Grinding disc groove cleaning device

Abstract

The invention relates to the technical field of semiconductors, and provides a grinding disc groove cleaning device which comprises a support assembly, a cleaning part and an extension part. The support assembly is provided with a sliding face, and the sliding face is used for being attached to the surface of a grinding disc and sliding along the surface. The cleaning piece is movably arranged on the support assembly, and the cleaning piece is at least used for being inserted into a groove of a grinding disc to clean the groove when moving; the extension piece is connected with the support assembly. The cleaning coverage range is enlarged through the grinding disc groove cleaning device, the grinding disc with the large diameter can be cleaned easily, on one hand, the labor intensity can be reduced, on the other hand, the stability of a cleaning tool can be kept, the cleaning efficiency can be improved, and the surface of the grinding disc is prevented from being scratched.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a grinding disc groove cleaning device. Background Art

[0002] Substrates (such as silicon wafers) are the raw materials for manufacturing semiconductor devices, and are used to make high-power rectifiers, diodes, switching devices, high-power transistors, etc. Their subsequent products, such as integrated circuits and semiconductor discrete devices, have been widely used in various fields.

[0003] The processing of the substrate requires a series of treatments on the grown crystal rod, mainly including cutting, outer diameter rolling, flat edge or V-groove processing, slicing, grinding, polishing and cleaning.

[0004] Grinding is the process of grinding the upper and lower surfaces of the substrate to remove knife marks or line marks on the surface of the silicon wafer and improve the surface flatness of the silicon wafer.

[0005] Existing grinding methods typically consist of two counter-rotating upper and lower grinding discs, with the silicon wafer placed between them. To allow the polishing fluid to penetrate, grooves are cut into the opposing surfaces of the upper and lower grinding discs, ensuring smooth inflow and outflow of the polishing fluid. However, the polishing fluid itself tends to settle. After a period of use, the grinding fluid, mixed with the abrasive sand and the removed substrate debris, can clog the grooves of the grinding discs. This requires cleaning to clear the grooves.

[0006] The existing cleaning method usually involves manually inserting a file into the groove to clean it. When encountering a blockage in the groove, the file needs to be manually pushed in to clear the blockage, which is labor-intensive. Moreover, the file is short, and the radius of the grinding disc is large (usually more than 2 meters), so manual cleaning cannot reach the center of the grinding disc. When cleaning the center of the grinding disc, to ensure that the operator does not come into contact with the grinding disc surface and damage the grinding disc, an external bracket is required to position the operator above the grinding disc, making the entire cleaning process more cumbersome and inefficient. Moreover, during manual cleaning, the cleaning force is difficult to control, and the file can easily lose control (for example, slip out of the groove) and scratch the grinding disc surface.

[0007] Based on this, a grinding disc groove cleaning device is needed. The grinding disc groove cleaning device can increase the cleaning coverage, which is conducive to cleaning grinding discs with larger diameters. On the one hand, it can reduce labor intensity, and on the other hand, it can maintain the stability of the cleaning tool, improve cleaning efficiency, and prevent scratches on the grinding disc surface. Summary of the Invention

[0008] The present invention provides a grinding disc groove cleaning device, which increases the cleaning coverage of the grinding disc groove cleaning device, which is conducive to cleaning grinding discs with larger diameters. On the one hand, it can reduce labor intensity, and on the other hand, it can maintain the stability of the cleaning tool, improve cleaning efficiency, and prevent scratches on the grinding disc surface.

[0009] The grinding disc groove cleaning device comprises: a bracket assembly, a cleaning piece and an extension piece; the bracket assembly has a sliding surface, the sliding surface is used to fit the surface of the grinding disc and slide along the surface; the cleaning piece is movably arranged on the bracket assembly, and when the cleaning piece moves, the cleaning piece is at least used to be inserted into the groove of the grinding disc to clean the groove; the extension piece is connected to the bracket assembly. The above-mentioned grinding disc groove cleaning device can drive the bracket assembly and the cleaning piece to move on the surface of the grinding disc through the configuration of the extension piece, so as to increase the cleaning range of the grinding disc groove cleaning device, so that the cleaning range covers the center position of the grinding disc, simplifies the cleaning process of the center position of the grinding disc, and improves the cleaning efficiency. In addition, the sliding surface cooperates with the surface of the grinding disc, so that the bracket assembly drives the cleaning piece to move stably along the surface of the grinding disc. In addition, when the cleaning piece is inserted into the groove, the groove itself forms a restraining and guiding effect on the cleaning piece. At this time, the bracket assembly drives the cleaning piece to reciprocate along the direction of the groove to achieve effective cleaning of the groove. On the one hand, this configuration helps to achieve standardization of groove cleaning, improve the stability of the cleaning part's movement during the cleaning process, and improve the phenomenon of the file slipping out of the groove and scratching the grinding disc surface during manual cleaning. On the other hand, it also helps to improve the cleaning effect, improve the cleaning efficiency, and reduce manual labor intensity.

[0010] Optionally, the bracket assembly includes a sliding seat and a bracket, the cleaning piece is arranged on the bracket, the bracket is arranged on the sliding seat, the sliding surface is located on the sliding seat, and the hardness of the material of the sliding seat is less than the hardness of the material of the grinding disc.

[0011] Optionally, the bracket includes a first rotating frame, the first rotating frame is rotatably arranged on the sliding seat, the rotation center axis of the first rotating frame is parallel to the sliding surface, the extension piece is connected to the first rotating frame, and the cleaning piece is arranged on the first rotating frame.

[0012] Optionally, the bracket further includes a position locking member, and the position locking member is used to lock the rotation angle of the first rotating frame relative to the sliding seat.

[0013] Optionally, the position locking member includes a second rotating frame and a sliding member, one end of the second rotating frame is rotatably set on the sliding seat, the other end of the second rotating frame is rotatably set on the sliding member, and the sliding member is linearly moved on the first rotating frame, and the rotation center axes at both ends of the second rotating frame are parallel to each other and parallel to the sliding surface and perpendicular to the linear movement direction of the sliding member.

[0014] Optionally, the grinding disc groove cleaning device further comprises a force-applying member, which is arranged on the bracket assembly and is used to apply a force to the bracket assembly to make the sliding surface fit against the surface of the grinding disc.

[0015] Optionally, when the bracket assembly includes a sliding seat, the force-applying member is arranged on a side of the sliding seat away from the sliding surface, and the force-applying member has an adsorption force to adsorb on the grinding disc.

[0016] Optionally, the cleaning member includes a cleaning disc, the central axis of the cleaning disc is parallel to the sliding surface, and the cleaning disc is arranged on the bracket assembly so as to rotate around its own central axis.

[0017] Optionally, the edge of the cleaning disk is provided with a plurality of notches arranged along its circumference.

[0018] Optionally, the grinding disc groove cleaning device further includes a vibrating member, and the vibrating member is arranged on the cleaning member.

[0019] So configured, during the cleaning process of the grinding disc groove cleaning device, first, the bracket assembly is placed on the surface of the grinding disc, at this time, the sliding surface fits with the surface of the grinding disc, and the posture of the bracket assembly is adjusted so that the cleaning piece is aligned with the groove to be driven, and then the cleaning piece is driven to move close to the groove so that the cleaning piece is inserted into the groove to be cleaned, and the bracket assembly is pushed by the extension piece so that the bracket assembly fits the surface of the grinding disc and slides along the groove to be cleaned to achieve cleaning and dredging of the groove. During the cleaning process, the bracket assembly can be pushed by the extension piece so that the cleaning piece reciprocates along the groove to achieve cleaning of the groove. Moreover, after the cleaning piece is inserted into the groove, since the depth of the groove is generally deeper, the groove itself forms a constraint and guiding effect on the cleaning piece, which also facilitates the cleaning piece to reciprocate along the direction of the groove, thereby improving the cleaning effect.

[0020] The above-mentioned grinding disc groove cleaning device can drive the bracket assembly and the cleaning piece to move on the surface of the grinding disc through the configuration of the extension piece, so as to increase the cleaning range of the grinding disc groove cleaning device, so that the cleaning range covers the center position of the grinding disc, simplifies the cleaning process of the center position of the grinding disc, and improves the cleaning efficiency. In addition, the sliding surface cooperates with the surface of the grinding disc, so that the bracket assembly drives the cleaning piece to move stably along the surface of the grinding disc. In addition, when the cleaning piece is inserted into the groove, the groove itself forms a restraining and guiding effect on the cleaning piece. At this time, the bracket assembly drives the cleaning piece to reciprocate along the direction of the groove to achieve effective cleaning of the groove. On the one hand, this configuration method helps to achieve the standardization of groove cleaning, improve the stability of the movement of the cleaning piece during the cleaning process, and improve the phenomenon that the file slips out of the groove and scratches the surface of the grinding disc during manual cleaning. On the other hand, it also helps to improve the cleaning effect, improve the cleaning efficiency, and reduce the intensity of manual labor.

[0021] The configuration of the first rotating frame facilitates adjustment of the height of the cleaning member to accommodate cleaning of grooves of different depths, thereby increasing its applicability. Furthermore, the configuration of the second rotating frame and the sliding member facilitates locking the position of the first rotating frame, thereby locking the height of the cleaning member and improving cleaning stability.

[0022] The vibrating element can be configured to apply a certain vibration frequency to the cleaning element, allowing it to loosen or break up deposits in the groove, improving cleaning efficiency and effectiveness. Compared to existing manual cleaning methods using files, cleaning time is reduced from approximately 4 hours to approximately 30 minutes, significantly improving cleaning efficiency and reducing downtime caused by cleaning the grinding disc, thereby increasing the effective working time of the grinding equipment and improving the grinding output of the grinding equipment.

[0023] The configuration of the force-applying member allows the sliding seat to be tightly pressed against the surface of the grinding disc, allowing the sliding seat to slide stably along the surface of the grinding disc. By applying a reasonable suction force, on the one hand, the sliding seat can be reliably pressed against the grinding disc surface, and on the other hand, the friction between the sliding seat and the grinding disc is not too large to affect the relative movement between the two. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic structural diagram of a grinding disc groove cleaning device according to an embodiment of the present invention;

[0025] Figure 2 A schematic diagram of a partial structure of a grinding disc groove cleaning device according to an embodiment of the present invention;

[0026] Figure 3 is a schematic diagram of a partial structure of a first rotating frame according to an embodiment of the present invention;

[0027] Figure 4is a schematic structural diagram of a second rotating frame according to an embodiment of the present invention;

[0028] Figure 5 A schematic diagram of the structure of a force applying member according to an embodiment of the present invention Figure 1 ;

[0029] Figure 6 A schematic diagram of the structure of a force applying member according to an embodiment of the present invention Figure 2 .

[0030] Among them, in the accompanying drawings:

[0031] 10-bracket assembly; 101-sliding surface; 11-sliding seat; 12-bracket; 121-first rotating frame; 122-second rotating frame; 123-sliding member; 1231-sliding block; 1232-elastic portion; 124-sliding groove; 125-rotating shaft;

[0032] 20-cleaning piece; 21-cleaning tray;

[0033] 30-Extension piece;

[0034] 40-force applying member;

[0035] 50-vibrating parts;

[0036] 60-grinding disc; 61-groove. DETAILED DESCRIPTION

[0037] The following is a further detailed description of the grinding disc groove cleaning device proposed by the present invention, with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are highly simplified and not to exact scale, and are intended solely to facilitate and clearly illustrate the embodiments of the present invention.

[0038] In the present invention, "outer diameter" and "inner diameter" for circular structures correspond to the diameter size. For non-circular structures, the inner diameter refers to the diameter of its inscribed circle, and the outer diameter refers to the diameter of its circumscribed circle. "Axial direction" for a cylindrical rod body corresponds to the direction of its axis. For a non-cylindrical rod body, the axial direction corresponds to the length direction of the rod body.

[0039] As used in the present invention, the singular forms "a", "an", and "the" include plural referents. The term "or" is generally used to include "and / or", the term "several" is generally used to include "at least one", and the term "at least two" is generally used to include "two or more". In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, features specified as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features. In addition, as used in the present invention, "mounted", "connected", "connected", and one element "disposed" on another element should be understood broadly and generally only indicate that there is a connection, coupling, mating, or transmission relationship between the two elements, and the connection, coupling, mating, or transmission between the two elements can be direct or indirect through an intermediate element. It should not be understood to indicate or imply a spatial positional relationship between the two elements, that is, one element can be in any orientation such as inside, outside, above, below, or to the side of another element, unless the content clearly indicates otherwise. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used with respect to the exemplary embodiments as they are shown in the figures, with the upward or upper direction being toward the top of the corresponding figure and the downward or lower direction being toward the bottom of the corresponding figure.

[0040] Please refer to Figure 1 As shown, this embodiment provides a grinding disc groove cleaning device, including a bracket assembly 10, a cleaning member 20 and an extension member 30;

[0041] The support assembly 10 has a sliding surface 101, and the sliding surface 101 is used to fit on the surface of the grinding disc 60 and slide along the surface;

[0042] The cleaning member 20 is movably arranged on the bracket assembly 10, and the cleaning member 20 is at least used to be inserted into the groove of the grinding disc to clean the groove when it moves. Figure 1 As shown, the upper surface of the grinding disc 60 is distributed with multiple horizontal and vertical staggered grooves 61. Preferably, the cleaning piece 20 is a thin sheet structure, and the thickness of the cleaning piece 20 should be smaller than the groove width of the groove 61 on the grinding disc 60 so that the cleaning piece 20 can be inserted into the groove 61.

[0043] The cleaning member 20 should at least be able to move up and down relative to the upper surface of the grinding disc 60, and the cleaning member 20 should be aligned with the groove 61 to be cleaned. When the cleaning member 20 moves downward, it can be inserted into the groove 61 on the grinding disc 60, and when the cleaning member 20 moves upward, it can extend out of the groove 61. In this embodiment, the movement of the cleaning member 20 is driven by the extension member 30 (the specific structure is described in detail below). In other alternative embodiments, the movement of the cleaning member 20 can be driven by a drive structure such as a motor or a hydraulic structure provided on the bracket assembly 10.

[0044] The extension member 30 is connected to the bracket assembly 10. The length of the extension member 30 can be adjusted based on actual usage requirements. In this embodiment, the extension member 30 is a rod-shaped structure. Preferably, the length of the extension member 30 is greater than the radius of the grinding disc 60. This allows the extension member 30 to be held by the user and the bracket assembly 10 to be pushed to the center of the grinding disc 60, so that the cleaning range of the grinding disc groove cleaning device can cover the center of the grinding disc 60.

[0045] So configure, in the cleaning process of above-mentioned grinding disc groove cleaning device, first support assembly 10 is placed on the surface of grinding disc 60, now sliding surface 101 fits with the surface of grinding disc, adjust the posture of support assembly 10, so that cleaning member 20 is aimed at the groove to be driven, then drive cleaning member 20 to move near groove 61, make cleaning member 20 insert in the groove to be cleaned, promote support assembly 10 by extension piece 30, make support assembly 10 fit on the surface of grinding disc and slide along the groove to be cleaned, to realize the cleaning and dredging of this groove.In the cleaning process, support assembly 10 can be promoted by extension piece 30, make cleaning member 20 reciprocate along groove 61, to realize the cleaning of groove 61.And, after cleaning member 20 inserts groove 61, because the depth of groove 61 is generally deeper, groove 61 itself forms the constraint guiding effect to cleaning member 20, also is convenient for cleaning member 20 to reciprocate along the direction of groove 61, improves cleaning effect.

[0046] The grinding disc groove cleaning device can drive the bracket assembly 10 and the cleaning member 20 to move the grinding disc groove on the surface ( Figure 1The upper surface in the middle) moves to increase the cleaning range of the grinding disc groove cleaning device, so that the cleaning range covers the center position of the grinding disc, simplifies the cleaning process of the center position of the grinding disc, and improves the cleaning efficiency. In addition, by cooperating with the surface of the grinding disc 60 through the sliding surface 101, the bracket assembly 10 drives the cleaning member 20 to move stably along the surface of the grinding disc 60. In addition, after the cleaning member 20 is inserted into the groove 61, the groove 61 itself forms a constraint guiding effect on the cleaning member 20. At this time, the bracket assembly 10 drives the cleaning member 20 to reciprocate along the direction of the groove 61 to achieve effective cleaning of the groove. On the one hand, this configuration method helps to realize the standardization of groove cleaning, improves the stability of the movement of the cleaning member 20 during the cleaning process, and improves the phenomenon that the file slides out of the groove and scratches the surface of the grinding disc during manual cleaning. On the other hand, it also helps to improve the cleaning effect, improve the cleaning efficiency, and reduce the intensity of manual labor.

[0047] Further, combined Figure 1 and Figure 2 As shown, the bracket assembly 10 includes a sliding seat 11 and a bracket 12, the cleaning piece 20 is arranged on the bracket 12, the bracket 12 is arranged on the sliding seat 11, the sliding surface 101 is located on the sliding seat 11, and the hardness of the material of the sliding seat 11 is less than the hardness of the material of the grinding disc.

[0048] like Figure 1 and Figure 2 As shown, in this embodiment, the sliding seat 11 is a rectangular strip structure, and the lower surface of the sliding seat 11 serves as a sliding surface 101, which is a rectangular plane. The sliding surface 101 is configured as a flat structure to better fit the surface of the grinding disc 60. Two sliding seats 11 are provided, and the two sliding seats 11 are arranged in parallel. The bracket 12 is connected between the two sliding seats 11. The area between the two sliding seats 11 is used to avoid the cleaning member 20, so that the cleaning member 20 can directly contact the surface of the grinding disc 60 during the up and down movement.

[0049] In this embodiment, two sliding seats 11 are provided, and the two sliding seats 11 are of a split structure. Each of the two sliding seats 11 has a rectangular sliding surface 101. The two sliding surfaces 101 are in contact with the surface of the grinding disc 60 to ensure a good support and guiding effect, and to make the entire cleaning device more stable when sliding along the surface of the grinding disc 60. In other alternative embodiments, more sliding seats 11 can be provided, for example, three or four. In addition, in other alternative embodiments, the sliding seat 11 can be an integrated structure, for example, the sliding seat 11 is provided as a U-shaped structure or a square frame structure, and the hollow area in the middle of the sliding seat 11 is used to avoid the cleaning member 20, so that the cleaning member 20 can directly contact the surface of the grinding disc 60 during the up and down movement.

[0050] In this embodiment, the sliding surface 101 is configured as a rectangular planar structure. In other alternative embodiments, the sliding surface 101 can be configured as a circular planar structure or other planar structures. In addition, a rounded corner can be provided at the edge of the sliding surface 101 to allow the sliding seat 11 to slide more smoothly along the surface of the grinding disc 60.

[0051] In this embodiment, the sliding seat 11 is made of a material with a low coefficient of friction, high toughness, and a relatively soft, scratch-resistant material. The hardness of the sliding seat 11 should be less than the hardness of the surface of the grinding disc 60. The grinding disc 60 is typically made of cast iron, so the sliding seat 11 can be made of a polymer material such as polyethylene or polypropylene. This choice of material reduces the resistance of the sliding seat 11 as it slides along the surface of the grinding disc 60 while also preventing the sliding seat 11 from damaging the surface of the grinding disc 60. In other alternative embodiments, the material of the main body of the sliding seat 11 is not particularly limited; the lower surface of the main body of the sliding seat 11 can be coated to form the sliding surface 101. In this case, it is sufficient to ensure that the coating material meets the aforementioned requirements.

[0052] Please continue to refer to Figure 1 and Figure 2 As shown, in this embodiment, the bracket 12 includes a first rotating frame 121, and the first rotating frame 121 is an "n"-shaped structure with an opening at the bottom. The two ends below the first rotating frame 121 are respectively rotatably arranged on two sliding seats 11. The rotation center axis of the first rotating frame 121 is parallel to the sliding surface 101, and the cleaning piece 20 is arranged on the crossbeam of the first rotating frame 121. Therefore, when the first rotating frame 121 rotates relative to the sliding seat 11, it can drive the cleaning piece 20 to perform a lifting movement to approach or move away from the surface of the grinding disc 60.

[0053] In other alternative embodiments, the specific shape of the first rotating frame 121 can be adaptively adjusted based on actual needs and the matching mode with the sliding seat 11. For example, the first rotating frame 121 is configured as a straight rod structure.

[0054] In this embodiment, the extension member 30 is fixedly connected to the first turret 121. The extension member 30 is generally Y-shaped, with two branched ends of the extension member 30 fixedly connected to the crossbeam of the first turret 121, and the cleaning member 20 is disposed between the two branched ends. The extension member 30 can push the first turret 121 and the sliding seat 11 to slide along the surface of the grinding disc 60, and the extension member 30 can drive the first turret 121 to rotate (swing up and down), thereby driving the adjustment cleaning member 20 to move up and down to adjust the position of the cleaning member 20.

[0055] In other alternative embodiments, the extension member 30 may be a rod structure, with one end fixedly connected to the first rotating frame 121 and the other end for handholding. Furthermore, the extension member 30 may be provided with a handle for easier handling and application of force. The specific structure of the extension member 30 can be adjusted based on actual usage requirements and its adaptability to the first rotating frame 121, and will not be further described here.

[0056] Please continue to refer to Figure 1 and Figure 2 As shown, in this embodiment, the cleaning member 20 includes a cleaning disc 21, which is a disc-shaped thin-sheet structure and can be made of cast iron. The central axis of the cleaning disc 21 is parallel to the sliding surface 101. The cleaning disc 21 is rotatably arranged on the bracket assembly 10 around its own central axis. Specifically, the cleaning disc 21 is rotatably arranged on the crossbeam of the first rotating frame 121. When the cleaning disc 21 is inserted into the groove 61 of the grinding disc 60 and is pushed to move along the groove 61, the cleaning disc 21 can adaptively roll in the groove 61 to improve the cleaning effect.

[0057] Furthermore, in this embodiment, the edge of the cleaning disk 21 is provided with a plurality of notches arranged along its circumference. The notches may be arc-shaped notches, triangular notches, etc. The arrangement of the notches makes the edge of the cleaning disk 21 have a sawtooth structure. The sawtooth structure cooperates with the rolling motion of the cleaning disk 21 in the groove 61, helping to loosen the accumulated matter in the groove 61, thereby further improving the cleaning effect.

[0058] In other alternative embodiments, the cleaning disc 21 can be fixed (non-rotatable) on the crossbar of the first rotating frame 121. In this case, the serrated edge of the cleaning disc 21 can be used to loosen the accumulated material in the groove 61. When the serrated structure at the bottom of the cleaning disc 21 is worn, the installation angle of the cleaning disc 21 can be adjusted to switch the serrated structure at the bottom.

[0059] In the present embodiment, the cleaning disk 21 is a circular disk structure, which can be adapted to rotate. In other alternative embodiments, the cleaning disk 21 can be configured as a non-circular structure, such as a rectangular sheet or other structures.

[0060] Please continue to refer to Figure 1 and Figure 2 As shown, the bracket 12 further includes a second rotating frame 122 and a sliding member 123 .

[0061] There are two second rotating frames 122 and two sliding seats 11 , which are respectively matched with the two vertical beams of the first rotating frame 121 .

[0062] Taking one of the vertical beams of the rotating frame 121 as an example, one end of the second rotating frame 122 is rotatably set on the sliding seat 11, and the other end of the second rotating frame 122 is rotatably set on the sliding member 123. The sliding member 123 is linearly moved on the vertical beam of the first rotating frame 121. The rotation center axes at both ends of the second rotating frame 122 are parallel to each other and parallel to the sliding surface 101, and perpendicular to the linear motion direction of the sliding member 123.

[0063] The other vertical beam of the rotating frame 121 is also provided with a second rotating frame 122 and a sliding member 123 .

[0064] With the above-described structure, when the first rotating frame 121 rotates relative to the sliding base 11, the sliding member 123 adaptively moves linearly relative to the first rotating frame 121, and both ends of the second rotating frame 122 adaptively rotate. The arrangement of the sliding member 123 and the second rotating frame 122 facilitates locking the rotation angle of the first rotating frame 121.

[0065] like Figure 3 As shown, the first rotating frame 121 is provided with a plurality of sliding grooves 124 of the same specifications and in the shape of isosceles trapezoids. The sliding grooves 124 are arranged along the sliding direction of the sliding member 123 and are connected end to end.

[0066] like Figure 4As shown, the upper end of the second rotating frame 122 is rotatably connected to the sliding member 123 via a rotating shaft 125. The sliding member 123 includes a sliding block 1231 and an elastic portion 1232. The elastic portion 1232 is composed of two springs and connected to the sliding block 1231. The two springs are arranged in a V-shape. The sliding member 123 is entirely located within the sliding groove 124 and can slide along the sliding groove 124. The two springs, due to their elastic deformation, abut against the inclined opposite sides of the trapezoidal sliding groove 124, thereby locking the sliding member 123 in position. At this time, the sliding member 123 can be driven by an external force to move unidirectionally along the wide end of the sliding groove 124 toward the narrow end, and this movement direction is adapted to the downward swing direction of the first rotating frame 121. During the actual cleaning process, the cleaning device is first placed at the edge of the grinding disc 60, and the first rotating frame 121 is swung downward so that the cleaning member 20 is inserted into the groove 61 of the grinding disc 60. The cleaning device is then pushed by the extension member 30 to slide along the surface of the grinding disc 60 and in the direction of the groove 61 to be cleaned, thereby cleaning the groove 61. At this time, since the sliding member 123 can only move in one direction, the upward swinging direction of the first rotating frame 121 is locked, so that the grinding disc 60 is always located in the groove 61. Moreover, due to the elastic deformation performance of the elastic piece itself, when the elastic piece abuts against the wide end of the sliding groove 124, the elastic piece can cause the sliding member 123 to move toward the wide end of the sliding groove 124 within a certain range based on its own deformation. That is, the sliding member 123 has a certain floating range, so that the first rotating frame 121 can swing within a certain range, and thus the cleaning member 20 can elastically float vertically within a certain range to improve the cleaning effect.

[0067] When cleaning is completed, the cleaning device is pulled back to the edge of the grinding disc 60 . At this time, the two springs can be driven closer to each other by external force, so that the sliding member 123 returns to the wide end along the narrow end of the sliding groove 124 .

[0068] The above-mentioned second rotating frame 122 cooperates with the structure of the sliding member 123 to lock the position of the first rotating frame 121. On the one hand, the position of the first rotating frame 121 can be adjusted, and then the height of the cleaning member 20 can be adjusted to adapt to the grooves 61 of different groove depths. On the other hand, the position of the cleaning member 20 can also be locked during the cleaning process to improve the cleaning efficiency.

[0069] In other alternative embodiments, sliding groove 124 can be a dovetail groove or a T-slot with a large inner portion and a small outer portion. Sliding member 123 and sliding groove 124 single degree of freedom conformal sliding cooperation, sliding member 123 can adopt the material with larger sliding friction, for example sliding member 123 adopts rubber, is used to lock the position of the first turret 121 by the sliding damping force of sliding member 123 in sliding groove 124, and then locks the position of cleaning member 20. Of course, also can configure a power drive member, for example configure a motor or hydraulic rod, the power output end of driving member is connected with sliding member 123, is used to lock the position of sliding member 123, and then locks the position of the first turret 121 and cleaning member 20.

[0070] In other alternative embodiments, the slider 123 may be slidably engaged with the sliding seat 11 with a single degree of freedom. One end of the second rotating frame 122 is rotationally engaged with the slider 123, while the other end of the second rotating frame 122 is rotationally engaged with the first rotating frame 121. The central axes of rotation at both ends of the second rotating frame 122 are parallel to each other and to the sliding surface 101. Furthermore, the central axes of rotation at both ends of the second rotating frame 122 are perpendicular to the linear motion direction of the slider 123. In this case, when the first rotating frame 121 rotates relative to the sliding seat 11, the second rotating frame 122 rotates adaptively, and the slider 123 moves linearly relative to the sliding seat 11. By locking the position of the slider 123, the angle of the first rotating frame 121 can be locked. For example, locking the linear position of the slider 123 can be achieved by increasing the sliding friction of the slider 123 or by configuring a motor or hydraulic structure. This will not be further described here.

[0071] In this embodiment, two second rotating frames 122 and two sliding seats 11 are each configured based on the structure of the first rotating frame 121. In other alternative embodiments, the number of second rotating frames 122 and two sliding seats 11 can be adjusted based on the structural adaptability of the first rotating frame 121. For example, when the first rotating frame 121 is a straight rod structure, only one second rotating frame 122 and one sliding seat 11 can be configured.

[0072] Combine Figure 1 and Figure 2 As shown, in this embodiment, the grinding disc groove cleaning device further includes a vibrating member 50 , which is disposed on the cleaning member 20 . The vibrating member 50 is a vibration motor or other known vibration structures.

[0073] The vibrating member 50 is arranged on one side of the axial direction of the cleaning member 20. The vibrating member 50 can apply a certain vibration frequency to the cleaning member 20 to loosen or break the deposits in the groove 61 of the grinding disc 60 to improve the cleaning efficiency and cleaning effect.

[0074] Combine Figure 1 and Figure 2As shown, the grinding disc groove cleaning device further includes a force-applying member 40 , which is disposed on the bracket assembly 10 . The force-applying member 40 is used to apply a force to the bracket assembly 10 to make the sliding surface 101 fit against the surface of the grinding disc.

[0075] In this embodiment, the force-applying member 40 is arranged on the side of the sliding seat 11 away from the sliding surface 101, and the force-applying member 40 has an adsorption force to adsorb on the grinding disk 60, that is, the force-applying member 40 adsorbs the grinding disk 60 through the sliding seat 11, thereby making the sliding seat 11 tightly pressed against the surface of the grinding disk 60, so that the sliding seat 11 can stably slide along the surface of the grinding disk 60.

[0076] Combine Figure 5 and Figure 6 As shown, in this embodiment, the force member 40 is a magnetic structure, and the sliding seat 11 is configured to be a non-magnetic material. The force member 40 is rotatably disposed on the sliding seat 11. When the force member 40 rotates, its north and south poles change, thereby causing the magnetic lines of force to change and the adaptive change of the adsorption force perpendicular to the sliding surface 101. Under normal circumstances, the force member 40 can be rotated to reduce its suction force perpendicular to the sliding surface 101, at which time the cleaning device can be moved normally; during the cleaning process, the cleaning device is placed on the surface of the grinding disc 60, and the force member 40 is rotated to increase its suction force perpendicular to the sliding surface 101. At this time, the force member 40 generates a suction force adsorbed on the grinding disc 60, thereby causing the sliding seat 11 to be tightly pressed against the surface of the grinding disc 60. The reasonable adsorption force of the force member 40 should be set to ensure that the sliding seat 11 is reliably pressed against the surface of the grinding disc 60 on the one hand, and on the other hand, to ensure that the friction between the sliding seat 11 and the grinding disc 60 is not too large and affects the relative sliding between the two.

[0077] In other alternative embodiments, the force-applying member 40 may be a counterweight, and a suitable counterweight is provided so that the force-applying member 40 presses against the sliding seat 11 by its own weight, thereby causing the sliding seat 11 to be tightly pressed against the surface of the grinding disc 60, so that the sliding seat 11 can stably slide along the surface of the grinding disc 60. In other alternative embodiments, the force-applying member 40 may also be configured as an electromagnet or other force-applying structure, which will not be described in detail here.

[0078] The above-mentioned grinding disc groove cleaning device, through the configuration of the extension piece 30, can drive the bracket assembly 10 and the cleaning piece 20 to move on the surface of the grinding disc, so as to increase the cleaning range of the grinding disc groove cleaning device, so that the cleaning range covers the center position of the grinding disc, simplifies the cleaning process of the center position of the grinding disc, and improves the cleaning efficiency.

[0079] By engaging the sliding surface 101 with the surface of the grinding disc 60, the bracket assembly 10 drives the cleaning member 20 to move stably along the surface of the grinding disc 60. Furthermore, when the cleaning member 20 is inserted into the groove 61, the groove 61 itself forms a restraining and guiding effect on the cleaning member 20. At this time, the bracket assembly 10 drives the cleaning member 20 to reciprocate along the direction of the groove 61, thereby effectively cleaning the groove. This configuration not only helps to standardize groove cleaning, improves the stability of the movement of the cleaning member 20 during the cleaning process, and reduces the problem of files slipping out of the groove and scratching the grinding disc surface during manual cleaning, but also helps to improve the cleaning effect and efficiency, and reduce manual labor intensity.

[0080] The configuration of the first rotating frame 121 facilitates adjustment of the height of the cleaning member 20 to accommodate cleaning of grooves 61 of varying depths, thereby increasing its applicability. Furthermore, the configuration of the second rotating frame 122 and the sliding member 123 facilitates locking the position of the first rotating frame 121, thereby locking the height of the cleaning member 20 and improving cleaning stability.

[0081] By configuring the vibrating member 50, a certain vibration frequency can be applied to the cleaning member 20, so that the cleaning member 20 can loosen or break up the accumulated materials in the groove 61, thereby improving the cleaning efficiency and cleaning effect. Compared with the existing manual cleaning method using a file, the cleaning time is reduced from approximately 4 hours to approximately 30 minutes, which significantly improves the cleaning efficiency and reduces the downtime caused by cleaning the grinding disc 60, thereby increasing the effective working time of the grinding equipment and improving the grinding output of the grinding equipment.

[0082] The configuration of the force applying member 40 allows the sliding seat 11 to be tightly pressed against the surface of the grinding disc 60, so that the sliding seat 11 can slide stably along the surface of the grinding disc 60. By applying a reasonable adsorption force, the sliding seat 11 can be reliably pressed against the surface of the grinding disc 60, while also ensuring that the friction between the sliding seat 11 and the grinding disc 60 is not too great to affect the relative movement between the two.

[0083] In this embodiment, the use of the cleaning device is illustrated by taking the cleaning of the grooves of the grinding disc as an example. In other alternative embodiments, the cleaning device can also clean the surfaces of other components having grooves.

[0084] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0085] The above description is only a description of the preferred embodiments of the present invention and is not intended to limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A grinding disc groove cleaning device, characterized in that: include: bracket assemblies, cleanouts, and extensions; The support assembly has a sliding surface, and the sliding surface is used to fit on the surface of the grinding disc and slide along the surface; The cleaning member is movably arranged on the bracket assembly, and when the cleaning member moves, it is at least used to be inserted into the groove of the grinding disc to clean the groove; The extension piece is connected to the bracket assembly.

2. The grinding disc groove cleaning device according to claim 1, characterized in that: The bracket assembly includes a sliding seat and a bracket, the cleaning piece is arranged on the bracket, the bracket is arranged on the sliding seat, the sliding surface is located on the sliding seat, and the hardness of the material of the sliding seat is less than the hardness of the material of the grinding disc.

3. The grinding disc groove cleaning device according to claim 2, characterized in that: The bracket includes a first rotating frame, which is rotatably arranged on the sliding seat, and a rotation center axis of the first rotating frame is parallel to the sliding surface. The extension member is connected to the first rotating frame, and the cleaning member is arranged on the first rotating frame.

4. The grinding disc groove cleaning device according to claim 3, characterized in that: The bracket further includes a position locking member, which is used to lock the rotation angle of the first rotating frame relative to the sliding seat.

5. The grinding disc groove cleaning device according to claim 4, characterized in that: The position locking member includes a second rotating frame and a sliding member, one end of the second rotating frame is rotatably set on the sliding seat, the other end of the second rotating frame is rotatably set on the sliding member, and the sliding member is linearly moved on the first rotating frame, and the rotation center axes at both ends of the second rotating frame are parallel to each other and parallel to the sliding surface and perpendicular to the linear motion direction of the sliding member.

6. The grinding disc groove cleaning device according to any one of claims 1 to 5, characterized in that: The grinding disc groove cleaning device further includes a force-applying member, which is disposed on the bracket assembly and is used to apply a force to the bracket assembly to make the sliding surface fit against the surface of the grinding disc.

7. The grinding disc groove cleaning device according to claim 6, characterized in that: When the bracket assembly includes a sliding seat, the force applying member is arranged on a side of the sliding seat away from the sliding surface, and the force applying member has an adsorption force to adsorb on the grinding disc.

8. The grinding disc groove cleaning device according to claim 1, wherein: The cleaning piece includes a cleaning disc, the central axis of the cleaning disc is parallel to the sliding surface, and the cleaning disc is arranged on the bracket assembly so as to rotate around its own central axis.

9. The grinding disc groove cleaning device according to claim 8, characterized in that: The edge of the cleaning disk is provided with a plurality of notches arranged along its circumference.

10. The grinding disc groove cleaning device according to claim 1, wherein: The grinding disc groove cleaning device further includes a vibrating member, which is arranged on the cleaning member.

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