TEOS solution feeding device

Abstract

The invention discloses a TEOS solution feeding device, and relates to the field of TEOS solution feeding devices.The TEOS solution feeding device comprises a main box body, a liquid feeding pump is installed in the main box body, the liquid feeding pump is connected with a liquid feeding pipe, the liquid feeding pump is connected with a bubble remover through a guide pipe, the bubble remover is connected with an electromagnetic valve through a flow meter, and the electromagnetic valve is connected with the liquid feeding pipe. The electromagnetic valve is connected with a control valve through a guide pipe, and the control valve is connected with a nitrogen storage tank through a nitrogen pipe. According to the TEOS solution feeding device, the self-locking connecting mechanism with a two-way self-locking function is adopted, when the valve seat and the threaded connector are not connected, self-locking of the valve rod can be achieved, a TEOS solution in the liquid storage barrel is splashed outwards due to the fact that the valve plate is mistakenly touched and opened, and after the valve seat and the threaded connector are connected, the self-locking function of the threaded connector and the valve seat can be achieved; pollution caused by overflow of TEOS gas in the liquid storage barrel due to separation of the screwed joint and the valve seat when the valve plate is not closed is avoided, and the use safety of the device is effectively guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of TEOS solution feeding devices, in particular to a TEOS solution feeding device. Background Art

[0002] TEOS solution has a high deposition rate and good uniformity. It is a commonly used precursor in semiconductor processes and is mainly used to prepare various silicon-based materials. In the semiconductor processing process, in order to prevent dry burning, the TEOS solution supply system needs to be replenished regularly. If the TEOS solution is not fully volatile, and the TEOS gas is not toxic, it will cause environmental pollution if it is discharged into the environment. TEOS solution is generally stored in a sealed tank with a valve installed on the upper end. Due to the volatilization of the TEOS solution, the TEOS solution infusion tube is in a positive pressure state. Subsequently, the infusion and feeding system is directly connected to the valve of the storage tank to achieve the delivery of the TEOS solution. However, in the current operation process, if the TEOS solution storage tank is replaced, when the upper valve of the storage tank that has consumed the TEOS solution is not closed, the infusion and feeding system is disconnected from the valve, the TEOS gas retained in the TEOS solution storage tank will overflow and cause environmental pollution. In addition, when the upper valve of the new storage tank storing the TEOS solution is connected to the infusion and feeding system, if the valve is opened by mistake before the connection is completed, the TEOS solution in the new storage tank will splash out under the action of the positive pressure inside the storage tank, causing a safety accident. Summary of the Invention

[0003] The object of the present invention is to provide a TEOS solution feeding device to solve the problems raised in the above background technology.

[0004] To achieve the above object, the present invention provides the following technical solution: a TEOS solution feeding device, comprising a main box, wherein a liquid feeding pump is installed in the main box, the liquid feeding pump and a liquid feeding pipe are interconnected, the liquid feeding pump is interconnected with a debubbler via a conduit, the debubbler is interconnected with a flow meter and a solenoid valve, the solenoid valve is interconnected with a control valve via a conduit, and the control valve is interconnected with a nitrogen storage tank via a nitrogen pipe; A self-locking connection mechanism, which is used to prevent the escape of TEOS evaporated gas in the liquid storage barrel through bidirectional self-locking of the self-locking connection mechanism, wherein the self-locking connection mechanism is interconnected with the solenoid valve through a conduit, and the self-locking connection mechanism is interconnected with the liquid storage barrel; The material moving mechanism realizes the automatic loading and unloading of the liquid storage barrel by moving and lifting the material moving mechanism. The material moving mechanism is installed in the main box body. The liquid storage barrel is placed on the material moving mechanism, and a liquid infusion tube is installed in the liquid storage barrel.

[0005] Preferably, a control panel is installed on the left side of the front end surface of the main box body, and a positioning frame is installed in the main box body, and the positioning frame is in contact with the liquid storage barrel. At the same time, the main box body is installed with a switchable box door, and the positioning frame can realize the positioning of the liquid storage barrel.

[0006] Preferably, the self-locking connection mechanism includes a valve seat fixed on the upper end surface of the liquid storage barrel, and a valve stem is connected to the bearing on the valve seat, and a valve plate is installed on the valve stem. At the same time, a cam is fixed symmetrically on the left and right of the valve stem. The cam is arranged in the valve seat. The valve structure is formed by the above structure to control the opening and closing of the liquid storage barrel.

[0007] Preferably, a first permanent magnet plate is slidably connected to the valve seat, and a spring is fixed between the first permanent magnet plate and the valve seat, and the springs are distributed at equal angles about the center of the valve seat. A limit rod is fixed symmetrically on the upper end surface of the first permanent magnet plate, and the limit rod cooperates with the circular hole on the cam to achieve a positioning effect. Through the positioning effect between the limit rod and the cam, the function of the valve stem can be realized, thereby preventing the limit rod from rotating.

[0008] Preferably, a movable plate made of plastic is slidably connected to the valve seat, and protrusions are fixed at equal angles on the side of the movable plate, and the protrusions are slidably connected to the valve seat. At the same time, latch teeth are evenly fixed on the upper end surface of the movable plate. The movable plate is slidably connected in contact with the cam, and the valve seat is connected to the infusion tube. The sliding connection between the movable plate and the cam and the self-gravity of the movable plate can provide a basic guarantee for the movement of the movable plate.

[0009] Preferably, the valve seat and the connector are sealed by a sealing ring, and a threaded joint is fixed on the connector, and the threaded joint and the valve seat are threadedly connected. The connector is connected to the solenoid valve through a conduit. Through the above structure, the threaded connection and disassembly of the valve seat and the connector can be realized, thereby improving the convenience of disassembly and assembly of the device.

[0010] Preferably, a second permanent magnet plate is also fixed to the lower end surface of the connecting head, and the second permanent magnet plate and the opposite magnetic poles of the first permanent magnet plate are the same to form a magnetic repulsion structure, and a clamping block is evenly fixed to the lower end surface of the second permanent magnet plate, and the clamping block cooperates with the clamping teeth to realize the positioning effect. Through the clamping action between the clamping block and the clamping teeth, the self-locking effect between the connecting head and the valve seat can be realized, thereby preventing the connecting head from separating from the valve seat.

[0011] Preferably, the material moving mechanism includes a hydraulic rod fixed in the main box body, and a fixed plate is fixed to the output end of the hydraulic rod, and the fixed plate and the vertical rod are slidably connected. At the same time, the vertical rod is symmetrically fixed on the movable frame. Through the above structure, the height adjustment of the movable frame can be realized, which is convenient for loading and unloading the liquid storage barrel.

[0012] Preferably, a sliding connection is formed between the movable frame and the main box body, and rollers are connected to equally spaced bearings on the movable frame, and the rollers are in contact with the liquid storage barrel. The rolling action of the rollers can facilitate the movement of the liquid storage barrel.

[0013] Preferably, a bracket is fixed symmetrically on the left and right of the movable frame, and a roller is connected to the bearing on the bracket, and the roller rolls in contact with the guide frame. At the same time, an inclined structure is provided near the front side of the guide frame. Through the sliding action between the roller and the guide frame, a basic guarantee can be provided for realizing the height adjustment of the movable frame, thereby improving the convenience of loading and unloading the liquid storage barrel.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. This TEOS solution feeding device adopts a self-locking connection mechanism with bidirectional self-locking. When the valve seat and threaded joint are not connected, the valve stem is self-locked, preventing the valve plate from accidentally opening and causing TEOS solution in the liquid storage barrel to splash out. After the valve seat and threaded joint are connected, the threaded joint and valve seat are self-locked, preventing the threaded joint and valve seat from separating when the valve plate is not closed, which may cause TEOS gas in the liquid storage barrel to overflow and cause pollution, effectively ensuring the safety of the device. 2. The TEOS solution feeding device adopts a highly adjustable material transfer mechanism, which can facilitate the loading and unloading of the liquid storage barrel, avoiding the difficulty in loading and unloading the liquid storage barrel due to the heavy overall mass of the liquid storage barrel, and effectively improving the convenience of device operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the front cross-sectional three-dimensional structure of the main box of the present invention; Figure 2 This is a schematic side view of the overall three-dimensional structure of the device of the present invention; Figure 3 This is a schematic diagram of the top-view cross-sectional three-dimensional structure of the main box of the present invention; Figure 4 This is a schematic diagram of the cross-sectional three-dimensional structure of the self-locking connection mechanism and the liquid storage barrel of the present invention; Figure 5 This is a schematic diagram of the exploded three-dimensional structure of the self-locking connection mechanism of the present invention; Figure 6 This is a schematic diagram of the three-dimensional structure of the valve plate and the first permanent magnet plate of the present invention; Figure 7 This is a schematic diagram of a front cross-sectional three-dimensional structure of the self-locking connection mechanism of the present invention; Figure 8 It is a rear perspective structural diagram of the material transfer mechanism of the present invention.

[0016] Figure: 1, main box; 101, control panel; 102, positioning frame; 103, box door; 2, liquid delivery pump; 3, liquid delivery pipe; 4, debubbler; 5, flow meter; 6, solenoid valve; 7, self-locking connection mechanism; 701, valve seat; 702, valve stem; 703, valve plate; 704, cam; 705, first permanent magnet plate; 706, spring; 707, limit rod; 708, movable plate; 709, convex Block; 710, latching teeth; 711, connector; 712, threaded joint; 713, second permanent magnet plate; 714, latching block; 8, liquid storage barrel; 801, infusion tube; 9, material transfer mechanism; 901, hydraulic rod; 902, fixed plate; 903, vertical rod; 904, movable frame; 905, roller; 906, bracket; 907, roller; 908, guide frame; 10, nitrogen pipe; 11, control valve. DETAILED DESCRIPTION

[0017] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0018] See also Figures 1-8 The present invention provides a technical solution: a TEOS solution feeding device, comprising a main box 1, a liquid feeding pump 2 installed in the main box 1, the liquid feeding pump 2 and the liquid feeding pipe 3 are interconnected, the liquid feeding pump 2 is interconnected with a debubbler 4 through a conduit, the debubbler 4 is interconnected with a solenoid valve 6 through a flow meter 5, the solenoid valve 6 is interconnected with a control valve 11 through a conduit, and the control valve 11 is interconnected with a nitrogen storage tank through a nitrogen pipe 10; A self-locking connection mechanism 7, which is used to prevent the escape of TEOS evaporated gas in the liquid storage barrel 8 through bidirectional self-locking of the self-locking connection mechanism 7. The self-locking connection mechanism 7 is interconnected with the solenoid valve 6 through a conduit, and the self-locking connection mechanism 7 is interconnected with the liquid storage barrel 8; The material moving mechanism 9 realizes the automatic loading and unloading of the liquid storage barrel 8 by moving and lifting the material moving mechanism 9. The material moving mechanism 9 is installed in the main box 1. The liquid storage barrel 8 is placed on the material moving mechanism 9, and the liquid storage barrel 8 is installed with an infusion tube 801.

[0019] A control panel 101 is installed on the left side of the front end face of the main box body 1, and a positioning frame 102 is installed in the main box body 1, and the positioning frame 102 is in contact with the liquid storage barrel 8, and the main box body 1 is installed with a switchable box door 103; the material moving mechanism 9 includes a hydraulic rod 901 fixed in the main box body 1, and the output end of the hydraulic rod 901 is fixed with a fixed plate 902, and the fixed plate 902 and the vertical rod 903 are slidably connected, and the vertical rod 903 is symmetrically fixed on the movable frame 904; the movable frame 904 is slidably connected to the main box body 1, and the movable frame 904 is connected to rollers 905 with equidistant bearings, and the rollers 905 are in contact with the liquid storage barrel 8; the movable frame 904 is also symmetrically fixed with brackets 906, and the brackets 906 are connected to rollers 907 with bearings, and the rollers 907 are in contact and roll with the guide frame 908, and the guide frame 908 is provided with an inclined structure near the front side; When using the TEOS solution feeding device, if Figures 1-8 As shown, when the liquid storage barrel 8 is loaded, the hydraulic rod 901 is first controlled to extend, thereby driving the fixed plate 902, the vertical rod 903 and the movable frame 904 to move forward. At this time, the roller 907 rolls with the rear plane of the guide frame 908 to ensure the stability of the movement of the fixed plate 902, the vertical rod 903 and the movable frame 904. When the movable frame 904 is completely moved out of the main box body 1, the roller 907 just contacts the inclined surface structure of the guide frame 908. At this time, the hydraulic rod 901 continues to extend, and with the gravity of the fixed plate 902, the vertical rod 903 and the movable frame 904, the sliding action of the roller 907 and the inclined surface of the guide frame 908 and the sliding action between the fixed plate 902 and the vertical rod 903, the fixed plate 902, the vertical rod 903 and the movable frame 904 can be moved downward until the roller 907 is separated from the inclined surface structure of the guide frame 908. When the lifting mechanism 902 is lifted, the lifting mechanism 903 is lifted and the lifting mechanism 904 is lifted. When the lifting mechanism 902 is lifted, the lifting mechanism 903 is lifted and the lifting mechanism 904 is lifted. When the lifting mechanism 902 is lifted, the lifting mechanism 903 is lifted and the lifting mechanism 904 is lifted. When the lifting mechanism 902 is lifted, the lifting mechanism 904 is lifted and the lifting mechanism 904 is lifted. When the lifting mechanism 902 is lifted, the lifting mechanism 904 is lifted and the lifting mechanism 904 is lifted. When the lifting mechanism 902 is lifted, the lifting mechanism 904 is lifted and the lifting mechanism 904 is lifted The self-locking connection mechanism 7 includes a valve seat 701 fixed to the upper end surface of the liquid storage barrel 8, and a valve stem 702 is connected to the bearing on the valve seat 701, and a valve plate 703 is installed on the valve stem 702, and a cam 704 is fixed to the valve stem 702 on the left and right, and the cam 704 is arranged in the valve seat 701; a first permanent magnet plate 705 is slidably connected to the valve seat 701, and a spring 706 is fixed between the first permanent magnet plate 705 and the valve seat 701, and the springs 706 are distributed at equal angles with respect to the center of the valve seat 701, and a limit rod 707 is fixed to the upper end surface of the first permanent magnet plate 705 on the left and right, and the limit rod 707 cooperates with the circular hole on the cam 704 to achieve a positioning effect; a movable plate 708 made of plastic is slidably connected to the valve seat 701, and a protrusion 709 is fixed at equal angles on the side of the movable plate 708, and The protrusion 709 is in sliding connection with the valve seat 701, and the upper end surface of the movable plate 708 is evenly fixed with latch teeth 710. The movable plate 708 is in contact and sliding connection with the cam 704, and the valve seat 701 is connected to the infusion tube 801; the valve seat 701 and the connector 711 are sealed by a sealing ring, and a threaded joint 712 is fixed on the connector 711, and the threaded joint 712 and the valve seat 701 are threadedly connected, and the connector 711 is connected to the solenoid valve 6 through a conduit; a second permanent magnet plate 713 is also fixed to the lower end surface of the connector 711, and the second permanent magnet plate 713 and the first permanent magnet plate 705 have the same magnetic poles on the opposite sides to form a magnetic repulsion structure, and the lower end surface of the second permanent magnet plate 713 is evenly fixed with latch blocks 714, and the latch blocks 714 cooperate with the latch teeth 710 to achieve a positioning effect; After the liquid storage tank 8 is loaded, Figures 1-8As shown, at this time, the valve plate 703 cooperates with the valve seat 701 to achieve sealing, and under the elastic action of the spring 706, the limiting rod 707 is nested with the circular hole on the cam 704 to achieve self-locking of the valve stem 702, thereby preventing the valve plate 703 from being accidentally opened, and at this time, the movable plate 708 is in contact with the plane of the cam 704 under the action of its own gravity. When the valve seat 701 and the connecting head 711 are connected, the valve seat 701 and the connecting head 711 can be assembled through the threaded connection between the threaded joint 712 and the valve seat 701, and during the threaded connection process, when the second permanent magnet plate 713 approaches the first permanent magnet plate 705, since the opposite magnetic poles of the second permanent magnet plate 713 and the first permanent magnet plate 705 are the same, under the action of magnetic repulsion, the valve plate 703 is opened. After the first permanent magnet plate 705 is forced to slide downward, the spring 706 is forced to contract. When the valve seat 701 and the connecting head 711 are fully connected, the magnetic repulsion between the second permanent magnet plate 713 and the first permanent magnet plate 705 is the largest, and when the first permanent magnet plate 705 moves downward, the limit rod 707 is synchronously driven to move downward. When the valve seat 701 and the connecting head 711 are fully connected, the limit rod 707 and the circular hole on the cam 704 are in a separated state, thereby realizing the unlocking effect of the valve stem 702, and at this time the block 714 and the latch tooth 710 are separated and lifted. According to the above principle, if the valve seat 701 and the connecting head 711 are not connected, the valve stem 702 is in a self-locking state and the valve plate 703 cannot be opened, which effectively avoids the problem of accidental opening and ensures the use of the device. 701 and 711 are in contact with each other, and the movable plate 708 is moved upward by force, thereby driving the latch 710 to move upward, so that the latch 710 engages with the block 714, thereby realizing the self-locking connection between the valve seat 701 and the connector 711. When the valve plate 703 is opened, the valve seat 701 and the connecting head 711 cannot be disassembled. According to the above principle, when the valve seat 701 and the connecting head 711 need to be disassembled, the valve stem 702 needs to be rotated 90 degrees in the opposite direction first, so that the cam 704 rotates from the convex surface contacting the movable plate 708 to the flat surface of the cam 704 contacting the movable plate 708. At this time, under the action of the movable plate 708's own gravity, the movable plate 708 automatically slides downward, thereby separating the latching teeth 710 from the blocking block 714, releasing the lock, so as to facilitate the normal disassembly of the valve seat 701 and the connecting head 711. After the valve seat 701 and the connecting head 711 are disassembled, the first permanent magnet plate 705 and the limit rod 707 are reset under the elastic action of the spring 706.Thus, the limiting rod 707 cooperates with the circular hole on the cam 704 to achieve locking again. In summary, the bidirectional self-locking effect of the self-locking connection mechanism 7 can effectively ensure the safety of the device and prevent the TEOS solution or TEOS gas from overflowing and polluting the environment. During the liquid delivery process, Figures 1-4 As shown, first open the two solenoid valves 6, at this time the valve plate 703 is in a closed state, and open the control valve 11, so that the high-pressure nitrogen in the nitrogen storage tank can enter the liquid delivery system pipeline through the nitrogen pipe 10, and the nitrogen can achieve the purging effect of the liquid delivery system pipeline. After the purging is completed, close the control valve 11. When delivering liquid, first open the left solenoid valve 6, close the right solenoid valve 6, and open the left and right valve plates 703 at the same time. With the action of the liquid delivery pump 2, the TEOS solution in the liquid storage barrel 8 can be delivered through the infusion pipe 801, the catheter and the liquid delivery pipe 3 to realize semiconductor processing equipment. The automatic liquid feeding and feeding function is realized, and in the process of conveying, the flow meter 5 can realize flow measurement, and the debubbler 4 can effectively remove bubbles in the solution to ensure the stability of the infusion. In the process of continuous infusion, when the TEOS solution in the left liquid storage barrel 8 is consumed, the flow meter 5 cannot detect the flow and feed back relevant information to the controller. The controller controls the left solenoid valve 6 to close and the right solenoid valve 6 to open, thereby realizing the delivery of the TEOS solution in the right liquid storage barrel 8, making it convenient for the staff to replace the left liquid storage barrel 8, and ensuring the continuity and stability of the TEOS solution delivery.

[0020] It should be noted that, in this article, the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements that are inherent to such process, method, article or apparatus.

[0021] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method of the present invention and its core ideas. The above is only a preferred implementation method of the present invention. It should be pointed out that due to the limitations of textual expression, there are objectively infinite specific structures. For ordinary technicians in this technical field, without departing from the principles of the present invention, they can make several improvements, modifications or changes, and can also combine the above technical features in an appropriate manner; these improvements, modifications, changes or combinations, or the direct application of the inventive concept and technical solution to other occasions without improvement, should be regarded as the scope of protection of the present invention.

Claims

1. A TEOS solution feeding device, comprising a main box (1), wherein a liquid feeding pump (2) is installed in the main box (1), and the liquid feeding pump (2) is connected to a liquid feeding pipe (3), characterized in that: The liquid delivery pump (2) is connected to the debubbler (4) via a conduit, the debubbler (4) is connected to the flow meter (5) and the electromagnetic valve (6), the electromagnetic valve (6) is connected to the control valve (11) via a conduit, and the control valve (11) is connected to the nitrogen storage tank via a nitrogen pipe (10); A self-locking connection mechanism (7) is used to prevent the escape of TEOS evaporated gas in the liquid storage barrel (8) through bidirectional self-locking of the self-locking connection mechanism (7), wherein the self-locking connection mechanism (7) is interconnected with the solenoid valve (6) through a conduit, and the self-locking connection mechanism (7) is interconnected with the liquid storage barrel (8); The material transfer mechanism (9) realizes the automatic loading and unloading of the liquid storage barrel (8) by moving and lifting the material transfer mechanism (9), wherein the material transfer mechanism (9) is installed in the main box (1), the liquid storage barrel (8) is placed on the material transfer mechanism (9), and a liquid infusion tube (801) is installed in the liquid storage barrel (8).

2. A TEOS solution feeding device according to claim 1, characterized in that: A control panel (101) is installed on the left side of the front end of the main box (1), and a positioning frame (102) is installed in the main box (1), and the positioning frame (102) is in contact with the liquid storage barrel (8). At the same time, a switchable box door (103) is installed on the main box (1).

3. A TEOS solution feeding device according to claim 1, characterized in that: The self-locking connection mechanism (7) includes a valve seat (701) fixed to the upper end surface of the liquid storage barrel (8), a valve stem (702) is connected to the bearing on the valve seat (701), and a valve plate (703) is installed on the valve stem (702). At the same time, a cam (704) is fixed to the valve stem (702) in a left-right symmetrical manner, and the cam (704) is arranged in the valve seat (701).

4. A TEOS solution feeding device according to claim 3, characterized in that: A first permanent magnet plate (705) is slidably connected to the valve seat (701), and a spring (706) is fixed between the first permanent magnet plate (705) and the valve seat (701), and the springs (706) are distributed at equal angles with respect to the center of the valve seat (701). A limiting rod (707) is fixed symmetrically on the upper end surface of the first permanent magnet plate (705), and the limiting rod (707) cooperates with the circular hole on the cam (704) to achieve a positioning effect.

5. A TEOS solution feeding device according to claim 4, characterized in that: A movable plate (708) made of plastic is slidably connected inside the valve seat (701), and protrusions (709) are fixed at equal angles on the side of the movable plate (708), and the protrusions (709) are slidably connected to the valve seat (701). At the same time, teeth (710) are evenly fixed on the upper end surface of the movable plate (708). The movable plate (708) is in contact and slidably connected with the cam (704), and the valve seat (701) is connected to the infusion tube (801).

6. A TEOS solution feeding device according to claim 5, characterized in that: The valve seat (701) and the connector (711) are sealed via a sealing ring, a threaded joint (712) is fixed to the connector (711), and the threaded joint (712) and the valve seat (701) are threadedly connected, and the connector (711) is connected to the solenoid valve (6) via a conduit.

7. A TEOS solution feeding device according to claim 6, characterized in that: A second permanent magnet plate (713) is also fixed to the lower end surface of the connector (711), and the second permanent magnet plate (713) and the first permanent magnet plate (705) have the same magnetic poles on opposite sides to form a magnetic repulsion structure, and a clamping block (714) is evenly fixed to the lower end surface of the second permanent magnet plate (713), and the clamping block (714) cooperates with the clamping teeth (710) to achieve a positioning effect.

8. A TEOS solution feeding device according to claim 1, characterized in that: The material moving mechanism (9) comprises a hydraulic rod (901) fixed in the main box (1), and a fixed plate (902) is fixed to the output end of the hydraulic rod (901), and the fixed plate (902) is slidably connected to the vertical rod (903), and the vertical rod (903) is fixed to the movable frame (904) in a left-right symmetrical manner.

9. A TEOS solution feeding device according to claim 8, characterized in that: The movable frame (904) is in sliding connection with the main box (1), and rollers (905) are connected to the movable frame (904) at equal intervals through bearings, and the rollers (905) are in contact with the liquid storage barrel (8).

10. A TEOS solution feeding device according to claim 9, characterized in that: The movable frame (904) is also symmetrically fixed with a bracket (906), and the bracket (906) is connected to a roller (907) via a bearing, and the roller (907) rolls in contact with the guide frame (908), and the guide frame (908) is provided with an inclined surface structure near the front side.

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