Microfluidic device

Abstract

The application provides a microfluidic device, which comprises a first substrate, a plurality of electrode pairs and a control circuit layer; wherein the first substrate comprises a first surface; the first surface has a plurality of opening regions arranged at intervals, each opening region has two accommodation grooves arranged at intervals along a first direction, and a common side wall of the two accommodation grooves has a microflow channel, and the two accommodation grooves are communicated through the microflow channel. The plurality of electrode pairs are arranged on the first substrate; each electrode pair is arranged corresponding to an opening region; the electrode pair comprises two driving electrodes, and the two driving electrodes are arranged at intervals on opposite sides of the microflow channel along the first direction. The control circuit layer is arranged on the first substrate and electrically connected with the plurality of electrode pairs; wherein the control circuit layer is used for applying voltage to each electrode pair. The microfluidic device realizes parallel processing of a plurality of DNA molecules or biological samples, and significantly improves the detection efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of microfluidic control, and in particular to a microfluidic device. BACKGROUND

[0002] As a platform integrating various advanced technologies (such as physics, chemistry and biotechnology), microfluidic chips have shown wide application prospects in the fields of DeoxyriboNucleic Acid (DNA) manipulation, gene sequencing and drug targeted therapy.

[0003] Currently, electric field force driving is one of the main methods for manipulating DNA molecules. This method takes advantage of the negative charge of DNA molecules in general biological environments. By loading voltages of different electricities at both ends of a micron-sized quartz tube channel, an electric field can be constructed to manipulate DNA molecules to achieve their movement in the microchannel. By constructing a microfluidic chip using this principle, separation and detection of DNA molecules can be achieved.

[0004] However, the existing technology has significant limitations in handling multiple DNA molecules that need to be loaded with different electric fields at the same time, and cannot be batch processed, resulting in low efficiency. SUMMARY

[0005] The present application provides a microfluidic device to solve the problem of low efficiency of batch processing DNA molecules by existing microfluidic chips.

[0006] To solve the above technical problems, one technical solution adopted by the present application is to provide a microfluidic device, comprising:

[0007] A first substrate, comprising a first surface; the first surface has a plurality of opening regions arranged at intervals, each of the opening regions has two accommodation grooves arranged at intervals along a first direction, and the common side wall of the two accommodation grooves has a micro flow channel, and the two accommodation grooves are communicated through the micro flow channel;

[0008] A plurality of electrode pairs are arranged on the first substrate; each of the electrode pairs corresponds to one of the opening regions; the electrode pair comprises two driving electrodes, and the two driving electrodes are arranged at intervals on opposite sides of the micro flow channel along the first direction;

[0009] A control circuit layer is arranged on the first substrate and electrically connected to the plurality of electrode pairs; wherein the control circuit layer is used to apply voltage to each of the electrode pairs.

[0010] In an embodiment, the plurality of electrode pairs and the control circuit layer are disposed on the first surface, and the two driving electrodes are disposed on opposite sides of the two accommodating grooves along the first direction, and the control circuit layer has a hollow portion corresponding to the opening area.

[0011] In an embodiment, the plurality of electrode pairs and the control circuit layer are disposed on the second surface of the first substrate; and the second surface is disposed opposite to the first surface.

[0012] In an embodiment, the two driving electrodes are disposed on opposite sides of the two accommodating grooves along the first direction; or

[0013] The two driving electrodes are respectively disposed on the bottom walls of the two accommodating grooves.

[0014] In an embodiment, the first substrate further comprises a second surface opposite to the first surface; wherein,

[0015] The first surface further comprises a plurality of first grooves, and each driving electrode is embedded in a first groove; or

[0016] The second surface further comprises a plurality of second grooves, and each driving electrode is embedded in a second groove.

[0017] In an embodiment, the top surface of the driving electrode is higher than the top surface of the micro flow channel, and the bottom surface of the driving electrode is lower than the bottom surface of the micro flow channel.

[0018] In an embodiment, the micro flow channel is a micro groove or a micro via disposed on the common side wall.

[0019] In an embodiment, the common side wall has a micro groove, and a micro pipe is embedded in the micro groove, and the micro pipe serves as the micro flow channel.

[0020] In an embodiment, the micro pipe is disposed apart from the bottom wall of the accommodating groove, and one end of the micro pipe protrudes from the side surface of the common side wall and extends into the accommodating groove.

[0021] In an embodiment, the electrode pair comprises a positive driving electrode and a negative driving electrode; and the control circuit layer comprises:

[0022] a plurality of gate scan lines;

[0023] a plurality of data lines, which are disposed transversely to the gate scan lines;

[0024] a plurality of thin film transistors; and each positive driving electrode is electrically connected to the data line through at least one thin film transistor.

[0025] Common electrode line; all the negative electrode driving electrodes are electrically connected to the common electrode line.

[0026] The microfluidic device provided by the application has the advantages that, compared with the prior art, the microfluidic device is integrated with multiple independent opening regions and electrode pairs on a single first substrate base plate, so that each opening region and the corresponding electrode pair can be independently operated, different test conditions can be flexibly configured, the microfluidic device can process multiple DNA molecules or biological samples in parallel, and the detection efficiency is significantly improved. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 A structure diagram of the microfluidic device provided by the first embodiment of the application;

[0028] Figure 2 A structure diagram of the microfluidic device provided by the first embodiment of the application; Figure 1 A partial enlarged view of A in FIG. 1;

[0029] Figure 3 A structure diagram of the microfluidic device provided by the first embodiment of the application; Figure 2 A sectional view of the structure shown in FIG. 1 along the line A-A;

[0030] Figure 4 A structure diagram of the microfluidic device provided by the first embodiment of the application; Figure 2 A structure diagram of the thin film transistor in the structure shown in FIG. 1;

[0031] Figure 5 A sectional view of the microfluidic device provided by the second embodiment of the application along the line A-A;

[0032] Figure 6 A sectional view of the microfluidic device provided by the third embodiment of the application along the line A-A;

[0033] Figure 7 A sectional view of the microfluidic device provided by the fourth embodiment of the application along the line A-A;

[0034] Figure 8 A sectional view of the microfluidic device provided by the fifth embodiment of the application along the line A-A;

[0035] Figure 9 A cross-sectional view of the microfluidic device along the line A-A according to a sixth embodiment of the present application is shown in FIG. 6;

[0036] Figure 10 A cross-sectional view of the microfluidic device along the line A-A according to a seventh embodiment of the present application is shown in FIG. 7;

[0037] Figure 11 A cross-sectional view of the microfluidic device along the line A-A according to an eighth embodiment of the present application is shown in FIG. 8;

[0038] Figure 12a A cross-sectional view of the microfluidic device along the line A-A according to a ninth embodiment of the present application is shown in FIG. 9;

[0039] Figure 12b A cross-sectional view of the microfluidic device along the line A-A according to another embodiment of the present application is shown in FIG. 10;

[0040] Figure 12c A cross-sectional view of the microfluidic device along the line A-A according to yet another embodiment of the present application is shown in FIG. 11;

[0041] Figure 13 A cross-sectional view of the microfluidic device along the line A-A according to a tenth embodiment of the present application is shown in FIG. 12;

[0042] Figure 14 A cross-sectional view of the microfluidic device along the line A-A according to an eleventh embodiment of the present application is shown in FIG. 13;

[0043] Figure 15 A cross-sectional view of the microfluidic device along the line A-A according to a twelfth embodiment of the present application is shown in FIG. 14.

[0044] BRIEF DESCRIPTION OF THE DRAWINGS

[0045] 100 - microfluidic substrate; 200 - control substrate; 1 - first substrate; 2 - electrode pair; 3 - control circuit layer; 4 - second substrate; 5 - contact pair; 10 - first surface; 20 - second surface; 30 - third surface; 40 - fourth surface; 11 - open area; 12 - non-open area; 13 - first groove; 14 - second groove; 21 - driving electrode; 31 - hollow part; 32 - gate scan line; 33 - data line; 34 - thin film transistor; 35 - common electrode line; 41 - via hole; 51 - connection contact; 111 - accommodating groove; 112 - microfluidic channel; 211 - positive driving electrode; 212 - negative driving electrode; 341 - gate; 342 - source; 343 - drain; 344 - insulating layer; 345 - doped semiconductor layer; 346 - protective layer; 511 - positive connection contact; 512 - negative connection contact. DETAILED DESCRIPTION

[0046] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0047] The terms "first," "second," and "third" in this application are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified. All directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this application are only used to explain the relative positional relationships and movements between components in a specific orientation (as shown in the figures). If the specific orientation changes, the directional indications also change accordingly. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or devices.

[0048] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0049] The present application will now be described in detail with reference to the accompanying drawings and embodiments.

[0050] See Figures 1-3 , Figure 1 This is a schematic diagram of the microfluidic device provided in the first embodiment of this application; Figure 2 for Figure 1 A magnified view of a section at point A in the middle; Figure 3 for Figure 2 The structure shown is a cross-sectional view along line AA. This microfluidic device can be used to separate individual DNA molecules from DNA clusters for easy detection. Specifically, such as... Figure 3As shown, the microfluidic device can include a first substrate base plate 1, a plurality of electrode pairs 2 and a control circuit layer 3.

[0051] The first substrate base plate 1 serves as the main support structure of the microfluidic device and can be made of quartz glass. Specifically, the first substrate base plate 1 includes a first surface 10, i.e. Figure 3 The first surface 10 has a plurality of opening regions 11 arranged at intervals, which are used to load and process samples; the opening regions 11 are recessed downward from the first surface 10 of the first substrate base plate 1 to form a groove-shaped opening region 11.

[0052] Each opening region 11 has two accommodation grooves 111 arranged at intervals along the first direction X for loading liquid and samples; the first direction X is perpendicular to the thickness direction Y of the first substrate base plate 1. The two accommodation grooves 111 have a common side wall, and the common side wall has a microfluidic channel 112, the two accommodation grooves 111 are connected through the microfluidic channel 112, and only a single DNA molecule in the sample can pass through the microfluidic channel 112, so that the user can observe the DNA molecule through the microfluidic channel 112. This design enables each opening region 11 to independently accommodate and process different samples or reactions, while achieving sample flow and observation through the microfluidic channel 112.

[0053] One of the two accommodation grooves 111 is an inlet groove for loading DNA molecule groups or other samples to be detected; the other is an outlet groove for accommodating single DNA molecules or other observed samples flowing out of the microfluidic channel 112.

[0054] The plurality of electrode pairs 2 are arranged on the first substrate base plate 1 and fixedly connected with the first substrate base plate 1, so that the electrode pairs 2 can exert a stable electric field; and each electrode pair 2 is arranged corresponding to one opening region 11 to exert an electric field on the corresponding opening region 11 to control the movement of DNA molecules or other charged particles. The electrode pair 2 includes two driving electrodes 21 arranged at intervals on opposite sides of the microfluidic channel 112 along the first direction X, so that the DNA molecules or other charged particles can pass through the microfluidic channel 112 along the first direction X.

[0055] The control circuit layer 3 is arranged on the first substrate base plate 1 and electrically connected with the plurality of electrode pairs 2; wherein the control circuit layer 3 is used to apply voltage to each electrode pair 2 to control the DNA molecules suspended in the liquid in the accommodation groove 111 to enter the microfluidic channel 112 from the inlet groove for detection by the detection device. At the same time, the control circuit layer 3 can also coordinate and control the voltage applied by each electrode pair 2, thereby realizing the simultaneous independent control of multiple samples.

[0056] The control circuit layer 3 is fixedly connected to the first substrate 1 to stably transmit voltage signals to each electrode pair 2. Specifically, the control circuit layer 3 can be directly fabricated on the first substrate 1, or the control circuit layer 3 can be fabricated on a substrate first, and then the substrate is fixed to the first substrate 1.

[0057] Thus, by integrating multiple independent opening regions 11 and electrode pairs 2 on a single first substrate 1, each opening region 11 and its corresponding electrode pair 2 can operate independently to flexibly configure different experimental conditions, enabling the microfluidic device to process multiple DNA molecules or biological samples in parallel, significantly improving detection efficiency.

[0058] like Figure 3 As shown, in a specific embodiment, multiple electrode pairs 2 and control circuit layer 3 can all be disposed on the first surface 10 of the first substrate 1 to simplify the structure of the microfluidic device and improve manufacturing efficiency. It can be understood that in this embodiment, the first surface 10 is a primary mounting surface of the microfluidic device. The fact that multiple electrode pairs 2 and control circuit layer 3 are all disposed on the first surface 10 means that these components can be centrally arranged, facilitating manufacturing and assembly. Specifically, multiple electrode pairs 2 and control circuit layer 3 are all disposed in the non-opening area 12 of the first surface 10 to avoid obstructing the opening area 11.

[0059] Specifically, two driving electrodes 21 are spaced apart along the first direction X on opposite sides of the two receiving grooves 111 to ensure the consistency and stability of the electric field applied to the electrode pair 2, which helps to achieve a uniform electric field distribution. The control circuit layer 3 has a cutout portion 31 corresponding to the opening region 11 to facilitate the observation of DNA molecules through the microfluidic channel 112. Specifically, the cutout portion 31 of the control circuit layer 3 can be formed by an etching process.

[0060] In a specific embodiment, the common sidewall refers to the shared sidewall between two receiving grooves 111 within the same opening area 11. The common sidewall has microgrooves, which are shallow trench structures formed on the common sidewall. The depth and width of these microgrooves can be designed and fabricated according to actual needs. Microchannels are embedded within the microgrooves; these microchannels are tiny tubes embedded inside the microgrooves, used to carry and control the flow of microfluidics. The microchannels serve as microfluidic channels 112 to simulate blood vessels, facilitating the detection of DNA molecules under similar conditions. Specifically, the microchannels can be micrometer-sized quartz capillaries.

[0061] Furthermore, such as Figure 3As shown, the micro-pipe can be spaced apart from the bottom wall of the accommodation groove 111, and one end of the micro-pipe protrudes from the side of the common side wall into the accommodation groove 111. It can be understood that the DNA molecules in the liquid in the accommodation groove 111 are usually in a suspended state. By spacing the micro-pipe from the bottom wall of the accommodation groove 111, the micro-pipe is kept a distance from the bottom wall, facilitating the suspended DNA molecules to enter the micro-pipe from the accommodation groove 111.

[0062] By suspending the end of the micro-pipe close to the liquid inlet groove, the DNA molecules can directly enter the micro-pipe, reducing the probability of the DNA molecules contacting the common side wall before entering the micro-pipe, and preventing the glass burrs on the surface of the common side wall from damaging the DNA molecules. Preferably, both ends of the micro-pipe protrude from the side of the common side wall to facilitate the installation and fixation of the micro-pipe.

[0063] Of course, in other embodiments, the micro-flow channel 112 can also be a micro-groove or a micro-via hole provided on the common side wall to simulate a blood vessel, so that the DNA molecules can directly pass through the micro-groove or micro-via hole on the common side wall, improving the space utilization and structural compactness of the micro-fluidic device.

[0064] As shown in Figure 3 The electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212. One of the two driving electrodes 21 is the positive driving electrode 211, and the other is the negative driving electrode 212. The positive driving electrode 211 is arranged close to the liquid outlet groove, and the negative driving electrode 212 is arranged close to the liquid inlet groove, so that the DNA molecules can pass through the micro-flow channel 112 from the liquid inlet groove to the liquid outlet groove in the first direction X.

[0065] Referring to Figure 1 With Figure 2 In specific embodiments, the control circuit layer 3 can include a plurality of gate scan lines 32, a plurality of data lines 33, a plurality of thin film transistors 34, and a common electrode line 35. The plurality of gate scan lines 32 and the plurality of data lines 33 are arranged in a cross manner. Each positive driving electrode 211 is electrically connected to the data line 33 through at least one thin film transistor 34, and all the negative driving electrodes 212 are electrically connected to the common electrode line 35.

[0066] In this way, by using a plurality of gate scan lines 32 and data lines 33, independent control of each opening area 11 can be achieved. The thin film transistor 34 acts as a switching element and can efficiently control the flow of current, thereby improving the response speed and accuracy of the system. All the negative driving electrodes 212 are connected to the common electrode line 35, which simplifies the circuit design, reduces the number of lines, reduces the manufacturing cost, and improves the consistency and reliability of the system.

[0067] Specifically, as shown in Figure 1As shown, multiple opening regions 11 are arranged in a two-dimensional array on the first substrate 1, and each opening region 11 is provided with at least one thin film transistor 34; the gate scan line 32 is used to turn on a specific row of thin film transistors 34 for operation, and the data line 33 is used to transmit voltage signals to a specific column of thin film transistors 34 so as to generate an electric field in a specific electrode pair 2.

[0068] like Figure 2 As shown, the thin-film transistor 34 includes a gate 341, a source 342, and a drain 343. The gate scan line 32 is electrically connected to the gate 341 of the thin-film transistor 34 to turn the thin-film transistor 34 on or off. The data line 33 is electrically connected to the source 342 of the thin-film transistor 34, and the drain 343 of the thin-film transistor 34 is electrically connected to the positive driving electrode 211. When the thin-film transistor 34 is on, a voltage signal is transmitted to the positive driving electrode 211 through the data line 33, causing an electric field to be generated between the positive driving electrode 211 and the negative driving electrode 212.

[0069] The input voltage of the scanning signal line can be 15V; the voltage at one end of the negative driving electrode 212 is 0V, and the voltage at one end of the positive driving electrode 211 can be 0-55V to avoid the generation of a large number of bubbles due to the electrolysis of water molecules in the solution. Specifically, different voltages and frequencies can be supplied to the data line 33 according to the needs of the municipal bureau; for example, the voltage at one end of the positive driving electrode 211 can be any value among 5V, 10V, 20V, 40V, and 55V.

[0070] like Figure 1 As shown, all data lines 33, gate scan lines 32 and common electrode lines 35 are grouped on one side of the first substrate 1 and connected to an external control chip to control the operation of the microfluidic device.

[0071] Combination Figure 2 and Figure 4 , Figure 4 for Figure 2 The diagram shows a schematic of the thin-film transistor structure. In a specific embodiment, the gate 341 of the thin-film transistor 34 is disposed on the first substrate 1, and is disposed on the same layer as and electrically connected to the gate scan line 32. Additionally, the common electrode line 35 can also be disposed on the same layer as the gate scan line 32. An insulating layer 344 covers the gate 341 and overlaps the first substrate 1. A doped semiconductor layer 345 is disposed on the insulating layer 344 and corresponds to the gate 341. The source 342 and drain 343 are disposed on the same layer of the insulating layer 344 and respectively cover one side surface of the doped semiconductor layer 345, with the source 342 and drain 343 spaced apart on the doped semiconductor layer 345. A protective layer 346 covers the source 342, drain 343, and the uncovered surface of the doped semiconductor layer 345.

[0072] SeeFigure 5 , Figure 5 The microfluidic device provided by the second embodiment of the present application is a sectional view along the line A-A. The microfluidic device provided by the second embodiment of the present application is basically the same as the microfluidic device provided by the first embodiment of the present application in structure, and the difference is that, in the second embodiment of the present application, the plurality of electrode pairs 2 and the control circuit layer 3 are arranged on the second surface 20 of the first substrate 1; wherein the second surface 20 is arranged opposite to the first surface 10, that is, the second surface 20 is the bottom surface of the first substrate 1 in the second embodiment of the present application, so as to avoid the situation that the preparation of the electrode pairs 2 and the control circuit layer 3 causes pollution to the accommodation groove 111 of the first surface 10, resulting in adverse effects on the detection results. Figure 4

[0073] In specific embodiments, the two driving electrodes 21 can be arranged on the opposite sides of the two accommodation grooves 111 along the first direction X, so that the two accommodation grooves are located as much as possible between the electric fields generated by the two driving electrodes 21, facilitating the movement of all DNA molecules in the liquid inlet groove to the microfluidic channel 112 under the action of the electric field. Specifically, the two driving electrodes 21 are arranged at positions corresponding to the non-opening area 12 of the second surface 20.

[0074] Referring to Figure 6 , Figure 6 The microfluidic device provided by the third embodiment of the present application is a sectional view along the line A-A. The microfluidic device provided by the third embodiment of the present application is basically the same as the microfluidic device provided by the second embodiment of the present application in structure, and the difference is that, in the third embodiment of the present application, the two driving electrodes 21 are arranged on the bottom walls of the two accommodation grooves 111, so as to reduce the distance between the two driving electrodes 21, so that the electric field between the two driving electrodes 21 is stronger, the moving speed of the DNA molecules is faster, and the detection reaction time of the microfluidic device is improved.

[0075] Specifically, the positive driving electrode 211 of the two driving electrodes 21 is arranged corresponding to the bottom wall of the liquid outlet groove, and the negative driving electrode 212 is arranged corresponding to the bottom wall of the liquid inlet groove.

[0076] Referring to Figure 7 , Figure 7 ​A cross-sectional view of the microfluidic device along the line A-A is shown in the fourth embodiment of the present application. The microfluidic device provided in the fourth embodiment of the present application has substantially the same structure as the microfluidic device provided in the first embodiment, except that in the fourth embodiment of the present application, the first surface 10 further has a plurality of first grooves 13, and each driving electrode 21 is embedded in one of the first grooves 13, so that the force of the electric field generated by the two driving electrodes 21 on the DNA molecules is greater, so that the DNA molecules can pass through the microfluidic channel 112 faster, thereby improving the detection reaction time of the microfluidic device. In addition, arranging the driving electrodes 21 in the first grooves 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0077] Specifically, the first grooves 13 are arranged in the non-opening area 12 of the first surface 10 and extend from the first surface 10 to the second surface 20. The top surface of the driving electrode 21 arranged in the first groove 13 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top surface and the bottom surface of the driving electrode 21, that is, the microfluidic channel 112 is located in the opposite area of the two driving electrodes 21. It can be understood that the electric field lines in the opposite area of the two driving electrodes 21 are more dense, the electric field strength is stronger, and the force on the DNA molecules is greater.

[0078] Referring to Figure 8 , Figure 8 A cross-sectional view of the microfluidic device along the line A-A is shown in the fifth embodiment of the present application. The microfluidic device provided in the fifth embodiment of the present application has substantially the same structure as the microfluidic device provided in the fourth embodiment, except that in the fifth embodiment of the present application, the first substrate 1 further includes a second surface 20 opposite to the first surface 10, and the control circuit layer 3 is arranged on the second surface 20 of the first substrate 1. Among them, the second surface 20 further has a plurality of second grooves 14, and each driving electrode 21 is embedded in one of the second grooves 14; so that the force of the electric field on the DNA molecules is greater, while avoiding the case that the preparation of the electrode pair 2 and the control circuit layer 3 causes pollution to the accommodation groove 111 of the first surface 10, resulting in adverse effects on the detection results.

[0079] Specifically, the second grooves 14 are arranged at positions corresponding to the non-opening area 12 of the second surface 20 and extend from the second surface 20 to the first surface 10. And the top surface of the driving electrode 21 arranged in the second groove 14 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top surface and the bottom surface of the driving electrode 21, that is, the microfluidic channel 112 is located in the opposite area of the two driving electrodes 21.

[0080] Reference is made to Figure 9 , Figure 9 The microfluidic device provided by the sixth embodiment of the present application is a sectional view along the line A-A. The microfluidic device provided by the sixth embodiment of the present application is basically the same as the microfluidic device provided by the first embodiment, and the difference is that, in the sixth embodiment of the present application, the microfluidic device comprises a microfluidic substrate 100 and a control substrate 200; wherein the microfluidic substrate 100 can comprise a first substrate 1 and a plurality of electrode pairs 2, and the control substrate 200 can comprise a second substrate 4, a control circuit layer 3 and a plurality of contact pairs 5.

[0081] The first substrate 1 comprises a first surface 10, and the first surface 10 has a plurality of opening regions 11 arranged at intervals, for loading and processing samples; the opening region 11 is recessed downward from the first surface 10 of the first substrate 1 to form a groove-shaped opening region 11.

[0082] Each opening region 11 has two accommodation grooves 111 arranged at intervals along the first direction X for loading liquid and samples. The two accommodation grooves 111 have a common side wall, and the common side wall has a microfluidic channel 112, and the two accommodation grooves 111 are communicated through the microfluidic channel 112, and only a single DNA molecule in the sample can pass through the microfluidic channel 112, so as to facilitate the user to observe the DNA molecule through the microfluidic channel 112. This design enables each opening region 11 to independently accommodate and process different samples or reactions, while realizing the flow and observation of the sample through the microfluidic channel 112.

[0083] One of the two accommodation grooves 111 is an inlet groove for loading DNA molecule groups or other samples to be detected; the other is an outlet groove for accommodating single DNA molecules or other observed samples flowing out of the microfluidic channel 112.

[0084] The plurality of electrode pairs 2 are arranged on the first substrate 1 and fixedly connected with the first substrate 1, so that the electrode pairs 2 can exert a stable electric field; and each electrode pair 2 is arranged corresponding to one opening region 11 to exert an electric field on the corresponding opening region 11 to manipulate the movement of DNA molecules or other charged particles. The electrode pair 2 comprises two driving electrodes 21 arranged at intervals on opposite sides of the microfluidic channel 112 along the first direction X, so that the DNA molecules or other charged particles can pass through the microfluidic channel 112 along the first direction X.

[0085] The second substrate 4 can also be quartz glass. The control circuit layer 3 is arranged on the second substrate 4 and fixedly connected with the second substrate 4 to stabilize the transmission of voltage signals. Specifically, the control circuit layer 3 can be directly prepared on the second substrate 4, or the control circuit layer 3 can be first prepared on a substrate, and then the substrate is fixed on the second substrate 4.

[0086] Multiple contact pairs 5 are disposed on the second substrate 4 and electrically connected to the control circuit layer 3. Each contact pair 5 includes two connecting contacts 51, and each connecting contact 51 corresponds to one of the two driving electrodes 21. Specifically, the connecting contacts 51 can be disposed on the surface of the control circuit layer 3 away from the second substrate 4. Alternatively, the control circuit layer 3 and the connecting contacts 51 can be disposed on different surfaces of the second substrate 4, and the two can be electrically connected through vias to prevent the control circuit layer 3 from being corroded by evaporating liquid. In addition, directly disposing the connecting contacts 51 on the bottom surface of the second substrate 4 makes the bottom surface of the second substrate 4 facing the first substrate 1 flatter, making it easier for the bottom surface of the second substrate 4 to adhere to the surface of the first substrate 1, and preventing the control circuit layer 3 from being squeezed.

[0087] In this system, the control substrate 200 is attached to the microfluidic substrate 100 during use. Multiple contact pairs 5 are electrically connected to multiple electrode pairs 2. The control circuit layer 3 is used to apply voltage to each electrode pair 2 to control the DNA molecules suspended in the liquid in the accommodating tank 111 to enter the microfluidic channel 112 from the liquid inlet tank for detection by the detection device. At the same time, the control circuit layer 3 can also coordinate and control the voltage applied to each electrode pair 2, thereby achieving simultaneous independent control of multiple samples.

[0088] Thus, by integrating multiple independent opening regions 11 and electrode pairs 2 on a single first substrate 1, each opening region 11 and its corresponding electrode pair 2 can operate independently, allowing for flexible configuration of different experimental conditions. This enables the microfluidic device to process multiple DNA molecules or biological samples in parallel, significantly improving detection efficiency. Simultaneously, by placing the control circuit layer 3 and contact pairs 5 on a second substrate 4 independent of the first substrate 1, the microfluidic substrate 100 can be replaced individually when replacement is needed, reducing replacement costs; similarly, the control substrate 200 can also be replaced individually when replacement is needed, further reducing replacement costs.

[0089] like Figure 9 As shown, in a specific embodiment, multiple electrode pairs 2 can be disposed on the non-opening region 12 of the first surface 10 of the first substrate 1 to avoid blocking the opening region 11. Two driving electrodes 21 can be disposed at intervals along the first direction X on opposite sides of the two receiving grooves 111 to ensure the consistency and stability of the electric field applied to the electrode pairs 2, which helps to achieve a uniform electric field distribution.

[0090] When in use, the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100 so that the electrode pair 2 on the first surface 10 makes contact with the corresponding contact pair 5 on the control substrate 200, so that the control circuit layer 3 can apply voltage to the electrode pair 2.

[0091] In a specific embodiment, the control circuit layer 3 has a cutout 31 corresponding to the microfluidic channel 112, and the second substrate 4 is a transparent substrate, so that the microfluidic device has higher transparency and observability, making it easier for users to observe DNA molecules in the microfluidic channel 112 from the top of the microfluidic device through the cutout 31 and the corresponding transparent substrate. Specifically, the cutout 31 of the control circuit layer 3 can be formed by an etching process. In other embodiments, the DNA molecules in the microfluidic channel 112 can also be observed from the bottom of the microfluidic device.

[0092] Of course, in some embodiments, the control substrate 200 may also have a cutout portion 31 corresponding to the microfluidic channel 112 to further improve optical transmittance and facilitate real-time monitoring of the state of the microfluidic channel 112.

[0093] like Figure 9 As shown, in a specific embodiment, the first surface 10 also has a plurality of first grooves 13, and each driving electrode 21 is embedded in one of the first grooves 13. This makes the electric field generated by the two driving electrodes 21 exert a greater force on the DNA molecules, enabling the DNA molecules to pass through the microfluidic channel 112 more quickly and improving the detection response time of the microfluidic device. In addition, placing the driving electrodes 21 in the first grooves 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0094] Specifically, the first groove 13 is disposed in the non-opening area 12 of the first surface 10 and extends from the first surface 10 to the bottom. The top surface of the driving electrode 21 is flush with or protrudes from the first surface 10 so that when the control substrate 200 and the microfluidic substrate 100 are bonded, the connection contact point 51 on the control substrate 200 can contact and be electrically connected with the driving electrode 21.

[0095] Furthermore, the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top and bottom surfaces of the driving electrode 21, that is, the microfluidic channel 112 is located in the area directly opposite the two driving electrodes 21, so as to enhance the force of the electric field on the DNA molecules.

[0096] In a specific embodiment, electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212, and correspondingly, contact pair 5 includes a positive electrode connection contact 511 and a negative electrode connection contact 512.

[0097] Specifically, in combination Figure 1 , Figure 2 and Figure 9The control circuit layer 3 can include a plurality of gate scanning lines 32, a plurality of data lines 33, a plurality of thin film transistors 34, and a common electrode line 35; wherein the plurality of gate scanning lines 32 and the plurality of data lines 33 are arranged in a cross manner. Each positive electrode connecting contact 511 is electrically connected to the data line 33 through at least one thin film transistor 34. Specifically, the positive electrode connecting contact 511 is electrically connected to the drain 343 of the thin film transistor 34, so as to transmit a voltage signal to the positive electrode connecting contact 511 through the data line 33 when the thin film transistor 34 is turned on. The positive electrode connecting contact 511 is configured to be electrically connected to the positive electrode driving electrode 211, and when the control substrate 200 is attached to the microfluidic substrate 100, the positive electrode driving electrode 211 is in contact with and electrically connected to the positive electrode connecting contact 511.

[0098] All the negative electrode connecting contacts 512 are electrically connected to the common electrode line 35. The negative electrode connecting contact 512 is configured to be electrically connected to the negative electrode driving electrode 212, and when the control substrate 200 is attached to the microfluidic substrate 100, the negative electrode driving electrode 212 is in contact with and electrically connected to the negative electrode connecting contact 512.

[0099] In this way, by using the plurality of gate scanning lines 32 and the data lines 33, independent control of each opening region 11 can be achieved. The thin film transistor 34 as a switching element can efficiently control the current flow, thereby improving the response speed and accuracy of the system. All the negative electrode driving electrodes 212 are connected to the common electrode line 35, which simplifies the circuit design, reduces the number of lines, reduces the manufacturing cost, and improves the consistency and reliability of the system.

[0100] Referring to Figure 10 , Figure 10 The microfluidic device provided in the seventh embodiment of the present application is a sectional view along the line A-A. The microfluidic device provided in the seventh embodiment of the present application has substantially the same structure as the microfluidic device provided in the sixth embodiment of the present application, except that in the seventh embodiment of the present application, the plurality of electrode pairs 2 are arranged on the second surface 20 of the first substrate 1. The second surface 20 is arranged opposite to the first surface 10, that is, the second surface 20 is the bottom surface of the first substrate 1 in the seventh embodiment of the present application, so as to avoid the pollution of the accommodation groove 111 of the first surface 10 when the electrode pairs 2 are prepared, thereby avoiding the adverse effects on the detection results. Figure 10

[0101] The control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100 when in use, so that the electrode pairs 2 of the second surface 20 are in contact with the corresponding contact pairs 5 on the control substrate 200, and the control circuit layer 3 can apply a voltage to the electrode pairs 2.

[0102] As Figure 10 ​As shown, in specific embodiments, the two driving electrodes 21 can be arranged on opposite sides of the two accommodating grooves 111 along the first direction X, so that the two accommodating grooves are located between the electric fields generated by the two driving electrodes 21 as much as possible, facilitating the movement of all DNA molecules in the liquid inlet groove to the micro flow channel 112 under the action of the electric field.

[0103] Specifically, the two driving electrodes 21 are arranged at positions corresponding to the non-opening area 12 of the second surface 20, respectively. The second surface 20 also has a plurality of second grooves 14, and each driving electrode 21 is embedded in a second groove 14, so that the action of the electric field on the DNA molecules is greater, and at the same time, the preparation of the electrode 2 and the control circuit layer 3 avoids the pollution of the accommodating groove 111 of the first surface 10, which causes adverse effects on the detection results.

[0104] Specifically, the second groove 14 is arranged at a position corresponding to the non-opening area 12 of the second surface 20, and extends from the second surface 20 to the first surface 10. The top surface of the driving electrode 21 arranged in the second groove 14 is higher than the top surface of the micro flow channel 112, and the bottom surface of the driving electrode 21 is flush with the second surface 20 or protrudes from the first surface 10; so that the micro flow channel 112 is located in the opposite area of the two driving electrodes 21, which enhances the action of the electric field on the DNA molecules, and facilitates the contact and electrical connection between the connection contact 51 on the control substrate 200 and the driving electrode 21 after the control substrate 200 is attached to the micro flow control substrate 100.

[0105] Referring to Figure 11 , Figure 11 The micro flow control device provided by the eighth embodiment of the application is a sectional view along the A-A line. The micro flow control device provided by the eighth embodiment of the application has basically the same structure as the micro flow control device provided by the seventh embodiment, and the difference lies in that in the eighth embodiment of the application, the two driving electrodes 21 are arranged on the bottom walls of the two accommodating grooves 111, so as to reduce the distance between the two driving electrodes 21, thereby making the electric field between the two driving electrodes 21 stronger and the moving speed of the DNA molecules faster, and improving the detection reaction time of the micro flow control device.

[0106] Specifically, the positive driving electrode 211 of the two driving electrodes 21 is arranged corresponding to the bottom wall of the liquid outlet groove, and the negative driving electrode 212 is arranged corresponding to the bottom wall of the liquid inlet groove.

[0107] Referring to Figure 12a , Figure 12aA cross-sectional view of the microfluidic device along the line A-A is shown in the ninth embodiment. The microfluidic device of the ninth embodiment is basically the same as the microfluidic device of the sixth embodiment, except that the microfluidic substrate 100 includes a first substrate 1, and the control substrate 200 can include a second substrate 4, a control circuit layer 3, and a plurality of electrode pairs 2.

[0108] Specifically, the first substrate 1 includes a first surface 10 having a plurality of opening regions 11 arranged at intervals for loading and processing samples, and the opening regions 11 are recessed downward from the first surface 10 of the first substrate 1 to form a groove-shaped opening region 11.

[0109] Each opening region 11 has two accommodation grooves 111 arranged at intervals along the first direction X for loading liquid and samples. The two accommodation grooves 111 have a common side wall, and the common side wall has a microfluidic channel 112, and the two accommodation grooves 111 are connected through the microfluidic channel 112, and only a single DNA molecule in the sample can pass through the microfluidic channel 112, so that the user can observe the DNA molecule through the microfluidic channel 112. This design enables each opening region 11 to independently accommodate and process different samples or reactions, while achieving sample flow and observation through the microfluidic channel 112.

[0110] One of the two accommodation grooves 111 is an inlet groove for loading DNA molecule groups to be detected or other samples, and the other is an outlet groove for accommodating single DNA molecules or other observed samples flowing out of the microfluidic channel 112.

[0111] The second substrate 4 can also be quartz glass. The control circuit layer 3 is arranged on the second substrate 4 and fixedly connected with the second substrate 4 to stabilize the transmission of voltage signals. Specifically, the control circuit layer 3 can be directly prepared on the second substrate 4, or the control circuit layer 3 can be first prepared on a substrate, and then the substrate is fixed on the second substrate 4.

[0112] The plurality of electrode pairs 2 are arranged on the second substrate 4 and electrically connected with the control circuit layer 3, so that the control circuit layer 3 can apply voltage to the electrode pairs 2 to form an electric field. Each electrode pair 2 corresponds to an opening region 11 to apply an electric field to the corresponding opening region 11 to control the movement of DNA molecules or other charged particles. Each electrode pair 2 includes two driving electrodes 21 arranged at intervals.

[0113] The control substrate 200 is attached to the microfluidic substrate 100 in use, so that the two driving electrodes 21 are arranged at opposite sides of the microfluidic channel 112 along the first direction X, so as to enable the DNA molecules or other charged particles to pass through the microfluidic channel 112 along the first direction X. The control circuit layer 3 is configured to apply a voltage to each electrode pair 2, so as to control the DNA molecules suspended in the liquid in the containing groove 111 to enter the microfluidic channel 112 from the liquid inlet groove for detection by the detection device. Meanwhile, the control circuit layer 3 can also coordinate and control the voltage applied by each electrode pair 2, so as to achieve simultaneous and independent control of multiple samples.

[0114] In this way, by further integrating multiple electrode pairs 2 on the control substrate 200, when the microfluidic substrate 100 needs to be replaced, only the first substrate 1 needs to be replaced, further reducing the replacement cost. Meanwhile, by integrating multiple independent opening regions 11 and electrode pairs 2 on a single first substrate 1, each opening region 11 and its corresponding electrode pair 2 can be independently operated to flexibly configure different test conditions, so as to realize parallel processing of multiple DNA molecules or biological samples by the microfluidic device, and significantly improve the detection efficiency.

[0115] In specific embodiments, as shown in Figure 12a The control circuit layer 3 has a hollow part 31 corresponding to the microfluidic channel 112, and the second substrate 4 is a transparent substrate, so that the microfluidic device has higher transparency and observability, and the user can observe the DNA molecules in the microfluidic channel 112 from the top of the microfluidic device through the hollow part 31 and the corresponding partially transparent substrate. Specifically, the control circuit layer 3 can form the hollow part 31 by etching process. In other embodiments, the DNA molecules in the microfluidic channel 112 can also be observed from the bottom of the microfluidic device.

[0116] Of course, in some embodiments, the control substrate 200 can also have a hollow part 31 corresponding to the microfluidic channel 112, so as to further improve the optical transmittance and facilitate real-time monitoring of the state of the microfluidic channel 112.

[0117] As shown in Figure 12a In use, the control substrate 200 can be attached to the first surface 10 of the microfluidic substrate 100, so that each driving electrode 21 is attached to the non-opening region 12 of the first surface 10.

[0118] Referring to Figures 12b-12c , Figure 12b A cross-sectional view of the microfluidic device provided by another embodiment of the present application along the line A-A; Figure 12cThis is a cross-sectional view along line AA of a microfluidic device provided in another embodiment of this application. In some embodiments, the first substrate 1 further includes a second surface 20 opposite to the first surface 10, and the control substrate 200 can also be attached to the second surface 20 of the microfluidic substrate 100 during use.

[0119] Among them, such as Figure 12b As shown, the two driving electrodes 21 can be disposed on the side of the control circuit layer 3 away from the cutout portion 31, so that when the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the two driving electrodes 21 correspond to the non-opening area 12 respectively, and the two driving electrodes 21 are spaced apart along the first direction X on opposite sides of the two receiving grooves 111, so that the two receiving grooves are located as close as possible between the electric fields generated by the two driving electrodes 21, so that all DNA molecules in the liquid inlet can move towards the microfluidic channel 112 under the action of the electric field.

[0120] Or, such as Figure 12c As shown, the two driving electrodes 21 can also be disposed on the side of the control circuit layer 3 near the cutout portion 31, so that when the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the two driving electrodes 21 correspond to the opening area 11, and the two driving electrodes 21 are respectively located on the bottom wall of the two receiving grooves 111, so as to reduce the distance between the two driving electrodes 21, thereby making the electric field between the two driving electrodes 21 stronger, the DNA molecules move faster, and improving the detection response time of the microfluidic device.

[0121] like Figure 12a As shown, in a specific embodiment, a microgroove is provided on the common sidewall between the two receiving grooves 111 within the same opening area 11. A microchannel is embedded within the microgroove; the microchannel is a tiny conduit embedded inside the microgroove, used to carry and control the flow of microfluidics. The microchannel serves as a microfluidic channel 112 to simulate blood vessels, facilitating the detection of DNA molecules under similar conditions. Specifically, the microchannel can be a micrometer-sized quartz capillary.

[0122] Of course, in other embodiments, the microfluidic channel 112 can also be a microgroove or micropore disposed on the common sidewall to simulate blood vessels, so that DNA molecules can pass directly through the microgroove or micropore on the common sidewall, thereby improving the space utilization and structural compactness of the microfluidic device.

[0123] like Figure 12aAs shown, in specific embodiments, the electrode pair 2 includes a positive driving electrode 211 and a negative driving electrode 212. Among them, one of the two driving electrodes 21 is the positive driving electrode 211, and the other is the negative driving electrode 212; and when the control substrate 200 is attached to the microfluidic substrate 100, the positive driving electrode 211 is located on the side close to the liquid outlet groove, and the negative driving electrode 212 is located on the side close to the liquid inlet groove, so that the DNA molecules can pass through the microfluidic channel 112 from the liquid inlet groove to the liquid outlet groove in the first direction X.

[0124] In specific embodiments, in combination with Figure 1 , Figure 2 and Figure 12a , the control circuit layer 3 can include a plurality of gate scan lines 32, a plurality of data lines 33, a plurality of thin film transistors 34 and a common electrode line 35. Among them, the plurality of gate scan lines 32 and the plurality of data lines 33 are arranged in cross. Each positive driving electrode 211 is electrically connected to the data line 33 through at least one thin film transistor 34, and all negative driving electrodes 212 are electrically connected to the common electrode line 35.

[0125] In this way, by using a plurality of gate scan lines 32 and data lines 33, independent control of each opening area 11 can be achieved; the thin film transistor 34 as a switching element can efficiently control the current flow, thereby improving the response speed and accuracy of the system. All negative driving electrodes 212 are connected to the common electrode line 35, which simplifies the circuit design, reduces the number of lines, reduces the manufacturing cost, and improves the consistency and reliability of the system.

[0126] Specifically, at least one thin film transistor 34 is arranged corresponding to each opening area 11; the gate scan line 32 is used to open a specific row of thin film transistors 34 for operation, and the data line 33 is used to transmit a voltage signal to a specific column of thin film transistors 34, so that a specific electrode pair 2 generates an electric field.

[0127] Among them, the thin film transistor 34 includes a gate 341, a source 342 and a drain 343. Among them, the gate scan line 32 is electrically connected to the gate 341 of the thin film transistor 34, which is used to open or close the thin film transistor 34; the data line 33 is electrically connected to the source 342 of the thin film transistor 34, and the drain 343 of the thin film transistor 34 is electrically connected to the positive driving electrode 211, so that when the thin film transistor 34 is opened, the voltage signal is transmitted to the positive driving electrode 211 through the data line 33, so that the positive driving electrode 211 and the negative driving electrode 212 generate an electric field.

[0128] All data lines 33, gate scan lines 32 and common electrode lines 35 are collected on one side of the second substrate 4 and connected with an external control chip to control the operation of the microfluidic device.

[0129] Referring toFigure 13 , Figure 13 The microfluidic device provided by the tenth embodiment of the present application is a cross-sectional view along the line A-A. The microfluidic device provided by the tenth embodiment of the present application is basically the same as the microfluidic device provided by the ninth embodiment of the present application, except that the first surface 10 further has a plurality of first grooves 13, and the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100 in use, so that each driving electrode 21 is embedded in one first groove 13. Thus, the force of the electric field generated by the two driving electrodes 21 on the DNA molecules is greater, so that the DNA molecules can pass through the microfluidic channel 112 faster, thereby improving the detection reaction time of the microfluidic device. In addition, embedding the driving electrodes 21 in the first grooves 13 can further improve the space utilization and structural compactness of the microfluidic device.

[0130] Specifically, the first grooves 13 are arranged in the non-opening area 12 of the first surface 10 and extend from the first surface 10 to the bottom. When the control substrate 200 is attached to the first surface 10 of the microfluidic substrate 100, the top surface of the driving electrode 21 embedded in the first groove 13 is higher than the top surface of the microfluidic channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microfluidic channel 112, so that along the thickness direction Y of the first substrate 1, the microfluidic channel 112 is completely located between the top surface and the bottom surface of the driving electrode 21, i.e. the microfluidic channel 112 is located in the opposite area of the two driving electrodes 21, so as to enhance the force of the electric field on the DNA molecules.

[0131] Referring to Figure 14 , Figure 14 The microfluidic device provided by the eleventh embodiment of the present application is a cross-sectional view along the line A-A. The microfluidic device provided by the eleventh embodiment of the present application is basically the same as the microfluidic device provided by the ninth embodiment of the present application, except that the second surface 20 further has a plurality of second grooves 14, and the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100 in use, so that each driving electrode 21 is embedded in one second groove 14. Thus, the force of the electric field generated by the two driving electrodes 21 on the DNA molecules is greater, so that the DNA molecules can pass through the microfluidic channel 112 faster, thereby improving the detection reaction time of the microfluidic device. In addition, embedding the driving electrodes 21 in the second grooves 14 can further improve the space utilization and structural compactness of the microfluidic device.

[0132] Specifically, the second groove 14 is arranged at a position corresponding to the non-opening area 12 of the second surface 20 and extends from the second surface 20 to the first surface 10. When the control substrate 200 is attached to the second surface 20 of the microfluidic substrate 100, the top surface of the driving electrode 21 is higher than the top surface of the microflow channel 112, and the bottom surface of the driving electrode 21 is lower than the bottom surface of the microflow channel 112, so that along the thickness direction Y of the first substrate 1, the microflow channel 112 is completely located between the top surface and the bottom surface of the driving electrode 21, that is, the microflow channel 112 is located in the opposite area of the two driving electrodes 21, so as to enhance the force of the electric field on the DNA molecules.

[0133] Referring to Figure 15 , Figure 15 The microfluidic device provided in the twelfth embodiment of the present application is a sectional view along the A-A line. The microfluidic device provided in the twelfth embodiment of the present application has basically the same structure as the microfluidic device provided in the ninth embodiment of the present application, and the difference lies in that, in the twelfth embodiment of the present application, the second substrate 4 includes opposite third and fourth surfaces 30 and 40; the control circuit layer 3 is arranged on the third surface 30, and the electrode pair 2 is arranged on the fourth surface 40 and electrically connected to the control circuit layer 3 through the via 41; so that the third surface 30 of the second substrate 4 is more flat towards the first substrate 1, so that the third surface 30 of the second substrate 4 and the surface of the first substrate 1 are more easily attached, and the control circuit layer 3 is not squeezed. In addition, when the control substrate 200 is attached to the first surface 10 of the control substrate 200, the control circuit layer 3 can be prevented from being corroded by the evaporated liquid.

[0134] The present application also provides a preparation method of a microfluidic device, and specific steps of the preparation method include:

[0135] Step S1: providing a first substrate.

[0136] Specifically, the first substrate 1 includes a first surface 10; the first surface 10 has a plurality of opening areas 11 arranged at intervals, each opening area 11 has two accommodation grooves 111 arranged at intervals along a first direction, and the common side wall of the two accommodation grooves 111 has a microflow channel 112, and the two accommodation grooves 111 are communicated through the microflow channel 112.

[0137] In the specific implementation process, the accommodation grooves 111 and the microflow channel 112 can also be soaked with a modification liquid and dried to change the surface hydrophilicity, so that the DNA molecules are not easily adhered to the quartz glass wall, so that the DNA molecules are extended in the microflow channel 112, and observation and detection are facilitated.

[0138] Step S2: manufacturing a control circuit layer on the first substrate.

[0139] Specifically, the control circuit layer 3 can include a plurality of gate scanning lines 32, a plurality of data lines 33, a plurality of thin film transistors 34 and a common electrode line 35. The plurality of gate scanning lines 32 and the plurality of data lines 33 are arranged in a cross manner; and each opening region 11 is provided with at least one thin film transistor 34.

[0140] Step S3: A plurality of electrode pairs are made on the first substrate, and each electrode pair is arranged corresponding to an opening region.

[0141] Specifically, two driving electrodes 21 are made at intervals on the opposite sides of the micro flow channel 112 along the first direction X to form an electrode pair 2.

[0142] After step S3, it can further include: attaching a control chip on one side of the first substrate, and electrically connecting all the data lines, gate scanning lines and common electrode lines with the external chip.

[0143] The above description is only an embodiment of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation using the content of the present application specification and drawings, or direct or indirect application in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A microfluidic device, characterized in that, include: The first substrate includes a first surface and a second surface disposed opposite to each other; the first surface has a plurality of opening regions disposed at intervals, each opening region having two receiving grooves disposed at intervals along a first direction, the common sidewall of the two receiving grooves having a microfluidic channel, and the two receiving grooves being connected through the microfluidic channel; Multiple electrode pairs are disposed on the first substrate; each electrode pair corresponds to one opening region; each electrode pair includes two driving electrodes, which are spaced apart along the first direction on opposite sides of the microfluidic channel; each electrode pair includes a positive driving electrode and a negative driving electrode. A control circuit layer is disposed on the first substrate and electrically connected to the plurality of electrode pairs; wherein the control circuit layer is used to apply a voltage to each electrode pair; The control circuit layer includes: Multiple gate scan lines; Multiple data lines are arranged to intersect with the gate scan lines; Multiple thin-film transistors; each of the positive drive electrodes is electrically connected to the data line via at least one of the thin-film transistors; Common electrode line; all of the negative drive electrodes are electrically connected to the common electrode line; Wherein, the microfluidic channel is a microgroove or micro-hole disposed on the common sidewall; or The common sidewall has microgrooves, and microchannels are embedded in the microgrooves, which serve as microflow channels; the microchannels are spaced apart from the bottom wall of the receiving groove, and one end of the microchannel protrudes from the side of the common sidewall and extends into the receiving groove.

2. The microfluidic device according to claim 1, characterized in that, Multiple electrode pairs and the control circuit layer are disposed on the first surface. Two driving electrodes are disposed at intervals along the first direction on opposite sides of the two receiving slots. The control circuit layer has a cutout portion corresponding to the opening area.

3. The microfluidic device according to claim 1, characterized in that, The plurality of electrode pairs and the control circuit layer are all disposed on the second surface of the first substrate.

4. The microfluidic device according to claim 3, characterized in that, The two driving electrodes are spaced apart along the first direction on opposite sides of the two receiving slots; or The two driving electrodes are respectively disposed on the bottom wall of the two receiving grooves.

5. The microfluidic device according to claim 1, characterized in that, The first surface also has a plurality of first grooves, and each of the driving electrodes is embedded in one of the first grooves; or The second surface also has a plurality of second grooves, each of the driving electrodes being embedded in one of the second grooves.

6. The microfluidic device according to claim 5, characterized in that, The top surface of the driving electrode is higher than the top surface of the microfluidic channel, and the bottom surface of the driving electrode is lower than the bottom surface of the microfluidic channel.

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