Flower basket lifting device and silicon wafer cleaning equipment

Abstract

The invention discloses a flower basket lifting device and silicon wafer cleaning equipment. The flower basket lifting device comprises a first X-axis displacement mechanism, at least one first Z-axis displacement mechanism and a bearing seat, the bearing seat is used for bearing a flower basket, and in a space rectangular coordinate system with X, Y and Z axes as coordinate axes, the flower basket comprises at least two accommodating spaces which are arranged in parallel along the X-axis direction and are used for accommodating silicon wafers; the first Z-axis displacement mechanism is connected with the bearing seat, and the first Z-axis displacement mechanism is used for driving the bearing seat displacement mechanism to move in the Z-axis direction; the first X-axis displacement mechanism is connected with the first Z-axis displacement mechanism, and the first X-axis displacement mechanism is used for driving the first Z-axis displacement mechanism to move in the X-axis direction. The flower basket lifting device can adapt to flower baskets of various specifications, the application range of the flower basket lifting device is widened, the loading capacity of the flower baskets can be increased, and the efficiency of the flower basket lifting device is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of silicon wafer cleaning, and particularly relates to a flower basket lifting device and silicon wafer cleaning equipment. Background Art

[0002] In existing silicon wafer cleaning machines, the basket is typically placed on a basket lift mechanism, which controls the basket's elevation, allowing it to receive silicon wafers transported by a conveyor belt. Conventional baskets only have a single compartment, which can hold multiple wafers stacked on top of each other. This results in limited loading capacity and low loading efficiency. To increase the basket's wafer loading capacity, the basket can be configured with multiple compartments. However, conventional basket lift mechanisms are not suitable for baskets with multiple compartments.

[0003] The information disclosed in this background technology section is only intended to enhance understanding of the overall background of the invention and should not be regarded as an admission or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the Invention

[0004] The object of the present invention is to provide a flower basket lifting device and a silicon wafer cleaning device, which can adapt to a variety of flower baskets of different specifications and increase the applicable scope of the lifting device.

[0005] To achieve the above-mentioned object, a specific embodiment of the present invention provides a technical solution as follows: a basket lifting device, applied to a silicon wafer cleaning device, the basket lifting device comprising a first X-axis displacement mechanism, at least one first Z-axis displacement mechanism, and a bearing seat;

[0006] The supporting seat is used to support the flower basket. In a spatial rectangular coordinate system with X, Y, and Z axes as coordinate axes, the flower basket includes at least two accommodating spaces for accommodating silicon wafers arranged in parallel along the X-axis direction;

[0007] The first Z-axis displacement mechanism is connected to the bearing seat, and the first Z-axis displacement mechanism is used to drive the bearing seat displacement mechanism to move along the Z-axis direction;

[0008] The first X-axis displacement mechanism is connected to the first Z-axis displacement mechanism, and the first X-axis displacement mechanism is used to drive the first Z-axis displacement mechanism to move along the X-axis direction so that different accommodation spaces are aligned with the silicon wafers. There is an angle between the X-axis direction and the silicon wafer transportation direction.

[0009] In one or more embodiments of the present invention, the flower basket lifting device further includes a protection assembly, which includes a protection drive unit and an elastic member. The protection drive unit is mounted on a supporting seat, and the elastic member is connected to the protection drive unit. The protection drive unit is configured to drive the elastic member to perform linear motion in horizontal sliding, so that the elastic member contacts the silicon wafer in the flower basket or moves the elastic member away from the flower basket.

[0010] In one or more embodiments of the present invention, the movement direction of the elastic member is the Y-axis direction.

[0011] In one or more embodiments of the present invention, the supporting seat is provided with an escape opening for the elastic member to move.

[0012] In one or more embodiments of the present invention, the first X-axis displacement mechanism includes a first X-axis fixed base and at least one first X-axis drive unit, the first X-axis drive unit is mounted on the first X-axis fixed base, and the output end of the first X-axis drive unit is connected to the first Z-axis displacement mechanism.

[0013] In one or more embodiments of the present invention, the first X-axis driving unit and the first Z-axis displacement mechanism are disposed on opposite sides of the first X-axis fixing seat.

[0014] In one or more embodiments of the present invention, the first Z-axis displacement mechanism includes a first Z-axis fixed seat and a first Z-axis drive unit, the first Z-axis drive unit is installed on the first Z-axis fixed seat, the output end of the first Z-axis drive unit is connected to the bearing seat, and the first Z-axis fixed seat is connected to the first X-axis displacement mechanism.

[0015] A specific embodiment of the present invention further provides a silicon wafer cleaning device, comprising:

[0016] Such as the flower basket lifting device mentioned above;

[0017] The wafer inserting device includes a first conveying mechanism for transporting the silicon wafers to the basket on the basket lifting device;

[0018] A cleaning device, comprising a plurality of cleaning tanks arranged in parallel, for cleaning the silicon wafers in the flower basket;

[0019] A cleaning conveyor line is located downstream of the wafer inserting device and upstream of the cleaning device along the transport direction of the wafer basket, and is used to transport the wafer basket to the cleaning device.

[0020] A flower basket conveying line is located upstream of the inserting device and downstream of the cleaning device along the conveying direction of the flower baskets, and is used to transport empty flower baskets;

[0021] The robot arm device is arranged above the starting ends of the flower basket lifting device, the cleaning conveyor line and the transfer conveyor line, and is used to transfer the flower baskets on the flower basket lifting device to the cleaning conveyor line, and to transfer the flower baskets on the flower basket conveyor line to the flower basket lifting device.

[0022] In one or more embodiments of the present invention, the inserting device further comprises:

[0023] a workbench, on which a feeding trough is provided, the first conveying mechanism is installed on the workbench, the feeding trough is located at the starting end of the first conveying mechanism, and the feeding trough is used to contain water;

[0024] A wafer loading mechanism is mounted on the workbench and partially located in the loading trough. The loading mechanism is used to drive a wafer holder loaded with multiple silicon wafers to move along the Z-axis direction.

[0025] The wafer separation mechanism includes a plurality of liquid sprayers disposed in the loading trough, the liquid sprayers being used to spray liquid onto the silicon wafers on the wafer support to separate the top silicon wafer on the wafer support from the remaining silicon wafers;

[0026] The wafer suction and conveying mechanism includes a suction cup and a wafer suction and conveying assembly. The end of the wafer suction and conveying assembly is adjacent to the starting end of the first conveying mechanism. The suction cup is used to suck the top silicon wafer on the wafer holder and make the top silicon wafer on the wafer holder collide with the wafer suction and conveying assembly. The wafer suction and conveying assembly is used to transport the silicon wafer sucked by the suction cup to the first conveying mechanism.

[0027] In one or more embodiments of the present invention, the wafer suction conveying assembly includes an adsorption seat and a conveyor belt structure installed on the adsorption seat, and the suction cup is installed below the adsorption seat, and the suction cup is used to suck the silicon wafer so that the silicon wafer is against the conveyor belt structure.

[0028] In one or more embodiments of the present invention, the film loading mechanism includes a film loading drive unit and a film loading base. The film loading base is used to carry the film holder, and the film loading drive unit is used to drive the film loading base to move along the Z-axis direction.

[0029] In one or more embodiments of the present invention, the robotic arm device includes a second X-axis displacement mechanism, at least one second Z-axis displacement mechanism, and a first clamping mechanism mounted on the second Z-axis displacement mechanism. The second Z-axis displacement mechanism can be slidably mounted on the second X-axis displacement mechanism. The second X-axis displacement mechanism is used to drive the second Z-axis displacement mechanism to move along the X-axis direction. The second Z-axis displacement mechanism is used to drive the first clamping mechanism to move along the X-axis direction so that the first clamping mechanism approaches or moves away from the flower basket on the flower basket lifting device. The first clamping mechanism is used to clamp the flower basket on the flower basket lifting device.

[0030] In one or more embodiments of the present invention, the inserting device includes a plurality of first conveying mechanisms arranged in parallel, the cleaning conveyor line includes a first cleaning conveyor line and a second cleaning conveyor line, the first cleaning conveyor line and the second cleaning conveyor line are respectively arranged on opposite sides of the plurality of first conveying mechanisms, the robotic arm device includes a third X-axis displacement mechanism, a third Z-axis displacement mechanism slidably mounted on the third X-axis displacement mechanism, and a second clamping mechanism mounted on the third Z-axis displacement mechanism, the third X-axis displacement mechanism is used to drive the third Z-axis displacement mechanism to move along the X-axis direction, the third Z-axis displacement mechanism is used to drive the second clamping mechanism to move along the X-axis direction between the first cleaning conveyor line and the second cleaning conveyor line, so that the second clamping mechanism approaches or moves away from the flower basket on the second cleaning conveyor line, and the second clamping mechanism is used to clamp the flower basket on the second cleaning conveyor line.

[0031] In one or more embodiments of the present invention, the cleaning conveyor line includes a cleaning rack, a cleaning conveyor belt installed on the cleaning rack, and a first flipping mechanism. The first flipping mechanism is located at the starting end of the cleaning conveyor belt and is used to flip the flower basket from a vertical state to a horizontal state.

[0032] In one or more embodiments of the present invention, the flower basket conveyor line includes a flower basket stand, a flower basket conveyor belt installed on the flower basket stand, and a second flipping mechanism. The second flipping mechanism is located at the end of the flower basket conveyor belt and is used to flip the flower basket from a horizontal state to a vertical state.

[0033] Compared with the prior art, the flower basket lifting device of the present invention drives the flower basket to move horizontally along the X-axis through the first X-axis displacement mechanism, so that different storage spaces are aligned with the silicon wafers transported by the first conveying mechanism. Therefore, the flower basket lifting device can adapt to flower baskets of various specifications, thereby improving the applicability of the flower basket lifting device. When the flower basket has multiple storage spaces, the loading capacity of the flower basket can also be increased, thereby improving the efficiency of the flower basket lifting device. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0035] Figure 1 is a three-dimensional schematic diagram of a flower basket in a vertical state according to the present invention;

[0036] Figure 2 is a three-dimensional schematic diagram of a flower basket in a horizontal state according to the present invention;

[0037] Figure 3 A partial three-dimensional schematic diagram of a silicon wafer cleaning device according to an embodiment of the present invention;

[0038] Figure 4 A partial three-dimensional schematic diagram of a silicon wafer cleaning device according to an embodiment of the present invention;

[0039] Figure 5 A schematic diagram of a film loading mechanism and a film support in one embodiment of the present invention;

[0040] Figure 6 Schematic diagram of a wafer suction and conveying mechanism and a silicon wafer in one embodiment of the present invention;

[0041] Figure 7 This is a three-dimensional diagram of a flower basket lifting device in one embodiment of the present invention;

[0042] Figure 8 This is a three-dimensional diagram of a flower basket lifting device in one embodiment of the present invention;

[0043] Figure 9 A partial perspective view of a robotic arm device according to an embodiment of the present invention;

[0044] Figure 10 FIG. 1 is a partial perspective view of a robotic arm device according to an embodiment of the present invention.

[0045] Description of main reference numerals:

[0046] 1. Flower basket lifting device; 11. First X-axis displacement mechanism; 111. First X-axis fixing seat; 112. First X-axis drive unit; 12. First Z-axis displacement mechanism; 121. First Z-axis fixing seat; 122. First Z-axis drive unit; 13. Support seat; 131. Avoidance; 14. Protection assembly; 141. Protection drive unit; 142. Elastic member; 143. Protection frame; 2. Frame; 3. Insertion device; 31. Workbench; 311. Loading chute; 32. First conveying mechanism; 33. Loading mechanism; 331. Loading base; 33 2. Wafer loading drive unit; 34. Wafer suction and conveying mechanism; 341. Adsorption seat; 342. Conveyor belt structure; 4. First cleaning conveyor line; 5. Second cleaning conveyor line; 6. Flower basket conveyor line; 7. Robotic arm device; 71. Second X-axis displacement mechanism; 72. Second Z-axis displacement mechanism; 73. First clamping mechanism; 74. Third X-axis displacement mechanism; 75. Third Z-axis displacement mechanism; 76. Second clamping mechanism; 8. Flower basket; 81. Support plate; 82. Rod-shaped support member; 83. Accommodating space; 821. Receiving slot; 9. Wafer holder; 91. Silicon wafer. DETAILED DESCRIPTION

[0047] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0048] As mentioned in the background art, during the production process of single crystal silicon wafers, some impurities or dust will remain on the surface of the silicon wafers, which need to be cleaned before subsequent processing or other steps. In order to achieve automated production, multiple silicon wafers are stacked and placed in a wafer tray.

[0049] like Figure 1 and Figure 2 As shown, the flower basket 8 includes two support plates 81 arranged opposite to each other, and a plurality of rod-shaped support members 82 spaced apart and connected between the two support plates 81. The plurality of support members and the two support plates 81 cooperate to enclose at least one receiving space 83 for receiving silicon wafers 91. The flower basket 8 in this embodiment has two receiving spaces 83. The rod-shaped support members 82 are provided with a plurality of receiving grooves 821 spaced apart along their axial direction. The receiving grooves 821 of the same height on the plurality of rod-shaped support members 82 form a group of receiving grooves 821. Multiple groups of receiving grooves 821 are spaced apart along the height direction on the plurality of rod-shaped support members 82. Each group of receiving grooves 821 receives the edge portion of a silicon wafer 91. That is, when a silicon wafer 91 enters the receiving space, the edge portion of the silicon wafer 91 will be inserted into a group of receiving grooves 821. The receiving grooves 821 not only support the silicon wafers 91, but also allow the plurality of silicon wafers 91 received in the flower basket 8 to be spaced apart in sequence, facilitating subsequent picking and cleaning. In addition, each receiving groove 821 is preferably only inserted with one silicon wafer 91. Figure 1 The flower basket 8 shown is in a vertical position. Figure 2 The flower basket 8 shown is in a horizontal state.

[0050] like Figure 3 and Figure 4 As shown, the silicon wafer cleaning equipment in one embodiment of the present invention includes a frame 2, a basket lifting device 1, a wafer inserting device 3, a cleaning device (not shown in the figure), a cleaning conveyor line, a basket conveyor line 6 and a robotic arm device 7.

[0051] It is understood that the flower basket conveyor line 6 transports the empty flower basket 8 to the end of the flower basket conveyor line 6, the robotic arm device 7 picks up the flower basket 8 at the end of the flower basket conveyor line 6 and transfers it to the flower basket 8 on the flower basket lifting device 1, the wafer insertion device 3 transports the silicon wafers 91 to the flower basket 8, and the robotic arm device 7 then transfers the flower basket 8 loaded with silicon wafers 91 to the cleaning conveyor line. The cleaning conveyor line transports the flower basket 8 and the silicon wafers 91 therein to the cleaning device, which completes the cleaning of the silicon wafers 91. The flower basket lifting device 1 and the robotic arm device 7 can both be installed on the frame 2, and it does not matter whether the wafer insertion device 3, the cleaning device, the cleaning conveyor line, and the flower basket conveyor line 6 are connected to the frame 2.

[0052] In order to facilitate the introduction of the silicon wafer cleaning device of the present invention, a spatial rectangular coordinate system with X, Y, and Z axes as coordinate axes is established ( Figure 3 and Figure 4 coordinate system shown in ).

[0053] Specifically, the cleaning device includes several parallel cleaning tanks for cleaning the silicon wafers 91 in the flower baskets 8. The flower basket conveyor line 6 is located upstream of the wafer insertion device 3 and downstream of the cleaning device along the direction in which the flower baskets 8 are transported. It is used to transport empty flower baskets 8. The cleaning conveyor line is located downstream of the wafer insertion device 3 and upstream of the cleaning device along the direction in which the flower baskets 8 are transported. It is used to transport the flower baskets 8 containing silicon wafers 91 to the cleaning device.

[0054] Furthermore, the cleaning conveyor line includes a cleaning rack, a cleaning conveyor belt mounted on the cleaning rack, and a first flipping mechanism. The first flipping mechanism is located at the starting end of the cleaning conveyor belt and is used to flip the flower basket 8 from a vertical position to a horizontal position. The first flipping mechanism can be any common flipping mechanism on the market, as long as it can flip the flower basket 8 from a vertical position to a horizontal position.

[0055] The flower basket conveyor line 6 includes a flower basket stand 8, a conveyor belt for the flower baskets 8 mounted on the flower basket stand 8, and a second flipping mechanism. The second flipping mechanism is located at the end of the conveyor belt for flipping the flower baskets 8 from a horizontal position to a vertical position. The second flipping mechanism can be any common flipping mechanism on the market, as long as it can flip the flower baskets 8 from a horizontal position to a vertical position.

[0056] like Figures 3 to 6As shown, the wafer insertion device 3 includes a workbench 31, a first conveying mechanism 32, a wafer loading mechanism 33, a wafer separation mechanism and a wafer suction and conveying mechanism 34; a loading trough 311 is provided on the workbench 31, and the first conveying mechanism 32 is installed on the workbench 31. The first conveying mechanism 32 is used to transport the silicon wafers 91 to the flower basket 8 on the flower basket lifting device 1. The loading trough 311 is located at the starting end of the first conveying mechanism 32. The loading trough 311 is used to hold water; the loading mechanism 33 is installed on the workbench 31, and part of it is located in the loading trough 311. The loading mechanism is used to drive the wafer loading machine loaded with multiple silicon wafers 91. The support 9 moves along the Z-axis direction; the slicing mechanism includes a plurality of liquid sprayers arranged in the loading trough 311, which are used to spray liquid onto the silicon wafer 91 on the wafer support 9 to separate the top silicon wafer 91 on the wafer support 9 from the remaining silicon wafers 91; the wafer suction and conveying mechanism 34 includes a suction cup and a wafer suction and conveying assembly, the end of the wafer suction and conveying assembly is adjacent to the starting end of the first conveying mechanism 32, the suction cup is used to suck the top silicon wafer 91 on the wafer support 9, and make the top silicon wafer 91 on the wafer support 9 collide with the wafer suction and conveying assembly, and the wafer suction and conveying assembly is used to transport the silicon wafer 91 adsorbed by the suction cup to the first conveying mechanism 32.

[0057] It is understood that the water contained in the loading trough 311 can protect the silicon wafers 91 and facilitate the separation of the silicon wafers 91 from the wafer holder 9. Water has the advantages of low cost and easy availability. In other embodiments, the loading trough 311 can also contain other liquids, as long as the liquid does not affect the silicon wafers 91. The liquid sprayed by the liquid sprayer is water or other liquid that does not affect the silicon wafers 91; preferably, the liquid sprayed by the liquid sprayer is water. The suction cup can be connected to a negative pressure source via a pipe, thereby providing a suction force.

[0058] The first conveyor mechanism 32 can be a commercially available conveyor belt mechanism or other conveyor mechanism, as long as it can transport the silicon wafers 91 to the flower basket 8 on the flower basket lifting device 1. In this embodiment, the first conveyor mechanism 32 is a common commercially available conveyor belt structure 342, and the end of the first conveyor mechanism 32 is located near the flower basket lifting device 1. In this embodiment, the conveyance direction of the silicon wafers 91 on the first conveyor mechanism 32 is the Y-axis direction.

[0059] The segmentation mechanism also includes a liquid supply source, which is connected to the liquid sprayer through a pipeline, thereby providing liquid to the liquid sprayer. The liquid sprayer can be a common nozzle on the market.

[0060] The wafer suction conveying assembly includes an adsorption seat 341 and a conveyor belt structure 342 mounted on the adsorption seat 341. The adsorption seat 341 is mounted on the workbench 31, and a suction cup is mounted below the adsorption seat 341. The suction cup is used to absorb the silicon wafer 91 so that the silicon wafer 91 is against the conveyor belt structure 342. The bottom of the conveyor belt structure 342 is against the silicon wafer 91 adsorbed by the suction cup. The rotation of the conveyor belt structure 342 drives the silicon wafer 91 adsorbed by the suction cup toward the first conveyor mechanism 32 until the silicon wafer 91 is transferred to the first conveyor mechanism 32. The conveyor belt structure 342 can include a motor fixedly mounted on the adsorption seat 341, a rotating wheel rotatably mounted on the adsorption seat 341, and a conveyor belt wrapped around the rotating wheel. The motor is connected to the rotating wheel and can drive the rotating wheel to rotate, thereby driving the conveyor belt to move.

[0061] The loading mechanism 33 includes a loading drive unit 332 and a loading base 331. The loading base 331 is used to support the wafer tray 9. The loading drive unit 332 is used to drive the loading base 331 to move along the Z-axis direction. The loading drive unit 332 is installed on the workbench 31. The loading mechanism 33 serves to allow the silicon wafer 91 at the top of the wafer tray 9 to be as close to the wafer suction conveying assembly as possible. Under the impact of the liquid sprayed by the liquid sprayer, the silicon wafer 91 at the top of the wafer tray 9 is separated from the other silicon wafers 91 and further approaches the suction cup. Under the suction force of the suction cup, the silicon wafer 91 at the top of the wafer tray 9 is adsorbed by the suction cup. When the silicon wafer 91 at the top of the wafer tray 9 is adsorbed by the suction cup, the loading drive unit 332 will drive the loading base 331 to move along the Z-axis direction (i.e., upward movement), and then move closer to the wafer suction conveying assembly, thereby facilitating the adsorption of the next silicon wafer 91 by the wafer suction conveying assembly. The Z-axis direction can be considered as the up-down direction.

[0062] like Figure 3 and Figure 4 As shown, in this embodiment, the wafer insertion device 3 includes two parallel workbenches 31, and each workbench 31 is equipped with two sets of first conveying mechanisms 32, a wafer loading mechanism 33, a wafer separating mechanism and a wafer suction conveying mechanism 34. Such an arrangement can improve the cleaning efficiency of the silicon wafer cleaning equipment. The cleaning conveyor line includes a first cleaning conveyor line 4 and a second cleaning conveyor line 5. The first cleaning conveyor line 4 and the second cleaning conveyor line 5 are respectively arranged on the opposite sides of multiple first conveying mechanisms 32.

[0063] In other embodiments, the wafer inserting device 3 may also be a structure of an existing wafer inserting device 3 , as long as it can slice the silicon wafers 91 on the wafer holder 9 and transport them to the flower basket 8 on the flower basket lifting device 1 .

[0064] like Figure 7 and Figure 8As shown, the flower basket lifting device 1 in this embodiment includes a first X-axis displacement mechanism 11, two first Z-axis displacement mechanisms 12, and two supporting seats 13. The supporting seats 13 are used to support the flower basket 8. Each first Z-axis displacement mechanism 12 is connected to a supporting seat 13, and the first Z-axis displacement mechanism 12 is used to drive the supporting seat 13 displacement mechanism along the Z-axis. The first X-axis displacement mechanism 11 is connected to the two first Z-axis displacement mechanisms 12, and the first X-axis displacement mechanism 11 is used to drive the first Z-axis displacement mechanisms 12 along the X-axis to align different receiving spaces 83 with the silicon wafer 91, with the X-axis direction forming an angle with the transport direction of the silicon wafer 91. The two receiving spaces 83 in the flower basket 8 placed on the supporting seats 13 are arranged side by side along the X-axis.

[0065] It will be understood that the transport direction of the silicon wafers 91 described above is the transport direction of the silicon wafers 91 on the first conveyor mechanism 32. In this embodiment, the transport direction of the silicon wafers 91 on the first conveyor mechanism 32 is the Y-axis direction, the angle between the Y-axis direction and the X-axis direction is 90°, and the plane in which the Y-axis direction and the X-axis direction lie is a horizontal plane. The first X-axis displacement mechanism 11 is used to drive the first Z-axis displacement mechanism 12 to move along the X-axis direction so that the different receiving spaces 83 are aligned with the silicon wafers 91. That is, the first X-axis displacement mechanism 11 drives the first Z-axis displacement mechanism 12 to move along the X-axis direction so that the different receiving spaces 83 of the flower basket 8 in the support seat 13 on the first Z-axis displacement mechanism 12 are aligned with the silicon wafers 91 being transported on the first conveyor mechanism 32, thereby inserting the silicon wafers 91 into the different receiving spaces 83 of the flower basket 8. In other embodiments, the angle between the X-axis direction and the transport direction of the silicon wafers 91 can be other angles.

[0066] Specifically, the first X-axis displacement mechanism 11 includes a first X-axis fixed base 111 and two first X-axis drive units 112. The first X-axis drive units 112 are mounted on the first X-axis fixed base 111. The output ends of the first X-axis drive units 112 are connected to the first Z-axis displacement mechanism 12. The first X-axis fixed base 111 is mounted on the frame 2.

[0067] In this embodiment, the first X-axis drive unit 112 is a cylinder, whose cylinder body is fixedly mounted on the first X-axis fixing base 111, and whose piston rod is connected to the first Z-axis displacement mechanism 12. In other embodiments, the first X-axis drive unit 112 can also be a common drive unit such as an electric screw structure, an electric cylinder structure, and corresponding connecting parts.

[0068] Preferably, the first X-axis driving unit 112 and the first Z-axis displacement mechanism 12 are arranged on opposite sides of the first X-axis fixing seat 111. Such an arrangement can save space and avoid collision between the first X-axis driving unit 112 and the first Z-axis displacement mechanism 12 during movement.

[0069] Specifically, the first Z-axis displacement mechanism 12 includes a first Z-axis fixed seat 121 and a first Z-axis drive unit 122. The first Z-axis drive unit 122 is installed on the first Z-axis fixed seat 121. The output end of the first Z-axis drive unit 122 is connected to the supporting seat 13. The first Z-axis fixed seat 121 is connected to the first X-axis drive unit 112.

[0070] In this embodiment, the first Z-axis drive unit 122 is an electric screw structure, the main body of which is fixedly mounted on the first Z-axis fixing base 121, and the movable end of the electric screw structure is connected to the bearing base 13. In other embodiments, the first Z-axis drive unit 122 can also be a common drive unit such as a cylinder structure or an electric cylinder structure, and corresponding connecting parts.

[0071] like Figure 7 and Figure 8 As shown, the flower basket lifting device 1 further includes a protection assembly 14, which includes a protection drive unit 141 and an elastic member 142. The protection drive unit 141 is mounted on the supporting base 13, and the elastic member 142 is connected to the protection drive unit 141. The protection drive unit 141 is used to drive the elastic member 142 to perform linear motion in a horizontal sliding manner, so that the elastic member 142 is abutted against the silicon wafer 91 in the flower basket 8 or the elastic member 142 is moved away from the flower basket 8.

[0072] The protective drive unit 141 can drive the elastic member 142 to partially reside within the flower basket 8 and abut against the silicon wafers 91 within the flower basket 8. Along the transport direction of the silicon wafers 91, the silicon wafers 91 transported by the first conveyor mechanism 32 preferentially come into contact with the elastic member 142. The elasticity of the elastic member 142 acts as a buffer, preventing the silicon wafers 91 from colliding with the rod-shaped support member 82 and potentially damaging the edges of the silicon wafers 91. In this embodiment, the elastic member 142 can be partially located within one receiving space 83 of the flower basket 8 and partially within another receiving space 83 of the flower basket 8. When the flower basket 8 is filled with silicon wafers 91, the protective drive unit 141 can drive the elastic member 142 to retract from the flower basket 8, thereby facilitating the robotic arm assembly 7 to pick up and transfer the flower basket 8. Preferably, the elastic member 142 moves along the Y-axis.

[0073] Furthermore, the protection assembly 14 further includes a protection frame 143 . The protection drive unit 141 is connected to the protection frame 143 . The elastic member 142 is mounted on the protection frame 143 . The protection frame 143 supports the elastic member 142 .

[0074] In this embodiment, the protection drive unit 141 is a cylinder, the cylinder body of which is fixedly mounted on the first Z-axis fixing seat 121, and the piston rod of which is connected to the protection frame 143. In other embodiments, the protection drive unit 141 can also be a common drive unit such as an electric screw structure, an electric cylinder structure, and corresponding connecting parts.

[0075] Furthermore, the support base 13 is provided with an escape opening 131 for the elastic member 142 to move. The protection drive unit 141 is disposed on a side of the support base 13 away from the first transmission mechanism 32 , so that the space occupied by the protection assembly 14 can be saved.

[0076] The robotic arm device 7 is arranged above the starting end of the flower basket lifting device 1, the cleaning conveyor line and the transfer conveyor line, and is used to transfer the flower basket 8 on the flower basket lifting device 1 to the cleaning conveyor line, and to transfer the flower basket 8 on the flower basket conveyor line 6 to the flower basket lifting device 1.

[0077] Specifically, such as Figure 9 As shown, the robotic arm device 7 includes a second X-axis displacement mechanism 71, two second Z-axis displacement mechanisms 72, and a first clamping mechanism 73 mounted on the second Z-axis displacement mechanism 72. The second Z-axis displacement mechanism 72 is slidably mounted on the second X-axis displacement mechanism 71. The second X-axis displacement mechanism 71 is used to drive the second Z-axis displacement mechanism 72 to move along the X-axis direction. The second Z-axis displacement mechanism 72 is used to drive the first clamping mechanism 73 to move along the X-axis direction to move the first clamping mechanism 73 closer to or away from the flower basket 8 on the flower basket lifting device 1. The first clamping mechanism 73 is used to clamp the flower basket 8 on the flower basket lifting device 1.

[0078] In this embodiment, a second Z-axis displacement mechanism 72 and a first gripping mechanism 73 thereon are used to transfer flower baskets 8 from the flower basket lifting device 1 to the cleaning conveyor line. Another second Z-axis displacement mechanism 72 and a first gripping mechanism 73 thereon are used to transfer flower baskets 8 from the flower basket conveyor line 6 to the flower basket lifting device 1, thereby improving the operating efficiency of the entire device. The first gripping mechanism 73 can be a common commercially available electric gripper, pneumatic gripper, or other similar gripping mechanism.

[0079] It can be understood that the specific structure of the second X-axis displacement mechanism 71 can refer to the first X-axis displacement mechanism 11, and the specific structure of the second Z-axis displacement mechanism 72 can refer to the first Z-axis displacement mechanism 12; or, the second X-axis displacement mechanism 71 can be a common linear motion displacement mechanism on the market, as long as it can drive the second Z-axis displacement mechanism 72 to move along the X-axis direction; the second Z-axis displacement mechanism 72 can be a common linear motion displacement mechanism on the market, as long as it can drive the first clamping mechanism 73 to move along the Z-axis direction.

[0080] Because the workbench 31 is provided with multiple first conveying mechanisms 32 and corresponding basket lifting devices 1, the cleaning conveyor line includes a first cleaning conveyor line 4 and a second cleaning conveyor line 5, which are respectively arranged on opposite sides of the multiple first conveying mechanisms 32. This arrangement can prevent the two second Z-axis displacement mechanisms 72 from interfering with each other during operation, thereby improving the operating efficiency of the robotic arm device 7.

[0081] Furthermore, since there are a large number of cleaning tanks in the cleaning device and there is generally only one cleaning conveyor line for transportation, in this embodiment, the first cleaning conveyor line 4 can directly transport the flower basket 8 to the cleaning device, and the second cleaning conveyor line 5 only transports the flower basket 8 along the Y-axis direction or other directions away from the second X-axis displacement mechanism 71, and does not directly transport the flower basket 8 to the cleaning device.

[0082] Therefore, if Figure 10 As shown, the robotic arm device 7 includes a third X-axis displacement mechanism 74, a third Z-axis displacement mechanism 75 slidably mounted on the third X-axis displacement mechanism 74, and a second clamping mechanism 76 mounted on the third Z-axis displacement mechanism 75. The third X-axis displacement mechanism 74 is used to drive the third Z-axis displacement mechanism 75 to move along the X-axis direction. The third Z-axis displacement mechanism 75 is used to drive the second clamping mechanism 76 to move along the X-axis direction between the first cleaning conveyor line 4 and the second cleaning conveyor line 5, so that the second clamping mechanism 76 approaches or moves away from the flower basket 8 on the second cleaning conveyor line 5. The second clamping mechanism 76 is used to clamp the flower basket 8 on the second cleaning conveyor line 5. The flower basket 8 clamped by the second clamping mechanism 76 is a flower basket 8 in a horizontal state.

[0083] It can be understood that the third X-axis displacement mechanism 74, the third Z-axis displacement mechanism 75 and the second clamping mechanism 76 are used to transfer the flower baskets 8 on the second cleaning conveyor line 5 to the first cleaning conveyor line 4, so that the flower baskets 8 can be transported to the cleaning device.

[0084] Specifically, the structure of the third X-axis displacement mechanism 74 can refer to the second X-axis displacement mechanism 71, the structure of the third Z-axis displacement mechanism 75 can refer to the second Z-axis displacement mechanism 72, and the structure of the second clamping mechanism 76 can refer to the first clamping mechanism 73; or, the third X-axis displacement mechanism 74 can be a common linear motion displacement mechanism on the market, as long as it can drive the third Z-axis displacement mechanism 75 to move along the X-axis direction; the second Z-axis displacement mechanism 72 can be a common linear motion displacement mechanism on the market, as long as it can drive the second clamping mechanism 76 to move along the Z-axis direction; the second clamping mechanism 76 can be a common electric clamp or pneumatic clamp or other similar clamping mechanism on the market, as long as it can clamp the flower basket 8.

[0085] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0086] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A flower basket lifting device, used in silicon wafer cleaning equipment, characterized in that: The flower basket lifting device includes a first X-axis displacement mechanism, at least one first Z-axis displacement mechanism and a bearing seat; The supporting seat is used to support the flower basket. In a spatial rectangular coordinate system with X, Y, and Z axes as coordinate axes, the flower basket includes at least two accommodating spaces for accommodating silicon wafers arranged in parallel along the X-axis direction; The first Z-axis displacement mechanism is connected to the bearing seat, and the first Z-axis displacement mechanism is used to drive the bearing seat displacement mechanism to move along the Z-axis direction; The first X-axis displacement mechanism is connected to the first Z-axis displacement mechanism, and the first X-axis displacement mechanism is used to drive the first Z-axis displacement mechanism to move along the X-axis direction so that the corresponding accommodation space is aligned with the silicon wafer to be inserted.

2. The flower basket lifting device according to claim 1, characterized in that: The flower basket lifting device also includes a protection component, which includes a protection drive unit and an elastic member. The protection drive unit is installed on a bearing seat, and the elastic member is connected to the protection drive unit. The protection drive unit is used to drive the elastic member to perform linear motion in horizontal sliding, so that the elastic member is against the silicon wafer in the flower basket or the elastic member is moved away from the flower basket.

3. The flower basket lifting device according to claim 2, characterized in that: The movement direction of the elastic member is the Y-axis direction.

4. The flower basket lifting device according to claim 2, characterized in that: The bearing seat is provided with an escape opening for the elastic member to move.

5. The flower basket lifting device according to claim 1, characterized in that: The first X-axis displacement mechanism includes a first X-axis fixing seat and at least one first X-axis driving unit, the first X-axis driving unit is installed on the first X-axis fixing seat, and the output end of the first X-axis driving unit is connected to the first Z-axis displacement mechanism.

6. The flower basket lifting device according to claim 5, characterized in that: The first X-axis driving unit and the first Z-axis displacement mechanism are arranged on opposite sides of the first X-axis fixing seat.

7. The flower basket lifting device according to claim 1, characterized in that: The first Z-axis displacement mechanism includes a first Z-axis fixed seat and a first Z-axis drive unit. The first Z-axis drive unit is installed on the first Z-axis fixed seat. The output end of the first Z-axis drive unit is connected to the bearing seat. The first Z-axis fixed seat is connected to the first X-axis displacement mechanism.

8. A silicon wafer cleaning device, characterized in that: include: The flower basket lifting device according to any one of claims 1 to 7; The wafer inserting device includes a first conveying mechanism for transporting the silicon wafers to the basket on the basket lifting device; A cleaning device, comprising a plurality of cleaning tanks arranged in parallel, for cleaning the silicon wafers in the flower basket; A cleaning conveyor line is located downstream of the wafer inserting device and upstream of the cleaning device along the transport direction of the wafer basket, and is used to transport the wafer basket to the cleaning device. A flower basket conveying line is located upstream of the inserting device and downstream of the cleaning device along the conveying direction of the flower baskets, and is used to transport empty flower baskets; The robot arm device is arranged above the starting ends of the flower basket lifting device, the cleaning conveyor line and the transfer conveyor line, and is used to transfer the flower baskets on the flower basket lifting device to the cleaning conveyor line, and to transfer the flower baskets on the flower basket conveyor line to the flower basket lifting device.

9. The silicon wafer cleaning equipment according to claim 8, characterized in that: The inserting device further comprises: a workbench, on which a feeding trough is provided, the first conveying mechanism is installed on the workbench, the feeding trough is located at the starting end of the first conveying mechanism, and the feeding trough is used to contain water; A wafer loading mechanism is mounted on the workbench and partially located in the loading trough. The loading mechanism is used to drive a wafer holder loaded with multiple silicon wafers to move along the Z-axis direction. The wafer separation mechanism includes a plurality of liquid sprayers disposed in the loading trough, the liquid sprayers being used to spray liquid onto the silicon wafers on the wafer support to separate the top silicon wafer on the wafer support from the remaining silicon wafers; The wafer suction and conveying mechanism includes a suction cup and a wafer suction and conveying assembly. The end of the wafer suction and conveying assembly is adjacent to the starting end of the first conveying mechanism. The suction cup is used to suck the top silicon wafer on the wafer holder and make the top silicon wafer on the wafer holder collide with the wafer suction and conveying assembly. The wafer suction and conveying assembly is used to transport the silicon wafer sucked by the suction cup to the first conveying mechanism.

10. The silicon wafer cleaning equipment according to claim 9, characterized in that: The wafer suction conveying assembly includes an adsorption seat and a conveyor belt structure installed on the adsorption seat. The suction cup is installed below the adsorption seat and is used to absorb the silicon wafer so that the silicon wafer and the conveyor belt structure are offset.

11. The silicon wafer cleaning equipment according to claim 9, characterized in that: The film loading mechanism includes a film loading drive unit and a film loading base. The film loading base is used to carry the film holder, and the film loading drive unit is used to drive the film loading base to move along the Z-axis direction.

12. The silicon wafer cleaning equipment according to claim 8, characterized in that: The robotic arm device includes a second X-axis displacement mechanism, at least one second Z-axis displacement mechanism, and a first clamping mechanism mounted on the second Z-axis displacement mechanism. The second Z-axis displacement mechanism can be slidably mounted on the second X-axis displacement mechanism. The second X-axis displacement mechanism is used to drive the second Z-axis displacement mechanism to move along the X-axis direction. The second Z-axis displacement mechanism is used to drive the first clamping mechanism to move along the X-axis direction so that the first clamping mechanism approaches or moves away from the flower basket on the flower basket lifting device. The first clamping mechanism is used to clamp the flower basket on the flower basket lifting device.

13. The silicon wafer cleaning equipment according to claim 8, characterized in that: The inserting device includes a plurality of first conveying mechanisms arranged in parallel, the cleaning conveyor line includes a first cleaning conveyor line and a second cleaning conveyor line, the first cleaning conveyor line and the second cleaning conveyor line are respectively arranged on opposite sides of the plurality of first conveying mechanisms, the robotic arm device includes a third X-axis displacement mechanism, a third Z-axis displacement mechanism slidably mounted on the third X-axis displacement mechanism, and a second clamping mechanism mounted on the third Z-axis displacement mechanism, the third X-axis displacement mechanism is used to drive the third Z-axis displacement mechanism to move along the X-axis direction, the third Z-axis displacement mechanism is used to drive the second clamping mechanism to move along the X-axis direction between the first cleaning conveyor line and the second cleaning conveyor line, so that the second clamping mechanism approaches or moves away from the flower basket on the second cleaning conveyor line, and the second clamping mechanism is used to clamp the flower basket on the second cleaning conveyor line.

14. The silicon wafer cleaning equipment according to claim 8, characterized in that: The cleaning conveyor line includes a cleaning rack, a cleaning conveyor belt installed on the cleaning rack, and a first flipping mechanism. The first flipping mechanism is located at the starting end of the cleaning conveyor belt and is used to flip the flower basket from a vertical state to a horizontal state.

15. The silicon wafer cleaning equipment according to claim 8, characterized in that: The flower basket conveyor line includes a flower basket stand, a flower basket conveyor belt installed on the flower basket stand, and a second flipping mechanism. The second flipping mechanism is located at the end of the flower basket conveyor belt and is used to flip the flower basket from a horizontal state to a vertical state.

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