Semiconductor-grade high-thermal-conductivity graphite material production reaction furnace

Abstract

The invention relates to the technical field of graphitization furnaces, in particular to a semiconductor-grade high-thermal-conductivity graphite material production reaction furnace which comprises a reaction unit and a storage unit, the reaction unit comprises a furnace body, a discharging mechanism, a discharging mechanism and a heating mechanism, and the storage unit comprises a frame body fixedly connected to the interior of the furnace body. The frame bodies are vertically arranged in the furnace body from top to bottom, shaft rods are rotationally connected to the inner walls of the frame bodies, bottom plates fixedly sleeve the outer surfaces of the shaft rods, release assemblies are arranged at the bottom of the furnace body, graphite materials are distributed into the multiple independent frame bodies through the separated structural design of the frame bodies and the bottom plates, the material stacking effect in the single frame body is low during heating, and the heating efficiency is improved. The heat conduction difference between the upper part and the lower part is small, the heat conduction path is shorter, the heat loss is less, the heating efficiency is greatly improved, the quality difference caused by local overheating or insufficient heating is reduced, the bottom plate can be driven to turn over by driving the transmission of the central rod, the driving wheel and the driven wheel through the first motor, and the discharging effect is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of graphitization furnaces, in particular to a reactor for producing semiconductor-grade high-thermal-conductivity graphite materials. Background Art

[0002] A graphite material production reactor is a high-temperature device used to convert carbon materials into graphite. It usually refers to a graphitization furnace, which is mainly composed of a furnace body, a heating system, a cooling system, and a control system. It causes the carbon material to undergo a graphitization reaction through heating.

[0003] After searching, the invention patent with publication number CN115159517A proposes a graphitization furnace for carbon products, including a furnace body and a telescopic assembly. The bottom of the furnace body is evenly provided with support legs. The top opening of the furnace body is correspondingly matched with a furnace cover. The top of the furnace cover is provided with a top seat, and a hanging hole is opened on the top seat. A power assembly is provided on the side of the furnace body, and a moving assembly is provided on the bottom of the side of the furnace body. A transmission assembly and a drive assembly are provided on the moving assembly. The telescopic assembly includes a side shaft, a slide rail, a slide rod, a slide seat, a side seat and an electric push rod. The side shaft is symmetrically arranged on both sides of the top of the furnace body, one end of the slide rail is fixedly sleeved on the end of the side shaft, and the slide rod passes through the end of the slide rail. The graphitization furnace has a lifting function, which is convenient for placing materials and opening the furnace cover. In addition, it is convenient to move the position of the furnace body and is highly practical.

[0004] The above patent still has shortcomings in actual use. The traditional reactor has an integrated structure. When the graphite material is added into the reactor, it will be piled up as a whole. Under the action of gravity, the graphite material at the bottom will be compacted, and the graphite material at the top will be relatively loose, resulting in differences in thermal conductivity and uneven temperature, which affects the overall heating efficiency. Based on this, the present invention discloses a reactor for producing semiconductor-grade high thermal conductivity graphite materials. Summary of the Invention

[0005] In order to solve the problem in the background art that the graphite material as a whole is piled up in the furnace body, resulting in a difference in thermal conductivity and affecting the heating efficiency, the present invention provides a semiconductor-grade high thermal conductivity graphite material production reactor, comprising a reaction unit and a storage unit;

[0006] The reaction unit includes a furnace body, a feeding mechanism, a discharging mechanism and a heating mechanism. The feeding mechanism is arranged at the top of the furnace body, the discharging mechanism is arranged at the bottom of the furnace body, and the heating mechanism is distributed in an annular gradient along the outer surface of the furnace body.

[0007] The storage unit includes a frame fixedly connected to the inside of the furnace body, the frame is arranged vertically from top to bottom inside the furnace body, the inner wall of the frame is rotatably connected to a shaft, the outer surface of the shaft is fixedly sleeved with a bottom plate, the bottom plate is configured as a quarter-circular ring structure, and all the bottom plates are spliced ​​to form an integral circular ring structure;

[0008] The bottom of the furnace body is provided with a release assembly, and the outer surface of the furnace body is provided with an air supply unit;

[0009] As a further improvement of the present technical solution, the release assembly includes a motor 1 arranged at the bottom of the furnace body, the driving end of the motor 1 is fixedly connected to a center rod, the outer surface of the center rod is fixedly sleeved with a driving wheel, the interior of the furnace body is fixedly connected to a column, and the column is arranged on the outer surface of the center rod to play a protective role.

[0010] As a further improvement of this technical solution, the end of the shaft away from the inner wall of the frame is movably inserted into the side of the column, and the end of the shaft extending into the interior of the column is fixedly connected to the driven wheel, and the driving wheel is meshed with the driven wheel.

[0011] As a further improvement of the present technical solution, a conduit is provided at the bottom of the unloading mechanism, the number of the conduits is the same as the number of the frames, and the bottom outlet of each conduit is respectively provided at a corresponding upper portion of a different frame.

[0012] As a further improvement of the present technical solution, the air supply unit includes an air inlet pipe fixedly connected to the lower part of the outer surface of the furnace body, a fan is arranged inside the air inlet pipe, a focusing plate is arranged on the inner wall of the furnace body, and the focusing plate is arranged as a triangular structure with an arc edge line, a convection component is arranged on the inner wall of the air inlet pipe, and an exhaust component is arranged on the upper part of the outer surface of the furnace body.

[0013] As a further improvement of the present technical solution, the convection assembly includes a transmission rod movably inserted into the middle of the exhaust pipe, a second motor is provided on the outer surface of the furnace body, the driving end of the second motor is fixedly connected to the bottom of the transmission rod, and an eccentric wheel is fixedly provided on the outer surface of the transmission rod.

[0014] As a further improvement of this technical solution, the inner wall of the air intake pipe is fixedly and slidably connected with a vertical plate, the outer surface of the vertical plate is slidably engaged with the outer surface of the eccentric wheel through a limiting slider, and the side of the vertical plate is hinged with a guide plate.

[0015] As a further improvement of the present technical solution, the inner wall of the air intake pipe is fixedly connected to a limit rod, and a strip groove is provided through the upper surface of the guide plate, and the strip groove is sleeved on the outer surface of the limit rod.

[0016] As a further improvement of the present technical solution, the exhaust assembly includes an exhaust pipe fixedly connected to the upper outer surface of the furnace body, a round rod is movably inserted into the middle of the exhaust pipe, baffles are distributed in a circular array on the outer surface of the round rod, and a cross-shaped groove plate is fixedly connected to the bottom end of the round rod.

[0017] As a further improvement of the present technical solution, the top end of the transmission rod is rotatably connected to the lower surface of the exhaust pipe, and a turntable is fixedly sleeved on the outer surface of the transmission rod near the top, and a shift block is fixedly connected to the edge of the upper surface of the turntable, and the shift block is slidably engaged with the inside of the cross-grooved disk.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. In this semiconductor-grade high-thermal-conductivity graphite material production reactor, the graphite material is diverted into multiple independent frames through the separate structural design of the frame and the bottom plate. During heating, the material accumulation effect in a single frame is low, the thermal conductivity difference between the upper and lower parts is small, the heat conduction path is shorter, and the heat loss is less, which greatly improves the heating efficiency and reduces the quality difference caused by local overheating or insufficient heating. The motor drives the center rod and the driving wheel and the driven wheel to drive the bottom plate to flip, thereby achieving the effect of unloading.

[0020] 2. In the reactor for producing semiconductor-grade high-thermal-conductivity graphite materials, the fan in the air inlet pipe drives the air to flow into the furnace body. After being heated by the heating mechanism, the air is guided along the converging plate to form convergent convection. The guide plate is driven by motor 2 to swing back and forth in a small amplitude. Its bifurcated design makes the air flow flow to both sides. The angle change during the swing changes the air flow direction and the cross-sectional area of ​​the channel, forming a turbulent effect. The air flow no longer flows in a single direction, but cross-convection in the furnace, thereby enhancing heat exchange with the graphite material.

[0021] 3. In this reactor used to produce semiconductor-grade, high-thermal-conductivity graphite, the rotation of the turntable drives the shifter, which in turn drives the cross-grooved disc. This causes the round rod to periodically rotate the baffle, changing the area of ​​the gap between the baffle and the exhaust pipe. When the gap opens, hot air is rapidly discharged. When the gap closes, the airflow is obstructed, breaking the closed-loop airflow within the furnace. This alternating airflow disturbance makes the temperature field more uniform, further improving heat transfer efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 This is a schematic diagram of the interior structure of the furnace body of the present invention from a first perspective;

[0024] Figure 3 This is a schematic structural diagram of the interior of the furnace body of the present invention from a second perspective;

[0025] Figure 4 This is a schematic structural diagram of the storage unit in the first state of the present invention;

[0026] Figure 5 This is a schematic structural diagram of the storage unit of the present invention in the second state;

[0027] Figure 6 for Figure 5 A magnified view of the structure at point A;

[0028] Figure 7 This is a schematic structural diagram of the air supply assembly of the present invention;

[0029] Figure 8 It is a schematic structural diagram of the convection component of the present invention;

[0030] Figure 9 It is a schematic diagram of the exhaust assembly structure of the present invention.

[0031] The meaning of each number in the figure is:

[0032] 11. Furnace body; 12. Unloading mechanism; 13. Discharging mechanism; 14. Heating mechanism; 21. Frame; 22. Shaft; 23. Bottom plate; 24. Conduit; 31. Motor 1; 32. Column; 33. Center rod; 34. Driving wheel; 35. Driven wheel; 41. Inlet pipe; 42. Fan; 43. Focusing plate; 51. Motor 2; 52. Transmission rod; 53. Eccentric wheel; 54. Vertical plate; 55. Guide plate; 56. Limiting rod; 57. Strip groove; 61. Exhaust pipe; 62. Round rod; 63. Baffle; 64. Turntable; 65. Dial block; 66. Cross-grooved plate. DETAILED DESCRIPTION

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0034] To this end, the present invention provides a semiconductor-grade high thermal conductivity graphite material production reactor, see Figures 1 to 9 As shown, it includes a reaction unit and a storage unit;

[0035] The reaction unit includes a furnace body 11, a feeding mechanism 12, a discharge mechanism 13 and a heating mechanism 14. The feeding mechanism 12 is arranged at the top of the furnace body 11, the discharge mechanism 13 is arranged at the bottom of the furnace body 11, and the heating mechanism 14 is distributed in an annular gradient along the outer surface of the furnace body 11. The storage unit includes a frame body 21 fixedly connected to the inside of the furnace body 11. The frame body 21 is vertically arranged from top to bottom inside the furnace body 11. The inner wall of the frame body 21 is rotatably connected to the shaft rod 22. The outer surface of the shaft rod 22 is fixedly sleeved with a bottom plate 23. The bottom plate 23 is arranged to be a quarter-circular ring structure. All the bottom plates 23 are spliced ​​to form an overall circular structure. A conduit 24 is provided at the bottom of the feeding mechanism 12, a release component is provided at the bottom of the furnace body 11, and an air supply unit is provided on the outer surface of the furnace body 11. The specific connection mode and operation principle of the reaction furnace structures such as the feeding mechanism 12, the discharge mechanism 13 and the heating mechanism 14 are the existing technology well known to the staff in this field, and will not be elaborated on here.

[0036] When the graphite material is heated and reacted, the graphite material is transported to the inside of the furnace body 11 through the feeding mechanism. After the graphite material enters the feeding mechanism, it will flow out from each conduit 24, so that the graphite material is diverted to all the frames 21. The graphite material is placed in the separated frames 21. The stacking effect of the graphite material in a single frame 21 is low, and the difference in thermal conductivity of the graphite material in the upper and lower parts is small. The heating mechanism 14 heats the graphite material in the single frame 21 inside the furnace body 11. The heat conduction path is shorter and the heat loss is less, which greatly improves the heating efficiency and reduces the quality difference caused by local overheating or insufficient heating. In the initial stage of heating, the air supply unit can be used to enhance the convective heat transfer effect of the hot air in the furnace, thereby improving the heating effect of the graphite material. The release component can drop the heated graphite material to the bottom of the furnace body 11, and finally discharge it from the discharge mechanism 13.

[0037] like Figures 2 to 6As shown, the release assembly includes a motor 31 arranged at the bottom of the furnace body 11, and the driving end of the motor 31 is fixedly connected to the center rod 33. The outer surface of the center rod 33 is fixedly sleeved with a driving wheel 34, and the driving wheel 34 is arranged corresponding to the position of the frame 21. The interior of the furnace body 11 is fixedly connected to a column 32, and the column 32 is arranged on the outer surface of the center rod 33. The column 32 is a hollow cylindrical structure, which not only protects the center rod 33, but also provides a support and positioning structure for the shaft rod 22. The shaft rod 22 is away from the frame 21. One end of the inner wall is movably inserted into the side of the column 32, and the end of the shaft 22 extending into the interior of the column 32 is fixedly connected to the driven wheel 35, and the driving wheel 34 is meshed and connected with the driven wheel 35. The number of conduits 24 is the same as the number of frames 21, and the bottom outlet of each conduit 24 is respectively arranged at the upper part of a different frame 21. The conduit 24 transports the graphite material entering the unloading mechanism 12. The inner wall of the bottom of each conduit 24 is provided with a guide spiral pattern, which can effectively guide the graphite material to fall evenly into all frames 21;

[0038] The starting motor 31 drives the center rod 33 to rotate. During the rotation of the center rod 33, the driving wheel 34 is driven to rotate, and then the meshing driven wheel 35 is driven to rotate synchronously. The driven wheel 35 further drives the shaft 22 to rotate. As the shaft 22 rotates, the bottom plate 23 will gradually flip from a horizontal state. When the bottom plate 23 flips to a certain angle with the vertical direction, the graphite material on the bottom plate 23 begins to slide due to gravity and finally flips completely to a vertical state, so that all the graphite material falls to the bottom of the furnace body 11 and is discharged out of the furnace under the guidance of the discharge mechanism 13.

[0039] like Figures 7 to 9 As shown, the air supply unit includes an air inlet pipe 41 fixedly connected to the lower portion of the outer surface of the furnace body 11, a fan 42 is provided inside the air inlet pipe 41, and a flow collecting plate 43 is provided on the inner wall of the furnace body 11. The flow collecting plate 43 is set to a triangular structure with an arc edge line, which fits more closely to the inner wall of the furnace body 11 and can also guide the airflow. The inner wall of the air inlet pipe 41 is provided with a convection component, and the upper portion of the outer surface of the furnace body 11 is provided with an exhaust component;

[0040] When the fan 42 is powered on, it can drive air to flow into the furnace body 11. The air is heated to a high temperature after contacting the heating mechanism 14 in the furnace. The heated airflow flows along the arc edge of the converging plate 43, and converges and convects under the guidance of the triangular structure. The convected hot air flows toward the frame 21, which can improve the air flow in the furnace body 11 while realizing convective heat transfer, thereby improving the heat transfer efficiency in the initial stage of heating and significantly improving the heating speed in the initial heating stage.

[0041] like Figure 7 and Figure 8As shown, the convection component includes a transmission rod 52 that is movably inserted into the middle of the exhaust pipe 61, a motor 2 51 is provided on the outer surface of the furnace body 11, and the driving end of the motor 2 51 is fixedly connected to the bottom of the transmission rod 52, and an eccentric wheel 53 is fixedly sleeved on the outer surface of the transmission rod 52. An annular groove is provided on the upper and lower sides of the eccentric wheel 53, and a vertical plate 54 is fixedly and slidably connected to the inner wall of the air inlet pipe 41. The outer surface of the vertical plate 54 is slidably engaged with the outer surface of the eccentric wheel 53 through a limiting slider, and the outer limit slider of the vertical plate 54 is slidably engaged in the annular groove, and a guide plate 55 is hinged on the side of the vertical plate 54. The inner wall of the air inlet pipe 41 is fixedly connected to the limiting rod 56, and a strip groove 57 is provided on the upper surface of the guide plate 55, and the strip groove 57 is sleeved on the outer surface of the limiting rod 56;

[0042] The second motor 51 drives the transmission rod 52 to rotate, and the transmission rod 52 synchronously drives the eccentric wheel 53 and the turntable 64 to rotate. During the rotation of the eccentric wheel 53, the vertical plate 54 is pulled back and forth, converting the circular motion into a linear reciprocating motion of the vertical plate 54. The vertical plate 54 pushes the guide plate 55 to move while performing a linear reciprocating motion. Since the strip groove 57 opened in the middle of the guide plate 55 is limited by the limiting rod 56, the guide plate 55 slides around the limiting rod 56 while being pushed by the vertical plate 54, thus achieving a small reciprocating swing. In this process, the airflow delivered by the fan 42 is guided into the furnace body 11 through the guide plate 55. The reciprocating swing of the guide plate 55 causes the direction of the airflow to change periodically. The bifurcated design of the guide plate 55 allows the airflow to flow to both sides. The angle change of the guide plate 55 during its swing will change the direction of the airflow. At the same time, the angle change will also change the cross-sectional area of ​​the airflow channel. When it swings to the extreme position, the channel becomes narrower and the airflow speed increases. When it swings back to the middle position, the channel becomes wider and the airflow speed slows down. This dynamic adjustment causes the airflow in the furnace to form a turbulent effect. The airflow no longer flows in a single direction, but forms cross convection in the furnace, thereby enhancing the heat exchange efficiency between the air and the graphite material, and ensuring that the temperature field in the furnace tends to be consistent due to the uniform disturbance of the airflow.

[0043] like Figure 7 and Figure 9 As shown, the exhaust assembly includes an exhaust pipe 61 fixedly connected to the upper outer surface of the furnace body 11, a round rod 62 is movably inserted in the middle of the exhaust pipe 61, and a baffle 63 is distributed in a ring array on the outer surface of the round rod 62. The bottom end of the round rod 62 is fixedly connected to a cross-shaped groove disk 66. The top end of the transmission rod 52 is rotatably connected to the lower surface of the exhaust pipe 61. A turntable 64 is fixedly sleeved on the outer surface of the transmission rod 52 near the top. A shift block 65 is fixedly connected to the edge of the upper surface of the turntable 64. The shift block 65 is slidably engaged with the inside of the cross-shaped groove disk 66.

[0044] As the turntable 64 rotates, the shift block 65 will drive the shift block 65 to make a circular motion around the center of the turntable 64. During the rotation, the shift block 65 will slide into the cross-shaped groove disk 66 and drive the cross-shaped groove disk 66 to drive the round rod 62 to rotate. Since the shift block 65 only engages with the cross-shaped groove disk 66 once per rotation, the round rod 62 is driven to rotate ninety degrees each time, and the rotation of the round rod 62 will synchronously drive the baffle 63 to rotate. The area of ​​the gap between the baffle 63 and the exhaust pipe 61 changes periodically. When the baffle 63 rotates to the extreme position, the gap is completely opened and the hot air is quickly discharged. When the baffle 63 approaches the inner wall of the exhaust pipe 61 again, the gap shrinks and the airflow circulation is blocked. This intermittent discharge breaks the closed-loop circulation of the airflow in the furnace, allowing fresh hot air to be continuously replenished while driving the original airflow to form turbulence, making the temperature field more uniform due to the alternating disturbance of the airflow, further improving the heat transfer efficiency.

[0045] The technical solution provided by the present invention is that when the graphite material is subjected to a heating reaction, the graphite material is transported to the interior of the furnace body 11 through the feeding mechanism, the heating mechanism 14 is started to heat the interior of the furnace body 11, and the heating reaction realizes the graphitization of the material. After the graphite material enters the feeding mechanism, it will flow out from each conduit 24, and the outlets of different conduits 24 are correspondingly arranged above different frames 21, so that the graphite material is diverted to all frames 21. At this time, the bottom plate 23 is in a horizontal state, which is convenient for receiving the graphite material. The graphite material is placed in the separated frames 21. The stacking effect of the graphite material in the single frame 21 is low, and the difference in thermal conductivity of the graphite material in the upper and lower parts is small. The heating mechanism 14 heats the graphite material in the single frame 21 inside the furnace body 11, thereby greatly improving the heating efficiency.

[0046] In the initial stage of heating, the air inlet pipe 41 and the exhaust pipe 61 are opened, and the fan 42 is powered on to drive the air flow into the furnace body 11. The air is heated synchronously by the heating mechanism 14 in the furnace body 11. The air flows along the guide plate 55 during the flow process to realize convergent convection. The convective hot air flows toward the frame 21. This can improve the air flow in the furnace body 11 while realizing convection heat transfer, thereby improving the heat transfer efficiency in the initial stage of heating. The motor 2 51 is started to drive the transmission rod 52 to rotate. The transmission rod 52 synchronously drives the eccentric wheel 53 and the turntable 64 to rotate. During the rotation of the eccentric wheel 53, the eccentric wheel 53 rotates. The vertical plate 54 will be pulled to move back and forth, and the vertical plate 54 will push the guide plate 55 to move while performing a linear reciprocating motion. Since the strip groove 57 opened in the middle of the guide plate 55 is limited by the limit rod 56, the guide plate 55 slides around the limit rod 56 while being pushed by the vertical plate 54, thus realizing a small reciprocating swing. The airflow delivered by the fan 42 is guided into the furnace body 11 through the guide plate 55. The reciprocating swing of the guide plate 55 causes the direction of the airflow to change periodically. The bifurcated design of the guide plate 55 can make the airflow flow to both sides. The change in the angle of the guide plate 55 when it swings will change the guide direction of the airflow. When the angle changes, the cross-sectional area of ​​the airflow channel will also change. When the channel is swung to the extreme position, the channel becomes narrower and the airflow speed increases. When the channel is swung back to the middle position, the channel becomes wider and the airflow speed slows down. This dynamic adjustment causes the airflow in the furnace to form a turbulent effect. The airflow no longer flows in a single direction, but forms cross convection in the furnace, thereby enhancing the heat exchange efficiency between the air and the graphite material, improving the convective heat transfer efficiency, ensuring a more uniform temperature field, and improving the heating effect on the graphite material. In addition, a round rod 62 and a baffle 63 are provided inside the exhaust pipe 61. The baffle 63 can achieve a certain blocking effect on the air flow in the exhaust pipe 61. During the rotation of the turntable 64, the shift block 65 will move in a circular motion around the center of the turntable 64. During the rotation, the shift block 65 will slide into the cross-shaped slotted disk 66 and drive the cross-shaped slotted disk 66 to drive the round rod 62 to rotate ninety degrees. The rotation of the round rod 62 will synchronously drive the baffle 63 to rotate. The area of ​​the gap between the baffle 63 and the exhaust pipe 61 changes periodically. When the baffle 63 rotates to the extreme position, the gap is fully opened and the hot air is quickly discharged. When the baffle 63 approaches the inner wall of the exhaust pipe 61 again, the gap is reduced, the air circulation is blocked, and the circulating flow state of the airflow is broken, thereby further improving the heat transfer efficiency.

[0047] The end of the air inlet pipe 41 is provided with a valve that can be opened and closed freely. When the heating continues to the middle, the fan 42 is turned off and the valves of the air inlet pipe 41 and the exhaust pipe 61 are closed at the same time to avoid the adverse effects caused by the entry of air under high temperature conditions. After the heating is completely completed, the discharge mechanism 13 is opened, and the motor 31 is started to drive the center rod 33 to rotate. During the rotation of the center rod 33, the driving wheel 34 is driven to rotate, and then the meshing driven wheel 35 is driven to rotate synchronously. The driven wheel 35 further drives the shaft 22 to rotate. As the shaft 22 rotates, the bottom plate 23 will slowly flip from a horizontal state to a vertical state, and the heated graphite material placed on the bottom plate 23 will fall to the bottom of the furnace body 11 and eventually be discharged from the discharge mechanism 13. The bottom plate 23 will return to a horizontal state from a vertical state as the shaft 22 rotates again, which is convenient for the next loading and heating.

[0048] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0049] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor-grade high thermal conductivity graphite material production reactor, characterized in that: It includes a reaction unit and a storage unit; The reaction unit comprises a furnace body (11), a feeding mechanism (12), a discharging mechanism (13), and a heating mechanism (14); the feeding mechanism (12) is arranged at the top of the furnace body (11); the discharging mechanism (13) is arranged at the bottom of the furnace body (11); and the heating mechanism (14) is distributed in an annular gradient along the outer surface of the furnace body (11); The storage unit comprises a frame (21) fixedly connected to the inside of the furnace body (11), the frame (21) is arranged vertically from top to bottom inside the furnace body (11), the inner wall of the frame (21) is rotatably connected to a shaft (22), the outer surface of the shaft (22) is fixedly sleeved with a bottom plate (23), the bottom plate (23) is configured as a quarter-circular ring structure, and all the bottom plates (23) are spliced ​​together to form an overall circular ring structure; A release assembly is provided at the bottom of the furnace body (11), and an air supply unit is provided on the outer surface of the furnace body (11).

2. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 1, characterized in that: The release assembly includes a motor (31) arranged at the bottom of the furnace body (11), a driving end of the motor (31) is fixedly connected to a center rod (33), an outer surface of the center rod (33) is fixedly sleeved with a driving wheel (34), and the interior of the furnace body (11) is fixedly connected to a column (32), and the column (32) is arranged on the outer surface of the center rod (33) to play a protective role.

3. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 2, characterized in that: One end of the shaft (22) away from the inner wall of the frame (21) is movably inserted into the side of the column (32), and one end of the shaft (22) extending into the interior of the column (32) is fixedly connected to a driven wheel (35), and the driving wheel (34) is meshedly connected to the driven wheel (35).

4. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 1, characterized in that: A conduit (24) is provided at the bottom of the unloading mechanism (12), and the number of the conduits (24) is the same as the number of the frames (21). The bottom outlet of each conduit (24) is correspondingly provided at the upper part of a different frame (21).

5. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 1, characterized in that: The air supply unit includes an air inlet pipe (41) fixedly connected to the lower part of the outer surface of the furnace body (11), a fan (42) is provided inside the air inlet pipe (41), a focusing plate (43) is provided on the inner wall of the furnace body (11), and the focusing plate (43) is set as a triangular structure with an arc edge line, a convection component is provided on the inner wall of the air inlet pipe (41), and an exhaust component is provided on the upper part of the outer surface of the furnace body (11).

6. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 5, characterized in that: The convection assembly includes a transmission rod (52) movably inserted into the middle of the exhaust pipe (61), a second motor (51) is provided on the outer surface of the furnace body (11), a driving end of the second motor (51) is fixedly connected to the bottom of the transmission rod (52), and an eccentric wheel (53) is fixedly sleeved on the outer surface of the transmission rod (52).

7. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 6, characterized in that: The inner wall of the air inlet pipe (41) is fixedly and slidably connected to a vertical plate (54), the outer surface of the vertical plate (54) is slidably engaged with the outer surface of the eccentric wheel (53) via a limiting slider, and the side of the vertical plate (54) is hinged with a guide plate (55).

8. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 7, characterized in that: The inner wall of the air inlet pipe (41) is fixedly connected to a limiting rod (56), and a strip groove (57) is provided through the upper surface of the guide plate (55), and the strip groove (57) is sleeved on the outer surface of the limiting rod (56).

9. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 5, characterized in that: The exhaust assembly comprises an exhaust pipe (61) fixedly connected to the upper outer surface of the furnace body (11); a round rod (62) is movably inserted into the middle of the exhaust pipe (61); baffles (63) are distributed in a circular array on the outer surface of the round rod (62); and a cross-shaped groove disk (66) is fixedly connected to the bottom end of the round rod (62).

10. The semiconductor-grade high thermal conductivity graphite material production reactor according to claim 6, characterized in that: The top end of the transmission rod (52) is rotatably connected to the lower surface of the exhaust pipe (61), and a turntable (64) is fixedly sleeved on the outer surface of the transmission rod (52) near the top. A shift block (65) is fixedly connected to the edge of the upper surface of the turntable (64), and the shift block (65) is slidably engaged with the interior of the cross-shaped groove disk (66).

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