Drying equipment

Abstract

The invention discloses drying equipment which comprises a shell, a first flow equalizing plate, a filtering element, a carrying table and a second flow equalizing plate. The shell is provided with an air inlet, an air outlet and a cavity which are communicated with one another. The air inlet and the air outlet are located in the two opposite sides of the cavity. The first flow equalizing plate is arranged in the cavity. The first flow equalizing plate is located between the air inlet and the air outlet and is close to the air inlet. The filtering element is arranged in the cavity and located between the first flow equalizing plate and the air inlet. The carrying table is arranged in the cavity and located between the first flow equalizing plate and the air outlet. The second flow equalizing plate is arranged in the cavity and located between the carrying table and the air outlet.

Description

Technical Field

[0001] The present invention provides a process equipment, in particular a drying equipment. Background Art

[0002] The manufacturing process of products in the fields of electronics, optics, semiconductors, chemicals, medicine, etc. includes a drying step. For example, in the manufacturing process of liquid crystal display panels, a thin film needs to be coated on a transparent substrate, and the transparent substrate needs to be dried using a drying device to ensure that the thin film is fixed on the transparent substrate. Generally speaking, drying equipment uses a high-temperature airflow to blow away the moisture on the sample, but some materials are prone to quality changes in a high-temperature environment, which makes the sample prone to structural damage. Another type of drying equipment uses a relatively low-temperature airflow to dry the moisture on the sample to prevent the sample from being damaged by high temperature, but this type of drying equipment often has the problem of uneven airflow field, resulting in poor drying efficiency and different drying rates for samples in different positions, thus affecting product quality. Summary of the Invention

[0003] The present invention provides a drying device, which improves drying efficiency by utilizing uniform airflow in a non-high temperature environment.

[0004] In order to achieve one or part or all of the above-mentioned purposes or other purposes, one embodiment of the present invention provides a drying device, including a shell, a first flow equalizing plate, a filter element, a carrier and a second flow equalizing plate. The shell has an air inlet, an air outlet and a chamber that are connected to each other. The air inlet and the air outlet are located on opposite sides of the chamber. The first flow equalizing plate is arranged in the chamber. The first flow equalizing plate is located between the air inlet and the air outlet, and is close to the air inlet. The filter element is arranged in the chamber, and is located between the first flow equalizing plate and the air inlet. The carrier is arranged in the chamber, and is located between the first flow equalizing plate and the air outlet. The second flow equalizing plate is arranged in the chamber, and is located between the carrier and the air outlet.

[0005] In one embodiment of the present invention, the second flow equalizing plate may have a plurality of middle ventilation holes and a plurality of peripheral ventilation holes, wherein the peripheral ventilation holes surround the middle ventilation holes, and the diameter of each middle ventilation hole is larger than the diameter of each peripheral ventilation hole.

[0006] In an embodiment of the present invention, the diameter of each of the central ventilation holes and the diameter of each of the peripheral ventilation holes are, for example, between 1 mm and 30 mm.

[0007] In one embodiment of the present invention, the distance between the second flow equalizing plate and the carrier may be smaller than the distance between the second flow equalizing plate and the air outlet.

[0008] In one embodiment of the present invention, the distance between the filter element and the first flow equalizer may be smaller than the distance between the filter element and the air inlet.

[0009] In one embodiment of the present invention, the distance between the first flow equalizing plate and the filter element may be smaller than the distance between the first flow equalizing plate and the carrier.

[0010] In one embodiment of the present invention, the drying device may further include a third flow equalizing plate disposed in the chamber and located between the filter element and the air inlet.

[0011] In one embodiment of the present invention, the third flow equalizer may have a plurality of first ventilation holes and a plurality of second ventilation holes. The first ventilation holes are aligned with the air inlet, and the second ventilation holes are offset from the air inlet. The aperture of each first ventilation hole may be smaller than the aperture of each second ventilation hole.

[0012] In an embodiment of the present invention, the diameter of each of the first ventilation holes and the diameter of each of the second ventilation holes are, for example, between 1 mm and 30 mm.

[0013] In one embodiment of the present invention, the distance between the third flow equalizing plate and the filter element may be smaller than the distance between the third flow equalizing plate and the air inlet.

[0014] In one embodiment of the present invention, the drying device further includes an air circulation device and a guide pipe, wherein the guide pipe is connected to the air inlet, and the air circulation device is connected to the guide pipe and the air outlet.

[0015] In one embodiment of the present invention, the air circulation device has a drainage hole, and the drainage hole is connected to the air outlet.

[0016] In one embodiment of the present invention, the drying device further includes a heating device, which is disposed between the air outlet and the air circulation device.

[0017] In one embodiment of the present invention, the plurality of ventilation holes of the first flow equalizing plate are evenly distributed, for example.

[0018] In one embodiment of the present invention, the diameter of the ventilation holes may be between 1 mm and 30 mm.

[0019] In the drying apparatus of the present invention, a first equalizer and a second equalizer are disposed on opposite sides of the carrier, respectively, and a filter element is disposed between the first equalizer and the air inlet. Therefore, after airflow enters the chamber through the air inlet, it first passes through the filter element to remove impurities and initially homogenize the airflow field. The first and second equalizers then further homogenize the airflow field through the carrier. Based on the foregoing, the drying apparatus of the present invention can effectively homogenize the airflow field through the carrier, thereby utilizing uniform airflow to improve drying efficiency in a non-high-temperature environment.

[0020] In order to make the above and other objects, features and advantages of the present invention more clearly understood, embodiments are given below with reference to the accompanying drawings for detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a cross-sectional schematic diagram of a drying device according to one embodiment of the present invention.

[0022] Figure 2 It is a cross-sectional schematic diagram of a drying device according to another embodiment of the present invention.

[0023] Figure 3 It is a cross-sectional schematic diagram of a drying device according to another embodiment of the present invention.

[0024] Figure 4 It is a cross-sectional schematic diagram of a drying device according to another embodiment of the present invention.

[0025] Wherein, the reference numerals:

[0026] 100, 100a, 100b, 100c: Drying equipment

[0027] 110: Shell

[0028] 111: Chamber

[0029] 120: First current equalizing plate

[0030] 121: Ventilation holes

[0031] 130: filter element

[0032] 140: stage

[0033] 150, 150a: second current equalizing plate

[0034] 151: Middle ventilation hole

[0035] 152:Surrounding ventilation holes

[0036] 160: Air circulation device

[0037] 170: Diversion tube

[0038] 180: Heating device

[0039] 190, 190c: The third current equalizing plate

[0040] 191: First ventilation hole

[0041] 192: Second ventilation hole

[0042] B:Branch pipe

[0043] D1, D2, D3, D4, D5, D6, D7: distance

[0044] F: Airflow

[0045] FA: Fan

[0046] H1: Drain hole

[0047] H2: air flow inlet

[0048] I: Air inlet

[0049] O: Air outlet

[0050] R1, R2, R3, R4, R5: aperture

[0051] S: Sample

[0052] V: Control valve DETAILED DESCRIPTION

[0053] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this does not limit the present invention.

[0054] Figure 1 This is a cross-sectional view of a drying device according to an embodiment of the present invention. Figure 1 The drying equipment 100 includes a shell 110, a first flow equalizing plate 120, a filter element 130, a carrier 140 and a second flow equalizing plate 150. The shell 110 has an air inlet I, an air outlet O and a chamber 111 that are connected to each other. The air inlet I and the air outlet O are located on opposite sides of the chamber 111. The first flow equalizing plate 120 is arranged in the chamber 111. The first flow equalizing plate 120 is located between the air inlet I and the air outlet O, and is close to the air inlet I. The filter element 130 is arranged in the chamber 111, and is located between the first flow equalizing plate 120 and the air inlet I. The carrier 140 is arranged in the chamber 111, and is located between the first flow equalizing plate 120 and the air outlet O. The second flow equalizing plate 150 is arranged in the chamber 111, and is located between the carrier 140 and the air outlet O.

[0055] The air inlet I of the housing 110 allows airflow F to enter the chamber 111, while the air outlet O allows airflow F to flow out of the housing 110. In this embodiment, after entering the chamber 111 through the air inlet I, the airflow F can flow through the filter element 130, the first flow equalizing plate 120, the carrier 140, and the second flow equalizing plate 150 in sequence.

[0056] The filter element 130 can filter impurities of the airflow F and can preliminarily homogenize the flow field of the airflow F. In the present embodiment, the distance D1 between the filter element 130 and the first flow uniformizer 120 can be less than the distance D2 between the filter element 130 and the air inlet I, so that the filter element 130 is farther away from the air inlet I to receive the airflow F with smaller wind pressure, thus being able to further improve the effect of the filter element 130 on homogenizing the flow field of the airflow F. Incidentally, the filter element 130 can include a HEPA (High-Efficiency Particulate Air) grade filter paper. Further, the material of the filter paper can include polypropylene (PP), polyethylene terephthalate (PET), a composite material of the above-mentioned PP and PET, or glass fiber, and the grade of the HEPA filter paper can include E10, E11, E12, H13, H14, U15, U16, or U17, but other embodiments are not limited thereto.

[0057] In the present embodiment, the first flow uniformizer 120 can have a plurality of ventilation holes 121, and the ventilation holes 121 can be uniformly distributed to further improve the effect of the first flow uniformizer 120 on homogenizing the flow field of the airflow F. In an embodiment, the hole diameter R1 of the ventilation holes 121 can be between 1 mm and 30 mm, such as but not limited to 1 mm, 5 mm, 10 mm, 15 mm, 20 mm, 25 mm, and 30 mm. In addition, the distance between two adjacent ventilation holes 121 can be between 1 mm and 100 mm, such as but not limited to 1 mm, 10 mm, 20 mm, 30 mm, 40 mm, 50 mm, 60 mm, 70 mm, 80 mm, 90 mm, and 100 mm, and the present application is not limited thereto. In the present embodiment, the distance D1 between the first flow uniformizer 120 and the filter element 130 can be less than the distance D3 between the first flow uniformizer 120 and the carrier 140, so that the first flow uniformizer 120 is closer to the filter element 130 to receive the airflow F with a more uniform flow field, thus further improving the effect of the first flow uniformizer 120 on homogenizing the flow field of the airflow F. Incidentally, the material of the first flow uniformizer 120 can include metal, such as stainless steel, aluminum, titanium alloy, or iron. In other embodiments, the material of the first flow uniformizer 120 can include engineering plastic, PMMA, PP, bakelite, and the like, and the present application is not limited thereto.

[0058] The carrier 140 of the present embodiment can carry the sample S to be dried. In detail, the carrier 140 can include a fixed carrier, i.e., the carrier 140 does not move relative to the housing 110. In an embodiment, the carrier 140 can include a conveying device or a rotating device, so that the sample S on the carrier 140 can swing back and forth, rotate, or move in a single direction relative to the housing 110.

[0059] In the present embodiment, the second flow uniformization plate 150 can be located downstream of the airflow of the platform 140 to further homogenize the airflow F flow field passing through the platform 140. Similarly, the distance D4 between the second flow uniformization plate 150 and the platform 140 can be smaller than the distance D5 between the second flow uniformization plate 150 and the air outlet O, so that the second flow uniformization plate 150 is closer to the platform 140, thereby further improving the effect of the second flow uniformization plate 150 on homogenizing the airflow F flow field, so that the airflow F is more uniformly passed through the platform 140.

[0060] Compared with the prior art, in the drying apparatus 100 of the present embodiment, the first flow uniformization plate 120 and the second flow uniformization plate 150 are respectively arranged on the opposite sides of the platform 140, and the filter element 130 is arranged between the first flow uniformization plate 120 and the air inlet I. Therefore, after the airflow F enters the chamber 111 from the air inlet I, it can first pass through the filter element 130 to filter out impurities and preliminarily homogenize the flow field of the airflow F, and then pass through the first flow uniformization plate 120 and the second flow uniformization plate 150 to homogenize the airflow F flow field passing through the platform 140 again. Based on the above, the drying apparatus 100 of the present embodiment can effectively homogenize the airflow F flow field passing through the platform 140, thereby improving the drying efficiency using the uniform airflow F in a non-high-temperature environment.

[0061] Further, the existing drying apparatus evaporates the moisture on the sample S by high temperature, so the internal temperature of the drying apparatus is as high as 100-180°C, but many materials cannot be applied to the above high-temperature environment. However, the drying apparatus 100 of the present embodiment blows off the moisture on the sample S using the uniform airflow F, rather than evaporating the moisture on the sample S by high temperature, so it can not only be widely applied to samples S that are not resistant to high temperature, but also can take into account the drying efficiency. For example, in an embodiment, the temperature in the chamber 111 can be about 40-50°C, but the present application is not limited thereto.

[0062] Incidentally, in the present embodiment, the drying apparatus 100 further includes, for example, an airflow circulation device 160 and a flow guide pipe 170. The flow guide pipe 170 is connected to the air inlet I, and the airflow circulation device 160 is connected to the flow guide pipe 170 and the air outlet O. In detail, the airflow circulation device 160 can push air into the chamber 111 through the flow guide pipe 170, and at the same time, air in the chamber 111 is drawn out from the air outlet O, to continuously generate a circulating airflow passing through the chamber 111. Further, the airflow circulation device 160 has a drain hole H1, and the drain hole H1 communicates with the air outlet O, to discharge the water vapor in the chamber 111 through the drain hole H1, thereby further improving the drying efficiency of the drying apparatus 100. In addition, the airflow circulation device 160 can also have an airflow inlet H2 to draw external air into the flow guide pipe 170 through the airflow inlet H2. The airflow circulation device 160 includes, for example, a fan FA, and in an embodiment, the airflow circulation device 160 can include an air pump, but the present application is not limited thereto.

[0063] The duct 170 can include a plurality of branch pipes B. For example, the air inlet I of the present embodiment can have two separate regions, and the duct 170 can connect the two regions through two branch pipes B. In one embodiment, the duct 170 can not include a branch pipe B, i.e., the duct 170 can have only one air outlet, and the housing 110 can have only one air inlet I to connect the air outlet. In addition, the duct 170 of the present embodiment can be provided with a regulating valve V, and the duct 170 of the present embodiment can be provided with, for example, three regulating valves V, one of which can be located near the airflow circulation device 160, and the other two can be connected to the two branch pipes B. It is noted that each regulating valve V can be controlled by a mechanical or electrical control. In one embodiment, the duct 170 can be provided with a regulating valve V downstream of the airflow circulation device 160. In another embodiment, the duct 170 can be provided with two regulating valves V respectively located in the two branch pipes B.

[0064] The drying apparatus 100 of the present embodiment further includes a heating device 180 disposed between the air outlet O and the airflow circulation device 160 to increase the temperature of the airflow F, thereby further improving the drying efficiency. In the present embodiment, the heating device 180 can include an electric heating device 180, but other embodiments are not limited thereto.

[0065] Figure 2 is a cross-sectional view of a drying apparatus according to another embodiment of the present application. The structure and advantages of the drying apparatus 100a of the present embodiment are similar to those of the embodiment of Figure 1 . Only the differences will be described below. Please refer to Figure 2 , the second flow uniformizing plate 150a can have a plurality of intermediate air vents 151 and a plurality of peripheral air vents 152. The peripheral air vents 152 surround the intermediate air vents 151, and the aperture R2 of each intermediate air vent 151 is greater than the aperture R3 of each peripheral air vent 152. In this way, the intermediate air vents 151 with a larger aperture R2 can guide more airflow through the carrier to the region located in the intermediate air vents 151, making the flow field of the airflow more uniform, thereby further improving the drying efficiency of the drying apparatus 100a. In one embodiment, the aperture R2 of each intermediate air vent 151 and the aperture R1 of each peripheral air vent 152 are, for example, between 1 mm and 30 mm, but the present application is not limited thereto. In another embodiment, the distance between two adjacent intermediate air vents 151 is, for example, between 1 mm and 100 mm, and the distance between two adjacent peripheral air vents 152 can be between 1 mm and 100 mm, but the present application does not make many limitations thereon.

[0066] Figure 3 is a cross-sectional view of a drying apparatus according to another embodiment of the present application. The structure and advantages of the drying apparatus 100b of the present embodiment are similar to those of the embodiment of Figure 1The following only describes the differences. Figure 3 Drying apparatus 100b may further include a third flow equalizer 190. The third flow equalizer 190 is disposed within chamber 111 and between filter element 130 and air inlet I to provide a more uniform flow field, thereby further improving the drying efficiency of drying apparatus 100b. Similarly, distance D6 between third flow equalizer 190 and filter element 130 may be less than distance D7 between third flow equalizer 190 and air inlet I, allowing third flow equalizer 190 to be positioned further away from air inlet I, thereby receiving airflow with more uniform pressure.

[0067] Figure 4 This is a cross-sectional view of a drying device according to another embodiment of the present invention. The structure and advantages of the drying device 100c of this embodiment are similar to those of Figure 3 The following only describes the differences. Figure 4 The third flow equalizing plate 190c may have a plurality of first ventilation holes 191 and a plurality of second ventilation holes 192. The first ventilation holes 191 are located opposite the air inlet I, and the second ventilation holes 192 are offset from the air inlet I. The aperture R4 of each first ventilation hole 191 may be smaller than the aperture R5 of each second ventilation hole 192. Specifically, the area of ​​the third flow equalizing plate 190c opposite the air inlet I may receive an airflow F with a higher pressure. Therefore, the first ventilation holes 191 with a smaller aperture R4 can reduce the pressure of the airflow F after passing through the third flow equalizing plate 190c, while the first ventilation holes 191 with a larger aperture R5 can attract more airflow F. In this way, the airflow F can pass through the third flow equalizing plate 190c with a more uniform flow field, thereby further improving the drying efficiency of the drying equipment 100c. In one embodiment, the aperture R4 of each first ventilation hole 191 and the aperture R5 of each second ventilation hole 192 are, for example, between 1 mm and 30 mm, but the present invention is not limited to this. In another embodiment, the distance between two adjacent first ventilation holes 191 is, for example, between 1 mm and 100 mm, and the distance between two adjacent second ventilation holes 192 is, for example, between 1 mm and 100 mm, but the present invention is not limited thereto.

[0068] In summary, in the drying device of the present invention, a first flow equalizer and a second flow equalizer are respectively provided on opposite sides of the carrier, and a filter element is provided between the first flow equalizer and the air inlet. Therefore, after the airflow enters the chamber from the air inlet, it can first pass through the filter element to filter out impurities and preliminarily uniformize the flow field of the airflow, and then pass through the first flow equalizer and the second flow equalizer to further uniformize the flow field of the airflow passing through the carrier. Based on the above, the drying device of the present invention can effectively uniformize the flow field of the airflow passing through the carrier, and thus improve the drying efficiency by utilizing uniform airflow in a non-high temperature environment. In one embodiment, the drying device can also guide more airflow through the area of ​​the carrier opposite to the middle ventilation hole through the middle ventilation hole with a larger aperture of the second flow equalizer, so that the flow field of the airflow is more uniform, thereby further improving the drying efficiency of the drying device. In another embodiment, a third flow equalizer can be provided between the filter element and the air inlet, so that the flow field of the airflow is more uniform, thereby further improving the drying efficiency of the drying device. In addition, the first ventilation hole of the third flow equalizer opposite to the air inlet can have a small aperture, and the second ventilation hole offset from the air inlet has a larger aperture. In this way, the first ventilation holes with smaller apertures can reduce the wind pressure after the airflow passes through the third flow equalizer, while the first ventilation holes with larger apertures can attract more airflow, so that the airflow passes through the third flow equalizer with a more uniform flow field, thereby further improving the drying efficiency of the drying equipment.

[0069] Although the present invention has been disclosed above with reference to the embodiments, they are not intended to limit the present invention. Those skilled in the art may make modifications and improvements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the scope of the appended claims.

Claims

1. A drying device, characterized in that: include: A housing having an air inlet, an air outlet, and a chamber that communicate with each other, wherein the air inlet and the air outlet are located on opposite sides of the chamber; a first flow balancing plate disposed in the chamber, the first flow balancing plate being located between the air inlet and the air outlet and close to the air inlet; a filter element disposed in the chamber and located between the first flow equalizer and the air inlet; a carrier, disposed in the chamber and located between the first flow balancing plate and the air outlet; and A second flow balancing plate is disposed in the chamber and located between the carrier and the air outlet.

2. The drying device according to claim 1, characterized in that The second flow balancing plate has a plurality of middle ventilation holes and a plurality of peripheral ventilation holes. The peripheral ventilation holes surround the middle ventilation holes, and a diameter of each of the middle ventilation holes is larger than a diameter of each of the peripheral ventilation holes.

3. The drying device according to claim 2, characterized in that The diameter of each of the middle ventilation holes and the diameter of each of the peripheral ventilation holes are between 1 mm and 30 mm.

4. The drying device according to claim 1, characterized in that The distance between the second flow balancing plate and the carrier is smaller than the distance between the second flow balancing plate and the air outlet.

5. The drying device according to claim 1, characterized in that The distance between the filter element and the first flow equalizing plate is smaller than the distance between the filter element and the air inlet.

6. The drying device according to claim 1, characterized in that The distance between the first flow balancing plate and the filter element is smaller than the distance between the first flow balancing plate and the carrier.

7. The drying device according to claim 1, wherein The invention further comprises a third flow balancing plate, wherein the third flow balancing plate is arranged in the chamber and located between the filter element and the air inlet.

8. The drying device according to claim 7, characterized in that The third flow equalizing plate has a plurality of first ventilation holes and a plurality of second ventilation holes, the first ventilation holes are located opposite the air inlet, and the second ventilation holes are staggered with the air inlet, and an aperture of each of the first ventilation holes is smaller than an aperture of each of the second ventilation holes.

9. The drying device according to claim 8, characterized in that The diameter of each of the first ventilation holes and the diameter of each of the second ventilation holes are between 1 mm and 30 mm.

10. The drying device according to claim 7, characterized in that The distance between the third flow balancing plate and the filter element is smaller than the distance between the third flow balancing plate and the air inlet.

11. The drying device according to claim 1, wherein It further includes an airflow circulation device and a guide pipe, wherein the guide pipe is connected to the air inlet, and the airflow circulation device is connected to the guide pipe and the air outlet.

12. The drying device according to claim 11, characterized in that The air circulation device has a drainage hole, and the drainage hole is communicated with the air outlet.

13. The drying device according to claim 11, characterized in that It further includes a heating device, wherein the heating device is arranged between the air outlet and the air flow circulation device.

14. The drying device according to claim 1, wherein The plurality of ventilation holes of the first flow equalizing plate are evenly distributed.

15. The drying device according to claim 14, characterized in that The diameters of the ventilation holes range from 1 mm to 30 mm.

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