Heating and stretching equipment and preparation process of quartz tube

Abstract

The embodiment of the invention provides heating and stretching equipment and a preparation process of a quartz tube, and relates to the technical field of quartz tube preparation, and the heating and stretching equipment comprises an equipment main body which is used for heating and stretching a quartz mother tube so as to enable the quartz mother tube to form the quartz tube; the gas inlet pipeline is used for being communicated with the interior of the quartz mother pipe, and the gas inlet pipeline is configured to introduce gas into the quartz mother pipe so as to control the pipe diameter of the quartz pipe through the gas; and the diameter measuring piece is used for measuring the actual pipe diameter value of the currently formed quartz pipe, so that the gas inlet pipeline adjusts the ventilation capacity and / or ventilation pressure of the gas according to the deviation between the actual pipe diameter value and the target pipe diameter value of the quartz pipe. According to the heating and stretching equipment and the preparation process of the quartz tube provided by the embodiment of the invention, the problem that the tube diameter fluctuation is relatively large after the quartz tube is prepared in the prior art is solved.

Description

Technical Field

[0001] The present application relates to the technical field of quartz tube preparation, and in particular to a heating and stretching device and a preparation process of a quartz tube. Background Art

[0002] A quartz tube generally refers to a quartz glass tube used to manufacture an optical fiber preform, which makes the quartz tube play an important role in the process of preparing an optical fiber preform.

[0003] In the related art, after a quartz mother tube is prepared through deposition and dehydroxylation steps, the quartz mother tube is heated at high temperature and stretched. During the stretching process, the quartz mother tube is gradually elongated while the tube diameter is gradually reduced, thereby preparing a quartz tube.

[0004] However, the quartz tubes prepared by the above-mentioned preparation method have large fluctuations in tube diameter. Summary of the Invention

[0005] The embodiments of the present application provide a heating and stretching device and a quartz tube preparation process to solve the problem of large fluctuations in the diameter of the quartz tube after preparation in the prior art.

[0006] In one aspect, an embodiment of the present application provides a heating and stretching device, comprising:

[0007] An apparatus body, the apparatus body being used to heat and stretch a quartz mother tube to form the quartz mother tube into a quartz tube;

[0008] An air inlet pipeline, the air inlet pipeline is used to communicate with the interior of the quartz mother tube, and the air inlet pipeline is configured to pass gas into the quartz mother tube to control the diameter of the quartz tube through the gas;

[0009] A diameter measuring piece is used to measure the actual diameter value of the currently formed quartz tube, so that the air inlet pipeline adjusts the ventilation volume and / or ventilation pressure of the gas according to the deviation between the actual diameter value and the target diameter value of the quartz tube.

[0010] In a possible implementation manner, a pressure detection component is provided on the air intake pipeline, and the pressure detection component is used to detect the pressure of the gas in the air intake pipeline.

[0011] In one possible implementation, the device body includes:

[0012] A heating element, the heating element being used to heat the quartz mother tube;

[0013] A drawing piece is used to draw the heated quartz mother tube to form the quartz tube.

[0014] On the other hand, an embodiment of the present application provides a process for preparing a quartz tube, comprising the following steps:

[0015] The quartz mother tube is heated and stretched by using the main body of the heating and stretching device, and gas is introduced into the quartz mother tube through the air inlet pipe of the heating and stretching device to produce a quartz tube;

[0016] The actual diameter of the quartz tube currently being formed is measured by the diameter measuring member in the heating and stretching device, and the ventilation volume and / or ventilation pressure in the air inlet pipe are adjusted according to the deviation between the actual diameter and the target diameter.

[0017] In a possible implementation manner, before using the heating and stretching device to heat and stretch the quartz mother tube, the method further includes:

[0018] The diameter of the quartz mother tube is measured, and corresponding stretching speeds are set according to the tube diameter values at different positions of the quartz mother tube.

[0019] In a possible implementation manner, before using the heating and stretching device to heat and stretch the quartz mother tube, the method further includes:

[0020] Pickling the quartz mother tube;

[0021] Clean the residual acid on the quartz mother tube.

[0022] In a possible implementation, the heating and stretching device is used to heat and stretch the quartz mother tube, wherein the heating temperature gradually increases with the stretching time and / or the stretching position of the quartz mother tube.

[0023] In a possible implementation, adjusting the ventilation volume and / or ventilation pressure in the intake pipe according to the deviation between the actual pipe diameter value and the target pipe diameter value includes:

[0024] When the actual pipe diameter value is greater than the target pipe diameter value, reducing the ventilation volume and / or ventilation pressure in the intake pipe;

[0025] When the actual pipe diameter value is smaller than the target pipe diameter value, the ventilation volume and / or ventilation pressure in the intake pipe is increased.

[0026] In a possible implementation, the method further includes:

[0027] Powder rods are obtained by deposition;

[0028] Dehydroxylating and melting the powder rod to form a quartz mother rod;

[0029] A hole is opened on the quartz mother rod, and the quartz mother rod with the hole opened is polished to form the quartz mother tube.

[0030] In one possible embodiment, the dehydroxylation and melting of the powder rod to form a quartz mother rod includes:

[0031] Dehydroxylating and melting the powder rod to form a quartz cylinder;

[0032] The quartz cylinder is stretched to form the quartz mother rod.

[0033] An embodiment of the present application provides a heating and stretching device and a preparation process for a quartz tube, wherein the heating and stretching device includes: an equipment body, the equipment body is used to heat and stretch a quartz mother tube to form a quartz tube from the quartz mother tube; an air inlet pipeline, the air inlet pipeline is used to connect to the interior of the quartz mother tube, and the air inlet pipeline is configured to introduce gas into the quartz mother tube to control the diameter of the quartz tube through the gas; a diameter measuring part, the diameter measuring part is used to measure the actual diameter value of the currently formed quartz tube, so that the air inlet pipeline adjusts the gas ventilation volume and / or ventilation pressure according to the deviation between the actual diameter value and the target diameter value of the quartz tube. Therefore, during implementation, the quartz mother tube is heated and stretched by the device main body, and gas is introduced into the quartz mother tube through the air inlet pipe to produce a quartz tube; in the process of stretching the quartz mother tube into the quartz tube, the actual tube diameter value of the currently formed quartz tube is also measured by the diameter measuring piece, and according to the deviation between the actual tube diameter value and the target tube diameter value of the quartz tube, the gas ventilation volume and / or ventilation pressure are adjusted to make the actual tube diameter value of the quartz tube formed by subsequent stretching tend to be consistent with the target tube diameter value, and then after the preparation of the quartz tube is completed, the tube diameter fluctuation is effectively reduced, solving the problem of large tube diameter fluctuation after the preparation of the quartz tube in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0035] Figure 1 This is a schematic structural diagram of a heating and stretching device provided in this application.

[0036] Description of reference numerals:

[0037] 10-quartz mother tube;

[0038] 20-quartz tube;

[0039] 100-equipment body; 110-heating element; 120-stretching element;

[0040] 200-intake pipe; 210-pressure detection component;

[0041] 300-diameter measuring piece.

[0042] The above drawings illustrate specific embodiments of the present application, which will be described in more detail below. These drawings and the textual description are not intended to limit the scope of the present application in any way, but rather to illustrate the concepts of the present application to those skilled in the art by reference to specific embodiments. DETAILED DESCRIPTION

[0043] Exemplary embodiments will be described in detail herein, with examples illustrated in the accompanying drawings. In the following description, when referring to the drawings, identical numerals in different figures represent identical or similar elements, unless otherwise indicated. The embodiments described in the following exemplary embodiments are not intended to represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present application, as detailed in the appended claims.

[0044] In the related art, a quartz tube generally refers to a quartz glass tube used to manufacture an optical fiber preform, so the quartz tube plays an important role in the process of preparing an optical fiber preform.

[0045] The preparation of the quartz tube is to first obtain a quartz mother tube through deposition and dehydroxylation steps, and then heat the quartz mother tube at a high temperature and stretch the heated quartz mother tube, so that the quartz mother tube is gradually stretched during the stretching process while the tube diameter gradually shrinks, thereby forming a quartz tube.

[0046] However, in the process of preparing the quartz tube in the above preparation method, it is difficult to control or adjust the diameter of the quartz tube during the stretching process, so that after the quartz tube is prepared, the overall diameter fluctuates greatly.

[0047] Therefore, the embodiment of the present application provides a heating and stretching device and a preparation process for a quartz tube, wherein the heating and stretching device includes: an equipment body, the equipment body is used to heat and stretch the quartz mother tube so that the quartz mother tube forms a quartz tube; an air inlet pipeline, the air inlet pipeline is used to connect to the inside of the quartz mother tube, and the air inlet pipeline is configured to introduce gas into the quartz mother tube to control the diameter of the quartz tube through the gas; a diameter measuring part, the diameter measuring part is used to measure the actual diameter value of the currently formed quartz tube, so that the air inlet pipeline adjusts the gas ventilation volume and / or ventilation pressure according to the deviation between the actual diameter value and the target diameter value of the quartz tube. Therefore, during implementation, the quartz mother tube is heated and stretched by the device main body, and gas is introduced into the quartz mother tube through the air inlet pipe to produce a quartz tube; in the process of stretching the quartz mother tube into the quartz tube, the actual tube diameter value of the currently formed quartz tube is also measured by the diameter measuring piece, and according to the deviation between the actual tube diameter value and the target tube diameter value of the quartz tube, the gas ventilation volume and / or ventilation pressure are adjusted to make the actual tube diameter value of the quartz tube formed by subsequent stretching tend to be consistent with the target tube diameter value, and then after the preparation of the quartz tube is completed, the tube diameter fluctuation is effectively reduced, solving the problem of large tube diameter fluctuation after the preparation of the quartz tube in the prior art.

[0048] The following specific embodiments describe in detail the technical solution of the present application and how the technical solution of the present application solves the above-mentioned technical problems. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be repeated in some embodiments. The embodiments of the present application will be described below in conjunction with the accompanying drawings.

[0049] like Figure 1 As shown, an embodiment of the present application provides a heating and stretching device, comprising:

[0050] The device body 100 is used to heat and stretch the quartz mother tube 10 to form the quartz tube 20;

[0051] The air inlet pipe 200 is used to communicate with the interior of the quartz mother tube 10. The air inlet pipe 200 is configured to introduce gas into the quartz mother tube 10 to control the diameter of the quartz tube 20 through the gas;

[0052] The diameter measuring part 300 is used to measure the actual diameter value of the currently formed quartz tube 20, so that the air inlet pipeline 200 adjusts the gas ventilation volume and / or ventilation pressure according to the deviation between the actual diameter value and the target diameter value of the quartz tube 20.

[0053] It should be noted that one end of the air inlet pipe 200 is connected to the interior of the quartz mother tube 10, and the other end is connected to a gas supply source, such as an air pump or a gas cylinder, to introduce gas into the quartz mother tube 10. In addition, a valve can be installed on the air inlet pipe 200 to control the opening and closing of the air inlet pipe 200 and the degree of opening, thereby facilitating the control of the ventilation volume and / or ventilation pressure.

[0054] The gas introduced into the quartz mother tube 10 may be nitrogen or other inert gases, which is not limited. By introducing gas into the quartz mother tube 10 , the diameter of the quartz tube 20 after forming can be effectively controlled.

[0055] The diameter measuring member 300 may be a caliper. The caliper may be an existing product without any limitation on the model.

[0056] During implementation, the quartz mother tube 10 is heated and stretched by the device body 100, and gas is introduced into the quartz mother tube 10 through the air inlet pipe 200 to produce the quartz tube 20; in the process of stretching the quartz mother tube 10 into the quartz tube 20, the actual tube diameter value of the currently formed quartz tube 20 is also measured by the diameter measuring member 300, and according to the deviation between the actual tube diameter value and the target tube diameter value of the quartz tube 20, the gas ventilation volume and / or ventilation pressure are adjusted so that the actual tube diameter value of the quartz tube 20 formed by subsequent stretching is consistent with the target tube diameter value. Therefore, after the preparation of the quartz tube 20 is completed, the tube diameter fluctuation is effectively reduced, solving the problem of large tube diameter fluctuation of the quartz tube 20 after preparation in the prior art.

[0057] In some embodiments, as Figure 1 As shown, the device body 100 includes:

[0058] A heating element 110, the heating element 110 is used to heat the quartz mother tube 10;

[0059] The drawing piece 120 is used to draw the heated quartz mother tube 10 to form a quartz tube 20 .

[0060] It should be noted that the heating element 110 can be a high-temperature furnace, a melting furnace, or a combustion chamber. During use, the quartz mother tube 10 is placed inside the heating element 110 and heated. The heating element 110 heats and softens the quartz mother tube 10 to a state suitable for stretching. Next, the stretching element 120 pulls one end of the softened quartz mother tube 10 outward and gradually stretches it to form the quartz tube 20. At the same time, the air inlet line 200 is kept ventilated into the quartz mother tube 10 to ensure that the interior of the quartz tube 20 is hollow and can be stably formed.

[0061] Among them, the stretching member 120 can be a winch, and the quartz mother tube 10 is stretched by the traction rope on the winch; the stretching member 120 can also be other existing equipment, so that the stretching member 120 can achieve the purpose of stretching the quartz mother tube 10, and there is no limitation on this.

[0062] In addition, if Figure 1 As shown, a pressure detection component 210 is provided on the intake pipe 200, and the pressure detection component 210 is used to detect the pressure of the gas in the intake pipe.

[0063] The pressure detection element 210 can be a pressure gauge, and the model is not limited. Thus, the pressure detection element 210 can provide real-time feedback of the state of the gas in the air inlet pipe 200, so as to control the ventilation volume and ventilation pressure of the gas during operation.

[0064] In summary, the heating and stretching equipment provided in the embodiment of the present application, when implemented, heats and stretches the quartz mother tube 10 through the equipment main body 100, and introduces gas into the quartz mother tube 10 through the air inlet pipe 200 to produce the quartz tube 20; in the process of stretching the quartz mother tube 10 into the quartz tube 20, the actual tube diameter value of the currently formed quartz tube 20 is also measured by the diameter measuring part 300, and according to the deviation between the actual tube diameter value and the target tube diameter value of the quartz tube 20, the gas ventilation volume and / or ventilation pressure are adjusted so that the actual tube diameter value of the quartz tube 20 formed by subsequent stretching is consistent with the target tube diameter value, and then after the preparation of the quartz tube 20 is completed, the tube diameter fluctuation is effectively reduced, which solves the problem of large tube diameter fluctuation after the preparation of the quartz tube 20 in the prior art.

[0065] The present invention provides a method for preparing a quartz tube, using the heating and stretching device of any of the above embodiments, comprising the following steps:

[0066] The quartz mother tube 10 is heated and stretched by the device body 100 in the heating and stretching device, and gas is introduced into the quartz mother tube 10 through the gas inlet pipe 200 in the heating and stretching device to produce the quartz tube 20;

[0067] The diameter measuring piece 300 in the heating and stretching equipment is used to measure the actual diameter value of the currently formed quartz tube 20, and according to the deviation between the actual diameter value and the target diameter value, the ventilation volume and / or ventilation pressure in the air inlet pipe 200 are adjusted so that the actual diameter value of the subsequently formed quartz tube 20 is consistent with the target diameter value.

[0068] Gas, which can be nitrogen or other inert gases, is introduced into the quartz mother tube 10 through the gas inlet line 200 to control the diameter of the quartz tube 20. Furthermore, during implementation, the apparatus body 100 can heat the quartz mother tube 10 using a vertical melting furnace and form the quartz tube 20 using a vertical stretching method.

[0069] In this embodiment, the diameter measuring member 300 is used to measure the outer diameter of the quartz tube 20, so that the air intake pipe 200 can adjust the gas flow rate and / or pressure based on the deviation between the actual outer diameter and the target outer diameter of the quartz tube 20. In other embodiments, the actual inner diameter of the quartz tube 20 can also be measured to adjust the gas flow rate and / or pressure based on the deviation between the actual inner diameter and the target inner diameter.

[0070] Thus, during the stretching process of the quartz tube 20, the diameter of the subsequently stretched quartz tube 20 can be promptly controlled or adjusted. This effectively reduces overall diameter fluctuations after the quartz tube 20 is manufactured, solving the problem of large diameter fluctuations in the prior art of the quartz tube 20 after manufacture.

[0071] In order to prepare the quartz mother tube 10, in this embodiment, the following steps are also included:

[0072] Powder rods are obtained by deposition;

[0073] The powder rod is dehydroxylated and melted to form a quartz master rod;

[0074] A hole is opened on the quartz mother rod, and the quartz mother rod with the hole opened is polished to form a quartz mother tube.

[0075] The process of removing hydroxylation from the powder rod and melting it to form a quartz mother rod comprises: removing hydroxylation from the powder rod and melting it to form a quartz cylinder; and stretching the quartz cylinder to form a quartz mother rod.

[0076] In practice, a powder rod can be obtained by external vapor deposition, using nine burners simultaneously, at a deposition rate of 250 g / min or higher. The resulting powder rod has an outer diameter of less than 200 mm, a purity of ppb, and a 95% distribution of particle sizes between 80 nm and 120 nm.

[0077] The powder rod is dehydroxylated and melted in an atmosphere of chlorine and helium to form a high-purity quartz cylinder with low hydroxyl content.

[0078] The quartz cylinder is stretched once, and its outer diameter is proportionally reduced to obtain a quartz mother rod. The outer diameter of the quartz mother rod can be controlled within 60~120mm, with a tolerance of ±0.5mm.

[0079] The quartz mother rod is machined and ground. Machining and grinding include boring, honing, and external grinding. Boring is used to make the quartz mother rod into a quartz mother tube 10 with an inner diameter close to the target value. Honing is used to grind the inner wall of the quartz mother tube 10 to accurately adjust the inner diameter of the quartz mother tube 10. External grinding is used to grind the outer wall of the quartz mother tube 10 to accurately adjust the outer diameter of the quartz mother tube 10. After external grinding, the wall deviation of the quartz mother tube 10 can be effectively controlled.

[0080] The target value of the inner diameter of the quartz mother tube 10 can be set according to the actual size requirements. It should be noted that the processing amount of the external grinding is above 5 mm.

[0081] After the quartz mother tube 10 is prepared, the quartz mother tube 10 is heated and stretched using the device body 100 in the heating and stretching device, and gas is introduced into the quartz mother tube 10 through the air inlet pipe 200 in the heating and stretching device to prepare the quartz tube 20. The process also includes the following steps:

[0082] Before using the main body 100 of the heating and stretching apparatus to heat and stretch the quartz mother tube 10, the diameter of the quartz mother tube 10 can be measured using a ruler, caliper, or other instrument. The stretching speed can be set accordingly based on the diameter values at different locations on the quartz mother tube 10. This ensures uniform diameters of the stretched quartz tube 20. For example, the stretching speed can be appropriately increased for locations with relatively large diameters on the quartz mother tube 10, while the stretching speed can be appropriately decreased for locations with relatively small diameters on the quartz mother tube 10.

[0083] In this embodiment, the outer diameter of the quartz mother tube 10 is measured; of course, in other embodiments, the inner diameter of the quartz mother tube 10 may also be measured.

[0084] Before using the main body 100 of the heating and stretching apparatus to heat and stretch the quartz mother tube 10, the quartz mother tube 10 is pickled to remove impurities and dirt on the surface of the quartz mother tube 10 and then clean the residual acid on the quartz mother tube 10. The pickling can be performed using hydrofluoric acid, nitric acid, hydrochloric acid, or other cleaning solutions. The residual acid on the quartz mother tube 10 can be cleaned using clean water. Of course, other liquids can also be used to clean the residual acid.

[0085] During the process of heating and stretching the quartz mother tube 10 in the apparatus body, the heating temperature of the quartz mother tube 10 is between 1800°C and 2100°C, and the heating temperature gradually increases with the stretching time and / or the stretching position of the quartz mother tube 10. Because the quartz mother tube 10 has better ductility and toughness at high temperatures, gradually increasing the temperature can better control the wall thickness and diameter of the quartz tube 20.

[0086] In addition, the heating temperature gradient can be set according to the stretching time and stretching position. It should be noted that the heating time includes the heating time and the holding time, and the holding time needs to be ≥30 minutes.

[0087] Adjusting the ventilation volume and / or ventilation pressure in the air intake pipe 200 according to the deviation between the actual pipe diameter value and the target pipe diameter value includes:

[0088] When the actual pipe diameter value is greater than the target pipe diameter value, the ventilation volume and / or ventilation pressure in the intake pipe 200 is reduced;

[0089] When the actual pipe diameter value is smaller than the target pipe diameter value, the ventilation volume and / or ventilation pressure in the intake pipe 200 is increased.

[0090] During the process, an appropriate amount of nitrogen is initially introduced into the quartz mother tube 10. After the quartz mother tube 10 is heated for a period of time and substantially softened, stretching can begin. During the stretching process, the amount of nitrogen needs to be adjusted accordingly based on the diameter of the quartz mother tube 10. The areas with larger outer diameters require a higher pressure, while the areas with smaller outer diameters require a lower pressure.

[0091] Secondly, during the stretching process, the ventilation volume is adjusted based on the changing trend of the outer diameter of the quartz tube 20. When the outer diameter increases (i.e., when the actual outer diameter is greater than the target outer diameter), the ventilation volume is reduced; when the outer diameter decreases (i.e., when the actual outer diameter is less than the target outer diameter), the ventilation volume is increased. Of course, during implementation, the ventilation volume or ventilation pressure can also be adjusted based on the change in the actual inner diameter.

[0092] Furthermore, it is understood that, in vertical stretching, as the weight of the quartz tube 20 gradually increases with the stretching process, the outer diameter of the quartz tube 20 during subsequent stretching may decrease. Therefore, during implementation, the ventilation volume can be appropriately increased as the stretching process progresses, depending on actual needs. The total ventilation volume can be controlled within a range of 20 to 90 L.

[0093] The resulting quartz tube 20 exhibits an excellent appearance, with minimal bright spots, bubbles, and scratches, while also boasting excellent dimensional control. Furthermore, the outer diameter of the quartz tube 20 can be controlled within a range of 10-40 mm, the wall thickness within a range of 1-4 mm, the out-of-roundness ≤ 0.1 mm, the wall deviation ≤ 0.1 mm, the bow ≤ 0.3 mm / m, and the outer diameter and wall thickness tolerances ≤ 0.15 mm, significantly reducing diameter fluctuations in the quartz tube 20.

[0094] In other embodiments, during the preparation of the quartz mother tube 10, the powder rod can be processed into a fluorine-doped quartz mother rod that meets the requirements using a powder deep fluorine doping process during the dehydroxylation and melting process, where the fluorine doping depth of the fluorine-doped quartz mother rod is -0.5% to -0.0%. The fluorine-doped quartz mother rod is then machined, polished, and cut to form the fluorine-doped quartz mother tube 10. In this case, when the fluorine-doped quartz mother tube 10 is stretched into the quartz tube 20, the stretching temperature can be controlled at 1800-1950°C, and the nitrogen ventilation volume can be controlled at 10-60L.

[0095] In summary, the preparation process of the quartz tube provided in the embodiment of the present application can timely control or adjust the diameter of the quartz tube 20 stretched out later, so that after the preparation of the quartz tube 20 is completed, the overall tube diameter fluctuation can be effectively reduced, and the tube diameter fluctuation can be controlled within 0.1 mm, which solves the problem of large tube diameter fluctuation after the preparation of the quartz tube 20 in the prior art.

[0096] The following are several embodiments to further illustrate this application:

[0097] Example 1:

[0098] A quartz tube 20 with an OD of 29 mm and a WT of 2.5 mm was prepared.

[0099] A powder rod is prepared using the OVD process, and after dehydroxylation and melt shrinkage, a quartz master rod is obtained. The quartz master rod has a hydroxyl content of 0.13 ppm and an average outer diameter of 154.41 mm. After a single stretching, the average outer diameter reaches 72 mm before being machined. Machining begins with boring, followed by rough grinding of the inner and outer diameters, rough and fine grinding of the inner and outer diameters, and finally fine grinding of the inner and outer diameters. The quartz master rod is ground and cut into a quartz master tube 10 with an outer diameter of 66 mm, an inner diameter of 43 mm, and a wall thickness of 0.07 mm.

[0100] When the quartz mother tube 10 began to be stretched, 20 L of nitrogen was initially introduced, the stretching speed was 25 mm / min, and the stretching temperature was set at 1990°C. At the rod position of 90 mm, the tube diameter reached 28 mm. After adding 20 L of nitrogen, the tube diameter reached 29 mm, entering a plateau. Specific parameters of the resulting quartz tube 20 are shown in Table 1. As can be seen from Table 1, the diameter fluctuation (i.e., tube diameter fluctuation) was minimal and could be controlled within 0.1 mm.

[0101]

[0102]

[0103] Example 2:

[0104] A fluorine-doped quartz tube 20 with an OD of 21 mm and a WT of 2 mm was prepared.

[0105] Powder rods were prepared using the OVD process, and fluorine-doped quartz master rods were prepared using a deep fluorine doping process. The quartz master rods had a fluorine doping depth of -0.29% and an average outer diameter of 149.78 mm. After a single stretching step, the average outer diameter reached 70 mm before being machined. Machining began with boring, followed by rough grinding of the inner and outer diameters, followed by rough and fine grinding of the inner and outer diameters, and finally, fine grinding of the inner and outer diameters. The quartz master rods were ground and cut into fluorine-doped quartz master tubes 10 with an outer diameter of 63 mm, an inner diameter of 43 mm, and a 0.04 mm sidewall.

[0106] When the quartz mother tube 10 began to be stretched, an initial gas flow of 10 L was used, the stretching speed was 15 mm / min, and the stretching temperature was set at 1930°C. At the rod position of 90 mm, the tube diameter reached 21.3 mm. After reducing the nitrogen flow by 2 L, the tube diameter reached 21 mm, entering a plateau. The specific parameters of the resulting quartz tube 20 are shown in Table 2. As can be seen from Table 2, the diameter fluctuation (i.e., tube diameter fluctuation) was minimal and could be controlled within 0.1 mm.

[0107] Finally, it should be noted that those skilled in the art will readily identify other embodiments of the present invention after considering the specification and practicing the invention disclosed herein. The present invention is intended to cover any variations, uses, or adaptations of the present invention that follow the general principles of the present invention and include common knowledge or customary techniques in the art not disclosed herein. The present invention is not limited to the precise structure described above and illustrated in the accompanying drawings, and various modifications and variations may be made without departing from the scope thereof. The scope of the present invention is limited solely by the appended claims.

Claims

1. A heating and stretching device, characterized in that: include: An apparatus body (100), the apparatus body (100) being used to heat and stretch a quartz mother tube (10) so as to form the quartz mother tube (10) into a quartz tube (20); An air inlet pipe (200), the air inlet pipe (200) being used to communicate with the interior of the quartz mother tube (10), the air inlet pipe (200) being configured to introduce gas into the quartz mother tube (10) so as to control the diameter of the quartz tube (20) through the gas; A diameter measuring member (300) is used to measure the actual diameter value of the currently formed quartz tube (20), so that the air inlet pipeline (200) adjusts the ventilation volume and / or ventilation pressure of the gas according to the deviation between the actual diameter value and the target diameter value of the quartz tube (20).

2. The heating and stretching equipment according to claim 1, characterized in that: A pressure detection component (210) is provided on the air intake pipeline (200), and the pressure detection component (210) is used to detect the pressure of the gas in the air intake pipeline (200).

3. The heating and stretching equipment according to claim 1 or 2, characterized in that: The device body (100) comprises: A heating element (110), the heating element (110) being used to heat the quartz mother tube (10); A drawing piece (120) is used to draw the heated quartz mother tube (10) to form the quartz tube (20).

4. A process for preparing a quartz tube, using the heating and stretching equipment according to any one of claims 1 to 3, characterized in that: The following steps are involved: The quartz mother tube (10) is heated and stretched using the device body (100) in the heating and stretching device, and gas is introduced into the quartz mother tube (10) through the air inlet pipe (200) in the heating and stretching device to produce a quartz tube (20); The actual diameter value of the currently formed quartz tube (20) is measured by a diameter measuring member (300) in the heating and stretching device, and the ventilation volume and / or ventilation pressure in the air inlet pipeline (200) are adjusted according to the deviation between the actual diameter value and the target diameter value.

5. The process for preparing the quartz tube according to claim 4, wherein: Before the device body (100) in the heating and stretching device is used to heat and stretch the quartz mother tube (10), the method further includes: The diameter of the quartz mother tube (10) is measured, and corresponding stretching speeds are set according to the tube diameter values at different positions of the quartz mother tube (10).

6. The process for preparing the quartz tube according to claim 4, wherein: Before the device body (100) in the heating and stretching device is used to heat and stretch the quartz mother tube (10), the method further includes: Pickling the quartz mother tube (10); Clean the residual acid on the quartz mother tube (10).

7. The process for preparing the quartz tube according to claim 4, wherein: The device body (100) in the heating and stretching device is used to heat and stretch the quartz mother tube (10), wherein the heating temperature gradually increases with the stretching time and / or the stretching position of the quartz mother tube (10).

8. The process for preparing the quartz tube according to claim 4, wherein: The adjusting of the ventilation volume and / or ventilation pressure in the air intake pipeline (200) according to the deviation between the actual pipe diameter value and the target pipe diameter value comprises: When the actual pipe diameter value is greater than the target pipe diameter value, the ventilation volume and / or ventilation pressure in the air intake pipeline (200) is reduced; When the actual pipe diameter value is smaller than the target pipe diameter value, the ventilation volume and / or ventilation pressure in the air intake pipeline (200) is increased.

9. The process for preparing a quartz tube according to any one of claims 4 to 8, characterized in that: Also includes: Powder rods are obtained by deposition; Dehydroxylating and melting the powder rod to form a quartz mother rod; A hole is opened on the quartz mother rod, and the quartz mother rod after the hole is opened is polished to form the quartz mother tube (10).

10. The process for preparing a quartz tube according to claim 9, wherein: The step of dehydroxylating and melting the powder rod to form a quartz mother rod comprises: Dehydroxylating and melting the powder rod to form a quartz cylinder; The quartz cylinder is stretched to form the quartz mother rod.

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