Contact type contourgraph double-induction-lens detection device

Abstract

The invention discloses a contact-type contourgraph double-induction-lens detection device, and belongs to the technical field of wafer etching pattern detection, the contact-type contourgraph double-induction-lens detection device comprises two detection lenses and a probe, the two detection lenses and the probe are connected through a mounting base, the camera shooting end of one detection lens irradiates an etching pattern of a wafer, and the camera shooting end of the other detection lens irradiates the etching pattern of the wafer; and the camera shooting end of the other detection lens irradiates the tip of the probe, scattered light of the lamp tube is focused into a high-intensity light spot, so that the contrast ratio of the tip of the probe and a wafer etching pattern is improved, and under the condition of photographing detection of different materials, the paraboloid form of the reflective airbag is actively changed, so that the detection coverage rate is increased, and the detection precision is improved. The signal-to-noise ratio of the low-reflection area is improved, and the signal-to-noise ratio of the high-reflection area can be ensured while the signal-to-noise ratio of the low-reflection area is improved, so that the low-reflection area and the high-reflection area can be quickly switched, and the detection effect on different materials is further improved.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer etching pattern detection, and in particular to a contact-type profilometer dual-sensing lens detection device. Background Art

[0002] With the rapid advancement of semiconductor technology, the manufacturing process of integrated circuits has become increasingly complex and demands extremely high precision. The wafer, the fundamental carrier of integrated circuits, has a surface etch pattern quality that directly impacts the performance and yield of subsequent chips. Therefore, accurate inspection of wafer etch patterns has become an essential step in the semiconductor manufacturing process. Contact profilometers are widely used for this purpose due to their high tolerance for materials (including transparent, semi-transparent, and non-transparent materials). However, traditional contact profilometer inspection devices often utilize a single camera for observation, which presents numerous limitations. Firstly, the limited field of view of a single camera makes it difficult to comprehensively and accurately reflect the etch pattern quality across the entire wafer. This can lead to missed detections or misjudgments, especially when complex patterns or minor defects are present on the wafer surface. Secondly, a single camera cannot monitor the contact status between the test probe (especially the probe) and the wafer in real time, as well as the accuracy of the test position, which increases uncertainty and error in the inspection process.

[0003] The patent title is: Contact profilometer dual-lens detection device, and the publication number is: CN118654594B. It also points out that the existing wafer profilometers are usually equipped with only one camera to observe the etching pattern in real time. The image display is partial and one-sided, which may cause the probe test position to deviate from the position to be tested set by the software. In addition, it is difficult for mechanical positioning to achieve the resolution of optical lens detection, and the detection result has a large error. The top-view lens focuses on the etching pattern on the wafer and observes the front of the entire wafer to ensure that the etching pattern is not distorted or deformed, which is convenient for making a preliminary judgment on the quality of the etching pattern; and then the side-view lens focuses on the probe tip of the test probe to Whether the probe contacts the wafer can be clearly observed in real time. At the same time, it can also be determined whether the position of the test probe is accurate and whether the starting test position is the set test position. Compared with a single camera, the image display is more comprehensive and the detection result is more reliable. However, during the detection process, when dual lenses are used, the shooting angles of the two lenses are not consistent, the received light illumination conditions are inconsistent, and the side view light source is visible light in a single direction. Under the interference of the light source in the external environment, the graphic contrast of the side view lens will decrease, and the contrast of the content captured by the two lenses will show a large difference. Therefore, a contact profilometer dual-sensing lens detection device is proposed. Summary of the Invention

[0004] The object of the present invention is to provide a contact profilometer dual-sensor lens detection device to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: a contact profilometer dual-sensor lens detection device, comprising:

[0006] Two detection lenses and probes, both of which are connected through a mounting base, wherein the camera end of one detection lens illuminates the etched pattern of the wafer, and the camera end of the other detection lens illuminates the needle tip of the probe. The mounting base is connected to a gas storage box through a directional gas supply structure, and a lamp is installed in the central axial direction of the gas storage box. The emitted light of the lamp is directly irradiated on the needle tip of the probe along the X-axis;

[0007] The deformation mapping structure includes two reflective airbags fixedly connected to the upper and lower sides of the air storage box respectively. The surface of the reflective airbag is connected with a reflective layer. The reflective airbag is used to reflect visible light to the tip of the probe through the reflective layer on the deformed parabola and the surface.

[0008] Preferably, the deformation mapping structure also includes a secondary expansion bladder located inside the reflective airbag, and the reflective airbag and the secondary expansion bladder are both connected to the directional gas supply structure. The secondary expansion bladder is used to expand the gas delivered by the directional gas supply structure, and the expansion of the secondary expansion bladder drives the parabola of the reflective airbag to form a wide-angle spherical surface, thereby expanding the light diffusion angle of the lamp tube.

[0009] Preferably, a color-changing film is attached to the outside of the reflective layer of the reflective airbag, and the energized end of the color-changing film is connected to an external power source through a wire. The color-changing film is used to change color when connected to electricity, and the reflective layer on the surface of the reflective airbag is shielded by the color-changing film.

[0010] Preferably, a plurality of electromagnetic suction plates are integrally formed on one side of the reflective airbag close to the secondary expansion bladder, the electromagnetic suction plates are connected by energized wires, the energized wires are connected to an external power supply, and a plurality of lower electromagnet plates are installed on the outside of the air storage box.

[0011] Preferably, the mounting part includes a positioning seat, the outside of the positioning seat is provided with a snap-in hole for the detection lens to pass through, the detection lens is snapped into the inside of the snap-in hole, the outside of the positioning seat is installed with a connecting seat, the outside of the connecting seat is connected to the mounting seat by bolts, two hydraulic telescopic right angles are fixedly connected to the bottom of the hydraulic telescopic right angles, the bottom of the hydraulic telescopic right angles is fixedly connected to a support plate, the support plate is fixedly connected to a wafer supporting platform, and the wafer supporting platform is located below the probe.

[0012] Preferably, the directional gas supply structure includes an air pump fixedly connected to the outside of the connecting seat, the air outlet of the air pump is connected to a metal shaped hose, the end of the metal shaped hose away from the air pump is connected to the air storage box, the upper and lower sides of the air storage box are connected to two first pressure electric control valves and second pressure expansion airbags, the two first pressure electric control valves are respectively connected to two reflective airbags, and the two second pressure expansion airbags are connected to the secondary expansion bladder.

[0013] Preferably, a plug-in column is fixedly connected to the positioning seat, a lens mounting seat is connected to the positioning seat, the detection lens is mounted inside the lens mounting seat, a plug-in hole is provided on a side of the lens mounting seat close to the positioning seat, and the plug-in column is plugged into the inside of the plug-in hole.

[0014] Preferably, an external inclined airbag is integrally formed on the outside of the lens mount, and the side of the external inclined airbag away from the lens mount is fixedly connected to the positioning seat. The outside of the positioning seat is connected to a delivery valve, and the air outlet of the delivery valve passes through the outer wall of the positioning seat and is connected to the external inclined airbag.

[0015] Preferably, the exterior of the reflective airbag is integrally formed with folding marks.

[0016] Preferably, two movable slide rails are installed on the connecting seat, and the two positioning seats are respectively connected to the movable seats of the movable slide rails by screws.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] In the present invention, the parabolic reflective layer formed by the expansion of the reflective airbag focuses the scattered light of the lamp tube, focusing the scattered light of the lamp tube into a high-intensity light spot, thereby improving the contrast between the probe tip and the wafer etching pattern.

[0019] In the present invention, when taking photos to detect different materials, the parabolic shape of the reflective airbag is actively changed to increase the detection coverage and improve the signal-to-noise ratio of the low-reflection area. While improving the signal-to-noise ratio of the low-reflection area, the signal-to-noise ratio of the high-reflection area can still be guaranteed, so that the two can be switched quickly, further improving the detection effect of different materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Schematic diagram of the three-dimensional structure of an embodiment of the present invention;

[0021] Figure 2 This is one of the exploded structural diagrams of the detection lens and the positioning seat in an embodiment of the present invention;

[0022] Figure 3This is a second schematic diagram of the explosion structure of the detection lens and the positioning seat in an embodiment of the present invention;

[0023] Figure 4 Schematic diagram of the structure of the reflective airbag in the expanded state according to an embodiment of the present invention;

[0024] Figure 5 Schematic diagram of the internal structure of the reflective airbag in an embodiment of the present invention;

[0025] Figure 6 For the embodiment of the present invention Figure 5 Schematic diagram of the enlarged structure of area A;

[0026] Figure 7 Schematic diagram of the structure of the first pressure electric control valve and the secondary expansion bladder in an embodiment of the present invention;

[0027] Figure 8 This is a schematic structural diagram of the expanded state of the secondary expansion bladder in an embodiment of the present invention;

[0028] Figure 9 For the embodiment of the present invention Figure 8 Schematic diagram of the enlarged structure of area B;

[0029] Figure 10 Schematic diagram of the array structure of electromagnetic suction plates and energized wires in an embodiment of the present invention.

[0030] In the figure: 100, support plate; 101, wafer carrier; 102, hydraulic telescopic right angle; 103, mounting seat; 104, connecting seat; 105, positioning seat; 106, lens clamping seat; 107, detection lens; 108, probe; 109, air pump; 110, air storage box; 111, lamp tube; 112, reflective airbag; 113, first pressure electric control valve; 114, metal shaping hose; 200, secondary expansion bladder; 201, second pressure expansion airbag; 300, color-changing film; 400, electromagnetic suction piece; 401, power-carrying wire; 402, lower electromagnetic iron plate; 500, plug-in column; 501, plug-in hole; 600, external tilt airbag; 601, delivery valve; 700, movable slide rail; 800, fold mark. DETAILED DESCRIPTION

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0032] Example 1: Figure 1As shown, the present application provides a contact profilometer dual-sensor lens detection device, comprising:

[0033] Two detection lenses 107 and a probe 108 are connected via a positioning base 105. The camera end of one detection lens 107 illuminates the etched pattern of the wafer, and the camera end of the other detection lens 107 illuminates the tip of the probe 108. The positioning base 105 is connected to a gas storage box 110 via a directional gas delivery structure. A lamp tube 111 is installed axially in the center of the gas storage box 110. The light emitted by the lamp tube 111 is directly irradiated along the X-axis to the tip of the probe 108.

[0034] The deformation mapping structure includes two reflective airbags 112 fixedly connected to the upper and lower sides of the air storage box 110 respectively. The surface of the reflective airbag 112 is connected with a reflective layer. The reflective airbag 112 is used to reflect visible light to the tip of the probe 108 through the reflective layer on the deformed parabola surface.

[0035] Specifically, during use, the wafer that needs to be inspected and photographed is placed under the probe 108. After placement is completed, vertical and lateral photographing and inspection are performed through the inspection lens 107 and the probe 108. During the photo inspection process, the lamp tube 111 located on the central axis of the air storage box 110 is turned on. After being turned on, the lamp tube 111 can generate light assistance. When light assistance is generated, the side inspection lens 107 can directly capture or capture the position of the probe 108 from the mirror reflection of the wafer, thereby improving the image display clarity.

[0036] In the case where the lamp tube 111 generates light, when the light is relatively scattered, or when an external light source intervenes, the contrast of the graphics of the side detection lens 107 will decrease, and the contrast of the content captured by the two lenses will show a large difference. Therefore, in the current situation, gas is delivered to the interior of the gas storage box 110 through a directional gas supply structure, and the two reflective airbags 112 are expanded. The two reflective airbags 112 can be hemispherical when expanded, and a parabola is formed on the side close to the lamp tube 111. There is a reflective layer on the parabola. In the presence of the reflective layer, the light generated by the lamp tube 111 can be reflected, and the visible light can be focused and reflected to the needle tip position of the probe 108, forming a high-intensity light spot with a diameter of less than 0.5 mm, thereby improving the contrast between the lamp tube 111 and the wafer background and reducing the difference in shooting and detection between the two lenses.

[0037] Specifically, when reflective focusing is performed, the coordinates of the probe 108 are the origin (0, 0, 0), and when the reflective airbag 112 is inflated (vertex coordinates (25mm, 0, 5mm), focal length 8mm), the material of the reflective layer is an aluminum coating on a silicone matrix (reflectivity > 95%).

[0038] like Figure 1 As shown, the mounting part includes a positioning seat 105, and the outside of the positioning seat 105 is provided with a snap-in hole for the detection lens 107 to pass through, and the detection lens 107 is snapped into the inside of the snap-in hole, and the outside of the positioning seat 105 is installed with a connecting seat 104, and the outside of the connecting seat 104 is connected to the mounting seat 103 by bolts, and two hydraulic telescopic right angles 102 are fixedly connected to the bottom of the mounting seat 103, and the bottom of the hydraulic telescopic right angle 102 is fixedly connected to the support plate 100, and the support plate 100 is fixedly connected to the wafer carrier 101, and the wafer carrier 101 is located below the probe 108, and two movable slide rails 700 are installed on the connecting seat 104, and the two positioning seats 105 are respectively connected to the movable seats of the movable slide rails 700 by screws.

[0039] Specifically, during use, the staff will place the wafer that needs to be photographed and inspected on the table of the wafer carrier 101, and raise or lower the position of the mounting seat 103 through two hydraulic telescopic right angles 102, thereby driving the two inspection lenses 107 to rise and fall as a whole. After the overall rise and fall is achieved, and after the placement is completed, the wafer carrier 101 can also be used to lift the table to actively lift the wafer to the position of the probe 108 to achieve two-way contact. At the same time, the two inspection lenses 107 can be driven to move parallel to their respective shooting axes by starting the movable slide rail 700, further ensuring the contact shooting of the probe 108 and the wafer.

[0040] like Figure 2-Figure 3 As shown, a plug-in post 500 is fixedly connected to the positioning seat 105, and a lens clamping seat 106 is connected to the positioning seat 105. The detection lens 107 is clamped inside the lens clamping seat 106. A plug-in hole 501 is opened on the side of the lens clamping seat 106 close to the positioning seat 105, and the plug-in post 500 is plugged into the inside of the plug-in hole 501;

[0041] An external tilting airbag 600 is integrally formed on the outside of the lens mount 106. The side of the external tilting airbag 600 away from the lens mount 106 is fixedly connected to the positioning seat 105. The outside of the positioning seat 105 is connected to a delivery valve 601. The air outlet of the delivery valve 601 passes through the outer wall of the positioning seat 105 and is connected to the external tilting airbag 600.

[0042] Specifically, in the process of fixing the detection lens 107, the detection lens 107 can be clamped and limited by the lens clamping seat 106 to prevent the detection lens 107 from falling off the positioning seat 105, and in the process of adjusting the angle, the gas can be continuously delivered to the inside of the delivery valve 601 by connecting to an external gas source. When the gas is continuously delivered to the inside of the delivery valve 601, the external tilting airbag 600 can be expanded. When the external tilting airbag 600 is expanded, the lens clamping seat 106 can be pushed to rotate around the plug-in column 500, thereby performing a certain angle adjustment.

[0043] like Figure 4 As shown, the directional gas supply structure includes an air pump 109 fixedly connected to the outside of the connecting seat 104, and the air outlet of the air pump 109 is connected to a metal shaped hose 114. The end of the metal shaped hose 114 away from the air pump 109 is connected to the air storage box 110. The upper and lower sides of the air storage box 110 are connected to two first pressure electric control valves 113 and second pressure expansion air bags 201. The two first pressure electric control valves 113 are respectively connected to the two reflective air bags 112, and the two second pressure expansion air bags 201 are connected to the secondary expansion bag body 200.

[0044] Specifically, during the expansion of the reflective airbag 112, gas can be continuously injected into the interior of the metal shaped hose 114 by starting the air pump 109. When gas is continuously injected into the interior of the metal shaped hose 114, the metal shaped hose 114 can continuously transport the gas into the interior of the air storage box 110. When the gas continues to enter the interior of the air storage box 110, the first pressure electric-controlled valve 113 can be opened. When the first pressure electric-controlled valve 113 is opened, gas can be continuously injected into the interior of the reflective airbag 112. When gas is injected into the interior of the reflective airbag 112, the reflective airbag 112 can be expanded, and the light source is reflected and focused by the expansion of the reflective airbag 112.

[0045] like Figure 5 As shown, the exterior of the reflective airbag 112 is integrally formed with a folding mark 800. The folding mark 800 ensures the expansion process of the reflective airbag 112 and reduces wrinkles. During the expansion process, the folding mark 800 unfolds, and when the reflective airbag 112 is folded, it is still folded along the folding mark 800.

[0046] The technical solution in the above-mentioned embodiment of the present application has at least the following technical effects or advantages: Compared with the existing technology, in this embodiment, the parabolic reflective layer formed after the reflective airbag 112 is expanded is used to focus the scattered light of the lamp tube 111, and the scattered light of the lamp tube 111 is focused into a high-intensity light spot, thereby improving the contrast between the needle tip of the probe 108 and the etched pattern of the wafer.

[0047] Embodiment 2: Considering that although the light source is focused by the inflated reflective airbag 112 and the reflective layer to improve the imaging signal-to-noise ratio of the probe 108, during the wafer inspection process, when the wafer is made of a low-reflectivity material such as a GaN / SiC wafer, a single fixed-angle light source cannot meet the imaging requirements of the two inspection lenses 107. In response to the above technical problems, this application proposes the following technical solutions to solve the above technical problems, specifically:

[0048] like Figure 5-Figure 8 As shown, the deformation mapping structure also includes a secondary expansion bladder 200 located inside the reflective airbag 112. The reflective airbag 112 and the secondary expansion bladder 200 are both connected to the directional gas supply structure. The secondary expansion bladder 200 is used to expand the gas delivered by the directional gas supply structure. The expansion of the secondary expansion bladder 200 drives the parabola of the reflective airbag 112 to form a wide-angle spherical surface, thereby expanding the light diffusion angle of the lamp tube 111.

[0049] Specifically, in the SiC / GaN wafer probe detection production line, it is necessary to simultaneously detect the high reflectivity of the metal probe and the reflectivity of the low reflective pad on the wafer surface less than 10%. In the parabolic mode of the reflective airbag 112, the light cannot dynamically switch the focusing angle, which will cause the high reflective probe to be overexposed and the low reflective pad to have insufficient signal-to-noise ratio. By opening the second pressure expansion airbag 201, when the second pressure expansion airbag 201 is opened, the gas delivered to the inside of the gas storage box 110 can be delivered to the inside of the secondary expansion bag 200 through the second pressure expansion airbag 201. When the gas is delivered to the inside of the secondary expansion bag 200 The secondary expansion bladder 200 can be expanded. When the secondary expansion bladder 200 is expanded, the parabola formed by the expansion of the reflective airbag 112 can be squeezed. By squeezing the parabola of the reflective airbag 112, the reflective surface of the reflective airbag 112 protrudes outward into a wide-angle sphere. When the wide-angle sphere is formed, the 700-1000nm near-infrared light of the lamp tube 111 will be scattered to the area with a diameter of 15mm around the probe 108, covering the gap between the pad and the probe 108, and forming multi-angle scattered light to illuminate, thereby improving the signal-to-noise ratio of the detection lens 107 during the monitoring process of the SiC / GaN wafer.

[0050] Specifically, when the secondary expansion bladder 200 is inflated, the focal length of the reflective airbag 112 that forces the parabola to expand into a spherical surface is: F=25mm, and the radius of the expanded spherical surface is R=15mm.

[0051] The technical solutions in the above-mentioned embodiments of the present application have at least the following technical effects or advantages: relative to embodiment one, in this embodiment, when photographing and detecting different materials, the parabolic shape of the reflective airbag 112 is actively changed to increase the detection coverage, thereby improving the signal-to-noise ratio of the low-reflection area, and while improving the signal-to-noise ratio of the low-reflection area, the signal-to-noise ratio of the high-reflection area can still be guaranteed, so that the two can be switched quickly, further improving the detection effect of different materials.

[0052] Example 3:

[0053] Considering that the reflectivity of the reflective layer is constant regardless of whether the reflective airbag 112 presents a parabolic surface or an outward-expanding spherical surface, and different materials also require different reflection requirements for the light source, the present application proposes the following technical solutions to solve the above technical problems, specifically:

[0054] like Figure 8-Figure 9 As shown, a color-changing film 300 is attached to the outside of the reflective layer of the reflective airbag 112. The power-on end of the color-changing film 300 is connected to an external power source through a wire. The color-changing film 300 is used to change color when connected to electricity, and the reflective layer on the surface of the reflective airbag 112 is shielded by the color-changing film 300.

[0055] Specifically, during use, when it is necessary to adjust the reflectivity of the reflective layer on the outside of the reflective airbag 112, the color-changing film 300 can be energized. When the color-changing film 300 is energized, the color-changing film 300 can be made transparent to different degrees. When the transparency becomes different, the reflective layer on the outside of the reflective airbag 112 can be adjusted in time to reduce the phenomenon of overexposure to the external environment.

[0056] Specifically, the color-changing film 300 is made of a polymer dispersed liquid crystal (PDLC) elastic film.

[0057] The technical solutions in the above-mentioned embodiments of the present application have at least the following technical effects or advantages: relative to the second embodiment, in this embodiment, the transmittance can be freely switched under different circumstances by attaching the color-changing film 300 to the outside of the reflective layer, thereby freely adjusting the reflectivity of the reflective layer. When facing the detection of different materials, when the external environment is overexposed, the color-changing film 300 can be actively powered on to suppress filtering, thereby improving the signal-to-noise ratio during the detection process.

[0058] Example 4: Considering that the wafer surface is not completely flat during use, when facing the stepped structure of the wafer such as 3D packaging, local reflection will cause the signal-to-noise ratio of the probe 108 to fluctuate greatly. In the case of large fluctuations, the light source reflection of the parabola and the wide-angle spherical surface cannot meet the local aberration compensation of the stepped wafer. In response to the above technical problems, the present application proposes the following technical solutions to solve the above technical problems, specifically:

[0059] like Figures 6-10 As shown, a plurality of electromagnetic suction plates 400 are integrally formed on one side of the reflective airbag 112 close to the secondary expansion bladder 200. The electromagnetic suction plates 400 are connected by power wires 401, which are connected to an external power supply. A plurality of lower electromagnet plates 402 are installed on the outside of the air storage box 110.

[0060] Specifically, when inspecting 3D packaged wafers, the probe 108 and the reflected light path differ due to the stepped structure, and the traditional homogeneous reflective surface cannot take into account the imaging of both. Therefore, after the reflective airbag 112 forms a basic parabola to cover the upper probe 108, the electromagnetic suction piece 400 is activated and forms an adsorption effect with the lower electromagnetic iron plate 402, so that the reflective airbag 112 is partially concave by 2mm to form a secondary focusing surface, which directs the light to the lower wafer pad and improves the signal-to-noise ratio; and when the probe 108 moves, the electromagnetic suction piece 400 tracks the coordinates in real time and dynamically adjusts the adsorption area. The reflective surface of the reflective airbag 112 continues to deform to maintain light spot tracking, reduce errors, and ultimately achieve synchronous and clear imaging of multi-layer structures, further improve detection efficiency, and avoid the phenomenon that complex geometric wafers cannot be optically adapted.

[0061] The technical solutions in the above-mentioned embodiments of the present application have at least the following technical effects or advantages: relative to the third embodiment, in the present embodiment, a local depression is precisely generated on the basic parabola of the reflective airbag 112 through the magnetically controlled dynamic adsorption mechanism of the electromagnetic suction piece 400 and the lower electromagnetic iron plate 402, and a secondary focusing surface is formed through the local depression, which guides the light in real time to the lower pad of the stepped structure of the 3D packaging wafer, thereby improving the signal-to-noise ratio of the reflected light path between the probe 108 and the pad.

[0062] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A contact profilometer dual-sensor lens detection device, characterized in that: include: Two detection lenses and probes, both of which are connected through a mounting base, wherein the camera end of one detection lens illuminates the etched pattern of the wafer, and the camera end of the other detection lens illuminates the needle tip of the probe. The mounting base is connected to a gas storage box through a directional gas supply structure, and a lamp is installed in the central axial direction of the gas storage box. The emitted light of the lamp is directly irradiated on the needle tip of the probe along the X-axis; The deformation mapping structure includes two reflective airbags fixedly connected to the upper and lower sides of the air storage box respectively. The surface of the reflective airbag is connected with a reflective layer. The reflective airbag is used to reflect visible light to the tip of the probe through the reflective layer on the deformed parabola and the surface.

2. The contact profilometer dual-sensor lens detection device according to claim 1, characterized in that: The deformation mapping structure also includes a secondary expansion bladder located inside the reflective airbag. The reflective airbag and the secondary expansion bladder are both connected to the directional gas supply structure. The secondary expansion bladder is used to expand the gas delivered by the directional gas supply structure. The expansion of the secondary expansion bladder drives the parabola of the reflective airbag to form a wide-angle spherical surface, thereby expanding the light diffusion angle of the lamp tube.

3. The contact profilometer dual-sensor lens detection device according to claim 1, characterized in that: The reflective layer of the reflective airbag is adhered to a color-changing film on the outside. The energized end of the color-changing film is connected to an external power source through a wire. The color-changing film is used to change color when powered, and the reflective layer on the surface of the reflective airbag is shielded by the color-changing film.

4. The contact profilometer dual-sensor lens detection device according to claim 1, characterized in that: A plurality of electromagnetic suction plates are integrally formed on one side of the reflective airbag close to the secondary expansion bladder, the electromagnetic suction plates are connected by energized wires, and the energized wires are connected to an external power supply. A plurality of lower electromagnet plates are installed on the outside of the air storage box.

5. The contact profilometer dual-sensor lens detection device according to claim 1, characterized in that: The mounting part includes a positioning seat, the outside of the positioning seat is provided with a snap-in hole for the detection lens to pass through, the detection lens is snapped into the inside of the snap-in hole, the outside of the positioning seat is installed with a connecting seat, the outside of the connecting seat is connected to the mounting seat by bolts, two hydraulic telescopic right angles are fixedly connected to the bottom of the hydraulic telescopic right angles, the bottom of the hydraulic telescopic right angles is fixedly connected to a support plate, the support plate is fixedly connected to a wafer supporting platform, and the wafer supporting platform is located below the probe.

6. The contact profilometer dual-sensor lens detection device according to claim 5, characterized in that: The directional gas supply structure includes an air pump fixedly connected to the outside of the connecting seat, the air outlet of the air pump is connected to a metal shaped hose, the end of the metal shaped hose away from the air pump is connected to the air storage box, the upper and lower sides of the air storage box are connected to two first pressure electric control valves and second pressure expansion air bags, the two first pressure electric control valves are respectively connected to two reflective air bags, and the two second pressure expansion air bags are connected to the secondary expansion bag body.

7. The contact profilometer dual-sensor lens detection device according to claim 6, characterized in that: A plug-in column is fixedly connected to the positioning seat, and a lens clamping seat is connected to the positioning seat. The detection lens is clamped inside the lens clamping seat. A plug-in hole is opened on the side of the lens clamping seat close to the positioning seat, and the plug-in column is plugged into the inside of the plug-in hole.

8. The contact profilometer dual-sensor lens detection device according to claim 7, characterized in that: An external inclined airbag is integrally formed on the outside of the lens mount, and the side of the external inclined airbag away from the lens mount is fixedly connected to the positioning seat. The outside of the positioning seat is connected to a delivery valve, and the air outlet of the delivery valve passes through the outer wall of the positioning seat and is connected to the external inclined airbag.

9. The contact profilometer dual-sensor lens detection device according to claim 1, characterized in that: The exterior of the reflective airbag is integrally formed with folding marks.

10. The contact profilometer dual-sensor lens detection device according to claim 8, characterized in that: Two movable slide rails are installed on the connecting seat, and the two positioning seats are respectively connected to the movable seats of the movable slide rails through screws.

Images