CDS liquid supply cabinet
Through the fully enclosed structure and automated control CDS liquid supply cabinet, the chemical leakage, liquid supply interruption and pipeline corrosion of traditional liquid supply cabinets are solved, safe delivery and production continuity of chemicals are achieved, and the stability and operation and maintenance efficiency of equipment are improved.
Patent Information
- Application Number
- CN202510912097.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-03
- Publication Date
- 2025-08-29
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
The traditional liquid supply cabinet has an open structure that causes chemical volatility and leakage, interruption of single barrel liquid supply affects production continuity, impurities and bubbles are easily mixed in the pipeline and interferes with the flowmeter reading, and the material pipeline is prone to corrosion and leakage, increasing operation and maintenance costs.
The CDS liquid supply cabinet adopts a fully enclosed structure, uses PP/PVDF/PFA acid- and alkali-resistant corrosion materials, a double-casing liquid supply system and a bubble defoamer, combined with air exhaust system and PLC control to achieve closed delivery and automated management of chemicals.
Thoroughly block chemical volatility and leakage, ensure process continuity, prevent impurities from entering, extend equipment life, reduce operation and maintenance costs, and improve production efficiency and product quality.
Smart Images
Figure CN120568643A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of CDS liquid supply cabinets, in particular to a CDS liquid supply cabinet. Background Art
[0002] CDS liquid supply system, also known as central acid supply system, is mainly used for centralized distribution of etching liquid required for wet etching and cleaning processes, and is distributed to equipment through pipelines. It has the characteristics of high degree of automation, good proportioning, and easy operation.
[0003] The CDS (Chemical Distribution System) is a chemical supply and delivery system that utilizes precision components and automated controls to automatically dispense chemicals. Its fully enclosed design effectively prevents chemical leaks, protecting the environment and operator safety.
[0004] In advanced manufacturing industries such as semiconductors, photovoltaics, and LEDs, wet processes (such as chemical etching, cleaning, and deposition) place stringent demands on the stability, safety, and purity control of chemical supply systems. Traditional chemical supply equipment commonly suffers from the following technical pain points, resulting in limited production efficiency, prominent safety hazards, and high operation and maintenance costs: 1. Open structure defects: Traditional liquid supply cabinets mostly adopt semi-open or open designs, which cannot completely block the volatilization and leakage of strong acids (such as H2SO4, HNO3), strong bases (such as NH4OH, KOH) and organic solvents (such as IPA, PGMEA), causing workshop air pollution, endangering the respiratory health of operators, and easily corroding metal parts of equipment, shortening equipment life; 2. Single-barrel liquid supply interruption: The traditional single-barrel liquid supply mode requires manual shutdown and replacement when the liquid level is exhausted, resulting in process interruption and affecting wafer yield (such as interruption of photoresist coating leading to pattern defects).
[0005] 3. Impurity and bubble interference: The liquid supply pipeline is easily mixed with foreign particles (such as metal chips, dust) or gases (such as dissolved air), resulting in flow meter reading deviation, ratio error, and even causing defects in the deposition layer of the process chamber (such as uneven film thickness and pinhole problems).
[0006] 4. Pipeline corrosion and leakage: Ordinary material pipes (such as PVC and stainless steel) are prone to perforation and leakage when exposed to highly corrosive chemicals such as hydrofluoric acid (HF) and aqua regia for a long time, increasing the frequency of downtime and maintenance; Therefore, the present invention provides a CDS liquid supply cabinet. Summary of the Invention
[0007] The object of the present invention is to provide a CDS liquid supply cabinet to solve the problems raised in the above background technology.
[0008] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: a CDS liquid supply cabinet, comprising a cabinet structure, a liquid supply system component, a safety and monitoring system component, and a human-machine interface control system; the cabinet structure comprises a plurality of compartments, each compartment being provided with a sealed partition; the cabinet structure adopts a fully enclosed structure and is made of acid- and alkali-resistant materials such as PP polypropylene, PVDF polyvinylidene fluoride, or PFA tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer; the front hinges of the cabinet structure are provided with two movable doors; the bottom of the cabinet structure is provided with universal wheels and a fixing device; the sides and back of the cabinet structure are also provided with transparent observation windows and equipment maintenance doors, respectively; and the bottom of the cabinet structure is provided with a transmission roller system.
[0009] Preferably, the liquid supply system components include two liquid supply barrels, a pump and multiple liquid supply pipes. The liquid supply barrels are configured in a one-for-one manner to ensure the continuity of liquid supply. The two liquid supply barrels are placed on the transmission roller system, and the pump is installed in the cabinet. The liquid supply pipe runs through each compartment and is finally connected to the liquid supply barrel to achieve precise liquid supply. The liquid supply pipe adopts a double-tube method and is laid at an angle. The inner pipe is made of PFA material to transport acid and alkali chemical liquids, and the outer pipe is made of transparent PVC material or PFA material.
[0010] Preferably, filters, debubblers and flow regulating valves are provided between the multiple liquid supply pipes to ensure stable flow during the liquid supply process. The filters are made of PFA material and can effectively intercept impurities. The debubbler is used to remove bubbles in the solution, and the flow regulating valve accurately adjusts the flow.
[0011] Preferably, the safety and monitoring system components specifically include an exhaust system and a monitoring device. The exhaust system includes an exhaust duct and an exhaust box. The exhaust duct and the exhaust box are connected and installed on the top of the cabinet. The monitoring device is installed on the top of the exhaust box.
[0012] Preferably, the exhaust box is equipped with an exhaust fan, and an activated carbon filter layer is provided at the bottom of the exhaust box, which can effectively absorb harmful gases and ensure that the harmful gases are discharged in time.
[0013] Preferably, the monitoring device includes a temperature and humidity sensor and a gas detector to monitor the environmental parameters in the cabinet in real time and automatically adjust the ventilation intensity through the PLC system.
[0014] Preferably, the human-machine interaction interface control system is equipped with a PLC human-machine interaction interface, which is set in front of the cabinet. The operator can conveniently set parameters, monitor the equipment operation status, and view alarm information through the touch screen or related operation panel. Its built-in PLC programmable logic controller is controlled to realize the automatic operation of the liquid supply system.
[0015] The present invention provides a CDS liquid supply cabinet. It has the following beneficial effects: (1) The present invention adopts a fully enclosed structure and acid- and alkali-resistant PP / PVDF / PFA material for the cabinet body, and separates multiple compartments by sealed partitions, thereby completely blocking the risk of chemical volatilization and leakage, preventing corrosive gases from spreading to the workshop environment, and protecting the health of operators and ecological safety. The exhaust system has a built-in exhaust fan and activated carbon filter layer, which adsorbs and filters volatile corrosive gases (such as HCl, HF, etc.) in real time, and discharges qualified gases through the exhaust duct, achieving "zero emission" of harmful gases and reducing the company's environmental compliance risks.
[0016] (2) The present invention adopts a "one in use and one in standby" mode through the liquid supply barrel. The liquid level sensor monitors the remaining liquid volume in real time. When the liquid level in the main liquid supply barrel is insufficient, the PLC system automatically switches to the standby barrel to ensure process continuity and avoid wafer scrapping or yield reduction due to shutdown; the cabinet integrates leakage detection sensors, flow control valves, and temperature and humidity sensors to monitor pipeline leakage, flow fluctuations and environmental parameters in real time. Abnormal data triggers sound and light alarms and is pushed to the human-machine interface to guide operation and maintenance personnel to quickly locate faults (such as pipeline blockage and pump failure); the cabinet has double movable doors on the front, side maintenance doors and a bottom transmission roller system to achieve quick disassembly and maintenance. When replacing the liquid supply barrel, the transfer trolley and the transmission roller work together, and a single person can complete the replacement of the full barrel, which is more efficient than traditional manual handling.
[0017] (3) The debubbler of the present invention removes bubbles ≥10 μm in the solution through centrifugal separation technology, and combines with a PFA material filter (interception accuracy 0.1 μm) to completely eliminate the interference of bubbles on the flow meter reading, while preventing particulate impurities from entering the process chamber, extending the life of the equipment deposition chamber. The PLC human-machine interface supports remote parameter setting, historical data tracing and energy consumption analysis. The system automatically adjusts the exhaust fan speed according to process requirements, which is more energy-efficient than traditional constant-speed fans. It can also be connected to the factory MES system to realize real-time uploading of production data and intelligent production scheduling. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a bottom view of the overall structure of the present invention; Figure 3 This is a view of the internal structure of the cabinet of the present invention; Figure 4 It is a side view of the overall structure of the present invention; Figure 5 This is a view of the components of the liquid supply system of the present invention; Figure 6 This is a view of the components of the security and monitoring system of the present invention; Figure 7 Schematic diagram of the safety and monitoring system components of the present invention.
[0019] In the figure: cabinet structure 11, partition compartment 21, movable door 22, universal wheel 23, fixing device 24, transparent observation window 25, equipment maintenance door 26, transmission roller system 27, liquid supply barrel 31, pump 32, liquid supply pipeline 33, filter 34, defoamer 35, flow regulating valve 36, exhaust system 41, monitoring device 42, exhaust duct 412, exhaust box 413, activated carbon filter layer 414, human-computer interaction interface control system 51. DETAILED DESCRIPTION
[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0021] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, but are not to be construed as limiting the present invention.
[0022] In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they may refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.
[0023] A preferred embodiment of a CDS liquid supply cabinet provided by the present invention is as follows: Figure 1-7As shown: A CDS liquid supply cabinet, including a cabinet structure 11, a liquid supply system component, a safety and monitoring system component, and a human-machine interface control system 51. The cabinet structure 11 includes multiple compartments 21, each compartment is provided with a sealed partition. The cabinet structure 11 adopts a fully enclosed structure, which can effectively prevent chemical leakage, protect the environment and the safety of operators. At the same time, this structure can prevent external impurities from entering the system, ensuring the purity of the chemicals. It is made of acid and alkali corrosion-resistant materials such as PP polypropylene, PVDF polyvinylidene fluoride or PFA tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, has excellent chemical stability, and can withstand corrosion from various strong acids and strong bases. To prevent the corrosion of harmful chemicals and extend the service life of the equipment, the front hinge of the cabinet structure 11 is equipped with two movable doors 22, which facilitate operators to quickly enter the various compartments for maintenance and overhaul. The bottom of the cabinet structure 11 is equipped with universal wheels 23 and fixing devices 24, so that the equipment can be flexibly moved or fixed as needed, enhancing the convenience and stability of use. The side and back of the cabinet structure 11 are also provided with transparent observation windows 25 and equipment maintenance doors 26, respectively, which facilitate operators to observe the internal pipelines and the flow of chemicals at any time and detect abnormalities in time. The bottom of the cabinet structure 11 is provided with a transmission roller system 27 and a pipetting trolley to facilitate the replacement of the liquid supply barrel. The liquid supply system assembly includes two liquid supply barrels 31, a pump 32, and multiple liquid supply pipes 33. The liquid supply barrels 31 are configured in a backup and standby mode to ensure the continuity of liquid supply. The two liquid supply barrels 31 are placed on the drive roller system 27, and the pump 32 is installed in the cabinet. The liquid supply pipes 33 pass through each compartment and are finally connected to the liquid supply barrels 31 to achieve precise liquid supply. The liquid supply pipes 33 adopt a double-tube method and are laid at an angle. The inner pipe is made of PFA material for conveying acid and alkaline chemical liquids, and the outer pipe is made of transparent PVC or PFA material. For liquid supply pipes for low flash point, flammable, and explosive substances such as organic solvents, the inner pipe can be made of SUS316 material and the outer pipe is made of PFA material. Filters 34, debubblers 35, and flow control valves 36 are arranged between the multiple liquid supply pipes 33 to ensure stable flow during the liquid supply process. The filter 34 is made of PFA material and can effectively intercept impurities. The debubbler 35 is used to remove bubbles in the solution. The flow control valve 36 accurately adjusts the flow rate. The safety and monitoring system components specifically include an exhaust system 41 and a monitoring device 42. The exhaust system 41 includes an exhaust duct 412 and an exhaust box 413. The exhaust duct 412 and the exhaust box 413 are connected and installed on the top of the cabinet. The monitoring device 42 is installed on the top of the exhaust box 413. The exhaust box 413 has an exhaust fan 411 built in. The bottom of the exhaust box 413 is provided with an activated carbon filter layer 414, which can effectively absorb harmful gases and ensure that harmful gases are discharged in time. The monitoring device 42 includes a temperature and humidity sensor and a gas detector to monitor the environmental parameters in the cabinet in real time and automatically adjust the exhaust intensity through the PLC system. The human-machine interaction interface control system 51 is equipped with a PLC human-machine interaction interface, which is set in front of the cabinet. The operator can conveniently set parameters, monitor the equipment operation status, view alarm information, etc. through the touch screen or related operation panel to realize remote control and intelligent management of the liquid supply cabinet. Its built-in PLC programmable logic controller is controlled to realize the automatic operation of the liquid supply system.
[0024] During use, the system is equipped with two stock liquid barrels of the same solution, one for use and one for backup. When the liquid level sensor of the liquid supply barrel in use detects insufficient liquid level, the switching valve automatically starts to switch the liquid supply source to the backup full barrel to ensure uninterrupted liquid supply. If there is a height difference between the liquid supply system and the process machine, the continuity of liquid transmission must be considered. When bubbles are mixed in the pipeline, the flow value measured by the flow meter will have errors, resulting in inaccurate liquid distribution ratio. Therefore, the system removes bubbles through the debubbler 35 to ensure accurate flow meter readings and maintain liquid distribution accuracy. Then, during the liquid transmission process, it must pass through the filter 34 to intercept fine impurities, prevent pipeline blockage, and ensure the purity of the liquid supply. At the same time, the system is equipped with a pressure sensor to monitor the pipeline pressure in real time to prevent unstable liquid supply caused by pressure fluctuations, thereby ensuring the stability and safety of the entire liquid supply process and ensuring production efficiency and product quality.
[0025] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.
[0026] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or substitute equivalents for some of the technical features. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.
Claims
1. A CDS liquid supply cabinet, comprising a cabinet structure (11), a liquid supply system component, a safety and monitoring system component, and a human-machine interface control system (51), characterized in that: The cabinet structure (11) includes a plurality of compartments (21), each compartment being provided with a sealed partition. The cabinet structure (11) adopts a fully enclosed structure and is made of PP (polypropylene), PVDF (polyvinylidene fluoride) or PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer) acid and alkali corrosion-resistant material. Two movable doors (22) are installed on the front hinge of the cabinet structure (11). Universal wheels (23) and a fixing device (24) are installed on the bottom of the cabinet structure (11). Transparent observation windows (25) and equipment maintenance doors (26) are also provided on the side and back of the cabinet structure (11). A transmission roller system (27) is provided on the bottom of the cabinet structure (11).
2. A CDS liquid supply cabinet according to claim 1, characterized in that: The liquid supply system assembly includes two liquid supply barrels (31), a pump (32) and a plurality of liquid supply pipes (33). The liquid supply barrels (31) are configured in a one-for-one configuration to ensure the continuity of liquid supply. The two liquid supply barrels (31) are placed on the transmission roller system (27). The pump (32) is installed in the cabinet and passes through each compartment through the liquid supply pipe (33) and is finally connected to the liquid supply barrel (31) to achieve precise liquid supply. The liquid supply pipe (33) adopts a double-tube method and is laid obliquely. The inner pipe is made of PFA material to transport acid and alkali chemical liquids, and the outer pipe is made of transparent PVC material or PFA material.
3. A CDS liquid supply cabinet according to claim 2, characterized in that: A filter (34), a debubbler (35) and a flow regulating valve (36) are provided between the plurality of liquid supply pipes (33) to ensure a stable flow rate during the liquid supply process. The filter (34) is made of PFA material and can effectively intercept impurities. The debubbler (35) is used to remove bubbles in the solution. The flow regulating valve (36) accurately adjusts the flow rate.
4. The CDS liquid supply cabinet according to claim 1, characterized in that: The safety and monitoring system components specifically include an exhaust system (41) and a monitoring device (42). The exhaust system (41) includes an exhaust duct (412) and an exhaust box (413). The exhaust duct (412) and the exhaust box (413) are connected and installed on the top of the cabinet. The monitoring device (42) is installed on the top of the exhaust box (413).
5. The CDS liquid supply cabinet according to claim 4, characterized in that: The exhaust box (413) has an exhaust fan (411) built in, and an activated carbon filter layer (414) is provided at the bottom of the exhaust box (413), which can effectively absorb harmful gases and ensure that the harmful gases are discharged in a timely manner.
6. The CDS liquid supply cabinet according to claim 4, characterized in that: The monitoring device (42) includes a temperature and humidity sensor and a gas detector, which monitors the environmental parameters in the cabinet in real time and automatically adjusts the ventilation intensity through the PLC system.
7. The CDS liquid supply cabinet according to claim 1, characterized in that: The human-machine interaction interface control system (51) is equipped with a PLC human-machine interaction interface and is arranged in front of the cabinet. The operator can conveniently set parameters, monitor the equipment operation status, and view alarm information through the touch screen or related operation panel. The built-in PLC programmable logic controller is controlled to realize the automatic operation of the liquid supply system.