Self-cleaning system and method for photomask box bearing table

Abstract

The embodiment of the invention provides a self-cleaning system and method for a photomask box bearing table. The system comprises the photomask box bearing table; the photomask box bearing table is provided with a containing cavity with an opening in the top, and a containing space is provided for a photomask taken out from the photomask box; the top opening of the photomask box bearing table is provided with a bearing step, and the bearing step is matched with the bottom of the photomask box and is used for bearing the photomask box; the air injection device is located on the top surface of the photomask box bearing table, and the air injection device is provided with a plurality of groups of air nozzles arranged around the bearing step; wherein the air injection direction of the air injection device partially or completely faces the photomask box, and part or all of the air injection direction is parallel to the top plane of the photomask box bearing table and / or the top surface of the photomask box. By adopting the technical scheme, the cleanliness of the bearing port of the photomask box can be improved.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of semiconductor manufacturing technology, and more particularly to a self-cleaning system and method for a reticle box carrier. Background Art

[0002] In the semiconductor production process, the mask box carrier of the lithography machine is exposed to the outside air. When the mask box is placed on the mask box carrier, it will be opened directly to take out the mask, which causes contamination particles to easily fall on the mask. Manual regular cleaning is frequent and inefficient, and it is easy to forget to clean, which increases the risk of mask contamination and affects product yield.

[0003] Therefore, how to provide a technical solution to solve the cleanliness problem of the mask box carrier has become a technical problem that needs to be solved urgently. Summary of the Invention

[0004] In view of this, embodiments of the present invention provide a self-cleaning system and method for a reticle box carrier, which can effectively improve the cleanliness of the reticle box carrier.

[0005] In order to solve the above technical problems, an embodiment of the present invention provides a self-cleaning system for a mask box carrier, comprising: a mask box carrier; the mask box carrier has a accommodating cavity with a top opening, which provides a storage space for the mask taken out from the mask box; the top opening of the mask box carrier has a supporting step, which is adapted to the bottom of the mask box and is used to support the mask box; an air jet device is located on the top surface of the mask box carrier, and the air jet device has multiple groups of air jet nozzles arranged around the supporting step; wherein, the air jet direction of the air jet device is partially or entirely toward the mask box, and partially or entirely of the air jet direction is parallel to the top plane of the mask box carrier and / or the top surface of the mask box.

[0006] Optionally, the top opening of the mask box carrying platform further has an operating rod for opening the mask box.

[0007] Optionally, the carrying step is in a step shape and is recessed below the top plane of the mask box carrying platform.

[0008] Optionally, an angle between the air jet directions of the plurality of air jet nozzles and a top plane of the reticle box carrier is selected from 20 degrees to 80 degrees.

[0009] Optionally, the multiple groups of air nozzles are adjustable air nozzles, and the air jet directions of the respective air nozzles are different; wherein the multiple groups of air nozzles are evenly distributed on opposite sides of the top opening.

[0010] Optionally, the jet device also includes: a jet gun located on the top plane of the mask box carrier and located on opposite sides of the top opening; wherein, the jet direction of the jet gun is toward the accommodating cavity, and / or, the angle between the jet direction of the jet gun and the top plane of the mask box carrier is selected from 45 degrees to 60 degrees.

[0011] Optionally, the air gun is connected to the top plane of the mask box carrier via a guide rail, and the air gun corresponds to the guide rail one-to-one; the guide rail is located on the top plane of the mask box carrier and is located on opposite sides of the top opening, and a slider is provided on the guide rail, and the slider is used to fix the air gun.

[0012] Optionally, the air gun is detachably connected to the slider; wherein the air gun fixed to the slider and / or the air gun that is movable after disassembly is connected to an air supply pipe for providing ultra-clean dry gas to the connected air gun.

[0013] Optionally, a bearing surface of the bearing step is provided with a sensing device for sensing whether the bearing step is bearing the mask box.

[0014] Optionally, the mask box carrier platform self-cleaning system further includes: a control unit; the control unit is coupled to the jet device and the sensing device, and controls the jet device to be turned on or off in response to a signal from the sensing device detecting whether the mask box carrier platform is carrying the mask box.

[0015] Accordingly, the present invention also provides a self-cleaning method for a reticle box carrier, wherein the self-cleaning system for the reticle box carrier includes a reticle box carrier and a control unit, an operating rod at a top opening of the reticle box carrier, an air jet device coupled to the control unit, and a sensing device, wherein the air jet device includes multiple sets of air jet nozzles, an air jet gun, and a guide rail;

[0016] The method includes: in response to the self-cleaning system of the mask box carrier being started, turning on the jet function of the multiple groups of air nozzles through the control unit; in response to the signal that the sensing device detects that the mask box carrier is carrying the mask box, controlling the operating rod to open the mask box; in response to the signal that the sensing device detects that the mask box is taken away, turning off the multiple groups of air nozzles to stop jetting, and turning on the jet function of the air gun; controlling the guide rail to drive the air gun to move back and forth on the guide rail at a preset speed; after a preset time period, turning off the jet function of the air gun and turning on the jet function of the multiple groups of air nozzles.

[0017] Optionally, the method satisfies one or more of the following: the preset time length is selected from [3 min, 5 min]; the gas flow rate is selected from 3 L / min to 10 L / min.

[0018] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0019] In the self-cleaning system for a mask box carrier provided by an embodiment of the present invention, a supporting step is provided at the top opening of the mask box carrier for supporting the bottom of the mask box; the mask box carrier also has a receiving cavity with a top opening for providing a storage space for a mask removed from the mask box. An air jet device is located on the top surface of the mask box carrier, and the air jet device has multiple groups of air jet nozzles arranged around the supporting step; wherein the air jet direction of the air jet device is partially or entirely toward the mask box, and the air jet direction is parallel to the top plane of the mask box carrier and / or the top surface of the mask box, so as to reduce the probability of particles falling into the mask box carrier by jetting in the direction of the mask box. Therefore, the cleanliness of the mask box carrier can be effectively improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the invention of this specification, the following briefly introduces the drawings required for use in the embodiments of the invention of this specification or the description of the prior art. Obviously, the drawings described below are only some embodiments of this specification. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0021] Figure 1 A schematic diagram of a self-cleaning system for a reticle box carrier platform according to an embodiment of the present invention is shown;

[0022] Figure 2 A schematic flow chart of a self-cleaning method for a reticle box carrier according to an embodiment of the present invention is shown.

[0023] Description of reference numerals:

[0024] The reticle box carrier 100 , the carrier step 101 , the accommodating chamber 102 , the air nozzle 111 , the air gun 112 , the guide rail 120 , the reticle box 130 , and the sensing device 140 . DETAILED DESCRIPTION

[0025] The technical solutions of the present invention are described in detail below in conjunction with specific embodiments and the accompanying drawings. The embodiments described herein are specific embodiments of the present invention and are used to illustrate the concept of the present invention. These descriptions are all illustrative and exemplary and should not be construed as limiting the embodiments of the present invention and the scope of protection of the present invention. In addition to the embodiments described herein, those skilled in the art can also adopt obvious other technical solutions based on the contents disclosed in the claims of this application and the specification thereof, including technical solutions that adopt any obvious replacements and modifications to the embodiments described herein.

[0026] It should be noted that the drawings in this embodiment are schematic diagrams to assist in illustrating the concept of the present invention and schematically illustrate the shapes of the various components and their interrelationships. It should be understood that in order to clearly illustrate the structure of the various components of the present invention, the drawings are not drawn to the same scale, and the same reference numerals are used to represent the same parts in the drawings.

[0027] As described in the background technology, in the semiconductor production process, the mask box carrier of the lithography machine is exposed to the outside air. When the mask box is placed on the mask box carrier, the mask box will be opened directly to take out the mask, which causes contamination particles to easily fall on the mask. Manual regular cleaning is frequent and inefficient, and it is easy to forget to clean, which increases the risk of mask contamination and affects product yield.

[0028] To solve the above-mentioned technical problems, an embodiment of the present invention provides a self-cleaning system for a mask box carrier, wherein the top opening of the mask box carrier is provided with a supporting step for supporting the bottom of the mask box; the mask box carrier also has a receiving cavity with a top opening for providing a storage space for the mask removed from the mask box. An air jet device is located on the top surface of the mask box carrier, and the air jet device has multiple groups of air jet nozzles arranged around the supporting step; wherein the air jet direction of the air jet device is partially or entirely directed toward the mask box, and the air jet direction is parallel to the top plane of the mask box carrier and / or the top surface of the mask box, so as to reduce the probability of particles falling into the mask box carrier by jetting in the direction of the mask box. Therefore, the cleanliness of the mask box carrier can be effectively improved.

[0029] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is described clearly and completely below with reference to the accompanying drawings.

[0030] See also Figure 1 , Figure 1 A schematic diagram of a self-cleaning system for a reticle box carrier according to an embodiment of the present invention is shown, wherein the reticle box 130 is connected to the reticle box carrier 100 by a dotted line to indicate the position of the reticle box 130 on the reticle box carrier 100 .

[0031] In this embodiment, the reticle box carrier self-cleaning system may include: a reticle box carrier 100 and an air jet device.

[0032] The reticle box carrier 100 has a receiving cavity 102 with an open top.

[0033] The top opening of the reticle box carrying platform 100 has a carrying step 101 , that is, the carrying step 101 is located at the top opening of the accommodating cavity 102 and is used to carry the reticle box 130 .

[0034] The supporting step 101 is adapted to the bottom of the reticle box 130 and is used to support the reticle box 130. In other words, the supporting step 101 is step-shaped and is recessed from the top plane of the reticle box supporting platform 100. In other words, the supporting step 101 is recessed downward from the top plane of the reticle box supporting platform 100.

[0035] The support step 101 may have a top-down shape of one or more of a "U," a "C," and a "U." In some embodiments, the support step 101 comprises a plurality of support blocks disposed at the top opening to support the reticle box 130, with the support blocks evenly distributed across the top opening. In this embodiment, the support step 101 has a top-down shape of a "C." Persons skilled in the art may select the shape of the support step 101 based on practical needs, and this is not intended to limit this application.

[0036] In some embodiments, the supporting step 101 protrudes from the top plane of the reticle box supporting platform 100 to support the reticle box 130 and limit the position of the reticle box 130 .

[0037] The carrying step 101 is provided with a sensing device 140 for sensing whether the carrying step 101 carries the reticle box 130. The sensing device 140 is selected from one or more of a photoelectric sensor, a pressure sensor, a capacitive proximity switch, a magnetic induction sensor, and an ultrasonic sensor.

[0038] Those skilled in the art can selectively place the sensing device 140 on the supporting step 101 according to the type of sensing device 140 actually used. The present invention does not limit the location of the sensing device 140, as long as the sensing device 140 can identify the position of the reticle box 130 on the supporting step 101.

[0039] In this embodiment, the bearing surface of the bearing step 101 is provided with the sensing device 140, and the sensing device 140 is a pressure sensor. Among them, the pressure sensor is preferably a piezoresistive pressure sensor. The piezoresistive pressure sensor is based on the principle of strain gauge. When subjected to pressure, the resistance changes, thereby generating a detection signal that characterizes the relative position of the sensing device 140 and the bearing step 101. This type of sensor has high precision and is suitable for static and dynamic measurements. In addition, the MEMS (micro-electromechanical system) pressure sensor has a small size and high integration, and is suitable for embedding in a compact space. The piezoresistive MEMS (micro-electromechanical system) pressure sensor has high precision and good reliability and is suitable for semiconductor manufacturing environments.

[0040] In this embodiment, there are two sensing devices 140, positioned opposite the supporting surface of the supporting step 101. This allows the remaining sensing devices 140 to continue performing the inspection process normally if one of the sensing devices 140 fails, thereby improving fault tolerance and stability. In some embodiments, the sensing devices 140 can be positioned in all areas of the supporting step 101 that contact the photomask.

[0041] It should be noted that the above examples do not limit the number of the sensing devices 140 . In addition to the two shown in the above examples, there may be multiple sensing devices 140 , such as three, four, or five.

[0042] Specifically, the reticle box 130 falls downward along the F direction into the reticle box carrier 100 and is received by the carrier step 101. When the sensing device 140 on the carrier step 101 senses that the reticle box 130 has fallen on the carrier step 101, a signal is generated, indicating that the reticle box 130 has been placed on the reticle box carrier 100. When the reticle box 130 leaves and is removed, the sensing device 140 on the carrier step 101 senses that the reticle box 130 has left the carrier step 101 and sends a signal that the reticle box 130 has been removed.

[0043] The top opening of the pod carrier 100 is also provided with an operating lever (not shown) for opening the pod 130. The operating lever abuts against the bottom surface of the pod 130 resting on the supporting step 101, and the operating lever adopts an eccentric dual-axis linkage structure (the main lever rotates and the secondary lever rises to open the pod 130).

[0044] Specifically, the relative height of the operating rod's contact surface with the lower bottom surface of the reticle box 130 is less than or equal to the relative height of the supporting surface of the supporting step 101 supporting the reticle. The relative height is the height relative to the bottom plane of the reticle box supporting platform 100. This prevents the operating rod from propping up the reticle box 130 and affecting the sensing results of the sensing device 140.

[0045] The accommodating cavity 102 provides a space for accommodating the reticle taken out from the reticle box 130 .

[0046] Specifically, the accommodating cavity 102 is connected to a robot operation channel, and a robot can extend into the accommodating cavity 102 through the robot operation channel to take out the photomask from the photomask box 130 .

[0047] The air-jet device is located on the top surface of the reticle box carrier 100 , and has a plurality of air-jet nozzles 111 arranged around the carrier step 101 .

[0048] The air nozzle 111 is connected to an air supply pipe, and the air supply pipe corresponds to the air nozzle 111. The air supply pipe is connected to an external air supply system to achieve stable delivery and precise control of the gas.

[0049] In some embodiments, at the connection between the reticle box carrier 100 and the air injection device, the reticle box carrier 100 has a through hole for the air supply pipe to pass through.

[0050] In some embodiments, the pod carrier 100 is provided with a through-hole for the gas supply pipe at its connection to the gas injection device. This ensures a compact and rational structure and prevents cluttered piping from impacting the overall layout and operational stability. A valve is provided at the connection between the gas supply pipe and the external gas supply system, and / or at the connection between the gas supply pipe and the gas nozzle 111. The valve near the external gas supply system can be used to control the overall on / off flow of the gas source and to initially adjust the gas flow rate, thereby precisely controlling the gas supply according to actual needs.

[0051] The valve close to the air nozzle 111 is used to control the gas outlet of the corresponding air nozzle 111 and perform fine adjustment. The gas flow rate, pressure and other parameters of each air nozzle 111 can be independently adjusted according to different working scenarios to adapt to diverse process requirements.

[0052] In some embodiments, the air supply pipe is connected to an air compressor. As the air supply source, the air compressor can strongly compress air and deliver it to the air supply pipe. The air is then ejected through the air nozzle 111 and a valve adjacent to the air nozzle 111 at an appropriate pressure and flow rate. This device design and layout can provide a stable and reliable gas environment for related processes, significantly improving the efficiency and quality of production or experimental processes.

[0053] The jetting direction of the jetting device is partially or entirely directed toward the reticle box 130 , and the partially or entirely jetting direction is parallel to the top plane of the reticle box carrier 100 and / or the top surface of the reticle box 130 .

[0054] Specifically, the air jet device is partially or entirely directed toward the reticle box 130 to spray air toward the reticle box 130, that is, the air jet device is partially or entirely directed toward the top opening of the reticle box carrier 100 and / or the central axis direction of the top opening of the reticle box carrier 100. The partial or entire air jet direction is parallel to the top plane of the reticle box carrier 100 and / or the top surface of the reticle box 130, so that the gas ejected by the air jet device covers the top opening direction of the reticle box carrier 100, thereby preventing particles of dust from falling into the interior of the accommodating cavity through the opening.

[0055] An included angle between the air-jet directions of the plurality of air-jet nozzles 111 and the top plane of the reticle box carrier 100 is selected from 20 degrees to 80 degrees.

[0056] Specifically, the air jet directions of the multiple groups of air nozzles 111 are all directed toward the top opening of the reticle box carrier 100, that is, toward the reticle box 130. A certain angle is formed between the air jet directions of the multiple groups of air nozzles 111 and the top plane of the reticle box carrier 100, and the angle is selected from 20 degrees to 80 degrees. In other words, with the top plane of the reticle box carrier 100 as a horizontal plane, the multiple groups of air nozzles 111 spray air above the top opening of the reticle box carrier 100, that is, from bottom to top.

[0057] In some embodiments, the air jet directions of the multiple groups of air nozzles 111 are aligned at the same angle to the top plane of the reticle box carrier 100, and the air jet directions of the multiple groups of air nozzles 111 are different. This configuration allows the air jet range of the air nozzles 111 to be wider, making it less likely for dust particles to fall into the accommodating cavity through the opening.

[0058] In this embodiment, the multiple groups of air nozzles 111 are adjustable air nozzles, and the air jet directions of the air nozzles 111 are different.

[0059] Specifically, the multiple groups of air nozzles 111 can adjust the angle between the air jet direction of the air nozzle 111 and the top plane of the mask box carrier 100, so that the air jet direction of each air nozzle 111 is different, and the planes perpendicular to the top plane of the mask box carrier 100 where the air jet directions of each air nozzle 111 are located are parallel.

[0060] The nozzle of the adjustable air nozzle is snap-fitted to the overall structure of the adjustable air nozzle, and the nozzle can be rotated around the snap-fitting position, so that the nozzle can be rotated by manual adjustment to change the angle between the air jet direction of the air nozzle 111 and the top plane of the mask box carrier 100.

[0061] In some embodiments, the planes perpendicular to the top plane of the mask box carrier 100 and the jet directions of the air nozzles intersect with each other, so that the jet range of the air nozzle 111 is wider and the particle dust is less likely to fall into the interior of the accommodating cavity from the opening.

[0062] In one embodiment, the multiple groups of air nozzles 111 are evenly distributed on opposite sides of the top opening. Specifically, the multiple groups of air nozzles 111 are disposed opposite each other, and the air jetting directions form an angle with the top plane of the reticle pod carrier 100. The air jetting directions are directed upward from the top opening, so that the gases ejected from the air nozzles 111 converge above the top opening and flow upward.

[0063] In a specific embodiment, the number of the air nozzles 111 on one side of the top opening is four.

[0064] It should be noted that the above example does not constitute a limitation on the number of the air nozzles 111 on one side of the top opening. In addition to the 4 shown in the above example, the number of the air nozzles 111 on one side of the top opening can also be multiple, such as: 2, 3, 5.

[0065] The air-jetting device further includes air-jet guns 112 located on the top plane of the pod carrier 100 and on opposite sides of the top opening. The air-jet guns 112 direct air toward the receiving cavity 102, and / or the angle between the air-jet guns 112 and the top plane of the pod carrier 100 is selected from 45 to 60 degrees.

[0066] Specifically, the air-jetting device includes symmetrically distributed air-jet guns 112 located on opposite sides of the top opening and on different sides from the plurality of air-jet nozzles 111. The air-jet guns 112 spray air in a direction inclined toward the receiving cavity 102 at a fixed angle selected from 45 to 60 degrees relative to a direction perpendicular to the top plane of the reticle box carrier 100.

[0067] The air guns 112 are connected to the top plane of the pod platform 100 via guide rails 120, and the air guns 112 correspond one to one with the guide rails 120. The guide rails 120 are located on the top plane of the pod platform 100 and on opposite sides of the top opening.

[0068] The guide rail 120 has a slider (not shown) thereon, and the slider fixes the spray gun 112 .

[0069] The air gun 112 is detachably connected to the slider. The air gun 112 fixed to the slider and / or the air gun 112 that can be removed and moved is connected to an air supply pipe for supplying ultra-clean dry gas to the connected air gun 112.

[0070] Specifically, the guide rails 120 are mounted on the top plane of the pod carrier 100 and are located on opposite sides of the top opening. The guide rails 120 are mounted at a different location than the multiple sets of air nozzles 111 are located on the top plane of the pod carrier 100. The length of the guide rails 120 matches the length of one side of the top opening, i.e., the length of the guide rails 120 is greater than or equal to the length of one side of the top opening, enabling the air gun 112 to blow air along the guide rails 120 to all areas of the accommodating chamber 102 facing the air gun 112.

[0071] In some embodiments, the guide rail 120 is preferably made of high-strength aluminum alloy or stainless steel, which has high rigidity and wear resistance to ensure that the accuracy is maintained during long-term use.

[0072] In addition, the surface of the guide rail 120 may be coated with a lubricating coating to reduce frictional resistance when the slider moves.

[0073] In some embodiments, the slider is disposed on the guide rail 120 to fix the air gun 112. The slider is preferably a mobile platform, and a sliding groove is provided at the bottom thereof to cooperate with the guide rail 120 to ensure smooth movement.

[0074] In some embodiments, a mounting bracket is provided on the upper portion of the slider for fixing the air gun 112 and directing the air jet of the air gun 112 toward the accommodating cavity 102. The mounting bracket can be adjusted in angle and height to accommodate accommodating cavities 102 of different sizes and shapes.

[0075] In some embodiments, a limiter may be further provided on the guide rail 120 to limit the movement range of the slider to prevent overtravel.

[0076] In some embodiments, a drive motor is used to drive the slider to move along the guide rail 120 .

[0077] Specifically, the driving motor is preferably a stepping motor or a servo motor, which has high precision and high response speed and can achieve precise control of the air jet gun 112.

[0078] In some embodiments, the drive motor is connected to the slider via a coupling to convert rotational motion into linear motion.

[0079] In addition, the drive motor may be equipped with a speed reducer to improve torque and motion smoothness.

[0080] In a specific embodiment, the air gun 112 can move back and forth along the guide rail 120 at a moving speed of 2 cm / s.

[0081] In another embodiment, the air gun 112 is detachably connected to the slider, that is, the air gun 112 is connected to the slider via a snap-fit connection, and the air gun 112 can be directly removed from the slider. The detached air gun 112 is still connected to the air supply pipe, which is used to supply ultra-clean dry gas to the connected air gun 112, thereby allowing precise air jet cleaning by holding the air gun 112.

[0082] The control unit is coupled to the air jet device and the sensing device 140 , and controls the opening or closing of the air jet nozzle 111 and / or the air jet gun 112 in response to a signal from the sensing device 140 detecting whether the reticle box 130 is carried.

[0083] It should be noted that the control unit is only a division of logical functions, and in actual implementation, it can be fully or partially integrated into a physical entity, or physically separated. In addition, the control unit can be implemented in the form of a processor calling software.

[0084] In this embodiment, the control unit is coupled to the air compressor, the drive motor and the sensing device 140 respectively. The control unit can receive a signal from the sensing device 140 indicating whether the supporting step 101 carries the mask box 130, and control the opening and closing of the air compressor and the drive motor according to the signal of whether the supporting step 101 carries the mask box 130.

[0085] In some embodiments, the sensing device 140 detects the position of the slider in real time and feeds the position information back to the control unit.

[0086] In some embodiments, the control unit is coupled to the valve to control the gas flow in the air nozzle 111 and / or the air gun 112 .

[0087] In this embodiment, the gas flow rate is selected from 3 L / min to 10 L / min. In a specific embodiment, the gas flow rate is 5 L / min.

[0088] In some embodiments, the control unit is preferably a microcontroller (MCU) or a programmable logic controller (PLC) with a built-in control algorithm that can adjust the position of each of the air jets 112 in real time to ensure that their relative positions on their respective guide rails 120 are consistent.

[0089] It can be understood that the above describes multiple embodiment schemes provided by this embodiment, and the various optional methods introduced in each embodiment scheme can be combined and cross-referenced with each other without conflict, thereby extending a variety of possible embodiment schemes, which can all be considered as embodiment schemes disclosed and open to the public by the present invention.

[0090] This embodiment also provides a self-cleaning method for a reticle box carrier platform corresponding to the self-cleaning system for the reticle box carrier platform.

[0091] It should be noted that the content of the self-cleaning method for the reticle box carrier described below can be referenced to the content of the self-cleaning system for the reticle box carrier described above.

[0092] See also Figure 2 , Figure 2 A flow chart of a self-cleaning method for a mask box carrier platform in an embodiment of the present invention is shown. The self-cleaning system of the mask box carrier platform includes a mask box carrier platform and a control unit, an operating rod at the top opening of the mask box carrier platform, an air jet device and a sensing device coupled to the control unit, the air jet device includes multiple groups of air jet nozzles, an air jet gun, and a guide rail. The method can perform the following steps S20 to S24, and each step is explained below.

[0093] In step S20, in response to the reticle box carrier self-cleaning system being started, the air-jet functions of the plurality of air-jet nozzles are turned on by the control unit.

[0094] Specifically, the control unit receives a start signal from the self-cleaning system of the reticle box carrier, or manually starts the reticle carrier (powers the reticle carrier), and then receives a start signal. The control unit activates the air jet function of the multiple sets of air nozzles, that is, the control unit activates the air supply device to provide ultra-clean dry gas to the multiple sets of air nozzles.

[0095] In some embodiments, the control unit can also control the valve (automatic regulating valve), which is a valve close to the air nozzle to adjust the gas flow through the air nozzle to achieve an optimal balance between the self-cleaning ability of the mask box carrier and resource consumption.

[0096] In step S21 , in response to a signal from the sensing device detecting that the reticle box carrying platform carries the reticle box, the operating rod is controlled to open the reticle box.

[0097] Specifically, when the robotic arm places the mask box on the carrying step at the top opening of the mask box carrier, the sensing device detects that the carrying step carries the mask box, and then the sensing device sends a signal detecting that the mask box carrier carries the mask box. After the control unit receives the signal sent by the sensing device detecting that the mask box carrier carries the mask box, it controls the operating lever to open the mask box.

[0098] In this embodiment, after the sensing device detects that the mask box is placed on the carrying step at the top opening of the mask box carrying platform, the multiple groups of air nozzles continue to spray air toward the mask box to clean the outer surface of the mask box.

[0099] In some embodiments, after the sensing device detects that the mask box is placed on the supporting step at the top opening of the mask box supporting platform, in response to the signal detected by the sensing device that the mask box supporting platform is supporting the mask box, the control unit controls the closing of the multiple groups of air nozzles to stop the air jets.

[0100] In step S22, in response to the signal that the sensing device detects that the reticle box is taken away, the multiple groups of air nozzles are closed to stop air jetting, and the air jet function of the air jet gun is turned on.

[0101] Specifically, when the robotic arm takes out the mask box placed on the supporting step at the top opening of the mask box supporting platform, the sensing device detects that the mask box at the supporting step is taken away, and then the sensing device sends a signal detecting that the mask box is taken away. After the control unit receives the signal sent by the sensing device detecting that the mask box is taken away, the control unit controls the closure of the multiple groups of air nozzles to stop air jetting, and turns on the air jet function of the air gun.

[0102] More specifically, the control unit controls a valve near the air nozzles to close the valves and stop the gas supply to the multiple air nozzles. The control unit controls a valve near the air guns to open the valves and start supplying ultra-clean dry gas to the air guns.

[0103] In step S23, the guide rail is controlled to drive the air jet gun to move back and forth on the guide rail at a preset speed.

[0104] In this embodiment, the control unit controls the driving motor to drive the slider to drive the air jet gun to move back and forth along the guide rail.

[0105] The preset speed is selected from [1 cm / s, 8 cm / s]. In a specific embodiment, the preset speed is 2 cm / s.

[0106] In some embodiments, a limiter may be further provided on the guide rail to limit the moving range of the slider to prevent overtravel.

[0107] In step S24, after a preset time period, the jetting function of the jet gun is turned off, and the jetting functions of the multiple groups of jet nozzles are turned on.

[0108] The preset duration is selected from [3 min, 5 min]. In a specific embodiment, the preset duration is 3 min.

[0109] The control unit controls the valves near the air guns to close the valves and stop the gas supply to the multiple air guns. The control unit controls the valves near the air nozzles to open the valves and start supplying ultra-clean dry gas to the air nozzles.

[0110] In some embodiments, the air supply devices of the multiple groups of air nozzles and the air gun are independent of each other, and the control unit can control the closing / opening of the multiple groups of air nozzles and the air gun by controlling the closing / opening of the air supply device.

[0111] It can be understood that the above describes multiple embodiment schemes of the self-cleaning method of the mask box carrier. The various optional methods introduced in each embodiment scheme can be combined and cross-referenced with each other without conflict, thereby extending a variety of possible embodiment schemes, which can all be considered as the embodiment schemes disclosed and open to the public by the present invention.

[0112] The above embodiments can be implemented in whole or in part by software, hardware, firmware or any other combination. When implemented using software, the above embodiments can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions or computer programs. When the computer instructions or computer program are loaded or executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer program can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer program can be transmitted from one website, computer, server or data center to another website, computer, server or data center by wired or wireless means.

[0113] It should be understood that the term "and / or" as used herein simply describes an association between related objects, indicating that three possible relationships exist. For example, "A and / or B" can represent: A exists alone, A and B exist simultaneously, or B exists alone. Furthermore, the character " / " as used herein indicates that the related objects are in an "or" relationship.

[0114] The term "plurality" used in the embodiments of the present application refers to two or more.

[0115] The first, second, etc. descriptions appearing in the embodiments of this application are only for illustration and distinction of the description objects. There is no order, nor does it indicate any special limitation on the number of devices in the embodiments of this application, and cannot constitute any limitation on the embodiments of this application.

[0116] It should be noted that the serial numbers of the steps in this embodiment do not limit the execution order of the steps.

[0117] Although the embodiments of the present invention are disclosed above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be based on the scope defined by the claims.

Claims

1. A self-cleaning system for a mask box carrier, characterized in that: include: Mask box carrier; The mask box supporting platform has a receiving cavity with a top opening, which provides a receiving space for the mask taken out from the mask box; The top opening of the mask box carrying platform is provided with a carrying step, and the carrying step is adapted to the bottom of the mask box and is used to carry the mask box; The air-jet device is located on the top surface of the reticle box carrying platform, and the air-jet device has a plurality of air-jet nozzles arranged around the carrying step; Wherein, the jetting direction of the jetting device is partially or entirely toward the mask box, and partially or entirely parallel to the top plane of the mask box carrying platform and / or the top surface of the mask box.

2. The self-cleaning system for the reticle box carrier according to claim 1, characterized in that: The top opening of the mask box carrying platform is further provided with an operating rod for opening the mask box.

3. The self-cleaning system for the reticle box carrier according to claim 1, characterized in that: The carrying step is in a step shape and is recessed below the top plane of the mask box carrying platform.

4. The self-cleaning system for the reticle box carrier according to claim 1, wherein: An included angle between the air-jet directions of the plurality of air-jet nozzles and the top plane of the reticle box carrier is selected from 20 degrees to 80 degrees.

5. The self-cleaning system for the reticle box carrier according to claim 4, characterized in that: The multiple groups of air nozzles are adjustable air nozzles, and the air jet directions of the air nozzles are different; Wherein, the multiple groups of air nozzles are evenly distributed on two opposite sides of the top opening.

6. The self-cleaning system for the reticle box carrier according to claim 1, characterized in that: The air jet device further includes: an air jet gun located on the top plane of the reticle box carrier and located on opposite sides of the top opening; The jetting direction of the jet gun is toward the accommodating cavity, and / or the angle between the jetting direction of the jet gun and the top plane of the reticle box carrier is selected from 45 degrees to 60 degrees.

7. The self-cleaning system for the reticle box carrier according to claim 6, wherein: The air jet gun is connected to the top plane of the reticle box carrier via a guide rail, and the air jet gun corresponds to the guide rail one by one; The guide rails are located on the top plane of the mask box carrying platform and on two opposite sides of the top opening. Slide blocks are provided on the guide rails, and the slide blocks are used to fix the air jet gun.

8. The self-cleaning system for the reticle box carrier according to claim 7, characterized in that: The air jet gun and the slider are detachably connected; The air jet gun fixed on the slider and / or the air jet gun movable after removal is connected to an air supply pipe for providing ultra-clean dry gas to the connected air jet gun.

9. The self-cleaning system for the reticle box carrier according to claim 1, wherein: The bearing surface of the bearing step is provided with a sensing device for sensing whether the bearing step is bearing the mask box.

10. The self-cleaning system for the reticle box carrier according to claim 9, wherein: Also includes: control unit; The control unit is coupled to the air-jetting device and the sensing device, and controls the air-jetting device to be turned on or off in response to a signal from the sensing device detecting whether the reticle box carrying platform carries the reticle box.

11. A self-cleaning method for a mask box carrier, characterized in that: The self-cleaning system for the reticle box carrier includes a reticle box carrier and a control unit, an operating rod at a top opening of the reticle box carrier, an air jet device and a sensing device coupled to the control unit, wherein the air jet device includes multiple sets of air jet nozzles, an air jet gun, and a guide rail; The method comprises: In response to the reticle box carrier self-cleaning system being started, turning on the air-jet functions of the plurality of air-jet nozzles through the control unit; In response to a signal detected by the sensing device that the reticle box carrying platform carries the reticle box, controlling the operating rod to open the reticle box; In response to the sensing device detecting a signal that the reticle box is taken away, closing the plurality of air nozzles to stop air jetting and turning on the air jet function of the air jet gun; Controlling the guide rail to drive the jet gun to move back and forth on the guide rail at a preset speed; After a preset time period, the jet function of the jet gun is turned off, and the jet functions of the multiple groups of jet nozzles are turned on.

12. The self-cleaning method for a reticle box carrier according to claim 11, wherein: The method satisfies one or more of the following: The preset duration is selected from [3min, 5min]; The gas flow rate is selected from 3 L / min to 10 L / min.

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