ATE-based millimeter wave chip amplitude and phase measurement device and method

Abstract

The invention relates to the technical field of semiconductor automatic testing, and discloses an ATE-based millimeter wave chip amplitude and phase measuring device and method.The device comprises an ATE computer, an ATE channel board card, an ATE measuring instrument and a load board, the ATE channel board card and the ATE measuring instrument are connected with the ATE computer, and the load board is characterized in that the ATE measuring instrument comprises an ATE signal source and an ATE signal analyzer; a millimeter wave chip to be measured and a radio frequency switch are arranged on the load board, a control port of the millimeter wave chip to be measured is connected with the ATE channel board card, a plurality of radio frequency ports of the radio frequency switch are respectively connected with a plurality of signal ports of the millimeter wave chip to be measured, and a comprehensive radio frequency port of the radio frequency switch is connected with the ATE measuring instrument. According to the method, through cooperative work of an ATE measuring instrument and a channel board card, rapid switching of gears and ports of the millimeter wave chip is realized by using accurate time sequence control, and a unified acquisition and segmented processing mode is adopted, so that the measuring efficiency is greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor automatic testing, and in particular to an ATE-based millimeter-wave chip amplitude and phase measurement device and method. Background Art

[0002] Millimeter-wave chips are currently widely used in satellite terminals, aerospace, emergency communications, and other fields due to their high data transmission rates, low-latency communications, and strong anti-interference capabilities. However, their high frequency band, large bandwidth, multiple channels, and numerous test modes pose significant challenges to mass production testing.

[0003] Existing testing methods for millimeter-wave chips with large bandwidth, high frequency bands, and multiple ranges typically use a vector network analyzer (VNA) to measure gain and phase values ​​by traversing the range and frequency of the chip. Measuring gain and phase within a range using a network-based measurement system requires first configuring the range, then measuring the gain and phase, and finally reading the gain and phase results. This technique frequently triggers network-based measurements, and reading the measurement results consumes a significant amount of time, resulting in inefficient measurements. This is particularly costly and inefficient in large-scale mass production. Summary of the Invention

[0004] The object of the present invention is to provide an ATE-based millimeter-wave chip amplitude and phase measurement device and method to solve the problem of low efficiency of millimeter-wave chip amplitude and phase measurement in the prior art.

[0005] To solve the above technical problems, according to a first aspect of the present invention, there is provided an ATE-based millimeter-wave chip amplitude and phase measurement device, comprising an ATE computer, an ATE channel board and an ATE test and measurement instrument connected to the ATE computer, and a load board; The ATE test and measurement instrument includes an ATE signal source and an ATE signal analyzer. The load board is provided with a millimeter-wave chip to be tested and a radio frequency switch. The control port of the millimeter-wave chip to be tested is connected to the ATE channel board. The multiple radio frequency ports of the radio frequency switch are respectively connected to the multiple signal ports of the millimeter-wave chip to be tested. The integrated radio frequency port of the radio frequency switch is connected to the ATE test and measurement instrument. Among them, the ATE test and measurement instrument is connected to different signal ports of the millimeter wave chip to be tested through the integrated RF port of the RF switch, the ATE signal source sends an excitation signal to the millimeter wave chip to be tested through the RF switch, and the ATE signal analyzer receives the response signal from the millimeter wave chip through the RF switch, which is used to measure the amplitude and phase response of the millimeter wave chip to be tested at different gears.

[0006] Furthermore, the ATE signal source and the ATE signal analyzer share the same local oscillator source to ensure consistency of phase reference during the measurement process.

[0007] Furthermore, the ATE channel board controls the millimeter wave chip to be tested to perform gear switching and the radio frequency switch to perform port switching through digital control signals.

[0008] According to a second aspect of the present invention, a millimeter-wave chip amplitude and phase measurement method based on ATE is provided. Based on the above-mentioned millimeter-wave chip amplitude and phase measurement device, the millimeter-wave chip amplitude and phase measurement method includes: S1, test measurement preparation stage, the ATE computer configures the test measurement parameters and generates a test measurement sequence pattern file, the pattern file contains the timing for triggering the signal source, controlling the gear switching of the millimeter wave chip to be tested, and controlling the switching of the RF switch port; S2, test and measurement execution phase, the ATE channel board controls the gear switching of the millimeter wave chip under test and the switching of the RF switch port according to the timing in the pattern file, and the ATE test and measurement instrument sends an excitation signal to the millimeter wave chip under test and receives a response signal, which is then transmitted to the ATE computer; S3, data processing stage, the ATE computer segments the received response signal and calculates the amplitude and phase values ​​of the millimeter wave chip under test at each gear and each signal port combination based on the IQ data.

[0009] Furthermore, the test measurement preparation stage includes: S11, the ATE computer configures the test measurement parameters of the millimeter wave chip to be tested, including the operating frequency range, the number of gears, and the number of signal ports; S12, the ATE computer configures ATE test and measurement instrument parameters, including the output power and frequency of the signal source, and the sampling rate and number of sampling points of the signal analyzer; S13, the ATE computer configures timing parameters, including a first vector for triggering a signal source, an SPI interface vector for configuring a chip gear position, a stabilization time after gear position configuration, and a data acquisition time; S14. The ATE computer generates a test measurement sequence pattern file, where the pattern file contains a vector sequence arranged in a predefined time sequence.

[0010] Furthermore, the test measurement execution phase includes: S21, the ATE channel board triggers the signal source in the ATE test and measurement instrument according to the first vector to generate an excitation signal and the signal analyzer to collect data; S22, the ATE channel board sends gear configuration data to the millimeter wave chip to be tested according to the SPI interface vector, so that the millimeter wave chip to be tested switches to different gears in sequence according to a preset order; S23, the ATE channel board controls the RF switch so that the integrated RF port of the RF switch is connected to different signal ports of the millimeter wave chip to be tested in sequence according to a preset order; S24, the signal source in the ATE test and measurement instrument sends an excitation signal of a preset frequency to the millimeter wave chip to be tested through the radio frequency switch; S25. After the gear configuration of the millimeter-wave chip to be tested is completed, the ATE test and measurement instrument waits for a preset stabilization time, and the signal analyzer collects response signals and converts the collected response signals into IQ data and sends them to the ATE computer.

[0011] Furthermore, the data processing stage includes: S31, the ATE computer calculates the number of sampling points for each gear and port combination based on the ratio of sampling time to sampling rate, and indexes the IQ data corresponding to each segment in the total sampled data; S32, the ATE computer calculates the gain value and phase value for each gear and signal port combination according to the indexed IQ data; S33. The ATE computer averages the gain values ​​and phase values ​​of multiple sampling points under the same gear position and signal port combination to obtain final gain and phase measurement results.

[0012] Furthermore, the calculation formula of the gain is , the phase calculation formula is , where p sig is the signal source excitation power; I is the in-phase component, which represents the real part of the signal, corresponding to the component that is in phase with the reference signal; Q is the orthogonal component, which represents the imaginary part of the signal, corresponding to the component that is 90 degrees out of phase with the reference signal.

[0013] Compared with the prior art, the present invention has at least the following beneficial effects: The present invention proposes a method for realizing rapid switching of millimeter-wave chip gears and ports by cooperating with an ATE measuring instrument and a channel board using precise timing control, and adopts a unified acquisition and segmented processing method, thereby greatly improving measurement efficiency.

[0014] Furthermore, the ATE signal source and ATE signal analyzer in the present invention share the same local oscillator source, so that the phase reference remains consistent during the measurement process. At the same time, through precise timing control and data segmentation processing, the amplitude and phase characteristics of the millimeter wave chip in different gears and different port combinations can be accurately obtained, avoiding repeated instrument configuration and data reading processes, reducing unnecessary waiting time, and improving measurement efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 Schematic diagram of the structure of a millimeter-wave chip amplitude and phase measurement device based on ATE in one embodiment of the present invention; Figure 2 This is a flow chart of a method for measuring amplitude and phase of a millimeter-wave chip in one embodiment of the present invention; Figure 3 Schematic diagram of a pattern file in a millimeter-wave chip amplitude and phase measurement method according to an embodiment of the present invention; Figure 4 Schematic diagram of data collection of a millimeter-wave chip amplitude and phase measurement method in one embodiment of the present invention. DETAILED DESCRIPTION

[0016] Based on the teachings of this specification, those skilled in the art may form new technical solutions by cross-combining different implementation methods without generating technical contradictions. Such variations should be deemed to fall within the scope of protection of this patent.

[0017] The following, with reference to schematic diagrams, provides a more detailed description of the ATE-based millimeter-wave chip amplitude and phase measurement device and method of the present invention. These schematic diagrams illustrate preferred embodiments of the present invention. It should be understood that those skilled in the art may modify the present invention described herein while still achieving its advantageous effects. Therefore, the following description should be understood as a general guide for those skilled in the art and not as a limitation of the present invention.

[0018] The following paragraphs describe the present invention in more detail by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are greatly simplified and not to exact scale, and are provided solely for the purpose of assisting in the description of the embodiments of the present invention.

[0019] Example 1 like Figure 1 As shown, this embodiment 1 proposes an ATE-based millimeter-wave chip amplitude and phase measurement device, including an ATE computer, an ATE channel board and an ATE measuring instrument connected to the ATE computer, and a load board.

[0020] Specifically, the ATE measuring instrument includes an ATE signal source and an ATE signal analyzer. The load board is provided with a millimeter-wave chip to be tested and a radio frequency switch. The control port of the millimeter-wave chip to be tested is connected to the ATE channel board. The multiple radio frequency ports of the radio frequency switch are respectively connected to the multiple signal ports of the millimeter-wave chip to be tested. The integrated radio frequency port of the radio frequency switch is connected to the ATE measuring instrument.

[0021] The ATE measuring instrument is connected to different signal ports of the millimeter-wave chip to be tested through the integrated RF port of the RF switch, the ATE signal source sends an excitation signal to the millimeter-wave chip to be tested through the RF switch, and the ATE signal analyzer receives a response signal from the millimeter-wave chip through the RF switch, so as to measure the amplitude and phase response of the millimeter-wave chip to be tested at different gears.

[0022] The ATE computer serves as the control center and is responsible for parameter configuration, sequence generation and data processing of the entire measurement process. The ATE channel board is used to generate precise digital control signals to control the gear switching of the chip to be tested and the port switching of the RF switch, thereby achieving fast and precise gear switching and improving test efficiency. The ATE signal source generates a radio frequency excitation signal and provides it to the millimeter wave chip to be tested. The ATE signal analyzer receives the response signal output by the millimeter wave chip, so that the amplitude and phase of the signal can be measured. The load board is used to place the chip to be tested and the RF switch, providing a physical interface platform for measurement. The RF switch can realize the switching of multi-port signals, so that the ATE measuring instrument can be connected to multiple signal ports of the millimeter wave chip through an integrated RF port.

[0023] In this embodiment, the ATE signal source and the ATE signal analyzer share the same local oscillator (LO) to ensure consistent phase references during measurement. This shared LO design is particularly important for amplitude and phase measurements, as phase measurements require a stable reference. If the ATE signal source and the ATE signal analyzer use different LOs, inaccurate measurement results may occur due to phase differences and drift between the two LOs. By sharing the same LO, this systematic error can be eliminated, significantly improving the accuracy and stability of phase measurements.

[0024] In this embodiment, the ATE channel board uses digital control signals to control the gear switching of the millimeter-wave chip under test and the port switching of the RF switch. The ATE channel board can generate high-precision digital timing signals. These signals control the millimeter-wave chip under test to switch to different operating gears through SPI or other digital interfaces, and simultaneously control the RF switch to switch between different signal ports. This precise control method using digital signals enables fast and synchronous gear and port switching, providing a foundation for efficient amplitude and phase scanning.

[0025] Example 2 like Figure 2 As shown, this embodiment 2 provides a millimeter wave chip amplitude and phase measurement method based on ATE based on the millimeter wave chip amplitude and phase measurement device described in embodiment 1. The millimeter wave chip amplitude and phase measurement method includes the following steps: S1. During the measurement preparation phase, the ATE computer configures measurement parameters and generates a measurement sequence pattern file. The pattern file contains the timing for triggering the signal source, controlling the gear switching of the millimeter-wave chip to be tested, and controlling the switching of the RF switch port.

[0026] S2, measurement execution phase, the ATE channel board controls the gear switching of the millimeter-wave chip under test and the switching of the RF switch port according to the timing in the pattern file, and the ATE measuring instrument sends an excitation signal to the millimeter-wave chip under test and receives a response signal, which is then transmitted to the ATE computer.

[0027] S3, data processing stage, the ATE computer segments the received response signal and calculates the amplitude and phase values ​​of the millimeter wave chip under test at each gear and each signal port combination based on the IQ data.

[0028] This millimeter-wave chip amplitude and phase measurement method leverages the timing control and signal processing capabilities of ATE to achieve efficient measurement of millimeter-wave chips. Traditional measurement methods typically require individual configuration, measurement, and data reading for each measurement point. This method, however, pre-generates a pattern file containing the complete measurement sequence, allowing for simultaneous measurement of multiple gear and port combinations, significantly improving measurement efficiency.

[0029] In this embodiment, the measurement preparation stage includes: S11. The ATE computer configures measurement parameters of the millimeter wave chip to be tested, including operating frequency range, number of gears, and number of signal ports.

[0030] S12. The ATE computer configures ATE measuring instrument parameters, including the output power and frequency of the signal source, and the sampling rate and number of sampling points of the signal analyzer.

[0031] S13, the ATE computer configures timing parameters, including a first vector vector0 for triggering a signal source, an SPI interface vector for configuring chip gear positions, a stabilization time after gear position configuration, and a data acquisition time.

[0032] S14. The ATE computer generates a measurement sequence pattern file, where the pattern file contains a vector sequence arranged in a predefined time sequence.

[0033] The measurement preparation phase is the foundation of the entire measurement process. By properly configuring measurement parameters and timing parameters, the accuracy and efficiency of subsequent measurements can be improved. The operating frequency range is usually determined by the specifications of the chip to be tested. For example, for a millimeter-wave chip, it may be 24-30GHz or 57-64GHz. The number of gears and the number of signal ports depend on the design of the chip to be tested. A typical millimeter-wave beamforming chip may have dozens of gears and multiple RF ports. The output power of the signal source needs to be set according to the input power range of the chip to be tested, usually between -20dBm and 0dBm. The sampling rate and number of sampling points affect the resolution and noise performance of the measurement. For the measurement of millimeter-wave chips, a sampling rate of more than 10MHz and thousands of sampling points are usually used. The first vector vector0 is used to trigger the start of the entire measurement sequence, and the SPI interface vector is used to control the gear switching of the chip. The stabilization time after the gear configuration allows the chip output signal to reach a stable state before data acquisition, avoiding measurement errors caused by unstable signals. Data acquisition time determines the number of data points and sampling accuracy for each measurement, avoiding excessively long or short acquisition times and improving overall test speed. The pattern file is used to precisely control the triggering of the signal source, the switching of chip gears, and the timing of data acquisition during the test, thereby achieving efficient and accurate automated testing. Compared to traditional testing methods, using pattern files allows for the continuous measurement of multiple test points in a single test, eliminating the need for separate configuration and triggering for each test point, significantly improving test efficiency.

[0034] In this embodiment, the measurement execution phase includes: S21 . The ATE channel board triggers a signal source in the ATE measuring instrument to generate an excitation signal and a signal analyzer to collect data according to a first vector vector0 .

[0035] S22. The ATE channel board sends gear configuration data to the millimeter-wave chip to be tested according to the SPI interface vector, so that the millimeter-wave chip to be tested switches to different gears in sequence according to a preset order.

[0036] S23. The ATE channel board controls the RF switch so that the integrated RF port of the RF switch is connected to different signal ports of the millimeter wave chip to be tested in sequence according to a preset order.

[0037] S24. The signal source in the ATE measuring instrument sends an excitation signal of a preset frequency to the millimeter wave chip to be tested through the radio frequency switch.

[0038] S25. After the gear configuration of the millimeter-wave chip to be tested is completed, the ATE measuring instrument waits for a preset stabilization time, the signal analyzer collects response signals, and converts the collected response signals into IQ data and sends them to the ATE computer.

[0039] During the measurement execution phase, the ATE channel board controls chip gear switching and RF switch port switching according to the precise timing specified in the pattern file. This allows for continuous testing of multiple gear and port combinations with a single setup, significantly reducing reconfiguration time. A continuous test mode replaces the traditional point-by-point configuration and measurement method, further reducing test time. Furthermore, by adjusting pattern file parameters, the system can adapt to various chips and test conditions.

[0040] In this embodiment, the data processing stage includes: S31. The ATE computer calculates the number of sampling points for each gear and port combination according to the ratio of sampling time to sampling rate, and indexes the IQ data corresponding to each segment in the total sampled data.

[0041] S32. The ATE computer calculates the gain value and phase value for each gear position and signal port combination according to the indexed IQ data.

[0042] S33. The ATE computer averages the gain values ​​and phase values ​​of multiple sampling points under the same gear position and signal port combination to obtain final gain and phase measurement results.

[0043] The data processing stage is to segment the continuously collected IQ data according to different gear and port combinations, and then calculate the gain and phase value of each segment based on the IQ data.

[0044] Furthermore, the calculation formula of the gain is , the phase calculation formula is , where p sig is the signal source excitation power; I is the in-phase component, which represents the real part of the signal, corresponding to the component that is in phase with the reference signal; Q is the orthogonal component, which represents the imaginary part of the signal, corresponding to the component that is 90 degrees out of phase with the reference signal.

[0045] Example 3 This embodiment is a specific application of Embodiment 1 and Embodiment 2, and is used to measure a millimeter-wave beamforming chip. The millimeter-wave beamforming chip has 12 ports and 32 ranges, each with four frequency points.

[0046] The test method of Example 2 is adopted, and the specific implementation steps are as follows: First, configure the test parameters on the ATE computer, including a frequency range of 4 frequency points, 32 gear segments, and 12 signal ports; set the sampling rate of the signal analyzer to 10 MHz, the number of sampling points to 5000 points, and configure the ATE test instrument parameters; set the trigger signal source vector, SPI interface vector, and 500 μs stabilization wait time to generate a test sequence pattern file, such as Figure 3 As shown. Figure 3 In the figure, the part marked 1 is where the ATE channel board triggers the signal source in the ATE measuring instrument to generate an excitation signal and the signal analyzer to collect data according to the first vector vector0; the part marked 2 is where the ATE channel board sends the gear configuration data to the millimeter wave chip to be tested according to the SPI interface vector; and the part marked 3 is where the ATE computer starts to record the measurement time of each segment.

[0047] exist Figure 4 In the figure, a represents the measurement time of each segment; t0 represents the moment when the trigger signal starts; t1 represents the time offset from the trigger signal or the start point of the segment to the actual start of the measurement, which is used to wait for the chip to stabilize; and t2 represents the actual measurement time length in each segment.

[0048] like Figure 4 As shown, the ATE channel board triggers the signal source and signal analyzer to start working according to the first vector vector0 in the pattern file, that is, it starts working after t0. Then, according to the SPI interface vector ( Figure 3 The 24 vectors (including address and data instructions) shown in the figure are used to send gear configuration data to the chip under test, causing the chip to switch to different gears in a preset sequence. Simultaneously, the RF switch is controlled to sequentially connect the integrated RF port to the chip's 12 signal ports. A signal source transmits an excitation signal at a preset frequency to the chip through the RF switch. After the chip gear configuration is complete, a 500μs stabilization time (i.e., t1) is allowed before testing begins. The ATE signal analyzer then collects the response signal and transmits it to the ATE computer.

[0049] The ATE computer divides the continuously collected records into multiple measurement segments, each segment corresponds to a specific gear and port combination, and calculates the IQ data corresponding to each segment to obtain the gain value and phase value under each gear and port combination, such as Figure 4 As shown in Figure 1, the gain and phase data of multiple segments are recorded on the time axis from t0 to t3. Finally, the average of multiple sampling points under the same combination is taken to obtain the final measurement result.

[0050] In this embodiment, the time distribution of the test process is: Gear switching configuration time: 24×50μs=1.2ms (corresponding to Figure 3 24 instruction vectors in the test), the waiting time for amplitude and phase stabilization is 500μs, i.e. t1; the actual measurement time is: 5000 / 10MHz=500μs, i.e. t2; a total of 2.2ms is required for each test point, and the total test time for 32 gear segments, 4 frequency points and 12 ports is 32×4×12×2.2ms=3.4s.

[0051] Traditional network analyzer testing methods require a separate configuration, measurement, and data readout cycle for each test point. Under the same test conditions, each configuration takes 1.2ms, each point measurement takes 1ms, and each readout takes 1ms, for a total measurement time of 32 × 4 × 12 × 3.2ms = 4.915s.

[0052] In comparison, the method proposed in this application saves 1.5 seconds compared to the traditional method, which will significantly reduce costs and increase production capacity in large-scale production testing.

[0053] In summary, the ATE-based millimeter-wave chip amplitude and phase measurement device and method provided by the present invention reduces the time for repeated configuration and data transmission through precise timing control and one-time data acquisition, and significantly improves the efficiency of millimeter-wave chip amplitude and phase measurement.

[0054] Furthermore, by designing the ATE signal source and signal analyzer to share the same local oscillator, the phase reference remains consistent during the measurement process, improving the accuracy of phase measurement. Furthermore, by setting a reasonable stabilization time after the chip gear is switched, measurements are performed under stable chip conditions, improving the reliability of the measurement results. Furthermore, the present invention performs averaging on the collected data, effectively reducing the impact of random noise and further improving measurement accuracy.

[0055] Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if such changes and modifications fall within the scope of the claims and their equivalents, the present invention is intended to include such changes and modifications.

Claims

1. A millimeter wave chip amplitude and phase measurement device based on ATE, characterized in that: It includes an ATE computer, an ATE channel board and an ATE measuring instrument connected to the ATE computer, and a load board; The ATE measuring instrument includes an ATE signal source and an ATE signal analyzer. The load board is provided with a millimeter-wave chip to be tested and a radio frequency switch. The control port of the millimeter-wave chip to be tested is connected to the ATE channel board. The multiple radio frequency ports of the radio frequency switch are respectively connected to the multiple signal ports of the millimeter-wave chip to be tested. The integrated radio frequency port of the radio frequency switch is connected to the ATE measuring instrument. The ATE measuring instrument is connected to different signal ports of the millimeter-wave chip to be tested through the integrated RF port of the RF switch, the ATE signal source sends an excitation signal to the millimeter-wave chip to be tested through the RF switch, and the ATE signal analyzer receives a response signal from the millimeter-wave chip through the RF switch, so as to measure the amplitude and phase response of the millimeter-wave chip to be tested at different gears.

2. The millimeter-wave chip amplitude and phase measurement device based on ATE according to claim 1, characterized in that: The ATE signal source and the ATE signal analyzer share the same local oscillator source to ensure the consistency of the phase reference during the measurement process.

3. The millimeter wave chip amplitude and phase measurement device based on ATE according to claim 1, characterized in that: The ATE channel board controls the millimeter wave chip to be tested to perform gear switching and the radio frequency switch to perform port switching through a digital control signal.

4. A millimeter wave chip amplitude and phase measurement method based on ATE, based on the millimeter wave chip amplitude and phase measurement device according to any one of claims 1 to 3, characterized in that: The millimeter wave chip amplitude and phase measurement method includes: S1, measurement preparation stage, the ATE computer configures the measurement parameters and generates a measurement sequence pattern file, which contains the timing for triggering the signal source, controlling the gear switching of the millimeter wave chip to be tested, and controlling the switching of the RF switch port; S2, during the measurement execution phase, the ATE channel board controls the gear switching of the millimeter-wave chip under test and the switching of the RF switch port according to the timing in the pattern file. The ATE measuring instrument sends an excitation signal to the millimeter-wave chip under test and receives a response signal, which is then transmitted to the ATE computer. S3, data processing stage, the ATE computer segments the received response signal and calculates the amplitude and phase values ​​of the millimeter wave chip under test at each gear and each signal port combination based on the IQ data.

5. The millimeter wave chip amplitude and phase measurement method based on ATE according to claim 4, characterized in that: The measurement preparation stage includes: S11, the ATE computer configures the measurement parameters of the millimeter wave chip to be tested, including the operating frequency range, the number of gears, and the number of signal ports; S12, the ATE computer configures ATE measuring instrument parameters, including the output power and frequency of the signal source, and the sampling rate and number of sampling points of the signal analyzer; S13, the ATE computer configures timing parameters, including a first vector for triggering a signal source, an SPI interface vector for configuring a chip gear position, a stabilization time after gear position configuration, and a data acquisition time; S14. The ATE computer generates a measurement sequence pattern file, where the pattern file contains a vector sequence arranged in a predefined time sequence.

6. The millimeter wave chip amplitude and phase measurement method based on ATE according to claim 4, characterized in that: The measurement execution phase includes: S21, the ATE channel board triggers the signal source in the ATE measuring instrument according to the first vector to generate an excitation signal and the signal analyzer to collect data; S22, the ATE channel board sends gear configuration data to the millimeter wave chip to be tested according to the SPI interface vector, so that the millimeter wave chip to be tested switches to different gears in sequence according to a preset order; S23, the ATE channel board controls the RF switch so that the integrated RF port of the RF switch is connected to different signal ports of the millimeter wave chip to be tested in sequence according to a preset order; S24, the signal source in the ATE measuring instrument sends an excitation signal of a preset frequency to the millimeter wave chip to be tested through the radio frequency switch; S25. After the gear configuration of the millimeter-wave chip to be tested is completed, the ATE measuring instrument waits for a preset stabilization time, the signal analyzer collects response signals, and converts the collected response signals into IQ data and sends them to the ATE computer.

7. The millimeter wave chip amplitude and phase measurement method based on ATE according to claim 4, characterized in that: The data processing stage includes: S31, the ATE computer calculates the number of sampling points for each gear and port combination based on the ratio of sampling time to sampling rate, and indexes the IQ data corresponding to each segment in the total sampled data; S32, the ATE computer calculates the gain value and phase value for each gear and signal port combination according to the indexed IQ data; S33. The ATE computer averages the gain values ​​and phase values ​​of multiple sampling points under the same gear position and signal port combination to obtain final gain and phase measurement results.

8. The millimeter wave chip amplitude and phase measurement method based on ATE according to claim 7, characterized in that: The gain calculation formula is , the phase calculation formula is , where p sig is the signal source excitation power; I is the in-phase component, which represents the real part of the signal, corresponding to the component that is in phase with the reference signal; Q is the orthogonal component, which represents the imaginary part of the signal, corresponding to the component that is 90 degrees out of phase with the reference signal.

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