Flow stabilizing air bag pump and semiconductor wet process liquid feeding system

Abstract

The invention discloses a steady flow air bag pump and a semiconductor wet process liquid feeding system, and belongs to the technical field of semiconductor manufacturing devices. The air bag pump comprises a pump head; the air cylinder comprises a pump shell and a sealing plate which are arranged on the two sides of the pump head, one end of the pump shell is connected with the pump head, and the other end of the pump shell is in threaded connection with the sealing plate; a gas phase working chamber is formed among the pump shell, the sealing plate and the pump head; the air bag is arranged in the gas-phase working chamber, and the interior of the air bag is hollow to form a liquid-phase working chamber; at least three open holes are formed in the pump head, a second connecting rod is fixed in each open hole, a first flange is arranged on the periphery of the first end of the air bag, a second through hole is formed in the first flange, and the second connecting rods penetrate through the second through holes so as to be fixedly connected with the air bag and the pump head. According to the scheme, due to the design of the structure of the air bag pump and the liquid feeding system, liquid flow conveying in the semiconductor wet process is more stable and controllable, and the production quality and the production efficiency can be improved.

Description

TECHNICAL FIELD

[0001] The application relates to a stable-flow air bag pump and a semiconductor wet process liquid delivery system, and belongs to the technical field of semiconductor manufacturing devices. BACKGROUND

[0002] With the development of large-size silicon wafer and high-density integration of integrated circuits, the tolerance of product yield to defects will be lower and lower. How to reduce wafer defects on the production line and improve product yield is one of the great challenges faced by wafer manufacturing.

[0003] The semiconductor wet process uses chemicals (acid, alkali, solvent, etc.) and liquid such as ultrapure water as process medium to process the wafer surface. The typical representatives are wet etching and wet cleaning. As a basic process of semiconductor manufacturing, wet etching selectively removes the materials on the wafer surface that are not needed by using chemicals, so as to realize correct replication of the mask pattern. Wet cleaning is used throughout the entire semiconductor process to strip the particles and organic matter on the wafer surface by using ultrapure water and ultrapure acid, alkali and solvent chemicals. The above processes all need a pump as the power for delivering the liquid medium. The air bag pump, as a kind of pump without shaft seal, has large flow and low risk of liquid leakage, and is gradually applied to semiconductor production.

[0004] The two pump chambers of the air bag pump pump liquid flow alternately, generating flow pulsation. Such pulsation has adverse effects on semiconductor manufacturing. For example, in the chemical supply system (CDS), the particles clogging in the filter are squeezed out into the downstream contaminated chemical liquid due to the pulsation, or the particles leak out from the joint due to the shaking of the pipeline. In the process of wafer cleaning, the pulsation causes the liquid level of the cleaning tank to fluctuate, the front section of the nozzle to vibrate, and the cleaning efficiency to decrease. In the chemical mechanical polishing (CMP) process, the pulsation can also cause uneven polishing of the wafer, and the particle agglomeration caused by the pulsation can even scratch the wafer surface, reducing the yield. Therefore, it is an urgent problem to be solved in semiconductor production to ensure stable operation of the pump, easy control of liquid flow delivery, and to reduce the introduction of new impurities as much as possible. SUMMARY

[0005] To solve the above problems, the application provides a stable-flow air bag pump and a semiconductor wet process liquid delivery system. Through control of the structure of the air bag pump and various devices in the liquid delivery system, the liquid flow delivery can be more stable and controllable, the risk of introducing impurities can be reduced, and the quality of wafer production can be improved and the maintenance cost can be saved.

[0006] According to one aspect of the application, a stable-flow air bag pump is provided, comprising: a pump head, the pump head comprising an inlet channel and an outlet channel; A cylinder comprises a pump shell and a sealing plate arranged on both sides of the pump head, the pump shell is cylindrical, one end of the pump shell is connected with the pump head, and the other end is threadedly connected with the sealing plate, the sealing plate is provided with a first through hole, and the first through holes on the sealing plates on both sides of the pump head correspond to each other and are used for fixing the cylinder through a first connecting rod. The pump shell, the sealing plate and the pump head form a gas-phase working chamber. A wind bag is arranged in the gas-phase working chamber, a first end of the wind bag is connected with the pump head, a second end of the wind bag is closed, and the inside is hollow to form a liquid-phase working chamber. The pump head is provided with at least three openings, each of the openings is fixed with a second connecting rod, a first flange is arranged on the periphery of the first end of the wind bag, the first flange is provided with a second through hole corresponding to the openings, and the second connecting rod passes through the second through hole to fixedly connect the wind bag and the pump head.

[0007] Specifically, the number of the first connecting rods is not less than 4.

[0008] Specifically, the end of the pump shell connected with the pump head is provided with a third recess, and a sealing gasket is arranged in the recess; an annular protrusion matching the third recess is arranged on the pump shell; when the wind bag pump is installed, the gasket between the pump shell and the pump head is compressed to realize the sealing between the cylinder and the pump head.

[0009] Optionally, a first recess is arranged on the side of the sealing plate close to the pump shell, a thread is arranged on the inner wall of the first recess, and a thread matching the inner wall of the first recess is arranged on the end of the pump shell close to the sealing plate; a gasket is arranged in the first recess to seal the connection between the pump shell and the sealing plate.

[0010] Optionally, a second flange is arranged on the second end of the wind bag, a third through hole is arranged on the second flange, the second connecting rod also passes through the third through hole, and the third through hole can slide along the second connecting rod.

[0011] Specifically, the material of the second connecting rod is one of a smooth-surface high polymer material, a ceramic material, a carbon fiber composite material and a metal material.

[0012] Optionally, a spring is arranged on the second end of the wind bag, the spring is fixedly connected with the wind bag and extends towards the sealing plate, and the other end of the spring is a free end or is connected with the sealing plate.

[0013] Specifically, when the other end of the spring is connected with the sealing plate, a clamping groove matching the spring is arranged on the sealing plate, and the second end of the spring is clamped with the clamping groove.

[0014] Optionally, a sleeve is arranged inside the sealing plate, the sleeve is matched with the spring, and the length of the sleeve is not more than the compression length of the spring. The sealing plate is provided with a second groove on the inner periphery of the sleeve.

[0015] Optionally, the wall thickness of the air bag gradually increases from the first end to the second end, and the ratio of the maximum thickness to the minimum thickness of the air bag is 1.4-1.8.

[0016] In particular, the minimum wall thickness of the air bag is 1.5 mm, and the maximum wall thickness is 2-2.7 mm.

[0017] According to another aspect of the present application, a semiconductor wet process liquid delivery system is disclosed, comprising the above-mentioned steady flow air bag pump, further comprising: an air compressor, pneumatically connected with the air bag pump, for providing power for the air bag pump; A bubble filtering device is connected with the air bag pump through a pipeline. A flow meter is fixed on the pipeline upstream of the bubble filtering device. A controller is signal connected with the flow meter and the air compressor.

[0018] In particular, the bubble filtering device is arranged above the pipeline in the vertical direction.

[0019] Optionally, a filtering stop valve is arranged between the bubble filtering device and the pipeline, and the filtering stop valve is signal connected with the controller.

[0020] Optionally, the filtering stop valve is a normally closed valve, which is opened after receiving the electrical signal of the controller.

[0021] Optionally, the system further comprises a liquid storage device, which is connected with the air bag pump through a pipeline, and a delivery stop valve is arranged between the liquid storage device and the air bag pump, and the delivery stop valve is normally open.

[0022] In particular, the flow meter comprises: At least one pair of ultrasonic transducers, the ultrasonic transducers comprising an outer clamping part, the outer clamping part being rotationally connected with the ultrasonic transducers; A transducer control device, the transducer control device comprising a timing assembly and a signal transmission assembly; A control terminal, the control terminal being signal connected with the transducer control device; A screen display device, the screen display device being signal connected or electrically connected with the processor.

[0023] In particular, the control terminal comprises: A memory for storing the data obtained by the flow metering system of the ultrasonic sensor and the processing program; A processor, configured to execute a flow meter data processing program; The communication unit is used to receive acquired data or transmit processed data and establish a communication channel.

[0024] Specifically, the method for processing data by the data processing program of the flow meter is: Collect the time when several groups of ultrasonic transducers emit and receive ultrasonic waves and the wave velocity of the ultrasonic waves; Calculate the time difference according to the time, determine the standard threshold, and filter the valid data and the offset data according to the standard threshold; Calculate the wave velocity reduction ratio based on the wave velocity and calculate the bubble content based on the wave velocity reduction ratio, then compensate the offset data based on the bubble content, update the compensated time difference and valid data into new valid data, and establish a valid data group; Calculate the fluid flow rate according to the valid data group and establish a flow rate data group; The flow velocity data set is corrected for fluid state and angle, and the average is taken to obtain the flow velocity data.

[0025] Specifically, each time data collection is performed, at least 5 valid data sets are obtained.

[0026] Specifically, it also includes establishing a flow meter digital twin model based on the flow velocity data, ultrasonic wave velocity and time difference obtained in each measurement, which is used to construct a functional relationship between the flow velocity data and the ultrasonic wave velocity, thereby playing a role in prediction and reliability judgment of subsequent flow meter data processing.

[0027] Specifically, the fluid state is corrected as follows: First, determine the fluid state: the Reynolds coefficient of the fluid is Re= ; Where ρ is the density of the fluid, μ is the dynamic viscosity of the fluid, D is the pipe diameter, and v n is the fluid velocity obtained from any set of data; when Re>2000, it is turbulent flow, and when Re<2000, it is laminar flow.

[0028] Then make flow rate correction according to the fluid state: Under laminar flow, v n 1 =4 / 3v n ; In turbulent state, v n 1 =( )v n ; v n 1 The fluid flow rate corrected for the fluid state of any set of data.

[0029] Specifically, the included angle correction is: For the included angle θ between the connecting line of the ultrasonic transducers and the pipeline, v n 2 = v n 1 cos θ, the v n 2 is the fluid flow rate after the included angle correction.

[0030] Specifically, the determination of the standard threshold value comprises: Finding the minimum value from the time difference values calculated from several groups, and taking the minimum value as Δt, i.e. the time difference value when the bubble content is 0; When any time difference value Δt n = Δt, it is valid data; When any time difference value Δt n ≠ Δt, if Δt ≦ Δt n ≦ 1.2 Δt, it is offset data; If Δt n ≧ 1.2 Δt, it is invalid data, n = 1, 2, 3, ….

[0031] Specifically, at least five groups of time difference values are taken as the array for finding the minimum value, and the new time difference value is compared with Δt in real time, and the minimum value of the comparison is iterated as the new Δt.

[0032] Specifically, the calculation of the wave speed reduction ratio according to the wave speed is that the difference between the emitted wave speed and the received wave speed and the emitted wave speed is the wave speed reduction ratio; The calculation of the bubble content according to the wave speed reduction ratio specifically comprises: according to the flowmeter calibration data fitting formula, the bubble content is calculated according to the wave speed reduction ratio: X = aq 2 + bq + c, 0 ≦ X ≦ 0.2 Wherein, q is the wave speed reduction ratio, and X is the bubble content.

[0033] Specifically, due to the discreteness of data and the statistical properties of parameter estimation, the values of parameters a, b and c are all ranges, and when calculating the bubble content, the maximum likelihood estimation method is used to solve the parameters of each data point and calculate the bubble content.

[0034] Optionally, the compensation of the offset data according to the bubble content specifically comprises: ; Wherein ∑dt nis the compensated time difference of the arbitrary offset data; c0is the sound speed of the ultrasonic wave in the bubble; c is the sound speed of the ultrasonic wave in the measured fluid; L is the horizontal distance between the ultrasonic transducers; X n is the bubble content corresponding to the arbitrary time difference; r is the radius of the pipeline in which the measured flow is located; the offset data Δt after compensation n ’=Δt n +∑dt n ; Δt n ’ is taken as the new Δt n .

[0035] Specifically, the calculation formula of the fluid flow rate is: , v n is the fluid flow rate obtained by the arbitrary group data; L0is the straight-line distance between the ultrasonic transducers; Specifically, the fluid flow Q = πr 2 *v, v is the corrected flow rate of one measurement.

[0036] The beneficial effects that can be produced by the present application include but are not limited to: 1. The steady flow air bag pump and semiconductor wet process liquid delivery system provided by the present application can run more stably by setting the structure of the air bag pump, limiting the movement mode of the air bag, and connecting the structures between the components of the air bag pump, thereby improving the overall stability of the liquid flow delivery.

[0037] 2. The steady flow air bag pump and semiconductor wet process liquid delivery system provided by the present application can monitor and adjust the liquid delivery system as a whole by taking the air bag pump, air compressor, flow meter, and controller as a whole, and take the air bag pump as the main liquid flow delivery control object, thereby improving the control efficiency of liquid delivery and avoiding the fatigue hazards caused by frequent opening and closing of the valve. BRIEF DESCRIPTION OF DRAWINGS

[0038] The drawings described herein are used to provide further understanding of the present application, and form a part of the present application. The schematic embodiments of the present application and the descriptions thereof are used to explain the present application, and do not constitute an improper limitation on the present application. In the drawings: Figure 1 is a cross-sectional view of the air bag pump related to embodiment 1 of the present application; Figure 2 is a partial view of the pump head of the air bag pump related to embodiment 1 of the present application; Figure 3 is a front view of the air bag of the air bag pump related to embodiment 1 of the present application; Figure 4 is a schematic view of the air bag pump related to embodiment 1 of the present application; Figure 5 A schematic flow chart of the method according to the embodiment 2 of the present application; Figure 6 Another schematic flow chart of the method according to the embodiment 2 of the present application; Figure 7 A schematic block diagram of the system according to the embodiment 2 of the present application; Figure 8 A schematic structural diagram of a terminal according to the embodiment 2 of the present application.

[0039] Components and reference numerals: 1, pump head; 2, cylinder; 3, pump shell; 4, sealing plate; 5, first through hole; 6, first connecting rod; 7, gas phase working chamber; 8, liquid phase working chamber; 9, first groove; 10, opening; 11, second connecting rod; 12, first flange; 13, second through hole; 14, second flange; 15, third through hole; 16, spring; 17, second groove; 18, sleeve. DETAILED DESCRIPTION

[0040] In order to make the technical personnel in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor should belong to the scope of protection of the present application.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0042] The data processing method of the flow meter provided by the embodiments of the present application is executed by a computer device, and accordingly, the flow meter and its data processing system run in the computer device.

[0043] Embodiment 1 As Figures 1-4 A steady flow wind bag pump is provided, comprising: The pump head 1 comprises a liquid inlet channel and a liquid outlet channel; The cylinder 2 comprises a pump shell 3 and a sealing plate 4 arranged on both sides of the pump head 1, the pump shell 3 is cylindrical, one end of the pump shell 3 is connected with the pump head 1, the other end is threadedly connected with the sealing plate 4, the sealing plate 4 is provided with a first through hole 5, the first through holes 5 on the sealing plates 4 on both sides of the pump head 1 correspond to each other, and the first connecting rods 6 are used to fix the cylinder 2; The pump shell 3, the sealing plate 4 and the pump head 1 form a gas phase working chamber 7; The air bag is arranged in the gas phase working chamber 7, the first end of the air bag is connected with the pump head 1, the second end is closed, and the inside is hollow to form a liquid phase working chamber 8; The pump head 1 is provided with at least three openings 10, and a second connecting rod 11 is fixed in each opening 10; the first end of the air bag is provided with a first flange 12, the first flange 12 is provided with a second through hole 13 corresponding to the opening 10, and the second connecting rod 11 passes through the second through hole 13 to fixedly connect the air bag and the pump head 1.

[0044] By arranging the cylinder 2 to be composed of the pump shell 3 and the sealing plate 4, and arranging the first connecting rod 6 between the two sealing plates 4, the cylinder 2 is fixed by compression to realize the sealing between the cylinder 2 and the pump head 1; at the same time, through the arrangement, the air bag can be maintained without disassembling the pump shell 3 when the air bag pump is maintained, which can save disassembly time and improve production efficiency.

[0045] As an embodiment, the sealing plate 4 is provided with a first recess 9 on the side close to the pump shell 3, the inner wall of the first recess 9 is provided with a thread, and the end of the pump shell 3 close to the sealing plate 4 is provided with a thread matched with the inner wall of the first recess 9; a gasket is arranged in the first recess 9 to seal the connection between the pump shell 3 and the sealing plate 4.

[0046] The cooperation of the thread connection and the gasket not only improves the sealing performance of the cylinder 2, but also increases the friction between the pump shell 3 and the sealing plate 4, reduces the shaking of the cylinder 2 caused by the stretching and contraction of the air bag, and improves the stability of the air bag pump.

[0047] As an embodiment, the second end of the air bag is provided with a second flange 14, the second flange 14 is provided with a third through hole 15, and the second connecting rod 11 also passes through the third through hole 15, and the third through hole 15 can slide along the second connecting rod 11.

[0048] The second connecting rod 11 fixedly connects the air bag and the pump head 1 through the second through hole 13 and passes through the third through hole 15, and the stretching and contraction track of the air bag pump is limited between the plurality of second connecting rods 11, so that the air bag pump does not swing in the up-down or front-back direction, thereby avoiding the pulse and disturbance to the liquid flow caused by the stretching and contraction of the air bag, and improving the stability of the liquid flow.

[0049] As an embodiment, the second end of the air bag is provided with a spring 16, the spring 16 is fixedly connected with the air bag and extends towards the sealing plate 4; the other end of the spring 16 is a free end or connected with the sealing plate 4.

[0050] The design of the wind bag end portion spring 16 can provide appropriate reaction force according to the deformation degree of the wind bag, ensure that the wind bag quickly restores to the original state when the air pressure in the gas phase working chamber 7 changes, and improve the working efficiency and response speed of the pump. On the other hand, the wind bag end portion spring 16 can also provide a certain reaction force to the wind bag to avoid overstretching of the wind bag, thereby preventing the reduction of service life due to overstretching. In addition, the spring 16 can effectively reduce the vibration and noise of the wind bag, and improve the stability of the overall operation of the wind bag pump.

[0051] As an embodiment, a sleeve 18 is arranged inside the sealing plate 4, the sleeve 18 cooperates with the spring 16, and the length of the sleeve 18 does not exceed the compression length of the spring 16. The sealing plate 4 is provided with a second groove 17 on the inner periphery of the sleeve 18.

[0052] The design of the sleeve 18 can limit the extension and contraction path of the spring 16, so that the spring 16 can keep extending and contracting in a straight line direction, avoiding the arc rebound of the spring 16 due to bias, which affects the stability of the wind bag extension and contraction.

[0053] As an embodiment, the wall thickness of the wind bag gradually increases from the first end to the second end, and the ratio of the maximum thickness to the minimum thickness of the wind bag is 1.4-1.8.

[0054] Specifically, the minimum wall thickness of the wind bag is 1.5 mm, and the maximum wall thickness is 2-2.7 mm.

[0055] The minimum wall thickness is arranged at the first end of the wind bag, where the stress on the wind bag is the smallest, and the smaller wall thickness will not affect the durability of the wind bag. The difference in the wall thickness of the wind bag provides a difference in the sensitivity of the wind bag extension and contraction, which can realize more accurate adjustment of the wind bag extension and contraction.

[0056] Embodiment 2 The semiconductor wet process liquid delivery system comprises the above-mentioned steady flow wind bag pump, and further comprises: An air compressor is pneumatically connected with the wind bag pump and used for providing power for the wind bag pump; A bubble filtering device is connected with the wind bag pump through a pipeline; A flow meter is fixed on the pipeline upstream of the bubble filtering device; A controller is signal connected with the flow meter and the air compressor.

[0057] Through the above-mentioned liquid delivery system, the pumping amount of the wind bag pump can be adjusted by the controller according to the detection of the flow meter, without the opening and closing of many valves, thereby avoiding the problem of inaccurate flow control caused by valve fatigue.

[0058] As an embodiment, a filter stop valve is arranged between the bubble filtering device and the pipeline, and the filter stop valve is signal connected with the controller.

[0059] As an implementation, the filter stop valve is a normally closed valve, which is opened after receiving the control signal.

[0060] The bubble filter device can determine the working state according to the opening and closing of the filter stop valve.

[0061] As an implementation, the system further comprises a liquid storage device, which is connected to the air bag pump through a pipeline, and a delivery stop valve is arranged between the liquid storage device and the air bag pump, and the delivery stop valve is set to be normally open.

[0062] The normally open state of the delivery stop valve ensures the normal delivery of the fluid, and when an emergency occurs downstream, the delivery stop valve is closed to ensure the safety of production.

[0063] As a specific implementation, the flow meter comprises: At least one pair of ultrasonic transducers, the ultrasonic transducers comprising an outer clamping part, the outer clamping part being rotatably connected to the ultrasonic transducers; A transducer control device, the transducer control device comprising a timing assembly and a signal transmission assembly; A control terminal, the control terminal being signal connected to the transducer control device; A screen display device, the screen display device being signal connected or electrically connected to the processor.

[0064] Figures 5-8 is a schematic flowchart of the present embodiment. Among them, Figure 5 The execution subject can be a flow metering system of an ultrasonic sensor. According to different needs, the order of steps in the flowchart can be changed, and some can be omitted.

[0065] As Figure 5 shown, the specific method of the flow meter data processing program executed by the processor is: Step 510, collecting a plurality of groups of ultrasonic transducers emitting and receiving ultrasonic waves and the time and wave speed of the ultrasonic waves; Step 520, calculating the time difference value according to the time, determining the standard threshold value, and screening the effective data and the offset data according to the standard threshold value; Step 530, calculating the wave speed reduction ratio according to the wave speed and calculating the bubble content according to the wave speed reduction ratio, and then compensating the offset data according to the bubble content, updating the compensated time difference value and the effective data as new effective data, and establishing an effective data group; Step 540, calculating the fluid flow rate according to the effective data group, and establishing a flow rate data group; Step 550, performing fluid state correction and angle correction on the flow rate data group, and taking the average to obtain flow rate data.

[0066] For the convenience of understanding the present application, the data processing method of the flow meter provided by the present application is further described below in combination with the data processing method process of the flow meter in the embodiments based on the principle of the data processing method of the flow meter of the present application.

[0067] Specifically, please refer to Figure 5 , Figure 6 The data processing method of the flow meter specifically comprises: S1, collecting the time for emitting and receiving ultrasonic waves and the wave speed of the ultrasonic waves by a plurality of groups of ultrasonic transducers.

[0068] The excitation of the ultrasonic transducers is controlled based on the preset time, and the time is recorded; the specific time for emitting and receiving ultrasonic waves and the wave speed of the ultrasonic transducers for emitting and receiving ultrasonic waves are obtained based on the recorded time and the excitation of the ultrasonic transducers.

[0069] The ultrasonic transducers are arranged in pairs, one of which is arranged upstream of the pipeline as an upstream ultrasonic transducer, and the other of which is arranged downstream of the pipeline as a downstream ultrasonic transducer. The upstream ultrasonic transducer is used to emit an ultrasonic wave signal to the downstream ultrasonic transducer, and the downstream ultrasonic transducer receives the ultrasonic wave signal. The downstream ultrasonic transducer emits an ultrasonic wave signal to the upstream ultrasonic transducer, and the upstream ultrasonic transducer receives the ultrasonic wave signal.

[0070] The upstream ultrasonic transducer emits an ultrasonic wave signal to the downstream ultrasonic transducer, and the built-in clock records time 1. After the downstream ultrasonic transducer receives the ultrasonic wave signal, the built-in clock records time 2. The difference between time 1 and time 2 is the difference in time in the flow direction. The difference in time in the reverse flow direction is based on the same principle as above, and will not be described again here.

[0071] S2, calculating the time difference according to the time, determining the standard threshold value, and screening the effective data and the offset data according to the standard threshold value.

[0072] The time difference is calculated; the upper limit value and the lower limit value of the threshold value are set based on the function; and the offset data falling within the upper and lower limit interval of the threshold value is screened from the time difference.

[0073] The minimum value is found according to the time difference values calculated by the plurality of groups, and the minimum value is taken as Δt, i.e. the time difference value when the gas bubble content is 0; When any time difference value Δt n = Δt, it is effective data; When any time difference value Δt n ≠ Δt, if Δt≦Δt n ≦1.2Δt, it is offset data; If Δt n ≧1.2Δt, it is invalid data, n = 1, 2, 3, ….

[0074] S3, calculating the bubble content according to the wave velocity reduction ratio, and compensating the migration data according to the bubble content, updating the compensated time difference value and the effective data as new effective data, and establishing an effective data group.

[0075] The function relationship between the wave velocity reduction ratio and the bubble content is calibrated by experiments, the bubble content is calculated according to the wave velocity reduction ratio and the function relationship between the wave velocity reduction ratio and the bubble content, the migration data is compensated according to the bubble content, and the compensated data is updated as effective data to establish an effective data group.

[0076] The bubble content is calculated according to the wave velocity reduction ratio, which is calculated according to the wave velocity measured by the flowmeter, and the bubble content is calculated according to the function relationship between the wave velocity reduction ratio and the bubble content. X=aq 2 +bq+c, 0≦X≦0.2, Wherein, q is the wave velocity reduction ratio, and X is the bubble content.

[0077] The migration data is compensated according to the bubble content, which is calculated according to the wave velocity reduction ratio. ; Wherein, ∑dt n is the compensated time difference value of any migration data; c0 is the sound velocity of ultrasonic wave in the bubble; c is the sound velocity of ultrasonic wave in the measured fluid; L is the horizontal distance between the ultrasonic transducers; X n is the bubble content corresponding to any time difference value; r is the radius of the pipeline where the measured flow is located; The compensated migration data Δt n ’=Δt n +∑dt n ; Δt n ’ is taken as new Δt n ; The calculation formula of the fluid flow rate is: , v n is the fluid flow rate obtained by any group of data; L0 is the straight line distance between the ultrasonic transducers; Specifically, the fluid flow Q=πr 2 *v, v is the corrected flow rate of one measurement.

[0078] S4, calculating the fluid flow rate according to the effective data group, and establishing a flow rate data group.

[0079] The flow rate of any group is calculated according to the time difference method principle based on the effective data group effective data; the flow rate data group is established according to several groups of flow rate data.

[0080] S5. Perform fluid state correction and angle correction on the flow velocity data set, and take the average to obtain flow velocity data.

[0081] The fluid state is judged and corrected according to the Reynolds coefficient; the flow velocity after the correction of the fluid state is corrected according to the angle θ between the connecting line between the ultrasonic sensor and the pipeline; the corrected flow velocity is averaged, and the output average value is the measured flow velocity.

[0082] First, determine the fluid state: the Reynolds coefficient of the fluid is Re= ; Where ρ is the density of the fluid, μ is the dynamic viscosity of the fluid, D is the pipe diameter, and v n is the fluid velocity obtained from any set of data; when Re>2000, it is turbulent flow, and when Re<2000, it is laminar flow.

[0083] Then make flow rate correction according to the fluid state: Under laminar flow, v n 1 =4 / 3v n ; In turbulent state, v n 1 =( )v n ; v n 1 The fluid flow rate corrected for the fluid state of any set of data; Correction based on the angle between the line between the ultrasonic transducers and the pipe: For the angle θ between the line connecting the ultrasonic transducers and the pipe, v n 2 =v n 1 cosθ, the v n 2 is the fluid flow rate after angle correction.

[0084] In some embodiments, the data processing system 700 of the flow meter may include a plurality of functional modules composed of computer program segments. The computer programs of the various program segments in the data processing system 700 of the flow meter may be stored in a memory of a computer device and executed by at least one processor to perform (see Figure 5 Description) The function of flow meter data processing.

[0085] In this embodiment, the flow meter data processing system 700 can be divided into multiple functional modules according to the functions it performs, such as Figure 7The function modules can include a data collection module 710, a data judgment module 720, a data updating module 730, a flow rate calculation module 740, and a flow rate correction module 750. The module referred to in the present application refers to a series of computer program segments capable of being executed by at least one processor and capable of completing a fixed function, which are stored in a memory. In the present embodiment, the functions of the modules will be described in detail in subsequent embodiments.

[0086] As an implementation, the data updating module comprises: a time difference value fitting unit configured to fit the time difference value and the time, and determine the change of the fitting relationship; a threshold setting unit configured to set a standard threshold according to the extreme value found; a data compensation unit configured to compensate the data that does not meet the standard threshold; a data updating unit configured to update the data after compensation to the data that meets the standard threshold.

[0087] Figure 8 A structural schematic diagram of a terminal 800 is provided for the embodiments of the present application, and the terminal 800 can be used to execute the data processing method of the flow meter provided by the embodiments of the present application.

[0088] The terminal 800 can include a processor 810, a memory 820, and a communication unit 830. These components communicate through one or more buses, and those skilled in the art can understand that the structure of the server shown in the figure does not constitute a limitation on the present application, which can be a bus structure or a star structure, and can include more or fewer components than shown in the figure, or combine some components, or different component arrangements.

[0089] The memory 820 can be used to store the execution instructions of the processor 810, and the memory 820 can be realized by any type of volatile or non-volatile storage terminal or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, magnetic disk or optical disk. When the execution instructions in the memory 820 are executed by the processor 810, the terminal 800 can execute part or all of the steps in the following method embodiments.

[0090] The processor 810 is a control center of the storage terminal, connects various parts of the entire electronic terminal by using various interfaces and lines, and executes various functions of the electronic terminal and / or processes data by running or executing software programs and / or modules stored in the memory 820 and calling data stored in the memory. The processor can be composed of an integrated circuit (IC), for example, can be composed of a single packaged IC, or can be composed of a plurality of packaged ICs connected to each other. For example, the processor 810 can only include a central processing unit (CPU). In the embodiments of the present application, the CPU can be a single operation core or can include a plurality of operation cores.

[0091] The communication unit 830 is configured to establish a communication channel, so that the storage terminal can communicate with other terminals. The communication unit 830 receives user data sent by other terminals or sends user data to other terminals.

[0092] The present application also provides a computer storage medium, wherein the computer storage medium can store a program, and the program can include some or all steps in the embodiments provided by the present application when executed. The storage medium can be a magnetic disk, an optical disk, a read-only memory (ROM) or a random access memory (RAM), etc.

[0093] Therefore, the present application provides a method with lower cost and more convenient implementation when processing the flow measurement of the ultrasonic sensor under the premise of only using the existing equipment without adding new devices, so that the flow measurement of the low-cost ultrasonic sensor is possible, and the manpower and material resources cost is saved. The technical effects achieved by the embodiments can be referred to the description in the foregoing, which will not be described here.

[0094] Those skilled in the art can clearly understand that the technology in the embodiments of the present application can be realized by means of software and necessary general hardware platforms. Based on such understanding, the technical solutions in the embodiments of the present application can be embodied in the form of a software product, which is stored in a storage medium such as a U disk, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk, etc. Various storage media that can store program codes, including a plurality of instructions for causing a computer terminal (which can be a personal computer, a server, or a second terminal, a network terminal, etc.) to execute all or part of the steps of the method of the embodiments of the present application.

[0095] The same or similar parts among various embodiments in the specification can be mutually referred to. Especially, for the terminal embodiments, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts can be referred to the description in the method embodiments.

[0096] In several embodiments provided in the present application, it should be understood that the disclosed system and method can be implemented in other ways. For example, the system embodiments described above are merely schematic, for example, the division of the modules is only a logical function division, and actual implementation can have another division manner, for example, a plurality of modules or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the coupling or direct coupling or communication connection between the displayed or discussed modules can be indirect coupling or communication connection through some interfaces, systems or modules, and can be electrical, mechanical or other forms.

[0097] The modules described as separate components can or can not be physically separated, and the components displayed as modules can or can not be physical modules, that is, can be located in one place, or can be distributed to a plurality of network modules. Part or all of the modules can be selected according to actual needs to achieve the purpose of the embodiment scheme.

[0098] In addition, the functional modules in each embodiment of the present application can be integrated into a processing module, or each module can exist physically, or two or more modules can be integrated into one module.

[0099] Each embodiment in the specification is described in a progressive manner, and the same or similar parts among various embodiments can be mutually referred to. Each embodiment mainly describes the differences from other embodiments. Especially, for the system embodiments, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts can be referred to the part of the description in the method embodiments.

[0100] The above only describes the embodiments of the present application and does not limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application shall be included in the scope of claims of the present application.

Claims

1. A steady flow air bag pump, characterized in that: include: A pump head, comprising a liquid inlet channel and a liquid outlet channel; A cylinder, the cylinder comprising a pump housing and a sealing plate provided on both sides of a pump head, the pump housing being cylindrical, one end of the pump housing being connected to the pump head, and the other end being threadedly connected to the sealing plate, the sealing plate being provided with a first through hole, the first through holes on the sealing plates on both sides of the pump head corresponding one to one, for fixing the cylinder via a first connecting rod; A gas phase working chamber is formed between the pump housing, the sealing plate and the pump head; An air bag is provided in the gas phase working chamber, the first end of the air bag is connected to the pump head, the second end is closed, and the interior is hollow to form a liquid phase working chamber; At least three openings are provided on the pump head, and a second connecting rod is fixed in each of the openings. A first flange is provided on the outer periphery of the first end of the air bag, and a second through hole corresponding to the openings is provided on the first flange. The second connecting rod passes through the second through hole to fixedly connect the air bag and the pump head.

2. The steady flow air bag pump according to claim 1, characterized in that: A first groove is provided on the side of the sealing plate close to the pump casing, and a thread is provided on the inner wall of the first groove. An end of the pump casing close to the sealing plate is provided with a thread that matches the inner wall of the first groove; a gasket is provided in the first groove for sealing the connection between the pump casing and the sealing plate.

3. The steady flow air bag pump according to claim 2, characterized in that: The second end of the air bag is provided with a second flange, the second flange is provided with a third through hole, the second connecting rod also passes through the third through hole, and the third through hole can slide along the second connecting rod.

4. The steady flow air bag pump according to claim 3, characterized in that: A spring is provided at the second end of the air bag, which is fixedly connected to the air bag and extends toward the sealing plate; the other end of the spring is a free end or connected to the sealing plate.

5. The steady flow air bag pump according to claim 4, characterized in that: A sleeve is provided on the inner side of the sealing plate, the sleeve cooperates with the spring, and the length of the sleeve does not exceed the compressed length of the spring; The sealing plate is provided with a second groove on the inner periphery of the sleeve.

6. The steady flow air bag pump according to claim 1, characterized in that: The wall thickness of the air bag gradually increases from the first end to the second end, and the ratio of the maximum thickness to the minimum thickness of the air bag is 1.4-1.

8.

7. A semiconductor wet process liquid delivery system, characterized in that: The steady flow air bladder pump according to any one of claims 1 to 6 further comprises: an air compressor, pneumatically connected to the bellows pump, for providing power to the bellows pump; The bubble filter device is connected to the air bag pump through a pipeline; a flow meter fixed on a pipeline upstream of the bubble filtering device; A controller is connected to the flow meter and the air compressor signal.

8. The semiconductor wet process liquid delivery system according to claim 7, wherein: A filter stop valve is provided between the bubble filter device and the pipeline, and the filter stop valve is connected to the controller signal.

9. The semiconductor wet process liquid delivery system according to claim 8, wherein: The filter stop valve is a normally closed valve and opens after receiving an electrical signal from a controller.

10. The semiconductor wet process liquid delivery system according to claim 9, wherein: The system further comprises a liquid storage device, wherein the liquid storage device is connected to the bellows pump via a pipeline, and a delivery stop valve is provided between the liquid storage device and the bellows pump, and the delivery stop valve is set to be normally open.

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