Calibration accuracy compensation device and method for five-axis machine

Abstract

The present invention discloses a calibration accuracy compensation device and method for a five-axis machine. The calibration accuracy compensation device includes a calibration sphere, a height sensor, a camera, and a controller. The controller is configured to determine compensation information for the third linear motion component based on first rotation information of the first rotary motion component and height information of the calibration sphere sensed by the height sensor, while controlling the first rotary motion component to rotate the worktable and the three linear motion components to follow the first rotary motion component. The controller is also configured to determine compensation information for the first and second linear motion components based on second rotation information of the second rotary motion component, image information of feature points on the worktable captured by the camera, and compensation information of the third linear motion component, while controlling the second rotary motion component to rotate the worktable and the three linear motion components to follow the second rotary motion component. This device can compensate for the calibration accuracy of the five-axis machine.

Description

Technical Field

[0001] The present invention relates to the technical field of five-axis machines, and in particular to a calibration accuracy compensation device and method for a five-axis machine. Background Art

[0002] After the existing five-axis machine is calibrated, its calibration accuracy is basically fixed. If the calibration accuracy needs to be improved in actual use, the five-axis machine needs to be recalibrated, which is very costly.

[0003] Therefore, there is an urgent need for a calibration accuracy compensation device for a five-axis machine to compensate for the calibration accuracy of the five-axis machine, so as to improve the calibration accuracy of the five-axis machine without recalibrating the five-axis machine. Summary of the Invention

[0004] The present invention provides a calibration accuracy compensation device and method for a five-axis machine, so as to solve the problem that if the calibration accuracy of the existing five-axis machine needs to be improved, it needs to be recalibrated, which is costly.

[0005] In a first aspect, an embodiment of the present invention provides a calibration accuracy compensation device for a five-axis machine, wherein the five-axis machine includes a spindle head, a worktable, a first linear motion component, a second linear motion component, a third linear motion component, a first rotary motion component shaft, and a second rotary motion component; the first linear motion component is used to drive the spindle head to move in a first direction; the second linear motion component is used to drive the worktable to move in a second direction; the third linear motion component is used to drive the spindle head to move in a third direction; the first rotary motion component is used to drive the worktable to rotate around an axis extending along the first direction; the second rotary motion component is used to drive the worktable and the first rotary motion component to rotate around an axis extending along the third direction; the first direction, the second direction, and the third direction intersect with each other;

[0006] The calibration accuracy compensation device includes a calibration ball, a height measurement sensor, a camera and a controller;

[0007] The calibration ball is arranged on the workbench; the height measuring sensor and the camera are both arranged on the spindle head;

[0008] The controller is communicatively connected to the first linear motion component, the second linear motion component, the third linear motion component, the first rotary motion component and the height measuring sensor respectively, and is used to obtain first rotation information of the first rotary motion component and height information of the calibration sphere sensed by the height measuring sensor in the process of controlling the first rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to follow the movement of the first rotary motion component, and determine compensation information of the third linear motion component based on the first rotation information and the height information;

[0009] The controller is also communicated with the second rotational motion component and the camera respectively, and is used to obtain the second rotation information of the second rotational motion component and the image information of the feature points on the workbench captured by the camera while controlling the second rotational motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to follow the movement of the second rotational motion component, and determine the compensation information of the first linear motion component and the second linear motion component based on the second rotation information, the image information and the compensation information of the third linear motion component.

[0010] Optionally, before controlling the first rotary motion component to drive the workbench to rotate, the controller is further configured to control the first rotary motion component and the second rotary motion component to be located at an initial position, and control the first linear motion component and / or the second linear motion component and / or the third linear motion component to move so that the height sensor and the vertex of the calibration sphere are aligned along the third direction;

[0011] Before controlling the second rotary motion component to drive the workbench to rotate, the controller is also used to control the first rotary motion component and the second rotary motion component to be located in the initial position, and control the first linear motion component and / or the second linear motion component and / or the third linear motion component to move so that the feature point is located at the center of the camera's field of view.

[0012] Optionally, the controller is further configured to obtain first distance information between the altimeter sensor and the camera in the first direction and second distance information between the altimeter sensor and the camera in the second direction;

[0013] The controller is configured to determine first position information of the feature point in the first direction and second position information of the feature point in the second direction according to the image information;

[0014] The controller is configured to determine compensation information of the first linear motion component according to the second rotation information, the first position information, compensation information of the third linear motion component, and the first distance information;

[0015] The controller is configured to determine compensation information of the second linear motion component according to the second rotation information, the second position information, compensation information of the third linear motion component, and the second distance information.

[0016] Optionally, the controller is further configured to compensate the calibration parameters of the first linear motion component according to the compensation information of the first linear motion component;

[0017] The controller is further configured to compensate the calibration parameters of the second linear motion component according to the compensation information of the second linear motion component;

[0018] The controller is further configured to compensate the calibration parameters of the third linear motion component according to the compensation information of the third linear motion component.

[0019] In a second aspect, an embodiment of the present invention provides a calibration accuracy compensation method for a five-axis machine, which is applied to the calibration accuracy compensation device described in the first aspect. The calibration accuracy compensation method includes:

[0020] In the process of controlling the first rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component, and the third linear motion component to move following the first rotary motion component, obtaining first rotation information of the first rotary motion component and height information of the calibration sphere sensed by the height measurement sensor;

[0021] determining compensation information of the third linear motion component according to the first rotation information and the height information;

[0022] In the process of controlling the second rotary motion component to rotate the worktable and controlling the first linear motion component, the second linear motion component, and the third linear motion component to move following the second rotary motion component, obtaining second rotation information of the second rotary motion component and image information of feature points on the worktable captured by the camera;

[0023] Compensation information of the first linear motion assembly and the second linear motion assembly is determined according to the second rotation information, the image information, and compensation information of the third linear motion assembly.

[0024] Optionally, before controlling the first rotary motion component to drive the workbench to rotate, the calibration accuracy compensation method further includes:

[0025] controlling the first rotational motion component and the second rotational motion component to be located at an initial position;

[0026] controlling the first linear motion assembly and / or the second linear motion assembly and / or the third linear motion assembly to move so that the height sensor and the vertex of the calibration sphere are aligned along the third direction;

[0027] Before controlling the second rotary motion component to drive the workbench to rotate, the calibration accuracy compensation method further includes:

[0028] Controlling the first rotational motion component and the second rotational motion component to be located at an initial position;

[0029] The first linear motion component and / or the second linear motion component and / or the third linear motion component are controlled to move so that the feature point is located at the center of the field of view of the camera.

[0030] Optionally, determining compensation information of the third linear motion component according to the first rotation information and the height information includes:

[0031] The compensation information of the third linear motion component is determined according to the following corresponding relationship:

[0032] ;

[0033] Wherein, the first rotation information includes a plurality of first preset rotation angle ranges, represents compensation information of the third linear motion component when the first rotational motion component rotates within the first preset rotation angle range, represents the maximum height information of the calibration sphere sensed by the height measuring sensor when the first rotary motion component rotates within the first preset rotation angle range, It represents the minimum height information of the calibration sphere sensed by the height measuring sensor when the first rotational motion component rotates within the first preset rotation angle range.

[0034] Optionally, before determining the compensation information of the first linear motion assembly and the second linear motion assembly according to the second rotation information, the image information, and the compensation information of the third linear motion assembly, the calibration accuracy compensation method further includes:

[0035] Acquire first distance information between the altimeter sensor and the camera in the first direction and second distance information between the altimeter sensor and the camera in the second direction;

[0036] Determining compensation information of the first linear motion assembly and the second linear motion assembly according to the second rotation information, the image information, and the compensation information of the third linear motion assembly includes:

[0037] determining, based on the image information, first position information of the feature point in the first direction and second position information of the feature point in the second direction;

[0038] determining compensation information of the first linear motion component according to the second rotation information, the first position information, compensation information of the third linear motion component, and the first distance information;

[0039] The compensation information of the second linear motion component is determined according to the second rotation information, the second position information, the compensation information of the third linear motion component and the second distance information.

[0040] Optionally, determining the compensation information of the first linear motion component according to the second rotation information, the first position information, the compensation information of the third linear motion component, and the first distance information includes:

[0041] The compensation information of the first linear motion component is determined according to the following corresponding relationship:

[0042] ;

[0043] The first rotation information includes a plurality of first preset rotation angle ranges, and the second rotation information includes a plurality of second preset rotation angle ranges. represents the compensation information of the first linear motion component when the second rotational motion component rotates within the second preset rotation angle range, represents the maximum first position information of the feature point in the first direction when the second rotational motion component rotates within the second preset rotation angle range, represents the minimum first position information of the feature point in the first direction when the second rotational motion component rotates within the second preset rotation angle range, represents compensation information of the third linear motion component when the first rotational motion component rotates within the first preset rotation angle range, represents the first distance information;

[0044] Determining compensation information of the second linear motion component according to the second rotation information, the second position information, compensation information of the third linear motion component, and the second distance information includes:

[0045] The compensation information of the second linear motion component is determined according to the following corresponding relationship:

[0046] ;

[0047] in, represents the compensation information of the second linear motion component when the second rotational motion component rotates within the second preset rotation angle range, represents the maximum second position information of the feature point in the second direction when the second rotational motion component rotates within the second preset rotation angle range, represents the minimum second position information of the feature point in the second direction when the second rotational motion component rotates within the second preset rotation angle range, represents compensation information of the third linear motion component when the first rotational motion component rotates within the first preset rotation angle range, Indicates the second distance information.

[0048] Optionally, the calibration accuracy compensation method further includes:

[0049] Compensating calibration parameters of the first linear motion component according to the compensation information of the first linear motion component;

[0050] compensating the calibration parameters of the second linear motion component according to the compensation information of the second linear motion component;

[0051] The calibration parameters of the third linear motion component are compensated according to the compensation information of the third linear motion component.

[0052] The technical solution of an embodiment of the present invention provides a calibration accuracy compensation device, which includes a calibration ball, a height sensor, a camera and a controller. The calibration ball is arranged on the workbench of a five-axis machine. The height sensor and the camera are both arranged on a spindle head that can move under the drive of a first linear motion component and a third linear motion component. The controller can determine the compensation information of the third linear motion component according to the first rotation information of the first rotary motion component and the height information of the calibration ball sensed by the height sensor in the process of controlling the first rotary motion component to drive the workbench to rotate and controlling the three linear motion components to follow the first rotary motion component. The controller can also determine the compensation information of the first linear motion component and the second linear motion component according to the second rotation information of the second rotary motion component, the image information of the feature points on the workbench captured by the camera and the compensation information of the third linear motion component in the process of controlling the second rotary motion component to drive the workbench to rotate and controlling the three linear motion components to follow the second rotary motion component to move, so as to realize compensation of the calibration accuracy of the five-axis machine. In this way, the calibration accuracy of the five-axis machine can be improved without recalibrating the five-axis machine, and the cost is low.

[0053] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present invention, nor is it intended to limit the scope of the present invention. Other features of the present invention will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0055] Figure 1 A schematic structural diagram of a five-axis machine and a calibration accuracy compensation device for the five-axis machine provided in an embodiment of the present invention;

[0056] Figure 2 A flowchart of a calibration accuracy compensation method for a five-axis machine provided by an embodiment of the present invention;

[0057] Figure 3 A flowchart of another calibration accuracy compensation method for a five-axis machine provided by an embodiment of the present invention;

[0058] Figure 4 A flowchart of another calibration accuracy compensation method for a five-axis machine provided by an embodiment of the present invention;

[0059] Figure 5 A flowchart of another calibration accuracy compensation method for a five-axis machine provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0060] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0061] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way are interchangeable where appropriate so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or are inherent to these processes, methods, products or devices. The directions or positional relationships indicated by the terms "upper", "lower", "left", "right", etc. are based on the directions or positional relationships shown in the drawings and are only used to illustrate the relative positional relationships between the various components or components, and do not particularly limit the specific installation directions of the various components or components.

[0062] Figure 1 A schematic diagram of the structure of a five-axis machine and a calibration accuracy compensation device for a five-axis machine provided by an embodiment of the present invention, with reference to Figure 1 The five-axis machine 10 in the embodiment of the present invention includes a spindle head 11, a worktable 12, a first linear motion assembly 13, a second linear motion assembly 14, a third linear motion assembly 15, a first rotary motion assembly 16, and a second rotary motion assembly 17. The first linear motion assembly 13 is used to drive the spindle head 11 to move along a first direction X. The second linear motion assembly 14 is used to drive the worktable 12 to move along a second direction Y. The third linear motion assembly 15 is used to drive the spindle head 11 to move along a third direction Z. The first rotary motion assembly 16 is used to drive the worktable 12 to rotate about an axis extending along the first direction X. The second rotary motion assembly 17 is used to drive the worktable 12 and the first rotary motion assembly 16 to rotate about an axis extending along the third direction Z. The first direction X, the second direction Y, and the third direction Z intersect with each other. The worktable 12 is disposed on the second rotary motion assembly 17, and the first rotary motion assembly 16 is disposed on the second rotary motion assembly 17.

[0063] refer to Figure 1The calibration accuracy compensation device 20 in the embodiment of the present invention includes a calibration ball 21, a height sensor 22, a camera 23 and a controller (not shown in the figure). The calibration ball 21 is set on the workbench 12. The height sensor 22 and the camera 23 are both set on the spindle head 11. The controller is respectively communicated with the first linear motion component 13, the second linear motion component 14, the third linear motion component 15, the first rotary motion component 16 and the height sensor 22, and is used to obtain the first rotation information of the first rotary motion component 16 and the height information of the calibration ball 21 sensed by the height sensor 22 in the process of controlling the first rotary motion component 16 to drive the workbench 12 to rotate and controlling the first linear motion component 13, the second linear motion component 14 and the third linear motion component 15 to follow the first rotary motion component 16 to move, and determine the compensation information of the third linear motion component 15 according to the first rotation information and the height information.

[0064] The controller is also communicated with the second rotary motion component 17 and the camera 23 respectively, and is used to obtain the second rotation information of the second rotary motion component 17 and the image information of the feature points on the workbench 12 captured by the camera 23 while controlling the second rotary motion component 17 to drive the workbench 12 to rotate and controlling the first linear motion component 13, the second linear motion component 14 and the third linear motion component 15 to follow the movement of the second rotary motion component 17, and determine the compensation information of the first linear motion component 13 and the second linear motion component 14 based on the second rotation information, image information and compensation information of the third linear motion component 15.

[0065] For example, a five-axis machine is a high-precision, high-efficiency CNC machine tool. After calibration, the five-axis machine can achieve complex curved surface and multi-angle machining through the coordinated operation of the first linear motion assembly 13, the second linear motion assembly 14, the third linear motion assembly 15, the first rotary motion assembly 16, and the second rotary motion assembly 17. It should be noted that in the embodiments of the present invention, the first direction X, the second direction Y, and the third direction Z can be perpendicular to each other.

[0066] refer to Figure 1 In the embodiment of the present invention, the spindle head 11 is arranged on the third linear motion component 15, and the third linear motion component 15 is arranged on the first linear motion component 13. Therefore, the first linear motion component 13 can drive the third linear motion component 15 and the spindle head 11 arranged on the third linear motion component 15 to move along the first direction X, and the third linear motion component 15 can drive the spindle head 11 arranged on the third linear motion component 15 to move along the third direction Z.

[0067] refer to Figure 1In the embodiment of the present invention, the workbench 12 is arranged on the second rotational motion component 17, the second rotational motion component 17 is arranged on the first rotational motion component 16, and the first rotational motion component 16 is arranged on the second linear motion component 14. Therefore, the second linear motion component 14 can drive the first rotational motion component 16, the second rotational motion component 17 arranged on the first rotational motion component 16, and the workbench 12 arranged on the second rotational motion component 17 to move along the second direction Y, the first rotational motion component 16 can drive the second rotational motion component 17 arranged on the first rotational motion component 16 and the workbench 12 arranged on the second rotational motion component 17 to rotate around the axis extending along the first direction X, and the second rotational motion component 17 can drive the workbench 12 arranged on the second rotational motion component 17 to rotate around the axis extending along the third direction Z.

[0068] It is understood that the controller in the embodiment of the present invention can be connected to the first linear motion assembly 13, the second linear motion assembly 14, and the third linear motion assembly 15 via the industrial computer (not shown) of the five-axis machine 10, and can send a follow-up function activation command to the industrial computer, thereby controlling the activation of the follow-up function of the five-axis machine 10. When the follow-up function of the calibrated five-axis machine 10 is activated, that is, when the first linear motion assembly 13, the second linear motion assembly 14, and the third linear motion assembly 15 can follow the movement of the first rotary motion assembly 16, if the calibration accuracy of the five-axis machine 10 can reach a preset calibration accuracy, then theoretically, no matter how the calibration sphere 21 on the worktable 12 is rotated by the first rotary motion assembly 16, the height sensor 22 will always be at the apex of the calibration sphere 21. Moreover, when the rotation angle of the first rotary motion assembly 16 is within the preset rotation angle range, the height information of the calibration sphere 21 sensed by the altitude sensor 22 (i.e., the distance information between the apex of the calibration sphere and the altitude sensor 22) should be within the preset range. It can be seen that the height information of the calibration ball 21 sensed by the altimeter sensor 22 is related to the calibration accuracy of the five-axis machine 10, and the height information of the calibration ball 21 is mainly determined by the third linear motion component 15 that moves following the first rotary motion component 16. Therefore, in order to improve the calibration accuracy of the five-axis machine 10 and make it reach the preset calibration accuracy, when the rotation angle of the first rotary motion component 16 is within the preset rotation angle range, when the height information of the calibration ball 21 sensed by the altimeter sensor 22 (that is, the distance information between the vertex of the calibration ball and the altimeter sensor 22) is not within the preset range, the compensation information of the third linear motion component 15 when the first rotary motion component 16 rotates in different rotation angle ranges can be determined according to the first rotation information of the first rotary motion component 16 (that is, the rotation angle of the first rotary motion component 16) and the height information of the calibration ball 21 sensed by the altimeter sensor 22, so as to compensate for the calibration parameters of the third linear motion component 15.

[0069] As a feasible implementation manner, determining compensation information of the third linear motion component according to the first rotation information and the height information includes:

[0070] The compensation information of the third linear motion component is determined according to the following corresponding relationship:

[0071] .

[0072] The first rotation information includes a plurality of first preset rotation angle ranges. Indicates the compensation information of the third linear motion component when the first rotary motion component rotates within the first preset rotation angle range, Indicates the maximum height information of the calibration ball sensed by the height sensor when the first rotary motion component rotates within the first preset rotation angle range. It represents the minimum height information of the calibration sphere sensed by the height measuring sensor when the first rotary motion component rotates within the first preset rotation angle range.

[0073] It can be understood that when the following function of the calibrated five-axis machine 10 is turned on, that is, the first linear motion component 13, the second linear motion component 14 and the third linear motion component 15 can follow the movement of the second rotary motion component 17, if the calibration accuracy of the five-axis machine 10 can reach the preset calibration accuracy, then theoretically, when the rotation angle of the second rotary motion component 17 is within the preset rotation angle range, the position information of the feature points obtained based on the image information of the feature points on the workbench 12 captured by the camera 23 should be within the preset range. It can be seen that the image information of the feature points on the workbench 12 captured by the camera 23 (i.e., the position information of the feature points) is related to the calibration accuracy of the five-axis machine 10, and the position information of the feature points on the workbench 12 is mainly determined by the first linear motion component 13 and the second linear motion component 14 that move with the second rotary motion component 17, and the first rotary motion component 16 is located below the second rotary motion component 17. The first rotary motion component 16 will affect the second rotary motion component 17. Therefore, in order to improve the calibration accuracy of the five-axis machine 10 and make it reach the preset calibration accuracy, and reduce the influence of the first rotary motion component 16 on the second rotary motion component 17, it can be When the rotation angle of component 17 is within the preset rotation angle range, and the position information of the feature point obtained according to the image information of the feature point on the workbench 12 captured by the camera 23 is not within the preset range, the compensation information of the first linear motion component 13 and the second linear motion component 14 when the second rotary motion component 17 rotates in different rotation angle ranges can be determined according to the second rotation information of the second rotary motion component 17 (that is, the rotation angle of the first rotary motion component 16), the image information of the feature point on the workbench 12 captured by the camera 23, and the compensation information of the third linear motion component 15, so as to compensate the calibration parameters of the first linear motion component 13 and the second linear motion component 14.

[0074] An embodiment of the present invention provides a calibration accuracy compensation device 20, which includes a calibration ball 21, a height sensor 22, a camera 23 and a controller. The calibration ball 21 is set on the workbench 12 of the five-axis machine 10, and the height sensor 22 and the camera 23 are both set on the spindle head 11 that can move under the drive of the first linear motion component 13 and the third linear motion component 15. The controller can control the first rotary motion component 16 to drive the workbench 12 to rotate and control the three linear motion components to follow the movement of the first rotary motion component 16. According to the first rotation information of the first rotary motion component 16 and the calibration ball 21 sensed by the height sensor 22, the calibration ball 21 is set on the workbench 12 of the five-axis machine 10, and the height sensor 22 and the camera 23 are both set on the spindle head 11 that can move under the drive of the first linear motion component 13 and the third linear motion component 15. 1, the controller can also determine the compensation information of the first linear motion component 13 and the second linear motion component 14 according to the second rotation information of the second rotary motion component 17, the image information of the feature points on the workbench 12 captured by the camera 23, and the compensation information of the third linear motion component 15, when controlling the second rotary motion component 17 to drive the workbench 12 to rotate and controlling the three linear motion components to move following the second rotary motion component 17, so as to compensate for the calibration accuracy of the five-axis machine 10. In this way, the calibration accuracy of the five-axis machine 10 can be improved without recalibrating the five-axis machine 10, and the cost is low.

[0075] Based on the above embodiment, the controller in the embodiment of the present invention is further configured to control the first rotary motion component 16 and the second rotary motion component 17 to be located at an initial position before controlling the first rotary motion component 16 to drive the worktable 12 to rotate, and to control the first linear motion component 13 and / or the second linear motion component 14 and / or the third linear motion component 15 to move so that the vertices of the height sensor 22 and the calibration sphere 21 are aligned along the third direction Z. Before controlling the second rotary motion component 17 to drive the worktable 12 to rotate, the controller is further configured to control the first rotary motion component 16 and the second rotary motion component 17 to be located at an initial position, and to control the first linear motion component 13 and / or the second linear motion component 14 and / or the third linear motion component 15 to move so that the feature point is located at the center of the field of view of the camera 23.

[0076] It should be noted that the first rotational motion component 16 and the second rotational motion component 17 being in the initial position means that the rotation angle of the first rotational motion component 16 is 0°, and the rotation angle of the second rotational motion component 17 is also 0°. At this time, the workbench 12 is not tilted.

[0077] In the embodiment of the present invention, a controller is set to control the first rotary motion component 16 and the second rotary motion component 17 to be in the initial position before controlling the first rotary motion component 16 to drive the worktable 12 to rotate and before controlling the second rotary motion component 17 to drive the worktable 12 to rotate. This not only makes the rotation angle planning of controlling the first rotary motion component 16 to drive the worktable 12 to rotate and the rotation angle planning of controlling the first rotary motion component 16 to drive the worktable 12 to rotate simpler without considering the terminal rotation angle of the previous rotation, but also reduces the impact of the first rotary motion component 16 in a non-initial position (i.e., when the worktable is in a tilted state) on the accuracy of shooting by the camera 23 when the second rotary motion component 17 drives the worktable 12 to rotate.

[0078] In an embodiment of the present invention, a controller is set to control the movement of the three linear motion components before controlling the first rotary motion component 16 to drive the workbench 12 to rotate, so that the vertices of the height sensor 22 and the calibration ball 21 are aligned along the third direction Z. This can eliminate the deviation between the height sensor 22 or the calibration ball 21 in the third direction Z caused by the tilted installation of the height sensor 22 or the calibration ball 21, which is beneficial to improving the accuracy of the height information of the calibration ball 21 sensed by the height sensor 22, and further beneficial to improving the accuracy of the compensation information of the third linear motion component 15, thereby improving the calibration accuracy of the five-axis machine 10.

[0079] It is understood that distortion (e.g., radial distortion and tangential distortion) is typically minimized at the center of the camera 23 lens. When the feature point is located at the center, the measurement is minimally affected by distortion. In this embodiment of the present invention, by configuring the controller to control the movement of the three linear motion assemblies before controlling the second rotary motion assembly 17 to rotate the worktable 12, the feature point on the worktable 12 is positioned at the center of the camera 23's field of view. This improves the accuracy of the image information captured by the camera 23 regarding the feature point on the worktable 12. This, in turn, improves the accuracy of the compensation information provided by the first and second linear motion assemblies 13, 14, and ultimately enhances the calibration accuracy of the five-axis machine tool 10.

[0080] Based on the above embodiment, the controller is further configured to obtain first distance information between the height measuring sensor 22 and the camera 23 in the first direction X, and second distance information between the height measuring sensor 22 and the camera 23 in the second direction Y. The controller is configured to determine, based on the image information, first position information of the feature point in the first direction X, and second position information of the feature point in the second direction Y. The controller is configured to determine compensation information for the first linear motion assembly 13 based on the second rotation information, the first position information, the compensation information of the third linear motion assembly 15, and the first distance information. The controller is configured to determine compensation information for the second linear motion assembly 14 based on the second rotation information, the second position information, the compensation information of the third linear motion assembly 15, and the second distance information.

[0081] For example, the coordinate system corresponding to the plane of the first direction X and the second direction Y in the five-axis machine 10 in the embodiment of the present invention can be associated with the coordinate system of the image captured by the camera 23, and the position information of the feature point in the coordinate system of the five-axis machine 10 can be determined based on the position information of the feature point in the coordinate system of the image captured by the camera 23, that is, the first position information of the feature point in the first direction X and the second position information of the feature point in the second direction Y. In combination with the above, it can be understood that the compensation information of the third linear motion component 15 will affect the compensation information of the first linear motion component 13 and the second linear motion component 14, and the compensation information of the third linear motion component 15 is determined based on the height information of the calibration ball 21 sensed by the height sensor 22. There is a fixed deviation between the height sensor 22 and the camera 23 when they are installed. In order to eliminate the influence of the fixed deviation on the compensation information of the third linear motion component 15 and improve the accuracy of the compensation information of the first linear motion component 13 and the second linear motion component 14, the first distance information of the height sensor 22 and the camera 23 in the first direction X and the second distance information of the height sensor 22 and the camera 23 in the second direction Y are first obtained, and then the compensation information of the first linear motion component 13 is determined based on the second rotation information, the first position information, the compensation information of the third linear motion component 15 and the first distance information, and the compensation information of the second linear motion component 14 is determined based on the second rotation information, the second position information, the compensation information of the third linear motion component 15 and the second distance information.

[0082] As a feasible implementation manner, determining the compensation information of the first linear motion component according to the second rotation information, the first position information, the compensation information of the third linear motion component and the first distance information includes:

[0083] The compensation information of the first linear motion component is determined according to the following corresponding relationship:

[0084] .

[0085] The first rotation information includes a plurality of first preset rotation angle ranges, and the second rotation information includes a plurality of second preset rotation angle ranges. Indicates the compensation information of the first linear motion component when the second rotary motion component rotates within the second preset rotation angle range, Indicates the maximum first position information of the feature point in the first direction when the second rotational motion component rotates within the second preset rotation angle range, represents the minimum first position information of the feature point in the first direction when the second rotational motion component rotates within the second preset rotation angle range, Indicates the compensation information of the third linear motion component when the first rotary motion component rotates within the first preset rotation angle range, Indicates the first distance information.

[0086] Determining compensation information of the second linear motion component according to the second rotation information, the second position information, the compensation information of the third linear motion component, and the second distance information includes:

[0087] The compensation information of the second linear motion component is determined according to the following corresponding relationship:

[0088] .

[0089] in, Indicates the compensation information of the second linear motion component when the second rotary motion component rotates within the second preset rotation angle range, Indicates the maximum second position information of the feature point in the second direction when the second rotational motion component rotates within the second preset rotation angle range, Indicates the minimum second position information of the feature point in the second direction when the second rotational motion component rotates within the second preset rotation angle range, Indicates the compensation information of the third linear motion component when the first rotary motion component rotates within the first preset rotation angle range, Indicates the second distance information.

[0090] Based on the above embodiment, the controller is further configured to compensate the calibration parameters of the first linear motion assembly 13 based on the compensation information of the first linear motion assembly 13. The controller is further configured to compensate the calibration parameters of the second linear motion assembly 14 based on the compensation information of the second linear motion assembly 14. The controller is further configured to compensate the calibration parameters of the third linear motion assembly 15 based on the compensation information of the third linear motion assembly 15.

[0091] It is understandable that the industrial computer of each brand of five-axis machine 10 has compensation information interfaces for the three linear motion components. After determining the compensation information of the three direct motion components, the controller will transmit the corresponding compensation information to the industrial computer of the five-axis machine 10 through the compensation information interface. Taking Omron's five-axis machine 10 as an example, the original calibration parameters of its first linear motion component 13 are satisfy: , after compensation, its original calibration parameters satisfy: The original calibration parameters of the second linear motion component 14 satisfy: , after compensation, its original calibration parameters satisfy: ; The original calibration parameters of the third linear motion component 15 satisfy: , after compensation, its original calibration parameters satisfy: .

[0092] An embodiment of the present invention further provides a calibration accuracy compensation method for a five-axis machine, and the calibration accuracy compensation method is applied to the calibration accuracy compensation device provided in the above embodiment of the present invention. Figure 2 This is a flowchart of a calibration accuracy compensation method for a five-axis machine provided by an embodiment of the present invention, referring to Figure 2 The calibration accuracy compensation method of the five-axis machine in the embodiment of the present invention includes:

[0093] S110. In the process of controlling the first rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to move following the first rotary motion component, obtain the first rotation information of the first rotary motion component and the height information of the calibration ball sensed by the height measuring sensor.

[0094] Exemplary, reference Figure 1 The controller is respectively communicated with the first linear motion component 13, the second linear motion component 14, the third linear motion component 15, the first rotary motion component 16 and the height measuring sensor 22. In the process of controlling the first rotary motion component 16 to drive the workbench 12 to rotate and controlling the first linear motion component 13, the second linear motion component 14 and the third linear motion component 15 to follow the first rotary motion component 16 to move, the first rotation information of the first rotary motion component 16 and the height information of the calibration ball 21 sensed by the height measuring sensor 22 can be obtained.

[0095] S120 . Determine compensation information of the third linear motion component according to the first rotation information and the height information.

[0096] Exemplary, reference Figure 1 After obtaining the first rotation information of the first rotational motion component 16 and the height information of the calibration ball 21 sensed by the altimeter sensor 22, the controller can determine the compensation information of the third linear motion component 15 based on the first rotation information of the first rotational motion component 16 and the height information of the calibration ball 21 sensed by the altimeter sensor 22.

[0097] As a feasible implementation manner, determining compensation information of the third linear motion component according to the first rotation information and the height information includes:

[0098] The compensation information of the third linear motion component is determined according to the following corresponding relationship:

[0099] .

[0100] The first rotation information includes a plurality of first preset rotation angle ranges. Indicates the compensation information of the third linear motion component when the first rotary motion component rotates within the first preset rotation angle range, Indicates the maximum height information of the calibration ball sensed by the height sensor when the first rotary motion component rotates within the first preset rotation angle range. It represents the minimum height information of the calibration sphere sensed by the height measuring sensor when the first rotary motion component rotates within the first preset rotation angle range.

[0101] S130. In the process of controlling the second rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to move following the second rotary motion component, obtain the second rotation information of the second rotary motion component and the image information of the feature points on the workbench captured by the camera.

[0102] Exemplary, reference Figure 1 The controller is also communicated with the second rotary motion component 17 and the camera 23 respectively. In the process of controlling the second rotary motion component 17 to drive the workbench 12 to rotate and controlling the first linear motion component 13, the second linear motion component 14 and the third linear motion component 15 to follow the second rotary motion component 17 to move, the second rotation information of the second rotary motion component 17 and the image information of the feature points on the workbench 12 captured by the camera 23 can be obtained.

[0103] S140 , determining compensation information of the first linear motion assembly and the second linear motion assembly according to the second rotation information, the image information, and the compensation information of the third linear motion assembly.

[0104] Exemplary, reference Figure 1 After obtaining the second rotation information of the second rotational motion component 17 and the image information of the feature points on the workbench 12 captured by the camera 23, the controller can determine the compensation information of the first linear motion component 13 and the second linear motion component 14 based on the second rotation information, image information and compensation information of the third linear motion component 15.

[0105] refer to Figure 1 and Figure 2An embodiment of the present invention provides a calibration accuracy compensation method. The method includes determining compensation information for the third linear motion assembly 15 based on first rotation information obtained from the first rotary motion assembly 16 and height information of the calibration sphere 21 sensed by the height sensor 22 while controlling the first rotary motion assembly 16 to rotate the worktable 12 and controlling the three linear motion assemblies to follow the first rotary motion assembly 16. Furthermore, determining compensation information for the first linear motion assembly 13 and the second linear motion assembly 14 based on second rotation information obtained from the second rotary motion assembly 17, image information of feature points on the worktable 12 captured by the camera 23, and compensation information for the third linear motion assembly 15 while controlling the second rotary motion assembly 17 to rotate the worktable 12 and controlling the three linear motion assemblies to follow the second rotary motion assembly 17. By employing the above calibration accuracy compensation method, the calibration accuracy of the five-axis machine tool 10 can be compensated. This improves the calibration accuracy of the five-axis machine tool 10 without requiring recalibration, resulting in low cost.

[0106] Figure 3 This is a flow chart of another calibration accuracy compensation method for a five-axis machine provided by an embodiment of the present invention. Figure 3 The embodiment shown enriches the process of the calibration accuracy compensation method of the five-axis machine. Figure 3 The calibration accuracy compensation method of the five-axis machine in the embodiment of the present invention includes:

[0107] S210 , controlling the first rotational motion component and the second rotational motion component to be located at an initial position.

[0108] Exemplary, reference Figure 1 The controller can place the first rotational motion component 16 and the second rotational motion component 17 in the initial position by controlling the rotation angle of the first rotational motion component 16 to 0°, and place the second rotational motion component 17 in the initial position by controlling the rotation angle of the second rotational motion component 17 to 0°.

[0109] In an embodiment of the present invention, a controller is set to control the first rotary motion component 16 and be located in an initial position before controlling the first rotary motion component 16 to drive the workbench 12 to rotate, so that the rotation angle planning of controlling the first rotary motion component 16 to drive the workbench 12 to rotate is simpler without considering the terminal rotation angle of the previous rotation.

[0110] S220 , controlling the first linear motion assembly and / or the second linear motion assembly and / or the third linear motion assembly to move so that the vertex of the height measuring sensor and the calibration sphere are aligned along the third direction.

[0111] Exemplary, reference Figure 1The controller can align the vertices of the height measuring sensor 22 and the calibration sphere 21 along the third direction by controlling the movement of the first linear motion component 13 and / or the second linear motion component 14 and / or the third linear motion component 15.

[0112] In an embodiment of the present invention, a controller is set to control the movement of the three linear motion components before controlling the first rotary motion component 16 to drive the workbench 12 to rotate, so that the vertices of the height sensor 22 and the calibration ball 21 are aligned along the third direction Z. This can eliminate the deviation between the height sensor 22 or the calibration ball 21 in the third direction Z caused by the tilted installation of the height sensor 22 or the calibration ball 21, which is beneficial to improving the accuracy of the height information of the calibration ball 21 sensed by the height sensor 22, and further beneficial to improving the accuracy of the compensation information of the third linear motion component 15, thereby improving the calibration accuracy of the five-axis machine 10.

[0113] S230. In the process of controlling the first rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to move following the first rotary motion component, obtain the first rotation information of the first rotary motion component and the height information of the calibration ball sensed by the height measuring sensor.

[0114] S240: Determine compensation information of the third linear motion component according to the first rotation information and the height information.

[0115] S250 , controlling the first rotational motion component and the second rotational motion component to be located at an initial position.

[0116] Exemplary, reference Figure 1 The controller can place the first rotary motion component 16 in the initial position by controlling the rotation angle of the first rotary motion component 16 to 0°, and place the second rotary motion component 17 in the initial position by controlling the rotation angle of the second rotary motion component 17 to 0°.

[0117] In the embodiment of the present invention, a controller is set to control the first rotary motion component 16 and the second rotary motion component 17 to be in the initial position before controlling the second rotary motion component 17 to drive the workbench 12 to rotate. This not only makes the rotation angle planning of controlling the first rotary motion component 16 to drive the workbench 12 to rotate simpler without considering the terminal rotation angle of the previous rotation, but also reduces the impact of the first rotary motion component 16 in a non-initial position (i.e., when the workbench is in a tilted state) on the accuracy of shooting by the camera 23 when the second rotary motion component 17 drives the workbench 12 to rotate.

[0118] S260: Control the first linear motion component and / or the second linear motion component and / or the third linear motion component to move so that the feature point is located at the center of the camera's field of view.

[0119] In an embodiment of the present invention, a controller is set to control the movement of the three linear motion components before controlling the second rotary motion component 17 to drive the workbench 12 to rotate, so that the feature point on the workbench 12 is located at the center of the field of view of the camera 23, which is beneficial to improving the accuracy of the image information of the feature point on the workbench 12 captured by the camera 23, and further beneficial to improving the accuracy of the compensation information of the first linear motion component 13 and the second linear motion component 14, thereby improving the calibration accuracy of the five-axis machine 10.

[0120] S270. In the process of controlling the second rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to move following the second rotary motion component, obtain the second rotation information of the second rotary motion component and the image information of the feature points on the workbench captured by the camera.

[0121] S280 , determining compensation information of the first linear motion assembly and the second linear motion assembly according to the second rotation information, the image information, and the compensation information of the third linear motion assembly.

[0122] Figure 4 A flowchart of another calibration accuracy compensation method for a five-axis machine provided by an embodiment of the present invention is provided. Figure 4 The embodiment shown not only enriches the process of the calibration accuracy compensation method of the five-axis machine, but also explains in detail how to determine the compensation information of the first linear motion component and the second linear motion component based on the second rotation information, image information and compensation information of the third linear motion component. Figure 4 The calibration accuracy compensation method of the five-axis machine in the embodiment of the present invention includes:

[0123] S310. In the process of controlling the first rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to move following the first rotary motion component, obtain the first rotation information of the first rotary motion component and the height information of the calibration ball sensed by the height measuring sensor.

[0124] S320: Determine compensation information of the third linear motion component according to the first rotation information and the height information.

[0125] S330. In the process of controlling the second rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to move following the second rotary motion component, obtain the second rotation information of the second rotary motion component and the image information of the feature points on the workbench captured by the camera.

[0126] S340: Acquire first distance information between the altimeter sensor and the camera in a first direction and second distance information between the altimeter sensor and the camera in a second direction.

[0127] For example, a fixed offset exists between the altimeter sensor 22 and the camera 23 during installation. The fixed offset includes first distance information between the altimeter sensor and the camera in a first direction X and second distance information between the altimeter sensor and the camera in a second direction Y. The fixed offset can be pre-stored in a memory, and the controller can be in communication with the memory to directly retrieve the information.

[0128] S350 , determining first position information of the feature point in the first direction and second position information of the feature point in the second direction according to the image information.

[0129] Exemplary, reference Figure 1 The coordinate system corresponding to the plane of the first direction X and the second direction Y in the five-axis machine 10 in the embodiment of the present invention can be associated with the coordinate system of the image captured by the camera 23. The position information of the feature point in the coordinate system of the image captured by the camera 23 can be determined, that is, the first position information of the feature point in the first direction X and the second position information of the feature point in the second direction Y.

[0130] S360 , determining compensation information of the first linear motion component according to the second rotation information, the first position information, compensation information of the third linear motion component, and the first distance information.

[0131] For example, in order to eliminate the influence of fixed deviation on the compensation information of the third linear motion component 15 and improve the accuracy of the compensation information of the first linear motion component 13, the controller will determine the compensation information of the first linear motion component 13 based on the first distance information of the height measuring sensor 22 and the camera 23 in the first direction X, the second rotation information of the second rotation motion component 17, the first position information of the feature point in the first direction X, and the compensation information of the third linear motion component 15.

[0132] As a feasible implementation manner, determining the compensation information of the first linear motion component according to the second rotation information, the first position information, the compensation information of the third linear motion component and the first distance information includes:

[0133] The compensation information of the first linear motion component is determined according to the following corresponding relationship:

[0134] .

[0135] The first rotation information includes a plurality of first preset rotation angle ranges, and the second rotation information includes a plurality of second preset rotation angle ranges. Indicates the compensation information of the first linear motion component when the second rotary motion component rotates within the second preset rotation angle range, Indicates the maximum first position information of the feature point in the first direction when the second rotational motion component rotates within the second preset rotation angle range, represents the minimum first position information of the feature point in the first direction when the second rotational motion component rotates within the second preset rotation angle range, Indicates the compensation information of the third linear motion component when the first rotary motion component rotates within the first preset rotation angle range, Indicates the first distance information.

[0136] S370 , determining compensation information of the second linear motion component according to the second rotation information, the second position information, the compensation information of the third linear motion component, and the second distance information.

[0137] For example, in order to eliminate the influence of fixed deviation on the compensation information of the third linear motion component 15 and improve the accuracy of the compensation information of the second linear motion component 14, the controller will determine the compensation information of the second linear motion component 14 based on the first distance information of the height measuring sensor 22 and the camera 23 in the second direction Y, the second rotation information of the second rotation motion component 17, the second position information of the feature point in the second direction Y and the compensation information of the third linear motion component 15.

[0138] As a feasible implementation manner, determining the compensation information of the second linear motion component according to the second rotation information, the second position information, the compensation information of the third linear motion component and the second distance information includes:

[0139] The compensation information of the second linear motion component is determined according to the following corresponding relationship:

[0140] .

[0141] in, Indicates the compensation information of the second linear motion component when the second rotary motion component rotates within the second preset rotation angle range, Indicates the maximum second position information of the feature point in the second direction when the second rotational motion component rotates within the second preset rotation angle range, Indicates the minimum second position information of the feature point in the second direction when the second rotational motion component rotates within the second preset rotation angle range, Indicates the compensation information of the third linear motion component when the first rotary motion component rotates within the first preset rotation angle range, Indicates the second distance information.

[0142] Figure 5 A flowchart of another calibration accuracy compensation method for a five-axis machine provided by an embodiment of the present invention is provided. Figure 5The embodiment shown enriches the process of the calibration accuracy compensation method of the five-axis machine. Figure 5 The calibration accuracy compensation method of the five-axis machine in the embodiment of the present invention includes:

[0143] S410. In the process of controlling the first rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to move following the first rotary motion component, obtain the first rotation information of the first rotary motion component and the height information of the calibration ball sensed by the height measuring sensor.

[0144] S420: Determine compensation information of the third linear motion component according to the first rotation information and the height information.

[0145] S430. In the process of controlling the second rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to move following the second rotary motion component, obtain the second rotation information of the second rotary motion component and the image information of the feature points on the workbench captured by the camera.

[0146] S440 , determining compensation information of the first linear motion assembly and the second linear motion assembly according to the second rotation information, the image information, and the compensation information of the third linear motion assembly.

[0147] S450: Compensate the calibration parameters of the first linear motion component according to the compensation information of the first linear motion component.

[0148] refer to Figure 1 It is understandable that the industrial computer of each brand of the five-axis machine 10 has a compensation information interface for the first linear motion component 13. After determining the compensation information of the first linear motion component 13, the controller will transmit the compensation information of the first linear motion component 13 to the industrial computer of the five-axis machine 10 through the compensation information interface. Taking the Omron five-axis machine 10 as an example, the original calibration parameters of its first linear motion component 13 are satisfy: , after compensation, its original calibration parameters satisfy: .

[0149] S460: Compensate the calibration parameters of the second linear motion assembly according to the compensation information of the second linear motion assembly.

[0150] refer to Figure 1It is understandable that the industrial computer of each brand of the five-axis machine 10 has a compensation information interface for the second linear motion component 14. After determining the compensation information of the second linear motion component 14, the controller will transmit the compensation information of the second linear motion component 14 to the industrial computer of the five-axis machine 10 through the compensation information interface. Taking Omron's five-axis machine 10 as an example, the original calibration parameters of its second linear motion component 14 are satisfy: , after compensation, its original calibration parameters satisfy: .

[0151] S470: Compensate the calibration parameters of the third linear motion component according to the compensation information of the third linear motion component.

[0152] refer to Figure 1 It is understandable that the industrial computer of each brand of the five-axis machine 10 has a compensation information interface for the third linear motion component 15. After determining the compensation information of the third linear motion component 15, the controller will transmit the compensation information of the third linear motion component 15 to the industrial computer of the five-axis machine 10 through the compensation information interface. Taking Omron's five-axis machine 10 as an example, the original calibration parameters of its third linear motion component 15 are satisfy: , after compensation, its original calibration parameters satisfy: .

[0153] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A calibration accuracy compensation device for a five-axis machine, characterized in that: The five-axis machine includes a spindle head, a worktable, a first linear motion component, a second linear motion component, a third linear motion component, a first rotary motion component, and a second rotary motion component; the first linear motion component is used to drive the spindle head to move along a first direction; the second linear motion component is used to drive the worktable to move along a second direction; the third linear motion component is used to drive the spindle head to move along a third direction; the first rotary motion component is used to drive the worktable to rotate around an axis extending along the first direction; the second rotary motion component is used to drive the worktable and the first rotary motion component to rotate around an axis extending along the third direction; the first direction, the second direction, and the third direction intersect with each other; The calibration accuracy compensation device includes a calibration ball, a height measurement sensor, a camera and a controller; The calibration ball is arranged on the workbench; the height measuring sensor and the camera are both arranged on the spindle head; The controller is communicatively connected to the first linear motion component, the second linear motion component, the third linear motion component, the first rotary motion component and the height measuring sensor respectively, and is used to obtain first rotation information of the first rotary motion component and height information of the calibration sphere sensed by the height measuring sensor in the process of controlling the first rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to follow the movement of the first rotary motion component, and determine compensation information of the third linear motion component based on the first rotation information and the height information; The controller is also communicated with the second rotational motion component and the camera respectively, and is used to obtain the second rotation information of the second rotational motion component and the image information of the feature points on the workbench captured by the camera while controlling the second rotational motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component and the third linear motion component to follow the movement of the second rotational motion component, and determine the compensation information of the first linear motion component and the second linear motion component based on the second rotation information, the image information and the compensation information of the third linear motion component.

2. The calibration accuracy compensation device according to claim 1, characterized in that: Before controlling the first rotary motion component to drive the workbench to rotate, the controller is further configured to control the first rotary motion component and the second rotary motion component to be located at an initial position, and control the first linear motion component and / or the second linear motion component and / or the third linear motion component to move so that the height sensor and the vertex of the calibration sphere are aligned along the third direction; Before controlling the second rotary motion component to drive the workbench to rotate, the controller is also used to control the first rotary motion component and the second rotary motion component to be located in the initial position, and control the first linear motion component and / or the second linear motion component and / or the third linear motion component to move so that the feature point is located at the center of the camera's field of view.

3. The calibration accuracy compensation device according to claim 1, characterized in that: The controller is further configured to obtain first distance information between the altimeter sensor and the camera in the first direction and second distance information between the altimeter sensor and the camera in the second direction; The controller is configured to determine first position information of the feature point in the first direction and second position information of the feature point in the second direction according to the image information; The controller is configured to determine compensation information of the first linear motion component according to the second rotation information, the first position information, compensation information of the third linear motion component, and the first distance information; The controller is configured to determine compensation information of the second linear motion component according to the second rotation information, the second position information, compensation information of the third linear motion component, and the second distance information.

4. The calibration accuracy compensation device according to claim 1, characterized in that: The controller is further configured to compensate the calibration parameters of the first linear motion component according to the compensation information of the first linear motion component; The controller is further configured to compensate the calibration parameters of the second linear motion component according to the compensation information of the second linear motion component; The controller is further configured to compensate the calibration parameters of the third linear motion component according to the compensation information of the third linear motion component.

5. A calibration accuracy compensation method for a five-axis machine, applied to the calibration accuracy compensation device according to any one of claims 1 to 4, characterized in that: The calibration accuracy compensation method includes: In the process of controlling the first rotary motion component to drive the workbench to rotate and controlling the first linear motion component, the second linear motion component, and the third linear motion component to move following the first rotary motion component, obtaining first rotation information of the first rotary motion component and height information of the calibration sphere sensed by the height measurement sensor; determining compensation information of the third linear motion component according to the first rotation information and the height information; In the process of controlling the second rotary motion component to rotate the worktable and controlling the first linear motion component, the second linear motion component, and the third linear motion component to move following the second rotary motion component, obtaining second rotation information of the second rotary motion component and image information of feature points on the worktable captured by the camera; Compensation information of the first linear motion assembly and the second linear motion assembly is determined according to the second rotation information, the image information, and compensation information of the third linear motion assembly.

6. The calibration accuracy compensation method according to claim 5, characterized in that: Before controlling the first rotary motion component to drive the workbench to rotate, the calibration accuracy compensation method further includes: controlling the first rotational motion component and the second rotational motion component to be located at an initial position; controlling the first linear motion assembly and / or the second linear motion assembly and / or the third linear motion assembly to move so that the height sensor and the vertex of the calibration sphere are aligned along the third direction; Before controlling the second rotary motion component to drive the workbench to rotate, the calibration accuracy compensation method further includes: Controlling the first rotational motion component and the second rotational motion component to be located at an initial position; The first linear motion component and / or the second linear motion component and / or the third linear motion component are controlled to move so that the feature point is located at the center of the field of view of the camera.

7. The calibration accuracy compensation method according to claim 5, characterized in that: Determining compensation information of the third linear motion component according to the first rotation information and the height information includes: The compensation information of the third linear motion component is determined according to the following corresponding relationship: ； Wherein, the first rotation information includes a plurality of first preset rotation angle ranges, represents compensation information of the third linear motion component when the first rotational motion component rotates within the first preset rotation angle range, represents the maximum height information of the calibration sphere sensed by the height measuring sensor when the first rotary motion component rotates within the first preset rotation angle range, It represents the minimum height information of the calibration sphere sensed by the height measuring sensor when the first rotational motion component rotates within the first preset rotation angle range.

8. The calibration accuracy compensation method according to claim 5, characterized in that: Before determining the compensation information of the first linear motion assembly and the second linear motion assembly according to the second rotation information, the image information, and the compensation information of the third linear motion assembly, the calibration accuracy compensation method further includes: Acquire first distance information between the altimeter sensor and the camera in the first direction and second distance information between the altimeter sensor and the camera in the second direction; Determining compensation information of the first linear motion assembly and the second linear motion assembly according to the second rotation information, the image information, and the compensation information of the third linear motion assembly includes: determining, based on the image information, first position information of the feature point in the first direction and second position information of the feature point in the second direction; determining compensation information of the first linear motion component according to the second rotation information, the first position information, compensation information of the third linear motion component, and the first distance information; The compensation information of the second linear motion component is determined according to the second rotation information, the second position information, the compensation information of the third linear motion component and the second distance information.

9. The calibration accuracy compensation method according to claim 8, characterized in that: Determining compensation information of the first linear motion component according to the second rotation information, the first position information, compensation information of the third linear motion component, and the first distance information includes: The compensation information of the first linear motion component is determined according to the following corresponding relationship: ； The first rotation information includes a plurality of first preset rotation angle ranges, and the second rotation information includes a plurality of second preset rotation angle ranges. represents the compensation information of the first linear motion component when the second rotational motion component rotates within the second preset rotation angle range, represents the maximum first position information of the feature point in the first direction when the second rotational motion component rotates within the second preset rotation angle range, represents the minimum first position information of the feature point in the first direction when the second rotational motion component rotates within the second preset rotation angle range, represents compensation information of the third linear motion component when the first rotational motion component rotates within the first preset rotation angle range, represents the first distance information; Determining compensation information of the second linear motion component according to the second rotation information, the second position information, compensation information of the third linear motion component, and the second distance information includes: The compensation information of the second linear motion component is determined according to the following corresponding relationship: ； in, represents the compensation information of the second linear motion component when the second rotational motion component rotates within the second preset rotation angle range, represents the maximum second position information of the feature point in the second direction when the second rotational motion component rotates within the second preset rotation angle range, represents the minimum second position information of the feature point in the second direction when the second rotational motion component rotates within the second preset rotation angle range, represents compensation information of the third linear motion component when the first rotational motion component rotates within the first preset rotation angle range, Indicates the second distance information.

10. The calibration accuracy compensation method according to claim 5, characterized in that: The calibration accuracy compensation method further includes: Compensating calibration parameters of the first linear motion component according to the compensation information of the first linear motion component; compensating the calibration parameters of the second linear motion component according to the compensation information of the second linear motion component; The calibration parameters of the third linear motion component are compensated according to the compensation information of the third linear motion component.

Images