Quality detection method and device, storage medium and electronic equipment

Abstract

The invention provides a quality detection method and apparatus, a storage medium and an electronic device. The method comprises the steps of determining site types of a first site and a second site associated in a production process of a target batch of products; and in response to determining that the first site is the process site and the second site is the measurement site, determining a spot check group corresponding to the target batch of products based on the spot check rule of the first site. And in response to the situation that the casual inspection group does not reach the group closing condition and the casual inspection group is in a casual inspection standard reaching state, skipping the measurement operation on the target batch of products, and determining that the quality of the target batch of products meets a preset quality requirement. According to the method, the quality detection efficiency is remarkably improved through a sampling inspection group management mechanism. Specifically, according to the method, only the sampling inspection objects in each sampling inspection group, such as the first batch in the sampling inspection group, need to be measured, and when the batch is measured to be qualified, other batches in the same group can be automatically exempted from inspection, so that the detection workload is greatly reduced, and the consumption of detection resources is effectively reduced.

Description

Technical Field

[0001] The technical solution disclosed herein relates to the field of computer technology, and in particular to a quality detection method and device, a storage medium, and an electronic device. Background Art

[0002] Current quality spot checks in industrial production are primarily conducted based on batch names, a method with significant limitations. First, when multiple batches share the same name, this results in a large number of sample checks, wasting testing resources. Second, because batch naming rules are often directly tied to the chronological order of production (e.g., naming by production date), batches produced within a certain timeframe often share the same name. This results in sample checks being overly concentrated in time, resulting in the inspection results not accurately reflecting the true quality status of the entire batch of products, and potentially leading to missed quality issues. Summary of the Invention

[0003] In view of this, embodiments of the present disclosure provide a quality detection method and device, a storage medium, and an electronic device.

[0004] According to a first aspect of the present disclosure, a quality detection method is proposed, the method comprising:

[0005] Determining the site types of a first site and a second site associated with a target batch of products in a production process; the site is the smallest functional unit in the product production process;

[0006] In response to determining that the first site is a process site and the second site is a measurement site, determining a sampling inspection group corresponding to the target batch of products based on the sampling inspection rules of the first site; the process site is a site for performing process processing on products, and the measurement site is a site for measuring product parameters, and one sampling inspection group accommodates at least two batches of products;

[0007] In response to the sampling group not meeting the group closing conditions and the sampling group being in the sampling compliance state, the measurement operation on the target batch of products is skipped, and it is determined that the quality of the target batch of products meets the preset quality requirements; the sampling compliance state is used to characterize that the quality of the sampling objects in the sampling group meets the preset quality requirements.

[0008] In combination with any embodiment provided in the present disclosure, the method further includes:

[0009] In response to the fact that the sampling inspection group corresponding to the target batch of products does not exist, or the sampling inspection group has reached a group closing condition, creating a sampling inspection group with the target batch of products as the sampling inspection object;

[0010] The second site is triggered to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement result.

[0011] In combination with any embodiment provided in the present disclosure, the determining the sampling inspection group corresponding to the target batch of products based on the sampling inspection rules of the first site includes:

[0012] Based on the sampling inspection rules of the first site, obtaining at least one sampling inspection group;

[0013] The most recently created sampling inspection group among the at least one sampling inspection group is determined as the sampling inspection group corresponding to the target batch of products.

[0014] In combination with any embodiment provided in the present disclosure, the method further includes:

[0015] In response to determining that the sampling group does not meet the group closing condition and at least one of the following is satisfied, triggering the second site to perform a measurement operation on the target batch of products:

[0016] The sampling inspection group is in a penalty state; the penalty state is used to indicate that the quality of the sampled objects in the sampling inspection group does not meet the preset quality requirements;

[0017] After the sampling inspection group is in the penalty state, the statistical results of the batches that have completed the processing flow of the first site and meet the preset quality requirements do not meet the preset requirements.

[0018] In combination with any embodiment provided in the present disclosure, the method further includes:

[0019] After determining that the quality of the target batch of products meets the preset quality requirements based on the measurement results, updating the statistical results of the batches that meet the preset quality requirements;

[0020] When it is determined that the updated statistical results meet the preset requirements, the status of the sampling inspection group is updated to a sampling inspection compliance status.

[0021] In combination with any embodiment provided in the present disclosure, the method further includes:

[0022] When it is determined that the sampling inspection group meets the group closing condition, the status of the sampling inspection group is updated to a completed status.

[0023] In combination with any embodiment provided by the present disclosure,

[0024] The first machine associated with the first station is used to perform the process function corresponding to the first station, and the first machine includes at least two chambers that can independently perform the process function;

[0025] The sampling inspection rule includes: at least one of a first sampling inspection rule, a second sampling inspection rule, a third sampling inspection rule, and a fourth sampling inspection rule;

[0026] The first sampling inspection rule is to use the target number of batches that complete the first site processing flow as a sampling inspection group, and to use the first batch in the sampling inspection group as the sampling inspection object;

[0027] The second sampling inspection rule defines the batches that complete the first site processing flow within a single maintenance cycle of the first machine as a sampling inspection group, and the first batch in the sampling inspection group is the sampling inspection object;

[0028] The third sampling inspection rule defines a sampling inspection group as a target number of batches that have completed the first station processing flow in the target chamber of the first machine, and the first batch in the sampling inspection group is the sampling inspection object;

[0029] The fourth sampling inspection rule establishes a sampling inspection group based on the batches whose time consumed to complete the first site processing flow is greater than or equal to the preset time as the sampling inspection objects.

[0030] In combination with any embodiment provided by the present disclosure,

[0031] When the sampling inspection rule includes the first sampling inspection rule or the third sampling inspection rule, the group closing condition includes: the number of batches in the sampling inspection group reaches the target number;

[0032] When the spot check rule includes the second spot check rule, the group closing condition includes: the current maintenance cycle of the first machine ends;

[0033] When the sampling inspection rule includes the fourth sampling inspection rule, the group closing condition includes: the time consumed by the target batch of products to complete the processing flow of the first site is greater than or equal to the preset time.

[0034] In conjunction with any embodiment provided in this disclosure, the sampling inspection rules are obtained based on the following method:

[0035] receiving rule configuration parameters input by a user, wherein the rule configuration parameters include a site identifier and associated configuration items;

[0036] generating a sampling inspection rule bound to the site identifier according to the associated configuration item;

[0037] The associated configuration items include at least one of the following:

[0038] The sampling inspection group capacity threshold is used to limit the maximum number of batches that a single sampling inspection group can accommodate;

[0039] Maintenance cycle parameters;

[0040] Chamber identification;

[0041] The maximum processing time threshold is used to limit the maximum time allowed to complete the processing process;

[0042] The number of penalty monitoring batches is used to limit the number of batches that need to be continuously measured after the sampling inspection group is in the penalty state.

[0043] In combination with any embodiment provided in the present disclosure, the method further includes:

[0044] Determining that both the first site and the second site are measurement sites, and that the first site has performed a measurement operation on the target batch of products;

[0045] The second site is triggered to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement results of the first site and the second site.

[0046] According to a second aspect of the present disclosure, a quality detection device is provided, comprising:

[0047] A site type determination module, configured to determine the site types of a first site and a second site associated with a target batch of products in a production process; the site being the smallest functional unit in the product production process;

[0048] a sampling inspection group determination module, configured to, in response to determining that the first site is a process site and the second site is a measurement site, determine a sampling inspection group corresponding to the target batch of products based on the sampling inspection rules of the first site; the process site is a site for performing process processing on products, and the measurement site is a site for measuring product parameters, and one sampling inspection group accommodates at least two batches of products;

[0049] The quality inspection module is used to skip the measurement operation of the target batch of products in response to the sampling group not meeting the group closing conditions and the sampling group being in the sampling standard compliance state, and determine that the quality of the target batch of products meets the preset quality requirements; the sampling standard compliance state is used to indicate that the quality of the sampling objects in the sampling group meets the preset quality requirements.

[0050] In combination with any embodiment provided in the present disclosure, the quality detection device further includes:

[0051] a sampling inspection group creation module, configured to create a sampling inspection group with the target batch of products as the sampling inspection object in response to the sampling inspection group corresponding to the target batch of products not existing or the sampling inspection group having reached a group closing condition;

[0052] The quality inspection module is further configured to trigger the second site to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement result.

[0053] In combination with any embodiment provided by the present disclosure, the sampling group determination module, when used to determine the sampling group corresponding to the target batch of products based on the sampling rules of the first site, includes:

[0054] Based on the sampling inspection rules of the first site, obtaining at least one sampling inspection group;

[0055] The most recently created sampling inspection group among the at least one sampling inspection group is determined as the sampling inspection group corresponding to the target batch of products.

[0056] In combination with any embodiment provided in the present disclosure, the quality detection module is further used to:

[0057] In response to determining that the sampling group does not meet the group closing condition and at least one of the following is satisfied, triggering the second site to perform a measurement operation on the target batch of products:

[0058] The sampling inspection group is in a penalty state; the penalty state is used to indicate that the quality of the sampled objects in the sampling inspection group does not meet the preset quality requirements;

[0059] After the sampling inspection group is in the penalty state, the statistical results of the batches that have completed the processing flow of the first site and meet the preset quality requirements do not meet the preset requirements.

[0060] In combination with any embodiment provided in the present disclosure, the quality detection device further includes:

[0061] a metrology module, configured to update statistical results of the batches that meet the preset quality requirements after determining that the quality of the target batch of products meets the preset quality requirements based on the measurement results;

[0062] The status update module is used to update the status of the sampling inspection group to a sampling inspection compliance status when it is determined that the updated statistical results meet the preset requirements.

[0063] In combination with any embodiment provided in the present disclosure, the status update module is further configured to:

[0064] When it is determined that the sampling inspection group meets the group closing condition, the status of the sampling inspection group is updated to a completed status.

[0065] In combination with any embodiment provided in the present disclosure, the first machine associated with the first station is used to perform the process function corresponding to the first station, and the first machine includes at least two chambers that can independently perform the process function;

[0066] The sampling inspection rule includes: at least one of a first sampling inspection rule, a second sampling inspection rule, a third sampling inspection rule, and a fourth sampling inspection rule;

[0067] The first sampling inspection rule is to use the target number of batches that complete the first site processing flow as a sampling inspection group, and to use the first batch in the sampling inspection group as the sampling inspection object;

[0068] The second sampling inspection rule defines the batches that complete the first site processing flow within a single maintenance cycle of the first machine as a sampling inspection group, and the first batch in the sampling inspection group is the sampling inspection object;

[0069] The third sampling inspection rule defines a sampling inspection group as a target number of batches that have completed the first station processing flow in the target chamber of the first machine, and the first batch in the sampling inspection group is the sampling inspection object;

[0070] The fourth sampling inspection rule establishes a sampling inspection group based on the batches whose time consumed to complete the first site processing flow is greater than or equal to the preset time as the sampling inspection objects.

[0071] In combination with any embodiment provided in the present disclosure, when the sampling inspection rule includes the first sampling inspection rule or the third sampling inspection rule, the group closing condition includes: the number of batches in the sampling inspection group reaches the target number;

[0072] When the spot check rule includes the second spot check rule, the group closing condition includes: the current maintenance cycle of the first machine ends;

[0073] When the sampling inspection rule includes the fourth sampling inspection rule, the group closing condition includes: the time consumed by the target batch of products to complete the processing flow of the first site is greater than or equal to the preset time.

[0074] In conjunction with any embodiment provided in this disclosure, the sampling inspection rules are obtained based on the following method:

[0075] receiving rule configuration parameters input by a user, wherein the rule configuration parameters include a site identifier and associated configuration items;

[0076] generating a sampling inspection rule bound to the site identifier according to the associated configuration item;

[0077] The associated configuration items include at least one of the following:

[0078] The sampling inspection group capacity threshold is used to limit the maximum number of batches that a single sampling inspection group can accommodate;

[0079] Maintenance cycle parameters;

[0080] Chamber identification;

[0081] The maximum processing time threshold is used to limit the maximum time allowed to complete the processing process;

[0082] The number of penalty monitoring batches is used to limit the number of batches that need to be continuously measured after the sampling inspection group is in the penalty state.

[0083] In combination with any embodiment provided in the present disclosure, the quality detection module is further used to:

[0084] Determining that both the first site and the second site are measurement sites, and that the first site has performed a measurement operation on the target batch of products;

[0085] The second site is triggered to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement results of the first site and the second site.

[0086] According to a third aspect of the present disclosure, a computer-readable storage medium is provided, wherein the machine-readable storage medium stores machine-readable instructions, which, when called and executed by a processor, prompt the processor to implement the quality detection method of any embodiment of the present disclosure.

[0087] According to a fourth aspect of the present disclosure, there is provided an electronic device comprising

[0088] processor;

[0089] a memory for storing processor-executable instructions;

[0090] The processor is configured to execute the quality detection method of any embodiment of the present disclosure.

[0091] The technical solutions provided by the embodiments of the present disclosure may have the following beneficial effects:

[0092] In the quality inspection method and device, storage medium and electronic device provided by the embodiments of the present disclosure, a significant improvement in quality inspection efficiency is achieved through the inspection group management mechanism. Specifically, the method only needs to measure the inspection objects in each inspection group, such as the first batch in the inspection group. When the batch is measured to be qualified, other batches in the same group can be automatically exempted from inspection, thereby greatly reducing the inspection workload and effectively reducing the consumption of inspection resources. At the same time, the mechanism of dynamically constructing the inspection group based on the production process can also ensure the representativeness and scientific nature of the inspection samples, and reduce the possibility of missing quality problems.

[0093] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0094] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0095] Figure 1 is a schematic diagram showing switching of various states of a site according to an exemplary embodiment of the present disclosure;

[0096] Figure 2 is a schematic diagram of a page for configuring site relationships according to an exemplary embodiment of the present disclosure;

[0097] Figure 3 is a schematic diagram of site selection according to an exemplary embodiment of the present disclosure;

[0098] Figure 4a 1 is a schematic diagram of a page for configuring sampling rules according to an exemplary embodiment of the present disclosure;

[0099] Figure 4b is a schematic diagram of a random inspection process according to an exemplary embodiment of the present disclosure;

[0100] Figure 5 is a flow chart of a quality detection method according to an exemplary embodiment of the present disclosure;

[0101] Figure 6 is a flow chart of another quality detection method according to an exemplary embodiment of the present disclosure;

[0102] Figure 7 is a flow chart of another quality detection method according to an exemplary embodiment of the present disclosure;

[0103] Figure 8 1 is a schematic diagram showing a state change of a sampling inspection group according to an exemplary embodiment of the present disclosure;

[0104] Figure 9 is a flow chart of another quality detection method according to an exemplary embodiment of the present disclosure;

[0105] Figure 10 is a flow chart of another quality detection method according to an exemplary embodiment of the present disclosure;

[0106] Figure 11 is a flow chart of another quality detection method according to an exemplary embodiment of the present disclosure;

[0107] Figure 12 is a structural diagram of a quality detection device according to an exemplary embodiment of the present disclosure;

[0108] Figure 13It is a structural diagram of an electronic device according to an exemplary embodiment of the present disclosure. DETAILED DESCRIPTION

[0109] Here, exemplary embodiments will be described in detail, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, unless otherwise indicated, the same numerals in different drawings represent the same or similar elements.

[0110] Current quality spot checks in industrial production are primarily conducted based on batch names and attributes. This approach has significant limitations: First, when multiple batches share the same name or attributes, the number of samples required for spot checks increases, resulting in a waste of testing resources. Second, because batch naming rules and batch attributes are often directly linked to the production time sequence (e.g., naming by production date), batches produced within a certain time period often share the same name or attributes. This results in the sample size being too concentrated in time, resulting in the spot check results not accurately reflecting the true quality status of the entire batch of products, and the risk of quality issues being missed.

[0111] In view of this, the embodiment of the present disclosure provides a quality inspection method, which achieves a significant improvement in quality inspection efficiency by introducing a sampling inspection group management mechanism. Specifically, the method only needs to measure the sampling objects in each sampling inspection group, such as the first batch in the sampling inspection group. When the batch is measured to be qualified, other batches in the same group can be automatically exempted from inspection, thereby greatly reducing the inspection workload and effectively reducing the consumption of inspection resources. At the same time, the mechanism of dynamically constructing the sampling inspection group based on the production process can also ensure the representativeness and scientific nature of the sampling inspection samples, and reduce the possibility of missing quality problems.

[0112] To facilitate understanding of the quality sampling inspection method provided by the embodiment of the present disclosure, the following contents are first introduced:

[0113] 1. Site specification information settings

[0114] A site is the smallest functional unit in the product production process, including process sites and measurement sites. The process site is a site used to process the product. Taking the wafer production process as an example, it includes but is not limited to electroplating sites, etching sites, etc. The measurement site is a site used to measure product parameters. Based on the measurement results of the measurement site, it can be determined whether the quality of the wafer meets the preset quality requirements. Specifically, if the measurement result is determined to be within the preset error range, the quality of the wafer is considered to meet the preset quality requirements. Otherwise, the quality of the wafer is considered to not meet the preset quality requirements.

[0115] In practice, users can obtain site rule information for each site through batch import or manual creation within the modeling tool. Site specification information may include, but is not limited to, the factory name (i.e., the name of the factory to which the site belongs), site name, site type (process site or measurement site), the name of the machine corresponding to the process site (used to perform the process function corresponding to the process site), and whether it is a primary site (the primary site is usually the first process site in the main process). At this point, the site is in the Unfrozen state.

[0116] In this state, users can modify the site rule information of the site. At the same time, in order to avoid multiple users editing at the same time, the CheckState field can be used to manage the editing status of the site specification information. Specifically, when CheckState is CheckedIn, it means that the site is in the initial state, has not been operated by other users, and can be edited. When CheckState is Checkedout, it means that the site is in the modification state. At this time, if it is determined that the account of the editor is inconsistent with that of the current operator, the current operator cannot edit the site specification information of the site. If it is determined that the account of the editor is consistent with that of the current operator, the current operator can edit the site specification information of the site.

[0117] Site batches, also called site groups, can group sites with similar functions together. Specifically, before creating a specific site batch based on the site specification information of each site, to ensure that the site specification information of each site is not modified, the site can be set to the frozen state. When creating a specific site batch, the site status is converted from frozen to active. The switching process of each site status is as follows: Figure 1 shown.

[0118] Based on the above, the status of the site can include FrozenState, CheckState and ActiveState. The meaning of each status is summarized in Table 1 below.

[0119] Table 1

[0120]

[0121] In addition, if the user wants to edit the site specification information of an activated site, this can be achieved through two methods: site specification upgrade and site specification cloning.

[0122] A site specification upgrade refers to upgrading the existing site specification information. The upgraded site specification information, except for the version number, remains consistent with the original version. You can edit the upgraded site specification information. Furthermore, you can freeze the edited site specification information and then activate it. Upon activation, the original site specification information automatically returns to an inactive state.

[0123] Site specification cloning means cloning a new site specification. Except for the site name, all other information in the cloned site specification remains the same as the original. You can edit the cloned site specification and then freeze and activate it. Upon activation, the original site specification automatically becomes inactive.

[0124] 2. Site Relationship Management

[0125] After configuring the site specification information of each site, the user can further configure the site relationship between the sites. For example, the site relationship can be configured as process site 1-measurement site 1, measurement site 1-measurement site 2, and so on.

[0126] like Figure 2 , illustrates a page diagram for configuring site relationships, where several filtering conditions are illustrated at the top of the page, including: Product ID (product name), Main Flow (main flow), From Step Sequence (starting site) and ToStep Sequence (ending site). Through these conditions, existing site relationship data can be found. On the right side of the page is the site relationship details page, where users can choose different processing methods based on actual needs, including: Create (add), Delete (delete) and Modify (modify). The data that users can configure include: Product ID (product name), MainFlow (main flow), From Step Sequence (starting site), To Step Sequence (ending site), SamplingStep Map Type (site relationship type, including process site-measurement site, measurement site-measurement site), etc.

[0127] When users need to add or modify site relationship data, they can quickly select a site by clicking the Fetch StepSequence button on the right side of the page. The pop-up page is as follows: Figure 3 shown.

[0128] The rules for selecting the start and end stations are as follows: 1. Only one station can be selected from each column, and the start station must be before the end station. 2. Only a measurement station can be selected as the end station, while the start station can be either a process station or a measurement station. 3. A station can only be used as the end station once.

[0129] For example, if you select Create on the Site Relationship Details page and configure the following: Product ID: A, Main Flow: a, From Step Sequence: Process Site 1, To Step Sequence: Measurement Site 1, Sampling Step Map Type: Process Site - Measurement Site. Alternatively, if you select Product ID: A, Main Flow: a, From Step Sequence: Measurement Site 1, To Step Sequence: Measurement Site 2, Sampling Step Map Type: Measurement Site - Measurement Site, the site relationships for product A in main process a are: Process Site 1 - Measurement Site 1, Measurement Site 1 - Measurement Site 2.

[0130] 3. Setting of sampling inspection rules

[0131] After configuring the site relationship, users can further configure sampling rules based on their needs.

[0132] like Figure 4aThe following illustrates a page for configuring sampling rules. The top of the page shows several filter criteria, including Machine, Product ID, and Logical Recipe. These criteria allow you to search for existing sampling rule data. The right side of the page contains the sampling rule details, allowing users to select different actions based on their needs, including Create, Delete, and Modify. User-configurable data includes: SamplingGroup Rule Name, Process Machine, Product ID, Logical Recipe, Total Lot Count, Track Out Interval, Select Count, After Fail Scan Lot Count (the number of batches that meet the preset quality requirements and require continuous measurement after failing to meet the preset quality requirements), Abnormal State Flag, Chamber Flag, and Rule Usage.

[0133] Among them, the rule name is the identifier of the sampling rule currently set by the user. The product name is the name of the product that the user wants to sample. The site name is the name of the site that the user wants to sample. The machine name is the name of the machine used to perform the process function corresponding to the aforementioned site. The total number of batches refers to the number of batches in a sampling group. When the user sets the total number of batches to 10, it means that a sampling group should contain 10 batches, and only the first batch in the sampling group is measured. If the measurement result of the batch meets the preset quality requirements, the measurement operation of other batches in the sampling group is skipped, and it is directly considered that the quality of other batches also meets the preset quality requirements. For details, please refer to Figure 4b For example, for the first batch, a first inspection group can be created with this batch as the inspection target, and measurements can be performed on this first batch. If the measurement results for this first batch meet the preset quality requirements, the second, third, and tenth batches, because these batches all belong to the first inspection group, are not measured and are directly assumed to meet the preset quality requirements. Then, for the eleventh batch, because it exceeds the total number of batches set by the user, 10, the first inspection group can be closed, and a second inspection group can be created with this batch as the inspection target, and measurements can be performed on this eleventh batch.

[0134] The inspection interval refers to the maximum allowed time to complete a station's processing flow. If the inspection interval is set to 10 seconds, if a batch of products takes longer than 10 seconds to complete a station's processing flow, a problem may exist. In this case, a new inspection group should be created, with that batch as the first batch in the new inspection group, and measurements should be performed on that batch. The number of inspections per batch refers to the number of products to be inspected from a selected batch. The number of consecutive batches that must be measured after failing to meet the preset quality requirements refers to the number of consecutive batches that must be successfully measured if the measurement result for a batch fails to meet the preset quality requirements. If the user sets this to 3, if the measurement result for the first batch in the inspection group fails to meet the preset quality requirements, five consecutive batches must meet the preset quality requirements. The abnormal status control flag indicates that after the machine has run for X hours, it needs maintenance for Y hours. After Y hours, a new inspection group should be created, with the first batch processed by the machine as the first batch, and measurements should be performed on that batch. The chamber control flag indicates that a sampling group should contain Z batches of batches passing through a certain chamber on the machine. In other words, this solution can not only set sampling rules for machines (stations), but also further set sampling rules for specific chambers on the machine.

[0135] It should be noted that, in actual applications, the user may set only part of the aforementioned rules, or may set all of the aforementioned rules, and this disclosure does not limit this.

[0136] After the user successfully sets the sampling inspection rules, the corresponding computing device can execute the quality inspection method provided by the present disclosure. The quality inspection method of the embodiment of the present disclosure is described in detail below with reference to the accompanying drawings.

[0137] Figure 5 This is a flow chart of a quality detection method according to an exemplary embodiment of the present disclosure. Figure 5 As shown, the exemplary embodiment method may include the following steps:

[0138] In step 501 , the site types of a first site and a second site associated with each other in the production process of a target batch of products are determined.

[0139] Taking the wafer production process as an example, a batch may include multiple wafers, for example, a batch may include 20 wafers.

[0140] For the target batch of wafers, after the target batch of wafers completes the processing flow of the target site, the next site of the target site can be determined first. This site can be called the second site to determine whether it is a measurement site for measuring product parameters. If it is determined that the second site is not a measurement site, but a process site for processing products, since the target batch of wafers must pass through each process site for process processing, there is no need to execute subsequent processes, and the second site can be directly triggered to perform corresponding process processing on the target batch of wafers. If it is determined that the second site is a measurement site, it can be determined based on this example method whether to trigger the second site to perform measurement operations on the target batch of wafers.

[0141] Specifically, when it is determined that the second site is a measurement site, it can be determined based on the site relationship configured in the second part above whether there is a site relationship with the second site as the end site. If it is determined that there is no such site, it means that the quality inspection method of this example cannot be performed on the site. At this time, it can be determined based on the batch name or attribute based on the batch in the relevant technical solution whether to measure the target batch of wafers. If it is determined that there is such a site, the starting site in the site relationship can be further determined, that is, the site type of the first site associated with the second site in the product production process.

[0142] It should be noted that the aforementioned first site and target site can be the same site or different sites. For example, to determine whether a CMP (Chemical Mechanical Polishing) operation performed at a process site meets preset quality requirements, it is necessary to measure the wafer thickness before and after CMP. Whether the CMP process meets the preset quality requirements is then determined based on the difference in the measurement results. In this case, a measurement site, referred to as the first measurement site, is required before the process site performing the CMP process, and a measurement site, referred to as the second measurement site, is also required after the process site performing the CMP process. In this case, when configuring the site relationship, it is necessary to configure the site relationship between the first measurement site and the second measurement site. In this case, the aforementioned target site corresponds to the process site in this example, and the aforementioned first site corresponds to the first measurement site in this example, meaning that the first and target sites are different sites. For another example, to determine whether a photolithography operation performed at a process site meets preset quality requirements, it is sufficient to simply measure the line width of the photoresist pattern on the wafer after the photolithography operation. In this case, a metrology site is simply set up after the process site performing the photolithography process. In this case, configuring the site relationship involves configuring the process site and metrology site relationships. In this case, the target site and the first site both correspond to the process site in this example, meaning the first site and the target site are the same site.

[0143] In step 502 , in response to determining that the first site is a process site and the second site is a measurement site, a sampling inspection group corresponding to the target batch of products is determined based on sampling inspection rules of the first site.

[0144] When the first site is determined to be a process site, it can be first determined whether there is a sampling inspection rule corresponding to the first site, that is, whether the user has configured a sampling inspection rule for the first site. Specifically, the sampling inspection rule can include at least one of a first sampling inspection rule, a second sampling inspection rule, a third sampling inspection rule, and a fourth sampling inspection rule.

[0145] The first sampling inspection rule specifically includes a sampling inspection rule based on a target number of batches that complete the first site processing flow, for example, 10 batches per sampling inspection group, with the first batch in the sampling inspection group as the sampling inspection target. This sampling inspection rule is determined based on the aforementioned Total Lot Count. The second sampling inspection rule specifically includes a sampling inspection rule based on batches that complete the first site processing flow within a single maintenance cycle of the first tool corresponding to the first site (i.e., after X hours of operation and Y hours of maintenance, the X+Y maintenance cycle), with the first batch in the sampling inspection group as the sampling inspection target. This sampling inspection rule is determined based on the aforementioned Abnormal State Flag. The third sampling inspection rule specifically includes a sampling inspection rule based on a target number of batches that complete the first site processing flow within a target chamber of the first tool corresponding to the first site, for example, 10 batches per sampling inspection group, with the first batch in the sampling inspection group as the sampling inspection target. This sampling inspection rule is determined based on the aforementioned Chamber Flag and Total Lot Count. The fourth sampling rule is specifically a sampling rule for establishing a sampling group based on batches that take a time greater than or equal to a preset time to complete the first site processing process. The sampling rule is determined based on the aforementioned configured Track Out Interval.

[0146] When it is determined that there are multiple sampling inspection rules corresponding to the first site, each sampling inspection rule may be traversed. Specifically, for each sampling inspection rule, at least one sampling inspection group corresponding to the sampling inspection rule may be first obtained. Then, the most recently created sampling inspection group among the at least one sampling inspection group may be determined as the sampling inspection group corresponding to the target batch of wafers.

[0147] It can be understood that when there are multiple sampling rules corresponding to the first site, there are also multiple sampling groups that are finally determined to correspond to the target batch of wafers.

[0148] In step 503, in response to the sampling inspection group not meeting the group closing condition and the sampling inspection group being in the sampling inspection compliance state, the measurement operation of the target batch of products is skipped to determine whether the quality of the target batch of products meets the preset quality requirements.

[0149] The group closing condition is used to determine whether the current sampling inspection group has completed the quality inspection. Specifically, when it is determined that the group closing condition is met, it is considered that the current sampling inspection group has completed the quality inspection.

[0150] In conjunction with the foregoing, when the sampling inspection rules include the first sampling inspection rule or the third sampling inspection rule, the group closing condition includes: the number of batches in the sampling inspection group reaches the target number, such as the aforementioned 10. When the sampling inspection rules include the second sampling inspection rule, the group closing condition includes: the first machine's current maintenance cycle ends, that is, the X+Y cycle ends. When the sampling inspection rules include the fourth sampling inspection rule, the group closing condition includes: the time consumed by the target batch of wafers to complete the processing flow of the first station is greater than or equal to the preset time.

[0151] For example, when it is determined that the sampling inspection rules corresponding to the first site include the aforementioned four sampling inspection rules, each sampling inspection rule may be traversed.

[0152] Specifically, for the first sampling inspection rule, the sampling inspection group corresponding to the target batch of wafers can be determined based on the first sampling inspection rule, and further determination can be made as to whether the number of batches in the sampling inspection group reaches 10. If not, it indicates that the group closing condition has not been met. At this point, it can be further determined whether the sampling inspection group is in a sampling inspection compliance state. When it is determined that the sampling inspection group is in a sampling inspection compliance state, it means that the sampling inspection objects in the sampling inspection group (such as the first batch) have been over-measured, and the measurement results are in compliance with the preset quality requirements. At this point, the measurement operation on the target batch of wafers can be skipped, and it can be determined that the quality of the target batch of wafers meets the preset quality requirements.

[0153] For the second sampling inspection rule, the sampling inspection group corresponding to the target batch of wafers can be determined based on the second sampling inspection rule, and further determination can be made as to whether the current maintenance cycle of the first machine has ended. If not, it indicates that the group shutdown condition has not been met. At this point, it can be further determined whether the sampling inspection group is in a sampling inspection compliance state. If it is determined that the sampling inspection group is in a sampling inspection compliance state, it means that the sampling inspection objects in the sampling inspection group have been over-measured, and the measurement results are in compliance with the preset quality requirements. At this point, the measurement operation of the target batch of wafers can also be skipped, and it can be determined that the quality of the target batch of wafers meets the preset quality requirements.

[0154] For the third sampling inspection rule, the sampling inspection group corresponding to the target batch of wafers can be determined based on the third sampling inspection rule, and further determination can be made as to whether the number of batches in the sampling inspection group reaches 10. If not, it indicates that the group closing condition has not been met. At this point, it can be further determined whether the sampling inspection group is in a sampling inspection compliance state. When it is determined that the sampling inspection group is in a sampling inspection compliance state, it means that the sampling inspection objects in the sampling inspection group have been over-measured, and the measurement results are in compliance with the preset quality requirements. At this point, the measurement operation on the target batch of wafers can also be skipped, and it can be determined that the quality of the target batch of wafers meets the preset quality requirements.

[0155] For the fourth sampling inspection rule, the sampling inspection group corresponding to the target batch of wafers can be determined based on the fourth sampling inspection rule, and further determination can be made as to whether the time consumed by the target batch of wafers to complete the first site processing flow is greater than or equal to the preset time. If it is not greater than or equal to the preset time, it indicates that the group closing condition has not been met. At this time, it can be further determined whether the sampling inspection group is in a sampling inspection compliance state. When it is determined that the sampling inspection group is in a sampling inspection compliance state, it means that the sampling inspection objects in the sampling inspection group have been over-measured, and the measurement results are in compliance with the preset quality requirements. At this time, the measurement operation on the target batch of wafers can also be skipped to determine that the quality of the target batch of wafers meets the preset quality requirements.

[0156] It should be noted that when traversing the sampling inspection rules corresponding to the first station, when it is determined that the sampling inspection groups corresponding to the target batch of wafers determined based on each sampling inspection rule have not met the group closing conditions and are all in the sampling inspection standard state, the measurement operation of the target batch of wafers can be skipped to determine that the quality of the target batch of wafers meets the preset quality requirements. When it is determined that the sampling inspection group corresponding to a certain sampling inspection rule has met the group closing conditions, or that the sampling inspection group corresponding to a certain sampling inspection rule is not in the sampling inspection standard state, the second station is triggered to measure the target batch of wafers. The relevant technical solutions are introduced in the subsequent embodiments and will not be repeated here.

[0157] In the quality inspection method provided by the embodiment of the present disclosure, a significant improvement in quality inspection efficiency is achieved through the inspection group management mechanism. Specifically, this method only requires measuring the inspection objects in each inspection group, such as the first batch in the inspection group. When the batch is measured to be qualified, other batches in the same group can be automatically exempted from inspection, thereby greatly reducing the inspection workload and effectively reducing the consumption of inspection resources. At the same time, the mechanism of dynamically constructing inspection groups based on the production process can also ensure the representativeness and scientific nature of the inspection samples, reducing the possibility of missing quality problems.

[0158] In one embodiment, if Figure 6 As shown, the quality detection method may further include the following steps:

[0159] In step 601, in response to the fact that the sampling inspection group corresponding to the target batch of products does not exist, or the sampling inspection group has reached a group closing condition, a sampling inspection group with the target batch of products as the sampling inspection object is created.

[0160] When it is determined that among the multiple sampling rules corresponding to the first site, the sampling group corresponding to a certain sampling rule does not exist, or the sampling group has reached the corresponding group closing condition, a new sampling group can be created, and the target batch of products, that is, the aforementioned target batch of wafers, can be used as the first batch in the newly created sampling group. At the same time, the target batch of wafers can be used as the sampling objects in the newly created sampling group.

[0161] For example, when it is determined that among the four sampling inspection rules corresponding to the first site, the sampling inspection group corresponding to the second sampling inspection rule does not exist, a sampling inspection group corresponding to the second sampling inspection rule with the target batch of wafers as the sampling inspection object can be created. For another example, when it is determined that among the four sampling inspection rules corresponding to the first site, the sampling inspection group corresponding to the fourth sampling inspection rule has reached the group closing condition, that is, the time consumed by the target batch of wafers to complete the processing flow of the first site is greater than or equal to the preset time length, a sampling inspection group corresponding to the fourth sampling inspection rule with the target batch of wafers as the sampling inspection object can be created.

[0162] In step 602, the second site is triggered to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement result.

[0163] After creating a sampling inspection group with the target batch of wafers as the sampling inspection objects, the second site can be triggered to perform measurement operations on the target batch of wafers to determine the quality inspection results for the target batch of products based on the measurement results.

[0164] In the quality inspection method provided by the disclosed embodiments, when it is determined that a sampling inspection group corresponding to a target batch of products does not exist or that the sampling inspection group has reached a group closure condition, a new sampling inspection group can be automatically created and measurement triggered, thus achieving intelligent quality inspection management. Furthermore, this method can promptly capture process changes and avoid the risk of missed inspections.

[0165] In one embodiment, the quality inspection method may further include: in response to determining that the sampling inspection group does not meet the group closing condition and at least one of the following is satisfied, triggering the second station to perform a measurement operation on the target batch of products:

[0166] 1. The inspection team is in a penalty state.

[0167] In actual applications, when a sampling inspection group is first created, it is in the selected state. When the first batch in the sampling inspection group is measured and the quality of the batch is determined to meet the preset quality requirements based on the measurement results, the status of the sampling inspection group can be updated to the sampling inspection compliance state. In this state, other batches in the sampling inspection group can be automatically exempted from inspection. If the quality of the batch is determined to not meet the preset quality requirements based on the measurement results, the status of the sampling inspection group can be updated to the penalty state. The penalty state is used to indicate that the quality of the sampled objects in the sampling inspection group does not meet the preset quality requirements. In this state, it is considered that there is a high probability of quality problems. In order to improve the detection accuracy, the other batches in the sampling inspection group can be measured, that is, the sampling inspection group can be fully inspected.

[0168] Specifically in this example, when it is determined that the sampling inspection group corresponding to the target batch of wafers is in a penalty state, the second site can be triggered to perform a measurement operation on the target batch of wafers.

[0169] 2. After the sampling inspection group is in the penalty state, among the batches that have completed the processing flow of the first site, the statistical results of the batches that meet the preset quality requirements do not meet the preset requirements.

[0170] Optionally, the preset requirement may be that the number of batches that continuously meet the preset quality requirement reaches a preset number.

[0171] As mentioned above, users can set the After Fail Scan Lot Count field. That is, users can set the preset number of batches that need to be continuously measured and whose measurement results show that the quality meets the preset quality requirements when the measurement results of the inspection objects in the inspection group, such as the first batch in the inspection group, show that the quality of the batch does not meet the preset quality requirements. When the preset number is reached, it is considered that the probability of the current quality problem is small, and the status of the inspection group can be updated from the penalty status to the inspection compliance status.

[0172] For example, when the user sets the After Fail Scan Lot Count to 5, it means that when it is determined that the measurement result of the first batch in the sampling inspection group is that the quality of the batch does not meet the preset quality requirements, the number of batches that need to be measured continuously and whose measurement results show that the quality meets the preset quality requirements is 5. When it reaches 5, the status of the sampling inspection group can be updated to the sampling inspection compliance status.

[0173] Specifically in this example, when it is determined that the sampling group corresponding to the target batch of wafers is in a penalty state, and after the sampling group is in the penalty state, when the number of batches that continuously meet the preset quality requirements in the batches that complete the processing flow of the first site is less than the aforementioned preset number, the second site can be triggered to perform measurement operations on the target batch of wafers.

[0174] Optionally, the preset requirement may also be: the proportion of batches that meet the preset quality requirement to the total batches that complete the processing flow of the first site after being in the penalty state reaches a preset proportion.

[0175] Similar to the above, users can use relevant fields to set a setting where, when the measurement results of a sampling inspection object in a sampling inspection group, such as the first batch in the sampling inspection group, indicate that the batch's quality does not meet the preset quality requirements, continuous measurement is required, and the proportion of batches that meet the preset quality requirements after entering the penalty state and completing the first site's processing flow reaches a preset ratio (for example, this preset ratio can be 95%). When this preset ratio is reached, the probability of a current quality problem is considered low, and the sampling inspection group's status can be updated from the penalty state to the inspection compliance state.

[0176] Specifically in this example, when it is determined that the sampling group corresponding to the target batch of wafers is in a penalty state, and after the sampling group is in the penalty state, among the batches that complete the processing flow of the first site, the proportion of batches that meet the preset quality requirements does not reach the aforementioned preset proportion after being in the penalty state, the second site can be triggered to perform measurement operations on the target batch of wafers.

[0177] It should be noted that the above-mentioned preset requirements that the number of batches that continuously meet the preset quality requirements reaches a preset number, and the proportion of batches that meet the preset quality requirements to the total batches that complete the processing flow of the first site after being in the penalty state reaches a preset proportion are merely exemplary, and are intended to enable those skilled in the art to better understand the technical solutions of the embodiments of the present disclosure. In actual applications, the above-mentioned preset requirements can be set by relevant staff based on actual conditions, and the present disclosure does not limit this.

[0178] In the quality inspection method provided by the embodiment of the present disclosure, a full inspection mechanism for the penalty status of the sampling inspection group and a continuous qualified batch verification mechanism are introduced. Specifically, when the sampling objects in the sampling inspection group, such as the first batch, do not meet the preset quality requirements, that is, when the sampling inspection group is in the penalty status, the full inspection mode is automatically triggered to prevent the spread of abnormalities. And when the number of batches whose quality meets the preset quality requirements reaches a preset number, or the proportion of batches that meet the preset quality requirements in the total batches that have completed the processing flow of the first site after being in the penalty status reaches a preset proportion, the exemption status is restored. This intelligent state transition mechanism can immediately strengthen the intensity of sampling inspections when quality problems are found, and ensure the stability of the process through continuous and strict inspections of multiple batches, avoiding excessive inspection or missed inspections due to single abnormalities.

[0179] Further, such as Figure 7As shown, the quality detection method may further include the following steps:

[0180] In step 701, after determining that the quality of the target batch of products meets the preset quality requirements based on the measurement results, the statistical results of the batches that meet the preset quality requirements are updated.

[0181] Continuing with the aforementioned embodiment, if it is determined that the inspection group corresponding to the target batch of wafers has not met the group closure conditions and is in a penalty state, and if the number of batches that have completed the processing flow of the first station and have continuously met the preset quality requirements is less than the aforementioned preset number, the second station can be triggered to perform measurement operations on the target batch of products. Then, after it is determined based on the measurement results that the quality of the target batch of products meets the preset quality requirements, the aforementioned number of batches that have continuously met the preset quality requirements can be increased by 1.

[0182] For example, if the inspection group is determined to be in a penalty state and the number of batches that have continuously met the preset quality requirements is 4, which is less than the preset number of 5, the second station can be triggered to perform a measurement operation on the target batch of products. Then, after the quality of the target batch of products is determined to meet the preset quality requirements based on the measurement results, the statistical results can be updated. Specifically, the number of batches that have continuously met the preset quality requirements can be increased by 1, that is, 4 + 1 to obtain 5.

[0183] Continuing with the aforementioned embodiment, when it is determined that the sampling inspection group corresponding to the target batch of wafers has not met the group closure condition and the sampling inspection group is in a penalty state, if the proportion of batches that meet the preset quality requirements among the batches that have completed the processing flow of the first station after entering the penalty state does not reach a preset proportion, the second station can be triggered to perform a measurement operation on the target batch of wafers. Then, after determining that the quality of the target batch meets the preset quality requirements based on the measurement results, the statistical results can be updated.

[0184] For example, if, after determining that the sampling inspection group is in a penalty state, the proportion of batches meeting the preset quality requirements in the total batches that have completed the processing flow of the first station after entering the penalty state is 90%, which is less than the preset proportion of 95%, the second station can be triggered to perform measurement operations on the target batch of products. Then, after determining that the quality of the target batch of products meets the preset quality requirements based on the measurement results, the statistical results can be updated, for example, to 96%.

[0185] In step 702, when it is determined that the updated statistical results meet the preset requirements, the status of the sampling inspection group is updated to a sampling inspection compliance status.

[0186] Continuing with the aforementioned embodiment, after determining that the quality of the target batch of products meets the preset quality requirements based on the measurement results, the number of batches that continuously meet the preset quality requirements can be increased by 1, that is, 5, reaching the aforementioned preset number. At this time, the status of the sampling group can be updated from the penalty status to the sampling compliance status.

[0187] Alternatively, after determining based on the measurement results that the quality of the target batch of products meets the preset quality requirements, the proportion of batches that meet the preset quality requirements in the total batches that are in the penalty state and complete the processing flow of the first site can be calculated. For example, it can be 96%, reaching the aforementioned preset proportion. At this time, the status of the sampling group can be updated from the penalty state to the sampling standard-compliant state.

[0188] The quality inspection method provided by the disclosed embodiments automatically updates the status of the sampling inspection group by dynamically tracking the number of consecutive qualified batches, thus achieving intelligent closed-loop management of quality inspection. Furthermore, by setting a reasonable number / ratio of qualified batches as a condition for restoring the inspection-free status, i.e., the sampling inspection compliance status, this method can prevent the safety hazards caused by premature relaxation of inspection standards and avoid the waste of resources caused by long-term full inspections.

[0189] In one embodiment, when it is determined that the sampling inspection group meets the group closing condition, the status of the sampling inspection group may be updated to a completed status.

[0190] like Figure 8 , shows a schematic diagram of the state changes of the sampling inspection group. When the sampling inspection group is just created, it is in the selected state. When the first batch in the sampling inspection group is measured, and it is determined based on the measurement results that the quality of the batch meets the preset quality requirements, the state of the sampling inspection group is updated from the selected state to the sampling inspection standard state. When it is determined based on the measurement results that the quality of the batch does not meet the preset quality requirements, the state of the sampling inspection group is updated from the selected state to the penalty state. Then, after it is determined that the sampling inspection group is in the penalty state, when the number of batches that continuously meet the preset quality requirements is greater than or equal to the preset number, the state of the sampling inspection group is updated from the penalty state to the sampling inspection standard state. Finally, when the sampling inspection group meets the group closing conditions, the state of the sampling inspection group is updated from the sampling inspection standard state to the completion state. Among them, the group closing conditions corresponding to different sampling inspection group rules are different. For details, please refer to the description of the aforementioned embodiment, which will not be repeated here.

[0191] The quality inspection method provided by the embodiment of the present disclosure implements standardized management of the entire life cycle of the sampling inspection group. This method clearly defines the state transition rules of the sampling inspection group from the selected state, penalty state, sampling inspection compliance state, and completion state, and strictly triggers state changes based on measurement results and preset conditions, forming a standardized sampling inspection group management process. This standardized state management solution ensures that every link of the sampling inspection group, from creation, use to closure, has a basis to rely on, which not only improves the traceability of the sampling inspection work, but also reduces the errors that may be caused by human intervention through automated state transitions.

[0192] In one embodiment, if Figure 9 As shown, the aforementioned sampling rules can be obtained based on the following methods:

[0193] In step 901, rule configuration parameters input by a user are received.

[0194] In actual application, the user can input the rule configuration parameters on the visual interface of the user operation platform. The rule configuration parameters may include a site identifier, that is, the aforementioned site name and associated configuration items, and the associated configuration items may include at least one of the following: sampling group capacity threshold, maintenance cycle parameter, chamber identifier, maximum processing time threshold and penalty monitoring batch number, etc. Among them, the sampling group capacity threshold is used to limit the maximum number of batches that a single sampling group can accommodate, corresponding to the aforementioned Total Lot Count field. The maintenance cycle parameter corresponds to the aforementioned Abnormal State Flag field. The chamber identifier corresponds to the aforementioned Chamber Flag. The maximum processing time threshold is used to limit the maximum time allowed to complete the processing flow, corresponding to the aforementioned Track Out Interval. The penalty monitoring batch number is used to limit the number of batches that need to be continuously measured after the sampling group is in the penalty state, and the measurement results meet the preset quality requirements, corresponding to the aforementioned After Fail Scan Lot Count.

[0195] In step 902, a sampling inspection rule bound to the site identifier is generated according to the associated configuration item.

[0196] In the quality inspection method provided by the embodiment of the present disclosure, a complete sampling inspection strategy formulation system is constructed by providing a visual rule configuration interface and an intelligent parameter conversion mechanism. The user only needs to input intuitive process parameters on the operating platform, and the system can automatically convert these configuration parameters into executable sampling inspection rules, realizing the intelligent conversion from business needs to inspection strategies. This parameter-driven rule generation method can simplify the policy formulation process, avoid the tedious manual rule coding in the traditional method, and improve the accuracy of sampling inspections. At the same time, in this method, the configuration of the rules is based on site names that are generally not modified. Compared with the related technical solutions based on the names of batches that are more easily changed, it can avoid production safety problems caused by information tampering.

[0197] In one embodiment, if Figure 10 As shown, the quality detection method may further include the following steps:

[0198] In step 1001, it is determined that both the first site and the second site are measurement sites, and the first site has performed a measurement operation on the target batch of products.

[0199] When it is determined that both the first site and the second site are metrology sites, it can be determined that the current situation belongs to the aforementioned CMP example. That is, when the first site has already performed metrology operations on the target batch of wafers, the second site must also perform metrology operations on the target batch of wafers to determine the quality inspection results for the target batch of wafers based on the metrology results of the first and second sites. When it is determined that the first site has not performed metrology operations on the target batch of wafers, the second site does not need to perform metrology operations on the target batch of wafers.

[0200] Based on this, in this example, after determining that the first site and the second site are both measurement sites, it is possible to query whether the result table measured by the first site contains the name of the target batch of wafers. If it does, it means that the first site has performed over-measurement operations on the target batch of wafers.

[0201] In step 1002, the second site is triggered to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement results of the first site and the second site.

[0202] After determining that the first station has performed a metrology operation on the target batch of wafers, the second station can be triggered to perform a metrology operation on the target batch of products, thereby determining the quality inspection results for the target batch of wafers based on the metrology results of the first and second stations. The specific process can be found in the aforementioned CMP embodiment and will not be repeated here.

[0203] It should be noted that in this example, whether the second site performs measurement operations on the target batch of wafers is determined based on whether the first site has performed measurement operations on the target batch of wafers. Whether the first site performs measurement operations on the target batch of wafers can be determined based on a third site associated with the first site in the production process, such as the previous site of the first site, for example, the sampling rules of a process site.

[0204] The quality inspection method provided by the disclosed embodiments utilizes a linkage mechanism between measurement sites to enable collaborative analysis of multi-site inspection data. Specifically, upon determining that the first measurement site has performed a measurement operation on the target batch of products, the second measurement site can be automatically triggered to perform the corresponding measurement operation, thereby ensuring the complete execution of the necessary measurement steps and improving the accuracy of quality inspection.

[0205] Figure 11 This is a flow chart of another quality detection method according to an exemplary embodiment of the present disclosure. In this embodiment, the same steps as those in the previous embodiment will be briefly described and will not be described in detail. For details, please refer to any of the previous embodiments. Figure 11 As shown, the exemplary embodiment method may include the following steps:

[0206] In step 1101 , when the target batch of products completes the processing flow of the target site, it is determined whether the second site is a measurement site.

[0207] The second site is the next site of the target site, and the site is the smallest functional unit in the product production process.

[0208] If so, execute step 1102.

[0209] If not, execute step 1103.

[0210] In step 1102, it is determined whether there is a site relationship corresponding to the second site.

[0211] In this example, based on the site relationship configured in the second part, it can be determined whether there is a site relationship with the second site as the end site.

[0212] If so, execute step 1104.

[0213] If not present, execute step 1103.

[0214] In step 1103 , it is determined whether to measure the target batch of products according to the batch name or attribute of the target batch of products.

[0215] For example, when it is determined that the batch name of the target batch of products is a preset batch name, the second site may be triggered to perform a measurement operation on the target batch of products. Alternatively, when it is determined that the attribute of the target batch of products is a preset attribute, the second site may be triggered to perform a measurement operation on the target batch of products. For another example, when it is determined that the batch name of the target batch of products is not a preset batch name, the second site may be triggered to perform a measurement operation on the target batch of products. Alternatively, when it is determined that the attribute of the target batch of products is not a preset attribute, the second site may be triggered to perform a measurement operation on the target batch of products. This disclosure does not limit this.

[0216] In step 1104 , it is determined whether a first site associated with the second site in the product production process is a measurement site.

[0217] In combination with the foregoing, the starting site in the site relationship with the aforementioned second site as the ending site may be used as the first site associated with the second site in the product production process.

[0218] It is understandable that the aforementioned first site and the target site may be the same site or different sites. Detailed descriptions can be made with reference to the aforementioned embodiment, which will not be repeated here.

[0219] If so, execute step 1105.

[0220] If not, execute step 1106.

[0221] In step 1105 , it is determined whether the first site has performed a measurement operation on the target batch of products.

[0222] In this example, it is possible to query whether the measured result table of the first site contains the name of the target batch of products. If it contains the name of the target batch of products, it means that the first site has performed an over-measurement operation on the target batch of products.

[0223] If so, execute step 1107.

[0224] If not, execute step 1108.

[0225] In step 1106, it is determined whether there is a sampling inspection rule corresponding to the first site.

[0226] If so, execute step 1109.

[0227] If not, execute step 1110.

[0228] In step 1107, the second site is triggered to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement results of the first site and the second site.

[0229] For details, please refer to the aforementioned embodiment of the CMP example, which will not be repeated here.

[0230] In step 1108 , the measurement operation of the target batch of products is skipped, and it is determined that the quality of the target batch of products meets the preset quality requirements.

[0231] In step 1109 , it is determined whether there is a sampling inspection group corresponding to the target batch of products based on the sampling inspection rules of the first site.

[0232] In this example, when it is determined that there are multiple sampling inspection rules corresponding to the first site, each sampling inspection rule can be traversed. Specifically, for each sampling inspection rule, it can be determined based on the sampling inspection rule whether there is a sampling inspection group corresponding to the target batch of products.

[0233] If so, execute step 1111.

[0234] If not, execute step 1112.

[0235] In step 1110, end.

[0236] When it is determined that there is no sampling inspection rule corresponding to the first site, it means that the user does not want to perform sampling inspection on the batches passing through the site at this time, and the process ends at this time.

[0237] In step 1111, it is determined whether the sampling group meets the group closing condition.

[0238] When it is determined that there are multiple sampling inspection rules corresponding to the first site, there are also multiple sampling inspection groups corresponding to the target batch of products. In this case, each sampling inspection group can be traversed. Specifically, for each sampling inspection group, it can be determined whether the sampling inspection group meets the group closing condition.

[0239] Specifically, when the sampling inspection rules corresponding to the first site include the aforementioned first or third sampling inspection rules, the group closing condition may include: the number of batches in the sampling inspection group reaches a target number. When the sampling inspection rules corresponding to the first site include the second sampling inspection rule, the group closing condition may include: the current maintenance cycle of the first machine corresponding to the first site has expired. When the sampling inspection rules corresponding to the first site include the fourth sampling inspection rule, the group closing condition may include: the time taken for the target batch of products to complete the processing flow at the first site is greater than or equal to a preset time.

[0240] The introduction of each sampling inspection rule can be found in the above embodiment and will not be repeated here.

[0241] If so, execute step 1112.

[0242] If not, execute step 1113.

[0243] In step 1112, a sampling inspection group is created with the target batch of products as the sampling inspection objects.

[0244] In step 1113, it is determined whether the sampling inspection group meets at least one of the following conditions: the sampling inspection group is in a penalty state; after the sampling inspection group is in the penalty state, the number of batches that continuously meet the preset quality requirements among the batches that complete the processing flow of the first site is less than the preset number.

[0245] The penalty status is used to indicate that the quality of the sampled objects in the sampled inspection group does not meet the preset quality requirements.

[0246] If so, execute step 1114.

[0247] If not, execute step 1108.

[0248] In step 1114 , the second site is triggered to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement result.

[0249] In step 1115 , after determining that the quality of the target batch of products meets the preset quality requirement based on the measurement results, the number of batches that continuously meet the preset quality requirement is increased by 1.

[0250] In step 1116, when it is determined that the number of batches that continuously meet the preset quality requirements reaches the preset number, the status of the sampling inspection group is updated to the sampling inspection compliance status.

[0251] In step 1117, when it is determined that the sampling inspection group meets the group closing condition, the status of the sampling inspection group is updated to the completed status.

[0252] In step 1118, the second site is triggered to perform a measurement operation on the target batch of products to determine a quality inspection result for the target batch of products based on the measurement result.

[0253] In the quality inspection method provided by the embodiment of the present disclosure, a significant improvement in quality inspection efficiency is achieved through the inspection group management mechanism. Specifically, this method only requires measuring the inspection objects in each inspection group, such as the first batch in the inspection group. When the batch is measured to be qualified, other batches in the same group can be automatically exempted from inspection, thereby greatly reducing the inspection workload and effectively reducing the consumption of inspection resources. At the same time, the mechanism of dynamically constructing inspection groups based on the production process can also ensure the representativeness and scientific nature of the inspection samples, reducing the possibility of missing quality problems.

[0254] For the sake of simplicity, the aforementioned method embodiments are all expressed as a series of action combinations. However, those skilled in the art should know that the present disclosure is not limited to the order of the actions described, because according to the present disclosure, certain steps can be performed in other orders or simultaneously.

[0255] Corresponding to the aforementioned method embodiments, the present disclosure also provides apparatus embodiments.

[0256] Figure 12 is a structural diagram of a quality detection device according to an exemplary embodiment of the present disclosure. Figure 12 The quality detection device may include:

[0257] The site type determination module 121 is used to determine the site types of the first site and the second site associated in the production process of the target batch of products; the site is the smallest functional unit in the product production process.

[0258] The sampling group determination module 122 is used to determine the sampling group corresponding to the target batch of products based on the sampling rules of the first site in response to determining that the first site is a process site and the second site is a measurement site; the process site is a site for performing process processing on the product, and the measurement site is a site for measuring product parameters. One sampling group accommodates at least two batches of products.

[0259] The quality inspection module 123 is used to skip the measurement operation of the target batch of products in response to the sampling group not meeting the group closing conditions and the sampling group being in the sampling standard compliance state, and determine that the quality of the target batch of products meets the preset quality requirements; the sampling standard compliance state is used to indicate that the quality of the sampling objects in the sampling group meets the preset quality requirements.

[0260] Optional, in Figure 12 On the basis of the modules shown, the quality detection device may further include:

[0261] The sampling inspection group creation module is used to create a sampling inspection group with the target batch of products as the sampling inspection object in response to the sampling inspection group corresponding to the target batch of products not existing or the sampling inspection group has reached the group closing condition.

[0262] The quality inspection module is further configured to trigger the second site to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement result.

[0263] Optionally, the sampling inspection group determination module, when used to determine the sampling inspection group corresponding to the target batch of products based on the sampling inspection rules of the first site, includes:

[0264] At least one sampling group is obtained based on the sampling rule of the first site.

[0265] The most recently created sampling inspection group among the at least one sampling inspection group is determined as the sampling inspection group corresponding to the target batch of products.

[0266] Optionally, the quality detection module is further used to:

[0267] In response to determining that the sampling group does not meet the group closing condition and at least one of the following is satisfied, triggering the second site to perform a measurement operation on the target batch of products:

[0268] The sampling inspection group is in a penalty state; the penalty state is used to indicate that the quality of the sampling inspection objects in the sampling inspection group does not meet the preset quality requirements.

[0269] After the sampling inspection group is in the penalty state, the statistical results of the batches that have completed the processing flow of the first site and meet the preset quality requirements do not meet the preset requirements.

[0270] Optional, in Figure 12 On the basis of the modules shown, the quality detection device may further include:

[0271] The metering module is used to update the statistical results of the batches that meet the preset quality requirements after determining that the quality of the target batch of products meets the preset quality requirements based on the measurement results.

[0272] The status update module is used to update the status of the sampling inspection group to a sampling inspection compliance status when it is determined that the updated statistical results meet the preset requirements.

[0273] Optionally, the status update module is further configured to:

[0274] When it is determined that the sampling inspection group meets the group closing condition, the status of the sampling inspection group is updated to a completed status.

[0275] Optionally, the first machine associated with the first site is used to perform a process function corresponding to the first site, and the first machine includes at least two chambers that can independently perform the process function;

[0276] The random inspection rule includes: at least one of a first random inspection rule, a second random inspection rule, a third random inspection rule and a fourth random inspection rule.

[0277] The first sampling inspection rule is to use the target number of batches that complete the first site processing flow as a sampling inspection group, and to use the first batch in the sampling inspection group as the sampling inspection object.

[0278] The second sampling inspection rule is to define the batches that complete the first site processing flow within a single maintenance cycle of the first machine as a sampling inspection group, and to use the first batch in the sampling inspection group as the sampling inspection object.

[0279] The third sampling inspection rule defines a sampling inspection group as a target number of batches that have completed the first station processing flow in the target chamber of the first machine, and the first batch in the sampling inspection group is used as the sampling inspection object.

[0280] The fourth sampling inspection rule establishes a sampling inspection group based on the batches whose time consumed to complete the first site processing flow is greater than or equal to the preset time as the sampling inspection objects.

[0281] Optionally, when the sampling inspection rule includes the first sampling inspection rule or the third sampling inspection rule, the group closing condition includes: the number of batches in the sampling inspection group reaches the target number.

[0282] When the random inspection rule includes the second random inspection rule, the group closing condition includes: the current maintenance cycle of the first machine ends.

[0283] When the sampling inspection rule includes the fourth sampling inspection rule, the group closing condition includes: the time consumed by the target batch of products to complete the processing flow of the first site is greater than or equal to the preset time.

[0284] Optionally, the sampling inspection rules are obtained based on the following method:

[0285] Receive rule configuration parameters input by a user, where the rule configuration parameters include a site identifier and associated configuration items.

[0286] A sampling inspection rule bound to the site identifier is generated according to the associated configuration item.

[0287] The associated configuration items include at least one of the following:

[0288] The sampling group capacity threshold is used to limit the maximum number of batches that a single sampling group can accommodate.

[0289] Maintenance cycle parameters.

[0290] Chamber identification.

[0291] The maximum processing time threshold is used to limit the maximum time allowed to complete the processing process.

[0292] The number of penalty monitoring batches is used to limit the number of batches that need to be continuously measured after the sampling inspection group is in the penalty state.

[0293] Optionally, the quality detection module is further used to:

[0294] It is determined that both the first site and the second site are measurement sites, and the first site has performed a measurement operation on the target batch of products.

[0295] The second site is triggered to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement results of the first site and the second site.

[0296] As for the device embodiment, since it basically corresponds to the method embodiment, the relevant parts can be referred to the partial description of the method embodiment.

[0297] An embodiment of the present disclosure further provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the quality detection method described in any embodiment of the present disclosure.

[0298] The computer-readable storage medium may be a ROM, a random access memory (RAM), a CD-ROM, a magnetic tape, a floppy disk, an optical data storage device, and the like.

[0299] The present disclosure also provides an electronic device, such as Figure 13 As shown, the electronic device includes a memory 131 and a processor 132, wherein the memory 131 is used to store computer instructions that can be executed on the processor, and the processor 132 is used to implement the quality detection method described in any embodiment of the present disclosure when executing the computer instructions.

[0300] It should be understood that the present disclosure is not limited to the exact structures that have been described above and shown in the drawings, and that various modifications and changes can be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A quality inspection method, characterized in that: The method comprises: Determining the site types of a first site and a second site associated with a target batch of products in a production process; the site is the smallest functional unit in the product production process; In response to determining that the first site is a process site and the second site is a measurement site, determining a sampling inspection group corresponding to the target batch of products based on the sampling inspection rules of the first site; the process site is a site for performing process processing on products, and the measurement site is a site for measuring product parameters, and one sampling inspection group accommodates at least two batches of products; In response to the sampling group not meeting the group closing conditions and the sampling group being in the sampling compliance state, the measurement operation on the target batch of products is skipped, and it is determined that the quality of the target batch of products meets the preset quality requirements; the sampling compliance state is used to characterize that the quality of the sampling objects in the sampling group meets the preset quality requirements.

2. The method according to claim 1, characterized in that The method further comprises: In response to the fact that the sampling inspection group corresponding to the target batch of products does not exist, or the sampling inspection group has reached a group closing condition, creating a sampling inspection group with the target batch of products as the sampling inspection object; The second site is triggered to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement result.

3. The method according to claim 1, characterized in that The determining the sampling inspection group corresponding to the target batch of products based on the sampling inspection rules of the first site includes: Based on the sampling inspection rules of the first site, obtaining at least one sampling inspection group; The most recently created sampling inspection group among the at least one sampling inspection group is determined as the sampling inspection group corresponding to the target batch of products.

4. The method according to claim 1, wherein The method further comprises: In response to determining that the sampling group does not meet the group closing condition and at least one of the following is satisfied, triggering the second site to perform a measurement operation on the target batch of products: The sampling inspection group is in a penalty state; the penalty state is used to indicate that the quality of the sampled objects in the sampling inspection group does not meet the preset quality requirements; After the sampling inspection group is in the penalty state, the statistical results of the batches that have completed the processing flow of the first site and meet the preset quality requirements do not meet the preset requirements.

5. The method according to claim 4, characterized in that The method further comprises: After determining that the quality of the target batch of products meets the preset quality requirements based on the measurement results, updating the statistical results of the batches that meet the preset quality requirements; When it is determined that the updated statistical results meet the preset requirements, the status of the sampling inspection group is updated to a sampling inspection compliance status.

6. The method according to claim 1 or 5, characterized in that The method further comprises: When it is determined that the sampling inspection group meets the group closing condition, the status of the sampling inspection group is updated to a completed status.

7. The method according to claim 1, characterized in that The first machine associated with the first station is used to perform the process function corresponding to the first station, and the first machine includes at least two chambers that can independently perform the process function; The sampling inspection rule includes: at least one of a first sampling inspection rule, a second sampling inspection rule, a third sampling inspection rule, and a fourth sampling inspection rule; The first sampling inspection rule is to use the target number of batches that complete the first site processing flow as a sampling inspection group, and to use the first batch in the sampling inspection group as the sampling inspection object; The second sampling inspection rule defines the batches that complete the first site processing flow within a single maintenance cycle of the first machine as a sampling inspection group, and the first batch in the sampling inspection group is the sampling inspection object; The third sampling inspection rule defines a sampling inspection group as a target number of batches that have completed the first station processing flow in the target chamber of the first machine, and the first batch in the sampling inspection group is the sampling inspection object; The fourth sampling inspection rule establishes a sampling inspection group based on the batches whose time consumed to complete the first site processing flow is greater than or equal to the preset time as the sampling inspection objects.

8. The method according to claim 7, characterized in that When the sampling inspection rule includes the first sampling inspection rule or the third sampling inspection rule, the group closing condition includes: the number of batches in the sampling inspection group reaches the target number; When the spot check rule includes the second spot check rule, the group closing condition includes: the current maintenance cycle of the first machine ends; When the sampling inspection rule includes the fourth sampling inspection rule, the group closing condition includes: the time consumed by the target batch of products to complete the processing flow of the first site is greater than or equal to the preset time.

9. The method according to claim 1, characterized in that The sampling inspection rules are obtained based on the following method: receiving rule configuration parameters input by a user, wherein the rule configuration parameters include a site identifier and associated configuration items; generating a sampling inspection rule bound to the site identifier according to the associated configuration item; The associated configuration items include at least one of the following: The sampling inspection group capacity threshold is used to limit the maximum number of batches that a single sampling inspection group can accommodate; Maintenance cycle parameters; Chamber identification; The maximum processing time threshold is used to limit the maximum time allowed to complete the processing process; The number of penalty monitoring batches is used to limit the number of batches that need to be continuously measured after the sampling inspection group is in the penalty state.

10. The method according to claim 1, characterized in that The method further comprises: Determining that both the first site and the second site are measurement sites, and that the first site has performed a measurement operation on the target batch of products; The second site is triggered to perform a measurement operation on the target batch of products, so as to determine a quality inspection result for the target batch of products based on the measurement results of the first site and the second site.

11. A quality inspection device, characterized in that: The device comprises: A site type determination module, configured to determine the site types of a first site and a second site associated with a target batch of products in a production process; the site being the smallest functional unit in the product production process; a sampling inspection group determination module, configured to, in response to determining that the first site is a process site and the second site is a measurement site, determine a sampling inspection group corresponding to the target batch of products based on the sampling inspection rules of the first site; the process site is a site for performing process processing on products, and the measurement site is a site for measuring product parameters, and one sampling inspection group accommodates at least two batches of products; The quality inspection module is used to skip the measurement operation of the target batch of products in response to the sampling group not meeting the group closing conditions and the sampling group being in the sampling standard compliance state, and determine that the quality of the target batch of products meets the preset quality requirements; the sampling standard compliance state is used to indicate that the quality of the sampling objects in the sampling group meets the preset quality requirements.

12. A computer-readable storage medium having a computer program stored thereon, wherein when the program is executed by a processor, the steps of the method according to any one of claims 1 to 10 are implemented.

13. An electronic device comprising: processor; a memory for storing processor-executable instructions; The processor is configured to execute the steps of any one of the methods of claims 1-10.

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