Vacuum chamber flatness and straightness detection device and detection method

Abstract

The invention relates to a vacuum chamber planeness and straightness detection device and method, the device comprises a bearing platform, an XY double-axis motion platform, a detection adjusting device and a fixed support, and the bearing platform comprises a marble platform; the XY double-axis motion platform comprises a Y-axis motion mechanism, an X-axis motion mechanism and an air floating system, the Y-axis motion mechanism executes Y-direction linear motion on the marble platform, the X-axis motion mechanism is installed on the Y-axis motion mechanism and executes X-direction linear motion, and the air floating system provides an air source for the X-axis motion mechanism and the Y-axis motion mechanism; an adjusting cushion block is mounted on the fixed support, and the undulator bracket and the vacuum chamber are mounted on the fixed support; adjusting the cushion block to determine a reference surface; the detection adjusting device comprises a detection support installed on the X-axis movement mechanism, a first sensor, a second sensor and a third sensor, the first sensor and the second sensor correspond to the upper surface and the side face of the vacuum chamber respectively, and the third sensor corresponds to the reference face. According to the invention, long-stroke and high-precision vacuum chamber positioning detection can be realized.

Description

Technical Field

[0001] The present invention relates to the technical field of precision detection devices, and in particular to a device and method for detecting flatness and straightness of a vacuum chamber. Background Art

[0002] In large-scale scientific projects like nuclear fusion devices and particle accelerators, the (U26 / U55) undulator is a critical component. The installation accuracy of its vacuum chamber directly impacts the overall performance of the system. The vacuum chamber is a slender structure (length ≥ 4 meters), and during installation, it must meet stringent requirements of ±0.1mm flatness and ±0.1mm straightness.

[0003] Traditional detection methods rely on manual multi-point measurement or single sensor scanning, which have the following defects: 1. Low measurement efficiency: Manual point-by-point detection takes a long time and is difficult to meet the requirements of modern engineering progress; 2. Limited accuracy: Long-distance measurement is easily affected by environmental vibration, temperature changes and mechanical friction, making it difficult to guarantee a repeatability of ±0.1mm. 3. Poor stability: Traditional detection devices are only suitable for short strokes (usually ≤1 meter) and are prone to displacement deviation during long strokes (over 4 meters); 4. Low degree of automation: Lack of integrated control system, unable to achieve multi-axis coordinated motion and real-time data feedback. Summary of the Invention

[0004] The present invention provides a vacuum chamber flatness and straightness detection device and detection method to solve the above technical problems.

[0005] In order to solve the above technical problems, the present invention provides a vacuum chamber flatness and straightness detection device, comprising a carrying platform, an XY biaxial motion platform, a detection and adjustment device and a fixed support. The carrying platform includes a marble platform and a first adjustment support leg installed at the bottom of the marble platform; The XY dual-axis motion platform includes a Y-axis motion mechanism, an X-axis motion mechanism and an air-floating system. The Y-axis motion mechanism includes a first permanent magnet stator, a first movable air-floating slider and a Y guide rail. The Y guide rail is laid on the upper surface of the marble platform. The first permanent magnet stator is installed between the Y guide rails. The first movable air-floating slider is arranged above the Y guide rail. A first grating scale is installed on the side of the marble platform. A first reader corresponding to the first grating scale is installed inside the first movable air-floating slider. The X-axis motion mechanism includes a base plate, an X guide rail, a second A permanent magnet stator and a second mover air-floating slider, wherein the base plate is mounted on the first mover air-floating slider, the X-guide rail is laid on the upper surface of the base plate, the second permanent magnet stator is mounted between the X-guide rails, the second mover air-floating slider is arranged above the X-guide rail, a second grating scale is mounted on the side of the base plate, and a second reader corresponding to the second grating scale is mounted on the second mover air-floating slider; a plurality of air holes are provided on the inner surfaces of the first mover air-floating slider and the second mover air-floating slider, and the air-floating system is connected to the air holes and provides an air source for the air holes; The bottom of the fixed support is equipped with a second adjustment support leg, the upper part of which is equipped with an adjustment pad. The undulator bracket and the vacuum chamber are installed on the fixed support. There are three adjustment pads, and the three adjustment pads define a reference plane. The detection and adjustment device includes a detection bracket installed on the second mover air-floating slider and a first sensor, a second sensor and a third sensor arranged longitudinally along the detection bracket, the first sensor corresponds to the upper surface of the vacuum chamber, the second sensor corresponds to the side of the vacuum chamber, and the third sensor corresponds to the reference surface.

[0006] Preferably, mechanical hard limits are respectively provided at both ends of the Y guide rail and the X guide rail, and an anti-collision pad is provided on a side of the mechanical hard limit close to the Y guide rail or the X guide rail.

[0007] Preferably, a plurality of photoelectric switches are provided on the marble platform, and the photoelectric switches correspond to the zero position and the limit position of the X-axis and the Y-axis respectively.

[0008] Preferably, the input and output port cables of the Y-axis motion mechanism are fixed and wrapped with silent drag chains.

[0009] Preferably, the air flotation system includes an air compressor, a cold dryer, an oil-water separator and a micro-particle separator which are sequentially connected by pipelines.

[0010] Preferably, a counterweight is installed on the side of the second mover air-floating slider away from the detection and adjustment device.

[0011] Preferably, the detection bracket is also provided with a lateral anti-collision sensor.

[0012] Preferably, the fixed support is further provided with an adjustment mechanism corresponding to the side surface of the marble platform.

[0013] Preferably, an L-shaped leg for fixing the position is also installed at the bottom of the fixed support.

[0014] The present invention also provides a method for detecting flatness and straightness of a vacuum chamber, which uses the above-mentioned device for detecting flatness and straightness of a vacuum chamber, and comprises the following steps: Step 1: Set up a clean shed; Step 2: Install the carrying platform and XY biaxial motion platform in the clean room; Step 3: Check the levelness of the marble platform and adjust the height of the first adjustable support leg until the flatness is less than 0.1 mm; Step 4: Complete the overall installation of the air flotation system and test the stability of the air source; Step 5: Install the fixed support and adjust the parallelism between the fixed support and the marble platform; Step 6: Check and adjust the flatness of the fixed support, and adjust the height of the second adjustable support leg until the flatness is less than 0.1 mm; Step 7: Install the undulator bracket and the vacuum chamber on the fixed support; Step 8: Adjust the X-axis motion mechanism to adjust the first sensor, the second sensor, and the third sensor to be in an effective detection position; Step 9: driving the Y-axis motion mechanism, using the second sensor to perform multi-point measurement on the side surface of the undulator bracket, and adjusting the straightness of the undulator bracket; Step 10: Using the second sensor to perform multi-point measurement on the side of the vacuum chamber and adjust the straightness of the vacuum chamber; Step 11: driving the Y-axis motion mechanism and detecting the flatness of the reference surface using the third sensor; Step 12: On the basis that the flatness of the reference surface meets the requirements, the flatness of the vacuum chamber is measured and adjusted by the first sensor.

[0015] Compared with the prior art, the vacuum chamber flatness and straightness detection device and detection method provided by the present invention have the following advantages: 1. The present invention can achieve ultra-high precision detection, with a comprehensive measurement error of ≤±0.05mm (better than the design requirement of ±0.1mm) and a repeatability of μ level; 2. The present invention takes a short time for a single detection and supports remote automatic / manual dual-mode switching, which can achieve efficient detection; 3. In the present invention, the air flotation system realizes the movement of the Y-axis motion mechanism and the X-axis motion mechanism without mechanical contact wear, the linear motor drive has a long service life and low maintenance cost; 4. The present invention can be adapted to various specifications of vacuum chambers such as U26 / U55, with standardized flange interface design and strong compatibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the three-dimensional structure of a vacuum chamber flatness and straightness detection device in one embodiment of the present invention; Figure 2 This is a schematic diagram of the installation of the Y-axis motion mechanism in a specific embodiment of the present invention; Figure 3 This is a schematic structural diagram of an X-axis motion mechanism in a specific embodiment of the present invention; Figure 4 This is a schematic diagram of the installation of an air flotation system in a specific embodiment of the present invention; Figure 5 This is a schematic diagram of pore distribution in a specific embodiment of the present invention; Figure 6 This is a structural diagram of a fixed support in a specific embodiment of the present invention; Figure 7 This is a schematic diagram of the installation of an undulator bracket and a vacuum chamber in a specific embodiment of the present invention; Figure 8 It is a structural schematic diagram of a detection and adjustment device in a specific embodiment of the present invention; Figure 9 Schematic diagram of a method for detecting flatness and straightness of a vacuum chamber in one embodiment of the present invention.

[0017] In the figure: 001-undulator bracket, 002-vacuum chamber, 003-surface bolt, 004-side bolt; 100-carrying platform, 110-marble platform, 111-photoelectric switch, 120-first adjustment support leg, 200-XY dual-axis motion platform, 210-Y-axis motion mechanism, 211-first permanent magnet stator, 212-first mover air-floating slider, 213-Y guide rail, 214-first grating scale, 215-first reader, 216-air hole, 217-mechanical hard limit, 218-anti-collision gasket, 219-silent drag chain, 220-X-axis motion mechanism, 221-base plate, 222 -X-guide rail, 223-second permanent magnet stator, 224-second mover air-floating slider, 225-second grating scale, 226-second reader, 227-counterweight, 230-air-floating system, 231-air compressor, 232-cold dryer, 233-oil-water separator, 234-micro-particle separator, 300-detection and adjustment device, 310-detection bracket, 311-anti-collision sensor, 320-first sensor, 330-second sensor, 340-third sensor, 400-fixed support, 410-second adjustment support leg, 420-adjustment pad, 430-adjustment mechanism, 440-L-shaped support leg. DETAILED DESCRIPTION

[0018] In order to describe the technical solution of the above invention in more detail, specific embodiments are listed below to demonstrate the technical effects; it should be emphasized that these embodiments are used to illustrate the present invention and are not used to limit the scope of the present invention.

[0019] The vacuum chamber flatness and straightness detection device provided by the present invention is as follows: Figure 1 As shown, it includes a carrying platform 100, an XY biaxial motion platform 200, a detection and adjustment device 300 and a fixed support 400, wherein: The carrying platform 100 includes a marble platform 110 and a first adjustment support leg 120 installed at the bottom of the marble platform 110. The main material of the marble platform 110 is marble, which has the characteristic of high stability. Eight first adjustment support legs 120 are set at the bottom to adjust the height and level of the marble platform 110.

[0020] The XY dual-axis motion platform 200 includes a Y-axis motion mechanism 210, an X-axis motion mechanism 220 and an air flotation system 230. Figure 2The Y-axis motion mechanism 210 includes a first permanent magnet stator 211, a first movable air-floating slider 212 and a Y-guide rail 213. The first permanent magnet stator 211 and the first movable air-floating slider 212 form a permanent magnet linear motor. The Y-guide rail 213 is laid on the upper surface of the marble platform 110. The first permanent magnet stator 211 is installed between the Y-guide rails 213 and is wrapped with stainless steel on the outside. The first movable air-floating slider 212 is arranged above the Y-guide rail 213 to provide power and buoyancy for the Y-axis motion. A first grating scale 214 is installed on the side of the marble platform 110. A first reader 215 corresponding to the first grating scale 214 is installed inside the first movable air-floating slider 212, which can provide real-time feedback of the position during Y-axis motion. According to the feedback data, the driver will perform PI control (resolution 0.1μm). Please refer to Figure 3 The X-axis motion mechanism 220 includes a base plate 221, an X-guide rail 222, a second permanent magnet stator 223, and a second movable air-floating slider 224. The base plate 221 is installed on the first movable air-floating slider 212 and moves synchronously with the first movable air-floating slider 212. The X-guide rail is laid on the upper surface of the base plate. The second permanent magnet stator 223 is installed between the X-guide rails 222. The second movable air-floating slider 224 is arranged above the X-guide rails 222 to provide power and buoyancy for the X-axis motion. A second grating scale 225 is installed on the side of the base plate 221. A second reader 226 corresponding to the second grating scale 225 is installed on the second movable air-floating slider 224 to provide real-time feedback of the X-axis motion information. Please refer to Figure 4 and Figure 5 The inner surfaces of the first and second mover air-floating sliders 212 and 224 are provided with multiple air holes 216. The air-floating system 230 communicates with these air holes 216 and provides an air source for them. Specifically, gas is introduced between the air-floating sliders (including the first and second mover air-floating sliders 212 and 224) and the guide rails (including the X-guide rail 222 and the Y-guide rail 213). The gas is evenly distributed within the narrow gap, forming an air film with a certain load-bearing capacity. This air film isolates the air-floating sliders from the guide rails, preventing direct contact between solid objects and significantly reducing friction. Gas is compressible. When the air-floating sliders are subjected to external impact or vibration, the gas in the air film can be compressed to absorb and disperse some of the energy, providing a buffering and shock-absorbing effect, ensuring the stability and precision of the air-floating sliders. Gas also has viscosity. When the gas flows between the air-floating sliders and the guide rails, the viscous force causes the gas to form a stable flow field distribution. This stable flow field helps maintain the uniformity and stability of the air film, ensuring that the air-floating slider can move smoothly.

[0021] Please focus on Figure 6 and Figure 7 A second adjustment support leg 410 is installed at the bottom of the fixed support 400, and an adjustment pad 420 is installed on the upper part. The undulator bracket 001 and the vacuum chamber 002 are installed on the adjustment pad 420 of the fixed support 400; there are three adjustment pads 420, and the three planes of the adjustment pads 420 can be leveled by a high-precision laser tracker. The detection head collects data from the three planes and fits them into a reference plane.

[0022] Please focus on Figure 7 and Figure 8 The detection and adjustment device 300 includes a detection bracket 310 installed on the second mover air-floating slider 224 and a first sensor 320, a second sensor 330 and a third sensor 340 arranged longitudinally along the detection bracket 310. A plurality of high-precision laser sensors (the first sensor 320, the second sensor 330 and the third sensor 340) are arranged. The first sensor 320 corresponds to the upper surface of the vacuum chamber 002 and is used to detect the flatness of the vacuum chamber 002. The second sensor 330 corresponds to the side of the vacuum chamber 002 and is used to detect the straightness of the vacuum chamber 002. The third sensor 340 corresponds to the reference surface and is used to determine the installation reference of the vacuum chamber 002.

[0023] The present invention can achieve ultra-high precision detection, with a comprehensive measurement error of ≤±0.05mm (better than the design requirement of ±0.1mm) and a repeatability of μ level; the present invention uses the air flotation system 230 to achieve the movement of the Y-axis motion mechanism 210 and the X-axis motion mechanism 220 without mechanical contact wear, and the linear motor drive has a long service life and low maintenance cost; the present invention can be adapted to vacuum chambers of various specifications such as U26 / U55, and the flange interface has a standardized design and strong compatibility.

[0024] In some embodiments, please refer to Figure 2 and Figure 3 Mechanical hard limits 217 are respectively provided at both ends of the Y guide rail 213 and the X guide rail 222 to prevent the corresponding first mover air-floating slider 212 and the second mover air-floating slider 224 from moving too far. The mechanical hard limit 217 is provided with an anti-collision gasket 218 on the side close to the Y guide rail 213 or the X guide rail 222 to play a protective role.

[0025] In some embodiments, please refer to Figure 2The marble platform 110 is equipped with multiple photoelectric switches 111 on each side of the X and Y axes. These switches correspond to the zero position and limit positions (including upper and lower limits) of the X and Y axes, respectively. When the machine is powered on, it automatically checks the zero position. The photoelectric switches 111 at the upper and lower limits indicate the operating limits of the X and Y axes. If the photoelectric switches 111 at the upper and lower limits fail, they are used to monitor, limit, and ensure safe movement.

[0026] In some embodiments, please refer to Figure 2 and Figure 4 The input and output port cables of the Y-axis motion mechanism 210 are fixedly wrapped with a silent drag chain 219, so that when various cables are deformed following the X-axis motion, they have the advantages of low noise and strong wear resistance.

[0027] In some embodiments, please refer to Figure 4 and Figure 5 The flotation system 230 comprises an air compressor 231, a cold dryer 232, an oil-water separator 233, and a microparticle separator 234, all interconnected by pipes. The air compressor 231 provides a 0.6 MPa air source, the cold dryer 232 filters oil mist and water, the oil-water separator 233 performs a secondary filtration process with a 5 μm accuracy, and the microparticle separator performs a tertiary filtration process with a 0.5 μm accuracy. This three-stage filtration ensures a clean air source and, in turn, ensures stable suspension over long Y-axis travel. The gaps between the three inner surfaces of the first mover's air-floating slider 212 and the guide rail are small. Micron-sized pores 216 are evenly distributed on each surface of the slider. A micron-sized dynamic air film is formed between the compressed air and the guide rail, achieving zero-friction suspension. In some embodiments, the flotation system 230 also includes a pressure regulating valve, a pressure sensor, and a flow sensor installed on the first mover flotation slider 212. The pressure regulating valve is used to set the pressure value of the flotation slider, the pressure sensor is used to detect the air pressure, and the flow sensor is used to detect the flow. When the pressure sensor and the flow sensor detect that the pressure and flow meet the set values, the flotation slider can move.

[0028] In some embodiments, please refer to Figure 3 A counterweight block 227 is installed on the side of the second movable air-floating slider 224 away from the detection and adjustment device 300 for adjusting the X-axis balance to ensure that the air-floating slider does not contact the marble platform 110.

[0029] In some embodiments, please refer to Figure 8 The detection bracket 310 is also provided with a lateral anti-collision sensor 311. Since there are water pipe joints at both ends of the vacuum chamber 002, the anti-collision sensor 311 can monitor the distance from the water pipe joints to prevent the detection and adjustment device 300 from colliding with the vacuum chamber 002.

[0030] In some embodiments, please refer to Figure 6 and Figure 7 The fixed support 400 is also provided with an adjustment mechanism 430 corresponding to the side of the marble platform 110. The adjustment mechanism 430 can adjust the front, back, left, and right positions of the fixed support 400 by tightening screws, and then adjust the vacuum chamber 002 fixed thereon to be parallel to the marble platform 110.

[0031] In some embodiments, please refer to Figure 6 and Figure 7 The bottom of the fixed support 400 is also equipped with an L-shaped support leg 440 for fixing the position. Six second adjustment support legs 410 are installed under the fixed support 400 for fine-tuning the height level of the fixed support 400. After fine-tuning, the bolts of the L-shaped support leg 440 are tightened to stabilize the height of the fixed support 400.

[0032] The present invention also provides a method for detecting flatness and straightness of a vacuum chamber, which uses the above-mentioned device for detecting flatness and straightness of a vacuum chamber, and comprises the following steps: Step 1: Set up a clean room to ensure that installation and testing work are carried out in a clean environment.

[0033] Step 2: Install the carrying platform 100 and the XY dual-axis motion platform 200 in the clean booth.

[0034] Step 3: Use a laser measuring instrument to detect the levelness of the marble platform 110 and adjust the height of the first adjustable support leg 120 until the flatness is less than 0.1 mm.

[0035] Step 4: Complete the overall installation of the air flotation system 230 and test the air source stability, ±0.6 MPa.

[0036] Step 5: Install the fixed support 400 and use the adjustment mechanism 430 to adjust the parallelism difference between the fixed support 400 and the marble platform 110 to be controlled within ±1 mm.

[0037] Step 6: Use a laser measuring instrument to detect and adjust the flatness of the fixed support 400, and adjust the height of the six second adjustment support legs 410 at the bottom until the flatness is less than 0.1 mm.

[0038] Step 7: Install the undulator bracket 001 and the vacuum chamber 002 on the fixed support 400 .

[0039] Step 8: Adjust the position of the second movable air-floating slider 224 and the counterweight block 227 on the X-axis motion mechanism 220, adjust the first sensor 320, the second sensor 330 and the third sensor 340 to the effective detection position and ensure that the detection and adjustment device 300 has no collision with the vacuum chamber 002.

[0040] Step 9: The Y-axis motion mechanism 210 is remotely driven by the PLC+servo system, and the first grating ruler 214 monitors the Y-axis motion accuracy in real time. The second sensor 330 is used to perform multi-point measurements on the side of the undulator bracket 001. If the measurement result is unqualified, the straightness of the undulator bracket 001 is adjusted by the adjusting bolt at the bottom of the undulator bracket 001 until its straightness is ≤0.1mm.

[0041] Step 10: Use the second sensor 330 to perform multi-point measurements on the side of the vacuum chamber 002. If the measurement does not meet the requirements, adjust the straightness of the vacuum chamber 002 in the X direction using the adjustment bolts on the undulator bracket 001.

[0042] Step 11: The Y-axis motion mechanism 210 is remotely driven by the PLC+servo system, the first grating ruler 214 monitors the Y-axis motion accuracy in real time, and the third sensor 340 is used to detect the flatness of the three reference surfaces through the double point 3 position, and the readings are fed back to the system.

[0043] Step 12: On the basis that the flatness of the reference surface meets the requirements, the Y-axis motion mechanism 210 is remotely driven, and the flatness of the vacuum chamber 002 is measured and adjusted to ≤0.1 mm through the first sensor 320 .

[0044] By adopting the above method, a single detection takes a short time, supports remote full-automatic / manual dual-mode switching, and can achieve efficient detection.

[0045] Specifically, the installation instructions for the undulator and vacuum chamber 002 are as follows: 1. The undulator bracket 001 is pre-installed on site.

[0046] 2. Vacuum chamber 002 and vacuum chamber bracket (not shown) are pre-installed by the manufacturer and shipped after passing the inspection.

[0047] 3. Receive vacuum chamber 002 on site and conduct leak detection.

[0048] 4. Connect the vacuum chamber 002 and the undulator bracket 001 with multiple sets of bolts.

[0049] 5. After installation, perform flatness and straightness inspection.

[0050] like Figure 9As shown in the figure, the flatness test method for vacuum chamber 002 is as follows: bolt 003 positions on each surface of the vacuum chamber 002 are used as measuring points (two points in a group) to form a plane for flatness measurement. The flatness measurement accuracy is ±0.1mm. The straightness test method for vacuum chamber 002 is as follows: bolt 004 positions on each side of the vacuum chamber 002 are used to form a straight line for straightness measurement. The straightness measurement accuracy is ±0.1mm.

[0051] In summary, the present invention provides a vacuum chamber flatness and straightness detection device and detection method, which includes a carrying platform 100, an XY biaxial motion platform 200, a detection and adjustment device 300 and a fixed support 400, wherein the carrying platform 100 includes a marble platform 110 and a first adjustment support leg 120 installed at the bottom of the marble platform 110; the XY biaxial motion platform 200 includes a Y-axis motion mechanism 210, an X-axis motion mechanism 220 and an air flotation system 230, wherein the Y-axis motion mechanism 210 includes a first permanent magnet stator 211, a first mover air flotation slider 212 and a Y guide rail 213, wherein the Y guide rail 213 is paved with a plurality of movable parts. On the upper surface of the marble platform 110, the first permanent magnet stator 211 is installed between the Y guide rails 213, the first movable air-floating slider 212 is arranged above the Y guide rails 213, the side of the marble platform 110 is installed with a first grating scale 214, and the first movable air-floating slider 212 is internally installed with a first reader 215 corresponding to the first grating scale 214; the X-axis motion mechanism 220 includes a base plate 221, an X-guide rail 222, a second permanent magnet stator 223 and a second movable air-floating slider 224, the base plate 221 is installed on the first movable air-floating slider 212, the X-guide rail is laid on the On the upper surface of the base plate, the second permanent magnet stator 223 is installed between the X guide rails 222, the second mover air-floating slider 224 is arranged above the X guide rails 222, a second grating scale 225 is installed on the side of the base plate 221, and a second reader 226 corresponding to the second grating scale 225 is installed on the second mover air-floating slider 224; the inner surfaces of the first mover air-floating slider 212 and the second mover air-floating slider 224 are provided with a plurality of air holes 216, the air-floating system 230 is connected to the air holes 216 and provides an air source for the air holes 216; a second adjustment support leg 410 is installed at the bottom of the fixed support 400, An adjustment pad 420 is installed on the upper part, and the undulator bracket 001 and the vacuum chamber 002 are installed on the adjustment pad 420 of the fixed support 400; the three adjustment pads 420 are used to determine a reference plane; the detection and adjustment device 300 includes a detection bracket 310 installed on the second mover air-floating slider 224 and a first sensor 320, a second sensor 330 and a third sensor 340 arranged longitudinally along the detection bracket 310, the first sensor 320 corresponds to the upper surface of the vacuum chamber 002, the second sensor 330 corresponds to the side of the vacuum chamber 002, and the third sensor 340 corresponds to the reference plane.The present invention can achieve ultra-high precision detection, with a comprehensive measurement error of ≤±0.05mm (better than the design requirement of ±0.1mm) and a repeatability of μ level; the present invention uses the air flotation system 230 to achieve the movement of the Y-axis motion mechanism 210 and the X-axis motion mechanism 220 without mechanical contact wear, and the linear motor drive has a long service life and low maintenance cost; the present invention can be adapted to vacuum chambers of various specifications such as U26 / U55, and the flange interface has a standardized design and strong compatibility.

[0052] Obviously, those skilled in the art may make various changes and modifications to the invention without departing from the spirit and scope of the invention. Thus, if such changes and modifications fall within the scope of the claims and their equivalents, the present invention is intended to include such changes and modifications.

Claims

1. A vacuum chamber flatness and straightness detection device, characterized in that: It includes a load-bearing platform, an XY dual-axis motion platform, a detection and adjustment device, and a fixed support. The carrying platform includes a marble platform and a first adjustment support leg installed at the bottom of the marble platform; The XY dual-axis motion platform includes a Y-axis motion mechanism, an X-axis motion mechanism and an air-floating system. The Y-axis motion mechanism includes a first permanent magnet stator, a first movable air-floating slider and a Y guide rail. The Y guide rail is laid on the upper surface of the marble platform. The first permanent magnet stator is installed between the Y guide rails. The first movable air-floating slider is arranged above the Y guide rail. A first grating scale is installed on the side of the marble platform. A first reader corresponding to the first grating scale is installed inside the first movable air-floating slider. The X-axis motion mechanism includes a base plate, an X guide rail, a second A permanent magnet stator and a second mover air-floating slider, wherein the base plate is mounted on the first mover air-floating slider, the X-guide rail is laid on the upper surface of the base plate, the second permanent magnet stator is mounted between the X-guide rails, the second mover air-floating slider is arranged above the X-guide rail, a second grating scale is mounted on the side of the base plate, and a second reader corresponding to the second grating scale is mounted on the second mover air-floating slider; a plurality of air holes are provided on the inner surfaces of the first mover air-floating slider and the second mover air-floating slider, and the air-floating system is connected to the air holes and provides an air source for the air holes; The bottom of the fixed support is equipped with a second adjustment support leg, the upper part is equipped with an adjustment pad, and the undulator bracket and the vacuum chamber are installed on the fixed support; there are three adjustment pads, and the three adjustment pads determine a reference surface; The detection and adjustment device includes a detection bracket installed on the second mover air-floating slider and a first sensor, a second sensor and a third sensor arranged longitudinally along the detection bracket, the first sensor corresponds to the upper surface of the vacuum chamber, the second sensor corresponds to the side of the vacuum chamber, and the third sensor corresponds to the reference surface.

2. The vacuum chamber flatness and straightness detection device according to claim 1, characterized in that: Mechanical hard limits are respectively provided at both ends of the Y guide rail and the X guide rail, and an anti-collision gasket is provided on a side of the mechanical hard limit close to the Y guide rail or the X guide rail.

3. The vacuum chamber flatness and straightness detection device according to claim 1, wherein: The marble platform is provided with a plurality of photoelectric switches, which correspond to the zero position and the limit position of the X-axis and the Y-axis respectively.

4. The vacuum chamber flatness and straightness detection device according to claim 1, wherein: The input and output port cables of the Y-axis motion mechanism are fixed and wrapped with silent drag chains.

5. The vacuum chamber flatness and straightness detection device according to claim 1, wherein: The air flotation system comprises an air compressor, a cold dryer, an oil-water separator and a micro-matter separator which are sequentially connected by pipelines.

6. The vacuum chamber flatness and straightness detection device according to claim 1, wherein: A counterweight is installed on the side of the second mover air-floating slider away from the detection and adjustment device.

7. The vacuum chamber flatness and straightness detection device according to claim 1, wherein: The detection bracket is also provided with a lateral anti-collision sensor.

8. The vacuum chamber flatness and straightness detection device according to claim 1, wherein: The fixed support is also provided with an adjustment mechanism corresponding to the side surface of the marble platform.

9. The vacuum chamber flatness and straightness detection device according to claim 1, wherein: An L-shaped support leg for fixing the position is also installed at the bottom of the fixed support.

10. A method for detecting flatness and straightness of a vacuum chamber, using the device for detecting flatness and straightness of a vacuum chamber according to any one of claims 1 to 9, characterized in that: The steps include: Step 1: Set up a clean shed; Step 2: Install the carrying platform and XY biaxial motion platform in the clean room; Step 3: Check the levelness of the marble platform and adjust the height of the first adjustable support leg until the flatness is less than 0.1 mm; Step 4: Complete the overall installation of the air flotation system and test the stability of the air source; Step 5: Install the fixed support and adjust the parallelism between the fixed support and the marble platform; Step 6: Check and adjust the flatness of the fixed support, and adjust the height of the second adjustable support leg until the flatness is less than 0.1 mm; Step 7: Install the undulator bracket and the vacuum chamber on the fixed support; Step 8: Adjust the X-axis motion mechanism to adjust the first sensor, the second sensor, and the third sensor to be in an effective detection position; Step 9: driving the Y-axis motion mechanism, using the second sensor to perform multi-point measurement on the side surface of the undulator bracket, and adjusting the straightness of the undulator bracket; Step 10: Using the second sensor to perform multi-point measurement on the side of the vacuum chamber and adjust the straightness of the vacuum chamber; Step 11: driving the Y-axis motion mechanism and detecting the flatness of the reference surface using the third sensor; Step 12: On the basis that the flatness of the reference surface meets the requirements, the flatness of the vacuum chamber is measured and adjusted by the first sensor.

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