A two-axis vibration damping device

Abstract

The application provides a two-axis damping device, and relates to the technical field of damping devices. The two-axis damping device comprises a first fixed plate, a second fixed plate, a first direction motor, a second direction motor, a first direction hinge, a second direction hinge and an elastic mechanism. The first direction hinge comprises an outer frame and an inner frame arranged in the interior of the outer frame. The outer frame is fixedly connected with the first fixed plate, and the inner frame is fixedly connected with the first direction motor. The first direction motor is used for driving the inner frame to move along a first direction relative to the first fixed plate. The first direction hinge is configured such that the rigidity between the inner frame and the outer frame along the first direction is smaller than the rigidity along other directions except the first direction. The second direction hinge connects the inner frame and the second fixed plate. The second direction motor is used for driving the second fixed plate to move along a second direction relative to the inner frame. The second direction hinge is configured such that the rigidity along the second direction is smaller than the rigidity along other directions except the second direction.

Description

TECHNICAL FIELD

[0001] The present specification relates to the technical field of vibration reduction devices, and in particular to a two-axis vibration reduction device. BACKGROUND

[0002] Vibration isolation or reduction devices can reduce the negative effects of vibrations on production, detection, and measurement equipment, such as mechanical failure, equipment damage, or reduced operating comfort. With the development of technology, vibration reduction technology has evolved from passive to active. In some related technologies, a vibration reduction device can use springs and dampers to absorb and consume vibration energy through physical structures. Such vibration reduction devices are simple and reliable, suitable for low-frequency vibration environments, but have limited response speed and adjustment capability. In other related technologies, a vibration reduction device can use active vibration reduction technology, but active vibration reduction technology is mostly single-axis vibration reduction, lacking two-axis vibration reduction devices. For some equipment that requires horizontal and vertical vibration reduction, the vibration reduction device cannot meet the equipment vibration reduction requirements. SUMMARY

[0003] One or more embodiments of the present specification provide a two-axis vibration reduction device, comprising: a first fixed plate, a second fixed plate, a first direction motor, a second direction motor, a first direction hinge, a second direction hinge, and an elastic mechanism; the first direction hinge comprises an outer frame and an inner frame arranged inside the outer frame, the outer frame is fixedly connected with the first fixed plate, the inner frame is fixedly connected with the first direction motor, and the first direction motor is used to drive the inner frame to move relative to the first fixed plate along a first direction; the first direction hinge is configured such that the rigidity between the inner frame and the outer frame along the first direction is less than the rigidity along other directions except the first direction; the second direction hinge connects the inner frame and the second fixed plate, and the second direction motor is used to drive the second fixed plate to move relative to the inner frame along a second direction; the second direction hinge is configured such that the rigidity along the second direction is less than the rigidity along other directions except the second direction; the second fixed plate is used to carry equipment, and the elastic mechanism provides an elastic force to the second fixed plate based on the first fixed plate to offset at least part of the gravity of the equipment.

[0004] In some embodiments, the elastic mechanism comprises: an elastic mechanism shell, an elastic mechanism core shaft capable of moving relative to the elastic mechanism shell, and an elastic piece.

[0005] In some embodiments, the elastic mechanism shell is fixedly connected with the first fixed plate, and the elastic mechanism core shaft is fixedly connected with the second fixed plate; the elastic piece connects the elastic mechanism shell and the elastic mechanism core shaft.

[0006] In some embodiments, the elastic member provides the elastic force to the elastic mechanism mandrel based on the elastic mechanism housing, so as to make the second fixed plate have a tendency to approach or move away from the first fixed plate.

[0007] In some embodiments, the second fixed plate is located below the first fixed plate, and the elastic member provides the elastic force to the elastic mechanism mandrel based on the elastic mechanism housing, so as to make the second fixed plate have a tendency to approach the first fixed plate.

[0008] In some embodiments, the second fixed plate is located above the first fixed plate, and the elastic member provides the elastic force to the elastic mechanism mandrel based on the elastic mechanism housing, so as to make the second fixed plate have a tendency to move away from the first fixed plate.

[0009] In some embodiments, at least a part of the elastic force provided by the elastic member is opposite to the direction of gravity of the device.

[0010] In some embodiments, the first fixed plate is located above the second fixed plate, and the device is located below the second fixed plate; the elastic mechanism comprises an elastic mechanism housing, an elastic mechanism mandrel capable of moving relative to the elastic mechanism housing, and an elastic member; the elastic mechanism housing is fixedly connected with the first fixed plate, the elastic mechanism mandrel penetrates through the elastic mechanism housing and is fixedly connected with the second fixed plate; the elastic member connects the elastic mechanism housing and the elastic mechanism mandrel, and provides the elastic force to the elastic mechanism mandrel based on the elastic mechanism housing, so as to drive the elastic mechanism mandrel to move towards the first fixed plate, and at least a part of the elastic force is opposite to the direction of gravity of the device.

[0011] In some embodiments, the elastic mechanism comprises a fixed nut and a locking nut; the fixed nut is threadedly connected with the elastic mechanism housing, the fixed nut has a stepped structure, the first fixed plate is provided with a stepped groove matched with the stepped structure, and the fixed nut is fixedly connected with the first fixed plate; the locking nut is threadedly connected with the elastic mechanism housing, and the locking nut is used to lock the fixed nut relative to the elastic mechanism housing.

[0012] In some embodiments, the elastic mechanism comprises a locking nut; the elastic mechanism housing is threadedly connected with the first fixed plate, the locking nut is threadedly connected with the elastic mechanism housing, and the locking nut is used to lock the elastic mechanism housing relative to the first fixed plate.

[0013] In some embodiments, one end of the elastic mechanism shaft penetrates through the elastic mechanism shell and is fixedly connected with the second fixed plate, and the other end of the elastic mechanism shaft is provided with an elastic member fixing portion; the inside of the elastic mechanism shell is provided with an elastic member accommodating space, and the elastic member abuts against the inner wall of the elastic member accommodating space and the elastic member fixing portion.

[0014] In some embodiments, the second fixed plate is located above the first fixed plate, and the device is located above the second fixed plate; the elastic mechanism comprises an elastic mechanism shell, an elastic mechanism shaft capable of moving relative to the elastic mechanism shell, and an elastic member; the elastic mechanism shell is fixedly connected with the first fixed plate, and the elastic mechanism shaft is fixedly connected with the second fixed plate; the elastic member connects the elastic mechanism shell and the elastic mechanism shaft, and the elastic member provides the elastic force to the elastic mechanism shaft based on the elastic mechanism shell to drive the elastic mechanism shaft to move towards the second fixed plate, and at least a component force of the elastic force is opposite to the direction of gravity of the device.

[0015] In some embodiments, the elastic mechanism comprises a locking nut; the first fixed plate is provided with an elastic mechanism accommodating groove, and the elastic mechanism shell is threadedly connected inside the elastic mechanism accommodating groove; the locking nut is threadedly connected with the elastic mechanism shell, and the locking nut is used to lock the elastic mechanism shell relative to the first fixed plate.

[0016] In some embodiments, one end of the elastic mechanism shaft is provided with an elastic member fixing portion, and the elastic member fixing portion is fixedly connected with the second fixed plate; the inside of the elastic mechanism shell is provided with an elastic member accommodating space, and the elastic member abuts against the inner wall of the elastic member accommodating space and the elastic member fixing portion.

[0017] In some embodiments, the two-axis vibration reduction device further comprises an adapter plate and one or more adapter blocks, the adapter plate and the first fixed plate are fixedly connected through the one or more adapter blocks; the adapter plate and the first fixed plate have a gap therebetween.

[0018] In some embodiments, the two-axis vibration reduction device further comprises a locking mechanism, the locking mechanism comprises a locking mechanism support and a locking plate which are directly or indirectly fixedly connected with the first fixed plate; wherein the locking plate is configured to be movable relative to the locking mechanism support in the second direction or fixed relative to the locking mechanism support; the locking plate is further configured to be fixed or unfixed relative to the second fixed plate.

[0019] In some embodiments, the locking mechanism bracket comprises a crossbeam and a column fixedly connecting the crossbeam and the first fixed plate, the locking plate is arranged between the crossbeam and the first fixed plate, the locking plate has a protruding structure configured to be capable of penetrating through the crossbeam and abutting against the second fixed plate; the locking mechanism further comprises a first connecting member and a second connecting member; the first connecting member is configured to be capable of fixedly connecting the crossbeam and the locking plate; the second connecting member is configured to be capable of fixedly connecting the protruding structure of the locking plate and the second fixed plate.

[0020] In some embodiments, a plurality of first-direction deformation grooves are arranged on the first-direction hinge; the plurality of first-direction deformation grooves are arranged in sequence along the first direction, the plurality of first-direction deformation grooves all penetrate through the first-direction hinge along the second direction, the plurality of first-direction deformation grooves respectively extend in the third direction, the interval of the plurality of first-direction deformation grooves in the first direction is less than the interval of the plurality of first-direction deformation grooves in the third direction; the third direction intersects the first direction, and the second direction is perpendicular to the first direction and the third direction.

[0021] In some embodiments, a plurality of second-direction deformation grooves are arranged on the second-direction hinge; the plurality of second-direction deformation grooves are arranged in sequence along the second direction, the plurality of second-direction deformation grooves all penetrate through the second-direction hinge along the first direction, the plurality of second-direction deformation grooves respectively extend in the third direction, the interval of the plurality of second-direction deformation grooves in the second direction is less than the interval of the plurality of second-direction deformation grooves in the third direction; or, the plurality of second-direction deformation grooves are arranged in sequence along the second direction, the plurality of second-direction deformation grooves all penetrate through the second-direction hinge along the third direction, the plurality of second-direction deformation grooves respectively extend in the first direction, the interval of the plurality of second-direction deformation grooves in the second direction is less than the interval of the plurality of second-direction deformation grooves in the first direction; the third direction intersects the first direction, and the second direction is perpendicular to the first direction and the third direction.

[0022] In some embodiments, the first-direction motor provides a first reverse vibration opposite to a first vibration of the device in the first direction based on the first vibration; the second-direction motor provides a second reverse vibration opposite to a second vibration of the device in the second direction based on the second vibration.

[0023] The beneficial effects that the embodiments of the present specification can bring include but are not limited to: (1) the two-axis damping device can provide damping in the first direction and the second direction at the same time; (2) the two-axis damping device guides the damping movement through the first direction hinge and the second direction hinge, without maintenance, simple operation, high efficiency, and higher rigidity and movement accuracy; (3) the two-axis damping device is suitable for damping of suspended equipment; (4) the gravity of the equipment is compensated by the elastic mechanism, so that the second direction motor only needs to provide damping action, and has higher damping accuracy; (5) the elastic mechanism shell and the first fixed plate are directly or indirectly locked through the locking nut of the elastic mechanism; (6) the position of the second fixed plate relative to the first fixed plate is locked through the locking mechanism, which can protect the first direction motor and the second direction motor in the transportation or fixed state. It should be noted that different embodiments can have different beneficial effects, and in different embodiments, the beneficial effects that can be produced can be any one or a combination of several of the above, or any other beneficial effect that can be obtained. BRIEF DESCRIPTION OF DRAWINGS

[0024] The present specification will be further illustrated in the manner of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same reference numbers in the drawings represent the same structures or steps.

[0025] Figure 1 is a schematic view of a two-axis damping device according to some embodiments of the present specification.

[0026] Figure 2 is a cross-sectional schematic view of a two-axis damping device according to some embodiments of the present specification.

[0027] Figure 3 is an assembled bottom view schematic diagram of a first direction hinge of a two-axis damping device according to some embodiments of the present specification.

[0028] Figure 4 is a schematic diagram of some first direction hinges of a two-axis damping device according to some embodiments of the present specification.

[0029] Figure 5 is a schematic diagram of some other first direction hinges of a two-axis damping device according to some embodiments of the present specification.

[0030] Figure 6 is a schematic diagram of some second direction hinges of a two-axis damping device according to some embodiments of the present specification.

[0031] Figure 7 is a schematic diagram of some other second direction hinges of a two-axis damping device according to some embodiments of the present specification.

[0032] Figure 8is a schematic view of the elastic mechanism of the two-axis vibration damping device according to some embodiments of the present specification.

[0033] Figure 9 is a sectional schematic view of the elastic mechanism of the two-axis vibration damping device according to some embodiments of the present specification.

[0034] Figure 10 is an assembly sectional schematic view of the locking mechanism of the two-axis vibration damping device according to some embodiments of the present specification.

[0035] Figure 11 is Figure 10 is a partial enlarged schematic view.

[0036] Figure 12 is a schematic view of the locking mechanism of the two-axis vibration damping device according to some embodiments of the present specification.

[0037] Figure 13 is a schematic view of the two-axis vibration damping device according to some other embodiments of the present specification.

[0038] Figure 14 is a schematic view of the elastic mechanism of the two-axis vibration damping device according to some other embodiments of the present specification.

[0039] Figure 15 is a sectional schematic view of the elastic mechanism of the two-axis vibration damping device according to some other embodiments of the present specification.

[0040] Figure Marked: 1 first fixed plate; 11 stepped groove; 2 second fixed plate; 3 first direction motor; 31 housing; 32 motor shaft; 33 first motor fixed block; 34 second motor fixed block; 4 second direction motor; 5 first direction hinge; 51 outer frame; 52 inner frame; 53 first direction deformation groove; 531 first direction outer side deformation groove; 532 first direction inner side deformation groove; 54 first direction auxiliary deformation groove; 6 second direction hinge; 61 second direction deformation groove; 611 second direction outer side deformation groove; 612 second direction inner side deformation groove; 62 second direction auxiliary deformation groove; 7 elastic mechanism; 71 elastic mechanism housing; 72 elastic mechanism core shaft; 721 elastic piece fixed part; 73 elastic piece; 74 fixed nut; 741 stepped structure; 75 locking nut; 76 limiting nut; 81 adapter plate; 82 adapter block; 9 locking mechanism; 91 locking mechanism support; 911 cross beam; 912 stand column; 92 locking plate; 921 protruding structure; 93 first connecting piece; 94 second connecting piece. DETAILED DESCRIPTION

[0041] In order to more clearly illustrate the technical solutions of the embodiments of the present specification, the embodiments will be described in detail below with reference to the drawings. Obviously, the following description is some examples or embodiments of the present specification, and those skilled in the art can also apply the technical solutions or means disclosed in the present specification to other scenarios without creative labor, based on the technical content.

[0042] It should be understood that the "system", "device", "equipment", "part" and / or "unit" and / or "module" used in the present specification is a method for distinguishing different components, elements, parts, parts or assemblies at different levels. However, if other words can achieve the same purpose, the words can be replaced by other expressions.

[0043] In the present specification, the technical terms of components, elements, etc. are not specified by single number unless otherwise specified. In general, the terms "include", "contain" and the like only indicate the inclusion of the steps, elements or components explicitly identified, and these steps, elements and components do not constitute an exclusive list, and the method or device described may also include other steps or components.

[0044] In the description of the present specification, it should be understood that the orientation description, such as the orientation or position relationship indicated by the upper, lower, front, rear, left, right and the like, is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the description of the present specification, unless otherwise expressly limited, the words such as arrangement, installation, connection and the like should be broadly understood, and those skilled in the art can reasonably determine the specific meaning of the above words in the present specification in combination with the specific content of the technical solution.

[0045] In semiconductor manufacturing plants, nanotechnology centers, nanofactories and other precision manufacturing and research, vibration isolation is required in semiconductor precision equipment to meet complex facility requirements. In some use scenarios, the active ground cannot provide the necessary vibration quiet environment, which is not suitable for vibration-sensitive production, detection and metrology equipment. Therefore, it is necessary to provide a vibration isolation or damping device for filtering ground motion to eliminate vibration in real time.

[0046] Vibration isolation or damping devices can reduce the negative effects of vibration on production, detection and measurement equipment, such as mechanical failure, equipment damage or reduced operating comfort. With the development of technology, vibration damping technology has evolved from passive to active. In some related embodiments, a damping device can use springs and dampers to absorb and consume vibration energy through physical structures. Such damping devices are simple and reliable, suitable for low-frequency vibration environments, but have limited response speed and adjustment capability. In other related embodiments, a damping device can use active damping technology, but active damping technology is mostly single-axis damping, lacking two-axis damping devices, and cannot meet the damping needs of some equipment that requires horizontal and vertical damping.

[0047] In addition, in some use scenarios, for some equipment that needs to be placed in suspension, the damping device needs to be specially designed to adapt to the suspension placement.

[0048] Therefore, in one or more embodiments of the present specification, a two-axis damping device is provided, which can realize horizontal and vertical damping, for example, damping in the first direction X and the second direction Z. In some embodiments, the two-axis damping device provided in the present specification is suitable for equipment placed in suspension.

[0049] Figure 1 is a schematic diagram of a two-axis damping device according to some embodiments of the present specification, Figure 2 is a cross-sectional schematic diagram of a two-axis damping device according to some embodiments of the present specification, Figure 3 is an assembled bottom view schematic diagram of a first direction hinge of a two-axis damping device according to some embodiments of the present specification. Referring to Figures 1 to 3 In one or more embodiments of the present specification, the two-axis damping device can include a first fixed plate 1, a second fixed plate 2, a first direction motor 3, a second direction motor 4, a first direction hinge 5, a second direction hinge 6 and an elastic mechanism 7. In some embodiments, the first fixed plate 1 is fixedly arranged, and the second fixed plate 2 can move in the first direction X relative to the first fixed plate 1 and / or move in the second direction Z relative to the first fixed plate 1. In some embodiments, the first fixed plate 1 can be directly or indirectly fixed to a fixed object. In some embodiments, the fixed object can be the ground, a support. In other embodiments, the fixed object can also be a top suspension plane (such as a ceiling). In some embodiments, the second fixed plate 2 is used to fix or carry equipment.

[0050] In some embodiments, the first direction motor 3 is configured to drive the second fixed plate 2 to move relative to the first fixed plate 1 in the first direction X. In some embodiments, the first direction motor 3 can provide a first counter vibration opposite to a first vibration of the device in the first direction X based on the first vibration. For example, the first direction motor 3 can output a counter wave according to the vibration of the device relative to the fixed object in the first direction X to offset the vibration of the device relative to the fixed object, thereby achieving active vibration reduction in the first direction X. In some embodiments, the first direction motor 3 can be a piezoelectric motor.

[0051] In some embodiments, the second direction motor 4 is configured to drive the second fixed plate 2 to move relative to the first fixed plate 1 in the second direction Z. In some embodiments, the second direction motor 4 can provide a second counter vibration opposite to a second vibration of the device in the second direction Z based on the second vibration. For example, the second direction motor 4 can output a counter wave according to the vibration of the device relative to the fixed object in the second direction Z to offset the vibration of the device relative to the fixed object, thereby achieving active vibration reduction in the second direction Z. In some embodiments, the second direction motor 4 can be a piezoelectric motor.

[0052] In some embodiments, the two-axis vibration reduction device can include a control module connected to the first direction motor 3 and the second direction motor 4 through a cable, and configured to drive the second fixed plate 2 to move the device in the first direction X and the second direction Z to generate a movement wave opposite to the ground vibration or the ceiling vibration, thereby offsetting the vibration of the device.

[0053] In some embodiments, the two-axis vibration reduction device can include an acceleration sensor arranged on the device fixed to the second fixed plate 2 and configured to detect the vibration of the device itself. In some embodiments, the acceleration sensor is signal-connected to the control module. In some embodiments, in order to reduce the influence and interference of the vibration on the operation of the device, the control module can drive the first direction motor 3 and / or the second direction motor 4 to generate a sine wave opposite to the vibration waveform of the device based on the signal provided by the acceleration sensor, so that the first direction motor 3 and / or the second direction motor 4 generates a movement to offset the vibration of the device, thereby achieving vibration reduction.

[0054] In some embodiments, the first direction hinge 5 is configured to guide the movement of the second fixed plate 2 relative to the first fixed plate 1 in the first direction X to avoid vibration in other directions than the first direction X that can be generated when the first direction motor 3 is working. In some embodiments, the second direction hinge 6 is configured to guide the movement of the second fixed plate 2 relative to the first fixed plate 1 in the second direction Z to avoid vibration in other directions than the second direction Z that can be generated when the second direction motor 4 is working.

[0055] In some embodiments, due to the precision of the installation plane of the first direction motor 3, or due to the installation precision of the first direction motor 3, or due to the output direction of the first direction motor 3, the first direction motor 3 may have an included angle with the first direction X when providing linear power, which causes the first direction motor 3 to not only provide vibration in the first direction X, but also generate vibration in the third direction Y and / or the second direction Z (for example, generate a component force in other directions), which causes cross talk, resulting in additional vibration in other directions or affecting active vibration reduction in other directions. Similarly, the second direction motor 4 may generate vibration in the third direction Y and / or the first direction X in addition to providing vibration in the second direction Z (for example, generate a component force in other directions), which causes cross talk, resulting in additional vibration in other directions or affecting active vibration reduction in other directions. Therefore, by arranging the first direction hinge 5 and / or the second direction hinge 6, the component force in other directions can be reduced, only leaving the force in the first direction X or the second direction Z, achieving first direction X guidance or second direction Z guidance, reducing interference, and improving precision.

[0056] In some embodiments, by arranging the first direction hinge 5 and / or the second direction hinge 6, the use of guide posts or linear bearings for guiding the vibration reduction movement can be avoided, and regular maintenance with lubricating oil is not required, which is simple to operate and efficient. In some embodiments, compared with the guide post or linear bearing guiding scheme in some related embodiments, the first direction hinge 5 and / or the second direction hinge 6 in the present embodiment can also provide higher stiffness and higher motion precision.

[0057] In some embodiments, the first direction hinge 5 includes an outer frame 51 and an inner frame 52 arranged inside the outer frame 51, the outer frame 51 is fixedly connected with the first fixed plate 1, and the inner frame 52 is fixedly connected with the first direction motor 3, and the first direction motor 3 is used to drive the inner frame 52 to move relative to the first fixed plate 1 along the first direction X. In some embodiments, the first direction hinge 5 is configured such that the rigidity between the inner frame 52 and the outer frame 51 along the first direction X is smaller than the rigidity along other directions except the first direction X. In some embodiments, the inner frame 52 can move relative to the outer frame 51 along the first direction X (the rigidity in this direction is smaller) and is difficult to move along other directions (the rigidity in other directions is larger).

[0058] In some embodiments, the second-direction hinge 6 connects the inner frame 52 and the second fixed plate 2, and the second-direction motor 4 is configured to drive the second fixed plate 2 to move relative to the inner frame 52 along the second direction Z. In some embodiments, the second-direction hinge 6 is configured to have a rigidity along the second direction Z smaller than a rigidity along other directions than the second direction Z. In some embodiments, the second-direction hinge 6 has two surfaces along the second direction Z, one of which is fixedly connected to the inner frame 52 and the other of which is fixedly connected to the second fixed plate 2. In some embodiments, the two surfaces of the second-direction hinge 6 along the second direction Z are movable along the second direction Z (which has a smaller rigidity) and difficult to move along other directions (which have a larger rigidity).

[0059] In some embodiments, the elastic mechanism 7 provides an elastic force to the second fixed plate 2 based on the first fixed plate 1 to counteract at least part of the gravity of the device.

[0060] In some embodiments, the elastic mechanism 7 includes an elastic mechanism housing 71, an elastic mechanism mandrel 72 movable relative to the elastic mechanism housing 71, and an elastic member 73. In some embodiments, the elastic mechanism housing 71 is fixedly connected to the first fixed plate 1, the elastic mechanism mandrel 72 is fixedly connected to the second fixed plate 2, and the elastic member 73 connects the elastic mechanism housing 71 and the elastic mechanism mandrel 72. In some embodiments, the elastic member 73 provides an elastic force to the elastic mechanism mandrel 72 based on the elastic mechanism housing 71 to cause the second fixed plate 2 to have a tendency to approach or move away from the first fixed plate 1. In some embodiments, at least a component of the elastic force provided by the elastic member 73 is opposite to the direction of the gravity of the device.

[0061] For example, the second fixed plate 2 is below the first fixed plate 1, and the elastic member 73 provides an elastic force to the elastic mechanism mandrel 72 based on the elastic mechanism housing 71 to cause the second fixed plate 2 to have a tendency to approach the first fixed plate 1. For example, the second fixed plate 2 is above the first fixed plate 1, and the elastic member 73 provides an elastic force to the elastic mechanism mandrel 72 based on the elastic mechanism housing 71 to cause the second fixed plate 2 to have a tendency to move away from the first fixed plate 1.

[0062] In one or more embodiments of the present specification, referring to Figures 1 to 3 As shown, the two-axis vibration reduction device can be used for a suspended device. In some embodiments, the two-axis vibration reduction device can be a suspended two-axis vibration reduction device. In some embodiments, the first fixed plate 1 of the two-axis vibration reduction device can be above the second fixed plate 2, and the device is below the second fixed plate 2. In some embodiments, the first fixed plate 1 is fixed to the ceiling, and the second fixed plate 2 and the device are suspended below the first fixed plate 1.

[0063] In some embodiments, referring to Figures 1 to 3 , in combination withFigure 8 、 Figure 9 As shown in FIG. 7, the elastic mechanism 7 comprises an elastic mechanism housing 71, an elastic mechanism mandrel 72 capable of moving relative to the elastic mechanism housing 71, and an elastic member 73.

[0064] In some embodiments, the elastic mechanism housing 71 is fixedly connected with the first fixed plate 1, and the elastic mechanism mandrel 72 penetrates through the elastic mechanism housing 71 and is fixedly connected with the second fixed plate 2.

[0065] In some embodiments, the elastic mechanism housing 71 has a cylindrical structure. In some embodiments, the outer surface of the elastic mechanism housing 71 is fixedly connected with the first fixed plate 1. In some embodiments, the elastic mechanism mandrel 72 has a rod structure. The elastic mechanism mandrel 72 is slidably connected with the inner wall of the elastic mechanism housing 71.

[0066] In some embodiments, the elastic member 73 connects the elastic mechanism housing 71 and the elastic mechanism mandrel 72, and provides an elastic force from the elastic mechanism housing 71 to the elastic mechanism mandrel 72 to drive the elastic mechanism mandrel 72 to move towards the first fixed plate 1 (e.g. move upwards along the second direction Z), at least a component of the elastic force being opposite to the direction of the gravity of the device. In some embodiments, the elastic member 73 provides an upward elastic force from the elastic mechanism housing 71 to the elastic mechanism mandrel 72 to make the elastic mechanism mandrel 72 with the second fixed plate 2 have a tendency to move upwards relative to the elastic mechanism housing 71, so as to make the second fixed plate 2 have a tendency to move upwards relative to the first fixed plate 1.

[0067] In some embodiments, the elastic force provided by the elastic member 73 can match the gravity of the device suspended on the second fixed plate 2, so as to compensate the gravity of the device, adjust and balance the mass of the device. In some embodiments, since the elastic force compensates the gravity of the device, the second direction motor 4 does not need to bear the gravity of the device, but only needs to output a reverse wave opposite to the vibration of the device along the second direction Z, so as to accurately implement vibration reduction. In some embodiments, after the elastic member 73 compensates the gravity of the device, the elastic mechanism mandrel 72 is configured to move relative to the elastic mechanism housing 71 within a first range along the second direction Z, so as to provide a space for the second fixed plate 2 to move upwards or downwards relative to the first fixed plate 1 when the second direction motor 4 is working.

[0068] In some embodiments, the elastic member 73 can be a spring.

[0069] In some embodiments, the elastic mechanism 7 can include a locking nut 75. In some embodiments, the elastic mechanism housing 71 is threadedly connected with the first fixed plate 1. In some embodiments, the outer surface of the elastic mechanism housing 71 is provided with external threads, and the first fixed plate 1 is provided with a hole for accommodating the elastic mechanism housing 71, and the inside of the hole is provided with internal threads to allow the elastic mechanism housing 71 to be threadedly connected with the first fixed plate 1. In some embodiments, the locking nut 75 is threadedly connected with the elastic mechanism housing 71, and the locking nut 75 is used to lock the elastic mechanism housing 71 relative to the first fixed plate 1. In some embodiments, the locking nut 75 can be rotated relative to the elastic mechanism housing 71 and abut against the first fixed plate 1, based on the elastic mechanism housing 71 applying a force to the first fixed plate 1, thereby reducing the gap between the external threads of the elastic mechanism housing 71 and the internal threads of the first fixed plate 1, thereby achieving locking of the elastic mechanism housing 71 relative to the first fixed plate 1.

[0070] In other embodiments, the elastic mechanism 7 can include a fixing nut 74 and a locking nut 75. In some embodiments, the fixing nut 74 is threadedly connected with the elastic mechanism housing 71, and the fixing nut 74 is provided with a stepped structure 741, and the first fixed plate 1 is provided with a stepped groove 11 matching the stepped structure 741. In some embodiments, the stepped structure 741 of the fixing nut 74 can be a two-level or more stepped structure. In some embodiments, the upper outer diameter of the stepped structure 741 of the fixing nut 74 is greater than the lower outer diameter, so that the fixing nut 74 can be erected inside the stepped groove 11, and when the fixing nut 74 has a downward movement tendency, the stepped groove 11 can block the downward movement of the fixing nut 74, i.e. limit the downward movement of the fixing nut 74 in the second direction Z.

[0071] In some embodiments, the two-axis vibration reduction device can include a plurality of elastic mechanisms 7 provided with a stepped structure 741, and correspondingly, the first fixed plate 1 is provided with a plurality of stepped grooves 11. In some embodiments, the stepped structure 741 of the fixing nut 74 of each elastic mechanism 7 is arranged inside a corresponding stepped groove 11.

[0072] In some embodiments, the plurality of elastic mechanisms 7 of the two-axis vibration reduction device are pre-configured in an equal height state in the initial state, for example, the elastic mechanism shafts 72 of the plurality of elastic mechanisms 7 are in the same position relative to the elastic mechanism housings 71, so that the second fixed plate 2 can be parallel to the first fixed plate 1 after assembly. In some embodiments, the step structures of the plurality of stepped grooves 11 have the same shape and depth. Therefore, when the plurality of elastic mechanisms 7 adjusted to the equal height state are arranged into the corresponding stepped grooves 11, the ends of the elastic mechanism shafts 72 of the plurality of elastic mechanisms 7 can be in the same plane parallel to the first fixed plate 1 without adjusting the positional relationship between the elastic mechanism housings 71 of the plurality of elastic mechanisms 7 and the first fixed plate 1, and the parallelism between the second fixed plate 2 and the first fixed plate 1 can be achieved after the second fixed plate 2 is fixed with the ends of the elastic mechanism shafts 72 of the plurality of elastic mechanisms 7. The cooperation of the step structure 741 and the stepped groove 11 facilitates the assembly between the elastic mechanism 7 and the first fixed plate 1, and facilitates the parallelism between the second fixed plate 2 and the first fixed plate.

[0073] In some embodiments, the fixed nut 74 is fixedly connected with the first fixed plate 1. In some embodiments, referring to FIG. 6, one or more fasteners pass through the step structure 741 of the fixed nut 74 from top to bottom and are fixedly connected with the first fixed plate 1, which not only can limit the upward movement of the fixed nut 74 in the second direction Z, but also can further limit the movement of the fixed nut 74 in the first direction X and the third direction Y. Figure 2

[0074] In some embodiments, the locking nut 75 is threadedly connected with the elastic mechanism housing 71. In some embodiments, the outer surface of the elastic mechanism housing 71 is provided with external threads, and the fixed nut 74 is provided with internal threads to allow the elastic mechanism housing 71 to be threadedly connected with the fixed nut 74. In some embodiments, the locking nut 75 is threadedly connected with the elastic mechanism housing 71, and the locking nut 75 is used to lock the fixed nut 74 relative to the elastic mechanism housing 71. In some embodiments, the locking nut 75 can rotate relative to the elastic mechanism housing 71 and abut against the fixed nut 74, based on the elastic mechanism housing 71 applying a force to the fixed nut 74, so as to reduce the gap between the external threads of the elastic mechanism housing 71 and the internal threads of the fixed nut 74, thereby achieving the locking of the fixed nut 74 relative to the elastic mechanism housing 71.

[0075] In some embodiments, one end of the elastic mechanism shaft 72 passes through the elastic mechanism housing 71 and is fixedly connected with the second fixed plate 2, and the other end of the elastic mechanism shaft 72 is provided with an elastic member fixing portion 721.

[0076] ​In some embodiments, the elastic mechanism housing 71 has an elastic member accommodating space inside. The elastic member 73 abuts against the inner wall of the elastic member accommodating space and the elastic member fixing portion 721.

[0077] In some embodiments, the elastic mechanism housing 71 has a cylindrical structure. In some embodiments, one end (e.g., the lower end in Figure 7 、 Figure 8 ) of the elastic mechanism shaft 72 can penetrate through the bottom plate of the cylindrical structure of the elastic mechanism housing 71 and be slidably connected to the bottom plate. Figure 7 、 Figure 8 In some embodiments, one end (e.g., the lower end in 、

[0078] ) of the elastic mechanism shaft 72 can be fixedly connected to the second fixing plate 2 by a fastener.

[0079] In some embodiments, the elastic mechanism housing 71 has a cylindrical structure. In some embodiments, one end (e.g., the lower end in 、

[0080] In some embodiments, the elastic mechanism 7 can further include a limiting nut 76. In some embodiments, the other end (e.g., the lower end in Figure 8 、 Figure 9 ) of the elastic mechanism shaft 72 is provided with the limiting nut 76, which is located outside the elastic mechanism housing 71 and used to limit the position of the elastic mechanism shaft 72 relative to the elastic mechanism housing 71 (e.g., the maximum position of upward movement in the second direction Z).

[0081] In one or more embodiments of the present specification, referring to Figure 13 , the two-axis vibration reduction device can be used in a base-type device. In some embodiments, the two-axis vibration reduction device can be a support-type two-axis vibration reduction device. In some embodiments, the second fixing plate 2 of the two-axis vibration reduction device can also be located above the first fixing plate 1, and a device is located above the second fixing plate 2. In some embodiments, the first fixing plate 1 is fixed to the ground or a base on the ground, and the second fixing plate 2 is supported above the first fixing plate 1 by one or more of the aforementioned first direction motor 3, second direction motor 4, first direction hinge 5, second direction hinge 6, and elastic mechanism 7, and a device is fixed or supported on the upper surface of the second fixing plate 2.

[0082] In some embodiments, referring to Figure 13 , in combination with Figure 14 , 15 , the elastic mechanism 7 includes an elastic mechanism housing 71, an elastic mechanism mandrel 72 capable of moving relative to the elastic mechanism housing 71, and an elastic member 73.

[0083] In some embodiments, the elastic mechanism housing 71 is fixedly connected with the first fixed plate 1, and the elastic mechanism mandrel 72 is fixedly connected with the second fixed plate 2.

[0084] In some embodiments, the elastic mechanism housing 71 has a cylindrical structure. In some embodiments, the outer surface of the elastic mechanism housing 71 is fixedly connected with the first fixed plate 1, and in some embodiments, the elastic mechanism mandrel 72 has a rod structure. The elastic mechanism mandrel 72 is slidably connected with the inner wall of the elastic mechanism housing 71.

[0085] The elastic member 73 connects the elastic mechanism housing 71 and the elastic mechanism mandrel 72, and the elastic member 73 provides an elastic force from the elastic mechanism housing 71 to the elastic mechanism mandrel 72 to drive the elastic mechanism mandrel 72 to move towards the second fixed plate 2 (e.g. move upwards along the second direction Z), at least a component of the elastic force is opposite to the direction of the gravity of the device. In some embodiments, the elastic member 73 provides an upward elastic force from the elastic mechanism housing 71 to the elastic mechanism mandrel 72 to make the elastic mechanism mandrel 72 with the second fixed plate 2 have a tendency to move upwards relative to the elastic mechanism housing 71, so that the second fixed plate 2 has a tendency to move upwards relative to the first fixed plate 1.

[0086] In some embodiments, the elastic force provided by the elastic member 73 can match the size of the gravity of the device supported on the second fixed plate 2 to compensate for the gravity of the device. In some embodiments, since the elastic force compensates for the gravity of the device, the second direction motor 4 does not need to bear the gravity of the device, and only needs to output the opposite wave opposite to the vibration of the device in the second direction Z, so as to accurately implement vibration reduction. In some embodiments, after the elastic member 73 compensates for the gravity of the device, the elastic mechanism mandrel 72 is configured to be capable of moving relative to the elastic mechanism housing 71 within a first range of the second direction Z, thereby providing a space for the second fixed plate 2 to move upwards or downwards relative to the first fixed plate 1 when the second direction motor 4 is working.

[0087] In some embodiments, the elastic mechanism 7 can include a locking nut 75. In some embodiments, the elastic mechanism housing 71 is threadedly connected with the first fixed plate 1. In some embodiments, the outer surface of the elastic mechanism housing 71 is provided with external threads, and the first fixed plate 1 is provided with a hole for accommodating the elastic mechanism housing 71, and the inside of the hole is provided with internal threads to allow the elastic mechanism housing 71 to be threadedly connected with the first fixed plate 1. In some embodiments, the locking nut 75 is threadedly connected with the elastic mechanism housing 71, and the locking nut 75 is used to lock the elastic mechanism housing 71 relative to the first fixed plate 1. In some embodiments, the locking nut 75 can be rotated relative to the elastic mechanism housing 71 and abut against the first fixed plate 1, based on the elastic mechanism housing 71 applying a force to the first fixed plate 1, thereby reducing the gap between the external threads of the elastic mechanism housing 71 and the internal threads of the first fixed plate 1, thereby achieving locking of the elastic mechanism housing 71 relative to the first fixed plate 1.

[0088] In some embodiments, the two-axis vibration reduction device can include a plurality of elastic mechanisms 7 provided with external threads, and correspondingly, the first fixed plate 1 is provided with a plurality of holes with internal threads. In some embodiments, the external threads of the elastic mechanism housing 71 of each elastic mechanism 7 are matched with the internal threads of the hole on the corresponding first fixed plate 1.

[0089] In some embodiments, by adjusting the screwing depth between the elastic mechanism housing 71 and the first fixed plate 1, the ends of the elastic mechanism shafts 72 of the plurality of elastic mechanisms 7 can be brought to the same plane parallel to the first fixed plate 1, and then the second fixed plate 2 can be fixed with the ends of the elastic mechanism shafts 72 of the plurality of elastic mechanisms 7 to achieve parallelism of the second fixed plate 2 and the first fixed plate 1.

[0090] In some embodiments, the hole of the first fixed plate 1 for accommodating the elastic mechanism housing 71 can also be used to accommodate the lower end of the elastic mechanism shaft 72 to provide space for the lower end of the elastic mechanism shaft 72 to move in the second direction Z.

[0091] In some embodiments, one end of the elastic mechanism shaft 72 is provided with an elastic member fixing portion 721, and the elastic member fixing portion 721 is fixedly connected with the second fixed plate 2.

[0092] In some embodiments, the inside of the elastic mechanism housing 71 is provided with an elastic member accommodating space, and the elastic member 73 abuts against the inner wall of the elastic member accommodating space and the elastic member fixing portion 721.

[0093] In some embodiments, the elastic mechanism housing 71 is in a cylindrical structure. In some embodiments, the cylindrical structure of the elastic mechanism housing 71 includes a bottom plate and a side wall, and the other end of the elastic mechanism shaft 72 (e.g. Figure 14 、 Figure 15The lower end of the elastic member 73 (e.g., the lower end of the elastic member 73 in FIG. 7) can penetrate the bottom plate of the cylindrical structure of the elastic mechanism housing 71 and be slidably connected with the bottom plate. In some embodiments, one end of the elastic mechanism mandrel 72 (e.g., the upper end of the elastic mechanism mandrel 72 in FIG. 7) can be fixedly connected with the second fixed plate 2 by a fastener, for example, the elastic member fixing portion 721 can be fixedly connected with the second fixed plate 2 by a fastener. Figure 14 、 Figure 15 In some embodiments, the other end of the elastic mechanism mandrel 72 (e.g., the lower end of the elastic mechanism mandrel 72 in FIG. 7) can be fixedly connected with the second fixed plate 2 by a fastener, for example, the elastic member fixing portion 721 can be fixedly connected with the second fixed plate 2 by a fastener.

[0094] In some embodiments, the inside of the cylindrical structure of the elastic mechanism housing 71 forms an elastic member accommodation space, and the elastic member 73 is arranged inside the elastic member accommodation space. In some embodiments, the elastic member 73 can be sleeved on the elastic mechanism mandrel 72. In some embodiments, one end of the elastic member 73 abuts against the bottom plate of the cylindrical structure of the elastic mechanism housing 71, and the other end of the elastic member 73 abuts against the elastic member fixing portion 721.

[0095] In some embodiments, the elastic member fixing portion 721 can be an annular structure extending outward from the upper end of the elastic mechanism mandrel 72 or the side surface of the elastic mechanism mandrel 72.

[0096] In some embodiments, the elastic mechanism 7 can further include a limiting nut 76. In some embodiments, the other end of the elastic mechanism mandrel 72 (e.g., the lower end of the elastic mechanism mandrel 72 in FIG. 7) is provided with the limiting nut 76, and the limiting nut 76 is located outside the elastic mechanism housing 71 and is used to limit the position of the elastic mechanism mandrel 72 relative to the elastic mechanism housing 71 (e.g., the maximum position of upward movement in the second direction Z). In some embodiments, the hole of the first fixed plate 1 for accommodating the elastic mechanism housing 71 can also be used to accommodate the limiting nut 76. Figure 14 、 Figure 15 In some embodiments, the other end of the elastic mechanism mandrel 72 (e.g., the lower end of the elastic mechanism mandrel 72 in FIG. 7) is provided with the limiting nut 76, and the limiting nut 76 is located outside the elastic mechanism housing 71 and is used to limit the position of the elastic mechanism mandrel 72 relative to the elastic mechanism housing 71 (e.g., the maximum position of upward movement in the second direction Z). In some embodiments, the hole of the first fixed plate 1 for accommodating the elastic mechanism housing 71 can also be used to accommodate the limiting nut 76.

[0097] In one or more embodiments of the present specification, referring to FIG. 8, the two-axis vibration damping device can further include a conversion plate 81 and one or more conversion blocks 82, and the conversion plate 81 is fixedly connected with the first fixed plate 1 through the one or more conversion blocks 82. In some embodiments, the conversion plate 81 can be fixed on a fixed object. In some embodiments, the fixed object can be the ground, a support. In other embodiments, the fixed object can also be a ceiling. Figure 1 、 Figure 2 In one or more embodiments of the present specification, referring to FIG. 8, the two-axis vibration damping device can further include a conversion plate 81 and one or more conversion blocks 82, and the conversion plate 81 is fixedly connected with the first fixed plate 1 through the one or more conversion blocks 82. In some embodiments, the conversion plate 81 can be fixed on a fixed object. In some embodiments, the fixed object can be the ground, a support. In other embodiments, the fixed object can also be a ceiling.

[0098] In some embodiments, the adapter blocks 82 can be I-beams, which have high bending strength and high shear capacity. In some embodiments, the adapter blocks 82 can be arranged along the first direction X (e.g., the length direction of the adapter blocks 82 extends along the first direction X). In other embodiments, the adapter blocks 82 can be arranged along the third direction Y (e.g., the length direction of the adapter blocks 82 extends along the third direction Y). In yet other embodiments, some of the adapter blocks 82 can be arranged along the first direction X, and some of the adapter blocks 82 can be arranged along the third direction Y. In some other embodiments, the adapter blocks 82 can be arranged obliquely relative to the first direction X or the third direction Y. In some embodiments, the number of the adapter blocks 82 can be three. In some embodiments, the three adapter blocks 82 can be arranged in an H shape, which can enhance stability and prevent overturning.

[0099] In some embodiments, the adapter plate 81 and the first fixed plate 1 have a gap therebetween, which can facilitate the arrangement of fasteners (e.g., bolts, rivets, welding structures, etc.) for connecting the adapter plate 81 and the first fixed plate 1, and / or for connecting the adapter plate 81 and the fixed object. In some embodiments, the adapter plate 81 is provided with mounting through holes, through which fasteners such as screws can be connected to a top suspension mounting plane (e.g., a ceiling, etc.).

[0100] In one or more embodiments of the present specification, referring to Figures 10 to 12 As shown in the drawings, the two-axis vibration damping device (e.g., a suspension type two-axis vibration damping device or a support type two-axis vibration damping device) can further include a locking mechanism 9, which includes a locking mechanism bracket 91 and a locking plate 92 that are directly or indirectly fixedly connected to the first fixed plate 1. In some embodiments, the locking mechanism bracket 91 is fixedly connected to the first fixed plate 1.

[0101] In some embodiments, the locking plate 92 is configured to be movable relative to the locking mechanism bracket 91 along the second direction Z or fixed relative to the locking mechanism bracket 91. In some embodiments, the locking plate 92 is further configured to be fixed or unfixed relative to the second fixed plate 2.

[0102] In some embodiments, the locking plate 92 is fixed with the second fixed plate 2, and when the locking plate 92 is fixed with the locking mechanism bracket 91, the distance between the second fixed plate 2 and the first fixed plate 1 in the second direction Z is fixed, and the movement of the second fixed plate 2 relative to the first fixed plate 1 in the first direction X and the third direction Y is limited due to the fixation of the locking plate 92 relative to the locking mechanism bracket 91. In this working condition, the second fixed plate 2 is locked relative to the first fixed plate 1, and this locking function is suitable for transportation and other use scenarios that require fixation, so as to avoid damage to the first direction motor 3 and / or the second direction motor 4. In other embodiments, when the locking plate 92 is fixed with the second fixed plate 2 and the locking plate 92 can move relative to the locking mechanism bracket 91 in the second direction Z, the second fixed plate 2 can move relative to the first fixed plate 1 in the second direction Z, and at this time, the relative movement between the locking plate 92 and the locking mechanism bracket 91 plays a certain guiding role on the relative movement between the second fixed plate 2 and the first fixed plate 1. In yet other embodiments, the locking plate 92 is not fixed with the second fixed plate 2, and whether the locking plate 92 is fixed with the locking mechanism bracket 91 does not affect the movement relationship between the second fixed plate 2 and the first fixed plate 1, and the second fixed plate 2 can move freely relative to the first fixed plate 1 (for example, allowing the second fixed plate 2 to vibrate relative to the first fixed plate 1 in the first direction X, the third direction Y, and / or the second direction Z).

[0103] In some embodiments, the locking mechanism bracket 91 includes a crossbeam 911 and a column 912 fixedly connected with the crossbeam 911 and the first fixed plate 1, and the locking plate 92 is arranged between the crossbeam 911 and the first fixed plate 1. In some embodiments, the locking mechanism bracket 91 includes two columns 912, one end of each of the two columns 912 is directly or indirectly fixedly connected with the first fixed plate 1, and the other end of each of the two columns 912 is fixedly connected with one end of the crossbeam 911. In some embodiments, the two columns 912 and the crossbeam 911 form a door-shaped space, and the locking plate 92 can slide in the door-shaped space in the second direction Z.

[0104] In some embodiments, the locking mechanism bracket 91 includes a base 913 fixedly connected with the first fixed plate 1, and one end of each of the two columns 912 is fixedly connected with the base 913.

[0105] In some embodiments, the locking plate 92 has a protruding structure 921 configured to be able to penetrate the crossbeam 911 and abut against the second fixing plate 2. In some embodiments, the protruding structure 921 can be a columnar structure, a conical structure or a boss structure, such as a cylindrical or prismatic structure, a conical or pyramidal structure, or a circular boss structure, etc., which is arranged at the middle of the locking plate 92. In some embodiments, a through hole matching the shape of the protruding structure 921 is formed on the crossbeam 911, and in some embodiments, the through hole is arranged penetratingly along the second direction Z to allow the protruding structure 921 to penetrate the crossbeam 911 and abut against the second fixing plate 2.

[0106] In some embodiments, the locking mechanism 9 further comprises a first connecting member 93 configured to fixedly connect the crossbeam 911 and the locking plate 92. In some embodiments, the locking mechanism 9 further comprises a second connecting member 94 configured to fixedly connect the protruding structure 921 of the locking plate 92 and the second fixing plate 2.

[0107] In some embodiments, the locking mechanism 9 comprises one second connecting member 94 which can connect and fasten the second fixing plate 2 and the protruding structure 921 from bottom to top. In some embodiments, the locking mechanism 9 comprises two first connecting members 93 which penetrate the second fixing plate 2 from bottom to top, connect and fasten the crossbeam 911 and the locking plate 92. In some embodiments, a through hole for the whole first connecting member 93 to pass through is formed on the second fixing plate 2. In some embodiments, the first connecting member 93 is clearance-fitted with the second fixing plate 2, so that the fastening of the first connecting member 93 to the crossbeam 911 and the locking plate 92 will not affect any movement of the second fixing plate 2 (such as movement along the second direction Z or movement along the first direction X or the third direction Y). In some embodiments, the two first connecting members 93 can be located on both sides of the second connecting member 94.

[0108] In some embodiments, the number of locking mechanisms 9 can be multiple, for example, four. In some embodiments, the locking mechanisms 9 can be symmetrically arranged along the first direction X or along the third direction Y.

[0109] In one or more embodiments of the present specification, refer to Figure 4 , Figure 5As shown, the first-direction hinge 5 is provided with a plurality of first-direction deformation grooves 53. In some embodiments, the plurality of first-direction deformation grooves 53 are sequentially arranged along the first direction X, the plurality of first-direction deformation grooves 53 all penetrate the first-direction hinge 5 along the second direction Z, the plurality of first-direction deformation grooves 53 extend respectively in the third direction Y, and the spacing between the plurality of first-direction deformation grooves 53 in the first direction X is smaller than the spacing between the plurality of first-direction deformation grooves 53 in the third direction Y, wherein the third direction Y intersects the first direction X, and the second direction Z is perpendicular to the first direction X and the third direction Y.

[0110] In some embodiments, the first direction deformation groove 53 may include a first direction outer deformation groove 531 and a first direction inner deformation groove 532. In some embodiments, the first direction hinge 5 further has a first direction auxiliary deformation groove 54 extending in the third direction Y.

[0111] In some embodiments, the first-direction outer deformation groove 531 and the first-direction auxiliary deformation groove 54 are not connected to each other. In some embodiments, the outermost first-direction outer deformation groove 531 and the first-direction auxiliary deformation groove 54 generally form a frame shape, with the outer frame 51 located outside the frame and the inner frame 52 located inside the frame. In some embodiments, the first-direction inner deformation groove 532 is located inside the frame.

[0112] In some embodiments, the length of the first direction outer deformation groove 531 is greater than the length of the first direction inner deformation groove 532. In some embodiments, two first direction inner deformation grooves 532 (for example, Figure 4 ), there is a spacing A between the two first-direction inner deformation grooves 532. In some embodiments, there is a spacing B between the first-direction inner deformation groove 532 and the first-direction outer deformation groove 531. In some embodiments, spacing A is greater than spacing B, so that deformation at spacing B is easier than deformation at spacing A, thereby making the rigidity of the first-direction hinge 5 in the first direction X less than that in the third direction Y. In addition, because the first-direction hinge 5 has no possibility of deformation in the second direction Z, the rigidity of the first-direction hinge 5 in the first direction X is obviously less than that in the second direction Z. Based on this, the first-direction hinge 5 can move in the first direction X but cannot move in the third direction Y or the second direction Z, thereby achieving unidirectional guidance in the first direction X.

[0113] In some embodiments, see Figure 5As shown, there can be multiple first-direction inner deformation grooves 532. In some embodiments, the first-direction inner deformation grooves 532 can have multiple shapes. In some embodiments, multiple first-direction inner deformation grooves 532 of different shapes can be arranged on the same first-direction hinge 5. In some embodiments, the first-direction inner deformation grooves 532 can be in a straight line shape. In some embodiments, the first-direction inner deformation grooves 532 can be in a U-shape. In some embodiments, the straight first-direction inner deformation grooves 532 and the U-shaped first-direction inner deformation grooves 532 are arranged alternately. In some embodiments, the straight first-direction inner deformation grooves 532 and the U-shaped first-direction inner deformation grooves 532 are arranged alternately, for example, one or more straight first-direction inner deformation grooves 532 can be arranged inside the U-shaped structure of the U-shaped first-direction inner deformation groove 532. In some embodiments, the first-direction inner deformation grooves 532 can be connected to or not connected to the first-direction auxiliary deformation grooves 54.

[0114] For example, see Figure 5 The upper left corner area of ​​the embodiment includes, from left to right, a straight-line first-direction inner deformation groove 532, a U-shaped first-direction inner deformation groove 532, and two straight-line first-direction inner deformation grooves 532 disposed within the U-shaped structure of the U-shaped first-direction inner deformation groove 532. In this example, the straight-line first-direction inner deformation groove 532 is connected to the first-direction auxiliary deformation groove 54, while the two ends of the U-shaped first-direction inner deformation groove 532 are not connected to the first-direction auxiliary deformation groove 54.

[0115] In one or more embodiments of this specification, see Figure 6 、 Figure 7 As shown, a plurality of second-direction deformation grooves 61 are provided on the second-direction hinge 6. In some embodiments, the plurality of second-direction deformation grooves 61 are sequentially arranged along the second direction Z, the plurality of second-direction deformation grooves 61 all penetrate the second-direction hinge 6 along the first direction X, the plurality of second-direction deformation grooves 61 extend respectively in the third direction Y, and the spacing between the plurality of second-direction deformation grooves 61 in the second direction Z is smaller than the spacing between the plurality of second-direction deformation grooves 61 in the third direction Y; or, the plurality of second-direction deformation grooves 61 are sequentially arranged along the second direction Z, the plurality of second-direction deformation grooves 61 all penetrate the second-direction hinge 6 along the third direction Y, the plurality of second-direction deformation grooves 61 extend respectively in the first direction X, and the spacing between the plurality of second-direction deformation grooves 61 in the second direction Z is smaller than the spacing between the plurality of second-direction deformation grooves 61 in the first direction X, wherein the third direction Y intersects the first direction X, and the second direction Z is perpendicular to the first direction X and the third direction Y.

[0116] In some embodiments, the second direction deformation groove 61 can include a second direction outer side deformation groove 611 and a second direction inner side deformation groove 612. In some embodiments, the second direction hinge 6 is further provided with a second direction auxiliary deformation groove 62 extending in the second direction Z.

[0117] In some embodiments, the second direction outer side deformation groove 611 and the second direction auxiliary deformation groove 62 are connected or not connected with each other, for example Figure 6 As shown, the second direction outer side deformation groove 611 is not connected with the second direction auxiliary deformation groove 62, for example Figure 7 As shown, the second direction outer side deformation groove 611 located at the outermost side (for example, the uppermost side or the lowermost side) is not connected with the second direction auxiliary deformation groove 62, and the second direction outer side deformation groove 611 located at the inner side is connected with the second direction auxiliary deformation groove 62. In some embodiments, the second direction outer side deformation groove 611 located at the outermost side and the second direction auxiliary deformation groove 62 substantially form a frame type. In some embodiments, the second direction inner side deformation groove 612 is located inside the frame type.

[0118] In some embodiments, the length of the second direction outer side deformation groove 611 is greater than the length of the second direction inner side deformation groove 612. In some embodiments, two second direction inner side deformation grooves 612 are arranged in the same straight line in the third direction Y (for example Figure 6 As shown in the lower side of FIG. 6B, the two second direction inner side deformation grooves 612 have a spacing C between them. In some embodiments, the second direction inner side deformation groove 612 and the second direction outer side deformation groove 611 have a spacing D between them. In some embodiments, the spacing C is greater than the spacing D, so that the deformation at the spacing D is easier than the deformation at the spacing C, so that the rigidity of the second direction hinge 6 in the second direction Z is less than the rigidity in the third direction Y. In addition, since the first direction hinge 5 does not have deformation possibility in the first direction X, the rigidity of the second direction hinge 6 in the second direction Z is obviously less than the rigidity in the first direction X. Based on this, the second direction hinge 6 can move in the second direction Z and cannot move in the first direction X and the third direction Y, thereby realizing the single direction guiding in the second direction Z.

[0119] In some embodiments, referring to Figure 7As shown, there can be multiple second-direction inner deformation grooves 612. In some embodiments, the second-direction inner deformation grooves 612 can have multiple shapes. In some embodiments, multiple second-direction inner deformation grooves 612 of different shapes can be arranged on the same second-direction hinge 6. In some embodiments, the second-direction inner deformation groove 612 can be in a straight line shape. In some embodiments, the second-direction inner deformation groove 612 can be in a C-shape. In some embodiments, the straight-line second-direction inner deformation grooves 612 and the C-shaped second-direction inner deformation grooves 612 are arranged alternately. In some embodiments, the straight-line second-direction inner deformation grooves 612 and the C-shaped second-direction inner deformation grooves 612 are arranged in an interlaced manner, for example, one or more straight-line second-direction inner deformation grooves 612 can be arranged inside the C-shaped structure of the C-shaped second-direction inner deformation groove 612. In some embodiments, the second-direction inner deformation groove 612 can be connected to the second-direction auxiliary deformation groove 62 or not.

[0120] For example, see Figure 7 The left side region includes: a C-shaped second-direction inner deformation groove 612, and two straight-line second-direction inner deformation grooves 612 disposed within the C-shaped structure of the C-shaped second-direction inner deformation groove 612. In this example, the straight-line second-direction inner deformation groove 612 is connected to the second-direction auxiliary deformation groove 62, and the two ends of the C-shaped second-direction inner deformation groove 612 are not connected to the second-direction auxiliary deformation groove 62. In this example, there are four second-direction outer deformation grooves 611, two of which are located on the upper side of the second-direction hinge 6, and the other two are located on the lower side of the second-direction hinge 6.

[0121] In one or more embodiments of this specification, see Figure 3 As shown, the two-axis vibration reduction device may include two second direction hinges 6, and the two second direction hinges 6 are located on both sides of the first direction hinge 5. In some embodiments, the two-axis vibration reduction device may include a first direction motor 3, and the first direction motor 3 may be arranged in the middle of the first direction hinge 5. In some embodiments, the two-axis vibration reduction device may include four second direction motors 4, and the four second direction motors 4 are arranged around the first direction motor 3. In some embodiments, the two-axis vibration reduction device may include four elastic mechanisms 7, and the four elastic mechanisms 7 are arranged around the first direction motor 3. In some embodiments, the four second direction motors 4 and the four elastic mechanisms 7 may be arranged alternately around the periphery of the first direction motor 3, for example Figure 3In some embodiments, the four second direction motors 4 are located at the four corners of the first direction motor 3, and the four elastic mechanisms 7 are located at the upper, lower, left and right of the first direction motor 3. In some embodiments, the two second direction hinges 6 can be centrosymmetric relative to the first direction motor 3.

[0122] In some embodiments, as shown in FIG. 1, the first direction hinge 5 is connected to the first fixed plate 1 through the first direction motor 3. Figure 2 、 Figure 3 In some embodiments, as shown in FIG. 1, the first direction hinge 5 is connected to the first fixed plate 1 through the first direction motor 3.

[0123] In some embodiments, the first direction motor 3 includes a housing 31 and a motor shaft 32 capable of linear motion relative to the housing 31. In some embodiments, the housing 31 can be fixedly connected to the first fixed plate 1 through a first motor fixing block 33. In some embodiments, the first motor fixing block 33 can be arranged inside the first direction hinge through hole. In some embodiments, the motor shaft 32 can be fixedly connected to the inner frame 52 through a second motor fixing block 34.

[0124] The above detailed description has described the basic concepts, and it is obvious that the above detailed description is only used as an example and does not limit the present specification. Although it is not explicitly stated herein, those skilled in the art can make various modifications, improvements and corrections to the present specification. Such modifications, improvements and corrections are taught in the present specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of the present specification.

Claims

1. A two-axis vibration reduction device, characterized in that: include: A first fixing plate, a second fixing plate, a first direction motor, a second direction motor, a first direction hinge, a second direction hinge, and an elastic mechanism; The first direction hinge includes an outer frame and an inner frame provided inside the outer frame, the outer frame is fixedly connected to the first fixing plate, and the inner frame is fixedly connected to the first direction motor, and the first direction motor is used to drive the inner frame to move relative to the first fixing plate in the first direction; The first-direction hinge is configured such that: the rigidity between the inner frame and the outer frame along the first direction is smaller than the rigidity along other directions except the first direction; The second direction hinge connects the inner frame and the second fixing plate, and the second direction motor is used to drive the second fixing plate to move relative to the inner frame along the second direction; The second-direction hinge is configured such that: rigidity along the second direction is less than rigidity along directions other than the second direction; The second fixing plate is used to carry a device, and the elastic mechanism provides an elastic force to the second fixing plate based on the first fixing plate to offset at least part of the gravity of the device; The two-axis shock absorbing device further includes: a locking mechanism, the locking mechanism including: a locking mechanism bracket and a locking plate directly or indirectly fixedly connected to the first fixing plate; Wherein, the locking plate is configured to be movable relative to the locking mechanism bracket along the second direction or fixed relative to the locking mechanism bracket; The locking plate is further configured to be fixable or releasable relative to the second fixing plate.

2. The two-axis vibration reduction device according to claim 1, characterized in that: The first fixing plate is located above the second fixing plate, and the device is located below the second fixing plate; The elastic mechanism comprises: an elastic mechanism housing, an elastic mechanism core shaft capable of moving relative to the elastic mechanism housing, and an elastic member; The elastic mechanism housing is fixedly connected to the first fixing plate, and the elastic mechanism core shaft passes through the elastic mechanism housing and is fixedly connected to the second fixing plate; The elastic member connects the elastic mechanism housing and the elastic mechanism core shaft, and the elastic member provides the elastic force to the elastic mechanism core shaft based on the elastic mechanism housing to drive the elastic mechanism core shaft to move toward the first fixed plate, and at least a part of the component of the elastic force is opposite to the direction of the gravity of the device.

3. The two-axis vibration reduction device according to claim 2, characterized in that: The elastic mechanism includes: a fixing nut and a locking nut; The fixing nut is threadedly connected to the elastic mechanism housing, the fixing nut has a step structure, the first fixing plate is provided with a step groove matching the step structure, and the fixing nut is fixedly connected to the first fixing plate; The locking nut is threadedly connected to the elastic mechanism housing, and the locking nut is used to lock the fixing nut relative to the elastic mechanism housing.

4. The two-axis vibration reduction device according to claim 2, characterized in that: The elastic mechanism includes: a locking nut; The elastic mechanism housing is threadedly connected to the first fixing plate, and the locking nut is threadedly connected to the elastic mechanism housing. The locking nut is used to lock the elastic mechanism housing relative to the first fixing plate.

5. The two-shaft vibration reduction device according to any one of claims 2 to 4, characterized in that: One end of the elastic mechanism core shaft passes through the elastic mechanism housing and is fixedly connected to the second fixing plate, and the other end of the elastic mechanism core shaft is provided with an elastic member fixing portion; An elastic member accommodating space is defined inside the elastic mechanism housing, and the elastic member abuts against an inner wall of the elastic member accommodating space and the elastic member fixing portion.

6. The two-axis vibration reduction device according to claim 1, characterized in that: The second fixing plate is located above the first fixing plate, and the device is arranged above the second fixing plate; The elastic mechanism comprises: an elastic mechanism housing, an elastic mechanism core shaft capable of moving relative to the elastic mechanism housing, and an elastic member; The elastic mechanism housing is fixedly connected to the first fixing plate, and the elastic mechanism core shaft is fixedly connected to the second fixing plate; The elastic member connects the elastic mechanism housing and the elastic mechanism core shaft, and the elastic member provides the elastic force to the elastic mechanism core shaft based on the elastic mechanism housing to drive the elastic mechanism core shaft to move toward the second fixed plate, and at least a part of the component of the elastic force is opposite to the direction of the gravity of the device.

7. The two-axis vibration reduction device according to claim 6, characterized in that: The elastic mechanism includes: a locking nut; The first fixing plate is provided with an elastic mechanism accommodating groove, and the elastic mechanism housing is threadedly connected to the interior of the elastic mechanism accommodating groove; The locking nut is threadedly connected to the elastic mechanism housing, and the locking nut is used to lock the elastic mechanism housing relative to the first fixing plate.

8. The two-shaft vibration reduction device according to claim 6 or 7, characterized in that: An elastic member fixing portion is provided at one end of the elastic mechanism core shaft, and the elastic member fixing portion is fixedly connected to the second fixing plate; An elastic member accommodating space is defined inside the elastic mechanism housing, and the elastic member abuts against an inner wall of the elastic member accommodating space and the elastic member fixing portion.

9. The two-axis vibration reduction device according to claim 1, characterized in that: Also includes: an adapter plate and one or more adapter blocks, wherein the adapter plate is fixedly connected to the first fixed plate via the one or more adapter blocks; There is a gap between the adapter plate and the first fixing plate.

10. The two-axis vibration reduction device according to claim 1, characterized in that: The locking mechanism bracket includes: a crossbeam and a column fixedly connecting the crossbeam and the first fixing plate, the locking plate is arranged between the crossbeam and the first fixing plate, and the locking plate has a protrusion structure, and the protrusion structure is configured to pass through the crossbeam and abut against the second fixing plate; The locking mechanism further comprises: a first connecting member and a second connecting member; The first connecting member is configured to fixedly connect the crossbeam and the locking plate; The second connecting member is configured to fixedly connect the protruding structure of the locking plate and the second fixing plate.

11. The two-axis vibration reduction device according to claim 1, characterized in that: The first direction hinge is provided with a plurality of first direction deformation grooves; A plurality of first-direction deformation grooves are sequentially arranged along the first direction, the plurality of first-direction deformation grooves all penetrate the first-direction hinge along the second direction, the plurality of first-direction deformation grooves extend in a third direction respectively, and a spacing between the plurality of first-direction deformation grooves in the first direction is smaller than a spacing between the plurality of first-direction deformation grooves in the third direction; The third direction intersects the first direction, and the second direction is perpendicular to the first direction and the third direction.

12. The two-axis vibration reduction device according to claim 1, characterized in that: The second direction hinge is provided with a plurality of second direction deformation grooves; A plurality of second-direction deformation grooves are arranged in sequence along the second direction, the plurality of second-direction deformation grooves all penetrate the second-direction hinge along the first direction, the plurality of second-direction deformation grooves extend in the third direction respectively, and a spacing between the plurality of second-direction deformation grooves in the second direction is smaller than a spacing between the plurality of second-direction deformation grooves in the third direction; Alternatively, a plurality of second-direction deformation grooves are arranged in sequence along the second direction, the plurality of second-direction deformation grooves all penetrate the second-direction hinge along the third direction, the plurality of second-direction deformation grooves extend in the first direction respectively, and a spacing between the plurality of second-direction deformation grooves in the second direction is smaller than a spacing between the plurality of second-direction deformation grooves in the first direction; The third direction intersects the first direction, and the second direction is perpendicular to the first direction and the third direction.

13. The two-axis vibration reduction device according to claim 1, characterized in that: The first direction motor provides a first reverse vibration opposite to the first vibration based on a first vibration of the device in the first direction; The second direction motor provides a second reverse vibration opposite to the second vibration based on a second vibration of the device in the second direction.

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