Nano polishing solution and preparation method thereof

Abstract

The invention discloses a nano polishing solution which is characterized by comprising the following components in parts by mass: 8-30 parts of aluminum oxide micro powder, 0.01-1.8 parts of a surfactant, 2-6 parts of a dispersing agent, 0.5-5 parts of a pH regulator and 200 parts of distilled water, the particle size of the aluminum oxide micro powder is 80-300 nm, and the particle size of the surface active agent is 1-3 nm. The invention belongs to the technical field of mechanical polishing, and particularly relates to a nano polishing solution and a preparation method thereof.

Description

Technical Field

[0001] The invention belongs to the technical field of mechanical polishing, and in particular relates to a nano polishing liquid and a preparation method thereof. Background Art

[0002] Chemical mechanical polishing technology, as a surface finishing technology that can provide overall planarization, has been widely used in the flattening of surfaces such as integrated circuit chips, computer hard disks, and micro-mechanical systems. Polishing fluid is one of the keys to chemical mechanical polishing technology, and its performance directly affects the surface quality of the polished workpiece. The polishing fluid currently used in high-precision polishing has increasingly higher requirements for the particle size, morphology, and uniformity of the powder's particle size distribution. The finer the particles, the closer they are to spherical, and the more uniform the distribution, the better the polishing effect. However, some existing polishing fluids cannot better fuse nano-alumina powder and distilled water, and agglomeration is prone to occur. Summary of the Invention

[0003] In order to solve the above problems, the present invention provides a nano-polishing liquid with good dissolution effect and a preparation method thereof.

[0004] In order to achieve the above functions, the technical solution adopted by the present invention is as follows: a nano-polishing liquid, including aluminum oxide micropowder, surfactant, dispersant, pH regulator and distilled water, specifically including the following parts by mass: 8 to 30 parts of aluminum oxide micropowder, 0.01 to 1.8 parts of surfactant, 2 to 6 parts of dispersant, 0.5 to 5 parts of pH regulator and 200 parts of distilled water, and the particle size of the aluminum oxide micropowder is 80-300nm.

[0005] Furthermore, the surfactant is sodium lauryl sulfate.

[0006] Furthermore, the dispersant is any one or more of polyethylene glycol, sodium hexametaphosphate, sodium polyacrylate, and sodium polypropylene sulfonate.

[0007] Furthermore, the pH adjuster is any one or more of citric acid, acetic acid, oxalic acid, distilled salicylic acid, triethanolamine and tetramethylammonium hydroxide.

[0008] The present invention also provides another technical solution: A method for preparing a nano-polishing liquid, a. Pour 8-30 parts of alumina powder into a container containing 200 parts of distilled water in a water bath. Maintain the distilled water at 50°C. Stir while pouring until the alumina powder is completely dispersed in the distilled water. b. Take 0.01-1.8 parts of surfactant and pour it into the solution in step a. Stir to dissolve. c. Take 2-6 parts of dispersant and pour it into the solution in step b. Stir and dissolve. d. Emulsify the solution obtained in step c multiple times to better disperse the alumina powder; e. After the solution has cooled to room temperature, add a pH adjuster to adjust the pH to 7-9; f. Seal and fill the prepared solution.

[0009] The present invention adopts the above method to achieve the following beneficial effects: The present invention provides a nano-polishing liquid and a preparation method thereof. The formula of the present invention does not contain heavy metals and will not cause heavy metal pollution to the environment, which is environmentally friendly and healthy. The polishing particles are small in size and have good polishing effect; The formula of the present invention is evenly dispersed and the probability of agglomeration is reduced. DETAILED DESCRIPTION

[0010] The technical solution of the present invention will be described clearly and completely below. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0011] A nano-polishing liquid comprises aluminum oxide micropowder, a surfactant, a dispersant, a pH regulator and distilled water, specifically comprising the following parts by weight: 8 to 30 parts of aluminum oxide micropowder, 0.01 to 1.8 parts of surfactant, 2 to 6 parts of dispersant, 0.5 to 5 parts of pH regulator and 200 parts of distilled water, wherein the particle size of the aluminum oxide micropowder is 80 to 300 nm.

[0012] The surfactant is sodium lauryl sulfate.

[0013] The dispersant is any one or more of polyethylene glycol, sodium hexametaphosphate, sodium polyacrylate, and sodium polypropylene sulfonate.

[0014] The pH regulator is any one or more of citric acid, acetic acid, oxalic acid, distilled salicylic acid, triethanolamine and tetramethylammonium hydroxide.

[0015] A method for preparing a nano-polishing liquid, the specific steps of which are: Example

[0016] a. Pour 10 parts of alumina powder into a container containing 200 parts of distilled water in a water bath, maintaining the distilled water temperature at 50°C. Stir while pouring until the alumina powder is completely dispersed in the distilled water. b. Take 0.02 parts of surfactant and pour it into the solution in step a. Stir to dissolve. c. Take 3 parts of dispersant, pour it into the solution in b, and stir to dissolve; d. Emulsify the solution obtained in step c multiple times to better disperse the alumina powder; e. After the solution has cooled to room temperature, add a pH adjuster to adjust the pH to 7; f. Seal and fill the prepared solution. Example

[0017] a. Pour 28 parts of alumina powder into a container containing 200 parts of distilled water in a water bath. Maintain the distilled water at 50°C. Stir while pouring until the alumina powder is completely dispersed in the distilled water. b. Take 1.8 parts of surfactant and pour it into the solution in step a. Stir to dissolve. c. Take 6 parts of dispersant and pour it into the solution in b. Stir and dissolve. d. Emulsify the solution obtained in step c multiple times to better disperse the alumina powder; e. After the solution has cooled to room temperature, add a pH adjuster to adjust the pH to 8.8; f. Seal and fill the prepared solution. Example

[0018] a. Pour 14 parts of alumina powder into a container containing 200 parts of distilled water in a water bath, maintaining the distilled water at 50°C. Stir while pouring until the alumina powder is completely dispersed in the distilled water. b. Take 1.0 part of surfactant and pour it into the solution in step a. Stir to dissolve. c. Take 4 parts of dispersant and pour it into the solution in b. Stir and dissolve. d. Emulsify the solution obtained in step c multiple times to better disperse the alumina powder; e. After the solution has cooled to room temperature, add a pH adjuster to adjust the pH to 8; f. Seal and fill the prepared solution.

[0019] After comparison, the best ratio for uniform dispersion and low agglomeration is: 14 parts of alumina powder, 1.0 part of surfactant, 4 parts of dispersant and 200 parts of distilled water, and the solution pH is 8.

[0020] The above description of the present invention and its embodiments is non-limiting. The description only shows some embodiments of the present invention, and the actual method is not limited thereto. In short, if a person skilled in the art is inspired by the above and, without departing from the purpose of the present invention, designs methods and embodiments similar to the technical solution without inventiveness, they shall fall within the scope of protection of the present invention.

Claims

1. A nano-polishing liquid, characterized in that: The polishing liquid includes aluminum oxide micropowder, a surfactant, a dispersant, a pH regulator and distilled water, specifically including the following parts by mass: 8 to 30 parts of aluminum oxide micropowder, 0.01 to 1.8 parts of surfactant, 2 to 6 parts of dispersant, 0.5 to 5 parts of pH regulator and 200 parts of distilled water, wherein the particle size of the aluminum oxide micropowder is 80 to 300 nm.

2. A nano-polishing liquid according to claim 1, characterized in that: The surfactant is sodium lauryl sulfate.

3. A nano-polishing liquid according to claim 1, characterized in that: The dispersant is any one or more of polyethylene glycol, sodium hexametaphosphate, sodium polyacrylate, and sodium polypropylene sulfonate.

4. A nano-polishing liquid according to claim 1, characterized in that: The pH regulator is any one or more of citric acid, acetic acid, oxalic acid, distilled salicylic acid, triethanolamine and tetramethylammonium hydroxide.

5. The method for preparing a nano-polishing liquid according to claim 1, wherein: a. Pour 8-30 parts of alumina powder into a container containing 200 parts of distilled water in a water bath. Maintain the distilled water at 50°C. Stir while pouring until the alumina powder is completely dispersed in the distilled water. b. Take 0.01-1.8 parts of surfactant, pour it into the solution in step a, and stir to dissolve; c. Take 2-6 parts of dispersant and pour it into the solution in step b. Stir and dissolve. d. Emulsify the solution obtained in step c multiple times to better disperse the alumina powder; e. After the solution has cooled to room temperature, add a pH adjuster to adjust the pH to 7-9; f. Seal and fill the prepared solution.