Phosphorus pentafluoride gas generator

Abstract

The invention provides a phosphorus pentafluoride gas generator which comprises a generator cylinder, a distribution disc, a first feeding port, a second feeding port, a valve assembly and a discharging port, and a containing cavity is formed in the generator cylinder; the distribution disc divides the accommodating cavity into an upper cavity body and a lower cavity body, and the distribution disc is provided with a through hole for communicating the upper cavity body with the lower cavity body; the first feeding hole is used for conveying phosphorus pentachloride solids to the lower cavity; the second feeding hole is used for conveying hydrogen fluoride liquid to the upper cavity; the valve assembly is used for opening or closing the through hole; when the through hole is opened, the hydrogen fluoride liquid in the upper cavity can enter the lower cavity through the through hole; the discharge hole is formed in the generator cylinder and is used for conveying phosphorus pentafluoride gas generated by reaction in the lower cavity to the outside of the generator cylinder. The through hole can be opened or closed through the valve assembly according to needs so as to control the intensity of the reaction, the temperature and pressure in the lower cavity are prevented from being too high, the sublimation and blockage risks of phosphorus pentachloride are reduced, and the production efficiency of phosphorus pentafluoride gas is improved.

Description

Technical Field

[0001] The present application relates to the technical field of phosphorus pentafluoride preparation, and in particular to a phosphorus pentafluoride gas generator. Background Art

[0002] Lithium hexafluorophosphate is one of the most commonly used electrolyte materials in lithium-ion batteries. It can provide ionic conductivity, allowing lithium ions to be transferred between the positive and negative electrodes, realizing the storage and release of electrical energy. It is widely used in lithium-ion power batteries, lithium-ion energy storage batteries and other daily batteries, such as batteries for electric vehicles, smart phones, laptops and other electronic devices.

[0003] Phosphorus pentafluoride gas is the main raw material for the preparation of lithium hexafluorophosphate. Currently, in the lithium hexafluorophosphate production process, phosphorus pentafluoride gas is mainly prepared by reacting solid phosphorus pentachloride and liquid hydrogen fluoride to produce the raw material phosphorus pentafluoride gas.

[0004] However, the reaction between hydrogen fluoride liquid and phosphorus pentachloride solid is a violent exothermic reaction, which will cause the phosphorus pentachloride to sublime. The sublimated phosphorus pentachloride will condense in the filter and pipeline, causing blockage and thus affecting production efficiency. Summary of the Invention

[0005] In view of this, the object of the present application is to provide a phosphorus pentafluoride gas generator, which is conducive to improving the production efficiency of phosphorus pentafluoride gas.

[0006] Based on the above objectives, the present application provides a phosphorus pentafluoride gas generator, which includes:

[0007] A generator cylinder, wherein a receiving cavity is formed in the generator cylinder;

[0008] a distribution plate, the distribution plate being arranged in the accommodating cavity and dividing the accommodating cavity into an upper cavity and a lower cavity, the distribution plate being provided with a through hole communicating with the upper cavity and the lower cavity;

[0009] a first feed port, the first feed port being provided on the generator barrel and being used for conveying phosphorus pentachloride solid to the lower cavity;

[0010] a second feed port, the second feed port being provided on the generator cylinder and being used for delivering hydrogen fluoride liquid to the upper cavity;

[0011] a valve assembly disposed in the accommodating cavity and configured to open or close the through hole; when the through hole is opened, the hydrogen fluoride liquid in the upper cavity can enter the lower cavity through the through hole;

[0012] A discharge port is provided on the generator cylinder and is used to transport the phosphorus pentafluoride gas generated by the reaction in the lower cavity to the outside of the generator cylinder.

[0013] In one embodiment, the valve assembly is partially disposed in the through hole, and the valve assembly is configured to float up and down according to pressure changes in the lower cavity to open or close the through hole.

[0014] In one embodiment, the valve assembly includes a floating valve and a limit member, the floating valve is at least partially arranged in the through hole and a gap is formed between the floating valve and the inner wall of the through hole, the limit member is connected to the bottom of the floating valve and floats up and down with the floating valve; when the limit member floats downward until it is out of contact with the distribution plate, the through hole opens; when the limit member floats upward until it abuts against the distribution plate, the through hole closes.

[0015] In one embodiment, the valve assembly further comprises a restoring member connected to the float valve and continuously applying an upward restoring force to the float valve.

[0016] In one embodiment, the return member includes a spring, which is sleeved on the floating valve, with the upper end of the spring abutting against the floating valve and the lower end of the spring abutting against the distribution plate.

[0017] In one embodiment, the orthographic projection of the through hole on the distribution plate is located within the orthographic projection of the limiting member on the distribution plate.

[0018] In one embodiment, the phosphorus pentafluoride gas generator further includes a pressure charging mechanism, which is connected to the upper cavity and is used to charge gas into the upper cavity to increase the pressure in the upper cavity so that the valve assembly opens the through hole.

[0019] In one embodiment, a first annular sealing slope is provided on the bottom of the distribution plate around the through hole, and a second annular sealing slope is provided on the limiting member. When the first annular sealing slope abuts against the second annular sealing slope, the through hole is closed.

[0020] In one embodiment, the distribution plate is provided with a plurality of the through holes, and the phosphorus pentafluoride gas generator includes a plurality of the valve assemblies, each of the valve assemblies being used to open or close a corresponding through hole.

[0021] In one embodiment, the plurality of valve assemblies include at least a first valve assembly and a second valve assembly, wherein the first valve assembly closes the corresponding through hole when the pressure in the lower cavity reaches a first pressure value; and the second valve assembly closes the corresponding through hole when the pressure in the lower cavity reaches a second pressure value; wherein the first pressure value is less than the second pressure value.

[0022] In one embodiment, the phosphorus pentafluoride gas generator further includes a first feed pipe, wherein a portion of the first feed pipe is located outside the accommodating cavity and forms the first feed port, and an outlet of the first feed pipe is disposed below the distribution plate.

[0023] In one embodiment, the phosphorus pentafluoride gas generator further includes a distributor, the distributor is provided with a hollow cavity and the outer diameter of the distributor gradually increases from top to bottom, and the hollow cavity is connected to the outlet of the first feed pipe;

[0024] Alternatively, the distributor is arranged below the outlet of the first feed pipe and the outer diameter of the distributor gradually increases from top to bottom.

[0025] In one embodiment, the phosphorus pentafluoride gas generator further includes a cooling pipe disposed within the lower cavity, the cooling pipe having a first refrigerant inlet and a first refrigerant outlet. In one embodiment, an orthographic projection of the through hole on the distribution plate at least partially overlaps with an orthographic projection of the cooling pipe on the distribution plate.

[0026] In one embodiment, the phosphorus pentafluoride gas generator further includes a cooling jacket, which is circumferentially arranged around the generator cylinder.

[0027] As can be seen from the above, the phosphorus pentafluoride gas generator provided in the present application is provided with a distribution plate in the generator cylinder, and the accommodating chamber in the generator cylinder is divided into an upper cavity and a lower cavity by using the distribution plate, and a through hole connecting the upper cavity and the lower cavity is provided on the distribution plate, and a valve assembly is provided for opening or closing the through hole. The valve assembly can open or close the through hole as needed to control the intensity of the reaction, avoid excessive temperature and pressure in the lower cavity, reduce the risk of sublimation and blockage of phosphorus pentachloride, and improve the production efficiency of phosphorus pentafluoride gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in this application or related technologies, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are merely embodiments of this application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0029] Figure 1 This is a schematic diagram of a phosphorus pentafluoride gas generator according to an embodiment of the present application;

[0030] Figure 2 This is a schematic diagram of a valve assembly closing a through hole in one embodiment of the present application;

[0031] Figure 3 This is a schematic diagram of the valve assembly opening the through hole in one embodiment of the present application.

[0032] Reference numerals

[0033] 100. Phosphorus pentafluoride gas generator;

[0034] 1. Generator cylinder; 11. Accommodation chamber; 111. Upper chamber; 112. Lower chamber; 12. First feed port; 13. Second feed port; 14. Discharge port;

[0035] 2. Distribution plate; 21. Through hole; 22. First annular sealing slope;

[0036] 3. Valve assembly; 31. Floating valve; 32. Position limiting member; 321. Second annular sealing slope; 322. Cone portion; 323. Cylindrical portion; 33. Return member;

[0037] 4. First feed pipe;

[0038] 5. Cooling pipe; 51. First refrigerant inlet; 52. First refrigerant outlet;

[0039] 6. Cooling jacket;

[0040] 7. Distributor. DETAILED DESCRIPTION

[0041] In order to make the objectives, technical solutions and advantages of this application more clear, this application is further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

[0042] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present application should have the usual meanings understood by people with ordinary skills in the field to which this application belongs. The "first", "second" and similar words used in the embodiments of the present application do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0043] Currently, during the preparation of phosphorus pentafluoride gas, a stirring device is usually installed to stir the phosphorus pentachloride solid in the reaction and remove heat to avoid local overheating and / or excessive pressure, thereby reducing phosphorus pentachloride sublimation and avoiding filter and pipeline blockage.

[0044] The stirring device typically includes a drive mechanism, a rotating shaft, and stirring blades. The drive mechanism is disposed outside the chamber, and the rotating shaft extends through the generator barrel. The drive mechanism rotates the rotating shaft to drive the stirring blades. Optionally, the drive mechanism includes a motor, a reducer, etc., and the motor and reducer cooperate to adjust the rotation speed of the rotating shaft.

[0045] The inventors' research has revealed that phosphorus pentafluoride powder, mixed with the gas in the stirring device, generates a large amount of dust, which can damage the mechanical seal and pose a risk of gas leakage. Furthermore, the mechanical seal between the stirring device and the generator cylinder can allow the sealing fluid to enter the reaction, generating new impurities. Furthermore, there is a risk of mechanical seal failure, leading to leakage.

[0046] Based on this, the present application provides a phosphorus pentafluoride gas generator solution to solve the above problems.

[0047] Reference Figure 1-3 As shown, an embodiment of the present application discloses a phosphorus pentafluoride gas generator 100 , which includes a generator cylinder 1 , a distribution plate 2 , a first feed port 12 , a second feed port 13 , a discharge port 14 and a valve assembly 3 .

[0048] Among them, a accommodating chamber 11 is formed in the generator cylinder 1, and a distribution plate 2 is arranged in the accommodating chamber 11 and divides the accommodating chamber 11 into an upper chamber 111 and a lower chamber 112, and the distribution plate 2 is provided with a through hole 21 connecting the upper chamber 111 and the lower chamber 112; a first feed port 12 is arranged in the generator cylinder 1 and is used to convey phosphorus pentachloride solid to the lower chamber 112; a second feed port 13 is arranged in the generator cylinder 1 and is used to convey hydrogen fluoride liquid to the upper chamber 111; a valve assembly 3 is arranged in the accommodating chamber 11 and is used to open or close the through hole 21; when the through hole 21 is opened, the hydrogen fluoride liquid in the upper chamber 111 can enter the lower chamber 112 through the through hole 21; a discharge port 14 is arranged in the generator cylinder 1 and is used to convey the phosphorus pentafluoride gas generated by the reaction in the lower chamber 112 to the outside of the generator cylinder 1.

[0049] The phosphorus pentafluoride gas generator 100 provided in this embodiment is configured to provide a distribution plate 2 in the generator cylinder 1, and utilize the distribution plate 2 to separate the accommodating chamber 11 in the generator cylinder 1 into an upper chamber 111 and a lower chamber 112. A through hole 21 connecting the upper chamber 111 and the lower chamber 112 is provided in the distribution plate 2, and a valve assembly 3 is provided for opening or closing the through hole 21. The valve assembly 3 can open or close the through hole 21 as needed to control the intensity of the reaction, avoid excessive temperature and pressure in the lower chamber 112, reduce the risk of sublimation and blockage of phosphorus pentachloride, and improve the production efficiency of phosphorus pentafluoride gas.

[0050] At the same time, the phosphorus pentafluoride gas generator 100 provided in this embodiment does not require a stirring device, thereby avoiding dust generated during stirring that may damage the mechanical seal, reducing the risk of leakage, and reducing the weight and cost of the equipment.

[0051] Specifically, when the reaction in the lower cavity 112 is too intense, the through hole 21 is closed by the valve assembly 3, and after a period of time, the through hole 21 is opened by the valve assembly 3. The intensity of the reaction in the lower cavity 112 can be detected by a pressure sensor and / or a temperature sensor, or the valve assembly 3 itself can sense the pressure difference between the upper cavity 111 and the lower cavity 112. When the pressure difference is too large, the valve assembly 3 closes the through hole 21 under the action of the pressure difference. When the pressure difference is too small, the through hole 21 is opened under the action of the gravity of the valve assembly 3 itself. The valve assembly 3 can also be used to set a fixed opening and closing time for the through hole 21. For example, the through hole 21 is opened for 1 minute, closed for 30 seconds, and then opened; or, opened for 2 minutes, closed for 1 minute, and then opened. There is no specific limitation. Reference Figure 2 and 3As shown, in one embodiment, the valve assembly 3 is partially disposed within the through-hole 21. The valve assembly 3 is configured to float up and down according to pressure changes within the lower cavity 112 to open or close the through-hole 21. Specifically, when the pressure within the lower cavity 112 is excessive, the valve assembly 3 floats upward due to the pressure differential, closing the through-hole 21. When the pressure within the lower cavity 112 is too low, the valve assembly 3 floats downward due to its own weight, opening the through-hole 21. This allows the through-hole 21 to be opened or closed without any electrical components, improving reliability and saving costs.

[0052] Reference Figure 2 and 3 As shown, in one embodiment, the valve assembly 3 includes a floating valve 31 and a limit member 32. The floating valve 31 is at least partially arranged in the through hole 21 and a gap is formed between the floating valve 31 and the inner wall of the through hole 21. The limit member 32 is connected to the bottom of the floating valve 31 and floats up and down with the floating valve 31; when the limit member 32 floats downward until it is out of contact with the distribution plate 2, the through hole 21 opens; when the limit member 32 floats upward until it abuts against the distribution plate 2, the through hole 21 is closed.

[0053] Specifically, refer to Figure 3 As shown, when through-hole 21 is open, the hydrogen fluoride liquid in upper chamber 111 enters lower chamber 112 through the gap between float valve 31 and the inner wall of through-hole 21, where it reacts with solid phosphorus pentachloride in lower chamber 112 to produce phosphorus pentafluoride gas. As the reaction proceeds, the pressure in lower chamber 112 continues to increase, driving valve assembly 3 to float upward, closing through-hole 21 and preventing excessive reaction in lower chamber 112.

[0054] In one embodiment, the valve assembly 3 further includes a restoring member 33, which is connected to the floating valve 31 and continuously applies an upward restoring force to the floating valve 31, so that in the initial state, the floating valve 31 drives the limiting member 32 to abut against the distribution plate 2, and the through hole 21 is closed.

[0055] In one embodiment, the return member 33 comprises a spring that is sleeved over the float valve 31. The upper end of the spring abuts the float valve 31, while the lower end abuts the distribution plate 2. The spring is compressed and continuously applies an upward return force to the float valve 31, thereby ensuring that the through hole 21 is initially closed. In other embodiments, the return member 33 may be a torsion spring, etc., without limitation.

[0056] In one embodiment, the orthographic projection of the through hole 21 on the distribution plate 2 is located within the orthographic projection of the limiting member 32 on the distribution plate 2 to ensure that the limiting member 32 can completely close the through hole 21 .

[0057] In one embodiment, the phosphorus pentafluoride gas generator 100 further includes a pressure charging mechanism, which is in communication with the upper cavity 111 and is configured to charge gas into the upper cavity 111 to increase the pressure in the upper cavity 111 so as to enable the valve assembly 3 to open the through hole 21 .

[0058] Specifically, in the initial state, the restoring member 33 continuously applies an upward restoring force to the floating valve 31, and the floating valve 31 drives the limit member 32 to abut against the distribution plate 2, at which time the through hole 21 is closed; then, hydrogen fluoride liquid is transported to the upper cavity 111 through the second feed port 13. During this process, the valve assembly 3 is subjected to the upward buoyancy of the hydrogen fluoride liquid, and the through hole 21 remains closed; then, gas is filled into the upper cavity 111 through the pressure charging mechanism to increase the pressure of the upper cavity 111, so that the valve assembly 3 floats downward to open the through hole 21, as shown in FIG. Figure 3 As shown, the hydrogen fluoride liquid in the upper chamber enters the lower chamber 112 through the gap between the float valve 31 and the inner wall of the through hole 21, and reacts with the phosphorus pentachloride solid in the lower chamber 112 to generate phosphorus pentafluoride gas. As the reaction proceeds, the pressure in the lower chamber 112 continues to increase, and drives the valve assembly 3 to float upward to close the through hole 21. Figure 2 shown.

[0059] Optionally, the charging mechanism includes an air pump and a pipeline, and the air pump is connected to the upper cavity 111 through the pipeline to charge gas into the upper cavity 111. Optionally, the gas can be air or other gas that does not react with hydrogen fluoride.

[0060] Reference Figure 3 As shown, in one embodiment, a first annular sealing bevel 22 is provided on the bottom of the distribution plate 2 around the through hole 21, and a second annular sealing bevel 321 is provided on the stopper 32. When the first annular sealing bevel 22 abuts the second annular sealing bevel 321, the through hole 21 is closed. The use of a surface-to-surface abutment method is beneficial for improving the sealing between the distribution plate 2 and the stopper 32, thereby better controlling the intensity of the reaction in the lower chamber 112. At the same time, the second annular sealing bevel 321 can evenly distribute the hydrogen fluoride liquid to the surrounding area, increasing the contact area with the phosphorus pentafluoride solid, thereby improving the reaction efficiency.

[0061] Reference Figure 3 As shown, in one embodiment, the stopper 32 includes a frustoconical portion 322, the sidewall of which forms a second annular sealing slope 321. Optionally, the frustoconical portion 322 is connected to the float valve 31 via bolts or screws. Specifically, during assembly of the valve assembly 3, the bottom of the float valve 31 is first inserted into the through-hole 21, and then the frustoconical portion 322 is connected to the bottom of the float valve 31 via bolts or screws.

[0062] Furthermore, the stopper 32 further includes a cylindrical portion 323, which is disposed at the bottom of the truncated cone portion 322. The truncated cone portion 322 can increase the stability of the floating valve 31 when floating up and down, thereby ensuring accurate opening or closing of the through hole 21. Optionally, the cylindrical portion 323 and the truncated cone portion 322 are integrally formed.

[0063] In one embodiment, the distribution plate 2 is provided with a plurality of through holes 21, and the phosphorus pentafluoride gas generator 100 includes a plurality of valve assemblies 3, each valve assembly 3 being used to open or close a corresponding through hole 21. In particular, due to the intense reaction in the lower chamber 112, the pressure distribution within the lower chamber 112 is uneven. By providing multiple through holes 21 and multiple valve assemblies 3, it is possible to prevent the uneven pressure distribution in the lower chamber 112 from causing some valve assemblies 3 to fail to open or close the corresponding through holes 21 in a timely manner, thereby better controlling the intensity of the reaction and preventing excessive pressure within the lower chamber 112. Optionally, the multiple through holes 21 are arranged in an annular pattern on the distribution plate 2, specifically with equal or unequal spacing.

[0064] In one embodiment, the multiple valve components 3 include at least a first valve component 3 and a second valve component 3. When the pressure in the lower cavity 112 reaches a first pressure value, the first valve component 3 closes the corresponding through hole 21; when the pressure in the lower cavity 112 reaches a second pressure value, the second valve component 3 closes the corresponding through hole 21; wherein the first pressure value is less than the second pressure value.

[0065] Specifically, as the reaction proceeds, the pressure in the lower cavity 112 continues to increase. When the pressure in the lower cavity 112 reaches a first pressure value, the first valve assembly 3 closes the corresponding through hole 21, and the hydrogen fluoride liquid in the upper cavity 111 cannot enter the lower cavity 112 through the through hole 21 corresponding to the first valve assembly 3. At this time, the through hole 21 corresponding to the second valve assembly 3 is in an open state, and the hydrogen fluoride liquid in the upper cavity 111 can enter the lower cavity 112 through the through hole 21 corresponding to the second valve assembly 3, thereby achieving a certain degree of control over the intensity of the reaction in the lower cavity 112. As the reaction continues, if the pressure in the lower cavity 112 continues to increase, when the pressure in the lower cavity 112 reaches a second pressure value, the second valve assembly 3 closes the corresponding through hole 21, and the hydrogen fluoride liquid in the upper cavity 111 cannot enter the lower cavity 112 through the through hole 21 corresponding to the second valve assembly 3. The intensity of the reaction in the lower cavity 112 can be further controlled, thereby achieving gradient control of the intensity of the reaction, which is beneficial to improving production efficiency.

[0066] Optionally, the restoring members 33 in the first and second valve assemblies 3 have different restoring properties, so that the first and second valve assemblies 3 and 3 close their corresponding through-holes 21 when the pressures within the lower chamber 112 reach different values. For example, the spring constant in the first valve assembly 3 can be smaller than the spring constant in the second valve assembly 3. Alternatively, different floating valves 31 or different stoppers 32 can be provided for the first and second valve assemblies 3 to close their corresponding through-holes 21 when the pressures within the lower chamber 112 reach different values. For example, the height of the frustum 322 in the first valve assembly 3 can be smaller than the height of the frustum 322 in the second valve assembly 3, resulting in the weight of the first valve assembly 3 being smaller than the weight of the second valve assembly 3. In other embodiments, the through holes 21 corresponding to the first valve assembly 3 and the second valve assembly 3 are of different sizes, so that the first valve assembly 3 and the second valve assembly 3 are subjected to different downward pressures from the hydrogen fluoride liquid in the upper cavity 111, so that the corresponding through holes 21 of the first valve assembly 3 and the second valve assembly 3 are closed when the pressures in the lower cavity 112 reach different pressure values.

[0067] Furthermore, the plurality of valve assemblies 3 further include a third valve assembly 3, which closes the corresponding through hole 21 when the pressure in the lower chamber 112 reaches a third pressure value; wherein the third pressure value is greater than the second pressure value. Optionally, the plurality of valve assemblies 3 further include a fourth valve assembly 3, etc., thereby achieving multiple gradients of control over the intensity of the reaction.

[0068] Reference Figure 1 As shown, in one embodiment, the phosphorus pentafluoride gas generator 100 further includes a first feed pipe 4. The first feed pipe 4 is partially located outside the accommodating chamber 11 and forms a first feed inlet 12. The outlet of the first feed pipe 4 is disposed below the distribution plate 2. Phosphorus pentachloride solid enters the first feed pipe 4 through the first feed inlet 12 and then directly flows into the lower chamber 112.

[0069] Optionally, the first feed pipe 4 passes through the distribution plate 2 , which facilitates the vertical arrangement of the first feed pipe 4 , so that the phosphorus pentachloride solid quickly enters the lower cavity 112 , thereby preventing the phosphorus pentachloride solid from being retained in the first feed pipe 4 .

[0070] Reference Figure 1As shown, in one embodiment, the phosphorus pentafluoride gas generator 100 further includes a distributor 7. The distributor 7 is provided with a hollow cavity, and the outer diameter of the distributor 7 gradually increases from top to bottom, forming a "trumpet-shaped" structure. The hollow cavity is connected to the outlet of the first feed pipe 4. Part of the phosphorus pentachloride solid enters the lower cavity 112 through the hollow cavity, and part of the phosphorus pentachloride solid enters the lower cavity 112 through the trumpet-shaped surface, ensuring that the phosphorus pentachloride solid in the distributor 7 is dispersed, thereby improving reaction efficiency.

[0071] In another embodiment, distributor 7 is positioned below the outlet of first feed pipe 4, and its outer diameter gradually increases from top to bottom, forming a "conical" structure. The phosphorus pentachloride solid enters lower cavity 112 through the conical surface, which also disperses the phosphorus pentachloride solid in distributor 7, thereby improving reaction efficiency.

[0072] Reference Figure 1 As shown, in one embodiment, the phosphorus pentafluoride gas generator 100 further includes a cooling pipe 5, which is disposed in the lower cavity 112 and has a first refrigerant inlet 51 and a first refrigerant outlet 52. Optionally, the cooling pipe 5 is arranged in a serpentine, triangular, or square shape to increase the length of the pipe and ensure a cooling effect.

[0073] Specifically, the high-temperature phosphorus pentafluoride gas generated by the reaction is cooled while passing through cooling pipe 5 and then discharged from lower chamber 112 through discharge port 14, thereby preventing the temperature in lower chamber 112 from being too high and ensuring the safety of phosphorus pentafluoride gas generator 100. Simultaneously, the sublimated phosphorus pentachloride is cooled and desublimated while passing through cooling pipe 5, preventing it from being discharged from lower chamber 112 along with the phosphorus pentafluoride gas.

[0074] The first refrigerant inlet 51 and the first refrigerant outlet 52 can provide refrigerant for the cooling pipe 5 to circulate, thereby ensuring a cooling effect.

[0075] Reference Figure 1 As shown, in one embodiment, the phosphorus pentafluoride gas generator 100 further includes a cooling jacket 6, which is circumferentially arranged around the generator barrel 1. The cooling jacket 6 can cool the generator barrel 1, and the cooling pipe 5 and the cooling jacket 6 cooperate with each other from the inside and outside of the lower cavity 111, respectively, to enhance the cooling effect. Optionally, the cooling jacket 6 includes a second refrigerant inlet and a second refrigerant outlet, which can circulate refrigerant through the cooling jacket 6 to ensure a cooling effect.

[0076] In one embodiment, the orthographic projection of the through-holes 21 on the distribution plate 2 at least partially overlaps with the orthographic projection of the cooling pipe 5 on the distribution plate 2. Partially sublimated phosphorus pentafluoride cools and condenses on the cooling pipe 5 as it passes through the cooling pipe 5. When hydrogen fluoride liquid drips onto the cooling pipe 5 through the through-holes 21, it slides down the cooling pipe 5, facilitating a reaction with the cooled and condensed phosphorus pentafluoride on the cooling pipe 5, thereby improving reaction efficiency.

[0077] Optionally, the distribution plate 2 is arranged in the accommodating cavity 11 near the upper head of the generator cylinder 1, so that the separated lower cavity 112 is larger than the upper cavity 111, so as to leave sufficient reaction space for the lower cavity 112 and accommodate more cooling pipes 5 to ensure the cooling effect.

[0078] It should be noted that the above description is limited to some embodiments of the present application. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recited in the claims can be performed in a different order than that described in the above embodiments and still achieve the desired results. Furthermore, the processes depicted in the accompanying drawings do not necessarily require the specific order or sequential order shown to achieve the desired results.

[0079] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present application (including the claims) is limited to these examples. Within the scope of the present application, the technical features of the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of different aspects of the above embodiments of the present application, which are not provided in detail for the sake of simplicity.

[0080] The embodiments of the present application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present application should be included in the scope of protection of this application.

Claims

1. A phosphorus pentafluoride gas generator, characterized in that: include: A generator cylinder, wherein a receiving cavity is formed in the generator cylinder; a distribution plate, the distribution plate being arranged in the accommodating cavity and dividing the accommodating cavity into an upper cavity and a lower cavity, the distribution plate being provided with a through hole communicating with the upper cavity and the lower cavity; a first feed port, the first feed port being provided on the generator barrel and being used for conveying phosphorus pentachloride solid to the lower cavity; a second feed port, the second feed port being provided on the generator cylinder and being used for delivering hydrogen fluoride liquid to the upper cavity; a valve assembly disposed in the accommodating cavity and configured to open or close the through hole; when the through hole is opened, the hydrogen fluoride liquid in the upper cavity can enter the lower cavity through the through hole; A discharge port is provided on the generator cylinder and is used to transport the phosphorus pentafluoride gas generated by the reaction in the lower cavity to the outside of the generator cylinder.

2. The phosphorus pentafluoride gas generator according to claim 1, characterized in that: The valve assembly is partially disposed in the through hole, and is configured to float up and down according to pressure changes in the lower cavity to open or close the through hole.

3. The phosphorus pentafluoride gas generator according to claim 2, characterized in that: The valve assembly includes a floating valve and a limit member, the floating valve is at least partially arranged in the through hole and a gap is formed between the floating valve and the inner wall of the through hole, the limit member is connected to the bottom of the floating valve and floats up and down with the floating valve; when the limit member floats downward until it is out of contact with the distribution plate, the through hole opens; when the limit member floats upward until it abuts against the distribution plate, the through hole closes.

4. The phosphorus pentafluoride gas generator according to claim 3, characterized in that: The valve assembly further includes a restoring member connected to the float valve and continuously applying an upward restoring force to the float valve.

5. The phosphorus pentafluoride gas generator according to claim 4, characterized in that: The return member includes a spring, which is sleeved on the floating valve. The upper end of the spring abuts against the floating valve, and the lower end of the spring abuts against the distribution plate.

6. The phosphorus pentafluoride gas generator according to claim 3, characterized in that: The orthographic projection of the through hole on the distribution plate is located within the orthographic projection of the limiting member on the distribution plate.

7. The phosphorus pentafluoride gas generator according to claim 4, characterized in that: The phosphorus pentafluoride gas generator further includes a pressure charging mechanism, which is communicated with the upper cavity and is used for charging gas into the upper cavity to increase the pressure in the upper cavity so as to enable the valve assembly to open the through hole.

8. The phosphorus pentafluoride gas generator according to claim 3, characterized in that: The bottom of the distribution plate is provided with a first annular sealing slope around the through hole, and the limiting member is provided with a second annular sealing slope. When the first annular sealing slope abuts against the second annular sealing slope, the through hole is closed.

9. The phosphorus pentafluoride gas generator according to claim 2, characterized in that: The distribution plate is provided with a plurality of the through holes, and the phosphorus pentafluoride gas generator includes a plurality of the valve assemblies, each of the valve assemblies being used to open or close a corresponding through hole.

10. The phosphorus pentafluoride gas generator according to claim 9, characterized in that: The multiple valve assemblies include at least a first valve assembly and a second valve assembly. When the pressure in the lower cavity reaches a first pressure value, the first valve assembly closes the corresponding through hole; when the pressure in the lower cavity reaches a second pressure value, the second valve assembly closes the corresponding through hole; wherein, the first pressure value is less than the second pressure value.

11. The phosphorus pentafluoride gas generator according to claim 1, characterized in that: The phosphorus pentafluoride gas generator further includes a first feed pipe, a portion of which is located outside the accommodating cavity and forms the first feed port, and an outlet of the first feed pipe is disposed below the distribution plate.

12. The phosphorus pentafluoride gas generator according to claim 11, characterized in that: The phosphorus pentafluoride gas generator further includes a distributor, the distributor is provided with a hollow cavity and the outer diameter of the distributor gradually increases from top to bottom, and the hollow cavity is communicated with the outlet of the first feed pipe; Alternatively, the distributor is arranged below the outlet of the first feeding pipe and the outer diameter of the distributor gradually increases from top to bottom.

13. The phosphorus pentafluoride gas generator according to claim 1, characterized in that The phosphorus pentafluoride gas generator further includes a cooling pipe, which is disposed in the lower cavity and has a first refrigerant inlet and a first refrigerant outlet.

14. The phosphorus pentafluoride gas generator according to claim 13, characterized in that: An orthographic projection of the through hole on the distribution plate at least partially overlaps with an orthographic projection of the cooling pipe on the distribution plate.

15. The phosphorus pentafluoride gas generator according to claim 1, characterized in that The phosphorus pentafluoride gas generator further includes a cooling jacket, which is circumferentially arranged around the generator cylinder.

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