Coating device

Abstract

The invention relates to a coating device which comprises a first mounting seat, a coating mechanism and a ventilation mechanism, the coating mechanism comprises a cathode target, the cathode target is arranged on the first mounting seat and is provided with a sputtering surface, and the sputtering surface is used for being arranged towards a to-be-coated part; and the ventilation mechanism is arranged on the first mounting seat, extends towards the coating mechanism and is used for conveying working gas to the to-be-coated part. Compared with the prior art, the coating device has the advantages that the cathode target and the ventilation mechanism are simultaneously arranged on the first mounting seat, and the ventilation mechanism extends towards the coating mechanism, so that the ventilation mechanism conveys the working gas to the to-be-coated part, the working gas at the to-be-coated part is ensured to be uniformly distributed, and the coating effect is further improved.

Description

Technical Field

[0001] The present application relates to the technical field of magnetron sputtering, and in particular to a film coating device. Background Art

[0002] Magnetron sputtering is a type of physical vapor deposition that can be used to prepare materials such as metals, semiconductors, and insulators. The working principle of magnetron sputtering is based on the synergistic effect of electric and magnetic fields. In a vacuum environment, argon gas is introduced and ionized to form argon ions (Ar + ); The cathode target in the magnetron sputtering device receives a negative voltage from an external power supply, making the target surface negatively charged, which attracts argon ions and accelerates them toward the cathode target. When these high-energy argon ions hit the target surface, they knock out the atoms or molecules of the target material, forming sputtered particles. These sputtered particles are deposited on the surface of the workpiece to be plated with the air flow, forming a thin film.

[0003] When the inner wall of a tubular object needs to be coated, the coating device needs to be extended into the interior of the tubular object, and argon gas needs to be introduced into the interior of the tubular object through an external ventilation device. However, this method makes it difficult for argon gas to enter the middle part of the tubular object, which in turn causes uneven distribution of argon gas inside the tubular object, affecting the coating effect. Summary of the Invention

[0004] Based on this, it is necessary to provide a coating device to address the problem of uneven distribution of argon gas inside tubular objects in traditional technologies, which affects the coating effect.

[0005] The technical solution is as follows:

[0006] One embodiment provides a film coating device, comprising:

[0007] a first mounting seat;

[0008] A film coating mechanism, the film coating mechanism comprising a cathode target, the cathode target being disposed on the first mounting seat and having a sputtering surface, the sputtering surface being arranged toward a portion to be plated;

[0009] A ventilation mechanism is provided on the first mounting seat and extends toward the coating mechanism, and is used for delivering working gas to the part to be coated.

[0010] In the above-mentioned coating device, when it is necessary to coat the area to be coated, the sputtering surface of the cathode target on the first mounting seat faces the area to be coated, and the ventilation mechanism on the first mounting seat extends toward the coating mechanism, so that the ventilation mechanism can transport working gas to the coating mechanism, thereby achieving coating of the area to be coated; compared with traditional technology, the above-mentioned coating device is provided with a cathode target and a ventilation mechanism on the first mounting seat at the same time, and the ventilation mechanism is provided to extend toward the coating mechanism, so that the ventilation mechanism can transport working gas to the area to be coated, ensuring that the working gas in the area to be coated is evenly distributed, thereby improving the coating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0012] Figure 1 Schematic diagram of a coating device coating an object in accordance with an embodiment of the present application.

[0013] Figure 2 Schematic diagram of the structure of a coating device in one embodiment of the present application.

[0014] Figure 3 for Figure 2 A partial enlarged view of point A in the middle.

[0015] Figure 4 for Figure 2 A partial enlarged view of point B in the middle.

[0016] Figure 5 for Figure 2 A partial enlarged view of point C in the middle.

[0017] Figure 6 This is a structural diagram of the first mounting base in one embodiment of the present application.

[0018] Figure 7 This is a structural schematic diagram of the first mounting base from another angle in one embodiment of the present application.

[0019] Figure 8 FIG. 1 is a top view of a coating device in one embodiment of the present application.

[0020] Figure 9 for Figure 8 A cross-sectional view of a portion of the middle DD surface.

[0021] Figure 10 for Figure 8 A cross-sectional view of another portion of the middle DD surface.

[0022] Figure 11 for Figure 8 Cross-sectional view of the EE plane.

[0023] Figure 12 Schematic diagram of the structure of the second mounting base in one embodiment of the present application.

[0024] Figure 13 Schematic diagram of the structure of the ventilation mechanism in one embodiment of the present application.

[0025] Figure 14 2 is a cross-sectional view of the second mounting base in one embodiment of the present application. DETAILED DESCRIPTION

[0026] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0027] In the description of this application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0028] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of this application, if the term "plurality" appears, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0029] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connected," "fixed," etc., should be interpreted broadly. For example, these terms may refer to fixed connections, removable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediary; and internal communication between two components or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0030] In this application, unless otherwise expressly specified or limited, if a first feature is described as being "above" or "below" a second feature, or similar descriptions, this may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is described as being "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is described as being "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0031] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only embodiment.

[0032] See also Figures 1 to 4 、 Figure 13 as well as Figure 14 An embodiment of the present application provides a coating device, including a first mounting seat 130, a coating mechanism 200 and a ventilation mechanism 300. The coating mechanism 200 includes a cathode target 210, which is arranged on the first mounting seat 130 and has a sputtering surface 211. The sputtering surface 211 is used to be set toward the part to be plated; the ventilation mechanism 300 is arranged on the first mounting seat 130 and extends toward the coating mechanism 200. The ventilation mechanism 300 is used to transport working gas to the part to be plated.

[0033] In the above-mentioned coating device, when it is necessary to coat the area to be coated, the sputtering surface 211 of the cathode target 210 on the first mounting seat 130 is facing the area to be coated, and the ventilation mechanism 300 on the first mounting seat 130 extends toward the coating mechanism 200, so that the ventilation mechanism 300 can transport working gas to the coating mechanism 200, thereby achieving coating of the area to be coated; compared with traditional technology, the above-mentioned coating device is equipped with a cathode target 210 and a ventilation mechanism 300 on the first mounting seat 130 at the same time, and the ventilation mechanism 300 is extended toward the coating mechanism 200, so that the ventilation mechanism 300 can transport working gas to the area to be coated, thereby ensuring that the working gas in the area to be coated is evenly distributed, thereby improving the coating effect.

[0034] Furthermore, the working gas may be a gas with good gaseous stability such as argon, which will not be described in detail here.

[0035] See also Figures 8 and 9 In one embodiment, the coating device further includes a driving mechanism 100, the driving mechanism 100 includes a rotating module 110, the rotating module 110 is rotatably disposed on the first mounting seat 130, and the cathode target 210 is disposed on the rotating module 110 and extends in a direction away from the driving mechanism 100.

[0036] When in use, the cathode target 210 is first extended into the interior of the workpiece to be plated, and the rotating module 110 rotates relative to the first mounting seat 130, thereby driving the cathode target 210 to rotate inside the workpiece to be plated, thereby changing the orientation of the sputtering surface 211 of the cathode target 210 to uniformly coat the inner wall of the workpiece to be plated. With this arrangement, there is no need to set up external equipment to drive the workpiece to be plated to rotate relative to the coating device, and the coating effect is uniform, thereby reducing the coating cost.

[0037] Furthermore, the cathode target 210 is a planar cathode target, one side of which is a sputtering surface 211, and the sputtering surface 211 is used to sputter the inner wall of the workpiece to be plated. Compared with the traditional columnar cathode target, the planar cathode target is not prone to expansion, bending or stress concentration due to local overheating, so the planar cathode target has more reliable overall strength, ensuring the stability of the coating device.

[0038] For explanation, see Figure 14 The cathode target 210 is roughly in the shape of a long flat plate, and the sputtering surface 211 is a plane. The rotating module 110 can drive the flat cathode target 210 to rotate, and then adjust the direction of the sputtering surface 211 to uniformly coat the inner wall of the workpiece to be plated.

[0039] For example, in one embodiment, the workpiece to be plated is a tubular component, and the long, flat cathode target 210 can be inserted into the interior of the tubular component. The rotating module 110 drives the cathode target 210 to rotate and adjusts the orientation of the sputtering surface 211, thereby uniformly coating the inner wall of the tubular component.

[0040] exist Figure 14 In the embodiment shown, the tubular component is about 10 meters long and has an inner diameter of about 200 mm. The long, flat cathode target 210 can extend into the tubular component to uniformly coat the inner wall of the tubular component.

[0041] Furthermore, the ventilation mechanism 300 in this embodiment can enter the interior of the tubular component together with the cathode target 210 , thereby ensuring the uniformity of the working gas distribution inside the tubular component and improving the uniformity of the coating.

[0042] See also Figure 3 、 Figure 4 、 Figure 13 and Figure 14 In one embodiment, the ventilation mechanism 300 includes at least two air distribution pipes 310, and the at least two air distribution pipes 310 are arranged at intervals on the coating mechanism 200. The first mounting seat 130 is provided with at least two air inlet portions 131, and all the air inlet portions 131 are arranged in a one-to-one correspondence with the air distribution pipes 310. One end of the air distribution pipe 310 is connected to the air inlet portion 131, and the air distribution pipe 310 is provided with an air distribution hole unit.

[0043] At least two air distribution pipes 310 are arranged at intervals on the coating mechanism 200 and are connected to the air inlet 131 on the first mounting seat 130 one by one. In this way, the working gas can enter the air distribution pipe 310 through the air inlet 131 on the first mounting seat 130, and then transport the working gas to the part to be coated through the air distribution hole unit on the air distribution pipe 310 to achieve coating of the part to be coated. At least two air distribution pipes 310 can further improve the uniformity of air distribution during coating, thereby ensuring the uniformity and coating effect of the coating on the part to be coated.

[0044] See also Figure 13 In one embodiment, the distance between one end of at least one air distribution pipe 310 away from the air inlet portion 131 and the first mounting seat 130 is greater than the distance between one end of at least another air distribution pipe 310 away from the air inlet portion 131 and the first mounting seat 130 .

[0045] The length of at least one gas distribution pipe 310 is greater than the length of at least another gas distribution pipe 310. In this way, when the inner wall of the tubular component is coated, gas distribution pipes 310 of different lengths can extend into different parts of the interior of the tubular component, so that the working gas can be output from different parts of the tubular component, thereby improving the distribution uniformity of the working gas in different parts of the tubular component, and then coating the inner walls of the tubular component at different depths, ensuring the uniformity of the coating inside the tubular component.

[0046] Further, see Figure 13 There are multiple gas distribution pipes 310 with different lengths. In this way, the working gas can be transported to different positions inside the tubular component to ensure the uniformity of the coating inside the tubular component.

[0047] See also Figure 13 In one embodiment, the air distribution hole unit includes a first air distribution hole 311 , and the first air distribution hole 311 is provided at an end of the air distribution pipe 310 away from the air inlet portion 131 .

[0048] The first gas distribution holes 311 provided at one end of the gas distribution pipe 310 away from the gas inlet portion 131 can guide the working gas to the end of the gas distribution pipe 310 to ensure the gas distribution effect on the area to be plated.

[0049] See also Figure 13 In one embodiment, the air distribution hole unit includes a second air distribution hole 312 , and the second air distribution hole 312 is provided on the side wall of the air distribution pipe 310 .

[0050] The second air distribution holes 312 are disposed on the side wall of the air distribution pipe 310 to achieve a more uniform air distribution effect.

[0051] Furthermore, at least two second air distribution holes 312 are provided and are spaced apart on the side wall of the air distribution pipe 310 along the axial direction of the air distribution pipe 310 .

[0052] See also Figure 4 、 Figure 13 as well as Figure 14 In one embodiment, the coating mechanism 200 further includes a second mounting seat 400 , the cathode target 210 is disposed on the second mounting seat 400 , the second mounting seat 400 is provided with at least two mounting portions 410 , and all the gas distribution pipes 310 are disposed one-to-one in the mounting portions 410 .

[0053] The at least two mounting portions 410 can mount the at least two air distribution pipes 310 on the second mounting seat 400 in a one-to-one correspondence, thereby improving the mounting strength of the air distribution pipes 310 and further improving the overall structural stability of the coating device.

[0054] See also Figure 13 and Figure 14In one embodiment, the mounting portion 410 is provided with a snap-fit groove, and the outer wall of the air distribution pipe 310 is snap-fitted into the snap-fit groove.

[0055] The snap-fit groove of the mounting portion 410 can snap-fit with the side wall of the air distribution pipe 310 , thereby fixing the air distribution pipe 310 and improving the installation strength of the air distribution pipe 310 . The implementation cost is low and the fixing effect is reliable.

[0056] Further, see Figure 13 and Figure 14 At least two clamping grooves extend along the length direction of the second mounting seat 400 and are parallel to each other and spaced apart to clamp and fix at least two air distribution pipes 310.

[0057] See also Figure 3 、 Figure 6 and Figure 9 In one embodiment, the driving mechanism 100 further includes a driving member 120, which is disposed on the first mounting seat 130 and is used to drive the rotation module 110 to rotate. The second mounting seat 400 is disposed on the rotation module 110, and the side of the cathode target 210 facing away from the sputtering surface 211 is connected to the second mounting seat 400.

[0058] The driving member 120 can provide power for the rotation of the rotating module 110 to drive the second mounting seat 400 to rotate, and further drive the cathode target 210 to rotate, so as to uniformly coat the inner wall of the workpiece.

[0059] Furthermore, a surface of the cathode target 210 facing away from the sputtering surface 211 is a mounting surface, and the mounting surface is connected to the second mounting seat 400 to ensure the connection reliability between the cathode target 210 and the second mounting seat 400 .

[0060] Optionally, the driving member 120 may be a component such as an electric motor, a hydraulic motor or a pneumatic motor that can drive the rotating module 110 to rotate, which is not specifically limited here.

[0061] See also Figure 5 In one embodiment, the coating mechanism 200 further includes at least two anti-collision limit blocks 220, which are spaced apart on the second mounting seat 400 along the length direction of the second mounting seat 400 to prevent the second mounting seat 400 from scratching the film layer of the component 10 to be plated.

[0062] See also Figure 14 In one embodiment, the coating mechanism 200 further includes a ceramic shield 230 . The ceramic shield 230 is disposed on a side of the second mounting base 400 away from the cathode target 210 to prevent glow discharge.

[0063] Furthermore, at least a portion of the air distribution duct 310 is disposed between the ceramic protective plate 230 and the second mounting seat 400 to provide a certain degree of protection for the air distribution duct 310 .

[0064] Furthermore, at least two ceramic guard plates 230 are provided and are sequentially arranged along the length direction of the second mounting seat 400 .

[0065] See also Figure 9 and Figure 10 In one embodiment, the coating device further includes a first power supply 510 and a second power supply 520. The first power supply 510 is disposed on the first mounting seat 130 and is used to supply power to one end of the cathode target 210. The second power supply 520 is disposed on the second mounting seat 400 and is used to supply power to the other end of the cathode target 210. Since the length of the cathode target 210 in this embodiment is relatively long, in order to ensure the coating effect of the cathode target 210, it is necessary to set the first power supply 510 and the second power supply 520 to supply power to the opposite ends of the cathode target 210 respectively to ensure that the cathode target 210 is charged.

[0066] Further, see Figure 10 The coating device also includes a third mounting seat 600, and the end of the second mounting seat 400 away from the first mounting seat 130 is rotatably arranged on the third mounting seat 600, and the second power supply 520 is arranged on the third mounting seat 600 and electrically connected to the second mounting seat 400, thereby realizing electrical connection with the cathode target 210.

[0067] Furthermore, the first power supply member 510 includes a first brush, and the second power supply member 520 includes a second brush. In this way, the cathode target 210 can be reliably powered while the second mounting base 400 rotates, which will not be described in detail here.

[0068] See also Figure 9 In one embodiment, the coating device also includes a rotating rod 111, and the first mounting seat 130 is provided with a first mounting cavity 132 and a first mounting port 133 that are connected to each other. One end of the rotating rod 111 is rotatably arranged in the first mounting cavity 132, and the other end of the rotating rod 111 is connected to the second mounting seat 400 through the first mounting port 133. The rotating rod 111 is provided with at least two air intake channels 1111, and all the air intake channels 1111 are arranged in a one-to-one correspondence with the air intake part 131. One end of the air intake channel 1111 is connected to the air intake part 131, and the other end of the air intake channel 1111 is connected to the air distribution pipe 310.

[0069] One end of the air inlet channel 1111 of the rotating rod 111 is connected to the air inlet part 131, and the other end of the air inlet channel 1111 is connected to the air distribution pipe 310. In this way, when the rotating rod 111 rotates, the air distribution pipe 310 also rotates together, thereby making the working gas at the part to be plated more uniform and improving the coating effect; in addition, the air distribution pipe 310 and the second mounting seat 400 rotate together, thereby driving the cathode target 210 to rotate together, and then changing the orientation of the sputtering surface 211 of the cathode target 210, thereby adjusting the coating direction. The adjustment process is convenient and the implementation cost is low.

[0070] Furthermore, the air intake portion 131 includes an air intake connector, which is disposed outside the first mounting seat 130 and is in one-to-one communication with the air intake channel 1111 .

[0071] See also Figure 9 In one embodiment, the driving mechanism 100 further includes a first transmission wheel 141 and a second transmission wheel 142. One end of the rotating rod 111 is rotatably disposed on the first mounting seat 130, and the other end of the rotating rod 111 is connected to the second mounting seat 400. The first transmission wheel 141 is disposed on the output portion of the driving member 120, and the second transmission wheel 142 is sleeved on the outer wall of the rotating rod 111 and cooperates with the first transmission wheel 141 for transmission.

[0072] The driving member 120 can drive the first transmission wheel 141 to rotate, and then drive the second transmission wheel 142 that cooperates with the first transmission wheel 141 to rotate. Since the second transmission wheel 142 is sleeved on the outer wall of the rotating rod 111, the rotating rod 111 can rotate synchronously with the second transmission wheel 142, thereby driving the second mounting seat 400 to rotate, so that the cathode target 210 can rotate and evenly coat the inner wall of the workpiece to be plated.

[0073] Optionally, the transmission between the first transmission wheel 141 and the second transmission wheel 142 can be performed by a transmission belt or by gear meshing, which will not be described in detail here.

[0074] Furthermore, the outer peripheral wall of the first transmission wheel 141 is provided with first meshing teeth, and the outer peripheral wall of the second transmission wheel 142 is provided with second meshing teeth, and the first meshing teeth mesh with the second meshing teeth.

[0075] See also Figure 9 In one embodiment, the rotating module 110 further includes a first bearing 112 , the outer annular surface of the first bearing 112 is disposed on the side wall of the first mounting cavity 132 , and the inner annular surface of the first bearing 112 is sleeved on the outer wall of the rotating rod 111 .

[0076] The setting of the first bearing 112 can provide a certain support effect for the rotation of the rotating rod 111, and can also reduce the friction and energy consumption generated by the rotation of the rotating rod 111, thereby improving the transmission efficiency; setting one end of the rotating rod 111 in the first mounting cavity 132 can provide a certain protection for the rotating rod 111 and the first bearing 112, prevent collisions, and improve rotation reliability.

[0077] Further, see Figure 9 At least two first bearings 112 are provided and are spaced apart along the depth direction of the first mounting cavity 132 , thereby providing a more stable support effect for the rotation of the rotating rod 111 .

[0078] See also Figure 9 and Figure 11 In one embodiment, at least two annular grooves 1321 are provided on the cavity wall of the first mounting cavity 132, and all the annular grooves 1321 are connected to the air inlet portion 131 in a one-to-one correspondence. The notches of the annular grooves 1321 are set toward the side wall of the rotating rod 111, and the annular grooves 1321 and the side wall of the rotating rod 111 are surrounded to form an annular cavity, and all the annular cavities are connected to the air inlet channel 1111 in a one-to-one correspondence.

[0079] The notches of at least two annular grooves 1321 are arranged toward the side wall of the rotating rod 111 to form at least two annular cavities together with the side wall of the rotating rod 111. The annular grooves 1321 are connected one-to-one with the air inlet portion 131. In this way, the air inlet portion 131 can introduce the working gas into the annular cavity. Since each annular cavity is connected one-to-one with the air inlet channel 1111 on the rotating rod 111, the working gas in the annular cavity can enter the air inlet channel 1111 of the rotating rod 111, and then input the working gas into the gas distribution pipe 310; since the annular cavity is arranged around the outer peripheral wall of the rotating rod 111, even if the rotating rod 111 rotates, the air inlet channel 1111 on the rotating rod 111 can be connected with the annular cavity at any time to ensure the working gas input effect of the rotating rod 111 during the rotation process.

[0080] Further, see Figure 11 , two adjacent annular grooves 1321 are separated by an annular oil seal.

[0081] See also Figure 12 and Figure 14In one embodiment, the coating device further includes an infusion mechanism, the second mounting seat 400 is provided with a cathode liquid cooling inlet 420, a cathode liquid cooling outlet 430 and a cathode liquid cooling chamber 440, the cathode liquid cooling inlet 420 and the cathode liquid cooling outlet 430 are both connected to the cathode liquid cooling chamber 440, the cathode target 210 is arranged with the side facing away from the sputtering surface 211 facing the cathode liquid cooling chamber 440, the rotating rod 111 is provided with a second mounting chamber 113, at least part of the infusion mechanism is provided in the second mounting chamber 113, and the cathode liquid cooling inlet 420 and the cathode liquid cooling outlet 430 are both connected to the infusion mechanism.

[0082] The infusion mechanism can deliver cooling liquid to the cathode liquid cooling inlet 420, and the cooling liquid enters the cathode liquid cooling cavity 440 through the cathode liquid cooling inlet 420 to cool the cathode target 210. The cooling liquid after cooling the cathode target 210 flows back to the infusion mechanism through the cathode liquid cooling outlet 430 to ensure that the cathode target 210 is in the best working state; at least part of the infusion mechanism is arranged in the second mounting cavity 113 of the rotating rod 111, so that the rotating rod 111 can drive the second mounting seat 400 to rotate while also delivering and recovering cooling liquid to the cathode liquid cooling cavity 440 of the second mounting seat 400, thereby providing a good cooling effect for the cathode target 210 during rotational coating.

[0083] Optionally, the coolant may be a liquid with good fluidity such as water or oil, which will not be described in detail here.

[0084] Furthermore, the shape of the cathode liquid cooling chamber 440 roughly matches the shape of the cathode target 210 , so that the cooling liquid can fully remove the heat generated by the cathode target 210 , ensuring that the cathode target 210 is in an optimal working state.

[0085] Furthermore, the cathode liquid cooling chamber 440 extends along the length direction of the second mounting seat 400 to the end of the second mounting seat 400 away from the first mounting seat 130. Correspondingly, the cathode target 210 also extends along the length direction of the second mounting seat 400 to the end of the second mounting seat 400 away from the first mounting seat 130, so that the shape of the cathode liquid cooling chamber 440 matches the shape of the cathode target 210, thereby ensuring the heat dissipation effect of the cathode target 210.

[0086] In one embodiment, a magnetic component is provided in the cathode liquid cooling chamber 440 to ensure that the sputtering surface 211 has a certain magnetic field strength, thereby achieving film coating on the area to be plated.

[0087] See also Figure 12 and Figure 14In one embodiment, the second mounting base 400 is further provided with a return water channel 450 connected to the cathode liquid cooling chamber 440, and the return water channel 450 is connected to the cathode liquid cooling outlet 430. In this way, when the coolant in the cathode liquid cooling chamber 440 completes the heat exchange with the cathode target 210, it can flow back to the infusion mechanism through the return water channel 450.

[0088] See also Figure 9 In one embodiment, the infusion mechanism includes a first infusion tube 710 and a second infusion tube 720, at least a portion of the first infusion tube 710 and at least a portion of the second infusion tube 720 are both arranged in the second mounting cavity 113, the first mounting seat 130 is provided with a liquid inlet 134 and a liquid return port 135, one end of the first infusion tube 710 is connected to the liquid inlet 134, the other end of the first infusion tube 710 is connected to the cathode liquid cooling inlet 420, one end of the second infusion tube 720 is connected to the liquid return port 135, and the other end of the second infusion tube 720 is connected to the cathode liquid cooling outlet 430.

[0089] The coolant enters the first liquid infusion pipe 710 through the liquid inlet 134 of the first mounting seat 130, and is transported to the cathode liquid cooling inlet 420 through the first liquid infusion pipe 710, thereby entering the cathode liquid cooling chamber 440. The coolant in the cathode liquid cooling chamber 440 enters the second liquid infusion pipe 720 through the cathode liquid cooling outlet 430, and is transported to the liquid return port 135 through the second liquid infusion pipe 720, thereby taking away the heat of the cathode target 210 on the second mounting seat 400. When using the coating device, the first mounting seat 130 is fixed, and the liquid inlet 134 and the liquid return port 135 on the first mounting seat 130 are connected to an external coolant generation device. Since the first mounting seat 130 does not rotate with the rotating rod 111, the positions of the liquid inlet 134 and the liquid return port 135 remain unchanged, so that the liquid inlet 134 and the liquid return port 135 can be connected to the external coolant generation device.

[0090] Optionally, the first infusion tube 710 and the second infusion tube 720 can be separately and spaced apart in the second installation cavity 113, or can be separately and spaced apart in the second installation cavity 113. Figure 9 The nested settings shown are not specifically limited here.

[0091] See also Figure 9 In one embodiment, a liquid inlet channel 711 is provided in the first liquid infusion tube 710, and the liquid inlet channel 711 is connected to the cathode liquid cooling inlet 420. The second liquid infusion tube 720 is sleeved on the outside of the first liquid infusion tube 710, and the inner wall of the second liquid infusion tube 720 is separated from the outer wall of the first liquid infusion tube 710 to form a return liquid channel 721, and the return liquid channel 721 is connected to the cathode liquid cooling outlet 430.

[0092] The cooling liquid enters the cathode liquid cooling inlet 420 through the liquid inlet channel 711 of the first liquid infusion tube 710, and can enter the return liquid channel 721 between the second liquid infusion tube 720 and the first liquid infusion tube 710 through the cathode liquid cooling outlet 430 to achieve circulating cooling of the cathode target 210; such a setting can improve the space utilization rate in the first installation cavity 132, making the coating device as a whole more compact.

[0093] Furthermore, in order to ensure the stability of liquid delivery, when the rotating rod 111 rotates, the first infusion tube 710 and the second infusion tube 720 are actually in a stationary state. The second infusion tube 720 is sleeved on the outside of the first infusion tube 710, so that the second infusion tube 720 and the first infusion tube 710 can form a cylindrical structure as a whole, and thus will not affect the rotation of the rotating rod 111 sleeved on the outside of the second infusion tube 720, thereby achieving the effect of driving the cathode target 210 to rotate together.

[0094] See also Figure 9 In one embodiment, the first mounting seat 130 is further provided with a first liquid return cavity 136 and a first liquid inlet cavity 137. The first liquid return cavity 136 and the first liquid inlet cavity 137 are spaced apart along the axial direction of the second infusion tube 720. The liquid return channel 721 is connected to the liquid return port 135 through the first liquid return cavity 136, and the liquid inlet channel 711 is connected to the liquid inlet 134 through the first liquid inlet cavity 137.

[0095] Further, see Figure 9 The first liquid return cavity 136 is an annular cavity. The first liquid infusion tube 710 located inside the second liquid infusion tube 720 passes through the first liquid return cavity 136 and communicates with the first liquid inlet cavity 137.

[0096] See also Figure 9 In one embodiment, the rotating module 110 further includes a second bearing 114 , the outer annular surface of the second bearing 114 is disposed on the cavity wall of the second mounting cavity 113 , and the inner annular surface of the second bearing 114 is sleeved on the infusion mechanism.

[0097] With such an arrangement, when the rotating rod 111 rotates relative to the mounting seat, the infusion mechanism does not rotate synchronously with the rotating rod 111 to ensure the reliability of the coolant delivery. The arrangement of the second bearing 114 can provide a certain support effect for the rotation of the rotating rod 111, and can also reduce the friction and energy consumption generated by the rotation of the rotating rod 111, thereby improving the transmission efficiency.

[0098] Furthermore, the second infusion tube 720 is sleeved on the outside of the first infusion tube 710 , and the inner annular surface of the second bearing 114 is sleeved on the outer wall of the second infusion tube 720 to provide a certain support effect for the rotating rod 111 outside the second infusion tube 720 .

[0099] See also Figure 9In one embodiment, at least two second bearings 114 are provided and spaced apart along the axial direction of the second infusion tube 720 to further improve the supporting effect of the rotating rod 111 and enhance the overall stability of the coating device.

[0100] See also Figure 4 In one embodiment, the coating mechanism 200 further includes an anode module 240 and a cooling pipe 250. The anode module 240 is disposed on the second mounting seat 400 and is insulated from the cathode target 210. The cooling pipe 250 is disposed on the anode module 240. One end of the cooling pipe 250 is connected to the first infusion pipe 710, and the other end of the cooling pipe 250 is connected to the second infusion pipe 720.

[0101] The coolant can also enter the cooling pipe 250 through the first infusion pipe 710 to cool the anode module 240 and ensure that the anode module 240 is in the best working condition; the coolant after cooling the anode module 240 flows back to the second infusion pipe 720 through the other end of the cooling pipe 250 to realize the circulation of the coolant, thereby realizing the circulating cooling of the anode module 240 and ensuring the cooling effect.

[0102] See also Figure 14 In one embodiment, the anode module 240 includes an anode plate 241, a ceramic screw 242 and a fixing screw 243. The ceramic screw 242 is screwed to the second mounting base 400, and the anode plate 241 is screwed to the side of the ceramic screw 242 away from the second mounting base 400 through the fixing screw 243. In this way, not only can the installation of the anode plate 241 be achieved, but the ceramic screw 242 can also achieve the insulation effect between the anode plate 241 and the cathode target 210 on the second mounting base 400.

[0103] Furthermore, the anode plate 241 extends along the length direction of the second mounting seat 400 and matches the cathode target 210 . The cooling pipe 250 surrounds the second mounting seat 400 and contacts the anode plate 241 to cool the anode plate 241 .

[0104] See also Figure 7 and Figure 11 In one embodiment, the ventilation mechanism 300 further includes at least two air pipes 320, all of which are arranged in one-to-one correspondence with the air inlet channels 1111, and one end of the air inlet channel 1111 away from the air inlet portion 131 is connected to the air distribution pipe 310 through the air pipe 320. The coating device further includes a connecting sleeve 850, one end of the connecting sleeve 850 is connected to the first mounting seat 130, and the other end of the connecting sleeve 850 is connected to the second mounting seat 400, and all of the air pipes 320 are arranged in the connecting sleeve 850.

[0105] The gas pipe 320 can guide the working gas in the air inlet channel 1111 to the gas distribution pipe 310, and the connecting sleeve 850 is used to connect the first mounting seat 130 and the second mounting seat 400. It can not only improve the connection strength between the first mounting seat 130 and the second mounting seat 400, but also provide a certain protection effect for the gas pipe 320 to prevent the gas pipe 320 from cracking or breaking due to collision with external objects.

[0106] See also Figure 2 、 Figure 7 and Figure 8 In one embodiment, the coating device further includes a connecting mechanism 800, which includes a first connecting tube 810, a second connecting tube 820, a third connecting tube 830, and a fourth connecting tube 840. The first mounting base 130 is provided with a first channel, a second channel, a third channel, and a fourth channel. One end of the first connecting tube 810 is connected to the first liquid infusion tube 710 through the first channel, and the other end of the first connecting tube 810 is connected to the cathode liquid cooling inlet 420. One end of the second connecting tube 820 is connected to the second liquid infusion tube 720 through the second channel, and the other end of the second connecting tube 820 is connected to the cathode liquid cooling outlet 430. One end of the third connecting tube 830 is connected to the first infusion tube 710 through the third channel, and the other end of the third connecting tube 830 is connected to one end of the cooling pipeline 250. One end of the fourth connecting tube 840 is connected to the second infusion tube 720 through the fourth channel, and the other end of the fourth connecting tube 840 is connected to the other end of the cooling pipeline 250. One end of the connecting sleeve 850 is connected to the first mounting seat 130, and the other end of the connecting sleeve 850 is connected to the second mounting seat 400. The first connecting tube 810, the second connecting tube 820, the third connecting tube 830 and the fourth connecting tube 840 are all arranged in the connecting sleeve 850.

[0107] The first liquid infusion pipe 710 transports the coolant through the first channel to the first connecting pipe 810, and the coolant is then transported to the cathode liquid cooling inlet 420 through the first connecting pipe 810 and enters the cathode liquid cooling chamber 440. After the coolant cools the cathode target 210, it enters the second connecting pipe 820 through the cathode liquid cooling outlet 430. The coolant in the second connecting pipe 820 is then transported to the second liquid infusion pipe 720 through the second channel to achieve the reflux of the coolant, thereby achieving the circulation cooling of the cathode target 210. Similarly, the first liquid infusion pipe 710 can also transport the coolant through the second channel to the third connecting pipe 830. The coolant is then transported to the cathode liquid cooling inlet 420 through the first connecting pipe 810 and enters the cathode liquid cooling chamber 440. The supercooling pipeline 250 cools the anode module 240. After cooling, it flows into the fourth channel through the fourth connecting pipe 840 and finally flows back to the second infusion pipe 720 to achieve circulating cooling of the anode module 240. The connecting sleeve 850 is used to connect the first mounting seat 130 and the second mounting seat 400. It can not only improve the connection strength between the first mounting seat 130 and the second mounting seat 400, but also provide a certain protection effect for the first connecting pipe 810, the second connecting pipe 820, the third connecting pipe 830 and the fourth connecting pipe 840 to prevent the pipeline from cracking or breaking due to collision with external objects.

[0108] See also Figure 9 In one embodiment, the rotating rod 111 is provided with a second liquid return chamber 1112 and a second liquid inlet chamber 1113. The second liquid return chamber 1112 is located at an end of the second infusion tube 720 away from the first liquid return chamber 136 and is communicated with the second infusion tube 720. The second liquid return chamber 1112 is communicated with the second connecting tube 820 and the fourth connecting tube 840 to achieve communication between the second connecting tube 820 and the fourth connecting tube 840 and the second infusion tube 720. The second liquid inlet chamber 1113 is located at an end of the first infusion tube 710 away from the first liquid return chamber 136 and is communicated with the first infusion tube 710. The second liquid inlet chamber 1113 is communicated with the first connecting tube 810 and the third connecting tube 830 to achieve communication between the first connecting tube 810 and the third connecting tube 830 and the first infusion tube 710.

[0109] Further, see Figure 9 The second liquid return chamber 1112 is an annular chamber and is arranged around the outside of the first infusion tube 710. In this way, when the rotating rod 111 rotates and the first infusion tube 710 and the second infusion tube 720 are stationary, the cooling liquid can still be transported and refluxed.

[0110] See also Figure 3 and Figure 4In one embodiment, the connecting mechanism 800 further includes a first seat body 860 and a second seat body 870, which are respectively arranged on opposite sides of the connecting sleeve 850, the first seat body 860 is connected to the first mounting seat 130, and the second seat body 870 is connected to the second mounting seat 400, the opposite ends of the first connecting pipe 810 are respectively passed through the first seat body 860 and the second seat body 870, the opposite ends of the second connecting pipe 820 are respectively passed through the first seat body 860 and the second seat body 870, the opposite ends of the third connecting pipe 830 are respectively passed through the first seat body 860 and the second seat body 870, the opposite ends of the fourth connecting pipe 840 are respectively passed through the first seat body 860 and the second seat body 870, and the opposite ends of all the gas pipes 320 are respectively passed through the first seat body 860 and the second seat body 870 to achieve conduction.

[0111] See also Figure 9 In one embodiment, the coating device further includes a third brush 530, which is disposed in the first mounting cavity 132. The connecting mechanism 800 further includes a power transmission tube 880. The first mounting seat 130 is provided with a power transmission channel 138, which is connected to the position where the third brush 530 is located. One end of the conductive wire is electrically connected to the third brush 530, and the other end of the conductive wire passes through the power transmission channel 138 and the power transmission tube 880 in sequence and is electrically connected to the anode plate 241 on the second mounting seat 400.

[0112] Furthermore, the second mounting base 400 is provided with a copper busbar 460 , which is electrically connected to an end of the conductive wire away from the third brush 530 and to the anode plate 241 , thereby achieving electrical connection between the conductive wire and the anode plate 241 .

[0113] See also Figure 9 In one embodiment, the electric energy released by the first brush is sequentially transmitted to the cathode target 210 through the first mounting base 130, the connecting sleeve 850 and the second mounting base 400, and the electric energy released by the second brush is sequentially transmitted to the cathode target 210 through the third mounting base 600 and the second mounting base 400, so as to achieve reliable power supply to the cathode target 210.

[0114] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0115] The above embodiments merely illustrate several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A film coating device, characterized in that: include: a first mounting seat; A film coating mechanism, the film coating mechanism comprising a cathode target, the cathode target being disposed on the first mounting seat and having a sputtering surface, the sputtering surface being arranged toward a portion to be plated; A ventilation mechanism is provided on the first mounting seat and extends toward the coating mechanism, and is used for delivering working gas to the part to be coated.

2. The coating device according to claim 1, characterized in that The ventilation mechanism includes at least two air distribution pipes, at least two of which are spaced apart on the coating mechanism, the first mounting seat is provided with at least two air inlets, all of which are arranged in one-to-one correspondence with the air distribution pipes, one end of the air distribution pipe is connected to the air inlet, and the air distribution pipe is provided with an air distribution hole unit.

3. The coating device according to claim 2, characterized in that: The distance between one end of at least one of the air distribution pipes away from the air inlet portion and the first mounting seat is greater than the distance between one end of at least another of the air distribution pipes away from the air inlet portion and the first mounting seat.

4. The coating device according to claim 2, characterized in that The air distribution hole unit includes a first air distribution hole, and the first air distribution hole is provided at an end of the air distribution pipe away from the air inlet portion.

5. The coating device according to claim 2, characterized in that: The air distribution hole unit includes a second air distribution hole, and the second air distribution hole is arranged on the side wall of the air distribution pipe.

6. The coating device according to claim 2, characterized in that: The coating mechanism further includes a second mounting seat, the cathode target is arranged on the second mounting seat, the second mounting seat is provided with at least two mounting parts, and all the gas distribution pipes are arranged in a one-to-one correspondence with the mounting parts.

7. The coating device according to claim 6, characterized in that: The mounting portion is provided with a clamping groove, and the outer side wall of the air distribution pipe is clamped in the clamping groove.

8. The coating device according to claim 6, characterized in that: The coating device also includes a rotating rod, the first mounting seat is provided with a first mounting cavity and a first mounting port that are connected to each other, one end of the rotating rod is rotatably arranged in the first mounting cavity, and the other end of the rotating rod is connected to the second mounting seat through the first mounting port, and the rotating rod is provided with at least two air intake channels, all of which are arranged in a one-to-one correspondence with the air intake part, one end of the air intake channel is connected to the air intake part, and the other end of the air intake channel is connected to the air distribution pipe.

9. The coating device according to claim 8, characterized in that: The cavity wall of the first mounting cavity is separated by at least two annular grooves, all of which are connected to the air inlet portion in a one-to-one correspondence, the notches of the annular grooves are set toward the side walls of the rotating rod, and the annular grooves and the side walls of the rotating rod are arranged to form an annular cavity, and all of the annular cavities are connected to the air inlet channel in a one-to-one correspondence.

10. The coating device according to claim 8, characterized in that: The ventilation mechanism also includes at least two air pipes, all of which are arranged in a one-to-one correspondence with the air inlet channels, and the end of the air inlet channel away from the air inlet part is connected to the air distribution pipe through the air pipe. The coating device also includes a connecting sleeve, one end of the connecting sleeve is connected to the first mounting seat, and the other end of the connecting sleeve is connected to the second mounting seat, and all of the air pipes are arranged in the connecting sleeve.

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