A sliding dual-temperature-zone chemical vapor deposition system and process

Abstract

The application discloses a sliding type double-temperature-zone chemical vapor deposition system and process, which comprises an equipment body, an equipment cover and a double-temperature-zone reaction tube, the top end rear end of the equipment body is rotationally connected with the equipment cover, heating grooves are longitudinally arranged in the middle positions of the opposite sides of the equipment cover and the equipment body, the heating grooves are matched with the double-temperature-zone reaction tube, the double-temperature-zone reaction tube is longitudinally arranged in the heating grooves of the equipment body, and support frames are fixedly connected to the outer sides of the two ends of the double-temperature-zone reaction tube. When the equipment is in a stationary operation state, the stability of the equipment is ensured, the reaction zone is prevented from being vibrated due to the shaking of the equipment caused by external factors, the purity of subsequent products is influenced, the sealing operation of the connecting position is ensured when the equipment is in the stationary operation state, heat dissipation is prevented, the temperature cannot quickly reach the reaction temperature, and the power consumption of the equipment is increased.

Description

A sliding dual-temperature zone chemical vapor deposition system and process Technical Field

[0001] This invention relates to the field of chemical vapor deposition systems, and more particularly to a sliding dual-temperature zone chemical vapor deposition system and process. Background Technology

[0002] Chemical vapor deposition (CVD) is a chemical engineering technique that utilizes one or more gaseous compounds or elements containing thin-film elements to chemically react on a substrate surface to form a thin film. CVD is a relatively new technology for preparing inorganic materials, developed in recent decades. It is widely used for purifying substances, developing new crystals, and depositing various single-crystal, polycrystalline, or glassy inorganic thin-film materials. These materials can be oxides, sulfides, nitrides, carbides, or binary or multi-element inter-element compounds from groups III-V, II-IV, and IV-VI, and their physical properties can be precisely controlled through the vapor-phase doping deposition process.

[0003] Referring to Chinese invention patent publication number CN 111485224 B, entitled "A Chemical Vapor Deposition Apparatus and a Chemical Vapor Deposition Method," the chemical vapor deposition apparatus, used for preparing thin film materials, includes a first chamber, a second chamber, a transition chamber, a chassis, and a transport mechanism. The first and second chambers are used for the growth or post-processing of the thin film material. The transition chamber is connected to both the first and second chambers via a separator. The chassis is used to hold the growth substrate. The transport mechanism is configured to transport the chassis between the first and transition chambers, and between the second and transition chambers. The chemical vapor deposition method provided by this invention utilizes the aforementioned apparatus for the growth or post-processing of thin film materials.

[0004] However, some problems still exist in actual use:

[0005] Existing sliding dual-temperature zone chemical vapor deposition systems require reciprocating motion to heat the material inside the container during operation. When the equipment is stationary and undergoing localized heating for an extended period, there is a certain amount of movement space between the moving mechanism and the equipment body. External influences can cause the equipment to shake. Furthermore, when the equipment is stationary, there are gaps between the heating space of the equipment and the connection area of ​​the container, which can easily lead to a large amount of heat loss and increased energy consumption. Summary of the Invention

[0006] The purpose of this invention is to address the problems in existing sliding dual-temperature zone chemical vapor deposition systems. These systems require reciprocating motion to heat the material inside the container. When the equipment is stationary for prolonged localized heating, a certain amount of space exists between the moving mechanism and the equipment body, causing the equipment to shake due to external influences. Furthermore, when the equipment is stationary, gaps exist between the heating space and the container connection area, leading to significant heat loss and increased energy consumption. Therefore, this invention proposes a sliding dual-temperature zone chemical vapor deposition system and process.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A sliding dual-temperature zone chemical vapor deposition system and process includes an equipment body, an equipment cover, and a dual-temperature zone chemical vapor deposition tube. The equipment cover is rotatably connected to the top and rear end of the equipment body. Heating grooves are longitudinally formed at the middle positions of opposite sides of the equipment cover and the equipment body. The heating grooves are adapted to the dual-temperature zone chemical vapor deposition tube, which is longitudinally arranged inside the heating groove of the equipment body. Support frames are fixedly connected to the outer sides of both ends of the dual-temperature zone chemical vapor deposition tube, and a connecting base is fixedly connected to the bottom of the support frame. A displacement mechanism is fixedly connected to the bottom of the equipment body, and a self-locking mechanism is fixedly connected to the bottom of the displacement mechanism. A sealing mechanism is movably connected to the opposite side of the support frame.

[0009] Preferably, the self-locking mechanism includes an electric push rod, a connecting bar, a drive bar, a transmission bar, a push bar, a control bar, a connecting rod, and a limiting head. Two connecting bars are provided and symmetrically arranged. The electric push rod is located on opposite sides of the connecting bars, and its telescopic end is fixedly connected to the opposite side of one of the connecting bars. The drive bar is rotatably connected to the bottom of the connecting bar near the telescopic end of the electric push rod. One end of the transmission bar is pivotally connected to the end of the drive bar away from the connecting bar, and the push bar is rotatably connected to the other end of the transmission bar. The other end of the push bar is pivotally connected to the bottom of the other connecting bar. The control bars are symmetrically arranged and rotatably connected to the top two sides of the connecting bars, and the connecting rods are movably connected to the ends of the control bars away from the connecting bars via pivots. The limiting head is fixedly connected to the other end of the connecting rod.

[0010] Preferably, the self-locking mechanism further includes sliding rings, limiting frames, and sliding rods. There are two sliding rods and four sliding rings, which are symmetrically slidably connected to the outer side of the sliding rods. The limiting frames are fixedly connected to the inner side of the sliding rings. A rectangular groove is opened on the inner side of the sliding ring. The limiting head is adapted to the rectangular groove and is located inside the rectangular groove. The end of the limiting frame away from the sliding ring is sleeved on the outer side of the connecting rod.

[0011] Preferably, both ends of the sliding rod are fixedly connected to the inside of the connecting base, and the bottom end of the sliding ring is fixedly connected to the bottom end of the device body. The end of the sliding rod near the limiting head has a longitudinal groove, the inside of the groove has serrations, and the limiting head has a limiting tooth on the side near the groove.

[0012] Preferably, the displacement mechanism includes a control motor, a threaded rod, and a slider. The control motor is fixedly connected to one end of the connecting base. The threaded rod is longitudinally disposed inside the connecting base, and both ends of the threaded rod are movably connected to the connecting base through bearings. The output end of the control motor passes through the connecting base and is fixedly connected to one end of the threaded rod through a coupling. The slider is movably connected to the outside of the threaded rod through a thread.

[0013] Preferably, the top of the slider is fixedly connected to the bottom center of the device body, the electric push rod is fixedly connected longitudinally to the bottom center of the slider, and the electric push rod, drive bar, transmission bar, and push bar are all located at the bottom of the slider.

[0014] Preferably, the sealing mechanism includes a drive motor, a control rod, a limiting strip, a winding roller, and steel cables. One end of the control rod is fixedly connected to the output end of the drive motor via a coupling. Two limiting strips are provided and are symmetrically and longitudinally fixedly connected to the outside of the control rod. Two winding rollers are provided, and the opposite sides of the winding rollers are fixedly connected via connectors. The winding rollers have sliding holes inside, and the sliding holes are adapted to the connecting cross-section of the control rod and the limiting strip. The winding rollers are symmetrically and slidably connected to the surface of the control rod. Four steel cables are provided, and each pair is wound in the same direction around the surface of the winding rollers.

[0015] Preferably, the drive motor is fixedly connected to the outside of the support frame, the bottom of the equipment body has a through hole in the longitudinal direction, and the control rod passes through the inside of the through hole in the longitudinal direction. The two ends of the control rod are respectively movably connected to the opposite side of the support frame through bearings, and the outer side of the winding roller has a sliding groove.

[0016] Preferably, the sealing mechanism further includes sealing rings, connecting shafts, support bars, and rollers. There are four sealing rings, which are arc-shaped and symmetrically arranged in pairs. The bottom end of each set of sealing rings is rotatably connected to the surface of the connecting shaft via a torque spring. The connecting shaft is fixedly connected to both ends of the arc-shaped groove on the equipment body. One end of the support bar is fixedly connected to the end of the connecting shaft away from the sealing ring, and the rollers are movably connected to the other end of the support bar. The rollers are adapted to the slide groove and are rotatably connected inside the slide groove.

[0017] A method for using a sliding dual-temperature zone chemical vapor deposition system includes the following steps:

[0018] S1: After the initial chemical vapor deposition operation is completed, close the equipment cover and the equipment body. At this time, the dual-temperature zone reaction tube is placed on the opposite side of the heating tank. When the equipment is in use, the machine body needs to be moved left and right to heat the inside of the dual-temperature zone reaction tube. At this time, start the control motor to drive the thread to rotate. At the same time, the thread rod drives the slider to move left and right according to the direction and speed of the control motor through the thread. The equipment body moves with the slider trajectory. At the same time, the heating tank moves at the same frequency as the equipment body on the outside of the dual-temperature zone reaction tube.

[0019] S2; When the equipment needs to stop performing fixed-point operation on a certain area of ​​the dual-temperature zone reaction tube, the control electric push rod pushes the connecting bar forward. At this time, the connecting bar moves parallel to the telescopic end of the electric push rod, and at the same time, its two ends drive the control bar to be aligned. Then, the two ends of the control bar expand outward and push the connecting rod to slide inside the limit frame. Next, the limit head is pushed by the connecting rod to move closer to the groove side until the limit tooth is locked inside the saw tooth.

[0020] S3; As the electric push rod telescopic end moves, it pushes one end of the drive bar forward and moves it forward. At the same time, the other end of the drive bar pushes the transmission bar backward, causing it to push the push bar to move backward into the limit frame. At this time, the push bar pushes the connecting bar to move in the opposite direction to another connecting bar. At the same time, the two ends of the connecting bar drive the control bar to align. Subsequently, the two ends of the control bar expand outward and push the connecting rod to slide inside the limit frame. Then, the limit head is pushed by the connecting rod to move closer to the groove side until the limit tooth is locked inside the saw tooth.

[0021] S4; Before the equipment body moves, the control rod is rotated by the drive motor, and the winding roller rotates along its trajectory. At this time, the winding roller winds and contracts the steel cable wrapped around its outer side. Then, the guide wheel rolls in the groove, and the other end of the steel cable pulls the sealing ring to open away from the dual-temperature zone reaction tube. When the equipment moves left and right, the winding roller will be pulled along its trajectory by the connecting shaft, support bar and guide wheel in sequence.

[0022] S5; When the equipment is stationary, control the drive motor to rotate in the opposite direction. At this time, the winding roller loosens the sealing ring, and the guide wheel rolls in the groove.

[0023] Compared with the prior art, the present invention provides a sliding dual-temperature zone chemical vapor deposition system and process, which has the following characteristics:

[0024] Beneficial effects:

[0025] 1. This sliding dual-temperature zone chemical vapor deposition system, through its self-locking mechanism, ensures the stability of the equipment when it is stationary, preventing external factors from causing equipment shaking and vibration in the reaction zone, which would affect the purity of subsequent products. This solves the problems of existing sliding dual-temperature zone chemical vapor deposition systems, where, during prolonged local heating while the equipment is stationary, there is a certain amount of movement space between the moving mechanism and the equipment body, causing equipment shaking due to external influences. Furthermore, when the equipment is stationary, gaps exist between the heating space and the container connection area, which can easily lead to a large amount of heat loss and increased energy consumption.

[0026] 2. This sliding dual-temperature zone chemical vapor deposition system, through its sealing mechanism, ensures that the connection is sealed while the equipment is stationary, preventing heat loss that would prevent the temperature from reaching the reaction temperature quickly and thus reducing power consumption. This solves the problem in existing technologies where gaps exist between the heating space and the container connection area, leading to significant heat loss and increased energy consumption.

[0027] 3. This sliding dual-temperature zone chemical vapor deposition system, through its displacement mechanism, achieves stable left and right movement during equipment operation, avoiding jamming and vibration that could affect the internal chemical reaction. It solves the problems of stability and smoothness when existing systems use reciprocating motion to heat materials inside the container. Attached Figure Description

[0028] Figure 1 is a schematic diagram of the structure of the present invention;

[0029] Figure 2 is a bottom-view three-dimensional structural diagram of the present invention;

[0030] Figure 3 is a partial cross-sectional structural diagram of the device body of the present invention;

[0031] Figure 4 is a schematic diagram of the self-locking mechanism of the present invention;

[0032] Figure 5 is a schematic diagram of a partial cross-sectional connection structure of the sliding rod of the present invention;

[0033] Figure 6 is a schematic diagram of the displacement mechanism of the present invention;

[0034] Figure 7 is a schematic diagram of the sealing mechanism of the present invention;

[0035] Figure 8 is an enlarged structural diagram of point A in Figure 7 of this invention.

[0036] In the diagram: 1. Equipment body; 2. Equipment cover; 3. Dual-temperature zone reaction tube; 4. Support frame; 5. Connecting base; 6. Displacement mechanism; 601. Control motor; 602. Threaded rod; 603. Slider; 7. Self-locking mechanism; 701. Electric push rod; 702. Connecting bar; 703. Drive bar; 704. Transmission bar; 705. Push bar; 706. Control bar; 707. Connecting rod; 708. Limiting head; 709. Sliding ring; 7010. Limiting frame; 7011. Sliding rod; 8. Sealing mechanism; 801. Drive motor; 802. Control rod; 803. Limiting bar; 804. Winding roller; 805. Steel cable; 806. Sealing ring; 807. Connecting shaft; 808. Support bar; 809. Roller; 9. Rectangular groove; 10. Groove; 11. Through hole; 12. Slide groove; 13. Heating tank. Detailed Implementation

[0037] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0038] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless defined as herein.

[0039] Example 1:

[0040] Referring to Figures 1-8, a sliding dual-temperature zone chemical vapor deposition system and process includes an equipment body 1, an equipment cover 2, and a dual-temperature zone chemical vapor deposition tube 3. The equipment cover 2 is rotatably connected to the top and rear ends of the equipment body 1. Heating grooves 13 are longitudinally opened at the middle positions of opposite sides of the equipment cover 2 and the equipment body 1. The heating grooves 13 are adapted to the dual-temperature zone chemical vapor deposition tube 3, and the dual-temperature zone chemical vapor deposition tube 3 is longitudinally arranged inside the heating grooves 13 of the equipment body 1. Support frames 4 are fixedly connected to the outer sides of both ends of the dual-temperature zone chemical vapor deposition tube 3, and a connecting base 5 is fixedly connected to the bottom end of the support frame 4. A displacement mechanism 6 is fixedly connected to the bottom of the equipment body 1, and a self-locking mechanism 7 is fixedly connected to the bottom of the displacement mechanism 6. A sealing mechanism 8 is movably connected to the opposite side of the support frame 4.

[0041] Example 2:

[0042] Referring to Figures 2, 3, 4, and 5, a sliding dual-temperature zone chemical vapor deposition system and process are basically the same as in Example 1. Furthermore, the self-locking mechanism 7 includes an electric push rod 701, a connecting bar 702, a drive bar 703, a transmission bar 704, a push bar 705, a control bar 706, a connecting rod 707, and a limiting head 708. Two connecting bars 702 are provided and symmetrically arranged. The electric push rod 701 is located on the opposite side of the connecting bar 702, and the telescopic end of the electric push rod 701 is fixedly connected to it. On the opposite side of one connecting bar 702, a drive bar 703 is rotatably connected to the bottom of the connecting bar 702 near the telescopic end of the electric push rod 701. One end of the transmission bar 704 is pivotally connected to the end of the drive bar 703 away from the connecting bar 702, and a push bar 705 is rotatably connected to the other end of the transmission bar 704. The other end of the push bar 705 is pivotally connected to the bottom of another connecting bar 702. Control bars 706 are symmetrically arranged and rotatably connected to the top two sides of the connecting bars 702, and connecting rods 707 are respectively connected via... The shaft is movably connected to the end of the control bar 706 away from the connecting bar 702, and the limiting head 708 is fixedly connected to the other end of the connecting rod 707. The self-locking mechanism 7 also includes a sliding ring 709, a limiting bracket 7010, and a sliding rod 7011. There are two sliding rods 7011, and four sliding rings 709 are provided and symmetrically slidably connected to the outer side of the sliding rods 7011. The limiting brackets 7010 are fixedly connected to the inner side of the sliding rings 709. A rectangular groove 9 is opened on the inner side of the sliding rings 709. The limiting head 708... The limiting head 708 is located inside the rectangular groove 9 and is adapted to the rectangular groove 9. The end of the limiting frame 7010 away from the sliding ring 709 is sleeved on the outside of the connecting rod 707. The two ends of the sliding rod 7011 are respectively fixedly connected to the inside of the connecting base 5. The bottom end of the sliding ring 709 is fixedly connected to the bottom end of the equipment body 1. The end of the sliding rod 7011 near the limiting head 708 has a longitudinal groove 10. The groove 10 has serrations inside, and the limiting head 708 has a limiting tooth on the side near the groove 10.

[0043] By controlling the electric push rod 701 to push the connecting bar 702 forward, the connecting bar 702 moves parallel to the telescopic end of the electric push rod 701. At the same time, its two ends drive the control bar 706 to align. Subsequently, the two ends of the control bar 706 expand outward, pushing the connecting rod 707 to slide inside the limiting frame 7010. Then, the limiting head 708 is pushed by the connecting rod 707 to move closer to the side of the groove 10 until the limiting tooth is engaged inside the sawtooth. As the telescopic end of the electric push rod 701 moves, it pushes one end of the drive bar 703 forward, while the other end of the drive bar 703 pushes the transmission bar 704 backward, pushing it forward. As the push bar 705 moves backward toward the interior of the limiting frame 7010, the push bar 705 pushes the connecting bar 702 to move in the opposite direction to another connecting bar. At the same time, the two ends of the connecting bar 702 drive the control bar 706 to align. Subsequently, the two ends of the control bar 706 expand outward, pushing the connecting rod 707 to slide inside the limiting frame 7010. Then, the limiting head 708 is pushed by the connecting rod 707 toward the side of the groove 10 until the limiting tooth is engaged inside the saw teeth. This helps to ensure the stability of the equipment when it is stationary, and avoids external factors causing the equipment to shake and vibrate the reaction zone, which would affect the purity of the subsequent products.

[0044] Example 3:

[0045] Referring to Figures 1, 2, 3, 6, and 7, a sliding dual-temperature zone chemical vapor deposition system and process are basically the same as in Example 1. However, the displacement mechanism 6 includes a control motor 601, a threaded rod 602, and a slider 603. The control motor 601 is fixedly connected to one end of the connecting base 5. The threaded rod 602 is longitudinally disposed inside the connecting base 5, and both ends of the threaded rod 602 are movably connected to the connecting base 5 via bearings. The output end of the control motor 601 passes through the connecting base 5 and is fixedly connected to one end of the threaded rod 602 via a coupling. The slider 603 is movably connected to the outside of the threaded rod 602 via a thread. The top end of the slider 603 is fixedly connected to the bottom center of the equipment body 1. The electric push rod 701 is longitudinally fixedly connected to the bottom center of the slider 603. The electric push rod 701, drive bar 703, transmission bar 704, and push bar 705 are all located at the bottom of the slider 603.

[0046] The control motor 601 is started to drive the thread to rotate. At the same time, the thread rod 602 drives the slider 603 to move left and right in accordance with the direction and speed of the control motor 601. The equipment body 1 moves along the trajectory of the slider 603. Meanwhile, the heating tank 13 moves at the same frequency as the equipment body 1 outside the dual-temperature zone reaction tube 3. This helps to ensure the stability of the left and right movement of the equipment during operation and avoids jamming and vibration, which would affect the internal chemical reaction.

[0047] Example 4:

[0048] Referring to Figures 1, 2, 3, 6, 7, and 8, a sliding dual-temperature zone chemical vapor deposition system and process are basically the same as in Example 1. However, the sealing mechanism 8 includes a drive motor 801, a control rod 802, a limiting strip 803, winding rollers 804, and steel cables 805. One end of the control rod 802 is fixedly connected to the output end of the drive motor 801 via a coupling. Two limiting strips 803 are symmetrically and longitudinally fixedly connected to the outside of the control rod 802. Two winding rollers 804 are provided, and their opposite sides are fixedly connected via connectors. Sliding holes are provided inside the winding rollers 804, and these holes are adapted to the connecting cross-sections of the control rod 802 and the limiting strips 803. The winding rollers 804 are symmetrically slidably connected to the surface of the control rod 802. Four steel cables 805 are provided, with each pair forming a group, wound in the same direction around the surface of the winding rollers 804. The drive motor 801 is fixedly connected to... On the outside of the support frame 4, a through hole 11 is longitudinally opened at the bottom of the equipment body 1, and the control rod 802 longitudinally passes through the inside of the through hole 11. The two ends of the control rod 802 are respectively movably connected to the opposite side of the support frame 4 through bearings. A groove 12 is opened on the outside of the winding roller 804. The sealing mechanism 8 also includes a sealing ring 806, a connecting shaft 807, a support bar 808, and rollers 809. There are four sealing rings 806, and the sealing rings 806 are arc-shaped and symmetrically arranged in pairs. The bottom end of each set of sealing rings 806 is rotatably connected to the surface of the connecting shaft 807 through a torque spring, and the connecting shaft 807 is respectively fixedly connected to the two ends of the arc-shaped groove opened on the equipment body 1. One end of the support bar 808 is fixedly connected to the end of the connecting shaft 807 away from the sealing ring 806, and the rollers 809 are all movably connected to the other end of the support bar 808. The rollers 809 are adapted to the groove 12, and the rollers 809 are tumblingly connected to the inside of the groove 12.

[0049] The drive motor 801 drives the control rod 802 to rotate, and the winding roller 804 rotates along its trajectory. At this time, the winding roller 804 winds and contracts the outer steel cable 805. Next, the guide wheel rolls in the slide groove 12. Then, the other end of the steel cable 805 pulls the sealing ring 806 to open away from the dual-temperature zone reaction tube 3. When the equipment moves left and right, the winding roller 804 will be pulled along its trajectory by the connecting shaft 807, support bar 808 and guide wheel in sequence. When the equipment is stationary, the drive motor 801 is controlled to rotate in the opposite direction. At this time, the winding roller 804 releases the sealing ring 806, and the guide wheel rolls in the slide groove 12, thereby clamping the connection between the heating tank 13 and the dual-temperature zone reaction tube 3. This helps to ensure the sealing operation at the connection when the equipment is stationary, prevents heat loss and prevents the temperature from not reaching the reaction temperature quickly, and also prevents the equipment from increasing power consumption.

[0050] Working principle: After the initial chemical vapor deposition (CVD) operation is completed, the equipment cover 2 is closed to the equipment body 1. At this time, the dual-temperature zone reaction tube 3 is placed on the opposite side of the heating tank 13. During operation, the equipment needs to move left and right to heat the inside of the dual-temperature zone reaction tube 3. The control motor 601 is then activated to rotate the threaded rod. Simultaneously, the threaded rod 602 drives the slider 603 to move left and right, following the direction and speed of the control motor 601. The equipment body 1 moves along the trajectory of the slider 603. Meanwhile, the heating tank 13 moves at the same frequency as the equipment body 1 outside the dual-temperature zone reaction tube 3. When the equipment needs to be stopped... When the dual-temperature zone reaction tube 3 is performing fixed-point operation in a certain area, the control electric push rod 701 pushes the connecting bar 702 forward. At this time, the connecting bar 702 moves parallel to the telescopic end of the electric push rod 701, and at the same time, its two ends drive the control bar 706 to be aligned. Subsequently, the two ends of the control bar 706 expand outward, pushing the connecting rod 707 to slide inside the limiting frame 7010. Then, the limiting head 708 is pushed by the connecting rod 707 to move closer to the side of the groove 10 until the limiting tooth is engaged inside the sawtooth. At the same time, the telescopic end of the electric push rod 701 moves forward, pushing one end of the drive bar 703 forward, and at the same time, the other end of the drive bar 703 moves forward. The end of the push bar 704 pushes the push bar 705 backward into the limit frame 7010. At this time, the push bar 705 pushes the connecting bar 702 to move in the opposite direction to another connecting bar. At the same time, the two ends of the connecting bar 702 drive the control bar 706 to align. Then, the two ends of the control bar 706 expand outward and push the connecting rod 707 to slide inside the limit frame 7010. Next, the limit head 708 is pushed by the connecting rod 707 to move closer to the groove 10 until the limit tooth is engaged inside the saw tooth. Before the equipment body 1 moves, the drive motor 801 drives the control rod 802 to rotate, and at the same time, the winding roller 8 04. Following its trajectory, the winding roller 804 winds and contracts the outer steel cable 805. Next, the guide wheel rolls in the slide groove 12. Then, the other end of the steel cable 805 pulls the sealing ring 806 to open away from the dual-temperature zone reaction tube 3. When the equipment moves left and right, it will sequentially pull the winding roller 804 to follow its trajectory through the connecting shaft 807, support bar 808 and guide wheel. When the equipment is stationary, the drive motor 801 is controlled to rotate in the opposite direction. At this time, the winding roller 804 releases the sealing ring 806, and the guide wheel rolls in the slide groove 12, thereby clamping the connection between the heating tank 13 and the dual-temperature zone reaction tube 3.

[0051] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A sliding dual-temperature zone chemical vapor deposition system, comprising a device body (1), a device cover (2), and a dual-temperature zone chemical reaction tube (3), characterized in that, The top and rear end of the device body (1) are rotatably connected to a device cover (2), and heating grooves (13) are longitudinally opened at the middle positions of opposite sides of the device cover (2) and the device body (1). The heating grooves (13) are adapted to the dual-temperature zone reaction tube (3), and the dual-temperature zone reaction tube (3) is longitudinally arranged inside the heating groove (13) of the device body (1). Support frames (4) are fixedly connected to the outer sides of both ends of the dual-temperature zone reaction tube (3), and a connecting base (5) is fixedly connected to the bottom end of the support frame (4). A displacement mechanism (6) is fixedly connected to the bottom of the device body (1), and a self-locking mechanism (7) is fixedly connected to the bottom of the displacement mechanism (6). The support frame (4) is fixedly connected to the bottom end of the device body (1). A sealing mechanism (8) is movably connected to the opposite side; the sealing mechanism (8) includes a drive motor (801), a control rod (802), a limiting strip (803), a winding roller (804), and a steel cable (805). One end of the control rod (802) is fixedly connected to the output end of the drive motor (801) via a coupling, and two limiting strips (803) are provided and are symmetrically and longitudinally fixedly connected to the outside of the control rod (802). Two winding rollers (804) are provided, and the opposite sides of the winding rollers (804) are fixedly connected via connectors. The winding rollers (804) have sliding holes inside, and the sliding holes are adapted to the connecting cross section of the control rod (802) and the limiting strips (803). The winding roller (804) is symmetrically slidably connected to the surface of the control rod (802). The steel cable (805) has four strands, and each pair is wound in the same direction around the surface of the winding roller (804). The drive motor (801) is fixedly connected to the outside of the support frame (4). The bottom of the equipment body (1) has a through hole (11) in the longitudinal direction, and the control rod (802) passes through the inside of the through hole (11) in the longitudinal direction. The two ends of the control rod (802) are respectively movably connected to the opposite side of the support frame (4) through bearings. The outer side of the winding roller (804) has a groove (12). The sealing mechanism (8) also includes a sealing ring (806) and a connecting shaft (807). The support bar (808) and rollers (809) are provided. The sealing ring (806) is provided in four shapes and is arranged in pairs symmetrically. The bottom end of each set of sealing rings (806) is rotatably connected to the surface of the connecting shaft (807) by a torque spring. The connecting shaft (807) is fixedly connected to both ends of the arc groove on the equipment body (1). One end of the support bar (808) is fixedly connected to the end of the connecting shaft (807) away from the sealing ring (806). The rollers (809) are movably connected to the other end of the support bar (808). The rollers (809) are adapted to the slide groove (12) and the rollers (809) are rotatably connected to the inside of the slide groove (12).

2. The sliding dual-temperature zone chemical vapor deposition system according to claim 1, characterized in that, The self-locking mechanism (7) includes an electric push rod (701), a connecting bar (702), a drive bar (703), a transmission bar (704), a push bar (705), a control bar (706), a connecting rod (707), and a limiting head (708). Two connecting bars (702) are provided and symmetrically arranged. The telescopic end of the electric push rod (701) is fixedly connected to the opposite side of one of the connecting bars (702). The drive bar (703) is rotatably connected to the bottom of the connecting bar (702) near the telescopic end of the electric push rod (701). One of the transmission bars (704)... The end shaft is connected to the end of the drive bar (703) away from the connecting bar (702), and the push bar (705) is rotatably connected to the other end of the transmission bar (704). The other end shaft of the push bar (705) is connected to the bottom of another connecting bar (702). The control bars (706) are symmetrically arranged and rotatably connected to the top two sides of the connecting bar (702). The connecting rods (707) are movably connected to the end of the control bar (706) away from the connecting bar (702) through the shaft. The limiting head (708) is fixedly connected to the other end of the connecting rod (707).

3. The sliding dual-temperature zone chemical vapor deposition system according to claim 2, characterized in that, The self-locking mechanism (7) further includes a sliding ring (709), a limiting frame (7010), and a sliding rod (7011). There are two sliding rods (7011), and four sliding rings (709) are provided and symmetrically slidably connected to the outside of the sliding rods (7011). The limiting frames (7010) are fixedly connected to the inside of the sliding rings (709). A rectangular groove (9) is opened on the inside of the sliding rings (709). The limiting head (708) is adapted to the rectangular groove (9) and is located inside the rectangular groove (9). The end of the limiting frame (7010) away from the sliding ring (709) is sleeved on the outside of the connecting rod (707).

4. A sliding dual-temperature zone chemical vapor deposition system according to claim 3, characterized in that, The two ends of the sliding rod (7011) are respectively fixedly connected to the inside of the connecting base (5), and the top of the sliding ring (709) is fixedly connected to the bottom of the equipment body (1). The sliding rod (7011) has a groove (10) longitudinally opened at one end near the limiting head (708). The groove (10) has serrations inside, and the limiting head (708) has a limiting tooth on one side near the groove (10).

5. A sliding dual-temperature zone chemical vapor deposition system according to claim 4, characterized in that, The displacement mechanism (6) includes a control motor (601), a threaded rod (602), and a slider (603). The control motor (601) is fixedly connected to one end of the connecting base (5). The threaded rod (602) is longitudinally arranged inside the connecting base (5), and both ends of the threaded rod (602) are movably connected to the connecting base (5) through bearings. The output end of the control motor (601) passes through the connecting base (5) and is fixedly connected to one end of the threaded rod (602) through a coupling. The slider (603) is movably connected to the outside of the threaded rod (602) through a thread.

6. A sliding dual-temperature zone chemical vapor deposition system according to claim 5, characterized in that, The top of the slider (603) is fixedly connected to the bottom middle position of the device body (1), and the electric push rod (701) is fixedly connected longitudinally to the bottom middle position of the slider (603). The electric push rod (701), drive bar (703), transmission bar (704), and push bar (705) are all located at the bottom of the slider (603).

7. The method of using a sliding dual-temperature zone chemical vapor deposition system according to claim 6, characterized in that, Includes the following steps: S1: After the initial operation of chemical vapor deposition is completed, close the equipment cover (2) and the equipment body (1). At this time, the dual-temperature zone reaction tube (3) is placed on the opposite side of the heating tank (13). When the equipment is in use, the machine body needs to be moved left and right to heat the inside of the dual-temperature zone reaction tube (3). At this time, start the control motor (601) to drive the thread to rotate. At the same time, the thread rod (602) drives the slider (603) to move left and right following the direction and speed of the control motor (601). The equipment body (1) moves along the trajectory of the slider (603). At the same time, the heating tank (13) moves at the same frequency as the equipment body (1) on the outside of the dual-temperature zone reaction tube (3). S2: When the equipment needs to stop the dual-temperature zone reaction, When the control rod (3) is performing fixed-point operation in a certain area, the electric push rod (701) is controlled to push the connecting rod (702) forward. At this time, the connecting rod (702) moves parallel to the telescopic end of the electric push rod (701), and at the same time, its two ends drive the control rod (706) to be aligned. Then, the two ends of the control rod (706) expand outward and push the connecting rod (707) to slide inside the limit frame (7010). Next, the limit head (708) is pushed by the connecting rod (707) to move closer to the groove (10) until the limit tooth is locked inside the saw tooth. Specifically, when the telescopic end of the electric push rod (701) moves, it pushes one end of the drive rod (703) forward and moves it forward, while the other end of the drive rod (703) pushes backward. The drive bar (704) pushes the push bar (705) to move backward into the limit frame (7010). At this time, the push bar (705) pushes the connecting bar (702) to move in the opposite direction to another connecting bar. At the same time, the two ends of the connecting bar (702) drive the control bar (706) to be aligned. Then, the two ends of the control bar (706) expand outward to push the connecting rod (707) to slide inside the limit frame (7010). Next, the limit head (708) is pushed by the connecting rod (707) to move closer to the groove (10) until the limit tooth is locked inside the saw tooth; S3; Before the equipment body (1) moves, the drive motor (801) drives the control rod (802) to rotate, and at the same time the winding roller (8 04) Following its trajectory, the winding roller (804) winds and contracts the outer steel cable (805), and then the guide wheel rolls in the groove (12). Subsequently, the other end of the steel cable (805) pulls the sealing ring (806) to open away from the dual-temperature zone reaction tube (3). When the equipment moves left and right, it will sequentially pull its winding roller (804) to follow its trajectory through the connecting shaft (807), support bar (808) and guide wheel. S4; When the equipment is stationary, the drive motor (801) is controlled to rotate in the opposite direction. At this time, the winding roller (804) releases the sealing ring (806), and the guide wheel rolls in the groove (12), thereby clamping the connection between the heating tank (13) and the dual-temperature zone reaction tube (3).

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