Single crystal furnace top cavity sealing device with multi-stage buffering

Abstract

The invention discloses a single crystal furnace top cavity sealing device with multi-stage buffering, and relates to the technical field of single crystal furnaces. The top cavity cover is mounted on a single crystal furnace main body, a first buffer cover and a second buffer cover are arranged in the top cavity cover, and the second buffer cover is arranged between the inner wall of the top of the top cavity cover and the first buffer cover; and a plurality of mounting frames are fixed at the top of the first buffer cover. When the second buffer cover is stressed to move upwards, the two connecting arms of the mounting frame can move towards the two sides under the guidance of the inclined surfaces of the reinforcing ribs, and meanwhile, the effect of unloading force is achieved based on buffering of the buffer springs; if the movement amplitude is too large, the roller is guided by the inclined plane of the reinforcing rib, so that the connecting arm is inclined and continuously moves along the bottom surface of the second buffer cover, and the connecting arm is in contact with the locking piece and pushes the locking piece to move along with the movement of the roller, so that the second buffer cover is unlocked; and the second buffering cover can move upwards, and secondary buffering is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal furnaces, and in particular to a single crystal furnace top cavity sealing device with multi-stage buffering. Background Art

[0002] In the production of single crystal silicon, the single crystal furnace is a core piece of equipment, and the performance of its top chamber sealing device plays a crucial role in single crystal growth quality and production stability. During operation, the interior of the top chamber of the single crystal furnace is subject to a variety of complex factors, including high temperatures, thermal stress, and possible mechanical vibration. These factors can easily cause deformation or displacement of the top chamber structure, thereby compromising the sealing performance of the top chamber. Once the top chamber seal fails, problems such as the ingress of external impurities and temperature field disturbances will ensue, seriously affecting the quality and production efficiency of the single crystal silicon.

[0003] Traditional single crystal furnace top cavity sealing devices usually adopt simple rigid structures to improve the force effect, thereby ensuring the sealing of the structure; or interlayer buffer structures, which use springs to unload force. Although they have the ability to unload force and buffer, only using springs to unload force cannot, firstly, well guarantee the stability of the structural movement during the unloading process, and secondly, cannot well cope with different pressure conditions. Specifically, the specifications of the spring are fixed. If it is to cope with smaller forces and still have a good unloading effect, the spring spring coefficient should not be too large. When a spring with a smaller spring coefficient is used, it is difficult for this type of spring to play the role of unloading protection when encountering a large force. There are limitations in application.

[0004] In addition to the above issues, for example, Chinese patent application CN202321755633.4 discloses a single crystal furnace isolation valve plate device and a single crystal furnace with a buffering function. The device comprises a valve plate body and a buffer assembly, wherein the buffer assembly comprises a buffer plate and a plurality of buffer components, one end of each of the plurality of buffer components being connected to the valve plate body. The single crystal furnace described in the above document has the following drawbacks: the buffer structure provided above the furnace roof cannot address the internal pressure buffering problem. Summary of the Invention

[0005] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a single crystal furnace top cavity sealing device with multi-stage buffering.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions: A single crystal furnace top cavity sealing device with multi-stage buffering comprises: a top cavity cover mounted on a single crystal furnace body, a first buffer cover and a second buffer cover arranged inside the top cavity cover, the second buffer cover being arranged between the top inner wall of the top cavity cover and the first buffer cover; A plurality of mounting brackets are fixed to the top of the first buffer cover. The plurality of mounting brackets are circumferentially distributed along the top of the first buffer cover. Two connecting arms are rotatably mounted on the top of the mounting brackets. The connecting arms and the mounting brackets are connected by a volute spring. The bottom of the second buffer cover is provided with circumferentially distributed reinforcing ribs, and transitional inclined surfaces are provided on both sides of the reinforcing ribs close to one end of the second buffer cover; the top ends of the two connecting arms are located under the two inclined surfaces of the reinforcing ribs; the mounting frame and the reinforcing ribs are connected by a buffer spring.

[0007] As a preferred embodiment of the present invention: a first annular plate is fixed to the inner side of the bottom of the top cavity cover, a second annular plate is fixed to the inner side of the bottom of the first buffer cover, the first annular plate and the second annular plate are connected by an annular elastic connecting belt, the annular edge of the bottom of the first buffer cover and the annular elastic connecting belt are both inclined, and the annular elastic connecting belt is provided with annular folds that are easy to deform.

[0008] As a preferred embodiment of the present invention: a roller is rotatably installed on the top of the connecting arm, the roller is located below the inclined surface of the reinforcing rib, and the initial distance between the bottom surface of the reinforcing rib and the top surface of the first buffer cover is smaller than the distance from the center line of rotation of the roller to the top surface of the first buffer cover.

[0009] As a preferred embodiment of the present invention: multiple groups of connecting seats are fixed on the second buffer cover, and the two connecting seats in each group are symmetrically arranged on both sides of the reinforcing rib. The connecting seat passes through the second buffer cover, and a tooth plate is fixed on the top inner wall of the top cavity cover. The outer wall of one side of the tooth plate is provided with evenly distributed first one-way latch teeth. The interior of the connecting seat is hollow, and the bottom end of the tooth plate extends to the interior of the connecting seat. The bottom end of the connecting seat is connected to the top surface of the first buffer cover through an annular elastic cylinder; a locking piece is provided on the bottom side wall of the connecting seat, and the locking piece cooperates with the first one-way latch tooth to realize one-way limiting of the second buffer cover; the locking piece is located on the movement path of the roller, and is unlocked based on the push of the roller.

[0010] As a preferred embodiment of the present invention: the locking member includes a clamping strip, a second one-way clamping tooth is provided on the side of the clamping strip close to the first one-way clamping tooth, the second one-way clamping tooth and the first one-way clamping tooth form a one-way limiting structure, a connecting rod is fixed to the outer wall of one side of the clamping strip, the connecting rod slides on the inner wall of one side of the connecting seat, an end plate is fixed to one end of the connecting rod, the end plate is located on the outside of the connecting seat, the end plate is located on the movement path of the roller, and the end plate and the connecting seat are connected by an elastic pleated tube.

[0011] As a preferred embodiment of the present invention: a limiting block is fixed at the bottom end of the tooth plate, and the clamping strip is located above the limiting block; a guide strip is fixed at the bottom of the top frame, and the bottom end of the guide strip extends to the inside of the connecting seat.

[0012] As a preferred embodiment of the present invention: a mounting seat is installed on the second buffer cover, a guide column is fixed to the top outer wall of the first buffer cover, a sliding groove adapted to the guide column is opened at the bottom end of the mounting seat, and the top of the guide column slides in the sliding groove.

[0013] As a preferred embodiment of the present invention: a second circulation pipe is installed in the chamber between the top cavity cover and the second buffer cover, the end of the second circulation pipe is connected to a circulation hose, one end of the circulation hose is connected to the first circulation pipe, and the first circulation pipe is connected to the coolant circulation supply device.

[0014] As a preferred embodiment of the present invention: an annular groove is provided on the side of the mounting seat, and the second circulation pipe is installed in the annular groove; the guide column and the slide groove are in a matching M-shaped structure.

[0015] As a preferred embodiment of the present invention, the top of the mounting seat is an arc surface structure with a raised middle portion, an elastic pad is installed on the top of the mounting seat, and a side of the elastic pad close to the top of the mounting seat is provided with circumferentially distributed deformation grooves.

[0016] The beneficial effects of the present invention are: The present invention provides a first buffer cover, a mounting frame, a connecting arm and other structures. When the second buffer cover is forced to move upward, the two connecting arms of the mounting frame can move to both sides under the guidance of the inclined surface of the reinforcing rib. At the same time, based on the cooperation between the connecting arm and the buffer spring, the effect of unloading force is achieved. The design of the connecting arm enables the structure to move more gradually, avoiding violent collision of the structure when unloading force. Compared with the traditional method of directly using a single buffer spring for buffering, the reinforcing rib of the present invention not only improves the structural strength, but also cooperates with the reinforcing rib and the connecting arm. The design of the double connecting arm can maintain the stability of the movement of the first buffer cover, avoid structural distortion, and facilitate structural resetting.

[0017] The present invention provides a top frame, a first one-way latch and a locking piece. When the first buffer cover moves upward, if the movement amplitude is too large, the roller is guided by the inclined surface of the reinforcing rib, causing the connecting arm to tilt and continue to move along the bottom surface of the second buffer cover. As the roller moves, it contacts the locking piece, pushing the locking piece to move, thereby unlocking the second buffer cover; enabling the second buffer cover to move upward, thereby achieving secondary buffering.

[0018] The present invention provides a locking piece. When the roller moves to contact the end plate, as the roller continues to move, the end plate is pushed toward the connecting seat, so that the second one-way tooth of the card strip is separated from the first one-way tooth, thereby achieving the purpose of unlocking. At this time, the second buffer cover can move upward; due to the use of a one-way limit, the structure is easy to reset after the impact.

[0019] In the present invention, since the locking member is unlocked by being pushed by the roller, when the impact is reduced or disappears, the roller is separated from the end plate, and the end plate can be reset in time based on the rebound force of the elastic pleated tube, thereby preventing the second buffer cover from moving further upward, which is beneficial to the protection of the structure; at the same time, timely reset can avoid the increase in the distance between the first buffer cover and the second buffer cover, and avoid the situation where the roller collides with the edge of the reinforcing rib and causes structural damage.

[0020] The present invention provides structures such as elastic pads and deformation grooves, so that during the upward movement of the second buffer cover, the elastic pads can contact the inner wall of the top of the top cavity cover and play a buffering role. During the process, since the top of the mounting seat is an arc surface structure with a raised middle part, the elastic pad can be squeezed, so that the elastic pad can achieve a certain degree of deformation by using the deformation groove, thereby achieving a good force unloading effect and improving reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a structural schematic diagram of a single crystal furnace top cavity sealing device with multi-stage buffering proposed by the present invention; Figure 2 This is a schematic structural diagram of a cross-section of a top cavity cover of a single crystal furnace top cavity sealing device with multi-stage buffering proposed by the present invention; Figure 3 This is a structural schematic diagram of the top of the second buffer cover of a single crystal furnace top cavity sealing device with multi-stage buffering proposed by the present invention; Figure 4 This is a schematic structural diagram of the upper and lower sides of the second buffer cover of a single crystal furnace top cavity sealing device with multi-stage buffering proposed by the present invention; Figure 5 This is a schematic structural diagram of the cooperation between the roller and the reinforcing rib of a single crystal furnace top cavity sealing device with multi-stage buffering proposed by the present invention; Figure 6 This is a schematic structural diagram of a cross-section of a connecting seat of a single crystal furnace top cavity sealing device with multi-stage buffering proposed by the present invention; Figure 7 This is a schematic structural diagram of an elastic pad of a single crystal furnace top cavity sealing device with multi-stage buffering proposed in Example 2 of the present invention.

[0022] In the figure: 1 top cavity cover, 2 single crystal furnace body, 3 first circulation pipe, 4 circulation hose, 5 second circulation pipe, 6 second buffer cover, 7 first buffer cover, 8 annular elastic cylinder, 9 annular elastic connecting belt, 10 connecting seat, 11 tooth plate, 12 top frame, 13 mounting seat, 14 mounting frame, 15 guide column, 16 reinforcing rib, 17 annular groove, 18 first one-way clamping tooth, 19 buffer spring, 20 connecting arm, 21 roller, 22 clamping strip, 23 limit block, 24 connecting rod, 25 elastic pleated cylinder, 26 end plate, 27 scroll spring, 28 second one-way clamping tooth, 29 elastic pad, 30 deformation groove. DETAILED DESCRIPTION

[0023] The technical solution of the present invention will be further described in detail below in conjunction with specific implementation methods.

[0024] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0025] Example 1: A single crystal furnace top cavity sealing device with multi-stage buffering, such as Figure 1-6 As shown, it includes: a top cavity cover 1 installed on the single crystal furnace body 2, a first buffer cover 7 and a second buffer cover 6 are arranged in the top cavity cover 1, and the second buffer cover 6 is arranged between the top inner wall of the top cavity cover 1 and the first buffer cover 7; A plurality of mounting brackets 14 are fixed to the top of the first buffer cover 7. The plurality of mounting brackets 14 are arranged circumferentially along the top of the first buffer cover 7. Two connecting arms 20 are rotatably mounted on the top of the mounting brackets 14. The connecting arms 20 and the mounting brackets 14 are connected by a volute spring 27. The bottom of the second buffer cover 6 is provided with circumferentially distributed reinforcing ribs 16. Transitional inclined surfaces are provided on both sides of the end of the reinforcing rib 16 close to the second buffer cover 6. The top ends of the two connecting arms 20 are located below the two inclined surfaces of the reinforcing rib 16. The mounting frame 14 and the reinforcing rib 16 are connected by a buffer spring 19. By providing the first buffer cover 7, the mounting frame 14, the connecting arms 20 and other structures, when the second buffer cover 6 is forced to move upward, the two connecting arms 20 of the mounting frame 14 can be guided by the inclined surface of the reinforcing rib 16 to move to the sides, and at the same time, based on the buffering of the buffer spring 19, the effect of unloading force can be achieved; The reinforcing ribs 16 can effectively enhance the structural strength of the second buffer cover 6. At the same time, the reinforcing ribs 16 cooperate with the connecting arms 20. The design of the double connecting arms 20 can maintain the stability of the movement of the first buffer cover 7, avoid structural skewness, and facilitate structural reset.

[0026] In order to improve the sealing of the structure; Figure 2 As shown, a first annular plate is fixed to the inner side of the bottom of the top cavity cover 1, and a second annular plate is fixed to the inner side of the bottom of the first buffer cover 7. The first annular plate and the second annular plate are connected by an annular elastic connecting belt 9. The annular edge of the bottom of the first buffer cover 7 and the annular elastic connecting belt 9 are both inclined, and the annular elastic connecting belt 9 is provided with annular folds that are easy to deform.

[0027] In order to improve the smoothness of structural movement; Figure 5As shown, a roller 21 is rotatably installed on the top of the connecting arm 20. The roller 21 is located below the inclined surface of the reinforcing rib 16. The initial distance between the bottom surface of the reinforcing rib 16 and the top surface of the first buffer cover 7 is smaller than the distance from the rotation center line of the roller 21 to the top surface of the first buffer cover 7.

[0028] In order to facilitate emergency situations by the second buffer cover 6 buffer; Figure 5 、 Figure 6 As shown, multiple groups of connecting seats 10 are fixed on the second buffer cover 6, and the two connecting seats 10 of each group are symmetrically arranged on both sides of the reinforcing rib 16. The connecting seat 10 passes through the second buffer cover 6, and a tooth plate 11 is fixed to the top inner wall of the top cavity cover 1. The outer wall of one side of the tooth plate 11 is provided with evenly distributed first one-way latch teeth 18. The interior of the connecting seat 10 is hollow, and the bottom end of the tooth plate 11 extends to the interior of the connecting seat 10. The bottom end of the connecting seat 10 is connected to the top surface of the first buffer cover 7 through the annular elastic cylinder 8; a locking piece is provided on the bottom side wall of the connecting seat 10, and the locking piece cooperates with the first one-way latch teeth 18 to achieve one-way limiting of the second buffer cover 6; the locking piece is located on the movement path of the roller 21, and is unlocked based on the push of the roller 21; By setting up the top frame 12, the first one-way latch 18 and the locking piece, when the first buffer cover 7 moves upward, if the movement amplitude is too large, the roller 21 is guided by the inclined surface of the reinforcing rib 16, causing the connecting arm 20 to tilt and continue to move along the bottom surface of the second buffer cover 6. As the roller 21 moves, it contacts the locking piece, pushing the locking piece to move, thereby unlocking the second buffer cover 6; allowing the second buffer cover 6 to move upward, thereby achieving secondary buffering.

[0029] To facilitate unlocking; Figure 6 As shown, the locking member includes a clamping strip 22, and a second one-way clamping tooth 28 is provided on one side of the clamping strip 22 close to the first one-way clamping tooth 18. The second one-way clamping tooth 28 and the first one-way clamping tooth 18 form a one-way limiting structure. A connecting rod 24 is fixed to the outer wall of one side of the clamping strip 22. The connecting rod 24 slides on the inner wall of one side of the connecting seat 10. An end plate 26 is fixed to one end of the connecting rod 24. The end plate 26 is located outside the connecting seat 10 and on the movement path of the roller 21. The end plate 26 and the connecting seat 10 are connected by an elastic pleated cylinder 25. By providing a locking member, when the roller 21 moves to contact the end plate 26, as the roller 21 continues to move, the end plate 26 is pushed toward the connecting seat 10, so that the second one-way latching tooth 28 of the clamping strip 22 is separated from the first one-way latching tooth 18, thereby achieving the purpose of unlocking. At this time, the second buffer cover 6 can move upward; due to the use of a one-way limit, the structure is easy to reset after an impact; In addition, since the locking member is unlocked based on the push of the roller 21, when the impact is reduced or disappears, the roller 21 separates from the end plate 26, and the end plate 26 can be reset in time based on the rebound force of the elastic pleated tube 25, thereby preventing the second buffer cover 6 from moving further upward, which is beneficial to the protection of the structure; At the same time, timely resetting can prevent the distance between the first buffer cover 7 and the second buffer cover 6 from increasing, and avoid the situation where the roller 21 collides with the edge of the reinforcing rib 16 and causes structural damage.

[0030] In order to better guide and limit the movement of the second buffer cover 6; Figure 5 、 Figure 6 As shown, a limit block 23 is fixed at the bottom end of the tooth plate 11, and the clamping strip 22 is located above the limit block 23; a guide strip is fixed at the bottom of the top frame 12, and the bottom end of the guide strip extends to the inside of the connecting seat 10; By providing the limit block 23 and the guide bar, the up and down movement of the second buffer cover 6 can be limited and guided, thereby ensuring the stability of the structural movement.

[0031] In order to facilitate the movement of the first buffer cover 7 to guide; Figure 5 As shown, a mounting seat 13 is installed on the second buffer cover 6, a guide column 15 is fixed to the top outer wall of the first buffer cover 7, and a sliding groove adapted to the guide column 15 is opened at the bottom end of the mounting seat 13, and the top of the guide column 15 slides in the sliding groove.

[0032] In order to facilitate heat dissipation; Figure 2 、 Figure 4 、 Figure 5 As shown, a second circulation pipe 5 is installed in the chamber between the top cavity cover 1 and the second buffer cover 6. The end of the second circulation pipe 5 is connected to the circulation hose 4. One end of the circulation hose 4 is connected to the first circulation pipe 3. The first circulation pipe 3 is connected to the coolant circulation supply device; By providing the first circulation pipe 3 , the circulation hose 4 and the second circulation pipe 5 , the interior can be cooled to a certain extent according to actual needs.

[0033] In order to improve the heat transfer effect; Figure 3 、 Figure 5 As shown, an annular groove 17 is provided on the side of the mounting seat 13, and the second circulation pipe 5 is installed in the annular groove 17; the guide column 15 and the slide groove are in a matching M-shaped structure; By providing the annular groove 17 and the guide column 15 and the slide groove of the M-shaped structure, the heat transfer effect can be improved, thereby improving the temperature control effect.

[0034] Example 2: like Figure 7As shown, in order to enhance the secondary buffering capacity, this embodiment makes the following improvements on the basis of embodiment 1: the top of the mounting seat 13 is a curved surface structure with a raised middle portion, an elastic pad 29 is installed on the top of the mounting seat 13, and the elastic pad 29 is provided with a circumferentially distributed deformation groove 30 on one side close to the top of the mounting seat 13; By providing structures such as the elastic pad 29 and the deformation groove 30, the elastic pad 29 can be used to contact the inner wall of the top of the top cavity cover 1 and play a buffering role during the upward movement of the second buffer cover 6. During the process, since the top of the mounting seat 13 is an arc surface structure with a raised middle part, the elastic pad 29 can be squeezed so that the elastic pad 29 can be deformed to a certain extent by using the deformation groove 30, thereby achieving a good unloading effect and improving reliability.

[0035] For the parts of the present invention that are not fully disclosed, those skilled in the art can ensure that the solutions of the present invention are successfully implemented based on common sense, normal thinking logic and existing technologies.

[0036] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A single crystal furnace top cavity sealing device with multi-stage buffer, characterized in that: include: A top cavity cover (1) mounted on a single crystal furnace body (2), wherein a first buffer cover (7) and a second buffer cover (6) are provided in the top cavity cover (1), and the second buffer cover (6) is provided between the top inner wall of the top cavity cover (1) and the first buffer cover (7); A plurality of mounting frames (14) are fixed to the top of the first buffer cover (7), and the plurality of mounting frames (14) are circumferentially distributed along the top of the first buffer cover (7). Two connecting arms (20) are rotatably mounted on the top of the mounting frames (14), and the connecting arms (20) and the mounting frames (14) are connected via a volute spring (27); The bottom of the second buffer cover (6) is provided with circumferentially distributed reinforcing ribs (16), and transitional inclined surfaces are provided on both sides of one end of the reinforcing rib (16) close to the second buffer cover (6); the top ends of the two connecting arms (20) are located below the two inclined surfaces of the reinforcing rib (16); and the mounting frame (14) and the reinforcing rib (16) are connected via a buffer spring (19).

2. The single crystal furnace top cavity sealing device with multi-stage buffering according to claim 1, characterized in that: A first annular plate is fixed to the inner side of the bottom of the top cavity cover (1), and a second annular plate is fixed to the inner side of the bottom of the first buffer cover (7). The first annular plate and the second annular plate are connected by an annular elastic connecting belt (9). The annular edge of the bottom of the first buffer cover (7) and the annular elastic connecting belt (9) are both inclined, and the annular elastic connecting belt (9) is provided with annular folds that are easy to deform.

3. The single crystal furnace top cavity sealing device with multi-stage buffering according to claim 1, characterized in that: A roller (21) is rotatably mounted on the top of the connecting arm (20). The roller (21) is located below the inclined surface of the reinforcing rib (16). The initial distance between the bottom surface of the reinforcing rib (16) and the top surface of the first buffer cover (7) is smaller than the distance from the rotation center line of the roller (21) to the top surface of the first buffer cover (7).

4. The single crystal furnace top cavity sealing device with multi-stage buffering according to claim 3, characterized in that: A plurality of groups of connecting seats (10) are fixed on the second buffer cover (6), and the two connecting seats (10) of each group are symmetrically arranged on both sides of the reinforcing rib (16). The connecting seats (10) pass through the second buffer cover (6). A tooth plate (11) is fixed to the inner wall of the top of the top cavity cover (1), and the outer wall of one side of the tooth plate (11) is provided with uniformly distributed first one-way latch teeth (18). The interior of the connecting seat (10) is hollow, and the bottom end of the tooth plate (11) extends to the interior of the connecting seat (10). The bottom end of the connecting seat (10) is connected to the top surface of the first buffer cover (7) through an annular elastic cylinder (8); a locking piece is provided on the side wall of the bottom of the connecting seat (10), and the locking piece cooperates with the first one-way latch teeth (18) to achieve one-way limiting of the second buffer cover (6); the locking piece is located on the movement path of the roller (21), and is unlocked based on the push of the roller (21).

5. The single crystal furnace top cavity sealing device with multi-stage buffering according to claim 4, characterized in that: The locking member includes a clamping strip (22), a second one-way clamping tooth (28) is provided on one side of the clamping strip (22) close to the first one-way clamping tooth (18), and the second one-way clamping tooth (28) and the first one-way clamping tooth (18) form a one-way limiting structure. A connecting rod (24) is fixed to the outer wall of one side of the clamping strip (22), and the connecting rod (24) slides on the inner wall of one side of the connecting seat (10). An end plate (26) is fixed to one end of the connecting rod (24), and the end plate (26) is located outside the connecting seat (10). The end plate (26) is located on the movement path of the roller (21), and the end plate (26) and the connecting seat (10) are connected by an elastic pleated tube (25).

6. The single crystal furnace top cavity sealing device with multi-stage buffering according to claim 5, characterized in that: A limit block (23) is fixed at the bottom end of the tooth plate (11), and the clamping strip (22) is located above the limit block (23); a guide strip is fixed at the bottom of the top frame (12), and the bottom end of the guide strip extends to the inside of the connecting seat (10).

7. The single crystal furnace top cavity sealing device with multi-stage buffering according to claim 1, characterized in that: A mounting seat (13) is installed on the second buffer cover (6), a guide column (15) is fixed to the top outer wall of the first buffer cover (7), a sliding groove adapted to the guide column (15) is provided at the bottom end of the mounting seat (13), and the top of the guide column (15) slides in the sliding groove.

8. The single crystal furnace top cavity sealing device with multi-stage buffering according to claim 7, characterized in that: A second circulation pipe (5) is installed in the chamber between the top chamber cover (1) and the second buffer cover (6), the end of the second circulation pipe (5) is connected to a circulation hose (4), one end of the circulation hose (4) is connected to the first circulation pipe (3), and the first circulation pipe (3) is connected to a coolant circulation supply device.

9. The single crystal furnace top cavity sealing device with multi-stage buffering according to claim 8, characterized in that: An annular groove (17) is provided on the side of the mounting seat (13), and the second circulation pipe (5) is installed in the annular groove (17); the guide column (15) and the slide groove are in a matching M-shaped structure.

10. The single crystal furnace top cavity sealing device with multi-stage buffering according to claim 7, characterized in that: The top of the mounting seat (13) is a curved surface structure with a raised middle portion. An elastic pad (29) is installed on the top of the mounting seat (13). The elastic pad (29) is provided with circumferentially distributed deformation grooves (30) on one side close to the top of the mounting seat (13).

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