Adjusting device, driving device, vacuum pump device and vacuum coating equipment

Abstract

The invention discloses an adjusting device, a driving device, a vacuum pump device and vacuum coating equipment. Wherein the workpiece comprises a first part and a second part capable of covering an opening of the first part; a first adjusting structure of the adjusting device is connected between the output end of a driving device and a second part, and the driving device is configured to be capable of driving the second part to rotate around a shaft, so that the second part has a first working state in which the second part covers an opening of a first part and a second working state in which the second part is far away from the first part; the first adjusting structure is configured to be capable of synchronously adjusting the posture of the second part in the process that the second part is converted into the first working state from the second working state, so that when the second part is in the first working state, the second part can seal the opening of the first part. The second part can be quickly and efficiently adjusted to seal the opening of the first part, and the working performance of the workpiece is effectively improved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to an adjusting device, a driving device, a vacuum pump device and vacuum coating equipment. Background Art

[0002] Vacuum coating is currently a cutting-edge coating technology with an increasingly wide range of applications. For example, it is used in glass, solar energy, electronic products, and tool production. Vacuum coating equipment has also evolved from single-chamber intermittent vacuum coating equipment to multi-chamber continuous vacuum coating equipment. The vacuum pump device is a key component of the vacuum coating equipment and consists of a vacuum pump body and a drive mechanism that drives the pump cover to cover or separate from the pump body. Regarding the vacuum pump body, when the drive mechanism drives the pump cover to cover the pump body, there is a possibility that the pump cover cannot effectively seal the opening of the pump body due to poor machining and / or installation accuracy of the pump cover. There is also a possibility that the pump cover cannot effectively seal the opening of the pump body due to poor machining and / or installation accuracy of the pump body. That is, there will be an angle between the covering surface of the pump cover and the sealing surface of the pump body, which can easily cause air leakage when the pump cover is covered on the pump body.

[0003] In the prior art, a sealing ring is usually provided to seal the joint between the pump body and the pump cover. However, for the problem existing in the vacuum pump body, air leakage cannot be effectively avoided. Summary of the Invention

[0004] The object of the present invention is to provide an adjusting device, a driving device, a vacuum pump device and a vacuum coating device to solve the above-mentioned problems existing in the prior art.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] An adjusting device, wherein the workpiece includes a first part and a second part capable of covering an opening of the first part, the adjusting device including a first adjusting structure connected between an output end of a driving device and the second part, the driving device being configured to drive the second part to rotate about an axis so that the second part has a first working state covering the opening of the first part and a second working state away from the first part;

[0007] The first adjustment structure is configured to synchronously adjust the posture of the second part during the process of the second part changing from the second working state to the first working state, so that when the second part is in the first working state, the second part can seal the opening of the first part.

[0008] As a preferred solution of the above-mentioned adjustment device, the first adjustment structure includes a universal adjustment structure, the output end of the driving device is transmission-connected to the universal adjustment structure, and the universal adjustment structure is also connected to the second part; in the process of the second part transforming from the second working state to the first working state, the universal adjustment structure can synchronously adjust the sealing surface of the second part and the covering surface of the first part to be parallel.

[0009] As a preferred solution of the above-mentioned adjustment device, the universal adjustment structure includes a universal bearing, the output end of the driving device is transmission-connected to the universal bearing, the outer ring of the universal bearing can rotate relative to the inner ring of the universal bearing and is connected to the second part.

[0010] As a preferred embodiment of the above-mentioned adjustment device, the first adjustment structure further includes a connection limit assembly, the connection limit assembly including a detachably connected upper connection limit piece and a lower connection limit piece, and the lower connection limit piece is further connected to the second part;

[0011] The outer ring fixing clamp of the universal bearing is arranged between the upper connection limiter and the lower connection limiter; or, the outer ring fixing clamp of the universal bearing is arranged between the upper connection limiter, the lower connection limiter and the second part.

[0012] As a preferred embodiment of the above-mentioned adjusting device, the adjusting device further comprises a guide shaft, the output end of the driving device is slidably connected to the guide shaft along the axial direction of the guide shaft, and the inner ring of the universal bearing is fixedly sleeved on the guide shaft;

[0013] The output end of the driving device is also transmission-connected to the inner ring of the universal bearing, the outer ring of the universal bearing, and one of the upper connection limiter.

[0014] As a preferred solution of the above-mentioned adjustment device, the adjustment device also includes a first elastic member, which is limited between the output end of the driving device and the first adjustment structure. When the second part is in the first working state, the output end of the driving device can apply pressure to the first elastic member so that the first elastic member is elastically pressed against the first adjustment structure along the circumferential direction.

[0015] As a preferred embodiment of the above-mentioned adjustment device, the driving device further includes a guide shaft, the output end of the driving device is slidably connected to the guide shaft along the axial direction of the guide shaft, and the first adjustment structure is provided on the guide shaft and is in transmission connection with the output end of the driving device;

[0016] The adjusting device also includes a second adjusting structure, which is arranged along the axial direction of the guide shaft between the output end of the driving device and the axial end limit edge of the guide shaft. The second adjusting structure can adjust the distance between the sealing surface and the fixed surface of the second part. The fixed surface is the plane on the output end of the driving device parallel to the covering surface of the first part when the second part is in the first working state.

[0017] As a preferred solution of the above-mentioned adjustment device, the second adjustment structure includes an adjustment gasket and / or an adjustment bushing, and the adjustment gasket and the adjustment bushing are both used to be sleeved on the guide shaft and are distributed between the output end of the drive device and the shaft end limit edge.

[0018] As a preferred embodiment of the above-mentioned regulating device, the regulating device further comprises a plurality of elastic positioning structures provided at the output end of the driving device, wherein the plurality of elastic positioning structures are distributed at intervals along the circumference of the second part;

[0019] When the second part is in the second working state, the multiple elastic positioning structures can adjust the sealing surface of the second part to be parallel to the fixed surface; the fixed surface is the plane on the output end of the driving device parallel to the covering surface of the first part when the second part is in the first working state.

[0020] As a preferred embodiment of the above-mentioned adjusting device, the adjusting device further comprises a mounting base connected to the output end of the driving device, the mounting base being provided with a plurality of mounting holes, and the plurality of mounting holes being provided in a one-to-one correspondence with the plurality of elastic positioning structures;

[0021] The elastic positioning structure includes a screw with one end threadedly connected to the mounting hole, a positioning rod slidably set in the mounting hole, a second elastic member distributed in the mounting hole, and a locking member, the two ends of the second elastic member are respectively fixedly set on the screw and the positioning rod, and the end of the positioning rod extending out of the mounting hole is used to press against the second part, and the locking member can lock or unlock the relative position of the screw and the mounting seat.

[0022] The driving device includes a workpiece including a first part and a second part that can cover the opening of the first part. A plurality of first parts of the workpiece are distributed at intervals and are all arranged on the valve body. The driving device includes:

[0023] A driving member fixedly arranged on the valve body;

[0024] a drive shaft, the drive shaft being drivingly connected to the output shaft of the drive member and being rotatably connected to the valve body;

[0025] A plurality of driving arms are distributed at intervals along the axial direction of the driving shaft and are fixedly mounted on the driving shaft; a plurality of second parts of the workpieces are arranged in a one-to-one correspondence with the plurality of driving arms, and the output end of the driving arm is transmission-connected to the second part; the driving member can drive the driving arm to rotate around the central axis of the driving shaft.

[0026] As a preferred solution of the above-mentioned driving device, the driving member is a motor.

[0027] As a preferred solution of the above-mentioned driving device, the driving device also includes a coaxiality adjustment component, which is connected between the driving shaft and the valve body, and is used to adjust the central axis of the driving shaft to be colinear with the rotation center line.

[0028] A vacuum pump device includes a valve body and a plurality of vacuum pump bodies, wherein the vacuum pump body includes a pump body disposed on the valve body and a pump cover capable of covering an opening of the pump body, and further includes a plurality of the aforementioned adjustment devices and the aforementioned driving device, wherein the vacuum pump body is the workpiece, the first part is the pump body, and the second part is the pump cover, and the pump covers of the plurality of vacuum pump bodies are independently disposed;

[0029] The pump covers of the plurality of vacuum pump bodies, the plurality of adjustment devices and the plurality of drive arms are all arranged in a one-to-one correspondence, and the first adjustment structure is connected between the output end of the drive arm and the pump cover.

[0030] Vacuum coating equipment includes the above-mentioned vacuum pump device.

[0031] Beneficial effects of the present invention:

[0032] The present invention provides an adjustment device, a drive device, a vacuum pump device, and a vacuum coating apparatus. The workpiece includes a first part and a second part that can cover an opening of the first part. The adjustment device includes a first adjustment structure connected between an output end of the drive device and the second part. The drive device is configured to drive the second part to rotate about an axis so that the second part has a first working state covering the opening of the first part and a second working state away from the first part. The first adjustment structure is configured to synchronously adjust the posture of the second part during the transition from the second working state to the first working state, so that when the second part is in the first working state, the second part can seal the opening of the first part.

[0033] The adjustment device is provided with a first adjustment structure, which is connected between the output end of the driving device and the second part, and is configured to synchronously adjust the posture of the second part during the process of the second part changing from the second working state to the first working state. When the second part is in the first working state, the second part can seal the opening of the first part. It can be understood that when the second part tends to cover the opening of the first part, if there is an angle between the sealing surface of the second part and the covering surface of the first part, the posture of the second part can be synchronously adjusted at this time, so that when the second part is in the first working state, the second part can seal the opening of the first part. The adjustment is fast, efficient and has a good effect, which effectively improves the working performance of the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 is a cross-sectional view of a vacuum pump device provided by a specific embodiment of the present invention;

[0035] Figure 2 A partial cross-sectional view of a vacuum pump device provided by a specific embodiment of the present invention Figure 1 ;

[0036] Figure 3 A partial cross-sectional view of a vacuum pump device provided by a specific embodiment of the present invention Figure 2 ;

[0037] Figure 4 is a structural schematic diagram of a vacuum pump device provided by a specific embodiment of the present invention in a first working state;

[0038] Figure 5 is a structural schematic diagram of a vacuum pump device provided by a specific embodiment of the present invention in a second working state;

[0039] Figure 6 A partial cross-sectional view of a vacuum pump device provided by a specific embodiment of the present invention along a first viewing angle Figure 3 ;

[0040] Figure 7 A partial cross-sectional view of a vacuum pump device provided by a specific embodiment of the present invention along a second viewing angle Figure 3 .

[0041] In the picture:

[0042] 100, workpiece; 110, first part; 111, opening; 120, second part; 121, sealing surface; 130, valve body; 131, through hole; 132, accommodating cavity;

[0043] 1. First adjustment structure; 11. Universal bearing; 12. Upper connection limiter; 13. Lower connection limiter;

[0044] 2. Guide shaft; 21. Shaft end limit edge;

[0045] 3. First elastic member; 31. Position limiting end cover;

[0046] 4. Second adjustment structure; 41. Adjustment gasket; 42. Adjustment bushing;

[0047] 5. Elastic positioning structure; 51. Screw; 52. Positioning rod; 53. Second elastic member; 54. Locking member;

[0048] 6. Mounting seat; 61. Mounting hole; 611. Limiting surface;

[0049] 7. First sealing ring;

[0050] 81. Driving member; 82. Driving shaft; 821. Connecting shaft; 83. Driving arm; 831. Fixed surface;

[0051] 9. Coaxiality adjustment component;

[0052] 91. First connecting structure; 911. Connecting seat; 9111. First connecting portion; 9112. Second connecting portion; 912. First bearing; 913. Closed end plate; 914. Second sealing ring; 915. Third sealing ring;

[0053] 92. Second connecting structure; 921. Connecting ring; 9211. Threaded hole; 922. Connecting piece. DETAILED DESCRIPTION

[0054] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It will be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all structures.

[0055] In the description of the present invention, unless otherwise expressly specified or limited, the terms "connected," "connected," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific circumstances.

[0056] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0057] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meanings.

[0058] like Figure 1 、 Figure 2 、 Figure 4 and Figure 5 As shown, the workpiece 100 includes a first part 110 and a second part 120 that can cover the opening 111 of the first part 110 .

[0059] The present invention provides a regulating device, such as Figure 1 and Figure 2 As shown, the adjustment device includes a first adjustment structure 1, which is connected between the output end of the driving device and the second part 120. The driving device is configured to drive the second part 120 to rotate around the axis so that the second part 120 has a first working state covering the opening 111 of the first part 110, and a second working state away from the first part 110; the first adjustment structure 1 is configured to synchronously adjust the posture of the second part 120 during the process of the second part 120 changing from the second working state to the first working state, so that when the second part 120 is in the first working state, the second part 120 can seal the opening 111 of the first part 110.

[0060] like Figure 1 and Figure 2As shown, the adjustment device is provided with a first adjustment structure 1, which is connected between the output end of the driving device and the second part 120, and is configured to synchronously adjust the posture of the second part 120 during the process of the second part 120 changing from the second working state to the first working state. When the second part 120 is in the first working state, the second part 120 can seal the opening 111 of the first part 110. It can be understood that when the second part 120 tends to cover the opening 111 of the first part 110, if there is an angle between the sealing surface 121 of the second part 120 and the covering surface of the first part 110, the posture of the second part 120 can be synchronously adjusted at this time, so that when the second part 120 is in the first working state, the second part 120 can seal the opening 111 of the first part 110. The adjustment is fast, efficient and has a good effect, which effectively improves the working performance of the workpiece 100.

[0061] Specifically, in this embodiment, Figure 1 、 Figure 2 、 Figure 4 and Figure 5 As shown, workpiece 100 is the vacuum pump body, first part 110 is the pump body, and second part 120 is the pump cover. As the pump cover is driven to close onto the pump body by the driving device, the first adjustment structure 1 can automatically adjust the posture of the pump cover. When the pump cover is closed onto the pump body, the pump cover can effectively seal the opening 111 of the pump body, effectively improving the working performance of the vacuum pump body.

[0062] Specifically, the first part 110 is disposed on the valve body 130, and the second part 120 can cover the valve body 130 to close the opening 111 of the first part 110; and / or, the second part 120 can cover the covering surface of the first part 110 to close the opening 111 of the first part 110. This arrangement enables the second part 120 to cover the opening 111 of the first part 110. Specifically, in this embodiment, if Figure 1 、 Figure 2 、 Figure 4 and Figure 5 As shown, the second part 120 is exemplarily configured to cover the valve body 130 to close the opening 111 of the first part 110. In other embodiments, the second part 120 may also be configured to cover the covering surface of the first part 110 to close the opening 111 of the first part 110, or the second part 120 may be configured to cover the covering surfaces of the valve body 130 and the first part 110 to close the opening 111 of the first part 110.

[0063] Specifically, if Figure 2As shown, the regulating device further includes a first sealing ring 7, which is used to seal the second part 120 against the valve body 130 and / or the covering surface of the first part 110. This further enhances the sealing effect of the second part 120 at the opening 111 of the first part 110. More specifically, the first sealing ring 7 is provided on the sealing surface 121 of the second part 120 and / or the valve body 130. When the second part 120 is in the first operating state, the first sealing ring 7 seals the gap between the sealing surface 121 of the second part 120 and the valve body 130. Alternatively, the first sealing ring 7 is provided on the sealing surface 121 of the second part 120 and / or the covering surface of the first part 110. When the second part 120 is in the first operating state, the first sealing ring 7 seals the gap between the sealing surface 121 of the second part 120 and the covering surface of the first part 110. Or, the sealing surface 121 of the second part 120 is provided with two first sealing rings 7, one of which is used to seal the gap between the sealing surface 121 of the second part 120 and the valve body 130, and the other is used to seal the gap between the sealing surface 121 of the second part 120 and the covering surface of the first part 110. Or, the covering surface of the first part 110 and the valve body 130 are both provided with first sealing rings 7. When the second part 120 is in the first working state, the first sealing ring 7 seals the gap between the sealing surface 121 of the second part 120 and the covering surface of the first part 110, and seals the gap between the sealing surface 121 of the second part 120 and the valve body 130. In this embodiment, as Figure 2 As shown, the sealing surface 121 of the second part 120 is exemplarily provided with a first sealing ring 7, which is partially embedded in the second part 120. When the second part 120 is in the first working state, the first sealing ring 7 elastically presses against the valve body 130 along the circumferential direction. Preferably, the first sealing ring 7 is a rubber sealing ring.

[0064] Among them, the first adjustment structure 1 includes a universal adjustment structure, the output end of the driving device is transmission-connected to the universal adjustment structure, and the universal adjustment structure is also connected to the second part 120; in the process of the second part 120 being transformed from the second working state to the first working state, the universal adjustment structure can synchronously adjust the sealing surface 121 of the second part 120 and the covering surface of the first part 110 to be parallel. It can be understood that in the process of the second part 120 being transformed from the second working state to the first working state, if there is an angle between the sealing surface 121 of the second part 120 and the covering surface of the first part 110, the universal adjustment structure can synchronously adjust the posture of the second part 120 at this time, so that the sealing surface 121 of the second part 120 and the covering surface of the first part 110 tend to be parallel, so that when the second part 120 covers the opening 111 of the first part 110, the driving device continues to apply downward pressure to the second part 120 to press the second part 120 against the valve body 130 and / or the first part 110, so that the opening 111 of the first part 110 can be sealed quickly and efficiently, and the air leakage caused by the angle between the sealing surface 121 and the covering surface can be effectively avoided.

[0065] Specifically, if Figure 1 and Figure 2 As shown, the universal adjustment structure includes a universal bearing 11. The output end of the drive device is in transmission connection with the universal bearing 11. The outer ring of the universal bearing 11 can rotate relative to the inner ring of the universal bearing 11 and is connected to the second part 120. Specifically, when the second part 120 covers the valve body 130 and / or the first part 110, when the second part 120 tends to cover the opening 111 of the first part 110, if there is an angle between the sealing surface 121 of the second part 120 and the covering surface of the first part 110, when the second part 120 initially contacts the valve body 130 and / or the first part 110, only a portion of the second part 120 contacts the valve body 130 and / or the first part 110. At this time, the portion of the second part 120 in contact with the valve body 130 and / or the first part 110 is supported, which drives the outer ring of the universal bearing 11 to rotate relative to the inner ring of the universal bearing 11. The second part 120 rotates synchronously with the inner ring of the universal bearing 11 until the sealing surface 121 of the second part 120 is parallel to the covering surface of the first part 110. It can be understood that when the sealing surface 121 of the second part 120 is completely parallel to the covering surface of the first part 110, the second part 120 is in the first working state, and the second part 120 covers the opening 111 of the first part 110 well. At this time, the driving device continues to apply downward pressure to the second part 120 to press the sealing surface 121 of the second part 120 against the valve body 130 and / or the first part 110, so that the opening 111 of the first part 110 can be sealed quickly and efficiently.

[0066] More specifically, Figure 1 and Figure 2 As shown, the first adjustment structure 1 also includes a connection limit assembly, which includes a detachably connected upper connection limit member 12 and a lower connection limit member 13, and the lower connection limit member 13 is also connected to the second part 120; the outer ring fixing clamp of the universal bearing 11 is arranged between the upper connection limit member 12 and the lower connection limit member 13; or, the outer ring fixing clamp of the universal bearing 11 is arranged between the upper connection limit member 12, the lower connection limit member 13 and the second part 120. This arrangement is used to define the relative positions of the universal bearing 11 and the second part 120, so that the second part 120 can rotate relative to the inner ring of the universal bearing 11 when it begins to contact the valve body 130 and / or the first part 110, so as to adjust the angle between the sealing surface 121 of the second part 120 and the covering surface of the first part 110; secondly, the upper connection limiter 12 and the lower connection limiter 13 are detachably connected, which can facilitate the assembly of the universal bearing 11 and the second part 120 and the subsequent maintenance of the universal bearing 11 and / or the second part 120. Specifically, in this embodiment, if Figure 1 and Figure 2 As shown, the outer ring of the universal bearing 11 is exemplarily fixed between the upper connection limiter 12 and the lower connection limiter 13. The lower connection limiter 13 is detachably connected to the second part 120; or, the lower connection limiter 13 is fixedly connected to the second part 120 or is integrally formed. In this embodiment, Figure 1 and Figure 2 As shown, the lower connection limiter 13 is exemplarily provided to be detachably connected to the second part 120 .

[0067] It is understandable that if Figure 1 、 Figure 4 and Figure 5 As shown, for multiple workpieces 100, when the second parts 120 of the multiple workpieces 100 are synchronously driven by the output end of the driving device to cover the openings 111 of the corresponding first parts 110, if the processing accuracy and / or installation accuracy of each second part 120 are inconsistent, and / or the processing accuracy and / or installation accuracy of each first part 110 are inconsistent, resulting in different angles between the sealing surfaces 121 of each second part 120 and the covering surfaces of the corresponding first parts 110, by adopting the above-mentioned first adjustment structure 1, the sealing surfaces 121 of each second part 120 can be effectively adjusted to be parallel to the covering surfaces of the corresponding first part 110, effectively avoiding the air leakage caused by the above-mentioned situation, thereby effectively improving the reliability of the collaborative work of the multiple workpieces 100, and effectively saving the driving cost of the second parts 120 of the multiple workpieces 100.

[0068] Among them, such as Figure 1 and Figure 2 As shown, the adjustment device also includes a guide shaft 2. The output end of the drive device is slidably connected to the guide shaft 2 along the axial direction of the guide shaft 2. The inner ring of the universal bearing 11 is fixedly mounted on the guide shaft 2. The output end of the drive device is also in transmission connection with the inner ring of the universal bearing 11, the outer ring of the universal bearing 11, or one of the upper connecting stoppers 12. This arrangement ensures that after the sealing surface 121 of the second part 120 is adjusted completely parallel to the covering surface of the first part 110 by the first adjustment structure 1, that is, when the second part 120 is in the first operating state, the drive device continues to apply downward pressure along the axial direction of the guide shaft 2 to the inner ring of the universal bearing 11, the outer ring of the universal bearing 11, and one of the upper connecting stoppers 12, thereby pressing the sealing surface 121 of the second part 120 against the valve body 130 and / or the first part 110. The output end of the drive device and the guide shaft 2 are loosely fitted, allowing the output end of the drive device to slide smoothly along the axial direction of the guide shaft 2 toward or away from the universal bearing 11. It can be understood that the connection limiting components are also distributed on the periphery of the guide shaft 2.

[0069] Among them, such as Figure 2 As shown, the regulating device further includes a first elastic member 3, which is defined between the output end of the driving device and the first regulating structure 1. When the second part 120 is in the first operating state, the output end of the driving device can apply pressure to the first elastic member 3, causing the first elastic member 3 to be elastically pressed against the first regulating structure 1 in the circumferential direction. This arrangement allows, when the second part 120 is in the first operating state, the downward pressure applied by the driving device to the second part 120 to be evenly distributed along the circumference of the second part 120, thereby evenly distributing the force applied by the second part 120 to the valve body 130 and / or the first part 110 along the circumference of the first part 110. This further enhances the sealing effect of the gap between the second part 120 and the valve body 130 and / or the first part 110 by the second part 120 and the first sealing ring 7, further improving the sealing performance at the opening 111 of the first part 110.

[0070] Specifically, if Figure 2 As shown, the first elastic member 3 is sleeved on the guide shaft 2. The two ends of the first elastic member 3 are circumferentially pressed against the output end of the drive device and the inner ring of the universal bearing 11, respectively. Alternatively, the two ends of the first elastic member 3 are circumferentially pressed against the output end of the drive device and the outer ring of the universal bearing 11, respectively. Alternatively, the two ends of the first elastic member 3 are circumferentially pressed against the output end of the drive device and the upper connection stopper 12, respectively. Both of these arrangements ensure that the downward pressure applied by the drive device to the second part 120 is evenly distributed along the circumference of the second part 120. It is understood that the first elastic member 3 is always in an elastically compressed state.

[0071] Preferably, if Figure 2As shown, both ends of the first elastic member 3 are provided with a limit end cover 31, and the two ends of the first elastic member 3 are arranged in a one-to-one correspondence with the two limit end covers 31, and the ends of the first elastic member 3 are confined within the limit end covers 31; the two limit end covers 31 are both slidably sleeved on the guide shaft 2, one of the limit end covers 31 is tightly pressed against the output end of the driving device, and the other limit end cover 31 is in contact with the inner ring of the universal bearing 11, the outer ring of the universal bearing 11 and one of the upper connecting limit members 12.

[0072] Preferably, in this embodiment, Figure 2 As shown, one of the limiting end caps 31 at each end of the first elastic member 3 abuts against the output end of the drive device, while the other abuts against the inner ring of the universal bearing 11. It will be appreciated that in this embodiment, the first elastic member 3 is a cylindrical elastic member. Preferably, the first elastic member 3 is a rectangular spring. The rectangular spring has flat ends along its length, facilitating assembly of the first elastic member 3 and the two limiting end caps 31. This allows the ends of the first elastic member 3 to be well confined within their respective limiting end caps 31. This further improves the performance of the first elastic member 3, ensuring that the force applied to the valve body 130 and / or the first member 110 by the second member 120 is more evenly distributed along the circumference of the first member 110. This further enhances the sealing effect of the gap between the second member 120 and the valve body 130 and / or the first member 110, which is sealed by the second member 120 and the first sealing ring 7. In other embodiments, when the two ends of the first elastic member 3 are respectively pressed against the output end of the driving device and the outer ring of the universal bearing 11 along the circumferential direction; or; the two ends of the first elastic member 3 are respectively pressed against the output end of the driving device and the upper connection limit member 12 along the circumferential direction, the first elastic member 3 is a frustum-shaped elastic member.

[0073] Among them, such as Figure 2 As shown, the drive device also includes a guide shaft 2, the output end of the drive device is slidably connected to the guide shaft 2 along the axial direction of the guide shaft 2, and the first adjustment structure 1 is provided on the guide shaft 2 and is transmission-connected to the output end of the drive device; the adjustment device also includes a second adjustment structure 4, which is provided between the output end of the drive device and the axial end limit edge 21 of the guide shaft 2 along the axial direction of the guide shaft 2. The second adjustment structure 4 can adjust the distance between the sealing surface 121 of the second part 120 and the fixed surface 831. The fixed surface 831 is a plane on the output end of the drive device that is parallel to the covering surface of the first part 110 when the second part 120 is in the first working state. Figure 2As shown, the guide shaft 2 is the same as the guide shaft 2 described above. By providing a second adjustment structure 4 between the output end of the driving device and the axial end limit edge 21 of the guide shaft 2, when the second part 120 is in the second working state, the distance between the sealing surface 121 of the second part 120 and the fixed surface 831 can be adjusted. This allows the sealing surface 121 of the second part 120 to completely fit circumferentially with the valve body 130 and / or the covering surface of the first part 110 when the second part 120 is in the first working state. As a result, when the driving device continues to apply downward pressure to the second part 120, the sealing surface 121 of the second part 120 can be effectively pressed circumferentially against the valve body 130 and / or the covering surface of the first part 110, thereby further preventing air leakage.

[0074] Specifically, the fixed surface 831 is not limited to Figure 2 The plane referred to in the figure may also be another plane on the output end of the driving device that is parallel to the covering surface of the first part 110 when the second part 120 is in the first working state. The distance L between the sealing surface 121 of the second part 120 and the output end of the driving device along the axial direction of the guide shaft 2 when the second part 120 is in the second working state can be measured, thereby facilitating adjustment of whether the sealing surface 121 of the second part 120 can fully circumferentially fit the covering surface of the valve body 130 and / or the first part 110 when the second part 120 is in the first working state.

[0075] Specifically, if Figure 2 As shown, the second adjustment structure 4 includes an adjustment gasket 41 and / or an adjustment bushing 42. The adjustment gasket 41 and the adjustment bushing 42 are both used to be sleeved on the guide shaft 2 and are distributed between the output end of the drive device and the shaft end limit edge 21. The adjustment gasket 41 and / or the adjustment bushing 42 are provided between the output end of the drive device and the shaft end limit edge 21 of the guide shaft 2. By adjusting the size and quantity of the adjustment gasket 41 and / or the adjustment bushing 42, the distance between the sealing surface 121 of the second part 120 and the fixed surface 831 can be effectively adjusted, so that when the second part 120 is in the first working state, the sealing surface 121 of the second part 120 can be completely in contact with the valve body 130 and / or the covering surface of the first part 110 along the circumferential direction.

[0076] More specifically, when the second adjustment structure 4 includes an adjustment gasket 41, the adjustment gasket 41 is detachably connected to the output end or the shaft end limit edge 21 of the driving device. When the second adjustment structure 4 includes an adjustment bushing 42, the adjustment bushing 42 is detachably connected to the output end or the shaft end limit edge 21 of the driving device. When the second adjustment structure 4 includes an adjustment gasket 41 and an adjustment bushing 42, both the adjustment gasket 41 and the adjustment bushing 42 are detachably connected to the output end or the shaft end limit edge 21 of the driving device. Among them, the detachable connection method can be selected from threaded connection and the like. Specifically, in this embodiment, if Figure 2 As shown, the second adjustment structure 4 preferably includes an adjustment washer 41 and an adjustment bushing 42 .

[0077] It is understandable that if Figure 1 、 Figure 2 、 Figure 4 and Figure 5 As shown, when the second parts 120 of multiple workpieces 100 are synchronously driven by the output end of the driving device to cover the corresponding first parts 110; if the processing accuracy and / or installation accuracy of each second part 120 are inconsistent, and / or the processing accuracy and / or installation accuracy of each first part 110 are inconsistent, resulting in different surface differences between the sealing surfaces 121 of each second part 120 and the covering surfaces of the corresponding first parts 110. For different workpieces 100, second adjustment structures 4 of different sizes and quantities are used to effectively adjust the second parts 120 of each workpiece 100 to be in the first working state. When the sealing surfaces 121 of each second part 120 can be completely fitted with the valve body 130 and / or the covering surface of the corresponding first part 110 along the circumferential direction, air leakage caused by surface differences can be effectively avoided, thereby further improving the reliability of the collaborative work of multiple workpieces 100.

[0078] The face difference refers to the distance between the sealing surface 121 of the second part 120 and the covering surface of the first part 110 when the second part 120 is in the first working state.

[0079] Among them, such as Figure 1-3 As shown, the adjustment device also includes multiple elastic positioning structures 5 disposed at the output end of the drive device. These elastic positioning structures 5 are spaced apart along the circumference of the second part 120. When the second part 120 is in the second operating state, the multiple elastic positioning structures 5 can adjust the sealing surface 121 of the second part 120 to be parallel to the fixed surface 831. The fixed surface 831 is a plane on the output end of the drive device that is parallel to the covering surface of the first part 110 when the second part 120 is in the first operating state. This arrangement ensures that the second part 120 remains stationary when in the second operating state, further improving the efficiency of sealing the opening 111 of the first part 110 by the second part 120. This ensures that the posture of the multiple second parts 120 is consistent, further improving the reliability of the coordinated operation of the multiple workpieces 100.

[0080] Specifically, if Figure 1-3As shown, the adjusting device also includes a mounting base 6 connected to the output end of the driving device, and the mounting base 6 is provided with a plurality of mounting holes 61, and the plurality of mounting holes 61 are arranged in a one-to-one correspondence with the plurality of elastic positioning structures 5; the elastic positioning structure 5 includes a screw 51 with one end threadedly connected to the mounting hole 61, a positioning rod 52 slidably set in the mounting hole 61, a second elastic member 53 distributed in the mounting hole 61, and a locking member 54, the two ends of the second elastic member 53 are respectively fixedly set on the screw 51 and the positioning rod 52, and the end of the positioning rod 52 extending out of the mounting hole 61 is used to press against the second part 120, and the locking member 54 can lock or unlock the relative position of the screw 51 and the mounting base 6. It can be understood that by screwing the screw 51, the tightening force of the positioning rod 52 against the second part 120 can be adjusted, so that multiple elastic positioning structures 5 work together to make the sealing surface 121 of the second part 120 parallel to the fixed surface 831 when the second part 120 is in the second working state, and after the sealing surface 121 of the second part 120 is adjusted to be parallel to the fixed surface 831, the posture of the second part 120 can be ensured to remain stationary. Secondly, since the positioning rod 52 always maintains a state of elastic pressure against the second part 120 under the action of the second elastic member 53, in the process of driving the second part 120 from the second working state to the first working state, when the second part 120 tends to cover the opening 111 of the first part 110, if there is an angle between the sealing surface 121 of the second part 120 and the covering surface of the first part 110, the upper part structure of the second part 120 first starts to contact the valve body 130, thereby driving the second part 120 to move relative to the ball head 112, and at the same time, it will apply a force to the positioning rod 52 to cause the second elastic member 53 to expand and contract, so that the elastic positioning structure 2 and the ball head adjustment member 11 can be used in combination to further improve the efficiency and effect of adjusting the sealing surface 121 of the second part 120 to be parallel to the covering surface of the first part 110.

[0081] In this embodiment, the locking member 54 is a locking nut.

[0082] More specifically, Figure 1-3 As shown, the inner wall of the mounting hole 61 is provided with a limiting surface 611, and the positioning rod 52 is provided with a limiting edge. Along the sliding direction of the positioning rod 52, the limiting edge can abut against the limiting surface 611 to prevent the positioning rod 52 from being separated from the mounting seat 6 and becoming ineffective.

[0083] Specifically, the mounting base 6 and the output end of the driving device can be two independent structures; or the mounting base 6 can be a part of the output end of the driving device. When the mounting base 6 and the output end of the driving device are two independent structures, the mounting base 6 is preferably connected to the output end of the driving device by a detachable connection method such as a threaded connection.

[0084] The present invention also provides a driving device, such as Figure 1、 Figure 2 、 Figure 4 and Figure 5 As shown, the workpiece 100 includes a first part 110 and a second part 120 that can cover the opening 111 of the first part 110. The first parts 110 of the multiple workpieces 100 are distributed at intervals and are all arranged on the valve body 130. The driving device includes a driving member 81 fixedly arranged on the valve body 130, a driving shaft 82, and a plurality of driving arms 83. The driving shaft 82 is transmission-connected to the output shaft of the driving member 81 and is rotationally connected to the valve body 130; the plurality of driving arms 83 are distributed at intervals along the axial direction of the driving shaft 82 and are all fixedly sleeved on the driving shaft 82; the second parts 120 of the multiple workpieces 100 are arranged one-to-one with the plurality of driving arms 83, and the output end of the driving arm 83 is transmission-connected to the second part 120; the driving member 81 can drive the driving arm 83 to rotate around the central axis of the driving shaft 82. Such an arrangement enables a driving member 81 to synchronously drive multiple driving arms 83 to rotate around the central axis of the driving shaft 82, thereby driving multiple second parts 120 to rotate around the central axis of the driving shaft 82, so that the multiple second parts 120 can be synchronously covered or separated from the openings 111 of the corresponding first parts 110, effectively saving the driving cost of driving the multiple second parts 120.

[0085] Specifically, if Figure 1 、 Figure 2 、 Figure 4 and Figure 5As shown, there are multiple adjustment devices, multiple adjustment devices, multiple driving arms 83 and multiple second parts 120 of workpieces 100 are set in a one-to-one correspondence, and the output end of the driving arm 83 is connected to the second part 120 through the adjustment device. The output end of the driving arm 83 is connected to the second part 120 through an adjustment device, so that when the driving member 81 synchronously drives the multiple second parts 120 to rotate around the central axis of the driving shaft 82, during the process of the second part 120 changing from the second working state to the first working state, if there is inconsistency in the processing accuracy and / or installation accuracy of each second part 120, and / or inconsistency in the processing accuracy and / or installation accuracy of each first part 110, resulting in different angles and / or different surface differences between the sealing surfaces 121 of each second part 120 and the covering surfaces of the corresponding first part 110, the first adjustment structure 1 and the elastic positioning structure 5 of the adjusting device can be used to effectively adjust the sealing surface 121 of each second part 120 to be parallel to the covering surface of the corresponding first part 110, and the second adjustment structure 4 of the adjusting device can be used to effectively adjust the second part 120 of each workpiece 100 to be in the first working state, so that the sealing surface 121 of each second part 120 can be circumferentially aligned with the valve body 1 30 and / or the corresponding covering surface of the first part 110 are completely fitted together, thereby effectively avoiding the air leakage caused by the above situation and effectively improving the reliability of the collaborative work of multiple workpieces 100; secondly, by adopting the above-mentioned adjusting device, the downward pressure applied to the second part 120 by the driving arm 83 can be evenly distributed along the circumference of the second part 120, so that the force applied to the valve body 130 and / or the first part 110 by the second part 120 can be evenly distributed along the circumference of the first part 110, which can further improve the sealing effect of sealing the gap between the second part 120 and the valve body 130 and / or the first part 110 through the second part 120 and the first sealing ring 7, and further improve the sealing performance of sealing the opening 111 of the first part 110; secondly, by adopting the above-mentioned adjusting device, when the second part 120 is in the second working state, it can also ensure that the postures of the multiple second parts 120 are consistent, thereby further improving the reliability of the collaborative work of the multiple workpieces 100.

[0086] Preferably, the driving member 81 is a motor. The motor can infinitely adjust the rotational speed of the drive shaft 82. Therefore, by driving the drive shaft 82 with the motor, the plurality of second parts 120 rotate about the central axis of the drive shaft 82, thereby effectively controlling the distance between the second parts 120 and the opening 111 of the first part 110. Specifically, when the workpiece 100 is a vacuum pump body, the distance between the sealing surface 121 of the pump cover and the sealing surface of the pump body affects the vacuum pumping speed. Therefore, by driving the plurality of second parts 120 to rotate about the central axis of the drive shaft 82 with the motor, the vacuum level of the vacuum pump body can be effectively controlled by controlling the pumping speed.

[0087] Specifically, the motor and the drive shaft 82 are connected via a transmission mechanism such as a reducer.

[0088] Specifically, the driving device also includes a controller and an encoder electrically connected to the controller. The motor is also electrically connected to the controller. The controller can control the output speed of the motor according to the electrical signal sent by the encoder.

[0089] Specifically, taking the example of a transmission mechanism comprising a first transmission shaft and a second transmission shaft in a transmission connection, the first transmission shaft is further connected to the output shaft of the driver 81, and the second transmission shaft is further connected to the first end of the drive shaft 82, and the second transmission shaft is capable of driving the drive shaft 82 to rotate about its own central axis. It is understood that when the drive shaft 82 is not provided with the second part 120, that is, when the drive shaft 52 is not subjected to external downward pressure, the rotational centerline of the second transmission shaft, the rotational centerline of the drive shaft 82, and the central axis of the drive shaft 82 are all collinear. When the drive shaft 82 drives the second part 120 to rotate, and particularly when the drive shaft 82 drives multiple second parts 120 to rotate synchronously, due to the heavy weight of the multiple second parts 120 and the axial spacing of the multiple second parts 120 along the drive shaft 82, the gravity of the second parts 120 causes the end of the drive shaft 82 axially away from the second transmission shaft to be depressed downward, thereby causing the central axis of the drive shaft 82 to be non-collinear with the rotational centerlines of the second transmission shaft and the rotational centerlines of the drive shaft 82.

[0090] Therefore Figure 4-7 As shown, the drive device also includes a coaxiality adjustment assembly 9 connected between the drive shaft 82 and the valve body 130. The coaxiality adjustment assembly 9 is used to adjust the central axis of the drive shaft 82 to be collinear with the rotation centerline. This arrangement effectively avoids the problem of the central axis of the drive shaft 82 and the rotation centerline being misaligned due to the heavy weight of the multiple second parts 120 when rotating simultaneously, effectively improving the driving performance and service life of the drive device, and further enhancing the reliability of the coordinated operation of multiple workpieces 100.

[0091] Specifically, if Figure 4-7As shown, the drive shaft 82 is rotatably connected to the valve body 130 along the axial direction close to the first end of the drive member 81, and the coaxiality adjustment assembly 9 includes a first connecting structure 91, a second connecting structure 92 and a plurality of coaxiality adjustment members. The first connecting structure 91 includes a connecting seat 911, and the first connecting portion 9111 of the connecting seat 911 is rotatably connected to the second end of the drive shaft 82, and the first connecting portion 9111 and the second end of the drive shaft 82 are both clearance-matched with the valve body 130, and the second connecting portion 9112 of the connecting seat 911 abuts against the valve body 130 along the axial direction of the drive shaft 82; the second connecting structure 92 is spaced apart and arranged on the outer periphery of the second connecting portion 9112 and is detachably connected to the valve body 130; a plurality of coaxiality adjustment members are distributed at intervals along the circumference of the second connecting structure 92 and are all arranged on the second connecting structure 92, and the coaxiality adjustment member is configured to be able to drive the second connecting portion 9112 to move along the radial direction of the second connecting structure 92, and can lock the relative position of the second connecting structure 92 and the second connecting portion 9112. Specifically, when the central axis of the drive shaft 82 is not colinear with the rotation centerline, the second connecting part 9112 is driven to move by at least a part of the multiple coaxiality adjustment parts. It can be understood that in this process, the connecting seat 911 and the second end of the drive shaft 82 are driven to move synchronously, so that the drive shaft 82 can be fine-tuned to the central axis and the rotation centerline being colinear; after the central axis of the drive shaft 82 is adjusted to be colinear with the rotation centerline, the relative position of the second connecting structure 92 and the second connecting part 9112 is locked by the coaxiality adjustment part. At this time, the relative position of the second connecting structure 92, the connecting seat 911 and the drive shaft 82 is synchronously locked, so that the central axis of the drive shaft 82 can be adjusted to be colinear with the rotation centerline quickly and efficiently, so that the drive member 81 can drive the drive shaft 82 to rotate around its own central axis, thereby improving the driving performance and service life of the driving device, and can further improve the reliability of the collaborative work of multiple workpieces 100.

[0092] Specifically, the outer peripheral shape of the second connecting portion 9112 of the connecting seat 911 is not limited to a circle, and the outer peripheral shape of the second connecting portion 9112 can also be set to a square, rectangular or polygonal shape. For example, when the outer peripheral shape of the second connecting portion 9112 is a circle, if the central axis of the drive shaft 82 is not collinear with the rotation centerline, it is necessary to adjust all the adjusting members so that the second connecting portion 9112 can be driven to move, so that the drive shaft 82 can be fine-tuned to the point where the central axis is collinear with the rotation centerline. For example, when the outer peripheral shape of the second connecting portion 9112 is a square or rectangular, if the central axis of the drive shaft 82 is not collinear with the rotation centerline, it is necessary to adjust some or all the adjusting members so that the second connecting portion 9112 can be driven to move, so that the drive shaft 82 can be fine-tuned to the point where the central axis is collinear with the rotation centerline.

[0093] Preferably, if Figure 4-7As shown, the first connecting portion 9111 and the second connecting portion 9112 of the connecting base 911 are integrally formed, which can reduce the number of parts, facilitate assembly, and improve the structural strength and service life of the connecting base 911.

[0094] Specifically, if Figure 6 and Figure 7 As shown, the second connecting structure 92 includes a connecting ring 921 that is detachably connected to the valve body 130. The connecting ring 921 is provided with a plurality of threaded holes 9211. The plurality of threaded holes 9211 correspond one-to-one with a plurality of coaxial adjustment members. The coaxial adjustment members are threadedly connected to the threaded holes 9211 and can be tightened against the outer peripheral wall of the second connecting portion 9112 along the radial direction of the second connecting structure 92. When the central axis of the drive shaft 82 is adjusted to be aligned with the rotation centerline, the corresponding coaxial adjustment members among the plurality of coaxial adjustment members are rotated, thereby causing the second connecting portion 9112 to move, thereby causing the connecting seat 911 and the second end of the drive shaft 82 to move synchronously until the drive shaft 82 is fine-tuned to have its central axis aligned with the rotation centerline. When the central axis of the drive shaft 82 is aligned with the rotation centerline, the coaxial adjustment members synchronously lock the relative positions of the connecting ring 921 and the second connecting portion 9112, thereby synchronously locking the relative positions of the connecting ring 921, the connecting seat 911, and the drive shaft 82. This simple structure and convenient operation. In this embodiment, the coaxiality adjusting member is a screw.

[0095] Preferably, the plurality of coaxiality adjustment members are evenly spaced along the circumference of the second connecting structure 92. This can further improve the efficiency and accuracy of adjusting the central axis of the driving shaft 82 to be colinear with the rotation centerline.

[0096] Specifically, if Figure 6 and Figure 7 As shown, the second connection structure 92 further includes a plurality of connecting members 922, which are spaced apart along the circumference of the connecting ring 921. The connecting members 922 pass through the connecting ring 921 and are detachably connected to the valve body 130. This allows the connecting ring 921 to be detachably connected to the valve body 130. In this embodiment, the connecting members 922 are screws. In other embodiments, the connecting members 922 may include a bolt and a lock nut, etc., which are used in conjunction to detachably connect the connecting ring 921 to the valve body 130. It is understood that the connecting members 922 and the coaxiality adjustment member are spaced apart along the circumference of the connecting ring 921.

[0097] Preferably, in this embodiment, Figure 6 and Figure 7As shown, the valve body 130 is provided with a through hole 131 communicating with the interior. The first connecting portion 9111 partially passes through the through hole 131 and is rotatably connected to the second end of the drive shaft 82. Along the radial direction of the drive shaft 82, the gap between the outer peripheral wall of the first connecting portion 9111 and the inner peripheral wall of the through hole 131 is smaller than the gap between the outer peripheral wall of the second connecting portion 9112 and the inner peripheral wall of the connecting ring 921. This allows the second end of the drive shaft 82 to be rotatably connected to the first connecting portion 9111, and the coaxiality adjustment member can effectively adjust the central axis of the drive shaft 82 to be collinear with the rotation centerline. Furthermore, this arrangement effectively reduces the space occupied by the coaxiality adjustment assembly 9, improving the aesthetics of the drive device.

[0098] As an alternative, the valve body 130 is provided with a through hole 131 communicating with the interior. The second end of the drive shaft 82 passes through the through hole 131 and is rotatably connected to the first connecting portion 9111. Along the radial direction of the drive shaft 82, the gap between the outer circumferential wall of the drive shaft 82 and the inner circumferential wall of the through hole 131 is smaller than the gap between the outer circumferential wall of the second connecting portion 9112 and the inner circumferential wall of the connecting ring 921. This allows the second end of the drive shaft 82 to be rotatably connected to the first connecting portion 9111, and allows the central axis of the drive shaft 82 to be effectively adjusted to be aligned with the rotation centerline using a coaxiality adjustment member.

[0099] More specifically, Figure 6 and Figure 7 As shown, the second end of the drive shaft 82 is provided with a connecting shaft 821. The first connecting structure 91 also includes a first bearing 912. The inner ring of the first bearing 912 is fixedly mounted on the connecting shaft 821, and the first connecting portion 9111 is fixedly mounted on the outer ring of the first bearing 912. This arrangement allows the second end of the drive shaft 82 to be rotatably connected to the first connecting portion 9111. The connecting shaft 821 and the drive shaft 82 can be two independent shafts, or they can be integrally formed. When the connecting shaft 821 and the drive shaft 82 are two independent shafts, the second end of the drive shaft 82 and the connecting shaft 821 are connected by plugging or using a coupling. In this embodiment, it is preferred that the connecting shaft 821 and the drive shaft 82 are two independent shafts, and the second end of the drive shaft 82 and the connecting shaft 821 are connected by plugging. With such a configuration, the coaxiality adjustment component 9 can be adapted to drive shafts 82 of different sizes by replacing the connecting shaft 821 according to the size of the drive shaft 82, thereby effectively improving the versatility of the coaxiality adjustment component 9.

[0100] Optionally, there are multiple first bearings 912, and the multiple first bearings 912 are distributed at intervals along the axial direction of the connecting shaft 821. In this embodiment, Figure 6 and Figure 7As shown, two first bearings 912 are exemplarily provided, wherein the distribution positions of the two first bearings 912 along the axial direction are defined by the shoulder of the connecting shaft 821, the limit ring and the shoulder of the first connecting portion 9111.

[0101] More specifically, the first end of the drive shaft 82 is rotatably connected to the valve body 130 via a second bearing.

[0102] More specifically, Figure 6 and Figure 7 As shown, a second sealing ring 914 is disposed between the second connecting portion 9112 and the valve body 130. The second sealing ring 914 is used to seal the gap between the second connecting portion 9112 and the valve body 130. This arrangement prevents debris and the like from entering the valve body 130 through the gap between the second connecting portion 9112 and the valve body 130. Specifically, in this embodiment, the second sealing ring 914 is a rubber sealing ring.

[0103] More specifically, Figure 6 and Figure 7 As shown, the first connecting structure 91 further includes a closed end plate 913, which is detachably connected to the second connecting portion 9112 and is located away from the drive shaft 82 relative to the connecting seat 911. This prevents debris from entering the valve body 130 and the connection between the first connecting portion 9111 and the connecting shaft 821, thereby damaging the performance and service life of the first bearing 912. Furthermore, the aesthetics of the drive device can be further enhanced.

[0104] Preferably, if Figure 6 and Figure 7 As shown, a third sealing ring 915 is disposed between the second connecting portion 9112 and the closed end plate 913. The third sealing ring 915 is used to seal the gap between the second connecting portion 9112 and the closed end plate 913. This arrangement can further enhance the sealing performance of the closed end plate 913. Specifically, in this embodiment, the third sealing ring 915 is also a rubber sealing ring.

[0105] like Figure 1-7 As shown, the present invention also provides a vacuum pump device, including a valve body 130 and multiple vacuum pump bodies. The vacuum pump body includes a pump body disposed on the valve body 130, and a pump cover that can cover the opening 111 of the pump body, and also includes multiple aforementioned adjustment devices and the aforementioned driving device. The vacuum pump body is a workpiece 100, the first part 110 is the pump body, and the second part 120 is the pump cover. The pump covers of the multiple vacuum pump bodies are independently provided; the pump covers of the multiple vacuum pump bodies, the multiple adjustment devices, and the multiple driving arms 83 are all provided in a one-to-one correspondence, and the first adjustment structure 1 is connected between the output end of the driving arm 83 and the pump cover. Specifically, the adjustment device is provided between the output end of the driving arm 83 and the pump cover.

[0106] For multiple vacuum pump bodies, by independently setting the pump covers of multiple vacuum pump bodies, compared with the prior art in which the pump covers of multiple vacuum pump bodies are set as one total pump cover, the independently set pump covers are light in weight and small in size, thereby effectively reducing the difficulty of installing and removing the pump covers from the drive shaft 82, making later maintenance more convenient.

[0107] Secondly, for multiple vacuum pump bodies, a driving member 81 is used to synchronously drive multiple pump covers to rotate around the central axis of the driving shaft 82, so that the multiple pump covers can be synchronously covered or separated at the openings 111 of the corresponding pump bodies, effectively saving the driving cost of synchronously driving the pump covers of multiple vacuum pump bodies.

[0108] Secondly, for multiple vacuum pump bodies, the above-mentioned driving device is used for driving, and the above-mentioned adjusting device is connected between the output end of each driving arm 83 of the driving device and the pump cover, so that when the driving member 81 synchronously drives the multiple pump covers to rotate around the central axis of the driving shaft 82, in the process of the pump cover changing from the second working state to the first working state, if the processing accuracy and / or installation accuracy of each pump cover are inconsistent, and / or the processing accuracy and / or installation accuracy of each pump body are inconsistent, resulting in different angles and / or surface differences between the sealing surfaces 121 of each pump cover and the corresponding pump body cover surface, the first adjusting structure 1 and the elastic positioning structure 5 of the adjusting device can effectively adjust the sealing surface 121 of each pump cover to be parallel to the corresponding pump body cover surface, and the second adjusting structure 4 of the adjusting device can effectively adjust the pump cover of each vacuum pump body to be in the first working state, so that the sealing surface 121 of each pump cover can be circumferentially aligned with the valve The valve body 130 and / or the corresponding pump body cover surface are completely fitted, thereby effectively avoiding the air leakage caused by the above situation, and effectively improving the reliability of the pump cover of the synchronously driven multiple vacuum pump bodies being fitted on the pump body and sealing the opening 111 of the pump body; secondly, by adopting the above-mentioned adjustment device, the downward pressure applied to the pump cover by the driving arm 83 can be evenly distributed along the circumference of the pump cover, so that the force applied to the valve body 130 and / or the pump body by the pump cover can be evenly distributed along the circumference of the pump body, which can further improve the sealing effect of the gap between the pump cover and the valve body 130 and / or the pump body through the pump cover and the first sealing ring 7, and further improve the sealing performance of the opening 111 of the pump body; secondly, by adopting the above-mentioned adjustment device, when the pump cover is in the second working state, it can also ensure that the postures of the multiple pump covers are consistent, thereby further improving the reliability of the pump cover of the synchronously driven multiple vacuum pump bodies being fitted on the pump body and sealing the opening 111 of the pump body.

[0109] It is understood that the adjustment of the sealing surface 121 of each pump cover to be parallel to the corresponding cover-fitting surface of the pump body by the first adjustment structure 1 is performed synchronously during the transition of the pump cover from the second working state to the first working state. The adjustment of the pump cover of each vacuum pump body to be in the first working state by the second adjustment structure 4 so that the sealing surface 121 of each pump cover can be completely aligned with the valve body 130 and / or the corresponding cover-fitting surface of the pump body along the circumferential direction is performed manually when the pump cover is in the second working state.

[0110] Specifically, in this embodiment, Figure 1 、 Figure 4 and Figure 5 As shown, the pump body is arranged obliquely on the valve body 130.

[0111] Specifically, the valve body 130 and the pump body can be two independent structures; or, the valve body 130 can be a partial structure on the pump body. When the valve body 130 and the pump body are two independent structures, the valve body 130 and the pump body can be detachably connected. This facilitates assembly and disassembly and maintenance of the pump body. In this embodiment, if Figure 1 、 Figure 4 and Figure 5 As shown, the valve body 130 and the pump body are preferably arranged as two independent structures, and the valve body 130 and the pump body are detachably connected.

[0112] More specifically, Figure 1 and Figure 4-7 As shown, the valve body 130 includes a first sub-valve body and a second sub-valve body that are detachably connected. The first sub-valve body and the second sub-valve body form a receiving chamber 132. The pump body is detachably connected to the first sub-valve body, and the receiving chamber 132 is connected to the opening 111 of the pump body. The receiving chamber 132 is used to accommodate structures such as the drive shaft 82, the drive arm 83, and the pump cover. This further facilitates the assembly and disassembly of the drive arm 83 and the vacuum pump body. It can be understood that the interior of the valve body 130 is the receiving chamber 132, and the receiving chamber 132 is connected to the through hole 131. The connection method for the detachable connection between the first and second sub-valve bodies can be selected from threaded, plug-in, and other connection methods.

[0113] The present invention also provides a vacuum coating device, which includes the above-mentioned vacuum pump device. By adopting the above-mentioned vacuum pump device, the working performance and service life of the vacuum coating device can be effectively improved.

[0114] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. An adjusting device, wherein a workpiece (100) comprises a first part (110) and a second part (120) capable of covering an opening (111) of the first part (110), characterized in that: The regulating device comprises a first regulating structure (1), the first regulating structure (1) being connected between an output end of a driving device and a second part (120), the driving device being configured to drive the second part (120) to rotate about an axis so that the second part (120) has a first working state in which it covers an opening (111) of the first part (110), and a second working state in which it is away from the first part (110); The first adjustment structure (1) is configured to synchronously adjust the posture of the second part (120) during the process of the second part (120) changing from the second working state to the first working state, so that when the second part (120) is in the first working state, the second part (120) can seal the opening (111) of the first part (110).

2. The adjustment device according to claim 1, characterized in that The first adjustment structure (1) includes a universal adjustment structure, the output end of the driving device is in transmission connection with the universal adjustment structure, and the universal adjustment structure is also connected to the second part (120); when the second part (120) is transformed from the second working state to the first working state, the universal adjustment structure can synchronously adjust the sealing surface (121) of the second part (120) and the covering surface of the first part (110) to be parallel.

3. The adjustment device according to claim 2, characterized in that The universal adjustment structure includes a universal bearing (11), the output end of the driving device is transmission-connected to the universal bearing (11), the outer ring of the universal bearing (11) can rotate relative to the inner ring of the universal bearing (11) and is connected to the second part (120).

4. The adjustment device according to claim 3, characterized in that The first adjustment structure (1) further comprises a connection limit assembly, wherein the connection limit assembly comprises a detachably connected upper connection limit member (12) and a lower connection limit member (13), wherein the lower connection limit member (13) is further connected to the second part (120); The outer ring fixing clamp of the universal bearing (11) is arranged between the upper connection limiter (12) and the lower connection limiter (13); or, the outer ring fixing clamp of the universal bearing (11) is arranged between the upper connection limiter (12), the lower connection limiter (13) and the second part (120).

5. The adjustment device according to claim 4, characterized in that The adjusting device further comprises a guide shaft (2), the output end of the driving device is slidably connected to the guide shaft (2) along the axial direction of the guide shaft (2), and the inner ring of the universal bearing (11) is fixedly sleeved on the guide shaft (2); The output end of the driving device is also in transmission connection with the inner ring of the universal bearing (11), the outer ring of the universal bearing (11) and one of the upper connection limiter (12).

6. The adjusting device according to any one of claims 1 to 5, characterized in that: The regulating device further comprises a first elastic member (3), wherein the first elastic member (3) is defined between the output end of the driving device and the first regulating structure (1); when the second part (120) is in the first working state, the output end of the driving device can apply pressure to the first elastic member (3) so that the first elastic member (3) is elastically pressed against the first regulating structure (1) in the circumferential direction.

7. The adjusting device according to any one of claims 1 to 5, characterized in that: The driving device further comprises a guide shaft (2), the output end of the driving device being slidably connected to the guide shaft (2) along the axial direction of the guide shaft (2), and the first adjustment structure (1) being arranged on the guide shaft (2) and being transmission-connected to the output end of the driving device; The adjusting device further comprises a second adjusting structure (4), which is arranged between the output end of the driving device and the axial end limit edge (21) of the guiding shaft (2) along the axial direction of the guiding shaft (2), and the second adjusting structure (4) is capable of adjusting the distance between the sealing surface (121) of the second part (120) and the fixed surface (831), and the fixed surface (831) is a plane on the output end of the driving device that is parallel to the covering surface of the first part (110) when the second part (120) is in the first working state.

8. The adjustment device according to claim 7, characterized in that The second adjustment structure (4) comprises an adjustment washer (41) and / or an adjustment bushing (42), wherein the adjustment washer (41) and the adjustment bushing (42) are both used to be sleeved on the guide shaft (2) and are both distributed between the output end of the drive device and the shaft end limit edge (21).

9. The adjusting device according to any one of claims 1 to 5, characterized in that: The regulating device further comprises a plurality of elastic positioning structures (5) arranged at the output end of the driving device, wherein the plurality of elastic positioning structures (5) are distributed at intervals along the circumference of the second part (120); When the second part (120) is in the second working state, the plurality of elastic positioning structures (5) can adjust the sealing surface (121) of the second part (120) to be parallel to the fixed surface (831); the fixed surface (831) is a plane on the output end of the driving device that is parallel to the covering surface of the first part (110) when the second part (120) is in the first working state.

10. The adjustment device according to claim 9, characterized in that The regulating device further comprises a mounting seat (6) connected to the output end of the driving device, the mounting seat (6) being provided with a plurality of mounting holes (61), and the plurality of mounting holes (61) being arranged in a one-to-one correspondence with the plurality of elastic positioning structures (5); The elastic positioning structure (5) includes a screw (51) with one end threadedly connected to the mounting hole (61), a positioning rod (52) slidably arranged in the mounting hole (61), a second elastic member (53) distributed in the mounting hole (61), and a locking member (54), wherein the two ends of the second elastic member (53) are respectively fixedly arranged on the screw (51) and the positioning rod (52), and the end of the positioning rod (52) extending out of the mounting hole (61) is used to press against the second part (120), and the locking member (54) can lock or unlock the relative position of the screw (51) and the mounting seat (6).

11. A driving device, wherein the workpiece (100) comprises a first part (110), and a second part (120) capable of covering an opening (111) of the first part (110), wherein a plurality of first parts (110) of the workpiece (100) are spaced apart and are all disposed on a valve body (130), characterized in that: The driving device comprises: a driving member (81) fixedly disposed on the valve body (130); a drive shaft (82), the drive shaft (82) being drivingly connected to the output shaft of the drive member (81) and being rotationally connected to the valve body (130); A plurality of driving arms (83) are distributed at intervals along the axial direction of the driving shaft (82) and are all fixedly sleeved on the driving shaft (82); a plurality of second parts (120) of the workpieces (100) are arranged in a one-to-one correspondence with the plurality of driving arms (83), and the output end of the driving arm (83) is transmission-connected to the second part (120); and the driving member (81) can drive the driving arm (83) to rotate around the central axis of the driving shaft (82).

12. The driving device according to claim 11, characterized in that The driving member (81) is a motor.

13. The driving device according to claim 11, characterized in that The driving device further comprises a coaxiality adjustment assembly (9), wherein the coaxiality adjustment assembly (9) is connected between the driving shaft (82) and the valve body (130), and the coaxiality adjustment assembly (9) is used to adjust the central axis of the driving shaft (82) to be colinear with the rotation center line.

14. A vacuum pump device, comprising a valve body (130) and a plurality of vacuum pump bodies, the vacuum pump bodies comprising a pump body disposed on the valve body (130) and a pump cover capable of covering an opening (111) of the pump body, further comprising a plurality of adjustment devices according to any one of claims 1 to 10, and further comprising a driving device according to any one of claims 11 to 13, the vacuum pump body being the workpiece (100), the first part (110) being the pump body, the second part (120) being the pump cover, and the pump covers of the plurality of vacuum pump bodies being independently disposed; The pump covers of the plurality of vacuum pump bodies, the plurality of regulating devices and the plurality of driving arms (83) are all arranged in a one-to-one correspondence, and the first regulating structure (1) is connected between the output end of the driving arm (83) and the pump cover.

15. Vacuum coating equipment, characterized in that, Includes the vacuum pump device according to claim 14.

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