Deep ultraviolet adjustable calcium fluoride coated optical filter group and use method thereof

Abstract

The invention relates to the field of optical filters, and discloses a deep ultraviolet adjustable calcium fluoride coated optical filter group and a use method thereof, the deep ultraviolet adjustable calcium fluoride coated optical filter group comprises an ultraviolet light source, a calcium fluoride coated optical filter group, a calcium fluoride coated optical filter group, a calcium fluoride coated optical filter group and a calcium fluoride coated optical filter group, the reflector plate group is used for reflecting the ultraviolet light to the reflector plate II through the reflector plate I, reflecting the ultraviolet light to the reflector plate III through the reflector plate II and reflecting the ultraviolet light to the reflector plate IV through the reflector plate III to form reflected light; and the adjusting reflection sheet group is used for reflecting the reflection rays to the sixth reflection sheet through the fifth reflection sheet to obtain a pure ultraviolet monochromatic light source, and adjusting the reflection angles of the fifth reflection sheet and the sixth reflection sheet through an adjusting assembly so as to adjust the wavelength of the ultraviolet monochromatic light source. Deep ultraviolet light with a target wavelength generates constructive interference and is efficiently reflected and transmitted through the reflecting layer by utilizing the light interference principle, and meanwhile, destructive interference attenuation is formed on light with a non-target wavelength through at least six times of reflection of the reflecting sheet group, and absorption of transmitted light by a full-wave-band black film on the other side of the reflecting sheet is matched.

Description

Technical Field

[0001] The present invention relates to the technical field of optical filters, and in particular to a deep ultraviolet tunable calcium fluoride coated filter set and a use method thereof. Background Art

[0002] In the field of deep ultraviolet optics, deep ultraviolet light with a wavelength between 100-200nm plays a key role in cutting-edge technologies such as semiconductor lithography, ultraviolet spectroscopy, and photocatalytic reactions due to its high photon energy and short wavelength. For example, 193nm deep ultraviolet light, the core wavelength of ArF excimer lasers, is a key light source for achieving sub-7nm process precision in semiconductor chip lithography. Meanwhile, 152nm vacuum ultraviolet light has important applications in atmospheric composition monitoring and material surface modification. These applications place extremely high demands on the spectral purity, wavelength tunability, and intensity stability of deep ultraviolet light, necessitating the precise control of high-performance optical filters.

[0003] Traditional deep-UV filters primarily utilize induced transmission filters (ITX) made of aluminum and dielectric films. These filters utilize the induced transmission effect of light through a composite structure of aluminum and multilayer dielectric films (such as magnesium fluoride). Their advantage lies in a very wide cutoff range, but due to the significant light absorption of the metal film, the transmittance is extremely low, with the transmitted light intensity being only 10-15% of the incident light intensity, making them inadequate for high-energy output requirements. Summary of the Invention

[0004] In response to the shortcomings of the existing technology, the present invention provides a deep ultraviolet tunable calcium fluoride coated filter set and a method of use to solve the problem that traditional deep ultraviolet filters have low transmittance and cannot meet high energy output requirements.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a deep ultraviolet tunable calcium fluoride coating filter set, comprising:

[0006] Ultraviolet light source: used to emit ultraviolet light;

[0007] Reflector assembly: used to reflect the ultraviolet light through reflector 1 to reflector 2, which is then reflected by reflector 2 to reflector 3, and then reflected by reflector 3 to reflector 4, forming a reflection line;

[0008] Adjusting the reflector assembly: used to reflect the reflected light through the reflector five to the reflector six to obtain a pure ultraviolet monochromatic light source, and to adjust the reflection angles of the reflector five and the reflector six by adjusting the assembly, thereby adjusting the wavelength of the ultraviolet monochromatic light source;

[0009] A reflective layer is provided on one side of the reflective surface of the reflective sheet 1, reflective sheet 2, reflective sheet 3, reflective sheet 4, reflective sheet 5 and reflective sheet 6, and a black film is provided on the other side of the reflective sheet 1, reflective sheet 2, reflective sheet 3, reflective sheet 4, reflective sheet 5 and reflective sheet 6.

[0010] By adopting the above technical solution, the reflective layer utilizes the interference principle of light to cause constructive interference of the target wavelength deep ultraviolet light and achieve efficient reflection and transmission. At the same time, the reflective plate group forms destructive interference attenuation for the non-target wavelength light through at least six multiple reflections. Combined with the absorption of the transmitted light by the full-band black film on the other side of the reflective plate, the loss of light intensity caused by secondary reflection is avoided, thereby achieving high transmittance of the target wavelength light in the deep ultraviolet band, while ensuring the stability of the output light intensity, and solving the problem of traditional deep ultraviolet filters with low transmittance and inability to meet high energy output requirements.

[0011] Preferably, the reflective sheet 1, reflective sheet 2, reflective sheet 3, reflective sheet 4, reflective sheet 5 and reflective sheet 6 are all circular ultraviolet single crystal calcium fluoride substrates.

[0012] Preferably, the reflective layer is 30 layers of magnesium fluoride film and 30 layers of lanthanum fluoride film stacked on the surface of a circular ultraviolet single crystal calcium fluoride substrate, and the black film is a full-band absorption film for absorbing the ultraviolet light passing through the reflective layer and the full-band light of the reflected light.

[0013] Preferably, the adjustment assembly includes a base plate, the top of the base plate is fixedly connected to a column, a slide groove is opened on one side of the column, a rack 1 is fixedly connected to one side of the slide groove of the column, a slider is symmetrically slidably connected in the slide groove of the column, one side of the slider is fixedly connected to a mounting block, one side of the mounting block is rotatably connected to a connecting block, one side of one of the connecting blocks is installed with a reflective sheet 5, and one side of the other connecting block is installed with a reflective sheet 6.

[0014] Preferably, a motor is fixedly provided on one side of the mounting block, a worm is fixedly provided on the output end of the motor, one end of the worm is rotatably connected to the inside of the mounting block, the tooth end of the worm is meshedly connected to a worm wheel, the middle part of the worm wheel is fixedly connected to a rotating shaft, the outer wall of the rotating shaft is rotatably connected to one side of the mounting block, and one end of the rotating shaft is fixedly connected to one end of the connecting block.

[0015] Preferably, the other end of the rotating shaft is rotatably connected to one side of the slider, one side of the rotating shaft is evenly fixedly connected to a limit strip, both ends of the limit strip are fixedly connected to a limit ring, and one side of the limit ring is fixedly connected to one side of the rotating shaft.

[0016] Preferably, one side of the outer wall of the rotating shaft and the outer wall of the limiting bar are both slidably connected with a gear, the tooth end of the gear can be meshed with the tooth end of the rack, and a T-shaped annular groove is opened on one side of the gear.

[0017] Preferably, an electric push rod is fixedly provided on one side of the slider, and a rack 2 is fixedly provided on the output end of the electric push rod, and the tooth end of the rack 2 can be meshed and connected with the tooth end of the rack 1.

[0018] Preferably, a T-shaped slider is fixedly connected to one side of the rack 2, and the outer wall of the T-shaped slider is slidably connected to the T-shaped annular groove of the gear.

[0019] The method for using a deep ultraviolet tunable calcium fluoride coated filter set is applied to the above-mentioned deep ultraviolet tunable calcium fluoride coated filter set, comprising the following steps:

[0020] When in use, ultraviolet light is emitted by an ultraviolet light source;

[0021] The ultraviolet light is reflected by the reflective sheet 1 to the reflective sheet 2, and is reflected by the reflective sheet 2 to the reflective sheet 3, and is reflected by the reflective sheet 3 to the reflective sheet 4, forming a reflection line;

[0022] The reflected light is reflected by the reflector plate 5 to the reflector plate 6 to obtain a pure ultraviolet monochromatic light source, and the reflection angles of the reflector plates 5 and 6 are adjusted by the adjustment component to thereby adjust the wavelength of the ultraviolet monochromatic light source.

[0023] The present invention provides a deep ultraviolet tunable calcium fluoride coated filter set and a method of use. It has the following beneficial effects:

[0024] 1. The present invention utilizes the interference principle of light through the reflective layer to cause constructive interference of the target wavelength deep ultraviolet light, resulting in efficient reflection and transmission. At the same time, the reflective plate group forms destructive interference attenuation for the non-target wavelength light through at least six multiple reflections. Combined with the absorption of the transmitted light by the full-band black film on the other side of the reflective plate, the light intensity loss caused by secondary reflection is avoided, thereby achieving high transmittance of the target wavelength light in the deep ultraviolet band, while ensuring the stability of the output light intensity, solving the problem of traditional deep ultraviolet filters with low transmittance and inability to meet high energy output requirements.

[0025] 2. The present invention uses a multilayer magnesium fluoride film and a lanthanum fluoride film in the reflective layer to form destructive interference reflection on non-target wavelength light. Combined with a multiple reflection process of at least six times, the stray light intensity is attenuated to an extremely low level, achieving a wide-band cutoff from deep ultraviolet to near infrared, and the cutoff depth reaches a high-grade standard, ensuring the high purity of the output light source.

[0026] 3. The present invention uses ultraviolet single crystal calcium fluoride as the substrate, which has excellent transmittance in the deep ultraviolet band and is resistant to radiation. It is combined with stable coating materials such as magnesium fluoride and lanthanum fluoride and a full-band black film, so that the filter set is not easily degraded due to material aging or light damage during long-term use, ensuring the durability and reliability of the deep ultraviolet light filtering effect.

[0027] 4. The present invention coats a full-band absorbing black film on the non-reflective surface of the reflector to effectively absorb the residual light passing through the reflective layer, avoiding secondary reflection interference at the interface. Combined with the interference filtering effect of multiple reflections, the stray light intensity of the output deep ultraviolet monochromatic light is greatly reduced, and the purity of the light source is significantly improved, meeting the requirements of high-precision applications such as spectral analysis and photolithography for light intensity stability.

[0028] 5. The present invention uses a motor to drive the rotating shaft to rotate through the setting of the adjustment component, so that the reflective sheet five and the reflective sheet six rotate with the connecting block as the center, adjust their angles, and drive the gear to rotate at the same time. The electric push rod is used to engage the rack two or the gear with the rack one, so that the angle of the reflective sheet five and the reflective sheet six can be adjusted while adjusting the spacing and height between the two, so that the adjustment component can meet more application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic diagram of the reflection process of the deep ultraviolet tunable calcium fluoride coating filter set proposed by the present invention;

[0030] Figure 2 A schematic diagram of a partial structure of a reflector of the present invention;

[0031] Figure 3 Schematic diagram of the relationship between the reflected light intensity and wavelength after a single reflection of the present invention;

[0032] Figure 4 Schematic diagram of the relationship between the reflected light intensity and wavelength after two reflections of the present invention;

[0033] Figure 5 Schematic diagram of the relationship between the reflected light intensity and wavelength after three reflections of the present invention;

[0034] Figure 6 Schematic diagram of the relationship between the intensity of the reflected light and the wavelength after four reflections of the present invention;

[0035] Figure 7 Schematic diagram of the relationship between the intensity of the reflected light and the wavelength after five reflections of the present invention;

[0036] Figure 8 Schematic diagram of the relationship between the intensity of the reflected light and the wavelength after six reflections of the present invention;

[0037] Figure 9Schematic diagram of the relationship between the reflected light intensity and wavelength after the angles of the reflector sheet five and the reflector sheet six are adjusted according to the present invention;

[0038] Figure 10 This is a schematic diagram of the three-dimensional structure of the adjustment component of the present invention;

[0039] Figure 11 It is a schematic diagram of the partial structure of the column of the present invention;

[0040] Figure 12 It is a schematic diagram of the local structure of the motor of the present invention;

[0041] Figure 13 This is a schematic diagram of the internal structure of the mounting block of the present invention;

[0042] Figure 14 It is a schematic diagram of the local structure of the worm of the present invention;

[0043] Figure 15 It is a schematic diagram of the partial structure of the gear of the present invention;

[0044] Figure 16 This is a schematic diagram of the partial structure of the rack 2 of the present invention;

[0045] Figure 17 This is a flow chart of the method for using the deep ultraviolet tunable calcium fluoride coated filter set proposed by the present invention.

[0046] Among them, 1. UV light source; 2. Reflector sheet 1; 3. Reflector sheet 2; 4. Reflector sheet 3; 5. Reflector sheet 4; 6. Reflector sheet 5; 7. Reflector sheet 6; 8. Bottom plate; 9. Column; 10. Slide groove; 11. Rack 1; 12. Slider; 13. Mounting block; 14. Motor; 15. Connecting block; 16. Rotating shaft; 17. Limiting ring; 18. Limiting bar; 19. Gear; 20. Electric push rod; 21. Worm; 22. Worm gear; 23. Rack 2; 24. T-shaped annular slide groove; 25. T-shaped slider; 26. Black film; 27. Magnesium fluoride film; 28. Lanthanum fluoride film. DETAILED DESCRIPTION

[0047] The following will clearly and completely describe the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0048] Please see the attached Figure 1 -Attached Figure 16 The embodiment of the present invention provides a deep ultraviolet tunable calcium fluoride coating filter set, characterized by comprising:

[0049] Ultraviolet light source 1: used for emitting ultraviolet light;

[0050] Reflector assembly: used to reflect the ultraviolet light through reflector 1 2 to reflector 2 3, and then reflected by reflector 2 3 to reflector 3 4, and then reflected by reflector 3 4 to reflector 4 5, forming a reflection line;

[0051] Adjusting the reflector assembly: used to reflect the reflected light through the reflector five 6 to the reflector six 7 to obtain a pure ultraviolet monochromatic light source, and to adjust the reflection angle between the reflector five 6 and the reflector six 7 by adjusting the assembly, thereby adjusting the wavelength of the ultraviolet monochromatic light source;

[0052] One side of the reflective surface of reflective sheet 1 2, reflective sheet 2 3, reflective sheet 3 4, reflective sheet 4 5, reflective sheet 5 6, and reflective sheet 6 7 is provided with a reflective layer, and the other side of reflective sheet 1 2, reflective sheet 2 3, reflective sheet 3 4, reflective sheet 4 5, reflective sheet 5 6, and reflective sheet 6 7 is provided with a black film 26.

[0053] Specifically, UV light source 1 utilizes a deuterium lamp or excimer laser, emitting a broad spectrum of UV light with a characteristic wavelength of 193 nm. Its spectral range spans from the deep ultraviolet to the near-infrared, providing the primary light source input for the filter assembly. The reflector assembly comprises reflectors 1 2 through 4 5, each staggered at a 45° angle, forming a Z-shaped reflective light path. UV light is reflected from reflector 1 2 to reflector 2 3, and then sequentially to reflectors 3 4 and 4 5. With each reflection, the intensity of non-characteristic wavelengths is attenuated by 10%-15% according to the principle of interference. After four reflections, the stray light intensity is initially reduced to 50%-60% of its original intensity.

[0054] Reflector sheets 5 6 and 6 7 of the adjustable reflector assembly are mounted in slots 10 of pillars 9 via adjustable brackets. Motor 14 drives worm 21, which in turn rotates worm gear 22, causing reflectors 5 6 and 6 7 to rotate synchronously about axis 16. By varying the angle of incidence (e.g., from 38° to 50°), the characteristic wavelength can be continuously adjusted from 193 nm to 152 nm. After reflecting twice by reflectors 5 6 and 6 7, the accumulated six reflections attenuate the non-characteristic light intensity to OD6 (one part per million). Meanwhile, the characteristic wavelength intensity maintains a transmittance of 80% or higher, resulting in a pure ultraviolet monochromatic light source with a half-width (FWHM) of 0.5 nm or less.

[0055] By setting up a reflective layer, that is, stacking 30 layers of magnesium fluoride and lanthanum fluoride films on the reflective surface of the reflector, the principle of optical interference is used to cause constructive interference and efficient reflection of the 193nm characteristic wavelength light, while at the same time generating destructive interference reflection of other wavelengths of light. As a result, after multiple reflections, the intensity of non-characteristic wavelengths is gradually attenuated to the OD6 level, achieving highly selective reflection of the target wavelength and wide-range suppression of stray light in the deep ultraviolet band. By setting up a black film, the high absorption characteristics of the metal and carbon nanotube composite coating for the full range of light from 200-1000nm are utilized to effectively absorb the residual light that passes through the reflective layer, avoiding secondary reflection interference at the interface, and achieving optimized output light intensity stability and improved light source purity.

[0056] The reflective layer is formed on the surface of a circular ultraviolet single crystal calcium fluoride substrate with a diameter of 20 mm by stacking 30 layers of magnesium fluoride and 30 layers of lanthanum fluoride films respectively. The reflection effect wavelength is as follows: Figure 1 As shown. It can be seen that apart from the reflected signal near 193nm, about 10% of other signals in other bands will also be reflected back, which will have a serious impact on detection or signal analysis. A black film that can absorb the entire band is coated on the back of the reflector to absorb the light that passes through and avoid secondary reflection interference at the interface. Figures 1 to 6 As can be seen, as the number of reflections increases, the intensity of light outside the characteristic signal gradually decreases to a very low level (OD6). Meanwhile, the intensity of the characteristic signal, while decreasing somewhat, remains relatively high. If a UV light source, such as a deuterium lamp, is added to the entrance of this filter set, a relatively pure monochromatic UV light source can be obtained at the exit without significant loss of light intensity. By adjusting the incident angles of the light on the last two reflectors to 38 and 50 degrees, respectively, the characteristic wavelength can be adjusted from 193 nm to 152 nm. By varying the incident angle, the characteristic wavelength can be adjusted within a certain range.

[0057] Please see the attached Figure 1 , Attachment Figure 2 Reflector sheet 1 2, reflector sheet 2 3, reflector sheet 3 4, reflector sheet 4 5, reflector sheet 5 6, and reflector sheet 6 7 are all circular UV single crystal calcium fluoride substrates. The reflective layer is composed of 30 layers of magnesium fluoride film 27 and lanthanum fluoride film 28 laminated on the surface of the circular UV single crystal calcium fluoride substrate. Black film 26 is a full-band absorption film used to absorb the UV light passing through the reflective layer and the full-band light reflected by the reflective layer.

[0058] Specifically, reflectors 1-2 to 6-7 all use a circular ultraviolet single crystal calcium fluoride substrate with a diameter of 20 mm. The crystals are cut in a specific crystal plane direction and polished on both sides. The surface is smooth and has extremely low volume absorption characteristics. The edges of the substrate are rounded to avoid optical distortion caused by stress concentration. The reflective surface is deposited with 30 layers of magnesium fluoride film 27 and lanthanum fluoride film 28, respectively. The reflectivity of 193nm light is enhanced through film interference, and destructive interference reflection is formed for light of other wavelengths. Each film layer is designed according to a specific optical thickness and is prepared using ion-assisted deposition technology to ensure high density. The two film layers are matched with different refractive indices to form a highly reflective film system, which has high reflectivity for ultraviolet light of the target wavelength and significantly reduces the reflectivity for light of other bands. After multiple reflections, it can effectively attenuate the intensity of non-target wavelengths; the non-reflective surface is coated with a full-band black film 26. A metal and carbon nanotube composite coating is prepared on the non-reflective surface of the substrate using magnetron sputtering to form a full-band absorption film of appropriate thickness. This film has excellent light absorption performance and can effectively absorb residual light that passes through the reflective layer, avoid secondary reflection interference at the interface, and ensure the purity of the output ultraviolet monochromatic light. The absorption rate for light of 200-1000nm is ≥99.9%, effectively suppressing secondary reflection interference of transmitted light and ensuring stable output light intensity.

[0059] Please see the attached Figure 10 -Attached Figure 16The adjustment assembly includes a base plate 8, a column 9 fixedly connected to the top of the base plate 8, a slot 10 defined on one side of the column 9, a rack 11 fixedly connected to one side of the slot 10 of the column 9, a slider 12 symmetrically slidably connected within the slot 10 of the column 9, a mounting block 13 fixedly connected to one side of the slider 12, a connecting block 15 rotatably connected to one side of the mounting block 13, one side of one connecting block 15 mounted with a reflector sheet 5 6, and one side of the other connecting block 15 mounted with a reflector sheet 6 7. A motor 14 is fixedly mounted on one side of the mounting block 13, a worm 21 fixedly mounted on the output end of the motor 14, one end of the worm 21 rotatably connected to the interior of the mounting block 13, the tooth end of the worm 21 meshingly connected to a worm gear 22, a rotating shaft 16 fixedly connected to the middle of the worm gear 22, the outer wall of the rotating shaft 16 rotatably connected to one side of the mounting block 13, and one end of the rotating shaft 16 fixedly connected to one end of the connecting block 15. The other end of the rotating shaft 16 is rotatably connected to one side of the slider 12. A limit bar 18 is evenly and fixedly connected to one side of the rotating shaft 16. Both ends of the limit bar 18 are fixedly connected to a limit ring 17, and one side of the limit ring 17 is fixedly connected to one side of the rotating shaft 16. A gear 19 is slidably connected to one side of the outer wall of the rotating shaft 16 and the outer wall of the limit bar 18. The tooth end of the gear 19 can mesh with the tooth end of rack 11. A T-shaped annular groove 24 is defined on one side of the gear 19. An electric push rod 20 is fixedly mounted on one side of the slider 12. A rack 23 is fixedly mounted on the output end of the electric push rod 20. The tooth end of rack 23 can mesh with the tooth end of rack 11. A T-shaped slider 25 is fixedly connected to one side of rack 23. The outer wall of the T-shaped slider 25 slides within the T-shaped annular groove 24 of the gear 19.

[0060] Specifically, the column 9 is installed through the base plate 8, and the rack 11 and the slider 12 are installed through the column 9. Through the operation of the motor 14, the worm 21 is driven to rotate inside the mounting block 13, thereby driving the worm gear 22 to rotate, and then driving the rotating shaft 16 to rotate, so that the connecting block 15 is rotated on one side of the mounting block 13, so that through the rotation of the connecting block 15, the reflective sheet 5 6 and the reflective sheet 6 7 are driven to rotate on one side of the mounting block 13 with the connecting block 15 as the center of the circle to adjust their angles. At the same time, through the rotation of the rotating shaft 16, the limit ring 17 and the limit bar 18 are driven to rotate with the rotating shaft 16 as the center of the circle, and the limit bar 18 is used to limit the gear 19, so as to drive the gear 19 to rotate with the rotating shaft 16 as the center of the circle.

[0061] By the operation of the electric push rod 20, the rack 23 is driven to move, and the T-shaped slider 25 and the T-shaped annular groove 24 are limited, which drives the gear 19 to slide on the outer wall of the limit bar 18 and the rotating shaft 16, so that the position of the gear 19 can be adjusted so that it can mesh with or not mesh with the rack 11, and then when the gear 19 is meshed with the rack 11, the rack 23 is not meshed with the rack 11, and when the gear 19 is not meshed with the rack 11, the rack 23 is meshed with the rack 11, and because one end of the rotating shaft 16 rotates on one side of the slider 12, the other side of the mounting block 13 is fixed to one side of the slider 12, so that by utilizing the rotation of the gear 19, when it meshes with the rack 11, it can The slider 12 is driven to slide up and down inside the slide groove 10 of the column 9, and then the mounting block 13 is driven to move up and down, thereby driving the reflective sheet 5 6 and the reflective sheet 6 7 to adjust the height, so that the distance between the two can be adjusted according to needs, thereby enhancing practicality. When there is no need to adjust the distance, the electric push rod 20 is operated so that the gear 19 no longer engages with the rack 1 11, and the rack 2 23 engages with the rack 1 11, thereby limiting the position of the reflective sheet 5 6 and the reflective sheet 6 7 through the engagement of the rack 2 23 with the rack 1 11, further enhancing practicality, thereby achieving the ability to adjust the angle of the reflective sheet 5 6 and the reflective sheet 6 7 while adjusting the distance and height between the two, so that the adjustment component can meet more application scenarios.

[0062] Please see the attached Figure 17 The method for using the deep ultraviolet tunable calcium fluoride coated filter set is applied to the above-mentioned deep ultraviolet tunable calcium fluoride coated filter set, comprising the following steps:

[0063] When in use, ultraviolet light is emitted by the ultraviolet light source 1;

[0064] The ultraviolet light is reflected by the reflective sheet 1 2 to the reflective sheet 2 3 , and is reflected by the reflective sheet 2 3 to the reflective sheet 3 4 , and is reflected by the reflective sheet 3 4 to the reflective sheet 4 5 , forming a reflection line;

[0065] The reflected light is reflected by the reflector five 6 to the reflector six 7 to obtain a pure ultraviolet monochromatic light source, and the reflection angle of the reflector five 6 and the reflector six 7 is adjusted by the adjustment component to thereby adjust the wavelength of the ultraviolet monochromatic light source.

[0066] Specifically, when in use, UV light source 1 is activated. This light source emits UV light of multiple wavelengths, providing the primary light input for the filter set. The light first strikes reflector 1 2, where it is reflected and then directed to reflector 2 3. It is then reflected by reflector 3 4 and reflector 4 5. During this process, as the light passes through each reflector, the non-target wavelengths carried by the light are partially filtered by the reflective layer according to the principle of optical interference, gradually forming a preliminarily filtered reflected line.

[0067] After reaching reflector plate 5 (6), the reflected light is reflected back to reflector plate 6 (7), completing the final two reflections and filtering. At this point, the target wavelength is efficiently retained while other wavelengths are significantly attenuated, resulting in a pure, monochromatic ultraviolet light source. During this process, the reflection angles of reflectors 5 (6) and 6 (7) can be adjusted using an adjustment component. Specifically, a motor drives a worm gear mechanism, which rotates the reflectors around their axis, changing the incident angle of the light. By leveraging the correspondence between optical angle and wavelength, the wavelength of the output monochromatic light can be adjusted.

[0068] The reflective layer of the reflector assembly is highly reflective of the target wavelength, effectively suppressing light at other wavelengths. The black film absorbs any remaining light that passes through the reflective layer, preventing secondary reflection interference. Through these steps, the filter assembly can output high-purity monochromatic light in the deep ultraviolet band, and the wavelength can be flexibly adjusted to meet the requirements of different scenarios.

[0069] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. Deep UV tunable calcium fluoride coated filter set, characterized by: include: Ultraviolet light source (1): used to emit ultraviolet light; Reflection sheet group: used to reflect ultraviolet light to reflection sheet two (3) through reflection sheet one (2), and then reflected by reflection sheet two (3) to reflection sheet three (4), and then reflected by reflection sheet three (4) to reflection sheet four (5), thereby forming a reflection line; Adjusting the reflector assembly: used to reflect the reflected light to the reflector six (7) through the reflector five (6) to obtain a pure ultraviolet monochromatic light source, and to adjust the reflection angle between the reflector five (6) and the reflector six (7) through the adjusting assembly, thereby adjusting the wavelength of the ultraviolet monochromatic light source; One side of the reflective surface of each of the reflective sheet 1 (2), the reflective sheet 2 (3), the reflective sheet 3 (4), the reflective sheet 4 (5), the reflective sheet 5 (6), and the reflective sheet 6 (7) is provided with a reflective layer, and the other side of each of the reflective sheet 1 (2), the reflective sheet 2 (3), the reflective sheet 3 (4), the reflective sheet 4 (5), the reflective sheet 5 (6), and the reflective sheet 6 (7) is provided with a black film (26).

2. The deep ultraviolet tunable calcium fluoride coated filter set according to claim 1, characterized in that: The reflective sheet 1 (2), reflective sheet 2 (3), reflective sheet 3 (4), reflective sheet 4 (5), reflective sheet 5 (6), and reflective sheet 6 (7) are all circular ultraviolet single crystal calcium fluoride substrates.

3. The deep ultraviolet tunable calcium fluoride coated filter set according to claim 1, characterized in that: The reflective layer comprises 30 layers of magnesium fluoride film (27) and 30 layers of lanthanum fluoride film (28) respectively stacked on the surface of a circular ultraviolet single crystal calcium fluoride substrate. The black film (26) is a full-band absorption film for absorbing ultraviolet light passing through the reflective layer and full-band light of the reflected light.

4. The deep ultraviolet tunable calcium fluoride coated filter set according to claim 1, characterized in that: The adjustment component includes a base plate (8), a column (9) is fixedly connected to the top of the base plate (8), a slide groove (10) is provided on one side of the column (9), a rack (11) is fixedly connected to one side of the slide groove (10) of the column (9), a slider (12) is symmetrically slidably connected in the slide groove (10) of the column (9), a mounting block (13) is fixedly connected to one side of the slider (12), and a connecting block (15) is rotatably connected to one side of the mounting block (13), wherein a reflective sheet (5) (6) is installed on one side of one of the connecting blocks (15), and a reflective sheet (6) (7) is installed on one side of the other connecting block (15).

5. The deep ultraviolet tunable calcium fluoride coated filter set according to claim 4, characterized in that: A motor (14) is fixedly provided on one side of the mounting block (13), a worm (21) is fixedly provided on the output end of the motor (14), one end of the worm (21) is rotatably connected to the interior of the mounting block (13), a tooth end of the worm (21) is meshingly connected to a worm wheel (22), a rotating shaft (16) is fixedly connected to the middle of the worm wheel (22), an outer wall of the rotating shaft (16) is rotatably connected to one side of the mounting block (13), and one end of the rotating shaft (16) is fixedly connected to one end of the connecting block (15).

6. The deep ultraviolet tunable calcium fluoride coated filter set according to claim 5, characterized in that: The other end of the rotating shaft (16) is rotatably connected to one side of the slider (12), one side of the rotating shaft (16) is evenly fixedly connected to a limit strip (18), both ends of the limit strip (18) are fixedly connected to a limit ring (17), and one side of the limit ring (17) is fixedly connected to one side of the rotating shaft (16).

7. The deep ultraviolet tunable calcium fluoride coated filter set according to claim 6, characterized in that: A gear (19) is slidably connected to one side of the outer wall of the rotating shaft (16) and the outer wall of the limiting bar (18), and the tooth end of the gear (19) can be meshed with the tooth end of the rack (11). A T-shaped annular groove (24) is provided on one side of the gear (19).

8. The deep ultraviolet tunable calcium fluoride coated filter set according to claim 6, characterized in that: An electric push rod (20) is fixedly provided on one side of the slider (12), and a rack 2 (23) is fixedly provided on the output end of the electric push rod (20), and the tooth end of the rack 2 (23) can be meshed and connected with the tooth end of the rack 1 (11).

9. The deep ultraviolet tunable calcium fluoride coated filter set according to claim 8, characterized in that: A T-shaped slider (25) is fixedly connected to one side of the rack 2 (23), and the outer wall of the T-shaped slider (25) is slidably connected to the T-shaped annular groove (24) of the gear (19).

10. A method for using a deep ultraviolet tunable calcium fluoride coated filter set, characterized in that: The deep ultraviolet tunable calcium fluoride coated filter set according to any one of claims 1 to 9 comprises the following steps: When in use, ultraviolet light is emitted by the ultraviolet light source (1); The ultraviolet light is reflected by the reflective sheet 1 (2) to the reflective sheet 2 (3), and is reflected by the reflective sheet 2 (3) to the reflective sheet 3 (4), and is reflected by the reflective sheet 3 (4) to the reflective sheet 4 (5), thereby forming a reflection line; The reflected light is reflected by the reflector five (6) to the reflector six (7) to obtain a pure ultraviolet monochromatic light source, and the reflection angle between the reflector five (6) and the reflector six (7) is adjusted by the adjustment component to thereby adjust the wavelength of the ultraviolet monochromatic light source.

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