Constant-temperature platform based on glass sheet laser processing and processing method

Abstract

The invention discloses a constant-temperature platform based on glass sheet laser processing and a processing method.The constant-temperature platform comprises a processing platform body, a plurality of electric heating rods, a plurality of temperature sensors, a temperature controller and a driving device, the processing platform body is arranged at the output end of the driving device, and the driving device drives the processing platform body to move; the electric heating rods are evenly distributed in the machining platform, and one ends of the electric heating rods stretch out to be electrically connected with the temperature controller. The temperature sensors are uniformly distributed on the surface of the processing platform and are electrically connected with the temperature controller; and the temperature sensor is used for detecting the temperature of the glass sheet on the processing platform. According to the invention, the glass sheet can be preheated before laser processing, and the temperature of the glass sheet is kept stable in the processing process, so that warping and cracking of the glass sheet caused by sudden temperature change generated by laser processing are effectively reduced, the high-precision requirement on glass sheet processing is ensured, and the processing quality and the yield are effectively improved.

Description

Technical Field

[0001] The present invention relates to glass sheet laser processing equipment, and in particular to a constant temperature platform and a processing method based on glass sheet laser processing. Background Art

[0002] In the current field of laser processing, there are many challenges in processing brittle materials such as glass. This is especially true in cutting-edge applications, such as the production of through-glass vias (TGVs) on glass substrates in advanced semiconductor packaging. The instantaneous high concentration of energy during laser processing causes a sudden change in the local temperature of the material, generating significant thermal stress within the material. This can easily cause the material to warp and crack, severely restricting processing quality and yield. Traditional equipment attempts to alleviate thermal stress with the help of auxiliary heat dissipation, but this cannot fundamentally address the problem of rapid temperature changes. Furthermore, traditional laser processing platforms lack a preheating function for the material, making it difficult to achieve a stable temperature before processing, further exacerbating the impact of thermal stress on processing quality.

[0003] At the same time, TGV technology, a key technology in fields such as advanced semiconductor packaging, places stringent demands on the quality and precision of glass processing. While the current mainstream TGV hole-forming technology, laser-induced etching, offers certain advantages, it also faces challenges such as glass damage caused by temperature fluctuations during processing. Summary of the Invention

[0004] The purpose of the present invention is to provide a constant temperature platform based on glass sheet laser processing, which can preheat the glass sheet before laser processing and maintain the temperature of the glass sheet stable during the processing, effectively reducing the warping and cracking of the glass sheet caused by the sudden temperature change caused by laser processing, ensuring the high precision requirements for glass sheet processing, and effectively improving the processing quality and yield rate.

[0005] Another object of the present invention is to provide a method for laser processing a glass sheet using a constant temperature platform for laser processing of the glass sheet, which has high precision in processing the glass sheet and effectively improves the processing quality and yield rate.

[0006] In order to achieve the above-mentioned objectives, the constant temperature platform based on glass sheet laser processing provided by the present invention includes a processing platform, multiple electric heating rods, multiple temperature sensors, a temperature controller and a driving device. The processing platform is arranged at the output end of the driving device, and the driving device drives the processing platform to move; the electric heating rods are evenly distributed inside the processing platform and one end extends out to be electrically connected to the temperature controller; the temperature sensors are evenly distributed on the surface of the processing platform and are electrically connected to the temperature controller; the temperature sensors detect the temperature of the glass sheet on the processing platform, and the temperature controller controls the heating power of the electric heating rod corresponding to the area where the temperature sensor is located according to the temperature of each temperature sensor, so that the temperature of each area of ​​the processing platform and its glass sheet remains the same and stable.

[0007] Compared to existing technologies, this invention preheats the processing platform using multiple electric heating rods evenly positioned on the processing platform, ensuring that the glass sheet reaches the appropriate temperature before processing. Furthermore, multiple temperature sensors are evenly positioned on the processing platform, monitoring the temperature of each area of ​​the glass in real time. This allows the power of each electric heating rod to be controlled via a thermostat. The temperature sensors, thermostat, and electric heating rods work together to maintain a stable temperature on the processing platform, thereby ensuring stable temperatures in all areas of the glass sheet. This effectively reduces the sudden temperature fluctuations caused by laser processing, reduces thermal stress within the glass, and significantly reduces problems such as glass warping and cracking. This ensures high-precision processing of the glass sheet, improving processing quality and yield.

[0008] Preferably, the constant temperature platform based on glass sheet laser processing also includes a negative pressure providing device, a plurality of suction holes are provided on the surface of the processing platform, a negative pressure cavity is provided in the processing platform, the suction holes are connected to the negative pressure cavity, and the negative pressure providing device is connected to the negative pressure cavity to provide negative pressure to the suction holes through the negative pressure cavity, thereby positioning the glass sheet on the surface of the processing platform.

[0009] Preferably, the drive device includes a transverse drive mechanism and a longitudinal drive mechanism. The longitudinal drive mechanism is disposed at the output end of the transverse drive mechanism to drive the processing platform longitudinally, while the transverse drive mechanism drives the processing platform transversely. Utilizing the transverse and longitudinal drive mechanisms to drive the processing platform, the required precision for glass processing and positioning for cutting complex patterns can be achieved, ensuring processing accuracy and meeting the stringent requirements of fields such as advanced semiconductor packaging.

[0010] Specifically, the driving device further includes a vertical driving mechanism, which is arranged at the output end of the longitudinal driving mechanism to drive the processing platform to move vertically.

[0011] Preferably, the processing platform is provided with a limit bar, which encloses an accommodating area for accommodating the glass sheet. The limit bar can quickly and accurately place the glass sheet on the processing platform, improving the convenience of loading, unloading and positioning the glass sheet.

[0012] Preferably, the constant temperature platform based on glass sheet laser processing further comprises a laser head, and the laser head is arranged above the processing platform for laser processing of the glass sheet.

[0013] A method for laser processing a glass sheet using a constant temperature platform comprises the following steps: placing a glass sheet to be processed on the processing platform, and positioning the glass sheet to be processed on the processing platform using a negative pressure providing device; starting an electric heating rod to heat the processing platform according to a preset temperature to preheat the glass sheet to be processed; monitoring the temperature of various areas of the glass sheet to be processed using a plurality of temperature sensors, and feeding back the temperature parameters to a temperature controller, and controlling the power of the electric heating rod corresponding to the area through the temperature controller to keep the temperature of the processing platform and various areas of the glass sheet to be processed uniform and stable; driving the processing platform using a driving device to move the glass sheet to be processed to below a laser head; and processing the glass sheet to be processed using the laser head.

[0014] Preferably, the last step further includes the following steps: presetting a pattern to be processed on the glass sheet to be processed; causing the driving device to move according to the set pattern, and using laser induction to modify a specific area of ​​the glass sheet to be processed; and wet-etching the glass sheet in the modified area.

[0015] Preferably, after the laser processing is completed, a step of naturally cooling the glass sheet is also included. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural diagram of the constant temperature platform based on glass sheet laser processing of the present invention.

[0017] Figure 2 It is a side view of the constant temperature platform based on glass sheet laser processing of the present invention.

[0018] Figure 3 It is a flow chart of the laser processing method for glass sheets of the present invention. DETAILED DESCRIPTION

[0019] In order to explain the technical content, structural features, achieved objectives and effects of the present invention in detail, the following is a detailed description in conjunction with the embodiments and the accompanying drawings.

[0020] See also Figure 1 and Figure 2The present invention relates to a constant temperature platform 100 for laser processing of glass sheets, comprising a processing platform 1, multiple electric heating rods 2, multiple temperature sensors 3, a temperature controller 4, and a drive unit 5. The processing platform 1 is mounted at the output end of the drive unit 5, which drives the processing platform 1. The electric heating rods 2 are evenly distributed within the processing platform 1, with one end extending outward and electrically connected to the temperature controller 4. The temperature sensors 3 are evenly distributed on the surface of the processing platform 1 and electrically connected to the temperature controller 4. The temperature sensors 3 detect the temperature of the glass sheet 200 on the processing platform 1. The temperature controller 4 controls the heating power of the electric heating rods 2 corresponding to the area where the temperature sensor 3 is located based on the temperature of each temperature sensor 3, thereby maintaining a consistent and stable temperature across all areas of the processing platform 1 and its glass sheet 200. The temperature controller 4 precisely adjusts the heating power of the electric heating rods 2, thereby achieving precise temperature control over all areas of the processing platform 1 and its glass sheet 200, ensuring that the temperature of the processing platform 1 remains stable within a set range.

[0021] See also Figure 2 The constant temperature platform 100 based on glass sheet laser processing also includes a negative pressure providing device 6. A plurality of suction holes 11 are provided on the surface of the processing platform 1. A negative pressure cavity 12 is provided inside the processing platform 1. The suction holes 11 are communicated with the negative pressure cavity 12. The negative pressure providing device 6 is connected to the negative pressure cavity 12 to provide negative pressure to the suction holes 11 through the negative pressure cavity 12, thereby positioning the glass sheet 200 on the surface of the processing platform 1.

[0022] See also Figure 1 and Figure 2 The drive device 5 includes a transverse drive mechanism 51 and a longitudinal drive mechanism 52, each of which is a linear motor. The longitudinal drive mechanism 52 is disposed at the output end of the transverse drive mechanism 51 to drive the processing platform 1 longitudinally, while the transverse drive mechanism 51 drives the processing platform 1 transversely. Using the transverse drive mechanism 51 and the longitudinal drive mechanism 52 to drive the processing platform 1, the required precision for glass processing and positioning for cutting complex patterns can be achieved, ensuring processing accuracy and meeting the stringent requirements of fields such as advanced semiconductor packaging.

[0023] See also Figure 1 and Figure 2 In another preferred embodiment, the driving device 5 further includes a vertical driving mechanism 53, and the vertical driving mechanism 53 is arranged at the output end of the longitudinal driving mechanism 52 to drive the processing platform 1 to move vertically.

[0024] Please refer to Figure 1 and Figure 2 The processing platform 1 is provided with a limiting strip 13, which encloses an accommodating area for accommodating the glass piece 200. The limiting strip 13 can quickly and accurately place the glass piece 200 on the processing platform 1, improving the convenience of loading, unloading and positioning the glass piece 200.

[0025] See also Figure 1 and Figure 2 The constant temperature platform 100 based on glass sheet laser processing also includes a laser head 7, and the laser head 7 is arranged above the processing platform 1 to laser process the glass sheet 200. The laser head 7 described in the present invention can adopt a Bessel laser cutting head. The Bessel laser cutting head has unique beam characteristics and can achieve high-quality cutting effects. It is particularly suitable for the processing of brittle materials such as glass. In glass processing related to TGV technology, the Bessel laser cutting head can be used for preliminary cutting of glass and fine processing in conjunction with laser induced etching. For example, when making glass through holes, pre-cutting can be performed with a Bessel laser cutting head, and then the through holes can be precisely formed using laser induced etching technology. Its high-quality cutting effect can effectively reduce damage to the glass edge and improve product quality.

[0026] See also Figure 3 The present invention provides a method for laser processing a glass sheet 200 using a constant temperature platform 100, comprising the following steps: In step S1 , a glass sheet 200 to be processed is placed on a processing platform 1 , and a negative pressure providing device 6 is used to position the glass sheet 200 to be processed on the processing platform 1 .

[0027] In step S2 , the electric heating rod 2 is started to heat the processing platform 1 according to a preset temperature so as to preheat the glass sheet 200 to be processed.

[0028] In step S3, the temperature of each area of ​​the glass sheet 200 to be processed is monitored by multiple temperature sensors 3, and the temperature parameters are fed back to the temperature controller 4. The temperature controller 4 controls the power of the electric heating rod 2 corresponding to the area to ensure that the temperature of the processing platform 1 and each area of ​​the glass sheet 200 to be processed remains uniform and stable.

[0029] In step S4 , the processing platform 1 is driven by the driving device 5 so that the glass sheet 200 to be processed moves to the bottom of the laser head 7 .

[0030] Step S5, processing the glass sheet 200 using the laser head 7. This step also includes the following steps: presetting a pattern to be processed on the glass sheet 200; moving the drive device 5 according to the set pattern to modify a specific area of ​​the glass sheet 200 using laser induction; and wet etching the glass sheet 200 in the modified area.

[0031] In step S6, after laser processing, the glass sheet 200 is naturally cooled. After the glass sheet 200 cools to room temperature, the vacuum suction device is turned off and the processed glass sheet 200 is removed. In TGV technology applications, such as after the production of through-glass holes or the cutting of special glass patterns, a proper cooling process can further stabilize the internal structure of the glass, reduce residual stress, and improve product reliability and stability.

[0032] In step S7, the processed glass sheet 200 is quality inspected to check for warping, cracking, and other issues. The processing accuracy is measured to evaluate the processing results. Based on the inspection results, the processing parameters and platform operating status are optimized and adjusted to further improve processing quality and efficiency.

[0033] Compared to the prior art, the present invention achieves a desired temperature for the glass sheet 200 by evenly disposing multiple electric heating rods 2 on the processing platform 1. These rods preheat the processing platform 1, ensuring that the glass sheet 200 reaches a suitable temperature before processing. Furthermore, multiple temperature sensors 3 are evenly distributed on the processing platform 1, monitoring the temperature of each region of the glass in real time. This allows the power of each electric heating rod 2 to be controlled via a thermostat 4. The temperature sensors 3, thermostat 4, and electric heating rods 2 work together to maintain a stable temperature on the processing platform 1, thereby ensuring stable temperatures in each region of the glass sheet 200. This effectively reduces the sudden local temperature fluctuations caused by laser processing, reduces thermal stress within the glass, and significantly reduces problems such as glass warping and cracking. This ensures high-precision processing of the glass sheet 200, improving processing quality and yield.

[0034] The above disclosure is merely a preferred embodiment of the present invention, which certainly cannot be used to limit the scope of the present invention. Therefore, equivalent changes made within the scope of the present invention are still within the scope of the present invention.

Claims

1. A constant temperature platform based on glass sheet laser processing, characterized by: The invention comprises a processing platform, a plurality of electric heating rods, a plurality of temperature sensors, a temperature controller and a driving device, wherein the processing platform is arranged at the output end of the driving device, and the driving device drives the processing platform to move; the electric heating rods are evenly distributed inside the processing platform and one end extends out to be electrically connected to the temperature controller; the temperature sensors are evenly distributed on the surface of the processing platform and are electrically connected to the temperature controller; the temperature sensors detect the temperature of the glass sheet on the processing platform, and the temperature controller controls the heating power of the electric heating rod corresponding to the area where the temperature sensor is located according to the temperature of each temperature sensor, so that the temperature of each area of ​​the processing platform and its glass sheet remains the same and stable.

2. The constant temperature platform for glass sheet laser processing according to claim 1, characterized in that: The constant temperature platform based on glass sheet laser processing also includes a negative pressure providing device. The surface of the processing platform is provided with a plurality of suction holes. A negative pressure cavity is provided inside the processing platform. The suction holes are connected to the negative pressure cavity. The negative pressure providing device is connected to the negative pressure cavity to provide negative pressure to the suction holes through the negative pressure cavity, thereby positioning the glass sheet on the surface of the processing platform.

3. The constant temperature platform for glass sheet laser processing according to claim 1, characterized in that: The driving device includes a transverse driving mechanism and a longitudinal driving mechanism. The longitudinal driving mechanism is arranged at the output end of the transverse driving mechanism to drive the processing platform to move longitudinally, and the transverse driving mechanism drives the processing platform to move transversely.

4. The constant temperature platform for glass sheet laser processing according to claim 3, characterized in that: The driving device further includes a vertical driving mechanism, which is arranged at the output end of the longitudinal driving mechanism to drive the processing platform to move vertically.

5. The constant temperature platform for glass sheet laser processing according to claim 1, characterized in that: The processing platform is provided with limiting strips, which enclose an accommodating area for accommodating the glass sheet.

6. The constant temperature platform for glass sheet laser processing according to claim 1, characterized in that: The constant temperature platform based on glass sheet laser processing further includes a laser head, which is arranged above the processing platform to perform laser processing on the glass sheet.

7. A method for laser processing a glass sheet using the constant temperature platform according to any one of claims 1 to 6, characterized in that: The following steps are involved: Placing a glass sheet to be processed on a processing platform, and positioning the glass sheet to be processed on the processing platform using a negative pressure providing device; Starting the electric heating rod to heat the processing platform according to a preset temperature to preheat the glass sheet to be processed; The temperature of each area of ​​the glass sheet to be processed is monitored by multiple temperature sensors, and the temperature parameters are fed back to a temperature controller, which controls the power of the electric heating rod corresponding to the area to ensure that the temperature of the processing platform and each area of ​​the glass sheet to be processed is uniform and stable; Using a driving device to drive the processing platform so that the glass sheet to be processed moves below the laser head; The glass sheet to be processed is processed by utilizing the laser head.

8. The processing method according to claim 7, characterized in that: In the final step, the following steps are also included: Presetting a pattern to be processed on the glass sheet to be processed; The driving device is moved according to a set pattern to modify a specific area of ​​the glass sheet to be processed by laser induction; The glass slide was wet-etched in the modified area.

9. The processing method according to claim 7, characterized in that: After the laser processing is completed, the glass sheet is also cooled naturally.

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