An ultrasonic-assisted cleaning device and method of using the same

Abstract

The application provides an ultrasonic-assisted cleaning device and a using equipment and method thereof, which comprises a connecting shell, one side of the connecting shell is provided with a cleaning cylinder, and the other side of the connecting shell is provided with a control panel; the side of the cleaning cylinder away from the connecting shell is provided with a cylinder cover, and the cylinder wall of the cleaning cylinder is provided with a plurality of through holes; the inside of the cleaning cylinder is used for placing materials to be cleaned; the outer circumferential surface of the connecting shell is provided with a plurality of connecting hooks; the side of the connecting shell close to the cleaning cylinder is provided with a plurality of fans; and the inside of the cleaning cylinder is provided with a cleaning mechanism. The application can flexibly operate the cleaning device, the cleaning device does not need to be fixed at a certain position, and the operation is more convenient; cleaning and drying are carried out in the same equipment, the efficiency is higher, and the cleaning device does not need to be transferred, so that secondary pollution is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of ultrasonic-assisted cleaning, and in particular to an ultrasonic-assisted cleaning device and a use device and method thereof. Background Art

[0002] During the manufacturing process, semiconductors, optical components, lasers, and electronic components are exposed to various contaminants, such as particulate impurities, organic matter, and metal ions. These contaminants can affect the soft and brittle crystalline materials, such as ZnSe crystals, YAG crystals, SiC crystals, and Si crystals, in the components, thereby affecting the performance, reliability, and service life of the components.

[0003] For example, particulate impurities may cause semiconductor chips to short-circuit or open-circuit, organic residues may affect the transmittance and refractive index of optical components, and metal ions may cause corrosion and leakage of electronic components. In order to solve these problems, semiconductors, optical components, lasers and electronic components need to be cleaned.

[0004] Although existing automated equipment can achieve batch processing, it still cannot meet the requirements in terms of cleaning efficiency, process integration and intelligent control. The following problems exist:

[0005] 1. Insufficient cleaning adaptability: Most existing equipment has a fixed structure and is not compatible with wafers of different sizes or special-shaped electronic components, and lacks a flexible positioning system.

[0006] 2. Low process separation efficiency: Cleaning and drying need to be carried out in steps. Intermediate transfer is prone to secondary contamination. In addition, traditional hot air drying has poor uniformity, resulting in uneven heating and warping of silicon wafers.

[0007] 3. Surface damage risk: Mechanical scrubbing or chemical immersion may damage the surface coating of high-precision optical components or the microstructure of semiconductor devices. Summary of the Invention

[0008] The main purpose of the present invention is to provide an ultrasonic assisted cleaning device and its use equipment and method, so as to solve the problem that the prior art needs to be transferred after cleaning, which easily causes secondary contamination during the transfer process.

[0009] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0010] An ultrasonic assisted cleaning device comprises a connecting shell, a cleaning cylinder is provided on one side of the connecting shell, and a control panel is provided on the other side of the connecting shell;

[0011] A cylinder cover is provided on the side of the cleaning cylinder away from the connecting shell, and a plurality of through holes are provided on the wall of the cleaning cylinder; the interior of the cleaning cylinder is used to place the material to be cleaned;

[0012] The outer peripheral surface of the connecting shell is provided with a plurality of connecting hooks;

[0013] A plurality of fans are provided on one side of the connecting shell close to the cleaning cylinder;

[0014] A cleaning mechanism is provided in the cleaning cylinder.

[0015] In a preferred embodiment, a magnet is provided on the side of the cylinder cover close to the cleaning cylinder;

[0016] The inner wall of the cleaning cylinder is provided with a first fixing clamp, which is used to clamp the partition. The material to be cleaned is placed in the cleaning cylinder and is located between adjacent partitions.

[0017] A first bottom plate is provided inside the cleaning cylinder;

[0018] The material to be cleaned is arranged inside the cleaning cylinder and between the first bottom plate and the cylinder cover.

[0019] In a preferred solution, the connecting hook includes a fixing bolt connected to the connecting shell, the fixing bolt is provided with a fixing shell, and the fixing shell is slidably connected to the movable rod;

[0020] A draw hook is provided on the side of the movable rod away from the fixing bolt;

[0021] A spring is provided between the side of the movable rod close to the fixing bolt and the fixing bolt.

[0022] In a preferred embodiment, the cleaning mechanism includes a hollow shaft motor disposed inside the connecting shell, and the hollow shaft of the hollow shaft motor is connected to an ultrasonic generating cylinder;

[0023] The ultrasonic generating cylinder is located inside the cleaning cylinder, and the cylinder wall is provided with a plurality of through holes;

[0024] Several fixing rods are provided between the ultrasonic generating cylinder and the cleaning cylinder;

[0025] An ultrasonic generator is arranged in the connecting shell, an ultrasonic transmitter is arranged in the ultrasonic generating tube, and the ultrasonic transmitter is connected to the ultrasonic generator.

[0026] In a preferred embodiment, a first fixing clamp is provided on the inner wall of the cleaning cylinder, and the first fixing clamp is used to clamp the partition. The material to be cleaned is placed in the cleaning cylinder and is located between adjacent partitions.

[0027] The cleaning mechanism includes a hollow shaft motor arranged inside the connecting shell, and the hollow shaft of the hollow shaft motor is connected to an ultrasonic generating cylinder;

[0028] The ultrasonic generating cylinder is located inside the cleaning cylinder, and the cylinder wall is provided with a plurality of through holes;

[0029] An ultrasonic generator is provided in the connecting shell, an ultrasonic transmitter is provided in the ultrasonic generating tube, and the ultrasonic transmitter is connected to the ultrasonic generator;

[0030] A lifting mechanism is provided between the connecting shell and the cleaning cylinder;

[0031] The lifting mechanism includes a fixed plate fixed between the hollow shaft and the ultrasonic generating tube;

[0032] A fixing ring is fixedly sleeved on the outer periphery of the ultrasonic generating tube;

[0033] The outer periphery of the ultrasonic generating tube is movably sleeved with a sliding ring, and the outer periphery of the sliding ring is fixed with a second bottom plate; the sliding ring is located on a side of the fixed ring close to the fixed plate;

[0034] A fixing seat is provided on the side of the fixing plate away from the ultrasonic generating tube, and a plurality of threaded rods are rotated between the fixing seat and the fixing ring; the connecting parts of the threaded rods, the fixing seat, the fixing plate and the fixing ring are cylindrical, and the threaded rods pass through the sliding ring and are threadedly connected to the sliding ring;

[0035] A first motor is provided on the side of the fixing seat, and the output shaft of the first motor is transmission-connected to the threaded rod;

[0036] The sliding ring is provided with a second fixing clamp, which is spaced apart from the threaded rod; the second fixing clamp is used to cooperate with the first fixing clamp to clamp the partition, and the material to be cleaned is placed in the cleaning cylinder and is located between adjacent partitions;

[0037] A worm gear is provided at the end of the threaded rod, and the worm gear is located in the fixed seat;

[0038] The output shaft of the first motor is provided with a worm, which is engaged with the worm wheel.

[0039] In a preferred embodiment, the second bottom plate is movably connected to the cleaning cylinder;

[0040] The outer periphery of the second bottom plate is provided with a plurality of movable grooves, the movable grooves are provided with first limiting blocks, and the first limiting blocks are provided with plug-in holes;

[0041] The inner wall of the cleaning cylinder is provided with a plurality of guide rods, and the guide rods are provided with a plurality of second limit blocks, and the guide rods are arranged along the axial direction of the cleaning cylinder; the second limit blocks are provided with plug-in columns, and the plug-in columns are adapted to the plug-in holes;

[0042] The sum of the sizes of the second limiting block and the first limiting block is no greater than the size of the movable slot.

[0043] A device for using an ultrasonic-assisted cleaning device comprises a base, a circular groove is provided on the top of the base, and an inner sleeve is provided in the circular groove;

[0044] The inner sleeve and the base are both cylindrical and coaxial;

[0045] A cleaning tank is formed between the inner sleeve and the base, and a cleaning liquid is provided in the cleaning tank;

[0046] The inner wall of the inner sleeve and the outer periphery of the base are both provided with guide grooves;

[0047] The base is provided with a number of control frames, which are used to connect with the connecting hooks;

[0048] The guide groove is arranged in a wave shape along the inner wall of the inner sleeve and the outer periphery of the base, and the highest point and the lowest point of the guide groove are arranged to extend horizontally;

[0049] The control frame is used to drive the ultrasonic assisted cleaning device located on the top of the base to rotate and perform reciprocating lifting and lowering motions along the guide groove; when descending, the cleaning cylinder enters the cleaning tank for cleaning, and after rising, it moves away from the cleaning tank for disassembly, assembly and drying of the cleaned materials in the cleaning cylinder.

[0050] In a preferred embodiment, the control frame includes an outer ring rotated on the outer periphery of the base and an inner ring rotated on the inner wall of the inner sleeve;

[0051] Several connecting plates are provided on the top of the outer ring and the inner ring;

[0052] The outer ring and the inner ring are both provided with a plurality of sliding grooves, the outer ring sliding grooves are slidably connected to the first sliding rod, and the inner ring sliding grooves are slidably connected to the second sliding rod;

[0053] A mounting frame is provided between the first slide bar and the second slide bar, and the mounting frame is located in the cleaning tank;

[0054] Wherein, the mounting frame includes a plurality of connecting blocks connected to the first slide bar and the second slide bar;

[0055] The bottom of the connecting block is provided with an extension block located inside the cleaning tank;

[0056] A mounting ring is provided between the extension blocks connected to the adjacent first sliding rods and the second sliding rods, and the mounting ring is used to support the connecting hook of the ultrasonic assisted cleaning device to complete the connection of the ultrasonic assisted cleaning device;

[0057] The bottom ends of the first slide bar and the second slide bar are both provided with guide blocks, which are slidably arranged inside the guide groove;

[0058] A driving mechanism is provided on the inner side of the inner sleeve, and the driving mechanism includes a motor seat;

[0059] A second motor is arranged inside the motor seat, an output shaft of the second motor is provided with a rotating block, and a connecting rod is fixedly connected between the rotating block and the inner ring.

[0060] A method for using an ultrasonic-assisted cleaning device comprises the following steps:

[0061] S1. Place the material to be cleaned in the cleaning cylinder;

[0062] S2. Pour cleaning liquid into the container, then place the cleaning device on top of the container, and make sure the cleaning cylinder is inside the container;

[0063] S3, the cleaning mechanism in the cleaning device works, drives the cleaning liquid to rotate reciprocatingly, and cleans through ultrasonic wave assistance;

[0064] S4, after cleaning, the fan works to generate wind, and the wind is heated through the electric heating wire to dry the material;

[0065] S5, after drying, the container stops rotating, and the cleaned material is taken out.

[0066] The application provides an ultrasonic wave assisted cleaning device, a use equipment and a method thereof.

[0067] 1. The cleaning device can be flexibly operated, and the cleaning device does not need to be fixed at a position, and operation is more convenient.

[0068] 2. Cleaning and drying are performed in the same equipment, which is more efficient, and does not need to be transferred, so that secondary pollution is avoided.

[0069] 3. The damage probability of the surface coating film of the optical element or the microstructure of the semiconductor device can be reduced.

[0070] 4. The use equipment is used, batch material cleaning is facilitated, and a part can be cleaned at a time, so that the cleaning efficiency is higher.

[0071] 5. The operation is simple, the use difficulty is low, so that the user can clean soft and brittle, hard and brittle crystal materials such as ZnSe crystal, YAG crystal, SiC crystal and Si crystal. DETAILED DESCRIPTION

[0072] The application will be further described in combination with the drawings and embodiments:

[0073] Figure 1 is a structural diagram of the application Figure 1 ;

[0074] Figure 2 is a structural diagram of the application Figure 2 ;

[0075] Figure 3 is a front view of the application;

[0076] Figure 4 is a structural diagram of the connecting hook of the application;

[0077] Figure 5 is a sectional view of the application;

[0078] Figure 6 is a sectional view of the embodiment of the application;

[0079] Figure 7 is a sectional view of the lifting mechanism in the embodiment of the application;

[0080] Figure 8 yes Figure 6 A in the middle is an enlarged schematic diagram;

[0081] Figure 9 It is a schematic diagram of the top view of the movable groove of the present invention;

[0082] Figure 10 It is a structural schematic diagram of the equipment used in the present invention;

[0083] Figure 11 It is a structural schematic diagram of the mounting frame of the present invention;

[0084] Figure 12 It is a schematic cross-sectional view of the device used in the present invention.

[0085] In the picture:

[0086] Connecting shell 1, cleaning cylinder 2, cylinder cover 201, first fixing clip 202, first bottom plate 203, second fixing clip 204, control panel 3, connecting hook 4, fixing bolt 401, fixing shell 402, movable rod 403, hook 404, spring 405, fan 5, cleaning mechanism 6, hollow shaft motor 601, hollow shaft 602, ultrasonic generating cylinder 603, fixing rod 604, ultrasonic generator 605, ultrasonic transmitter 606, lifting mechanism 7, fixing plate 701, fixing ring 702, second bottom plate 703, guide rod 731, movable groove 732, first limit Positioning block 733, plug-in hole 734, second limiting block 735, plug-in column 736, sliding ring 704, fixing seat 705, threaded rod 706, worm gear 707, first motor 708, worm 709, base 801, guide groove 802, inner sleeve 803, outer ring 901, inner ring 902, connecting plate 903, driving mechanism 904, motor seat 941, second motor 942, rotating block 943, connecting rod 944, first slide rod 905, second slide rod 906, mounting frame 907, connecting block 971, extension block 972, mounting ring 973, guide block 908. DETAILED DESCRIPTION

[0087] Example 1:

[0088] like Figure 1 、 2 , 3, 4 and 5, an ultrasonic-assisted cleaning device includes a connecting shell 1, a cleaning cylinder 2 is provided on one side of the connecting shell 1, and a control panel 3 is provided on the other side of the connecting shell 1. The control panel 3 is preferably an existing control panel with a human-computer interaction interface, which is connected to an existing control chip;

[0089] A cylinder cover 201 is provided on the side of the cleaning cylinder 2 away from the connecting shell 1, and a number of through holes are provided on the wall of the cleaning cylinder 2; the interior of the cleaning cylinder 2 is used to place the material to be cleaned; the materials to be cleaned referred to in this application include but are not limited to soft and brittle, hard and brittle crystal materials such as ZnSe crystals, YAG crystals, SiC crystals, and Si crystals.

[0090] A magnet is provided on one side of the cylinder cover 201 close to the cleaning cylinder 2. When in use, the cylinder cover 201 and the cleaning cylinder 2 are connected via the magnet, which is simple to operate and convenient to connect and disassemble.

[0091] A first fixing clamp 202 is provided on the inner wall of the cleaning cylinder 2. The first fixing clamp 202 is used to clamp the partition. The material to be cleaned is placed in the cleaning cylinder 2 and is located between adjacent partitions. A first bottom plate 203 is provided inside the cleaning cylinder 2. The material to be cleaned is placed inside the cleaning cylinder 2 and is located between the first bottom plate 203 and the cylinder cover 201. The material to be cleaned is isolated by the partition to limit the range of movement of the material to be cleaned and avoid damage to the material to be cleaned.

[0092] The outer peripheral surface of the connecting shell 1 is provided with a plurality of connecting hooks 4. Specifically, the connecting hook 4 includes a fixing bolt 401 connected to the connecting shell 1. The fixing bolt 401 is provided with a fixing shell 402. The fixing shell 402 is slidably connected to a movable rod 403. A sliding groove for the movable rod 403 to slide is provided in the fixed shell 402. A hook 404 is provided on the side of the movable rod 403 away from the fixing bolt 401. The hook 404 is used to hook the edge of the cleaning liquid container. A spring 405 is provided between the side of the movable rod 403 close to the fixing bolt 401 and the fixing bolt 401. The spring 405 provides tension so that the movable rod 403 and the fixed shell 402 are combined into a telescopic rod body. When needed, the movable rod 403 is pulled to enable the hook 404 to hook the edge of the cleaning liquid container, and then the hook 404 is tightened by the tension provided by the spring 405, so that the device of the present application can be installed on the cleaning liquid container. The operation is simple and easy to connect. The cleaning liquid container includes a beaker, etc.

[0093] Cleaning liquid refers to the cleaning liquid currently used for cleaning soft and brittle and hard and brittle crystal materials such as ZnSe crystals, YAG crystals, SiC crystals, and Si crystals.

[0094] Several fans 5 are provided on one side of the connecting shell 1 close to the cleaning cylinder 2. After cleaning is completed, the fans 5 are started to accelerate the drying of the cleaned materials. An air duct for air circulation is provided in the connecting shell 1. An electric heating wire is preferably provided in the air duct and is controlled and connected in an existing manner so that the airflow becomes hot air after passing through the electric heating wire, thereby accelerating the drying of the cleaned materials.

[0095] In a further embodiment, a cleaning mechanism 6 is provided in the cleaning cylinder 2. Specifically, the cleaning mechanism 6 includes a hollow shaft motor 601 provided inside the connecting shell 1. The hollow shaft motor 601 is a motor with a hollow tubular output shaft. The hollow shaft 602 of the hollow shaft motor 601 is connected to an ultrasonic generating cylinder 603; the ultrasonic generating cylinder 603 is located inside the cleaning cylinder 2, and a plurality of through holes are provided in the cylinder wall, and the through holes are used to facilitate the transmission of ultrasonic waves; a plurality of fixing rods 604 are provided between the ultrasonic generating cylinder 603 and the cleaning cylinder 2; the ultrasonic generating cylinder 603 and the cleaning cylinder 2 are fixed by the fixing rods 604, so that when the hollow shaft motor 601 is started, the ultrasonic generating cylinder 603 can be driven to rotate, thereby driving the cleaning cylinder 2 to rotate synchronously.

[0096] An ultrasonic generator 605 is disposed within the connecting housing 1, and an ultrasonic transmitter 606 is disposed within the ultrasonic generating tube 603. The ultrasonic transmitter 606 is connected to the ultrasonic generator 605. The ultrasonic generator 605 and the ultrasonic transmitter 606 utilize existing ultrasonic equipment. The ultrasonic generator 605 generates an ultrasonic signal using existing methods, and the ultrasonic transmitter 606 transmits the ultrasonic signal using existing methods to act on the material being cleaned in the cleaning fluid.

[0097] When in use, the material to be cleaned is first placed in the cleaning cylinder 2, and then the cylinder cover 201 is closed. The cleaning cylinder 2 is then placed in a container filled with cleaning liquid, and then connected and fixed by the connecting hook 4. The hollow shaft motor 601 and the ultrasonic generator 605 are then started, so that the material to be cleaned is cleaned by ultrasonic waves in combination with the cleaning liquid, and the cleaning effect is increased by rotation, preferably using a reciprocating rotation method. After cleaning is completed, the device of the present application is taken out or the cleaning liquid is poured out, and then the fan 5 and the heating wire are started for drying, and finally the cylinder cover 201 is opened to take out the cleaned material.

[0098] Example 2:

[0099] The same structure will not be repeated, such as Figure 6 、 7 As shown in Figures 8 and 9, the inner wall of the cleaning cylinder 2 is provided with a first fixing clamp 202, which is used to clamp the partition. The material to be cleaned is placed in the cleaning cylinder 2 and is located between adjacent partitions. The partition is used to isolate the material to be cleaned, limit the range of movement of the material to be cleaned, and avoid damage to the material to be cleaned.

[0100] The cleaning mechanism 6 includes a hollow shaft motor 601 disposed inside the connecting shell 1. The hollow shaft motor 601 is a motor having a hollow tubular output shaft. The hollow shaft 602 of the hollow shaft motor 601 is connected to an ultrasonic generating cylinder 603. The ultrasonic generating cylinder 603 is located inside the cleaning cylinder 2 and has a plurality of through holes on its wall for facilitating the transmission of ultrasonic waves.

[0101] An ultrasonic generator 605 is provided in the connecting shell 1, and an ultrasonic transmitter 606 is provided in the ultrasonic generating tube 603, and the ultrasonic transmitter 606 is connected to the ultrasonic generator 605; the ultrasonic generator 605 and the ultrasonic transmitter 606 use existing ultrasonic equipment, the ultrasonic generator 605 generates an ultrasonic signal in an existing manner, and the ultrasonic transmitter 606 transmits the ultrasonic wave in an existing manner to act on the material to be cleaned in the cleaning liquid.

[0102] A lifting mechanism 7 is provided between the connecting shell 1 and the cleaning cylinder 2 for lifting and lowering the cleaning cylinder 2 and the material to be cleaned placed therein. Specifically, the lifting mechanism 7 includes a fixing plate 701 fixed between the hollow shaft 602 and the ultrasonic generating cylinder 603. A fixing ring 702 is fixedly sleeved on the outer periphery of the ultrasonic generating cylinder 603.

[0103] The outer periphery of the ultrasonic generating tube 603 is movably connected with a sliding ring 704, which can slide along the rest of the ultrasonic generating tube 603. The outer periphery of the sliding ring 704 is fixed with a second bottom plate 703. The sliding ring 704 is located on the side of the fixed ring 702 close to the fixed plate 701.

[0104] A fixing seat 705 is provided on the side of the fixing plate 701 away from the ultrasonic generating tube 603. A plurality of threaded rods 706 are rotated between the fixing seat 705 and the fixing ring 702. The connecting portion between the threaded rods 706 and the fixing seat 705, the fixing plate 701 and the fixing ring 702 is a cylinder, ensuring that the threaded rods 706 can only rotate relative to the fixing seat 705, the fixing plate 701 and the fixing ring 702. The threaded rods 706 pass through the sliding ring 704 and are threadedly connected to the sliding ring 704.

[0105] A first motor 708 is provided on the side of the fixing base 705. The first motor 708 is preferably a stepping motor, which is connected and controlled in an existing manner. The output shaft of the first motor 708 is in transmission connection with the threaded rod 706.

[0106] Preferably, a worm gear 707 is provided at the end of the threaded rod 706, and the worm gear 707 is located in the fixed seat 705; the output shaft of the first motor 708 is provided with a worm 709, and the worm 709 is meshed with the worm gear 707.

[0107] The sliding ring 704 is provided with a second fixing clamp 204, and the second fixing clamp 204 is spaced apart from the threaded rod 706; the second fixing clamp 204 is used to cooperate with the first fixing clamp 202 to clamp the partition, and the cleaned material is placed in the cleaning cylinder 2 and is located between adjacent partitions; in the process of the cleaning cylinder 2 moving up and down, the partition and the first fixing clamp 202 are relatively prohibited, that is, the partition is tightly connected to the first fixing clamp 202, and the partition is slidingly connected to the second fixing clamp 204, that is, the second fixing clamp 204 is provided with a sliding, which allows the partition to slide along the slide groove while limiting the partition.

[0108] After the cleaning is completed as in Example 1, the first motor 708 is started to rotate the worm gear 707, the worm 709 and the threaded rod 706 in sequence, which can drive the sliding ring 704 to rise and fall, thereby driving the second base plate 703, the cleaning cylinder 2 and the cylinder cover 201 to move up and down. The upward movement can drive the cleaned material away from the cleaning liquid, and then the fan 5 and the heating wire are started to dry. After the drying is completed, the device of the present application is taken out, and finally the cylinder cover 201 is opened to take out the cleaned material. A through hole is provided in the center of the cylinder cover 201, which is adapted to the ultrasonic generator cylinder 603 and can slide along the through hole.

[0109] In a further embodiment, the second bottom plate 703 is movably connected to the cleaning cylinder 2; a plurality of movable grooves 732 are provided on the outer periphery of the second bottom plate 703, a first limiting block 733 is provided in the movable groove 732, and a plug hole 734 is provided in the first limiting block 733;

[0110] The inner wall of the cleaning cylinder 2 is provided with a plurality of guide rods 731, and the guide rods 731 are provided with a plurality of second limit blocks 735. The guide rods 731 are arranged axially along the cleaning cylinder 2; the second limit block 735 is provided with a plug-in column 736, and the plug-in column 736 is located at the bottom of the second limit block 735; the plug-in column 736 is adapted to the plug-in hole 734; the second limit block 735 is located at the top of the first limit block 733; the sum of the sizes of the second limit block 735 and the first limit block 733 is not greater than the size of the movable groove 732.

[0111] When it is necessary to adjust the height of the second base plate 703 relative to the cleaning cylinder 2, move the cleaning cylinder 2 upward, drive the second limit block 735 to move upward, so that the plug-in column 736 is away from the plug-in hole 734, and then rotate the cleaning cylinder 2 to misalign the second limit block 735 and the first limit block 733, and then move the cleaning cylinder 2 up and down to adjust to a suitable height, and then rotate the cleaning cylinder 2 in the opposite direction to align the plug-in column 736 with the plug-in hole 734, and finally lower the cleaning cylinder 2 to insert the plug-in column 736 into the plug-in hole 734, so as to complete the adjustment of the height of the second base plate 703 relative to the cleaning cylinder 2. The operation is simple and can adapt to different usage requirements.

[0112] Example 3:

[0113] like Figure 1 、 2, 3, 4, 5, 10, 11 and 12 show an apparatus for using an ultrasonic-assisted cleaning device, comprising a base 801, a circular groove being provided on the top of the base 801, an inner sleeve 803 being provided in the circular groove; the inner sleeve 803 and the base 801 are both cylindrical and coaxial; a cleaning groove is formed between the inner sleeve 803 and the base 801, and a cleaning liquid is provided in the cleaning groove; a guide groove 802 is provided on the inner wall of the inner sleeve 803 and the outer periphery of the base 801; the guide groove 802 is arranged in a wave shape along the inner wall of the inner sleeve 803 and the outer periphery of the base 801, and the highest point and the lowest point of the guide groove 802 are horizontally extended; the base 801 is provided with a plurality of control The control frame is used to place the cleaning device, which refers to the ultrasonic-assisted cleaning device of this application; the control frame is used to drive the cleaning device located on the top of the base 801 to rotate and perform reciprocating lifting and lowering motions along the guide groove 802; when in use, first place the cleaning device containing the material to be cleaned on the top of the control frame, and then control the control frame to rotate with the axis of the base 801 as the axis. During the rotation, the cleaning device can move up and down. After the cleaning device moves down, it can enter the cleaning liquid and then perform the cleaning operation. After the cleaning device moves up and away from the cleaning liquid, it can be dried and replaced. The operation is simple and easy to clean. During cleaning, multiple cleaning devices can be used simultaneously to clean the material to be cleaned, which increases the cleaning efficiency.

[0114] In a further embodiment, the control frame includes an outer ring 901 rotated on the outer periphery of the base 801 and an inner ring 902 rotated on the inner wall of the inner sleeve 803; a plurality of connecting plates 903 are provided on the top of the outer ring 901 and the inner ring 902; the outer ring 901 and the inner ring 902 are both provided with a plurality of slide grooves, the slide groove of the outer ring 901 is slidably connected to the first slide rod 905, and the slide groove of the inner ring 902 is slidably connected to the second slide rod 906; the first slide rod 905 and the second slide rod 906 can slide up and down along the slide groove; a mounting frame 907 is provided between the first slide rod 905 and the second slide rod 906, and the mounting frame 907 is located in the cleaning tank; the mounting frame 907 is used to install a cleaning device; the bottom ends of the first slide rod 905 and the second slide rod 906 are both provided with guide blocks 908, and the guide blocks 908 are slidably set inside the guide groove 802. When the outer ring 901 and the inner ring 902 rotate, they drive the first slide bar 905 and the second slide bar 906 to rotate. During the rotation process, the guide block 908 slides in the guide groove 802, which drives the first slide bar 905 and the second slide bar 906 to move up and down while rotating. This can drive the mounting bracket 907 to move up and down, and ultimately drive the placed cleaning device to move up and down to meet the corresponding usage requirements. In the actual design process, it is necessary to ensure that the first slide bar 905 and the second slide bar 906 connected to the same mounting bracket 907 move up and down synchronously, and the guide groove 802 on the inner wall of the inner sleeve 803 and the outer periphery of the base 801 have the same lifting and lowering frequency. The specific lifting and lowering frequency can be determined according to actual needs, such as 6-12 times.

[0115] Furthermore, the mounting frame 907 includes several connecting blocks 971 connected to the first slide bar 905 and the second slide bar 906; the bottom of the connecting block 971 is provided with an extension block 972 located on the inner side of the cleaning tank; a mounting ring 973 is provided between the extension blocks 972 connecting the adjacent first slide bar 905 and the second slide bar 906; when in use, the cleaning device is installed on the mounting ring 973, and the connecting block 971 and the extension block 972 are used to connect and prevent the mounting ring 973 from being too high.

[0116] Inside the inner sleeve 803, a drive mechanism 904 is installed. This drive mechanism 904 includes a motor base 941. A second motor 942 is housed within the motor base 941. A rotating block 943 is attached to the output shaft of the second motor 942. A connecting rod 944 is fixedly connected between the rotating block 943 and the inner ring 902. The second motor 942 is preferably a conventional stepper motor, controlled and connected using conventional methods. During operation, starting the second motor 942 drives the rotating block 943, connecting rod 944, inner ring 902, connecting plate 903, and outer ring 901 to rotate synchronously.

[0117] Furthermore, the cleaning device includes a connecting shell 1, a cleaning cylinder 2 is provided on one side of the connecting shell 1, and a control panel 3 is provided on the other side of the connecting shell 1. The control panel 3 is preferably an existing control panel with a human-computer interaction interface, connected to an existing control chip;

[0118] A cylinder cover 201 is provided on the side of the cleaning cylinder 2 away from the connecting shell 1, and a number of through holes are provided on the wall of the cleaning cylinder 2; the interior of the cleaning cylinder 2 is used to place the material to be cleaned; the materials to be cleaned referred to in this application include but are not limited to soft and brittle, hard and brittle crystal materials such as ZnSe crystals, YAG crystals, SiC crystals, and Si crystals.

[0119] A magnet is provided on one side of the cylinder cover 201 close to the cleaning cylinder 2. When in use, the cylinder cover 201 and the cleaning cylinder 2 are connected via the magnet, which is simple to operate and convenient to connect and disassemble.

[0120] A first fixing clamp 202 is provided on the inner wall of the cleaning cylinder 2. The first fixing clamp 202 is used to clamp the partition. The material to be cleaned is placed in the cleaning cylinder 2 and is located between adjacent partitions. A first bottom plate 203 is provided inside the cleaning cylinder 2. The material to be cleaned is placed inside the cleaning cylinder 2 and is located between the first bottom plate 203 and the cylinder cover 201. The material to be cleaned is isolated by the partition to limit the range of movement of the material to be cleaned and avoid damage to the material to be cleaned.

[0121] The outer peripheral surface of the connecting shell 1 is provided with multiple connecting hooks 4. Specifically, the connecting hook 4 includes a fixing bolt 401 connected to the connecting shell 1. The fixing bolt 401 is provided with a fixing shell 402. The fixing shell 402 is slidably connected to a movable rod 403; a sliding groove for the movable rod 403 to slide is provided in the fixed shell 402, and a hook 404 is provided on the side of the movable rod 403 away from the fixing bolt 401. The hook 404 is used to hook the edge of the cleaning liquid container; a spring 405 is provided between the side of the movable rod 403 close to the fixing bolt 401 and the fixing bolt 401, and the spring 405 provides a pulling force so that the movable rod 403 and the fixed shell 402 are combined into a telescopic rod body. When needed, the movable rod 403 is pulled to enable the hook 404 to hook on the edge of the mounting ring 973, and then the hook 404 is tightened by the pulling force provided by the spring 405, so that the device of the present application can be installed on the mounting ring 973, which is simple to operate and easy to connect.

[0122] Cleaning liquid refers to the cleaning liquid currently used for cleaning soft and brittle and hard and brittle crystal materials such as ZnSe crystals, YAG crystals, SiC crystals, and Si crystals.

[0123] Several fans 5 are provided on one side of the connecting shell 1 close to the cleaning cylinder 2. After cleaning is completed, the fans 5 are started to accelerate the drying of the cleaned materials. An air duct for air circulation is provided in the connecting shell 1. An electric heating wire is preferably provided in the air duct and is controlled and connected in an existing manner so that the airflow becomes hot air after passing through the electric heating wire, thereby accelerating the drying of the cleaned materials.

[0124] In a further embodiment, a cleaning mechanism 6 is provided in the cleaning cylinder 2. Specifically, the cleaning mechanism 6 includes a hollow shaft motor 601 provided inside the connecting shell 1. The hollow shaft motor 601 is a motor with a hollow tubular output shaft. The hollow shaft 602 of the hollow shaft motor 601 is connected to an ultrasonic generating cylinder 603; the ultrasonic generating cylinder 603 is located inside the cleaning cylinder 2, and a plurality of through holes are provided in the cylinder wall, and the through holes are used to facilitate the transmission of ultrasonic waves; a plurality of fixing rods 604 are provided between the ultrasonic generating cylinder 603 and the cleaning cylinder 2; the ultrasonic generating cylinder 603 and the cleaning cylinder 2 are fixed by the fixing rods 604, so that when the hollow shaft motor 601 is started, the ultrasonic generating cylinder 603 can be driven to rotate, thereby driving the cleaning cylinder 2 to rotate synchronously.

[0125] An ultrasonic generator 605 is disposed within the connecting housing 1, and an ultrasonic transmitter 606 is disposed within the ultrasonic generating tube 603. The ultrasonic transmitter 606 is connected to the ultrasonic generator 605. The ultrasonic generator 605 and the ultrasonic transmitter 606 utilize existing ultrasonic equipment. The ultrasonic generator 605 generates an ultrasonic signal using existing methods, and the ultrasonic transmitter 606 transmits the ultrasonic signal using existing methods to act on the material being cleaned in the cleaning fluid.

[0126] In use, the material to be cleaned is placed in the cleaning cylinder 2, then the cylinder cover 201 is closed, then the cleaning cylinder 2 is placed on the mounting ring 973, then connected and fixed by the connecting hook 4, then the cleaning cylinder 2 moves down with the mounting ring 973, moves into the cleaning liquid, then the hollow shaft motor 601 and the ultrasonic generator 605 are started, so that the material to be cleaned is cleaned by the ultrasonic wave cooperating with the cleaning liquid, and the cleaning effect is increased by rotating, preferably in a reciprocating rotating manner. After cleaning is completed, the cleaning cylinder 2 moves to a high position away from the cleaning liquid, then the fan 5 and the electric heating wire are started for drying, and finally the cleaning device is removed, the cylinder cover 201 is opened, and the cleaned material is taken out.

[0127] Embodiment 4:

[0128] A method for using an ultrasonic auxiliary cleaning device, comprising the following steps:

[0129] S1, placing the material to be cleaned in the cleaning cylinder 2;

[0130] S2, pouring cleaning liquid into the container, then placing the cleaning device on the top of the container, and making the cleaning cylinder 2 in the container;

[0131] S3, the cleaning mechanism 6 in the cleaning device works, drives the cleaning liquid to reciprocate and rotate, and assists cleaning through ultrasonic wave;

[0132] S4, after cleaning is completed, the fan works to generate wind, and the wind is heated by the electric heating wire to dry the material;

[0133] S5, after drying is completed, the container stops rotating, and the cleaned material is taken out.

[0134] The application completes cleaning of the material to be cleaned by ultrasonic wave assisted cleaning liquid in the container, and can directly dry after cleaning is completed, without the need to complete cleaning and drying in different devices, so as to not only ensure cleaning efficiency and convenience, but also avoid secondary pollution.

[0135] The above embodiments are only preferred technical solutions of the application, and should not be regarded as limitations of the application. The protection scope of the application should be the technical solutions recited in the claims, including equivalent replacement solutions of the technical features recited in the claims. That is, equivalent replacement improvements within this range are also within the protection scope of the application.

Claims

1. An ultrasonic-assisted cleaning device, characterized in that: It comprises a connecting shell (1), a cleaning cylinder (2) is provided on one side of the connecting shell (1), and a control panel (3) is provided on the other side of the connecting shell (1); A cylinder cover (201) is provided on the side of the cleaning cylinder (2) away from the connection shell (1), and a plurality of through holes are provided on the cylinder wall of the cleaning cylinder (2); the interior of the cleaning cylinder (2) is used to place the material to be cleaned; The outer peripheral surface of the connecting shell (1) is provided with a plurality of connecting hooks (4); A plurality of fans (5) are provided on one side of the connecting shell (1) close to the cleaning cylinder (2); A cleaning mechanism (6) is provided in the cleaning cylinder (2); A magnet is provided on one side of the cylinder cover (201) close to the cleaning cylinder (2); A first fixing clamp (202) is provided on the inner wall of the cleaning cylinder (2), and the first fixing clamp (202) is used to clamp the partitions. The material to be cleaned is placed in the cleaning cylinder (2) and is located between adjacent partitions. A first bottom plate (203) is provided inside the cleaning cylinder (2); The material to be cleaned is arranged inside the cleaning cylinder (2) and between the first bottom plate (203) and the cylinder cover (201); The connecting hook (4) includes a fixing bolt (401) connected to the connecting shell (1), the fixing bolt (401) is provided with a fixing shell (402), and the fixing shell (402) is slidably connected to a movable rod (403); A draw hook (404) is provided on one side of the movable rod (403) away from the fixing bolt (401); A spring (405) is provided between the side of the movable rod (403) close to the fixing bolt (401) and the fixing bolt (401); The cleaning mechanism (6) comprises a hollow shaft motor (601) disposed inside the connecting shell (1), wherein the hollow shaft (602) of the hollow shaft motor (601) is connected to an ultrasonic generating cylinder (603); The ultrasonic generating cylinder (603) is located inside the cleaning cylinder (2), and a plurality of through holes are provided on the cylinder wall; A plurality of fixing rods (604) are provided between the ultrasonic generating cylinder (603) and the cleaning cylinder (2); An ultrasonic generator (605) is provided in the connecting shell (1), an ultrasonic transmitter (606) is provided in the ultrasonic generating tube (603), and the ultrasonic transmitter (606) is connected to the ultrasonic generator (605); A first fixing clamp (202) is provided on the inner wall of the cleaning cylinder (2), and the first fixing clamp (202) is used to clamp the partitions. The material to be cleaned is placed in the cleaning cylinder (2) and is located between adjacent partitions. The cleaning mechanism (6) comprises a hollow shaft motor (601) disposed inside the connecting shell (1), wherein the hollow shaft (602) of the hollow shaft motor (601) is connected to an ultrasonic generating cylinder (603); The ultrasonic generating cylinder (603) is located inside the cleaning cylinder (2), and a plurality of through holes are provided on the cylinder wall; An ultrasonic generator (605) is provided in the connecting shell (1), an ultrasonic transmitter (606) is provided in the ultrasonic generating tube (603), and the ultrasonic transmitter (606) is connected to the ultrasonic generator (605); A lifting mechanism (7) is provided between the connecting shell (1) and the cleaning cylinder (2) for lifting and lowering the cleaning cylinder (2).

2. The ultrasonic-assisted cleaning device according to claim 1, wherein: The lifting mechanism (7) includes a fixing plate (701) fixed between the hollow shaft (602) and the ultrasonic generating tube (603); A fixing ring (702) is fixedly sleeved on the outer periphery of the ultrasonic generating tube (603); The outer periphery of the ultrasonic generating tube (603) is movably sleeved with a sliding ring (704), and the outer periphery of the sliding ring (704) is fixed with a second bottom plate (703); the sliding ring (704) is located on a side of the fixed ring (702) close to the fixed plate (701); A fixing seat (705) is provided on a side of the fixing plate (701) away from the ultrasonic generating tube (603), and a plurality of threaded rods (706) are provided between the fixing seat (705) and the fixing ring (702); the connection portion between the threaded rod (706), the fixing seat (705), the fixing plate (701) and the fixing ring (702) is a cylinder, and the threaded rod (706) passes through the sliding ring (704) and is threadedly connected to the sliding ring (704); A first motor (708) is provided on the side of the fixing seat (705), and an output shaft of the first motor (708) is in transmission connection with the threaded rod (706); The sliding ring (704) is provided with a second fixing clamp (204), and the second fixing clamp (204) and the threaded rod (706) are spaced apart. The second fixing clamp (204) is used to cooperate with the first fixing clamp (202) to clamp the partition. The material to be cleaned is placed in the cleaning cylinder (2) and is located between adjacent partitions. A worm gear (707) is provided at the end of the threaded rod (706), and the worm gear (707) is located in the fixed seat (705); The output shaft of the first motor (708) is provided with a worm (709), and the worm (709) is meshed with the worm wheel (707).

3. The ultrasonic-assisted cleaning device according to claim 2, wherein: The second bottom plate (703) is movably connected to the cleaning cylinder (2); The outer periphery of the second bottom plate (703) is provided with a plurality of movable grooves (732), a first limiting block (733) is provided in the movable groove (732), and a plug hole (734) is provided in the first limiting block (733); The inner wall of the cleaning cylinder (2) is provided with a plurality of guide rods (731), the guide rods (731) are provided with a plurality of second limiting blocks (735), and the guide rods (731) are arranged along the axial direction of the cleaning cylinder (2); the second limiting blocks (735) are provided with plug-in columns (736), and the plug-in columns (736) are adapted to the plug-in holes (734); The sum of the dimensions of the second limiting block (735) and the first limiting block (733) is no greater than the dimension of the movable slot (732).

4. A device for using the ultrasonic-assisted cleaning device according to claim 1, characterized in that: It comprises a base (801), a circular groove is provided on the top of the base (801), and an inner sleeve (803) is provided in the circular groove; The inner sleeve (803) and the base (801) are both cylindrical and coaxial; A cleaning tank is formed between the inner sleeve (803) and the base (801), and a cleaning liquid is provided in the cleaning tank; The inner wall of the inner sleeve (803) and the outer periphery of the base (801) are both provided with guide grooves (802); The base (801) is provided with a plurality of control frames, and the control frames are used to connect with the connecting hooks (4); The guide groove (802) is arranged in a wave shape along the inner wall of the inner sleeve (803) and the outer periphery of the base (801), and the highest point and the lowest point of the guide groove (802) are arranged horizontally; The control frame is used to drive the ultrasonic-assisted cleaning device located on the top of the base (801) to rotate and perform reciprocating lifting motion along the guide groove (802); When lowered, the cleaning cylinder (2) enters the cleaning tank for cleaning, and when raised, it moves away from the cleaning tank for disassembling and drying the cleaned material in the cleaning cylinder (2).

5. The device for using the ultrasonic-assisted cleaning device according to claim 4, characterized in that: The control frame includes an outer ring (901) rotated on the outer periphery of the base (801) and an inner ring (902) rotated on the inner wall of the inner sleeve (803); A plurality of connecting plates (903) are provided on the top of the outer ring (901) and the inner ring (902); The outer ring (901) and the inner ring (902) are both provided with a plurality of sliding grooves. The sliding grooves of the outer ring (901) are slidably connected to a first sliding rod (905), and the sliding grooves of the inner ring (902) are slidably connected to a second sliding rod (906). A mounting frame (907) is provided between the first slide bar (905) and the second slide bar (906), and the mounting frame (907) is located in the cleaning tank; Wherein, the mounting frame (907) includes a plurality of connecting blocks (971) connected to the first sliding rod (905) and the second sliding rod (906); The bottom of the connecting block (971) is provided with an extension block (972) located inside the cleaning tank; A mounting ring (973) is provided between the extension block (972) connecting the adjacent first slide bar (905) and the second slide bar (906), and the mounting ring (973) is used to support the connecting hook (4) of the ultrasonic assisted cleaning device; The bottom ends of the first slide bar (905) and the second slide bar (906) are both provided with guide blocks (908), and the guide blocks (908) are slidably arranged inside the guide groove (802); A driving mechanism (904) is provided on the inner side of the inner sleeve (803), and the driving mechanism (904) includes a motor seat (941); A second motor (942) is provided inside the motor seat (941), an output shaft of the second motor (942) is provided with a rotating block (943), and a connecting rod (944) is fixedly connected between the rotating block (943) and the inner ring (902).

6. A method for using an ultrasonic-assisted cleaning device, characterized by: Using the ultrasonic-assisted cleaning device according to any one of claims 1 to 3 comprises the following steps: S1. Place the material to be cleaned inside the cleaning cylinder (2); S2, pouring cleaning liquid into the container, then placing the cleaning device on the top of the container, and making the cleaning cylinder (2) located in the container; S3, the cleaning mechanism (6) in the cleaning device works, driving the cleaning liquid to rotate back and forth, and assisting cleaning through ultrasonic waves; S4. After cleaning is completed, the fan generates wind, which is heated by the heating wire to dry the material; S5. After drying is completed, the container stops rotating and the cleaned material is taken out.

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