Graphite boat disassembling and assembling method
By designing fully automated graphite boat disassembly and assembly equipment, the existing equipment's low efficiency and large area are solved, efficient graphite boat disassembly and assembly are achieved, and silicon wafer conversion efficiency is improved.
Patent Information
- Application Number
- CN202510573748.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-11
- Publication Date
- 2025-08-15
AI Technical Summary
The existing graphite boat disassembly and assembly equipment is inefficient and covers a large area, so it cannot be disassembled and assembled efficiently, which affects the use efficiency of graphite boats and the conversion efficiency of silicon wafers.
A graphite boat disassembly and assembly equipment is designed, including the main body of the graphite boat disassembly and assembly machine, the graphite boat buffer area, the graphite boat clamping point loading and unloading machine, the graphite boat rotary handling mechanism, the disassembly and assembly components, the graphite boat sheet transmission device and the graphite boat sheet handling mechanism to realize the fully automated disassembly and assembly process, including the boat sheet detection, the clip point replacement and the replacement of accessories.
The efficiency of graphite boat sheet correction and accessories replacement is improved, the equipment structure is compact, the area is small, and a fully automated disassembly and assembly process is realized.
Smart Images

Figure CN120480583A_ABST
Abstract
Description
[0001] This application is a divisional application of the following application: the application date is November 11, 2024, the application number is 202411599094.9, and the invention name is a graphite boat disassembly and assembly device. Technical Field
[0002] The invention relates to the technical field of graphite boat disassembly and assembly, in particular to a graphite boat disassembly and assembly method. Background Art
[0003] As the cost of photovoltaic power generation continues to decrease, solar power generation will have a broader market space. As a carrier for anti-reflection coating of solar cells, the structure and size of the graphite boat directly affect the conversion efficiency and production efficiency of the silicon wafer.
[0004] After a period of use, the graphite boat will become loose and the surface of the boat will be covered with dust, affecting the efficiency of the graphite boat. Therefore, the graphite boat will be disassembled, the boat will be blown clean, and damaged accessories such as nuts, ceramic rings and card points will be replaced. After replacing accessories and calibration, the graphite boat will be assembled and used.
[0005] The existing graphite boat disassembly and assembly uses independent mechanical equipment in conjunction with manual labor to complete the disassembly and assembly, which is inefficient and the equipment is scattered and occupies a large area.
[0006] Therefore, we propose a graphite boat disassembly and assembly device to solve the above problems. Summary of the Invention
[0007] The object of the present invention is to provide a graphite boat disassembly and assembly device to solve the problems raised in the above background technology.
[0008] To achieve the above-mentioned object, the present invention provides the following technical solution: a graphite boat disassembly and assembly equipment, comprising: a graphite boat disassembly and assembly machine body, a graphite boat sheet buffer area, and a graphite boat card point loading and unloading machine, wherein the graphite boat disassembly and assembly machine body is connected to the graphite boat sheet buffer area, and the graphite boat sheet buffer area is connected to the graphite boat card point loading and unloading machine;
[0009] A graphite boat rotating and transporting mechanism, two graphite boat disassembly and assembly components, a graphite boat sheet transmission device, a loading and unloading turnover mechanism, and a graphite boat sheet transmission mechanism are arranged in the main body of the graphite boat disassembly and assembly machine. The two graphite boat disassembly and assembly components are located on both sides of the graphite boat sheet transmission device. A graphite boat sheet transmission mechanism is arranged above the two graphite boat disassembly and assembly components and the graphite boat sheet transmission device. A graphite boat rotating and transporting mechanism is arranged above the loading and unloading turnover mechanism and the graphite boat sheet transmission mechanism. The loading and unloading turnover mechanism caches the graphite boat.
[0010] The graphite boat disassembly and assembly assembly comprises a disassembly and assembly mechanism, a first placement platform, a disassembly and assembly platform, and a second placement platform. The second placement platform is located on both sides of the graphite boat sheet transmission device. The disassembly and assembly platform and the first placement platform are sequentially arranged on the second placement platform in a direction away from the graphite boat sheet transmission device. The disassembly and assembly mechanism is arranged above the disassembly and assembly platform and the first placement platform.
[0011] Both ends of the disassembly and assembly platform are provided with a good product placement platform, an electrode block buffer column and a scrap product recovery box, and the electrode block buffer column is connected to the electrode block pick-up and placement mechanism;
[0012] Material toggling mechanism, its both sides respectively have a cylinder pressure, and the cylinder pressure bar connects swing arm, and the swing arm end face has hook portion, and a bar passes position between the end of two swing arms and the hook portion.
[0013] A boat caching mechanism is provided in the graphite boat caching area, and the boat caching mechanism caches scrapped boats and good boats.
[0014] Preferably, the graphite boat rotating conveying mechanism includes two sets of symmetrical first slide rails and a first conveying device, a conveyor body is slidably arranged on the first slide rail, the conveyor body is fixedly connected to the first conveying device, and the first conveying device drives the conveyor body to move along the first slide rail passing over the graphite boat disassembly and assembly assembly and the loading and unloading turnover mechanism.
[0015] Preferably, the conveyor body includes a mobile platform seat, both ends of the mobile platform seat are slidingly connected to the first slide rail, both ends of the mobile platform seat are fixedly connected to the first conveying device, two first lifting drive mechanisms are arranged on the mobile platform seat, the lower end of the first lifting drive mechanism is connected to the clamping claw lifting seat, the clamping claw assembly is installed at both ends of the clamping claw lifting seat, the clamping claw assembly is automatically slidably connected to the clamping claw lifting seat, and the clamping claw assembly is provided with a motor assembly for driving the clamping claw to flip.
[0016] Preferably, the graphite boat sheet transport mechanism comprises two sets of symmetrical second slide rails and a second conveying device, two movable beams are slidably arranged on the second slide rails, both ends of the movable beams are fixedly connected to the second conveying device, and the graphite boat sheet adsorption transport mechanism is centrally hoisted on the movable beams.
[0017] Preferably, the graphite boat sheet adsorption and transportation mechanism includes a fixed seat, which is fixedly mounted on a movable crossbeam, and the fixed seat is slidably connected to an automatic lifting seat, which is hoisted by a cross frame, and the cross frame is provided with a number of vacuum suction nozzles and positioning needles and a ceramic ring clamping mechanism, the vacuum suction nozzle adsorbs the boat sheet, and downward pressing pin assemblies are installed at both ends of the fixed seat.
[0018] Preferably, the disassembly and assembly mechanism comprises a bracket, the bracket is fixedly arranged, a Y-axis moving component is arranged on the bracket, two groups of X-axis moving components are arranged on the Y-axis moving component, and a Z-axis disassembly and assembly robot is arranged on the X-axis moving component;
[0019] The Z-axis disassembly and assembly robot comprises a Z-axis moving base, in which a nut disassembly and assembly machine and a visual inspection machine are installed;
[0020] The Z-axis moving base is an automatic Z-axis moving module that drives the nut disassembly and assembly machine and the visual inspection machine to rise and fall;
[0021] The lower end of the Z-axis movable seat is also provided with an opening and closing clamping claw driven by a clamping cylinder.
[0022] Preferably, end positioning mechanisms are installed on the lower surfaces of both ends of the disassembly and assembly platform, and the end positioning mechanisms include a fourth lifting drive mechanism, which drives the lifting and connecting lifting seat, and the lifting seat is provided with a supporting clamp, a lifting cylinder and a supporting positioning column, and the lifting cylinder drives the lifting and connecting supporting clamp.
[0023] Preferably, the first placement platform includes a fixed fixing plate, the fixed plate is centrally fixedly connected to the second lifting drive mechanism, the telescopic end of the second lifting drive mechanism is fixedly connected to the lifting plate, and a plurality of guide columns are provided between the fixed plate and the lifting plate;
[0024] A plurality of ceramic ring cache columns are installed on the upper surface of the fixed plate, and the ceramic ring cache columns movably penetrate the lifting plate. The ceramic ring cache columns cache the removed ceramic rings, and the removed nuts and other graphite boat accessories are placed on the upper surface of the lifting plate.
[0025] Preferably, a plurality of bottom positioning cylinders are installed below the disassembly and assembly platform, and the bottom positioning cylinders drive the positioning plates.
[0026] Preferably, the graphite boat sheet transmission device includes a first conveyor line and a second conveyor line, the first conveyor line and the second conveyor line are connected, a boat sheet carrier positioning mechanism is provided in the first conveyor line, and a detection camera and a wind knife are provided at the end of the second conveyor line.
[0027] Compared with the prior art, the present invention has the following beneficial effects:
[0028] The graphite boat is loaded onto the loading and unloading turnover mechanism. The graphite boat rotating transport mechanism rotates the graphite boat of the loading and unloading turnover mechanism by 90 degrees and then transports it to the graphite boat disassembly and assembly assembly for disassembly of nuts, ceramic rings and electrode blocks. The graphite boat sheet transport mechanism sequentially adsorbs the boat sheets and places them into the graphite boat sheet transmission device and transports them to the boat sheet temporary buffer mechanism. After being inspected and replaced by the card point machine, they are sent back to the graphite boat disassembly and assembly assembly for assembly. The assembled graphite boat is then sent to the loading and unloading turnover mechanism for unloading. During this process, the scrapped boat sheets, nuts and ceramic rings are automatically replaced. The whole process has a high degree of automation. The two groups of graphite boat disassembly and assembly components work alternately, and the disassembly and assembly are completed in one piece, which greatly improves the efficiency of graphite boat sheet calibration and replacement of accessories. The overall structure of the equipment is compact and occupies a small area. BRIEF DESCRIPTION OF THE DRAWINGS
[0029] Figure 1 It is a structural schematic diagram of the present invention;
[0030] Figure 2 It is a schematic diagram of the main structure of the present invention;
[0031] Figure 3 This is a disassembled diagram of the main structure of the present invention;
[0032] Figure 4 Schematic diagram of the structure of the graphite boat rotating transport mechanism of the present invention;
[0033] Figure 5 For the present invention Figure 4 A magnified view of point A;
[0034] Figure 6 Schematic diagram of the structure of the graphite boat transport mechanism of the present invention;
[0035] Figure 7 Schematic diagram of the structure of the graphite boat sheet adsorption and transportation mechanism of the present invention;
[0036] Figure 8 It is a partial enlarged view of the graphite boat adsorption and transportation mechanism of the present invention;
[0037] Figure 9 This is a schematic diagram of the structure of the graphite boat disassembly and assembly components of the present invention;
[0038] Figure 10 This is an exploded view of the disassembly mechanism and disassembly platform of the present invention;
[0039] Figure 11 For the present invention Figure 10 Enlarged view of point B;
[0040] Figure 12 Schematic diagram of the structure of the disassembly and assembly mechanism of the present invention;
[0041] Figure 13Schematic diagram of the partial structure of the Z-axis disassembly and assembly robot in the present invention;
[0042] Figure 14 Schematic diagram of the structure of the end positioning mechanism of the present invention;
[0043] Figure 15 Schematic diagram of the structure of the first placement platform in the present invention;
[0044] Figure 16 Schematic diagram of the structure of the lifting and positioning mechanism of the present invention;
[0045] Figure 17 It is a partial side elevation view of the lifting and positioning mechanism of the present invention;
[0046] Figure 18 For the present invention Figure 16 Enlarged view of point D;
[0047] Figure 19 For the present invention Figure 10 Enlarged view of point C;
[0048] Figure 20 It is a structural schematic diagram of the graphite boat sheet transmission device in the present invention.
[0049] Figure: 1. Graphite boat disassembly and assembly machine body; 2. Graphite boat sheet buffer area; 3. Graphite boat card point loading and unloading machine; 4. Graphite boat rotating conveying mechanism; 41. First slide rail; 42. First conveying device; 44. Conveyor body; 441. Mobile platform seat; 442. First lifting drive mechanism; 443. Gripping claw lifting seat; 444. Gripping claw assembly; 5. Graphite boat disassembly and assembly assembly; 51. Disassembly and assembly mechanism; 511. Bracket; 512. Y-axis moving assembly; 513. X-axis moving assembly; 514. Z-axis disassembly and assembly manipulator; 5141. Nut Assembly and disassembly machine; 5142, visual inspection machine; 5143, Z-axis moving seat; 5144, clamping cylinder; 5145, opening and closing clamping claw; 52, first placement platform; 521, fixed plate; 522, second lifting drive mechanism; 523, lifting plate; 524, guide column; 525, ceramic ring buffer column; 53, assembly and disassembly platform; 531, good product placement platform; 532, electrode block buffer column; 533, scrap product recycling box; 534, electrode block pick-up and placement mechanism; 54, second placement platform; 55, lifting and positioning mechanism; 551, Fixed platform plate; 552, lifting platform plate; 553, driving connecting rod; 554, clamping seat; 555, third lifting drive mechanism; 556, horizontal push cylinder; 557, nut positioning column; 558, connecting arm; 559, linkage rod; 56, end positioning mechanism; 561, fourth lifting drive mechanism; 562, supporting clamping claw; 563, lifting seat; 564, lifting cylinder; 565, supporting positioning column; 57, bottom positioning cylinder; 6, boat caching mechanism; 7, gantry transport mechanism; 8, boat temporary caching mechanism; 9 , graphite boat transmission device; 91, first section conveyor line; 92, second section conveyor line; 93, detection camera; 94, air knife; 10, loading and unloading turnover mechanism; 11, graphite boat transport mechanism; 111, second slide rail; 112, second conveyor device; 113, moving beam; 114, graphite boat adsorption and transport mechanism; 1141, fixed seat; 1142, automatic lifting seat; 1143, horizontal frame; 1144, vacuum nozzle; 1145, positioning pin; 1146, ceramic ring clamping mechanism; 1147, push-down pin assembly. DETAILED DESCRIPTION
[0050] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0051] See also Figure 1The present invention provides a technical solution: a graphite boat disassembly and assembly equipment, comprising: a graphite boat disassembly and assembly machine main body 1, a graphite boat sheet buffer area 2 and a graphite boat card point loader and unloader 3, the graphite boat disassembly and assembly machine main body 1 is connected to the graphite boat sheet buffer area 2, the graphite boat sheet buffer area 2 is connected to the graphite boat card point loader and unloader 3, after the graphite boat is disassembled by the graphite boat disassembly and assembly machine main body 1, the boat sheet enters the graphite boat sheet buffer area 2, and then enters the graphite boat card point loader and unloader 3 to replace the card point, and then returns to the graphite boat disassembly and assembly machine main body 1 for assembly.
[0052] See also Figure 2 and Figure 3 , a graphite boat rotating and transporting mechanism 4, two graphite boat disassembling and assembling components 5, a graphite boat sheet transmission device 9, a loading and unloading turnover mechanism 10 and a graphite boat sheet transmission mechanism 11 are arranged in the main body 1 of the graphite boat disassembling and assembling machine. The two graphite boat disassembling and assembling components 5 are located on both sides of the graphite boat sheet transmission device 9. A graphite boat sheet transmission mechanism 11 is arranged across the two graphite boat disassembling and assembling components 5 and the graphite boat sheet transmission device 9. A graphite boat rotating and transporting mechanism 4 is arranged across the loading and unloading turnover mechanism 10 and the graphite boat sheet transmission mechanism 11. The loading and unloading turnover mechanism 10 buffers the graphite boat. The graphite boat rotating conveying mechanism 4 conveys the graphite boat on the loading and unloading turnover mechanism 10 and turns it 90 degrees to place it on the graphite boat disassembly and assembly component 5 to be disassembled into boat slices. The graphite boat slice conveying mechanism 11 places the disassembled boat slices on the graphite boat slice transmission device 9 and transports them to the graphite boat slice buffer area 2. The boat slices after replacing the card points are put back on the graphite boat slice transmission device 9 and transported back. They are transported to the graphite boat disassembly and assembly component 5 through the graphite boat slice conveying mechanism 11 for assembly, and then the assembled graphite boat is transported to the loading and unloading turnover mechanism 10 for unloading by the graphite boat rotating conveying mechanism 4.
[0053] See also Figure 4 The graphite boat rotating conveying mechanism 4 includes two sets of symmetrical first slide rails 41 and a first conveying device 42. A set of conveyor bodies 44 are slidably arranged on the first slide rails 41. The conveyor bodies 44 are fixedly connected to the first conveying device 42. The first conveying device 42 drives the conveyor body 44 to move along the first slide rails 41 and pass over the graphite boat disassembly and assembly component 5 and the loading and unloading turnover mechanism 10.
[0054] See also Figure 5The conveyor body 44 includes a mobile platform seat 441, both ends of the mobile platform seat 441 are slidingly connected to the first slide rail 41, and both ends of the mobile platform seat 441 are fixedly connected to the first conveying device 42. Two first lifting drive mechanisms 442 are arranged on the mobile platform seat 441, and the lower end of the first lifting drive mechanism 442 is connected to the clamping claw lifting seat 443, and the clamping claw assembly 444 is installed at both ends of the clamping claw lifting seat 443. The clamping claw assembly 444 is automatically slidably connected to the clamping claw lifting seat 443, and the clamping claw assembly 444 is provided with a motor assembly for clamping claw flipping drive to realize the three-axial movement of the clamping claw assembly 444, so as to grab the graphite boat and move back and forth between the graphite boat disassembly and assembly assembly 5 and the loading and unloading turnover mechanism 10. At the same time, after the clamping claw assembly 444 grabs the graphite boat, it is driven to rotate by the motor assembly to flip the graphite boat 90°.
[0055] See also Figure 6 The graphite boat transport mechanism 11 includes two sets of symmetrical second slide rails 111 and a second conveying device 112. Two movable beams 113 are slidably arranged on the second slide rails 111. Both ends of the movable beams 113 are fixedly connected to the second conveying device 112. A graphite boat adsorption and transport mechanism 114 is centrally suspended on the movable beam 113. The second conveying device 112 drives the graphite boat adsorption and transport mechanism 114 to move linearly along the second slide rails 111, so that the graphite boat adsorption and transport mechanism 114 adsorbs the graphite boat and travels back and forth between the graphite boat transmission device 9 and the graphite boat disassembly and assembly component 5.
[0056] See also Figure 7 and Figure 8 The graphite boat sheet adsorption and transportation mechanism 114 includes a fixed seat 1141, which is fixedly installed on the moving beam 113. The fixed seat 1141 is slidably connected to the automatic lifting seat 1142, and the automatic lifting seat 1142 hoists the horizontal frame 1143. The horizontal frame 1143 is provided with a number of vacuum suction nozzles 1144, positioning needles 1145 and ceramic ring clamping mechanisms 1146. The vacuum suction nozzle 1144 adsorbs the boat sheet, and the boat sheet is positioned by the positioning needle 1145 during adsorption. The ceramic ring clamping mechanism 1146 clamps the ceramic ring. Down-pressing pin assemblies 1147 are installed at both ends of the fixed seat 1141 for pressing down the graphite rods or ceramic rods at both ends of the graphite boat to keep the graphite boat electrode block in a state to be grasped.
[0057] See also Figure 9The graphite boat disassembly and assembly assembly 5 includes a disassembly and assembly mechanism 51, a first placement platform 52, a disassembly and assembly platform 53, and a second placement platform 54. The second placement platform 54 is located on one side of the graphite boat sheet transmission device 9. The disassembly and assembly platform 53 and the first placement platform 52 are sequentially arranged in the direction away from the graphite boat sheet transmission device 9. The disassembly and assembly mechanism 51 is arranged above the disassembly and assembly platform 53 and the first placement platform 52. The graphite boat is flipped 90 degrees and placed on the disassembly and assembly platform 53 for positioning. The disassembly and assembly mechanism 51 removes the nuts of the graphite boat, and the graphite boat sheet adsorption and transportation mechanism 114 moves the boat sheet in sequence. It is adsorbed and placed on the graphite boat transmission device 9, and then the graphite boat adsorption and transportation mechanism 114 clamps the ceramic ring and places it on the first placement platform 52. When returning, the boat on the graphite boat transmission device 9 is adsorbed and transported to the second placement platform 54 for buffering. After all the boats are returned, the boat on the second placement platform 54 and the ceramic ring on the first placement platform 52 are transported to the disassembly and assembly platform 53 in turn. Finally, the disassembly and assembly mechanism 51 assembles the nuts and other parts and inspects them. After the inspection is completed, the graphite boat rotating transportation mechanism 4 transports them to the loading and unloading turnover mechanism 10 for unloading.
[0058] See also Figure 10 and Figure 11 At both ends of the disassembly and assembly platform 53, a good product placement platform 531, an electrode block cache column 532 and a scrap product recycling box 533 are provided. The electrode block cache column 532 is connected to the electrode block picking and placing mechanism 534. The good product placement platform 531 pre-stores good product nuts and ceramic rings for replacing the worn nuts and ceramic rings removed from the graphite boat. The worn nuts and ceramic rings are put into the scrap product recycling box 533 for recycling. The electrode block cache column 532 is used to cache the disassembled motor pieces. The electrode block picking and placing mechanism 534 is used to lift the electrode block to the top of the cache column to facilitate the removal of the electrode block.
[0059] See also Figure 12 and Figure 13 The disassembly and assembly mechanism 51 includes a bracket 511, the bracket 511 is fixed, a Y-axis moving component 512 is provided on the bracket 511, two sets of X-axis moving components 513 are provided on the Y-axis moving component 512, and a Z-axis disassembly and assembly manipulator 514 is provided on the X-axis moving component 513 to enable the Z-axis disassembly and assembly manipulator 514 to move along the X, Y, and Z axes;
[0060] The Z-axis disassembly and assembly robot 514 includes a Z-axis moving base 5143, in which a nut disassembly and assembly machine 5141 and a visual inspection machine 5142 are installed. The nut disassembly and assembly machine 5141 is used to disassemble and assemble nuts and other accessories, and place the disassembled nuts on the first placement platform 52. The visual inspection machine 5142 is used to take pictures of nuts and other accessories, locate them, and detect whether they are worn.
[0061] The Z-axis moving base 5143 is an automatic Z-axis moving module, driving the nut disassembly and assembly machine 5141 and the visual inspection machine 5142 to move up and down;
[0062] The lower end of the Z-axis movable seat 5143 is also provided with an opening and closing clamping jaw 5145 driven by a clamping cylinder 5144. The opening and closing clamping jaw 5145 is used to clamp the electrode block and the ceramic ring, and place the electrode block on the electrode block cache column 532, or remove it from the electrode block cache column 532 and place it on the graphite boat. The scrapped nuts and ceramic rings are placed in the scrap recycling box 533.
[0063] See also Figure 10 and Figure 14 , end positioning mechanisms 56 are installed on the lower surfaces of both ends of the disassembly and assembly platform 53, and the end positioning mechanisms 56 include a fourth lifting drive mechanism 561. The fourth lifting drive mechanism 561 drives the lifting and connecting lifting seat 563. The lifting seat 563 is provided with a supporting clamp 562, a lifting cylinder 564 and a supporting positioning column 565. The lifting cylinder 564 drives the lifting and connecting supporting clamp 562. When the boat piece is disassembled, the lower end of the serial rod of the graphite boat piece is lifted and fixed by the supporting positioning column 565, which is convenient for the rotation and disassembly of the nut on the top. After the boat piece is removed, the supporting positioning column 565 descends, and the supporting clamp 562 is lifted to clamp the serial rod to prevent the serial rod from shaking.
[0064] See also Figure 15 The first placement platform 52 includes a fixed fixed plate 521, the fixed plate 521 is fixedly connected to the second lifting drive mechanism 522 at the center, the telescopic end of the second lifting drive mechanism 522 is fixedly connected to the lifting plate 523, and a plurality of guide columns 524 are provided between the fixed plate 521 and the lifting plate 523. The guide columns 524 are used for guiding so that the fixed plate 521 and the lifting plate 523 can be vertically lifted and lowered;
[0065] Several ceramic ring cache columns 525 are installed on the upper surface of the fixed plate 521. The ceramic ring cache columns 525 movably penetrate the lifting plate 523. The ceramic ring cache columns 525 are used to cache the removed ceramic rings. The upper surface of the lifting plate 523 is used to place removed nuts and other accessories.
[0066] See also Figure 9 、 Figure 15 、 Figure 16 and Figure 17A lifting and positioning mechanism 55 is installed below the disassembly and assembly platform 53. The lifting and positioning mechanism 55 includes a fixed platform plate 551. The fixed platform plate 551 is suspended below the disassembly and assembly platform 53. A lifting platform plate 552 is provided above the fixed platform plate 551. Two linkage rods 559 are slidingly provided on the lifting platform plate 552. Two third lifting drive mechanisms 555 are provided between the fixed platform plate 551 and the lifting platform plate 552. The third lifting drive mechanism 555 drives the lifting platform plate 552 to move up and down. Two sets of horizontal push cylinders 556 are respectively provided below both ends of the platform plate 552. The telescopic ends of the horizontal push cylinders 556 are fixed to the connecting arms 558. The other end of the connecting arms 558 is fixedly connected to the linkage rod 559. A number of driving connecting rods 553 are fixedly installed on the linkage rod 559. The ends of the driving connecting rods 553 are installed with clamping seats 554. The clamping seats 554 are staggered and clamped. A number of pairs of nut positioning columns 557 are installed on the fixed platform plate 551. The nut positioning columns 557 movably penetrate the clamping seats 554 and the disassembly and assembly platform 53.
[0067] The nut positioning column 557 fixes the nut at the bottom of the graphite boat series rod from the bottom, so that the series rod is fixed, which makes it easier to disassemble and assemble the nut at the top of the series rod. The third lifting drive mechanism 555 drives the lifting platform plate 552 to lift and lower the clamping seat 554, and the horizontal pushing cylinder 556 drives the two linkage rods 559 to approach through the connecting arm 558, so that the clamping seat 554 clamps the graphite boat series rod to make it vertically stable.
[0068] See also Figure 9 and Figure 18 A plurality of bottom positioning cylinders 57 are installed under the disassembly and assembly platform 53. The bottom positioning cylinders 57 drive the positioning plates to clamp the graphite boat sheet from the side and position the side of the graphite boat.
[0069] See also Figure 19 The graphite boat sheet transmission device 9 includes a first conveyor line 91 and a second conveyor line 92, which are connected to each other. A boat sheet carrier positioning mechanism is provided in the first conveyor line 91. The boat sheet carrier positioning mechanism is composed of a cylinder-driven convex shaft plugging the boat sheet to realize boat sheet positioning. An inspection camera 93 and a wind knife 94 are provided at the end of the second conveyor line 92. The inspection camera 93 is used to inspect the appearance and card points on the boat sheet. At the same time, the wind knife 94 cleans the dust on the surface of the boat sheet and cleans the graphite boat residue on the carrier.
[0070] See also Figure 2 A boat caching mechanism 6 is provided in the graphite boat caching area 2. The boat caching mechanism 6 is used to cache scrapped boats and qualified boats. Unqualified boats are placed in the boat caching mechanism 6 for unloading, and qualified boats are taken away to replace the scrapped boats.
[0071] The boat caching mechanism 6 is connected to the boat temporary caching mechanism 8, and the boat temporary caching mechanism 8 is connected to the boat carding machine. A gantry conveying mechanism 7 is set across the boat temporary caching mechanism 8 and the boat caching mechanism 6. The gantry conveying mechanism 7 passes back and forth through the boat temporary caching mechanism 8, the boat caching mechanism 6 and the graphite boat transmission device 9 for three-way boat conveying.
[0072] Working principle: The graphite boat is loaded onto the loading and unloading turnover mechanism 10. The graphite boat rotating and transporting mechanism 4 rotates the graphite boat of the loading and unloading turnover mechanism 10 by 90 degrees and then transports it to the graphite boat disassembly and assembly component 5 for disassembly of the nuts, ceramic rings and electrode blocks. The graphite boat sheet transporting mechanism 11 sequentially absorbs the boat sheets and places them into the graphite boat sheet transmission device 9 and transports them to the boat sheet temporary buffer mechanism 8. After being inspected and replaced by the card point machine, the boat is sent back to the graphite boat disassembly and assembly component 5 for assembly. The assembled graphite boat is then sent to the loading and unloading turnover mechanism 10 for unloading.
[0073] During this process, scrapped boats, nuts and ceramic rings are automatically replaced;
[0074] The whole process is highly automated, with two groups of graphite boat disassembly and assembly components 5 working alternately, and disassembly and assembly are completed in one piece, which greatly improves the efficiency of graphite boat calibration and replacement of accessories. The structure is compact and occupies a small area.
[0075] The contents not described in detail in this specification belong to the prior art known to those skilled in the art.
[0076] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.
Claims
1. A graphite boat disassembly and assembly method, characterized in that: include: The graphite boat disassembly assembly component (5) and the graphite boat sheet conveying mechanism (11) disassemble the graphite boat into nuts, electrode blocks, boat sheets and ceramic rings; The inspection camera (93) inspects the boat, and the graphite boat transport device (9) transports the boat that has passed the inspection to the graphite boat buffer area (2), and the graphite boat card point loader (3) inspects the boat and replaces the card point; The graphite boat transport mechanism (11) transports the boat and the ceramic ring to the disassembly and assembly platform (53) and sleeves them on the serial rod. The Z-axis disassembly and assembly robot (514) transports the electrode block to the disassembly and assembly platform (53) and sleeves them on the serial rod. After all the boats, ceramic rings and electrode blocks are assembled in sequence, the nut disassembly and assembly machine (5141) installs the nut on the top of the serial rod to complete the graphite boat assembly.
2. The graphite boat disassembly and assembly method according to claim 1, characterized in that: The graphite boat disassembly assembly (5) and the graphite boat sheet transport mechanism (11) disassemble the graphite boat into nuts, electrode blocks, boat sheets and ceramic rings, and further include: The nut disassembly machine (5141) of the graphite boat disassembly assembly (5) disassembles the nuts on the top of the graphite boat, the visual inspection machine (5142) inspects the nuts, and the X-axis moving assembly (513), the Y-axis moving assembly (512) and the Z-axis moving seat (5143) drive the nut disassembly machine (5141) to place nuts that pass the inspection on the first placement platform (52), or to place nuts that fail the inspection in the scrap recycling box (533); The graphite boat transport mechanism (11) absorbs the boat and transports it to the graphite boat transmission device (9); The opening and closing clamping jaws (5145) of the graphite boat disassembly assembly (5) disassemble the electrode blocks at both ends of the graphite boat, and the X-axis moving assembly (513), the Y-axis moving assembly (512) and the Z-axis moving seat (5143) drive the opening and closing clamping jaws (5145) to transport the electrode blocks and place them on the electrode block buffer column (532); the ceramic ring clamping mechanism (1146) of the graphite boat sheet transporting mechanism (11) clamps the ceramic ring and transports it to the first placement platform (52); the graphite boat sheet transporting mechanism (11) adsorbs the boat sheet and transports it to the graphite boat sheet transmission device (9), and the operation is cyclically operated until the boat sheet, ceramic ring and electrode blocks on the disassembly platform (53) are cleared, and the graphite boat disassembly is completed.
3. The graphite boat disassembly and assembly method according to claim 1, characterized in that: The inspection camera (93) inspects the boat, the graphite boat transport device (9) transports the qualified boat to the graphite boat buffer area (2), and the graphite boat card point loader (3) inspects the boat and replaces the card point, further comprising: The inspection camera (93) configured on the graphite boat sheet transmission device (9) sequentially inspects the appearance and card points of the boat sheets and transports them to one side of the graphite boat sheet buffer area (2); the gantry transport mechanism (7) transfers qualified boat sheets to the boat sheet temporary buffer mechanism (8); or the gantry transport mechanism (7) places unqualified boat sheets on the boat sheet buffer mechanism (6) to wait for unloading and transports qualified boat sheets pre-placed on the boat sheet buffer mechanism (6) to the boat sheet temporary buffer mechanism (8); The graphite boat card point loading and unloading machine (3) detects and replaces the card points of the boat pieces of the boat piece temporary buffer mechanism (8), and the gantry transport mechanism (7) transfers the boat pieces after the detection and replacement of the card points to the graphite boat piece transmission device (9), and finally the graphite boat piece transmission device (9) transports the boat pieces after the detection and replacement of the card points to the side of the graphite boat disassembly and assembly component (5).
4. The graphite boat disassembly and assembly method according to claim 1, characterized in that: The graphite boat transport mechanism (11) transports the boat and the ceramic ring to the disassembly and assembly platform (53) and sleeves them on the serial rods. The Z-axis disassembly and assembly robot (514) transports the electrode block to the disassembly and assembly platform (53) and sleeves them on the serial rods. After all the boats, ceramic rings and electrode blocks are assembled in sequence, the nut disassembly and assembly machine (5141) installs the nut on the top of the serial rod to complete the graphite boat assembly. The process further includes: The graphite boat sheet conveying mechanism (11) transfers the boat sheets on the graphite boat sheet transmission device (9) to the second placement platform (54) one by one. After all the boat sheets are in place, the graphite boat sheet conveying mechanism (11) absorbs the boat sheets from the second placement platform (54) and sleeves them on the serial rods of the disassembly and assembly platform (53). The ceramic ring clamping mechanism (1146) of the graphite boat sheet conveying mechanism (11) clamps the ceramic ring from the first placement platform (52) and sleeves it into the serial rods. The opening and closing clamping claws (5145) of the Z-axis disassembly and assembly manipulator (514) clamp the electrode block from the electrode block cache column (532) and sleeve it on the ceramic rod. The operation is cyclic until all the boat sheets, electrode blocks and ceramic rings are assembled. Finally, the nut disassembling and assembling machine (5141) grabs the nut on the first placement platform (52) or the nut pre-placed on the good product placement platform and installs it to the top of the series rod to complete the assembly of the graphite boat.
5. The graphite boat disassembly and assembly method according to claim 2 or 4, characterized in that: Before removing the nut on the top of the graphite boat, the method further includes: When the graphite boat is placed on the disassembly and assembly platform (53), the nut positioning column (557) on the fixed platform plate (551) in the lifting and positioning mechanism (55) is sleeved with the nut fixing the bottom of the graphite boat; The fourth lifting drive mechanism (561) of the end positioning mechanism (56) drives the lifting seat (563) to move toward the graphite boat until one end of the supporting positioning column (565) is sleeved with the nuts at both ends of the bottom of the graphite boat.
6. The graphite boat disassembly and assembly method according to claim 1, characterized in that: Before the graphite boat disassembly assembly component (5) and the graphite boat sheet conveying mechanism (11) disassemble the graphite boat into nuts, electrode blocks, boat sheets and ceramic rings, the method further comprises: the graphite boat rotating conveying mechanism (4) grabs the graphite boat placed horizontally on the loading and unloading turnover mechanism (10), conveys it to the top of the disassembly assembly component, flips it 90 degrees, and places it on the disassembly assembly platform (53) of the disassembly assembly component.
7. The graphite boat disassembly and assembly method according to claim 1, characterized in that: After the graphite boat is assembled, the method further comprises: the graphite boat rotating transport mechanism (4) grabs the graphite boat placed in a vertical state on the disassembly and assembly platform (53) of the disassembly and assembly component, transports it to the top of the loading and unloading turnover mechanism (10), flips it 90 degrees, and places it on the loading and unloading turnover mechanism (10).