An automated wafer cassette bagging and packaging device and method

Abstract

This invention belongs to the field of wafer box packaging technology, specifically relating to an automatic wafer box bagging and packaging device and method. The automatic wafer box bagging and packaging device performs bagging and heat sealing treatment on labeled wafer boxes. It includes a packaging table, a bagging position set on the packaging table, a packaging bag storage rack set on the packaging table, a bag picking device for picking up packaging bags from the packaging bag storage rack to the bagging position, a bag supporting device for opening the packaging bag at the bagging position, a pushing device for pushing the wafer box into the opened packaging bag, and a heat sealing device for heat sealing the packaging bag. Through the cooperation of the bag picking device, the bag supporting device, the pushing device, and the heat sealing device, the labeled wafer box can be pushed into the packaging bag opened by the bag supporting device by the pushing device, and then the heat sealing device performs bag folding, vacuuming, and heat sealing treatment to complete the packaging of the wafer box. The whole process has a high degree of automation, greatly reduces manual intervention, and effectively improves the packaging efficiency of wafer boxes.

Description

Technical Field

[0001] This invention belongs to the field of wafer box packaging technology, specifically relating to an automatic wafer box bagging and packaging device and method. Background Technology

[0002] Before photolithography, wafers undergo processes such as chamfering, polishing, and cleaning. After these processes, the wafers are packaged in clean wafer packaging boxes and then vacuum-sealed in double-layer aluminum foil bags for storage and transportation. The vacuum packaging process using aluminum foil bags for wafer packaging boxes is crucial, effectively protecting the packaging boxes from damage and isolating particulate contamination, thus ensuring a high yield rate for subsequent photolithography processes. Currently, the vacuum packaging of wafer packaging boxes using aluminum foil bags is still done manually, involving tasks such as bagging, vacuuming, folding, sealing with tape, and affixing information labels. This packaging method is inefficient, requires a large amount of manpower, has high labor costs, and makes it difficult to guarantee cleanliness. Chinese patent CN111619899A discloses an automatic wafer cassette packaging device, including a bag-in module, a bag-removing device, a packaging platform, and a sealing module. After the wafer cassette is fed into an open packaging bag by the bag-in module, it is transferred to the sealing module for heat sealing. However, due to its material, the packaging bag is relatively soft and thin, and is prone to damage during the transfer process. In addition, the bag opening is soft and collapses. When transferring from the bag-in module to the sealing module, relatively careful handling is required to ensure that the bag opening can enter the sealing module for heat sealing. The transfer requirements are high and the packaging efficiency is low, which urgently needs improvement. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide an automatic wafer cassette bagging and packaging device and packaging method.

[0004] The present invention adopts the following technical solution:

[0005] An automatic bagging and packaging device for wafer cassettes, which performs bagging and heat sealing on labeled wafer cassettes, includes a packaging table, a bagging position set on the packaging table, a packaging bag storage rack set on the packaging table, a bag-picking device for picking up packaging bags from the packaging bag storage rack and placing them at the bagging position, a bag-opening device for opening the packaging bags at the bagging position, a pusher device for pushing the wafer cassettes into the opened packaging bags, and a heat-sealing device for heat sealing the packaging bags.

[0006] The heat sealing device includes two folding bag seats movable towards each other on a sealing platform, two folding bag cutters respectively mounted on the two folding bag seats, a negative pressure tube disposed inside one of the folding bag cutters, an upper heat sealing assembly and a lower heat sealing assembly disposed vertically opposite each other, a first moving mechanism mounted on the sealing platform to drive the folding bag seats to move, a second moving mechanism to drive the two folding bag seats to move towards each other, an upper positioning plate extending downward on the upper heat sealing assembly, and a lower positioning plate extending upward on the lower heat sealing assembly opposite to the upper positioning plate. The two folding bag cutters are respectively opposite to the two sides of the packaging bag. The upper and lower positioning plates are vertically opposite each other on the side opposite the wafer cassette and the negative pressure tube. The first moving mechanism drives the folding bag seats to move closer to the bag filling position so that the negative pressure tube extends into the packaging bag, and the folding bag cutter on the same side is located on the outside of the packaging bag. The second moving mechanism drives the two folding bag cutters to move towards each other so that the folding bag cutter drives the side of the packaging bag in contact with it to move inward to complete the folding of the packaging bag opening.

[0007] The negative pressure tube includes a main body section that connects to an external negative pressure source and a flat section that can extend into a packaging bag.

[0008] The lower heat-sealing assembly includes a lower heat-sealing seat mounted on a sealing platform, a lower heat-sealing head mounted on the lower heat-sealing seat that can move up and down, a first heat-sealing cylinder connected to and driving the lower heat-sealing head to move, a mounting plate for mounting the first heat-sealing cylinder, and a second heat-sealing cylinder mounted on the lower heat-sealing seat and connected to the mounting plate. The lower positioning plate is mounted on the mounting plate and extends upward. When the negative pressure tube is working, the second heat-sealing cylinder drives the mounting plate to move upward, causing the lower heat-sealing head to contact the bottom surface of the packaging bag. After the negative pressure tube has completed its work, the first moving mechanism drives the folding bag seat to move, causing the negative pressure tube to be pulled out of the packaging bag. At this time, the first heat-sealing cylinder drives the lower heat-sealing head to move upward and cooperate with the upper heat-sealing assembly to clamp the folding part of the packaging bag for heat sealing.

[0009] Preferably, the bag-retrieving device includes a first bag-retrieving frame extending along the direction near the bag-filling position on the sealing platform, a second bag-retrieving frame extending along the direction near the packaging bag storage rack on the first bag-retrieving frame, a support plate movably disposed on the first bag-retrieving frame for placing packaging bags, a correction mechanism located below the second bag-retrieving frame for correcting the position of packaging bags, a bag-retrieving assembly movably disposed on the second bag-retrieving frame for clamping packaging bags, a first drive assembly disposed on the first bag-retrieving frame for driving the support plate to move, and a second drive assembly disposed on the second bag-retrieving frame for driving the bag-retrieving assembly to move. The bag-retrieving assembly picks up packaging bags from the packaging bag storage rack and places them onto the support plate, and the first drive assembly drives the support plate with the packaging bags to move to the bag-filling position.

[0010] Preferably, the calibration mechanism includes a calibration frame that can be moved up and down below the second bag-retrieving frame, two first calibration components that are arranged opposite each other on both sides of the calibration frame, two second calibration components that are arranged opposite each other on both sides of the calibration frame, and a lifting cylinder that connects to and drives the calibration frame to move up and down. The two first calibration components and the two second calibration components are alternately arranged on the four outer surfaces of the calibration frame. The first calibration component includes a calibration plate that can move along the opposite outer surface and a first calibration cylinder that is arranged on the calibration frame to drive the calibration plate to move. The second calibration component includes a calibration column that can move along the opposite outer surface and a second calibration cylinder that is arranged on the calibration frame to drive the calibration column to move. The support plate is provided with a strip-shaped moving hole for the opposite calibration column to pass through.

[0011] Preferably, the bag-retrieving assembly includes a movable seat movably disposed on a second bag-retrieving frame, a bag-retrieving plate disposed at the lower end of the movable seat that can extend into a packaging bag storage rack, and a plurality of bag-retrieving suction nozzles spaced apart at the lower end of the bag-retrieving plate.

[0012] Preferably, the packaging bag includes two upper edges disposed opposite to each other on its top surface and two lower edges disposed opposite to each other on its bottom surface. The bag supporting device includes an adsorption bag supporting assembly disposed above the bag filling position and two clamping bag supporting assemblies disposed opposite to each other on the packaging platform on both sides of the packaging bag. The two clamping bag supporting assemblies are respectively opposite to the two upper edges. The clamping bag supporting assembly includes a clamping bag supporting base, an upper clamping member disposed vertically on the clamping bag supporting base for clamping the upper edge, a lower clamping member disposed vertically on the clamping bag supporting base for clamping the lower edge, a first lifting member disposed on the clamping bag supporting base to drive the upper clamping member to move, and a second lifting member disposed on the clamping bag supporting base to drive the lower clamping member to move.

[0013] Preferably, the adsorption bag support assembly includes an adsorption bag support frame, a lifting plate that can be moved up and down on the adsorption bag support frame, a fixed suction nozzle on the lifting plate, an adjusting plate on the lifting plate that can move relative to the fixed suction nozzle, a movable suction nozzle on the adjusting plate opposite to the fixed suction nozzle, a first lifting cylinder connected to and driving the lifting plate to move, and a second lifting cylinder on the adsorption bag support frame connected to and driving the first lifting cylinder to move up and down. The movable suction nozzle and the fixed suction nozzle can be adsorbed and fixed on the top surface of the packaging bag.

[0014] Preferably, the pushing device includes a movable frame that is mounted on the packaging platform and can move along the direction of approaching the bagging position, a pushing plate mounted on the movable frame for placing wafer cassettes, a first pushing cylinder mounted on the movable frame to drive the pushing plate to move closer to the bagging position, and a second pushing cylinder mounted on the pushing plate to push the wafer cassettes into the packaging bag.

[0015] A wafer cassette packaging method, based on any one of the bagging and packaging devices described above, specifically includes the following steps:

[0016] Step 1: The wafer cassette with the information label is fed into the feeding device. The bag taking device takes the packaging bag out from the packaging bag storage rack and moves it to the bagging position. The bag opening device opens the packaging bag at the bagging position. The feeding device then pushes the wafer cassette into the opened packaging bag.

[0017] Step 2: The bag folding seat moves closer to the bagging position, causing the two bag folding knives and the negative pressure tube to move closer to the packaging bag so that the two bag folding knives are located on the outer sides of opposite sides of the packaging bag, and the negative pressure tube extends into the packaging bag. Then, the second moving mechanism drives the two bag folding knives to move towards each other, causing the sides of the packaging bag that are in contact with them to move inward into place, thus completing the bag folding process at the bag opening.

[0018] Step 3: The upper heat-sealing assembly moves downwards to contact the upper surface of the folded area of ​​the packaging bag, while the lower heat-sealing assembly moves upwards to contact the lower surface of the folded area. The negative pressure tube operates to vacuum the inside of the packaging bag. The wafer cassette is limited by the upper and lower positioning plates and will not move. After the negative pressure tube completes the vacuuming process, the first moving mechanism drives the folding seat to move away from the bagging position, thereby pulling the negative pressure tube out of the packaging bag. At this time, the lower heat-sealing assembly moves upwards further to cooperate with the upper heat-sealing assembly to clamp the folded area of ​​the packaging bag for heat sealing, thus completing the vacuuming and heat sealing process of the folded packaging bag.

[0019] As can be seen from the above description of the present invention, compared with the prior art, the beneficial effects of the present invention are as follows: By defining the structural composition of the bagging and heat-sealing device, and through the cooperation of the bag-taking device, bag-supporting device, material-pushing device, and heat-sealing device, the packaging bag can complete the pushing, folding, and heat-sealing of the wafer cassette at a fixed position to complete the encapsulation of the wafer cassette. This eliminates the need to transfer the above operations between multiple devices, thus solving the problem that packaging bags are easily damaged during transportation due to their softness and thinness. The overall structure is compact, the entire process is highly automated, greatly reducing manual intervention and effectively... This improves the packaging efficiency of wafer cassettes and also increases the yield rate of wafer cassette packaging. Specifically, the setting of the negative pressure tube and the folding knife is defined, and the upper and lower heat sealing components work together to ensure that the negative pressure tube can work with the folding knife. When the packaging bag is folded, the negative pressure tube is already inside the packaging bag, and the vacuuming process can begin. When the negative pressure tube completes the vacuuming and withdraws outward, the lower heat sealing component can further cooperate with the upper heat sealing component to clamp the folded part of the packaging bag for heat sealing. The overall operation is smooth and can ensure the efficiency and yield rate of wafer cassette vacuum packaging. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the bagging and sealing device;

[0021] Figure 2A partial structural diagram of the bagging and sealing device. Figure 1 ;

[0022] Figure 3 A partial structural diagram of the bagging and sealing device. Figure 2 ;

[0023] Figure 4 A partial structural diagram of the bagging and sealing device. Figure 3 ;

[0024] Figure 5 Schematic diagram of the bag-removing device Figure 1 ;

[0025] Figure 6 Schematic diagram of the bag-removing device Figure 2 ;

[0026] Figure 7 This is a schematic diagram of the bag-supporting device;

[0027] Figure 8 This is a schematic diagram of the adsorption bag support assembly;

[0028] Figure 9 This is a schematic diagram of the structure of the first clamping support bag assembly;

[0029] Figure 10 This is a schematic diagram of the structure of the second clamping support bag assembly;

[0030] Figure 11 This is a schematic diagram of the material pushing device and the bag folding knife;

[0031] Figure 12 This is a schematic diagram of the upper heat sealing assembly and the lower heat sealing assembly;

[0032] Figure 13 A schematic diagram showing the process of packaging bags transitioning from bag stretching to bag folding.

[0033] In the diagram, 1. Sealing platform; 2. Packaging bag storage rack; 3. Bag picking device; 4. Bag supporting device; 5. Material pushing device; 6. Heat sealing device; 7. Packaging bag; 11. Bag filling position; 21. Storage rack body; 22. Bag pressing frame; 23. Bag pressing roller; 24. Z-axis moving module; 31. First bag picking frame; 32. Second bag picking frame; 33. Support plate; 331. Negative pressure suction nozzle; 332. Strip-shaped moving hole; 34. Correction mechanism; 341. Correction frame; 342. First correction component; 343. Second correction component; 44. Lifting cylinder; 345. Correction plate; 346. First correction cylinder; 347. Correction column; 348. Second correction cylinder; 35. Bag-taking assembly; 351. Moving seat; 352. Bag-taking plate; 353. Bag-taking nozzle; 36. First drive assembly; 37. Second drive assembly; 41. Adsorption bag-supporting assembly; 411. Adsorption bag-supporting frame; 412. Lifting plate; 413. Fixed nozzle; 414. Adjusting plate; 415. Moving nozzle; 416. First lifting cylinder; 417. Second lifting cylinder; 2. First clamping and supporting bag assembly; 421. Clamping and supporting bag seat; 422. Upper clamping component; 423. Lower clamping component; 424. First lifting component; 425. Second lifting component; 426. Upper clamping frame; 427. Upper clamping pneumatic gripper; 43. Second clamping and supporting bag assembly; 51. Moving frame; 52. Pushing plate; 53. First pushing cylinder; 54. Second pushing cylinder; 55. Limiting cylinder; 56. Pushing linear movement module; 61. Folding bag seat; 62. Folding bag knife; 63. Negative pressure pipe; 631. Main body section; 6 32. Flat section; 64. Upper heat sealing assembly; 641. Upper heat sealing seat; 642. Upper heat sealing head; 643. Upper heat sealing cylinder; 65. Lower heat sealing assembly; 651. Lower heat sealing seat; 652. Lower heat sealing head; 653. First heat sealing cylinder; 654. Mounting plate; 655. Second heat sealing cylinder; 66. First moving mechanism; 67. Second moving mechanism; 68. Upper positioning plate; 69. Lower positioning plate; 71. Upper edge; 72. Lower edge; 73. Bag opening; 74. Top surface; 75. Side surface; 76. Folding area. Detailed Implementation

[0034] The present invention will be further described below through specific embodiments.

[0035] Reference Figures 1 to 13As shown, an automatic wafer cassette bagging and packaging device performs bagging and heat sealing treatment on labeled wafer cassettes. It includes a packaging platform 1, a bagging position 11 on the packaging platform 1, a packaging bag storage rack 2 on the packaging platform 1, a bag-picking device 3 for picking up packaging bags 7 from the packaging bag storage rack 2 and placing them at the bagging position 11, a bag-supporting device 4 for opening the packaging bags 7 at the bagging position 11, a pusher device 5 for pushing the wafer cassette into the opened packaging bag 7, and a heat-sealing device 6 for heat-sealing the packaging bag 7. Specifically, the packaging bag 7 includes a top surface 74, two upper edges 71 opposite to each other on the top surface 74, two lower edges 72 opposite to each other on the bottom surface, two side surfaces 75 opposite to each other on both sides of the top surface 74, and a bag opening 73 for the wafer cassette to enter.

[0036] The packaging bag storage rack 2 includes a storage rack body 21 for placing packaging bags 7, two bag pressing frames 22 disposed on opposite sides of the storage rack body 21, a bag pressing roller 23 disposed vertically between the two bag pressing frames 22, and a Z-axis moving module 24 for driving the storage rack body 21 to move vertically. Multiple unsupported packaging bags 7 are stacked sequentially in the storage rack body 21, and the bag pressing roller 23 presses on the packaging bags 7. The bag pressing roller 23 prevents one side of the packaging bag 7 in the storage rack body 21 from warping or bending. Different weights of bag pressing rollers 23 can be selected according to the softness or hardness of the packaging bag 7 to ensure that the bag taking device 3 can only take out one packaging bag 7 at a time.

[0037] The bag-retrieving device 3 includes a first bag-retrieving frame 31 extending along the direction near the bag-filling position 11 on the sealing table 1, a second bag-retrieving frame 32 extending along the direction near the packaging bag storage rack 2 on the first bag-retrieving frame 31, a support plate 33 movably mounted on the first bag-retrieving frame 31 for placing packaging bags 7, a correction mechanism 34 located below the second bag-retrieving frame 32 for correcting the position of the packaging bags 7, a bag-retrieving assembly 35 movably mounted on the second bag-retrieving frame 32 for clamping the packaging bags 7, a first drive assembly 36 mounted on the first bag-retrieving frame 31 for driving the support plate 33 to move, and a second drive assembly 37 mounted on the second bag-retrieving frame 32 for driving the bag-retrieving assembly 35 to move. When retrieving a bag, the bag-retrieving assembly 35 cooperates with the second drive assembly 37. The first drive assembly 37 picks up the packaging bag 7 from the packaging bag storage rack 2 and places it onto the support plate 33. The first drive assembly 36 drives the support plate 33, on which the packaging bag 7 is placed, to move to the bagging position 11. Specifically, the support plate 33 is provided with multiple negative pressure suction nozzles 331. After the correction mechanism 34 completes the correction of the position of the packaging bag 7, the multiple negative pressure suction nozzles 331 work to adsorb and fix the packaging bag 7 on the support plate 33, preventing the packaging bag 7 from shifting during the movement of the support plate 33 to the bagging position 11, which would affect the subsequent bag-holding process. Furthermore, both the first drive assembly 36 and the second drive assembly 37 adopt linear motion modules. Linear motion modules are existing technology, and their specific structure and working principle will not be further described here.

[0038] The calibration mechanism 34 includes a calibration frame 341 that can be moved up and down below the second bag-retrieving frame 32, two first calibration components 342 that are arranged opposite to each other on both sides of the calibration frame 341, two second calibration components 343 that are arranged opposite to each other on both sides of the calibration frame 341, and a lifting cylinder 344 that connects to and drives the calibration frame 341 to move up and down. The two first calibration components 342 and the two second calibration components 343 are alternately arranged on the four outer surfaces of the calibration frame 341. Specifically, the first calibration component 342 includes a calibration plate 345 that can move along the opposite outer surface and a first calibration cylinder 346 that is arranged on the calibration frame 341 to drive the calibration plate 345 to move. The second calibration component 343 includes a calibration column 347 that can move along the opposite outer surface and a second calibration cylinder 348 that is arranged on the calibration frame 341 to drive the calibration column 347 to move. The support plate 33 is provided with a strip-shaped moving hole 332 for the opposite calibration column 347 to pass through.

[0039] The bag-retrieving assembly 35 includes a movable seat 351 movably mounted on the second bag-retrieving frame 32, a bag-retrieving plate 352 extending into the packaging bag storage rack 2 and disposed at the lower end of the movable seat 351, and a plurality of bag-retrieving suction nozzles 353 spaced apart at the lower end of the bag-retrieving plate 352 near the packaging bag storage rack 2. When retrieving a bag, the second drive assembly 37 controls the movable seat 351 to move closer to the packaging bag storage rack 2, so that the plurality of bag-retrieving suction nozzles 353 are opposite to the front end of the packaging bag 7 in the packaging bag storage rack 2. At this time, controlling the plurality of bag-retrieving suction nozzles 353 to work can adsorb the front end of the packaging bag 7. Then, in conjunction with the second drive assembly 37 moving in the opposite direction, the packaging bag 7 is taken out from the packaging bag storage rack 2 and placed on the support plate 33.

[0040] The bag-holding device 4 includes an adsorption bag-holding assembly 41 disposed above the bag-filling position 11 and two clamping bag-holding assemblies disposed opposite each other on the sealing platform 1 on both sides of the packaging bag 7. The two clamping bag-holding assemblies are respectively disposed on both sides of the packaging bag 7, so that the area between the two clamping bag-holding assemblies constitutes the bag-filling position 11 as defined in this application. When holding the bag, the adsorption bag-holding assembly 41 adsorbs the surface of the packaging bag 7, and the clamping bag-holding assemblies clamp the upper edge 71 and the lower edge 72 disposed on the same side to open the packaging bag 7. Specifically, the clamping bag-holding assemblies include a first clamping bag-holding assembly 42 and a second clamping bag-holding assembly 43 disposed at intervals.

[0041] The adsorption bag support assembly 41 includes an adsorption bag support frame 411, a lifting plate 412 that can be moved up and down on the adsorption bag support frame 411, a fixed suction nozzle 413 that is mounted on the lifting plate 412, an adjusting plate 414 that is mounted on the lifting plate 412 and can move relative to the fixed suction nozzle 413, a movable suction nozzle 415 that is mounted on the adjusting plate 414 and opposite to the fixed suction nozzle 413, a first lifting cylinder 416 that is connected to and drives the lifting plate 412 to move, and a second lifting cylinder 417 that is mounted on the adsorption bag support frame 411 and connects to and drives the first lifting cylinder 416 to move up and down. The movable suction nozzle 415 and the fixed suction nozzle 413 can be adsorbed and fixed on the top surface 74 of the packaging bag. By setting the movable suction nozzle 415, the adsorption bag support assembly 41 can adapt to packaging bags 7 of different sizes.

[0042] The first clamping and supporting bag assembly 42 includes a clamping and supporting bag seat 421, an upper clamping member 422 movably mounted on the clamping and supporting bag seat 421 for clamping the upper edge 71, a lower clamping member 423 movably mounted on the clamping and supporting bag seat 421 for clamping the lower edge 72, a first lifting member 424 mounted on the clamping and supporting bag seat 421 for driving the upper clamping member 422 to move, and a second lifting member 425 mounted on the clamping and supporting bag seat 421 for driving the lower clamping member 423 to move; wherein, the upper clamping member 422 includes an upper clamping frame 426 connected to the first lifting member 424 and two upper clamping pneumatic grippers 427 oppositely mounted on the upper clamping frame 426, the two upper clamping pneumatic grippers 427 can clamp the upper edge 71 respectively, and move upward with the adsorption bag support assembly 41 to open the packaging bag 7; specifically, the structure of the lower clamping member 423 is the same as that of the upper clamping member 422, and will not be described in detail here. When the lower clamping member 423 clamps the lower edge 72 on the same side, it works with the negative pressure suction nozzle 331 on the support plate 33 to prevent the packaging bag 7 from moving upward with the upper clamping member 422, ensuring that the packaging bag 7 can be stably opened to the required extent; furthermore, both the first lifting member 424 and the second lifting member 425 adopt a linear movement module that can move vertically. The linear movement module is existing technology, and its specific structure and working principle will not be described in detail here.

[0043] The second clamping and supporting bag assembly 43 has a structure that is basically the same as that of the first clamping and supporting bag assembly 42. The difference is that it does not include the clamping and supporting bag seat 421, and the first lifting member 424 and the second lifting member 425 are vertically opposite each other. It also has a linear movement module that can drive the first lifting member 424 or the second lifting member 425 to move along the pushing direction, so that the clamping position of the second clamping and supporting bag assembly 43 can be adjusted according to the packaging bags 7 of different sizes.

[0044] The pushing device 5, opposite to the bag opening 73 of the packaging bag 7, includes a movable frame 51 mounted on the sealing platform 1 and movable in the direction of approaching the bagging position 11; a pushing plate 52 mounted on the movable frame 51 for placing wafer cassettes; a first pushing cylinder 53 mounted on the movable frame 51 to move the pushing plate 52 closer to the bagging position 11; a second pushing cylinder 54 mounted on the pushing plate 52 to push the wafer cassettes into the packaging bag 7; two limiting cylinders 55 mounted opposite to the pushing plate 52 to correct the position of the wafer cassettes; and a second pushing cylinder 54 mounted on the sealing platform 1. The pusher linear motion module 56, which drives the moving frame 51 on the mounting platform 1 to move closer to the bagging position 11, corrects the position of the wafer box through the setting of two limit cylinders 55 to ensure that the wafer box can smoothly enter the packaging bag 7. After the packaging bag 7 is opened, the first pusher cylinder 53, in conjunction with the pusher linear motion module 56, moves the wafer box to the bag opening 73. The second pusher cylinder 54 then pushes the wafer box into the packaging bag 7 so that it is supported on the support plate 33. At this time, the negative pressure suction nozzle 331 on the support plate 33 stops working.

[0045] The heat sealing device 6 includes two folding bag holders 61 movably mounted on a sealing platform 1, two folding bag cutters 62 respectively mounted on the two folding bag holders 61, a negative pressure tube 63 disposed inside one of the folding bag cutters 62, an upper heat sealing assembly 64 and a lower heat sealing assembly 65 disposed vertically opposite each other, a first moving mechanism 66 mounted on the sealing platform 1 to drive the folding bag holders 61 to move, a second moving mechanism 67 to drive the two folding bag holders 61 to move towards each other, an upper positioning plate 68 extending downward on the upper heat sealing assembly 64, and a lower positioning plate 69 extending upward on the lower heat sealing assembly 65 opposite to the upper positioning plate 68. The two folding bag cutters 62 are respectively opposite to the two sides 75 of the packaging bag. The first moving mechanism 66 drives the folding bag holders 61 to move closer to the bag filling position 11, causing the negative pressure tube 63 to extend into the packaging bag 7, and the folding bag cutters on the same side... 62 is located on the outside of the packaging bag; the second moving mechanism 67 drives the two folding bag seats 61 to move towards each other, so that the folding bag knife 62 drives the side 75 of the packaging bag in contact with it to move inward to complete the folding of the bag opening 73 to form the folding point 76; the upper positioning plate 68 and the lower positioning plate 69 are located opposite each other on one side of the wafer box and the negative pressure tube 63, which can limit the wafer box when the negative pressure tube 63 is evacuated to prevent the wafer box from shifting when the packaging bag 7 is evacuated; specifically, the negative pressure tube 63 includes a main body section 631 connected to the external negative pressure source and a flat section 632 that can extend into the packaging bag 7; furthermore, both the first moving mechanism 66 and the second moving mechanism 67 adopt linear moving modules. Linear moving modules are existing technology, and their specific structure and working principle will not be described in detail here.

[0046] The upper heat sealing assembly 64 includes an upper heat sealing seat 641 disposed on the sealing stage 1, an upper heat sealing head 642 disposed on the upper heat sealing seat 641 and movable up and down, and an upper heat sealing cylinder 643 connected to and driving the upper heat sealing head 642 to move.

[0047] The lower heat-sealing assembly 65 includes a lower heat-sealing seat 651 mounted on the sealing platform 1, a lower heat-sealing head 652 movably mounted on the lower heat-sealing seat 651, a first heat-sealing cylinder 653 connected to and driving the lower heat-sealing head 652, a mounting plate 654 for mounting the first heat-sealing cylinder 653, and a second heat-sealing cylinder 655 mounted on the lower heat-sealing seat 651 and connected to the mounting plate 654. A lower positioning plate 69 extends upwards from the mounting plate 654. After the packaging bag 7 is folded, the upper heat-sealing cylinder 653 drives the upper heat-sealing head 652 downwards to contact the upper surface of the folded portion 76 of the packaging bag, and the second heat-sealing cylinder 655 drives the mounting plate 654. 4. The upward movement of the lower heat sealing head 652 brings it into contact with the bottom surface of the packaging bag 7, and the negative pressure tube 63 can then begin to vacuum the packaging bag 7. The moment the negative pressure tube 63 completes the vacuuming, the vacuum is closed and the nitrogen control valve is opened to fill a small amount of nitrogen. After completion, the first moving mechanism 66 drives the folding bag seat 61 to move, which in turn pulls the negative pressure tube 63 out of the packaging bag 7. At this time, the first heat sealing cylinder 653 drives the lower heat sealing head 652 to move upward and cooperate with the upper heat sealing head 642 to clamp the folding part 76 of the packaging bag for heat sealing. After the heat sealing heating is completed, a pressure holding process is performed. After the pressure holding is completed, the upper heat sealing assembly 64 and the lower heat sealing assembly 65 move in opposite directions to the standby state.

[0048] The method for packaging a wafer cassette using the aforementioned apparatus specifically includes the following steps:

[0049] Step 1: The wafer cassette with the information label attached is fed into the pusher device 5. The bag taking device 3 takes the packaging bag 7 from the packaging bag storage rack 2 and moves it to the bagging position 11. The bag supporting device 4 opens the packaging bag 7 on the bagging position 11. The pusher device 5 then pushes the wafer cassette into the opened packaging bag 7.

[0050] Step 2: The bag folding seat 61 moves closer to the bag filling position 11, causing the two bag folding knives 62 and the negative pressure tube 63 to move closer to the packaging bag 7, so that the two bag folding knives 62 are located on the outer sides 75 of opposite sides of the packaging bag 7, and the negative pressure tube 63 extends into the packaging bag 7. Then, the second moving mechanism 67 drives the two bag folding knives 62 to move towards each other, causing the packaging bag side 75 in contact with them to move inward to the correct position, completing the bag folding process of the bag opening 73 to form the bag fold 76.

[0051] Step 3: The upper heat-sealing assembly 64 moves downward to contact the upper surface of the folded area 76 of the packaging bag, and the lower heat-sealing assembly 65 moves upward to contact the lower surface of the folded area 76 of the packaging bag. The negative pressure tube 63 works to vacuum the inside of the packaging bag 7. The wafer cassette is limited by the upper positioning plate 68 and the lower positioning plate 69, which are opposite each other, and will not move. After the negative pressure tube 63 completes the vacuuming process, the first moving mechanism 66 drives the folded bag seat 61 to move away from the bagging position 11, thereby driving the negative pressure tube 63 to be pulled out of the packaging bag 7. At this time, the first heat-sealing cylinder 653 drives the lower heat-sealing head 652 to move upward and cooperate with the upper heat-sealing head 642 to clamp the folded area 76 of the packaging bag for heat sealing, so as to complete the vacuuming and heat sealing process of the folded packaging bag 7.

[0052] This application, by defining the structural composition of the bagging and heat-sealing device, utilizes the cooperation of the bag-taking device 3, the bag-supporting device 4, the material-pushing device 5, and the heat-sealing device 6 to enable the packaging bag 7 to complete the wafer cassette insertion, folding, and heat-sealing processes at a fixed position 11, thereby completing the wafer cassette encapsulation. This eliminates the need for transfer between multiple devices to complete the above operations, solving the problem of packaging bags being easily damaged during transfer due to their softness and thinness. The overall structure is compact, the entire process is highly automated, significantly reducing manual intervention and effectively improving the wafer cassette encapsulation efficiency. It also enhances the wafer cassette encapsulation process. Yield rate; Specifically, the setting of negative pressure tube 63 and bag folding knife 62 is defined, and they are coordinated with the operation of upper heat sealing assembly 64 and lower heat sealing assembly 65, so that negative pressure tube 63 can work together with bag folding knife 62. When the bag folding process of packaging bag 7 is completed, negative pressure tube 63 is already in packaging bag 7, and vacuuming process can begin; and when negative pressure tube 63 completes vacuuming and withdraws outward, lower heat sealing assembly 65 can further cooperate with upper heat sealing assembly 64 to clamp the folded part 76 of packaging bag 7 for heat sealing process. The overall operation has good continuity, which can ensure the efficiency and yield rate of vacuum sealing of wafer cassette.

[0053] The above description is merely a preferred embodiment of the present invention and should not be construed as limiting the scope of the present invention. All equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the specification of the present invention should still fall within the scope of the patent of the present invention.

Claims

1. An automatic bagging and packaging device for wafer cassettes, which performs bagging and heat-sealing treatment on labeled wafer cassettes, characterized in that: It includes a packaging stage, a bagging position set on the packaging stage, a packaging bag storage rack set on the packaging stage, a bag-picking device for picking up packaging bags from the packaging bag storage rack and placing them at the bagging position, a bag-opening device for opening the packaging bags at the bagging position, a pusher device for pushing the wafer cassette into the opened packaging bag, and a heat-sealing device for heat-sealing the packaging bag, so that the packaging bag can complete the pushing of the wafer cassette, bag folding and heat-sealing at the fixed position of the bagging position; The heat sealing device includes two folding bag holders movable towards each other on a sealing platform, two folding bag cutters respectively mounted on the two folding bag holders, a negative pressure tube disposed inside one of the folding bag cutters, an upper heat sealing assembly and a lower heat sealing assembly disposed vertically opposite each other, a first moving mechanism mounted on the sealing platform to drive the folding bag holders to move, a second moving mechanism to drive the two folding bag holders to move towards each other, an upper positioning plate extending downward on the upper heat sealing assembly, and a lower positioning plate extending upward on the lower heat sealing assembly opposite to the upper positioning plate. The two folding bag cutters are respectively positioned on the two sides of the packaging bag. Relatively speaking, the upper positioning plate and the lower positioning plate are positioned opposite each other on one side of the wafer cassette and the negative pressure tube. When the negative pressure tube is working, it performs vacuum treatment inside the packaging bag. The wafer cassette is limited by the upper and lower positioning plates and will not move. The first moving mechanism drives the folding bag seat to move closer to the bagging position so that the negative pressure tube extends into the packaging bag, and the folding bag knife on the same side is located on the outside of the packaging bag. The second moving mechanism drives the two folding bag knives to move towards each other so that the folding bag knife drives the side of the packaging bag that it contacts to move inward to complete the folding treatment of the bag opening. The negative pressure tube includes a main body section that connects to an external negative pressure source and a flat section that can extend into a packaging bag. The lower heat-sealing assembly includes a lower heat-sealing seat mounted on a sealing platform, a lower heat-sealing head mounted on the lower heat-sealing seat that can move up and down, a first heat-sealing cylinder connected to and driving the lower heat-sealing head to move, a mounting plate for mounting the first heat-sealing cylinder, and a second heat-sealing cylinder mounted on the lower heat-sealing seat and connected to the mounting plate. The lower positioning plate is mounted on the mounting plate and extends upward. When the negative pressure tube is working, the second heat-sealing cylinder drives the mounting plate to move upward, causing the lower heat-sealing head to contact the bottom surface of the packaging bag. After the negative pressure tube has completed its work, the first moving mechanism drives the folding bag seat to move, causing the negative pressure tube to be pulled out of the packaging bag. At this time, the first heat-sealing cylinder drives the lower heat-sealing head to move upward and cooperate with the upper heat-sealing assembly to clamp the folding part of the packaging bag for heat sealing. The bag-picking device includes a first bag-picking frame extending along the direction near the bag-filling position on the sealing platform, a second bag-picking frame extending along the direction near the packaging bag storage rack on the first bag-picking frame, a support plate movably mounted on the first bag-picking frame for placing packaging bags, a correction mechanism located below the second bag-picking frame for correcting the position of the packaging bags, a bag-picking assembly movably mounted on the second bag-picking frame for clamping packaging bags, a first drive assembly mounted on the first bag-picking frame for driving the support plate to move, and a second drive assembly mounted on the second bag-picking frame for driving the bag-picking assembly to move. The bag-picking assembly picks up packaging bags from the packaging bag storage rack and places them onto the support plate, and the first drive assembly drives the support plate with the packaging bags to move to the bag-filling position.

2. The automatic wafer cassette bagging and packaging device according to claim 1, characterized in that: The calibration mechanism includes a calibration frame that can be moved up and down below the second bag-retrieving frame, two first calibration components that are arranged opposite each other on both sides of the calibration frame, two second calibration components that are arranged opposite each other on both sides of the calibration frame, and a lifting cylinder that connects to and drives the calibration frame to move up and down. The two first calibration components and the two second calibration components are alternately arranged on the four outer surfaces of the calibration frame. The first calibration component includes a calibration plate that can move along the opposite outer surface and a first calibration cylinder that is arranged on the calibration frame to drive the calibration plate to move. The second calibration component includes a calibration column that can move along the opposite outer surface and a second calibration cylinder that is arranged on the calibration frame to drive the calibration column to move. The support plate is provided with a strip-shaped moving hole for the opposite calibration column to pass through.

3. The automatic wafer cassette bagging and packaging device according to claim 2, characterized in that: The bag-retrieving assembly includes a movable seat movably mounted on a second bag-retrieving frame, a bag-retrieving plate that extends into a packaging bag storage rack and is located at the lower end of the movable seat, and a plurality of bag-retrieving suction nozzles spaced apart at the lower end of the bag-retrieving plate.

4. The automatic wafer cassette bagging and packaging device according to claim 1, characterized in that: The packaging bag includes two upper edges opposite to each other on its top surface and two lower edges opposite to each other on its bottom surface. The bag supporting device includes an adsorption bag supporting assembly disposed above the bag filling position and two clamping bag supporting assemblies disposed opposite to each other on the packaging platform on both sides of the packaging bag. The two clamping bag supporting assemblies are respectively opposite to the two upper edges. The clamping bag supporting assembly includes a clamping bag supporting base, an upper clamping member disposed vertically on the clamping bag supporting base for clamping the upper edge opposite to the upper edge, a lower clamping member disposed vertically on the clamping bag supporting base for clamping the lower edge opposite to the upper edge, a first lifting member disposed on the clamping bag supporting base to drive the upper clamping member to move, and a second lifting member disposed on the clamping bag supporting base to drive the lower clamping member to move.

5. The automatic wafer cassette bagging and packaging device according to claim 4, characterized in that: The adsorption bag support assembly includes an adsorption bag support frame, a lifting plate that can be moved up and down on the adsorption bag support frame, a fixed suction nozzle on the lifting plate, an adjusting plate on the lifting plate that can move relative to the fixed suction nozzle, a movable suction nozzle on the adjusting plate that is opposite to the fixed suction nozzle, a first lifting cylinder that is connected to and drives the lifting plate to move, and a second lifting cylinder that is connected to and drives the first lifting cylinder to move up and down on the adsorption bag support frame. The movable suction nozzle and the fixed suction nozzle can be adsorbed and fixed on the top surface of the packaging bag.

6. The automatic wafer cassette bagging and packaging device according to claim 1, characterized in that: The pushing device includes a movable frame that can move along the direction of approaching the bagging position on the packaging platform, a pushing plate for placing wafer cassettes on the movable frame, a first pushing cylinder that drives the pushing plate to move closer to the bagging position on the movable frame, and a second pushing cylinder that pushes the wafer cassettes into the packaging bag on the pushing plate.

7. A wafer cassette packaging method, characterized in that: The bagging and sealing apparatus according to any one of claims 1 to 6 is used, specifically including the following steps: Step 1: The wafer cassette with the information label is fed into the feeding device. The bag taking device takes the packaging bag out from the packaging bag storage rack and moves it to the bagging position. The bag opening device opens the packaging bag at the bagging position. The feeding device then pushes the wafer cassette into the opened packaging bag. Step 2: The bag folding seat moves closer to the bagging position, causing the two bag folding knives and the negative pressure tube to move closer to the packaging bag so that the two bag folding knives are located on the outer sides of opposite sides of the packaging bag, and the negative pressure tube extends into the packaging bag. Then, the second moving mechanism drives the two bag folding knives to move towards each other, causing the sides of the packaging bag that are in contact with them to move inward into place, thus completing the bag folding process at the bag opening. Step 3: The upper heat-sealing assembly moves downwards to contact the upper surface of the folded area of ​​the packaging bag, while the lower heat-sealing assembly moves upwards to contact the lower surface of the folded area. The negative pressure tube operates to vacuum the inside of the packaging bag. The wafer cassette is limited by the upper and lower positioning plates and will not move. After the negative pressure tube completes the vacuuming process, the first moving mechanism drives the folding seat to move away from the bagging position, thereby pulling the negative pressure tube out of the packaging bag. At this time, the lower heat-sealing assembly moves upwards further to cooperate with the upper heat-sealing assembly to clamp the folded area of ​​the packaging bag for heat sealing, thus completing the vacuuming and heat sealing process of the folded packaging bag.

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