Heater and single crystal furnace

Abstract

The embodiment of the invention provides a heater and a single crystal furnace. The heater comprises a foot plate and an annular heater body connected with the foot plate, and the heater body is divided into a plurality of equal-length equal areas in the circumferential direction of the heater body. Wherein in the plurality of equally divided areas, the equally divided area connected with the foot plate is a connecting area, and in the equally divided areas among the connecting areas, at least one equally divided area is an anti-deformation area; the weight of the heater body in the anti-deformation area is the first weight, the weight of the heater body in the connecting area is the second weight, and the first weight is smaller than the second weight. According to the embodiment of the invention, the deformation of the anti-deformation area under the action of gravity is relatively small, and the service life of the heater is greatly prolonged.

Description

Technical Field

[0001] The present application belongs to the field of photovoltaic processing technology, and specifically relates to a heater and a single crystal furnace. Background Art

[0002] With the rapid development of the photovoltaic industry, the production of single crystal silicon rods has also developed in the direction of large thermal fields, large loadings, and large sizes. Correspondingly, the size and weight of the heaters used to heat the silicon material have also gradually increased.

[0003] In the existing technology, the heater usually includes an annular heater body and a foot plate supporting the heater body. As the size and weight of the heater body increase, the deformation of the heater body becomes more serious, and the service life of the heater is correspondingly reduced. Summary of the Invention

[0004] The present application aims to provide a heater and a single crystal furnace to solve the problems of large deformation and short service life of existing heaters.

[0005] In order to solve the above technical problems, this application is implemented as follows:

[0006] In the first aspect, the present application discloses a heater, which includes: a foot plate and an annular heater body connected to the foot plate, wherein the heater body is divided into a plurality of equal-length partitions along its circumference; wherein, among the plurality of the partitions, the partition connected to the foot plate is a connection zone, and among the partitions between the connection zones, at least one partition is an anti-deformation zone; the weight of the heater body in the anti-deformation zone is a first weight, and the weight of the heater body in the connection zone is a second weight, and the first weight is less than the second weight.

[0007] In an embodiment of the present application, the heater body is provided with at least one anti-deformation zone between the connection zones with the footplates. The weight of the heater body in the anti-deformation zone is a first weight, and the weight of the heater body in the connection zone is a second weight, with the first weight being less than the second weight. In other words, the anti-deformation zone of the heater body located between the footplates is subject to less gravity, and the torque generated is correspondingly smaller. This minimizes the deformation of the anti-deformation zone under gravity, significantly extending the heater's service life.

[0008] Optionally, the maximum axial height of the heater body in the anti-deformation zone is smaller than the maximum axial height of the heater body in the connection zone, as an embodiment of making the first weight of the heater body in the anti-deformation zone smaller than the second weight of the heater body in the connection zone.

[0009] Optionally, the maximum axial height of the heater body in the connection zone is a first height, less than or equal to 300 mm. This prevents the heater body from being too high in the connection zone and affecting processing, thereby improving the processing convenience of the heater body. This also prevents the heater from being too high and affecting its use during crystal pulling. And / or, the minimum axial height of the heater body in the anti-deformation zone is a second height, greater than or equal to 30 mm. This prevents the heater body from being too low in the anti-deformation zone and affecting its strength, thereby improving the overall strength and reliability of the heater body.

[0010] Optionally, the heater body includes two axial end surfaces disposed axially apart; wherein, in the heater body, at least a portion of the axial end surface of the connection zone and at least a portion of the axial end surface of the anti-deformation zone are flush. Thus, during the processing of the heater body, the axial end surfaces can be used as a reference for processing, greatly improving the processing convenience of the heater body.

[0011] Optionally, of the two axial end surfaces, the axial end surface distal from the foot plate is a first end surface, and the first end surfaces of the connection zone and the anti-deformation zone are flush. In this way, the heat radiated from the upper portion of the heater body to the crucible allows oxygen released from the crucible at high temperatures to be quickly removed by the argon gas in the furnace, reducing the oxygen content entering the melt. The lower heat radiated from the lower portion of the heater body can reduce thermal convection in the lower, lower-temperature zone, thereby reducing the oxygen content in the melt.

[0012] Optionally, the heater body includes a plurality of heating plates connected in sequence along its circumference, and the heights of the plurality of heating plates are non-uniform; wherein the sum of the heights of the heating plates located in the anti-deformation zone is a first sum of heights, and the sum of the heights of the heating plates located in the connection zone is a second sum of heights, and the first sum of heights is less than the second sum of heights, so that the first weight of the heating petal in the anti-deformation zone is less than the second weight of the heated petal in the connection zone.

[0013] Optionally, the heater body includes a plurality of heating petals spliced in sequence along its circumference; the connection area or the anti-deformation area includes at least one heating petal; the heating petal includes a plurality of heating plates connected in sequence along the circumference of the heater body, and a heating petal can be located in the same connection area or the same anti-deformation area, so that the setting and processing of the heating petal are relatively simple.

[0014] Optionally, the heater body includes multiple heating lobes sequentially connected along its circumference, each of which comprises multiple heating plates sequentially connected along the circumference of the heater body; wherein the connection area or the anti-deformation area includes at least two heating plates. A heating lobe can be located in two adjacent connection areas and anti-deformation areas, and only one type of heating lobe is required in the heater body, greatly reducing the number of materials required in the heater and lowering production costs.

[0015] Optionally, along the circumference of the heater body, the heating lobes include a first end and a second end disposed in opposite directions. The heating plate located at the first end is a first heating plate, and the heating plate located at the second end is a second heating plate. The axial height of the first heating plate is greater than the axial height of the second heating plate. In two adjacent heating lobes, the first heating plate is connected to the foot plate. Due to the greater axial height of the first heating plate, the connection reliability between the first heating plate and the foot plate is enhanced after the two are connected. Furthermore, the axial height of the first heating plate is greater than the axial height of the second heating plate, which can better ensure that the weight near the foot plate is greater than the weight far from the foot plate.

[0016] Optionally, the axial heights of the plurality of heating plates decrease from the first end to the second end of the heating plate, so as to reduce the cost of the heating flaps and improve the processing efficiency of the heating flaps.

[0017] In a second aspect, the present application further discloses a single crystal furnace, which comprises: a heater as described in any one of the above items.

[0018] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments with reference to the following drawings, in which:

[0020] Figure 1 This is one of the structural diagrams of a heater described in an embodiment of the present application;

[0021] Figure 2 This is the second structural diagram of a heater described in an embodiment of the present application;

[0022] Figure 3 This is the third structural diagram of a heater described in an embodiment of the present application;

[0023] Figure 4 This is the fourth structural diagram of a heater described in an embodiment of the present application;

[0024] Figure 5 This is a schematic structural diagram of a heating petal according to an embodiment of the present application;

[0025] Figure 6 This is one of the structural diagrams of a footboard described in an embodiment of the present application;

[0026] Figure 7 This is the second structural diagram of a footboard described in an embodiment of the present application;

[0027] Figure 8 This is a structural diagram of a connecting plate according to an embodiment of the present application;

[0028] Figure 9 This is a schematic structural diagram of a fastener according to an embodiment of the present application;

[0029] Figure 10 This is a processing layout diagram of a heating flap described in an embodiment of the present application;

[0030] Figure 11 It is a structural schematic diagram of another heater described in an embodiment of the present application.

[0031] Figure numerals: 10 - foot plate, 101 - second connecting hole, 11 - heater body, 111 - heating flap, 1111 - first connecting hole, 1112 - heating plate, 12 - connecting plate, 121 - third connecting hole, 13 - fastener, A - connecting area, B - anti-deformation area, C - first end, D - second end. DETAILED DESCRIPTION

[0032] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention and are not to be construed as limiting the present invention. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative work are within the scope of protection of this application.

[0033] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly refer to one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more. Furthermore, the term "and / or" in the specification and claims refers to at least one of the connected entities, and the character " / " generally indicates an "or" relationship between the connected entities.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0035] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0036] Reference Figure 1 , shows one of the structural diagrams of a heater according to an embodiment of the present application, referring to Figure 2 , shows a second structural diagram of a heater according to an embodiment of the present application, referring to Figure 3 , shows a third structural diagram of a heater according to an embodiment of the present application, referring to Figure 4 , shows a fourth structural diagram of a heater according to an embodiment of the present application. Figures 1 to 4 As shown, the heater may specifically include: a foot plate 10 and an annular heater body 11 connected to the foot plate 10, the heater body 11 is divided into a plurality of equal-length partitions along its circumference, among the plurality of partitions, the partition connected to the foot plate 10 is a connection area A, and among the partitions between the connection areas A, at least one partition is an anti-deformation area B; the weight of the heater body 11 in the anti-deformation area B is a first weight, and the weight of the heater body 11 in the connection area A is a second weight, and the first weight is less than the second weight.

[0037] In the embodiment of the present application, the heater body 11 is divided into a plurality of equal-length zones along its circumference. Specifically, the heater body 11 is evenly divided into a plurality of zones extending along the circumference of the heater body 11. For example, the heater body 11 is evenly divided into four zones extending along the circumference of the heater body, six zones extending along the circumference of the heater body, or eight zones extending along the circumference of the heater body.

[0038] In an embodiment of the present application, the heater body 11 is provided with at least one anti-deformation zone B between the connection zone A connected to the foot plate 10. The weight of the heater body 11 in the anti-deformation zone B is a first weight, and the weight of the heater body 11 in the connection zone A is a second weight, and the first weight is less than the second weight. That is, the gravity of the anti-deformation zone B of the heater body 11 between the foot plates 10 is also small, and the torque generated is also correspondingly small. Specifically, in this embodiment, the weight of the anti-deformation zone B and the weight of the connection zone A refer to: the weight of the heater body corresponding to the anti-deformation zone B, and the weight of the heater body corresponding to the connection zone A, respectively. In this way, the deformation that can be produced by the anti-deformation zone B under the action of gravity is also small, which greatly improves the service life of the heater.

[0039] In a specific application, when the heater is used in a single crystal furnace, the heater can be placed inside the single crystal furnace. Specifically, the heater body 11 can be mounted outside the crucible, and the foot plate 10 is connected to the heater body 11 to support the heater body 11 and energize the heater body 11 so that the heater body 11 is energized and heated to heat the silicon liquid in the crucible. As the size of the heater increases, the weight of the heater body 11 will also increase. The anti-deformation zone B located between the two foot plates 10 is far away from the foot plates 10, and the torque generated by the weight of the heater body 11 in this area is large, so the deformation is also more obvious.

[0040] In the embodiment of the present application, since the first weight of the heater body 11 in the anti-deformation zone B is less than the second weight of the heater body 11 in the connection zone A, the torque generated by the weight of the heater body 11 in the anti-deformation zone B can be reduced. This can significantly reduce the deformation of the heater body 11 in the anti-deformation zone B, greatly improving the service life of the heater. The heater of the present application can reduce the deformation of the heater body 11 without adding an additional support structure, thus avoiding the problems of structural complexity and increased power consumption caused by the addition of a support structure. The structure is simple, the power consumption is low, and it is easy to implement.

[0041] Optional, such as Figure 4 As shown, the heater body 11 can be divided into four equal-length zones along its circumference. The heater may include two foot plates 10, that is, two connection zones A are provided on the heater body 11, and an anti-deformation zone B is provided between the two connection zones A. In a specific application, such as Figure 4 As shown, the connection position of the foot plate 10 can be used as the center of the connection area A, and the heater body 11 can be divided into four equal parts, and the heater body 11 can be divided into two connection areas A and two anti-deformation areas B that are alternately arranged.

[0042] It should be noted that, for ease of description, the drawings of the embodiments of the present application only illustrate the case where the heater body 11 is divided into four equal sections. In actual applications, the heater body 11 can also be divided into six or eight equal sections, etc., and the embodiments of the present application do not limit this.

[0043] In some optional embodiments of the present application, the heater body 11 can be a structure of equal thickness, and the maximum axial height h2 of the heater body 11 in the anti-deformation zone B is smaller than the maximum axial height h1 of the heater body 11 in the connection zone A, so that the first weight of the heater body 11 in the anti-deformation zone B is smaller than the second weight of the heater body 11 in the connection zone A.

[0044] In this embodiment, the axial height of the connection area A or the anti-deformation area B refers to the extension length of the connection area A or the anti-deformation area B along the axial direction of the heater body. The maximum axial height of the heater body (11) in the connection area A or the anti-deformation area B refers to the maximum value of the extension length of the connection area A or the anti-deformation area B along the axial direction of the heater body.

[0045] Specifically, if the heater body 11 has a uniform thickness, it can be made of graphite or carbon-carbon materials of the same thickness, making it easier to process. If the heater body 11 has a uniform thickness, the weight of the heater body 11 in different regions can be determined by the axial height of that region. The higher the axial height, the heavier the heater body 11 in that region. By setting the axial height of the anti-deformation region B to be smaller than the axial height of the connection region A, the weight of the heater body 11 in the anti-deformation region B can be reduced from that in the connection region A.

[0046] It should be noted that, in a specific application, the heater body 11 may also be a structure of non-uniform thickness, and it is only necessary to set the first weight of the anti-deformation zone B of the heater body 11 to be smaller.

[0047] Optionally, the maximum axial height of the heater body 11 in the connection area A is a first height, which is less than or equal to 300 mm. This prevents the heater body 11 from being too high in the connection area A and affecting processing, thereby improving the processing convenience of the heater body 11. And / or, the minimum axial height of the heater body 11 in the anti-deformation area B is a second height, which is greater than or equal to 30 mm. This prevents the heater body 11 from being too low in the anti-deformation area B and affecting the strength of the heater body 11, thereby improving the overall strength and reliability of the heater body 11.

[0048] In some optional embodiments of the present application, the heater body 11 may include two axial end surfaces disposed axially apart; wherein at least a portion of the axial end surface of the connection region A and at least a portion of the axial end surface of the anti-deformation region B are flush. In this way, during the processing of the heater body 11, the heater body 11 can be processed with reference to the flush axial end surfaces, greatly improving the processing convenience of the heater body 11.

[0049] Optionally, of the two axial end faces, the axial end face away from the foot plate 10 is the first end face, and the first end faces of the connection area A and the anti-deformation area B are arranged flush. In actual applications, since the first end face is located at the top of the heater body 11, the high-temperature zone formed on the first end face of the heater body 11 corresponds to the liquid surface of the crucible. When the first end faces of the connection area A and the anti-deformation area B are flush, the high-temperature zone formed on the upper part of the heater body 11 can be made larger, and more heat can be radiated to the crucible. At the same time, the high-temperature zone formed on the lower part of the heater body 11 can also be made smaller, and less heat can be radiated to the crucible. In this way, the heat radiated from the upper part of the heater body 11 to the crucible can enable the oxygen precipitated from the crucible at high temperature to be quickly taken away by the argon gas in the furnace, thereby reducing the oxygen content entering the melt. The less heat radiated from the lower part of the heater body 11 can weaken the thermal convection in the lower low-temperature zone, thereby reducing the oxygen content in the melt.

[0050] It should be noted that the present embodiment only illustrates the case where the connection area A and the anti-deformation area B of the heater body 11 are flush with each other at the top first end surface. In actual applications, the connection area A and the anti-deformation area B of the heater body 11 can also be flush with each other at the bottom second end surface, which is not limited in the present embodiment.

[0051] In some optional embodiments of the present application, the heater body 11 may include multiple heating plates 1112 connected sequentially along its circumference, with the maximum axial heights of the multiple heating plates 1112 being non-uniform. The sum of the maximum axial heights of the heating plates 1112 located in the anti-deformation zone B is a first sum, and the sum of the maximum axial heights of the heating plates 1112 located in the connection zone A is a second sum, with the first sum being less than the second sum, such that the first weight of the heating petals 111 in the anti-deformation zone B is less than the second weight of the heater body 111 in the connection zone A. In this embodiment, a narrow slot is provided in the middle of the heating plates 1112, approximating a U-shaped structure.

[0052] In a specific application, the heating plate 1112 with a higher maximum axial height can be set in the connection area A, and the heating plate 1112 with a lower maximum axial height can be set in the anti-deformation area B, so that the first height sum of the heating plates 1112 located in the anti-deformation area B is smaller than the second height sum of the heating plates 1112 located in the connection area A.

[0053] Optionally, the heating plate 1112 located in the anti-deformation zone B and the heating plate 1112 located in the connection zone A have the same radial thickness in the annular heater body 11. The ratio of the first height sum to the second height sum is less than or equal to 9:10, so that the ratio of the first weight of the heater body 11 in the anti-deformation zone B to the second weight of the heater body 11 in the connection zone A can be less than or equal to 9:10. In this way, the first weight of the heater body 11 in the anti-deformation zone B can be significantly reduced, thereby significantly reducing the torque generated by the heater body 11 in the anti-deformation zone B and avoiding deformation of the heater body 11 in the anti-deformation zone B.

[0054] For example, the ratio of the first height sum to the second height sum can be 2:3, 3:5, 6:7, etc. The embodiment of the present application does not specifically limit the ratio of the first height sum to the second height sum.

[0055] In some optional embodiments of the present application, the heater body 11 may include a plurality of heating petals 111 sequentially spliced along its circumference. The heater body may further include a connecting plate 12, which is connected to two adjacent heating petals 111 to connect the two adjacent heating petals 111. In practical applications, the heater body 11 is divided into multiple heating petals 111, and then spliced into a whole after the heating petals 111 are processed. This can make the structure of the individual heating petals 111 relatively simple and easy to process, thereby improving the workability of the heater body 11.

[0056] Reference Figure 5 , shows a schematic structural diagram of a heating petal according to an embodiment of the present application, such as Figure 5 As shown, a plurality of first connection holes 1111 are provided on the processing flap 111 for connecting with the foot plate 10 and the connecting plate 12. Figure 6 , shows one of the structural diagrams of a footboard according to an embodiment of the present application, referring to Figure 7 , shows the second structural diagram of a footboard according to an embodiment of the present application. Figure 6 、 Figure 7 As shown, a plurality of second connection holes 101 are provided on the foot plate 10 at positions for connecting the heating petals 111. Figure 8 , shows a structural diagram of a connecting plate according to an embodiment of the present application, such as Figure 8 As shown, a plurality of third connection holes 121 are provided on the connection plate 12. Figure 9 , shows a schematic structural diagram of a fastener described in an embodiment of the present application.

[0057] In practical applications, during the assembly process of the heater, the third connection hole 121 on the connection plate 12 can be aligned with the first connection hole 1111 on the heating petal 111, and then the heater can be assembled. Figure 9 The fastener 13 shown in the figure passes through the first connection hole 1111 and the third connection hole 121 in sequence to achieve the connection between the connection plate 12 and the heating petal 111. Then, align the second connection hole 101 on the foot plate 10 with the first connection hole 1111 on the heating petal 111, and then use Figure 9 The fastener 13 shown is passed through the third connection hole 121 and the first connection hole 1111 in sequence, so that the foot plate 10 can be connected to the heating flap 111.

[0058] For example, the fasteners 13 may include, but are not limited to, screws or bolts. The present embodiment does not limit the specific type of the fasteners 13. The fasteners 13 connect the connecting plate 12 and the heating petals 111, and the fasteners 13 connect the foot plate 10 and the heating petals 111, making the heater more removable and easier to repair and replace.

[0059] It should be noted that, in actual applications, those skilled in the art may also adopt connection methods such as snap-on connection to realize the connection between the connecting plate 12, the foot plate 10 and the heating petal 111. The embodiment of the present application does not specifically limit the connection method between the connecting plate 12, the foot plate 10 and the heating petal 111.

[0060] In some optional embodiments of the present application, the connection area A or the anti-deformation area B includes at least one heating flap 111 ; the heating flap 111 may include a plurality of heating plates 1112 sequentially connected along the circumference of the heater body 11 .

[0061] In practical applications, when the connection area A or the anti-deformation area B includes at least one heating petal 111, one heating petal 111 can be located in the same connection area A or the same anti-deformation area B. Therefore, in the process of heating the petal 111, the heating plate 1112 with a higher maximum axial height can be set on the same heating petal 111, and the heating petal 111 can be set in the connection area A of the heater body 11. Similarly, the heating plate 1112 with a lower maximum axial height can be set on the same heating petal 111, and the heating petal 111 can be set in the anti-deformation area B of the heater body 11. In this way, the setting method and processing of the heating petal 111 can be made simpler. In this embodiment, the maximum axial height of the heating plate 1112 refers to: the maximum extension length of the heating plate 1112 along the axial direction of the heater body. The axial height of the heating plate refers to: the extension length of the heating plate 1112 along the axial direction of the heater body.

[0062] Alternatively, as Figure 11As shown, the heater body 11 is divided into four equal zones along its circumference, each having an equal circumferential extension length. The heating plates 1112 of the heating lobes in the connection zone A have the same axial height, and the heating plates 1112 of the heating lobes in the anti-deformation zone B have the same axial height. The axial height of the heating plates 1112 in the connection zone A is greater than that of the heating plates 1112 in the anti-deformation zone B.

[0063] In another optional embodiment of the present application, the heater body 11 may include a plurality of heating petals 111 spliced in sequence along its circumference, and the heating petals 111 may include a plurality of heating plates 1112 connected in sequence along the circumference of the heater body 11; wherein, the connection area A or the anti-deformation area B may include a heating plate 1112 of at least two heating petals 111.

[0064] Optionally, a narrow groove is provided in the middle of the heating plate of this embodiment, which is approximately a U-shaped plate structure; when multiple heating plates 1112 are connected in sequence, the ends of the heating plates with the grooves are connected in sequence.

[0065] In practical applications, when the connection area A or the anti-deformation area B may include at least two heating plates 1112 of the heating petals 111, one heating petal 111 may be located in two adjacent connection areas A and anti-deformation areas B. That is, the heating petal 111 may include both a heating plate 1112 with a higher maximum axial height and a heating plate 1112 with a lower maximum axial height, and the heating plate 1112 with a higher maximum axial height may be located in the connection area A, and the heating plate 1112 with a lower maximum axial height may be located in the anti-deformation area B. In this way, the structures of all the heating petals 111 in the heater body 11 may be unified, such as Figures 1 to 4 As shown, only one type of heating flap 111 needs to be provided in the heater body 11, which greatly reduces the types of materials in the heater and reduces production costs.

[0066] Optionally, the heater body 11 is divided into four equal zones of equal length along its circumference; the connection zone A and the anti-deformation zone B each include the heating plate 1112 with two heating lobes.

[0067] Optionally, the heating petal 111 may include a first zone and a second zone equally divided along the circumference of the heater body 11. The sum of the weights of the heating plates 1112 located in the first zone is a third weight, and the sum of the weights of the heating plates 1112 located in the second zone is a fourth weight, wherein the third weight is greater than the fourth weight. The heating plates 1112 in the first zone of the heating petal 111 are located in the connection zone A, and the heating plates 1112 in the second zone are located in the anti-deformation zone B. In this way, the first weight of the heating petal 111 in the anti-deformation zone B can be less than the second weight of the heating petal 111 in the connection zone A.

[0068] like Figure 5 As shown, in the circumference of the heater body 11, the heating petal 111 includes a first end C and a second end D that are arranged in opposite directions. The heating plate 1112 close to the first end C is the first heating plate, and the heating plate 1112 close to the second end D is the second heating plate. The axial height of the first heating plate is greater than the axial height of the second heating plate. The first end C can be located in the first zone of the heating petal 111, that is, the first heating plate can be located in the first zone of the heating petal 111, and the second end D can be located in the second zone of the heating petal 111, that is, the second heating plate is located in the second zone of the heating petal 111. In two adjacent heating petals 111, the first heating plate is connected to the foot plate 10, and the second heating plate is connected to the connecting plate 12. In this embodiment, a narrow groove is provided in the middle of the first heating plate and the second heating plate, which is approximately a U-shaped structure.

[0069] In specific applications, the first heating plate's greater axial height enhances the reliability of the connection between the first heating plate and the foot plate 10 after they are connected. Since the second heating plate 1112 has a smaller axial height, when a connecting plate 12 is used to connect the second heating plates 1112 of two adjacent heating petals 111, the axial height of the connecting plate 12 can be correspondingly reduced. This reduces the area of a single connecting plate 12 and lowers its cost. Furthermore, splicing short sections increases the temperature of the connecting plate 12 and the second heating plate, reducing cracks caused by silicone liquid adhesion.

[0070] Alternatively, as Figure 5 As shown, the axial heights of the plurality of heating plates 1112 decrease from the first end C to the second end D of the heating plate 1112. In practical applications, when the axial heights of the plurality of heating petals 111 of the heating petals 111 are in a decreasing trend, the processing of the heating petals 111 can be as follows: Figure 10 The arrangement is as shown, that is, the two heating petals 111 are processed simultaneously using the same plate, thereby avoiding material waste and reducing the cost of the heating petals 111. In addition, the processing efficiency of the heating petals 111 can be improved.

[0071] Optionally, the height of each heating plate 1112 in the heating petal 111 satisfies: H2+H n =H i +H (n－i+2) Wherein, H2 represents the axial height of the second heating plate 1112 adjacent to the end of the heating petal 111; H i represents the axial height of the i-th heating plate 1112 on the heating petal 111 along the circumferential direction, starting from the end where H2 is located; i is greater than 2 and less than or equal to n, where n is the total number of heating plates 1112 included in the heating petal 111. For example, in this embodiment, Figure 10As shown, the heating petal includes five heating plates 1112, where H2+H5=H3+H4. In this embodiment, the heating plate 1112 is a U-shaped petal with a narrow slot in the middle.

[0072] In practical applications, in H2+H n =H i +H (n－i+2) In the case of the heating flap 111, the long heating plate and the short heating plate are correspondingly embedded from one end to the other end. In this way, when processing the heating flap 111, two heating flaps 111 can be processed from the same plate, further reducing material costs.

[0073] The test data show that the Figure 10 The fabric processing of the heating petal 111 is carried out in the manner shown, that is, the long heating plate and the short heating plate of the heating petal 111 are correspondingly interlocked. Under the condition that the resistance range required by the heater is met, two heating petals 111 can be processed from the same plate, and the raw material cost is reduced by 50%.

[0074] Of course, in specific applications, the lengths of the multiple heating plates 1112 in the heating petal 111 can also be flexibly set according to actual conditions. For example, the heating plates 1112 in the heating petal 111 can be arranged in a manner that alternates between long and short, or staggered between long and short, which is not limited in this embodiment of the present application.

[0075] It should be noted that the drawings of the embodiments of the present application only show the case where the connection area A or the anti-deformation area B may include a heating plate 1112 with at least two heating petals 111. The case where the connection area A or the anti-deformation area B includes at least one heating petal 111 can be implemented accordingly.

[0076] Optionally, the heater body 11 may also be an integrally formed structure, that is, the heater body 11 may be obtained by a one-time processing method, so as to reduce the splicing process and improve the structural accuracy of the heater body 11 .

[0077] In summary, the heater described in the embodiments of the present application may have at least the following advantages:

[0078] In an embodiment of the present application, the heater body is provided with at least one anti-deformation zone between the connection zones with the footplates. The weight of the heater body in the anti-deformation zone is a first weight, and the weight of the heater body in the connection zone is a second weight, with the first weight being less than the second weight. In other words, the anti-deformation zone of the heater body located between the footplates is subject to less gravity, and the torque generated is correspondingly smaller. This minimizes the deformation of the anti-deformation zone under gravity, significantly extending the heater's service life.

[0079] An embodiment of the present application further provides a single crystal furnace, which may specifically include: a furnace body, a crucible, and the heater described in any of the above embodiments; wherein the crucible and the heater are both arranged in the furnace body; and the heater is sleeved outside the crucible.

[0080] It should be noted that, in the embodiment of the present application, the structure of the heater is the same as that of the heater described in any of the above embodiments, and its beneficial effects are similar, which will not be described in detail here. The single crystal furnace can specifically be a single crystal furnace.

[0081] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative uses of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0082] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A heater, characterized in that: The heater comprises: a foot plate (10) and an annular heater body (11) connected to the foot plate (10), wherein the heater body (11) is divided into a plurality of equal-length partitions along its circumference; wherein, Among the multiple equal zones, the equal zones connected to the foot plate (10) are connection zones (A), and among the equal zones between the connection zones (A), at least one equal zone is an anti-deformation zone (B); The weight of the heater body (11) in the anti-deformation area (B) is a first weight, and the weight of the heater body (11) in the connection area (A) is a second weight, and the first weight is smaller than the second weight.

2. The heater according to claim 1, wherein The maximum axial height of the heater body (11) in the anti-deformation zone (B) is smaller than the maximum axial height of the heater body (11) in the connection zone (A).

3. The heater according to claim 2, characterized in that The maximum axial height of the heater body (11) in the connection area (A) is a first height, and the first height is less than or equal to 300 mm; And / or, the minimum axial height of the heater body (11) in the anti-deformation zone (B) is a second height, and the second height is greater than or equal to 30 mm.

4. The heater according to claim 1 or 2, characterized in that The heater body (11) comprises two axial end surfaces arranged axially away from each other; wherein, At least part of the axial end surface of the connecting area (A) and at least part of the axial end surface of the anti-deformation area (B) are arranged flush.

5. The heater according to claim 4, characterized in that Of the two axial end faces of the heater body (11), the axial end face away from the foot plate (10) is the first end face, and the first end faces of the connection area (A) and the anti-deformation area (B) are arranged flush.

6. The heater according to claim 1, wherein The heater body (11) comprises a plurality of heating plates (1112) connected in sequence along its circumference, and the maximum axial heights of the plurality of heating plates (1112) are non-uniform; The maximum axial height sum of the heating plate (1112) located in the anti-deformation zone (B) is a first height sum, and the maximum axial height sum of the heating plate (1112) located in the connection zone (A) is a second height sum, and the first height sum is smaller than the second height sum.

7. The heater according to claim 6, characterized in that The heating plate (1112) located in the anti-deformation zone (B) and the heating plate (1112) located in the connection zone (A) have the same thickness in the radial direction of the annular heater body (11), and the ratio of the first height sum to the second height sum is less than or equal to 9:

10.

8. The heater according to claim 1, wherein The heater body (11) comprises a plurality of heating petals sequentially spliced along its circumference; the connection area (A) or the anti-deformation area (B) comprises at least one heating petal; The heating flap (111) includes a plurality of heating plates (1112) connected in sequence along the circumference of the heater body (11).

9. The heater according to claim 1, wherein The heater body (11) comprises a plurality of heating petals (111) sequentially connected along its circumference, and the heating petals (111) comprise a plurality of heating plates (1112) sequentially connected along the circumference of the heater body (11); wherein, The connection zone (A) or the anti-deformation zone (B) comprises the heating plate (1112) having at least two heating lobes.

10. The heater according to claim 9, characterized in that The heater body (11) is divided into four equal sections of equal length along its circumference; The connection zone (A) and the anti-deformation zone (B) include the heating plate (1112) having two heating lobes.

11. The heater according to claim 9 or 10, characterized in that The heating flap (111) comprises a first zone and a second zone equally divided along the circumference of the heater body (11), the sum of the weights of the heating plates (1112) located in the first zone is a third weight, the sum of the weights of the heating plates (1112) located in the second zone is a fourth weight, and the third weight is greater than the fourth weight; wherein, The heating plate (1112) in the first zone of the heating flap (111) is located in the connection zone, and the heating plate (1112) in the second zone is located in the anti-deformation zone.

12. The heater according to claim 9 or 10, characterized in that Along the circumference of the heater body (11), the heating flap (111) includes a first end (C) and a second end (D) that are arranged in a direction opposite to each other, the heating plate (1112) located at the first end (C) is a first heating plate, and the heating plate (1112) located at the second end (D) is a second heating plate, and the axial height of the first heating plate is greater than the axial height of the second heating plate; wherein, In two adjacent heating lobes (111), the first heating plate is connected to the foot plate (10).

13. The heater according to claim 12, characterized in that From the first end (C) to the second end (D) of the heating plate (1112), the axial heights of the plurality of heating plates (1112) decrease.

14. The heater according to claim 13, wherein The axial height of each heating plate (1112) in the heating petal satisfies, H2+H n =H i +H (n－i+2) ; Wherein, H2 represents the axial height of the second heating plate (1112) adjacent to the end of the heating flap (111); H i It represents the axial height of the i-th heating plate (1112) on the heating lobe (111) along the circumferential direction, starting from the end where H1 is located; i is greater than 2 and less than or equal to n, and n is the total number of the heating plates (1112) included in the heating lobe (111).

15. The heater according to claim 1, wherein The heater body is an integrally formed structure.

16. A single crystal furnace, characterized in that: The single crystal furnace comprises: the heater according to any one of claims 1 to 15.

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