Transmission device, reaction furnace and boat structure

Abstract

The invention discloses a transmission device, a reaction furnace and a boat structure, and the transmission device comprises a flat plate supporting piece which is provided with a first surface and a second surface which are arranged oppositely, and the first surface is used for bearing a boat body; and the paddle assembly is used for supporting the flat plate supporting piece and feeding the flat plate supporting piece into the chamber. The flat plate supporting piece is arranged for bearing the boat body, the stability and safety of the boat body in the conveying process are guaranteed, meanwhile, the flat design of the flat plate supporting piece can reduce the occupied space of the conveying device in the cavity to the maximum extent, the exposed area of the boat body in the cavity is increased, and therefore in the subsequent heating process of the cavity, the conveying efficiency is improved. The efficiency of heat absorbed by the boat body and the thermal uniformity of the whole boat body can be improved.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor preparation technology, and in particular to a transmission device, a reaction furnace, and a boat structure. Background Art

[0002] In the prior art, cells are typically stacked in small boats, with multiple boats arranged within a larger boat. After the boat is placed into a reactor tube, several heaters distributed around the outer circumference of the reactor tube heat the boats carrying the cells. However, existing large boats typically consist of a base plate, two side panels, and a boat cover. This prevents heat from the heaters outside the reactor tube from directly radiating to the small boats carrying the cells. When heat from the heaters outside the reactor tube cannot reach all surfaces of the boat, excessively high or low temperatures on one surface of the boat can create a temperature difference within the boat, creating a "heat absorption effect" where the lower temperature areas are affected by the higher temperature areas. This results in poor temperature uniformity within the boat. Furthermore, when side panels are present, heat from the heaters radiates directly onto the side panels rather than directly onto the boat, significantly reducing the efficiency of heat radiation and heat conduction. Consequently, the temperatures on the cut surfaces of the cells and within the cells do not reach the required level, resulting in uneven heating of the cells and poor coating quality. Summary of the Invention

[0003] The present disclosure provides a transmission device, a reaction furnace and a boat structure, which can solve the problems of uneven heating of battery cells and low efficiency of heat radiation and heat conduction.

[0004] In order to solve the above technical problems, the present disclosure adopts a technical solution: providing a transmission device, comprising:

[0005] A flat support member having a first surface and a second surface disposed opposite to each other, wherein the first surface is used to support the boat body;

[0006] A paddle assembly is used to support the flat plate support and move the flat plate support into the chamber.

[0007] Wherein, the flat plate support member and the paddle assembly are integrally arranged.

[0008] The flat plate support member and the paddle assembly are independently provided, and after the flat plate support member is sent into the chamber, the paddle assembly can be separated from the flat plate support member.

[0009] Wherein, the paddle assembly includes a paddle rod supporting the flat plate support member, and the paddle rod includes a first rod portion and a second rod portion, the first rod portion is used to abut against the second surface of the flat plate support member, and the second rod portion is used to abut against the side wall of the flat plate support member.

[0010] Wherein, the first rod portion and the second rod portion are an integrally formed structure.

[0011] Wherein, the paddle assembly further includes a first driving member, which is used to drive the paddle rod to press against the flat plate support member or separate from the flat plate support member.

[0012] Wherein, the paddle assembly includes:

[0013] Two paddle rods, each of which extends along a first direction, are spaced apart in a second direction intersecting the first direction and are both connected to the flat plate support, wherein the paddle assembly is used to drive the flat plate support to move in the first direction.

[0014] Wherein, a limiting structure for limiting the boat body is provided on the first surface, and the limiting structure includes a positioning pin protruding from the first surface, and the positioning pin is used to be inserted into a groove on the boat body to limit the boat body.

[0015] The first surface of the flat support member is provided with a support area, the boat body is located in the support area, and the first surface of the flat support member is further provided with a first protrusion and a second protrusion spaced apart, and the first protrusion and the second protrusion are distributed on both sides of the support area.

[0016] In order to solve the above technical problems, the present disclosure adopts a technical solution: providing a reactor, the reactor comprising the above-mentioned transmission device.

[0017] In order to solve the above technical problems, the present disclosure adopts a technical solution: providing a boat structure, including a boat body and a flat plate support member arranged at the bottom of the boat body, the boat body is used to accommodate a plurality of stacked workpieces to be coated, and the flat plate support member is used to carry the boat body and drive the boat body into a chamber, wherein, after the boat body enters the chamber, the plurality of side plates and the top plate of the boat body are exposed in the chamber.

[0018] In which, the boat body also includes a bottom plate arranged opposite to the top plate, and the multiple side plates include a first side plate, a second side plate and a third side plate, and the first side plate, the second side plate and the third side plate are sequentially connected between the top plate and the bottom plate, and form a accommodating cavity with an opening, wherein the accommodating cavity is used to accommodate the workpiece to be coated, and the processing surface of the workpiece to be coated is exposed at the opening.

[0019] In order to solve the above technical problems, the present invention adopts a technical solution: providing a reaction furnace, which includes the boat structure described above, and the reaction furnace is provided with a chamber and a heating element arranged outside the chamber. After the boat body is sent into the chamber, the heating element passes through the cavity wall of the chamber to heat the boat body and the workpiece to be coated in the boat body.

[0020] Beneficial effects: The present invention provides a flat support for supporting the boat, thereby ensuring the stability and safety of the boat during the transmission process. At the same time, the flat design of the flat support can minimize the space occupied by the transmission device in the chamber and increase the exposed area of the boat in the chamber. Therefore, in the subsequent heating process of the chamber, the heat absorbed by the boat and the heat radiation from the heater are increased. When the heat is conducted to the boat, it can be greatly ensured that the heat received by each side of the boat is consistent, thereby ensuring the consistency and uniformity of the heating of the boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present disclosure. Those skilled in the art can also derive other drawings based on these drawings without inventive efforts, among which:

[0022] Figure 1 This is a schematic diagram of processing of the existing boat structure in the reactor;

[0023] Figure 2 This is a schematic diagram of processing a boat structure provided by an embodiment of the present disclosure in a reactor;

[0024] Figure 3 is a schematic structural diagram of a transmission device provided in one embodiment of the present disclosure;

[0025] Figure 4 is a schematic top view of the structure of a transmission device provided in one embodiment of the present disclosure;

[0026] Figure 5 is a structural diagram of a limiting structure provided by an embodiment of the present disclosure;

[0027] Figure 6 is a schematic structural diagram of a transmission device provided by another embodiment of the present disclosure;

[0028] Figure 7 is a structural schematic diagram of a paddle assembly provided by an embodiment of the present disclosure;

[0029] Figure 8 is a schematic structural diagram of a boat body provided by an embodiment of the present disclosure;

[0030] Figure 9 It is a schematic diagram of processing a boat structure provided by another embodiment of the present disclosure in a reactor. DETAILED DESCRIPTION

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present disclosure in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present disclosure without making any creative efforts shall fall within the scope of protection of the present disclosure.

[0032] The terms "first", "second" and "third" in this disclosure are only used for descriptive purposes and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first", "second" and "third" may explicitly or implicitly include at least one such feature. In the description of this disclosure, "multiple" means at least two, for example, two, three, etc., unless otherwise clearly and specifically defined. All directional indications in the embodiments of this disclosure (such as up, down, left, right, front, back...) are only used to explain the relative positional relationship, movement, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication also changes accordingly. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units that are not listed, or optionally also includes other steps or units inherent to these processes, methods, products or devices.

[0033] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present disclosure. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0034] See also Figure 1In the prior art, in edge passivation experiments, since the substrate for edge passivation deposition is the cut surface of the finished battery cell, in order to prevent the deposition of aluminum oxide film on the non-cut surface of the battery cell (depositing aluminum oxide film on the non-cut surface will cause the aluminum oxide film to cover the grid line, resulting in a cold solder joint during component welding, causing abnormal battery components), it is necessary to deposit the aluminum oxide film in a directionally directed manner on the cut surface of the battery cell. Specifically, multiple battery cells are stacked together, and the cut edges of the multiple battery cells face the same edge, that is, the cut edges of the multiple battery cells are stacked together to form a cut surface, and deposition is performed on the cut surface.

[0035] However, the above deposition process creates a new problem. After multiple battery cells are stacked together, the volume becomes larger and heat conduction is relatively difficult. The current mainstream edge passivation design is to place the stacked battery cells in a large flat boat support 1. The large flat boat support 1 is composed of a bottom plate 101, two side plates 102 and a boat cover 103. The edge passivation chamber 201 (that is, the chamber 201 of the reactor 200) uses a heating element 202 to provide heat. The current chamber 201 and boat structure have the problem that the heat of the heating element 202 cannot be directly radiated to the cutting surface that needs to be coated, resulting in the cutting surface not reaching the required heat, affecting the coating uniformity and process quality. Moreover, during the heat conduction process, the heat received by each surface of the boat body is different, affecting the consistency and uniformity of heat conduction at various positions of the boat body.

[0036] To this end, in an embodiment of the present disclosure, a new transmission device 100 is provided. The transmission device 100 not only retains the functions of the traditional transfer boat structure, but also enables the heat of the heating element 202 through the chamber 201 to be directly radiated to the cutting surface of the battery cell and various surfaces of the boat body, while improving the heat transfer efficiency and the consistency and uniformity of the heating of the boat body.

[0037] The present disclosure is described in detail below with reference to the accompanying drawings and embodiments.

[0038] Please also refer to Figure 2 and Figure 3 In one embodiment of the present disclosure, a transfer device 100 is provided for transferring a boat 10 into a chamber 201. The boat 10 serves as a carrier for workpieces to be coated, and is used to accommodate multiple stacked workpieces to be coated. It is understood that the chamber 201 can be a diffusion furnace, a chemical vapor deposition (CVD) reaction chamber, or an atomic layer deposition (ALD) reaction chamber in a semiconductor process. In this embodiment, the chamber 201 refers to the inner cavity of the reactor 200, and the workpiece to be coated is a battery cell.

[0039] Specifically, the transfer device 100 is designed to achieve smooth transfer of the boat 10 between different environments. The transfer device 100 includes a flat support member 20 and a paddle assembly 30. The flat support member 20 has a first surface 21 and a second surface 22 disposed opposite to each other, and the first surface 21 is used to support the boat 10. The paddle assembly 30 is used to support the flat support member 20 and transport the flat support member 20 into the chamber 201. The main function of the paddle assembly 30 is to provide stable support for the flat support member 20 to ensure that it does not tilt or become unstable during movement. At the same time, the paddle assembly 30 is also responsible for accurately transporting the flat support member 20 into the designated chamber 201.

[0040] As can be appreciated, the flat design of the flat support member 20 minimizes the space occupied by the transfer device 100 within the chamber 201 and increases the exposed area of the supported boat 10 within the chamber 201. This allows heat from the external heating element 202 of the chamber 201 to be radiated directly through the chamber 201 to the processing surface (i.e., cut surface) of the workpiece (i.e., cell) to be coated within the boat 10, thereby improving heat transfer efficiency. Furthermore, by optimizing heat distribution, the transfer device 100 ensures that critical areas within the boat 10 (including the cut surface) reach the desired temperature, significantly improving the uniformity and quality of the coating.

[0041] In actual use, the application process of the transfer device 100 includes the following: During the loading phase, the boat 10 is placed on the first surface 21 of the flat support member 20. To ensure the safety and stability of the boat 10, a clamp or other fixing component may be used to additionally secure the boat 10. Once the boat 10 is properly positioned, the paddle assembly 30 begins to operate, using a motor or other drive method to move the flat support member 20 and the boat 10 together to the target position in the chamber 201. Once the flat support member 20 reaches the designated position in the chamber 201, the paddle assembly 30 accurately delivers the flat support member 20 into the chamber 201.

[0042] In the above-mentioned transmission device 100, a flat plate support member 20 is provided to support the boat body 10, thereby ensuring the stability and safety of the boat body 10 during the transmission process. At the same time, the flat design of the flat plate support member 20 can minimize the space occupied by the transmission device 100 in the chamber 201 and increase the exposed area of the boat body 10 in the chamber 201, thereby increasing the heat absorbed by the boat body 10 during the subsequent heating process of the chamber 201.

[0043] Please also refer to Figure 2 、 Figure 3 and Figure 4 In one embodiment, the flat support member 20 and the paddle assembly 30 are integrally provided, thereby improving the rigidity and stability of the overall structure of the transmission device 100 and extending the service life of the transmission device 100.

[0044] Specifically, when the boat body 10 is placed on the flat plate support 20, the boat body 10 is transported into the chamber 201 through the integrated flat plate support 20 and the paddle assembly 30. At this time, there is only a cavity wall between the heating element 202 outside the chamber 201 and the boat body 10, and the flat plate support 20 has no intermediate barrier layers such as cover plates and side plates, thereby reducing heat loss in the intermediate barrier layers. This allows the heat generated by the heating element 202 to be directly radiated through the chamber 201 to the boat body 10 and the processing surface (i.e., cutting surface) of the workpiece to be coated in the boat body 10, thereby improving thermal efficiency and ensuring the temperature uniformity of the boat body 10. At the same time, it can also greatly reduce radiation shielding and improve the radiation efficiency of the heating element 202.

[0045] It can be understood that in specific applications, after the integrated flat support member 20 and the paddle assembly 30 drive the boat body 10 into the chamber 201, when the corresponding processing technology of the chamber 201 starts, the paddle assembly 30 and the flat support member 20 do not leave the chamber 201, and continue to carry the boat body 10 in the chamber 201 as the supporting components of the boat body 10 in the chamber 201 for processing.

[0046] Please continue reading Figure 2 、 Figure 3 and Figure 4 In one embodiment, the paddle assembly 30 includes two paddle rods 31 extending along a first direction X. The two paddle rods 31 are spaced apart in a second direction Y intersecting the first direction X and are both connected to the tablet support 20. The paddle assembly 30 is used to drive the tablet support 20 to move in the first direction X. The two spaced apart paddle rods 31 can provide a more balanced support force, reduce the risk of the tablet support 20 tilting or deflecting during movement, and thereby ensure stable support and smooth movement of the tablet support 20.

[0047] In other embodiments, the position and number of the paddle rods 31 can be flexibly adjusted according to the size and weight of the flat panel support 20 to improve the stability and flexibility of the paddle assembly 30 in supporting the flat panel support 20.

[0048] Please also refer to Figure 3 and Figure 5 In one embodiment, a retaining structure 40 for retaining the boat 10 is provided on the first surface 21. The retaining structure 40 includes a positioning pin 41 protruding from the first surface 21. The positioning pin 41 is configured to be inserted into a groove (not shown) on the boat 10 to retain the boat 10. The design of the positioning pin 41 ensures that the boat 10 remains stable during transportation, reducing the risk of slipping or shifting of the boat 10.

[0049] In one embodiment, the head of the positioning pin 41 can be designed to be conical or cylindrical to facilitate insertion into the groove on the boat body 10 and provide a better locking effect. The depth and width of the groove should match the positioning pin 41 to ensure that the positioning pin 41 can be firmly inserted while avoiding being too tight and difficult to remove.

[0050] In one embodiment, the number and positions of the positioning pins 41 can be adjusted according to the requirements of different boat bodies 10 , thereby providing flexibility to the transmission device 100 .

[0051] In one embodiment, the limiting mechanism of the first surface 21 can be provided as an independent component for easy removal and replacement. For example, when handling boats 10 of different sizes or shapes, different positioning pins 41 can be replaced to accommodate various boats 10, thereby improving the versatility of the transport device 100 in carrying different boats 10.

[0052] Please also refer to Figure 2 、 Figure 6 and Figure 7 In another embodiment, the flat plate support 20 and the paddle assembly 30 are independently provided. After the flat plate support 20 is sent into the chamber 201, the paddle assembly 30 can be separated from the flat plate support 20, thereby providing greater operational flexibility.

[0053] It is understood that in a specific application, after the paddle assembly 30 drives the flat support member 20 and the boat 10 on the flat support member 20 into the chamber 201, it exits the chamber 201. That is, after the paddle assembly 30 is separated from the flat support member 20, the space occupied by the conveying device 100 in the chamber 201 can be reduced, without affecting subsequent process steps. At the same time, the separation design of the paddle assembly 30 and the flat support member 20 also allows the paddle assembly 30 and the support member to be maintained and repaired separately, reducing the overall maintenance difficulty and cost.

[0054] Please continue reading Figure 2 、 Figure 6 and Figure 7 In one embodiment, the paddle assembly 30 includes a paddle shaft 31 that supports the tablet support 20. The paddle shaft 31 includes a first shaft portion 311 and a second shaft portion 312. The first shaft portion 311 is configured to abut against the second surface 22 of the tablet support 20. The first shaft portion 311 provides the primary support force, ensuring that the tablet support 20 does not tilt or shift during movement. The second shaft portion 312 abuts against the sidewall of the tablet support 20, providing additional stability and reducing the risk of the tablet support 20 sliding or rotating in the lateral direction.

[0055] See also Figure 7In one embodiment, the first rod portion 311 and the second rod portion 312 are an integrally formed structure. While improving the structural strength of the paddle rod 31, the first rod portion 311 and the second rod portion 312 provide stable support for the flat plate support 20 in multiple directions through the coordinated action of the first rod portion 311 and the second rod portion 312, effectively reducing the risk of unstable movement of the flat plate support 20 during transmission.

[0056] In one embodiment, the position and number of the first rod portion 311 and the second rod portion 312 can be flexibly adjusted according to the size and weight of the flat support member 20 to meet diverse application requirements.

[0057] In one embodiment, the paddle assembly 30 further includes a first driving member (not shown), which is configured to drive the paddle rod 31 to abut against the flat plate support 20 or to separate from the flat plate support 20 .

[0058] In one embodiment, the first driving member can provide power to the paddle rod 31 through mechanical, hydraulic or pneumatic means, so that it can accurately perform grasping and translation tasks.

[0059] Specifically, the first driver activates, driving the paddle rod 31 toward and ultimately into contact with the flat panel support 20, ensuring that the first rod portion 311 is in close contact with the second surface 22 of the flat panel support 20 and the second rod portion 312 abuts the sidewall of the flat panel support 20, providing all-round support. The first driver continues to operate, maintaining the paddle rod 31's secure support of the flat panel support 20. Simultaneously, the paddle assembly 30 begins to move, smoothly transporting the flat panel support 20 and the boat 10 atop it into the chamber 201. Throughout this process, the first driver adjusts the position and pressure of the paddle rod 31 as needed to ensure stability during transport. Once the flat panel support 20 reaches the designated position in the chamber 201, the first driver activates again, causing the paddle rod 31 to release from the flat panel support 20, completing the separation process. The paddle assembly 30 then exits the chamber 201, leaving the flat panel support 20 and the boat 10 atop it within the chamber 201 for subsequent processing.

[0060] In this embodiment, the paddle 31 may be a claw structure to grasp the flat panel support 20 and deliver the flat panel support 20 carrying the boat 10 into the chamber 201. In other embodiments, the paddle 31 may also be a hydraulic or pneumatic telescopic arm structure to complete the action of grasping and translating the flat panel support 20.

[0061] Please also refer to Figure 2 and Figure 3In one embodiment, a support area 211 is provided on the first surface 21 of the flat plate support 20, and the boat body 10 is located in the support area 211. The first surface 21 of the flat plate support 20 is further provided with a first protrusion 23 and a second protrusion 24 that are spaced apart. The first protrusion 23 and the second protrusion 24 are distributed on both sides of the support area 211. Without interfering with the normal placement of the boat body 10, the first protrusion 23 and the second protrusion 24 can play a role in strengthening the structural strength of the flat plate support 20 and further reduce the risk of the boat body 10 shifting on the flat plate support 20.

[0062] It is understandable that the support area 211 is designed according to the specific size of the boat body 10 to ensure that the boat body 10 can be completely placed in the support area 211 and obtain the best support effect.

[0063] Please continue reading Figure 2 and Figure 3 The present disclosure further provides a reaction furnace 200 , which includes the above-mentioned transmission device 100 .

[0064] Specifically, the basic structure of the reactor 200 includes a chamber 201, a heating system (not shown), an exhaust system (not shown) and a control system (not shown). The chamber 201 is the core part of the reactor 200, which is used to accommodate the workpiece to be processed and to provide the required environmental conditions (such as temperature, pressure, atmosphere, etc.). The heating system is usually located at the bottom or around the chamber 201 to provide the necessary heat for the reaction process. The heating system of the present application includes a plurality of heating elements 202 surrounding the chamber 201. The exhaust system is used to discharge the exhaust gas generated during the reaction process and maintain the cleanliness and stability of the environment in the chamber 201. The control system includes temperature control, pressure control and automatic control system to ensure that the entire reaction process is carried out according to the preset parameters.

[0065] During the loading phase, the boat 10 is placed on the first surface 21 of the flat support 20, and the paddle assembly 30 pushes the flat support 20 forward smoothly. Once the flat support 20 reaches the designated position, the paddle assembly 30 accurately delivers the flat support 20 into the chamber 201 of the reactor 200, completing the transfer task.

[0066] During the transplanting phase, if the flat support member 20 and the paddle assembly 30 are an integrated structure, the paddle assembly 30 will also remain in the chamber 201 after transporting the flat support member 200 into the chamber 201 of the reactor 200. Before the reactor 200 begins processing, the furnace door of the reactor 200 must be closed to seal the chamber 201 and create a processing environment.

[0067] If the flat support member 20 and the paddle assembly 30 are independent structures, the paddle assembly 30 can be moved from the chamber 201 of the reactor 200 after inserting the flat support member 200 into the reactor 200, without affecting subsequent process steps. Similarly, before starting processing in the reactor 200, the furnace door of the reactor 200 must be closed to seal the chamber 201 and create a processing environment.

[0068] During the processing phase, within chamber 201, boat 10 and its workpiece undergoes treatment according to pre-set process parameters, such as chemical vapor deposition (CVD) or atomic layer deposition (ALD). Heat from heating element 202 in the heating system directly impacts boat 10, ensuring a uniform temperature and rapid heating rate across the entire boat. A control system monitors and adjusts key parameters within chamber 201, such as temperature and pressure, in real time to ensure uniform and high-quality treatment for each workpiece.

[0069] It is understood that a spray plate (not shown) is provided on the furnace door (not shown) of the reactor 200 for spraying reaction gas (which may include a passivator and an oxidant) onto the workpiece to be coated in the chamber 201. The reaction gas contacts the processing surface (i.e., the cut surface) of the workpiece to be coated (cell), and then an atomic layer deposition (ALD) chemical reaction occurs on the processing surface (i.e., the cut surface) to form a coating, such as an aluminum oxide coating, an aluminum nitride coating, a silicon oxide coating, etc., to complete the edge passivation coating process of the cell. In other embodiments, the coating can also be generated by a chemical reaction of chemical vapor deposition (CVD), which is not limited here.

[0070] In the process completion stage, after the processing is completed, if the flat plate support member 20 and the paddle assembly 30 are an integrated structure, the paddle assembly 30 can directly drive the flat plate support member 20 to exit the chamber 201.

[0071] If the flat plate support 20 and the paddle assembly 30 are independent structures, after the processing is completed, the paddle assembly 30 re-enters the chamber 201 and connects with the flat plate support 20. The paddle assembly 30 removes the flat plate support 20 and the boat body 10 thereon from the chamber 201, completing the entire processing cycle.

[0072] Please also refer to Figure 2 and Figure 8 The present disclosure also provides a boat structure 300, including a boat body 10 and a flat support member 20 arranged at the bottom of the boat body 10, the boat body 10 is used to accommodate a plurality of stacked workpieces to be coated, the flat support member 20 is used to carry the boat body 10 and drive the boat body 10 into the chamber 201, wherein, after the boat body 10 enters the chamber 201, the plurality of side panels 11 and the top panel 12 of the boat body 10 are exposed in the chamber 201.

[0073] Specifically, the interior of the boat 10 is designed to accommodate multiple stacked workpieces to be coated, and the space inside the boat 10 can ensure that the spacing between the workpieces to be coated is appropriate to facilitate uniform coating. The flat support 20 carries the boat 10 and the workpieces to be coated thereon, and ensures that they can smoothly enter the chamber 201. After the boat 10 enters the chamber 201, the multiple side panels 11 and the top panel 12 of the boat 10 are exposed in the chamber 201, increasing the exposure area of the boat 10 in the chamber 201, so that when the external heating element 202 heats the chamber 201, the heat emitted by the heating element 202 can be directly radiated through the chamber 201 to the processing surface (i.e., the cutting surface) of the workpiece to be coated (i.e., the battery cell) in the boat 10, while improving the heat transfer efficiency, thereby significantly improving the uniformity and quality of the coating.

[0074] Please continue reading Figure 2 and Figure 8 In one embodiment, the boat body 10 also includes a bottom plate 13 arranged opposite to the top plate 12, and the multiple side plates 11 include a first side plate 111, a second side plate 112 and a third side plate 113. The first side plate 111, the second side plate 112 and the third side plate 113 are sequentially connected between the top plate 12 and the bottom plate 13, and form a accommodating cavity 115 with an opening 114, wherein the accommodating cavity 115 is used to accommodate the workpiece to be coated, and the processing surface of the workpiece to be coated is exposed at the opening 114.

[0075] Specifically, the boat structure 300 is a five-sided closed structure. The workpieces to be coated, especially many workpieces to be coated, are closely attached to each other or spaced apart from each other, neatly arranged and stacked into a rectangular parallelepiped, so that the processed surfaces of the workpieces to be coated face the same side, and then neatly inserted into the boat structure 300, leaving the processed surfaces facing outward at the opening 114. At the same time, the entire stack of workpieces to be coated are sealed in the boat structure 300, which can ensure that during the coating process, the reaction gas can directly contact and evenly cover the surface of the workpiece to be coated that needs to be processed.

[0076] Please also refer to Figure 8 and Figure 9 The present disclosure also provides a reaction furnace 400, which includes the above-mentioned boat structure 300. The reaction furnace is provided with a chamber 401 and a heating element 402 provided outside the chamber 401. After the boat body 10 is sent into the chamber 401, the heating element 402 passes through the cavity wall of the chamber 401 to heat the boat body 10 and the workpiece to be coated in the boat body 10.

[0077] In one embodiment, the interaction between the boat body 10 and the chamber 401 can be achieved through the above-mentioned transmission device 100. The flat support member 20 and the paddle assembly 30 in the transmission device 100 cooperate to transport the boat body 10 from the outside into the chamber 401 and take it out.

[0078] In one embodiment, there are multiple boats 10, which are arranged along the extension direction of the flat support member 20. It is understood that the openings 114 of the two boats 10 arranged side by side are arranged opposite to each other, so that multiple groups of workpieces to be coated in the multiple boats 10 can be coated simultaneously in the chamber 401, thereby improving production efficiency.

[0079] In one embodiment, at least two boat bodies 10 are stacked in a direction perpendicular to the extension direction of the flat support member 20 to increase the number of boat bodies 10 inside the chamber 401, thereby further improving production efficiency.

[0080] In one embodiment, the heating element 402 includes a resistance heater, an induction heater, or other types of heating components, depending on the desired temperature range and heating efficiency, which are not limited herein.

[0081] In one embodiment, the reaction furnace 400 further includes a temperature control system (not shown), including a temperature sensor and a feedback loop, to ensure that the temperature in the chamber 401 can be accurately controlled to meet the requirements of different coating processes.

[0082] Please continue reading Figure 8 and Figure 9 The present disclosure also provides a photovoltaic cell coating process. When coating the cell, the boat 10 is placed directly on the flat support 20 and enters the chamber 401 for the coating process using the device of the present disclosure or other conventional devices.

[0083] Specifically, Table 1 shows the results of a comparative coating process using a conventional apparatus and the apparatus disclosed herein, with the boat structure 300 driven into the chamber 401 of a reactor 400. H2O (water) was used as the oxidant in the coating process, and TMA (trimethylaluminum) was used as the passivating agent. The comparative example in Table 1 refers to a conventional apparatus having multiple side panels 102 and a boat cover 103 outside the boat structure.

[0084] Table 1

[0085]

[0086]

[0087] As can be seen from Table 1 above, the comparative example and the embodiment of the present disclosure both employed the same process parameters for the coating process, with TMA (trimethylaluminum) and H₂O (water) used as reactants in a pulsed reaction. The pulse / purge ratio for TMA was 3:10, the pulse / purge ratio for H₂O was 2:10, the thickness was 300 cycles, and the process temperature was 270 / 350°C. By measuring the temperature at different stages of the temperature measurement locations within the boat structure 300, it can be seen that the temperatures at various key locations within the boat structure 300 of the present disclosure, whether after preheating, after processing, or after annealing, were higher than those at various key locations within the boat structure of the existing device. It can be seen from this that since the flat support member 20 of the device disclosed herein has no intermediate barrier layers such as a cover plate and side plates, the heat loss in the intermediate barrier layers is reduced. This allows the heat generated by the heating element 402 to be directly radiated to the boat body 10 and the processing surface (i.e., the cutting surface) of the workpiece to be coated in the boat body 10 through the chamber 401, thereby improving thermal efficiency, ensuring the temperature uniformity and heating consistency of the boat body 10, and at the same time greatly reducing radiation shielding and improving the radiation efficiency of the heating element 402.

[0088] The above are merely embodiments of the present disclosure and are not intended to limit the patent scope of the present disclosure. Any equivalent structure or equivalent process transformation made using the contents of the present disclosure and the drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present disclosure.

Claims

1. A transmission device, characterized in that: include: A flat support member having a first surface and a second surface disposed opposite to each other, wherein the first surface is used to support the boat body; A paddle assembly is used to support the flat plate support and move the flat plate support into the chamber.

2. The transmission device according to claim 1, characterized in that The flat plate support is integrally provided with the paddle assembly.

3. The transmission device according to claim 1, characterized in that The flat plate support member and the paddle assembly are independently provided. After the flat plate support member is sent into the chamber, the paddle assembly can be separated from the flat plate support member.

4. The transmission device according to claim 3, characterized in that The paddle assembly includes a paddle rod supporting the flat plate support, the paddle rod includes a first rod portion and a second rod portion, the first rod portion is used to abut against the second surface of the flat plate support, and the second rod portion is used to abut against the side wall of the flat plate support.

5. The transmission device according to claim 4, characterized in that The first rod portion and the second rod portion are an integrally formed structure.

6. The transmission device according to claim 4, characterized in that The paddle assembly further includes a first driving member configured to drive the paddle rod to abut against the flat plate support member or to separate from the flat plate support member.

7. The transmission device according to claim 1, characterized in that The paddle assembly comprises: Two paddle rods, each of which extends along a first direction, are spaced apart in a second direction intersecting the first direction and are both connected to the flat plate support, wherein the paddle assembly is used to drive the flat plate support to move in the first direction.

8. The transmission device according to claim 1, characterized in that A limiting structure for limiting the boat body is provided on the first surface. The limiting structure includes a positioning pin protruding from the first surface. The positioning pin is used to be inserted into a groove on the boat body to limit the boat body.

9. The transmission device according to claim 1, characterized in that The first surface of the flat support member is provided with a support area, the boat body is located in the support area, and the first surface of the flat support member is further provided with a first protrusion and a second protrusion arranged at intervals, and the first protrusion and the second protrusion are distributed on both sides of the support area.

10. A reactor, characterized in that: The reaction furnace comprises the transmission device according to any one of claims 1 to 9.

11. A boat structure, characterized in that: It includes a boat body and a flat support member arranged at the bottom of the boat body, the boat body is used to accommodate multiple stacked workpieces to be coated, and the flat support member is used to carry the boat body and drive the boat body into the chamber, wherein after the boat body enters the chamber, the multiple side plates and top plate of the boat body are exposed in the chamber.

12. The boat structure according to claim 11, wherein: The boat body also includes a bottom plate arranged opposite to the top plate, and the plurality of side plates include a first side plate, a second side plate and a third side plate, the first side plate, the second side plate and the third side plate are sequentially connected between the top plate and the bottom plate, and form a accommodating cavity with an opening, wherein the accommodating cavity is used to accommodate the workpiece to be coated, and the processing surface of the workpiece to be coated is exposed at the opening.

13. A reactor, characterized in that: The reaction furnace includes a boat structure as described in any one of claims 11-12, and the reaction furnace is provided with a chamber and a heating element provided outside the chamber. After the boat body is sent into the chamber, the heating element passes through the cavity wall of the chamber to heat the boat body and the workpiece to be coated in the boat body.

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