Angular displacement micro-motion driving mechanism, linear array detection device and high-energy industrial CT

Abstract

The invention relates to an angular displacement micro-motion driving mechanism, a linear array detection device and a high-energy industrial CT (Computed Tomography), which are used for solving the technical problem that the pixels of the existing detection device interfere with each other along with the reduction of the pixel size, and the angular displacement micro-motion driving mechanism comprises a power source, a rotary and linear motion assembly, an arc motion assembly and a fixed seat, the arc motion assembly comprises an arc guide rail, a roller and a moving plate, the arc guide rail provides an arc motion track for the moving plate, the roller is in contact with the arc guide rail and can roll on the arc guide rail to support and guide the moving plate to move along the arc track, and the moving plate moves on the arc guide rail through the roller to achieve angular displacement micro motion. The angle adjusting capability of the detection device is improved, the detection device can be aligned with a target object more accurately, signal acquisition is optimized, when the detection device performs micro motion, signals received by pixels can be more concentrated and accurate, and signal overlapping and interference caused by reduction of the pixel size are reduced.

Description

Technical Field

[0001] The present invention relates to the field of radiation detection technology, and in particular to an angular displacement micro-drive mechanism, a linear array detection device and a high-energy industrial CT. Background Art

[0002] High-energy industrial CT is a computed tomography technology used for non-destructive testing. It is mainly used to detect the internal structure and defects of large workpieces. It uses a linear array detection device to collect detection data to obtain internal structure and defect information of large workpieces.

[0003] With the development of ray detection technology, the requirements for detection accuracy are becoming increasingly higher. Traditional detectors achieve high resolution by reducing the size of individual detector pixels. When the detector pixel size is reduced, the distance between pixels will also be shortened accordingly, which increases the mutual interference between pixels. The crosstalk phenomenon will reduce the clarity of the image and affect the resolution performance of the detector. Among them, crosstalk refers to the signal received by one pixel being interfered with by the signal of the adjacent pixel, which will cause the signal output by the detector to be distorted. Summary of the Invention

[0004] The purpose of the present invention is to provide an angular displacement micro-drive mechanism, a linear array detection device and a high-energy industrial CT to solve the technical problem of mutual interference between pixels in existing detection devices as the pixel size decreases.

[0005] The purpose of the present invention is mainly achieved through the following technical solutions:

[0006] In the first aspect, the present invention provides an angular displacement micro-drive mechanism for a linear array detection device, comprising a power source, a rotation and linear motion component, an arc motion component and a fixed seat, wherein the power source and the arc motion component are both arranged on the fixed seat, the rotation and linear motion component is arranged on the arc motion component, the rotation and linear motion component is connected to the power source for rotation and linear motion, and the arc motion component is connected to the rotation and linear motion component to be driven by the rotation and linear motion to achieve angular displacement micro-motion.

[0007] Furthermore, an annular cooling channel is provided on the fixing seat, and the annular cooling channel surrounds the circumference of the power source. The inlet and outlet of the cooling channel are respectively connected to an external cooling medium circulation system through quick connectors to cool the power source.

[0008] Furthermore, the bottom surface of the fixed seat is provided with a first positioning key groove and a second positioning key groove which are perpendicular to each other, and the width tolerance of the first positioning key groove and the second positioning key groove is h7. The first positioning key groove and the second positioning key groove are used to position with the external platform and limit the rotational freedom of the fixed seat around the vertical axis.

[0009] Furthermore, the projection of the center of gravity of the power source on the horizontal plane falls on the intersection of the first positioning key groove and the second positioning key groove to reduce the overturning moment of the fixing seat.

[0010] Furthermore, the power source includes a direct drive motor, a transmission column and a bearing seat, the direct drive motor is connected to the transmission column, the transmission column is connected to the bearing seat, and the inner ring of the bearing seat is connected to the rotation and linear motion component.

[0011] Furthermore, the angular displacement fine-motion driving mechanism further includes a mechanism fixing frame, and the fixing seat is fixedly arranged on the mechanism fixing frame.

[0012] Furthermore, the angular displacement micro-drive mechanism further includes a power source fixing frame, the power source fixing frame is fixedly arranged at the bottom end of the fixing seat, and the power source is fixedly arranged on the power source fixing frame.

[0013] Furthermore, the output shaft of the power source is connected to the input end of the rotation and linear motion component through an elastic coupling to isolate the vibration transmission of the axial movement of the power source to the fixed seat.

[0014] In a second aspect, the present invention provides a linear array detection device, comprising a comb collimator, a detector and the angular displacement micro-drive mechanism, wherein the comb collimator and the detector are both fixedly arranged on the arc motion component, and the comb collimator is arranged in front of the detection direction of the detector.

[0015] In a third aspect, the present invention provides a high-energy industrial CT for detecting the internal structure and defects of a workpiece, comprising a data acquisition and processing system and the linear array detection device, wherein the linear array detection device is connected to the data acquisition and processing system to send the detected electrical signal.

[0016] One or more technical solutions provided in the exemplary embodiments of the present invention can achieve at least one of the following beneficial effects.

[0017] (1) In the technical solutions of the angular displacement micro-motion drive mechanism, linear array detection device and high-energy industrial CT of the present invention, the arc guide rail provides an arc motion trajectory for the movable plate, the roller contacts the arc guide rail and can roll on the arc guide rail, supporting and guiding the movable plate to move along the arc trajectory, and the movable plate moves on the arc guide rail through the roller to achieve angular displacement micro-motion, thereby improving the angle adjustment capability of the detection device, enabling the detection device to be more accurately aligned with the target object, thereby optimizing signal acquisition, when the detection device is micro-moved, the signal received by the pixel can be made more concentrated and accurate, reducing the signal overlap and interference caused by the reduction of pixel size, at the same time, when the detection device is adjusted at an angle, the signals of different target objects can be separated, thereby further reducing the overlap and interference between signals, in addition, through angular displacement micro-motion, the signal separation can also be improved, when the detection device is adjusted at an angle with high precision, the detection device can separate the signals of different target objects, which helps to improve the imaging quality and observation accuracy of the detection device.

[0018] (2) In the technical solutions of the angular displacement micro-drive mechanism, the linear array detection device and the high-energy industrial CT of the present invention, the arc guide rail includes a first arc guide rail and a second arc guide rail, and the first arc guide rail and the second arc guide rail are respectively fixedly arranged on both sides of the fixed seat and are respectively located below the two side ends of the movable plate; through the cooperation of the arc guide rails, stable arc motion is achieved, and the use of a double guide rail support method can effectively improve the stability and accuracy of the movable plate movement, and avoid deflection or vibration caused by unilateral support.

[0019] (3) In the technical solutions of the angular displacement micro-drive mechanism, linear array detection device and high-energy industrial CT of the present invention, the roller includes a roller fixing plate and a roller unit. The roller fixing plate is fixedly arranged at the bottom end of the movable plate. The roller units are arranged on both sides of the movable plate to match the track grooves on both sides of the arc guide rail. The roller units enable the movable plate to move smoothly along the arc guide rail, ensuring the stability and accuracy of the movement. The roller units are used to realize rolling friction. Compared with sliding friction, the roller unit reduces the friction between the movable plate and the arc guide rail, improves the efficiency of the movement, and also extends the service life of the roller unit and the arc guide rail.

[0020] In the present invention, the above-mentioned technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of the present invention will be described in the following description, and some advantages will become apparent from the description or be learned through practice of the present invention. The objectives and other advantages of the present invention can be realized and obtained through the contents particularly pointed out in the description and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings illustrate exemplary embodiments of the present invention and, together with the description, serve to explain the principles of the present invention. These drawings are included to provide a further understanding of the present invention and are incorporated in and constitute a part of this specification.

[0022] Figure 1 2 is a schematic structural diagram of an angular displacement micro-drive mechanism according to an embodiment of the present invention;

[0023] Figure 2 2. This is a front view of the angular displacement micro-drive mechanism according to an embodiment of the present invention;

[0024] Figure 3 is a schematic structural diagram of a rotary and linear motion assembly according to an embodiment of the present invention;

[0025] Figure 4a This is one of the schematic diagrams of the arc displacement of the movable plate formed by combining the linear displacement and the arc displacement in an embodiment of the present invention;

[0026] Figure 4b This is a second schematic diagram of the arc displacement of the movable plate formed by combining the linear displacement and the arc displacement in an embodiment of the present invention;

[0027] Figure 5 1 is a schematic structural diagram of an arc guide rail according to an embodiment of the present invention;

[0028] Figure 6 is a schematic structural diagram of a roller in an embodiment of the present invention;

[0029] Figure 7 is a schematic structural diagram of a power source in an embodiment of the present invention;

[0030] Figure 8 This is a schematic structural diagram of a mechanism fixing frame according to an embodiment of the present invention;

[0031] Figure 9 is a schematic structural diagram of a linear array detection device according to an embodiment of the present invention;

[0032] Figure 10 Schematic diagram of the structure of a high-energy industrial CT in an embodiment of the present invention.

[0033] Reference numerals:

[0034] 1-power source, 11-direct drive motor, 12-transmission column, 13-bearing seat, 14-bearing;

[0035] 2-rotation and linear motion components, 21-linear guide rails, 22-slide blocks;

[0036] 3-arc motion assembly, 31-arc guide rail, 311-first arc guide rail, 312-second arc guide rail, 32-roller, 321-roller fixing plate, 322-roller unit, 33-moving plate;

[0037] 4-fixed seat;

[0038] 5-Power source fixing bracket;

[0039] 6-mechanism fixing frame, 61-lateral vertical plate, 62-bottom plate, 63-support plate;

[0040] a-comb collimator;

[0041] b-Detector. DETAILED DESCRIPTION

[0042] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0043] The following describes in detail the technical solution of the present application and how the technical solution of the present application solves the above-mentioned technical problems with specific embodiments.

[0044] Example 1

[0045] like Figure 1 and Figure 2 As shown, an embodiment of the present invention provides an angular displacement micro-drive mechanism for a linear array detection device, including a power source 1, a rotation and linear motion component 2, an arc motion component 3 and a fixed seat 4, the power source 1 and the arc motion component 3 are both arranged on the fixed seat 4, the rotation and linear motion component 2 is arranged on the arc motion component 3, the rotation and linear motion component 2 is connected to the power source 1 for rotation and linear motion, and the arc motion component 3 is connected to the rotation and linear motion component 2 to be driven by rotation and linear motion; the arc motion component 3 includes an arc guide rail 31, a roller 32 and a movable plate 33, the arc guide rail 31 is fixedly arranged on the fixed seat 4, and the movable plate 33 is arranged on the arc guide rail 31 through the roller 32 for angular displacement micro-motion.

[0046] Specifically, the power source 1 is used to provide driving energy, which can be a motor or a pneumatic element. The rotation and linear motion component 2 is used to convert the movement of the power source 1 into rotation and linear motion. The arc motion component 3 serves as a driven component of the rotation and linear motion component 2, and is driven by rotation and linear motion to perform arc motion. The fixed seat 4 provides support and installation basis for the power source 1, the rotation and linear motion component 2, and the arc motion component 3 to ensure the stability and accuracy of the entire mechanism; wherein the arc guide rail 31, for example, can be fixed on the fixed seat 4 by bolts to provide an arc motion trajectory for the moving plate 33, the roller 32 contacts the arc guide rail 31 and can roll on the arc guide rail 31, supporting and guiding the moving plate 33 to move along the arc trajectory, and the moving plate 33 moves on the arc guide rail 31 through the roller 32 to achieve angular displacement micro-motion, thereby improving the angle adjustment capability of the detection device, making the detection device The position can more accurately align with the target object, thereby optimizing signal acquisition. When the detection device is slightly moved, the signal received by the pixel can be made more concentrated and accurate, reducing signal overlap and interference caused by the reduction of pixel size. For example, in X-ray flaw detection, by precisely controlling the position of the detection device, the signal received by each pixel can be made clearer and independent, thereby reducing mutual interference between pixels. At the same time, when the detection device is adjusted at an angle, the signals of different target objects can be separated, thereby further reducing overlap and interference between signals. In addition, the signal separation can also be improved through angular displacement micro-movement. When the detection device is adjusted at an angle with high precision, the detection device can separate the signals of different target objects, which helps to improve the imaging quality and observation accuracy of the detection device, and solves the technical problem of increased mutual interference between pixels in existing detection devices as the pixel size is reduced.

[0047] In a preferred embodiment of the present invention, Figure 3As shown, the rotation and linear motion component 2 includes a linear guide 21 and a slider 22 that is slidably arranged on the linear guide 21. The power source 1 is connected to the slider 22 so that the slider 22 slides along the linear guide 21, and the slider 22 drives the linear guide 21 to rotate. The linear guide 21 is fixed on the moving plate 33 so that the moving plate 33 rotates along the arc guide 31. The slider 22 has no contact with the moving plate 33. The linear guide 21 provides guidance and support for the linear motion of the slider 22, so that the slider 22 can move along a predetermined linear path. The slider 22 is installed on the linear guide 21 and can slide along the linear guide 21 to achieve linear motion. The slider 22 forms a linear displacement along the movement of the linear guide 21. The linear guide 21 rotates with the slider 22 to form an arc displacement. The linear displacement and the arc position The linear guide 21 and the slider 22 are combined to form an arc displacement of the movable plate 33, and the arc displacement is used to characterize the data of the angular displacement micro-motion. Through the combined movement of the linear guide 21 and the slider 22, the movable plate 33 can achieve precise arc displacement; the cooperation of the linear guide 21 and the slider 22 is used to achieve micron-level or even higher positioning accuracy. In the linear array detection device, the high-precision positioning capability enables the pixels to be aligned with the target, thereby reducing the optical and electrical crosstalk between pixels caused by inaccurate positioning; there is rolling friction between the linear guide 21 and the slider 22, and the friction coefficient is low, which helps to achieve smooth linear motion, which helps to reduce energy consumption and ensure that the linear array detection device will not affect the precise alignment of pixels due to vibration or jitter when adjusting the position. Smooth operation helps to keep the relative position between pixels stable and reduce mutual interference.

[0048] Specifically, if Figure 4a and Figure 4b As shown, let the radius of the large arc displacement of the movable plate 33 be R, and the arc angle of the arc be A; the radius of the small arc rotation of the linear guide 21 and the slider 22 be r, and the arc angle be B; H is the distance between the center of R and the center of r, all of which are known. Among them, the power source 1 rotates, driving the linear guide 21 and the slider 22 to rotate, the linear guide 21 is fixed on the movable plate 33, and the slider 22 moves along the linear guide 21 toward the center of the arc of the movable plate 33. The rotation and linear motion of the slider 22 drive the movable plate 33 to move along the arc with a radius of R, and the slider 22 participates in the small arc and large arc movement respectively, as shown in FIG. Figure 4a As shown, X is the displacement of the slider 22 on the x-axis. The relationship between the displacement X in the large arc and small arc motions is derived from the following formulas (1)-(3):

[0049] X=rsinB……(1);

[0050] X=(H+rcosB)*tgA……(2);

[0051] rsinB / (H+rcosB)=tgA......(3);

[0052] Thus, by controlling the power source 1 , fine movement of the angular displacement in the order of arc seconds can be achieved.

[0053] In a preferred embodiment of the present invention, Figure 5 As shown, the arc guide rail 31 includes a first arc guide rail 311 and a second arc guide rail 312, and the first arc guide rail 311 and the second arc guide rail 312 are respectively fixedly arranged on both sides of the fixed base 4 and are respectively located below the two side ends of the movable plate 33; the first arc guide rail 311 is located on one side of the fixed base 4, providing a trajectory of arc motion for one side end of the movable plate 33, and the second arc guide rail 312 is located on the other side of the fixed base 4, providing a trajectory of arc motion for the other side end of the movable plate 33. In consideration of matching accuracy and load capacity, the first arc guide rail 311 and the second arc guide rail 312 can be made of high carbon steel or alloy steel. In terms of quality, by setting the first arc guide rail 311 and the second arc guide rail 312, the two side ends of the movable plate 33 cooperate with the first arc guide rail 311 and the second arc guide rail 312 respectively to achieve stable arc motion. The use of a double-guide rail support method can effectively improve the stability and accuracy of the movement of the movable plate 33, and avoid deflection or vibration caused by unilateral support. In actual applications, the two independent arc guide rails disperse the stress of the movable plate 33 during movement, reduce stress concentration, and extend the service life of the equipment. The curvature of the first arc guide rail 311 and the second arc guide rail 312 can be adjusted according to the specific data of the angular displacement micro-motion.

[0054] On this basis, the first arc guide rail 311 and the second arc guide rail 312 are concentric, and the first arc guide rail 311 and the second arc guide rail 312 are structurally symmetrical. The curvature, radius and shape of the two are the same, and they are distributed on both sides of the fixed seat 4. The symmetrical distribution enables the movable plate 33 to maintain balance and stability during movement.

[0055] In a preferred embodiment of the present invention, Figure 6As shown, the roller 32 includes a roller fixing plate 321 and a roller unit 322. The roller fixing plate 321 is fixedly set at the bottom end of the movable plate 33, and the roller units 322 are set on both sides of the movable plate 33 to match the track grooves on both sides of the arc guide rail 31. The roller units 322 roll in the track grooves of the arc guide rail 31 to provide support and guidance for the movable plate 33. The roller units 322 enable the movable plate 33 to move smoothly along the arc guide rail 31 to ensure the stability and accuracy of the movement. The roller unit 322 is used to achieve rolling friction. Compared with sliding friction, the roller unit 322 reduces the friction between the movable plate 33 and the arc guide rail 31, improves the efficiency of the movement, and extends the service life of the roller unit 322 and the arc guide rail 31. Exemplarily, the roller fixing plate 321 and the roller unit 322 can both be made of stainless steel. It should be noted that the shape and size of the track groove match the shape and size of the roller unit 322 to achieve a close fit. The surface of the track groove should be smooth and have a certain hardness to reduce friction and wear.

[0056] In a preferred embodiment of the present invention, Figure 7 As shown, the power source 1 includes a direct-drive motor 11, a transmission column 12, a bearing seat 13 and a bearing 14. The direct-drive motor 11 is connected to the transmission column 12. The transmission column 12 is passed through the inner ring of the bearing 14 and is connected to the rotation and linear motion component 2. The outer ring of the bearing 14 is fixed in the bearing seat 13. For example, the bearing 14 is a deep groove ball bearing, and two sets of deep groove ball bearings facing each other are nested in the bearing seat 13. Under the drive of the direct-drive motor 11, the movement of the transmission column 12 can be transmitted to the rotation and linear motion component 2, driving the component to achieve the established rotation and linear motion functions. Two sets of deep groove ball bearings facing each other are nested in the bearing seat 13, which can effectively withstand radial loads from different directions, reduce friction resistance, improve operation accuracy, and help ensure the smooth rotation of the transmission column 12 and the stability and reliability of the entire power transmission process.

[0057] In a preferred embodiment of the present invention, Figure 8 As shown, the angular displacement micro-drive mechanism also includes a mechanism fixing frame 6, and the fixing seat 4 is fixedly set on the mechanism fixing frame 6. The mechanism fixing frame 6 serves as a fixed base of the angular displacement micro-drive mechanism. Specifically, the mechanism fixing frame 6 includes a lateral vertical plate 61 and a bottom plate 62. The lateral vertical plate 61 is fixedly set at the bottom of the side end of the fixing seat 4, and the adjacent lateral vertical plates 61 are fixedly connected to each other. The bottom plate 62 is fixedly set between the adjacent lateral vertical plates 61. The coordinated setting of the lateral vertical plates 61 and the bottom plate 62 is used to enhance the stability of the mechanism fixing frame 6 and ensure that the micro-motion action of the angular displacement micro-drive mechanism can operate stably.

[0058] On this basis, the mechanism fixing frame 6 also includes a support plate 63, the bottom of the support plate 63 is fixed on the base plate 62, the side of the support plate 63 is fixed on the lateral vertical plate 61, and the top of the support plate 63 is fixed on the fixing seat 4. Through the setting of the support plate 63, the overall structure of the mechanism fixing frame 6 is more stable, and can effectively disperse and withstand forces from different directions, further ensuring that the angular displacement micro-drive mechanism remains stable during operation. The multi-point fixing design (bottom, side and top) of the support plate 63 also enhances the rigidity and reliability of the mechanism fixing frame 6, which is suitable for application scenarios with high precision and high stability of the angular displacement micro-drive mechanism.

[0059] In a preferred embodiment of the present invention, Figure 1 and Figure 2 As shown, the angular displacement micro-drive mechanism also includes a power source fixing frame 5, which is fixedly arranged at the bottom end of the fixing seat 4, and the power source 1 is fixedly arranged on the power source fixing frame 5; the power source fixing frame 5 is used to provide support and fixation for the power source 1. By fixing the power source 1 on the power source fixing frame 5, it can be ensured that the power source 1 remains stable during operation, avoiding displacement or tilt of the power source due to vibration or load changes, thereby ensuring the normal operation and movement accuracy of the entire angular displacement micro-drive mechanism.

[0060] In a preferred embodiment of the present invention, an annular cooling channel is provided on the fixing seat 4, which surrounds the power source 1. The inlet and outlet of the cooling channel are respectively connected to the external cooling medium circulation system through quick connectors to cool the power source 1.

[0061] The annular cooling channel is used to promptly remove the heat generated by the power source 1 during continuous operation. Specifically, the annular cooling channel can control the operating temperature of the power source 1 within 25°C ± 2°C (or the designed temperature zone), avoiding changes in winding resistance and magnetic steel performance caused by temperature rise, and ensuring constant output torque / speed; in addition, the power source 1 operates in a constant temperature state, which also suppresses the size drift of the machine base or bearing seat caused by thermal expansion, maintains the relative position accuracy between the rotary linear motion component 2 and the arc guide rail 31, and reduces angular displacement errors; the use of an annular flow channel "encirclement" rather than single-point cooling makes the temperature gradient of the power source 1 uniform, reducing the risk of asymmetric thermal deformation. For micro-angular displacement (arcsecond level) systems, thermally induced micron-level deformation can cause significant angular errors; continuous cooling can suppress this error source to the submicron level.

[0062] In a preferred embodiment of the present invention, the bottom surface of the fixed seat 4 is provided with a first positioning key groove and a second positioning key groove which are perpendicular to each other, and the width tolerance of the first positioning key groove and the second positioning key groove is h7. The first positioning key groove and the second positioning key groove are used to position with the external platform and limit the rotational freedom of the fixed seat 4 around the vertical axis.

[0063] The first positioning key slot and the second positioning key slot cooperate with the positioning key of the external platform to achieve high-precision positioning, which improves the installation accuracy and operation stability of the equipment, and is also convenient for maintenance and replacement. Limiting the rotational freedom around the vertical axis can effectively prevent the fixing seat 4 from rotating due to external force during operation, thereby improving the stability of the entire system.

[0064] In a preferred embodiment of the present invention, the projection of the center of gravity of the power source 1 on the horizontal plane falls on the intersection of the first positioning key groove and the second positioning key groove to reduce the overturning moment of the fixing seat 4.

[0065] The projection of the center of gravity of the power source 1 on the horizontal plane falls on the intersection of the first positioning keyway and the second positioning keyway. By reducing the overturning moment, the structural stability of the fixed seat 4 and the operating accuracy of the entire angular displacement micro-drive mechanism are improved. Aligning the center of gravity projection with the intersection of the keyways can reduce vibration and unbalanced torque during dynamic operation and improve the smooth operation of the system.

[0066] In a preferred embodiment of the present invention, the output shaft of the power source 1 is connected to the input end of the rotation and linear motion component 2 through an elastic coupling. The torsional stiffness of the elastic coupling is 50N·m / rad~200N·m / rad to isolate the vibration transmission of the axial movement of the power source 1 to the fixed seat 4.

[0067] The elastic coupling can effectively isolate the vibration caused by the axial movement of the power source 1, reduce the impact of the vibration on the fixing seat 4, and improve the operating accuracy and stability of the entire angular displacement micro-drive mechanism.

[0068] Example 2

[0069] The embodiment of the present invention further provides a linear array detection device, such as Figure 9As shown, it includes a comb collimator a, a detector b and the angular displacement micro-drive mechanism in Example 1. The comb collimator a and the detector b are both fixedly arranged on the movable plate 33, and the comb collimator a is arranged in front of the detection direction of the detector b; the linear array detection device is a device for optical imaging and ray detection. The comb collimator a is used to collimate the incident ray or light so that it propagates in a specific direction. Specifically, the comb collimator a can be composed of a plurality of small gaps. These gaps can perform spatial filtering on the ray and only allow the ray that meets a specific angle to pass through. The detector b is used to detect The rays or light passing through the comb collimator a are measured and converted into electrical signals. These electrical signals can generate images or data after processing. In specific applications, with the help of the angular displacement micro-motion drive mechanism in Example 1, the comb collimator a and the detector b perform rotational micro-motion at the same time. Through micro-motion, a larger area can be scanned or data can be collected more finely. Moreover, the target object can be more accurately aligned, thereby optimizing signal collection. When the detection device is micro-moved, the signal received by the pixel can be made more concentrated and accurate, reducing signal overlap and interference caused by the reduction in pixel size.

[0070] Example 3

[0071] The embodiment of the present invention further provides a high-energy industrial CT for detecting the internal structure and defects of a workpiece, such as Figure 10 As shown, the high-energy industrial CT includes a data acquisition and processing system and the linear array detection device in Example 2. The linear array detection device is connected to the data acquisition and processing system to send detected electrical signals; the data acquisition and processing system is used to receive the electrical signals sent by the linear array detection device, and process and analyze these signals to ultimately generate a three-dimensional image of the workpiece; the linear array detection device is used to receive rays passing through the workpiece, and convert them into electrical signals, and send them to the data acquisition and processing system. With the help of the linear array detection device in Example 2, an accurate three-dimensional image of the workpiece can be obtained.

[0072] It should be understood by those skilled in the art that the above embodiments are merely for the purpose of illustrating the present invention clearly, and are not intended to limit the scope of the present invention. For those skilled in the art, other changes or modifications may be made based on the above disclosure, and these changes or modifications are still within the scope of the present invention.

Claims

1. An angular displacement micro-drive mechanism for a linear array detection device, characterized in that: The invention comprises a power source (1), a rotation and linear motion component (2), an arc motion component (3) and a fixed seat (4); the power source (1) and the arc motion component (3) are both arranged on the fixed seat (4); the rotation and linear motion component (2) is arranged on the arc motion component (3); the rotation and linear motion component (2) is connected to the power source (1) to perform rotation and linear motion; the arc motion component (3) is connected to the rotation and linear motion component (2) to be driven by the rotation and linear motion to achieve angular displacement micro-motion.

2. The angular displacement fine-motion drive mechanism according to claim 1, characterized in that: An annular cooling channel is provided on the fixing seat (4), and the annular cooling channel surrounds the circumference of the power source (1). The inlet and outlet of the cooling channel are respectively connected to an external cooling medium circulation system through quick connectors to cool the power source (1).

3. The angular displacement fine-motion driving mechanism according to claim 1, characterized in that: The bottom surface of the fixing seat (4) is provided with a first positioning key groove and a second positioning key groove which are perpendicular to each other, the width tolerance of the first positioning key groove and the second positioning key groove is h7, and the first positioning key groove and the second positioning key groove are used for positioning with the external platform and limiting the rotational freedom of the fixing seat (4) around the vertical axis.

4. The angular displacement fine-motion driving mechanism according to claim 3, characterized in that: The projection of the center of gravity of the power source (1) on the horizontal plane falls on the intersection of the first positioning key groove and the second positioning key groove to reduce the overturning moment of the fixing seat (4).

5. The angular displacement fine-motion driving mechanism according to claim 1, characterized in that: The power source (1) comprises a direct drive motor (11), a transmission column (12) and a bearing seat (13), wherein the direct drive motor (11) is connected to the transmission column (12), the transmission column (12) is connected to the bearing seat (13), and the inner ring of the bearing seat (13) is connected to the rotary and linear motion component (2).

6. The angular displacement fine-motion driving mechanism according to claim 1, characterized in that: The angular displacement micro-drive mechanism further comprises a mechanism fixing frame (6), and the fixing seat (4) is fixedly arranged on the mechanism fixing frame (6).

7. The angular displacement fine-motion driving mechanism according to claim 1, characterized in that: The angular displacement micro-drive mechanism further comprises a power source fixing frame (5), wherein the power source fixing frame (5) is fixedly arranged at the bottom end of the fixing seat (4), and the power source (1) is fixedly arranged on the power source fixing frame (5).

8. The angular displacement fine-motion driving mechanism according to claim 3, characterized in that: The output shaft of the power source (1) is connected to the input end of the rotation and linear motion component (2) via an elastic coupling to isolate the vibration transmission of the axial movement of the power source (1) to the fixed seat (4).

9. A linear array detection device, characterized in that: The invention comprises a comb-shaped collimator (a), a detector (b) and an angular displacement micro-drive mechanism according to any one of claims 1 to 8, wherein the comb-shaped collimator and the detector (b) are both fixedly arranged on the arc motion component (3), and the comb-shaped collimator (a) is arranged in front of the detection direction of the detector (b).

10. A high-energy industrial CT for detecting the internal structure and defects of a workpiece, characterized in that: It comprises a data acquisition and processing system and the linear array detection device according to claim 9, wherein the linear array detection device is connected to the data acquisition and processing system to send the detected electrical signals.

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