Microfluidic devices and methods of making the same

Abstract

The application provides a microfluidic device and a preparation method thereof. The microfluidic device comprises a microfluidic substrate and a control substrate. The microfluidic substrate comprises a first substrate and a plurality of electrode pairs. The control substrate comprises a second substrate, a control circuit layer and a plurality of contact pairs. The first surface of the first substrate has a plurality of opening regions, each of which has two accommodation grooves arranged at intervals, and the two accommodation grooves are communicated through a microfluid channel on the common side wall. The plurality of electrode pairs are arranged on the first substrate and correspond to the opening regions. The control circuit layer is arranged on the second substrate. The plurality of contact pairs are arranged on the second substrate and are electrically connected with the control circuit layer. The control substrate is attached to the microfluidic substrate in use, the plurality of contact pairs are electrically connected with the plurality of electrode pairs, and the control circuit layer is used for applying voltage to each electrode pair. The microfluidic device realizes parallel processing of multiple samples, improves the detection efficiency, and can also reduce the replacement cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of microfluidic control, and in particular to a microfluidic device and a preparation method thereof. BACKGROUND

[0002] As a platform integrating various advanced technologies (such as physics, chemistry and biotechnology), microfluidic chips have shown wide application prospects in the fields of DeoxyriboNucleic Acid (DNA) manipulation, gene sequencing and drug targeted therapy.

[0003] Currently, electric field force driving is one of the main methods for manipulating DNA molecules. This method takes advantage of the negative charge of DNA molecules in general biological environments. By loading voltages of different electricities at both ends of a micron-sized quartz tube channel, an electric field can be constructed to manipulate DNA molecules to achieve their movement in the microchannel. By using this principle to construct a microfluidic chip, the separation and detection of DNA molecules can be achieved.

[0004] However, the existing technology has significant limitations in handling multiple DNA molecules that need to be loaded with different electric fields at the same time, and cannot be batch processed, resulting in low efficiency. SUMMARY

[0005] The present application provides a microfluidic device and a preparation method thereof, aiming to solve the problem of low efficiency of batch processing DNA molecules by existing microfluidic chips.

[0006] To solve the above technical problems, one technical solution adopted by the present application is to provide a microfluidic device, comprising:

[0007] A first substrate, comprising a first surface; the first surface has a plurality of opening regions arranged at intervals, each of the opening regions has two accommodation grooves arranged at intervals along a first direction, and the common side wall of the two accommodation grooves has a micro flow channel, and the two accommodation grooves are communicated through the micro flow channel;

[0008] A plurality of electrode pairs are arranged on the first substrate; each of the electrode pairs corresponds to one of the opening regions; the electrode pair comprises two driving electrodes, and the two driving electrodes are arranged at intervals on opposite sides of the micro flow channel along the first direction;

[0009] A control circuit layer is arranged on the first substrate and electrically connected to the plurality of electrode pairs; wherein the control circuit layer is used to apply a voltage to each of the electrode pairs.

[0010] In an embodiment, the first surface has a plurality of recesses, each of the driving electrodes is embedded in one of the recesses; and / or

[0011] The control substrate is attached to the first surface or the second surface of the microfluidic substrate in use.

[0012] In an embodiment, the first surface has a plurality of recesses, each of the driving electrodes is embedded in one of the recesses; and / or

[0013] The second surface has a plurality of recesses, each of the driving electrodes is embedded in one of the recesses.

[0014] In an embodiment, the top surface of the driving electrode is flush with the first surface or protrudes from the first surface, and the bottom surface of the driving electrode is lower than the bottom surface of the microfluidic channel; and / or

[0015] The top surface of the driving electrode is higher than the top surface of the microfluidic channel, and the bottom surface of the driving electrode is flush with the second surface or protrudes from the second surface.

[0016] In an embodiment, the first substrate has a second surface opposite to the first surface; the first substrate has a plurality of through holes penetrating the first substrate along the thickness direction; each of the driving electrodes is embedded in one of the through holes.

[0017] The top surface of the driving electrode is flush with the first surface or protrudes from the first surface, and the bottom surface of the driving electrode is flush with the second surface or protrudes from the second surface; the control substrate is attached to the first surface or the second surface of the microfluidic substrate in use.

[0018] In an embodiment, the side wall of the recess has a limiting portion; the limiting portion extends from the side wall along a direction parallel to the first substrate towards the axis of the recess.

[0019] In an embodiment, the driving electrode protrudes from the first surface and extends to the first surface along a direction parallel to the first substrate; and / or the driving electrode protrudes from the second surface and extends to the second surface along a direction parallel to the first substrate.

[0020] In an embodiment, the control circuit layer has a hollow portion corresponding to the microfluidic channel, and the second substrate is a transparent substrate.

[0021] The control substrate has a hollow portion corresponding to the microfluidic channel.

[0022] In an embodiment, the electrode pair includes a positive driving electrode and a negative driving electrode, and the control circuit layer includes:

[0023] a plurality of gate scanning lines;

[0024] a plurality of data lines crossing the gate scanning lines;

[0025] a plurality of thin film transistors, and each positive driving electrode is electrically connected to the data line through at least one thin film transistor;

[0026] a common electrode line, and all negative driving electrodes are electrically connected to the common electrode line.

[0027] To solve the above technical problems, another technical solution adopted by the present application is to provide a preparation method of a microfluidic device, comprising:

[0028] providing a first substrate, wherein the first substrate includes a first surface having a plurality of open regions arranged at intervals;

[0029] opening two accommodation grooves arranged at intervals along a first direction in each open region, and forming a microfluidic channel on the common side wall of the two accommodation grooves, so that the two accommodation grooves are communicated through the microfluidic channel;

[0030] fixing a plurality of electrode pairs on the first substrate, and making each electrode pair correspond to one open region to form a microfluidic substrate, wherein the electrode pair includes two driving electrodes, and the two driving electrodes are arranged at intervals on opposite sides of the microfluidic channel along the first direction;

[0031] providing a second substrate, and manufacturing a control circuit layer on the second substrate;

[0032] manufacturing a plurality of contact pairs electrically connected to the control circuit layer on the second substrate to form a control substrate.

[0033] The beneficial effects of the embodiments of the present application are as follows: Different from the prior art, the present application provides a microfluidic device and a preparation method thereof. The microfluidic device comprises a microfluidic substrate and a control substrate. The microfluidic substrate comprises a first substrate and a plurality of electrode pairs. The control substrate comprises a second substrate, a control circuit layer, and a plurality of contact pairs. The first substrate comprises a first surface. The first surface has a plurality of opening regions arranged at intervals. Each opening region has two accommodation grooves arranged at intervals along a first direction. The common sidewall of the two accommodation grooves has a microfluid channel. The two accommodation grooves are communicated through the microfluid channel. The plurality of electrode pairs are arranged on the first substrate. Each electrode pair corresponds to an opening region. The electrode pair comprises two driving electrodes arranged at intervals on opposite sides of the microfluid channel along the first direction. The control circuit layer is arranged on the second substrate. The plurality of contact pairs are arranged on the second substrate and electrically connected with the control circuit layer. The contact pair comprises two connection contacts. In use, the control substrate is attached to the microfluidic substrate. The plurality of contact pairs are electrically connected with the plurality of electrode pairs. The control circuit layer is used to apply voltage to each electrode pair. By integrating a plurality of independent opening regions and electrode pairs on a single first substrate, each opening region and its corresponding electrode pair can be independently operated to flexibly configure different test conditions. The microfluidic device can process multiple DNA molecules or biological samples in parallel, thereby significantly improving the detection efficiency. Meanwhile, by arranging the control circuit layer and the contact pair on the second substrate independent of the first substrate, the microfluidic substrate can be replaced alone when needed, thereby reducing the replacement cost. Or, the control substrate can be replaced alone when needed, thereby reducing the replacement cost. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1 Structure schematic diagram of the microfluidic device provided by the first embodiment of the present application;

[0035] Figure 2 For Figure 1 Partial enlarged view of A in FIG.

[0036] Figure 3 For Figure 2 Structure along the line A-A of the structure shown in FIG.

[0037] Figure 4 For Figure 2 Structure schematic diagram of the thin film transistor in the structure shown in FIG.

[0038] Figure 5 Cross-sectional view along the line A-A of the microfluidic device provided by the second embodiment of the present application;

[0039] Figure 6 Cross-sectional view along the line A-A of the microfluidic device provided by the third embodiment of the present application;

[0040] Figure 7 A cross-sectional view of the microfluidic device along the line A-A according to a fourth embodiment of the present application is shown in FIG. 4;

[0041] Figure 8 A cross-sectional view of the microfluidic device along the line A-A according to a fifth embodiment of the present application is shown in FIG. 5;

[0042] Figure 9 A cross-sectional view of the microfluidic device along the line A-A according to a sixth embodiment of the present application is shown in FIG. 6;

[0043] Figure 10 A cross-sectional view of the microfluidic device along the line A-A according to a seventh embodiment of the present application is shown in FIG. 7;

[0044] Figure 11 A cross-sectional view of the microfluidic device along the line A-A according to an eighth embodiment of the present application is shown in FIG. 8;

[0045] Figure 12a A cross-sectional view of the microfluidic device along the line A-A according to a ninth embodiment of the present application is shown in FIG. 9;

[0046] Figure 12b A cross-sectional view of the microfluidic device along the line A-A according to another embodiment of the present application is shown in FIG. 10;

[0047] Figure 12c A cross-sectional view of the microfluidic device along the line A-A according to yet another embodiment of the present application is shown in FIG. 11;

[0048] Figure 13 A cross-sectional view of the microfluidic device along the line A-A according to a tenth embodiment of the present application is shown in FIG. 12;

[0049] Figure 14 A cross-sectional view of the microfluidic device along the line A-A according to an eleventh embodiment of the present application is shown in FIG. 13;

[0050] Figure 15 A cross-sectional view of the microfluidic device along the line A-A according to a twelfth embodiment of the present application is shown in FIG. 14;

[0051] Figure 16 A cross-sectional view of the microfluidic device along the line A-A according to a thirteenth embodiment of the present application is shown in FIG. 15;

[0052] Figure 17 A cross-sectional view of the microfluidic device along the line A-A according to a fourteenth embodiment of the present application is shown in FIG. 16;

[0053] Figure 18 A flow chart of the method for preparing the microfluidic device according to an embodiment of the present application is shown in FIG. 17.

[0054] BRIEF DESCRIPTION OF THE DRAWINGS

[0055] 100-microfluidic substrate; 200-control substrate; 1-first substrate; 2-pair of electrodes; 3-control circuit layer; 4-second substrate; 5-pair of contacts; 10-first surface; 20-second surface; 30-third surface; 40-fourth surface; 11-opening region; 12-non-opening region; 13-first groove; 14-second groove; 15-via hole; 16-limiting portion; 21-driving electrode; 31-hollow portion; 32-gate scanning line; 33-data line; 34-thin film transistor; 35-common electrode line; 41-via hole; 51-connection contact; 111-receiving groove; 112-microfluidic channel; 211-positive driving electrode; 212-negative driving electrode; 341-gate; 342-source; 343-drain; 344-insulating layer; 345-doped semiconductor layer; 346-protective layer; 511-positive connection contact; 512-negative connection contact. DETAILED DESCRIPTION

[0056] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0057] The terms "first", "second", "third" in the present application are only for descriptive purpose, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second", "third" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise explicitly and specifically limited. All directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative position relationship, movement condition, etc. between components in a certain posture (as shown in the drawings), and if the certain posture changes, the directional indications also change accordingly. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units not listed, or optionally includes other steps or units inherent to the process, method, product or device.

[0058] Reference to an“embodiment” herein means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of one another. As will be apparent to those of ordinary skill in the art, embodiments described herein can be combined with other embodiments.

[0059] The application will be described in detail below with reference to the accompanying drawings and embodiments.

[0060] Reference Figures 1-3 , Figure 1 A schematic structural diagram of a microfluidic device provided for the first embodiment of the application is shown in FIG. 1. Figure 2 For Figure 1 A partial enlarged view of position A in FIG. 1. Figure 3 For Figure 2 A cross-sectional view of the structure shown in FIG. 1 along line A-A. The microfluidic device can be used to separate single DNA molecules in a DNA molecule group for detection of the DNA molecules. Specifically, as shown in FIG. 2, the microfluidic device can include a first substrate base plate 1, a plurality of electrode pairs 2, and a control circuit layer 3. Figure 3

[0061] The first substrate base plate 1 serves as the main support structure of the microfluidic device and can be made of quartz glass. Specifically, the first substrate base plate 1 includes a first surface 10, i.e. Figure 3 the top surface of the first substrate base plate 1, for arranging opening regions 11 and other components. The first surface 10 has a plurality of opening regions 11 arranged at intervals, for loading and processing samples; the opening regions 11 are recessed downward from the first surface 10 of the first substrate base plate 1 to form groove-shaped opening regions 11.

[0062] Each opening region 11 has two accommodation grooves 111 arranged at intervals along a first direction X for loading liquids and samples; the first direction X is perpendicular to the thickness direction Y of the first substrate base plate 1. The two accommodation grooves 111 have a common side wall, and the common side wall has a microflow channel 112, the two accommodation grooves 111 are connected through the microflow channel 112, and only a single DNA molecule in the sample can pass through the microflow channel 112 to facilitate the user to observe the DNA molecule through the microflow channel 112. This design enables each opening region 11 to independently accommodate and process different samples or reactions, while achieving sample flow and observation through the microflow channel 112.

[0063] One of the two accommodation grooves 111 is an inlet groove for loading a DNA molecule group or other sample to be detected; the other is an outlet groove for accommodating a single DNA molecule or other observed sample flowing out of the microflow channel 112. ​

[0064] Multiple electrode pairs 2 are disposed on and fixedly connected to the first substrate 1 to enable the electrode pairs 2 to apply a stable electric field; and each electrode pair 2 is disposed corresponding to an opening region 11 to apply an electric field to the corresponding opening region 11 to manipulate the movement of DNA molecules or other charged particles. The electrode pair 2 includes two driving electrodes 21, which are spaced apart along a first direction X on opposite sides of the microfluidic channel 112 so that DNA molecules or other charged particles can pass through the microfluidic channel 112 along the first direction X.

[0065] A control circuit layer 3 is disposed on the first substrate 1 and electrically connected to multiple electrode pairs 2. The control circuit layer 3 applies a voltage to each electrode pair 2 to control DNA molecules suspended in liquid within the receiving tank 111 to enter the microfluidic channel 112 from the inlet tank for detection by the detection device. Simultaneously, the control circuit layer 3 can also coordinate and control the voltage applied to each electrode pair 2, thereby achieving simultaneous independent control of multiple samples.

[0066] The control circuit layer 3 is fixedly connected to the first substrate 1 to stably transmit voltage signals to each electrode pair 2. Specifically, the control circuit layer 3 can be directly fabricated on the first substrate 1, or the control circuit layer 3 can be fabricated on a substrate first, and then the substrate is fixed to the first substrate 1.

[0067] Thus, by integrating multiple independent opening regions 11 and electrode pairs 2 on a single first substrate 1, each opening region 11 and its corresponding electrode pair 2 can operate independently to flexibly configure different experimental conditions, enabling the microfluidic device to process multiple DNA molecules or biological samples in parallel, significantly improving detection efficiency.

[0068] like Figure 3 As shown, in a specific embodiment, multiple electrode pairs 2 and control circuit layer 3 can all be disposed on the first surface 10 of the first substrate 1 to simplify the structure of the microfluidic device and improve manufacturing efficiency. It can be understood that in this embodiment, the first surface 10 is a primary mounting surface of the microfluidic device. The fact that multiple electrode pairs 2 and control circuit layer 3 are all disposed on the first surface 10 means that these components can be centrally arranged, facilitating manufacturing and assembly. Specifically, multiple electrode pairs 2 and control circuit layer 3 are all disposed in the non-opening area 12 of the first surface 10 to avoid obstructing the opening area 11.

[0069] Specifically, the two driving electrodes 21 are arranged on opposite sides of the two accommodating grooves 111 along the first direction X to ensure consistency and stability of the electric field applied by the electrode pair 2, which helps to achieve uniform electric field distribution. The control circuit layer 3 has a hollow part 31 corresponding to the opening area 11 to facilitate observation of the DNA molecules through the micro flow channel 112. Specifically, the control circuit layer 3 can form the hollow part 31 through an etching process.

[0070] In specific embodiments, the common side wall refers to the common side wall between the two accommodating grooves 111 in the same opening area 11, and the micro groove is a shallow trench structure formed on the common side wall, the depth and width of which can be designed and processed according to actual needs. The micro groove is embedded with a micro pipeline, which is a small pipeline embedded in the micro groove for carrying and controlling the flow of microfluids. The micro pipeline serves as the micro flow channel 112 to simulate blood vessels, facilitating the detection of DNA molecules under similar conditions. Specifically, the micro pipeline can be a micron-level quartz capillary tube.

[0071] Further, as shown in Figure 3 , the micro pipeline can be arranged spaced apart from the bottom wall of the accommodating groove 111, and one end of the micro pipeline protrudes from the side of the common side wall to extend into the accommodating groove 111. It can be understood that the DNA molecules are usually in a suspended state in the liquid in the accommodating groove 111. By arranging the micro pipeline spaced apart from the bottom wall of the accommodating groove 111, the micro pipeline is kept at a distance from the bottom wall, which facilitates the DNA molecules suspended in the accommodating groove 111 to enter the micro pipeline.

[0072] By suspending the end of the micro pipeline close to the liquid inlet groove, the DNA molecules can directly enter the micro pipeline, reducing the probability of contact with the common side wall before entering the micro pipeline, and preventing the glass burrs on the surface of the common side wall from damaging the DNA molecules. Preferably, both ends of the micro pipeline protrude from the side edges of the common side wall to facilitate the installation and fixation of the micro pipeline.

[0073] Of course, in other embodiments, the micro flow channel 112 can also be a micro groove or a micro via arranged on the common side wall to simulate blood vessels, so that the DNA molecules can directly pass through the micro groove or micro via on the common side wall, improving the space utilization and structural compactness of the microfluidic device.

[0074] As shown in Figure 3 , the electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212. One of the two driving electrodes 21 is the positive driving electrode 211, and the other is the negative driving electrode 212; and the positive driving electrode 211 is arranged on the side close to the liquid outlet groove, and the negative driving electrode 212 is arranged on the side close to the liquid inlet groove, so that the DNA molecules can pass through the micro flow channel 112 from the liquid inlet groove along the first direction X into the liquid outlet groove.

[0075] Referring to Figure 1 with Figure 2 In specific embodiments, the control circuit layer 3 can include a plurality of gate scanning lines 32, a plurality of data lines 33, a plurality of thin film transistors 34, and a common electrode line 35. Among them, the plurality of gate scanning lines 32 and the plurality of data lines 33 are arranged in a cross manner; each positive electrode driving electrode 211 is electrically connected to the data line 33 through at least one thin film transistor 34, and all the negative electrode driving electrodes 212 are electrically connected to the common electrode line 35.

[0076] In this way, by using the plurality of gate scanning lines 32 and the data lines 33, independent control of each opening area 11 can be achieved; the thin film transistor 34 as a switching element can efficiently control the current flow, thereby improving the response speed and accuracy of the system. All the negative electrode driving electrodes 212 are connected to the common electrode line 35, which simplifies the circuit design, reduces the number of lines, reduces the manufacturing cost, and improves the consistency and reliability of the system.

[0077] Specifically, as shown in Figure 1 , the plurality of opening areas 11 are arranged in a two-dimensional array on the first substrate 1, and at least one thin film transistor 34 is arranged corresponding to each opening area 11; the gate scanning line 32 is used to open a specific row of thin film transistors 34 for operation, and the data line 33 is used to transmit a voltage signal to a specific column of thin film transistors 34 to generate an electric field for a specific electrode pair 2.

[0078] As shown in Figure 2 , the thin film transistor 34 includes a gate 341, a source 342, and a drain 343. Among them, the gate scanning line 32 is electrically connected to the gate 341 of the thin film transistor 34, which is used to open or close the thin film transistor 34; the data line 33 is electrically connected to the source 342 of the thin film transistor 34, and the drain 343 of the thin film transistor 34 is electrically connected to the positive electrode driving electrode 211, so that when the thin film transistor 34 is opened, the voltage signal is transmitted to the positive electrode driving electrode 211 through the data line 33, so that the positive electrode driving electrode 211 and the negative electrode driving electrode 212 generate an electric field.

[0079] Among them, the input voltage of the scanning signal line can be 15V; the voltage at one end of the negative electrode driving electrode 212 is 0V, and the voltage at one end of the positive electrode driving electrode 211 can be 0-55V, so as to avoid the situation that a large amount of bubbles is generated by electrolysis of water molecules in the solution. Specifically, different sizes and frequencies of voltage can be given to the data line 33 according to the needs of the market; for example, the voltage at one end of the positive electrode driving electrode 211 can be any value in 5V, 10V, 20V, 40V, and 55V.

[0080] As shown in Figure 1As shown, all the data lines 33, the gate scanning lines 32 and the common electrode lines 35 are arranged on one side of the first substrate 1 and connected with an external control chip to control the operation of the microfluidic device.

[0081] In combination Figure 2 With Figure 4 , Figure 4 For Figure 2 A structural schematic diagram of the thin film transistor in the structure shown. In specific embodiments, the gate 341 of the thin film transistor 34 is arranged on the first substrate 1 and arranged in the same layer and electrically connected with the gate scanning line 32, and in addition, the common electrode line 35 can also be arranged in the same layer with the gate scanning line 32. The insulating layer 344 covers the gate 341 and overlaps on the first substrate 1, the doped semiconductor layer 345 is arranged on the insulating layer 344 and corresponds to the gate 341, the source 342 and the drain 343 are arranged in the same layer on the insulating layer 344 and respectively cover one side surface of the doped semiconductor layer 345, and the source 342 and the drain 343 are arranged on the doped semiconductor layer 345. The protective layer 346 covers the source 342, the drain 343 and the surface of the doped semiconductor layer 345 which is not covered.

[0082] Referring to Figure 5 , Figure 5 A cross-sectional view of the microfluidic device provided by the second embodiment of the present application along the line A-A. The microfluidic device provided by the second embodiment of the present application is basically the same as the microfluidic device provided by the first embodiment, and the difference lies in that in the second embodiment of the present application, the plurality of electrode pairs 2 and the control circuit layer 3 are arranged on the second surface 20 of the first substrate 1; wherein the second surface 20 is arranged opposite to the first surface 10, that is, the second surface 20 is Figure 4 the bottom surface of the first substrate 1 in the first embodiment to avoid the case that the preparation of the electrode pairs 2 and the control circuit layer 3 causes pollution to the accommodation groove 111 of the first surface 10, resulting in adverse effects on the detection results.

[0083] In specific embodiments, the two driving electrodes 21 can be arranged on the opposite sides of the two accommodation grooves 111 along the first direction X so that the two accommodation grooves are located as much as possible between the electric fields generated by the two driving electrodes 21, facilitating the movement of all DNA molecules in the liquid inlet groove to the microfluidic channel 112 under the action of the electric field. Specifically, the two driving electrodes 21 are arranged at positions corresponding to the non-opening area 12 of the second surface 20.

[0084] Referring to Figure 6 , Figure 6The microfluidic device provided by the third embodiment of the present application is a sectional view along the line A-A. The microfluidic device provided by the third embodiment of the present application has substantially the same structure as the microfluidic device provided by the second embodiment of the present application, and the difference lies in that, in the third embodiment of the present application, the two driving electrodes 21 are arranged on the bottom walls of the two accommodating grooves 111, so as to reduce the distance between the two driving electrodes 21, thereby making the electric field between the two driving electrodes 21 stronger, the moving speed of the DNA molecules faster, and the detection reaction time of the microfluidic device shorter.

[0085] Specifically, the anode driving electrode 211 of the two driving electrodes 21 is arranged on the bottom wall corresponding to the outlet groove, and the cathode driving electrode 212 is arranged on the bottom wall corresponding to the inlet groove.

[0086] Referring to Figure 7 , Figure 7 The microfluidic device provided by the fourth embodiment of the present application is a sectional view along the line A-A. The microfluidic device provided by the fourth embodiment of the present application has substantially the same structure as the microfluidic device provided by the first embodiment of the present application, and the difference lies in that, in the fourth embodiment of the present application, the first surface 10 further has a plurality of first grooves 13, and each driving electrode 21 is embedded in one first groove 13, so that the electric field generated by the two driving electrodes 21 has a greater force on the DNA molecules, so that the DNA molecules can pass through the microfluidic channel 112 faster, thereby improving the detection reaction time of the microfluidic device. In addition, arranging the driving electrodes 21 in the first grooves 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0087] Specifically, the first grooves 13 are arranged in the non-opening area 12 of the first surface 10 and extend from the first surface 10 to the second surface 20. The top surface of the driving electrode 21 arranged in the first groove 13 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top surface and the bottom surface of the driving electrode 21, that is, the microfluidic channel 112 is located in the opposite area of the two driving electrodes 21. It can be understood that the electric field lines in the opposite area of the two driving electrodes 21 are more dense, the electric field strength is stronger, and the force on the DNA molecules is greater.

[0088] Referring to Figure 8 , Figure 8The microfluidic device provided by the fifth embodiment of the present application is a sectional view along the line A-A. The microfluidic device provided by the fifth embodiment of the present application has substantially the same structure as the microfluidic device provided by the fourth embodiment of the present application, and the difference lies in that, in the fifth embodiment of the present application, the first substrate 1 further comprises a second surface 20 opposite to the first surface 10, and the control circuit layer 3 is arranged on the second surface 20 of the first substrate 1. The second surface 20 further comprises a plurality of second grooves 14, and each driving electrode 21 is embedded in one second groove 14, so that the effect of the electric field on the DNA molecules is greater, and at the same time, the preparation of the electrode pair 2 and the control circuit layer 3 avoids the pollution of the accommodation groove 111 of the first surface 10, thereby avoiding the adverse effects on the detection results.

[0089] Specifically, the second grooves 14 are arranged at positions corresponding to the non-opening regions 12 of the second surface 20 and extend from the second surface 20 to the first surface 10. The top surface of the driving electrode 21 arranged in the second groove 14 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top surface and the bottom surface of the driving electrode 21, that is, the microfluidic channel 112 is located in the opposite region of the two driving electrodes 21.

[0090] Referring to Figure 9 , Figure 9 The microfluidic device provided by the sixth embodiment of the present application is a sectional view along the line A-A. The microfluidic device provided by the sixth embodiment of the present application has substantially the same structure as the microfluidic device provided by the first embodiment of the present application, and the difference lies in that, in the sixth embodiment of the present application, the microfluidic device comprises a microfluidic substrate 100 and a control substrate 200. The microfluidic substrate 100 can comprise a first substrate 1 and a plurality of electrode pairs 2, and the control substrate 200 can comprise a second substrate 4, a control circuit layer 3 and a plurality of contact pairs 5.

[0091] The first substrate 1 comprises a first surface 10, and the first surface 10 has a plurality of opening regions 11 arranged at intervals, for loading and processing samples. The opening region 11 is recessed downward from the first surface 10 of the first substrate 1 to form a groove-shaped opening region 11.

[0092] Each of the opening regions 11 has two accommodation grooves 111 arranged at intervals along the first direction X for loading liquid and samples. The two accommodation grooves 111 have a common side wall, and the common side wall has a micro flow channel 112, the two accommodation grooves 111 are communicated through the micro flow channel 112, and only a single DNA molecule in the sample can pass through the micro flow channel 112, so that the user can observe the DNA molecule through the micro flow channel 112. This design enables each opening region 11 to independently accommodate and process different samples or reactions, while achieving sample flow and observation through the micro flow channel 112.

[0093] One of the two accommodation grooves 111 is an inlet groove for loading DNA molecule groups or other samples to be detected; the other is an outlet groove for accommodating single DNA molecules or other observed samples flowing out of the micro flow channel 112.

[0094] A plurality of electrode pairs 2 are arranged on the first substrate 1 and fixedly connected with the first substrate 1, so that the electrode pairs 2 can exert a stable electric field; and each electrode pair 2 corresponds to an opening region 11 to exert an electric field on the corresponding opening region 11 to manipulate the movement of DNA molecules or other charged particles. The electrode pair 2 includes two driving electrodes 21 arranged at intervals on opposite sides of the micro flow channel 112 along the first direction X, so that the DNA molecules or other charged particles can pass through the micro flow channel 112 along the first direction X.

[0095] The second substrate 4 can also be quartz glass. The control circuit layer 3 is arranged on the second substrate 4 and fixedly connected with the second substrate 4 to stabilize the transmission of voltage signals. Specifically, the control circuit layer 3 can be directly prepared on the second substrate 4, or the control circuit layer 3 can be first prepared on a substrate, and then the substrate is fixed on the second substrate 4.

[0096] A plurality of contact pairs 5 are arranged on the second substrate 4 and electrically connected with the control circuit layer 3; the contact pair 5 includes two connection contacts 51, and the two connection contacts 51 correspond to the two driving electrodes 21 respectively. Specifically, the connection contact 51 can be arranged on the surface of the control circuit layer 3 away from the second substrate 4. Or the control circuit layer 3 and the connection contact 51 can be arranged on different surfaces of the second substrate 4, and they are electrically connected through a via hole to avoid the control circuit layer 3 being corroded by the evaporated liquid; in addition, arranging the connection contact 51 directly on the bottom surface of the second substrate 4 can make the bottom surface of the second substrate 4 more flat towards the bottom surface of the first substrate 1, so that the bottom surface of the second substrate 4 and the surface of the first substrate 1 can be more easily attached, without pressing the control circuit layer 3.

[0097] The control substrate 200 is attached to the microfluidic substrate 100 in use, the plurality of contact pairs 5 are electrically connected with the plurality of electrode pairs 2, and the control circuit layer 3 is used to apply a voltage to each electrode pair 2 to control the DNA molecules suspended in the liquid in the accommodation groove 111 to enter the microfluidic channel 112 from the liquid inlet groove for detection by the detection device. At the same time, the control circuit layer 3 can also coordinate and control the voltage applied by each electrode pair 2, thereby realizing the simultaneous independent control of multiple samples.

[0098] In this way, by integrating a plurality of independent opening regions 11 and electrode pairs 2 on a single first substrate 1, each opening region 11 and its corresponding electrode pair 2 can be independently operated to flexibly configure different test conditions, thereby realizing parallel processing of multiple DNA molecules or biological samples by the microfluidic device and significantly improving detection efficiency. At the same time, by arranging the control circuit layer 3 and the contact pairs 5 on the second substrate 4 independent of the first substrate 1, the microfluidic substrate 100 can be replaced alone when it needs to be replaced, thereby reducing replacement costs; or the control substrate 200 can be replaced alone when it needs to be replaced, thereby reducing replacement costs.

[0099] As shown in FIG. 1, Figure 9 In specific embodiments, the plurality of electrode pairs 2 can be arranged on the non-opening region 12 of the first surface 10 of the first substrate 1 to avoid blocking the opening region 11. The two driving electrodes 21 can be arranged on the opposite sides of the two accommodation grooves 111 along the first direction X to ensure the consistency and stability of the electric field applied by the electrode pairs 2, which helps to realize uniform electric field distribution.

[0100] The control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100 in use, so that the electrode pairs 2 of the first surface 10 are in contact with the corresponding contact pairs 5 on the control substrate 200, and the control circuit layer 3 can apply a voltage to the electrode pairs 2.

[0101] In specific embodiments, the control circuit layer 3 has a hollow part 31 corresponding to the microfluidic channel 112, and the second substrate 4 is a transparent substrate, so that the microfluidic device has higher transparency and observability, and the user can observe the DNA molecules in the microfluidic channel 112 from the top of the microfluidic device through the hollow part 31 and the corresponding partially transparent substrate. Specifically, the control circuit layer 3 can form the hollow part 31 by etching process. In other embodiments, the DNA molecules in the microfluidic channel 112 can also be observed from the bottom of the microfluidic device.

[0102] Of course, in some embodiments, the control substrate 200 can also have a hollow part 31 corresponding to the microfluidic channel 112 to further improve the optical transmittance and facilitate real-time monitoring of the state of the microfluidic channel 112.

[0103] like Figure 9 As shown, in a specific embodiment, the first surface 10 also has a plurality of first grooves 13, and each driving electrode 21 is embedded in one of the first grooves 13. This makes the electric field generated by the two driving electrodes 21 exert a greater force on the DNA molecules, enabling the DNA molecules to pass through the microfluidic channel 112 more quickly and improving the detection response time of the microfluidic device. In addition, placing the driving electrodes 21 in the first grooves 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0104] Specifically, the first groove 13 is disposed in the non-opening area 12 of the first surface 10 and extends from the first surface 10 to the bottom. The top surface of the driving electrode 21 is flush with or protrudes from the first surface 10 so that when the control substrate 200 and the microfluidic substrate 100 are bonded, the connection contact point 51 on the control substrate 200 can contact and be electrically connected with the driving electrode 21.

[0105] Furthermore, the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top and bottom surfaces of the driving electrode 21, that is, the microfluidic channel 112 is located in the area directly opposite the two driving electrodes 21, so as to enhance the force of the electric field on the DNA molecules.

[0106] In a specific embodiment, electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212, and correspondingly, contact pair 5 includes a positive electrode connection contact 511 and a negative electrode connection contact 512.

[0107] Specifically, in combination Figure 1 , Figure 2 and Figure 9 The control circuit layer 3 may include multiple gate scan lines 32, multiple data lines 33, multiple thin-film transistors 34, and a common electrode line 35; wherein the multiple gate scan lines 32 and multiple data lines 33 are arranged in an interleaved manner. Each positive electrode contact 511 is electrically connected to the data line 33 through at least one thin-film transistor 34. Specifically, the positive electrode contact 511 is electrically connected to the drain 343 of the thin-film transistor 34 so that when the thin-film transistor 34 is turned on, a voltage signal is transmitted to the positive electrode contact 511 through the data line 33. The positive electrode contact 511 is used to electrically connect to the positive electrode driving electrode 211, and when the control substrate 200 is attached to the microfluidic substrate 100, the positive electrode driving electrode 211 contacts and is electrically connected to the positive electrode contact 511.

[0108] All the negative connection contacts 512 are electrically connected to the common electrode line 35; the negative connection contacts 512 are used to electrically connect with the negative driving electrodes 212, and when the control substrate 200 is attached to the microfluidic substrate 100, the negative driving electrodes 212 are in contact with and electrically connected to the negative connection contacts 512.

[0109] In this way, by using multiple gate scanning lines 32 and data lines 33, independent control of each opening area 11 can be achieved; the thin film transistor 34 as a switching element can efficiently control the current flow, thereby improving the response speed and accuracy of the system. All the negative driving electrodes 212 are connected to the common electrode line 35, which simplifies the circuit design, reduces the number of lines, reduces the manufacturing cost, and improves the consistency and reliability of the system.

[0110] Referring to Figure 10 , Figure 10 The microfluidic device provided by the seventh embodiment of the application is a sectional view along the A-A line. The microfluidic device provided by the seventh embodiment of the application has basically the same structure as the microfluidic device provided by the sixth embodiment, and the difference lies in that in the seventh embodiment of the application, multiple electrode pairs 2 are arranged on the second surface 20 of the first substrate 1; wherein the second surface 20 is arranged opposite to the first surface 10, that is, the second surface 20 is the bottom surface of the first substrate 1 in order to avoid the situation that the preparation of the electrode pairs 2 causes pollution to the accommodation groove 111 of the first surface 10, resulting in adverse effects on the detection results. Figure 10

[0111] The control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100 when in use, so that the electrode pairs 2 of the second surface 20 are in contact with the corresponding contact pairs 5 on the control substrate 200, and the control circuit layer 3 can apply voltage to the electrode pairs 2.

[0112] As shown in Figure 10 , in specific embodiments, the two driving electrodes 21 can be arranged at opposite sides of the two accommodation grooves 111, so that the two accommodation grooves are located as much as possible between the electric fields generated by the two driving electrodes 21, facilitating the movement of all DNA molecules in the liquid inlet groove to the microfluidic channel 112 under the action of the electric field.

[0113] Specifically, the two driving electrodes 21 are arranged at positions corresponding to the non-opening areas 12 of the second surface 20. The second surface 20 also has multiple second grooves 14, and each driving electrode 21 is embedded in a second groove 14, so that the electric field has a greater effect on the DNA molecules, and at the same time, the preparation of the electrode pairs 2 and the control circuit layer 3 avoids pollution to the accommodation groove 111 of the first surface 10, resulting in adverse effects on the detection results.

[0114] ​Specifically, the second groove 14 is arranged at the position corresponding to the non-opening area 12 of the second surface 20 and extends from the second surface 20 to the first surface 10. The top surface of the driving electrode 21 arranged in the second groove 14 is higher than the top surface of the micro flow channel 112, and the bottom surface of the driving electrode 21 is flush with the second surface 20 or protrudes from the first surface 10; so that the micro flow channel 112 is located in the opposite area of the two driving electrodes 21, which enhances the force of the electric field on the DNA molecules and facilitates the contact and electrical connection between the connecting contact 51 on the control substrate 200 and the driving electrode 21 after the control substrate 200 is attached to the micro fluidic substrate 100.

[0115] Referring to Figure 11 , Figure 11 The micro fluidic device provided in the eighth embodiment of the present application is a sectional view along the line A-A. The micro fluidic device provided in the eighth embodiment of the present application has basically the same structure as the micro fluidic device provided in the seventh embodiment of the present application, and the difference lies in that in the eighth embodiment of the present application, the two driving electrodes 21 are arranged on the bottom walls of the two accommodating grooves 111, so as to reduce the distance between the two driving electrodes 21, thereby making the electric field between the two driving electrodes 21 stronger and the moving speed of the DNA molecules faster, and improving the detection reaction time of the micro fluidic device.

[0116] Specifically, the anode driving electrode 211 of the two driving electrodes 21 is arranged corresponding to the bottom wall of the outlet groove, and the cathode driving electrode 212 is arranged corresponding to the bottom wall of the inlet groove.

[0117] Referring to Figure 12a , Figure 12a The micro fluidic device provided in the ninth embodiment of the present application is a sectional view along the line A-A. The micro fluidic device provided in the ninth embodiment of the present application has basically the same structure as the micro fluidic device provided in the sixth embodiment of the present application, and the difference lies in that in the ninth embodiment of the present application, the micro fluidic substrate 100 includes a first substrate 1, and the control substrate 200 can include a second substrate 4, a control circuit layer 3 and a plurality of electrode pairs 2.

[0118] Specifically, the first substrate 1 includes a first surface 10, and the first surface 10 has a plurality of opening areas 11 arranged at intervals, for loading and processing samples; the opening area 11 is recessed downward from the first surface 10 of the first substrate 1, so as to form a groove-shaped opening area 11.

[0119] Each of the opening regions 11 has two accommodation grooves 111 arranged along the first direction X for loading liquid and samples. The two accommodation grooves 111 have a common side wall, and the common side wall has a micro flow channel 112, and the two accommodation grooves 111 are communicated through the micro flow channel 112, and only a single DNA molecule in the sample can pass through the micro flow channel 112, so that a user can observe the DNA molecule through the micro flow channel 112. This design enables each opening region 11 to independently accommodate and process different samples or reactions, while achieving sample flow and observation through the micro flow channel 112.

[0120] One of the two accommodation grooves 111 is an inlet groove for loading DNA molecule groups to be detected or other samples, and the other is an outlet groove for accommodating single DNA molecules or other observed samples flowing out of the micro flow channel 112.

[0121] The second substrate 4 can also be quartz glass. The control circuit layer 3 is arranged on the second substrate 4 and fixedly connected with the second substrate 4 to stabilize the transmission of the voltage signal. Specifically, the control circuit layer 3 can be directly prepared on the second substrate 4, or the control circuit layer 3 can be first prepared on a substrate, and then the substrate is fixed on the second substrate 4.

[0122] The plurality of electrode pairs 2 are arranged on the second substrate 4 and electrically connected with the control circuit layer 3, so that the control circuit layer 3 can apply a voltage to the electrode pairs 2 to form an electric field. Each of the electrode pairs 2 corresponds to one of the opening regions 11 to apply an electric field to the corresponding opening region 11 to control the movement of DNA molecules or other charged particles. Each of the electrode pairs 2 includes two driving electrodes 21 arranged at intervals.

[0123] The control substrate 200 is attached to the micro flow control substrate 100 during use, so that the two driving electrodes 21 are arranged at intervals along the first direction X on opposite sides of the micro flow channel 112, so that the DNA molecules or other charged particles can pass through the micro flow channel 112 along the first direction X. The control circuit layer 3 is used to apply a voltage to each of the electrode pairs 2 to control the DNA molecules suspended in the liquid in the accommodation grooves 111 to enter the micro flow channel 112 from the inlet groove for detection by a detection device. At the same time, the control circuit layer 3 can also coordinate and control the voltage applied by each of the electrode pairs 2, so as to realize the simultaneous independent control of multiple samples.

[0124] Thus, by further integrating the plurality of electrode pairs 2 onto the control substrate 200, when the microfluidic substrate 100 needs to be replaced, only the first substrate 1 can be replaced, further reducing the replacement cost; meanwhile, by integrating a plurality of independent opening regions 11 and electrode pairs 2 on a single first substrate 1, each opening region 11 and its corresponding electrode pair 2 can be independently operated to flexibly configure different test conditions, realizing parallel processing of multiple DNA molecules or biological samples by the microfluidic device, and significantly improving the detection efficiency.

[0125] In specific embodiments, as shown in Figure 12a , the control circuit layer 3 has a hollow part 31 corresponding to the microfluidic channel 112, and the second substrate 4 is a transparent substrate, so that the microfluidic device has higher transparency and observability, and the user can observe the DNA molecules in the microfluidic channel 112 from the top of the microfluidic device through the hollow part 31 and the corresponding partially transparent substrate. Specifically, the control circuit layer 3 can form the hollow part 31 by etching process. In other embodiments, the DNA molecules in the microfluidic channel 112 can also be observed from the bottom of the microfluidic device.

[0126] Of course, in some embodiments, the control substrate 200 can also have a hollow part 31 corresponding to the microfluidic channel 112 to further improve the optical transmittance and facilitate real-time monitoring of the state of the microfluidic channel 112.

[0127] As shown in Figure 12a , the control substrate 200 can be attached to the first surface 10 of the microfluidic substrate 100 when in use, so that each driving electrode 21 is attached to the non-opening region 12 of the first surface 10.

[0128] Referring to Figures 12b-12c , Figure 12b the cross-sectional view of the microfluidic device along the A-A line provided by another embodiment of the present application; Figure 12c the cross-sectional view of the microfluidic device along the A-A line provided by yet another embodiment of the present application. In some embodiments, the first substrate 1 further comprises a second surface 20 opposite to the first surface 10, and the control substrate 200 can also be attached to the second surface 20 of the microfluidic substrate 100 when in use.

[0129] As shown in Figure 12b , the two driving electrodes 21 can be arranged on the side of the control circuit layer 3 away from the hollow part 31, so that when the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the two driving electrodes 21 correspond to the non-opening region 12 respectively, and the two driving electrodes 21 are spaced apart on the opposite sides of the two accommodation grooves 111, so that the two accommodation grooves are located as far as possible between the electric fields generated by the two driving electrodes 21, and all the DNA molecules in the liquid inlet groove can move to the microfluidic channel 112 under the action of the electric field.

[0130] Alternatively, as shown in Figure 12c , two driving electrodes 21 can also be arranged on the side of the control circuit layer 3 close to the hollow part 31, so that when the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the two driving electrodes 21 correspond to the opening area 11, and the two driving electrodes 21 are respectively located on the bottom wall of the two accommodation grooves 111, so as to reduce the distance between the two driving electrodes 21, so that the electric field between the two driving electrodes 21 is stronger, and the moving speed of the DNA molecules is faster, thereby improving the detection reaction time of the microfluidic device.

[0131] As shown in Figure 12a , in specific embodiments, the common side wall between the two accommodation grooves 111 in the same opening area 11 has a micro groove, and a micro channel is embedded in the micro groove. The micro channel is a small pipeline embedded in the micro groove and is used to carry and control the flow of microfluid. The micro channel serves as a micro flow channel 112 to simulate blood vessels and facilitate the detection of DNA molecules under similar conditions. Specifically, the micro channel can be a micron-level quartz tube.

[0132] Of course, in other embodiments, the micro flow channel 112 can also be a micro groove or a micro via provided on the common side wall to simulate blood vessels, so that the DNA molecules can directly pass through the micro groove or micro via on the common side wall, thereby improving the space utilization and structural compactness of the microfluidic device.

[0133] As shown in Figure 12a , in specific embodiments, the electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212. Among them, one of the two driving electrodes 21 is the positive driving electrode 211, and the other is the negative driving electrode 212; and when the control substrate 200 is attached to the microfluidic substrate 100, the positive driving electrode 211 is located on the side close to the liquid outlet groove, and the negative driving electrode 212 is located on the side close to the liquid inlet groove, so that the DNA molecules can pass through the micro flow channel 112 from the liquid inlet groove to the liquid outlet groove in the first direction X.

[0134] In specific embodiments, in combination with Figure 1 , Figure 2 and Figure 12a , the control circuit layer 3 can include a plurality of gate scan lines 32, a plurality of data lines 33, a plurality of thin film transistors 34, and a common electrode line 35. Among them, the plurality of gate scan lines 32 and the plurality of data lines 33 are arranged in a cross manner; each positive driving electrode 211 is electrically connected to the data line 33 through at least one thin film transistor 34, and all negative driving electrodes 212 are electrically connected to the common electrode line 35.

[0135] In this way, by using the plurality of gate scanning lines 32 and the data lines 33, independent control of each of the opening regions 11 can be achieved; the thin film transistors 34, as switching elements, can efficiently control the current flow, thereby improving the response speed and accuracy of the system. All of the negative electrode driving electrodes 212 are connected to the common electrode line 35, which simplifies the circuit design, reduces the number of lines, lowers the manufacturing cost, and improves the consistency and reliability of the system.

[0136] Specifically, at least one thin film transistor 34 is provided for each of the opening regions 11; the gate scanning lines 32 are used to turn on a specific row of thin film transistors 34 for operation, and the data lines 33 are used to transmit a voltage signal to a specific column of thin film transistors 34, so as to generate an electric field for a specific pair of electrodes 2.

[0137] The thin film transistor 34 includes a gate 341, a source 342, and a drain 343. The gate scanning line 32 is electrically connected to the gate 341 of the thin film transistor 34, for turning on or off the thin film transistor 34; the data line 33 is electrically connected to the source 342 of the thin film transistor 34, and the drain 343 of the thin film transistor 34 is electrically connected to the positive electrode driving electrode 211, so as to transmit a voltage signal from the data line 33 to the positive electrode driving electrode 211 when the thin film transistor 34 is turned on, and generate an electric field between the positive electrode driving electrode 211 and the negative electrode driving electrode 212.

[0138] All of the data lines 33, the gate scanning lines 32, and the common electrode line 35 are collected on one side of the second substrate 4 and connected to an external control chip, so as to control the operation of the microfluidic device.

[0139] Referring to Figure 13 , Figure 13 A cross-sectional view of the microfluidic device provided by the tenth embodiment of the present application along the line A-A. The microfluidic device provided by the tenth embodiment of the present application has substantially the same structure as the microfluidic device provided by the ninth embodiment of the present application, except that the first surface 10 further has a plurality of first grooves 13, and the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100 in use, so that each of the driving electrodes 21 is embedded in one of the first grooves 13. Thus, the force on the DNA molecules generated by the electric field of the two driving electrodes 21 is greater, so that the DNA molecules can pass through the microfluidic channel 112 faster, thereby improving the detection reaction time of the microfluidic device. In addition, embedding the driving electrodes 21 in the first grooves 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0140] Specifically, the first groove 13 is arranged in the non-opening area 12 of the first surface 10 and extends from the first surface 10 to the bottom. When the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100, the top surface of the driving electrode 21 embedded in the first groove 13 is higher than the top surface of the microfluid channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluid channel 112, so that along the thickness direction Y of the first substrate 1, the microfluid channel 112 is completely located between the top surface and the bottom surface of the driving electrode 21, that is, the microfluid channel 112 is located in the opposite area of the two driving electrodes 21, so as to enhance the force of the electric field on the DNA molecules.

[0141] Referring to Figure 14 , Figure 14 The microfluidic device provided by the eleventh embodiment of the present application is a sectional view along the A-A line. The microfluidic device provided by the eleventh embodiment of the present application has basically the same structure as the microfluidic device provided by the ninth embodiment, and the difference lies in that in the eleventh embodiment of the present application, the second surface 20 further has a plurality of second grooves 14; and when the control substrate 200 is used, it is attached to the second surface 20 of the microfluidic substrate 100, so that each driving electrode 21 is embedded in a second groove 14. Thus, the electric field generated by the two driving electrodes 21 has a greater force on the DNA molecules, so that the DNA molecules can pass through the microfluid channel 112 faster, thereby improving the detection reaction time of the microfluidic device. In addition, embedding the driving electrode 21 in the second groove 14 can further improve the space utilization and structural compactness of the microfluidic device.

[0142] Specifically, the second groove 14 is arranged at a position corresponding to the non-opening area 12 of the second surface 20 and extends from the second surface 20 to the first surface 10. When the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the top surface of the driving electrode 21 is higher than the top surface of the microfluid channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluid channel 112, so that along the thickness direction Y of the first substrate 1, the microfluid channel 112 is completely located between the top surface and the bottom surface of the driving electrode 21, that is, the microfluid channel 112 is located in the opposite area of the two driving electrodes 21, so as to enhance the force of the electric field on the DNA molecules.

[0143] Referring to Figure 15 , Figure 15The microfluidic device provided by the twelfth embodiment of the present application is a cross-sectional view along the line A-A. The microfluidic device provided by the twelfth embodiment of the present application is basically the same as the microfluidic device provided by the ninth embodiment of the present application in structure, except that in the twelfth embodiment of the present application, the second substrate 4 includes opposite third and fourth surfaces 30 and 40; wherein the control circuit layer 3 is arranged on the third surface 30, and the electrode pair 2 is arranged on the fourth surface 40 and electrically connected with the control circuit layer 3 through the via hole 41; so that the third surface 30 of the second substrate 4 is more flat towards the first substrate 1, so that the third surface 30 of the second substrate 4 and the surface of the first substrate 1 are more easily attached, and the control circuit layer 3 is not squeezed. In addition, when the control substrate 200 is attached to the first surface 10 of the control substrate 200, the control circuit layer 3 can be prevented from being corroded by the evaporated liquid.

[0144] Referring to Figure 16 , Figure 16 The microfluidic device provided by the thirteenth embodiment of the present application is a cross-sectional view along the line A-A. The microfluidic device provided by the thirteenth embodiment of the present application is basically the same as the microfluidic device provided by the sixth embodiment of the present application in structure, except that in the thirteenth embodiment of the present application, the first surface 10 of the first substrate 1 has a plurality of first grooves 13, and the second surface 20 of the first substrate 1 also has a plurality of second grooves 14, and each first groove 13 and each second groove 14 is embedded with a driving electrode 21.

[0145] In this way, the control substrate 200 can be attached to the first surface 10 of the microfluidic substrate 100 when in use to cover the accommodation groove 111, so as to avoid the evaporation of the liquid in the accommodation groove 111; or the control substrate 200 can be attached to the second surface 20 of the microfluidic substrate 100 to avoid the control substrate 200 from blocking the line of sight, so as to facilitate better observation of the sample in the microfluidic channel 112. It can be understood that the specific attachment position of the control substrate 200 can be adjusted according to the detection requirements.

[0146] Further, as Figure 16 shown, the driving electrode 21 embedded in the first groove 13 can also protrude from the first surface 10 and extend to the first surface in a direction parallel to the first substrate 1, so as to increase the area of the driving electrode 21 towards the first surface 10 side, thereby facilitating the successful contact and electrical connection between the contact point 51 and the driving electrode 21 when the control substrate 200 is attached to the first surface 10, and effectively reducing the precision requirement of the alignment and attachment of the control substrate 200 and the microfluidic substrate 100.

[0147] Of course, the driving electrode 21 embedded in the second groove 14 can also protrude from the second surface 20 and extend to the second surface 20 in a direction parallel to the first substrate 1, so as to increase the area of the driving electrode 21 towards the second surface 20 side, thereby facilitating the successful contact and electrical connection between the contact 51 and the driving electrode 21 when the control substrate 200 is attached to the second surface 20, and effectively reducing the precision requirement of the alignment and attachment of the control substrate 200 and the microfluidic substrate 100.

[0148] As shown in Figure 16 , the side wall of the first groove 13 is provided with a limiting portion 16 to fix the driving electrode 21 in the first groove 13, so as to avoid the driving electrode 21 from falling off.

[0149] Specifically, the limiting portion 16 extends from the side wall in a direction parallel to the first substrate 1 towards the axis of the first groove 13. The driving electrode 21 has a recess at a position corresponding to the limiting portion 16, and the limiting portion 16 cooperates with the recess to clamp the driving electrode 21.

[0150] Similarly, the side wall of the second groove 14 is provided with a limiting portion 16 to fix the driving electrode 21 in the second groove 14, so as to avoid the driving electrode 21 from falling off. Specifically, the limiting portion 16 extends from the side wall in a direction parallel to the first substrate 1 towards the axis of the second groove 14.

[0151] Referring to Figure 17 , Figure 17 The microfluidic device provided by the fourteenth embodiment of the present application is a sectional view along the A-A line. The microfluidic device provided by the fourteenth embodiment of the present application has basically the same structure as the microfluidic device provided by the thirteenth embodiment of the present application, and the difference lies in that, in the fourteenth embodiment of the present application, the first substrate 1 has a plurality of through holes 15 penetrating the first substrate 1 in the thickness direction Y; each driving electrode 21 is embedded in one through hole 15, and the control substrate 200 can be attached to the first surface 10 of the microfluidic substrate 100 or the second surface of the microfluidic substrate 100 when in use.

[0152] In this way, the control substrate 200 can be attached to the first surface 10 of the microfluidic substrate 100 to cover the accommodation groove 111 when in use, so as to avoid the evaporation of the liquid in the accommodation groove 111; or the control substrate 200 can be attached to the second surface 20 of the microfluidic substrate 100, so as to avoid the control substrate 200 from blocking the line of sight and facilitate better observation of the sample in the microfluidic channel 112. At the same time, the top surface of the driving electrode 21 can be higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 can be lower than the bottom surface of the microfluidic channel 112, so that the microfluidic channel 112 is located in the opposite area of the two driving electrodes 21, thereby enhancing the force of the electric field on the DNA molecules.

[0153] Specifically, the top surface of the driving electrode 21 can be flush with the first surface 10 or protrude from the first surface 10, so as to facilitate the contact and electrical connection between the connection contact 51 on the control substrate 200 and the driving electrode 21 after the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100. The bottom surface of the driving electrode 21 can also be flush with the second surface 20 or protrude from the second surface 20, so as to facilitate the contact and electrical connection between the connection contact 51 on the control substrate 200 and the driving electrode 21 after the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100.

[0154] Referring to Figure 18 , Figure 18 A flowchart of a preparation method of a microfluidic device provided by an embodiment of the present application is shown. The present application also provides a preparation method of a microfluidic device, and the specific steps of the preparation method include:

[0155] Step S1: providing a first substrate substrate.

[0156] Specifically, the first substrate substrate 1 includes a first surface 10; the first surface 10 has a plurality of opening regions 11 arranged at intervals.

[0157] Step S2: opening two accommodation grooves arranged at intervals along the first direction in each opening region, and forming a microfluid channel on the common side wall of the two accommodation grooves, so that the two accommodation grooves are communicated through the microfluid channel.

[0158] In the specific implementation process, the accommodation groove 111 and the microfluid channel 112 can also be soaked and dried by using a modification liquid, so as to change the surface hydrophilicity, so that the DNA molecules are not easy to adhere to the quartz glass wall, so as to facilitate the extension of the DNA molecules in the microfluid channel 112, and facilitate observation and detection.

[0159] Step S3: fixing a plurality of electrode pairs on the first substrate substrate, and arranging each electrode pair to correspond to one opening region, so as to form a microfluidic substrate.

[0160] Specifically, two driving electrodes 21 are arranged at intervals on the opposite sides of the microfluid channel 112 along the first direction X, so as to form an electrode pair 2.

[0161] Step S4: providing a second substrate substrate, and manufacturing a control circuit layer on the second substrate substrate.

[0162] Specifically, the control circuit layer 3 can include a plurality of gate scan lines 32, a plurality of data lines 33, a plurality of thin film transistors 34, and a common electrode line 35. Among them, the plurality of gate scan lines 32 and the plurality of data lines 33 are arranged in a cross manner; each opening region 11 is arranged to correspond to at least one thin film transistor 34.

[0163] Step S5: making a plurality of contact pairs electrically connected with the control circuit layer on the second substrate to form a control substrate.

[0164] Specifically, the contact pair 5 includes two connection contacts 51; the control substrate 200 is attached to the microfluidic substrate 100 in use, and the plurality of contact pairs 5 are electrically connected with the plurality of electrode pairs 2, so that the control circuit layer 3 can apply voltage to each electrode pair 2 through the contact pair 5.

[0165] After step S5, it can also include: attaching a control chip on one side of the second substrate, and electrically connecting all the data lines, gate scanning lines and common electrode lines with the external chip.

[0166] The above is only an embodiment of the present application, and does not limit the patent scope of the present application, and any equivalent structure or equivalent process transformation using the content of the specification and drawings, or direct or indirect application in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A microfluidic device, characterized in that, include: Microfluidic substrate, including: A first substrate includes a first surface; the first surface has a plurality of opening regions spaced apart, each opening region has two receiving grooves spaced apart along a first direction, the common sidewall of the two receiving grooves has a microfluidic channel, and the two receiving grooves are connected through the microfluidic channel; Multiple electrode pairs are disposed on the first substrate; each electrode pair corresponds to one opening region; each electrode pair includes two driving electrodes, which are spaced apart along the first direction on opposite sides of the microfluidic channel; each electrode pair includes a positive driving electrode and a negative driving electrode. Control board, including: Second substrate; A control circuit layer is disposed on the second substrate. Multiple contact pairs are disposed on the second substrate and electrically connected to the control circuit layer; each contact pair includes two connecting contacts; each contact pair includes a positive connecting contact and a negative connecting contact. The control substrate is attached to the microfluidic substrate during use, the plurality of contact pairs are electrically connected to the plurality of electrode pairs, and the control circuit layer is used to apply voltage to each electrode pair; A plurality of electrode pairs are disposed on the first surface, and two driving electrodes are disposed at intervals along the first direction on opposite sides of the two receiving grooves; and / or, a plurality of electrode pairs are disposed on the second surface of the first substrate; the second surface is disposed opposite to the first surface; The control substrate is attached to the first surface or the second surface of the microfluidic substrate during use; The control circuit layer further includes: Multiple gate scan lines; Multiple data lines are arranged to intersect with the gate scan lines; Multiple thin-film transistors; each of the positive electrode contact points is electrically connected to the data line through at least one of the thin-film transistors, and the positive electrode contact point is used to be electrically connected to the positive electrode drive electrode. A common electrode line; all the negative electrode contact points are electrically connected to the common electrode line; the negative electrode contact points are used to electrically connect to the negative electrode drive electrode.

2. The microfluidic device according to claim 1, characterized in that, The first surface also has a plurality of first grooves, each of the driving electrodes being embedded in one of the first grooves; and / or The second surface also has a plurality of second grooves, each of the driving electrodes being embedded in one of the second grooves.

3. The microfluidic device according to claim 2, characterized in that, The top surface of the driving electrode is flush with or protrudes from the first surface, and the bottom surface of the driving electrode is lower than the bottom surface of the microfluidic channel; and / or The top surface of the driving electrode is higher than the top surface of the microfluidic channel, and the bottom surface of the driving electrode is flush with or protrudes from the second surface.

4. The microfluidic device according to claim 1, characterized in that, The first substrate further includes a second surface opposite to the first surface; the first substrate has a plurality of through holes that penetrate the first substrate along the thickness direction; each of the driving electrodes is embedded in one of the through holes; The top surface of the driving electrode is flush with or protrudes from the first surface, and the bottom surface of the driving electrode is flush with or protrudes from the second surface. The control substrate is attached to the first surface or the second surface of the microfluidic substrate during use.

5. The microfluidic device according to claim 2, characterized in that, A limiting portion is provided on the sidewall of the first groove and / or the second groove; the limiting portion extends from the sidewall along a direction parallel to the first substrate toward the axis of the first groove and / or the second groove.

6. The microfluidic device according to any one of claims 3-5, characterized in that, The driving electrode protrudes from the first surface and extends onto the first surface in a direction parallel to the first substrate; and / or the driving electrode protrudes from the second surface and extends onto the second surface in a direction parallel to the first substrate.

7. The microfluidic device according to any one of claims 1-5, characterized in that, The control circuit layer has cutouts corresponding to the microfluidic channels, and the second substrate is a transparent substrate; or The control substrate has a cutout portion corresponding to the microfluidic channel.

8. A method for fabricating a microfluidic device, used to fabricate the microfluidic device as described in any one of claims 1-7, characterized in that, include: Provide a first substrate; The first substrate includes a first surface, and the first surface has a plurality of opening regions spaced apart. Two receiving slots are provided in each of the opening areas and spaced apart along a first direction, and a microfluidic channel is formed on the common sidewall of the two receiving slots so that the two receiving slots are connected through the microfluidic channel; Multiple electrode pairs are fixed on the first substrate, and each electrode pair corresponds to one of the opening regions to form a microfluidic substrate; the electrode pair includes two driving electrodes, which are spaced apart along the first direction on opposite sides of the microfluidic channel; A second substrate is provided, and a control circuit layer is fabricated on the second substrate; Multiple contact pairs electrically connected to the control circuit layer are fabricated on the second substrate to form a control substrate.

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