Photoresist diluting stirrer

Abstract

The invention belongs to the field of photoresist processing equipment, and particularly relates to a photoresist diluting stirrer which comprises a double-layer reaction container body, a cavity is formed in the double-layer reaction container body, and a photoresist mixed solution is located in the cavity; the middle shaft rod is connected with the double-layer reaction container body and can rotate; the stirring wheel is arranged on the middle shaft rod, is positioned in the cavity and can synchronously rotate with the middle shaft rod; an output shaft of the driving motor is in butt joint with the middle shaft rod and used for controlling the middle shaft rod to rotate, and the mixed liquid is preliminarily scattered through the stirring wheel; the guide transmission assembly is connected with the double-layer reaction container body; compared with the prior art, the device has the advantages that the middle shaft rod can be controlled by the driving motor to rotate, the middle shaft rod drives the stirring wheel to rotate, at the moment, the photoresist and diluent mixed liquid in the double-layer reaction container body is preliminarily scattered, and after preliminary scattering, the stirring wheel continues to rotate, and meanwhile, the double-layer reaction container body swings; the stirring effect on the mixed liquid is improved, and the dilution efficiency is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of photoresist processing equipment, and particularly relates to a photoresist dilution stirrer. BACKGROUND

[0002] In the chip manufacturing process, some non-standard wafers cannot use rotary coating, and need to adopt the form of spraying glue, which atomizes the photoresist into fine particles, and then makes the atomized particles uniformly adhere to the wafer surface, wherein the viscosity of the photoresist is required to be relatively low, otherwise it cannot be atomized, so the photoresist needs to be mixed with a diluent in a certain proportion to reduce the viscosity of the photoresist when used.

[0003] In the prior art, the photoresist and the diluent are placed in a container, and then a stirring rod is stirred in the container to finally realize the dilution of the mixed liquid in the container.

[0004] However, since the initial viscosity of the photoresist is relatively high, if the capacity of the photoresist in the container is relatively large when the dilution is performed by the above-mentioned method, the stirring efficiency of the stirring rod is affected, and if the capacity of the photoresist is relatively small, although the stirring of the stirring rod is relatively easy at this time, the dilution efficiency is affected. SUMMARY

[0005] The purpose of the present application is to provide a photoresist dilution stirrer which can improve the dilution efficiency of the photoresist.

[0006] To achieve the above-mentioned purpose, the technical scheme adopted by the present application is a photoresist dilution stirrer, which comprises a double-layer reaction container body, the inside of the double-layer reaction container body has a cavity, so that the photoresist mixed liquid is located in the cavity; a middle shaft is connected with the double-layer reaction container body and can rotate; a stirring wheel is arranged on the middle shaft and located in the cavity, and can rotate synchronously with the middle shaft; the output shaft of a driving motor is butted with the middle shaft, which is used to control the rotation of the middle shaft, and the mixed liquid is preliminarily dispersed by the stirring wheel; a guide transmission assembly is connected with the double-layer reaction container body; a horizontal driving assembly is detachably connected with the guide transmission assembly, which is used to swing the double-layer reaction container body to stir the preliminarily dispersed mixture.

[0007] Further, a bracket is connected with the double-layer reaction container body, so that the double-layer reaction container body is in a suspended state; A tray is connected to the bracket and is connected with the double-layer reaction container body, and the double-layer reaction container body can swing around the connecting point.

[0008] Further, a positioning assembly is connected to the bracket and can move vertically, which is used to keep the container body in a vertical state.

[0009] Further, the positioning assembly comprises a positioning disc and a base, the positioning disc is connected with the support and can move vertically, and the center of the positioning disc is provided with a positioning opening; the base is arranged on the positioning disc and located at the side of the positioning opening; the auxiliary top rod can move axially after rotating.

[0010] Further, the positioning assembly comprises a positioning disc and a base, the positioning disc is connected with the support and can move vertically, and the center of the positioning disc is provided with a positioning opening; the base is arranged on the positioning disc and located at the side of the positioning opening; the auxiliary top rod can move axially after rotating. After the positioning assembly moves upward, the support cooperates with the side clamping assembly.

[0011] Further, the side clamping assembly comprises a clamping seat, the clamping seat is slidingly connected with the tray, the clamping seat is provided with a vertical side surface and an inclined side surface, and a clamping plate is connected with the vertical side surface of the clamping seat. The positioning support arm is fixed on the tray and connected with a turnover arm at the upper end, the inner end of the turnover arm is in contact with the inclined side surface of the clamping seat, and the outer end of the turnover arm cooperates with the support, so that the turnover arm can move by turning over.

[0012] Further, the support comprises a support arm and a limiting sliding arm, and the support arm is arranged vertically. The limiting sliding arm is provided with a plurality of limiting sliding arms, and each limiting sliding arm is connected with the support arm. The limiting sleeve is fixed at the end of the limiting sliding arm, and the limiting sleeve is connected with the support and can slide vertically on the support.

[0013] Further, the double-layer reaction container body comprises a container body, and the container body is provided with a top opening. The top sealing seat is connected at the top opening of the container body in a detachable manner.

[0014] Further, the container body comprises a plurality of cylinder bodies, and the plurality of cylinder bodies are sequentially connected in a butt joint manner to form a cylinder wall body, and the lower end of the cylinder wall body is connected with a bottom tray.

[0015] Further, the top sealing seat comprises a top cover, the top cover is used for abutting against the container body, and a center opening is arranged at the center position of the top rod. The flat sealing seat is connected at the center position of the top cover. The flat channel is arranged on the flat sealing seat and abuts against the center opening, so that the central axis rod can pass through the flat channel.

[0016] Further, the flat channel comprises a top channel, a middle channel and a bottom channel arranged in sequence, and a center disc is arranged in the middle channel and in close contact with the inner wall of the middle channel.

[0017] Further, the center disc is provided with an axis rod and a hole, the axis rod penetrates through the flat sealing seat and is connected with the tray, and the hole extends along the radial direction of the center disc, so that the central axis rod can pass through the hole.

[0018] Further, the container body is provided with a view liquid tube, the view liquid tube is a transparent tube body, both ends of the view liquid tube are communicated with the container body, so that the dilution glue liquid in the container body can enter into the view liquid tube.

[0019] Compared with the prior art, the beneficial effects of the present application are: by driving the motor to control the rotation of the middle shaft rod, the middle shaft rod drives the stirring wheel to rotate, at this time, the liquid mixed by the photoresist and the diluent in the double-layer reaction container body is preliminarily dispersed, and after the preliminary dispersion, the stirring wheel continues to rotate while the double-layer reaction container body swings, increasing the stirring effect of the mixed liquid and improving the dilution efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a schematic view of the support and the double-layer reaction container body of the present application; Figure 2 It is a schematic view of the double-layer reaction container body structure of the present application; Figure 3 It is a schematic view of the top position sealing seat and the support connection of the present application; Figure 4 It is a schematic view of the flat sealing seat cross-section structure of the present application; Figure 5 It is a schematic view of the positioning assembly structure of the present application; Figure 6 It is a schematic view of the support and the side clamp assembly cooperation of the present application; Figure 7 It is a schematic view of the support structure of the present application; Figure 8 It is a schematic view of the side clamp assembly structure of the present application; Figure 9 It is a schematic view of the horizontal driving assembly second embodiment structure of the present application; Figure 10 It is a schematic view of the push-pull arm 901 and the support connection of the present application.

[0021] Wherein, 101 - the central shaft, 102 - the explosion-proof stirring motor, 103 - the stirring wheel, 201 - the top lifting plate, 202 - the support column, 203 - the tray, 301 - the top cover, 302 - the flat seat, 303 - the center plate, 3021 - the opposite bottom seat, 3022 - the middle flat body, 3023 - the top expansion body, 3041 - the top channel, 3042 - the middle channel, 3043 - the bottom channel, 3051 - the cylinder, 3052 - the bottom tray, 401 - the liquid level gauge, 402 - the flow guide pipe, 501 - the positioning disc, 502 - the positioning port, 503 - the sliding sleeve, 504 - the base, 505 - the auxiliary top rod, 601 - the support arm, 602 - the limit sliding arm, 603 - the limit sleeve, 701 - the clamping seat, 702 - the chuck, 703 - the clamping plate, 704 - the positioning support arm, 705 - the turning and pushing arm, 706 - the clamping groove, 801 - the base, 802 - the driving part, 803 - the support disc, 804 - the side support rod, 901 - the push-pull arm, 902 - the guide part, 903 - the guide port, 1001 - the flat lifting plate, 1002 - the lifting shaft, 1003 - the transmission gear, 1004 - the lower transmission wheel, 1005 - the connecting rod, 1101 - the flat pulling plate, 1102 - the guide pipe. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below with reference to the drawings of the embodiments of the present application. Obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0023] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection" and "linking" should be understood in a broad sense, for example, can be fixed connection, can also be detachable connection, or integrally connected; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0024] Reference Figure 1 As shown in the figure, a photoresist dilution stirrer comprises a double-layer reaction container body, the double-layer reaction container body has a cavity inside, photoresist and diluent can be put into the cavity inside the double-layer reaction container body, then the photoresist and the diluent are mixed in the double-layer reaction container body, and finally the diluted photoresist is obtained.

[0025] In order to mix the photoresist in the double-layer reaction container uniformly, the double-layer reaction container body is connected with a stirring assembly, the stirring assembly comprises a central shaft 101 and an explosion-proof stirring motor 102, the central shaft 101 is inserted from the upper end of the double-layer reaction container body, at this time, the lower end of the central shaft 101 is located in the cavity and the central shaft 101 coincides with the central axis of the double-layer reaction container body, the central shaft 101 is butt-jointed with the output shaft of the explosion-proof stirring motor 102, the rotation of the central shaft 101 is controlled by the explosion-proof stirring motor 102, a stirring wheel 103 is installed on the central shaft 101, the stirring wheel 103 is located in the double-layer reaction container body, so that the rotation of the stirring wheel 103 is controlled by the explosion-proof stirring motor 102, and the photoresist and the diluent are mixed by the rotating stirring wheel 103.

[0026] In order to increase the mixing efficiency, the double-layer reaction container body can be reciprocated during the rotation of the stirring wheel 103 controlled by the explosion-proof stirring motor 102, and the stirring wheel 103 is always located in the double-layer reaction container during the reciprocation of the double-layer reaction container; Specifically, the double-layer reaction container body comprises a container body provided with a top opening, a top sealing seat is butt-jointed at the top opening of the container body, a support is arranged outside the double-layer reaction container body, so that the double-layer reaction container body is in a hanging state, the support comprises a top hanging plate 201 and a supporting column 202, the explosion-proof stirring motor 102 is installed on the top hanging plate 201, the top sealing seat is connected with the support, and the top sealing seat is detachably connected with the container body, at this time, the hanging state of the double-layer reaction container body is formed, when the double-layer reaction container body swings, the top sealing seat needs to swing, so the connection structure of the top sealing seat and the support is as follows: Referring to Figures 1 to 4As shown, the tray 203 is connected to the bracket, the middle of the tray 203 is provided with a central opening, the top sealing seat is connected to the tray 203, at this time the top sealing seat can swing around the shaft joint, the top sealing seat includes a top cover 301 and a flat sealing seat 302, the flat sealing seat 302 is fixed in the center of the top cover 301, the flat sealing seat 302 is provided with a flat channel, and the center of the top cover 301 is provided with a central hole which is connected to the lower end of the flat channel, the central disc 303 is arranged in the flat channel, the shaft rod is fixed in the center of the central disc 303, the shaft rod penetrates the flat sealing seat 302 and is connected to the tray 203, the shaft rod is fixedly connected to the tray 203, that is, when the top sealing seat swings around the shaft rod, the shaft rod is fixed, at this time the central disc 303 in the flat channel is also in a static state, but the central disc 303 and the flat sealing seat 302 move relative to each other, the hole in the radial direction is arranged on the central disc 303, at this time the hole is in a vertical state and penetrates the central disc 303 completely, the central hole 101 connected to the explosion-proof stirring motor 102 passes through the hole in the central disc 303, when the central disc 303 is in the flat channel, the central disc 303 is in close contact with the inner wall of the flat channel, and the sealing gasket is also arranged in the hole in the central disc 303, so that the cavity in the double-layer reaction container body has a certain sealing property.

[0027] The flat sealing seat 302 includes a pull base 3021, a middle flat body 3022 and a top expansion body 3023, the flat channel extends from the top surface of the top expansion body 3023 to the bottom surface of the pull base 3021, that is, the flat channel also includes three parts, that is, the top channel 3041, the middle channel 3042 and the bottom channel 3043, which are arranged on the top expansion body 3023, the middle flat body 3022 and the pull base 3021 respectively, the middle channel 3042 extends in a straight line and penetrates the middle flat body 3022, the lower end of the top channel 3041 is connected to the middle channel 3042, and the cross-sectional area of the top channel 3041 gradually increases from the bottom end to the top end, that is, the cross-sectional area of the top end opening of the top channel 3041 is the largest, and the cross-sectional area gradually decreases along the downward extension of the top channel 3041, so that a certain displacement space is provided, that is, when the top sealing seat swings, the top expansion body 3023 moves along an arc trajectory, when the top end opening of the top channel 3041 is in contact with the central hole 101, the top sealing seat cannot continue to swing in this direction, and the length of the bottom end of the bottom channel 3043 is greater than the length of the top end, the top end of the bottom channel 3043 is connected to the lower end of the middle channel 3042, so that a complete flat channel is formed, and the flat channel has a double-cone symmetric structure, that is, the cross section of the flat channel is in the shape of a sandglass.

[0028] An extension disc is arranged at the edge of the top cover 301, and a through hole is arranged on the extension disc. A flange ring is arranged at the upper end of the container body, and a through hole is also arranged on the flange ring. In this way, the top cover 301 and the flange ring can be connected by bolts, thereby realizing the connection between the top cover and the container body. The container body includes a plurality of cylinder bodies 3051, which are sequentially connected end to end to form a cylinder wall body. A bottom tray 3052 is connected to the lower end of the cylinder wall body. Two adjacent cylinder bodies 3051 are connected by bolts, and a sealing ring is arranged between the two adjacent cylinder bodies 3051. The volume of the container body can be changed by adjusting the number of cylinder bodies 3051, and the inner wall can be easily cleaned by disassembling the cylinder bodies 3051.

[0029] A sight tube 401 is arranged on the container body, and both ends of the sight tube 401 communicate with the container body. The diluted photoresist liquid in the container body can enter the sight tube 401. The sight tube 401 is a transparent tube, and an operator can directly observe the dilution state of the photoresist through the sight tube 401. A plurality of flow guides 402 are connected between the sight tube 401 and the container body. The flow guides 402 are arranged in a vertical direction. Each flow guide 402 communicates with the sight tube 401 and the container body, and the connection position of the flow guide 402 and the container body is in a trumpet-shaped expansion state. A waste discharge port and a liquid discharge port are further arranged at the bottom of the container body. The liquid discharge port can be connected to a pipeline. After the photoresist is diluted, the valve on the liquid discharge port is opened, and the diluted photoresist is transported to a collection tool through the pipeline.

[0030] Referring to Figure 1 and Figure 5 A positioning assembly is arranged on the support. The positioning assembly can move vertically. When the positioning assembly cooperates with the container body, the container body is always in a vertical state, and the central shaft 101 coincides with the central axis of the container body at this time. At this time, the output shaft of the explosion-proof stirring motor 102 can be controlled to be in a high-speed rotating state. The container body is relatively stable during this process and does not shake randomly. The positioning assembly includes a positioning disc 501. A positioning port 502 is arranged at the center of the positioning disc 501. A sliding sleeve 503 is further arranged on the positioning disc 501. The sliding sleeve 503 is connected with the support, so that the positioning disc 501 can move vertically. When the positioning disc 501 moves upward, the container body can enter the positioning port 502. A locking screw is arranged on the sliding sleeve 503. By rotating the locking screw, the inner end of the locking screw abuts against the support, thereby realizing the position locking of the sliding sleeve 503. A plurality of stable auxiliary elements are arranged on the positioning disc 501, and the stable auxiliary elements are arranged at the side of the positioning opening 502. After the position of the positioning disc 501 is locked, the stable auxiliary elements are controlled to be in contact with the container body, so that the stable auxiliary elements further assist the container body to be in a stable state. The stable auxiliary element comprises a base 504 fixed on the positioning disc 501, the base 504 is provided with a horizontal threaded hole penetrating through the base 504, the threaded hole extends along the radial direction of the positioning disc 501, and an auxiliary jack 505 is screwed in the threaded hole. The auxiliary jack 505 can move axially after being screwed, and when the inner end of the auxiliary jack 505 abuts against the outer wall of the container body, the container body is clamped; Referring to Figures 1 to 8 The tray 203 is provided with a longitudinal through hole, a support element is slidingly connected to the bracket, and the support element is located above the positioning disc 501. When the positioning disc 501 moves upward, an upward pushing force is applied to the support element to move the support element upward. The upper end of the support element passes through the longitudinal through hole. The tray 203 is provided with two side clamping assemblies, and the top expansion body 3023 is located between the two side clamping assemblies. During the upward movement of the support element, the upper end of the support element is in contact with the corresponding side clamping assembly. At this time, the two side clamping assemblies clamp and position the central shaft 101, thereby increasing the stability of the central shaft 101 during rotation and avoiding shaking of the central shaft 101.

[0031] The support element comprises a support arm 601 vertically arranged and provided with a plurality of limiting sliding arms 602. The support arm 601 is parallel to the support column 202. The limiting sliding arm 602 can be a straight rod body or a straight plate body. A limiting sleeve 603 is fixed to the end of the limiting sliding arm 602. The limiting sleeve 603 is sleeved on the support column 202, so that the support arm 601 remains in a vertical state. The lower end of the support arm 601 can be in contact with the positioning disc 501, and the upper end of the support arm 601 can pass through the longitudinal through hole. The plurality of limiting sliding arms 602 not only enable the support arm 601 to remain in a vertical state, but also increase the bending resistance of the support arm 601.

[0032] The side clamping assembly comprises a clamping seat 701 slidingly connected to the tray 203. The clamping seat 701 is provided with at least one vertical side surface and one inclined side surface, and a chuck 702 is arranged on the vertical side surface. The chuck 702 is provided with a clamping plate 703 vertically arranged and having a semicircular cross section. When the two clamping seats 701 move to the direction of approaching each other and the central shaft 101 is located inside the clamping plate 703, the clamping plates 703 on the two clamping seats 701 cooperate to form a cylinder 3051. At this time, the central shaft 101 is clamped by the two clamping plates 703, and the flat sealing seat 302 is clamped by the clamping seat 701, thereby increasing the stability of the double-layer reaction container body. At this time, the top expansion body 3023 is located between the two clamping seats 701 and below the clamping plate 703, the bottom surface of the clamping seat 701 is provided with a sliding block with a convex section, and the tray 203 is provided with a sliding groove extending along the radial direction of the tray 203, the sliding block is installed in the sliding groove and can slide in the sliding groove, thereby connecting the clamping seat 701 with the tray 203 and enabling the clamping seat 701 to move along the radial direction of the tray 203, the sliding seat is provided with a reset component, which can be a spring and can be selected according to the installation position, for example, when the reset component is located between the sliding block and the central shaft rod 101, the reset component is a compression reset spring, and when the sliding block is located between the reset component and the central shaft rod 101, the reset component is a tensile reset spring, that is, the clamping seat 701 generates a reset force after moving towards the central shaft rod 101, so that the clamping seat 701 can automatically reset after losing the pushing force; In order to move the clamping seat 701 towards the central shaft rod 101, the tray 203 is fixed with a positioning support arm 704 located on the extension line of the sliding groove, the upper end of the positioning support arm 704 has an opening, the opening is provided with a push arm 705, the push arm 705 is connected with the positioning support arm 704, the inner end of the push arm 705 is located on the clamping seat 701, the inclined side surface of the clamping seat 701 is provided with a clamping groove 706 extending in the inclined direction, the inner end of the push arm 705 is located in the clamping groove 706, after the support column 202 moves upwards, the upper end of the support column 202 passes through the longitudinal perforation, and then the support column 202 continues to move upwards, the support column 202 applies an upward pushing force to the outer end of the push arm 705, at this time, the push arm 705 moves, the inner end of the push arm 705 moves downwards, at this time, the clamping seat 701 is pushed by the inner end of the push arm 705, so that the clamping seat 701 can move horizontally, and finally the two clamping seats 701 complete the auxiliary positioning of the central shaft rod 101.

[0033] A driving lifting assembly is arranged below the positioning disc 501, and the driving lifting assembly is connected with the support. The driving lifting assembly is used for controlling the positioning disc 501 to ascend and descend. Specifically, the driving lifting assembly comprises a base 801 fixed on the support and close to the lower end position. A telescopic driving component 802 is arranged at the center position of the base 801. The driving component 802 can be an existing product such as an electric push rod or a hydraulic cylinder. A supporting disc 803 is connected with the driving component 802 at the output end of the driving component 802. The supporting disc 803 is connected with the positioning disc 501 through a side supporting rod 804. The side supporting rod 804 is arranged around the positioning opening 502 on the positioning disc 501. A center position slot is arranged at the center position of the supporting disc 803. When the positioning disc 501 is controlled to move upwards to position the container body, the lower end of the container body is arranged in the center position slot of the supporting disc 803. At this time, the container body is limited by the stable auxiliary part on the positioning disc 501, and the lower end of the container body is limited by the center position slot, so that the container body has high stability.

[0034] When the photoresist is preliminarily stirred and dispersed by the high-speed rotating stirring wheel 103, in order to increase the dilution effect and efficiency, the output rotating speed of the explosion-proof stirring motor 102 is adjusted, the rotating speed of the stirring wheel 103 is appropriately reduced, then the supporting disc 803 is controlled to move downwards, the positioning disc 501 is driven to move downwards, until the positioning disc 501 is separated from the container body. At this time, the container body loses the limitation of the positioning disc 501 and the stable auxiliary part. After an acting force is applied to the container body, the container body can be moved, and then the container body is rotated to stir the preliminarily dispersed mixed liquid in cooperation with the stirring wheel 103. Referring to Figure 1 , Figure 9 and Figure 10 , a horizontal driving assembly is mounted on the support. The horizontal driving assembly is detachably connected with a guide transmission assembly. The guide transmission assembly is connected with the double-layer reaction container body. The double-layer reaction container body can be swung by the horizontal driving assembly. The connection position of the two is located on the top sealing seat. The guide transmission assembly comprises a horizontally movable push-pull arm 901. A guide piece 902 is fixed on the top sealing seat. A sliding head is fixed on one end of the push-pull arm 901. The guide piece 902 is a flat plate body. A guide opening 903 is arranged on the guide piece 902. The guide opening 903 is in a strip shape. The sliding head fixed on one end of the push-pull arm 901 is located in the guide opening 903. When the push-pull arm 901 moves horizontally along the axial direction, the sliding head can move in the guide opening 903. When the push-pull arm 901 moves horizontally and reciprocally, the double-layer reaction container body can be swung. The horizontal driving assembly has two implementation structures. In the first implementation structure, the horizontal driving assembly is an electric push rod. The rear end of the electric push rod is connected with the support, and the electric push rod has a telescopic structure. When the electric push rod is powered, the electric push rod can be controlled to extend or retract. The output end of the electric push rod is connected with the push-pull arm 901. The push-pull arm 901 can be controlled to move linearly along the axial direction through the electric push rod. In this case, the horizontal driving assembly can independently control the swinging speed and swinging amplitude of the double-layer reaction container body. In the second implementation structure, the horizontal driving assembly includes two flat hangers 1001, which are fixedly connected with the support. The two flat hangers 1001 are connected with rotatable hanger shafts 1002. The hanger shafts 1002 are fixedly connected with a transmission gear 1003 and a lower transmission wheel 1004. A driving pinion is fixedly connected with the middle shaft 101. The diameter of the driving pinion is smaller than that of the transmission gear 1003, and the two gears are located on the same horizontal plane. The two gears are connected through a gear set or a transmission chain. When the driving pinion rotates N (N>5) times, the transmission gear 1003 rotates one time, and the lower transmission wheel 1004 also rotates one time. A short shaft is fixedly connected with the lower surface of the lower transmission wheel 1004. The short shaft is eccentrically arranged, i.e., the short shaft is parallel to the hanger shaft 1002. The lower transmission wheel 1004 is hingedly connected with a connecting rod 1005 through the short shaft. The other end of the connecting rod 1005 is hingedly connected with the push-pull arm 901. It should be noted that the lower transmission wheel 1004 is located below the lower flat hanger 1001. When the explosion-proof stirring motor 102 works, the middle shaft 101 rotates. In this case, the transmission gear 1003 is driven to rotate through the driving pinion, so that the hanger shaft 1002 and the lower transmission wheel 1004 rotate, and the push-pull arm 901 moves linearly. A guide assembly is arranged on the support. The push-pull arm 901 is connected with the guide assembly. The guide assembly is used to keep the push-pull arm 901 horizontally moving. The guide assembly includes a flat pull plate 1101. The two ends of the flat pull plate 1101 are fixedly connected with the support columns 202 of the support. A guide pipe 1102 is fixedly connected with the flat pull plate 1101. The push-pull arm 901 passes through the guide pipe 1102. In this way, when the push-pull arm 901 is pushed or pulled by the connecting rod 1005, the push-pull arm 901 moves along the axial direction of the guide pipe 1102, and drives the top sealing seat to move.

[0035] In the present application, the inner wall of the top channel 3041 on the top expansion body 3023 is provided with an arc-shaped groove. A limiting short rod is arranged on the center disc 303. The end of the limiting short rod is located in the arc-shaped groove. When the double-layer reaction container body swings, the limiting short rod moves in the arc-shaped groove. When the limiting short rod moves to contact the end of the arc-shaped groove, the double-layer reaction container body cannot continue to move in this direction, so that the top expansion body 3023 does not contact the middle shaft 101, and the middle shaft 101 is not damaged.

[0036] In addition, the top cover 301 in the present application is provided with an exhaust pipe head, which can be connected with a vacuum generator through a flexible pipe, so that the gas generated by the mixed photoresist in the double-layer reaction container body can be discharged.

[0037] The stirring wheel 103, the central shaft 101 and the double-layer reaction container body in the present application can be made of alumina ceramic.

[0038] The device embodiments described above are only illustrative, wherein the units described as separate components can or can not be physically separated, and the components displayed as units can or can not be physical units, i.e., can be located in one place, or can be distributed to multiple network units. Part or all of the modules can be selected to achieve the purpose of the present embodiment scheme according to actual needs. Those skilled in the art can understand and implement without creative labor.

[0039] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A photoresist dilution mixer, characterized in that: include: A double-layer reaction container body has a cavity inside, so that the photoresist mixture is located in the cavity; A central axis rod (101) is connected to the double-layer reaction container body and is rotatable; A stirring wheel (103) is provided on the central shaft (101) and is located in the cavity, and is capable of rotating synchronously with the central shaft (101); An explosion-proof stirring motor (102), the output shaft of which is connected to the central shaft (101), is used to control the rotation of the central shaft (101) and to initially disperse the mixed liquid through the stirring wheel (103); A guide transmission assembly connected to the double-layer reaction vessel body; The horizontal driving assembly is detachably connected to the guide transmission assembly and is used to swing the double-layer reaction container body to stir the mixture that has been preliminarily dispersed.

2. The photoresist dilution mixer according to claim 1, characterized in that: Also includes: The bracket is connected to the double-layer reaction container body to place the double-layer reaction container body in a hanging state; The tray (203) is connected to the bracket and is axially connected to the double-layer reaction container body, and the double-layer reaction container body can swing around the axial joint.

3. The photoresist dilution mixer according to claim 2, characterized in that: Also includes: The positioning assembly is connected to the bracket and can move vertically, and is used to keep the container body in a vertical state.

4. The photoresist dilution mixer according to claim 3, characterized in that: The positioning component includes: A positioning plate (501) is connected to the bracket and is capable of vertical movement, and a positioning opening is provided at the center of the positioning plate (501); A base (504) is provided on the positioning plate (501) and is located to the side of the positioning opening; The auxiliary ejector rod (505) can move axially after being rotated.

5. The photoresist dilution mixer according to claim 3, characterized in that: Also includes: A side clamp assembly, disposed on the tray (203), for assisting in positioning the central axis rod (101); A support member, connected to the bracket and capable of vertical movement; After the positioning assembly moves upward, the support member is matched with the side clamp assembly.

6. The photoresist dilution mixer according to claim 5, characterized in that: The side clamp assembly comprises: A clamping seat (701) is slidably connected to the tray (203), and the clamping seat (701) is provided with a vertical side surface and an inclined side surface; A clamping plate (703) connected to the inner side of the vertical side of the clamping seat (701); The positioning support arm (704) is fixed on the tray (203) and is connected to the flip arm (705) at its upper end. The inner end of the flip arm (705) contacts the inclined side surface of the clamping seat (701), and the outer end of the flip arm (705) cooperates with the support member to enable the flip arm (705) to flip and move.

7. The photoresist dilution mixer according to claim 5 or 6, characterized in that: The support member comprises: Support arm (601), the support arm (601) is arranged vertically; There are a plurality of limiting sliding arms (602) all connected to the supporting arm (601); The limiting sleeve (603) is fixed to the end of the limiting sliding arm (602), and the limiting sleeve (603) is connected to the bracket and can slide vertically on the bracket.

8. The photoresist dilution mixer according to any one of claims 1 to 6, characterized in that: The double-layer reaction vessel body comprises: The container body is provided with a top opening; The top sealing seat is connected to the top opening of the container body, and the two are detachably connected.

9. The photoresist dilution mixer according to claim 8, characterized in that: The container body comprises a plurality of cylinders (3051), which are connected end to end in sequence to form a cylinder wall, and the lower end of the cylinder wall is connected to a bottom tray (3052).

10. The photoresist dilution mixer according to claim 8, characterized in that: The top sealing seat includes: A top cover (301) is used for docking with the container body, and a center opening is provided at the center of the top rod; A flat sealing seat (302) connected to the center of the top cover (301); The flat channel is provided on the flat sealing seat (302) and docked with the central opening, so that the central axis rod (101) can pass through the flat channel.

11. The photoresist dilution mixer according to claim 10, characterized in that: The flat channel comprises a top channel (3041), a middle channel (3042) and a bottom channel (3043) which are arranged in sequence. A central disk (303) is arranged in the middle channel (3042), and the central disk (303) is in close contact with the inner wall of the middle channel (3042).

12. The photoresist dilution mixer according to claim 11, characterized in that: The central disk (303) is provided with: A shaft rod, which passes through the flat sealing seat (302) and is connected to the tray (203); The hole extends in the radial direction of the center disk (303), so that the central axis rod (101) can pass through the hole.

13. The photoresist dilution mixer according to claim 8, characterized in that: The container body is provided with a sight tube (401), which is a transparent tube. Both ends of the sight tube (401) are connected to the container body, so that the diluted glue in the container body can enter the sight tube (401).

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