A mixer for preparing high-purity electronic-grade thionyl fluoride

Abstract

The invention discloses a mixer for preparing high-purity electronic-grade thionyl fluoride, comprising a mixing tube, an anhydrous hydrogen fluoride feeding end, a thionyl chloride feeding end, and a discharging end, and also comprising: a middle material dividing structure, the mixing tube comprising a front section branch pipe, a rear section segment, and a cross-connecting plate, the middle material dividing structure comprising a first sealing crank sleeve, the lower end of the cross-connecting plate being connected to a second sealing crank sleeve, a driving member being provided on a side of the first sealing crank sleeve away from the cross-connecting plate, a dynamic material dividing member being connected to an output end of the driving member and penetrating the cross-connecting plate and being located in the first sealing crank sleeve and the second sealing crank sleeve; an axial material dividing structure, the front section branch pipe and the rear section segment are both provided with an installation groove on one side close to the cross-connecting plate, a static material dividing member being movably provided in the installation groove, the first sealing crank sleeve and the second sealing crank sleeve being connected to the rear side of the cross-connecting plate and respectively abutting against the two static material dividing members. The invention can facilitate the regeneration of the coating and better facilitate the maintenance and use of the mixer.

Description

Technical Field

[0001] The invention relates to a production device for thionyl fluoride, in particular to a mixer for preparing high-purity electronic-grade thionyl fluoride. Background Art

[0002] With the continuous development of the semiconductor industry, high-end chip technology has made continuous breakthroughs, among which dry etching technology has been widely used. As the key etching electronic gas and cleaning electronic gas, higher demands have been put forward. Fluorine-based electronic gases have ushered in rapid development. Typical fluorine-based electronic gases currently include sulfur hexafluoride (SF6), carbon tetrafluoride (CF4) and fluorocarbon gases (such as CH3F, CH2F2, CHF3, C2F6, C3F8, etc.). Their GWP values ​​are relatively high and have a greater potential impact on the environment. The development of low-GWP etching and cleaning gases has become the key to the development of the semiconductor industry. While ensuring the etching and cleaning effects, thionyl fluoride (SOF2) is easier to dispose of and more environmentally friendly. Existing technologies usually use anhydrous hydrogen fluoride (AHF) and thionyl chloride (SOCl2) to synthesize thionyl fluoride.

[0003] Traditionally, when anhydrous hydrogen fluoride and thionyl chloride are mixed in a mixer, a static mixer is usually used, that is, spiral blades or baffles are set in the mixer. This setting method improves the mixing effect between the raw materials. However, this method will cause the coating on the spiral blades or baffles to be gradually damaged, and the coating of the barrier structure needs to be replenished after a period of time. Therefore, the existing technology will replenish the coating on the spiral blades or baffles within a period of time. However, due to the complex structure inside the mixer, it is difficult to coat from the outside. Therefore, the entire mixer needs to be removed from the pipeline and immersed in the coating liquid. The engineering workload is large, and it is also easy to lose more coating liquid, and the overall cost is high.

[0004] Therefore, this case aims to provide a mixer for the preparation of high-purity electronic-grade thionyl fluoride, which can not only fully mix the two raw materials, but also set the mixing structure in the middle of the channel, which can facilitate the regeneration of the coating and better facilitate the maintenance and use of the mixer. Summary of the Invention

[0005] The present invention provides a mixer for preparing high-purity electronic-grade thionyl fluoride, which can effectively solve the above problems.

[0006] The present invention is achieved in that:

[0007] A mixer for preparing high-purity electronic-grade thionyl fluoride comprises a mixing tube for mixing, wherein the mixing tube is provided with an anhydrous hydrogen fluoride feed end and a thionyl chloride feed end, respectively, and a discharge end is provided at one end of the mixing tube away from the thionyl chloride feed end, and further comprises:

[0008] A middle material separation structure, wherein the mixing tube includes a front branch pipe provided with an anhydrous hydrogen fluoride feed end and a thionyl chloride feed end, and a rear segment provided with a discharge end, wherein the middle positions of the front branch pipe and the rear segment are connected by a cross-connecting plate, and the middle material separation structure includes a first sealing crank sleeve provided at the upper end of the cross-connecting plate, a second sealing crank sleeve connected to the lower end of the cross-connecting plate, a driving member provided on the side of the first sealing crank sleeve away from the cross-connecting plate, and a dynamic material separation member connected to the output end of the driving member that passes through the cross-connecting plate and is located in the first sealing crank sleeve and the second sealing crank sleeve;

[0009] The axial material distribution structure is provided with an installation groove on one side of the front section branch pipe and the rear section segment close to the cross-connecting plate. A static material distribution component is movably provided in the installation groove. The first sealing crank sleeve and the second sealing crank sleeve are connected to the rear sides of the cross-connecting plate and respectively abut against the two static material distribution components. The raw materials entering through the anhydrous hydrogen fluoride feed end and the thionyl chloride feed end are distributed by the static material distribution component at the front end, mixed by the dynamic material distribution component, and then distributed by the static material distribution component at the rear end.

[0010] As a further improvement, the cross-connecting plate includes two connecting arc plates connected between the front section branch and the rear section segment, and a cross-connecting plate is connected between the two connecting arc plates. The cross-connecting plate is provided with a pair of through holes, and a sealing piece is locked on the pair of through holes.

[0011] As a further improvement, the second sealed crank sleeve includes a lower outer closed sleeve that is in contact with the lower end of the connecting arc plate, and the inner side of the lower outer closed sleeve is connected to a lower inner closed arc sleeve that is in contact with the inner side wall of the connecting arc plate, and the lower inner closed arc sleeve is provided with a facing empty cylinder and a lateral opening of the facing empty cylinder.

[0012] As a further improvement, the first sealing crank sleeve includes an upper outer sealing sleeve that is in contact with the upper end of the connecting arc plate, and the inner side of the upper outer sealing sleeve is connected to an upper inner sealing sleeve arc sleeve that is in contact with the inner side wall of the connecting arc plate. The lower end of the upper inner sealing sleeve arc sleeve is provided with a facing column tube, and the lateral opening of the facing column tube. When the first sealing crank sleeve is matched with the second sealing crank sleeve, the facing column tube is embedded in the facing empty cylinder through the facing through hole, and the facing column tube and the facing empty cylinder are connected through the facing through hole via the sealing piece.

[0013] As a further improvement, the transverse connecting plate is provided with a transverse threaded hole in the transverse direction corresponding to the through-hole position, and the sealing member includes a stud portion that passes through the opposite column tube and the opposite empty cylinder and cooperates with the transverse threaded hole, and an external blocking portion is provided on the stud portion, and the external blocking portion closes the through-hole.

[0014] As a further improvement, a rotating joint is opened in the middle of the transverse connecting plate, and the dynamic material distribution component includes a circulating ring arranged in the rotating joint. The top of the circulating ring is provided with an upper mixing part, and the lower end of the circulating ring is connected to the lower mixing part, and the upper mixing part is connected to the output end of the driving component.

[0015] As a further improvement, the upper mixing section and the lower mixing section have the same structure and size. The upper mixing section includes an axial column connected to the epicyclic ring, the axial column is connected to the driving member, and a semi-arc-shaped dispersion sheet is provided on the axial column. The dispersion sheet is provided with a plurality of dispersion holes.

[0016] As a further improvement, a gasket is provided on the outer side of the dispersion sheet, and the gasket is attached to the inner side of the first sealing crank sleeve.

[0017] As a further improvement, the installation groove includes an internal cavity, a plurality of external expansion grooves are opened on the inner side of the internal cavity, and external spring pieces are opened on the outer edges of the external expansion grooves. After the static dividing material opens the external spring pieces, they are inserted into the internal cavity and the external expansion grooves.

[0018] As a further improvement, the static material part includes a clamping ring that cooperates with the built-in cavity, a plurality of outward expansion pads are provided on the outside of the clamping ring, a spiral sheet is provided on the inside of the clamping ring, and the outer edge of the clamping ring is attached to the outside of the first sealing crank sleeve and the second sealing crank sleeve.

[0019] The beneficial effects of the present invention are:

[0020] Whether it is a static mixer or a dynamic mixer used in the prior art, the coating needs to be regenerated after a period of use. When the coating is regenerated, the entire mixer needs to be removed from the pipeline and then immersed in the coating, which is not only time-consuming and labor-intensive, but also the connected pipeline needs to be repeatedly tested before it can be used. Therefore, the present invention sets up a middle dividing structure, firstly divides the entire mixer into two parts, namely the front section branch pipe and the rear section segment, and sets a middle dividing structure between the two parts, which can not only achieve the effect of dynamic mixing in the middle part through the dynamic dividing piece, but also the entire mixer can be disassembled at this time, and the regeneration of the mixing structure can be carried out directly in the middle position, thereby effectively allowing the dynamic mixing effect of the mixer to maintain a good dispersion effect, thereby improving the mixing effect of anhydrous hydrogen fluoride and thionyl chloride.

[0021] If the front branch pipe and the rear section are set as two separate parts, it will be difficult to connect the two sections of pipes during either gluing or welding. Therefore, the present invention provides a cross-connecting plate between the front branch pipe and the rear section, connects the two pipes through the cross-connecting plate, and has connecting surfaces on the sides and the middle. As a result, although the two parts of the structure are set separately, they have a certain connection, which makes it more stable when the sealing structure is formed again.

[0022] Due to the setting of the cross-connecting plate, the middle material structure needs to be divided into two upper and lower sealing settings, and the two parts have different structures. First, the second sealing crank sleeve at the lower end has a lower outer closed sleeve and a lower inner closed arc sleeve that fit with the connecting arc plate, thereby reducing the sealing difficulty. The first sealing crank sleeve at the upper end also includes an upper outer closed sleeve, an upper inner closed sleeve arc sleeve and a connecting arc plate. However, the difference between the second sealing crank sleeve and the first sealing crank sleeve is that the second sealing crank sleeve is set with an opposing empty cylinder, while the first sealing crank sleeve is set with an opposing column tube, so that the two can form a quick point-to-point connection, thereby ensuring that a relatively complete circular structure can be formed.

[0023] After the second sealed crank sleeve and the first sealed crank sleeve form a circular structure, in order to make the two structures form a stable fit, a transverse threaded hole is provided on the transverse connecting plate of the present invention, laying the foundation for the fit with the sealing piece, so that the stud part can pass through the opposite column tube and the opposite empty cylinder, so that the second sealed crank sleeve and the first sealed crank sleeve form a whole, reducing the difficulty of subsequent gluing or welding.

[0024] The dynamic mixing stage of the entire mixer occurs at the position of the cross-connecting plate. Therefore, after the second sealed crank sleeve and the first sealed crank sleeve form a whole, the entire dynamic material separation component is also installed. The dynamic material separation component is divided into an upper mixing part and a lower mixing part, so that the dynamic uniform mixing effect can be achieved in two different areas, and it can be regenerated as the second sealed crank sleeve and the first sealed crank sleeve are disassembled.

[0025] When the raw materials are mixed in the upper mixing section, they are dispersed through small chambers formed by several dispersion sheets, and then dispersedly disrupted and mixed to achieve a high-efficiency mixing effect. The entire process is in a high-speed operation state, which can ensure the uniformity of mixing.

[0026] Although the dynamic material dividing parts are directly installed on the middle material dividing structure to achieve the effect of being removable and regenerated, the static mixing structures in the front branch pipe and the rear segment are also difficult to regenerate. Therefore, the present invention arranges an axial material dividing structure on the basis of the middle material dividing structure, and arranges the two static material dividing parts directly on the side positions of the first sealing crank sleeve and the second sealing crank sleeve, so that the two static material dividing parts can be directly exposed after the first sealing crank sleeve and the second sealing crank sleeve are removed, so that the coating on the static material dividing parts can be directly regenerated from the outside, thereby achieving the regeneration effect of the static and dynamic mixing parts, and no cumbersome operation is required, so that the mixing effect of the mixer can be maintained for a long time.

[0027] If the static dividing material is set at an inner position, it is more difficult to infiltrate or spray it during coating regeneration. Therefore, the static dividing material of the present invention is fixed on the inner side of the mounting groove, and the clamping ring and the outward expansion pad of the static dividing material are matched by the outer spring piece and the outward expansion groove to form self-fixation, and then the clamping ring on the static dividing material is squeezed on the side of the middle dividing structure, so that the static dividing material is close to the middle dividing structure and can achieve the effect of static mixing. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 It is a front structural schematic diagram of the present invention.

[0030] Figure 2 It is a schematic diagram of the top structure of the present invention.

[0031] Figure 3 This invention Figure 2 Cross-section view at AA in the middle.

[0032] Figure 4 It is a side view structural diagram of the partial material structure in the present invention.

[0033] Figure 5 This invention Figure 4 Magnified view of area A in center.

[0034] Figure 6 It is a structural schematic diagram of the static material parts of the present invention.

[0035] In the picture:

[0036] Mixing tube 10, front section branch tube 11, rear section segment 12, cross-connecting plate 13, connecting arc plate 131, cross-connecting plate 132, rotary joint 1321, through hole 133, plugging piece 135, stud portion 1351, outer plugging portion 1352, anhydrous hydrogen fluoride feed end 20, thionyl chloride feed end 30, discharge end 40, middle material distribution structure 50, first sealing crank sleeve 51, upper outer sealing sleeve 511, upper inner sealing sleeve arc sleeve 512, opposite column pipe 513, first Second sealing crank sleeve 52, lower outer sealing sleeve 521, lower inner sealing arc sleeve 522, opposite empty cylinder 523, driving part 53, dynamic material distribution part 54, revolving ring 541, upper mixing part 542, axial column 5421, dispersion piece 5422, gasket 5423, lower mixing part 543, axial material distribution structure 60, mounting groove 61, built-in cavity 611, outer expansion groove 612, outer spring piece 613, static material distribution part 62, clamping ring 621, expansion gasket 622, spiral piece 623. DETAILED DESCRIPTION

[0037] All embodiments of the present invention are within the scope of protection of the present invention. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0038] In the description of the present invention, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as referring to the purpose, technical solutions and advantages of the methods. To be clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work indicate or imply relative importance or implicitly indicate the number of indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0039] Reference Figures 1 to 6As shown, a mixer for preparing high-purity electronic grade thionyl fluoride includes a mixing tube 10 for mixing, wherein the mixing tube 10 is respectively provided with an anhydrous hydrogen fluoride feed end 20 and a thionyl chloride feed end 30, and the mixing tube 10 is provided with a discharge end 40 at one end away from the thionyl chloride feed end 30, and further includes: a middle material dividing structure 50, wherein the mixing tube 10 includes a front section branch pipe 11 provided with an anhydrous hydrogen fluoride feed end 20 and a thionyl chloride feed end 30 and a rear section segment 12 provided with a discharge end 40, the middle position of the front section branch pipe 11 and the rear section segment 12 are connected by a cross-connecting plate 13, the middle material dividing structure 50 includes a first sealing crank sleeve 51 provided at the upper end of the cross-connecting plate 13, the lower end of the cross-connecting plate 13 is connected to a second sealing crank sleeve 52, the first A driving member 53 is provided on the side of the sealing crank sleeve 51 away from the cross-plate 13, and the output end of the driving member 53 is connected to a dynamic material dividing member 54 that penetrates the cross-plate 13 and is located in the first sealing crank sleeve 51 and the second sealing crank sleeve 52; an axial material dividing structure 60, the front section branch pipe 11 and the rear section segment 12 are provided with a mounting groove 61 on one side close to the cross-plate 13, and a static material dividing member 62 is movably provided in the mounting groove 61, the first sealing crank sleeve 51 and the second sealing crank sleeve 52 are connected to the rear side of the cross-plate 13 and respectively abut against the two static material dividing members 62, and the raw materials entering through the anhydrous hydrogen fluoride feed end 20 and the thionyl chloride feed end 30 are divided by the static material dividing member 62 at the front end, mixed by the dynamic material dividing member 54, and then divided by the static material dividing member 62 at the rear end.

[0040] Whether it is a static mixer or a dynamic mixer used in the prior art, the coating needs to be regenerated after a period of use. When the coating is regenerated, the entire mixer needs to be removed from the pipeline and then immersed in the coating, which is not only time-consuming and labor-intensive, but also the connected pipeline needs to be repeatedly tested before it can be used. Therefore, the present invention sets a middle dividing structure 50, firstly divides the entire mixer into two parts, namely the front section branch pipe 11 and the rear section 12, and sets a middle dividing structure 50 between the two parts, which can not only achieve the dynamic mixing effect in the middle through the dynamic dividing piece 54, but also the entire mixer can be disassembled at this time, and the regeneration of the mixing structure can be carried out directly in the middle position, thereby effectively maintaining a good dispersion effect of the dynamic mixing effect of the mixer, thereby improving the mixing effect of anhydrous hydrogen fluoride and thionyl chloride.

[0041] If the front branch pipe 11 and the rear section 12 are set as two separate parts, it will be difficult to connect the two sections of the pipeline regardless of the gluing or welding stage. Therefore, the cross-connecting plate 13 of this embodiment includes two connecting arc plates 131 connected between the front branch pipe 11 and the rear section 12, and a cross-connecting plate 132 is connected between the two connecting arc plates 131. The cross-connecting plate 132 is provided with a pair of through holes 133, and a sealing member 135 is locked on the pair of through holes 133. By setting the cross-connecting plate 13 between the front branch pipe 11 and the rear section 12, the two pipelines are connected through the cross-connecting plate 13, and there are connecting surfaces on the side and the middle, so that although the two parts of the structure are set separately, they have a certain connection, so that they can be more stable when the sealing structure is formed again.

[0042] Due to the setting of the cross-connecting plate 13, the middle material distribution structure 50 needs to be divided into two upper and lower sealing settings, and the two parts have different structures. Specifically: first, there is a second sealing crank sleeve 52 at the lower end, and the second sealing crank sleeve 52 includes a lower outer sealing sleeve 521 that fits with the lower end of the connecting arc plate 131, and the inner side of the lower outer sealing sleeve 521 is connected to the lower inner sealing arc sleeve 522 that fits with the inner wall of the connecting arc plate 131, and the lower inner sealing arc sleeve 522 is provided with a facing empty cylinder 523. The lateral opening of the facing empty cylinder 523 has a lower outer sealing sleeve 521 and a lower inner sealing arc sleeve 522 that fit with the connecting arc plate 131, thereby reducing the difficulty of sealing. The first sealing crank sleeve 51 at the upper end also includes an upper outer sealing sleeve 511 and an upper inner sealing sleeve arc sleeve 512 that cooperate with the connecting arc plate 131, but the second sealing crank sleeve 52 and the first sealing crank sleeve 51 The difference is that the second sealing crank sleeve 52 is provided with a facing empty cylinder 523, while the first sealing crank sleeve 51 is provided with a facing column tube 513. The first sealing crank sleeve 51 includes an upper outer sealing sleeve 511 that is in contact with the upper end of the connecting arc plate 131. The inner side of the upper outer sealing sleeve 511 is connected to the upper inner sealing sleeve arc sleeve 512 that is in contact with the inner side wall of the connecting arc plate 131. The lower end of the upper inner sealing sleeve arc sleeve 512 is provided with a facing column tube 513. The lateral opening of the facing column tube 513, when the first sealing crank sleeve 51 and the second sealing crank sleeve 52 are matched, the facing column tube 513 is embedded in the facing empty cylinder 523 through the through-hole 133, and the facing column tube 513 and the facing empty cylinder 523 are connected through the through-hole 133 via the blocking piece 135, so that the two can form a rapid point-to-point connection, thereby ensuring that a relatively complete circular structure can be formed.

[0043] After the second sealed crank sleeve 52 and the first sealed crank sleeve 51 form a circular structure, in order to ensure a stable fit between the two structures, the transverse connecting plate 132 of this embodiment is provided with a transverse threaded hole in the transverse direction corresponding to the position of the through hole 133, and the blocking piece 135 includes a stud portion 1351 that passes through the opposing column tube 513 and the opposing empty cylinder 523 and cooperates with the transverse threaded hole. The stud portion 1351 is provided with an external blocking portion 1352, and the external blocking portion 1352 closes the through hole 133. By providing a transverse threaded hole on the transverse connecting plate 132, a foundation is laid for cooperation with the blocking piece 135, so that the stud portion 1351 can pass through the opposing column tube 513 and the opposing empty cylinder 523, allowing the second sealed crank sleeve 52 and the first sealed crank sleeve 51 to form a whole, reducing the difficulty of subsequent gluing or welding.

[0044] The dynamic mixing stage of the entire mixer occurs at the position of the transverse connecting plate 132. Therefore, after the second sealed crank sleeve 52 and the first sealed crank sleeve 51 form a whole, the entire dynamic material distribution component 54 is also installed. Specifically, a rotating interface 1321 is provided in the middle of the transverse connecting plate 132. The dynamic material distribution component 54 includes a revolving ring 541 arranged in the rotating interface 1321. The top of the revolving ring 541 is provided with an upper mixing part 542. The lower end of the revolving ring 541 is connected to a lower mixing part 543. The upper mixing part 542 is connected to the output end of the driving member 53. The dynamic material distribution component 54 is divided into an upper mixing part 542 and a lower mixing part 543, so that the effect of dynamic uniform mixing can be achieved in two different areas, and can be regenerated as the second sealed crank sleeve 52 and the first sealed crank sleeve 51 are disassembled.

[0045] When the upper mixing section 542 mixes the raw materials, the upper mixing section 542 and the lower mixing section 543 have the same structure and size. The upper mixing section 542 includes a central column 5421 connected to the revolving ring 541. The central column 5421 is connected to the driving member 53. A semi-arc-shaped dispersion sheet 5422 is provided on the central column 5421. A plurality of dispersion holes are opened on the dispersion sheet 5422. The raw materials are dispersed through the small chambers formed by the plurality of dispersion sheets 5422, and then dispersedly disrupted and mixed, thereby achieving an efficient mixing effect. The entire process is in a high-speed operation state, thereby ensuring the uniformity of mixing.

[0046] In order to avoid friction when the dispersion piece 5422 cooperates with the inner wall of the pipe, a gasket 5423 is provided on the outer side of the dispersion piece 5422 , and the gasket 5423 is attached to the inner side of the first sealing crank sleeve 51 .

[0047] Although the dynamic material dividing member 54 is directly installed on the middle material dividing structure 50 to achieve its external detachable regeneration effect, the static mixing structure in the front section branch pipe 11 and the rear section 12 is also difficult to regenerate. Therefore, the present invention provides an axial material dividing structure 60 on the basis of the middle material dividing structure 50, and directly provides two static material dividing members 62 on the side positions of the first sealing crank sleeve 51 and the second sealing crank sleeve 52, so that the two static material dividing members 62 can be directly exposed after the first sealing crank sleeve 51 and the second sealing crank sleeve 52 are removed, so that the coating on the static material dividing member 62 can be directly regenerated from the outside, thereby achieving the regeneration effect of the static and dynamic mixing members without the need for tedious operations, thereby maintaining the mixing effect of the mixer for a long time.

[0048] If the static material part 62 is set at the inner side, it is difficult to infiltrate or spray during the coating regeneration. Therefore, the mounting groove 61 of this embodiment includes an inner cavity 611, and a plurality of outward expansion grooves 612 are provided on the inner side of the inner cavity 611. The outer edge of the outward expansion groove 612 is provided with an outer spring piece 613. After the static material part 62 opens the outer spring piece 613, it is clamped into the inner cavity 611 and the outward expansion groove 612. The static material part 62 includes a clamping ring 621 that cooperates with the inner cavity 611. A plurality of outward expansion pads 622 are provided on the outer side of the clamping ring 621. A spiral sheet 623 is provided on the inner side of 21, and the outer edge of the clamping ring 621 is fitted on the outer side of the first sealing crank sleeve 51 and the second sealing crank sleeve 52. The static material part 62 is fixed on the inner side of the mounting groove 61, and the clamping ring 621 and the outward expansion pad 622 of the static material part 62 are matched with the outer spring piece 613 and the outward expansion groove 612, thereby forming self-fixation, and then the clamping ring 621 on the static material part 62 is squeezed on the side of the middle material part structure 50, so that the static material part 62 is close to the middle material part structure 50 and can achieve the effect of static mixing.

[0049] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A mixer for preparing high-purity electronic grade thionyl fluoride, characterized in that: The invention comprises a mixing tube (10) for mixing materials, wherein the mixing tube (10) is provided with an anhydrous hydrogen fluoride feed end (20) and a thionyl chloride feed end (30), and a discharge end (40) is provided at one end of the mixing tube (10) away from the thionyl chloride feed end (30). The invention also comprises: A middle material dividing structure (50), wherein the mixing tube (10) comprises a front section branch pipe (11) provided with an anhydrous hydrogen fluoride feed end (20) and a thionyl chloride feed end (30) and a rear section segment (12) provided with a discharge end (40), wherein the middle positions of the front section branch pipe (11) and the rear section segment (12) are connected via a cross-connecting plate (13), wherein the middle material dividing structure (50) comprises a first sealing crank sleeve (51) provided at the upper end of the cross-connecting plate (13), wherein the lower end of the cross-connecting plate (13) is connected to a second sealing crank sleeve (52), wherein a driving member (53) is provided on a side of the first sealing crank sleeve (51) away from the cross-connecting plate (13), and wherein the output end of the driving member (53) is connected to a dynamic material dividing member (54) which penetrates the cross-connecting plate (13) and is located in the first sealing crank sleeve (51) and the second sealing crank sleeve (52); The axial material distribution structure (60) is provided with a mounting groove (61) on one side of the front section branch pipe (11) and the rear section segment (12) close to the cross-connecting plate (13). A static material distribution member (62) is movably provided in the mounting groove (61). The first sealing crank sleeve (51) and the second sealing crank sleeve (52) are connected to the rear side of the cross-connecting plate (13) and respectively abut against the two static material distribution members (62). The raw materials entering through the anhydrous hydrogen fluoride feed end (20) and the thionyl chloride feed end (30) are distributed by the static material distribution member (62) at the front end, mixed by the dynamic material distribution member (54), and then distributed by the static material distribution member (62) at the rear end.

2. A mixer for preparing high-purity electronic-grade thionyl fluoride according to claim 1, characterized in that: The transverse connecting plate (13) comprises two connecting arc plates (131) connected between the front section branch pipe (11) and the rear section branch pipe (12), a transverse connecting plate (132) is connected between the two connecting arc plates (131), a pair of through holes (133) are formed on the transverse connecting plate (132), and a blocking member (135) is locked on the pair of through holes (133).

3. A mixer for preparing high-purity electronic-grade thionyl fluoride according to claim 2, characterized in that: The second sealed crank sleeve (52) comprises a lower outer sealing sleeve (521) fitted with the lower end of the connecting arc plate (131); the inner side of the lower outer sealing sleeve (521) is connected to a lower inner sealing arc sleeve (522) fitted with the inner side wall of the connecting arc plate (131); the lower inner sealing arc sleeve (522) is provided with a facing hollow cylinder (523), and the facing hollow cylinder (523) has a lateral opening.

4. A mixer for preparing high-purity electronic-grade thionyl fluoride according to claim 3, characterized in that: The first sealing crank sleeve (51) includes an upper outer sealing sleeve (511) fitted with the upper end of the connecting arc plate (131), the inner side of the upper outer sealing sleeve (511) is connected to an upper inner sealing sleeve arc sleeve (512) fitted with the inner side wall of the connecting arc plate (131), and the lower end of the upper inner sealing sleeve arc sleeve (512) is provided with a facing column tube (513), and the lateral opening of the facing column tube (513) is provided. When the first sealing crank sleeve (51) and the second sealing crank sleeve (52) are matched, the facing column tube (513) is embedded in the facing empty cylinder (523) through the facing through hole (133), and the facing column tube (513) and the facing empty cylinder (523) are connected through the facing through hole (133) via the blocking member (135).

5. A mixer for preparing high-purity electronic-grade thionyl fluoride according to claim 4, characterized in that: The transverse connecting plate (132) is provided with a transverse threaded hole in the transverse direction corresponding to the position of the through hole (133); the blocking member (135) includes a stud portion (1351) that passes through the opposite column tube (513) and the opposite hollow cylinder (523) and cooperates with the transverse threaded hole; an external blocking portion (1352) is provided on the stud portion (1351), and the external blocking portion (1352) closes the through hole (133).

6. A mixer for preparing high-purity electronic-grade thionyl fluoride according to claim 5, characterized in that: A rotary interface (1321) is provided in the middle of the transverse connecting plate (132), the dynamic material distribution member (54) comprises a revolving ring (541) arranged in the revolving interface (1321), an upper mixing portion (542) is provided at the top of the revolving ring (541), a lower end of the revolving ring (541) is connected to a lower mixing portion (543), and the upper mixing portion (542) is connected to the output end of the driving member (53).

7. A mixer for preparing high-purity electronic-grade thionyl fluoride according to claim 6, characterized in that: The upper mixing section (542) and the lower mixing section (543) have the same structure and size. The upper mixing section (542) includes an axial column (5421) connected to the revolving ring (541). The axial column (5421) is connected to the driving member (53). A semi-arc-shaped dispersion sheet (5422) is provided on the axial column (5421). A plurality of dispersion holes are opened on the dispersion sheet (5422).

8. A mixer for preparing high-purity electronic-grade thionyl fluoride according to claim 7, characterized in that: A gasket (5423) is provided on the outer side of the dispersion sheet (5422), and the gasket (5423) is fitted on the inner side of the first sealing crank sleeve (51).

9. A mixer for preparing high-purity electronic-grade thionyl fluoride according to claim 1, characterized in that: The mounting groove (61) includes an inner cavity (611), a plurality of outer expansion grooves (612) are provided on the inner side of the inner cavity (611), and outer spring pieces (613) are provided on the outer edges of the outer expansion grooves (612). The static material component (62) stretches out the outer spring pieces (613) and then snaps into the inner cavity (611) and the outer expansion grooves (612).

10. A mixer for preparing high-purity electronic-grade thionyl fluoride according to claim 9, characterized in that: The static material part (62) includes a clamping ring (621) that cooperates with the built-in cavity (611), a plurality of outward expansion pads (622) are provided on the outside of the clamping ring (621), a spiral sheet (623) is provided on the inside of the clamping ring (621), and the outer edge of the clamping ring (621) is attached to the outside of the first sealing crank sleeve (51) and the second sealing crank sleeve (52).

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