Optical measurement system and method for measuring object to be measured

Abstract

The invention relates to an optical measurement system and method for measuring an object to be measured. The invention relates to an optical measurement module for measuring an object to be measured, the object to be measured comprises a first corner, a second corner, a third corner and a fourth corner, and the optical measurement module comprises at least two optical lenses. The at least two optical lenses are arranged above at least two adjacent corners of the first to fourth corners, the position of one of the at least two optical lenses is used as a reference position, and the at least two optical lenses are configured to respectively obtain images of the at least two adjacent corners; and providing the at least two images to an image analysis and comparison module, so that the image analysis and comparison module calculates at least one side length of the object to be measured according to the reference position.

Description

Technical Field

[0001] The present invention relates to an optical measurement system and method for measuring an object to be measured, and more particularly to an optical measurement system and method for measuring an object to be measured that utilizes first to fourth optical lenses to simultaneously acquire images of the object to be measured. Background Art

[0002] IC carriers serve as carriers for ICs, primarily protecting circuits, securing wiring, and dissipating excess heat. As a key component in the packaging process, their precision is crucial. Conventional measurement techniques for carriers utilize a single charge-coupled device (CCD) optical lens, moving the lens along the four sides of the object under test / carrier for measurement. However, this technique is susceptible to precision errors in the device responsible for carrier movement, which can lead to errors in the optical lens's image capture. These image errors can further lead to errors in the measured values. Therefore, minimizing device movement to improve measurement precision is essential.

[0003] For this reason, it is worth considering how to solve the problem of inevitable precision errors in the device responsible for moving the carrier. In view of the shortcomings of the existing technology, after careful testing and research, and with a spirit of perseverance, the present invention was finally conceived. The following is a brief description of the invention. Summary of the Invention

[0004] The optical measurement system for measuring an object to be measured of the present invention is calibrated with a reference piece. Images simultaneously acquired by four optical lenses at four corners are used to calculate the four sides of the object to be measured, thereby eliminating errors caused by hardware movement.

[0005] The present invention provides an optical measurement system for measuring an object to be measured, comprising first, second, third, and fourth optical lenses, and an image analysis and comparison module. The first optical lens has a first position serving as a reference position, the first position being located above a first corner of the object to be measured, and the second to fourth optical lenses are located above the second, third, and fourth corners of the object to be measured, respectively. The first to fourth optical lenses are configured to capture first, second, third, and fourth images above the first to fourth corners, respectively. The image analysis and comparison module is coupled to the first to fourth optical lenses and configured to calculate the first, second, third, and fourth side lengths of the object to be measured based on the positions of points A, B, C, and D of the object to be measured as captured in the first to fourth images.

[0006] From a primary technical perspective, the present invention provides an optical measurement module for measuring an object under test, wherein the object under test includes first, second, third, and fourth corners, and the optical measurement module includes at least two optical lenses. The at least two optical lenses are positioned above at least two adjacent corners among the first to fourth corners, with the position of one of the at least two optical lenses serving as a reference position. The at least two optical lenses are configured to respectively capture images of the at least two adjacent corners and provide the at least two images to an image analysis and comparison module, which then calculates the length of at least one side of the object under test based on the reference position.

[0007] From another practical perspective, the present invention may encompass a method for measuring a first object under test using an optical module, wherein the optical module includes first and second optical lenses, and the method includes moving the first and second optical lenses above the first object under test; allowing the first and second optical lenses to simultaneously capture first and second images of the first object under test, respectively; determining point A and point B of the first object under test based on the first and second images; using point A as a reference position and calculating a first length of a line connecting point A and point B based on the reference position; and comparing the first length with the specifications of the first object under test to determine whether the first object under test is a defective product.

[0008] The present invention may also be a method for measuring an object under test using an optical module, wherein the optical module includes first and second optical lenses, and the method includes causing the first and second optical lenses to simultaneously obtain first and second images of the object under test, respectively; calculating a first parameter value of the object under test based on the first and second images; and comparing the parameter value with the required specifications of the object under test to determine whether the object under test is a defective product. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 is a schematic diagram of an optical measurement system for measuring an object to be measured according to a preferred embodiment of the present invention;

[0010] Figure 2 is a three-dimensional schematic diagram of the optical measurement module of the present invention;

[0011] Figure 3 It is a three-dimensional schematic diagram of the tray and the object to be tested therein;

[0012] Figure 4 yes Figure 3 Schematic diagram of a top view of the object to be tested;

[0013] Figure 5 yes Figure 3 Schematic diagram of a method for calculating the deflection distance of the third side length of the object to be measured;

[0014] Figure 6 It is a top view schematic diagram of the reference plate used in the optical lens;

[0015] Figure 7 It is a cross-sectional schematic diagram of an optical lens and a reflector;

[0016] Figure 8 A schematic diagram of a camera and lens that is an optical lens; and

[0017] Figure 9 It is a three-dimensional schematic diagram of four optical lenses using a reference plate to calibrate the fixed distance between each other. DETAILED DESCRIPTION

[0018] The present invention can be used for polygonal objects such as substrates and PCBs that require precise measurement to ensure shipping yield. The measured data can be further analyzed, and changes in the data can be used to determine issues that should have been noted in the previous process, such as the degree of blade wear or cutting precision settings. The optical measurement system proposed by the present invention for measuring the object under test uses a calibrated fixed spacing for measurement, eliminating errors caused by hardware movement. By capturing images of the object under test in a single pass, imaging efficiency is improved, and the lens spacing does not change when moving to the next object under test, thereby enhancing the stability of measurement accuracy.

[0019] See also Figures 1 to 4 , which shows an optical measurement system 101 for measuring an object to be measured. The optical measurement system 101 includes an optical measurement module 10 and an image analysis and comparison module 102. The optical measurement module 10 includes a first optical lens 11, a second optical lens 12, a third optical lens 13 and a fourth optical lens 14 (such as Figure 2 As shown). Figure 2 As shown in FIG, the first position 21 of the first optical lens 11 is a reference position, and the first position 21 is located as shown in FIG. Figure 3 The tray (i.e., tray) 30 shown is located above the first corner 321 of the first object to be tested 31, and the second to fourth optical lenses 12, 13, and 14 are respectively located above the second corner 322, third corner 323, and fourth corner 324 of the first object to be tested 31, wherein the first to fourth optical lenses 11-14 are configured to respectively obtain first, second, third, and fourth images above the first to fourth corners 321-324. The image analysis and comparison module 102 is coupled to the first to fourth optical lenses 11-14, and the image analysis and comparison module 102 is configured to analyze the first to fourth images of the object to be tested 31 according to the first to fourth images. Figure 4At points A, B, C, and D, the first side length Y1, second side length X1, third side length Y2, and fourth side length X2 of the front side of the object under test 31 are calculated. After completing the measurement of the four sides of the front side of the object under test 31, the four sides of the back side of the object under test 31 also need to be measured.

[0020] In the above embodiment, the third side length Y2 of the object to be measured 31 is pulled out from the point C as shown in FIG. Figure 5 The extension line EL is shown, and the projection line PL drawn from point B is projected to the third side length Y2, and the extension line EL and the projection line PL intersect perpendicularly at point C', and the image analysis and comparison module 102 is further configured to calculate the deflection distance κ of the third side length Y2 (for example: 0.829 (μm)-14.202 (μm)).

[0021] In the aforementioned embodiments, the second side length X1 of the object under test 31 forms an angle θ with the projection line PL, and the image analysis and comparison module 102 is further configured to calculate the corner slope of point B using the angle θ and compare it with the specifications of the object under test 31 to determine whether it is a non-conforming (NG) product.

[0022] In the above embodiments, the first to fourth optical lenses 11-14 of the optical measurement module 10 are Figure 6 The reference plate 60 shown calibrates the respective first position 21, second position 22, third position 23, and fourth position 24. In other words, the present invention utilizes the reference plate 60 to simultaneously set up four optical lenses 11-14. Based on the size of the first object under test 31, one of the lenses can be used as a reference position, while the other three lenses can be positioned at the corners of the first object under test 31 with different axes.

[0023] In the above embodiments, the first to fourth optical lenses 11-14 of the optical measurement module 10 are all CCDs (including Figure 7 The CCD uses a reflector 73 to change the direction of light from the object to be tested 31, which is a polygonal object to be tested, such as a carrier board or PCB. Figure 4 Although a quadrilateral is used as an example, in actual application, it can correspond to a specific polygonal object to be tested. The carrier is used to measure the necessary process control before the IC is installed in the future. The IC is usually connected to the carrier in a flip-chip manner. Figure 8 , showing the camera 81 and lens 82 of the third optical lens 13.

[0024] From a technical perspective, the present invention is an optical measurement module 10 for measuring a first object under test 31. The first object under test 31 includes first, second, third, and fourth corners 321-324. The optical measurement module 10 includes at least two optical lenses (e.g., first and second optical lenses 11, 12). The at least two optical lenses 11, 12 are positioned above at least two adjacent corners (e.g., first and second corners 321, 322) of the first to fourth corners 321-324. The position of one of the at least two optical lenses 11, 12 serves as a reference position. The at least two optical lenses 11, 12 are configured to capture images of the at least two adjacent corners and provide the at least two images to an image analysis and comparison module 102, which then calculates the length of at least one side (e.g., first side length Y1) of the first object under test 31 based on the reference position.

[0025] In the aforementioned embodiment, the first object to be measured 31 in the optical measurement module 10 is located in the tray 30, and the at least two optical lenses include first, second, third and fourth optical lenses 11-14, wherein the first and second optical lenses 11, 12 are arranged opposite to each other on the X-axis, and the fourth optical lens 14 is arranged parallel to the Y-axis.

[0026] From another practical perspective, the present invention may encompass a method for measuring a first object under test 31 using an optical module (e.g., optical measurement module 10), wherein the optical module includes first and second optical lenses 11, 12. The method includes moving the first and second optical lenses 11, 12 above the first object under test 31; having the first and second optical lenses 11, 12 simultaneously capture first and second images of the first object under test 31, respectively; determining the positions of point A and point B of the first object under test 31 based on the first and second images; using point A as a reference position and calculating a first length (e.g., a first side length Y1) of a line connecting points A and B based on the reference position; and comparing the first length with the specifications of the first object under test 31 to determine whether the first object under test 31 is a defective product.

[0027] See also Figure 9In the aforementioned embodiment, the method further includes using a reference plate 60 to position the first to fourth optical lenses 11-14, with points A to D located at the first to fourth corners 321-324 of the first object under test 31, respectively. The reference plate 60 is selected based on the size of the first object under test 31, and the first and second optical lenses 11 and 12 are positioned using the reference plate 60. The method further includes moving the first and second optical lenses 11 and 12 to above the second object under test 32 for measurement based on the position of the object under test within the tray without changing the spacing between the first and second optical lenses 11 and 12. Therefore, the optical measurement module of the present invention can be moved directly from above the first object under test 31 to above the second object under test 32 for measurement without changing the spacing between the four lenses.

[0028] The present invention may also be a method for measuring a first object under test 31 using an optical module (e.g., optical measurement module 10), wherein the optical module includes first and second optical lenses 11 and 12. The method includes having the first and second optical lenses 11 and 12 simultaneously capture first and second images of the first object under test 31, respectively; calculating a first parameter value (e.g., first side length Y1) of the first object under test 31 based on the first and second images; and comparing the parameter value with the required specifications of the first object under test 31 to determine whether the first object under test 31 is a defective product.

[0029] In summary, the present invention discloses a novel optical measurement system for measuring an object to be measured. By positioning first to fourth optical lenses and employing an image analysis and comparison module, the system can calculate the first to fourth side lengths of the object to be measured based on the positions of points A to D of the object to be measured in the first to fourth images. Therefore, the system has industrial value and thus achieves the intended purpose of the development of this application.

[0030] Although the present application discloses the preferred embodiments as above, they are not intended to limit the scope of the present application. Any changes and modifications made by anyone skilled in the art without departing from the spirit and scope of the present application should be covered by the present application.

[0031] Explanation of symbols

[0032] 10: Optical measurement module

[0033] 101: Optical Measurement Systems

[0034] 102: Image analysis and comparison module

[0035] 11: First optical lens

[0036] 12: Second optical lens

[0037] 13: Third optical lens

[0038] 14: Fourth optical lens

[0039] 21: First position

[0040] 22: Second position

[0041] 23: Third position

[0042] 24: Fourth position

[0043] 30: Pallet

[0044] 31: First object to be tested

[0045] 32: Second object to be tested

[0046] 321: First Corner

[0047] 322: Second Corner

[0048] 323: The Third Corner

[0049] 324: The Fourth Corner

[0050] AD, C': point

[0051] Y1: length of the first side

[0052] X1: Second side length

[0053] Y2: length of the third side

[0054] X2: length of the fourth side

[0055] EL: Extension line

[0056] PL: Projection Line

[0057] κ: skew distance

[0058] θ: angle

[0059] 60: Benchmark

[0060] 71: Camera

[0061] 72: Lens

[0062] 73: Reflector

[0063] 81: Camera

[0064] 82: Lens.

Claims

1. An optical measurement system for measuring an object to be measured, comprising: a first optical lens, a second optical lens, a third optical lens, and a fourth optical lens, wherein a first position of the first optical lens is a reference position, and the first position is located above a first corner of the object to be measured, and the second to fourth optical lenses are respectively located above a second corner, a third corner, and a fourth corner of the object to be measured, wherein the first to fourth optical lenses are configured to respectively obtain a first image, a second image, a third image, and a fourth image above the first corner to the fourth corner; and An image analysis and comparison module is coupled to the first to fourth optical lenses, and is configured to calculate a first side length, a second side length, a third side length, and a fourth side length of the object to be measured based on a point A, a point B, a point C, and a point D of the object to be measured in the first to fourth images.

2. The optical measurement system of claim 1 , wherein the third side is formed by extending a line from point C and projecting a line from point B onto the third side, wherein the extension line and the projected line intersect perpendicularly at point C′, and the image analysis and comparison module is further configured to calculate a deflection distance of the third side.

3. The optical measurement system of claim 2 , wherein the second side length forms an angle with the projection line, and the image analysis and comparison module is further configured to calculate a side angle slope of point B using the angle, and compare the calculated angle with the specifications of the object to be measured to determine whether the object is a defective product. 4 . The optical measurement system according to claim 2 , wherein the first to fourth optical lenses are calibrated for the first position, the second position, the third position, and the fourth position thereof by a reference plate.

5. The optical measurement system according to claim 2, wherein the first to fourth optical lenses are each a CCD, the CCD uses a reflector to change a light direction, and the object to be measured is a polygonal object to be measured, and the polygonal object to be measured is a carrier board, a PCB, or a specific polygonal object to be measured.

6. An optical measurement module for measuring an object to be measured, wherein the object to be measured includes a first corner, a second corner, a third corner, and a fourth corner, and the optical measurement module comprises: At least two optical lenses are disposed above at least two adjacent corners between the first corner and the fourth corner, with the position of one of the at least two optical lenses serving as a reference position, wherein the at least two optical lenses are configured to: An image of at least two adjacent corners is obtained respectively, and the at least two images are provided to an image analysis and comparison module, so that the image analysis and comparison module calculates at least one side length of the object to be measured according to the reference position.

7. The measurement module according to claim 6, wherein the object to be measured is placed on a tray, the at least two optical lenses include a first optical lens, a second optical lens, a third optical lens, and a fourth optical lens, wherein the first optical lens and the second optical lens are disposed opposite to each other on an X-axis, and the fourth optical lens is disposed parallel to the Y-axis.

8. A method for measuring a first object under test using an optical module, wherein the optical module includes a first optical lens and a second optical lens, and the method comprises: Moving the first optical lens and the second optical lens to above the first object to be measured; Using the first optical lens and the second optical lens to simultaneously obtain a first image and a second image of the first object to be measured respectively; Determining a point A and a point B of the first object to be measured according to the first image and the second image; Taking point A as a reference position, and calculating a first length of a line connecting point A and point B according to the reference position; as well as The first length is compared with the specification of the first object to be tested to determine whether the first object to be tested is a substandard product.

9. The method according to claim 8, further comprising using a reference plate to position the first optical lens and the second optical lens, wherein point A and point B are located at a first corner and a second corner of the first object to be measured, respectively, and the reference plate is selected based on a size of the first object to be measured, and the first optical lens and the second optical lens are positioned using the reference plate. The method further comprises moving directly from above the first object to above a second object to be measured to perform measurement without changing the spacing between the first optical lens and the second optical lens.

10. A method for measuring an object to be measured using an optical module, wherein the optical module includes a first optical lens and a second optical lens, and the method comprises: The first optical lens and the second optical lens are used to respectively obtain a first image and a second image of the object to be measured simultaneously; Calculating a first parameter value of the object to be measured according to the first image and the second image; and The parameter value is compared with the required specification of the object to be tested to determine whether the object to be tested is a substandard product.

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