Multi-anode synergistic heterogeneous metal meniscus constraint electrochemical deposition device and method

Abstract

The multi-anode synergistic heterogeneous metal meniscus constraint electrochemical deposition device comprises a vibration isolation system, a displacement control device and a double-electrode system, the vibration isolation system comprises a vibration isolation platform, and a portal frame 5 is connected with the vibration isolation platform; the displacement control device comprises a cathode clamp 13 capable of moving and rotating and a plurality of anode clamps 12, the cathode clamp 13 is connected with the vibration isolation platform, and the anode clamps 12 are rotationally connected with the portal frame 5; the dual-electrode system comprises a cathode substrate 11 and a plurality of liquid storage devices, the cathode substrate 11 is clamped by a cathode clamp 13, the liquid storage devices are clamped by an anode clamp 12, the liquid storage devices are used for storing a plurality of electrolytes, the liquid storage devices are electrically connected with an electrochemical workstation 8, and the cathode substrate 11 is electrically connected with the electrochemical workstation 8; and the plurality of liquid storage devices can respectively generate electrolyte meniscus with the cathode substrate 11 after rotating. Different metal ions are deposited through accurate switching of a multi-anode system, and direct stacking and bonding of different metals at a growth interface are achieved.

Description

Technical Field

[0001] The present invention belongs to the technical field of electrochemical deposition, and in particular relates to a multi-anode coordinated heterogeneous metal curved liquid surface constrained electrochemical deposition device and method. Background Art

[0002] Electrochemical deposition (ECD) is a process that uses an electric field to reduce metal ions in an electrolyte to metal atoms at the surface of a conductive substrate. Due to its high efficiency, low cost, and environmentally friendly nature, this technique is widely used in metal plating, semiconductor manufacturing, and electronic devices. Among the many electrochemical deposition techniques, meniscus-constrained electrochemical deposition (ECD) achieves directional growth of metals within the meniscus region by manipulating the dynamic equilibrium of the solid-liquid-gas three-phase interface. While maintaining the uniformity and controllability advantages of traditional electrochemical deposition, this technique overcomes the limitations of micro- and nanoscale precision. By studying the droplet transport mechanism and liquid properties through fluid dynamics, it achieves precise control of the deposition morphology, significantly improving its applicability for the fabrication of complex microstructures and functional materials in a variety of fields, including metal plating, semiconductor manufacturing, and electronic devices. Furthermore, the stable meniscus ensures repeatability in the deposition process, ensuring consistent size and shape of each structure produced. Compared to other micro- and nanofabrication techniques, ECD is generally simple to operate and has lower equipment costs. Existing meniscus-constrained electrochemical deposition techniques deposit relatively single metals, making it difficult for a single metal to meet the requirements of complex working conditions (such as high strength, corrosion resistance, and electrical / thermal synergy). Co-deposition of multiple metals can form alloys or composite structures, achieving complementary and enhanced performance. Multi-metal co-deposition technology is a core means of breaking through the boundaries of material performance and promoting the upgrading of precision manufacturing. Therefore, a new technical solution is needed to achieve multi-anode collaborative manufacturing of heterogeneous metals to meet the diverse needs of the market. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a multi-anode coordinated heterogeneous metal curved liquid surface constrained electrochemical deposition device and method, which realizes the in-situ deposition and combination of different metals by precisely switching multiple anodes and accurately controlling the curved liquid surface constraint area, and solves the problems of solution cross-contamination and low interface control accuracy in the in-situ deposition of heterogeneous metals.

[0004] A multi-anode coordinated heterogeneous metal curved liquid surface constrained electrochemical deposition device includes a vibration isolation system, a displacement control device and a dual-electrode system, the vibration isolation system includes a vibration isolation platform, and a gantry 5 is connected to the vibration isolation platform; the displacement control device includes a cathode clamp 13 capable of displacement and rotation and several anode clamps 12, the cathode clamp 13 is connected to the vibration isolation platform, and the anode clamp 12 is rotationally connected to the gantry 5; the dual-electrode system includes a cathode base 11 and several liquid storage devices, the cathode clamp 13 clamps the cathode base 11, and the anode clamp 12 clamps the liquid storage device, the several liquid storage devices are used to store several electrolytes, the liquid storage device is electrically connected to the electrochemical workstation 8, and the cathode base 11 is electrically connected to the electrochemical workstation 8; after rotation, the several liquid storage devices can respectively generate electrolyte curved liquid surfaces with the cathode base 11 for electrochemical deposition on the cathode base 11.

[0005] Furthermore, the liquid storage device includes a liquid storage tube 105 for storing electrolyte, the liquid storage tube 105 is fixedly connected to the nozzle 103 through a nut 104 and a rubber sleeve, the anode metal wire 102 is inserted into and immersed in the liquid storage tube 105, the top of the anode metal wire 102 is electrically connected to the electrochemical workstation 8, and the ventilation tube 101 passes through the liquid storage tube 105 from one end, and the ventilation tube 101 is connected to the atmosphere.

[0006] Furthermore, the displacement control device includes a precision Z-axis motion platform 701 mounted on a vibration isolation platform, a precision Y-axis motion platform 702 mounted on the precision Z-axis motion platform 701, a precision X-axis motion platform 703 mounted on the precision Y-axis motion platform 702, a rotational motion platform 704 mounted on the precision X-axis motion platform 703, and a cathode fixture 13 mounted on the rotational motion platform 704. The motion accuracy of the precision Z-axis motion platform 701, the precision Y-axis motion platform 702, the precision X-axis motion platform 703 and the rotational motion platform 704 is 0.01 microns.

[0007] Furthermore, the displacement control device also includes a coarse adjustment Z-axis motion platform 10 installed on the gantry 5, and the anode clamp 12 is rotationally connected to the coarse adjustment Z-axis motion platform 10 through the adapter plate 6. The coarse adjustment Z-axis motion platform 10 is used to adjust the Z-axis position of the nozzle 103.

[0008] Furthermore, the anode metal wire 102 is electrically connected to the electrochemical workstation 8 via a varistor unit 9 .

[0009] Furthermore, the liquid storage tube 105 is formed by drawing a transparent glass tube in contact with the cathode substrate 11 .

[0010] Furthermore, it also includes a visualization system, which includes a CCD camera, a white light source, an optical support and an optical breadboard. The optical breadboard is laid on the gantry 5, and the CCD camera and the white light source are respectively installed on the optical breadboard through the optical supports to monitor the process of electrolyte deposition. The optical breadboard is used to isolate vibrations and provide a stable physical environment.

[0011] Furthermore, the electrolyte includes CuSO4, ZnSO4, NiSO4 and AgNO3.

[0012] A multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition method, using the multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition device according to any one of claims 1 to 8, comprising the following steps, which are performed in sequence:

[0013] Step 1: Prepare several electrolytes and inject the prepared electrolytes into several liquid storage devices respectively;

[0014] Step 2: Clamp the cathode substrate 11 on the rotating motion platform 704 through the cathode clamp 13, and adjust the position of the liquid storage device by coarsely adjusting the Z-axis motion platform 10;

[0015] Step 3: Start the CCD camera and adjust the position of the CCD camera to observe the electrochemical deposition between the cathode substrate 11 and the liquid storage device;

[0016] Step 4: Rotate the anode fixture 12 to move the liquid storage device containing the electrolyte to be deposited to the deposition area;

[0017] Step 5: Start the control software of the electrochemical workstation 8 and control the end surface of the liquid storage tube 105 to contact the cathode substrate 11 via the precision Z-axis motion platform 701, the precision Y-axis motion platform 702, the precision X-axis motion platform 703, the rotational motion platform 704, and the coarse Z-axis motion platform 10 to form a closed circuit.

[0018] Step 6: Control the cathode substrate 11 to move downward via the precision Z-axis motion platform 701 to generate a stable meniscus between the liquid storage tube 105 and the cathode substrate 11;

[0019] Step 7: The electrochemical workstation 8 controls the liquid storage tube 105 to perform electrochemical deposition. When the deposition of the electrolyte is completed, the electrochemical workstation 8 controls the electrochemical deposition to be terminated.

[0020] Step 8: When the deposition of all the electrolytes to be deposited is completed, the electrochemical deposition is terminated; if the deposition of all the electrolytes to be deposited is not completed, the process returns to step 4.

[0021] Furthermore, in the step 2, before the cathode substrate 11 is clamped on the rotating motion platform 704 by the cathode clamp 13 , the cathode substrate 11 is cleaned several times. The cleaning is performed by using an ultrasonic cleaning machine to clean the cathode substrate 11 immersed in acetone solution for several minutes.

[0022] Through the above design scheme, the present invention can bring the following beneficial effects:

[0023] This invention proposes a multi-anode collaborative fabrication method for heterogeneous metal components. By precisely switching the deposition of different metal ions within a micro-reaction zone constrained by a meniscus, the multi-anode system achieves direct stacking and bonding of dissimilar metals at the growth interface. This significantly improves the overall mechanical properties of the component, enhances corrosion resistance, and enhances electrical and thermal conductivity uniformity, providing a breakthrough manufacturing solution for highly reliable, long-life heterogeneous metal structures.

[0024] 2. This invention utilizes a stable microscale meniscus as a dynamic forming mold, confining the electrochemical reaction to a very small area between the liquid reservoir and the deposition front. Combined with precise substrate rotation and axial motion control, it achieves precise point-by-point, layer-by-layer deposition of metal materials in three-dimensional space. Its core breakthrough lies in the ability to directly form independent structures with stringent geometric requirements. This achieves superior dimensional and shape accuracy, improves material utilization, reduces the need for subsequent finishing, and significantly reduces the manufacturing cost and cycle time of complex, irregularly shaped cylindrical components.

[0025] 3. This invention utilizes independent multiple anodes and a zoned liquid supply system, combined with the highly localized reaction characteristics of the meniscus. This enables rapid and clean switching between electrolytes corresponding to different metals, while effectively preventing cross-contamination between solutions through physical isolation. This enables ultra-fine control of heterogeneous material interfaces, ensures high purity of the deposited metal, and supports flexible material design.

[0026] 4. The present invention uses multiple anodes to collaboratively manufacture heterogeneous metals, combining the characteristics of different metals to obtain a composite material with multifunctionality. The combination of multiple metals can produce a synergistic effect and improve the overall performance of the material. In electrocatalytic applications, alloys or composites of multiple metals significantly improve catalytic activity. Compared with the traditional layer-by-layer deposition method, the simultaneous manufacture of multiple metals reduces process steps, reduces production costs, improves efficiency, and reduces costs. The curved liquid surface constrained electrochemical deposition of multiple metals can achieve the preparation of high-performance, multifunctional materials, while being efficient, economical, and environmentally friendly. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of the multi-anode coordinated heterogeneous metal curved liquid surface constrained electrochemical deposition device of the present invention.

[0028] Figure 2Schematic diagram of the structure of the liquid storage device of the present invention.

[0029] Figure 3 Schematic diagram of the anode conversion process of the present invention.

[0030] Figure 4 This is a circuit diagram of the participating reaction of the present invention.

[0031] Among them, 1. First liquid storage device; 101. Ventilation tube; 102. Anode wire; 103. Nozzle; 104. Nut; 105. Liquid storage tube; 2. Second liquid storage device; 3. Third liquid storage device; 4. Fourth liquid storage device; 5. Gantry; 6. Adapter plate; 7. Precision displacement control device; 701. Precision Z-axis motion platform; 702. Precision Y-axis motion platform; 703. Precision X-axis motion platform; 704. Rotary motion platform; 8. Electrochemical workstation; 9. Rheostat unit; 10. Coarse Adjust the Z-axis motion platform; 11. Cathode substrate; 12. Anode fixture; 13. Cathode fixture; R1. Sliding rheostat corresponding to liquid storage device A; R2. Sliding rheostat corresponding to liquid storage device B; R3. Sliding rheostat corresponding to liquid storage device C; R4. Sliding rheostat corresponding to liquid storage device D; Z. Impedance during deposition; M1. Impedance measurement value of liquid storage device A; M2. Impedance measurement value of liquid storage device B; M3. Impedance measurement value of liquid storage device C; M4. Impedance measurement value of liquid storage device D; V. Voltmeter. DETAILED DESCRIPTION

[0032] In order to better understand the purpose, structure and function of the present invention, the multi-anode coordinated heterogeneous metal curved liquid surface constrained electrochemical deposition device and method of the present invention are further described in conjunction with the drawings and embodiments.

[0033] according to Figures 1 to 4 As shown, the present application provides a multi-anode coordinated heterogeneous metal curved liquid surface constrained electrochemical deposition device, including a vibration isolation system, a displacement control device, a dual-electrode system and a visualization system. The vibration isolation system is used to stabilize the localized electrochemical deposition process.

[0034] The vibration isolation system includes a vibration isolation platform and a gantry 5. The gantry 5 is mounted on the vibration isolation platform. The vibration isolation platform is an optical vibration isolation platform for vibration isolation. The gantry 5 is a marble gantry for vibration isolation.

[0035] The displacement control device includes a precision displacement control device 7 and a coarse Z-axis motion platform 10. The precision displacement control device is fixedly connected to the vibration isolation platform, and the coarse Z-axis motion platform 10 is mounted on the gantry 5. The anode fixture 12 is rotatably connected to the coarse Z-axis motion platform 10 via an adapter plate 6. The anode fixture 12 is used to clamp the nozzle 103 and adjust the position and angle of the nozzle 103. The coarse Z-axis motion platform 10 is used to adjust the Z-axis position of the nozzle 103.

[0036] Precision displacement control device 7 includes a precision Z-axis motion platform 701 mounted on a vibration isolation platform, a precision Y-axis motion platform 702 mounted on precision Z-axis motion platform 701, a precision X-axis motion platform 703 mounted on precision Y-axis motion platform 702, and a rotational motion platform 704 mounted on precision X-axis motion platform 703. The motion accuracy of precision Z-axis motion platform 701, precision Y-axis motion platform 702, precision X-axis motion platform 703, and rotational motion platform 704 is 0.01 micron.

[0037] The cathode fixture 13 is mounted on the rotary motion platform 704 and is used to hold the cathode substrate 11. The movement of the precision displacement control device 7 drives the cathode fixture 13 to rotate and displace. The precision displacement control device 7 controls the displacement and rotation of the cathode substrate 11. The precision displacement control device 7 and the coarse Z-axis motion platform 10 cooperate to adjust the relative position between the cathode substrate 11 and the nozzle 103.

[0038] The two-electrode system includes a liquid storage device, an electrochemical workstation 8, a varistor unit 9 and a cathode substrate 11. The two-electrode system is provided with four liquid storage devices, including a first liquid storage device 1, a second liquid storage device 2, a third liquid storage device 3 and a fourth liquid storage device 4.

[0039] The liquid storage device includes a vent tube 101, an anode wire 102, a nozzle 103, a nut 104, and a liquid storage tube 105. The liquid storage tube 105 is formed by drawing a transparent glass tube into contact with a cathode substrate. After the liquid storage tube 105 passes through the nut 104 and a rubber sleeve, the nut 104 is located below the rubber sleeve. The liquid storage tube 105 is fixedly connected to the nozzle 103 through the nut 104 and the rubber sleeve, and the rubber sleeve is located between the nut 104 and the nozzle 103. The vent tube 101 passes through the liquid storage tube 105 from one end, and the vent tube 101 is connected to the atmosphere. The nozzle 103 is clamped by the anode clamp 12, and a nozzle is provided at the bottom of the nozzle 103.

[0040] The liquid storage tube 105 is used to store electrolyte, which includes CuSO4, ZnSO4, NiSO4 and AgNO3. The capacity of the liquid storage tube 105 includes 50 mL. The anode wire 102 is inserted into and immersed in the liquid storage tube 105. The distance between the anode wire 102 and the port of the liquid storage tube 105 is 5 mm, and the anode wire 102 does not extend out of the liquid storage tube 105. The top of the anode wire 102 is electrically connected to the anode interface of the electrochemical workstation 8 through the rheostat unit 9, and the electrochemical workstation 8 is electrically connected to the power supply.

[0041] The cathode substrate 11 is held by a cathode fixture 13 and is a cube with a side length of 15 mm and a thickness of 1 mm. The cathode substrate 11 is electrically connected to the cathode interface of the electrochemical workstation 8 .

[0042] The visualization system includes a CCD camera, a white light source, an optical support, and an optical breadboard. The optical breadboard is placed on the gantry 5. The CCD camera and the white light source are respectively mounted on the optical breadboard through optical supports to monitor the multi-metal synchronous manufacturing process. The optical breadboard is used to provide a stable and vibration-isolated physical environment.

[0043] A multi-anode coordinated heterogeneous metal meniscus-constrained electrochemical deposition method, using the multi-anode coordinated heterogeneous metal meniscus-constrained electrochemical deposition device, comprises the following steps:

[0044] Step 1: Prepare electrolytes and inject different prepared electrolytes into different liquid storage devices using micro syringes;

[0045] Step 2: Clean the cathode substrate 11 and clamp the cathode substrate 11 on the precision displacement control device 7 through the cathode clamp 13, and adjust the position of the liquid storage device by coarse adjustment of the Z-axis motion platform 10;

[0046] Step 3: Start the CCD camera and adjust the observation position of the CCD camera so that the cathode substrate 11 and the liquid storage device are imaged in the CCD camera; start the power supply of the electrochemical workstation 8 and electrically connect the chemical workstation 8 to the two-electrode system;

[0047] Step 4: rotating the anode fixture 12 to transfer the liquid storage device containing the electrolyte to be deposited to the deposition area, wherein the electrolyte includes CuSO4, ZnSO4, NiSO4 and AgNO3;

[0048] Step 5: Start the PStrace control software of the electrochemical workstation 8; control the end surface of the liquid storage tube 105 to contact the cathode substrate 11 through the precision Z-axis motion platform 701, the precision Y-axis motion platform 702, the precision X-axis motion platform 703, the rotational motion platform 704, and the coarse Z-axis motion platform 10 to form a closed loop;

[0049] Step 6: Control the cathode substrate 11 to move downward via the precision Z-axis motion platform 701 to generate a stable meniscus between the liquid storage tube 105 and the cathode substrate 11;

[0050] Step 7: The electrochemical workstation 8 controls the liquid storage tube 105 to perform electrochemical deposition. When the deposition of the electrolyte is completed, the electrochemical workstation 8 controls the electrochemical deposition to be terminated.

[0051] Step 8: When all the electrolytes to be deposited are deposited, the electrochemical deposition is terminated, the multi-anode cooperative heterogeneous metal curved liquid surface constrained electrochemical deposition device is arranged, the liquid storage tube 105 is cleaned, and the electrochemical deposition data is saved; if the deposition of all the electrolytes to be deposited is not completed, return to step 4.

[0052] The step of cleaning the cathode substrate 11 in step 2 includes: before the cathode substrate 11 is placed in the cathode fixture 13, the cathode substrate 11 immersed in the acetone solution is cleaned using an ultrasonic cleaning machine for 5 minutes, and then the acetone solution remaining on the surface of the cathode substrate 11 is blown dry; the cathode substrate 11 immersed in the acetone solution is cleaned using an ultrasonic cleaning machine for 3 minutes, and then the acetone solution remaining on the surface of the cathode substrate 11 is blown dry; the cathode substrate 11 immersed in the acetone solution is cleaned using an ultrasonic cleaning machine for 2 minutes, and then the acetone solution remaining on the surface of the cathode substrate 11 is blown dry.

[0053] It should be understood that although the present application is described according to embodiments, not every embodiment contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0054] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present application and are not used to limit the scope of protection of the present application. Any equivalent embodiments or changes that do not deviate from the technical spirit of the present application should be included in the scope of protection of the present application.

Claims

1. A multi-anode coordinated heterogeneous metal curved liquid surface constrained electrochemical deposition device, comprising a vibration isolation system, a displacement control device and a dual-electrode system, wherein the vibration isolation system comprises a vibration isolation platform, and a gantry (5) is connected to the vibration isolation platform; the displacement control device comprises a cathode clamp (13) capable of displacement and rotation and several anode clamps (12), the cathode clamp (13) is connected to the vibration isolation platform, and the anode clamp (12) is rotationally connected to the gantry (5); the dual-electrode system comprises a cathode base (11) and several liquid storage devices, the cathode clamp (13) clamps the cathode base (11), and the anode clamp (12) clamps the liquid storage device, the several liquid storage devices are used to store several electrolytes, the liquid storage device is electrically connected to the electrochemical workstation (8), and the cathode base (11) is electrically connected to the electrochemical workstation (8); characterized in that After the plurality of liquid storage devices rotate, they can respectively generate electrolyte curved liquid surfaces with the cathode substrate (11) for performing electrochemical deposition on the cathode substrate (11).

2. The multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition device according to claim 1, characterized in that: The liquid storage device comprises a liquid storage tube (105) for storing electrolyte, the liquid storage tube (105) is fixedly connected to the nozzle (103) through a nut (104) and a rubber sleeve, the anode metal wire (102) is inserted into and immersed in the liquid storage tube (105), the top end of the anode metal wire (102) is electrically connected to the electrochemical workstation (8), and the ventilation tube (101) passes through the liquid storage tube (105) from one end, and the ventilation tube (101) is connected to the atmosphere.

3. The multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition device according to claim 2, characterized in that: The displacement control device comprises a precision Z-axis motion platform (701) mounted on a vibration isolation platform, a precision Y-axis motion platform (702) mounted on the precision Z-axis motion platform (701), a precision X-axis motion platform (703) mounted on the precision Y-axis motion platform (702), a rotational motion platform (704) mounted on the precision X-axis motion platform (703), and a cathode fixture (13) mounted on the rotational motion platform (704). The motion accuracy of the precision Z-axis motion platform (701), the precision Y-axis motion platform (702), the precision X-axis motion platform (703), and the rotational motion platform (704) is 0.01 micrometers.

4. The multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition device according to claim 3, characterized in that: The displacement control device further comprises a coarse adjustment Z-axis motion platform (10) mounted on the gantry (5); the anode fixture (12) is rotatably connected to the coarse adjustment Z-axis motion platform (10) via an adapter plate (6); and the coarse adjustment Z-axis motion platform (10) is used to adjust the Z-axis position of the nozzle (103).

5. The multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition device according to claim 4, characterized in that: The anode metal wire (102) is electrically connected to the electrochemical workstation (8) via a rheostat unit (9).

6. The multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition device according to claim 5, characterized in that: The liquid storage tube (105) is formed by drawing a transparent glass tube in contact with a cathode substrate (11).

7. The multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition device according to claim 6, characterized in that: The invention also includes a visualization system, which includes a CCD camera, a white light source, an optical support and an optical breadboard. The optical breadboard is laid on a gantry (5). The CCD camera and the white light source are respectively installed on the optical breadboard through the optical support and are used to monitor the process of electrolyte deposition. The optical breadboard is used to isolate vibrations and provide a stable physical environment.

8. The multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition device according to claim 1, characterized in that: The electrolyte includes CuSO4, ZnSO4, NiSO4 and AgNO3.

9. A multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition method, using the multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition device according to any one of claims 1 to 8, comprising the following steps, which are performed in sequence: Step 1: Prepare several electrolytes and inject the prepared electrolytes into several liquid storage devices respectively; Step 2: Clamp the cathode substrate (11) on the rotating motion platform (704) through the cathode clamp (13), and adjust the position of the liquid storage device by coarsely adjusting the Z-axis motion platform (10); Step 3: starting the CCD camera and adjusting the position of the CCD camera to observe the electrochemical deposition between the cathode substrate (11) and the liquid storage device; Step 4: rotating the anode fixture (12) to move the liquid storage device containing the electrolyte to be deposited to the deposition area; Step 5: Start the control software of the electrochemical workstation (8), and control the end surface of the liquid storage tube (105) to contact the cathode substrate (11) through the precision Z-axis motion platform (701), the precision Y-axis motion platform (702), the precision X-axis motion platform (703), the rotation motion platform (704) and the coarse adjustment Z-axis motion platform (10) to form a closed loop; Step 6: Control the cathode substrate (11) to move downwards by the precision Z-axis motion platform (701) so as to generate a stable meniscus between the liquid storage tube (105) and the cathode substrate (11); Step 7: Control the liquid storage tube (105) to perform electrochemical deposition through the electrochemical workstation (8); and when the deposition of the electrolyte is completed, stop the electrochemical deposition through the electrochemical workstation (8); Step 8: When the deposition of all the electrolytes to be deposited is completed, the electrochemical deposition is terminated; if the deposition of all the electrolytes to be deposited is not completed, the process returns to step 4.

10. The multi-anode coordinated heterogeneous metal meniscus confined electrochemical deposition method according to claim 9, characterized in that: In the second step, the cathode substrate (11) is cleaned several times before being clamped on the rotating motion platform (704) by the cathode clamp (13). The cleaning is performed by using an ultrasonic cleaning machine to clean the cathode substrate (11) immersed in an acetone solution for several minutes.

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