Waste gas treatment device and treatment method

Abstract

The invention relates to a waste gas treatment device and method, and relates to the technical field of waste gas treatment.The waste gas treatment device comprises at least two waste gas treatment mechanisms which are connected through a main control valve, the at least two waste gas treatment mechanisms conduct waste gas treatment at the same time, and under the condition that one waste gas treatment mechanism stops working, the waste gas treatment mechanism stops working; waste gas input from the gas inlet is conveyed to at least another waste gas treatment mechanism through the main control valve; the waste gas treatment mechanism comprises a main gas path, an auxiliary gas path, a first control valve, a cleaning assembly and an exhaust assembly, and the first control valve is used for conveying waste gas to the main barrel or conveying the waste gas to the auxiliary barrel under a preset condition so as to control the flow direction of the waste gas; the exhaust assembly is used for exhausting the waste gas treatment gas in the main barrel and the auxiliary barrel and exhausting the purging gas in the main barrel and the auxiliary barrel; the cleaning assembly is used for purging residual waste gas in the main gas path or the auxiliary gas path. The waste gas treatment device is helpful for continuously and stably treating waste gas, and has the effect of improving the waste gas treatment efficiency.

Description

Technical Field

[0001] The present application relates to the technical field of waste gas treatment, and in particular to a waste gas treatment device and method. Background Art

[0002] During the semiconductor device production process, large amounts of toxic gases are generated. These gases cannot be discharged directly. Therefore, to meet waste gas emission standards, most factories install large-scale central waste gas treatment units to treat the gases through chemical adsorption.

[0003] At present, the waste gas treatment device is to pass the waste gas into a large adsorption barrel, and use chemical reactions to neutralize, react, adsorb and other toxic gases to treat the waste gas into a gas that meets the emission standards.

[0004] However, during the treatment process, when the chemical adsorption agent in the large adsorption barrel is saturated, the agent in the large adsorption barrel needs to be replaced. During the replacement, the exhaust gas needs to be switched to the small adsorption barrel for treatment. However, due to the small capacity of the small adsorption barrel, a series of alarm problems such as high temperature, high pressure, and unqualified exhaust end gas detection often occur, causing equipment shutdown, affecting the stability of the continuous operation of the exhaust gas treatment device, and thus reducing the efficiency of exhaust gas treatment.

[0005] The contents of the background technology section are merely technologies known to the public and do not necessarily represent the existing technologies in this field. Summary of the Invention

[0006] The present application provides an exhaust gas treatment device, which aims to solve the problem of poor operating stability of the exhaust gas treatment device.

[0007] According to one aspect of the present application, an exhaust gas treatment device is provided, comprising at least two exhaust gas treatment mechanisms, which are connected through a main control valve, and the at least two exhaust gas treatment mechanisms perform exhaust gas treatment at the same time. When one of the exhaust gas treatment mechanisms stops working, the exhaust gas input from the air inlet is transported to at least another exhaust gas treatment mechanism through the main control valve; the exhaust gas treatment mechanism comprises a main air path, a secondary air path, a first control valve, a cleaning component and an exhaust component, one end of the main air path is connected to the air inlet, and the other end is connected to the main barrel; one end of the secondary air path is connected to the air inlet, and the other end is connected to the secondary barrel; one end of the first control valve is connected to the air inlet , the other end is connected to the main barrel and the auxiliary barrel, and is used to transport the exhaust gas to the main barrel, or to transport the exhaust gas to the auxiliary barrel under preset circumstances to control the flow direction of the exhaust gas; the exhaust component is connected to the main barrel and the auxiliary barrel, and is used to discharge the exhaust treatment gas in the main barrel and the auxiliary barrel, and to discharge the purge gas in the main barrel and the auxiliary barrel; the cleaning component includes a first cleaning part and a second cleaning part, the first cleaning part is arranged on the main gas path, and is used to purge the exhaust gas remaining in the main gas path when the main barrel stops working; the second cleaning part is arranged on the auxiliary gas path, and is used to purge the exhaust gas remaining in the auxiliary gas path when the auxiliary barrel stops working.

[0008] According to one aspect of the present application, an exhaust gas treatment method is provided, including that when each exhaust gas treatment mechanism is operating normally, the main control valve is in a closed state, and each exhaust gas treatment mechanism operates independently; when one of the exhaust gas treatment mechanisms stops working, the main control valve is in an open state, and the exhaust gas at the air inlet of the stopped exhaust gas treatment mechanism is switched to at least another exhaust gas treatment mechanism.

[0009] Beneficial effects

[0010] The present application can simultaneously treat exhaust gas through multiple parallel exhaust gas treatment mechanisms, and can switch exhaust gas treatment after any exhaust gas treatment mechanism stops working, ensuring that the device can continuously and stably treat exhaust gas, thereby improving exhaust gas treatment efficiency. At the same time, the present application uses a cleaning component to purge residual exhaust gas in the main gas path or the auxiliary gas path, and in conjunction with the exhaust component, it can achieve directional separation and discharge of the purged exhaust gas and the treated gas, avoiding secondary pollution, thereby improving the exhaust gas treatment effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0012] Figure 1 A schematic structural diagram of an exhaust gas treatment device according to an embodiment of the present application is shown;

[0013] Figure 2 A schematic structural diagram of an exhaust gas treatment mechanism according to an embodiment of the present application is shown;

[0014] Figure 3 A schematic plan view of the exhaust gas treatment mechanism according to an embodiment of the present application is shown;

[0015] Figure 4 A simplified schematic diagram of an exhaust gas treatment mechanism according to an embodiment of the present application is shown;

[0016] Figure 5 A schematic diagram of a process of the waste gas treatment method according to an embodiment of the present application is shown;

[0017] Figure 6 Another schematic diagram of the exhaust gas treatment method according to an embodiment of the present application is shown;

[0018] Figure 7 Another schematic diagram of the exhaust gas treatment method according to an embodiment of the present application is shown;

[0019] Figure 8 Another schematic flow chart of the waste gas treatment method according to an embodiment of the present application is shown.

[0020] Description of reference numerals:

[0021] 11. Main control valve;

[0022] 2. Profile frame; 21. Moving parts; 22. Main barrel; 23. Auxiliary barrel; 24. Warning light; 25. Observation window;

[0023] 31. Main gas line; 32. Auxiliary gas line;

[0024] 4. First control valve;

[0025] 51. First cleaning section; 52. Second cleaning section;

[0026] 61. First exhaust path; 62. Second exhaust path; 63. Second control valve; 64. Third control valve; 65. Gas detection element;

[0027] 71. First manual valve; 72. Second manual valve;

[0028] 81. First pressure sensor; 82. Second pressure sensor; 83. Third pressure sensor; 84. First temperature sensor; 85. Second temperature sensor; 86. Third temperature sensor. DETAILED DESCRIPTION

[0029] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concepts of the example embodiments to those skilled in the art. Like reference numerals in the drawings represent like or similar parts, and thus repetitive description thereof will be omitted.

[0030] The described features, structures or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, many specific details are provided to provide a full understanding of the embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of these specific details, or other methods, components, materials, devices, etc. may be employed. In these cases, well-known structures, methods, devices, implementations, materials or operations will not be shown or described in detail.

[0031] Furthermore, the terms "include," "comprise," and "have," and any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus comprising a series of steps or elements is not limited to the listed steps or elements, but may optionally include steps or elements not listed, or may optionally include other steps or elements inherent to the process, method, product, or apparatus.

[0032] The terms "first", "second" and the like in the specification, claims and drawings of this application are used to distinguish different objects rather than to describe a specific order.

[0033] The following is a clear and complete description of the technical solution of this application in conjunction with the drawings in the embodiments of this application. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making any creative efforts are within the scope of protection of this application.

[0034] According to one aspect of the present application, an exhaust gas treatment device is provided. Figure 1 A schematic structural diagram of an exhaust gas treatment device according to an embodiment of the present application is shown.

[0035] According to an example embodiment, Figure 1 and Figure 3 As shown, the exhaust gas treatment device includes at least two exhaust gas treatment mechanisms, which are connected by a master control valve 11. At least two exhaust gas treatment mechanisms perform exhaust gas treatment simultaneously. If one exhaust gas treatment mechanism stops operating, the exhaust gas input from the air inlet is transported to at least one other exhaust gas treatment mechanism via the master control valve 11.

[0036] For example, the exhaust gas treatment mechanism may be provided in multiple forms, and two adjacent exhaust gas treatment mechanisms are connected via a master control valve 11. The master control valve 11 may include, but is not limited to, a pneumatic ball valve or a solenoid valve.

[0037] For example, Figure 3 As shown, two exhaust gas treatment mechanisms are provided, the two exhaust gas treatment mechanisms are provided in parallel, and the main control valve 11 is a pneumatic ball valve.

[0038] According to an example embodiment, Figure 1-Figure 3 As shown, the exhaust gas treatment mechanism includes a main air path 31, a secondary air path 32, a first control valve 4, a cleaning component and an exhaust component. One end of the main air path 31 is connected to the air inlet, and the other end is connected to the main barrel 22. One end of the secondary air path 32 is connected to the air inlet, and the other end is connected to the secondary barrel 23.

[0039] One end of the first control valve 4 is connected to the air inlet, and the other end is connected to the main barrel 22 and the sub-barrel 23, and is used to transport the exhaust gas to the main barrel 22, or to transport the exhaust gas to the sub-barrel 23 under preset circumstances to control the flow direction of the exhaust gas.

[0040] For example, the exhaust gas treatment mechanism may include a hollow profile frame 2 and a movable member 21. Multiple movable members 21 may be provided, and the plurality of movable members 21 are disposed at the bottom end of the profile frame 2. A primary air path 31 and a secondary air path 32 may be disposed on the profile frame 2. A primary barrel 22 and a secondary barrel 23 are disposed within the profile frame 2.

[0041] The main gas path 31 and the auxiliary gas path 32 may be made of stainless steel pipes, seamless steel pipes, or corrugated pipes. The connection between the main gas path 31, the main barrel 22, and the air inlet may include, but is not limited to, welding or flange connections. The connection between the auxiliary gas path 32, the auxiliary barrel 23, and the air inlet may include, but is not limited to, welding or flange connections.

[0042] The first control valve 4 may include but is not limited to a pneumatic ball valve or a solenoid valve, etc. A brake valve may be provided on the main gas line 31 to prevent exhaust gas from flowing to the exhaust gas treatment mechanism that has stopped working. The brake valve may include but is not limited to a pneumatic ball valve or a solenoid valve, etc.

[0043] An observation window 25 may be provided on the main barrel 22. Both the main barrel 22 and the auxiliary barrel 23 contain an adsorbent, which may be a combination of zeolite molecular sieve and coal-based granular carbon. It should be noted that the default condition refers to the situation where the main barrel 22 reaches a saturated state or a malfunction occurs.

[0044] Exemplarily, a connecting pipe is provided between the main gas paths 31 in the two exhaust gas treatment mechanisms, and the main control valve 11 is provided on the connecting pipe.

[0045] The profile frame 2 is a rectangular hollow structure. Four moving members 21 are provided, each positioned at the four vertices of the bottom end of the profile frame 2. A primary air path 31 and a secondary air path 32 can be provided on the profile frame 2. The primary barrel 22 and the secondary barrel 23 are disposed within the profile frame 2.

[0046] The main gas line 31 may include a first stainless steel tube, a second stainless steel tube, a first bellows, and a second bellows. One end of the first bellows is connected to the air inlet via a flange, and the other end is connected to one end of the first stainless steel tube via a clamp-type quick-connect connector. The first bellows is used to adjust for assembly tolerances. The other end of the first stainless steel tube is threadedly connected to the first control valve 4.

[0047] The first control valve 4 is a pneumatic three-way valve. The brake valve, a pneumatic ball valve, is mounted on the first stainless steel pipe. The other end of the first control valve 4 is flanged to the second stainless steel pipe, which in turn is flanged to the second bellows, which in turn is flanged to the bottom of the main barrel 22. The second bellows is used to adjust the installation position of the main barrel 22 for secure assembly.

[0048] The secondary air path 32 may include a third stainless steel tube and a third bellows. One end of the third stainless steel tube is flanged to the top of the main tub 22, and the other end is flanged to one end of the third bellows. The other end of the third bellows is flanged to the exhaust port. The third bellows is used to adjust for assembly errors.

[0049] According to an example embodiment, Figure 1 As shown, the cleaning assembly includes a first cleaning portion 51 and a second cleaning portion 52. The first cleaning portion 51 is provided on the main air path 31 and is used to purge the residual exhaust gas in the main air path 31 when the main barrel 22 stops working. The second cleaning portion 52 is provided on the secondary air path 32 and is used to purge the residual exhaust gas in the secondary air path 32 when the secondary barrel 23 stops working.

[0050] For example, the conditions for stopping operation may include replacing the main barrel 22 or the auxiliary barrel 23, or malfunctioning the main barrel 22 or the auxiliary barrel 23. Replacing the main barrel 22 or the auxiliary barrel 23 means that the adsorbent in the main barrel 22 or the auxiliary barrel 23 has reached saturation and cannot continue to adsorb. Malfunctioning the main barrel 22 or the auxiliary barrel 23 means that the temperature or pressure in the main barrel 22 or the auxiliary barrel 23 is abnormal.

[0051] According to an example embodiment, Figure 1 As shown, the exhaust assembly is connected to the main barrel 22 and the auxiliary barrel 23 for discharging the waste treatment gas in the main barrel 22 and the auxiliary barrel 23 , as well as discharging the purge gas in the main barrel 22 and the auxiliary barrel 23 .

[0052] Through the above embodiments, the present application can simultaneously treat exhaust gas through multiple parallel exhaust gas treatment mechanisms, and can switch exhaust gas treatment after any exhaust gas treatment mechanism stops working, which can ensure that the device can continuously and stably treat exhaust gas, thereby improving exhaust gas treatment efficiency. At the same time, the present application uses a cleaning component to purge residual exhaust gas in the main gas path or the auxiliary gas path, and cooperates with the exhaust component to achieve directional separation and discharge of the purged exhaust gas and the treated gas, avoiding secondary pollution, thereby improving the exhaust gas treatment effect.

[0053] According to an example embodiment, Figure 2-Figure 4 As shown, the exhaust assembly includes a first exhaust path 61, a second exhaust path 62, a second control valve 63, and a third control valve 64. One end of the first exhaust path 61 is connected to the main tub 22, and the other end is connected to the exhaust port. One end of the second exhaust path 62 is connected to the auxiliary tub 23, and the other end is connected to the exhaust port.

[0054] For example, the first exhaust passage 61 and the second exhaust passage 62 may be made of stainless steel pipes or seamless steel pipes. The connection method between the first exhaust passage 61 and the main tub 22 and the exhaust port may include, but is not limited to, welding or flange connection. The connection method between the second exhaust passage 62 and the auxiliary tub 23 and the exhaust port may include, but is not limited to, welding or flange connection.

[0055] Exemplarily, the first exhaust passage 61 and the second exhaust passage 62 are both configured as stainless steel pipes. One end of the first exhaust passage 61 is connected to the top of the main tub 22 via a flange, and the other end is connected to the exhaust outlet via a flange. One end of the second exhaust passage 62 is connected to the top of the auxiliary tub 23, and the other end is connected to the exhaust outlet.

[0056] According to an example embodiment, Figure 3 As shown, the second control valve 63 is connected to the first exhaust path 61 and the second exhaust path 62 to control the flow direction of the exhaust treatment gas in the main barrel 22 or the auxiliary barrel 23. The third control valve 64 is connected to the first exhaust path 61 and the second exhaust path 62 to control the flow direction of the purge gas in the main barrel 22 or the auxiliary barrel 23.

[0057] For example, the second control valve 63 may include but is not limited to a pneumatic ball valve or a solenoid valve, etc. The third control valve 64 may include but is not limited to a pneumatic ball valve or a solenoid valve, etc.

[0058] Exemplarily, the second control valve 63 is a pneumatic three-way valve, one end of which is connected to the exhaust port via a flange, one end of which is connected to the first exhaust path 61 via a flange, and the other end of which is connected to the second exhaust path 62 via a flange.

[0059] As an embodiment, when the adsorption of the main barrel 22 reaches a saturated state, the second control valve 63 closes the first exhaust path 61 and opens the second exhaust path 62 at the same time, so that the auxiliary barrel 23 starts to process the exhaust gas and replaces the main barrel 22.

[0060] As an embodiment, when a fault occurs in the main barrel 22, the second control valve 63 closes the first exhaust path 61 and opens the second exhaust path 62 at the same time, so that the auxiliary barrel 23 starts to process the exhaust gas and inspects the main barrel 22 or the main gas path 31.

[0061] A connecting pipe may be provided between the first exhaust path 61 and the second exhaust path 62 , and a third control valve 64 is provided on the connecting pipe. The third control valve 64 is a pneumatic ball valve, one end of which is connected to the first exhaust path 61 via a flange, and the other end is connected to the second exhaust path 62 via a flange.

[0062] Through the above-described embodiment, the present application can switch the pneumatic three-way structure of the second control valve to the secondary exhaust path through a flange seal when the main barrel is saturated or fails, ensuring uninterrupted exhaust gas treatment. At the same time, the present application can quickly discharge the purge gas through the third control valve, thereby improving the cleaning effect of the exhaust gas treatment device.

[0063] According to an example embodiment, Figure 2-Figure 4 As shown, the first cleaning part 51 includes a first cleaning interface, which is arranged between the first control valve 4 and the main barrel 22 and is connected to an external cleaning device. When the main barrel 22 stops working and the auxiliary barrel 23 works normally, the external cleaning device purges the main air path 31 through the first cleaning interface.

[0064] For example, the first cleaning interface can be configured as a through hole or a pipe end interface. The external cleaning device is a nitrogen purge device (not shown). When the main barrel 22 stops working and the auxiliary barrel 23 is operating normally, the nitrogen purge device is connected to the pipe end interface and purges the main gas path 31 through the pipe end interface.

[0065] According to an example embodiment, Figure 2-Figure 4 As shown, the second cleaning part 52 includes a second cleaning interface, which is arranged between the first control valve 4 and the auxiliary barrel 23 and is connected to an external cleaning device. When the auxiliary barrel 23 stops working and the main barrel 22 works normally, the external cleaning device purges the auxiliary air path 32 through the second cleaning interface.

[0066] For example, the second cleaning interface can be configured as a through hole or a pipe end interface. The external cleaning device is a nitrogen purge device (not shown). When the auxiliary barrel 23 stops working and the main barrel 22 is operating normally, the nitrogen purge device is connected to the pipe end interface and purges the auxiliary gas path 32 through the pipe end interface.

[0067] Through the above embodiments, the present application can use the nitrogen purge device in conjunction with the first cleaning interface or the second cleaning interface to timely and thoroughly clean the residual exhaust gas in the main gas path or the auxiliary gas path, thereby preventing the exhaust gas from leaking. At the same time, the present application can also clean the exhaust gas, thereby improving the cleaning effect of the exhaust gas treatment device.

[0068] According to an example embodiment, Figure 2-Figure 4 As shown, the exhaust gas treatment mechanism further includes a first manual valve 71 and a second manual valve 72 . There are at least two first manual valves 71 , which are respectively disposed at both ends of the main barrel 22 .

[0069] At least two second manual valves 72 are provided, which are respectively provided on the main gas path 31 and the first exhaust path 61 .

[0070] For example, two first manual valves 71 and two second manual valves 72 are provided, and the two first manual valves 71 are respectively provided at the top and bottom positions of the main barrel 22. The two second manual valves 72 are respectively provided on the main gas path 31 and the first exhaust path 61.

[0071] Through the above embodiments, the present application closes the first manual valve and the second manual valve to prevent leakage of exhaust gas in the main gas path when the main barrel is disassembled and replaced, thereby effectively preventing environmental pollution.

[0072] According to an example embodiment, Figure 1-Figure 3 As shown, the exhaust assembly further includes a gas detection element 65 , which is disposed on one end of the first exhaust passage 61 away from the main barrel 22 and is used to detect the exhaust gas concentration in the exhaust gas.

[0073] Exemplarily, the gas detection element 65 may be a gas detector, which is disposed at the end of the exhaust port and is used to detect the exhaust gas concentration in the exhaust gas.

[0074] Through the above embodiments, the present application can detect whether the treated exhaust gas meets the standards through the gas detection component, and can also detect the concentration of the exhaust gas after purging, thereby improving the cleaning efficiency of the exhaust gas treatment device.

[0075] According to an example embodiment, Figure 2-Figure 3 As shown, the exhaust gas treatment mechanism also includes a detection component, which includes a first pressure sensor 81. The first pressure sensor 81 is arranged on the main gas path 31, located between the second manual valve 72 and the first control valve 4, and is used to detect the gas pressure of the main gas path 31.

[0076] For example, the first pressure sensor 81 can be connected to an external control device for communication, and the external control device receives the pressure signal output by the first pressure sensor 81 and outputs an early warning signal when the pressure signal is abnormal. The early warning signal can be issued by a warning light 24 or a buzzer.

[0077] For example, the external control device may be a controller (not shown in the figure), and the warning light 24 is provided on the top of the profile frame 2 and is electrically connected to the controller.

[0078] Through the above embodiments, the present application can detect the pressure signal in the main gas path through the first pressure sensor, and judge whether the first manual valve and the second manual valve are in the open state through pressure signal feedback, thereby improving the stability of the exhaust gas treatment device.

[0079] According to an example embodiment, Figure 2-Figure 3 As shown, the detection assembly further includes a second pressure sensor 82 and a third pressure sensor 83. The second pressure sensor 82 is provided on the air inlet for detecting the gas pressure at the air inlet. The third pressure sensor 83 is provided on the exhaust port for detecting the gas pressure at the exhaust port.

[0080] For example, the second pressure sensor 82 and the third pressure sensor 83 can be connected to an external control device for communication. The external control device receives the pressure signals output by the second pressure sensor 82 and the third pressure sensor 83 and outputs an early warning signal if the pressure signals are abnormal. The early warning signal can be issued by the warning light 24 or a buzzer.

[0081] Through the above embodiment, the present application can use the second pressure sensor and the third pressure sensor to detect the pressure of the air inlet and exhaust port respectively, and use the pressure signal feedback to determine whether the air inlet and exhaust ports are blocked. The early warning signal facilitates timely cleaning of the air inlet and exhaust ports, thereby improving the stability of the exhaust gas treatment device.

[0082] According to an example embodiment, Figure 2-Figure 3 As shown, the detection assembly also includes a first temperature sensor 84, a second temperature sensor 85, and a third temperature sensor 86. The first temperature sensor 84 is provided on the main barrel 22 for detecting the temperature inside the main barrel 22. The second temperature sensor 85 is provided between the second manual valve 72 and the first control valve 4 for detecting the temperature of the incoming exhaust gas. The third temperature sensor 86 is provided at the exhaust port for detecting the temperature of the exhaust treatment gas.

[0083] For example, the first temperature sensor 84, the second temperature sensor 85, and the third temperature sensor 86 can be communicatively connected to an external control device, which receives temperature signals output by the first temperature sensor 84, the second temperature sensor 85, and the third temperature sensor 86 and outputs an early warning signal if the temperature signals are abnormal. The early warning signal can be issued by a warning light 24 or a buzzer.

[0084] Through the above embodiments, the present application can detect the exhaust gas temperature during the adsorption process through the first temperature sensor, the second temperature sensor and the third temperature sensor. When the temperature exceeds the set value, the early warning signal can prompt the staff to perform maintenance to prevent the adsorbent from failing due to excessive temperature, thereby improving the stability of the exhaust gas treatment device.

[0085] According to one aspect of the present application, a method for treating exhaust gas is provided.

[0086] Figure 5 A schematic diagram of a waste gas treatment method according to an embodiment of the present application is shown. Figure 5 As shown, the production method may include steps S100-S200.

[0087] According to an example embodiment, in step S100 , when each exhaust gas treatment mechanism of the exhaust gas treatment device is operating normally, the main control valve is in a closed state, and each exhaust gas treatment mechanism operates independently.

[0088] In step S200, when one of the exhaust gas treatment mechanisms of the exhaust gas treatment device stops working, the main control valve is in an open state, and the exhaust gas at the air inlet of the stopped exhaust gas treatment mechanism is switched to at least another exhaust gas treatment mechanism.

[0089] For example, the exhaust gas treatment device controls the switching of the connection between the two exhaust gas treatment mechanisms through a master control valve. When each exhaust gas treatment mechanism is operating normally, the master control valve is closed, and each exhaust gas treatment mechanism operates independently. If one exhaust gas treatment mechanism stops operating, the master control valve is opened, and the exhaust gas from the inlet of the stopped exhaust gas treatment mechanism is switched to at least one other exhaust gas treatment mechanism.

[0090] Through the above embodiments, the present application can simultaneously treat exhaust gas through multiple parallel exhaust gas treatment mechanisms, and can perform exhaust gas switching treatment after any exhaust gas treatment mechanism stops working, which can ensure that the device continuously and stably treats exhaust gas, thereby improving exhaust gas treatment efficiency.

[0091] Figure 6 Another schematic flow chart of the waste gas treatment method according to an embodiment of the present application is shown.

[0092] According to an example embodiment, Figure 6 As shown, when all exhaust gas treatment mechanisms are working normally, the main control valve is in a closed state, and each exhaust gas treatment mechanism operates independently, which may include steps S110-S120.

[0093] In step S110, when the main barrel operates normally, the exhaust gas treatment device opens the main gas path and closes the secondary gas path through the first control valve, and opens the first exhaust path and closes the second exhaust path through the second control valve, and the main barrel processes the exhaust gas entering through the air inlet.

[0094] In step S120, when the main barrel stops working, the exhaust gas treatment device closes the main air path and opens the secondary air path through the first control valve, and closes the first exhaust path and opens the second exhaust path through the second control valve, and the secondary barrel treats the exhaust gas entering from the air inlet.

[0095] For example, when a single exhaust gas treatment mechanism is working normally, the exhaust gas treatment device preferentially transports the exhaust gas to the air path where the main barrel is located, opens the main air path and closes the secondary air path through the first control valve, and opens the first exhaust path and closes the second exhaust path through the second control valve. The main barrel processes the exhaust gas entering from the air inlet.

[0096] When the main barrel stops working, the exhaust gas treatment device closes the main air path and opens the secondary air path through the first control valve, and closes the first exhaust path and opens the second exhaust path through the second control valve, and the secondary barrel processes the exhaust gas entering from the air inlet.

[0097] Through the above-described embodiments, the present application can monitor the normal working state of the main barrel in real time through pressure and temperature sensors, and establish a priority processing path between the main gas path and the first exhaust pipe by adjusting the first control valve and the second control valve. If an abnormality occurs in the main barrel, such as temperature exceeding the limit or pressure dropping suddenly, the present application can complete the gas path switching and maintain the processing operation through the secondary gas path and the second exhaust pipe. Through intelligent valve control strategies, the exhaust gas treatment device can ensure uninterrupted operation.

[0098] Figure 7 Another schematic flow chart of the waste gas treatment method according to an embodiment of the present application is shown.

[0099] According to an example embodiment, Figure 7 As shown, when the main barrel stops working, the main air path is closed and the auxiliary air path is opened by the first control valve, and the first exhaust path is closed and the second exhaust path is opened by the second control valve. After the auxiliary barrel processes the exhaust gas entering from the air inlet, step S130 is also included.

[0100] In step S130 , the exhaust gas treatment device controls the first cleaning part through the third control valve to purge the exhaust gas remaining in the main gas path, so as to discharge the purge gas to the exhaust port.

[0101] Through the above embodiment, when the system switches to the auxiliary barrel operation mode, the present application can start the compressed air purge program through the third control valve, which significantly improves the safety and reliability of the exhaust gas treatment system.

[0102] Figure 8 Another schematic flow chart of the waste gas treatment method according to an embodiment of the present application is shown.

[0103] According to an example embodiment, Figure 8 As shown, when one of the exhaust gas treatment mechanisms stops working, the main control valve is in an open state, and the exhaust gas at the air inlet of the stopped exhaust gas treatment mechanism is switched to at least another exhaust gas treatment mechanism, step S300 is also included.

[0104] In step S300 , the exhaust gas treatment device controls the second cleaning part through the third control valve to purge the exhaust gas remaining in the main gas path, so as to discharge the purge gas to the exhaust port.

[0105] Through the above embodiments, the present application can purge the residual exhaust gas in the main gas path or the auxiliary gas path, and cooperate with the exhaust component to achieve directional separation and discharge of the purged exhaust gas and the treated gas, thereby avoiding secondary pollution and improving the exhaust gas treatment effect.

[0106] Finally, it should be noted that the above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Although the present application is described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions of the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. An exhaust gas treatment device, characterized in that: include: At least two exhaust gas treatment mechanisms are connected via a main control valve, and the at least two exhaust gas treatment mechanisms simultaneously treat exhaust gas. The exhaust gas treatment mechanisms include: The main gas line is connected to the air inlet at one end and the main barrel at the other end; A secondary air path, one end of which is connected to the air inlet and the other end of which is connected to the secondary barrel; a first control valve, one end of which is connected to the air inlet and the other end of which is connected to the main barrel and the sub-barrel, for conveying the exhaust gas to the main barrel, or conveying the exhaust gas to the sub-barrel under preset circumstances, so as to control the flow direction of the exhaust gas; Cleanup components, including: a first cleaning unit, provided on the main gas path, for purging residual waste gas in the main gas path when the main barrel stops working; a second cleaning portion, provided on the auxiliary air path, for purging the residual waste gas in the auxiliary air path when the auxiliary barrel stops working; an exhaust assembly connected to the main barrel and the auxiliary barrel, for discharging the waste gas treatment gas in the main barrel and the auxiliary barrel, and discharging the purge gas in the main barrel and the auxiliary barrel; When one of the exhaust gas treatment mechanisms stops working, the exhaust gas input from the air intake is transported to at least another exhaust gas treatment mechanism through the main control valve.

2. The exhaust gas treatment device according to claim 1, characterized in that The exhaust assembly comprises: a first exhaust passage, one end of which is connected to the main barrel and the other end of which is connected to the exhaust port; a second exhaust passage, one end of which is connected to the auxiliary barrel and the other end of which is connected to the exhaust port; a second control valve connected to the first exhaust path and the second exhaust path, for controlling the flow direction of the exhaust treatment gas in the main barrel or the auxiliary barrel; The third control valve is connected to the first exhaust path and the second exhaust path, and is used to control the flow direction of the purge gas in the main barrel or the auxiliary barrel.

3. The exhaust gas treatment device according to claim 1, characterized in that The first cleaning unit includes: a first cleaning interface, provided between the first control valve and the main barrel, and connected to an external cleaning device. When the main barrel stops working and the auxiliary barrel operates normally, the external cleaning device purges the main air path through the first cleaning interface; The second cleaning unit includes: The second cleaning interface is arranged between the first control valve and the auxiliary barrel and is connected to an external cleaning device. When the auxiliary barrel stops working and the main barrel works normally, the external cleaning device purges the auxiliary air path through the second cleaning interface.

4. The exhaust gas treatment device according to claim 2, characterized in that: The exhaust gas treatment mechanism further comprises: There are at least two first manual valves, which are respectively arranged at both ends of the main barrel; There are at least two second manual valves, which are respectively arranged on the main gas path and the first exhaust path.

5. The exhaust gas treatment device according to claim 2, characterized in that: The exhaust assembly further comprises: The gas detection component is arranged on the end of the first exhaust passage away from the main barrel, and is used to detect the exhaust gas concentration in the exhaust gas.

6. The exhaust gas treatment device according to claim 4, characterized in that: The exhaust gas treatment mechanism further comprises: Detection components, including: The first pressure sensor is provided on the main gas line, located between the second manual valve and the first control valve, and is used to detect the gas pressure of the main gas line.

7. The exhaust gas treatment device according to claim 6, characterized in that: The detection component also includes: a second pressure sensor, disposed on the air inlet, for detecting the gas pressure at the air inlet; The third pressure sensor is disposed on the exhaust port and is used to detect the gas pressure at the exhaust port.

8. The exhaust gas treatment device according to claim 3, characterized in that: The detection component also includes: a first temperature sensor, disposed on the main barrel, for detecting the temperature inside the main barrel; a second temperature sensor, disposed between the second manual valve and the first control valve, for detecting the temperature of the incoming exhaust gas; The third temperature sensor is provided at the exhaust port and is used to detect the temperature of the exhaust treatment gas.

9. A method for treating waste gas, characterized in that: The exhaust gas treatment method is performed by the exhaust gas treatment device according to any one of claims 1 to 8, and the exhaust gas treatment method includes: When all the exhaust gas treatment mechanisms are operating normally, the main control valve is in a closed state, and each exhaust gas treatment mechanism operates independently; When one of the exhaust gas treatment mechanisms stops working, the main control valve is in an open state, and the exhaust gas from the air inlet of the stopped exhaust gas treatment mechanism is switched to at least another exhaust gas treatment mechanism.

10. The waste gas treatment method according to claim 9, characterized in that: When each of the exhaust gas treatment mechanisms is operating normally, the main control valve is closed, and each of the exhaust gas treatment mechanisms operates independently, including: When the main tub operates normally, the main air path is opened and the auxiliary air path is closed by the first control valve, and the first exhaust path is opened and the second exhaust path is closed by the second control valve, so that the main tub processes the exhaust gas entering through the air inlet. When the main barrel stops working, the main air path is closed and the secondary air path is opened by the first control valve, and the first exhaust path is closed and the second exhaust path is opened by the second control valve, and the secondary barrel processes the exhaust gas entering through the air intake.

11. The waste gas treatment method according to claim 10, characterized in that: When the main barrel stops working, the main gas path is closed by the first control valve and the secondary gas path is opened, and the first exhaust path is closed by the second control valve and the second exhaust path is opened, and after the secondary barrel processes the exhaust gas entering through the air inlet, the method further includes: The first cleaning part is controlled by the third control valve to purge the waste gas remaining in the main gas path, so as to discharge the purge gas to the exhaust port.

12. The waste gas treatment method according to claim 9, characterized in that: When one of the exhaust gas treatment mechanisms stops working, the main control valve is in an open state, and the exhaust gas from the air inlet of the stopped exhaust gas treatment mechanism is switched to at least another exhaust gas treatment mechanism, the method further includes: The second cleaning portion is controlled by the third control valve to purge the waste gas remaining in the main gas path, so as to discharge the purge gas to the exhaust port.

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