Process measurement and control instrument

Abstract

The invention relates to the technical field of process measurement and control, in particular to a process measurement and control instrument. The process measurement and control instrument comprises a measuring tube, a micro electro mechanical system chip and a rectification assembly, a fluid connection interface of the process measurement and control instrument is compatible with a fluid connection interface of the variable-area flowmeter and is connected to two ends of the measuring tube; the rectification assembly and the micro-electro-mechanical system chip are both installed in the measuring tube, and the rectification assembly and the micro-electro-mechanical system chip are sequentially arranged in the flow direction of fluid. The rectifying assembly is used for rectifying fluid, and the micro electro mechanical system chip is provided with a thermal mass flow sensor. The process measurement and control instrument provided by the invention can replace a variable-area flowmeter to be applied to an industrial field, measurement is not influenced by temperature and pressure changes, and the resolution ratio and the precision are high; various media can be measured and controlled, the control range is wide, and the cost is equivalent to that of a traditional variable-area flowmeter; in addition, digitization and remote data transmission / measurement and control are realized.

Description

Technical Field

[0001] The present invention relates to the technical field of process measurement and control, and in particular to a process measurement and control instrument. Background Art

[0002] In industrial production, various fluids are often used as raw materials. Currently, mechanical variable area flowmeters (commonly known as rotameters) are widely used to measure and control fluids. However, with the increasing demand for precise measurement and control, these devices are unable to measure the effects of temperature and pressure changes on the fluid. Furthermore, their measurement range is limited to a narrow range due to mechanical principles. Furthermore, variable area flowmeters typically use photoelectric technology for digital conversion, which is costly and requires an external power supply. Consequently, variable area flowmeters are no longer able to meet the current practical needs of industrial field measurement and control.

[0003] Microelectromechanical systems (MEMS) chips, manufactured using methods similar to large-scale integrated circuits, offer the potential for reducing manufacturing costs and enabling low-power measurement and transmission of multiple process control parameters. However, current flow process measurement and control products often have stringent installation requirements, making it difficult for existing MEMS flow products to replace variable area flowmeters in industrial applications (especially those without straight pipe sections). Consequently, in current Industrial Internet of Things (IIoT) process measurement and control applications, flow measurement process control data is difficult to obtain on a large scale. Summary of the Invention

[0004] The object of the present invention is to provide a process measurement and control instrument to solve the technical problem that the rotor flowmeter widely used in the prior art is difficult to directly provide digitalization and mass flow measurement and control, and is costly.

[0005] The process measurement and control instrument provided by the present invention comprises a measuring tube, a micro-electromechanical system chip and a rectifier component.

[0006] The fluid connection interface of the process measurement and control instrument is compatible with the fluid connection interface of the variable area flowmeter and is connected to the measuring tube.

[0007] The rectifier assembly and the micro-electromechanical system chip are both installed in the measuring tube, and the rectifier assembly is arranged on the fluid inflow side of the micro-electromechanical system chip; the rectifier assembly is used to rectify the fluid, and the micro-electromechanical system chip is provided with a plurality of sensors, which include one or more of a thermal mass flow sensor, a temperature sensor and a pressure sensor.

[0008] Preferably, as an implementable embodiment, the rectification assembly includes a flow-breaking disk and a rectification chamber, the flow-breaking disk is arranged at the inlet end of the rectification chamber, the central axis of the flow-breaking disk and the central axis of the rectification chamber both coincide with the central axis of the measuring tube, and there is an annular gap between the flow-breaking disk and the measuring tube.

[0009] Preferably, as an implementable embodiment, the rectifying cavity includes a straight pipe section, a standard DC converter and a standard rectifier, the standard DC converter is provided at the inlet end of the straight pipe section, and the standard rectifier is provided at the outlet end of the straight pipe section;

[0010] And / or, the flow breaking disk includes a flat plate, and the flat plate is perpendicular to the central axis of the rectification cavity.

[0011] Preferably, as an implementable embodiment, the ratio of the diameter of the flow breaking disk to the inner diameter of the measuring tube is greater than or equal to 5 / 8;

[0012] And / or, the ratio of the length of the straight pipe section to the inner diameter of the measuring tube is greater than or equal to 3.

[0013] Preferably, as an implementable embodiment, the rectifier assembly further includes a flow regulator, which is provided at the outlet end of the rectifier cavity and is used to adjust the full scale of the measured flow;

[0014] And / or, the full scale of the process measurement and control instrument is any value between 10 sccm and 200 slpm.

[0015] Preferably, as an implementable embodiment, the process measurement and control instrument further includes a data transmission component, the micro-electromechanical system chip is communicatively connected to the Internet of Things via the data transmission component, and the data transmission component is used to transmit the measurement signal of the micro-electromechanical system chip to the Internet of Things.

[0016] Preferably, as an implementable embodiment, the data transmission component includes a wired data transmission interface;

[0017] And / or, the data transmission component includes one or more of a Bluetooth module, a narrowband Internet of Things module, a mobile communication module, a WIFI module and a long-range radio module.

[0018] Preferably, as an implementable embodiment, the process measurement and control instrument further includes a processor, which is electrically connected to the micro-electromechanical system chip and is used to convert the measurement signal of the micro-electromechanical system chip into a digital signal.

[0019] The process measurement and control instrument also includes a display, which is electrically connected to the processor and is used to display the values of various parameters measured by the micro-electromechanical system chip; and / or the processor is used to alarm when the parameter value measured by the micro-electromechanical system chip exceeds the limit.

[0020] Preferably, as an implementable embodiment, the micro-electromechanical system chip is further provided with a temperature sensor and / or a pressure sensor.

[0021] Preferably, as an implementable embodiment, the process measurement and control instrument is provided with a manual flow regulating valve, and the manual flow regulating valve is used to regulate the flow of the fluid;

[0022] And / or, the process measurement and control instrument is provided with a battery assembly;

[0023] and / or, the thermal mass flow sensor is aligned with the center of the measuring tube;

[0024] and / or, the surface of the thermal mass flow sensor is parallel to the fluid flow direction;

[0025] And / or, the process measurement and control instrument is provided with a menu key, which is used to: view or reset the accumulated flow, select the medium for measuring the fluid, set the limit value of the flow alarm, set the limit value of the leak detection, view the alarm data and / or set a password.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] The process measurement and control instrument provided by the present invention has its fluid connection interface set to be compatible with the fluid connection interface of the traditional variable area flowmeter, which does not change the installation structure of the traditional process measurement and control products and meets the current design scheme and usage habits of on-site process measurement and control. Therefore, the process measurement and control instrument provided by the present invention can directly replace the traditional variable area flowmeter and be installed in the corresponding position. The thermal mass flow sensor in the micro-electromechanical system chip arranged in the measuring tube can sense the flow rate of the fluid flowing through the measuring tube.

[0028] It should be noted that the measurement method of the thermal mass flow sensor is thermal mass flow sensing technology, which is not affected by ambient temperature and pressure, ensuring the requirements of high precision, repeatability and high resolution, and can be implemented in a specific manner; the thermal mass flow sensor can also realize digital measurement of fluid flow. Compared with the variable area flow meter that needs to obtain the fluid flow through manual visual inspection, the data reading accuracy is higher, which has obvious advantages for more accurate industrial process measurement and control, and the cost is comparable to that of the variable area flow meter; it can also measure and control a variety of media with a wide control range; in addition, the adjustment resolution is better than the mechanical type, and the accuracy of the measured quantity can be improved by more than 3 orders of magnitude.

[0029] The present invention arranges a rectifier assembly at a position to the side of the fluid in the micro-electromechanical system chip in the measuring tube, utilizes the rectifier assembly to process the fluid, and guides the fluid with a repeatable flow distribution to the measuring point of the micro-electromechanical system chip, thereby ensuring the stability and repeatability of the measurement and metering. In this way, the accuracy of the numerical values of various parameters measured by the micro-electromechanical system chip can be guaranteed. At the same time, the arrangement of the rectifier assembly can also reduce flow resistance and pressure loss, and can significantly reduce the probability of flow blockage, thereby reducing the requirements for the pipeline system to be measured.

[0030] Therefore, the process measurement and control instrument provided by the present invention can replace the application of variable area flowmeters in industrial sites. The measurement is not affected by temperature and pressure changes, and has high resolution and accuracy. It can measure and control a variety of media, has a wide control range, and the cost is comparable to that of traditional variable area flowmeters. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0032] Figure 1 A schematic diagram of the structure of a process measurement and control instrument provided by an embodiment of the present invention without a battery assembly installed;

[0033] Figure 2 A schematic diagram of the structure of a process measurement and control instrument provided by an embodiment of the present invention with a battery assembly installed;

[0034] Figure 3 A schematic structural diagram of a process measurement and control instrument provided by an embodiment of the present invention from another perspective when no battery assembly is installed;

[0035] Figure 4 A schematic structural diagram of a process measurement and control instrument provided by an embodiment of the present invention from another perspective with a battery assembly installed;

[0036] Figure 5 A schematic diagram of the exploded structure of a process measurement and control instrument provided by an embodiment of the present invention.

[0037] Description of reference numerals:

[0038] 100-measuring tube; 110-upper cover; 120-lower cover;

[0039] 200-MEMS chip; 210-processor;

[0040] 300-rectifier assembly; 310-flow breaking disc; 320-rectifier cavity; 330-flow regulator;

[0041] 400 - Fluid connection interface; 410 - Fluid inlet interface; 420 - Fluid outlet interface; 430 - Flow channel module; 440 - Threaded connector; 450 - Fixing screw; 460 - First rubber washer; 470 - Third rubber washer; 480 - Screw assembly; 490 - Nut assembly;

[0042] 510-wired data transmission interface; 520-communication circuit;

[0043] 600-display;

[0044] 700 - manual flow control valve; 710 - valve core; 720 - second rubber gasket; 730 - nut; 740 - screw; 750 - direction indicator; 760 - adjustment handle;

[0045] 800 - battery assembly; 810 - battery holder; 820 - power interface circuit board; 830 - battery cover; 840 - battery;

[0046] 900-Menu key. DETAILED DESCRIPTION

[0047] Traditional variable area flowmeters are widely used in industrial field control because they do not require an external power source / power supply, are easy to install, and can be manually controlled. However, the measurement value of the variable area flowmeter requires manual visual inspection, which often varies from person to person and cannot achieve accurate measurement. In addition, the measurement value of the variable area flowmeter is affected by temperature and pressure changes, and its measurement range is limited to a narrow range by mechanical principles. It can only provide a single instantaneous flow parameter for measurement, and cannot obtain real-time cumulative volume, detect on-site leaks, or warn of safety issues of measured over-limit. It cannot provide remote data transmission or requires the addition of expensive electromechanical / photoelectric conversion equipment. Therefore, the variable area flowmeter can no longer meet current actual needs, and for the industrial Internet of Things, it is even more impossible to directly obtain effective data from it to realize the Internet of Things function. The present application aims to solve the difficulty of obtaining digital measurement quantities of flow measurement process control quantities on a large scale in the current industrial Internet of Things process measurement and control applications, and to design a method that is easy to manufacture and can directly and seamlessly replace traditional variable area flowmeters, has multiple enhanced functions, and can be adopted on a large scale in Internet of Things applications.

[0048] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0049] The present invention will be further described in detail below through specific implementation examples in conjunction with the accompanying drawings.

[0050] See also Figure 1-Figure 5This embodiment provides a process measurement and control instrument, which includes a measuring tube 100, a micro-electromechanical system chip 200 and a rectifier assembly 300; the fluid connection interface 400 of the process measurement and control instrument is compatible with the fluid connection interface of a variable area flowmeter and is connected to both ends of the measuring tube 100; the rectifier assembly 300 and the micro-electromechanical system chip 200 are both installed in the measuring tube 100, and the rectifier assembly 300 and the micro-electromechanical system chip 200 are arranged in sequence along the fluid flow direction; the rectifier assembly 300 is used to rectify the fluid, and the micro-electromechanical system chip 200 is provided with a plurality of sensors, including one or more of a thermal mass flow sensor, a temperature sensor and a pressure sensor.

[0051] The process measurement and control instrument provided in this embodiment has its fluid connection interface 400 configured to be compatible with the fluid connection interface of a conventional variable area flowmeter. This allows for seamless replacement without changing the installation structure of conventional process measurement and control products, meeting current on-site process measurement and control design solutions and usage habits. Thus, the process measurement and control instrument provided in this embodiment can directly replace conventional variable area flowmeters and be installed in corresponding locations. The thermal mass flow sensor in the micro-electromechanical system chip 200 disposed within the measuring tube 100 can sense the flow rate of the fluid flowing through the measuring tube 100. The thermal mass flow sensor utilizes thermal mass flow sensing technology, which is unaffected by ambient temperature and pressure, ensuring high precision, repeatability, and high resolution, and is readily implemented. Furthermore, the thermal mass flow sensor can digitally measure fluid flow. Compared to variable area flowmeters that require manual visual measurement of fluid flow, the thermal mass flow sensor offers higher data reading accuracy, providing significant advantages for more precise industrial process measurement and control, while maintaining comparable cost to variable area flowmeters. Furthermore, the thermal mass flow sensor can measure and control a wide range of media, encompassing a wide range of control options.

[0052] Traditional variable area flowmeters typically use visual inspection to measure and control fluids, and the measured values often vary from person to person. Furthermore, the range and resolution of flow regulation are limited by the mechanical scale on the glass tube, making high-resolution regulation impossible. This makes digitizing and precisely controlling flow challenging, especially in low-flow applications or applications with strict precision requirements. This limitation can lead to inefficiency, poor process performance, or failure to meet required flow specifications, or even failure to achieve generally accurate and repeatable measurement. The process measurement and control instrument provided in this embodiment uses a micro-electromechanical system chip for digital measurement, replacing manual visual inspection and completely resolving this problem. Its adjustment resolution is superior to mechanical methods, and the accuracy of the measured value can be improved by more than three orders of magnitude.

[0053] Traditional variable-area flowmeters are mounted vertically, with the fluid connection interface perpendicular to the measuring tube. Variable-area flowmeters determine the instantaneous flow rate of the fluid by determining the position of a float in the measuring tube supported by the fluid, so the flow pattern of the fluid has little impact on the results. In contrast, the sensors in the MEMS chip 200 of this embodiment determine the flow rate, temperature, and pressure of the fluid flowing through the entire measuring tube 100 from a single point within the measuring tube 100. Therefore, this measurement point requires excellent stability and repeatability. The fluid connection interface 400 of the process measurement and control instrument provided in this embodiment is positioned perpendicular to the measuring tube 100 to accommodate the fluid connection interface of the variable-area flowmeter. However, this layout exacerbates the uncertainty of fluid distribution. In this embodiment, a rectifier assembly 300 is provided at a position to the side of the fluid in the measuring tube 100 that is located near the MEMS chip 200. The rectifier assembly 300 is used to process the fluid and guide the fluid with a repeatable flow distribution to the measuring point of the MEMS chip 200. This ensures the stability and repeatability of the measurement and thus the accuracy of the values of the various parameters measured by the MEMS chip 200. At the same time, the provision of the rectifier assembly 300 can also reduce flow resistance and pressure loss, and can significantly reduce the probability of flow blockage, thereby reducing the requirements for the pipeline system to be measured.

[0054] Therefore, the process measurement and control instrument provided in this embodiment can replace the application of variable area flowmeters in industrial sites. The measurement is not affected by temperature and pressure changes, and has high resolution and accuracy. It can measure and control a variety of media, has a wide control range, and the cost is comparable to that of traditional variable area flowmeters.

[0055] At least the spacing / size between the inlet and the outlet of the fluid connection interface 400 of the process measurement and control instrument provided in this embodiment is compatible with the fluid connection interface of a conventional variable area flowmeter.

[0056] At the application level, when the process measurement and control instrument provided in this embodiment is applied to the process measurement and control environment of the Internet of Things, the flow measurement process control quantity can be obtained on a large scale as the basis for big data analysis of the Internet of Things; because it can provide effective measurement and control parameters with high accuracy, it can improve the effectiveness and practicality of the Internet of Things and meet the current requirements of refined production.

[0057] The MEMS chip 200 utilizes the traditional thermal mass flow measurement principle, integrating the capillary resistance wire of a conventional thermal sensor onto a single chip through a process similar to large-scale integrated circuits as the measurement sensing element. Furthermore, the chip's measurement parameters include fluid physical thermal parameters such as thermal conductivity. Because thermal conductivity is closely related to the physical properties of gases, it can measure the concentrations of two gas components.

[0058] The specific structure of the rectifier assembly 300 includes a flow breakup disk 310 and a flow rectifier chamber 320. The flow breakup disk 310 is positioned at the inlet end of the flow rectifier chamber 320, and the central axes of the flow breakup disk 310 and the flow rectifier chamber 320 are both configured to coincide with the central axis of the measuring tube 100. An annular gap is reserved between the flow breakup disk 310 and the measuring tube 100. Depending on the conditions of the inlet connection pipeline, the fluid entering the measuring tube 100 can have any flow pattern and directly impact the surface of the flow breakup disk 310. The flow breakup disk 310 forces the flowing fluid to be redistributed along its edge before converging in the flow rectifier chamber 320. In other words, the flow breakup disk 310 forcibly redistributes the flow pattern and flow field of the fluid entering the measuring tube 100. The flow rectifier chamber 320 can guide the fluid with a repeatable flow distribution to the measurement point of the MEMS chip 200, thereby ensuring the stability and repeatability of the measurement and metrology of the MEMS chip 200.

[0059] Specifically, the rectifying chamber 320 primarily consists of a straight pipe section, a standard DC converter, and a standard rectifier. The standard DC converter is located at the inlet of the straight pipe section, and the standard rectifier is located at the outlet of the straight pipe section. The ratio of the straight pipe section length to the inner diameter of the measuring tube 100 can be set to be greater than or equal to 3, which can better ensure the measurement accuracy of the MEMS chip 200.

[0060] Specifically, the flow breaking disk 310 may include a flat plate, and the flat plate is disposed perpendicular to the central axis of the rectification cavity 320 .

[0061] Specifically, the ratio of the diameter of the flow breaking disk 310 to the inner diameter of the measuring tube 100 may be set to be greater than or equal to 5 / 8, preferably 7 / 8.

[0062] A guide ring may also be provided in the fairing assembly 300 .

[0063] The rectifier assembly 300 also includes a flow regulator 330, located at the outlet of the rectifier chamber 320. This regulator can be used to adjust the full-scale flow rate measurement range based on application requirements. This provides high scalability, allows for application in different pipelines, and facilitates maintenance and replacement. Specifically, the full-scale range of the process measurement and control instrument can be set to any value between 10 sccm and 200 slpm.

[0064] This embodiment also includes a data transmission component that connects the MEMS chip 200 to the Internet of Things (IoT) through the data transmission component. The data transmission component transmits measurement signals from the MEMS chip 200 to the IoT, enabling remote data transmission. This allows the IoT to directly obtain valid data measured by process measurement and control instruments, thus achieving IoT connectivity. A communication circuit 520 may be provided in the data transmission component.

[0065] Specifically, the data transmission component may adopt one or both of wired transmission and wireless transmission.

[0066] When wired transmission is used, a wired data transmission interface 510 can be provided on the process measurement and control instrument to transmit data via a wired manner. Specifically, the wired data transmission interface 510 can adopt a standard USB-C interface, providing the standard data transmission format commonly used in industry, RS485 Modbus.

[0067] When wireless transmission is adopted, one or more of a Bluetooth module, a narrowband Internet of Things module, a mobile communication module, a WIFI module and a long-distance radio module can be set on the process measurement and control instrument. The appropriate wireless transmission module can be selected according to the needs.

[0068] In this embodiment, a processor 210 may also be provided and electrically connected to the MEMS chip 200 so that the processor 210 can convert the measurement signal from the MEMS chip 200 into a digital signal. Specifically, the processor 210 may convert the measurement signal into a digital signal via an analog-to-digital converter, amplify the signal, and then convert it into a corresponding parameter value for output. The processor 210 may also calculate the accumulated flow rate based on the acquired instantaneous flow rate value and a clock.

[0069] A display 600 can also be provided on the process measurement and control instrument, electrically connected to the processor 210, to display the numerical values of various parameters measured by the MEMS chip 200, such as instantaneous flow rate, fluid temperature, fluid pressure, and a barcode indicating flow rate. Compared to conventional variable area flowmeters that visually determine parameter values by float position, numerical readings are more accurate and intuitive. The display 600 can include a liquid crystal display (LCD) with a backlight, employing a vertical display format to be compatible with conventional variable area flowmeters and adapt to user preferences.

[0070] Processor 210 can set limits corresponding to the values of various monitored parameters. When the parameter values measured by the MEMS chip 200 exceed these limits, processor 210 can generate an alarm. This allows for monitoring the status of the measured pipelines / flow channels and provides an alarm when a fault occurs. Specifically, it can monitor the upper and lower limits of measured quantities and fluid leaks, enabling on-site safety monitoring and control. Furthermore, it can promptly notify of industrial control site faults such as overflow, overpressure, and blockages, preventing process control failures and other safety incidents.

[0071] A temperature sensor and / or a pressure sensor can also be set on the micro-electromechanical system chip 200. The temperature sensor can sense the temperature of the fluid, and the pressure sensor can sense the pressure of the fluid. Thus, multi-parameter data acquisition can be realized, and more complete process control parameters can be obtained. These parameters are very important for process control. Compared with the variable area flowmeter that can only obtain a single instantaneous fluid flow rate, the process measurement and control instrument provided in this embodiment has obvious advantages for more accurate industrial process digitization and big data measurement and control.

[0072] The process measurement and control instrument provided in this embodiment may also be provided with a manual flow control valve 700 , which can adjust the flow of the fluid. The manual adjustment method is compatible with the mechanical manual flow control structure of traditional variable area flowmeters and can adapt to user habits. The manual flow control valve 700 may be a needle valve.

[0073] The process measurement and control instrument provided in this embodiment is provided with a battery assembly 800 as a power source for powering it. Thus, the process measurement and control instrument provided in this embodiment can be applied to the situation where there is no external power supply at the measurement and control site, and achieves compatibility with the power supply requirements of traditional mechanical variable area flowmeters. The battery assembly 800 can power the process measurement and control instrument through the above-mentioned wired data transmission port 510. The battery assembly 800 is composed of a battery holder 810, a power interface circuit board 820, a battery cover 830 and a battery 840, wherein the power interface is preferably a Type-C plug, and the battery 840 can adopt a lithium battery ER14250. When there is no data transmission, the service life of the battery 840 can reach more than 6 months; when wireless data transmission is required, its transmission mode is intermittent to ensure the working life of the battery 840.

[0074] The process measurement and control instrument provided in this embodiment, the micro-electromechanical system chip 200 and the overall circuit have a micro-power consumption design, and the average current required for the sensor chip to operate does not exceed 100 microamperes, so a small and inexpensive 1200mAh lithium battery or a corresponding rechargeable battery can be used to ensure a working time of more than half a year.

[0075] Preferably, the thermal mass flow sensor is aligned with the center of the measuring tube 100. The center of the flow channel has the highest fluid velocity, which increases the sensitivity of the thermal mass flow sensor. Alternatively, the pressure sensor and temperature sensor can be aligned with the center of the measuring tube 100 to increase their sensitivity.

[0076] Furthermore, the surface of the thermal mass flow sensor can be arranged parallel to the direction of fluid flow to reduce the impact force of the fluid on the thermal mass flow sensor. Of course, the surfaces of the pressure sensor and the temperature sensor can also be arranged parallel to the direction of fluid flow to reduce the impact force of the fluid on the pressure sensor and the temperature sensor.

[0077] A menu key 900 may be provided on the process measurement and control instrument, and the menu key 900 may be used to: view or reset the accumulated flow, select the medium of the measured fluid, set the limit value of the flow alarm, set the limit value of the leak detection, view the alarm data and / or set a password.

[0078] The process measurement and control instrument provided in this embodiment can be applied to process measurement and control of various fluid media, wherein the fluid medium can be gas or liquid; specifically, the medium to be measured and controlled can be switched online or remotely.

[0079] In practice, there are two fluid connection interfaces 400, namely a fluid inlet interface 410 and a fluid outlet interface 420. In the specific structure of each of the two fluid connection interfaces 400, a flow channel module 430 and a threaded connector 440 are provided. The threaded connector 440 is fixed to the flow channel module 430 via a fixing screw 450. A first leak-proof rubber gasket 460 is provided between the fixing screw 450 and the flow channel module 430.

[0080] The manual flow control valve 700 can be installed from above the flow channel module 430 of the fluid inlet interface 410. Before placing the valve core 710, first place the second rubber gasket 720 on the flow channel module 430 and then secure it with the nut 730. The adjustment handle 760 is fixed to the nut 730 with a screw 740, and then the adjustment direction indicator plate 750 is bonded to the adjustment handle 760.

[0081] The flow channel module 430 is connected to the measuring tube 100 via a third rubber washer 470 , a screw assembly 480 , and a nut assembly 490 .

[0082] The measurement body and the processor 210 may be protected by an upper cover 110 and a lower cover 120 .

[0083] The process measurement and control instrument provided in this embodiment can meet the requirements of digital remote transmission, low power consumption, multi-parameter, high precision, low pressure drop, and leak detection. The process measurement and control instrument provided in this embodiment uses the same mechanical dimensions and installation flow channel interface as traditional variable area flowmeters, making it suitable for installation in confined spaces.

[0084] In the description of the present invention, it should be noted that the orientation or position relationship indicated by the term "vertical" or the like is based on the orientation or position relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0085] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the above embodiments, or make equivalent replacements for some or all of the technical features therein; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A process measurement and control instrument, characterized in that: Including measuring tube, micro-electromechanical system chip and rectifier components; The fluid connection interface of the process measurement and control instrument is compatible with the fluid connection interface of the variable area flowmeter and is connected to the measuring tube; The rectifier assembly and the micro-electromechanical system chip are both installed in the measuring tube, and the rectifier assembly is arranged on the fluid inflow side of the micro-electromechanical system chip; the rectifier assembly is used to rectify the fluid, and the micro-electromechanical system chip is provided with a thermal mass flow sensor.

2. The process measurement and control instrument according to claim 1, characterized in that: The rectification assembly includes a flow-breaking disc and a rectification chamber. The flow-breaking disc is arranged at the inlet end of the rectification chamber. The central axes of the flow-breaking disc and the rectification chamber coincide with the central axis of the measuring tube, and an annular gap is provided between the flow-breaking disc and the measuring tube.

3. The process measurement and control instrument according to claim 2, characterized in that: The rectifying cavity includes a straight pipe section, a standard DC converter and a standard rectifier, wherein the standard DC converter is provided at the inlet end of the straight pipe section, and the standard rectifier is provided at the outlet end of the straight pipe section; And / or, the flow breaking disk includes a flat plate, and the flat plate is perpendicular to the central axis of the rectification cavity.

4. The process measurement and control instrument according to claim 3, characterized in that: The ratio of the diameter of the flow breaking disk to the inner diameter of the measuring tube is greater than or equal to 5 / 8; And / or, the ratio of the length of the straight pipe section to the inner diameter of the measuring tube is greater than or equal to 3.

5. The process measurement and control instrument according to claim 2, characterized in that: The rectifier assembly further includes a flow regulator, which is provided at the outlet end of the rectifier cavity and is used to adjust the full scale of the measured flow; And / or, the full scale of the process measurement and control instrument is any value between 10 sccm and 200 slpm.

6. The process measurement and control instrument according to claim 1, characterized in that: The process measurement and control instrument further includes a data transmission component, through which the micro-electromechanical system chip is communicatively connected to the Internet of Things, and the data transmission component is used to transmit the measurement signal of the micro-electromechanical system chip to the Internet of Things.

7. The process measurement and control instrument according to claim 6, characterized in that: The data transmission component includes a wired data transmission interface; And / or, the data transmission component includes one or more of a Bluetooth module, a narrowband Internet of Things module, a mobile communication module, a WIFI module and a long-range radio module.

8. The process measurement and control instrument according to claim 1, characterized in that: The process measurement and control instrument further includes a processor, which is electrically connected to the micro-electromechanical system chip and is used to convert the measurement signal of the micro-electromechanical system chip into a digital signal; The process measurement and control instrument also includes a display, which is electrically connected to the processor and is used to display the values of various parameters measured by the micro-electromechanical system chip; and / or the processor is used to alarm when the parameter value measured by the micro-electromechanical system chip exceeds the limit.

9. The process measurement and control instrument according to claim 1, characterized in that: The micro-electromechanical system chip is further provided with a temperature sensor and / or a pressure sensor.

10. The process measurement and control instrument according to any one of claims 1 to 9, characterized in that: The process measurement and control instrument is provided with a manual flow regulating valve, which is used to adjust the flow of the fluid; And / or, the process measurement and control instrument is provided with a battery assembly; and / or, the thermal mass flow sensor is aligned with the center of the measuring tube; and / or, the surface of the thermal mass flow sensor is parallel to the fluid flow direction; And / or, the process measurement and control instrument is provided with a menu key, which is used to: view or reset the accumulated flow, select the medium for measuring the fluid, set the limit value of the flow alarm, set the limit value of the leak detection, view the alarm data and / or set a password.

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