A crystal expander

Abstract

The application relates to a wafer expander, which comprises a workbench, a film tearing mechanism and a detection mechanism arranged on the upper side of the workbench, an automatic ring disassembling mechanism, a film expanding and transporting platform, a film moving mechanism, an upper film expanding mechanism, a moving outer ring structure and a lower film expanding structure abutting after film expanding is completed, the moving outer ring structure and the lower film expanding structure are abutted, the inner ring and the outer ring are clamped, a new film expanding ring is formed, a film discharging structure is used for moving the new film expanding ring after film expanding is completed to a material collecting structure position, the old film expanding ring is disassembled into the inner ring and the outer ring through the automatic ring disassembling mechanism, meanwhile, the corresponding old waste film is removed, the disassembled inner ring and outer ring are directly used without being collected, thus the overall equipment structure can be simplified, meanwhile, the disassembled inner ring and outer ring are assembled again according to the original assembling relationship and used, the inner ring and the outer ring can be used in the same group in multiple uses, even if deformation occurs, the inner ring and the outer ring can be matched, and thus the service life of the inner ring and the outer ring is prolonged.

Description

Technical Field

[0001] This invention relates to the field of chip manufacturing equipment, and in particular to a die expander. Background Technology

[0002] In the post-processing of LED chips, the chips need to be sorted into different grades. To sort the chips, the blue film on which the chips are placed must be expanded with an expansion ring before being put into the sorting machine. After the sorting machine completes its work, the expansion ring needs to be removed, the sorted blue film removed, a new blue film installed, and then sorted again.

[0003] The film expansion ring consists of an inner ring and an outer ring, with the blue film sandwiched between them. During film expansion, the inner and outer rings are compressed very tightly, making it difficult for operators to disassemble manually, resulting in low disassembly efficiency. Furthermore, the inner and outer rings may deform during prolonged use. If the film expansion rings are disassembled uniformly, the inner and outer rings are collected separately after disassembly. When they need to be assembled into film expansion rings again, the inner and outer rings are randomly selected, which may lead to mismatch due to deformation, affecting normal production.

[0004] Meanwhile, existing film expansion equipment is equipped with separate inner and outer ring storage racks. During the production process, the inner and outer rings are fed separately, which makes the overall equipment complex and the production cost higher. Summary of the Invention

[0005] Therefore, it is necessary to provide a die expander to address the problems in the existing technology.

[0006] A die expansion machine, characterized in that it includes a worktable, wherein the upper side of the worktable is provided with

[0007] The film-peeling mechanism is used to move the blue film to be expanded and peel off the release paper and PET film on the top of the blue film chip;

[0008] The testing agency is used to detect the angular position of the chip on the upper side of the blue film after the release paper and PET film have been removed;

[0009] The automatic ring-removal mechanism is equipped with a rack for placing old film-expanding rings, and separates the inner and outer rings of the old film-expanding rings at the rack position one by one, and removes the corresponding discarded blue film.

[0010] The film expansion transport platform includes a first bearing platform and a second bearing platform. The first bearing platform is provided with an annular hole, and a lower film expansion structure that moves up and down is provided at the position of the annular hole. The lower film expansion structure is used to support the split inner ring and moves up and down for film expansion. The second bearing platform is used to support the split outer ring.

[0011] The film transfer mechanism is used to move the blue film with the release paper and PET film removed to the testing mechanism position, and to move the blue film after testing to the first bearing platform position. At this time, when it is moved to the first bearing platform position, the blue film is located on the upper side of the inner ring.

[0012] The upper expansion film mechanism includes an outer ring moving structure and a film pressing structure. The film pressing structure presses against the upper side of the first bearing platform, and the lower expansion film structure moves upward to complete the film expansion. The outer ring moving structure is used to move the outer ring at the position of the second bearing platform to the upper side of the lower expansion film structure. After the film expansion is completed, the outer ring moving structure abuts against the lower expansion film structure to lock the inner ring and the outer ring together to form a new expansion film ring.

[0013] The film exit structure is used to move the newly expanded film ring, after it has been expanded, to the receiving structure position.

[0014] In one embodiment, the film-tearing mechanism includes a PET film-tearing structure. The PET film-tearing structure includes a base, a peeling plate on the side of the base, and a fixed platform slidably connected to the upper side of the base. The fixed platform has a fixing structure for fixing a blue film placed on the fixed platform. A fixing tearing structure is provided on the outer side of the peeling plate for clamping the side of the blue film placed on the upper side of the fixed platform and pulling the blue film downward. When the PET film on the upper side of the blue film moves to the peeling plate, the PET film and the blue film are partially separated. A tearing structure is provided on the upper side of the fixed platform for tearing the partially separated PET film from the upper side of the blue film. A reset mechanism is provided between the base and the fixed platform. When the fixing tearing structure removes the force acting on the blue film, the fixed platform returns to its initial position under the action of the reset mechanism.

[0015] In one embodiment, the outer side of the peeling plate is provided with an inclined side, the inclined surface of the inclined side faces downward, the fixed tearing structure is located outside the inclined side, the PET film is rectangular, the right angle of the PET film faces the peeling plate, when the PET film and the blue film move towards the peeling plate at the same time, the right angle of the PET film and the blue film separate at the inclined side of the peeling plate.

[0016] In one embodiment, the automatic replacement mechanism further includes a ring-removing base plate, with a cover plate on the upper side of the ring-removing base plate, forming a material transfer channel between the cover plate and the worktable.

[0017] The cover plate has a first through hole and a second through hole. The material rack is located above the first through hole. The old film expansion ring to be disassembled inside the material rack moves to the material transfer channel position through the first through hole. The replacement bottom plate has a third through hole, located below the second through hole.

[0018] The material transfer channel is equipped with a first pushing structure, which is used to push the old film expansion ring at the material rack position from the first through hole position to the second through hole position.

[0019] The pallet structure includes two pallet blocks and a pallet cylinder for controlling the movement of the pallet blocks. The pallet blocks are at least partially disposed on the lower side of the second through hole. The two pallet blocks are respectively located on both sides of the second through hole. The pallet blocks have a first step portion flush with the material transfer channel and a second step portion lower than the first step portion. Under the action of the pallet cylinder, the pallet blocks move toward or away from the center of the second through hole. The old film expansion ring moves to the first step position through the material transfer channel.

[0020] The cover plate has a splitting structure on the upper side of the second through hole, which is used to separate the inner ring and outer ring of the old expansion ring and remove the waste blue film. The inner ring is separated from the outer ring under the action of the splitting structure and moves to the second step position. The waste blue film is separated from the outer ring under the action of the splitting structure and moves from the third through hole position to the underside of the replacement base plate. After the support block moves away from the center of the second through hole, the outer ring moves from the first step position to the second step position.

[0021] Two discharge guide blocks are provided on the underside of the ring-disassembly base plate to form a discharge guide groove;

[0022] The bottom side of the ring-removing base plate is equipped with a second pushing structure, which sequentially pushes the inner ring and outer ring, which have been moved to the second step position, to the film expansion transport platform position through the discharge guide groove.

[0023] In one embodiment, the splitting structure includes a pressure-dividing structure and a film-removing structure. The pressure-dividing structure includes a pressure-dividing cylinder fixed to the upper side of the cover plate. The piston rod of the pressure-dividing cylinder is connected to a pressure-dividing rod. When the pressure-dividing rod moves downward, it acts on the inner ring position of the old film-expanding ring, causing the inner ring to separate from the outer ring.

[0024] The film removal structure includes a film removal cylinder fixed to the upper side of the cover plate. The piston rod of the film removal cylinder is connected to a vertical rod, which is located above the center of the third through hole. The bottom of the vertical rod is provided with a pressing structure that contacts the waste blue film. The pressing structure moves up and down under the action of the film removal cylinder, thereby separating the waste blue film after the inner ring is removed from the outer ring.

[0025] In one embodiment, the film expansion transport platform further includes a movable seat that slides on the upper side of the worktable via a guide rail slider structure. The upper side of the movable seat is provided with movable platforms at intervals. Each movable platform includes a first bearing platform and a second bearing platform arranged side-by-side along the moving direction of the movable seat.

[0026] The lower expansion membrane structure includes a lifting cylinder fixed to the lower side of the movable seat. The piston rod of the lifting cylinder is connected to a lifting plate. The lifting plate is located between the movable seat and the movable platform. Under the action of the lifting cylinder, the lifting plate moves up and down through the annular hole of the first bearing platform. The lifting plate is provided with a positioning step corresponding to the inner ring. When the inner ring is engaged in the positioning step, the inner ring is flush with the upper surface of the lifting plate.

[0027] The first carrier platform is equipped with a first fixing suction cup for fixing the blue film. When the detected blue film is placed on the first carrier platform, the blue film is fixed on the upper side of the first carrier platform by the first fixing suction cup.

[0028] The second bearing platform is equipped with an external positioning part that is adapted to the outer ring.

[0029] In one embodiment, the upper expansion mechanism includes an upper fixed plate fixed to the upper side of the worktable by a bracket, and the outer ring moving structure includes a first pressing cylinder fixed to the upper side of the upper fixed plate. The piston rod of the first pressing cylinder is connected to the pressing plate, and the pressing plate has a through hole in the middle.

[0030] The pressure film structure includes a second pressing cylinder fixed to the upper side of an upper fixing plate. The piston rod of the second pressing cylinder is connected to a pressing plate. The outer side of the pressing plate is provided with an outer positioning part for fixing an outer ring. The pressing plate moves up and down at the through hole position in the middle of the pressing plate.

[0031] Both the clamping plate and the pressing plate are located on the lower side of the upper fixing plate.

[0032] In one embodiment, the crystal expansion machine further includes a waste film removal mechanism. The waste film removal mechanism includes a rotating rod, the upper end of which is rotatably connected to an upper fixed plate via a rotating shaft. The lower end of the rotating rod is provided with a removal cylinder, and the movable end of the removal cylinder is provided with a removal gripper. The removal cylinder is arranged perpendicular to the rotating rod and is a finger cylinder. A horizontal cylinder is provided on the lower side of the upper fixed plate. The piston rod of the horizontal cylinder is connected to a horizontal guide rod. The horizontal guide rail is connected to the lower side of the upper fixed plate via a guide rail slider structure. A rotating wheel is provided at the outer end of the horizontal guide rod, and the rotating wheel abuts against the side of the rotating rod. The horizontal cylinder controls the rotating rod to rotate around the rotating shaft via the horizontal guide rod. When the rotating rod is in a vertical state, the removal gripper of the removal cylinder is located on the side of the pressing plate of the upper expansion mechanism, used to clamp the waste film on the outer side after the inner ring and outer ring are pressed together.

[0033] In one embodiment, the detection mechanism includes a detection platform, an adjustment structure on the lower side of the detection platform for controlling and adjusting the angle position of the detection platform, and a detection camera on the upper side of the detection platform for detecting the angle position of the chip on the blue film placed on the detection platform.

[0034] In one embodiment, the film-exiting structure includes a longitudinally moving module that is longitudinally arranged on the upper side of the worktable via a support. A vertical film-exiting cylinder is provided on the lower side of the longitudinally moving module. The piston rod of the vertical film-exiting cylinder is connected to a three-jaw cylinder. The moving end of the three-jaw cylinder is provided with film-exiting grippers for removing the newly expanded film ring that has completed the film expansion from the upper side of the lower film expansion structure.

[0035] The aforementioned crystal expansion machine uses an automatic ring-disassembly mechanism to separate the old expansion ring into inner and outer rings, while simultaneously removing the corresponding old waste blue film. The separated inner and outer rings are used directly without collection, which simplifies the overall equipment structure. Furthermore, the separated inner and outer rings are reassembled according to their original assembly relationship, ensuring that the inner and outer rings are used in the same set during multiple uses. Even if deformation occurs, they can still be matched, thereby improving the service life of the inner and outer rings. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the overall structure of the crystal expander of the present invention;

[0037] Figure 2 This is a schematic diagram of the overall structure of the crystal expander of the present invention;

[0038] Figure 3 This is a schematic top view of the overall structure of the crystal expansion machine of the present invention;

[0039] Figure 4 This is a schematic diagram of the structure of the crystal expander of the present invention;

[0040] Figure 5 This is a schematic diagram of the structure of the crystal expander of the present invention;

[0041] Figure 6 This is a schematic diagram of the automatic ring-removal mechanism of the crystal expander of the present invention;

[0042] Figure 7 for Figure 6 Enlarged view of the structure at point A;

[0043] Figure 8 This is a schematic diagram of the bottom structure of the automatic ring-removal mechanism of the crystal expander of the present invention;

[0044] Figure 9 This is a top view schematic diagram of the automatic ring-removing mechanism of the crystal expander of the present invention;

[0045] Figure 10 This is a schematic diagram of the expansion film transport platform structure of the crystal expansion machine of the present invention;

[0046] Figure 11 This is a schematic diagram of the expansion film transport platform structure of the crystal expansion machine of the present invention;

[0047] Figure 12 This is a schematic diagram of a portion of the film expansion mechanism on the crystal expansion machine of the present invention;

[0048] Figure 13 This is a schematic diagram of the film expansion mechanism on the crystal expansion machine of the present invention;

[0049] Figure 14 This is a schematic diagram of the PET film tearing structure of the crystal expander of the present invention;

[0050] Figure 15 This is a schematic diagram of the PET film tearing structure of the crystal expander of the present invention;

[0051] Among them, 1. Workbench;

[0052] 2. Film tearing mechanism; 21. PET film tearing structure; 211. Base; 212. Peeling plate; 2121. Inclined side; 213. Fixing platform; 214. Fixing structure; 215. Fixing tearing structure; 216. Tearing structure; 217. Reset mechanism;

[0053] 3. Automatic ring-removing mechanism; 31. Material rack; 32. Ring-removing base plate; 321. Third through hole;

[0054] 33. Cover plate; 331. First through hole; 332. Second through hole; 34. Material transfer channel; 35. First pusher structure;

[0055] 36. Pallet structure; 361. Pallet block; 362. Pallet cylinder; 363. First step; 364. Second step;

[0056] 37. Split-type structure; 371. Pressure-dividing structure; 3711. Pressure-dividing cylinder; 3712. Pressure-dividing rod;

[0057] 372. Demolding structure; 3721. Demolding cylinder; 3722. Vertical rod; 3723. Extrusion structure;

[0058] 38. Discharge guide block; 39. Second pusher structure;

[0059] 4. Testing facility; 41. Testing station; 42. Testing camera;

[0060] 5. Expanding film transport platform; 51. First bearing platform; 511. Annular hole; 512. First fixed suction cup;

[0061] 52. Second bearing platform; 521. External positioning part; 53. Lower expansion membrane structure; 531. Lifting cylinder; 532. Lifting plate; 533. Positioning step; 54. Moving seat; 55. Moving platform;

[0062] 6. Film transfer mechanism;

[0063] 7. Upper film expansion mechanism; 71. Outer ring shifting structure; 711. First clamping cylinder; 712. Clamping plate;

[0064] 72. Pressing structure; 721. Second pressing cylinder; 722. Pressing plate; 723. External positioning part;

[0065] 73. Mount the fixing plate;

[0066] 74. Waste film removal mechanism; 741. Rotating rod; 742. Removal cylinder; 743. Removal gripper; 744. Horizontal cylinder; 745. Horizontal guide rod; 746. Rotating wheel;

[0067] 8. Film ejection structure; 81. Longitudinal movement module; 82. Vertical film ejection cylinder; 83. Three-jaw cylinder; 84. Film ejection gripper;

[0068] 9. Material receiving structure. Detailed Implementation

[0069] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0070] It should be noted that when an element is said to be "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is said to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. Conversely, when an element is said to be "directly on" another element, there is no intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0071] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0072] like Figures 1 to 15 As shown, a die expansion machine is characterized by comprising a worktable 1, wherein the upper side of the worktable 1 is provided with

[0073] The film-tearing mechanism 2 is used to move the blue film to be expanded and to tear off the release paper and PET film on the upper side of the blue film chip;

[0074] Testing unit 4 is used to detect the angle position of the chip on the upper side of the blue film after the release paper and PET film have been removed;

[0075] The automatic ring-removal mechanism 3 is equipped with a material rack 31 for placing old film-expanding rings, and disassembles the inner and outer rings of the old film-expanding rings at the material rack 31 one by one, and removes the corresponding discarded blue film.

[0076] The film expansion transport platform 5 includes a first bearing platform 51 and a second bearing platform 52. The first bearing platform 51 is provided with an annular hole 511. A lower film expansion structure 53 that moves up and down is provided at the position of the annular hole 511. The lower film expansion structure 53 is used to support the split inner ring and moves up and down for film expansion. The second bearing platform 52 is used to support the split outer ring.

[0077] The film transfer mechanism 6 is used to move the blue film with the release paper and PET film removed to the position of the detection mechanism 4, and to move the blue film after detection to the position of the first bearing platform 51. At this time, when it is moved to the position of the first bearing platform 51, the blue film is located on the upper side of the inner ring.

[0078] The upper film expansion mechanism 7 includes an outer ring shifting structure 71 and a film pressing structure 72. The film pressing structure 72 presses against the upper side of the first bearing platform 51, and the lower film expansion structure 53 moves upward to complete the film expansion. The outer ring shifting structure 71 is used to move the outer ring at the position of the second bearing platform 52 to the upper side of the lower film expansion structure 53. After the film expansion is completed, the outer ring shifting structure 71 abuts against the lower film expansion structure 53 to snap the inner ring and the outer ring together to form a new film expansion ring.

[0079] The film exit structure 8 is used to move the newly expanded film ring, after the film expansion is completed, to the position of the material receiving structure 9.

[0080] The old film expansion ring is separated into inner and outer rings by the automatic ring-disassembly mechanism 3, and the corresponding old waste blue film is removed. The separated inner and outer rings are used directly without collection, which simplifies the overall equipment structure. At the same time, the separated inner and outer rings are reassembled according to the original assembly relationship, which can ensure that the inner and outer rings are used in the same group in multiple uses. Even if deformation occurs, they can still match, thereby improving the service life of the inner and outer rings.

[0081] At this time, the automatic ring-removing mechanism 3 and the film-expanding transport platform 5 are positioned on the left and right sides of the workbench 1. Specifically, the automatic ring-removing mechanism 3 is located on the left side of the middle of the workbench 1, and the film-expanding transport platform 5 is located on the right side of the automatic ring-removing mechanism 3, so that the inner and outer rings removed by the automatic ring-removing mechanism 3 can be smoothly moved to the film-expanding transport platform. The workbench 1 has a groove, and the film-expanding transport platform 5 moves left and right in the groove through a guide rail slider structure. At the same time, a film-tearing mechanism 2 and a material-collecting structure 9 are respectively provided on both sides of the automatic ring-removing mechanism 3. Thus, the automatic ring-removing mechanism 3, the film-tearing mechanism 2, and the material-collecting structure 9 are arranged side by side on the upper side of the workbench 1. A film-transferring mechanism 6 is provided on the side of the film-expanding transport platform 5 and the film-tearing mechanism 2. Meanwhile, a detection mechanism 4 is set on the side of the film transfer mechanism 6. This allows the top release paper and PET film to be easily removed from the film tearing mechanism 2 and moved to the detection mechanism 4. After the detection mechanism 4 completes the detection, the blue film can also be quickly moved to the film expansion transport platform 5, thereby improving the moving efficiency of the blue film. At the same time, the upper film expansion mechanism 7 is fixed to the upper side of the film expansion transport platform 5 by a bracket so as to complete the inner and outer ring pressing with the film expansion transport platform 5. At least part of the film exit structure 8 is set on the upper side of the film expansion transport platform 5 so as to remove the new film expansion ring after pressing from the film expansion transport platform 5. The other end of the film exit structure 8 is close to the receiving structure 9 to collect the new film expansion ring.

[0082] For the chip to be processed, the bottom layer is a blue film (bottom film), the chip is on the top of the blue film, a PET film is covering the chip, and a release paper is covering the top, thus forming a complete product to be expanded.

[0083] At this point, the products to be expanded are piled up together and need to be removed one by one by the film-tearing structure, and the release paper and PET film on the surface need to be removed. Therefore, the film-tearing structure includes a longitudinally arranged moving module. The moving module is equipped with a moving structure (such as a vacuum suction cup) for fixing the products to be expanded. A corresponding release paper tearing structure is provided on the upper side of the worktable 1. At this point, the moving module and the release paper tearing structure adopt existing technical solutions, so they will not be described in detail here.

[0084] After the release paper is removed, a PET film remains on the top of the chip. This PET film has a certain stiffness, making it difficult to remove using existing tear-off structures. Therefore, in this embodiment, as... Figure 14 , Figure 15As shown, the film-tearing mechanism 2 includes a PET film-tearing structure 21. The PET film-tearing structure 21 includes a base 211, a peeling plate 212 on the side of the base 211, and a fixed platform 213 slidably connected on the upper side of the base 211. The fixed platform 213 has a fixing structure 214 for fixing the blue film placed on the fixed platform 213. A fixing tearing structure 215 is provided on the outer side of the peeling plate 212 for clamping the side of the blue film placed on the upper side of the fixed platform 213 and pulling the blue film downward. When the PET film on the upper side of the blue film moves to the peeling plate 212, the PET film and the blue film are partially separated. A tearing structure 216 is provided on the upper side of the fixed platform 213 for tearing the partially separated PET film from the upper side of the blue film. A reset mechanism 217 is provided between the base 211 and the fixed platform 213. When the fixing tearing structure 215 removes the force acting on the blue film, the fixed platform 213 returns to its initial position under the action of the reset structure.

[0085] The base 211 is elongated, and the peeling plate 212 is set on one side of the base 211 (it can be fixed together with the base 211 or at a certain distance). The base 211 and the fixed platform 213 are slidably connected by a guide rail slider structure. At this time, the upper side of the fixed platform 213 is rectangular in shape, and a notch is provided on one side corresponding to the peeling plate 212. The peeling plate 212 is located at the notch. When the blue film is placed on the upper side of the fixed platform 213, part of the blue film is located on the upper side of the peeling plate 212, and part of it extends to the outside of the peeling plate 212 so that the fixing tearing structure 215 on the outside of the peeling plate 212 can fix the blue film.

[0086] Meanwhile, when the base 211 and the fixed platform 213 move relative to each other, the PET film on the upper side of the fixed platform 213 needs to be moved to the peeling plate 212 position so that the PET film and the blue film can be separated at the peeling plate 212 position. Therefore, at this time, the fixed platform 213 is provided with a moving groove at the notch position near the peeling platform. When the base 211 and the fixed platform 213 move relative to each other, the moving groove position of the fixed platform 213 can be moved to coincide with the peeling platform, so that the PET film moves to the peeling platform position and the PET film and the blue film are peeled apart at the peeling platform position. This setting can also reduce the overall volume of the PET film tearing structure 21.

[0087] The reset mechanism 217 is used to reset the position between the fixed platform 213 and the base 211. When the fixed tearing structure 215 pulls the blue film, the fixed platform 213 and the blue film move synchronously, and the fixed platform 213 and the base 211 move relative to each other. When the fixed tearing structure 215 removes the force acting on the blue film, the fixed platform 213 returns to its initial position under the action of the reset structure.

[0088] Specifically, the reset structure includes a guide rod fixed to the fixed platform 213 or the base 211. The base 211 or the fixed platform 213 is provided with a limiting ring, through which the guide rod passes. A reset spring is sleeved on the outside of the guide rod. When the fixed platform 213 moves toward the peeling platform of the base 211, the reset spring is compressed. In this embodiment, the guide rod is fixed to the base 211. A limiting ring is provided on the lower side of the fixed platform 213 and sleeved on the outside of the guide rod. The reset spring is sleeved on the outside of the guide rod, located between the base 211 and the limiting ring. When the fixed tearing structure 215 pulls the blue film downward, relative movement occurs between the fixed platform 213 and the base 211. The fixed platform 213 moves toward the peeling plate 212, and the reset spring is compressed. When the fixed tearing structure 215 is released from pulling the blue film, the fixed platform 213 moves away from the peeling plate 212 under the action of the reset spring, thereby restoring the fixed plate and the base 211 to their initial positions.

[0089] The fixed tearing structure 215 first fixes the blue film and then pulls the blue film downward. In this embodiment, the fixed tearing structure 215 includes a vertical cylinder, the moving end of the vertical cylinder is provided with a clamping cylinder, the moving end of the clamping cylinder is provided with a fixed claw, and the fixed claw is located on the outside of the peeling plate 212. The clamping cylinder is a finger cylinder, and the fixing claw is a clamping part set at the moving end of the finger cylinder. After the blue film is fixed by the fixing claw, the clamping cylinder is controlled by the vertical cylinder to move downward, thereby causing the fixing claw to move downward. This causes the fixed blue film to move downward as well. Since the fixing claw fixes the blue film, it will pull the blue film downward, causing it to move downward on the side of the peeling plate 212. During the downward pulling of the blue film, the fixing plate will be pulled towards the peeling plate 212, causing the PET film on the upper side of the blue film to move towards the peeling plate 212 as well. When it moves to the side of the peeling plate 212, the lower blue film continues to move downward, while the PET film, due to its certain stiffness, will not move downward with the blue film, but will continue to move forward, thereby separating the PET film from the blue film.

[0090] The tearing structure 216 includes a moving structure and tearing claws. The moving structure controls the lateral and vertical movement of the tearing claws. The tearing claws clamp the PET film separated from the blue film, and the moving structure tears the PET film apart from the blue film. Under the action of the horizontal and vertical moving structures, the tearing gripper moves to the outside of the PET film and clamps the PET film at the position where it is separated from the blue film. Then, the movement of the tearing gripper is controlled by the horizontal and vertical moving structures to tear the PET film from the top of the blue film, thus completing the automatic tearing process of the PET film. At this time, the horizontal moving structure is a horizontally arranged horizontal module, and the vertical moving structure is a vertically arranged first cylinder. A vertical moving plate connected to the piston rod of the cylinder is provided on the side plate of the first cylinder. A second cylinder is provided on the side of the vertical moving plate. The piston rod of the second cylinder is equipped with a clamping block. The clamping block moves up and down to form a gripper structure with the vertical moving plate, thereby clamping the PET film. After clamping, the movement of the gripper structure is controlled by the horizontal module and the first cylinder to tear the PET film from the top of the blue film.

[0091] After the blue film is placed on the fixing platform 213, it needs to be fixed on the upper side of the fixing platform 213. This way, when the blue film is pulled on the outside of the peeling plate 212, the entire blue film located on the upper side of the fixing platform 213 will move with the fixing platform 213. Therefore, the fixing structure 214 includes a fixing suction cup located at the fixing plate position. The fixing platform 213 is provided with a through hole that runs vertically through the fixing platform, and the fixing suction cup is located in the through hole. A suction cup is installed on the fixing platform 213. The suction cup is a vacuum suction cup and is not higher than the upper surface of the fixing platform 213. After the blue film is placed on the fixing platform 213, the lower side of the blue film is completely attached to the upper surface of the fixing platform 213. Then, it is fixed to the upper side of the fixing platform 213 by the action of the suction cup. At the same time, in order to prevent the blue film from deforming during the tearing process, a fixing plate is also provided at the notch of the fixing plate to press the blue film tightly. A fixing cylinder is provided on the side of the fixing plate. The fixing cylinder is connected to the fixing plate through a piston rod to control the up and down movement of the fixing plate. The fixing plate presses the blue film tightly on the upper side of the fixing platform 213. Two fixing plates are provided, located on both sides of the peeling plate 212. Under the action of the fixing cylinder, they can be pressed against the upper side of the fixing plate, thereby pressing the blue film on the upper side of the fixing plate. This ensures that the fixing plate and the blue film move together when the blue film is pulled. At the same time, the fixing plates are located on both sides of the peeling plate 212, and when the blue film is placed on the fixing plates, part of the PET is located between the fixing plate and the peeling plate 212. That is, most of the PET is located on the back side of the fixing plate, and only the part that is torn first is located between the fixing plate and the peeling plate 212. In this way, when the blue film is pulled, the PET and most of the blue film will not deform, thus ensuring that the position of the chip on the upper side of the blue film does not change. At the same time, when the blue film is pulled, the blue film moves downward, allowing the PET film between the fixing plate and the peeling plate 212 to quickly move to the position of the peeling plate 212 and separate from the blue film, thereby improving the film tearing efficiency. At the same time, it can be ensured that the position of the chip on the upper side of the blue film does not change during the film tearing process.

[0092] To increase the probability of separation between the blue film and the PET film at the peeling plate 212, the outer side of the peeling plate 212 is provided with an inclined side 2121, the inclined surface of which faces downward. The fixed tearing structure 215 is located outside the inclined side 2121. The PET film is rectangular, with its right angle facing the peeling plate 212. When the PET film and the blue film move simultaneously toward the peeling plate 212, the right angle of the PET film separates from the blue film at the inclined side 2121 of the peeling plate 212. At this time, the inclined side 2121 is not completely downward, but rather inclined downward, that is, inclined toward the fixed tearing structure 215. Thus, when the blue film and the PET film move to the inclined side 2121, the contact between the blue film and the peeling plate 212 is a straight line. This makes it easier for the blue film and the PET film to separate when they reach the end of the peeling plate 212. Meanwhile, the PET film is rectangular, with its right angle facing the peeling plate 212. As the PET film moves to the peeling plate 212, the area it moves onto the peeling plate 212 gradually increases. This ensures that the separation surface between the PET film and the blue film increases from small to large when the PET film separates from the blue film. This guarantees that the PET film will be able to separate from the blue film when it moves to the peeling plate 212. There are no restrictions on the shape of the blue film at this time, and it can be set according to actual needs.

[0093] Thus, after the blue film (with the release paper removed, the chip is located on the upper side of the blue film, and a PET film is placed on the upper side of the chip, with the PET film and blue film sandwiching the chip in the middle) is placed on the upper side of the fixing stage 213, the blue film is fixed by the fixing structure 214, and the fixing and tearing structure 215 clamps the side of the blue film and pulls it downwards. This causes the fixing stage 213 to move towards the peeling plate 212, and the blue film, chip, and PET film all move towards the peeling plate 212. When the PET film moves to the end of the peeling plate 212 (near the inclined side 2121)... During the process, the PET film, due to its stiffness, will not deform, while the blue film continues to move downwards, allowing the PET film to separate from the blue film. After moving a certain distance (but not to the chip position to avoid affecting the chip), the PET film is torn off from the top of the blue film by the tearing structure 216. After the force exerted on the blue film by the fixing tearing structure 215 is removed, the fixing stage 213 returns to its initial position under the action of the reset structure. At this time, the blue film and the chip on the top side also return to their initial positions, thus completing the removal of the PET film.

[0094] The automatic ring-removal mechanism 3 is used to separate the outer and inner rings of the old film expansion ring, and also to remove the waste blue film sandwiched between the inner and outer rings. Specifically, in this embodiment, as follows... Figures 6 to 9As shown, the automatic replacement mechanism also includes a ring-removing base plate 32, and a cover plate 33 is provided on the upper side of the ring-removing base plate 32. A material transfer channel 34 is formed between the cover plate 33 and the worktable 1.

[0095] The cover plate 33 is provided with a first through hole 331 and a second through hole 332. The material rack 31 is located above the first through hole 331. The old film expansion ring to be disassembled in the material rack 31 moves to the material transfer channel 34 through the first through hole 331. The replacement bottom plate is provided with a third through hole 321, located below the second through hole 332.

[0096] The material transfer channel 34 is provided with a first pushing structure 35, which is used to push the old film expansion ring at the material rack 31 from the first through hole 331 to the second through hole 332.

[0097] The pallet structure 36 includes two pallet blocks 361 and a pallet cylinder 362 for controlling the movement of the pallet blocks 361. The pallet blocks 361 are at least partially disposed on the lower side of the second through hole 332. The two pallet blocks 361 are respectively located on both sides of the second through hole 332. The pallet blocks 361 are provided with a first step portion 363 flush with the material transfer channel 34 and a second step portion 364 lower than the first step portion 363. Under the action of the pallet cylinder 362, the pallet blocks 361 move toward or away from the center of the second through hole 332, and the old film expansion ring moves to the first step position through the material transfer channel 34.

[0098] The cover plate 33 has a splitting structure 37 on the upper side of the second through hole 332, which is used to separate the inner ring and outer ring of the old film expansion ring and remove the waste blue film. Under the action of the splitting structure 37, the inner ring is separated from the outer ring and moves to the second step position. Under the action of the splitting structure 37, the waste blue film is separated from the outer ring and moves from the third through hole 321 to the lower side of the replacement base plate. After the support block 361 moves away from the center of the second through hole 332, the outer ring moves from the first step position to the second step position.

[0099] Two discharge guide blocks 38 are provided on the lower side of the ring-disassembly bottom plate 32 to form a discharge guide groove;

[0100] The bottom plate 32 of the ring-removing device is provided with a second pushing structure 39, which pushes the inner ring and outer ring, which have been moved to the second step position, to the position of the film expansion transport platform 5 through the discharge guide groove.

[0101] The old film-expanding ring is placed at position 31 of the material rack, which is located above the first through hole 331. When the first pushing structure 35 moves backward, the old film-expanding ring at the bottom of the material rack 31 moves through the first through hole 331 to position 34. When the first pushing structure 35 moves forward, the old film-expanding ring that has moved to position 34 is moved to position 332 of the second through hole. At this time, the outer ring of the old film-expanding ring is exactly abutting the first step, and the inner ring is on the upper side of the second step, but with a certain gap from the second step. The disassembly structure 37 presses the inner ring downward, so that the inner ring moves downward and separates from the outer ring (waste blue film). The inner ring moves to position 332 of the second step. Under the action of the second pushing structure 39, the inner ring that has moved to position 332 of the second step is pushed out through the discharge guide groove to position 5 of the film-expanding transport platform. After structure 39 pushes out the inner ring, it returns to its original position. The remaining outer ring and waste blue film are at the first step position. The disassembly structure 37 moves downward, thus separating the blue film from the outer ring. The waste blue film is moved out from the third through hole 321. The remaining outer ring is at the first step position. The control block 361 moves outward, and the distance between the two blocks 361 increases, so that the outer ring moves from the first step position to the second step position. Under the action of the second pushing structure 39, the outer ring that has moved to the second step position is pushed out through the discharge guide groove to the film expansion transport platform 5, thus realizing the automated process of disassembling the inner and outer rings of the old film expansion ring and removing the waste blue film. At this time, the disassembled inner and outer rings are reassembled and used according to the original assembly relationship, so as to ensure that the inner and outer rings are used in the same group in multiple uses, and can match even if deformation occurs.

[0102] Both the first and second pushing structures use cylinders to control the movement of the push blocks. The first push block of the first pushing structure is located in the material transfer channel 34, pushing the old film expansion ring at the first through hole 331 to the second through hole 332. The second push block of the second pushing structure is located on the lower side of the ring removal base plate 32, flush with the second step, and can push the inner and outer rings at the second step to the film expansion transport platform 5.

[0103] The splitting structure 37 is used to split the inner ring and outer ring and remove the waste blue film. In this embodiment, the splitting structure 37 includes a pressure-splitting structure 371 and a film-removing structure 372. The pressure-splitting structure 371 includes a pressure-splitting cylinder 3711 fixed on the upper side of the cover plate 33. The piston rod of the pressure-splitting cylinder 3711 is connected to a pressure-splitting rod 3712. When the pressure-splitting rod 3712 moves downward, it acts on the inner ring position of the old film-expanding ring, causing the inner ring to separate from the outer ring. Under the action of the pressure-splitting cylinder 3711, the pressure-splitting rod 3712 moves up and down. When the pressure-splitting rod 3712 moves downward, it abuts against the upper side of the inner ring, thereby causing the inner ring to separate from the outer ring (waste blue film).

[0104] The film removal structure 372 includes a film removal cylinder 3721 fixed to the upper side of the cover plate 33. The piston rod of the film removal cylinder 3721 is connected to a vertical rod 3722. The vertical rod 3722 is located above the center of the third through hole 321. The bottom of the vertical rod 3722 is provided with a pressing structure 3723 that contacts the waste blue film. The pressing structure 3723 moves up and down under the action of the film removal cylinder 3721, thereby separating the waste blue film after the inner ring is removed from the outer ring. Under the action of the film removal cylinder 3721, the pressing structure 3723 moves up and down. At this time, the pressing structure 3723 includes a connecting block provided on the lower side of the vertical rod 3722. The connecting block is provided with multiple connecting grooves around the axis of the vertical rod 3722. The connecting rod is provided with an inclined rod at the position of the connecting groove. A pressure roller is provided on the lower side of the inclined rod. Specifically, three connecting slots are set up, evenly distributed around the vertical rod 3722 with the vertical rod 3722 as the axis. At this time, the pressure roller is at its lowest position, so the pressure roller first contacts the blue film. When the pressure roller continues to descend under the control of the vertical rod 3722, it is closer to the outer ring when it contacts the blue film. At the same time, three pressure rollers are set up so that when the pressure roller moves downward, it can provide a more stable force to the blue film, so that the blue film is not easy to tear when it separates from the outer ring, thus avoiding the blue film sticking to the outer ring after tearing and affecting the normal use of the outer ring.

[0105] At this time, the second through hole 332 is mainly for facilitating the vertical movement of the corresponding parts of the pressure dividing structure 371 and the film removal structure 372. Therefore, the shape of the second through hole 332 is not limited to a circle. It can be set to other shapes according to actual needs. For example, in this embodiment, it can be set to a hole structure with multiple annular processing shapes. It is only necessary to ensure that it can operate normally during the process of downward inner ring and blue film.

[0106] After separating the inner and outer rings of the old expanded film ring, the separated inner and outer rings need to be carried by the expanded film transport platform 5, and the expanded film is completed at the position of the expanded film transport platform 5. Specifically, as follows... Figures 10 to 13 As shown, the film expansion transport platform 5 also includes a movable seat 54, which slides on the upper side of the worktable 1 via a guide rail slider structure. Movable platforms 55 are spaced apart on the upper side of the movable seat 54. Each movable platform 55 includes a first bearing platform 51 and a second bearing platform 52 arranged side-by-side along the moving direction of the movable seat 54.

[0107] The lower expansion membrane structure 53 includes a lifting cylinder 531 fixed to the lower side of the movable seat 54. The piston rod of the lifting cylinder 531 is connected to a lifting plate 532. The lifting plate 532 is located between the movable seat 54 and the movable platform 55. Under the action of the lifting cylinder 531, the lifting plate 532 moves up and down through the annular hole 511 provided in the first bearing platform 51. The lifting plate 532 is provided with a positioning step 533 corresponding to the inner ring. When the inner ring is engaged in the position of the positioning step 533, the inner ring is flush with the upper surface of the lifting plate 532.

[0108] The first carrier platform 51 is provided with a first fixing suction cup 512 for fixing the blue film. When the detected blue film is placed on the first carrier platform 51, the blue film is fixed on the upper side of the first carrier platform 51 by the first fixing suction cup 512.

[0109] The second bearing platform 52 is provided with an outer positioning part 723 that is adapted to the outer ring.

[0110] At this time, the moving platform 55 of the moving seat 54 (including the first bearing platform 51 and the second bearing platform 52) can be moved to the side of the discharge guide block 38 of the automatic ring disassembly mechanism 3 under the action of the guide rail slider, so as to push the inner ring and the outer ring to the positions of the first bearing platform 51 and the second bearing platform 52. The first bearing platform 51 is provided with a lower expansion film structure 53. At this time, the lower expansion film structure 53 includes a positioning step 533 for the inner ring to be engaged. The second bearing platform 52 is provided with an outer positioning part 723 that is adapted to the outer ring. In order to ensure that the inner ring and the outer ring that are moved out of the position of the discharge guide block 38 can be engaged at the positions of the positioning step 533 and the outer positioning part 723, the positioning of the inner ring and the outer ring after disassembly is realized. In preparation for the next film expansion assembly, in order to ensure that the inner and outer rings can be accurately positioned when they move to the corresponding positions, a positioning mechanism is provided on the side of the discharge guide block 38 in this embodiment. This mechanism is used to position the inner ring when the outer ring moves to the corresponding position. Specifically, the positioning mechanism is basically the same as the film removal structure 372. After setting multiple tilting rods, the center positioning of the inner and outer rings can be achieved by the tilting rods. In this way, when the inner and outer rings move to the positioning step 533 and the outer positioning part 723, the accuracy of placing the inner and outer rings on the positioning step 533 and the outer positioning part 723 can be ensured when the corresponding centers are aligned, thereby ensuring that the subsequent inner and outer ring pressing process can be aligned.

[0111] After the inner ring and outer ring are moved to the positions of the first positioning step 533 and the outer positioning part 723, the outer ring needs to be moved to the position of the upper expansion mechanism 7. At the same time, the upper expansion mechanism 7 also needs to press the blue film at the position of the first bearing platform 51 during the expansion process.

[0112] At this time, the upper expansion mechanism 7 includes an upper fixing plate 73 fixed to the upper side of the worktable 1 by a bracket, and the outer ring moving structure 71 includes a first pressing cylinder 711 fixed to the upper side of the upper fixing plate 73. The piston rod of the first pressing cylinder 711 is connected to a pressing plate 712, and the pressing plate 712 has a through hole in the middle.

[0113] The pressure film structure 72 includes a second pressing cylinder 721 fixed to the upper side of the upper fixing plate 73. The piston rod of the second pressing cylinder 721 is connected to a pressing plate 722. The outer side of the pressing plate is provided with an outer positioning part 723 for fixing the outer ring. The pressing plate 722 moves up and down at the through hole position in the middle of the pressing plate 712.

[0114] The clamping plate 712 and the pressing plate 722 are both located on the lower side of the upper fixing plate 73.

[0115] At this time, in order to ensure that the outer ring of the pressing plate 722 can engage with the inner ring of the lower expanding film structure 53 while the blue film is pressed by the pressing plate 712, a through hole is provided in the middle of the pressing plate 712. The pressing plate 722 moves up and down at the through hole position, so that the pressing plate 722 is located inside the pressing plate 712. After the pressing plate 712 presses the blue film, the pressing plate 722 can move downward and abut against the lower expanding film structure 53, thereby engaging the inner ring with the outer ring. Specifically, the pressing plate 712 and the pressing plate 722 are respectively connected by the first pressing cylinder 711 and the second pressing cylinder 722. 21 controls the up and down movement. At this time, the pressing plate 722 is provided with an outer positioning part 723 that engages with the outer ring. The second bearing moving platform 55 is controlled to move to the lower side of the pressing plate 722. Then, the pressing plate 722 is controlled to move downward by the second pressing cylinder 721, so that the outer ring of the second bearing moving platform 55 is engaged with the outer positioning part 723 of the pressing plate 722. At this time, the inner ring is located at the positioning step 533 of the lower expansion film structure 53 of the first bearing platform 51, and the outer ring is located at the outer positioning part 723 of the pressing plate 722 of the pressing film structure 72 of the upper expansion film mechanism 7.

[0116] Under the action of the first pressing cylinder 711, the pressing plate 712 can move up and down. When the first bearing platform 51 moves to the lower side of the pressing plate 712, the pressing plate 712 moves down and can press against the position of the first bearing platform 51. At this time, the through hole of the first bearing platform 51 corresponds to the lower expansion film structure 53. In this way, when the pressing plate 712 moves down, it will not press against the position of the lower expansion film structure 53, that is, it will not affect the blue film and chip at the position of the lower expansion film structure 53.

[0117] Before film expansion, the PET film needs to be removed from the blue film, and the completed movement is moved to the first support platform 51. After moving to the first support platform 51, the blue film is fixed in place by the first fixing suction cup 512. Then, the pressing plate 712 of the first pressing cylinder 711 is controlled to move downward, pressing the blue film firmly to the upper side of the first support platform 51. The lifting cylinder 531 of the lower film expansion structure 53 controls the lifting plate 532 to move upward. At this time, the inner ring is engaged with the positioning step 533 of the lifting plate 532, so the inner ring is also located on the lower side of the blue film. At this time, the outer side of the blue film is pressed by the pressing plate 712 and the first support platform 51. During the upward movement of the lifting plate 532, the blue film is stretched and deformed, thereby increasing the chip spacing on the upper side of the blue film. To achieve film expansion, when the chip spacing increases to the preset requirement, the lifting plate 532 stops moving upward, and the second pressing cylinder 721 controls the pressing plate 722 to move downward, thereby moving the outer ring downward. When the pressing plate 722 and the lifting plate 532 are pressed together, the inner ring and the outer ring can be engaged. At this time, an annular protrusion is provided on the lower side of the pressing plate 722, and the inner side of the annular protrusion is distributed with buckles for engaging and fixing the outer ring. This ensures that when the outer ring is engaged on the lower side of the pressing plate 722, there are no other structures in the middle of the outer ring, so as to facilitate the outer ring and the inner ring to be pressed together. A cutting blade is provided around the pressing plate 722 to remove the blue film and deformed blue film that are pressed between the inner and outer rings. After the outer ring and the inner ring are engaged, the first pressing cylinder 711 and the second pressing cylinder 721 control the pressing plate 712 and the pressing plate 722 to move upward, completing the film expansion process.

[0118] After the inner and outer rings are engaged, the film is cut. At this point, there is still waste blue film remaining from the cut circular film. This waste blue film needs to be removed. In this embodiment, the crystal expansion machine also includes a waste film removal mechanism 74. The waste film removal mechanism 74 includes a rotating rod 741. The upper end of the rotating rod 741 is rotatably connected to the upper fixed plate 73 via a rotating shaft. The lower end of the rotating rod 741 is provided with a removal cylinder 742. The movable end of the removal cylinder 742 is provided with a removal gripper 743. The removal cylinder 742 is arranged perpendicular to the rotating rod 741. The removal cylinder 742 is a finger cylinder. The lower side of the upper fixed plate 73 A horizontal cylinder 744 is provided, and the piston rod of the horizontal cylinder 744 is connected to a horizontal guide rod 745. The horizontal guide rail is connected to the lower side of the upper fixed plate 73 through a guide rail slider structure. A rotating wheel 746 is provided at the outer end of the horizontal guide rod 745. The rotating wheel 746 abuts against the side of the rotating rod 741. The horizontal cylinder 744 controls the rotating rod 741 to rotate around the rotating axis through the horizontal guide rod 745. When the rotating rod 741 is in a vertical state, the removal gripper 743 of the removal cylinder 742 is located on the side of the pressing plate 712 of the upper film expansion mechanism 7, and is used to clamp the waste film on the outer side after the inner ring and the outer ring are pressed together. At this time, a vacuum suction cup is provided on the lower side of the pressing plate 712. After the blue film is cut, the waste blue film moves upward with the pressing plate 712 through the vacuum suction cup. Under the action of the horizontal cylinder 744, the horizontal guide rod 745 moves laterally, so that the rotating rod 741 rotates around the rotating shaft. When the rotating rod 741 is in the vertical state, the removal claw 743 of the removal cylinder 742 is exactly horizontally located on the side of the pressing plate 712. After the waste film is clamped, the horizontal guide rod 745 moves laterally, so that the rotating rod 741 rotates outward around the rotating shaft. In this way, the clamped waste film can be removed from the lower side of the pressing plate 712, thus realizing automatic waste film removal. At this time, a waste port is provided on the worktable 1. After the rotating rod 741 rotates to a specific position (the removal claw 743 is located on the upper side of the waste port), the removal claw 743 of the removal cylinder 742 is released, and the waste blue film falls from the position of the removal claw 743 through the waste port to the lower side of the worktable 1.

[0119] After the PET film is removed from the blue film, an inspection is required between film expansions. Specifically, the inspection mechanism 4 includes an inspection platform 41. An adjustment structure is provided on the lower side of the inspection platform 41 to control and adjust its angle. An inspection camera 42 is provided on the upper side of the inspection platform 41 to detect the angle position of the chip on the blue film placed on the inspection platform 41. The angle position of the chip is determined by the inspection camera 42. When adjustment is needed, the rotation of the inspection platform 41 is controlled by the adjustment structure, thereby adjusting the angle of the blue film and the chip. The adjustment structure can be a rotating module to achieve the angle adjustment of the blue film.

[0120] After the PET film is torn off, the blue film needs to be moved to the inspection mechanism 4. After inspection, it needs to be moved to the first support platform 51. Therefore, in this embodiment, a film transfer mechanism 6 is also provided. The film transfer mechanism 6 includes a film transfer longitudinal moving module 81 set on the upper side of the worktable 1. A vertically arranged film transfer cylinder is provided on the upper side of the film transfer longitudinal moving module 81. The piston rod of the film transfer cylinder is connected to a moving plate. The moving plate is provided with several vacuum suction cups. The vacuum suction cups are used to adsorb and fix the blue film. The film transfer cylinder controls the moving plate to move up and down. The film transfer longitudinal moving module 81 controls the moving plate to move longitudinally, thereby realizing the movement of the blue film between different positions.

[0121] After the film expansion is completed, the new film expansion ring needs to be removed from the lifting plate 532 at the position of the first bearing platform 51. Therefore, in this embodiment, the film exiting structure 8 includes a longitudinally moving module 81 that is longitudinally arranged on the upper side of the worktable 1 via a bracket. The lower side of the longitudinally moving module 81 is provided with a vertical film exiting cylinder 82. The piston rod of the vertical film exiting cylinder 82 is connected to a three-jaw cylinder 83. The moving end of the three-jaw cylinder 83 is provided with a film exiting gripper 84, which is used to remove the new film expansion ring after film expansion from the upper side of the lower film expansion structure 53. At this time, the outer periphery of the lifting plate 532 is provided with an inner groove, which extends to the lower side of the inner ring. The film ejection claw 84 can move into the inner groove. At this time, the film ejection claw 84 is L-shaped. When the film ejection claw 84 moves into the inner groove, the bottom of the film ejection claw 84 abuts against the bottom of the inner ring and the outer ring. After the film ejection claw 84 clamps the expansion ring, the film ejection claw 84 moves upward. The new expansion ring moves upward in the clamped state and is taken out on the upper side of the lifting plate 532. After being taken out, it moves to the outer position of the lifting plate 532 under the action of the longitudinal moving module 81 and is collected by the receiving structure 9. At this time, the receiving structure 9 adopts the existing design scheme, so it will not be described in detail here.

[0122] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0123] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A crystal expander characterized by comprising: The workbench is provided with A film tearing mechanism is used to move the blue film to be expanded and tear off the release paper and PET film on the upper side of the blue film chip; A detection mechanism is used to detect the angle position of the chip on the upper side of the blue film after the release paper and PET film are torn off; An automatic ring disassembling mechanism is provided with a rack for placing old expanded film rings, and the inner ring and outer ring of the old expanded film ring on the rack are disassembled one by one, and the corresponding waste blue film is removed; An expanded film transport platform includes a first bearing platform and a second bearing platform, the first bearing platform is provided with an annular hole, the annular hole is provided with a lower expanded film structure moving up and down, the lower expanded film structure is used to bear the disassembled inner ring, and moves up and down to expand the film, and the second bearing platform is used to bear the disassembled outer ring; A film moving mechanism is used to move the blue film with the release paper and PET film torn off to the position of the detection mechanism, and is used to move the blue film after detection to the position of the first bearing platform, at this time, the blue film is located on the upper side of the inner ring when being moved to the position of the first bearing platform; An upper film expanding mechanism includes a outer ring moving structure and a film pressing structure, the film pressing structure is pressed on the upper side of the first bearing platform, the lower expanded film structure moves up to complete the film expansion, the outer ring moving structure is used to move the outer ring at the position of the second bearing platform to the upper side of the lower expanded film structure, after the film expansion is completed, the outer ring moving structure abuts against the lower expanded film structure, the inner ring and the outer ring are clamped to form a new expanded film ring; An out-of-film structure is used to move the new expanded film ring after the film expansion is completed to the position of a material collecting structure; The automatic ring disassembling mechanism further includes a ring disassembling bottom plate, a cover plate is arranged on the upper side of the ring disassembling bottom plate, and a material moving channel is formed between the cover plate and the workbench, The cover plate is provided with a first through hole and a second through hole, the rack is located on the upper side of the first through hole, the old expanded film ring to be disassembled in the rack moves to the position of the material moving channel through the first through hole, the disassembling bottom plate is provided with a third through hole, and the third through hole is located at the lower side of the second through hole, A first pushing structure is arranged in the material moving channel and is used to push the old expanded film ring at the position of the rack from the position of the first through hole to the position of the second through hole, A supporting plate structure includes two supporting blocks and a supporting plate cylinder controlling the movement of the supporting blocks, the supporting blocks are at least partially arranged at the lower side of the second through hole, the two supporting blocks are respectively located at the two sides of the second through hole, the supporting blocks are provided with a first step portion flush with the material moving channel and a second step portion lower than the first step portion, the supporting blocks move towards or away from the center of the second through hole under the action of the supporting plate cylinder, and the old expanded film ring moves to the first step position through the material moving channel; A disassembling structure is arranged on the upper side of the second through hole of the cover plate and is used to disassemble the inner ring and the outer ring of the old expanded film ring and remove the waste blue film, the inner ring is separated from the outer ring under the action of the disassembling structure and moves to the second step position, the waste blue film is separated from the outer ring under the action of the disassembling structure and moves to the lower side of the disassembling bottom plate through the third through hole, and the outer ring moves from the first step position to the second step position after the supporting blocks move away from the center of the second through hole; Two out-of-material guide blocks are arranged at the lower side of the disassembling bottom plate and form an out-of-material guide groove; A second pushing structure is arranged at the lower side of the disassembling bottom plate and is used to push the inner ring and the outer ring moving to the second step position through the out-of-material guide groove to the position of the expanded film transport platform. The split structure includes a pressure splitting structure and a film removing structure, the pressure splitting structure includes a pressure splitting cylinder fixed on the upper side of the cover plate, the piston rod of the pressure splitting cylinder is connected with a pressure splitting rod, and the pressure splitting rod moves downward to act on the inner ring position of the old expansion film ring, so that the inner ring is separated from the outer ring; The film removing structure includes a film removing cylinder fixed on the upper side of the cover plate, the piston rod of the film removing cylinder is connected with a vertical rod, the vertical rod is located at the upper side of the center of the third through hole, the bottom of the vertical rod is provided with a pressing structure in contact with the waste blue film, and the pressing structure moves up and down under the action of the film removing cylinder, so as to separate the waste blue film after the inner ring is removed from the outer ring.

2. The crystal expander of claim 1, wherein The film tearing mechanism includes a PET film tearing structure, the PET film tearing structure includes a base, the side edge of the base is provided with a stripping plate, the upper side of the base is provided with a slidingly connected fixing table, the fixing table is provided with a fixing structure for fixing the blue film placed on the fixing table, the outer side of the stripping plate is provided with a fixed tearing structure for clamping the side edge position of the blue film placed on the upper side of the fixing table and pulling and moving the blue film downward, when the PET film on the upper side of the blue film moves to the position of the stripping plate, the PET film is partially separated from the blue film, the upper side of the fixing table is provided with a tearing structure for tearing the partially separated PET film from the upper side of the blue film, and the base and the fixing table are provided with a reset mechanism, when the fixed tearing structure cancels the acting force on the blue film, the fixing table returns to the initial position under the action of the reset mechanism.

3. The crystal expander of claim 2, wherein, The outer side of the stripping plate is provided with an inclined side edge, the inclined surface of the inclined side edge faces downward, the fixed tearing structure is located at the outer side of the inclined side edge, the PET film is rectangular, the right angle of the PET film faces one side of the stripping plate, and when the PET film and the blue film move toward the stripping plate at the same time, the right angle of the PET film is separated from the blue film at the position of the inclined side edge of the stripping plate.

4. The wafer expander of claim 1, wherein, The film expanding and transporting carrier also includes a moving seat which slides on the upper side of the workbench through a guide rail sliding block structure, the upper side of the moving seat is provided with a moving platform at intervals, the moving platform includes a first bearing platform and a second bearing platform which are arranged side by side along the moving direction of the moving seat, The lower film expanding structure includes a jacking cylinder fixed on the lower side of the moving seat, the piston rod of the jacking cylinder is connected with a jacking disc, the jacking disc is located between the moving seat and the moving platform, and the jacking disc moves up and down through the annular hole of the first bearing platform under the action of the jacking cylinder, the jacking disc is provided with a positioning step corresponding to the inner ring, and when the inner ring is clamped at the position of the positioning step, the upper surface of the jacking disc is flush with the inner ring. The first bearing platform is provided with a first fixed suction disc for fixing the blue film, and when the detected blue film is placed on the first bearing platform, the blue film is fixed on the upper side of the first bearing platform through the first fixed suction disc; The second bearing platform is provided with an outer positioning part matched with the outer ring.

5. The crystal expander of claim 4, wherein, The upper film expanding mechanism includes an upper fixed plate fixed on the upper side of the workbench through a support, the outer ring moving structure includes a first pressing cylinder fixed on the upper side of the upper fixed plate, the piston rod of the first pressing cylinder is connected with a pressing plate, and the pressing plate is provided with a through hole in the middle The pressing film structure comprises a second pressing cylinder fixed on the upper side of the upper fixed plate, a pressing disc is connected to the piston rod of the second pressing cylinder, an outer positioning part for fixing the outer ring is arranged on the outer side of the pressing plate, the pressing disc moves up and down at the position of the through hole in the middle part of the pressing plate, The pressing plate and the pressing disc are located on the lower side of the upper fixed plate.

6. The wafer expander of claim 5, wherein, The wafer expander further comprises a waste film removing mechanism, the waste film removing mechanism comprises a rotating rod, the upper end of the rotating rod is rotationally connected to the upper fixed plate through a rotating shaft, the lower end of the rotating rod is provided with a removing cylinder, the movable end of the removing cylinder is provided with a removing clamp, the removing cylinder is arranged vertically to the rotating rod, the removing cylinder is a finger cylinder, the lower side of the upper fixed plate is provided with a horizontal cylinder, the piston rod of the horizontal cylinder is connected with a horizontal guide rod, the horizontal guide rod is connected to the lower side of the upper fixed plate through a guide rail sliding block structure, the outer end of the horizontal guide rod is provided with a rotating wheel, the rotating wheel abuts against the side edge of the rotating rod, the horizontal cylinder controls the rotating rod to rotate around the rotating shaft through the horizontal guide rod, when the rotating rod is in the vertical state, the removing clamp of the removing cylinder is located on the side edge of the pressing plate of the upper film expanding mechanism, and is used for clamping the waste film on the outer side of the inner ring and the outer ring after pressing.

7. The wafer expander of claim 1, wherein, The detection mechanism comprises a detection table, the lower side of the detection table is provided with an adjusting structure for controlling the angle position of the detection table, and the upper side of the detection table is provided with a detection camera for detecting the angle position of the chip on the blue film placed on the detection table.

8. The wafer expander of claim 1, wherein, The film output structure comprises a longitudinal movement module arranged on the upper side of the workbench through a support, the lower side of the longitudinal movement module is provided with a vertical film output cylinder, the piston rod of the vertical film output cylinder is connected with a three-jaw cylinder, the moving end of the three-jaw cylinder is provided with a film output clamp for taking out the new expanded film ring from the upper side of the lower film expanding structure after the film expanding is completed.

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