Helium recovery and purification system and method

Abstract

The invention discloses a helium recovery and purification system and method. The system comprises a helium recovery device, a compressor unit, a helium purification device, a pure helium storage device, a circulating purification pipeline and a first helium purity analyzer, wherein the helium recovery device, the compressor unit, the helium purification device and the pure helium storage device are communicated in sequence; a pure helium outlet valve is arranged between the helium purification device and the pure helium storage device, a non-pure helium outlet valve is arranged between one end of the circulation purification pipeline and the gas outlet end of the helium purification device, the other end of the circulation purification pipeline is communicated with the compressor unit, and the first helium purity analyzer is communicated with the helium purification device. The helium analysis device is used for analyzing the purity of the helium purified by the helium purification device, and when the purity of the purified helium is lower than first preset purity, the pure helium outlet valve is closed, and the non-pure helium outlet valve is opened; and when the purity of the purified helium is not lower than the first preset purity, the pure helium outlet valve is opened, and the non-pure helium outlet valve is closed. According to the invention, the low-purity helium can be circularly purified, so that the purified helium can meet the purity requirement.

Description

Technical Field

[0001] The present application relates to the technical field of helium recovery and purification, and in particular to a helium recovery and purification system and method. Background Art

[0002] The strategic importance of helium resources is becoming increasingly prominent. However, my country's helium resources are quite scarce, with very low concentrations, making extraction difficult and costly. Most helium is imported, severely restricting the development of some of my country's cutting-edge scientific and technological fields. Helium liquefaction can significantly reduce transportation costs. Typically, helium recovery and purification units are used in pairs with helium liquefaction units, forming the core equipment for helium purification and liquefaction. Helium purity is extremely demanding in a wide range of applications. For example, high-purity helium (volume fraction ≥ 99.999%) is required in low-temperature superconductors, large-scale helium liquefaction, and cryogenic refrigeration. The semiconductor and precision welding industries even require ultra-high-purity helium (volume fraction ≥ 99.9999%). However, existing helium purification and recovery methods have a limited range of raw helium purity and cannot effectively purify low-purity helium, resulting in the recovered helium purity not meeting actual requirements. Summary of the Invention

[0003] In view of this, the present application provides a helium recovery and purification system to solve the problem that the existing helium recovery and purification methods have poor purification effects on low-purity helium.

[0004] To solve the above technical problems, the present application adopts a technical solution: providing a helium recovery and purification system, comprising: a helium recovery device, a compressor unit, a helium purification device, and a pure helium storage device connected in sequence, further comprising a circulating purification pipeline and a first helium purity analyzer; a pure helium outlet valve is provided between the helium purification device and the pure helium storage device, an impure helium outlet valve is provided between one end of the circulating purification pipeline and the outlet end of the helium purification device, the other end of the circulating purification pipeline is connected to the inlet end valve of the compressor unit, and the first helium purity analyzer is connected to the outlet end of the helium purification device; the first helium purity analyzer is used to analyze the purity of the helium purified by the helium purification device, and when the purity of the purified helium is lower than a first preset purity, the pure helium outlet valve is closed and the impure helium outlet valve is opened; when the purity of the purified helium is not lower than the first preset purity, the pure helium outlet valve is opened and the impure helium outlet valve is closed.

[0005] As a further improvement of the present application, the helium recovery device includes a plurality of helium recovery balloons arranged in parallel, each helium recovery balloon is provided with a first air inlet valve and a first air outlet valve, and the helium purification device includes a plurality of helium low-temperature purification units arranged in parallel, each helium low-temperature purification unit is provided with a second air inlet valve, and the outlet end of each helium low-temperature purification unit is respectively connected to a pure helium outlet valve and a non-pure helium outlet valve.

[0006] As a further improvement of the present application, the circulating purification pipeline includes a non-pure helium high-pressure tank group, a pressure reducing valve group, a first valve, and a second helium purity analyzer. The air inlet end of the non-pure helium high-pressure tank group is respectively connected to the first valve and the non-pure helium outlet valve, the pressure reducing valve group is respectively connected to the outlet end of the non-pure helium high-pressure tank group and the air inlet end valve of the compressor group, the first valve is connected to the outlet end valve of the compressor group, and a pressure stabilizing valve group is further provided between the outlet end valve of the compressor group and the helium purification device; the second helium purity analyzer is connected to the outlet end valve of the compressor group, and the second helium purity analyzer is connected to the outlet end valve of the compressor group. The purity of the helium to be purified after the compressor group is pressurized is analyzed. When the purity of the helium to be purified is lower than the second preset purity, the pressure reducing valve group, the pressure stabilizing valve group, and the impure helium outlet valve are closed, and the first valve is opened. When the purity of the helium to be purified is not lower than the second preset purity, the first valve is closed and the pressure stabilizing valve group is opened. A pressure sensor is also provided in the impure helium high-pressure tank group. When the pressure sensor detects that the pressure in the impure helium high-pressure tank group exceeds the preset pressure threshold, the pressure reducing valve group, the outlet valve of the compressor group, and the impure helium outlet valve are closed, and the first valve and the pressure stabilizing valve group are opened.

[0007] As a further improvement of the present application, the gas outlet of the first helium purity analyzer and the gas outlet of the second helium purity analyzer are both connected to the gas inlet of the helium recovery device.

[0008] As a further improvement of the present application, the circulation purification pipeline also includes a second valve and a non-pure helium gas cylinder group. The second valve is connected to the outlet valve of the compressor group, and the non-pure helium gas cylinder group is connected to the second valve.

[0009] As a further improvement of the present application, the pure helium storage device includes a third valve, a mobile pure helium gas cylinder group, a fourth valve, and a pure helium high-pressure tank group. The third valve is respectively connected to the pure helium outlet valve and the mobile pure helium gas cylinder group, and the fourth valve is respectively connected to the pure helium outlet valve and the pure helium high-pressure tank group.

[0010] In order to solve the above technical problems, another technical solution adopted is: to provide a helium recovery and purification method, which is applied to one of the above-mentioned helium recovery and purification systems, the helium recovery and purification system comprising: a helium recovery device, a compressor unit, a helium purification device, a pure helium storage device, a circulating purification pipeline and a first helium purity analyzer, a pure helium outlet valve is provided between the helium purification device and the pure helium storage device, and a non-pure helium outlet valve is provided between one end of the circulating purification pipeline and the outlet end of the helium purification device; the helium recovery and purification method comprises: the helium recovery device transmits the received helium to be purified to the compressor unit; the compressor unit increases the helium to be purified After compression, the helium is transmitted to the helium purification device; the helium purification device purifies the helium to be purified and outputs the purified helium from the outlet; the first helium purity analyzer analyzes the purity of the purified helium output by the helium purification device; when the purity of the purified helium is lower than the first preset purity, the pure helium outlet valve is closed, the impure helium outlet valve is opened, and the purified helium is transmitted to the compressor unit through the circulation purification pipeline, and then transmitted to the helium purification device again after passing through the compressor unit for purification; when the purity of the purified helium is not lower than the first preset purity, the pure helium outlet valve is opened, the impure helium outlet valve is closed, and the purified helium is transmitted to the pure helium storage device for storage.

[0011] As a further improvement of the present application, the helium recovery device includes multiple helium recovery bags arranged in parallel, each helium recovery bag is provided with a first air inlet valve and a first air outlet valve; before the helium recovery bag transmits the received helium to be purified to the compressor unit, the device includes: selecting a target helium recovery bag from the multiple helium recovery bags and opening the first air inlet valve of the target helium recovery bag; detecting the gas amount of the helium to be purified in the target helium recovery bag in real time, and when the gas amount reaches a warning value, selecting a new helium recovery bag from the multiple helium recovery bags again, opening the first air inlet valve of the new helium recovery bag, and closing the first air inlet valve of the target helium recovery bag at the same time; and when a helium purification instruction is received, opening the first air outlet valve of the helium recovery bag whose gas amount reaches the warning value.

[0012] As a further improvement of the present application, the helium purification device includes a plurality of helium low-temperature purification units arranged in parallel, each helium low-temperature purification unit is provided with a second air inlet valve, and the outlet end of each helium low-temperature purification unit is respectively connected to a pure helium outlet valve and an impure helium outlet valve; the helium purification device performs steps of purifying the helium to be purified, including: selecting a target helium low-temperature purification unit from the plurality of helium low-temperature purification units, opening the second air inlet valve of the target helium low-temperature purification unit; obtaining the pressure difference between the air inlet end and the air outlet end of the target helium low-temperature purification unit, or the purification time of the target helium low-temperature purification unit; determining whether the target helium low-temperature purification unit needs to be activated and regenerated based on the pressure difference or the purification time; when it is determined that the target helium low-temperature purification unit needs to be activated and regenerated, closing the second air inlet valve of the target helium low-temperature purification unit, selecting a new helium low-temperature purification unit from the plurality of helium low-temperature purification units again, and opening the second air inlet valve of the new helium low-temperature purification unit.

[0013] As a further improvement of the present application, the circulating purification pipeline includes a non-pure helium high-pressure tank group, a pressure reducing valve group, a first valve, and a second helium purity analyzer. A pressure stabilizing valve group is further provided between the outlet valve of the compressor group and the helium purification device, and a pressure sensor is further provided in the non-pure helium high-pressure tank group; the steps of the compressor group pressurizing the helium to be purified and then transmitting it to the helium purification device specifically include: the compressor group pressurizes the helium to be purified and then outputs it; the second helium purity analyzer analyzes the purity of the helium to be purified after the compressor group pressurizes it; when the purity of the helium to be purified is lower than the first When the purity reaches the second preset purity, the pressure reducing valve group, the pressure stabilizing valve group, and the impure helium outlet valve are closed, and the first valve is opened. The helium to be purified is transmitted to the impure helium high-pressure tank group, and the pressure sensor is used to detect the pressure in the impure helium high-pressure tank group in real time. When the pressure in the impure helium high-pressure tank group exceeds the preset pressure threshold, the pressure reducing valve group, the outlet valve of the compressor group, and the impure helium outlet valve are closed, and the first valve and the pressure stabilizing valve group are opened. When the purity of the helium to be purified is not lower than the second preset purity, the first valve is closed, the pressure stabilizing valve group is opened, and the helium to be purified is transmitted to the helium purification device.

[0014] The beneficial effect of the present application is that the helium recovery and purification system of the present application constructs a circulation purification pipeline and sets a first helium purity analyzer. After the helium to be purified is purified by the helium purification device, the first helium purity analyzer is used to analyze whether the purity of the purified helium meets the requirement. When the purified helium does not meet the requirement, the non-pure helium outlet valve connected to the circulation purification pipeline is opened, and the pure helium outlet valve connected to the pure helium storage device is closed, so that the helium with substandard purity is circulated and transmitted to the helium purification device for purification, thereby ensuring that the purity of the purified helium can meet actual use requirements. In addition, the setting of the circulation purification pipeline makes the helium recovery and purification system also applicable to low-purity helium and can process a wider range of helium purities. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 1 is a schematic structural diagram of a helium recovery and purification system according to an embodiment of the present invention;

[0016] Figure 2 Schematic diagram of the helium recovery and purification method according to an embodiment of the present invention. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0018] The terms "first," "second," and "third" in this application are used only for descriptive purposes and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of such features. In the description of this application, "multiple" means at least two, for example, two, three, etc., unless otherwise specifically defined. All directional indications in the embodiments of this application (such as up, down, left, right, front, back...) are only used to explain the relative positional relationship, movement, etc. between the components under a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications also change accordingly. In addition, the terms "including" and "having," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units that are not listed, or may optionally include other steps or units that are inherent to these processes, methods, products, or devices.

[0019] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0020] Figure 1 An embodiment of the helium recovery and purification system of the present invention is shown. Figure 1As shown, the helium recovery and purification system includes: a helium recovery device 1, a compressor unit 2, a helium purification device 3, and a pure helium storage device 4, which are connected in sequence. It also includes a circulating purification pipeline 5 and a first helium purity analyzer 6. A pure helium outlet valve 31 is provided between the helium purification device 3 and the pure helium storage device 4. A non-pure helium outlet valve 32 is provided between one end of the circulating purification pipeline 5 and the outlet end of the helium purification device 3. The other end of the circulating purification pipeline 5 is connected to the inlet valve 21 of the compressor unit 2. The first helium purity analyzer 6 is connected to the outlet end of the helium purification device 3. The first helium purity analyzer 6 is used to analyze the purity of the helium purified by the helium purification device 3. When the purity of the purified helium is lower than a first preset purity, the pure helium outlet valve 31 is closed and the non-pure helium outlet valve 32 is opened. When the purity of the purified helium is not lower than the first preset purity, the pure helium outlet valve 31 is opened and the non-pure helium outlet valve 32 is closed.

[0021] Specifically, when the helium to be purified needs to be purified, the helium to be purified is input from the air inlet end of the helium recovery device 1, and then transmitted by the helium recovery device 1 to the air inlet end valve 21 of the compressor unit 2. After being compressed by the compressor unit 2, the helium is output from the air outlet end valve 22 of the compressor unit 2 and then transmitted to the helium purification device 3 for purification. The purified helium is output from the air outlet end of the helium purification device 3. The first helium purity analyzer 6 collects the purified helium output from the air outlet end of the helium purification device 3, analyzes the purity of the purified helium, and compares the purity of the purified helium with the first preset purity. The first preset purity is preset, preferably set to 99.9995%. When the purity of the purified helium is lower than the first preset purity, it indicates that the purity of the purified helium has not yet reached the standard. Therefore, the pure helium outlet valve 31 is closed, and the impure helium outlet valve 32 is opened. The purified helium enters the circulating purification pipeline 5 through the impure helium outlet valve 32, then enters the compressor unit 2 through the circulating purification pipeline 5 for re-pressurization, and is then output to the helium purification device 3 for further purification. After the re-purification, the helium purity determination is continued, thereby circulating and purifying the helium until the purity of the purified helium exceeds the first preset purity.

[0022] The helium recovery and purification system of this embodiment constructs a circulating purification pipeline 5 and provides a first helium purity analyzer 6. After the helium to be purified is purified by the helium purification device 3, the first helium purity analyzer 6 is used to analyze whether the purity of the purified helium meets the required purity. When the purified helium does not meet the required purity, the non-pure helium outlet valve 32 connected to the circulating purification pipeline 5 is opened, and the pure helium outlet valve 31 connected to the pure helium storage device is closed, so that the helium with substandard purity is circulated and transferred to the helium purification device 3 for purification, thereby ensuring that the purity of the purified helium can meet actual use requirements. In addition, the provision of the circulating purification pipeline 5 makes the helium recovery and purification system applicable to low-purity helium and can process a wider range of helium purities.

[0023] Furthermore, in order to increase the limit load of the helium recovery and purification system, in some embodiments, the helium recovery device 1 includes a plurality of helium recovery balloons 11 arranged in parallel, each of which is provided with a first air inlet valve 111 and a first air outlet valve 112; the helium purification device 3 includes a plurality of helium low-temperature purification units 33 arranged in parallel, each of which is provided with a second air inlet valve 34; and the air outlet end of each helium low-temperature purification unit 33 is respectively connected to a pure helium outlet valve 31 and an impure helium outlet valve 32.

[0024] Specifically, by arranging multiple helium recovery balloons 11 and multiple helium low-temperature purification units 33 in parallel, this embodiment greatly improves the maximum load of the helium recovery and purification system, allowing the helium recovery and purification system to operate normally under high load conditions and is more practical.

[0025] It should be noted that, in the actual working process, the multiple helium recovery balloons 11 change and adjust their working states according to the helium flow rate input from the outside. Specifically, assuming there are N helium recovery balloons 11, such as Figure 1As shown, when the helium recovery mode starts, the helium recovery balloon A collects helium first, while the helium recovery balloons B to N are temporarily closed; then, the amount of gas in the helium recovery balloon A is detected in real time. When the amount of gas in the helium recovery balloon A reaches the warning value, the working states of the helium recovery balloon A and the helium recovery balloon B are switched, that is, the helium recovery balloon A stops collecting helium and prepares to supply gas to the compressor unit 2, and the helium recovery balloon B starts collecting helium; when the amount of gas in the helium recovery balloon A does not reach the warning value, the helium recovery balloon A and the helium recovery balloon B are switched. The operating state of balloon B remains unchanged, i.e., helium recovery balloon A continues to collect helium. If the operating states of helium recovery balloons A and B are switched, a determination is made as to whether purification is required. If so, the purification mode is initiated, i.e., the first outlet valve 112 of helium recovery balloon A is opened. If purification is not yet required, the gas volume in helium recovery balloon B is determined. If the gas volume in helium recovery balloon B also reaches the warning value, the process switches to helium recovery balloon C, and so on, all the way to helium recovery balloon N. If the gas volume in one or more helium recovery balloons 11 reaches the warning value, the first outlet valve 112 of the helium recovery balloon 11 that has reached the warning value is opened, and the purification mode is initiated. If the gas volume in helium recovery balloon B has not reached the warning value, the switched operating state of helium recovery balloon 11 is maintained, and the determination as to whether the purification mode needs to be initiated continues.

[0026] Specifically, for the helium purification device 3, it is assumed that it is composed of N helium low-temperature purification units 33 connected in parallel, each helium low-temperature purification unit 33 is provided with a second air inlet valve 34, and the outlet end of each helium low-temperature purification unit 33 is connected to a pure helium outlet valve 31 and an impure helium outlet valve 32, respectively. Figure 1As shown, when the helium purification mode starts, helium is first purified by helium cryogenic purification unit A, while helium cryogenic purification units B to N are temporarily shut down. Then, whether helium cryogenic purification unit A needs activation and regeneration is continuously determined based on the pressure difference between the inlet and outlet ends of helium cryogenic purification unit A or the purification time of helium cryogenic purification unit A. When helium cryogenic purification unit A needs activation and regeneration, the working states of helium cryogenic purification unit A and helium cryogenic purification unit B are switched, that is, helium cryogenic purification unit A stops purifying helium and helium cryogenic purification unit B purifies helium. When helium cryogenic purification unit A does not need activation and regeneration, the working states of helium cryogenic purification unit A and helium cryogenic purification unit B remain unchanged, that is, helium cryogenic purification unit A continues to purify helium. If the working states of helium cryogenic purification unit A and helium cryogenic purification unit B are switched, whether helium cryogenic purification unit B needs activation and regeneration is continuously determined. If helium cryogenic purification unit B needs activation and regeneration, the working state of helium cryogenic purification unit A, ..., is switched to helium cryogenic purification unit N in a similar manner. If a certain helium cryogenic purification unit 33 or several helium cryogenic purification units 33 need to be activated and regenerated, the second air inlet valve 34 and the pure helium outlet valve 31 of the helium cryogenic purification unit 33 are closed to activate and regenerate the helium cryogenic purification unit 33.

[0027] This embodiment achieves continuous, large-scale, uninterrupted recovery and purification of helium by configuring multiple helium recovery balloons 11 and multiple helium low-temperature purification units 33 in parallel. The helium recovery and purification process will not be interrupted due to the need for activation and regeneration of the helium low-temperature purification units 33, and can adapt to high-load helium recovery and purification scenarios.

[0028] Furthermore, the circulating purification pipeline 5 includes a non-pure helium high-pressure tank group 51, a pressure reducing valve group 52, a first valve 53, and a second helium purity analyzer 54. The air inlet end of the non-pure helium high-pressure tank group 51 is respectively connected to the first valve 53 and the non-pure helium outlet valve 32, the pressure reducing valve group 52 is respectively connected to the air outlet end of the non-pure helium high-pressure tank group 51 and the air inlet end valve 21 of the compressor group 2, the first valve 53 is connected to the air outlet end valve 22 of the compressor group 2, and a pressure stabilizing valve group 23 is further provided between the air outlet end valve 22 of the compressor group 2 and the helium purification device 3; the second helium purity analyzer 54 is connected to the air outlet end valve 22 of the compressor group 2, and the second helium purity analyzer 54 is used to analyze the pressure of the compressor group 2 after pressurization. The purity of the helium to be purified is determined, and when the purity of the helium to be purified is lower than the second preset purity, the pressure reducing valve group 52, the pressure stabilizing valve group 23, and the impure helium outlet valve 32 are closed, and the first valve 53 is opened. The second preset purity is preset, preferably set to 95%; when the purity of the helium to be purified is not lower than the second preset purity, the first valve 53 is closed, and the pressure stabilizing valve group 23 is opened; a pressure sensor (not shown in the figure) is also provided in the impure helium high-pressure tank group 51. When the pressure sensor detects that the pressure in the impure helium high-pressure tank group 51 exceeds the preset pressure threshold, the pressure reducing valve group 52, the outlet valve 22 of the compressor group 2, and the impure helium outlet valve 32 are closed, and the first valve 53 and the pressure stabilizing valve group 23 are opened.

[0029] Specifically, in order to reduce energy consumption during the purification process, in this embodiment, a non-pure helium high-pressure tank group 51 is provided in the circulation purification pipeline 5. When helium recovery and purification is required, the compressor group 2 first pressurizes the helium to be purified and then outputs it. Then, the second helium purity analyzer 54 is used to analyze the purity of the helium to be purified after pressurization by the compressor group 2. When the purity of the helium to be purified is lower than the second preset purity, the pressure reducing valve group 52, the pressure stabilizing valve group 23, and the non-pure helium outlet valve 32 are closed, and the first valve 53 is opened, and the helium to be purified is transferred to the non-pure helium high-pressure tank group 51. As the amount of gas in the non-pure helium high-pressure tank group 51 increases, the pressure in the non-pure helium high-pressure tank group 51 is detected in real time by a pressure sensor. When the pressure in the non-pure helium high-pressure tank group 51 exceeds the preset pressure threshold, the pressure reducing valve group 52, the outlet valve of the compressor group, and the non-pure helium outlet valve 32 are closed, and the first valve 53 and the pressure stabilizing valve group 23 are opened. At this time, the non-pure helium in the high-pressure tank group 51 is After being discharged, the purified helium enters the helium purification device 3 through the first valve 53 and the pressure-stabilizing valve group 23 for purification. The pressure difference between the non-pure helium high-pressure tank group 51 and the helium purification device 3 is used to purify the helium, without the need for the compressor group 2 for pressurization. Moreover, due to the parallel effect of the helium cryogenic purification units 33, the maximum number of which can be N, the pressure drop through the array of helium cryogenic purification units 33 can be significantly reduced, thereby achieving the purpose of energy saving. When the purity of the helium to be purified is not lower than the second preset purity, the first valve 53 is closed, the pressure-stabilizing valve group 23 is opened, and the helium to be purified is transmitted to the helium purification device.

[0030] Furthermore, in order to avoid wasting helium, in some embodiments, the gas outlet of the first helium purity analyzer 6 and the gas outlet of the second helium purity analyzer 54 are both connected to the gas inlet of the helium recovery device 1 .

[0031] Specifically, by connecting the outlet end of the first helium purity analyzer 6 and the outlet end of the second helium purity analyzer 54 to the inlet end of the helium recovery device 1, the helium after the purity test in the first helium purity analyzer 6 and the second helium purity analyzer 54 can enter the helium recovery device 1 again for recovery and purification, thereby avoiding wasting the helium after the purity test.

[0032] Furthermore, in order to expand the storage capacity of the helium recovery and purification system for impure helium, the circulating purification pipeline 5 also includes a second valve 55 and a impure helium cylinder group 56. The second valve 55 is connected to the outlet valve 22 of the compressor group 2, and the impure helium cylinder group 56 is connected to the second valve 55.

[0033] Specifically, when the gas in the impure helium high-pressure tank group 51 reaches a preset pressure threshold, if there is still helium to be purified injected at this time, the injected helium to be purified will be buffered in the impure helium cylinder group 56 to avoid affecting the helium purification process.

[0034] Furthermore, in order to improve the storage capacity of purified helium, the pure helium storage device 4 includes a third valve 41, a mobile pure helium gas cylinder group 42, a fourth valve 43, and a pure helium high-pressure tank group 44. The third valve 41 is connected to the pure helium outlet valve 31 and the mobile pure helium gas cylinder group 42, respectively. The fourth valve 43 is connected to the pure helium outlet valve 31 and the pure helium high-pressure tank group 44, respectively.

[0035] Specifically, by providing the mobile pure helium cylinder group 42 , when the pure helium high-pressure tank group 44 is full, the mobile helium storage cylinder group can also be used to store the purified helium, thereby ensuring the continuation of the helium purification process.

[0036] Figure 2 An embodiment of the helium recovery and purification method of the present invention is shown. The helium recovery and purification method is applied to the helium recovery and purification system of one of the above embodiments. The helium recovery and purification system includes: a helium recovery device, a compressor unit, a helium purification device, a pure helium storage device, a circulating purification pipeline and a first helium purity analyzer. A pure helium outlet valve is provided between the helium purification device and the pure helium storage device, and a non-pure helium outlet valve is provided between one end of the circulating purification pipeline and the outlet end of the helium purification device. Figure 2 As shown, the helium recovery and purification method includes:

[0037] Step S101: The helium recovery device transmits the received helium to be purified to the compressor unit.

[0038] Step S102: The compressor unit pressurizes the helium to be purified and then transmits it to the helium purification device.

[0039] Step S103: The helium purification device purifies the helium to be purified and outputs the purified helium from the gas outlet.

[0040] Step S104: The first helium purity analyzer analyzes the purity of the purified helium output by the helium purification device.

[0041] Step S105: When the purity of the purified helium is lower than the first preset purity, the pure helium outlet valve is closed and the impure helium outlet valve is opened. The purified helium is transmitted to the compressor unit through the circulation purification pipeline, and then transmitted to the helium purification device again after passing through the compressor unit for purification.

[0042] Step S106: When the purity of the purified helium is not lower than the first preset purity, the pure helium outlet valve is opened, the impure helium outlet valve is closed, and the purified helium is transferred to the pure helium storage device for storage.

[0043] Furthermore, the helium recovery device includes a plurality of helium recovery balloons arranged in parallel, each of which is provided with a first air inlet valve and a first air outlet valve; before step S101, the device further includes:

[0044] 1. Select a target helium recovery balloon from multiple helium recovery balloons and open the first air inlet valve of the target helium recovery balloon.

[0045] 2. Real-time detection of the amount of helium to be purified in the target helium recovery balloon. When the amount of gas reaches the warning value, a new helium recovery balloon is selected from multiple helium recovery balloons, and the first air inlet valve of the new helium recovery balloon is opened, while the first air inlet valve of the target helium recovery balloon is closed.

[0046] 3. When a helium purification instruction is received, the first outlet valve of the helium recovery bag is opened when the gas volume reaches the warning value.

[0047] Furthermore, the helium purification device includes a plurality of helium cryogenic purification units arranged in parallel, each helium cryogenic purification unit is provided with a second gas inlet valve, and the gas outlet end of each helium cryogenic purification unit is respectively connected to a pure helium gas outlet valve and an impure helium gas outlet valve; the step of purifying the helium to be purified by the helium purification device in step S103 includes:

[0048] 1. Select a target helium cryogenic purification unit from multiple helium cryogenic purification units, and open the second air inlet valve of the target helium cryogenic purification unit.

[0049] 2. Obtain the pressure difference between the inlet and outlet ends of the target helium cryogenic purification unit, or the purification time of the target helium cryogenic purification unit.

[0050] 3. Determine whether the target helium low-temperature purification unit needs activation and regeneration based on the pressure difference or purification time.

[0051] 4. When it is confirmed that the target helium cryogenic purification unit needs to be activated and regenerated, the second air inlet valve of the target helium cryogenic purification unit is closed, and a new helium cryogenic purification unit is selected from multiple helium cryogenic purification units, and the second air inlet valve of the new helium cryogenic purification unit is opened.

[0052] Furthermore, the circulating purification pipeline includes a non-pure helium high-pressure tank group, a pressure reducing valve group, a first valve, a second helium purity analyzer, a pressure stabilizing valve group is further provided between the outlet valve of the compressor group and the helium purification device, and a pressure sensor is further provided in the non-pure helium high-pressure tank group. Step S102 specifically includes:

[0053] 1. The compressor unit pressurizes the helium to be purified and then outputs it.

[0054] 2. The second helium purity analyzer analyzes the purity of the helium to be purified after being pressurized by the compressor unit.

[0055] 3. When the purity of the helium to be purified is lower than the second preset purity, the pressure reducing valve group, the pressure stabilizing valve group, and the impure helium outlet valve are closed, and the first valve is opened. The helium to be purified is transmitted to the impure helium high-pressure tank group, and the pressure sensor is used to detect the pressure in the impure helium high-pressure tank group in real time. When the pressure in the impure helium high-pressure tank group exceeds the preset pressure threshold, the pressure reducing valve group, the outlet valve of the compressor group, and the impure helium outlet valve are closed, and the first valve and the pressure stabilizing valve group are opened.

[0056] 4. When the purity of the helium to be purified is not lower than the second preset purity, the first valve is closed, the pressure-stabilizing valve group is opened, and the helium to be purified is transmitted to the helium purification device.

[0057] For other details of the technical solutions for implementing each module in the helium recovery and purification method in the above embodiment, please refer to the description of the helium recovery and purification system in the above embodiment, which will not be repeated here.

[0058] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same and similar parts between the various embodiments can be referenced to each other.

[0059] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A helium recovery and purification system, characterized in that: It includes: a helium recovery device, a compressor unit, a helium purification device and a pure helium storage device connected in sequence, and also includes a circulating purification pipeline and a first helium purity analyzer; A pure helium outlet valve is provided between the helium purification device and the pure helium storage device, a non-pure helium outlet valve is provided between one end of the circulating purification pipeline and the outlet end of the helium purification device, the other end of the circulating purification pipeline is connected to the air inlet valve of the compressor unit, and the first helium purity analyzer is connected to the outlet end of the helium purification device; The first helium purity analyzer is used to analyze the purity of the helium purified by the helium purification device, and when the purity of the purified helium is lower than a first preset purity, close the pure helium outlet valve and open the impure helium outlet valve; when the purity of the purified helium is not lower than the first preset purity, open the pure helium outlet valve and close the impure helium outlet valve.

2. The helium recovery and purification system according to claim 1, characterized in that: The helium recovery device includes a plurality of helium recovery balloons arranged in parallel, each of which is provided with a first air inlet valve and a first air outlet valve. The helium purification device includes a plurality of helium low-temperature purification units arranged in parallel, each of which is provided with a second air inlet valve. The outlet end of each helium low-temperature purification unit is respectively connected to one of the pure helium outlet valves and one of the impure helium outlet valves.

3. The helium recovery and purification system according to claim 1, characterized in that: The circulating purification pipeline includes a non-pure helium high-pressure tank group, a pressure reducing valve group, a first valve, and a second helium purity analyzer. The air inlet end of the non-pure helium high-pressure tank group is respectively connected to the first valve and the non-pure helium outlet valve. The pressure reducing valve group is respectively connected to the air outlet end of the non-pure helium high-pressure tank group and the air inlet valve of the compressor group. The first valve is connected to the air outlet valve of the compressor group. A pressure stabilizing valve group is further provided between the air outlet valve of the compressor group and the helium purification device. The second helium purity analyzer is connected to the outlet valve of the compressor group, and is used to analyze the purity of the helium to be purified after being pressurized by the compressor group. When the purity of the helium to be purified is lower than a second preset purity, the second helium purity analyzer closes the pressure reducing valve group, the pressure stabilizing valve group, and the impure helium outlet valve, and opens the first valve; when the purity of the helium to be purified is not lower than the second preset purity, the second helium purity analyzer closes the first valve and opens the pressure stabilizing valve group; The non-pure helium high-pressure tank group is also provided with a pressure sensor. When the pressure sensor detects that the pressure in the non-pure helium high-pressure tank group exceeds a preset pressure threshold, the pressure reducing valve group, the outlet valve of the compressor group, and the non-pure helium outlet valve are closed, and the first valve and the pressure stabilizing valve group are opened.

4. The helium recovery and purification system according to claim 3, characterized in that: The gas outlet end of the first helium purity analyzer and the gas outlet end of the second helium purity analyzer are both connected to the gas inlet end of the helium recovery device.

5. The helium recovery and purification system according to claim 3, characterized in that: The circulation purification pipeline further includes a second valve and a non-pure helium gas cylinder group. The second valve is communicated with the gas outlet valve of the compressor group, and the non-pure helium gas cylinder group is communicated with the second valve.

6. The helium recovery and purification system according to claim 1, characterized in that: The pure helium storage device includes a third valve, a mobile pure helium gas cylinder group, a fourth valve, and a pure helium high-pressure tank group. The third valve is respectively connected to the pure helium outlet valve and the mobile pure helium gas cylinder group, and the fourth valve is respectively connected to the pure helium outlet valve and the pure helium high-pressure tank group.

7. A helium recovery and purification method, characterized in that: The invention is applied to the helium recovery and purification system according to any one of claims 1 to 6, wherein the helium recovery and purification system comprises: a helium recovery device, a compressor unit, a helium purification device, a pure helium storage device, a circulating purification pipeline, and a first helium purity analyzer; a pure helium outlet valve is provided between the helium purification device and the pure helium storage device; and a non-pure helium outlet valve is provided between one end of the circulating purification pipeline and the outlet end of the helium purification device; the helium recovery and purification method comprises: The helium recovery device transmits the received helium to be purified to the compressor unit; The compressor unit pressurizes the helium to be purified and then transmits it to the helium purification device; The helium purification device purifies the helium to be purified and outputs the purified helium from the gas outlet; A first helium purity analyzer analyzes the purity of the purified helium output by the helium purification device; When the purity of the purified helium is lower than the first preset purity, the pure helium outlet valve is closed, the impure helium outlet valve is opened, and the purified helium is transmitted to the compressor unit through the circulation purification pipeline, and then transmitted to the helium purification device again after passing through the compressor unit for purification; When the purity of the purified helium is not lower than the first preset purity, the pure helium outlet valve is opened, the impure helium outlet valve is closed, and the purified helium is transferred to the pure helium storage device for storage.

8. The helium recovery and purification method according to claim 7, characterized in that: The helium recovery device includes a plurality of helium recovery balloons arranged in parallel, each of which is provided with a first air inlet valve and a first air outlet valve. Before the helium recovery device transmits the received helium to be purified to the compressor unit, the method includes: Selecting a target helium recovery balloon from the multiple helium recovery balloons, and opening a first air inlet valve of the target helium recovery balloon; detecting in real time the amount of helium to be purified in the target helium recovery balloon, and when the amount reaches a warning value, selecting a new helium recovery balloon from the multiple helium recovery balloons, opening a first air inlet valve of the new helium recovery balloon, and simultaneously closing the first air inlet valve of the target helium recovery balloon; When a helium purification instruction is received, the first outlet valve of the helium recovery bag is opened when the gas volume reaches the warning value.

9. The helium recovery and purification method according to claim 7, characterized in that: The helium purification device includes a plurality of helium cryogenic purification units arranged in parallel, each of which is provided with a second air inlet valve, and the outlet end of each helium cryogenic purification unit is respectively connected to one of the pure helium outlet valves and one of the impure helium outlet valves. The helium purification device purifies the helium to be purified, including: Selecting a target helium low-temperature purification unit from the plurality of helium low-temperature purification units, and opening a second air inlet valve of the target helium low-temperature purification unit; Obtaining the pressure difference between the air inlet and the air outlet of the target helium low-temperature purification unit, or the purification time of the target helium low-temperature purification unit; Determining whether the target helium low-temperature purification unit needs activation and regeneration according to the pressure difference or the purification time; When it is confirmed that the target helium low-temperature purification unit needs to be activated and regenerated, the second air inlet valve of the target helium low-temperature purification unit is closed, and a new helium low-temperature purification unit is selected again from the multiple helium low-temperature purification units, and the second air inlet valve of the new helium low-temperature purification unit is opened.

10. The helium recovery and purification method according to claim 7, characterized in that: The circulating purification pipeline includes a non-pure helium high-pressure tank group, a pressure reducing valve group, a first valve, and a second helium purity analyzer. A pressure stabilizing valve group is further provided between the outlet valve of the compressor group and the helium purification device. The non-pure helium high-pressure tank group is also provided with a pressure sensor. The steps of pressurizing the helium to be purified by the compressor group and then transmitting it to the helium purification device specifically include: The compressor unit pressurizes the helium to be purified and then outputs it; The second helium purity analyzer analyzes the purity of the helium to be purified after being pressurized by the compressor unit; When the purity of the helium to be purified is lower than a second preset purity, the pressure reducing valve group, the pressure stabilizing valve group, and the impure helium outlet valve are closed, and the first valve is opened. The helium to be purified is transferred to the impure helium high-pressure tank group, and the pressure in the impure helium high-pressure tank group is detected in real time by using the pressure sensor. When the pressure in the impure helium high-pressure tank group exceeds a preset pressure threshold, the pressure reducing valve group, the outlet valve of the compressor group, and the impure helium outlet valve are closed, and the first valve and the pressure stabilizing valve group are opened. When the purity of the helium to be purified is not lower than a second preset purity, the first valve is closed, the pressure-stabilizing valve group is opened, and the helium to be purified is transmitted to the helium purification device.

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