A method for evaluating the durability of anti-reflective surfaces under laser irradiation

Abstract

The present invention discloses a method for evaluating the durability of an anti-reflective surface subjected to laser irradiation, comprising the following steps: S1, selecting a batch of test samples with consistent surface conditions and material properties, and obtaining initial reflectivity data for each test sample using a reflectivity testing system; S2, irradiating each test sample using a laser irradiation experimental device while varying different test variables; S3, measuring the reflectivity data of the irradiated test sample after irradiation; S4, calculating the difference between the reflectivity data of the test sample after irradiation and the initial reflectivity data; and S5, comparing the reflectivity change difference with a set reflectivity threshold to quantitatively evaluate the impact of the reflectivity change on the durability of the test sample. The present invention quantitatively evaluates the durability of the sample through the change in reflectivity.

Description

Technical Field

[0001] The invention belongs to the technical field of anti-reflection surface performance evaluation, and in particular relates to a method for evaluating the laser irradiation durability of an anti-reflection surface. Background Art

[0002] Anti-reflective coatings are widely used in many fields such as optical components, laser equipment, and solar cells. Their core function is to reduce light reflection, thereby improving light transmission efficiency. With the continuous advancement of laser technology, anti-reflective coatings are increasingly used in high-power laser systems. Their durability directly determines the service life of optical components and the stability of the system. Therefore, the performance requirements for coatings in laser environments are also constantly increasing. However, existing anti-reflective coating testing methods have obvious defects in evaluating their long-term stability under laser irradiation.

[0003] Currently, optical transmittance testing and mechanical wear testing are commonly used to test anti-reflective coatings. Optical transmittance testing primarily measures a material's light transmission properties under static conditions, but it cannot accurately reflect the material's dynamic behavior and long-term stability under laser irradiation. Mechanical wear testing primarily focuses on the material's physical wear resistance and has a weak correlation with actual laser irradiation conditions. These traditional methods are unable to quantify long-term stability under laser irradiation, making them difficult to meet practical application requirements. Furthermore, there is a lack of standardized evaluation methods that link realistic laser environment simulations with actual damage mechanisms. Existing testing methods are mostly based on idealized experimental conditions and cannot fully simulate the complex operating conditions of a real-world laser environment. For example, laser parameters such as wavelength, power density, and pulse frequency constantly change in real-world applications, and traditional methods cannot effectively simulate these dynamic changes, resulting in significant deviations between test results and actual applications. Furthermore, existing methods lack a clear evaluation system to quantify the relationship between reflectivity degradation caused by laser irradiation and microscopic damage, failing to provide strong support for material optimization design.

[0004] During laser irradiation, the reflectivity of anti-reflective coatings degrades, and microscopic damage occurs within the material. However, existing technologies lack a comprehensive characterization system to quantify the relationship between reflectivity degradation and microscopic damage. For example, it is impossible to accurately measure the specific impact of microscopic damage on reflectivity, nor can the extent of microscopic damage be predicted from changes in reflectivity. This lack of a relevant characterization system makes it difficult to gain a deep understanding of the failure mechanisms of materials in laser environments, limiting the development and optimization of anti-reflective coating technology. Summary of the Invention

[0005] An object of the present invention is to solve at least the above problems and / or disadvantages and to provide at least the advantages which will be described hereinafter.

[0006] In order to achieve these objects and other advantages of the present invention, a method for evaluating the durability of an anti-reflection surface under laser irradiation is provided, comprising:

[0007] S1. Select a batch of test samples with consistent surface conditions and material properties, and obtain the initial reflectivity data of each test sample through the reflectivity test system;

[0008] S2. Divide the test samples into several groups. For each group of samples, set multiple different values ​​for one of the test variables while keeping the other test variables fixed. Then, irradiate each group of test samples using a laser irradiation experimental device. Then, repeat the above operation while changing the other test variables.

[0009] S3. measuring the reflectivity data of each group of test samples after irradiation treatment;

[0010] S4. Calculate the difference between the reflectivity data after irradiation and the initial reflectivity data of each group of test samples;

[0011] S5. Process the difference between the reflectivity data of each group of test samples calculated in S4 to obtain the reflectivity change amplitude and trend, and set the reflectivity change threshold based on the reflectivity change amplitude and trend. Compare the difference between the reflectivity data in S4 with the set reflectivity change threshold. If the difference is greater than the threshold, it has a greater impact on the durability of the test sample; if the difference is less than the threshold, it has a smaller impact on its durability. By comparing the difference in reflectivity change with the set reflectivity threshold, the impact of the reflectivity change on the durability of the test sample can be quantitatively evaluated.

[0012] Preferably, in S2, the test variables include: energy density, irradiation area, irradiation time and irradiation angle;

[0013] Before and after the irradiation treatment process, the surface morphology of the test sample is observed by a transmission electron microscope TEM or a scanning electron microscope SEM, and the microstructure of the test sample is observed by X-ray diffraction XRD at the same time.

[0014] Preferably, in S1, the test sample is selected from one of Invar, titanium alloy, aluminum alloy, quartz glass, quartz fabric, and copper, and the number of the test samples is not less than 3.

[0015] Preferably, in S1, the reflectivity of the test sample is repeatedly tested for 100 times at a measurement frequency of 10 kHz.

[0016] Among them, the reflectivity test system adopts the integrating sphere measurement method.

[0017] Preferably, in S2, the irradiation treatment is carried out in a Class 1000 cleanroom laboratory, the irradiation time is 30 seconds, the test sample is cooled for 30 seconds, and each test sample is irradiated 100 times.

[0018] Preferably, the laser irradiation experimental device comprises: a continuous laser for generating laser light to irradiate the test sample;

[0019] a workbench for mounting test specimens;

[0020] Reflector I and Reflector II for preliminary guidance of the laser light path;

[0021] Split the light beam transmitted by the reflector II into the beam splitter wedge I of the power meter I;

[0022] Guide the main light path output from the beam splitter wedge I to the reflector III of the optical beam expander;

[0023] Wherein, the workbench is located at the output end of the optical beam expander.

[0024] Preferably, the continuous laser is configured as a 1064 nm continuous laser, the laser spot diameter is 3 mm, the energy density output by the continuous laser is 0.1-10 W / cm², and the irradiation area of ​​the continuous laser is 7.06-452.16 mm².

[0025] Preferably, the optical beam expander has a beam expansion ratio of 1-8 times.

[0026] Preferably, the workbench has multiple degrees of freedom in space.

[0027] The present invention has at least the following beneficial effects: 1. quantitatively evaluating the durability of a sample by changes in reflectivity;

[0028] 2. Through a high-precision reflectivity test system and a flexible laser irradiation device, precise measurement and control of samples under various experimental conditions are achieved. This method can simultaneously control multiple variables such as laser energy density, irradiation area, time, and incident angle, comprehensively studying their effects on material reflectivity, surface morphology, and physical properties, and deeply revealing the physical mechanism of laser-material interaction;

[0029] 3. The experimental device adopts a modular design with the characteristics of versatility and strong scalability. It can be widely used in the research of other materials and processes, promoting the coordinated development of materials science and laser technology, and has important scientific significance and application value.

[0030] Other advantages, objectives and features of the present invention will be reflected in part from the following description and will be understood by those skilled in the art through study and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 Schematic diagram of the reflectivity testing system structure in the present invention;

[0032] Figure 2 Schematic diagram of the structure of the laser irradiation experimental device in the present invention;

[0033] Figure 3 The reflectivity curves of the unirradiated reflector and the irradiated reflector are shown in FIG.

[0034] Figure numerals: 1. continuous laser, 2. test sample, 3. workbench, 4. reflector I, 5. reflector II, 6. power meter I, 7. spectroscopic wedge I, 8. reflector III, 9. optical beam expander, 10. laser generator, 11. integrating sphere, 12. reflector IV, 13. reflector V, 14. power meter II, 15. spectroscopic wedge II, 16. power meter III. DETAILED DESCRIPTION

[0035] The present invention will be described in further detail below with reference to the accompanying drawings, so that those skilled in the art can implement the invention with reference to the description. It should be understood that terms such as "having," "comprising," and "including" as used herein do not exclude the presence or addition of one or more other elements or combinations thereof. It should be noted that in the description of the present invention, the orientations or positional relationships indicated by terms are based on the orientations or positional relationships shown in the accompanying drawings. This is only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed or operate in a specific orientation, and therefore should not be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance. In the description of the present invention, unless otherwise expressly specified or limited, the terms "installed," "provided with," "sleeved / connected," and "connected" should be understood broadly. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, or internal communication between two elements. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific circumstances. Furthermore, in the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, a first feature being "above," "above," or "above" a second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. A first feature being "below," "below," or "below" a second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0036] Figure 1 The present invention provides a method for evaluating the durability of an anti-reflection surface under laser irradiation, comprising:

[0037] S1. Select a batch of test samples 2 with consistent surface conditions and material properties, and obtain initial reflectivity data of each test sample 2 through a reflectivity testing system;

[0038] S2. Divide the test samples 2 into several groups. For each group of samples, set multiple different values ​​for one of the test variables while keeping the other test variables fixed. Then, irradiate each group of test samples 2 using the laser irradiation experimental device. Then, repeat the above operation while changing the other test variables.

[0039] S3, measuring the reflectivity data of each group of test samples 2 after irradiation treatment;

[0040] S4. Calculate the difference between the reflectivity data after irradiation and the initial reflectivity data of each group of test sample 2;

[0041] S5. Process the difference in reflectivity data of each group of test sample 2 calculated in S4 to obtain the reflectivity change amplitude and trend, and set a reflectivity change threshold based on the reflectivity change amplitude and trend. Compare the difference in reflectivity data in S4 with the set reflectivity change threshold. If the difference is greater than the threshold, it has a greater impact on the durability performance of the test sample 2; if the difference is less than the threshold, it has a smaller impact on its durability performance. By comparing the difference in reflectivity change with the set reflectivity threshold, the impact of the reflectivity change on the durability performance of the test sample 2 can be quantitatively evaluated.

[0042] Working principle:

[0043] Step 1: In order to accurately test the optical properties of sample 2, a high-precision reflectivity test system was built. The system uses advanced optical components and precise measurement technology, which can effectively reduce measurement errors and ensure the accuracy of reflectivity data. First, a batch of test samples 2 were selected. These samples were strictly screened before the experiment to ensure the consistency of their surface state and material properties. Subsequently, these test samples 2 were placed one by one on the measurement platform of the reflectivity test system. The reflectivity test experiment was carried out in strict accordance with the experimental standard operating procedures. After repeated measurements and statistical analysis of the data, the initial reflectivity data of the test sample 2 were finally obtained. These initial data will serve as the basis for subsequent research and are used to compare and analyze the changes in the reflectivity of the samples after laser irradiation treatment.

[0044] In the actual operation process, the sample 2 to be tested is one of Invar, titanium alloy, aluminum alloy, quartz glass, quartz fabric, and copper, and the number of test samples 2 is not less than 3. When preparing the test sample 2, the sample 2 to be tested is placed in acetone, ethanol and ultrapure water and ultrasonically cleaned for 10 minutes respectively, then taken out and blown dry with clean air to ensure that its surface quality meets the test requirements. The number of repeated measurements of the test sample 2 is 100 times, and the measurement frequency is 10 kHz. When performing the reflectivity test, the reflectivity test system adopts the integrating sphere measurement method to ensure the accuracy and repeatability of the measurement results.

[0045] Step 2: Build a set of experimental equipment specifically for laser irradiation. The device has high precision and flexibility and can finely control the key parameters of the laser beam. The device can accurately control the energy density of the laser beam to ensure that it can output stably according to the preset value during the experiment, with an error range controlled within the range of ±1%, providing consistent irradiation conditions for the experiment. The device can accurately adjust the irradiation area of ​​the laser beam. Through the beam expander, the size of the irradiation area can be flexibly adjusted according to the experimental requirements, achieving irradiation from a small area to a large area, meeting the requirements of different sample sizes and experimental designs. The device also performs well in controlling the irradiation time and can accurately set the irradiation duration, from short instantaneous pulses to long-term continuous irradiation. Precise control can be achieved, providing strong support for studying the interaction between lasers and materials at different time scales. More importantly, the device also has the function of adjusting the irradiation angle. Through the mechanical structure and control system, the incident angle of the laser beam can be adjusted to simulate different actual application scenarios and study the effect of angle changes on the irradiation response of the material.

[0046] In the actual operation process, all experimental operations were carried out in a Class 1000 cleanroom. The laser was a 1064nm continuous laser 1 with a laser spot diameter of 3mm. The laser irradiation time was 30s, the sample was cooled for 30s, and a total of 100 irradiations were performed. The beam expansion magnification of the optical beam expander 9 was 1-8 times.

[0047] Step 3: Perform a laser irradiation experiment on the test sample 2, where the experimental variables are energy density, irradiation area, irradiation time, and irradiation angle. A group of test samples 2 with the same initial characteristics are selected and placed in a dedicated laser irradiation device. By precisely adjusting the output power and beam focusing parameters of the laser generator 10, a series of different energy density values ​​are set. While keeping other parameters (such as irradiation area, time, and angle) constant, the samples are irradiated in sequence. The experiment was repeated multiple times at each energy density level to ensure the reliability and statistical significance of the data. During the experiment, the surface temperature and physical state changes of the samples were monitored in real time, and the microstructure and macroscopic performance data after irradiation were recorded. A beam expander was used to adjust the irradiation area of ​​the laser beam from a smaller local area to a larger overall coverage. Under the premise of fixed energy density, irradiation time and angle, the samples were irradiated one by one. By comparing the damage threshold, surface morphology and physical property changes of the samples under different irradiation areas, the influence mechanism of irradiation area on material response was analyzed. In order to study the influence of time factor on the laser irradiation effect, the test sample 2 was exposed to a laser beam with set energy density and irradiation area, and different irradiation times were controlled respectively. From short, instantaneous pulses to longer, continuous irradiation, the damage characteristics and performance evolution of the sample at different time points are systematically recorded. Through comparative analysis, the quantitative relationship between irradiation time and the material's cumulative damage and thermal effects is revealed. Utilizing the laser device's multi-degree-of-freedom worktable (3), the incident angle of the laser beam is varied. While maintaining constant energy density, irradiation area, and time, the test sample (2) is irradiated at different angles. By measuring the sample's reflectivity, absorptivity, and surface morphology at different angles, the geometric effect of the incident angle on the laser-material interaction is explored, providing a theoretical basis for optimizing laser processing technology.

[0048] During actual operation, the energy density output by the continuous laser 1 is 0.1-10 W / cm², the laser irradiation area is 7.06-452.16 mm², and the multi-degree-of-freedom workbench 3 has an angle adjustment accuracy of 0.1° and a position adjustment accuracy of 0.01mm to achieve precise control of the laser beam incident angle and irradiation position, ensuring the accuracy and repeatability of the experimental results.

[0049] Step 4. In order to evaluate the durability of test sample 2 under laser irradiation, the reflectivity test of the sample treated with laser irradiation was carried out and compared with the initial reflectivity data. After completing the laser irradiation experiment, all irradiated samples were placed one by one in the high-precision reflectivity test system according to the preset test process. During the test, the sample surface was ensured to be clean and the placement was accurate to avoid interference from external factors on the measurement results. The reflectivity measurement of each sample was repeated many times to obtain stable and reliable data. The reflectivity test results of the laser irradiated sample were compared with the initial reflectivity data in detail. By calculating the change in reflectivity, that is, the difference between the reflectivity after irradiation and the initial reflectivity, the effect of laser irradiation on the reflectivity of the sample was quantitatively evaluated, the change trend of the reflectivity was analyzed, and different experimental variables were examined. The contribution of various factors (such as energy density, irradiation area, time, and angle) to the change in reflectivity, for example, analyzing whether high energy density irradiation leads to a significant decrease in reflectivity, and whether prolonged irradiation time exacerbates reflectivity attenuation; based on the amplitude and trend of reflectivity change, a comprehensive evaluation of the laser irradiation durability of the sample is conducted. If the reflectivity change is small and within an acceptable range, it indicates that the sample has good durability and can maintain stable optical properties under laser irradiation. On the contrary, if the reflectivity changes greatly, especially if there is a significant downward trend, it indicates that the sample is prone to optical performance degradation under laser irradiation and has poor durability. In addition, combined with the microstructural analysis of the sample (such as surface morphology, crystal structure changes, etc.), the physical mechanism of reflectivity change is further explored to provide a theoretical basis for optimizing the material properties and processing technology of the sample;

[0050] In actual operation, when analyzing the contribution of different experimental variables to reflectivity changes, a mathematical model is established to quantitatively analyze the weights of factors such as energy density, irradiation area, time and angle on reflectivity changes, so as to more accurately determine the degree of influence of each factor;

[0051] The microstructural analysis of the test sample 2 includes observing the surface morphology using a scanning electron microscope (SEM) and analyzing the crystal structure changes using X-ray diffraction (XRD) to more comprehensively explore the physical mechanism of the reflectivity change. Based on the reflectivity change amplitude and trend and the physical state of the monitored sample, a durability evaluation standard is formulated. The durability evaluation standard is used to evaluate the impact of changes in different variables during irradiation treatment on the durability performance of the test sample 2.

[0052] Example:

[0053] The reflectivity test system used in the method for evaluating the durability of anti-reflection surface laser irradiation in the present invention is as follows: Figure 1 As shown,

[0054] The reflectivity test system includes: a laser generator 10, an integrating sphere 11 for fixing a test sample 2, a reflector IV 12 and a reflector V 13 for initially guiding the optical path of the reflectivity test laser; a beam splitter wedge II 15 for partially splitting the light beam transmitted from the reflector V 13 to a power meter II 14, the beam splitter wedge II 15 transmitting the output main light path to the test sample 2 on the integrating sphere 11, and the test sample 2 transmitting the reflected light path to the power meter III 16;

[0055] The laser generator 10 passes through the reflector IV 12, reflector V 13 and beam splitter wedge II 15, and then through the integrating sphere 11 at an incident angle of 45° to the test sample 2. The test sample 2 is fixed outside the integrating sphere 11, close to the through hole. The reflected light is emitted and received by the power meter III 16. When the laser beam passes through the beam splitter wedge II 15, the power meter II 14 collects a beam of laser light to detect and calculate the real-time laser power. The optical path diagram is shown in Figure 1 As shown. The data collected by power meter II 14 is recorded as the incident power, and the data collected by power meter III 16 is recorded as the reflected power. Power meter III 16 uses electronic counting, the number of collections is set to 100, and the frequency is 10 Hz. The average reflected power is calculated and divided by the incident power to obtain the initial reflectivity of the sample;

[0056] The laser irradiation test was performed on the sample using a laser irradiation experimental device. The irradiation process was carried out in a Class 1000 cleanroom laboratory. The irradiation time was 30 seconds, the test sample 2 was cooled for 30 seconds, and each test sample 2 was irradiated 100 times. Using this technical solution, the laser light generated by the continuous laser 1 passed through the reflector I4, reflector II5, beam splitter wedge I7, reflector III8 and optical beam expander 9, and irradiated on the test sample 2. The test sample 2 was fixed on the workbench 3. The optical path diagram is shown in FIG. Figure 2 As shown in the figure, continuous laser 1 outputs a continuous laser with a wavelength of 1064 nm and an energy density of 0.1-1 W / cm². The beam is expanded 5 times by an optical beam expander 9, and the radiation angle is controlled to 10° to prevent reflected light from damaging the laser. In the experiment, the laser irradiation time is 30 seconds per shot, and the sample is cooled for 30 seconds. A total of 100 irradiations are performed, and the sample heating process is recorded using an infrared thermal imager.

[0057] The reflectivity test system is used to test the reflectivity of samples irradiated by laser light. The samples are fixed in the sample area of ​​the reflectivity test system and the reflectivity test experiment is carried out. All irradiated samples are placed one by one in the high-precision reflectivity test system according to the preset test process. During the test, the sample surface is ensured to be clean and the placement is accurate to avoid external factors from interfering with the measurement results. The reflectivity measurement of each sample is repeated multiple times to obtain stable and reliable data.

[0058] The reflectivity test results of the laser-irradiated samples are compared in detail with the initial reflectivity data of the unirradiated samples. By calculating the change in reflectivity, that is, the difference between the reflectivity after irradiation and the initial reflectivity, the effect of laser irradiation on the reflectivity of the samples is quantitatively evaluated, the trend of reflectivity change is analyzed, and the effects of different experimental variables (such as energy density, irradiation area, time and angle) on the reflectivity change are examined. Depending on the actual use of the test sample 2, there are different durability range requirements. The test sample 2 in this embodiment is copper, which is suitable for use as an absorbing material and requires a reflectivity within 5%. For example, the reflectivity change of the samples processed at different scanning speeds after being continuously irradiated with a high energy density of 10 W / cm² for 100 times is as follows: Figure 3 As shown. After laser irradiation, the reflectivity of the sample increased, but the reflectivity of the sample was still around 1%, which is in line with the durability range requirements of the sample. According to the amplitude and trend of the reflectivity change, the laser irradiation durability of the sample was comprehensively evaluated. If the reflectivity change is small and within an acceptable range, it indicates that the sample has good durability and can maintain stable optical properties under laser irradiation. On the contrary, if the reflectivity changes greatly, especially if there is a clear downward trend, it means that the sample is prone to optical performance degradation under laser irradiation and has poor durability. The samples were observed at different time points using transmission electron microscopy TEM or scanning electron microscopy SEM, and the crystal structure changes of the materials were analyzed using X-ray diffraction XRD to provide data support for a deeper understanding of the mechanism of the influence of laser irradiation on material properties.

[0059] Although the embodiments of the present invention have been disclosed above, they are not limited to the applications listed in the description and implementation methods. They can be fully applied to various fields suitable for the present invention. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the present invention is not limited to the specific details and illustrations shown and described herein.

Claims

1. A method for evaluating the durability of an anti-reflective surface under laser irradiation, characterized in that: include: S1. Select a batch of test samples with consistent surface conditions and material properties, and obtain the initial reflectivity data of each test sample through the reflectivity test system; S2. Divide the test samples into several groups. For each group of test samples, set multiple different values ​​for one of the test variables while keeping the other test variables fixed. Then, irradiate each group of test samples using a laser irradiation experimental device. Then, repeat the above operation while changing the other test variables. S3. measuring the reflectivity data of each group of test samples after irradiation treatment; S4. Calculate the difference between the reflectivity data after irradiation and the initial reflectivity data of each group of test samples; S5. Processing the differences in reflectivity data of each group of test samples calculated in S4 to obtain a reflectivity change amplitude and trend, and setting a reflectivity change threshold based on the reflectivity change amplitude and trend. Comparing the differences in reflectivity data in S4 with the set reflectivity change threshold. If the difference in reflectivity data is greater than the set reflectivity change threshold, it has a significant impact on the durability of the test sample. If the difference in reflectivity data is less than the set reflectivity change threshold, it has a minimal impact on the durability. Comparing the difference in reflectivity data with the set reflectivity change threshold can quantitatively evaluate the impact of the reflectivity change on the durability of the test sample. In S2, the test variables include: energy density, irradiation area, irradiation time and irradiation angle; Before and after the irradiation treatment, the surface morphology of the test sample is observed by a transmission electron microscope TEM or a scanning electron microscope SEM, and the microstructure of the test sample is observed by X-ray diffraction XRD at the same time; In S1, the test sample is selected from one of Invar, titanium alloy, aluminum alloy, quartz glass, quartz fabric, and copper, and the number of test samples is not less than 3; The laser irradiation experimental device comprises: a continuous laser for generating laser light to irradiate the test sample; a workbench for mounting test specimens; Reflector I and Reflector II for preliminary guidance of the laser light path; Split the light beam transmitted by the reflector II into the beam splitter wedge I of the power meter I; Guide the main light path output from the beam splitter wedge I to the reflector III of the optical beam expander; Wherein, the workbench is located at the output end of the optical beam expander.

2. The method for evaluating the durability of anti-reflection surface laser irradiation according to claim 1, characterized in that: In S1, the reflectivity of the test sample needs to be tested repeatedly for 100 times at a measurement frequency of 10 kHz. Among them, the reflectivity test system adopts the integrating sphere measurement method.

3. The method for evaluating the durability of anti-reflection surface laser irradiation according to claim 1, characterized in that: In S2, the irradiation treatment is carried out in a Class 1000 cleanroom laboratory, the irradiation time is 30 seconds, the test sample is cooled for 30 seconds, and each test sample is irradiated 100 times.

4. The method for evaluating the durability of anti-reflection surface laser irradiation according to claim 1, characterized in that: The continuous laser is configured as a 1064nm continuous laser, the laser spot diameter is 3mm, the energy density output by the continuous laser is 0.1-10 W / cm², and the irradiation area of ​​the continuous laser is 7.06-452.16 mm².

5. The method for evaluating the durability of anti-reflection surface laser irradiation according to claim 1, characterized in that: The optical beam expander has a beam expansion ratio of 1 to 8 times.

6. The method for evaluating the durability of anti-reflection surface laser irradiation according to claim 1, characterized in that: The workbench has multiple degrees of freedom in space.

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