Vacuum pump with vortex rotor and spiral blade

Abstract

The invention belongs to the technical field of vacuum pumps, and particularly relates to a vacuum pump with a vortex rotor and a spiral blade. In order to overcome the defect that airflow of an existing vortex vacuum pump spirally moves in the radial direction, the technical scheme is adopted as follows: the vacuum pump with the vortex rotor comprises a stator and a rotor, the stator comprises a cylinder, an air inlet is formed in one end of the cylinder, and an air outlet is formed in the other end of the cylinder; the rotor is provided with a spiral groove; the spiral blade is positioned in the cylinder body; the spiral blade is located in the spiral groove, and the spiral blade and the spiral groove extend in the axial direction of the barrel. The rotor is whirled; the spiral blade can move relative to the cylinder body; the width of the spiral groove is larger than the thickness of the spiral blade. The invention has the beneficial effects that the spiral blades of the stator and the spiral grooves of the rotor extend along the axial direction of the cylinder body, so that the axial size can be larger, the efficiency is higher and / or the stability is better; the spiral blades can move relative to the cylinder body, and interference between the rotor and the spiral blades can be avoided or reduced through movement of the spiral blades.

Description

Technical Field

[0001] The present invention belongs to the technical field of vacuum pumps, and in particular relates to a vacuum pump with a vortex rotor and spiral blades. Background Art

[0002] The fixed scroll of a scroll vacuum pump is called the fixed disk, while the rotating scroll is called the rotating disk. The rotating disk does not rotate on its own but instead orbits in a translational motion within a certain radius of gyration. As the rotating disk orbits in translation, an intake chamber and a compression chamber are formed between the two scrolls. After the gas is drawn in, the volume of the working chamber decreases as the rotor moves, and the gas is discharged from the outer ring toward the center, completing the suction, compression, and exhaust processes continuously.

[0003] Given the many advantages of vortex vacuum pumps, the applicant designed a vacuum pump with a vortex rotor. The rotor features spiral grooves and the stator is equipped with spiral blades. The rotor's vortex motion creates a vacuum. While the rotor in this vacuum pump also vortexes, unlike conventional vortex vacuum pumps, where the airflow spirals radially inward, the airflow instead spirals axially.

[0004] During the research and development process, the applicant discovered that the vortexing rotor interfered seriously with the spiral blades, affecting the operation of the vacuum pump. This was because when the cross-section of the spiral groove and the blades was the same and both were stationary, the spiral blades were just embedded in the spiral grooves. When the rotor began to vortex, it was obvious that the motion trajectory of the spiral grooves did not coincide with the blades, making interference inevitable.

[0005] Therefore, there is a need to avoid or reduce the interference between the rotor and the spiral blades of a vacuum pump that transmits this special airflow axial spiral motion.

[0006] While vortex vacuum pumps offer many advantages, such as oil-free operation and low noise, they also suffer from the following shortcomings: 1. The rotating and stationary discs of existing vortex vacuum pumps are sealed with sealing strips, which wear out during use and require regular replacement. Even with high-quality sealing strips, replacement is typically required every six months to a year, and high-quality sealing strips are typically more expensive. 2. In vortex vacuum pumps, gas moves radially from the outer ring toward the center. Due to the limited radial dimension, the ultimate vacuum level is low. When the radial dimension is larger, not only does the pump lose its small size advantage, but stability is also poor. 3. Existing vortex vacuum pumps have weak dust and water vapor handling capabilities. Summary of the Invention

[0007] The present invention addresses the shortcomings of existing vortex vacuum pumps, where the airflow in a radial spiral motion requires regular replacement of the sealing strip between the moving and stationary discs. A vacuum pump with a vortex rotor is provided. Unlike existing vortex vacuum pumps, the airflow in an axial spiral motion retains the advantages of a vortex vacuum pump, such as being oil-free and free of wear and tear. The invention also reduces interference between the rotor and blades. The present invention also provides a spiral blade for use in such a vacuum pump.

[0008] To achieve the above object, the present invention adopts the following technical solution: a vacuum pump with a vortex rotor, the vacuum pump with a vortex rotor comprising:

[0009] The stator comprises a cylinder, wherein one end of the cylinder is provided with an air inlet and the other end is provided with an air outlet;

[0010] The rotor is provided with spiral grooves;

[0011] The spiral blade is located in the cylinder;

[0012] The spiral blade is located in the spiral groove, and both the spiral blade and the spiral groove extend along the axial direction of the cylinder;

[0013] Among them, the rotor vortex;

[0014] The width of the spiral groove is greater than the thickness of the spiral blade, and the size difference between the width of the spiral groove and the thickness of the spiral blade gradually increases radially from the inside to the outside.

[0015] The vacuum pump with a vortex rotor of the present invention has advantages of oil-free and other advantages of a vortex vacuum pump. The stator's spiral blades and the rotor's spiral grooves both extend axially along the barrel, allowing for a larger axial dimension than existing vortex vacuum pumps. This allows for a balanced vacuum limit and stability compared to increased radial dimensions. The width of the spiral grooves is greater than the thickness of the spiral blades, thereby avoiding or reducing interference between the rotor and the spiral blades. The dynamic sealing strip between the stator and rotor discs of existing vortex vacuum pumps can be omitted. The gradual increase is preferably continuous (without sudden changes), or can be a stepwise increase.

[0016] As an improvement, the spiral grooves have equal widths, the spiral blades have unequal thicknesses, the spiral grooves and the spiral blades have the same pitch, the thickness of the spiral blades increases radially from the inside to the outside, and the difference in thickness at both radial ends is proportional to the pitch and / or eccentricity. The difference in thickness at both radial ends of the spiral blades is proportional to the pitch and / or eccentricity, and is aimed at vacuum pumps with different pitches or eccentricities. When the pitch or eccentricity of the vacuum pump increases, the difference in thickness at both radial ends of the spiral blades also increases. The size difference is proportional to the pitch and / or eccentricity, that is, there are three situations: 1. The size difference is proportional to the pitch and is not affected by the eccentricity; 2. The size difference is proportional to the eccentricity and is not affected by the pitch; 3. The size difference is proportional to both the pitch and the eccentricity (usually this situation).

[0017] As an improvement, the cross-section of the spiral blade is a right-angled trapezoid, the right-angled side of the right-angled trapezoid faces the air inlet, the oblique side faces the air outlet, the shorter upper base side faces inward, the longer lower base side faces outward, the right-angled side is parallel to the radial wall of the spiral groove, and the size difference between the upper base side and the lower base side is proportional to the pitch and / or eccentricity.

[0018] As an improvement, the spiral grooves are of unequal width, the spiral blades are of equal thickness, the pitch of the spiral grooves and the spiral blades is the same, the width of the spiral grooves decreases radially from the inside to the outside, and the size difference of the width at both ends of the radial direction is proportional to the pitch.

[0019] As an improvement, the cross-section of the spiral groove is a right-angled trapezoid, with the right-angled side of the right-angled trapezoid facing the air inlet, the oblique side facing the air outlet, the shorter upper base side facing outward, and the longer lower base side facing inward. The right-angled side is parallel to the radial wall of the spiral groove, and the size difference between the upper base side and the lower base side is proportional to the pitch.

[0020] As an improvement, the spiral blades and the cylinder are movable.

[0021] As an improvement, the vacuum pump with a vortex rotor also includes a limiting structure to prevent the rotor from getting stuck. The limiting structure includes a limiting rib on the spiral blade and a limiting groove on the rotor. The limiting rib is located on the surface of the spiral blade, and the maximum displacement of the limiting rib in the limiting groove is less than the maximum distance between the end face of the spiral blade and the end face of the spiral groove. The limiting structure also prevents the spiral blade from falling off the rotor.

[0022] As an improvement, the limiting ribs are installed after the spiral blades are screwed into the rotor; and / or the limiting ribs are detachable from the spiral blades; and / or the limiting ribs are distributed radially.

[0023] As an improvement, the spiral blade includes an inner metal skeleton and a surface self-lubricating layer.

[0024] As an improvement, the vacuum pump with a vortex rotor also includes a vortex structure, which includes a motor, an eccentric shaft and a bellows. The two ends of the bellows are respectively fixed to the motor and the rotor, and the rotation axis of the eccentric shaft coincides with the axis of the stator cylinder.

[0025] As an improvement, the eccentric shaft is inserted into the rotor, and the eccentric shaft and the rotor are connected through bearings. The bearings include a first bearing and a second bearing. An abutment sleeve is provided between the first bearing and the second bearing. An abutment sleeve is provided between the first bearing and the second bearing, and both ends of the abutment sleeve abut against the inner rings of the first bearing and the second bearing respectively.

[0026] Static seal between motor and stator.

[0027] As an improvement, the rotor includes a rotating body and a sealing cover. The rotating body has a through hole. The sealing cover is threadedly connected to the rotating body. A sealing strip is provided between the sealing cover and the rotating body. The second bearing is close to the sealing cover. The through hole forms a step. The outer ring of the second bearing abuts the step.

[0028] As an improvement, the dimensions meet the following conditions: inner radius of the spiral blade = inner radius of the pump cavity - 2 × eccentricity - minimum overlap width between the spiral blade and the spiral groove of the rotor: and / or,

[0029] The outer diameter of the spiral blade = the inner diameter of the pump chamber, that is, the outer edge of the spiral blade is in direct contact with the inner surface of the pump chamber: and / or,

[0030] Rotor radius = pump chamber inner radius - eccentricity.

[0031] The spiral blade is used in a vacuum pump with a vortex rotor. The spiral blade extends axially, and the thickness of the spiral blade increases radially from the inside to the outside.

[0032] As an improvement of the spiral blade, the cross section of the spiral blade is a right-angled trapezoid, the right-angled side of the right-angled trapezoid faces the air inlet end, the oblique side faces the air outlet end, the shorter upper base faces inward, and the longer lower base faces outward.

[0033] As an improvement of the spiral blade, the spiral blade includes a limiting rib on the surface. The limiting rib is located at the air outlet end.

[0034] As an improvement of the spiral blade, the spiral blade includes an inner metal skeleton and a surface self-lubricating layer.

[0035] The beneficial effects of the vacuum pump with a vortex rotor of the present invention are as follows: the rotor vortexes, and has the advantages of oil pollution-free of the existing vortex vacuum pump; the spiral blades of the stator and the spiral grooves of the rotor both extend along the axial direction of the cylinder, and compared with the existing vortex vacuum pump, the axial dimension can be larger, and compared with the increase in radial dimension, the ultimate vacuum degree and stability are taken into account; the spiral blades of the stator and the spiral grooves of the rotor both extend along the axial direction of the cylinder, and the dynamic sealing strip between the static disk and the dynamic disk of the existing vortex vacuum pump can be omitted; the airflow is transmitted axially in a spiral manner, and the dust and water vapor processing capability is stronger. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 Schematic diagram of the structure of a vacuum pump with a vortex rotor according to the first embodiment of the present invention.

[0037] Figure 2 and Figure 3 1 is a cross-sectional view at different angles of a vacuum pump with a vortex rotor according to a first embodiment of the present invention.

[0038] Figure 4 This is a schematic structural diagram of a vacuum pump with a vortex rotor according to a first embodiment of the present invention, with the stator hidden.

[0039] Figure 5 1 is a schematic structural diagram of a stator of a vacuum pump with a vortex rotor according to a first embodiment of the present invention.

[0040] Figure 6 It is a cross-sectional view of the barrel of the stator of the vacuum pump with a vortex rotor according to the first embodiment of the present invention.

[0041] Figure 7 1 is a schematic structural diagram of a rotor of a vacuum pump with a vortex rotor according to a first embodiment of the present invention.

[0042] Figure 8 It is a schematic structural diagram of the spiral blades of a vacuum pump with a vortex rotor according to the first embodiment of the present invention.

[0043] Figure 9 4 is a cross-sectional view of a spiral blade of a vacuum pump with a vortex rotor according to a first embodiment of the present invention.

[0044] Figure 10 It is a schematic structural diagram of a cross section of a spiral blade of a vacuum pump with a vortex rotor according to a first embodiment of the present invention.

[0045] Figure 11 It is a structural schematic diagram of the eccentric shaft of the vacuum pump with a vortex rotor according to the first embodiment of the present invention.

[0046] Figure 12 It is a cross-sectional view of the eccentric shaft of the vacuum pump with a vortex rotor according to the first embodiment of the present invention.

[0047] Figure 13 and Figure 14 1 is a cross-sectional view of the spiral blades and spiral grooves of the vacuum pump with a vortex rotor according to the first embodiment of the present invention at two axial extreme positions.

[0048] Figure 15 and Figure 16 1 is a cross-sectional view of the spiral blades and spiral grooves of the vacuum pump with a vortex rotor according to the second embodiment of the present invention at two axial extreme positions.

[0049] In the figure, 1, stator; 11, cylinder; 12, end cover; 13, air inlet; 14, air outlet; 15, vertical support assembly;

[0050] 2. Rotor; 21. Rotating body; 22. Sealing cover; 211. Spiral groove; 212. Positioning groove; 23. Positioning pin;

[0051] 3. Spiral blades; 31. Metal skeleton; 32. Surface self-lubricating layer; 33. Position limiting ribs;

[0052] 4. Motor;

[0053] 5. Eccentric shaft;

[0054] 6. Bellows;

[0055] 7. First bearing;

[0056] 8. Second bearing;

[0057] 9. Butt sleeve. DETAILED DESCRIPTION

[0058] The technical solutions of the embodiments of the present invention are explained and described below, but the following embodiments are only preferred embodiments of the present invention and are not exhaustive. Based on the embodiments in the embodiments, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the present invention.

[0059] See also Figures 1 to 15 , a vacuum pump with a vortex rotor according to an embodiment of the present invention, the vacuum pump with a vortex rotor comprising:

[0060] The stator comprises a cylinder, wherein one end of the cylinder is provided with an air inlet and the other end is provided with an air outlet;

[0061] The rotor is provided with spiral grooves;

[0062] The spiral blade is located in the cylinder;

[0063] The spiral blade is located in the spiral groove, and both the spiral blade and the spiral groove extend along the axial direction of the cylinder;

[0064] Among them, the rotor vortex;

[0065] Among them, the spiral blades and the cylinder are movable;

[0066] The width of the spiral groove is greater than the thickness of the spiral blade.

[0067] The vacuum pump with a vortex rotor of the present invention has advantages of oil-free and other advantages over existing vortex vacuum pumps. The spiral blades of the stator and the spiral grooves of the rotor extend along the axial direction of the cylinder. Compared with existing vortex vacuum pumps, the axial dimension can be larger, and compared with increasing the radial dimension, the ultimate vacuum degree and stability are taken into account. The spiral blades of the stator and the spiral grooves of the rotor extend along the axial direction of the cylinder, which can eliminate the dynamic sealing strips between the static disk and the dynamic disk of the existing vortex vacuum pump. When the gas is not compressed during the transportation process, it is suitable for extracting condensable gases and can cope with complex working conditions. When the gas is compressed during the transportation process (such as by changing the pitch or using a tapered cylinder), the extraction efficiency under low vacuum for a longer working time can be improved.

[0068] Example 1

[0069] See also Figures 1 to 14The vacuum pump with a vortex rotor 2 according to the first embodiment of the present invention comprises:

[0070] The stator 1 includes a cylinder 11, which forms a pump cavity. An air inlet 13 is provided at one end of the cylinder 11, and an air outlet 14 is provided at the other end.

[0071] The rotor 2 is provided with a spiral groove 211;

[0072] The spiral blade 3 is located in the cylinder 11;

[0073] The spiral blade 3 is located in the spiral groove 211, and both the spiral blade 3 and the spiral groove 211 extend along the axial direction of the cylinder 11;

[0074] Among them, rotor 2 vortexes;

[0075] The spiral blade 3 and the cylinder 11 are movable;

[0076] The width of the spiral groove 211 is greater than the thickness of the spiral blade 3 , and the size difference between the width of the spiral groove 211 and the thickness of the spiral blade 3 gradually increases radially from the inside to the outside, and the size difference is proportional to the pitch and / or eccentricity.

[0077] In this embodiment, the relevant dimensional relationship satisfies:

[0078] The inner radius of the spiral blade 3 (c / 2) = the inner radius of the pump chamber (a / 2) - 2 × the eccentricity (b) - the minimum overlap width (d) between the spiral blade 3 and the spiral groove 211 of the rotor 2:

[0079] The outer diameter of the spiral blade 3 = the inner diameter of the pump chamber (a), that is, the outer edge of the spiral blade 3 is in direct contact with the inner surface of the pump chamber;

[0080] The radius of rotor 2 (e / 2) = the inner radius of the pump cavity (a / 2) - the eccentricity (b);

[0081] The minimum overlap width (d) is when the rotor 2 moves to the limit on one side, the blade on that side completely enters the spiral groove 211 of the rotor 2, and the overlap width between the other side and the spiral groove 211 of the rotor 2 is the smallest. This is the minimum overlap width. Figure 3 .

[0082] In this embodiment, the spiral grooves 211 have equal widths, the spiral blades 3 have unequal thicknesses, the spiral grooves 211 and the spiral blades 3 have the same pitch, the thickness of the spiral blades 3 increases radially from the inside to the outside, and the difference in thickness at both ends is proportional to the pitch. The spiral grooves 211 and the spiral blades 3 may have the same pitch, and may both have a constant pitch or a variable pitch.

[0083] In this embodiment, the cross-section of the spiral blade 3 is a right-angled trapezoid, with the right-angled side facing the air inlet 13 and the hypotenuse facing the air outlet 14. The shorter upper base faces inward, the longer lower base faces outward, and the right-angled side is parallel to the spiral groove 211. The size difference between the upper and lower bases is proportional to the pitch. In other embodiments, the cross-section of the spiral blade 3 can also have other shapes, such as an isosceles trapezoid. The right-angled side is parallel to the spiral groove 211 to control interstage leakage and backflow.

[0084] In this embodiment, the depth (radial dimension) of the spiral groove 211 is slightly smaller than the height of the isosceles trapezoid.

[0085] In this embodiment, the spiral blade 3 is movable with respect to the barrel 11 to accommodate processing and assembly errors, working environment factors, etc. Although interference can theoretically be avoided by designing the dimensions of the spiral groove 211 and the spiral blade 3, differences in actual processing, assembly, and working environment may affect this.

[0086] In this embodiment, the vacuum pump having a vortex rotor 2 further includes a limiting structure to prevent the rotor 2 from getting stuck. The limiting structure includes a limiting rib 33 on the spiral blade 3 and a limiting groove 212 on the rotor 2. The limiting rib 33 is located on the surface of the spiral blade 3. The maximum displacement (L1) of the limiting rib 33 in the limiting groove 212 is less than the maximum distance (L2) between the end face of the spiral blade 3 and the end face of the spiral groove 211. Because the spiral blade 3 is not fixed, when the rotor 2 is driven by the eccentric shaft 5 to perform high-speed eccentric vortex motion, the spiral blade 3 will also move relative to the rotor 2 as the rotor 2 moves. If the limiting structure is not provided, the relative motion of the spiral blade 3 and the rotor 2 is uncontrollable. When the end face of the spiral blade 3 contacts the end face of the spiral groove 211 of the rotor 2, the rotor 2 may get stuck (the rotor 2 may drive the spiral blade 3 to move horizontally, but the outer diameter of the spiral blade 3 is consistent with the inner diameter of the pump chamber, making it impossible for the spiral blade 3 to move horizontally). The limiting rib 33 and the limiting groove 212 cooperate to limit the spiral blade 3 to the extreme position of sliding in the spiral groove 211, so that the rotor 2 will not be stuck. The limiting structure also prevents the spiral blade 3 from falling out relative to the rotor 2.

[0087] In this embodiment, the spiral blade 3 is screwed into the rotor 2 and then the limiting rib 33 is installed.

[0088] In this embodiment, the limiting rib 33 and the spiral blade 3 are detachable.

[0089] In this embodiment, the limiting ribs 33 are distributed along the radial direction, so that a larger connection area is provided between the limiting ribs 33 and the body of the spiral blade 3 .

[0090] In this embodiment, the spiral blade 3 includes an inner metal skeleton 31 and a surface self-lubricating layer 32. The metal skeleton 31 provides structural strength, rigid support, and anti-deformation ability to ensure that the spiral blade 3 maintains a stable shape under high-speed rotation and large pressure differences, prevents local failures caused by stress concentration, and avoids deformation or breakage of the blades caused by deformation caused by interference with the rotor 2. The self-lubricating layer on the surface of the spiral blade 3, such as PTFE, PEEK, etc., ensures the self-lubrication of the spiral blade 3 and does not require additional lubrication. In addition, in actual applications, metal blades are easily corroded by corrosive gases. The surface coating isolates the working medium from the metal skeleton 31, which can improve the corrosion resistance of the spiral blade 3.

[0091] In this embodiment, the vacuum pump with the vortex rotor 2 also includes a vortex structure, which includes a motor 4, an eccentric shaft 5 and a bellows 6. The two ends of the bellows 6 are respectively fixed to the motor 4 and the rotor 2. The rotation axis of the eccentric shaft 5 coincides with the axis of the cylinder 11 of the stator 1, and the eccentric axis 5 line of the eccentric shaft 5 (which is also the axis of the output shaft of the motor 4) coincides with the axis of the rotor 2. The bellows 6 is a metal bellows 6, and its two ends are respectively fixed to the motor 4 and the rotor 2 through flanges. The specific structure of the bellows 6 can be seen in the drawings and the prior art. In order to facilitate the connection between the bellows 6 and the motor 4 and the rotor 2, a positioning structure is provided between the bellows 6 and the motor 4 and the rotor 2. The positioning structure includes a positioning pin 23 and a positioning hole.

[0092] In this embodiment, the eccentric shaft 5 is inserted into the rotor 2. The eccentric shaft 5 and the rotor 2 are connected by bearings. The bearings include a first bearing 7 and a second bearing 8. An abutment sleeve 9 is provided between the first bearing 7 and the second bearing 8. The abutment sleeve 9 is provided between the first bearing 7 and the second bearing 8. The ends of the abutment sleeve 9 abut the inner rings of the first bearing 7 and the second bearing 8, respectively. The eccentric shaft 5 is fixedly connected to the output shaft of the motor 4, specifically by a keyway connection and radial screws. The first bearing 7 is an angular contact ball bearing, and the second bearing 8 is a deep groove ball bearing. The provision of the first bearing 7 and the second bearing 8 provides better support for the rotor 2. The first bearing 7 and the second bearing 8 are roughly located at the two axial ends of the rotor 2.

[0093] In this embodiment, the rotor 2 includes a rotating body 21 and a sealing cover 22. The rotating body 21 has a through-hole, and the sealing cover 22 is threadedly connected to the rotating body 21. A sealing strip is provided between the sealing cover 22 and the rotating body 21. The second bearing 8 is adjacent to the sealing cover 22, and the through-hole forms a step, against which the outer ring of the second bearing 8 abuts. This structure ensures a seal between the airflow channel and the output shaft of the motor 4, while facilitating maintenance of the first bearing 7 and the second bearing 8, particularly the second bearing 8.

[0094] In this embodiment, a static seal is established between the motor 4 and the stator 1. A flange is formed on the end of the stator 1's cylindrical body 11 near the motor 4. The stator 1's flange and motor 4 are sealed together using screws and a sealing strip. The cylindrical body 11 has an air inlet section axially corresponding to the bellows 6, and an air inlet 13 is formed in the air inlet section.

[0095] In this embodiment, the vacuum pump can be horizontal or vertical. The motor 4 has a horizontal support structure. The stator 1 has a vertical support assembly 15.

[0096] In this embodiment, the axis of the rotor 2 is eccentrically arranged relative to the axis of the pump chamber, and a "crescent-shaped" axial space is formed between the outer side of the rotor 2 and the inner side of the pump chamber. Gas is transferred through the cooperation of the rotor 2, the spiral blades 3 and the pump chamber.

[0097] In other embodiments, the vortex structure further includes an eccentric support shaft disposed at the outlet end, with the ends of the eccentric support shaft respectively connected to the barrel 11 and the rotor 2, thereby providing support at both ends of the rotor 2 and ensuring smoother operation. Existing scroll vacuum pumps are unable or difficult to achieve support at both ends of the rotor plate (corresponding to the rotor 2 of this embodiment).

[0098] See also Figure 13 and Figure 14 , the spiral blade 3 has a right-angled trapezoidal cross-section, which is larger on the outside and smaller on the inside in the radial direction, with the right-angled side facing the air inlet end, and the difference in thickness at both ends in the radial direction is proportional to the pitch and / or eccentricity. When the spiral blade 3 and the spiral groove 211 are at the two extreme axial positions (the two positions are 180° apart), there is a small axial gap between the spiral blade 3 and the spiral groove 211, so that there is no interference between the spiral blade 3 and the spiral groove 211. Although the spiral blade 3 will produce a spiral motion relative to the spiral groove 211 limited by the limiting structure, the axial displacement of the spiral blade 3 is very small and has almost no effect on the interference. The dimensions in the figure are not drawn strictly according to the actual dimensions and are only used to illustrate the effect.

[0099] In this embodiment, with respect to the thickness of the spiral blade 3 and the width of the spiral groove 211, without considering the interference (at this time, the thickness of the spiral blade 3 and the width of the spiral groove 211 are clearance fit, and the specific values ​​are determined according to the design and test), all or part of the interference between the spiral blade 3 and the spiral groove 211 is cut off (this process step may not be performed during the actual processing, and the spiral blade 3 is already of unequal thickness after forming).

[0100] The beneficial effects of the vacuum pump with vortex rotor 2 of the embodiment 1 of the present invention are as follows: the rotor 2 vortexes, and has the advantages of oil-free pollution of the existing vortex vacuum pump; the spiral blade 3 and the spiral groove 211 extend axially, and the axial dimension can be larger than the radial extension, taking into account the ultimate vacuum degree and the running stability (small radial shaking); the air flow is transmitted axially and spirally, and the dust and water vapor processing ability is stronger; the spiral blade 3 is not fixed, and the spiral blade 3 and the cylinder 11 are movable, and the spiral blade 3 and the cylinder 11 can be separately processed and assembled; the movement of the spiral blade 3 can adapt to the processing Assembly errors, changes in the working environment, etc., avoid or reduce the interference between the rotor 2 and the spiral blade 3; the width of the spiral groove 211 of the rotor 2 is greater than the thickness of the spiral blade 3, and the cross-section of the spiral blade 3 is a right-angled trapezoid, which reduces interference while also reducing leakage between the rotor 2 and the spiral blade 3; a limiting structure is provided between the rotor 2 and the spiral blade 3 to prevent the rotor 2 from getting stuck or falling out; a static seal is provided between the motor 4 and the stator 1, and no dynamic seal strips of the existing vortex pump are required; the motor 4 and the rotor 2 are sealed and connected by a bellows 6, which also has an anti-rotation function.

[0101] Example 2

[0102] The difference between the second embodiment and the first embodiment lies in the shapes of the spiral groove 211 and the spiral blade 3 .

[0103] See also Figure 15 and Figure 16 In this embodiment, the spiral grooves 211 are of different widths, the spiral blades 3 are of equal thickness, the pitch of the spiral grooves 211 and the spiral blades 3 are the same, the width of the spiral grooves 211 gradually decreases radially from the inside to the outside, the spiral grooves 211 are in the shape of a right-angled trapezoid, with the right-angled sides facing the air inlet end, and the difference in width between the radial ends is proportional to the pitch and / or eccentricity.

[0104] In this embodiment, when the two axial extreme positions of the spiral blade 3 and the spiral groove 211 are 180° apart, a slight axial gap exists between the spiral blade 3 and the spiral groove 211, thereby preventing interference between the spiral blade 3 and the spiral groove 211. Although the spiral blade 3 produces a spiral motion relative to the spiral groove 211, which is restricted by the limiting structure, the axial displacement of the spiral blade 3 is very small and has almost no impact on the interference. The dimensions in the figure are not strictly based on actual dimensions and are drawn for illustrative purposes only.

[0105] The embodiment of the present invention also provides a spiral blade 3 for a vacuum pump having a vortex rotor 2. The spiral blade 3 is the spiral blade 3 in the first embodiment. The spiral blade 3 extends axially, and the thickness of the spiral blade 3 gradually increases radially from the inside to the outside.

[0106] The cross section of the spiral blade 3 is a right-angled trapezoid, with the right-angled side of the right-angled trapezoid facing the air inlet end, the oblique side facing the air outlet end, the shorter upper base facing inward, and the longer lower base facing outward.

[0107] The spiral blade 3 includes a limiting rib 33 on the surface.

[0108] The spiral blade 3 includes an inner metal skeleton 31 and a surface self-lubricating layer 32 .

[0109] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Those skilled in the art will understand that the present invention includes, but is not limited to, the contents described in the above specific embodiments. Any modifications that do not deviate from the functional and structural principles of the present invention are intended to be included within the scope of the claims.

Claims

1. A vacuum pump having a vortex rotor, characterized in that: The vacuum pump with a vortex rotor comprises: The stator (1) comprises a cylinder (11), wherein one end of the cylinder (11) is provided with an air inlet (13) and the other end is provided with an air outlet (14); The rotor (2) is provided with a spiral groove (211); A spiral blade (3) is located in the cylinder (11); The spiral blade (3) is located in the spiral groove (211), and both the spiral blade (3) and the spiral groove (211) extend along the axial direction of the cylinder (11); wherein the rotor (2) vortexes; The width of the spiral groove (211) is greater than the thickness of the spiral blade (3), and the size difference between the width of the spiral groove (211) and the thickness of the spiral blade (3) gradually increases radially from the inside to the outside.

2. The vacuum pump with a vortex rotor according to claim 1, characterized in that: The spiral grooves (211) have equal widths, the spiral blades (3) have unequal thicknesses, the spiral grooves (211) and the spiral blades (3) have the same pitch, the thickness of the spiral blades (3) increases gradually from the inside to the outside in the radial direction, and the difference in thickness at both ends in the radial direction is proportional to the pitch and / or the eccentricity.

3. The vacuum pump with a vortex rotor according to claim 2, characterized in that: The cross section of the spiral blade (3) is a right-angled trapezoid, with the right-angled side of the right-angled trapezoid facing the air inlet (13) and the oblique side facing the air outlet (14), the shorter upper base facing inward, and the longer lower base facing outward, the right-angled side being parallel to the radial wall of the spiral groove (211), and the size difference between the upper base and the lower base being proportional to the pitch.

4. The vacuum pump with a vortex rotor according to claim 1, characterized in that: The spiral grooves (211) are of different widths, the spiral blades (3) are of equal thickness, the spiral grooves (211) and the spiral blades (3) have the same pitch, the width of the spiral grooves (211) decreases radially from the inside to the outside, and the difference in width between the radial ends is proportional to the pitch and / or eccentricity.

5. The vacuum pump with a vortex rotor according to any one of claims 1 to 4, characterized in that: The spiral blade (3) and the cylinder (11) are movable.

6. The vacuum pump with a vortex rotor according to claim 5, characterized in that: The vacuum pump with a vortex rotor further comprises a limiting structure, the limiting structure comprising a limiting rib (33) on the spiral blade (3) and a limiting groove (212) on the rotor (2), the limiting rib (33) being located on the surface of the spiral blade (3), and the maximum displacement of the limiting rib (33) in the limiting groove (212) being less than the maximum distance between the end face of the spiral blade (3) and the end face of the spiral groove (211).

7. The vacuum pump with a vortex rotor according to claim 6, characterized in that: After the spiral blade (3) is screwed into the rotor (2), the limiting rib (33) is installed; And / or, the limiting rib (33) and the spiral blade (3) are detachable; And / or, the limiting ribs (33) are distributed along the radial direction.

8. The vacuum pump with a vortex rotor according to any one of claims 1 to 4, characterized in that: The spiral blade (3) comprises an inner metal skeleton (31) and a surface self-lubricating layer (32).

9. The vacuum pump with a vortex rotor according to any one of claims 1 to 4, characterized in that: The vacuum pump with a vortex rotor also includes a vortex structure, which includes a motor (4), an eccentric shaft (5) and a bellows (6). The two ends of the bellows (6) are respectively fixed to the motor (4) and the rotor (2). The rotation axis of the eccentric shaft (5) coincides with the axis of the cylinder (11) of the stator (1).

10. The vacuum pump with a vortex rotor according to claim 9, characterized in that: The eccentric shaft (5) is inserted into the rotor (2). The eccentric shaft (5) and the rotor (2) are connected via bearings. The bearings include a first bearing (7) and a second bearing (8). An abutment sleeve (9) is provided between the first bearing (7) and the second bearing (8). Two ends of the abutment sleeve (9) respectively abut against the inner rings of the first bearing (7) and the second bearing (8). A static seal is formed between the motor (4) and the stator (1).

11. The vacuum pump with a vortex rotor according to claim 9, characterized in that: The rotor (2) includes a rotating body (21) and a sealing cover (22). The rotating body (21) has a through hole. The sealing cover (22) is threadedly connected to the rotating body (21). A sealing ring is provided between the sealing cover (22) and the rotating body (21). The second bearing (8) is close to the sealing cover (22). The through hole forms a step, and the outer ring of the second bearing (8) abuts the step.

12. The vacuum pump with a vortex rotor according to any one of claims 1 to 4, characterized in that: Size meets: Inner radius of spiral blade (3) = inner radius of pump chamber - 2 × eccentricity - minimum overlap width of spiral blade (3) and spiral groove (211) of rotor (2): and / or, The outer diameter of the spiral blade (3) = the inner diameter of the pump chamber, that is, the outer edge of the spiral blade (3) is in direct contact with the inner surface of the pump chamber: and / or, The radius of the rotor (2) = the inner radius of the pump cavity - the eccentricity.

13. Helical blades for vacuum pumps with vortex rotors, characterized in that: The spiral blade extends axially, and the thickness of the spiral blade (3) gradually increases from the inside to the outside in the radial direction.

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