Automatic sampling and analyzing system for electronic-grade high-purity gas

Abstract

The invention discloses an automatic sampling and analyzing system for electronic-grade high-purity gas, and relates to the field of automatic sampling and analyzing systems. Comprising a dilution gas flow path, a standard gas flow path, a dilution device, an analysis device and a control device, diluted gas is introduced into the diluted gas flow path, and a fourth control valve is arranged on the diluted gas flow path; standard gas is introduced into the standard gas flow path, and a sixth control valve is arranged on the standard gas flow path; the diluted gas flow path and the standard gas flow path are connected in parallel, and a pipeline after parallel connection is communicated with the input end of the diluting device; the output end of the dilution device is communicated with the analysis device; the dilution gas flow path and the standard gas flow path are communicated with the dilution device after being connected in parallel, the concentration of standard gas entering the analysis device can be adjusted through the dilution device under the condition that a standard gas tank is not replaced, and external gas is prevented from entering the system in the process of replacing standard gas tanks with different concentrations; therefore, the detection and calibration distortion is caused.

Description

Technical Field

[0001] The present invention relates to the technical field of automatic sampling and analysis systems, in particular to an automatic sampling and analysis system for electronic-grade high-purity gas. Background Art

[0002] In advanced semiconductor manufacturing processes, the purity of electronic special gases is required to be above 99.999%, and gas chromatography analyzers are needed for analysis and monitoring to ensure that the purity of the supplied gases meets the process requirements; traditional sampling systems have certain shortcomings; first, detection and calibration rely on offline standard gas preparation, which is easy to infiltrate external environmental gases during the detection process, causing calibration distortion and affecting the detection results; second, there is gas residue in the pipeline, which can easily lead to cross-interference in multi-component detection; finally, the sampling and analysis system in the existing technology has weak multi-gas path collaborative control capabilities and cannot meet the needs of synchronous detection of multiple gas stations, resulting in poor detection efficiency.

[0003] Therefore, the present invention has developed an automatic sampling and analysis system for electronic-grade high-purity gas to solve the above-mentioned technical problems. Summary of the Invention

[0004] The present invention aims to provide an automatic sampling and analysis system for electronic-grade high-purity gases to address the aforementioned problems of the prior art and prevent the infiltration of ambient gases during the detection process, which could cause calibration distortion. To achieve this objective, the present invention provides the following solutions:

[0005] The present invention provides an automatic sampling and analysis system for electronic-grade high-purity gas, comprising: a dilution gas flow path, a standard gas flow path, a dilution device, an analysis device and a control device; dilution gas is introduced into the dilution gas flow path, and a fourth control valve is provided on the dilution gas flow path; standard gas is introduced into the standard gas flow path, and a sixth control valve is provided on the standard gas flow path; the dilution gas flow path is connected in parallel with the standard gas flow path, and the parallel-connected pipelines are connected to the input end of the dilution device; the dilution device is used to mix the required amount of dilution gas and the standard gas, and dilute the standard gas to a specific concentration; the output end of the dilution device is connected to the analysis device; the dilution device and the analysis device are both electrically connected to the control device.

[0006] Preferably, it further includes a flow meter and a one-way valve; the flow meter, the one-way valve and the analysis device are connected in series, and the flow meter and the one-way valve are arranged behind the analysis device along the gas flow direction.

[0007] Preferably, it also includes a sample flow path, an electronic gas mixing flow path and a multi-channel gas path switching device; sample gas flows through the sample flow path, and a second control valve is provided on the sample flow path; electronic gas or mixed gas flows through the electronic gas mixing flow path, and an eleventh control valve is provided on the electronic gas mixing flow path; the electronic gas mixing flow path, the sample flow path, the dilution device and the analysis device are respectively connected to the multi-channel gas path switching device, and the gases in different flow paths and the dilution device are transported to the analysis device through the multi-channel gas path switching device.

[0008] Preferably, there are multiple electronic gas mixing and matching airflow paths; each of the electronic gas mixing and matching airflow paths is connected to the multi-channel airflow switching device; and the eleventh control valve is provided between each of the electronic gas mixing and matching airflow paths and the channel airflow switching device.

[0009] Preferably, there are a plurality of sample flow paths; each of the sample flow paths is connected to the multi-channel gas path switching device; and the second control valve is provided between each of the sample flow paths and the channel gas path switching device.

[0010] Preferably, there are multiple analyzing devices; all of the multiple analyzing devices are connected to the multi-channel gas path switching device; and a fifteenth control valve is provided between each analyzing device and the channel gas path switching device.

[0011] Preferably, a filter is provided between each of the analysis devices and the multi-channel gas path switching device.

[0012] Preferably, it also includes a negative pressure device; each of the analysis devices is connected to a flow meter; the rear end of the flow meter is connected to a first gas exhaust port; the negative pressure device and the one-way valve are installed between the first gas exhaust port and the flow meter.

[0013] Preferably, it also includes a purging device; the purging device is filled with high-purity gas, the gas purity is greater than or equal to 5N, and is used to clear the residual sample gas and electronic gas mixture in the pipeline; the purging device is connected to the multi-channel gas path switching device; a fourteenth control valve is arranged between the purging device and the multi-channel gas path switching device.

[0014] Preferably, the multi-channel gas path switching device is a multi-way electric valve.

[0015] Compared with the prior art, the present invention has achieved the following technical effects:

[0016] In the present invention, the dilution gas flow path and the standard gas flow path are connected in parallel and communicated with the dilution device. The dilution device can adjust the concentration of the standard gas entering the analysis device without replacing the standard gas tank, thereby avoiding the entry of external gas into the system during the replacement of standard gas tanks with different concentrations, thereby causing detection calibration distortion. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 It is a schematic structural diagram of the present invention as a whole.

[0019] Among them, 1. sample gas tank; 2. first control valve; 3. first pressure reducing valve; 4. second control valve; 5. first helium tank; 6. third control valve; 7. second pressure reducing valve; 8. fourth control valve; 9. standard gas tank; 10. fifth control valve; 11. third pressure reducing valve; 12. sixth control valve; 13. seventh control valve; 14. eighth control valve; 15. ninth control valve; 16. dilution device; 17. electronic gas mixing tank; 18. tenth control valve; 19. fourth pressure reducing valve; 20. eleventh control valve; 21. twelfth control valve; 22. second helium tank ; 23. The thirteenth control valve; 24. The fifth pressure reducing valve; 25. The fourteenth control valve; 26. The multi-channel gas path switching device; 27. The fifteenth control valve; 28. The filter; 29. ​​The sixteenth control valve; 30. The analysis device; 31. The flow meter; 32. The first one-way valve; 33. The seventeenth control valve; 34. The negative pressure gauge; 35. The vacuum pump; 36. The second one-way valve; 37. The first gas exhaust port; 38. The eighteenth control valve; 39. The third one-way valve; 40. The second gas exhaust port; 41. The third gas exhaust port; 42. The fourth gas exhaust port; 43. The sixth pressure reducing valve. DETAILED DESCRIPTION

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0021] The purpose of the present invention is to provide an automatic sampling and analysis system for electronic grade high-purity gas to solve the problems existing in the above-mentioned prior art and prevent the infiltration of external environmental gas during the detection process, which causes calibration distortion.

[0022] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0023] This embodiment provides an automatic sampling and analysis system for electronic grade high purity gas, such as Figure 1 As shown, it includes: a dilution gas flow path, a standard gas flow path, a dilution device 16, an analysis device 30 and a control device; dilution gas is introduced into the dilution gas flow path, and a fourth control valve 8 is provided on the dilution gas flow path; standard gas is introduced into the standard gas flow path, and a sixth control valve 12 is provided on the standard gas flow path; the dilution gas flow path and the standard gas flow path are connected in parallel, and the parallel pipelines are connected to the input end of the dilution device 16; the dilution device 16 is used to supply the required amount of dilution gas and standard gas to mix, and dilute the standard gas to a specific concentration; the output end of the dilution device 16 is connected to the analysis device 30; the dilution device 16 and the analysis device 30 are both electrically connected to the control device.

[0024] As a specific implementation of this embodiment, the analysis device 30 is a chromatograph.

[0025] Specifically, it also includes a flow meter 31 and a one-way valve; the flow meter 31, the one-way valve and the analysis device 30 are connected in series, and the flow meter 31 and the one-way valve are arranged behind the analysis device 30 along the gas flow path direction; as a specific implementation of this embodiment, there are two one-way valves, namely a first one-way valve 32 and a second one-way valve 36; the flow meter 31 is connected to the back of the analysis device 30; the flow meter 31 is connected to the first one-way valve 32; the first one-way valve 32 is connected to the back of the seventeenth control valve 33; the seventeenth control valve 33 is connected to the second one-way valve 36; the second one-way valve 36 is connected to a first gas exhaust port 37; the first one-way valve 32 prevents gas backflow, so that the gas can only flow in one direction, that is, from the analysis device 30 to the outside; the seventeenth control valve 33 is used to control the opening and closing of the flow path, and can cut off the gas flow path in time; the second one-way valve 36 is closer to the external gas environment, and the second one-way valve 36 blocks the penetration of external gas to prevent the infiltration of external gas and water vapor; the use of two one-way valves can have higher safety and reliability. After one of the one-way valves fails, the other one-way valve can still function to keep the gas in the system flowing in one direction.

[0026] Specifically, it also includes a sample flow path, an electronic gas mixed flow path and a multi-channel gas path switching device; sample gas flows in the sample flow path, and a second control valve 4 is provided on the sample flow path; electronic gas or mixed gas flows in the electronic gas mixed flow path, and an eleventh control valve 20 is provided on the electronic gas mixed flow path; the electronic gas mixed flow path, the sample flow path, the dilution device 16 and the analysis device 30 are respectively connected to the multi-channel gas path switching device, and the gases in different flow paths and the dilution device 16 are transported to the analysis device 30 through the multi-channel gas path switching device; different flow paths are connected through the multi-channel gas path switching device, so that the system has the ability of multi-gas path coordinated control, can control different flow paths, improve work efficiency, and at the same time avoid the intersection of standard gas, sample gas and electronic gas mixed gas lines, thereby improving the accuracy of detection.

[0027] As a specific implementation of this embodiment, a pressure regulating device is installed on the sample flow path, the electronic gas mixed flow path, the standard gas flow path and the dilution gas flow path; the pressure regulating device is a pressure reducing valve; the sample gas is encapsulated in a sample gas tank 1, and the sample gas tank 1 filled with sample gas is connected to the sample flow path, and the sample gas is filled into the sample flow path through the sample gas tank 1; along the gas flow direction, the rear end of the sample gas tank 1 is connected to the first control valve 2, the rear end of the first control valve 2 is connected to the first pressure reducing valve 3, the rear end of the first pressure reducing valve 3 is connected to the second control valve 4, and the second The control valve 4 is connected to the multi-channel gas circuit switching device; the first control valve 2 is a manual valve; when performing gas analysis, when the location of the sample gas tank 1 is relatively far away from the control room, the first control valve 2 is first opened manually, and then the second control valve 4 is opened from inside the control room through the control device; when the electronic control system fails, the manual valve is not affected, and the first control valve 2 can cut off the gas flow to prevent high-pressure gas from directly entering the system; the air pressure in the sample gas tank 1 is relatively high, and the first pressure reducing valve 3 reduces the air pressure to a pressure that enables the multi-channel gas circuit switching device to work normally.

[0028] As a specific implementation of this embodiment, the electronic gas or mixed gas on the electronic gas mixed gas flow path is encapsulated in the electronic gas mixed gas tank 17, and the electronic gas or mixed gas is filled into the electronic gas mixed gas flow path through the electronic gas mixed gas tank 17; along the gas flow direction, the rear end of the electronic gas mixed gas tank 17 is connected to the tenth control valve 18, the rear end of the tenth control valve 18 is connected to the fourth pressure reducing valve 19, the rear end of the fourth pressure reducing valve 19 is connected to the eleventh control valve 20, and the eleventh control valve 20 is connected to the multi-channel gas path switching device; the tenth control valve 18 is a manual valve.

[0029] As a specific implementation of this embodiment, the standard gas on the standard gas flow path is encapsulated in a standard gas tank 9, and the standard gas is filled into the standard gas flow path through the standard gas tank 9; along the gas flow direction, the rear end of the standard gas tank 9 is connected to a fifth control valve 10, the rear end of the fifth control valve 10 is connected to a third pressure reducing valve 11, the rear end of the third pressure reducing valve 11 is connected to a sixth control valve 12, and the sixth control valve 12 is connected to a dilution device 16; the fifth control valve 10 is a manual valve; by arranging a dilution device 16 in the system, the concentration of the standard gas entering the analysis device 30 can be adjusted without replacing the standard gas tank 9, thereby avoiding the situation where external gas enters the system during the replacement of standard gas tanks 9 with different concentrations, thereby causing distortion of the detection calibration.

[0030] As a specific implementation of this embodiment, the dilution gas in the dilution gas flow path is helium; the helium is encapsulated in a first helium tank 5, and the dilution gas flow path is filled with helium through the first helium tank 5. Along the gas flow direction, the flow path at the rear end of the first helium tank 5 is connected to a third control valve 6, the rear end of the third control valve 6 is connected to a second pressure reducing valve 7, and the rear end of the second pressure reducing valve 7 is connected to a fourth control valve 8; the fourth control valve 8 is connected to the dilution device 16; the third control valve 6 is a manual valve.

[0031] As a specific implementation of this embodiment, the dilution device 16 is a diluter; a sixth pressure reducing valve 43 and a twelfth control valve 21 are sequentially arranged between the diluter and the multi-channel gas path switching device along the gas flow direction; the sixth pressure reducing valve 43 regulates the gas pressure in the flow path, and the twelfth control valve 21 controls the flow of the flow path between the diluter and the multi-channel gas path switching device, and can promptly cut off the flow path when the sixth pressure reducing valve 43 fails.

[0032] Specifically, multiple electronic gas mixing flow paths are provided; each electronic gas mixing flow path is connected to a multi-channel gas path switching device; a tenth control valve 18, a fourth pressure reducing valve 19, and an eleventh control valve 20 are sequentially provided between each electronic gas mixing flow path and the channel gas path switching device along the gas flow direction; as a specific implementation method of this example, three electronic gas mixing flow paths are provided; three electronic gas mixing gas tanks 17 are respectively connected to the three electronic gas mixing flow paths; the three electronic gas mixing flow paths are independent of each other and are controlled separately, and different electronic gases or mixed gases can be filled into each electronic gas mixing flow path. By providing three electronic gas mixing flow paths, when the electronic gas mixing gas tank 17 on one of the flow paths is replaced, the detection of the electronic gas mixing flow path will not be affected, which can further improve the working efficiency of the system;

[0033] Specifically, multiple sample flow paths are provided; each sample flow path is connected to a multi-channel gas path switching device; as a specific implementation method of this embodiment, three sample flow paths are connected in parallel, and the parallel pipelines are connected to a multi-channel gas path switching device; three sample gas tanks 1 are respectively connected to the three sample flow paths; the sample flow path on each branch is provided with a first control valve 2, a first pressure reducing valve 3 and a second control valve 4 in sequence along the gas flow direction; the three sample flow paths are independent of each other and are controlled separately, and different sample gases can be filled in each sample flow path; by providing three sample flow paths, the detection efficiency is further improved.

[0034] As a specific implementation of this embodiment, three standard gas flow paths are provided, and the three standard gas flow paths are connected in parallel, and the parallel pipelines are connected to the dilution device 16; the three standard gas tanks 9 are connected to the three standard gas flow paths respectively; the standard gas flow path on each branch is sequentially provided with a fifth control valve 10, a third pressure reducing valve 11 and a sixth control valve 12 along the gas flow direction; the three standard gas flow paths are independent of each other and are controlled separately.

[0035] Specifically, there are multiple analysis devices 30; multiple analysis devices 30 are connected to the multi-channel gas path switching device; a fifteenth control valve 27 is provided between each analysis device 30 and the channel gas path switching device; as a specific implementation of this embodiment, there are three analysis devices 30; the three analysis devices 30 are connected in parallel, and the parallel pipelines are connected to the channel gas path switching device; the three analysis devices 30 respectively detect three gases of different concentrations; each branch where each analysis device 30 is located is sequentially provided with a fifteenth control valve 27, a filter 28 and a sixteenth control valve 29 along the gas flow direction; by controlling The opening and closing of the fifteenth control valve 27 controls the gas flow into the corresponding analysis device 30; the filter 28 is used to remove impurities in the gas to avoid clogging of the analysis device 30 and affect the detection results; the sixteenth control valve 29 prevents the gas in the analysis device 30 from flowing back; by setting up three analysis devices 30, three gases with different gas concentrations can be detected at the same time, and the three analysis devices 30 cooperate with three sample flow paths and three electronic gas mixed flow paths to detect three gases at the same time, completing the detection of gases with different concentrations in different flow paths; the multi-gas path collaborative control capability is strong and the detection efficiency is high.

[0036] Specifically, it also includes a negative pressure device; as a specific implementation of this embodiment, the negative pressure device includes a vacuum pump 35 and a negative pressure gauge 34; along the gas flow direction, the three analysis devices 30 are connected to the back of a flow meter 31; the three flow meters 31 are connected to the back of a first one-way valve 32; the three first one-way valves 32 are connected to the seventeenth control valve 33; the seventeenth control valve 33 is connected to the back of a negative pressure gauge 34; the negative pressure gauge 34 is connected to the back of a vacuum pump 35; the rear end of the vacuum pump 35 is connected to the second one-way valve 36; the rear end of the second one-way valve 36 is connected to the first gas exhaust port 37; when performing gas detection, the vacuum pump 35 vacuums the system to remove residual gas in the pipeline, ensure the vacuum in the gas pipeline, and avoid the presence of residual gas in the pipeline of the flow path, which may cause cross-interference of multi-component gas detection results; during the vacuuming process, each flow path is connected to the flow path where the vacuum pump 35 is located in turn through the multi-channel gas path switching device to ensure that the residual gas in each flow path in the system is cleaned.

[0037] Specifically, it also includes a purge device; the purge device is filled with high-purity gas, the gas purity is greater than or equal to 5N, that is, the gas purity is ≥99.999%, which is used to remove the residual sample gas and electronic gas mixture in the pipeline; the purge device is connected to the multi-channel gas path switching device; a fourteenth control valve 25 is provided between the purge device and the multi-channel gas path switching device; as a specific implementation of this embodiment, the purge device is a second helium tank 22; the second helium tank 22 is connected to the multi-channel gas path switching device through a pipeline; a thirteenth control valve 23, a fifth pressure reducing valve 24 and a fourteenth control valve are sequentially provided on the flow path between the second helium tank 22 and the multi-channel gas path switching device along the gas flow direction. 25; the thirteenth control valve 23 is a manual valve; the fifth pressure reducing valve 24 reduces the high-pressure gas flowing out of the second helium tank 22 to a pressure strength at which the multi-channel gas path switching device can operate normally; the gas flowing out of the second helium tank 22 is used to purge the flow path behind the multi-channel gas path switching device, and the sample gas and electronic gas mixed gas remaining in the flow path are purged; the purge device is used to cooperate with the negative pressure device to clean the pipeline to ensure that the residual gas in the system can be completely cleared; the pipeline is first purged with the gas in the purge device, and then vacuumed by the vacuum pump 35; the above process is repeated 2-3 times to completely remove the gas in the system flow path.

[0038] As a specific implementation of this embodiment, a second gas exhaust port 40 and an eighteenth control valve 38 are also provided; the outlet ends of the three first one-way valves 32 along the gas flow direction are all connected to the eighteenth control valve 38; the rear end of the eighteenth control valve 38 is connected to a third one-way valve 39; the third one-way valve 39 is connected to the second gas exhaust port 40; the third one-way valve 39 is used to block the penetration of external gas and prevent the infiltration of external gas and water vapor; during the gas detection process, it is necessary to perform multiple tests on the same sample gas or the same electronic gas mixed flow path to ensure the detection results; when the same gas is tested multiple times, the fifteenth control valve 27 is opened, and the tested gas flows out from the second gas exhaust port 40. No vacuum treatment is performed during the multiple tests of the same gas, thereby improving the detection efficiency; when different types of gases are tested, the test gas is discharged from the first gas exhaust port 37, and after one gas test is completed, vacuum treatment is required to clear the gas in the system flow path before the second gas test is performed, thereby ensuring the accuracy of the test.

[0039] As a specific implementation of this embodiment, a third gas exhaust port 41 and a fourth gas exhaust port 42 are further provided; the pipeline after the three sample flow paths are connected in parallel is connected to the third gas exhaust port 41, and a seventh control valve 13 is provided between the third gas exhaust port 41; the dilution gas flow path is connected to the third gas exhaust port 41, and the connection position is located behind the fourth control valve 8; an eighth control valve 14 is provided between the fourth control valve 8 and the third gas exhaust port 41; the pipeline after the three standard gas flow paths are connected in parallel is connected to the third gas exhaust port 41, and the seventh control valve 13 is provided between the third gas exhaust port 41; the dilution gas flow path is connected to the third gas exhaust port 41, and the connection position is located behind the fourth control valve 8; the eighth control valve 14 is provided between the fourth control valve 8 and the third gas exhaust port 41; the pipeline after the three standard gas flow paths are connected in parallel is connected to the third gas exhaust port 41, and the seventh control valve 13 is provided between the third gas exhaust port 41 A ninth control valve 15 is provided between the gas ports 41; when the sample gas, rare gas or standard gas is filled into the system, only a small amount of gas needs to pass through the analysis device 30, and most of the gas is discharged from the third gas exhaust port 41; for example, when the sample gas is introduced into the system, the seventh control valve 13 is opened, and the gas flow into the analysis device 30 is adjusted by the flow meter 31, and the remaining sample gas flowing into the system from the sample gas tank 1 is discharged from the third gas exhaust port 41; the fourth gas exhaust port 42 is connected to the diluter, and cooperates with the diluter to achieve precise concentration control.

[0040] As a specific implementation of this embodiment, the multi-channel air circuit switching device is a multi-way electric valve; the first control valve 2, the third control valve 6, the fifth control valve 10, the tenth control valve 18 and the thirteenth control valve 23 are manual diaphragm valves; the second control valve 4, the fourth control valve 8, the sixth control valve 12, the seventh control valve 13, the eighth control valve 14, the ninth control valve 15, the eleventh control valve 20, the twelfth control valve 21, the fourteenth control valve 25, the fifteenth control valve 27, the sixteenth control valve 29, the seventeenth control valve 33 and the eighteenth control valve 38 are pneumatic diaphragm valves.

[0041] The first pressure reducing valve 3, the second control valve 4, the second pressure reducing valve 7, the fourth control valve 8, the third pressure reducing valve 11, the sixth control valve 12, the seventh control valve 13, the eighth control valve 14, the ninth control valve 15, the dilution device 16, the fourth pressure reducing valve 19, the eleventh control valve 20, the twelfth control valve 21, the fifth pressure reducing valve 24, the fourteenth control valve 25, the multi-channel gas path switching device, the fifteenth control valve 27, the sixteenth control valve 29, the analysis device 30, the flow meter 31, the seventeenth control valve 33, the negative pressure gauge 34, the vacuum pump 35, the eighteenth control valve 38 and the sixth pressure reducing valve 43 are all electrically connected to the control device.

[0042] It should be noted that it is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, from all perspectives, the embodiments should be regarded as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the foregoing description. It is intended that all changes that fall within the meaning and range of equivalents of the claims be included in the present invention, and any reference signs in the claims should not be construed as limiting the claims to which they relate.

[0043] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. At the same time, those skilled in the art will find that the specific implementation methods and application scopes may vary based on the concept of the present invention. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims

1. An electronic grade high purity gas automatic sampling and analysis system, characterized in that: include: A dilution gas flow path, a standard gas flow path, a dilution device, an analysis device and a control device; dilution gas is introduced into the dilution gas flow path, and a fourth control valve is provided on the dilution gas flow path; standard gas is introduced into the standard gas flow path, and a sixth control valve is provided on the standard gas flow path; the dilution gas flow path is connected in parallel with the standard gas flow path, and the parallel pipelines are connected to the input end of the dilution device; the dilution device is used to supply the required amount of the dilution gas and the standard gas to mix, and dilute the standard gas to a specific concentration; the output end of the dilution device is connected to the analysis device; the dilution device and the analysis device are both electrically connected to the control device.

2. The electronic grade high purity gas automatic sampling and analysis system according to claim 1, characterized in that: It also includes a flow meter and a one-way valve; the flow meter, the one-way valve and the analysis device are connected in series, and the flow meter and the one-way valve are arranged behind the analysis device along the gas flow direction.

3. The electronic grade high purity gas automatic sampling and analysis system according to claim 2, characterized in that: It also includes a sample flow path, an electronic gas mixing flow path and a multi-channel gas path switching device; sample gas flows through the sample flow path, and a second control valve is provided on the sample flow path; electronic gas or mixed gas flows through the electronic gas mixing flow path, and an eleventh control valve is provided on the electronic gas mixing flow path; the electronic gas mixing flow path, the sample flow path, the dilution device and the analysis device are respectively connected to the multi-channel gas path switching device, and the gases in different flow paths and the dilution device are transported to the analysis device through the multi-channel gas path switching device.

4. The electronic grade high purity gas automatic sampling and analysis system according to claim 3, characterized in that: There are multiple electronic gas mixing and matching airflow paths; each of the electronic gas mixing and matching airflow paths is connected to the multi-channel airflow switching device; the eleventh control valve is provided between each electronic gas mixing and matching airflow path and the channel airflow switching device.

5. The electronic grade high purity gas automatic sampling and analysis system according to claim 3, characterized in that: There are multiple sample flow paths; each of the sample flow paths is connected to the multi-channel gas path switching device; and the second control valve is provided between each of the sample flow paths and the channel gas path switching device.

6. An electronic grade high purity gas automatic sampling and analysis system according to any one of claims 3 to 5, characterized in that: There are multiple analyzing devices; all of the analyzing devices are connected to the multi-channel gas path switching device; a fifteenth control valve is provided between each analyzing device and the channel gas path switching device.

7. The electronic grade high purity gas automatic sampling and analysis system according to claim 6, characterized in that: A filter is provided between each of the analysis devices and the multi-channel gas path switching device.

8. The electronic grade high purity gas automatic sampling and analysis system according to claim 6, characterized in that: It also includes a negative pressure device; each of the analysis devices is connected to a flow meter; the rear end of the flow meter is connected to a first gas exhaust port; the negative pressure device and the one-way valve are installed between the first gas exhaust port and the flow meter.

9. The electronic grade high purity gas automatic sampling and analysis system according to claim 6, characterized in that: It also includes a purging device; the purging device is filled with high-purity gas, the gas purity is greater than or equal to 5N, and is used to clear the residual sample gas and electronic gas mixed gas in the pipeline; the purging device is connected to the multi-channel gas path switching device; a fourteenth control valve is arranged between the purging device and the multi-channel gas path switching device.

10. The electronic grade high purity gas automatic sampling and analysis system according to claim 3, characterized in that: The multi-channel gas path switching device is a multi-way electric valve.

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