Graphite-based coating surface particle detection method

Abstract

The invention provides a graphite-based coating surface particle inspection method, which belongs to the technical field of semiconductors, and comprises the following steps: respectively arranging lifting devices on two sides of a graphite-based sample, respectively connecting a light source module and a receiver to the two lifting devices, and simultaneously operating the two lifting devices to inspect particles on the surface of the graphite-based sample. The light source module and the receiver are synchronously driven to move upwards at a constant speed from the upper end of the graphite-based sample coating, the time when the receiver receives the light signal is metered to identify particles on the surface of the graphite-based sample coating, and the time when the receiver receives the light signal and the moving speed are metered to identify particles on the surface of the graphite-based sample coating. The method is used for calculating graphite-based sample coating surface particle height information. According to the graphite-based coating surface particle detection method provided by the invention, the graphite-based coating surface particles can be effectively and accurately identified, the existing particles can be measured, the control of the surface particles is facilitated, the product performance is guaranteed, and the production yield is improved.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor technology, and more particularly, relates to a method for detecting particles on the surface of a graphite-based coating. Background Art

[0002] Graphite materials are susceptible to oxidation, corrosion, and flaking (dusting) in high-temperature environments, leading to product failure. Therefore, a dense, oxidation- and corrosion-resistant coating must be deposited on the surface via chemical vapor deposition (CVD) during use to improve product performance and service life.

[0003] However, during the growth process using chemical vapor deposition (CVD), particle defects can form on the coating surface due to contaminant particles carried on the graphite substrate surface, exfoliation within the reaction chamber, and powder particles generated by homogeneous nucleation of gas-phase reactants. If these graphite-based coating products, used as carriers for epitaxial growth (such as susceptors), have surface particles located within the wafer-supporting pits (slit pits), they can cause the wafer to sit unevenly, affecting the uniformity of the temperature field and the distribution of the reactive gas flow, resulting in uneven epitaxial layer thickness or doping concentration. If the particles are located at the edge of the pits, they can become stuck in the wafer, leading to serious problems such as wafer cracking. Therefore, accurately identifying and controlling surface particles during the coating growth process is crucial to ensuring final product performance and improving production yield.

[0004] Silicon carbide (SiC), with its excellent thermodynamic stability, high thermal conductivity, high electron mobility, and antioxidant and corrosion resistance, is an ideal material for protective coatings on graphite susceptors. Current CVD SiC coatings are typically polycrystalline (β-SiC), resulting in a high surface roughness and a non-mirror finish. When vertical light is applied to such surfaces, the light is primarily diffusely scattered, making it difficult to effectively distinguish between normal polycrystalline grains and large surface defects. Summary of the Invention

[0005] The purpose of the present invention is to provide a method for detecting surface particles of a graphite-based coating, aiming to solve the technical problem that the surface roughness of the graphite-based coating is large and it is difficult to effectively identify surface particles during the growth process.

[0006] To achieve the above object, the technical solution adopted by the present invention is to provide a method for detecting particles on the surface of a graphite-based coating, comprising the following steps: S10: a set of lifting devices is provided on two opposite sides of the graphite-based sample, so that the lifting devices have the freedom to move along the height direction of the graphite-based sample; S20: Arranging a light source module on the lifting device on one side of the graphite-based sample so that the light emission direction of the light source module is parallel to the upper surface of the graphite-based sample and in a horizontal direction; S30: arranging a receiver on the lifting device on the other side of the graphite-based sample so that the receiver can receive the light signal emitted by the light source module; S40: The light source module and the receiver are synchronously moved upward from the upper end of the graphite-based sample coating at a uniform speed, and the surface particles of the graphite-based sample coating are identified by measuring the time taken by the receiver to receive the light signal. The height information of the surface particles of the graphite-based sample coating is calculated by measuring the time taken by the receiver to receive the light signal and its moving speed.

[0007] In one possible implementation, a control receiving unit is provided so as to be electrically connected to the lifting device, the light source module and the receiver respectively. The control receiving unit includes a signal processing module, a calculation module, a control module and an output module. The signal processing module is suitable for measuring the time when the receiver receives the light signal. The calculation module is suitable for multiplying the time when the receiver receives the light signal and the speed at which it moves and outputting the calculation result. The control module is suitable for controlling the synchronous operation of the two groups of the lifting devices. The output module is suitable for outputting the identification of whether particles exist on the surface of the graphite-based sample coating and outputting particle height information.

[0008] In a possible implementation, the lifting device includes: The base is located on the side of the graphite-based sample; A guide rail, the lower end of which is connected to the upper end of the base, the guide rail being vertically arranged with its length along the height direction of the graphite base, the light source module or the receiver being slidably connected to the guide rail and having vertical movement freedom; A driver is connected to the guide rail and has a power output end. The power output end is connected to the light source module or the receiver and is suitable for driving the light source module or the receiver to move at a constant speed.

[0009] In one possible implementation, the guide rail is connected to a transmission member, one end of the transmission member is connected to the power output end of the driver and the other end is connected to the light source module or the receiver, and the driver drives the light source module or the receiver to move at a constant speed with the help of the transmission member.

[0010] In one possible implementation, the lifting device also includes a first rotating platform, the base is connected to the upper end of the first rotating platform, the upper end of the first rotating platform has circumferential rotation freedom and is suitable for driving the base to rotate circumferentially to adjust the light emission direction of the light source module, or adjust the direction in which the receiver receives the light signal.

[0011] In one possible implementation, a second rotating table is provided at the bottom of the graphite-based sample, so that the graphite-based sample is located at the upper end of the second rotating table. The upper end of the second rotating table has circumferential rotational freedom and is suitable for driving the graphite-based sample to rotate circumferentially, so that the light source module can illuminate the graphite-based sample from different directions.

[0012] In one possible implementation, the second rotating table is electrically connected to a wireless communication module, and the wireless communication module is wirelessly connected to a remote control, so that the remote control can remotely control the rotation of the second rotating table through the wireless communication module, thereby adjusting the rotation angle of the graphite-based sample.

[0013] In a possible implementation, a light shield is connected to the upper end of the guide rail, and the light shield is suitable for blocking sunlight or light and preventing it from interfering with the light signal emitted by the light source module.

[0014] In a possible implementation, the light shield is disc-shaped and has a connecting piece at the bottom center, the connecting piece is detachably connected to the guide rail, and the outer periphery of the light shield is connected to a hanging piece, which is used to connect to the extension plate.

[0015] In one possible implementation, a slide is provided on one side of the guide rail, the light source module or the receiver is slidably connected to the slide, and a machine vision detector is provided on the other side of the guide rail opposite to the slide, and the machine vision detector is suitable for machine vision detection of particles on the surface of the graphite-based sample coating.

[0016] The beneficial effect of a graphite-based coating surface particle detection method provided by the present invention is that: compared with the existing technology, the graphite-based coating surface particle detection method provided by the present invention includes the steps of arranging a lifting device on both sides of the graphite-based sample, and connecting the light source module and the receiver to the two groups of lifting devices respectively. The two groups of lifting devices are operated simultaneously to synchronously drive the light source module and the receiver to move upward at a uniform speed from the upper end of the graphite-based sample coating. The time taken by the receiver to receive the light signal is used to identify the surface particles of the graphite-based sample coating. The time taken by the receiver to receive the light signal and its moving speed are measured to calculate the height information of the surface particles of the graphite-based sample coating. The surface particles of the graphite-based coating can be effectively and accurately identified and the existing particles can be measured, which is beneficial to controlling the surface particles, ensuring product performance and improving production yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 A flowchart of the steps of a method for detecting particles on the surface of a graphite-based coating provided by an embodiment of the present invention; Figure 2 A schematic diagram illustrating the layout of a lifting device, a light source module, and a receiver for a method for detecting particles on the surface of a graphite-based coating provided by an embodiment of the present invention (the dashed line segment above the graphite substrate in the figure represents the light signal); Figure 3 A timing diagram showing the variation of light signal intensity over time in a method for detecting particles on the surface of a graphite-based coating provided by an embodiment of the present invention; Figure 4 A schematic diagram of the layout structure of a lifting device, a light source module, and a receiver for a method for detecting particles on the surface of a graphite-based coating provided by another embodiment of the present invention; Figure 5 for Figure 4 The left structural diagram in .

[0019] Description of reference numerals: 1. Graphite-based sample; 2. Lifting device; 21. Base; 22. Guide rail; 221. Slide; 222. Cover; 23. Drive; 24. Conveyor; 241. Driven wheel; 242. Conveyor belt; 3. Light source module; 4. Receiver; 5. Control receiving unit; 6. First turntable; 7. Second turntable; 71. Tray; 8. Remote control; 9. Light shield; 91. Connector; 92. Hanging part; 10. Extension plate; 11. Machine vision detector. DETAILED DESCRIPTION

[0020] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0021] Please also refer to Figures 1 to 2 The present invention provides a method for detecting particles on the surface of a graphite-based coating. The method comprises the following steps: S10: A set of lifting devices 2 is provided on two opposite sides of the graphite-based sample 1, so that the lifting devices 2 have the freedom to move along the height direction of the graphite-based sample 1; S20: Arrange a light source module 3 on the lifting device 2 on one side of the graphite-based sample 1 so that the light emission direction of the light source module 3 is parallel to the upper surface of the graphite-based sample 1 and in the horizontal direction; S30: Setting a receiver 4 on the lifting device 2 on the other side of the graphite-based sample 1 so that the receiver 4 can receive the light signal emitted by the light source module 3; S40: The light source module 3 and the receiver 4 are synchronously moved upward from the upper end of the coating of the graphite-based sample 1 at a uniform speed. The time taken by the receiver 4 to receive the light signal is used to identify the surface particles of the coating of the graphite-based sample 1. The time taken by the receiver 4 to receive the light signal and its moving speed are used to calculate the height information of the surface particles of the coating of the graphite-based sample 1.

[0022] Compared with the prior art, the present invention provides a method for detecting surface particles of a graphite-based coating. The method includes the following steps: arranging a lifting device 2 on each side of a graphite-based sample 1, and connecting a light source module 3 and a receiver 4 to the two sets of lifting devices 2 respectively. The two sets of lifting devices 2 operate simultaneously to synchronously drive the light source module 3 and the receiver 4 to move upward at a uniform speed from the upper end of the coating of the graphite-based sample 1. The time taken by the receiver 4 to receive the light signal is used to identify the surface particles of the coating of the graphite-based sample 1. The time taken by the receiver 4 to receive the light signal and its moving speed are used to calculate the height information of the surface particles of the coating of the graphite-based sample 1. The method can effectively and accurately identify the surface particles of the graphite-based coating and measure the existing particles, which is beneficial to controlling the surface particles, ensuring product performance and improving production yield.

[0023] In this embodiment, both the light source module 3 and the receiver 4 utilize existing technology. The light source module 3 is capable of emitting a light signal, particularly in a linear direction. In the present invention, the light signal is emitted horizontally from one side of the graphite substrate to the other. The receiver 4 is capable of receiving the light signal and timing the time it is received. In the present invention, the graphite-based sample 1 is graphite-based, and its upper end surface is provided with a coating. The upper surface of the coating generally contains particles. The light source module 3 and the receiver 4 are first positioned at the same height. The initial position of the light signal emitted by the light source module 3 is located at the upper end of the coating. The light source module 3 and the receiver 4 are simultaneously moved upward. When the movement begins, a timer is simultaneously set. The time it takes for the receiver 4 to receive the light signal is the timer. When the timer reaches 0, it indicates that no particles are present at the upper end of the coating. The particles referred to in the present invention are particulate matter. As the light source module 3 and the receiver 4 move upward simultaneously, a timer is set. When the receiver 4 receives the light signal, the timer stops. If the timer displays a time greater than 0, such as 50 milliseconds, it indicates that particles are present at the upper end of the coating. The moving speed of the receiver 4 is uniform, and by referring to the set moving speed, the moving distance of the receiver 4, that is, the height of the particles, can be calculated.

[0024] The detection method of the present invention achieves two detection effects. First, it can identify the presence of particles on the coating surface. If the timer is 0, meaning the receiver 4 receives a light signal before movement begins, it is determined that no particles are present on the coating. If the light signal is received after a period of movement, it indicates that a particle is present. The distance traveled can be calculated by multiplying the timer by the speed of movement, which is the height of the particle. The two lifting devices 2 have the same structure and operate synchronously, ascending and descending simultaneously.

[0025] In some embodiments, see Figures 1 to 2 The present invention also includes a control receiving unit 5, electrically connected to the lifting device 2, light source module 3, and receiver 4. The control receiving unit 5 includes a signal processing module, a calculation module, a control module, and an output module. The signal processing module is adapted to measure the time it takes for the receiver 4 to receive the light signal. The calculation module is adapted to multiply the time it takes for the receiver 4 to receive the light signal by its speed and output the result. The control module is adapted to control the synchronous operation of the two lifting devices 2. The output module is adapted to output information indicating the presence of particles on the coating surface of the graphite-based sample 1 and the particle height. The control receiving unit 5 has the functions of receiving signals, timing, calculating, controlling the operation of the lifting device 2, and outputting a display. The signal processing module not only measures the time it takes for the receiver 4 to receive the light signal, but also measures the time it receives the light signal. The output module also includes a display for displaying the output data.

[0026] In this embodiment, the calculation module, signal processing module, control module and output module can all adopt existing technologies, and can achieve the functions and effects as described above, thereby meeting the requirements for identifying and measuring particles on the surface of the graphite-based coating.

[0027] In some embodiments, see Figures 2 to 3The lifting device 2 includes a base 21, a guide rail 22 and a driver 23. The base 21 is arranged on the side of the graphite-based sample 1; the lower end of the guide rail 22 is connected to the upper end of the base 21. The guide rail 22 is arranged vertically and its length is along the height direction of the graphite base. The light source module 3 or the receiver 4 is slidably connected to the guide rail 22 and has a vertical movement freedom; the driver 23 is connected to the guide rail 22 and has a power output end, which is connected to the light source module 3 or the receiver 4 and is suitable for driving the light source module 3 or the receiver 4 to move at a constant speed. The base 21 plays a role in supporting the guide rail 22. In this embodiment, it is disc-shaped. The lower end of the guide rail 22 is placed at the center of the upper end of the base 21, so that the guide rail 22 can remain stable and prevent skew and other phenomena that affect the recognition and measurement accuracy of the particles. The guide rail 22 is arranged vertically, which enables the light source module 3 and the receiver 4 to slide or move, thereby measuring the height of the particles and identifying the particles. The driver 23 can drive the light source module 3 or the receiver 4 to move, so as to accurately identify and measure the height of the particles.

[0028] In this embodiment, the driver 23 is electrically connected to the aforementioned control module and its operation is controlled by the control module. A control button is provided on the control module, and by operating the control button, the operation of the driver 23 is controlled, thereby controlling the synchronous movement of the light source module 3 and the receiver 4. In this embodiment, the light source module 3 and the receiver 4 are arranged opposite each other, that is, facing opposite sides. The light signal is located at the upper end or above the graphite-based sample 1 and moves upward in a horizontal manner. When downward movement is required, the driver 23 can be operated in the reverse direction.

[0029] Driver 23 includes a servo motor and a high-precision encoder, capable of driving the light source module 3 and receiver 4 to move synchronously and at a constant speed (speed v) in the vertical direction. The encoder has a resolution of 20 bits (0.1 μm). Light source module 3 is specifically a laser module with a wavelength of 655 nm and a spot diameter of 0.5 nm. Light source module 3 is specifically a parallel laser light source module 3, capable of emitting a parallel beam. When a particle obstructs the light, the signal at receiver 4 changes from 1 to 0; when the particle is not obstructing the light, the signal at receiver 4 changes from 0 to 1. Receiver 4 is a photoelectric receiver 4, specifically a photodiode, with a response time of 15 ns and a spectral range of 320-730 nm. The signal processing module is specifically a signal processor, including a high-speed ADC acquisition card and edge detection circuitry, capable of processing optical signal transitions in real time and capturing the precise moments of optical signal disconnection and restoration. The calculation module is specifically an embedded processor, which calculates the time taken for light source module 3 to move based on the time difference (timed from the start of light source module 3 movement, i.e., t1; timed again after receiver 4 receives the light signal, i.e., t2) Δt = t2 - t1. Then, according to the set moving speed v of the light source module 3 , the height of the particle h=v×Δt can be calculated.

[0030] Specifically, in this embodiment, a falling edge (t1) and a rising edge (t2) are set. The falling edge is when the light intensity falls below a first threshold (e.g., 5%), marking the start of the obstruction and recording the start time. The rising edge is when the light intensity returns to a second threshold (e.g., 95%), marking the end of the obstruction and recording the end time. Δt: The duration that the particle completely obstructs the light beam, i.e., the particle height h = v × Δt. In this embodiment, the allowable error range for calculating the particle height is ± (10-15)%.

[0031] The present application realizes non-contact measurement of particles on the surface of graphite-based coatings without damaging the coating surface; the height resolution can reach 0.1 μm.

[0032] In some embodiments, see Figure 2 、 Figures 4 and 5 The guide rail 22 is connected to a transmission member 24, one end of which is connected to the power output end of the driver 23 and the other end is connected to the light source module 3 or the receiver 4. The driver 23 drives the light source module 3 or the receiver 4 to move at a constant speed with the help of the transmission member 24. The transmission member 24 in this embodiment includes a driven wheel 241 and a conveyor belt 242, wherein the driven wheel 241 is located on the guide rail 22 near its upper end and forms a rotational connection with the guide rail 22, while the driver 23 is located on the guide rail 22 near its lower end, and the conveyor belt 242 is wrapped around the power output end of the driver 23 and the driven wheel 241, thereby realizing power transmission. The light source module 3 and the receiver 4 are respectively slidably connected to the two sets of guide rails 22. The middle part of the light source module 3 or the receiver 4 is slidably connected to the guide rail 22, and one end is connected to the conveyor belt 242. Therefore, through the circular transmission of the conveyor belt 242, the light source module 3 or the receiver 4 can be driven to slide on the guide rail 22, that is, it can rise and fall in the vertical direction.

[0033] Specifically, the path or length of the conveyor belt 242 driving the light source module 3 or receiver 4 is significantly greater than the total height of the graphite substrate, coating, and particles, enabling accurate identification of particles on the coating surface and measurement of particle height. The control module can set the operating speed of the driver 23, which in turn determines the movement speed of the light source module 3 and receiver 4.

[0034] In order to realize the circumferential rotation adjustment of the light source module 3 and the receiver 4, in some embodiments, refer to Figure 2The lifting device 2 further includes a first rotating platform 6, with a base 21 connected to the upper end of the first rotating platform 6. The upper end of the first rotating platform 6 has circumferential rotational freedom and is suitable for driving the base 21 to rotate circumferentially to adjust the light emission direction of the light source module 3 or the direction of light signals received by the receiver 4. The first rotating platform 6 is configured to drive the base 21 to rotate circumferentially within a horizontal plane. In this embodiment, the graphite-based sample 1 is also disc-shaped, with its upper end surface within the horizontal plane. By rotating the light source module 3, its rotation angle can be adjusted, thereby enabling illumination in different directions, thereby adjusting the illumination direction of the particles or the direction of light signals received by the receiver 4.

[0035] In this embodiment, the first rotating platform 6 is an electric rotating platform in the prior art. The bottom area of ​​the base 21 is smaller than the bottom area of ​​the first rotating platform 6, so that the base 21 can be supported and driven to rotate.

[0036] In some embodiments, see Figure 4 A second rotating platform 7 is provided at the bottom of the graphite-based sample 1 so that the graphite-based sample 1 is located at the upper end of the second rotating platform 7. The upper end of the second rotating platform 7 has circumferential rotational freedom and is suitable for driving the graphite-based sample 1 to rotate circumferentially, so that the light source module 3 irradiates the graphite-based sample 1 from different directions. In this embodiment, the bottom area of ​​the graphite-based sample 1 is larger than the upper area of ​​the second rotating platform 7. A tray 71 can be provided at the upper end of the second rotating platform 7. The tray 71 is disc-shaped. The bottom area of ​​the tray 71 is smaller than the top area. The bottom area of ​​the tray 71 is larger than the upper area of ​​the second rotating platform 7, and the top area is smaller than the bottom area of ​​the graphite-based sample 1. The tray 71 plays a role in stably supporting the graphite-based sample 1, preventing the graphite-based sample 1 from tilting or slipping during rotation, and can effectively ensure the stability of the graphite-based sample 1 during the rotation adjustment process.

[0037] The second rotating table 7 has the same structure as the first rotating table 6 and can support the graphite-based sample 1 and drive its circumferential rotation. The circumferential rotation referred to in the present invention can be a 360° circumferential rotation or a rotation of a certain angle, that is, it can achieve rotational adjustment and flexible adjustment. The final effect or position after adjustment in the present invention is that the light source module 3 and the receiver 4 are at the same height, and the initial position is at the upper end of the graphite-based coating. The two are arranged opposite to each other, and the light source module 3 emits a light signal toward the receiver 4, and the light signal and the graphite-based sample 1 are both arranged horizontally, and the movement of the light signal is vertically from bottom to top until the receiver 4 can receive the light signal.

[0038] In order to realize the identification and height measurement of particles at multiple positions on the upper end of the graphite-based coating, the graphite-based sample 1 can be translated in the horizontal plane (it can be moved manually at this time), or the two sets of lifting devices 2 can be translated, so that the particles at multiple positions on the upper end of the coating can be identified and the height measurement can be performed.

[0039] In some embodiments, see Figure 4 The second rotating platform 7 is electrically connected to a wireless communication module, and the wireless communication module is wirelessly connected to a remote controller 8, so that the remote controller 8 can remotely control the rotation of the second rotating platform 7 through the wireless communication module, thereby adjusting the rotation angle of the graphite-based sample 1. The wireless communication module in this embodiment adopts existing technology, such as a 4G or GPRS communication module, which can achieve long-range wireless communication. The remote controller 8 also has a wireless communication module to achieve wireless communication between them, thereby enabling remote control and adjustment of the rotation of the second rotating platform 7 and the circumferential rotation of the graphite-based sample 1, thereby improving the convenience of rotating or detecting particles.

[0040] Preferably, the first rotating table 6 is also connected to a wireless communication module and can realize wireless communication connection with the remote control 8. The remote control 8 has control buttons that can control the operation of the first rotating table 6 and the second rotating table 7, thereby realizing control of the operation of both.

[0041] In order to avoid interference or influence of other light sources (such as sunlight or lamplight) on the light signal emitted by the light source module 3 during the particle detection process, in some embodiments, refer to Figures 4 and 5 A light shield 9 is connected to the upper end of the guide rail 22. The light shield 9 is suitable for blocking sunlight or light and preventing it from interfering with the light signal emitted by the light source module 3. The light shield 9 can prevent other light sources from interfering with the light signal in the present invention, making the identification and detection of particles on the upper end of the coating more accurate. By installing and using the light shield 9, interference from other light sources can be effectively avoided.

[0042] In this embodiment, the light shield 9 is disc-shaped and detachably connected to the upper end of the guide rail 22. It can be installed on the guide rail 22 when it is necessary to block other light sources, and can be removed when it is no longer necessary. The area of ​​the light shield 9 is larger than the upper end of the first rotating platform 6 and much larger than the upper end of the guide rail 22. It can effectively block other light sources without affecting the normal operation of the light source module 3.

[0043] Figure 2 、 Figure 4 and Figure 5The figure shows two groups of light source modules 3 and two groups of receivers 4. The upper group of light source modules 3 and receivers 4 is a structural diagram of their positions after movement, and the lower group of light source modules 3 and receivers 4 are the light source modules 3 and receivers 4 at their initial positions, that is, the light signal is located at the upper end of the coating.

[0044] To achieve the connection between the light shield 9 and the guide rail 22, in some embodiments, refer to Figures 4 and 5 The light shield 9 is disc-shaped and has a connector 91 at the center of its bottom end. The connector 91 is detachably connected to the guide rail 22. A hanging member 92 is connected to the outer periphery of the light shield 9 for connecting to the extension plate 10. In this embodiment, the connecting member 91 is a member such as a clamp, a hoop, or a screw. After the light shield 9 is placed on the upper end of the guide rail 22, it can be connected to the upper end of the guide rail 22 through the connecting member 91, thereby stably fixing the light shield 9 to the upper end of the guide rail 22.

[0045] When the area blocked by the light shield 9 does not meet the required use, the extension plate 10 can be attached using the attachment member 92. This means that by connecting the extension plates 10, the shielding area of ​​the light shield 9 can be extended, thereby shielding a larger area and effectively protecting the light source module 3. The extension plate 10 in this embodiment is conventional and is a plate or plastic material with attachment holes that can be attached to the attachment member 92. The extension plate 10 is attached to the periphery of the light shield 9. When a single extension plate 10 does not meet the required use, multiple extension plates 10 can be used to expand the shielding area of ​​the light shield 9 (wherein the extension plates 10 can provide a partial shielding effect). Figure 5 The dotted irregular shape at the top represents the extension plate 10. In this embodiment, the extension plate 10 is allowed to tilt downward without affecting the shielding effect of the light source module 3 (to a certain extent, the hanging member 92 can prevent or hinder the extension plate 10 from freely falling downward to a vertical position).

[0046] In some embodiments, see Figure 5A slide 221 is provided on one side of the guide rail 22, and the light source module 3 or the receiver 4 is slidably connected to the slide 221. A machine vision detector 11 is provided on the other side of the guide rail 22 opposite to the slide 221. When the guide rail 22 is rotated circumferentially, the machine vision detector 11 is directed towards the particles. The machine vision detector 11 is suitable for machine vision detection of particles on the coating surface of the graphite-based sample 1. The guide rail 22 in this embodiment has a slide 221 on one side, and the slide 221 is slidably connected to the light source module 3 or the receiver 4, or a slider is set in the middle of the light source module 3 or the receiver 4, so that the slider is slidably connected to the slide 221, and the conveyor belt 242 does not contact the slider. The interior of the guide rail 22 is hollow (with a cavity inside), the driver 23, the driven wheel 241 and the conveying member 24 are arranged inside the cavity, and the inner side of the slide 221 has a long strip through hole, one end of the light source module 3 and the receiver 4 passes through the long strip through hole and extends into the cavity, and is connected to the conveying member 24. As the conveying member 24 transmits, it can drive the light source module 3 or the receiver 4 to slide on the slide 221, so that the light signal can move up and down.

[0047] Specifically, an opening is provided on the side of the guide rail 22 away from the slideway 221, and a cover 222 is provided at the opening. When the driver 23, the driven wheel 241 or the transmission part needs to be installed or removed, the cover 222 can be removed at this time to open the opening, and the assembly and disassembly operation can be carried out. After the assembly and disassembly are completed, the cover 222 can be used to seal the opening. The machine vision detector 11 includes an industrial CCD camera, a light source and an image processing system. The industrial CCD camera and the light source are provided on the side of the guide rail 22 away from the slide, or can be provided on the cover 222. The machine vision detector 11 can realize machine vision inspection of the particles on the upper end of the coating to identify information such as the shape of the particles. Among them, the image processing system is located near the first rotating table 6 and is electrically connected to the industrial CCD camera and the light source. A particle image database is stored in the embodiment processing system, so that the collected particle image can be compared and analyzed with the stored image, and the comparison result can be output.

[0048] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for detecting particles on the surface of a graphite-based coating, characterized in that: The steps include: S10: a set of lifting devices is provided on two opposite sides of the graphite-based sample, so that the lifting devices have the freedom to move along the height direction of the graphite-based sample; S20: Arranging a light source module on the lifting device on one side of the graphite-based sample so that the light emission direction of the light source module is parallel to the upper surface of the graphite-based sample and in a horizontal direction; S30: arranging a receiver on the lifting device on the other side of the graphite-based sample so that the receiver can receive the light signal emitted by the light source module; S40: The light source module and the receiver are synchronously moved upward from the upper end of the graphite-based sample coating at a uniform speed, and the surface particles of the graphite-based sample coating are identified by measuring the time taken by the receiver to receive the light signal. The height information of the surface particles of the graphite-based sample coating is calculated by measuring the time taken by the receiver to receive the light signal and its moving speed.

2. A method for detecting particles on the surface of a graphite-based coating according to claim 1, characterized in that: A control receiving unit is provided so as to be electrically connected to the lifting device, the light source module and the receiver respectively. The control receiving unit includes a signal processing module, a calculation module, a control module and an output module. The signal processing module is suitable for measuring the time when the receiver receives the light signal. The calculation module is suitable for multiplying the time when the receiver receives the light signal and the speed at which the receiver moves and outputting the calculation result. The control module is suitable for controlling the synchronous operation of the two groups of lifting devices. The output module is suitable for outputting the identification of whether particles exist on the surface of the graphite-based sample coating and outputting particle height information.

3. A method for detecting particles on the surface of a graphite-based coating according to claim 1, characterized in that: The lifting device comprises: The base is located on the side of the graphite-based sample; A guide rail, the lower end of which is connected to the upper end of the base, the guide rail being vertically arranged with its length along the height direction of the graphite base, the light source module or the receiver being slidably connected to the guide rail and having vertical movement freedom; A driver is connected to the guide rail and has a power output end. The power output end is connected to the light source module or the receiver and is suitable for driving the light source module or the receiver to move at a constant speed.

4. A method for detecting particles on the surface of a graphite-based coating according to claim 3, characterized in that: The guide rail is connected to a transmission member, one end of the transmission member is connected to the power output end of the driver, and the other end is connected to the light source module or the receiver. The driver drives the light source module or the receiver to move at a constant speed with the help of the transmission member.

5. A method for detecting particles on the surface of a graphite-based coating according to claim 3, characterized in that: The lifting device also includes a first rotating platform, the base is connected to the upper end of the first rotating platform, the upper end of the first rotating platform has circumferential rotation freedom and is suitable for driving the base to rotate circumferentially to adjust the light emission direction of the light source module, or adjust the direction in which the receiver receives the light signal.

6. A method for detecting particles on the surface of a graphite-based coating according to claim 1, characterized in that: A second rotating platform is provided at the bottom of the graphite-based sample, so that the graphite-based sample is located at the upper end of the second rotating platform. The upper end of the second rotating platform has circumferential rotational freedom and is suitable for driving the graphite-based sample to rotate circumferentially, so that the light source module irradiates the graphite-based sample from different directions.

7. A method for detecting particles on the surface of a graphite-based coating according to claim 6, characterized in that: The second rotating table is electrically connected to a wireless communication module, and the wireless communication module is wirelessly connected to a remote controller, so that the remote controller can remotely control the rotation of the second rotating table through the wireless communication module, thereby adjusting the rotation angle of the graphite-based sample.

8. A method for detecting particles on the surface of a graphite-based coating according to claim 3, characterized in that: The upper end of the guide rail is connected to a light shield, which is suitable for blocking sunlight or light and preventing it from interfering with the light signal emitted by the light source module.

9. A method for detecting particles on the surface of a graphite-based coating according to claim 8, characterized in that: The light shield is disc-shaped and has a connecting piece at the center of the bottom end. The connecting piece is detachably connected to the guide rail. The outer periphery of the light shield is connected to a hanging piece, and the hanging piece is used to connect the extension plate.

10. The method for detecting particles on the surface of a graphite-based coating according to claim 3, wherein: A slide is provided on one side of the guide rail, and the light source module or the receiver is slidably connected to the slide. A machine vision detector is provided on the other side of the guide rail opposite to the slide, and the machine vision detector is suitable for machine vision detection of particles on the surface of the graphite-based sample coating.

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