Graphite boat cleaning device and process

Abstract

The graphite boat cleaning device comprises a support and a box body, the box body is fixedly connected to the top of the support, a cleaning box is fixedly connected to the inner wall of the bottom of the box body, and a first deionized water tank, a non-strong alkali solution tank, a second deionized water tank and an acid solution tank which are distributed at equal intervals are formed in the top of the cleaning box; the invention further discloses a graphite boat cleaning process which comprises the following steps: S1, adding a solution, namely adding the acid solution with the concentration of 20-25% into the acid solution tank, and the like. According to the method, residual acid on the wall of the graphite boat can be more effectively removed, other impurities are not introduced, the boat wall and a silicon wafer are not corroded, the cleaning effect can be enhanced, other pollutants can be separated from the graphite boat, water vapor adsorbed in the graphite boat can be volatilized to the maximum extent, and therefore the drying effect on the graphite boat is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of graphite boat cleaning, and in particular to a graphite boat cleaning device and process. Background Art

[0002] During the production of solar cells, the surface of the semiconductor wafers needs to be coated. Specifically, an anti-reflective coating is formed on the surface of the semiconductor wafers to improve the utilization rate of absorbed light. The key to coating the semiconductor wafer surface is the use of a graphite boat as a carrier to transport the coating material. The quality of the graphite boat directly affects the conversion efficiency and production efficiency of the silicon wafers. Due to production costs and other reasons, the graphite boat needs to be reused during the coating process. That is, after coating, the graphite boat needs to be cleaned for secondary use.

[0003] The current method for cleaning a graphite boat is to first pickle it in hydrofluoric acid with a volume concentration of 25% for 6 hours, then rinse it with water for 6 hours, and finally dry it for 10 hours. This method takes too long to rinse thoroughly, greatly reducing the service life of the graphite boat and increasing production costs. Therefore, it is necessary to propose a graphite boat cleaning device and process to solve the above problems. Summary of the Invention

[0004] (1) Technical problems solved In response to the shortcomings of the existing technology, the present invention provides a graphite boat cleaning device and process, which mainly solves the problem that the existing method of cleaning the graphite boat is to first pickle it in hydrofluoric acid with a volume concentration of 25% for 6 hours, then wash it with water for 6 hours, and finally dry it for 10 hours. This method takes too long to wash the graphite boat and the washing is not thorough, which greatly reduces the service life of the graphite boat and also causes an increase in production costs.

[0005] (2) Technical solution In order to achieve the above object, the present invention adopts the following technical solutions: A graphite boat cleaning device comprises a bracket and a box body, the box body is fixedly connected to the top of the bracket, the bottom inner wall of the box body is fixedly connected to a cleaning box, the top of the cleaning box is provided with a deionized water tank 1, a non-strong alkali solution tank, a deionized water tank 2 and an acid solution tank which are equidistantly distributed, the top inner wall of the box body is fixedly connected to a linear motor, the bottom of the linear motor moving part is provided with a clamping mechanism for grabbing the graphite boat, a plurality of mounting grooves penetrating the deionized water tank 1, the non-strong alkali solution tank, the deionized water tank 2 and the acid solution tank are provided in the cleaning box, an air pipe is fixedly connected in the mounting groove, a plurality of air holes equidistantly distributed are provided on the top of the air pipe, a tee is embedded in the cleaning box, and the air pipe is connected to the tee, the bottom inner wall of the cleaning box is fixedly connected to a mounting bracket, the top of the mounting bracket is fixedly connected to an air pump, and one end of the air pump outlet is connected to the tee through a pipeline.

[0006] Furthermore, the clamping mechanism includes a hydraulic cylinder, which is fixedly connected to the bottom of the moving part of the linear motor. One end of the telescopic part of the hydraulic cylinder is fixedly connected to a connecting rod. Two symmetrically distributed dovetail grooves are provided on the upper surface of the connecting rod. An L-shaped plate is slidably connected in the dovetail groove. The top of the connecting rod is fixedly connected to two symmetrically distributed electric telescopic rods, and one end of the telescopic part of the two electric telescopic rods is fixed to the two L-shaped plates.

[0007] Based on the above solution, the bottom of the L-shaped plate is integrally formed with a slope sloping from bottom to top.

[0008] As a further solution of the present invention, two doors are hingedly connected to one side of the box body, and a handle is fixedly connected to one side of the two doors.

[0009] Furthermore, the top of the air pipe is higher than the bottom of the deionized water tank 1, the non-strong alkali solution tank, the deionized water tank 2 and the acid solution tank, and the corners of the deionized water tank 1, the non-strong alkali solution tank, the deionized water tank 2 and the acid solution tank are all arc-shaped.

[0010] The present invention also discloses a graphite boat cleaning process, comprising the following steps: S1: Add solution, add acid solution with a concentration of 20-25% into the acid solution tank, add deionized water into deionized water tank 1 and deionized water tank 2, and then add non-strong alkaline solution with a concentration of 2-8% into the non-strong alkaline solution tank; S2: Bubbling, through the cooperation of the air pump, the tee pipe and the air pipe, the air pipe is blown through the air holes to the deionized water tank 1, the non-strong alkali solution tank, the deionized water tank 2 and the acid solution tank, so that the solutions in the deionized water tank 1, the non-strong alkali solution tank, the deionized water tank 2 and the acid solution tank are bubbled; S3: Pickling: adding the graphite boat into the acid solution tank for bubbling pickling; S4: First cleaning: After the pickling is completed, the graphite boat in the acid solution tank is taken out of the acid solution tank by the clamping mechanism, and then the clamping mechanism is moved to the top of the second deionized water tank by the linear motor, and then the graphite boat is placed in the second deionized water tank by the clamping mechanism for the first bubbling cleaning; S5: Alkali washing. After the cleaning is completed, the graphite boat in the deionized water tank 2 is taken out of the deionized water tank 2 by the clamping mechanism, and then the clamping mechanism is moved to the top of the non-strong alkaline solution tank by the linear motor. Then, the graphite boat is placed into the non-strong alkaline solution tank by the clamping mechanism for bubbling alkaline washing; S6: After the second cleaning, the graphite boat in the non-strong alkaline solution tank is taken out of the non-strong alkaline solution tank by the clamping mechanism, and then the clamping mechanism is moved to the top of the deionized water tank 1 by the linear motor, and then the graphite boat is placed in the deionized water tank 1 by the clamping mechanism for the second bubbling cleaning; S7: Drying. After the second cleaning is completed, the graphite boat in the deionized water tank 1 is taken out by the clamping mechanism, and then the graphite boat is dried by a gradient drying method.

[0011] Based on the above scheme, the acid solution in S1 is any one of hydrofluoric acid, hydrochloric acid, nitric acid and fluosilicic acid, and the non-alkali solution in S1 is any one or more of ammonia water, sodium bicarbonate solution, potassium bicarbonate solution or ammonium bicarbonate solution.

[0012] As a further solution of the present invention, the gradient drying method is to first dry at 95-105° C. for 2.5-3.5 hours, and then dry at 155-175° C. for 7-8 hours.

[0013] (3) Beneficial effects Compared with the prior art, the present invention provides a graphite boat cleaning device and process, which has the following beneficial effects: 1. The present invention neutralizes acidic substances adsorbed in the graphite after acid washing by adding a non-strong alkaline solution, resulting in a better cleaning effect. It can more effectively remove residual acid from the graphite boat wall without introducing other impurities and preventing corrosion of the boat wall and silicon wafer. After alkali washing, the boat wall becomes neutral or alkaline, which can prevent acid gas corrosion of silicon wafers under high temperature conditions compared to the acidic boat wall after water washing. Bubble cleaning can also enhance the cleaning effect and remove other contaminants from the graphite boat.

[0014] 2. The present invention dries the graphite boat by adopting a gradient drying method. The gradient temperature drying method helps to volatilize the water vapor adsorbed in the graphite boat to the maximum extent, thereby improving the drying effect of the graphite boat.

[0015] 3. The present invention uses a clamping mechanism and a linear motor to clamp and transport the cleaned graphite boat, thereby eliminating the need for staff to operate, reducing the workload of the staff and preventing acid and alkali solutions from causing harm to the workers. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of a graphite boat cleaning device proposed by the present invention; Figure 2 This is a schematic diagram of the enlarged structure of the interior of a box of a graphite boat cleaning device proposed in the present invention; Figure 3 This is a schematic diagram of the partial cross-sectional structure of a cleaning box of a graphite boat cleaning device proposed in the present invention.

[0017] Figure 4 This is an enlarged structural diagram of a clamping mechanism of a graphite boat cleaning device proposed in the present invention; Figure 5 This is a schematic diagram of a partially enlarged structure of an air pipe of a graphite boat cleaning device proposed by the present invention; Figure 6 This is a schematic diagram of the process flow structure of a graphite boat cleaning process proposed by the present invention.

[0018] In the figure: 1. bracket; 2. box body; 3. box door; 4. handle; 5. linear motor; 6. gripper mechanism; 7. cleaning box; 8. deionized water tank 1; 9. non-strong alkaline solution tank; 10. deionized water tank 2; 11. acid solution tank; 12. mounting frame; 13. air pump; 14. air pipe; 15. tee pipe; 16. mounting slot; 17. electric telescopic rod; 19. dovetail slot; 20. L-shaped plate; 21. hydraulic cylinder; 22. ramp; 23. connecting rod; 24. air hole. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0020] Example 1 Reference Figures 1-6A graphite boat cleaning device includes a bracket 1 and a box 2. The box 2 is fixed to the top of the bracket 1 by bolts. A cleaning box 7 is fixed to the bottom inner wall of the box 2 by bolts. The top of the cleaning box 7 is provided with a deionized water tank 1 8, a non-strong alkaline solution tank 9, a deionized water tank 2 10, and an acid solution tank 11 that are evenly distributed. A linear motor 5 is fixed to the top inner wall of the box 2 by bolts. A clamping mechanism 6 for grabbing the graphite boat is provided at the bottom of the moving part of the linear motor 5. The clamping mechanism 6 includes a hydraulic cylinder 21, which is fixed to the bottom of the moving part of the linear motor 5 by bolts. One end of the telescopic part of the hydraulic cylinder 21 is fixed with a connecting rod 23 by bolts. The upper surface of the connecting rod 23 is provided with two symmetrically distributed dovetail grooves 19, and an L-shaped plate 20 is slidably connected in the dovetail groove 19. The top of the connecting rod 23 is fixed with two symmetrically distributed electric telescopic rods 17 by bolts. One end of the telescopic part of the two electric telescopic rods 17 is fixed with two L-shaped plates 20. When it is necessary to clamp the graphite boat, the hydraulic cylinder 21 is started to extend, and the hydraulic cylinder 21 will push the connecting rod 23 to move in the acid solution tank 11. At the same time, the connecting rod 23 will drive the L-shaped plate 20 to move. When the L-shaped plate 20 moves to fit the bottom of the acid solution tank 11, the electric The telescopic rod 17 contracts, causing the two L-shaped plates 20 to move toward each other along the dovetail groove 19, so that the L-shaped plates 20 clamp the graphite boat, thereby clamping the graphite boat, and then the hydraulic cylinder 21 contracts, driving the clamped graphite boat to move upward and out of the acid solution tank 11, and then the hydraulic cylinder 21 is driven by the linear motor 5 to move, thereby moving the clamped graphite boat to just above the deionized water tank 2 10, and then the hydraulic cylinder 21 is extended to place the graphite boat into the deionized water tank 2 10 for bubbling cleaning. In addition, the graphite boat can be moved to the non-strong alkaline solution tank 9 and the deionized water tank 1 8 for cleaning in the above manner, without the need for workers to move the graphite boat, thereby reducing the workload of the workers and preventing the acid and alkali solutions from causing harm to the workers. In the present invention, a plurality of mounting slots 16 are provided in the cleaning box 7, which penetrate the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11. The air pipe 14 is fixed in the mounting slot 16 by bolts. The top of the air pipe 14 is provided with a plurality of air holes 24 distributed at equal intervals. A three-way pipe 15 is embedded in the cleaning box 7, and the air pipe 14 is connected to the three-way pipe 15. The bottom inner wall of the cleaning box 7 is fixed with a mounting bracket 12 by bolts. The top of the mounting bracket 12 is fixed by bolts. An air pump 13 is provided, and one end of the air outlet of the air pump 13 is connected to the tee pipe 15 through a pipeline. Ammonia is extracted by the air pump 13, and the air pump 13 transports the ammonia into the air pipe 14 through the tee pipe 15, and then blows the ammonia out through the air holes 24 of the air pipe 14, thereby causing bubbles to form in the solutions in the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11, thereby achieving bubbling cleaning of the graphite boat, enhancing the cleaning effect, and allowing other pollutants to be separated from the graphite boat.

[0021] In particular, the bottom of the L-shaped plate 20 is integrally formed with a slope 22 inclined from bottom to top, one side of the box body 2 is hinged with two box doors 3, and one side of the two box doors 3 is fixed with a handle 4 by bolts. The top of the air pipe 14 is higher than the bottom of the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11. When the L-shaped plate 20 clamps the graphite boat, since the air pipe 14 is higher than the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 1 The graphite boat is positioned at the bottom of the deionized water tank 10 and the acid solution tank 11, so there is a gap between the graphite boat and the acid solution tank 11. During the movement toward each other, the L-shaped plate 20 pushes the graphite boat upward through its own slope 22, causing the graphite boat to fall onto the L-shaped plate 20, thereby supporting the graphite boat and stably clamping the graphite boat. The corners of the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11 are all arc-shaped.

[0022] Working principle: When in use, ammonia is extracted through the air pump 13, and the air pump 13 will transport the ammonia to the air pipe 14 through the three-way pipe 15, and then blow it out through the air hole 24 of the air pipe 14, so that the solutions in the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11 are bubbled, so as to achieve the bubbling cleaning of the graphite boat, enhance the cleaning effect, and make other pollutants separate from the graphite boat. When the graphite boat in the acid solution tank 11 is cleaned, , start the hydraulic cylinder 21 to extend, the hydraulic cylinder 21 will push the connecting rod 23 to move in the acid solution tank 11, and at the same time the connecting rod 23 will drive the L-shaped plate 20 to move. When the L-shaped plate 20 moves to fit the bottom of the acid solution tank 11, start the electric telescopic rod 17 to retract, so that the two L-shaped plates 20 move toward each other along the dovetail groove 19. At the same time, because the air pipe 14 is higher than the bottom of the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11, Therefore, there is a gap between the graphite boat and the acid solution tank 11, and the L-shaped plate 20 will push the graphite boat upward through its own slope 22 during the process of moving toward each other, so that the graphite boat falls on the L-shaped plate 20, so that the L-shaped plate 20 supports the graphite boat and clamps the graphite boat through the L-shaped plate 20, thereby clamping the graphite boat, and then the hydraulic cylinder 21 contracts, driving the clamped graphite boat to move upward and out of the acid solution tank 11, and then the hydraulic cylinder 21 is driven by the linear motor 5 to move, so as to move the clamped graphite boat to just above the deionized water tank 2 10, and then the hydraulic cylinder 21 is extended to put the graphite boat into the deionized water tank 2 10 for bubbling cleaning, and the graphite boat can be moved to the non-strong alkaline solution tank 9 and the deionized water tank 1 8 for cleaning in the above manner, without the need for staff to move the graphite boat, reducing the workload of staff and avoiding harm to workers caused by acid and alkali solutions.

[0023] The present invention also discloses a graphite boat cleaning process, comprising the following steps: S1: Add solution, add acid solution with a concentration of 20% into acid solution tank 11, add deionized water into deionized water tank 1 8 and deionized water tank 2 10, and then add non-strong alkaline solution with a concentration of 2% into non-strong alkaline solution tank 9; S2: Bubbling, through the cooperation of the air pump 13, the tee pipe 15 and the air pipe 14, the air pipe 14 is used to blow air through the air hole 24 to the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11, so that the solutions in the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11 are bubbled; S3: Pickling: adding the graphite boat into the acid solution tank 11 for bubbling pickling; S4: First cleaning: After the pickling is completed, the graphite boat in the acid solution tank 11 is taken out of the acid solution tank 11 by the clamping mechanism 6, and then the clamping mechanism 6 is moved to the top of the deionized water tank 2 10 by the linear motor 5, and then the graphite boat is placed in the deionized water tank 2 10 by the clamping mechanism 6 for the first bubbling cleaning; S5: Alkali washing. After the washing is completed, the graphite boat in the deionized water tank 2 10 is taken out of the deionized water tank 2 10 by the clamping mechanism 6, and then the clamping mechanism 6 is moved to the top of the non-strong alkaline solution tank 9 by the linear motor 5. Then, the graphite boat is placed in the non-strong alkaline solution tank 9 by the clamping mechanism 6 for bubbling alkali washing. By adding the non-strong alkaline solution, the acidic substances adsorbed in the graphite after acid washing are neutralized, and the cleaning effect is better. The residual acid on the graphite boat wall can be removed more effectively without introducing other impurities and corroding the boat wall and silicon wafer. After the alkali washing, the boat wall becomes neutral or alkaline. Compared with the boat wall that becomes acidic after water washing, it can avoid the corrosion of the silicon wafer by acid gas under high temperature conditions. In addition, bubbling washing can enhance the cleaning effect and remove other contaminants from the graphite boat. S6: Second cleaning: After the alkaline cleaning is completed, the graphite boat in the non-strong alkaline solution tank 9 is taken out of the non-strong alkaline solution tank 9 by the clamping mechanism 6, and then the clamping mechanism 6 is moved to the top of the deionized water tank 8 by the linear motor 5, and then the graphite boat is placed in the deionized water tank 8 by the clamping mechanism 6 for the second bubbling cleaning; S7: Drying. After the second cleaning is completed, the graphite boat in the deionized water tank 8 is taken out by the clamping mechanism 6, and then the graphite boat is dried by a gradient drying method. The gradient drying method is used to dry the graphite boat. The gradient temperature drying method will help to volatilize the water vapor adsorbed in the graphite boat to the maximum extent, thereby improving the drying effect of the graphite boat.

[0024] It should be noted that the acid solution in S1 is nitric acid, the non-strong alkaline solution in S1 is ammonia water, and the gradient drying method is first drying at 105° C. for 2.5 hours and then drying at 175° C. for 7 hours.

[0025] Example 2 Reference Figures 1-6 A graphite boat cleaning device includes a bracket 1 and a box 2. The box 2 is fixed to the top of the bracket 1 by bolts. A cleaning box 7 is fixed to the bottom inner wall of the box 2 by bolts. The top of the cleaning box 7 is provided with a deionized water tank 1 8, a non-strong alkaline solution tank 9, a deionized water tank 2 10, and an acid solution tank 11 that are evenly distributed. A linear motor 5 is fixed to the top inner wall of the box 2 by bolts. A clamping mechanism 6 for grabbing the graphite boat is provided at the bottom of the moving part of the linear motor 5. The clamping mechanism 6 includes a hydraulic cylinder 21, which is fixed to the bottom of the moving part of the linear motor 5 by bolts. One end of the telescopic part of the hydraulic cylinder 21 is fixed with a connecting rod 23 by bolts. The upper surface of the connecting rod 23 is provided with two symmetrically distributed dovetail grooves 19, and an L-shaped plate 20 is slidably connected in the dovetail groove 19. The top of the connecting rod 23 is fixed with two symmetrically distributed electric telescopic rods 17 by bolts. One end of the telescopic part of the two electric telescopic rods 17 is fixed with two L-shaped plates 20. When it is necessary to clamp the graphite boat, the hydraulic cylinder 21 is started to extend, and the hydraulic cylinder 21 will push the connecting rod 23 to move in the acid solution tank 11. At the same time, the connecting rod 23 will drive the L-shaped plate 20 to move. When the L-shaped plate 20 moves to fit the bottom of the acid solution tank 11, the electric The telescopic rod 17 contracts, causing the two L-shaped plates 20 to move toward each other along the dovetail groove 19, so that the L-shaped plates 20 clamp the graphite boat, thereby clamping the graphite boat, and then the hydraulic cylinder 21 contracts, driving the clamped graphite boat to move upward and out of the acid solution tank 11, and then the hydraulic cylinder 21 is driven by the linear motor 5 to move, thereby moving the clamped graphite boat to just above the deionized water tank 2 10, and then the hydraulic cylinder 21 is extended to place the graphite boat into the deionized water tank 2 10 for bubbling cleaning. In addition, the graphite boat can be moved to the non-strong alkaline solution tank 9 and the deionized water tank 1 8 for cleaning in the above manner, without the need for workers to move the graphite boat, thereby reducing the workload of the workers and preventing the acid and alkali solutions from causing harm to the workers. In the present invention, a plurality of mounting slots 16 are provided in the cleaning box 7, which penetrate the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11. The air pipe 14 is fixed in the mounting slot 16 by bolts. The top of the air pipe 14 is provided with a plurality of air holes 24 distributed at equal intervals. A three-way pipe 15 is embedded in the cleaning box 7, and the air pipe 14 is connected to the three-way pipe 15. The bottom inner wall of the cleaning box 7 is fixed with a mounting bracket 12 by bolts. The top of the mounting bracket 12 is fixed by bolts. An air pump 13 is provided, and one end of the air outlet of the air pump 13 is connected to the tee pipe 15 through a pipeline. Ammonia is extracted by the air pump 13, and the air pump 13 transports the ammonia into the air pipe 14 through the tee pipe 15, and then blows the ammonia out through the air holes 24 of the air pipe 14, thereby causing bubbles to form in the solutions in the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11, thereby achieving bubbling cleaning of the graphite boat, enhancing the cleaning effect, and allowing other pollutants to be separated from the graphite boat.

[0026] In particular, the bottom of the L-shaped plate 20 is integrally formed with a slope 22 inclined from bottom to top, one side of the box body 2 is hinged with two box doors 3, and one side of the two box doors 3 is fixed with a handle 4 by bolts. The top of the air pipe 14 is higher than the bottom of the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11. When the L-shaped plate 20 clamps the graphite boat, since the air pipe 14 is higher than the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 1 The graphite boat is positioned at the bottom of the deionized water tank 10 and the acid solution tank 11, so there is a gap between the graphite boat and the acid solution tank 11. During the movement toward each other, the L-shaped plate 20 pushes the graphite boat upward through its own slope 22, causing the graphite boat to fall onto the L-shaped plate 20, thereby supporting the graphite boat and stably clamping the graphite boat. The corners of the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11 are all arc-shaped.

[0027] Working principle: When in use, ammonia is extracted through the air pump 13, and the air pump 13 will transport the ammonia to the air pipe 14 through the three-way pipe 15, and then blow it out through the air hole 24 of the air pipe 14, so that the solutions in the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11 are bubbled, so as to achieve the bubbling cleaning of the graphite boat, enhance the cleaning effect, and make other pollutants separate from the graphite boat. When the graphite boat in the acid solution tank 11 is cleaned, , start the hydraulic cylinder 21 to extend, the hydraulic cylinder 21 will push the connecting rod 23 to move in the acid solution tank 11, and at the same time the connecting rod 23 will drive the L-shaped plate 20 to move. When the L-shaped plate 20 moves to fit the bottom of the acid solution tank 11, start the electric telescopic rod 17 to retract, so that the two L-shaped plates 20 move toward each other along the dovetail groove 19. At the same time, because the air pipe 14 is higher than the bottom of the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11, Therefore, there is a gap between the graphite boat and the acid solution tank 11, and the L-shaped plate 20 will push the graphite boat upward through its own slope 22 during the process of moving toward each other, so that the graphite boat falls on the L-shaped plate 20, so that the L-shaped plate 20 supports the graphite boat and clamps the graphite boat through the L-shaped plate 20, thereby clamping the graphite boat, and then the hydraulic cylinder 21 contracts, driving the clamped graphite boat to move upward and out of the acid solution tank 11, and then the hydraulic cylinder 21 is driven by the linear motor 5 to move, so as to move the clamped graphite boat to just above the deionized water tank 2 10, and then the hydraulic cylinder 21 is extended to put the graphite boat into the deionized water tank 2 10 for bubbling cleaning, and the graphite boat can be moved to the non-strong alkaline solution tank 9 and the deionized water tank 1 8 for cleaning in the above manner, without the need for staff to move the graphite boat, reducing the workload of staff and avoiding harm to workers caused by acid and alkali solutions.

[0028] The present invention also discloses a graphite boat cleaning process, comprising the following steps: S1: Add solution, add acid solution with a concentration of 25% into acid solution tank 11, add deionized water into deionized water tank 1 8 and deionized water tank 2 10, and then add non-strong alkaline solution with a concentration of 8% into non-strong alkaline solution tank 9; S2: Bubbling, through the cooperation of the air pump 13, the tee pipe 15 and the air pipe 14, the air pipe 14 is used to blow air through the air hole 24 to the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11, so that the solutions in the deionized water tank 1 8, the non-strong alkaline solution tank 9, the deionized water tank 2 10 and the acid solution tank 11 are bubbled; S3: Pickling: adding the graphite boat into the acid solution tank 11 for bubbling pickling; S4: First cleaning: After the pickling is completed, the graphite boat in the acid solution tank 11 is taken out of the acid solution tank 11 by the clamping mechanism 6, and then the clamping mechanism 6 is moved to the top of the deionized water tank 2 10 by the linear motor 5, and then the graphite boat is placed in the deionized water tank 2 10 by the clamping mechanism 6 for the first bubbling cleaning; S5: Alkali washing. After the washing is completed, the graphite boat in the deionized water tank 2 10 is taken out of the deionized water tank 2 10 by the clamping mechanism 6, and then the clamping mechanism 6 is moved to the top of the non-strong alkaline solution tank 9 by the linear motor 5. Then, the graphite boat is placed in the non-strong alkaline solution tank 9 by the clamping mechanism 6 for bubbling alkali washing. By adding the non-strong alkaline solution, the acidic substances adsorbed in the graphite after acid washing are neutralized, and the cleaning effect is better. The residual acid on the graphite boat wall can be removed more effectively without introducing other impurities and corroding the boat wall and silicon wafer. After the alkali washing, the boat wall becomes neutral or alkaline. Compared with the boat wall that becomes acidic after water washing, it can avoid the corrosion of the silicon wafer by acid gas under high temperature conditions. In addition, bubbling washing can enhance the cleaning effect and remove other contaminants from the graphite boat. S6: Second cleaning: After the alkaline cleaning is completed, the graphite boat in the non-strong alkaline solution tank 9 is taken out of the non-strong alkaline solution tank 9 by the clamping mechanism 6, and then the clamping mechanism 6 is moved to the top of the deionized water tank 8 by the linear motor 5, and then the graphite boat is placed in the deionized water tank 8 by the clamping mechanism 6 for the second bubbling cleaning; S7: Drying. After the second cleaning is completed, the graphite boat in the deionized water tank 8 is taken out by the clamping mechanism 6, and then the graphite boat is dried by a gradient drying method. The gradient drying method is used to dry the graphite boat. The gradient temperature drying method will help to volatilize the water vapor adsorbed in the graphite boat to the maximum extent, thereby improving the drying effect of the graphite boat.

[0029] It should be noted that the acid solution in S1 is hydrofluoric acid, the non-alkali solution in S1 is potassium bicarbonate solution, and the gradient drying method is first drying at 95° C. for 3.5 hours and then drying at 155° C. for 8 hours.

[0030] In the description herein, it should be noted that relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Furthermore, the terms "include," "comprise," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0031] In addition, while embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the invention, and the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A graphite boat cleaning device, comprising a support (1) and a box (2), wherein the box (2) is fixedly connected to the top of the support (1), characterized in that: The bottom inner wall of the box body (2) is fixedly connected to a cleaning box (7), and the top of the cleaning box (7) is provided with a deionized water tank (8), a non-alkali solution tank (9), a deionized water tank (10) and an acid solution tank (11) that are evenly distributed. The top inner wall of the box body (2) is fixedly connected to a linear motor (5), and the bottom of the moving part of the linear motor (5) is provided with a clamping mechanism (6) for grabbing the graphite boat. The cleaning box (7) is provided with a plurality of deionized water tanks (8), non-alkali solution tanks (9), deionized water tanks (10) and acid solution tanks (11) that are evenly distributed. 10) and an installation groove (16) of the acid solution tank (11), an air pipe (14) is fixedly connected in the installation groove (16), a plurality of air holes (24) distributed at equal intervals are opened on the top of the air pipe (14), a three-way pipe (15) is embedded in the cleaning box (7), and the air pipe (14) is connected to the three-way pipe (15), the bottom inner wall of the cleaning box (7) is fixedly connected to a mounting frame (12), the top of the mounting frame (12) is fixedly connected to an air pump (13), and one end of the air outlet of the air pump (13) is connected to the three-way pipe (15) through a pipeline.

2. The graphite boat cleaning device according to claim 1, characterized in that: The clamping mechanism (6) includes a hydraulic cylinder (21), which is fixedly connected to the bottom of the moving part of the linear motor (5), and one end of the telescopic part of the hydraulic cylinder (21) is fixedly connected to a connecting rod (23), and two symmetrically distributed dovetail grooves (19) are provided on the upper surface of the connecting rod (23), and an L-shaped plate (20) is slidably connected in the dovetail groove (19). The top of the connecting rod (23) is fixedly connected to two symmetrically distributed electric telescopic rods (17), and one end of the telescopic part of the two electric telescopic rods (17) is fixed to the two L-shaped plates (20).

3. The graphite boat cleaning device according to claim 2, characterized in that: The bottom of the L-shaped plate (20) is integrally formed with a slope (22) that tilts upward from bottom to top.

4. The graphite boat cleaning device according to claim 1, characterized in that: Two doors (3) are hingedly connected to one side of the box body (2), and a handle (4) is fixedly connected to one side of each of the two doors (3).

5. The graphite boat cleaning device according to claim 1, characterized in that: The top of the air pipe (14) is higher than the bottoms of the deionized water tank (8), the non-strong alkali solution tank (9), the deionized water tank (10) and the acid solution tank (11), and the corners of the deionized water tank (8), the non-strong alkali solution tank (9), the deionized water tank (10) and the acid solution tank (11) are all arc-shaped.

6. A graphite boat cleaning process, characterized in that: The following steps are involved: S1: Add solution, add acid solution with a concentration of 20-25% into the acid solution tank (11), add deionized water into deionized water tank 1 (8) and deionized water tank 2 (10), and then add non-strong alkaline solution with a concentration of 2-8% into the non-strong alkaline solution tank (9); S2: Bubbling, through the cooperation of the air pump (13), the three-way pipe (15) and the air pipe (14), the air pipe (14) blows air through the air hole (24) to the deionized water tank (8), the non-strong alkali solution tank (9), the deionized water tank (10) and the acid solution tank (11), so that the solutions in the deionized water tank (8), the non-strong alkali solution tank (9), the deionized water tank (10) and the acid solution tank (11) are bubbled; S3: pickling, adding the graphite boat into the acid solution tank (11) for bubbling pickling; S4: First cleaning: After the pickling is completed, the graphite boat in the acid solution tank (11) is taken out of the acid solution tank (11) by the clamping mechanism (6), and then the clamping mechanism (6) is moved to the top of the second deionized water tank (10) by the linear motor (5), and then the graphite boat is placed into the second deionized water tank (10) by the clamping mechanism (6) for the first bubbling cleaning; S5: Alkaline washing. After the washing is completed, the graphite boat in the deionized water tank (10) is taken out of the deionized water tank (10) by the clamping mechanism (6), and then the clamping mechanism (6) is moved to the top of the non-strong alkaline solution tank (9) by the linear motor (5), and then the graphite boat is placed into the non-strong alkaline solution tank (9) by the clamping mechanism (6) for bubbling alkaline washing; S6: After the second cleaning, the graphite boat in the non-strong alkaline solution tank (9) is taken out of the non-strong alkaline solution tank (9) by the clamping mechanism (6), and then the clamping mechanism (6) is moved to the top of the deionized water tank (8) by the linear motor (5), and then the graphite boat is placed in the deionized water tank (8) by the clamping mechanism (6) for the second bubbling cleaning; S7: Drying. After the second cleaning is completed, the graphite boat in the deionized water tank (8) is taken out by the clamping mechanism (6), and then the graphite boat is dried by gradient drying.

7. A graphite boat cleaning device and process according to claim 6, characterized in that: The acid solution in S1 is any one of hydrofluoric acid, hydrochloric acid, nitric acid and fluosilicic acid, and the non-alkali solution in S1 is any one or more of ammonia water, sodium bicarbonate solution, potassium bicarbonate solution or ammonium bicarbonate solution.

8. The graphite boat cleaning device and process according to claim 6, characterized in that: The gradient drying method is to first dry at 95-105° C. for 2.5-3.5 hours, and then dry at 155-175° C. for 7-8 hours.

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