Wafer transfer apparatus

Abstract

The application discloses a wafer conveying device, which comprises a shell, the shell comprises a cleaning chamber which is connected with a wafer loading device, a filter is arranged on the top of the cleaning chamber, a cover is pressed on the filter, and the wafer conveying device further comprises a lifting device which is used for lifting the cover. The lifting device comprises a pressure-bearing piece, a connecting rod mechanism, a guide mechanism and a driving mechanism, the pressure-bearing piece is fixed with the cover, the driving mechanism drives the pressure-bearing piece to move up and down through the connecting rod mechanism, and the guide mechanism guides the movement of the pressure-bearing piece so that the pressure-bearing piece can only move up and down. The wafer conveying device can quickly lift the cover through the lifting device, the filter paper of all filters can be conveniently replaced, meanwhile, the cover can be pressed tightly, and the cleanliness of the cleaning chamber in the wafer conveying device is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer processing equipment, in particular to a wafer transfer equipment. BACKGROUND

[0002] The wafer transfer equipment includes a wafer front end module (EFEM) and a wafer sorter, both of which are provided with a mechanical hand for carrying wafers, and the wafers are exposed in the cavity during the process of being carried by the mechanical hand, so that a high cleanliness is required in the cavity to avoid the wafers from being contaminated. Therefore, a filter equipment is arranged at the top of the wafer transfer equipment, and the filter equipment is connected to the gas preliminarily filtered by a semiconductor factory, and the filter equipment finely filters the connected gas, and the clean gas blown out of the filter equipment flows uniformly from the top of the cavity to the bottom, the clean gas deposits the particles in the cavity to the bottom and keeps the cavity in a positive pressure environment, so as to ensure the cleanliness of the cavity of the wafer front end module and the wafer sorter.

[0003] The cavity space of the wafer transfer equipment is usually corresponding to the number of wafer load ports, and in order to match the cavity space with the filter equipment, a plurality of filter equipments are usually combined for use, and personnel need to stand high to open the interface between the filter and the air inlet pipe when replacing the filter paper regularly, so that the replacement of the filter core is not only time-consuming but also complicated. SUMMARY

[0004] In order to overcome the above-mentioned defects, the purpose of the present application is to provide a wafer transfer equipment, which increases a lifting device for facilitating single-person operation, and the lifting device can quickly replace the filter paper of all filters and press the cover tightly to ensure the cleanliness of the clean chamber in the wafer transfer equipment.

[0005] In order to achieve the above purpose, the technical scheme adopted by the present application is as follows: a wafer transfer equipment, comprising a shell, the shell comprising a clean chamber for docking with a wafer load port, a filter being arranged at the top of the clean chamber, a cover being pressed on the filter, and the wafer transfer equipment further comprising a lifting device for lifting the cover, the lifting device comprising:

[0006] pressure receiving members being fixed on the upper surface of the cover and being arranged at intervals along a first direction of the horizontal plane, the pressure receiving members extending out of the cover at both ends along a second direction of the horizontal plane, and the part of the pressure receiving members extending out of the cover being provided with a groove;

[0007] The connecting rod mechanism comprises two groups of connecting rod assemblies arranged in the second direction, each of the connecting rod assemblies comprises two first swing rods arranged in the first direction and a first connecting rod pivoted between the two first swing rods, and the two connecting rod assemblies are linked by a second connecting rod fixed with the corresponding first swing rod, the first swing rod comprises a first part and a second part arranged in an up-down manner, the connection between the first part and the second part is pivotally connected with a support fixed with the shell, the second part forms an included angle with a vertical plane and is inclined to the pressure-bearing piece, and a part of the second part can be embedded in the groove to press upward or downward on the pressure-bearing piece when the first swing rod swings, and a second swing rod fixed with the first swing rod swings synchronously is fixed on one of the first swing rods.

[0008] The guide mechanism comprises a through hole formed in the support and a guide rod capable of moving only up and down in the through hole, and the guide rod is fixedly connected with the pressure-bearing piece.

[0009] The driving mechanism comprises a lead screw extending in the first direction and a nut seat threadedly connected with the lead screw, and the nut seat can push the first swing rod to swing through the second swing rod when moving in the first direction.

[0010] Further, the lower end of the second swing rod is lower than the cover, the lower end of the second swing rod is pivotally connected with one end of a linkage rod, and the other end of the linkage rod is pivotally connected with the nut seat.

[0011] Further, the linkage rod is always inclined, and the end of the linkage rod pivotally connected with the second swing rod is inclined upward.

[0012] Further, the first swing rod is located outside the cover in the second direction.

[0013] Further, the driving mechanism further comprises a guide rail and a sliding block sliding along the guide rail, the nut seat comprises a nut body and a connecting frame fixedly connected, the connecting frame is fixedly connected with the sliding block and pivotally connected with one end of the linkage rod.

[0014] Further, a connecting piece fixedly connected with the pressure-bearing pieces is further arranged between the two pressure-bearing pieces, and the connecting piece is fixedly connected with the upper surface of the cover.

[0015] Further, the part of the second part embedded in the groove is connected with a roller, the roller is in rolling connection with the groove, and a gasket capable of abutting against the roller is arranged on the upper wall and the lower wall of the groove.

[0016] Further, the opening of the groove faces the first direction, and the bottom of the groove is provided with an opening for the roller to pass through.

[0017] Further, a limiting plate is fixed on the guide rod above the through hole, and the limiting plate can abut against the support to limit the lower position of the guide rod.

[0018] Further, the wafer loading devices are uniformly arranged along a first direction, the filters correspond to the wafer loading devices one by one, and the cover can be pressed on all the filters. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the embodiment of the present application;

[0020] Figure 2 It is a side view of the lifting device in the embodiment of the present application;

[0021] Figure 3 It is a schematic diagram of the three-dimensional structure of the lifting device in the embodiment of the present application;

[0022] Figure 4 It is a schematic diagram of the three-dimensional structure of the lifting device in the embodiment of the present application; Figure 2 It is an enlarged view of A in the figure;

[0023] Figure 5 It is an enlarged view of B in the figure; Figure 2 It is an enlarged view of B in the figure;

[0024] Figure 6 It is an enlarged view of C in the figure; Figure 3 It is an enlarged view of C in the figure;

[0025] Figure 7 It is an enlarged view of D in the figure; Figure 3 It is an enlarged view of D in the figure;

[0026] Figure 8 It is a connection diagram of the cover and the connecting frame in the embodiment of the present application;

[0027] Figure 9 It is an enlarged view of E in the figure. Figure 8 It is an enlarged view of E in the figure. DETAILED DESCRIPTION

[0028] The preferred embodiments of the present application are described in detail below with reference to the accompanying drawings, so that the advantages and features of the present application can be more easily understood by those skilled in the art, and the protection scope of the present application is more clearly defined.

[0029] In the figures, left and right, front and back represent two horizontal directions perpendicular to each other, which are respectively a first direction of a horizontal plane and a second direction of a horizontal plane, and the up and down direction is a vertical direction.

[0030] The wafer conveying device of the present application, referring to the accompanying Figure 1As shown, the wafer transfer device comprises a housing 200, the housing 200 comprises a cleaning chamber which is in abutment with a wafer loading device 300, a mechanical hand is arranged in the cleaning chamber, and the mechanical hand is used to carry the wafer between the wafer loading device 300 and the cleaning chamber. In order to maintain the cleanliness of the cleaning chamber, a filter 400 is arranged on the top of the cleaning chamber, and the external gas is filtered through the filter 400 before entering the cleaning chamber.

[0031] The wafer transfer device further comprises a cover 1 which is pressed on the filter 400, and the cover 1 is provided with an air inlet pipe 11 corresponding to the filter 400, and the external gas enters the corresponding filter 400 through the air inlet pipe 11. The lower surface of the cover 1 is provided with a sealing ring 12 which can seal the connection between the cover 1 and the filter 400, and when the cover 1 is covered on the filter 400, the sealing ring 12 is deformed by extrusion to achieve the sealing effect. After the filter 400 is used for a period of time, the filter element needs to be replaced, but when the filter element is replaced, the cover 1 needs to be lifted until the cover 1 and the filter 400 are separated. In the prior art, it is usually necessary to lift the cover 1 by multiple people, which brings great inconvenience to the replacement of the filter paper.

[0032] Therefore, in the embodiment, the wafer transfer device further comprises a lifting device 100, and the lifting device 100 is used to lift the cover 1. When the lifting device 100 lifts the cover 1 to separate the cover 1 from the filter 400, personnel replace the filter element between the cover 1 and the filter 400 from the gap between the cover 1 and the filter 400. When the lifting device 100 lowers the cover 1 to press the cover 1 on the filter 400, the sealing ring 12 at the lower end of the cover 1 seals the gap between the cover 1 and the filter 400, so that the external air with particles cannot enter the filter 400 from the gap.

[0033] Referring to FIG. 1, Figure 2 and FIG. 2, Figure 3 As shown, the lifting device 100 comprises a pressure-bearing piece 21, a connecting rod mechanism 3, a guide mechanism 4 and a driving mechanism 5. The pressure-bearing piece 21 is fixed with the cover 1, the driving mechanism 5 drives the pressure-bearing piece 21 to move up and down through the connecting rod mechanism 3, thereby realizing the lifting of the cover 1, and the guide mechanism 4 guides the movement of the pressure-bearing piece 21 so that the pressure-bearing piece 21 can only move up and down.

[0034] The pressure-bearing piece 21 is fixed on the upper surface of the cover 1, and two pressure-bearing pieces 21 are arranged in the left-right direction at intervals. The two ends of the pressure-bearing piece 21 in the front-rear direction extend out of the cover 1, and the part of the pressure-bearing piece 21 extending out of the cover 1 is provided with a groove 211. The groove 211 is located on the outside of the cover 1 in the front-rear direction and cooperates with the connecting rod assembly 31. At this time, when the connecting rod assembly 31 swings, it will not interfere with the rising cover 1.

[0035] Referring to FIG. 1, Figure 3As shown, the linkage mechanism 3 comprises two groups of linkage assemblies 31 arranged in the second direction, and the two groups of linkage assemblies 31 are linked by the second linkage 32. When one group of linkage assemblies 31 swings, the second linkage 32 transmits torque, and the other group of linkage assemblies 3 swings synchronously and in the same direction.

[0036] Referring to the accompanying drawings Figure 4 and the accompanying drawings Figure 5 As shown, the linkage assembly 31 comprises two first swing rods 311 arranged in the first direction and a first linkage 312 pivoted between the two first swing rods 311. The first swing rod 311 comprises a first part 3111 and a second part 3112 arranged in the up-down direction, and the connection between the first part 3111 and the second part 3112 is pivotally connected with a support 41 located outside the cover 1, which is fixed on the shell 200. The two ends of the first linkage 312 are respectively pivotally connected with the two first parts 3111, and the second linkage 32 is fixed on the corresponding first swing rod 311 and located at the connection between the first part 3111 and the second part 3112. When the first swing rod 311 swings, it drives the second linkage 32 to rotate along its own axis, and then transmits torque through the second linkage 32.

[0037] The second part 3112 forms an angle with the vertical plane and is inclined to the pressure-bearing part 21, and part of the second part 3112 can be embedded in the groove body 211 so that the first swing rod 311 can press upward or downward on the pressure-bearing part 21 when it swings. When the second part 3112 swings up and down, it applies force to the upper wall or the lower wall of the groove body 211, thereby driving the pressure-bearing part 21 and the cover 1 to move up and down. A second swing rod 33 that swings synchronously with the first swing rod 311 is fixed on one first swing rod 311, and an external force is applied to the second swing rod 33, thereby driving the linkage assembly 31 to swing. The linkage mechanism 3 has four second parts 3112, forming four top rod support points, which can stably lift the cover 1.

[0038] The guide mechanism 4 comprises a through hole opened in the support 41 and a guide rod 42 that can only move up and down in the through hole, and the guide rod 42 is fixedly connected with the pressure-bearing part 21. When the second part 3112 swings, it has a tendency to move up and down as well as left and right, but the cover 1 can only move up and down, otherwise it will affect the alignment of the cover 1 and the filter 400. Therefore, the through hole and the guide rod 42 are provided, the through hole is opened in the up-down direction and matches the outer circumferential surface of the guide rod 42, at this time the cover 1 only moves upward and will not move left and right at the same time as the second part 3112 moves up and down.

[0039] Referring to the accompanying drawings Figure 6As shown, the driving mechanism 5 includes a screw rod 51 extending in the first direction and a nut seat 52 threadedly connected with the screw rod 51, when the screw rod 51 rotates, the nut seat 52 moves in the left-right direction and pushes the first swing rod 311 to swing through the second swing rod 33. The driving mechanism 5 adopts the screw rod and nut structure, due to the self-locking effect of the screw rod and the nut, it can avoid that the personnel is pinched when the filter is replaced due to the sudden falling of the cover 1 under its own weight. At the same time, due to the self-locking effect of the screw rod 51 and the nut seat 52, when the gas pressure in the cleaning cavity is greater than the pressure outside the cleaning cavity, the cover 1 is lifted and the gas with more particles outside enters the cleaning cavity from the gap between the cover 1 and the filter 400, thereby causing the filter to fail prematurely and the cleanliness in the cleaning cavity to be low.

[0040] In this embodiment, the lifting device 100 is provided, when lifting the cover 1, the driving mechanism 5 composed of the screw rod 51 and the nut seat 52 can lift the cover 1 labor-savingly, and a single person can quickly replace the filter. Due to the self-locking effect of the screw rod 51 and the nut seat 52, it can avoid that the personnel is pinched when the filter is replaced due to the sudden falling of the cover 1 under its own weight. At the same time, by using the matched connecting rod mechanism 3 and the guide mechanism 4, the stress on the cover 1 is more uniform, and the cover 1 does not move horizontally in the upward process, and the sealing ring on the cover 1 is not damaged. When the cover 1 is lowered, due to the self-locking effect of the screw rod 51 and the nut seat 52, in addition to the gravity of the cover 1 itself, a downward pressure will be applied to the cover 1 through the connecting rod assembly 31, which can avoid that when the gas pressure in the cleaning cavity is greater than the pressure outside the cavity, the gas lifts the cover 1 and makes the gas with more particles outside enter the filter 400 from the gap between the cover 1 and the filter 400. Due to the effect of the guide mechanism 4 and the connecting rod mechanism 3 on the driving mechanism 5, the large pressure provided by the driving mechanism 5 to the pressure-bearing piece 21 will not be directly transmitted to the cover 1 and the sealing ring 12, so that the cover 1 is not easy to be damaged and deformed, and the sealing ring 12 will not be crushed, thereby ensuring the sealing between the cover 1 and the filter 400.

[0041] When the lifting device 100 lifts the cover 1, an external force rotates the lead screw 51, the rotating lead screw 51 drives the nut seat 52 to move to the right, the moving nut seat 52 pushes the lower end of the second swing rod 33 to the right, the first swing rod 311 fixedly connected with the second swing rod 33 swings clockwise around the hinge between the support 41 and the second swing rod 33, that is, the linkage assembly 31 swings counterclockwise, the two sets of linkage mechanisms 3 in the front-rear direction are connected through the second linkage 32 to transfer torque, and the two sets of linkage mechanisms 3 synchronously swing counterclockwise. The second part 3112 of the four first swing rods 311 of the two sets of linkage mechanisms 3 rotates counterclockwise while moving upward, the part inserted into the slot body 211 abuts against the upper wall of the slot body 211, and drives the cover 1 to lift upward. Since the guide rod 42 is fixedly connected with the pressure-bearing piece 21 and can only move up and down along the through hole on the support 41 fixedly connected with the shell 200, the cover 1 only moves upward and will not move rightward while moving upward with the second part 3112. When the cover 1 is lifted to a predetermined height, personnel can replace the filter element from the gap between the cover 1 and the filter 400.

[0042] When the lifting device 100 lowers the cover 1, an external force reversely rotates the lead screw 51, the rotating lead screw 51 drives the nut seat 52 to move to the left, the moving nut seat 52 pulls the lower end of the second swing rod 33 to the left, the first swing rod 311 fixedly connected with the second swing rod 33 swings clockwise around the hinge between the support 41 and the second swing rod 33, that is, the linkage assembly 31 swings clockwise, the two sets of linkage mechanisms 3 in the front-rear direction are connected through the second linkage 32 to transfer torque, and the two sets of linkage mechanisms 3 synchronously swing clockwise. The second part 3112 of the four first swing rods 311 of the two sets of linkage mechanisms 3 rotates clockwise while moving downward, the part inserted into the slot body 211 abuts against the lower wall of the slot body 211, and pushes the cover 1 to move downward. Since the guide rod 42 is fixedly connected with the pressure-bearing piece 21 and can only move up and down along the through hole on the support 41 fixedly connected with the shell 200, the cover 1 only moves downward and will not move leftward while moving downward with the second part 3112. The cover 1 is lowered to a position, at which time the sealing ring at the lower end of the cover 1 closes the gap between the cover 1 and the filter 400, so that external air containing particles cannot enter the filter 400 from the gap.

[0043] The driving mechanism 5 further comprises a driving member for driving the lead screw 51 to rotate along the axis thereof. In the present application, the driving member is not limited, and is exemplarily a handle 511 or a motor.

[0044] In an embodiment, in order to reduce the height position of the driving mechanism 5 and facilitate personnel operation, see FIG. 6, the driving mechanism 5 is arranged on the bottom of the shell 200. Figure 3As shown, the lower end of the second swing lever 33 is below the cover 1, and the lower end of the second swing lever 33 is pivotally connected with one end of a linkage lever 53, and the other end of the linkage lever 53 is pivotally connected with the nut seat 52.

[0045] The lower end of the second swing lever 33 is below the cover 1, and the linkage lever 53 is arranged to pivotally connect the nut seat 52 and the second swing lever 33, and at this time, the driving mechanism 5 can be arranged below the cover 1, which is convenient for personnel to operate. The arrangement of the linkage lever 53 forms a lever, which can more easily lift the cover 1. At the same time, the linkage lever 53 extends the distance from the nut seat 52 to the second swing lever 33 in the left-right direction, so that even if the handle 511 is located outside the cover 1 in the left-right direction, the handle 511 can still be rotated, and the handle 511 is also more convenient for personnel to operate at this position.

[0046] The lower the height of the driving mechanism 5, the more convenient it is for personnel to operate, and personnel do not need to climb to rotate the screw rod 51. Therefore, the linkage lever 53 is always inclined, and the end of the linkage lever 53 pivotally connected with the second swing lever 33 is inclined upward. At this time, the end of the linkage lever 53 pivotally connected with the nut seat 52 is lower, so that even if the position of the nut seat 52 is lower, the second swing lever 33 can still be pushed by the linkage lever 53.

[0047] It can be understood that the above-mentioned linkage lever 53 in the embodiment can not be arranged, but replaced by an arc-shaped hole on the nut seat 52, and the nut seat 52 is directly pivotally connected with the second swing lever 33, and the shaft of the second swing lever 33 connected with the nut seat 52 can rotate and slide in the arc-shaped hole. At this time, when the nut seat 52 reciprocates in the left-right direction, the first swing lever 311 can still be pushed up and down by the second swing lever 33.

[0048] Referring to FIG. 1, Figure 3 As shown, the first swing lever 311 is located outside the cover 1 in the front-rear direction, because the height position of the first swing lever 311 is always higher than the cover 1, if the first swing lever 311 is located directly above the cover 1, it may interfere with the swinging first swing lever 311 when the cover 1 moves upward, affecting the lifting distance of the cover 1. Therefore, the first swing lever 311 is located outside the cover 1 in the front-rear direction, so that the cover 1 will not collide with the swinging first swing lever 311 when the cover 1 moves upward.

[0049] At the same time, the first swing lever 311 is located outside the cover 1 in the front-rear direction, so that the first swing lever 311 and the cover 1 do not need to have a large distance in the up-down direction to provide the cover 1 with lifting, which can relatively reduce the height position of the first swing lever 311, so as to facilitate installation.

[0050] In order to improve the stability of the movement of the nut seat 52, referring to FIG. 1, Figure 6As shown, the driving mechanism 5 further comprises a guide rail 54 and a sliding block 55 sliding along the guide rail 54, the nut seat 52 is fixedly connected with the sliding block 55, and the guide rail 54 is fixedly connected with the shell 200. When the two ends of the lead screw 51 are rotatably connected with the bearing seat and the shell 200, the nut seat 52 can only move linearly and reciprocally. However, because the nut seat 52 needs to lift the cover 1 against the gravity of the cover 1, the force received by the nut seat 52 is transmitted to the lead screw 51. At this time, the sliding block 55 and the guide rail 54 are arranged to guide the movement of the nut seat 52 and simultaneously disperse the force received by the lead screw 51 and transmit the force to the shell 200, so as to avoid deformation of the lead screw 51 due to excessive force.

[0051] The nut seat 52 comprises a nut body 521 fixedly connected and a connecting frame 522, the connecting frame 522 is fixedly connected with the sliding block 55 and pivotally connected with one end of the linkage rod 53. The connecting frame 522 firmly connects the nut body 521 and the sliding block 55 together while providing space for the pivotal connection of the linkage rod 53.

[0052] In one embodiment, referring to the accompanying drawings, Figure 8 As shown, the two pressure receiving members 21 are further provided with a connecting member 22 fixedly connected therewith, and the connecting member 22 is fixedly connected with the upper surface of the cover 1. The connecting member 22 and the pressure receiving member 21 form a connecting frame 2 fixed with the cover 1, and the connecting frame 2 is used to connect the linkage mechanism 3 and the cover 1. The connecting member 22 can transmit the pressure received by the pressure receiving member 21, so that the cover 1 is subjected to force at multiple positions, thereby avoiding stress concentration and deformation of the cover 1. The number of the connecting member 22 is set according to actual needs. For example, two connecting members 22 are provided, which are arranged in the front-rear direction and form a frame structure with the two pressure receiving members 21.

[0053] Referring to the accompanying drawings, Figure 4 As shown, the linkage assembly 31 can further comprise a roller 31121, the second part 3112 is rotatably connected with the roller 31121, and the roller 31121 is rollingly connected with the groove body 211. The roller 31121 is arranged to reduce friction and avoid direct sliding contact between the second part 3112 and the groove body 211, so as to reduce the generation of particles and affect the cleanliness of the environment.

[0054] Referring to the accompanying drawings, Figure 9 As shown, the upper wall and the lower wall of the groove body 211 are both provided with a gasket 212 abutting against the roller 31121. The gasket 212 is made of a material with a small friction coefficient, so as to improve the smoothness of the roller 31121 and reduce friction and the generation of particles. For example, the gasket 212 is made of plastic, which can also avoid direct wear of the groove body 211.

[0055] Referring to the accompanying drawings, Figure 9As shown, the opening of the groove body 211 faces the left-right direction, and the bottom of the groove body 211 is provided with an opening hole 2111 through which the roller 31121 partially passes. Because the roller 31121 also moves in the left-right direction within the groove body 211, the opening and the opening hole 2111 provide space for the displacement of the roller 31121 in the first direction, and increase the movement space of the roller 31121 in the left-right direction without increasing the depth of the groove body 211 in the left-right direction.

[0056] Referring to the accompanying drawings Figure 7 As shown, the guide mechanism 4 further comprises a limiting plate 421 fixed on the guide rod 42 above the through hole, and the limiting plate 421 can abut against the support 41 to limit the downward position of the guide rod 42. When the cover 1 is excessively lowered, the sealing ring 12 will be excessively compressed, causing damage to the sealing ring 12. Therefore, the limiting plate 421 can be provided to limit the downward position of the cover 1. When the limiting plate 421 abuts against the upper end surface of the support 41, the screw rod 51 is stopped from rotating due to resistance, and the cover 1 is lowered to the position. At this time, the sealing ring at the lower end of the cover 1 closes the gap between the cover 1 and the filter 400.

[0057] Referring to the accompanying drawings Figure 1 As shown, the wafer loading device 300 is uniformly arranged in the first direction, and the filter 400 corresponds to the wafer loading device 300 one by one, that is, the filter 400 is also arranged in the first direction, and the cover 1 can be pressed against all the filters 400. At this time, the length direction of the cover 1 is the same as the extension direction of the screw rod 51, and the connecting frame 2 is located at the middle position of the length direction of the cover 1, so that the force applied to the cover 1 by the driving mechanism 5 is more uniform, the cover 1 can be stably lifted and lowered, and it is also more convenient to operate the handle.

[0058] Referring to the accompanying drawings Figure 1 As shown, the wafer transmission mechanism further comprises a protective cover 500, which can be covered above the housing 200 and cover the lifting device 100. The protective cover 500 can effectively protect the lifting device 100, avoiding damage to the lifting device 100 due to collision or external force.

[0059] The above embodiments are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit and essence of the present application shall be covered within the protection scope of the present application.

Claims

1. A wafer transfer apparatus, characterized by: The utility model provides a wafer loading device cleaning device, including shell, the shell includes the clean chamber who is butt joint with wafer loading device, the clean chamber top is provided with filter, the filter is pressed on the cover, the wafer transmission equipment still includes the lifting device for lifting the cover, the lifting device includes: Pressure bearing, fixed in the upper surface of the cover and along the horizontal plane first direction interval arrangement two, the pressure bearing extends along the horizontal plane second direction both ends and extends out of the cover, the pressure bearing extension part is provided with the groove body; Connecting rod mechanism, the connecting rod mechanism includes two groups of connecting rod assemblies spaced apart along the second direction, the connecting rod assembly includes two first swing rods spaced apart along the first direction and a first connecting rod pivoted between the two first swing rods, two connecting rod assemblies are linked through the second connecting rod fixed with the corresponding first swing rod, the first swing rod includes first and second parts arranged vertically, the first and second parts are pivotally connected with the support fixed with the shell, the second part forms an angle with the vertical plane and the second part is inclined to the pressure bearing, part of the second part can be embedded in the groove to enable the first swing rod to press upward or downward when swinging the pressure bearing, a second swing rod is fixed on one of the first swing rods and swings synchronously with it; Guide mechanism, including a through hole opened in the support and a guide rod that can only move up and down in the through hole, the guide rod is fixedly connected with the pressure bearing; Driving mechanism, including a lead screw extending in the first direction and a nut seat threadedly connected with the lead screw, the nut seat moves in the first direction and pushes the first swing rod to swing through the second swing rod.

2. The wafer transfer apparatus of claim 1, wherein: The lower end of the second swing rod is lower than the cover, and the lower end of the second swing rod is pivotally connected with one end of a linkage rod, and the other end of the linkage rod is pivotally connected with the nut seat.

3. The wafer transfer apparatus of claim 2, wherein: The linkage rod is always inclined, and the end of the linkage rod pivotally connected with the second swing rod is inclined upward.

4. The wafer transfer apparatus of claim 1, wherein: The first swing rod is located outside the cover in the second direction.

5. The wafer transfer apparatus of claim 2, wherein: The driving mechanism further includes a guide rail and a sliding block sliding along the guide rail, the nut seat includes a nut body and a connecting frame fixedly connected, the connecting frame is fixedly connected with the sliding block and pivotally connected with one end of the linkage rod.

6. The wafer transfer apparatus of claim 1, wherein: Two pressure bearings are further provided with a connecting piece fixedly connected therewith, and the connecting piece is fixedly connected with the upper surface of the cover.

7. The wafer transfer device according to claim 1, wherein: Part of the second part that can be embedded in the groove is connected with a roller, the roller is in rolling connection with the groove, and gaskets that can abut against the roller are arranged on the upper wall and the lower wall of the groove.

8. The wafer transfer apparatus of claim 7, wherein: The opening of the groove faces the first direction, and the bottom of the groove is provided with an opening for the roller to pass through.

9. The wafer transfer apparatus of claim 1, wherein: A limiting plate is fixed on the guide rod above the through hole, and the limiting plate can abut against the support to limit the downward position of the guide rod.

10. The wafer transfer apparatus according to any one of claims 1 to 9, characterized by: A plurality of wafer loading devices are uniformly arranged in the first direction, the filter corresponds to the wafer loading device one by one, and the cover can be pressed tightly on all the filters.

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