CVD product hoisting structure

Abstract

The invention relates to the technical field of CVD product processing, and discloses a CVD product hoisting structure which comprises a frame, a mounting assembly and a hoisting assembly, the frame is used for mounting a product, the mounting assembly is located below the frame and connected with the frame, and the mounting assembly is detachably connected with a processing frame so that the lower portion of the frame can be fixed or moved; the hoisting assembly is located above the frame and connected with the frame, and the hoisting assembly is matched with the hoisting tool and used for hoisting the frame so that the frame can be turned over in the air, or the hoisting assembly is matched with the machining frame so that the upper portion of the frame can be fixed. According to the automatic overturning device, manual intervention is reduced, the safety risk of overturning operation on workers is reduced, the risk that an upper electrode is damaged possibly due to misoperation is reduced, and the production progress and the product quality are guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of CVD product processing, in particular to a CVD product hoisting structure. Background Art

[0002] In the chemical vapor deposition (CVD) process, the diffuser is equivalent to the upper electrode of a parallel capacitor plate. It is typically a key component of the gas delivery system. Its primary function is to evenly distribute the reactant gases into the reaction chamber to ensure uniformity and consistency in the deposited film. During the CVD process, reactant gases (such as SiH4, NH3, WF6, etc.) need to evenly cover the entire surface of the wafer or substrate to avoid variations in film thickness caused by localized uneven deposition rates. The diffuser achieves uniform gas dispersion through special designs (such as porous structures or diversion channels).

[0003] However, in actual production, the upper electrode requires regular maintenance, cleaning, and replacement of internal components. When the upper electrode needs to be flipped, manual intervention is often required, which poses a significant safety risk. Improper operation can also damage the upper electrode, impacting production schedules and product quality. Summary of the Invention

[0004] The present application discloses a CVD product hoisting structure to solve the problems in the prior art of manual intervention posing safety risks and affecting production progress and product quality.

[0005] In order to solve the above problems, the present invention adopts the following technical solutions: A CVD product hoisting structure, comprising: Frame, the frame is used to install the product; An installation component is located below the frame and is connected to the frame. The installation component is detachably connected to the processing frame so that the lower portion of the frame can be fixed or moved; The hoisting assembly is located above the frame and is connected to the frame. The hoisting assembly cooperates with the sling to lift the frame so that the frame can be flipped in the air, or the hoisting assembly cooperates with the processing frame to fix the upper part of the frame.

[0006] The technical solution adopted by the present invention can achieve the following beneficial effects: The present invention ensures the stability of the product during maintenance, cleaning, and replacement of internal parts by installing the product in a frame, cooperating the hoisting assembly with the upper part of the processing frame, and connecting the mounting assembly with the lower part of the processing frame, thereby preventing shaking from affecting product quality. When it is necessary to perform maintenance, cleaning, and replacement of internal parts on the other side of the product, the mounting assembly is separated from the processing frame so that the lower part of the frame can be moved. The hoisting assembly is then coordinated with the sling, and the frame is lifted by the sling. The frame can be flipped in the air by a rotation action driven manually or by the sling itself. After flipping into place, the frame is lowered by the sling so that the hoisting assembly is re-cooperated with the upper part of the processing frame, and the mounting assembly is re-connected with the lower part of the processing frame so that the other side of the product can be maintained, cleaned, and replaced with internal parts. The present invention reduces manual intervention, reduces the safety risk of the flipping operation to the staff, and reduces the risk of damage to the upper electrode due to improper operation, thereby ensuring production progress and product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0008] Figure 1 It is a schematic diagram of the front view structure disclosed in some embodiments of the present application; Figure 2 yes Figure 1 Schematic diagram of the enlarged structure at A in the middle; Figure 3 yes Figure 1 Schematic diagram of the enlarged structure at B in the middle; Figure 4 yes Figure 1 Schematic diagram of the enlarged structure at C in the middle; Figure 5 is a schematic diagram of the right side structure disclosed in some embodiments of the present application; Figure 6 yes Figure 5 Schematic diagram of the enlarged structure at D in the middle; Figure 7 yes Figure 5 Schematic diagram of the enlarged structure at E in the middle; Figure 8 yes Figure 5 Schematic diagram of the enlarged structure at F in the middle; Figure 9 It is a schematic structural diagram of the processing frame disclosed in some embodiments of the present application.

[0009] In the picture: 100-frame; 110-first connecting rod; 120-second connecting rod; 200 - mounting assembly; 210 - rotating portion; 211 - rotating shaft; 212 - first stopper; 220 - mounting plate; 230 - fixing plate; 240 - waist-shaped hole; 250 - sliding rod; 260 - second stopper; 270 - connecting hole; 300-Lifting assembly; 310-Hanging fixture; 311-Slot; 312-Block; 320-Lifting ring; 400 - adjustment assembly; 410 - first telescopic member; 420 - connecting plate; 430 - second telescopic member; 440 - retaining edge; 450 - through hole; 10-Processing rack. DETAILED DESCRIPTION

[0010] To make the objectives, technical solutions, and advantages of the present invention more apparent, the technical solutions of the present invention will be described in detail below. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other implementations obtained by those of ordinary skill in the art without inventive effort are within the scope of protection of the present invention.

[0011] The terms "first", "second", "third", etc. in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", "third", etc. are generally of the same type, and do not limit the number of objects. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0012] The inventive concept of this application is described here: The inventor found that during actual use, the traditional method is to remove the upper electrode from the reaction chamber by a crane or a clamp, and then install the upper electrode on the processing frame, and perform maintenance, cleaning and replacement of internal components on one side of the upper electrode. When the other side of the upper electrode needs to be maintained, cleaned and replaced with internal components, the upper electrode needs to be manually removed, flipped over and then reinstalled on the processing frame. Due to the complex structure and heavy weight of the upper electrode, this poses a great safety risk. At the same time, the upper electrode may also be damaged due to improper operation, affecting production progress and product quality. Moreover, the processing frame cannot be installed and fixed for upper electrodes of different sizes, reducing the flexibility and practicality of the equipment.

[0013] Based on this, the inventor provides a CVD product lifting structure, in which the upper electrode is installed on the lifting structure, and the lifting structure is installed on a processing frame. When the upper electrode needs to be flipped, the lifting structure is lifted by a crane, and then flipped and reinstalled on the processing frame, thereby reducing manual intervention and the risk of damage to the upper electrode. At the same time, the lifting structure can install and fix upper electrodes of different sizes, thereby improving flexibility and practicality.

[0014] The following is combined with Figures 1 to 9 , a CVD product lifting structure provided in this application is described in detail through specific embodiments and application scenarios.

[0015] Reference Figures 1 to 9 A CVD product hanging structure includes: a frame 100, a mounting assembly 200 and a hanging assembly 300; The frame 100 is used to mount the product; Specifically, the frame 100 is a square frame with a hollow interior; in this embodiment, the frame 100 is vertically arranged; and the product is an upper electrode plate.

[0016] Reference Figure 1 and Figure 5 , first connecting rods 110 are vertically installed on both sides of the bottom of the frame 100, and second connecting rods 120 are vertically installed on both sides of the top of the frame 100.

[0017] Reference Figure 1 、 Figure 5 and Figure 9 , the mounting assembly 200 is located below the frame 100, and the mounting assembly 200 is connected to the frame 100, and the mounting assembly 200 is detachably connected to the processing frame 10 to allow the lower portion of the frame 100 to be fixed or movable; Specifically, there are two groups of mounting components 200, and the two groups of mounting components 200 are respectively connected to the lower parts of the two first connecting rods 110; through the detachable connection between the mounting components 200 and the processing frame 10, the lower part of the frame 100 is fixed on the processing frame 10 (to ensure stability during operation) or moved (to avoid movement interference between the frame 100 and the processing frame 10 through the connection of the mounting components 200, to ensure that the frame 100 can be lifted).

[0018] Reference Figure 1 、 Figure 5 and Figure 9 The hoisting assembly 300 is located above the frame 100 and is connected to the frame 100. The hoisting assembly 300 cooperates with the sling to lift the frame 100 so that the frame 100 can be flipped in the air, or the hoisting assembly 300 cooperates with the processing frame 10 to fix the upper part of the frame 100.

[0019] Specifically, the tops of the two second connecting rods 120 are connected to the same lifting assembly 300; the lifting device can be a crane, a robotic arm or an electric hoist. The specific structure and working principle of the crane, robotic arm or electric hoist are common knowledge, so they will not be described in detail here; the overall lifting of the frame 100 is achieved through the lifting point design, and the frame 100 can be flipped in a suspended state through a rotation action driven manually or by the lifting device itself (such as the rotation action of the rotating shaft connected to the lifting point on the robotic arm); the lifting assembly 300 is coordinated with the processing frame 10 to lock the upper part of the frame 100 to form a "top and bottom fixed at the same time" structure, ensuring the stability of the product during maintenance, cleaning and replacement of internal parts, and avoiding shaking that affects product quality.

[0020] Reference Figure 1 、 Figure 2 、 Figure 5 、 Figure 6 and Figure 9 In this embodiment, the mounting assembly 200 includes a rotating portion 210, a mounting plate 220 and a fixing plate 230; The rotating portion 210 is located below the frame 100 and is rotatably connected to the frame 100 . The mounting plate 220 is connected to the rotating portion 210 . The fixed plate 230 is slidably connected to the mounting plate 220 , facilitating the connection between the fixed plate 230 and the processing frame 10 . Specifically, the rotating part 210 is horizontally rotatably installed at the lower part of the first connecting rod 110; the mounting plate 220 is L-shaped, one side of the mounting plate 220 is connected to the rotating part 210, and the other side of the mounting plate 220 is slidably connected to the fixed plate 230.

[0021] The rotating portion 210 is used to adjust the installation direction of the fixing plate 230 so that the fixing plate 230 and the processing frame 10 can be detachably connected.

[0022] Specifically, the installation direction of the fixing plate 230 is the direction of the fixing plate 230 toward the processing frame 10, and the fixing plate 230 is located on the lower side of the first connecting rod 110. It can be understood that when the other side of the product needs to be maintained, cleaned, and internal components replaced, after the frame 100 completes the flipping action in the suspended state, the mounting plate 220 is rotated by the rotating part 210, so that the fixing plate 230 bypasses the bottom of the first connecting rod 110, so that the fixing plate 230 rotates from the lower side of the first connecting rod 110 to the other side of the lower part of the first connecting rod 110, so that after the frame 100 is put back into the processing frame 10, the installation direction of the fixing plate 230 is still toward the processing frame 10, which facilitates the detachable connection between the fixing plate 230 and the processing frame 10.

[0023] Reference Figure 1 、 Figure 2 、 Figure 5 and Figure 6 In this embodiment, the rotating portion 210 includes a rotating shaft 211 and a first limiting block 212; The rotating shaft 211 is located below the frame 100 and is rotatably connected to the frame 100. One end of the rotating shaft 211 is connected to the mounting plate 220, and the other end of the rotating shaft 211 is connected to the first limit block 212. The first limit block 212 is used to prevent the rotating shaft 211 from detaching from the frame 100.

[0024] Specifically, the rotating shaft 211 is horizontally rotatably installed on the lower part of the first connecting rod 110, and the rotating shaft 211 passes through both sides of the lower part of the first connecting rod 110; preferably, a rubber ring (not shown in the figure) is installed between the rotating shaft 211 and the lower part of the first connecting rod 110 to increase the friction between the rotating shaft 211 and the first connecting rod 110, so that after the rotating shaft 211 is rotated, it will remain in the rotated position and will not rotate easily; the first limit block 212 can be an annular boss whose diameter is larger than the axial diameter of the rotating shaft 211 to prevent the rotating shaft 211 from separating from the first connecting rod 110.

[0025] Reference Figure 1 、 Figure 2 、 Figure 5 and Figure 6 and Figure 9 In this embodiment, the mounting assembly 200 further includes a waist-shaped hole 240, a sliding rod 250, a second limiting block 260 and a connecting hole 270; The mounting plate 220 is provided with a plurality of waist-shaped holes 240, in which a sliding rod 250 is slidably mounted. One end of the sliding rod 250 is connected to the fixing plate 230, and the other end of the sliding rod 250 is connected to a second stopper 260. The second stopper 260 is used to prevent the sliding rod 250 from falling out of the waist-shaped hole 240. Specifically, the waist-shaped hole 240 is a long strip hole and is arranged along the sliding direction of the fixed plate 230. In this embodiment, the number of the waist-shaped holes 240 is 2, which are horizontally arranged and arranged on the side where the mounting plate 220 and the fixed plate 230 are slidably connected; the rod body diameter of the sliding rod 250 is slightly smaller than the aperture of the waist-shaped hole 240. Similarly, the number of the sliding rods 250 is also 2; the second limit block 260 can be an annular boss, the diameter of which is larger than the aperture of the waist-shaped hole 240 to prevent the sliding rod 250 from falling off the waist-shaped hole 240 and at the same time limit the sliding stroke of the fixed plate 230.

[0026] The fixing plate 230 defines a plurality of connection holes 270 for detachably connecting to the processing frame 10 .

[0027] Specifically, the connecting holes 270 are distributed in a matrix or symmetrically on the fixing plate 230. In the present embodiment, the connecting holes 270 are distributed in a matrix, and the number of the connecting holes 270 is 4. The aperture of the connecting hole 270 matches the mounting stud of the processing frame 10, and a detachable connection with the processing frame 10 can be achieved by bolts or pins. When the fixing plate 230 is to be connected to the lower part of the processing frame 10, the connecting holes 270 are made to correspond to the holes of the processing frame 10 by sliding the fixing plate 230, thereby improving the fault tolerance and avoiding the problem that the fixing plate 230 cannot be connected to the processing frame 10.

[0028] Reference Figure 1 、 Figure 3 、 Figure 5 、 Figure 7 and Figure 9 , in this embodiment, the hanging assembly 300 includes a hanger 310 and a hanging ring 320; The hanger 310 is located above the frame 100 and is connected to the frame 100. The hanger 310 cooperates with the processing frame 10 to fix the upper portion of the frame 100. Specifically, the bottom of the hanger 310 is connected to the upper part of the second connecting rod 120; the hanger 310 is plugged into the hook on the upper part of the processing frame 10; the connection between the hanger 310 and the processing frame 10 forms an "upper rigid support", and the connection between the fixed plate 230 and the processing frame 10 forms a "lower rigid support", so that the frame 100 forms a four-point or multi-point fixed structure to reduce vibration during operation.

[0029] The lifting ring 320 is connected to the top of the hanger 310 , and the lifting ring 320 cooperates with the hanger to lift the frame 100 so that the frame 100 can be turned over in the air.

[0030] Specifically, in this embodiment, there are two lifting rings 320, and the lifting rings 320 are symmetrically provided on both sides of the top of the hanger 310; after the hanger is connected to the two lifting rings 320 through a lifting rope, the frame 100 is lifted by tension, and the symmetrical distribution of the lifting rings 320 ensures the balance of the center of gravity during lifting; the lifting rings 320 can be connected to an intelligent lifting device (such as an electric lifting beam with an angle sensor), monitor the posture of the frame 100 in real time, and automatically adjust the flip angle through the PLC control system to reduce manual intervention (such as the flip accuracy is controlled at ±0.5°).

[0031] Reference Figure 1 、 Figure 3 、 Figure 5 、 Figure 7 and Figure 9 In this embodiment, the hanger 310 is arranged in a T-shape, and slots 311 are opened on both sides of the bottom of the hanger 310. The slots 311 are plugged into the hooks on the upper part of the processing frame 10.

[0032] Specifically, the hanger 310 has a vertical part and a horizontal part. The bottom of the vertical part of the hanger 310 is connected to the upper part of the second connecting rod 120, and the horizontal part of the hanger 310 is connected to the top of the vertical part of the hanger 310. Slots 311 are provided on both sides of the bottom of the horizontal part of the hanger 310, opening downward, and the groove width matches the thickness of the hook of the processing frame 10 (such as a gap of 0.5-1mm), and the groove depth is usually 100-200mm; a buffer pad (such as polyurethane material) is provided at the bottom of the groove, which is not shown in the figure, to reduce the impact force during insertion; in this embodiment, the number of hooks on the upper part of the processing frame 10 is 2, which are symmetrically arranged on both sides of the upper part of the processing frame 10, and the upper part of the frame 100 is fixed by plugging and matching the two hooks with one of the slots 311; when the frame 100 is flipped over, the two hooks are plugged and matched with the other slot 311.

[0033] Reference Figure 1 、 Figure 3 、 Figure 5 、 Figure 7 and Figure 9 In this embodiment, a stopper 312 is provided in the slot 311 , and the stopper 312 is used to limit the hook of the processing frame 10 to prevent the hook from moving relatively in the slot 311 .

[0034] Specifically, the stopper 312 is located in the middle of the slot 311, that is, between the two hooks. When the hook of the processing frame 10 is inserted into the slot 311, the setting of the stopper 312 prevents the hook from sliding laterally in the slot 311, eliminating the shaking during operation caused by the gap; preferably, the bottom two sides of the stopper 312 are inclined to provide a guiding function to facilitate the quick insertion of the hook into the slot 311, and a compensation gap of 0.1mm-0.5mm can be reserved between the stopper 312 and the hook to prevent rigid jamming and limit the lateral displacement.

[0035] Reference Figure 1 、 Figure 4 、 Figure 5 、 Figure 8 and Figure 9 , in this embodiment, the hoisting structure further includes a plurality of adjustment components 400; A plurality of adjustment assemblies 400 are respectively connected to the sides of the frame 100 . The adjustment assemblies 400 are used to adjust according to products of different sizes so that the adjustment assemblies 400 can fix the products in the frame 100 .

[0036] Specifically, there are four groups of adjustment components 400 , which are evenly arranged along the four sides of the frame 100 .

[0037] Reference Figure 1 、 Figure 4 、 Figure 5 and Figure 8 In this embodiment, the adjustment assembly 400 includes a first telescopic member 410, a connecting plate 420 and a second telescopic member 430; The first telescopic member 410 is connected to the side of the frame 100. The telescopic end of the first telescopic member 410 is located inside the frame 100. The telescopic end of the first telescopic member 410 is connected to a connecting plate 420. A plurality of second telescopic members 430 are mounted on the connecting plate 420. Specifically, the first telescopic member 410 can be an electric cylinder, an air cylinder or a hydraulic cylinder. Preferably, the first telescopic member 410 is an electric cylinder; the first telescopic member 410 is vertically connected to the side of the frame 100, the telescopic end of the first telescopic member 410 passes through the side of the frame 100 and extends into the frame 100, and the telescopic end of the first telescopic member 410 slides with the frame 100; the connecting plate 420 is arranged parallel to the corresponding side of the frame 100, that is, the connecting plate 420 is vertically connected to the telescopic end of the first telescopic member 410; the second telescopic member 430 is a micro cylinder, a spring plunger or an electromagnetic push rod, Preferably, the second telescopic member 430 is a miniature cylinder; the second telescopic member 430 is installed on the side of the connecting plate 420 close to the first telescopic member 410, the telescopic end of the second telescopic member 430 passes through the connecting plate 420, and the telescopic end of the second telescopic member 430 slides with the connecting plate 420; in this embodiment, the number of second telescopic members 430 on a connecting plate 420 is 4, and multiple second telescopic members 430 are evenly distributed on the connecting plate 420; the specific structure and working principle of the first telescopic member 410 and the second telescopic member 430 are common knowledge, so they are not described in detail here.

[0038] A through hole 450 is provided on the side of the frame 100, and the telescopic end of the first telescopic member 410 passes through the through hole 450, and the telescopic end of the first telescopic member 410 slides with the through hole 450. The length and width of the through hole 450 match the length and width of the connecting plate 420, so that the connecting plate 420 can enter and exit the through hole 450, and the connecting plate 420 can completely enter the through hole 450, so that the space inside the frame 100 is fully utilized (such as when the size of the product just matches the size inside the frame 100).

[0039] The first telescopic member 410 is used to adjust the distance according to the products of different sizes; The second telescopic member 430 is used to tighten the product.

[0040] Specifically, a rubber pad or a metal pressing block (such as polyurethane hardness A80, increasing the friction coefficient to 0.8) is provided at the telescopic end of the second telescopic member 430, which is not shown in the figure, to avoid scratching the product surface.

[0041] When the length and width of the product increase, the first telescopic members 410 on the four sides expand outwards synchronously; when the length and width of the product decrease, the first telescopic members 410 on the four sides retract inwards synchronously.

[0042] The second telescopic member 430 moves independently to compensate for local dimensional deviation or surface unevenness of the product.

[0043] Reference Figure 1 、 Figure 4 、 Figure 5 and Figure 8 In this embodiment, a rib 440 is installed on one side of the two opposite connecting plates 420 away from the first telescopic member 410. The rib 440 is used to initially position the product so that the second telescopic member 430 can better press the product.

[0044] Specifically, according to the length or width of the product, the first telescopic member 410 connected by the connecting plate 420 with the retaining edge 440 is first extended and retracted, so that when the product is placed in the frame 100, it can be blocked by the retaining edge 440, so that the product is just placed inside the frame 100, and the lateral movement or vertical movement of the product is limited, so that the product can be quickly pre-positioned. Then, the first telescopic member 410 connected by the other two connecting plates 420 without the retaining edge 440 is extended and retracted. After moving to the appropriate position, the two sides of the product are tightened by the second telescopic member 430. Then the first telescopic member 410 connected to the connecting plate 420 with the guard edge 440 is shortened so that the guard edge 440 no longer blocks the product, that is, after the guard edge 440 is no longer in contact with the product, the two sides of the product are pressed tightly by the second telescopic member 430 on the connecting plate 420 with the guard edge 440, so that after the product is turned over, the guard edge 440 will not affect maintenance, cleaning, and replacement of internal parts, because the guard edge 440 does not block the product; and the second telescopic member 430 is used to press symmetrically to prevent product deformation due to uneven force.

[0045] Reference Figure 1 and Figure 4 In this embodiment, the rib 440 is located on the connecting plate 420 which is adjusted according to the width of the product.

[0046] Working principle: When in use, in the initial state, the hanger 310 is plugged into the hook on the upper part of the processing frame 10, and the fixing plate 230 is connected to the lower part of the processing frame 10. Then, according to the width of the product, the first telescopic member 410 connected by the connecting plate 420 with the retaining edge 440 is first extended and retracted, so that when the product is placed in the frame 100, it can be blocked by the retaining edge 440, so that the product is just placed inside the frame 100, and the lateral movement of the product is limited, so that the product can be quickly pre-positioned, and then the other two parts without retaining edges 440 are used to move the product. The first telescopic member 410 connected to the connecting plate 420 of 40 is extended and retracted. After moving to an appropriate position, the second telescopic member 430 is used to press the two sides of the product tightly. Then, the first telescopic member 410 connected to the connecting plate 420 with the retaining edge 440 is shortened so that the retaining edge 440 no longer blocks the product. Then, the second telescopic member 430 on the connecting plate 420 with the retaining edge 440 presses the two sides of the product tightly, ensuring the stability of the product during maintenance, cleaning, and replacement of internal parts, etc., to prevent shaking from affecting the product quality. When it is necessary to maintain, clean, or replace internal parts on the other side of the product, the fixing plate 230 is disassembled from the processing frame 10, so that the fixing plate 230 is separated from the processing frame 10, and then the frame 100 is lifted by tension after being connected to the lifting ring 320 through the sling. The frame can be turned over in the suspended state by manual or self-driven rotation. After turning over to the right position, the frame 100 is lowered by the sling so that the hanger 310 is re-engaged with the hook on the upper part of the processing frame 10. At the same time, the first limit block can be rotated 212 rotates the rotating shaft 211, and the rotating shaft 211 rotates the mounting plate 220, so that the fixed plate 230 bypasses the bottom of the first connecting rod 110, so that the fixed plate 230 rotates from one side of the lower part of the first connecting rod 110 to the other side of the lower part of the first connecting rod 110, so that after the frame 100 is put back into the processing frame 10, the installation direction of the fixed plate 230 is still facing the processing frame 10, and the fixed plate 230 is reconnected to the lower part of the processing frame 10 to perform maintenance, cleaning, and replacement of internal parts on the other side of the product.

[0047] The present invention reduces manual intervention, reduces the safety risk of the flipping operation to the workers, and reduces the risk of damage to the upper electrode due to improper operation, thereby ensuring production progress and product quality.

[0048] It should be noted that, in this document, the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or apparatus comprising the element.

[0049] Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of the present application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in reverse order depending on the functions involved. For example, the methods described may be performed in an order different from that described, and various steps may be added, omitted, or combined. Furthermore, features described with reference to certain examples may be combined in other examples.

[0050] The above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with this technical field can easily think of changes or replacements within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A CVD product hoisting structure, characterized in that: include: A frame (100), the frame (100) being used to mount the product; A mounting assembly (200), the mounting assembly (200) being located below the frame (100) and connected to the frame (100), the mounting assembly (200) being detachably connected to the processing frame (10) so as to fix or move the lower portion of the frame (100); A hoisting assembly (300) is located above the frame (100) and is connected to the frame (100). The hoisting assembly (300) cooperates with a sling to lift the frame (100) so that the frame (100) can be turned in the air, or the hoisting assembly (300) cooperates with a processing frame (10) to fix the upper part of the frame (100).

2. The CVD product hoisting structure according to claim 1, characterized in that: The mounting assembly (200) comprises a rotating portion (210), a mounting plate (220) and a fixing plate (230); The rotating portion (210) is located below the frame (100), and the rotating portion (210) is rotatably connected to the frame (100). The mounting plate (220) is connected to the rotating portion (210), and the fixed plate (230) is slidably connected to the mounting plate (220), so as to facilitate the connection between the fixed plate (230) and the processing frame (10). The rotating portion (210) is used to adjust the installation direction of the fixing plate (230) so that the fixing plate (230) and the processing frame (10) are detachably connected.

3. The CVD product hoisting structure according to claim 2, characterized in that: The rotating portion (210) comprises a rotating shaft (211) and a first limiting block (212); The rotating shaft (211) is located below the frame (100) and is rotatably connected to the frame (100). One end of the rotating shaft (211) is connected to the mounting plate (220), and the other end of the rotating shaft (211) is connected to a first limiting block (212). The first limiting block (212) is used to prevent the rotating shaft (211) from being separated from the frame (100).

4. The CVD product hoisting structure according to claim 3, characterized in that: The mounting assembly (200) further includes a waist-shaped hole (240), a sliding rod (250), a second limiting block (260) and a connecting hole (270); The mounting plate (220) is provided with a plurality of waist-shaped holes (240), a sliding rod (250) is slidably provided in the waist-shaped hole (240), one end of the sliding rod (250) is connected to the fixed plate (230), and the other end of the sliding rod (250) is connected to a second limiting block (260), and the second limiting block (260) is used to prevent the sliding rod (250) from falling off the waist-shaped hole (240); The fixing plate (230) is provided with a plurality of connection holes (270) for detachably connecting to the processing frame (10).

5. The CVD product hoisting structure according to claim 1, characterized in that: The hoisting assembly (300) includes a hanger (310) and a hoisting ring (320); The hanger (310) is located above the frame (100), and the hanger (310) is connected to the frame (100). The hanger (310) cooperates with the processing frame (10) to fix the upper part of the frame (100); The lifting ring (320) is connected to the top of the hanger (310), and the lifting ring (320) cooperates with the hanger to lift the frame (100) so that the frame (100) can be turned over in the air.

6. The CVD product hoisting structure according to claim 5, characterized in that: The hanger (310) is arranged in a T-shape, and slots (311) are provided on both sides of the bottom of the hanger (310), and the slots (311) are plugged into and matched with hooks on the upper part of the processing frame (10).

7. The CVD product hoisting structure according to claim 6, characterized in that: A stopper (312) is provided in the slot (311), and the stopper (312) is used to limit the hook of the processing frame (10) to prevent the hook from moving relative to the slot (311).

8. The CVD product hoisting structure according to claim 1, characterized in that: The hoisting structure further includes a plurality of adjustment components (400); The plurality of adjustment components (400) are respectively connected to the side edges of the frame (100), and the adjustment components (400) are used to adjust according to products of different sizes, so that the adjustment components (400) fix the products in the frame (100).

9. The CVD product hoisting structure according to claim 8, characterized in that: The adjustment assembly (400) comprises a first telescopic member (410), a connecting plate (420), and a second telescopic member (430); The first telescopic member (410) is connected to a side of the frame (100), a telescopic end of the first telescopic member (410) is located inside the frame (100), and a connecting plate (420) is connected to the telescopic end of the first telescopic member (410), and a plurality of second telescopic members (430) are mounted on the connecting plate (420); The first telescopic member (410) is used to adjust the distance according to products of different sizes; The second telescopic member (430) is used to tighten the product.

10. The CVD product hoisting structure according to claim 9, characterized in that: A retaining edge (440) is installed on one side of the two opposite connecting plates (420) away from the first telescopic member (410). The retaining edge (440) is used to perform preliminary positioning of the product so that the second telescopic member (430) can better press against the product.

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