Special adaptive device of white light interferometer for taper drill processing

Abstract

The invention discloses a special adaptive device for a white light interferometer for taper drill processing, which comprises a white light interferometer and an inclined fixing unit, and is characterized in that the inclined fixing unit comprises a calibration module, an air cylinder, a motor, a shifting module, a mounting plate, a first fixing plate, a second fixing plate and two clamping plates; the two clamping plates are movably connected to the first fixing plate and the second fixing plate respectively, the air cylinder is mounted at one end of the base and connected with the mounting plate, the first fixing plate is movably connected to the mounting plate, the second fixing plate is fixed to the bottom plate, the motor is mounted on the bottom plate and connected with the shifting module, and the shifting module is matched with the clamping plate on the second fixing plate. The calibration module is movably connected to the bottom plate. The device has the beneficial effects that the inclined surface of the large-cone-angle taper drill can be horizontally fixed, and the taper drill can be rotated by one circle in the detection process, so that the white light interferometer can conveniently carry out circumferential all-directional detection on the inclined surface of the large-cone-angle taper drill, the taper angle of the taper drill is measured at the same time, and the detection precision and the detection efficiency are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of tapered drill detection, and more particularly to a special adapter device for a white light interferometer used for tapered drill processing. Background Art

[0002] A tapered drill is a tool used to process conical holes or outer surfaces. It is widely used in mechanical processing, mold manufacturing, pipe connection and other fields. During the manufacturing process of tapered drills, a three-coordinate measuring machine (CMM) is generally used for inspection. However, the detection capability is limited in high-precision, complex blade shape or micro-feature inspection scenarios. White light interferometer is used to inspect the surface quality of tapered drills.

[0003] After the tapered drill finishing process is completed, it is very important to inspect its surface quality. The purpose of the finishing process is to ensure that the dimensional accuracy and surface quality of the tapered drill meet the design requirements. The white light interferometer can measure the surface roughness with high precision to ensure that it is within the specified tolerance range. In addition, it can also detect the microscopic morphology of the surface, such as whether there are cracks, scratches, burrs and other defects. These defects may affect the service life and processing performance of the tapered drill. Therefore, using a white light interferometer for inspection after the tapered drill finishing process can timely discover these problems, timely adjust and optimize the processing technology, improve the processing quality, reduce rework and scrap rates caused by quality problems, and thus improve production efficiency and economic benefits. If the processing of the tapered drill includes heat treatment and coating processes, it is also necessary to use a white light interferometer for inspection after these processes are completed. When the tapered drill is processed and the final inspection is carried out, a white light interferometer is used for final inspection to comprehensively evaluate the surface quality of the product. However, the following problems exist when traditional white light interferometers are used to inspect tapered drills:

[0004] 1. Due to the special shape and size of the tapered drill, the vertical scanning range of the white-light interferometer is limited. The sample stage of the white-light interferometer does not have a fixed structure designed for the tapered drill. As a result, the tapered drill's inclined surface (especially those with large taper angles or steep surfaces, such as those with a taper angle greater than 30°) cannot be kept perpendicular to the objective lens of the white-light interferometer during the inspection process. When the tapered drill's surface inclination angle is too large, the detector cannot receive sufficient reflected light, resulting in data loss or increased error, affecting the accuracy of the tapered drill's surface inspection.

[0005] 2. White-light interferometers indirectly measure taper angles by fitting surface equations using 3D point cloud data. If the inclined surface of a tapered drill is a steep cone (e.g., a cone angle greater than 30°), fitting errors can easily occur due to signal loss. Although a tilted sample stage or a high-NA objective lens can be used during the measurement process, adjusting the sample stage tilt is inconvenient and the high-NA objective lens is expensive. Therefore, white-light interferometers are generally used for auxiliary verification of small taper angles. Measurements of large taper angles of tapered drills have low reliability and require cross-verification with other instruments, resulting in low detection efficiency and high detection costs.

[0006] 3. During the inspection process, the tapered drill is stationary, and the objective lens of the white light interferometer can only inspect the corresponding inspection area. The tapered drill cannot be rotated one circle during the inspection process, resulting in the white light interferometer being unable to perform circumferential and all-round inspection of the entire inclined surface of the tapered drill. The inspection area is limited, and it is necessary to convert the uninspected area of the tapered drill multiple times to correspond to the objective lens of the white light interferometer before a comprehensive inspection can be performed, which consumes inspection time and has low inspection efficiency. Summary of the Invention

[0007] In view of the shortcomings of the prior art, the present invention aims to provide a special adapter device for a white light interferometer used in tapered drill processing.

[0008] To achieve the above object, the present invention provides the following technical solutions:

[0009] A special adapter device for a white light interferometer for tapered drill processing includes a white light interferometer. A tilting and fixing unit for fixing the tapered drill and rotating the tapered drill is provided on a sample stage of the white light interferometer. The tilting and fixing unit includes a base, a bottom plate, a calibration module, a cylinder, a motor, a toggle module, a mounting plate, a first fixing plate, a second fixing plate and two clamping plates. The base is mounted on the sample stage of the white light interferometer and is movably connected to the bottom plate. The cylinder is mounted on one end of the base and connected to the mounting plate. The motor is mounted on the bottom plate and arranged opposite to the cylinder. The first fixing plate is movably connected to the mounting plate. The second fixing plate is fixed to the bottom plate and corresponds to the motor. The two clamping plates are movably connected to the first fixing plate and the second fixing plate respectively for fixing the tapered drill. The toggle module is mounted on the output of the motor. At the output end, the toggle module cooperates with the splint on the second fixed plate to drive the tapered drill to rotate. The calibration module includes a mounting post, a semicircular plate, a pointer, a magnet block and a wedge block. One end of the mounting post includes a movable groove and a slide groove arranged on the inner wall of the bottom of the movable groove. The semicircular plate is rotatably connected in the movable groove. The horizontal surface of the semicircular plate contacts the inclined surface of the tapered drill. The arc surface of the semicircular plate corresponds to the bottom of the movable groove. The semicircular surface of the semicircular plate is provided with a number of scale lines arranged around the center of the semicircle. The magnet block is fixed to the other end of the mounting post and is magnetically connected to the bottom plate. The pointer is mounted on the magnet block and corresponds to the scale lines on the semicircular plate. The wedge block is movably connected to the movable groove, and the bottom of the wedge block is fixed with a protrusion slidably connected to the slide groove, and the top surface of the wedge block conflicts with the arc surface of the semicircular plate.

[0010] It is further configured that the toggle module includes a fixed block and an adjusting rod, the fixed block is provided with an adjusting screw hole threadedly connected to the adjusting rod, the splint on the second fixed plate is connected to a number of paddles arranged around the splint, the adjusting rod cooperates with the paddles, a magnet seat for fixing the motor is provided on the base plate, the magnet seat is magnetically connected to the base plate, two guide rods are provided on the splint on the second fixed plate, an elastic rubber block fixedly connected to the splint is fixed on the guide rod, a disc is embedded in the second fixed plate, the disc is rotatably connected to the second fixed plate through a rolling bearing, a guide hole threadedly connected to the guide rod is provided on the disc, a deformable silicone pad is fixed on the first fixed plate, and the silicone pad is connected to the splint on the first fixed plate.

[0011] It is further configured that a threaded hole is opened on the mounting plate, an adjusting screw is provided on the mounting plate and is threadedly connected to the threaded hole, and the first fixing plate is rotatably connected to the output end of the adjusting screw through a rolling bearing.

[0012] It is further configured that a rack is provided on both sides of the base, two gears are provided on the mounting plate that are respectively meshed with the two racks, the gears are rotatably connected to the mounting plate, a guide groove is provided on the base that cooperates with the bottom plate, and a plurality of first accommodating grooves are provided on the bottom inner wall of the guide groove, a first ball is movably connected in the first accommodating groove, the first ball extends out of the first accommodating groove and contacts the bottom of the bottom plate, and the bottom plate moves in the guide groove.

[0013] It is further configured that a second receiving groove is opened at the bottom of the mounting plate, a second ball is movably connected in the second receiving groove, the groove diameter of the second receiving groove is smaller than the diameter of the second ball, the second ball extends out of the groove of the second receiving groove and rolls on the bottom plate.

[0014] It is further configured that a connecting plate is fixed on the mounting plate, a through hole is opened on the connecting plate, a plurality of limiting grooves corresponding to the connecting plate are opened on the bottom plate, the limiting grooves cooperate with the through holes, and the plurality of limiting grooves are evenly arranged along the length direction of the bottom plate, and an L-shaped rod is provided on the connecting plate to be plugged into the through hole and the limiting groove.

[0015] It is further configured that a first shaft is provided on the gear, one end of the first shaft is fixedly connected to the bottom of the mounting plate, and the other end of the first shaft is rotationally connected to the gear through a rolling bearing.

[0016] It is further configured that the semicircular plate is provided with a second shaft rod corresponding to the inner walls on both sides of the movable groove, one end of the second shaft rod is rotatably connected to the corresponding inner wall of the movable groove through a rolling bearing, and the other end of the second shaft rod is fixedly connected to the semicircular plate through a rolling bearing.

[0017] It is further configured that a support plate for supporting the cylinder is connected to the sample stage of the white light interferometer.

[0018] By adopting the above technical solution, the beneficial effects of the present invention are:

[0019] 1. The tilt fixing unit designed for large-angle taper drills on the sample stage of the white-light interferometer can fix the inclined surface of the large-angle taper drill horizontally, optimize the sample posture, and keep the inclined surface area to be detected perpendicular to the objective lens of the white-light interferometer during the detection process. This improves the effective signal coverage of the inclined surface of the large-angle taper drill, avoids the detector's inability to receive sufficient reflected light when the inclination of the tapered drill surface is too large, resulting in data loss or increased error, and improves the detection accuracy of large-angle taper drills.

[0020] 2. The calibration module can measure large cone angles of tapered drills, making up for the low reliability of white light interferometers in measuring large cone angles of tapered drills. When measuring large cone angles of tapered drills, the white light interferometer does not need to adjust the sample stage tilt or use a high NA objective lens. The measurement operation is convenient, the detection cost is reduced, and there is no need to use other instruments for cone angle detection, which improves the detection efficiency. Compared with using other instruments to measure taper, the calibration module has a simple structure, low cost, and easy operation.

[0021] 3. After the inclined surface of the tapered drill is fixed horizontally by the inclined fixing unit, the tapered drill can be rotated one circle during the detection process. During the rotation of the tapered drill, the inclined surface area to be detected on the tapered drill always remains horizontal and perpendicular to the objective lens of the white light interferometer, which facilitates the white light interferometer to perform reliable circumferential and all-round detection of the inclined surface of the tapered drill, avoids the need to manually switch the detection area of the tapered drill multiple times due to the limited detection area, and improves the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Schematic diagram of the structure of an embodiment of the present invention.

[0023] Figure 2 This is a structural diagram of the calibration module.

[0024] Figure 3 It is a structural diagram of the cooperation between the mounting plate and the first fixing plate.

[0025] Figure 4 This is a schematic diagram of the enlarged structure at point A.

[0026] Figure 5 This is a schematic diagram of the enlarged structure at point B.

[0027] Figure 6 A schematic diagram of the structure for adjusting the coordination between the lever and the paddle.

[0028] Figure 7 It is a structural diagram of the cooperation between the base plate and the guide groove.

[0029] Figure 8 Schematic diagram of the structure of the gear and rack.

[0030] Figure 9 It is a structural diagram of the cooperation between the L-shaped rod and the limiting groove.

[0031] Figure: White light interferometer 100, tapered drill 200, base 1, bottom plate 2, calibration module 3, cylinder 4, motor 5, toggle module 6, mounting plate 7, first fixing plate 8, second fixing plate 9, clamping plate 10, mounting column 301, semicircular plate 302, pointer 303, magnet block 304, wedge block 305, movable groove 3011, slide groove 3012, protrusion 3051, fixing block 601, adjustment lever 602, adjustment screw hole 601 1. Pick 11, magnet base 12, guide rod 13, elastic rubber block 131, disc 14, guide hole 141, silicone pad 15, threaded hole 701, adjusting screw 702, rack 16, gear 17, guide groove 18, first accommodating groove 19, first ball 20, second accommodating groove 21, second ball 23, connecting piece 24, through hole 25, limiting groove 26, L-shaped rod 27, first shaft rod 28, second shaft rod 29, support plate 30. DETAILED DESCRIPTION

[0032] Reference Figures 1 to 4 The embodiments of the present invention are further described.

[0033] A special adapter device for a white light interferometer for tapered drill processing includes a white light interferometer 100. A tilting and fixing unit for fixing and rotating a tapered drill 200 is provided on a sample stage of the white light interferometer 100. The tilting and fixing unit includes a base 1, a base plate 2, a calibration module 3, a cylinder 4, a motor 5, a toggle module 6, a mounting plate 7, a first fixing plate 8, a second fixing plate 9, and two clamping plates 10. The base 1 is mounted on the sample stage of the white light interferometer 100 and is movably connected to the base plate 2. The cylinder 4 is mounted at one end of the base 1, and the output end of the cylinder 4 is fixedly connected to the mounting plate 7. The mounting plate 7 moves on the base 1. The motor 5 is mounted on the base plate 2 and is arranged opposite to the cylinder 4.

[0034] The two splints 10 are respectively connected to the first fixed plate 8 and the second fixed plate 9. A threaded hole 701 is opened on the mounting plate 7, and an adjusting screw 702 threadedly connected to the threaded hole 701 is provided on the mounting plate 7. The first fixed plate 8 is rotatably connected to the output end of the adjusting screw 702 through a rolling bearing. A deformable silicone pad 15 is fixed on the first fixed plate 8, and the silicone pad 15 is connected to the splint 10 on the first fixed plate 8. The second fixed plate 9 is fixed on the base plate 2 and corresponds to the motor 5. Two guide rods 13 are provided on the splint 10 on the second fixed plate 9. An elastic rubber block 131 fixedly connected to the corresponding splint 10 is fixed on the guide rod 13. A disc 14 is embedded on the second fixed plate 9. The disc 14 is rotatably connected to the second fixed plate 9 through a rolling bearing. A guide hole 141 threadedly connected to the guide rod 13 is opened on the disc 14. The two splints 10 are used together to fix the tapered drill 200.

[0035] The toggle module 6 includes a fixed block 601 and an adjusting lever 602. The fixed block 601 is installed at the output end of the motor 5. An adjusting screw hole 6011 is provided on the fixed block 601 and is threadedly connected to the adjusting lever 602. A plurality of paddles 11 arranged around the plywood 10 are connected to the paddle 10 on the second fixed plate 9. The adjusting lever 602 cooperates with the paddles 11 to drive the tapered drill 200 to rotate. A magnet seat 12 for fixing the motor 5 is provided on the base plate 2. The magnet seat 12 is magnetically connected to the base plate 2. The base plate 2 is made of metal that can be magnetically connected to the magnet seat 12.

[0036] Working principle: Place the tapered drill 200 between the two clamping plates 10, adjust the inclined surface area to be detected on one side of the tapered drill 200 to be horizontal, so that the detection area of the tapered drill 200 is perpendicular to the objective lens of the white light interferometer 100, optimize the sample posture, and facilitate measurement. Then, the adjusted tapered drill 200 is fixed by the two clamping plates 10. Specifically, the cylinder 4 drives the mounting plate 7 to move on the base plate 2, so that the two clamping plates 10 are close to each other, so that the two clamping plates 10 are in conflict with the end faces of the tapered drill 200 to perform a preliminary clamping and fixing of the tapered drill 200. Since the inclined surface on one side of the tapered drill 200 is horizontal, the end faces of the two ends of the tapered drill 200 are in an inclined state, and the two guide rods 13 on the clamping plate 10 on the second fixed plate 9 are rotated, and the moving distances of the two guide rods 13 are different, so that the clamping plate 10 on the second fixed plate 9 is in an inclined state and fits the corresponding end faces of the tapered drill 200, and the adjusting screw 702 is rotated to make the first fixed plate 8 The clamping plate 10 continues to move toward the motor 5. At this time, the clamping plate 10 on the first fixed plate 8 is further squeezed to deform the silicone pad 15, so that the clamping plate 10 on the first fixed plate 8 is tilted and fits the corresponding end face of the tapered drill 200, so that the two clamping plates 10 fit the two inclined end faces of the tapered drill 200 to further better fix the tapered drill 200, improve the fixation stability of the tapered drill 200, and realize that the tilt fixing unit designed for the large-cone-angle tapered drill 200 on the sample stage of the white light interferometer 100 can fix the inclined surface of the large-cone-angle tapered drill 200 horizontally, so that the tapered drill 200 keeps its inclined surface area to be detected perpendicular to the objective lens of the white light interferometer 100 during the detection process, optimizes the sample posture, improves the effective signal coverage of the inclined surface of the large-cone-angle tapered drill 200, and avoids the inclination of the inclined surface of the tapered drill 200 being too large, resulting in data loss or increased error, thereby improving the detection accuracy of the large-cone-angle tapered drill 200.

[0037] During the measurement process, the motor 5 works to drive the adjusting lever 602 on the fixed block 601 to rotate and the disc 14 is connected to the second fixed plate 9, so that when the motor 5 drives the adjusting lever 602 to rotate, the adjusting lever 602 moves the paddle 11 on the clamping plate 10 on the second fixed plate 9, thereby driving the clamping plate 10 corresponding to the motor 5 to rotate, and the clamping plate 10 on the first fixed plate 8 is connected to the adjusting screw 702 through the fixed plate rotation, so that the tapered drill 200 fixed by the two clamping plates 10 rotates circumferentially, which is convenient for the white light interferometer 100 to perform a comprehensive circumferential detection, and the circumferential rotation of the tapered drill 200 is completed. During the detection process, the surface detection area of the tapered drill 200 corresponding to the objective lens on the white light interferometer 100 is always in a horizontal state, so that the detection area of the tapered drill 200 is perpendicular to the objective lens, ensuring the detection accuracy of the tapered drill 200 in a comprehensive circumferential detection. After the tilt fixing unit fixes the inclined surface of the tapered drill 200 horizontally, the tapered drill 200 can be rotated one circle during the detection process, which facilitates the white light interferometer 100 to perform reliable circumferential and comprehensive detection of the inclined surface of the tapered drill 200, avoids the need to manually switch the detection area of the tapered drill 200 multiple times due to limited detection area, and improves the detection efficiency of the detection equipment for processing the tapered drill 200 of the present invention.

[0038] When measuring the tapered drill 200 with different cone angles, in order to keep the inclined surface of the area to be detected on the tapered drill 200 horizontal and make the area to be detected on the tapered drill 200 perpendicular to the objective lens on the white light interferometer 100, it is necessary to adjust the tapered drill 200 so that its end faces are inclined to different degrees. Therefore, it is necessary to tilt the two clamping plates 10 to different degrees to clamp and fix the tapered drill 200 with different cone angles. The magnet seat 12 is magnetically connected to the base plate 2, and the position of the motor 5 on the base plate 2 can be changed so that the position of the motor 5 on the base plate 2 can be adjusted according to the tilt of the clamping plate 10 on the second fixing plate 9. The position of the adjustment lever 602 corresponds to the paddle 11, and the adjustment lever 602 threadedly connected to the adjustment screw hole 6011 is rotated to raise or lower it, so that the adjustment lever 602 always maintains cooperation with the paddle 11, so that no matter how the tilt degree of the splint 10 corresponding to the motor 5 is, the adjustment lever 602 can move the paddle 11 under the action of the motor 5 to rotate the splint 10, thereby realizing the circumferential rotation of the tapered drill 200 with different taper angles for comprehensive measurement, thereby improving the detection versatility of the detection equipment for processing the tapered drill 200 of the present invention, and having high practicality.

[0039] The calibration module 3 includes a mounting post 301, a semicircular plate 302, a pointer 303, a magnet block 304 and a wedge block 305. One end of the mounting post 301 includes a movable groove 3011 and a slide groove 3012 arranged on the inner wall of the bottom of the movable groove 3011. The semicircular plate 302 is rotatably connected in the movable groove 3011. The horizontal surface of the semicircular plate 302 contacts the inclined surface of the tapered drill 200. The arc surface of the semicircular plate 302 corresponds to the bottom of the movable groove 3011. The semicircular surface of the semicircular plate 302 is provided with a plurality of scale lines arranged around the center of the semicircle. The magnet block 304 is fixed. At the other end of the mounting column 301, it is magnetically connected to the base plate 2, so that the calibration module 3 can move on the base plate 2 to contact the inclined surface of the tapered drill 200 for measuring the taper angle of the tapered drill 200. The pointer 303 is mounted on the magnet block 304 and corresponds to the scale line on the semicircular plate 302. The wedge block 305 is movably connected to the movable groove 3011, and a protrusion 3051 is fixed at the bottom of the wedge block 305 to be slidably connected to the slide groove 3012 to facilitate the movement of the wedge block 305 in the movable groove 3011. The top surface of the wedge block 305 conflicts with the arc surface of the semicircular plate 302.

[0040] After the tapered drill 200 is fixed, the position of the mounting post 301 on the base plate 2 is adjusted according to the taper angle of the tapered drill 200, and the mounting post 301 is fixed in the adjusted position by the magnetic connection between the magnet block 304 and the base plate 2. Thus, by adjusting the position of the mounting post 301 on the base plate 2, the semicircular plate 302 is rotated so that the horizontal surface of the semicircular plate 302 rotates to fit the inclined surface area of the tapered drill 200 opposite to the area to be detected. At this time, the rotation angle of the semicircular plate 302 is twice the taper angle of the tapered drill 200 so that the inclined surface area of the tapered drill 200 opposite to the area to be detected can remain in fit with the horizontal surface of the semicircular plate 302. At this time, observe that the pointer 303 points to the scale line of the initial position on the semicircular plate 302 The scale line pointed by the pointer 303 changes in value after the semicircular plate 302 rotates at an angle, and 1 / 2 of the change value is taken as the cone angle of the tapered drill 200, thereby achieving the purpose of measuring the cone angle of the tapered drill 200, realizing that the calibration module 3 can perform large cone angle measurement of the tapered drill 200, and making up for the disadvantage of low reliability of the white light interferometer 100 in measuring large cone angles of the tapered drill 200. When measuring the tapered drill 200 with a large cone angle, the white light interferometer 100 does not need to adjust the tilt of the sample stage or use a high NA objective lens, the measurement operation is convenient, the detection cost is reduced, and there is no need to use other instruments for cone angle detection, thereby improving the detection efficiency. Compared with using other instruments to measure the taper, the calibration module 3 has a simple structure, low use cost, and is easy to use and operate.

[0041] For measuring the cone angle of drills 200 with different tapers, the inclined surface area of the cone drill 200 opposite to the area to be detected is kept in contact with the horizontal surface of the semicircular plate 302. The cone angle of drills 200 with different tapers can be measured by obtaining the value of the corresponding scale line change after the semicircular plate 302 is rotated, thereby improving the practicality of the calibration module 3.

[0042] After the semicircular plate 302 is rotated to a certain angle so that the inclined surface area of the tapered drill 200 opposite to the area to be detected is in contact with the horizontal surface of the semicircular plate 302, the wedge block 305 is moved at the bottom of the movable groove 3011 so that the top surface of the wedge block 305 comes into contact with the curved surface of the semicircular plate 302, thereby fixing the semicircular plate 302 after the rotation angle, making it easier to read the scale line change value and preventing the semicircular plate 302 from shaking and affecting the reading.

[0043] There is a rack 16 on both sides of the base 1, and two gears 17 are provided on the mounting plate 7 that mesh with the two racks 16 respectively. The gear 17 is rotatably connected to the mounting plate 7. A guide groove 18 is provided on the base 1 to cooperate with the bottom plate 2. The bottom inner wall of the guide groove 18 is provided with a plurality of first receiving grooves 19. A first ball 20 is movably connected in the first receiving groove 19. The first ball 20 extends out of the first receiving groove 19 and contacts the bottom of the bottom plate 2. The bottom plate 2 moves in the guide groove 18. A second receiving groove 21 is provided at the bottom of the mounting plate 7. The second receiving groove 2 1 is movably connected with a second ball 23. The diameter of the notch of the second accommodating groove 21 is smaller than the diameter of the second ball 23. The second ball 23 extends out of the notch of the second accommodating groove 21 and rolls on the bottom plate 2. A connecting piece 24 is fixed to the mounting plate 7. The connecting piece 24 is provided with a through hole 25. The bottom plate 2 is provided with a plurality of limiting grooves 26 corresponding to the connecting piece 24. The limiting grooves 26 cooperate with the through holes 25. The plurality of limiting grooves 26 are evenly arranged along the length direction of the bottom plate 2. The connecting piece 24 is provided with an L-shaped rod 27 that is plugged into the through hole 25 and the limiting groove 26.

[0044] When the cylinder 4 pushes the mounting plate 7 to move on the base plate 2, the gears 17 on both sides of the mounting plate 7 engage with the racks 16 on both sides of the base 1, and the gears 17 are connected to the rotation of the mounting plate 7 to achieve smooth linear movement of the mounting plate 7, thereby avoiding the displacement of the mounting plate 7 during movement, which causes the clamping plates 10 of the two clamping units to be misaligned and affects the fixation of the tapered drill 200. The setting of the second ball 23 reduces the friction between the bottom of the mounting plate 7 and the base plate 2, making it easier for the mounting plate 7 to move on the base plate 2.

[0045] After the mounting plate 7 moves, the L-shaped rod 27 is plugged into the through hole 25 on the connecting piece 24 and the limiting groove 26 at the corresponding position to achieve the fixation of the mounting plate 7 on the base 1, so that the cylinder 4 can drive the base plate 2 to move horizontally in the guide groove 18 through the mounting plate 7, so that the tapered drill 200 fixed by the two clamping plates 10 on the base plate 2 moves horizontally, which is convenient for the objective lens of the white light interferometer 100 to perform comprehensive measurement of the tapered drill 200 with a longer length, and there is no need to manually change the detection area of the tapered drill 200 in the horizontal direction, further improving the detection versatility of the white light interferometer 100. The setting of the first ball 20 reduces the friction between the base plate 2 and the inner wall of the bottom of the guide groove 18, so that the base plate 2 moves more smoothly in the guide groove 18.

[0046] A first shaft 28 is provided on the gear 17, one end of the first shaft 28 is fixedly connected to the bottom of the mounting plate 7, and the other end of the first shaft 28 is rotationally connected to the gear 17 through a rolling bearing, so as to realize the rotational connection of the gear 17 at the bottom of the mounting plate 7.

[0047] A second shaft rod 29 is provided on the semicircular plate 302, which corresponds to the inner walls on both sides of the movable groove 3011 respectively. One end of the second shaft rod 29 is rotatably connected to the corresponding inner wall of the movable groove 3011 through a rolling bearing, and the other end of the second shaft rod 29 is fixedly connected to the semicircular plate 302 through a rolling bearing, so as to realize the rotational connection of the semicircular plate 302 in the movable groove 3011.

[0048] A support plate 30 for supporting the cylinder 4 is connected to the sample stage of the white light interferometer 100 , so as to enhance the installation stability of the cylinder 4 .

[0049] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0050] In the present invention, unless otherwise expressly specified or limited, terms such as "disposed," "installed," "connected," "connected," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; they may refer to mechanical connections, direct connections, or indirect connections through an intermediate medium; they may refer to internal communication between two elements or interaction between two elements. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0051] The control method of the present invention is automatic control through a controller. The control circuit of the controller can be implemented by simple programming by a person skilled in the art. The provision of power is also common knowledge in the art. The present invention is mainly used to protect mechanical devices, so the control method and circuit connection are not explained in detail in the present invention.

[0052] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Common changes and substitutions made by those skilled in the art within the scope of the technical solution of the present invention should be included in the protection scope of the present invention.

Claims

1. A special adapter device for a white light interferometer for tapered drill processing, comprising a white light interferometer (100), characterized in that: A tilting and fixing unit for fixing the tapered drill (200) and rotating the tapered drill (200) is provided on the sample stage of the white light interferometer (100); The tilt fixing unit comprises a base (1), a base plate (2), a calibration module (3), a cylinder (4), a motor (5), a toggle module (6), a mounting plate (7), a first fixing plate (8), a second fixing plate (9) and two clamping plates (10), wherein the base (1) is mounted on a sample stage of a white light interferometer (100) and is movably connected to the base plate (2), the cylinder (4) is mounted on one end of the base (1) and is connected to the mounting plate (7), the motor (5) is mounted on the base plate (2) and is arranged opposite to the cylinder (4), the first fixing plate (8) is movably connected to the mounting plate (7), the second fixing plate (9) is fixed on the base plate (2) and corresponds to the motor (5), and the two clamping plates (10) are movably connected to the first fixing plate (8) and the second fixing plate (9) for fixing the taper drill (200); The toggle module (6) is installed at the output end of the motor (5), and the toggle module (6) cooperates with the clamping plate (10) on the second fixed plate (9) to drive the tapered drill (200) to rotate; The calibration module (3) includes a mounting post (301), a semicircular plate (302), a pointer (303), a magnet block (304) and a wedge block (305). One end of the mounting post (301) includes a movable groove (3011) and a slide groove (3012) arranged on the inner wall of the bottom of the movable groove (3011). The semicircular plate (302) is rotatably connected in the movable groove (3011). The horizontal surface of the semicircular plate (302) contacts the inclined surface of the tapered drill (200). The arc surface of the semicircular plate (302) corresponds to the bottom of the movable groove (3011). The semicircular surface of the plate (302) is provided with a plurality of scale lines arranged around the center of the semicircle, the magnet block (304) is fixed to the other end of the mounting column (301) and is magnetically connected to the bottom plate (2), the pointer (303) is mounted on the magnet block (304) and corresponds to the scale lines on the semicircular plate (302), the wedge block (305) is movably connected to the movable groove (3011), and a protrusion (3051) slidably connected to the slide groove (3012) is fixed to the bottom of the wedge block (305), and the top surface of the wedge block (305) contacts the arc surface of the semicircular plate (302).

2. The special adapter device for a white light interferometer for tapered drill processing according to claim 1, characterized in that: The toggle module (6) includes a fixed block (601) and an adjusting toggle rod (602), the fixed block (601) is provided with an adjusting screw hole (6011) threadedly connected to the adjusting toggle rod (602), a clamping plate (10) on the second fixed plate (9) is connected to a plurality of toggle pieces (11) arranged around the clamping plate (10), the adjusting toggle rod (602) cooperates with the toggle pieces (11), a magnet seat (12) for fixing the motor (5) is provided on the bottom plate (2), the magnet seat (12) is magnetically connected to the bottom plate (2), and the clamping plate (10) on the second fixed plate (9) is connected to the adjusting screw hole (6011) and the adjusting screw hole (6011) is threadedly connected to the adjusting screw hole (6011), a plurality of toggle pieces (11) arranged around the clamping plate (10) are connected to the clamping plate (10), the adjusting toggle rod (602) cooperates with the toggle pieces (11), a magnet seat (12) for fixing the motor (5) is provided on the bottom plate (2), the magnet seat (12) is magnetically connected to the bottom plate (2), and the clamping plate (10) on the second fixed plate (9) is connected to the adjusting screw hole (6011) and the adjusting screw hole (6011) is connected to the adjusting screw hole (6011) and the adjusting screw hole (6011) Two guide rods (13) are provided on the plate (10), and elastic rubber blocks (131) fixedly connected to the splint (10) are fixed on the guide rods (13). A disc (14) is embedded on the second fixed plate (9), and the disc (14) is rotatably connected to the second fixed plate (9) through a rolling bearing. A guide hole (141) threadedly connected to the guide rods (13) is opened on the disc (14). A deformable silicone pad (15) is fixed on the first fixed plate (8), and the silicone pad (15) is connected to the splint (10) on the first fixed plate (8).

3. The special adapter device for a white light interferometer for tapered drill processing according to claim 2, characterized in that: The mounting plate (7) is provided with a threaded hole (701), and the mounting plate (7) is provided with an adjusting screw (702) threadedly connected to the threaded hole (701). The first fixing plate (8) is rotatably connected to the output end of the adjusting screw (702) via a rolling bearing.

4. The special adapter device for a white light interferometer for tapered drill processing according to claim 3, characterized in that: A rack (16) is provided on both sides of the base (1), and two gears (17) are provided on the mounting plate (7) and are respectively engaged with the two racks (16). The gears (17) are rotatably connected to the mounting plate (7). A guide groove (18) is provided on the base (1) and is matched with the bottom plate (2). The bottom inner wall of the guide groove (18) is provided with a plurality of first receiving grooves (19). A first ball (20) is movably connected in the first receiving groove (19). The first ball (20) extends out of the first receiving groove (19) and contacts the bottom of the bottom plate (2). The bottom plate (2) moves in the guide groove (18).

5. The special adapter device for a white light interferometer for tapered drill processing according to claim 4, characterized in that: A second receiving groove (21) is formed at the bottom of the mounting plate (7), and a second ball (23) is movably connected in the second receiving groove (21). The diameter of the notch of the second receiving groove (21) is smaller than the diameter of the second ball (23). The second ball (23) extends out of the notch of the second receiving groove (21) and rolls on the bottom plate (2).

6. The special adapter device for a white light interferometer for tapered drill processing according to claim 5, characterized in that: A connecting piece (24) is fixed on the mounting plate (7), a through hole (25) is formed on the connecting piece (24), a plurality of limiting grooves (26) corresponding to the connecting piece (24) are formed on the bottom plate (2), the limiting grooves (26) cooperate with the through hole (25), and the plurality of limiting grooves (26) are evenly arranged along the length direction of the bottom plate (2), and an L-shaped rod (27) is provided on the connecting piece (24) and is plugged into the through hole (25) and the limiting groove (26).

7. The special adapter device for a white light interferometer for tapered drill processing according to claim 6, characterized in that: The gear (17) is provided with a first shaft (28), one end of the first shaft (28) is fixedly connected to the bottom of the mounting plate (7), and the other end of the first shaft (28) is rotatably connected to the gear (17) via a rolling bearing.

8. The special adapter device for a white light interferometer for tapered drill processing according to claim 7, characterized in that: The semicircular plate (302) is provided with a second shaft (29) corresponding to the inner walls on both sides of the movable groove (3011), one end of the second shaft (29) is rotatably connected to the corresponding inner wall of the movable groove (3011) through a rolling bearing, and the other end of the second shaft (29) is fixedly connected to the semicircular plate (302) through a rolling bearing.

9. The special adapter device for a white light interferometer for tapered drill processing according to claim 8, characterized in that: A support plate (30) for supporting the cylinder (4) is connected to the sample stage of the white light interferometer (100).

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