MEMS optical fiber sensor and structure thereof

Abstract

The invention belongs to the technical field of optical fiber sensors, and discloses an MEMS optical fiber sensor and a structure thereof, and the MEMS optical fiber sensor comprises a housing which is used as an overall frame of the MEMS optical fiber sensor; the temperature sensing structure is connected to the top end of the inner wall of the shell; the quartz tube is connected to the bottom end of the inner wall of the shell; one end of the connecting wire harness is inserted into the middle of the quartz tube and connected with the temperature sensing structure, and the other end of the connecting wire harness extends out of the shell and is used for transmitting data collected by the temperature sensing structure to external equipment; the flexible connecting assembly comprises a positioning sleeve, a flexible metal strip, a movable cover, a lifting structure and a clamping structure. The temperature sensing structure has the beneficial effects that when vibration occurs outside, the clamping force generated by the structure can effectively limit the displacement of the temperature sensing structure, so that fatigue fracture caused by vibration at the joint of the chip and the wiring harness for connection is avoided, and stable connection of core components of the sensor and stability of signal transmission are guaranteed.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of connecting harness sensors, and particularly relates to a MEMS optical fiber sensor and a structure thereof. BACKGROUND

[0002] In the current sensing technology field, optical fiber sensors have attracted widespread attention due to their excellent performance. They usually utilize the propagation characteristics of light to monitor various physical and chemical parameters such as temperature, pressure and displacement, and can work stably in harsh environments. Although traditional connecting harness sensors have strong temperature resistance and corrosion resistance, they also face some challenges such as complex structure, high production cost and susceptibility to vibration.

[0003] The MEMS optical fiber sensor encapsulates the thermocouple element and the ASIC together, realizing the miniaturization and performance optimization of the sensing part. This technology not only significantly reduces the cost, but also realizes precise control and high integration through microfabrication process, thereby greatly expanding the application range and applicability of the optical fiber sensor.

[0004] In the MEMS optical fiber sensor, the temperature sensing structure and the quartz tube are fixedly installed. External vibration easily causes displacement of the temperature sensing structure, thereby causing fatigue fracture of the connecting part of the temperature sensing structure and the connecting harness. SUMMARY

[0005] The application proposes the following technical solutions to solve the problem that the temperature sensing structure and the quartz tube are fixedly installed in the prior art, external vibration easily causes displacement of the temperature sensing structure, thereby causing fatigue fracture of the connecting part of the temperature sensing structure and the connecting harness.

[0006] A MEMS optical fiber sensor, comprising:

[0007] A shell serving as an overall frame of the MEMS optical fiber sensor;

[0008] A temperature sensing structure connected to the top end of the inner wall of the shell;

[0009] A quartz tube connected to the bottom end of the inner wall of the shell;

[0010] A connecting harness having one end inserted into the middle part of the quartz tube and connected to the temperature sensing structure, and the other end extending to the outside of the shell, for transmitting data collected by the temperature sensing structure to an external device;

[0011] The flexible connection assembly includes: a positioning sleeve, a flexible metal strip, a movable cover, a lifting structure and a clamping structure; the positioning sleeve is connected to the temperature sensing structure, the movable cover is connected to the quartz tube, the flexible metal strip is connected between the positioning sleeve and the movable cover, the lifting structure is connected to the bottom end of the movable cover, and the clamping structure is connected to the top end of the movable cover. The lifting structure drives the movable cover to move and causes the flexible metal strip to bend, and the lifting structure drives the clamping structure to squeeze the connecting wire harness.

[0012] As a preferred embodiment of the above technical solution, the flexible connection assembly further includes:

[0013] A mounting block connected to the top of the flexible metal strip and used for connecting to the positioning sleeve;

[0014] an outer sleeve connected to the quartz tube and used for connecting to the movable cover;

[0015] The inner sleeve is connected to the outer sleeve and is used for connecting to the lifting structure.

[0016] As a preferred embodiment of the above technical solution, the lifting structure includes:

[0017] piezoelectric ceramics, inserted into the inner sleeve;

[0018] a guide post connected to the piezoelectric ceramic and passing through the inner sleeve;

[0019] A connecting ring connected to the guide post;

[0020] A connecting line is connected to the connecting ring.

[0021] As a preferred embodiment of the above technical solution, the lifting structure further includes:

[0022] A piston disk connected to the piezoelectric ceramic and inserted into the inner sleeve;

[0023] The sealing structure is connected to the piston disc.

[0024] As a preferred embodiment of the above technical solution, the sealing structure includes:

[0025] A sealing sleeve, sleeved on the middle part of the outer side of the piston disc;

[0026] an airbag, inserted into the sealing sleeve;

[0027] an air intake passage, passing through the airbag, the sealing sleeve and the piston disc;

[0028] a cylinder connected to the movable cover;

[0029] A rubber block is connected to the cylinder, and the cylinder and the rubber block squeeze the air inlet passage to expand the airbag.

[0030] As a preferred embodiment of the above technical solution, the outer side of the rubber block and the outer side of the air intake channel are in contact with each other, circular grooves are equidistantly provided on the outer side of the rubber block, and the bottom edge of the rubber block is provided with a rounded corner.

[0031] As a preferred embodiment of the above technical solution, the clamping structure includes:

[0032] a tilting tube connected to the movable cover;

[0033] A push rod, inserted into the push rod;

[0034] The support block is connected to the push rod, and the support block moves along the inclined tube through the push rod.

[0035] As a preferred embodiment of the above technical solution, the clamping structure further includes:

[0036] a spring connected to the push rod;

[0037] The piston is connected to the spring, and the piston and the spring support the push rod.

[0038] A structure of a MEMS optical fiber sensor, comprising the above-mentioned MEMS optical fiber sensor, and further comprising:

[0039] The flexible metal strip is in an arc shape, and the surface of the strip is coated with an anti-oxidation coating.

[0040] The beneficial effects of the present invention are:

[0041] (1) When external vibration occurs, the clamping force generated by the structure can effectively limit the displacement of the temperature sensing structure, avoiding fatigue fracture of the connection between the temperature sensing structure and the connecting harness due to vibration, thereby ensuring the stable connection of the sensor core components and the stability of signal transmission;

[0042] (2) The sealing performance between the piston disc and the outer sleeve is enhanced, effectively preventing gas leakage, ensuring the stability and accuracy of pressure transmission, and thus ensuring the reliable operation of the pressure drive structure inside the sensor;

[0043] (3) Firmly fixing the connecting harness can ensure the stability and reliability of the optical path connection inside the MEMS sensor and avoid affecting the signal transmission quality due to loosening of the connecting harness. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 FIG. 1 is a schematic structural diagram of a MEMS optical fiber sensor in Example 1;

[0045] Figure 2 FIG2 shows a cross-sectional view of a MEMS optical fiber sensor in Example 1;

[0046] Figure 3 The figure shows the installation structure diagram of the connecting ring in Example 1;

[0047] Figure 4 Shown is a cross-sectional view of the positioning sleeve in Example 1;

[0048] Figure 5 Shown is Figure 4 Schematic diagram of the structure of area A in the middle.

[0049] In the figure: 1. Housing; 2. Temperature sensing structure; 3. Quartz tube; 4. Connecting wire harness; 51. Positioning sleeve; 52. Mounting block; 53. Flexible metal strip; 54. Movable cover; 55. Outer sleeve; 56. Inner sleeve; 57. Piezoelectric ceramic; 58. Guide column; 59. Connecting ring; 510. Connecting wire; 511. Piston disc; 512. Sealing sleeve; 513. Airbag; 514. Intake channel; 515. Cylinder; 516. Rubber block; 517. Tilt tube; 518. Piston; 519. Spring; 520. Push rod; 521. Support block; 522. Synchronizing ring. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments.

[0051] Example 1

[0052] The present invention provides a MEMS optical fiber sensor, such as Figures 1 to 5 As shown, it includes: a shell 1, a temperature sensing structure 2, a quartz tube 3, a connecting harness 4 and a flexible connecting component. The shell 1 serves as the overall frame of the MEMS optical fiber sensor; the temperature sensing structure 2 is connected to the top of the inner wall of the shell 1; the quartz tube 3 is connected to the bottom of the inner wall of the shell 1; one end of the connecting harness 4 is inserted into the middle of the quartz tube 3 and connected to the temperature sensing structure 2, and the other end extends to the outside of the shell 1, and is used to transmit the data collected by the temperature sensing structure 2 to the external device; a flexible connecting component is installed between the temperature sensing structure 2 and the quartz tube 3. The flexible connection component includes: a positioning sleeve 51, a flexible metal strip 53, a movable cover 54, a lifting structure and a clamping structure; the positioning sleeve 51 is connected to the temperature sensing structure 2, the movable cover 54 is connected to the quartz tube 3, the flexible metal strip 53 is connected between the positioning sleeve 51 and the movable cover 54, the lifting structure is connected to the bottom end of the movable cover 54, and the clamping structure is connected to the top end of the movable cover 54. The lifting structure drives the movable cover 54 to move and causes the flexible metal strip 53 to bend, and the lifting structure drives the clamping structure to squeeze the connecting wire harness 4.

[0053] Since the temperature sensing structure 2 and the quartz tube 3 cannot be limited after installation, vibration may easily cause the connection harness 4 and the temperature sensing structure 2 to separate. Therefore, a flexible connection component is provided to enable a flexible connection between the temperature sensing structure 2 and the quartz tube 3. During connection, the temperature sensing structure 2 and the quartz tube 3 are limited so that they cannot rotate independently. The connection harness 4 is pushed and squeezed upward to fix the connection harness 4, thereby increasing the stability between the connection harness 4 and the temperature sensing structure 2 for a second time.

[0054] During use, the shell 1, the temperature sensing structure 2, the quartz tube 3, the connecting harness 4 and the flexible connecting component are assembled to form a MEMS optical fiber sensor. At this time, the lifting structure is operated, and the movable cover 54 is driven to rise when the lifting structure is operated. When the movable cover 54 rises, the flexible metal strip 53 is driven to bend, and the clamping structure is driven to operate at the same time. When the clamping structure is operated, the connecting harness 4 is clamped and pushed upward, so that the connecting harness 4 squeezes and abuts the temperature sensing structure 2.

[0055] Specifically, a temperature sensing structure 2 is fixedly installed on the top of the inner wall of the shell 1. Glass is provided on the top of the shell 1 for transmitting infrared rays. A connecting harness 4 is fixedly installed on the middle of the bottom end of the temperature sensing structure 2. A quartz tube 3 is sleeved on the outside of the connecting harness 4. The quartz tube 3 is fixedly installed on the bottom end of the inner wall of the shell 1. Eight positioning sleeves 51 are arranged on the circumference of the center point at the bottom end of the temperature sensing structure 2. Flexible metal strips 53 are installed inside the eight positioning sleeves 51. The shape of the flexible metal strip 53 is arc-shaped, and the end face shape of the flexible metal strip 53 is rectangular. The bottom end of the flexible metal strip 53 is integrally formed with a movable cover 54. The bottom end of the movable cover 54 A lifting structure is installed, a clamping structure is installed on the top of the movable cover 54, and the same synchronization ring 522 is clamped and connected between the tops of the surfaces of several movable covers 54. The synchronization ring 522 is used for the synchronous displacement of multiple movable covers 54. The temperature sensing structure 2 is integrated with a cavity with a MEMS sensitive diaphragm (silicon-based), a hollow glass sheet and a ceramic ferrule (the above structure belongs to the prior art. When the external environment changes, the diaphragm area expands due to heat. The deformation of the diaphragm under the action of thermal stress causes the FP cavity length to change, forming a spectrum drift, and the temperature parameters are sensed by analyzing the spectrum). The connection harness 4 is fixedly connected to the ceramic ferrule.

[0056] like Figures 2 to 5As shown, the lifting structure includes: piezoelectric ceramic 57, guide post 58, connecting ring 59, connecting wire 510, piston disc 511, sealing sleeve 512, air bag 513, air inlet channel 514, cylinder 515 and rubber block 516; piezoelectric ceramic 57 is inserted into inner sleeve 56; guide post 58 is connected to piezoelectric ceramic 57 and passes through inner sleeve 56; connecting ring 59 is connected to guide post 58; connecting wire 510 is connected to connecting ring 59; piston disc 511 It is connected to the piezoelectric ceramic 57 and inserted into the inner sleeve 56; the sealing sleeve 512 is sleeved on the middle part of the outer side of the piston disc 511; the airbag 513 is inserted inside the sealing sleeve 512; the air intake channel 514 runs through the airbag 513, the sealing sleeve 512 and the piston disc 511; the cylinder 515 is connected to the movable cover 54; the rubber block 516 is connected to the cylinder 515, and the cylinder 515 and the rubber block 516 squeeze the air intake channel 514 to expand the airbag 513.

[0057] Since the clamping structure requires gas compression when it is in operation, the gas is compressed by the lifting structure, so that the clamping structure can operate and the temperature sensing structure 2 and the quartz tube 3 are abutted and fixed.

[0058] When in use, connect the connecting wire 510 to an external power source. At this time, electricity enters the piezoelectric ceramic 57 along the connecting wire 510, the connecting ring 59 and the guide pillar 58. As the piezoelectric ceramic 57 expands under the action of the electric energy, the piezoelectric ceramic 57 moves along the inner sleeve 56 when it expands. As the piezoelectric ceramic 57 moves, it drives the piston disk 511 to move. When the piston disk 511 moves, it cooperates with the air inlet channel 514, the cylinder 515 and the rubber block 516. At this time, the cylinder 515 and the rubber block 516 squeeze the gas inside the air inlet channel 514, allowing the gas to enter the airbag 513, causing the airbag 513 to expand. The expansion of the airbag 513 causes the sealing sleeve 512 to move closer to the inner wall of the outer sleeve 55, thereby increasing the sealing between the piston disc 511 and the outer sleeve 55. At this time, when the piston disc 511 moves upward, the gas between the piston disc 511 and the movable cover 54 is squeezed, and the gas enters the interior of the inclined tube 517 along the guide hole. At the same time, when the piston disc 511 and the movable cover 54 are in contact with each other, the rise of the piston disc 511 drives the movable cover 54 to rise. When the movable cover 54 rises, it drives the clamping structure to rise, and at the same time drives the flexible metal strip 53 to bend, so that the temperature sensing structure 2 and the quartz tube 3 are abutted and fixed.

[0059] Specifically, the piezoelectric ceramic 57 is installed inside the inner sleeve 56, the bottom end of the piezoelectric ceramic 57 is fixedly connected to the bottom end of the inner wall of the inner sleeve 56, the middle part of the bottom end of the piezoelectric ceramic 57 is fixedly connected to a guide post 58, the guide post 58 passes through the inner sleeve 56, and the bottom ends of several guide posts 58 are connected to the same connecting ring 59. The outer sides of the connecting ring 59 and the guide posts 58 are both sleeved with insulating materials. The insulating materials protect the connecting ring 59 and the guide posts 58 to prevent leakage of the connecting ring 59 and the guide posts 58. The bottom end of the connecting ring 59 is connected to a connecting wire 510, which passes through the quartz tube 3. The top of the piezoelectric ceramic 57 is fixedly installed with a piston disk 511. The outer side of the piston disk 511 is in contact with the inner wall of the outer sleeve 55, and the outer surface of the piston disk 511 is in contact with the inner wall of the outer sleeve 55. A sealing sleeve 512 is sleeved on the middle part of the surface, and an air bag 513 is provided in the middle part of the sealing sleeve 512. An air intake channel 514 is provided on one side of the air bag 513 close to the center line of the piston disc 511. The air intake channel 514 runs through the sealing sleeve 512 and the piston disc 511. A cylinder 515 is embedded in the bottom end of the movable cover 54. A rubber block 516 is provided at the bottom end of the cylinder 515 inside the air intake channel 514. The outer side of the rubber block 516 and the outer side of the air intake channel 514 fit together. Circular grooves are provided on the outer side of the rubber block 516 at equal intervals, and rounded corners are provided on the bottom edge of the rubber block 516. The number of air intake channels 514, rubber blocks 516 and cylinders 515 are the same and correspond one to one, which are used to squeeze the inside of the air intake channel 514.

[0060] like Figure 4 and Figure 5 As shown, the clamping structure includes: an inclined tube 517, a piston 518, a spring 519, a push rod 520 and a support block 521; the inclined tube 517 is connected to the movable cover 54; the push rod 520 is inserted into the push rod 520; the support block 521 is connected to the push rod 520, and the support block 521 moves along the inclined tube 517 through the push rod 520; the spring 519 is connected to the push rod 520; the piston 518 is connected to the spring 519, and the piston 518 and the spring 519 support the push rod 520.

[0061] Since the clamping structure needs to clamp the connecting wire harness 4, the clamping structure needs to operate at this time, so that the support block 521 in the clamping structure increases the clamping force of the support block 521 on the connecting wire harness 4, making the connecting wire harness 4 more stable after installation and preventing the connecting wire harness 4 from shaking.

[0062] When in use, as the piston disc 511 rises, it drives the gas between the piston disc 511 and the movable cover 54 to move along the inside of the inclined tube 517. At this time, the gas enters the bottom end of the piston 518 along the inclined tube 517 and drives the piston 518 to move. When the piston 518 moves, the push rod 520 is driven to move by the spring 519. When the push rod 520 moves, it drives the support block 521 to clamp the connecting wire harness 4. When the connecting wire harness 4 abuts the support block 521, the movement of the support block 521 is blocked, while the piston 518 continues to move. At this time, the push rod 520 cannot move because the support block 521 is not moving, and the piston 518 continues to move. At this time, the piston 518 squeezes the spring 519, causing the spring 519 to compress. After compression, the spring 519 is deformed and the tension of the spring 519 increases. At this time, the support block 521 is driven to clamp the connecting wire harness 4 through the increased tension, so that the clamping between the support block 521 and the connecting wire harness 4 is more stable.

[0063] Specifically, the inclined tube 517 is integrally formed at the top of the movable cover 54, and a guide hole is opened inside the inclined tube 517 and penetrates the inside of the movable cover 54. The diameter of the guide hole is located inside the inclined tube 517 and is larger than the diameter at both ends. A piston 518 is slidably connected to the guide hole inside the inclined tube 517, and a sealing ring is sleeved on the middle part of the outer side of the piston 518. A spring 519 is fixedly installed on one end face of the piston 518, and a push rod 520 is fixedly installed on one end face of the spring 519. The push rod 520 is T-shaped, and a support block 521 is clamped and installed on one end face of the push rod 520. One end of the support block 521 is in contact with the outer side of the connecting harness 4.

[0064] like Figure 2 and Figure 3 As shown, the flexible connection assembly also includes: a mounting block 52, an outer sleeve 55 and an inner sleeve 56; the mounting block 52 is connected to the top of the flexible metal strip 53 and is used to connect to the positioning sleeve 51; the outer sleeve 55 is connected to the quartz tube 3 and is used to connect to the movable cover 54; the inner sleeve 56 is connected to the outer sleeve 55 and is used to connect to the lifting structure.

[0065] Since it is necessary to limit the temperature sensing structure 2 and the quartz tube 3, it is necessary to limit the flexible metal strip 53 and the temperature sensing structure 2 to prevent shaking between the flexible metal strip 53 and the temperature sensing structure 2. To this end, the two ends of the flexible metal strip 53 are limited by the action of the mounting block 52, the inner sleeve 56 and the outer sleeve 55 to prevent the flexible metal strip 53 from deflecting, thereby positioning the temperature sensing structure 2 and the quartz tube 3.

[0066] When in use, the mounting block 52 and the flexible metal strip 53 are fixed, and then the outer sleeve 55 and the inner sleeve 56 are fixed. Then, the flexible metal strip 53 is installed inside the mounting block 52 and the outer sleeve 55 respectively, thereby limiting the position of the flexible metal strip 53.

[0067] Specifically, the number of mounting blocks 52 is set to eight, and the bottom ends of the eight mounting blocks 52 are respectively welded to the top ends of the eight flexible metal strips 53. The eight mounting blocks 52 are sleeved inside the eight positioning sleeves 51. The outer sleeve 55 is clamped inside the quartz tube 3 and corresponds one-to-one to the bottom ends of the mounting blocks 52. The inner sleeve 56 is integrally formed in the middle of the top end of the outer sleeve 55.

[0068] Example 2

[0069] A structure of a MEMS optical fiber sensor, comprising the above-mentioned MEMS optical fiber sensor, and further comprising:

[0070] The flexible metal strip 53 is arc-shaped, and its surface is coated with an anti-oxidation coating.

[0071] Working Principle: Before the MEMS fiber optic sensor is put into use, the housing 1, temperature sensing structure 2, quartz tube 3, connection harness 4 and flexible connection components need to be assembled. Through the orderly coordination and docking of each component, a complete MEMS fiber optic sensor is finally formed.

[0072] After the basic assembly of the sensor is completed, the connecting wire 510 is connected to an external power source to form an energized circuit. At this time, the current is conducted along the connecting wire 510, flows through the connecting ring 59 and the guide pillar 58 in sequence, and finally enters the interior of the piezoelectric ceramic 57. According to the principle of the inverse piezoelectric effect, the piezoelectric ceramic 57 undergoes electrostriction under the action of electrical energy, that is, it expands. The expanded piezoelectric ceramic 57 moves in a direction along the inner wall of the inner sleeve 56, and its displacement change is transmitted through the mechanical transmission structure.

[0073] Specifically, the movement of the piezoelectric ceramic 57 drives the piston disc 511 connected thereto to move synchronously. During the movement, the piston disc 511 forms a gas compression system with the air inlet channel 514, the cylinder 515 and the rubber block 516. As the piston disc 511 advances, the cylinder 515 and the rubber block 516 effectively squeeze the gas in the air inlet channel 514. Under the action of pressure, the gas enters the airbag 513 through the air inlet channel 514. After being filled with gas, the airbag 513 expands and deforms. The deformed gas pushes the sealing sleeve 512 toward the inner wall of the outer sleeve 55, making it fit the inner wall of the outer sleeve 55. This significantly enhances the sealing performance between the piston disc 511 and the outer sleeve 55, effectively preventing gas leakage, and ensuring the stability and accuracy of subsequent pressure transmission.

[0074] When the piston disc 511 moves upward, the gas in the enclosed space between it and the movable cover 54 is squeezed, the gas pressure increases, and the pressurized gas enters the interior of the inclined tube 517 along the pre-designed guide hole. Under the guidance of the inclined tube 517, the gas smoothly reaches the bottom end of the piston 518. The gas pressure acts on the piston 518, overcoming the initial elastic force of the spring 519, driving the piston 518 to produce displacement. The movement of the piston 518 is transmitted to the push rod 520 through the spring 519, thereby driving the support block 521 to move toward the connecting wire harness 4, thereby achieving preliminary clamping of the connecting wire harness 4;

[0075] When the connecting wire harness 4 contacts the support block 521, the connecting wire harness 4 hinders the movement of the support block 521 by virtue of its own rigidity. At this time, although the piston 518 still maintains a moving trend under the action of gas pressure, the support block 521 is blocked and cannot continue to move forward, and the movement of the push rod 520 is also restricted. The piston 518 continues to move, compressing the spring 519, causing the spring 519 to undergo elastic deformation. According to Hooke's law, the increased compression of the spring 519 causes its restoring force (tension) to increase accordingly. This increased tension drives the support block 521 to clamp the connecting wire harness 4 with greater pressure, thereby achieving a firm fixation between the connecting wire harness 4 and the support block 521, thereby ensuring the stability and reliability of the internal optical path connection of the MEMS sensor.

[0076] In addition, when the piston disc 511 is completely fitted with the movable cover 54, the continuous rise of the piston disc 511 drives the movable cover 54 to rise synchronously, and the displacement of the movable cover 54 drives the inclined tube 517 to move accordingly. At the same time, the flexible metal strip 53 bends and deforms under the action of mechanical force. Through the precisely designed transmission ratio and mechanical structure, the displacement is converted into precise pressure on the temperature sensing structure 2 and the quartz tube 3, prompting the two to be tightly abutted and fixed. Finally, when the external environment changes, the diaphragm area expands due to heat. The deformation of the diaphragm under the action of thermal stress causes the FP cavity length to change, forming a spectral drift. The temperature parameters are sensed by analyzing the spectrum. At this time, the data connection is output using the wiring harness 4.

[0077] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same.

Claims

1. A MEMS optical fiber sensor, characterized in that: include: A housing (1) serving as an overall frame of the MEMS optical fiber sensor; A temperature sensing structure (2) is connected to the top of the inner wall of the housing (1); A quartz tube (3) connected to the bottom end of the inner wall of the housing (1); A connecting wire harness (4), one end of which is inserted into the middle of the quartz tube (3) and connected to the temperature sensing structure (2), and the other end of which extends to the outside of the housing (1); The flexible connection assembly comprises: a positioning sleeve (51), a flexible metal strip (53), a movable cover (54), a lifting structure and a clamping structure; The positioning sleeve (51) is connected to the temperature sensing structure (2), the movable cover (54) is connected to the quartz tube (3), the flexible metal strip (53) is connected between the positioning sleeve (51) and the movable cover (54), the lifting structure is connected to the bottom end of the movable cover (54), the clamping structure is connected to the top end of the movable cover (54), the lifting structure drives the movable cover (54) to move and causes the flexible metal strip (53) to bend, and the lifting structure drives the clamping structure to squeeze the connecting wire harness (4).

2. A MEMS optical fiber sensor according to claim 1, characterized in that: The flexible connection assembly further includes: A mounting block (52) connected to the top of the flexible metal strip (53) and used for connecting to the positioning sleeve (51); an outer sleeve (55), connected to the quartz tube (3) and used for connecting to the movable cover (54); The inner sleeve (56) is connected to the outer sleeve (55) and is used for connecting the lifting structure.

3. A MEMS optical fiber sensor according to claim 2, characterized in that: The lifting structure includes: A piezoelectric ceramic (57) is inserted into the inner sleeve (56); A guide post (58) connected to the piezoelectric ceramic (57) and passing through the inner sleeve (56); A connecting ring (59) connected to the guide post (58); The connecting line (510) is connected to the connecting ring (59).

4. A MEMS optical fiber sensor according to claim 3, characterized in that: The lifting structure further includes: A piston disc (511) connected to the piezoelectric ceramic (57) and inserted into the inner sleeve (56); A sealing structure is connected to the piston disc (511).

5. The MEMS optical fiber sensor according to claim 4, characterized in that: The sealing structure includes: A sealing sleeve (512) is sleeved on the middle portion of the outer side of the piston disc (511); An air bag (513) is inserted into the sealing sleeve (512); an air intake passage (514) passing through the air bag (513), the sealing sleeve (512) and the piston disc (511); A cylinder (515) connected to the movable cover (54); A rubber block (516) is connected to the cylinder (515), and the cylinder (515) and the rubber block (516) squeeze the air inlet passage (514) to expand the air bag (513).

6. The MEMS optical fiber sensor according to claim 5, characterized in that: The outer side of the rubber block (516) and the outer side of the air intake channel (514) are in contact with each other, circular grooves are provided at equal intervals on the outer side of the rubber block (516), and a rounded corner is provided on the bottom edge of the rubber block (516).

7. The MEMS optical fiber sensor according to claim 6, characterized in that: The clamping structure comprises: a tilting tube (517) connected to the movable cover (54); A push rod (520), inserted into the push rod (520); The support block (521) is connected to the push rod (520), and the support block (521) moves along the inclined tube (517) through the push rod (520).

8. The MEMS optical fiber sensor according to claim 7, characterized in that: The clamping structure further comprises: a spring (519), connected to the push rod (520); The piston (518) is connected to the spring (519), and the piston (518) and the spring (519) support the push rod (520).

9. A structure of a MEMS optical fiber sensor, characterized in that: The structure includes the MEMS fiber optic sensor as claimed in claim 8, and further includes: The flexible metal strip (53) is in an arc shape, and its surface is coated with an anti-oxidation coating.

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