The mover module of a linear motor and its cooling control method

Abstract

This invention discloses a mover module for a linear motor and its cooling control method. The module includes a housing and a potted mover disposed within the housing. The potted mover has cooling channels inside, and a heat dissipation cavity is formed between the housing and the potted mover. The housing has an air inlet, an air outlet, a liquid inlet, and a liquid outlet. The air inlet and outlet are connected to the heat dissipation cavity, and the liquid inlet and outlet are connected to the cooling channels. This invention uses both air cooling and liquid cooling to dissipate heat from the mover, resulting in good heat dissipation and effectively reducing the motor temperature.

Description

Technical Field

[0001] This invention relates to the field of motor technology, and in particular to a mover module of a linear motor and its cooling control method. Background Technology

[0002] A linear motor's mover consists of a yoke and coils mounted on the yoke. In the chip manufacturing industry, equipment requires high temperature stability, necessitating that linear motors operate at low temperatures. However, some designs are limited by space constraints, requiring the use of smaller motors. To ensure sufficient output, the motor current needs to be increased, which significantly raises the motor temperature. Therefore, heat dissipation is necessary to mitigate the impact of temperature. Existing linear motors are mostly naturally cooled. When the motor operates at continuous high frequencies, it generates a large amount of heat, leading to excessive temperature rise in both the motor and the mounting surface, thus affecting the motor's performance. Summary of the Invention

[0003] The technical problem to be solved by the embodiments of the present invention is to provide a linear motor mover module and its cooling control method to improve heat dissipation.

[0004] To address the aforementioned technical problems, this invention provides a linear motor mover module, comprising a housing and a potted mover disposed within the housing. The potted mover has a cooling channel, and a heat dissipation cavity is formed between the housing and the potted mover. The housing has an air inlet, an air outlet, a liquid inlet, and a liquid outlet. The air inlet and air outlet are connected to the heat dissipation cavity, and the liquid inlet and liquid outlet are connected to the cooling channel.

[0005] Furthermore, the glue-filled mover is provided with several cooling pipes, and cooling fluid is provided in the cooling pipes. The cooling pipes include a condensation section and an evaporation section, and capillary mechanisms are provided between the condensation section and the evaporation section. The condensation section is arranged adjacent to the cooling flow channel, and the evaporation section is arranged in the middle of the glue-filled mover.

[0006] Furthermore, the condensation section is positioned at a higher horizontal level than the evaporation section.

[0007] Furthermore, the glued mover consists of a mover body and a glued layer covering the mover body. The evaporation section of the cooling pipe is located on the mover body, and the cooling channel is arranged along the outside of the mover body.

[0008] Furthermore, the potted mover is integrated with several thermally conductive fasteners. The cooling channels and cooling pipes are fixed by the thermally conductive fasteners, and the cooling channels and condensation sections, as well as the evaporation section and the mover body, are connected by thermally conductive fasteners.

[0009] Furthermore, the cooling channel is U-shaped, with the inlet and outlet located on the same side of the outer casing.

[0010] Furthermore, the cooling pipes are L-shaped or Z-shaped.

[0011] Furthermore, the cooling pipes are divided into multiple pairs, with each pair of cooling pipes arranged in a U-shape.

[0012] Furthermore, several heat insulation pads are installed inside the heat dissipation cavity.

[0013] Accordingly, embodiments of the present invention also provide a cooling control method for the mover module of a linear motor, comprising:

[0014] The temperature of the potting mover is monitored in real time. When the temperature is greater than or equal to the preset temperature, both air cooling and liquid cooling are used for heat dissipation. When the temperature is less than the preset temperature, only air cooling or liquid cooling is used for heat dissipation.

[0015] The beneficial effects of this invention are as follows: This invention uses air cooling and liquid cooling to dissipate heat from the mover, which has a good heat dissipation effect and can effectively reduce the motor temperature. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the mover module of the linear motor according to an embodiment of the present invention.

[0017] Figure 2 This is a three-dimensional structural view of the mover module of the linear motor according to an embodiment of the present invention from another angle.

[0018] Figure 3 This is a three-dimensional structural diagram of the glue-pouring actuator according to an embodiment of the present invention.

[0019] Figure 4 This is an internal structural diagram of the glue-pouring actuator according to an embodiment of the present invention.

[0020] Figure 5 This is a three-dimensional structural diagram of the cooling pipe according to an embodiment of the present invention.

[0021] Figure 6 This is a front view of the moving part module of the linear motor according to an embodiment of the present invention.

[0022] Figure 7 This is the book Figure 6 Sectional view at point BB.

[0023] Explanation of icon numbers

[0024] The components include: outer casing 10, heat dissipation cavity 11, air inlet 12, air outlet 13, liquid inlet 14, liquid outlet 15, heat insulation pad 16, potting mover 20, cooling channel 21, thermally conductive fixing component 22, mover body 23, cooling pipe 30, condensation section 31, and evaporation section 32. Detailed Implementation

[0025] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] In this embodiment of the invention, directional indicators (such as up, down, left, right, front, back, etc.) are only used to explain the relative positional relationship and movement of each component in a specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0027] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features.

[0028] Please refer to Figures 1 to 7 The linear motor mover module of this embodiment includes a housing 10 and a potted mover 20.

[0029] The outer casing 10 is located outside the potting actuator 20. A cooling channel 21 is provided inside the potting actuator 20, and the cooling channel 21 is connected to a liquid cooling circulation system. A heat dissipation cavity 11 is formed between the outer casing 10 and the potting actuator 20, i.e., the top of the potting actuator 20 and the inner wall of the outer casing 10 are spaced at a predetermined distance to form a sealed heat dissipation cavity 11. The outer casing 10 is provided with an air inlet 12, an air outlet 13, a liquid inlet 14, and a liquid outlet 15. The air inlet 12 and the air outlet 13 are respectively connected to the two sides (opposite sides) of the heat dissipation cavity 11, and the liquid inlet 14 and the liquid outlet 15 are respectively connected to the two ends of the cooling channel 21. Preferably, the top surface of the outer casing 10 is the mounting surface, i.e., the load is mounted on the top of the outer casing 10. Because air has a very low thermal conductivity, it can effectively reduce the heat transferred from the motor (i.e., the mover module) to the mounting surface, thereby lowering the temperature of the mounting surface and preventing the heat generated by the mover module from affecting the load. At the same time, because a closed space is formed in the middle, cooling gas is introduced into the closed space, which can remove the heat from the mover module and further reduce the temperature of the mounting surface.

[0030] In one implementation, the heat dissipation cavity 11 is provided with several heat insulation pads 16, which divide the heat dissipation cavity 11 into multiple air-cooling channels. Specifically, the heat insulation pads 16 are positioned between the outer shell 10 and the potted stator. The heat insulation pads 16 are made of heat-insulating material to reduce the transfer of rotor temperature to the mounting surface. In a specific implementation, steps can be provided on the outer shell 10 to limit the placement depth of the potted rotor 20 within the outer shell 10. Simultaneously, sealant is applied to the steps during the installation of the outer shell 10 to ensure no air leakage during internal air cooling. The outer shell 10 has mounting holes with recessed grooves inside. When installing the heat insulation pads 16, sealant is applied between the heat insulation pads 16 and the outer shell 10 to ensure no air leakage during internal air cooling from the heat insulation pads 16.

[0031] In one embodiment, the glue-filled mover 20 is provided with a plurality of cooling pipes 30, each containing a cooling fluid. Each cooling pipe 30 includes a condensation section 31 and an evaporation section 32, with capillary mechanisms corresponding to each other. The condensation section 31 is adjacent to the cooling channel 21, and the evaporation section 32 is located in the middle of the glue-filled mover 20. The glue-filled mover 20 consists of a mover body 23 (composed of a yoke and a coil disposed on the yoke) and a glue-filled layer covering the mover body 23. The evaporation section 32 of the cooling pipes 30 is located on the mover body 23. Preferably, the evaporation section 32 is disposed between the clearance grooves of the yoke, thereby making the structure of the invention more compact and the overall height lower. The cooling channel 21 is disposed along the outer side of the mover body 23, preferably at the upper outer edge of the mover body 23 (the top of the cooling channel 21 is slightly lower than the top of the mover body 23). The cooling channel 21 of the present invention is disposed on the side of the moving body 23, separating the outer shell 10 and the moving body 23, which can effectively reduce the temperature of the moving body 23 transferred to the outer shell 10, and further reduce the temperature of the outer shell 10.

[0032] In practice, the cooling pipe 30 is coated with thermally conductive silicone grease on the outside and contains cooling fluid inside. When the fluid is exposed to high temperature, it absorbs heat and then vaporizes. The vapor flows from the evaporation section 32 to the condensation section 31, where it is cooled and condensed into a liquid. The liquid then returns from the condensation section 31 of the cooling pipe 30 to the evaporation section 32 through capillary action to cool the actuator and repeat the cooling cycle. The heat of the condensation section 31 is exchanged with the fluid in the adjacent cooling channel 21, which accelerates the cooling of the condensation section 31 and ensures that the temperature of the condensation section 31 is lower than that of the evaporation section 32.

[0033] In one implementation, the condensing section 31 is positioned at a higher horizontal level than the evaporating section 32, i.e., the evaporating section 32 is horizontally positioned, and the condensing section 31 is tilted at a certain angle. Under the action of gravity, this can accelerate the return flow of cooling fluid in the cooling pipe 30.

[0034] In one implementation, the potted mover 20 integrates several thermally conductive fixing components 22. The cooling pipe 30 and cooling channel 21 are fixed by the thermally conductive fixing components 22, which facilitates the fixing of the potting compound and heat conduction, and facilitates the fabrication of the potted mover 20. The thermally conductive fixing components 22 are made of a high thermal conductivity metal, such as copper or aluminum. The cooling channel 21 and the condensation section 31, as well as the evaporation section 32 and the mover body 23 (yoke), are respectively connected by the thermally conductive fixing components 22. Preferably, the thermally conductive fixing components 22 are coated with thermally conductive silicone grease, that is, the spaces between the cooling channel 21, the cooling pipe 30, the mover body 23 and the corresponding thermally conductive fixing components 22 are filled with thermally conductive silicone grease.

[0035] In one implementation, the cooling channel 21 is U-shaped, with the inlet 14 and outlet 15 located on the same side of the outer casing 10. The cooling channel 21 has a simple structure, ensuring the coolant flow rate and maintaining a fast flow rate, thereby improving the cooling effect.

[0036] In one implementation, the cooling pipe 30 is L-shaped or Z-shaped. The cooling pipe 30 is divided into multiple pairs, and each pair of cooling pipes 30 is arranged in a U-shape. For example... Figure 4 and Figure 5 As shown, in an L-shaped configuration, the shorter side is the condensation section 31, and the longer side is the evaporation section 32. That is, the condensation section 31 end of the cooling pipe 30 is upturned, and the end of the condensation section 31 is slightly higher than the evaporation section 32. When the cooling pipe 30 is Z-shaped, the middle part is the evaporation section 32, and the two sides are the condensation sections 31, as shown... Figure 4 In the middle, the evaporation sections 32 of the adjacent cooling pipes 30 are integrated together.

[0037] The cooling control method for the mover module of the linear motor according to an embodiment of the present invention includes:

[0038] The temperature of the potting mover 20 is monitored in real time. When the temperature is greater than or equal to the preset temperature, air cooling and liquid cooling are used for heat dissipation at the same time. When the temperature is less than the preset temperature, only air cooling or liquid cooling is used for heat dissipation.

[0039] This invention allows for a hybrid cooling system combining liquid and air cooling, or a single cooling method can be selected based on specific requirements. This invention is suitable for industries with stringent temperature control requirements, such as semiconductor manufacturing.

[0040] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A mover module for a linear motor, comprising a housing and a potted mover disposed within the housing, characterized in that, The glued mover has a cooling channel inside, and a heat dissipation cavity is formed between the outer shell and the glued mover. The outer shell has an air inlet, an air outlet, a liquid inlet and a liquid outlet. The air inlet and the air outlet are connected to the heat dissipation cavity, and the liquid inlet and the liquid outlet are connected to the cooling channel. The glue-filling mover is equipped with several cooling pipes, and cooling fluid is contained in the cooling pipes. The cooling pipes include a condensation section and an evaporation section. Capillary mechanisms are provided between the condensation section and the evaporation section. The condensation section is located adjacent to the cooling flow channel, and the evaporation section is located in the middle of the glue-filling mover. The glued mover consists of a mover body and a glued layer covering the mover body. The evaporation section of the cooling pipe is located above the mover body and is set between the vented grooves of the yoke. The cooling flow channel is set along the outside of the mover body. The potted mover integrates several thermally conductive fasteners. The cooling channels and cooling pipes are fixed by the thermally conductive fasteners. The cooling channels and condensation section, as well as the evaporation section and the mover body, are connected by thermally conductive fasteners. Thermally conductive silicone grease is filled between the cooling channels, cooling pipes, mover body and the corresponding thermally conductive fasteners. Thermally conductive silicone grease is applied to the outside of the cooling pipes. The cooling channel is U-shaped, with the inlet and outlet located on the same side of the outer casing. The cooling pipes are L-shaped or Z-shaped, and the cooling pipes are divided into multiple pairs, with each pair of cooling pipes arranged in a U-shape.

2. The mover module of the linear motor as described in claim 1, characterized in that, The condensation section is positioned at a higher horizontal level than the evaporation section.

3. The mover module of the linear motor as described in claim 1, characterized in that, Several heat insulation pads are installed inside the heat dissipation cavity.

4. A cooling control method for the mover module of a linear motor as described in any one of claims 1 to 3, characterized in that, include: The temperature of the potting mover is monitored in real time. When the temperature is greater than or equal to the preset temperature, both air cooling and liquid cooling are used for heat dissipation. When the temperature is less than the preset temperature, only air cooling or liquid cooling is used for heat dissipation.

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