Semiconductor ultrahigh-purity fluid integrated control module and manufacturing method thereof

Abstract

The application relates to the technical field of valves, in particular to a semiconductor ultrahigh-purity fluid integrated control module and a manufacturing method thereof, which comprises a control unit, a sealing unit, a flow channel cavity and a sealing seat; the control unit is linearly arranged on a valve seat and is symmetrically provided with two rows on both sides of a distribution channel; the sealing unit is connected with the control unit; the flow channel cavity is symmetrically arranged in the valve seat and is connected with the distribution channel; the sealing seat is arranged in the flow channel cavity; the linear sealing is improved into plane sealing matched with rigid and flexible PTFE materials to enhance wear resistance and fatigue resistance; a sliding labyrinth sealing plate is arranged to jointly form multilayer redundant sealing together with a diaphragm block and a labyrinth sealing capsule; a leakage hole communicated with the labyrinth sealing capsule is designed; when the diaphragm block leaks, the leaked fluid enters the labyrinth sealing capsule through the leakage hole, the labyrinth sealing capsule is expanded, pressure self-adaptive compensation sealing protection is formed; and the problem that a PTFE diaphragm valve is easy to be worn, deformed and failed in single-line sealing is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of valves, in particular to a semiconductor ultra-high purity fluid integrated control module and a manufacturing method thereof. BACKGROUND

[0002] In the process of semiconductor manufacturing, precise and non-polluted control and transmission of process fluids such as high-purity chemicals and special gases are required to ensure the yield of semiconductor products. Valve assemblies used in semiconductor manufacturing processes must have good corrosion resistance, high sealing performance and ultra-high cleanliness.

[0003] In the process of semiconductor manufacturing, valves are used to realize functions such as liquid dispensing, liquid discharging, liquid feeding, flow control and liquid reversing. In order to more efficiently and simply control the feeding and transmission of chemical liquids, the prior art proposes to integrate multiple function valves into one assembly or system. The multi-channel integrated valve mainly integrates multiple valve units, uses independent or linked operation of each valve unit to realize system control and adjustment, and uses a diaphragm valve for each valve unit to realize on-off by contact control between the diaphragm and the annular valve seat. This sealing method belongs to single-line sealing. In order to ensure the sealing effect, the diaphragm needs to be pressed by increasing the driving force, and then the excessive closing pressure will cause permanent deformation and mechanical fatigue of the diaphragm, thereby shortening the effective life of the valve. In the process of semiconductor manufacturing, in order to ensure good chemical stability, low permeability, good heat resistance and non-adhesion, polytetrafluoroethylene (PTFE) material with excellent chemical inertness is usually used to make the valve body. The inherent softness and low mechanical strength of PTFE material make it more prone to wear and deformation during repeated cyclic loading and unloading, and the particles in the polishing liquid used in the semiconductor manufacturing process also cause wear on the surface of the diaphragm, further leading to sealing failure.

[0004] In view of the above, in order to overcome the above technical problems, the present application designs a semiconductor ultra-high purity fluid integrated control module and a manufacturing method thereof. SUMMARY

[0005] The present application provides a semiconductor ultra-high purity fluid integrated control module and a manufacturing method thereof, which solves the problem of easy wear and deformation failure of PTFE diaphragm valve single-line sealing. The line sealing is improved to flat sealing with rigid and flexible PTFE material combination to enhance wear resistance and fatigue resistance. A sliding labyrinth sealing plate is provided, which together with the diaphragm block and the labyrinth sealing capsule forms a multi-layer redundant sealing. A leakage hole communicating with the labyrinth sealing capsule is designed. When the diaphragm block leaks, the leaked fluid enters the labyrinth sealing capsule through the leakage hole, causing it to expand and form a pressure self-adaptive compensation sealing protection.

[0006] To achieve the above object, the present application provides the following technical solutions:

[0007] A semiconductor ultrahigh-purity fluid integrated control module, comprising a valve seat and a distribution channel, further comprising a control unit, a sealing unit, a flow channel cavity and a sealing seat; the control unit is linearly arrayed on the valve seat and symmetrically arranged with two rows on both sides of the distribution channel; the sealing unit is connected with the control unit, and the control unit moves upward or downward to drive the sealing unit to move upward or downward; the flow channel cavity is symmetrically arranged in the valve seat and connected with the distribution channel; the sealing seat is arranged in the flow channel cavity, and when the sealing unit leaks, fluid enters the sealing seat to make it expand to abut the inner ring of the sealing unit to form a pressure self-adaptive compensation sealing protection.

[0008] Preferably, the control unit comprises a valve body, a first air duct, a second air duct, a valve duct, a valve core and a return spring; the valve body is installed on the valve seat and linearly arrayed on the valve seat; the first air duct and the second air duct are respectively arranged in the upper part and the lower part of the valve body; the valve duct is arranged in the valve body; the valve core is slidably installed in the valve duct; and the return spring is connected between the valve core and the valve body.

[0009] In the above scheme, compressed air is introduced into the first air duct and the second air duct to drive the valve core to slide, when sealing and flow cutting is needed, compressed air is introduced into the first air duct to drive the valve core to slide downward against the elastic force of the return spring, at this time the valve core will drive the sealing unit to abut the sealing seat to form a sealing effect; when fluid flow is needed, compressed air is introduced into the second air duct to disconnect the first air duct, at this time the valve core will move upward under the action of the compressed air in the second air duct and the elastic force of the return spring, thereby driving the sealing unit to move upward to disconnect the contact with the sealing seat, and thus enabling the fluid to flow.

[0010] Preferably, the sealing unit comprises a diaphragm block, a sealing plate groove, a labyrinth sealing plate and a sealing plate disc spring; the diaphragm block is threadedly connected with the valve core; the sealing plate groove is arranged at the bottom of the diaphragm block; the labyrinth sealing plate is slidably installed in the sealing plate groove, and the lower part of the labyrinth sealing plate is provided with an inner labyrinth ring and an outer labyrinth ring; and the sealing plate disc spring is connected between the labyrinth sealing plate and the sealing plate groove.

[0011] In the above scheme, the multi-layer sealing structure is formed by the membrane block and the labyrinth sealing plate, and the leakage occurs only when all the multi-layer structures fail, which can improve the sealing effect. When one of the sealing surfaces is worn, the other sealing surfaces will still maintain the sealing effect. The labyrinth sealing plate can guide the fluid flowing into the failure position and dissipate energy, so that the impact force generated by the subsequent sealing layer is reduced, preventing the failure of the subsequent sealing layer. In addition, the sealing surface of the labyrinth sealing plate is the lower end surface of the inner and outer labyrinth rings, so the fluid entering the sliding position of the labyrinth sealing plate will not cause sealing failure, on the contrary, it can enhance the downward pressure of the labyrinth sealing plate, further improving the sealing reliability.

[0012] Preferably, the membrane block comprises an elastic part and a sealing part; the elastic part is connected with the valve channel; the sealing part is connected with the elastic part, the lower surface of the sealing part is a plane structure, the side wall is an arc structure, and the radius of the sealing part gradually increases in the downward axial direction.

[0013] In the above scheme, the plane sealing is used to replace the original line sealing of the diaphragm valve, which can further enhance the sealing effect. Compared with the form of line sealing, the face sealing increases the contact area, which can effectively prevent the crushing of the sealing surface, thereby reducing the possibility of sealing failure. In the sealing state, the elastic part will deform, and the downward bending arc formed at this time can guide the fluid, so that the fluid can flow downward. The side wall of the sealing part is an arc structure, and the radius of the lower end is large, which can form a downward pressure on the sealing part, further enhancing the sealing effect.

[0014] Preferably, the sealing seat comprises a fixed seat, a sealing ring, a sealing disc spring, a flow hole and a labyrinth sealing capsule; the fixed seat is connected with the flow channel cavity, the outer diameter of the fixed seat is equal to the outer diameter of the outer labyrinth ring, and the inner diameter of the fixed seat is equal to the inner diameter of the inner labyrinth ring; the sealing ring is installed on the fixed seat; the sealing disc spring is connected between the bottom of the fixed seat and the sealing ring; the flow hole is opened on the side wall of the top of the fixed seat; the labyrinth sealing capsule is connected with the top of the fixed seat, and the labyrinth sealing capsule is a hollow structure with a "C" shaped cross section.

[0015] In the above scheme, under the action of the sealing disc spring, on the one hand, the sealing disc spring is directly fixedly connected with the sealing ring, and the sealing ring is fixedly connected with the bottom of the fixed seat, which can form a completely sealed state, thereby preventing the fluid from leaking from the sliding position of the inner wall of the sealing ring. On the other hand, the sealing disc spring can push the sealing ring upward, thereby ensuring that the sealing ring and the sealing part can maintain a stable fitting state under the sealing state. Even if the sealing part moves up a small distance under unstable air pressure or fluid impact, the sealing disc spring can also push the sealing ring upward a small distance to ensure the fitting between the two, thereby ensuring the sealing property.

[0016] Preferably, the distribution channel comprises a main flow channel and a branch flow channel; the main flow channel is arranged in the center of the valve seat; the branch flow channel is arranged on the upper part of both sides of the main flow channel, and the cross section formed by the main flow channel and the branch flow channel is V-shaped, and the tail part of the branch flow channel is connected with the flow channel cavity.

[0017] In the above scheme, when the fluid enters the flow channel cavity through the branch flow channel, the fluid will first reach the upper part of the flow channel cavity under the guiding effect of the V-shaped structure, so as to avoid directly impacting the sealing position, reduce the fluid impact and fluid pressure at the sealing position, and further reduce the possibility of sealing failure, and cooperate with the structure that the lower surface of the sealing part is a planar structure, the side wall is an arc-shaped structure, and the radius of the sealing part gradually increases in the downward axial direction, so that the fluid downward pressure can effectively act on the sealing part, and the pressing effect of the sealing part is ensured.

[0018] Preferably, the leakage hole is a conical structure, and the radius of the leakage hole gradually decreases in the direction of the center of the fixed seat; the labyrinth sealing capsule is made of fluororubber.

[0019] In the above scheme, the leakage hole can guide the fluid to the labyrinth sealing capsule when leakage occurs, the fluid pressure will cause the labyrinth sealing capsule to expand, and a close-fitting effect with the bottom of the labyrinth sealing plate will be generated, so that leakage protection can be achieved, and the size of the sealing force is proportional to the leakage pressure, the larger the leakage pressure is, the more the labyrinth sealing capsule expands, the tighter the sealing is, and self-adaptive positive feedback is achieved.

[0020] A semiconductor ultrahigh-purity fluid integrated control module manufacturing method is suitable for any of the semiconductor ultrahigh-purity fluid integrated control modules, and specifically comprises the following steps:

[0021] S1: performing multiple stress relief annealing treatments on the PTFE material, and then standing in a constant temperature environment for more than two weeks to release the internal stress of the material;

[0022] S2: performing dry cutting of the annealed and stood PTFE material without cutting fluid in a ten-thousand-level dust-free room by using a numerical control machine tool, machining the valve seat, the control unit, the sealing unit and the sealing seat by using high-speed steel cutters, and machining the distribution channel and the flow channel cavity in the valve seat by using a diamond cutter;

[0023] S3: performing surface finishing treatment on the machined structures by using high-mesh ultra-fine sandpaper to remove micro burrs, and then performing multiple cleaning and drying treatments;

[0024] S4: assembling the valve seat, the control unit, the sealing unit and the sealing seat in the ten-thousand-level dust-free room.

[0025] Compared with the prior art, the semiconductor ultrahigh-purity fluid integrated control module has the following beneficial effects:

[0026] 1. The scheme will improve the line sealing of the traditional diaphragm valve to the plane sealing, greatly increase the contact area of the diaphragm block and the fixed seat, effectively disperse the closing pressure, avoid the stress concentration caused by the sealing surface pressure, creep and permanent deformation, significantly improve the durability and wear resistance of the main sealing. At the same time, the materials of rigidity and flexibility are matched, the flexible PTFE of M112 brand is used in the elastic part to ensure excellent fatigue resistance, the rigid PTFE of M111 brand is used in the sealing part to ensure the flatness and wear resistance of the contact surface, and the valve can still maintain excellent sealing performance after millions of cycles.

[0027] 2. The multilayer sealing structure composed of the diaphragm block and the built-in slidable labyrinth sealing plate can still provide effective sealing barrier even if the main sealing surface fails due to wear or particles, and leakage will occur only when all the multilayer structures fail. At the same time, the labyrinth sealing plate can also guide the leaked fluid and dissipate energy, reducing the impact on the subsequent sealing layer, thereby significantly prolonging the effective service life and operation stability of the valve, and avoiding the risk of single-point sealing failure.

[0028] 3. The labyrinth sealing capsule is provided in communication with the leakage hole, when the diaphragm block sealing occurs leakage, the leakage fluid will be automatically introduced into the labyrinth sealing capsule, the pressure of the fluid will drive the labyrinth sealing capsule to expand, so that it closely fits with the related parts, forming an active and reliable compensating seal, the sealing force is proportional to the leakage pressure, realizing the self-adaptive positive feedback effect of "the more leakage, the tighter", which can automatically handle small leakage without external intervention, greatly improving the safety redundancy and sealing protection ability of the valve under severe working conditions. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0030] Figure 1 is the overall structure diagram of the present application;

[0031] Figure 2 is the internal structure diagram of the valve body of the present application;

[0032] Figure 3 is the sectional view of the present application;

[0033] Figure 4 is Figure 3 is the enlarged view of structure A in the middle;

[0034] Figure 5 For Figure 4 Structure enlarged view at B in the middle;

[0035] Figure 6 For Figure 5 Structure enlarged view at C in the middle;

[0036] Figure 7 Sealing state diagram of the present application;

[0037] Figure 8 State diagram of the present application when leaking;

[0038] Figure 9 Manufacturing flow chart of the present application.

[0039] In the figure: 1, valve seat; 2, distribution channel; 21, main flow channel; 22, branch flow channel; 3, control unit; 31, valve body; 32, first air channel; 33, second air channel; 34, valve channel; 35, valve core; 36, return spring; 4, sealing unit; 41, diaphragm block; 411, elastic part; 412, sealing part; 42, sealing plate groove; 43, labyrinth sealing plate; 431, inner labyrinth ring; 432, outer labyrinth ring; 44, sealing plate disc spring; 5, flow channel cavity; 6, sealing seat; 61, fixed seat; 62, sealing ring; 63, sealing disc spring; 64, leakage hole; 65, labyrinth sealing bag. DETAILED DESCRIPTION

[0040] In order to better understand the above technical solutions, the above technical solutions will be described in detail below in combination with the drawings in the specification and specific embodiments.

[0041] Please refer to Figures 1 to 9 The present application provides a semiconductor ultrahigh-purity fluid integrated control module and a manufacturing method thereof, and the technical solutions are as follows:

[0042] As a specific embodiment of the present application, referring to Figure 1 and Figure 2 A semiconductor ultrahigh-purity fluid integrated control module, comprising a valve seat 1 and a distribution channel 2, further comprising a control unit 3, a sealing unit 4, a flow channel cavity 5 and a sealing seat 6; the control unit 3 is linearly arrayed on the valve seat 1 and symmetrically provided with two rows on both sides of the distribution channel 2; the sealing unit 4 is connected with the control unit 3, and the control unit 3 drives the sealing unit 4 to move upward or downward when moving upward or downward; the flow channel cavity 5 is symmetrically provided in the valve seat 1 and connected with the distribution channel 2; the sealing seat 6 is provided in the flow channel cavity 5, and when the sealing unit 4 leaks, fluid enters the sealing seat 6 to make it expand and abut against the inner ring of the sealing unit 4 to form a pressure self-adapting compensation sealing protection.

[0043] As a specific embodiment of the present application, with reference to Figure 2 , Figure 3 and Figure 7 , the control unit 3 comprises a valve body 31, a first air passage 32, a second air passage 33, a valve passage 34, a valve core 35 and a return spring 36; the valve body 31 is installed on the valve seat 1 and arranged linearly on the valve seat 1; the first air passage 32 and the second air passage 33 are respectively formed in the upper and lower parts of the valve body 31; the valve passage 34 is formed in the valve body 31; the valve core 35 is slidingly installed in the valve passage 34; and the return spring 36 is connected between the valve core 35 and the valve body 31. By introducing compressed air into the first air passage 32 and the second air passage 33, the valve core 35 is driven to slide. When sealing and cutting off fluid is needed, compressed air is introduced into the first air passage 32 to drive the valve core 35 to slide downward against the elastic force of the return spring 36. At this time, the valve core 35 will drive the sealing unit 4 to abut against the sealing seat 6 to form a sealing effect. When fluid needs to flow, compressed air is introduced into the second air passage 33 to cut off the air supply of the first air passage 32. At this time, the valve core 35 will move upward under the action of the compressed air in the second air passage 33 and the elastic force of the return spring 36, thereby driving the sealing unit 4 to move upward and cut off the contact with the sealing seat 6, so that the fluid can flow.

[0044] As a specific embodiment of the present application, with reference to Figure 3 , Figure 4 and Figure 5 , the sealing unit 4 comprises a diaphragm block 41, a sealing plate groove 42, a labyrinth sealing plate 43 and a sealing plate disc spring 44; the diaphragm block 41 is threadedly connected with the valve core 35; the sealing plate groove 42 is formed in the bottom of the diaphragm block 41; the labyrinth sealing plate 43 is slidingly installed in the sealing plate groove 42, and the lower part of the labyrinth sealing plate 43 is provided with an inner labyrinth ring 431 and an outer labyrinth ring 432; and the sealing plate disc spring 44 is connected between the labyrinth sealing plate 43 and the sealing plate groove 42. The diaphragm block 41 and the labyrinth sealing plate 43 form a multi-layer sealing structure. Leakage will occur only when all the multi-layer structures fail, which can improve the sealing effect. When one of the sealing surfaces is worn, the other sealing surfaces will still maintain the sealing effect. The labyrinth sealing plate 43 can guide the fluid flowing into the failure position and dissipate energy, so as to reduce the impact force on the subsequent sealing layer and prevent the subsequent sealing layer from failing. In addition, the sealing surface of the labyrinth sealing plate 43 is the lower end surface of the inner labyrinth ring 431 and the outer labyrinth ring 432, so that the fluid entering the sliding position of the labyrinth sealing plate 43 will not cause sealing failure, on the contrary, the labyrinth sealing plate 43 can enhance the downward pressure to further improve the sealing reliability.

[0045] As a specific embodiment of the present application, with reference to Figure 4 and Figure 5The diaphragm block 41 comprises an elastic part 411 and a sealing part 412; the elastic part 411 is connected with the valve channel 34; the sealing part 412 is connected with the elastic part 411, the lower surface of the sealing part 412 is a plane structure, the side wall is an arc structure, and the radius of the sealing part 412 gradually increases in the direction of the axis downward. By using the plane sealing to replace the line sealing of the original diaphragm valve, the sealing effect can be further enhanced, and compared with the form of line sealing, the face sealing increases the contact area, which can effectively prevent the crushing of the sealing surface, thereby reducing the possibility of sealing failure. In the sealing state, the elastic part 411 will be deformed, at this time, the downward bending arc formed can form a flow guiding effect on the fluid, so that the fluid can flow downward, and the side wall of the sealing part 412 is an arc structure, and the radius of the lower end is large, so that the fluid can form a downward pressure on the sealing part 412, further enhancing the sealing effect; the elastic part 411 adopts PTFE with a large gold mark of M112, the PTFE material with this mark is a flexible material, has excellent fatigue resistance, can realize millions of times of opening and closing deformation, and has good anti-creeper property, even if in the closed state for a long time, the elastic part 411 can also restore to the original state, the sealing part 412 adopts PTFE with a large gold mark of M111, has stronger rigidity, can ensure that the sealing surface is flat, wear-resistant and hard, and will not be crushed and deformed, thereby ensuring good sealing.

[0046] As a specific embodiment of the present application, reference is made to Figure 5 、 Figure 6 、 Figure 7 and Figure 8The sealing seat 6 comprises a fixed seat 61, a sealing ring 62, a sealing disc spring 63, a leakage hole 64 and a labyrinth sealing bag 65. The fixed seat 61 is connected with the flow channel cavity 5, the outer diameter of the fixed seat 61 is equal to the outer diameter of the outer labyrinth ring 432, and the inner diameter of the fixed seat 61 is equal to the inner diameter of the inner labyrinth ring 431. The sealing ring 62 is installed on the fixed seat 61. The sealing disc spring 63 is connected between the bottom of the fixed seat 61 and the sealing ring 62. The leakage hole 64 is arranged on the sidewall of the top of the fixed seat 61. The labyrinth sealing bag 65 is connected with the top of the fixed seat 61, and the labyrinth sealing bag 65 is a hollow structure with a “C” shaped cross section and is communicated with the leakage hole 64. Under the action of the sealing disc spring 63, on the one hand, the sealing disc spring 63 is directly fixedly connected with the sealing ring 62, and the sealing ring 62 is fixedly connected with the bottom of the fixed seat 61, so that a completely sealed state is formed, thereby preventing fluid from leaking from the sliding position of the inner wall of the sealing ring 62. On the other hand, the sealing disc spring 63 can push the sealing ring 62 upward, so that the sealing ring 62 and the sealing part 412 can be kept in a stable and close state under the sealing state, even if the sealing part 412 moves upward by a small distance under unstable air pressure or fluid impact, the sealing disc spring 63 can also push the sealing ring 62 upward by a small distance to ensure that the two are close to each other, thereby ensuring the sealing property. When the lower surface of the sealing part 412 is required to be close to the sealing ring 62 during processing, the sealing ring 62 can move downward by a small distance under the action of pressure, and the processing depth of the sealing plate groove 42 needs to ensure that the sealing ring 62 and the sealing part 412 are close to each other, and the bottom of the inner labyrinth ring 431 and the outer labyrinth ring 432 of the lower part of the labyrinth sealing plate 43 can be close to the upper surface of the fixed seat 61.

[0047] As a specific embodiment of the present application, refer to Figure 3 and Figure 4 The distribution channel 2 comprises a main flow channel 21 and a branch flow channel 22. The main flow channel 21 is arranged at the center of the valve seat 1. The branch flow channel 22 is arranged at the upper part of both sides of the main flow channel 21 and forms a “V” shaped cross section with the main flow channel 21. The tail part of the branch flow channel 22 is connected with the flow channel cavity 5. When the fluid enters the flow channel cavity 5 through the branch flow channel 22, it will first reach the upper part of the flow channel cavity 5 under the guidance of the “V” shaped structure, thereby avoiding direct impact on the sealing position, reducing the fluid impact and fluid pressure on the sealing position, and further reducing the possibility of sealing failure. In combination with the structure that the lower surface of the sealing part 412 is a flat structure, the sidewall is an arc structure, and the radius of the sealing part 412 gradually increases in the downward direction along the axial direction, the fluid downward pressure can effectively act on the sealing part 412, thereby ensuring the pressing effect of the sealing part 412.

[0048] As a specific embodiment of the present application, refer to Figure 6 , Figure 7 and Figure 8The leakage hole 64 is a conical structure, and the radius of the leakage hole 64 gradually decreases towards the center of the fixing base 61; the labyrinth sealing bag 65 is made of fluororubber. The leakage hole 64 can guide the fluid to the labyrinth sealing bag 65 when leakage occurs, and the fluid pressure will make the labyrinth sealing bag 65 expand and tightly fit the bottom of the labyrinth sealing plate 43, so as to realize leakage protection, and the size of the sealing force is proportional to the leakage pressure, the greater the leakage pressure, the more the labyrinth sealing bag 65 expands, the tighter the sealing, and the adaptive positive feedback is realized; the fluororubber material has high chemical inertness and fatigue resistance, and can resist most strong acids, strong bases, solvents and oxidizing agents in semiconductor processes, and when it is driven to expand by internal pressure, it can perfectly fill any microscopic scratches, pits or processing marks like a soft gasket, thereby forming a high-airtightness surface seal.

[0049] As a specific embodiment of the present application, reference is made to Figure 9 A semiconductor ultrahigh-purity fluid integrated control module manufacturing method, suitable for any of the above-mentioned semiconductor ultrahigh-purity fluid integrated control modules, specifically comprising:

[0050] S1: The PTFE material is subjected to multiple stress relief annealing treatment, and then is placed in a constant temperature environment for more than two weeks to release the internal stress of the material;

[0051] S2: The PTFE material after annealing and standing is subjected to dry cutting without cutting fluid in a ten-thousand-level clean room using a numerical control machine tool, a high-speed steel cutter is used to process the valve seat 1, the control unit 3, the sealing unit 4 and the sealing seat 6, and a diamond cutter is used to process the distribution channel 2 and the flow passage cavity 5 in the valve seat 1;

[0052] S3: High-mesh ultra-fine sandpaper is used to perform surface finishing treatment on the processed structures to remove microscopic burrs, and then multiple cleaning and drying treatments are performed;

[0053] S4: The valve seat 1, the control unit 3, the sealing unit 4 and the sealing seat 6 are assembled in a ten-thousand-level clean room.

[0054] Workflow: When the valve needs to be closed (sealing intercepts): the external control system to the first airway 32 into compressed air, while the second airway 33 of the air, compressed air into the valve body 31, the top of the valve core 35, generate a downward driving force, which overcomes the reset spring 36 upward pre-tightening elastic force, push the valve core 35 in the valve 34 inside the smooth downward sliding, because the film block 41 in the sealing unit 4 and the valve core 35 threaded connection, the downward sliding of the valve core 35 will drive the entire sealing unit 4 synchronous downward movement. Ultimately, the sealing part 412 below the plane sealing surface of the film block 41, with the sealing ring 62 on the fixed seat 61 closely, the process relies on the flexible deformation of the elastic part 411 to make the sealing part 412 can smoothly down, form a stable and reliable plane seal, so as to completely block the flow of fluid in the flow channel cavity 5, complete the closing action of the valve;

[0055] When the valve needs to be opened (fluid flow), the external control system to the second airway 33 into compressed air, while the first airway 32 is disconnected and emptied, compressed air into the valve body 31, the lower part of the valve core 35, generate a upward driving force. This upward pneumatic driving force and the elastic force of the reset spring 36 itself superimposed, together push the valve core 35 to overcome the friction resistance upward sliding, the upward movement of the valve core 35 also drive the sealing unit 4 upward, so that the sealing surface of the sealing part 412 and the sealing ring 62 completely separated, between them form an open fluid channel. At this time, the fluid can flow smoothly through the flow channel cavity 5, complete the opening action of the valve;

[0056] In the case of leakage, the sealing part 412 and the sealing ring 62 due to long-term use or abrasive particles wear and produce a small leakage, the leakage of high pressure fluid will be guided out through the flow hole 64 opened in the top of the fixed seat 61 side wall, the flow hole 64 is designed as a tapered structure with a gradually decreasing radius towards the center, which can further pressurize the fluid, so that the leakage fluid is collected and directed to the labyrinth seal capsule 65 connected thereto, the labyrinth seal capsule 65 is made of high elasticity fluorine rubber material, when the hollow capsule is filled with the leakage fluid, the fluid pressure will make it swell rapidly, the swollen labyrinth seal capsule 65 will closely adhere to the bottom of the labyrinth seal plate 43, forming a flexible, self-adaptive compensation seal, the greater the leakage pressure, the more swelling of the labyrinth seal capsule 65, the stronger the sealing force, realizing the intelligent self-adaptive positive feedback;

[0057] In the case that the outer labyrinth ring 432 and the labyrinth seal bag 65 are both invalid, the leaked fluid will be effectively dissipated its kinetic energy and gradually attenuated its pressure in the tortuous sealing path formed by the outer labyrinth ring 432, the labyrinth seal bag 65 and the inner labyrinth ring 431, preventing most of the fluid from continuing to leak, and when the fluid enters the upper area of the labyrinth seal plate 43, the fluid pressure will also act on the labyrinth seal plate 43, enhancing its downward pressure, so that it is more tightly attached to the fixed seat 61, further improving its sealing reliability.

[0058] The basic principles, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited by the above-mentioned embodiments, and the above-mentioned embodiments and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A semiconductor ultrapure fluid integrated control module comprising a valve seat (1) and a distribution channel (2), characterized in that: Also include control unit (3), sealing unit (4), flow channel cavity (5) and sealing seat (6); The control unit (3) is linearly arranged on the valve seat (1), and two rows are symmetrically arranged on both sides of the distribution channel (2); The sealing unit (4) is connected with the control unit (3), and the control unit (3) moves upward or downward, and drives the sealing unit (4) to move upward or downward; The flow channel cavity (5) is symmetrically arranged in the valve seat (1) and connected with the distribution channel (2); The sealing seat (6) is arranged in the flow channel cavity (5), and when the sealing unit (4) leaks, the fluid enters the sealing seat (6) to make it swell and abut the inner ring of the sealing unit (4) to form a pressure self-adaptive compensation sealing protection; The sealing unit (4) includes a diaphragm block (41), an sealing plate groove (42), a labyrinth sealing plate (43) and a sealing plate disc spring (44); The diaphragm block (41) is threadedly connected with the valve core (35); The sealing plate groove (42) is arranged at the bottom of the diaphragm block (41); The labyrinth sealing plate (43) is slidably installed in the sealing plate groove (42), and the lower part of the labyrinth sealing plate (43) is provided with an inner labyrinth ring (431) and an outer labyrinth ring (432); The sealing plate disc spring (44) is connected between the labyrinth sealing plate (43) and the sealing plate groove (42); The sealing seat (6) includes a fixed seat (61), a sealing ring (62), a sealing disc spring (63), a leakage hole (64) and a labyrinth sealing bag (65); The fixed seat (61) is connected with the flow channel cavity (5), the outer diameter of the fixed seat (61) is equal to the outer diameter of the outer labyrinth ring (432), and the inner diameter of the fixed seat (61) is equal to the inner diameter of the inner labyrinth ring (431); The sealing ring (62) is installed on the fixed seat (61); The sealing disc spring (63) is connected between the bottom of the fixed seat (61) and the sealing ring (62); The leakage hole (64) is arranged on the side wall of the top of the fixed seat (61); The labyrinth sealing bag (65) is connected with the top of the fixed seat (61), and the labyrinth sealing bag (65) is a hollow structure with a "C" shaped cross section and communicates with the leakage hole (64).

2. The semiconductor ultrapure fluid integrated control module of claim 1, wherein: The control unit (3) includes a valve body (31), a first air channel (32), a second air channel (33), a valve channel (34), a valve core (35) and a reset spring (36); The valve body (31) is linearly arranged on the valve seat (1); The first air channel (32) and the second air channel (33) are respectively arranged at the upper part and the lower part of the valve body (31); The valve channel (34) is arranged inside the valve body (31); The valve core (35) is slidably installed in the valve channel (34); The reset spring (36) is connected between the valve core (35) and the valve body (31).

3. The semiconductor ultrapure fluid integrated control module of claim 1, wherein: The diaphragm block (41) includes an elastic part (411) and a sealing part (412); The elastic part (411) is connected with the valve channel (34); The sealing part (412) is connected with the elastic part (411), the lower surface of the sealing part (412) is a plane structure, the side wall is an arc structure, and the radius of the sealing part (412) gradually increases in the direction of the axis downward.

4. The semiconductor ultrapure fluid integrated control module of claim 1, wherein: The distribution channel (2) comprises a main flow channel (21) and a branch flow channel (22); the main flow channel (21) is arranged in the center of the valve seat (1); the branch flow channel (22) is arranged on the upper part of both sides of the main flow channel (21) and forms a "V" shape with the main flow channel (21) in cross section, and the tail part of the branch flow channel (22) is connected with the flow channel cavity (5).

5. The semiconductor ultrapure fluid integrated control module of claim 1, wherein: The leakage hole (64) is a conical structure, and the radius of the leakage hole (64) gradually decreases towards the center of the fixing seat (61); the labyrinth sealing bag (65) is made of fluororubber material.

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